Motorola MPX5700GS, MPX5700GSX, MPX5700D, MPX5700DP, MPX5700GP Datasheet

The MPX5700 series piezoresistive transducer is a state±of±the±art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin±film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure.

Features

• 2.5% Maximum Error over 0° to 85°C

MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated

and Calibrated

Order this document by MPX5700/D

MPX5700

SERIES

INTEGRATED

PRESSURE SENSOR

0 to 700 kPa (0 to 101.5 psi)

0.2 to 4.7 V OUTPUT

	• Ideally Suited for Microprocessor or Microcontroller±Based Systems		BASIC CHIP
	•	Available in Differential and Gauge Configurations
			CARRIER ELEMENT
	•	Patented Silicon Shear Stress Strain Gauge
			CASE 867±08, STYLE 1
	• Durable Epoxy Unibody Element

	VS
	3
	THIN FILM	GAIN STAGE #2
X±ducer	TEMPERATURE	AND	1
SENSING	COMPENSATION	GROUND		V	DIFFERENTIAL
ELEMENT	AND	REFERENCE		out
					PORT OPTION
	GAIN STAGE #1	SHIFT CIRCUITRY
					CASE 867C±05, STYLE 1

2	PINS 4, 5 AND 6 ARE NO CONNECTS

	GND						PIN NUMBER
	Figure 1. Fully Integrated Pressure Sensor Schematic					1	Vout	4		N/C
						2	Gnd	5		N/C
						3	VS	6		N/C
	MAXIMUM RATINGS(1)					NOTE: Pins 4, 5, and 6 are internal
						device connections. Do not connect
	Parametrics	Symbol	Value	Unit
						to external circuitry or ground. Pin 1
	Overpressure (P2 v 1 Atmosphere)	P1max	2800	kPa		is noted by the notch in the Lead.
	Burst Pressure (P2 v 1 Atmosphere)	P1burst	5000	kPa
	Storage Temperature	Tstg	± 40 to +125	°C
	Operating Temperature	TA	± 40 to +125	°C

1.TC = 25°C unless otherwise noted. Maximum Ratings apply to Case 867±08 only.

2.Extended exposure at the specified limits may cause permanent damage or degradation to the device.

3.This sensor is designed for applications where P1 is always greater than, or equal to P2.

Senseon and X±ducer are trademarks of Motorola, Inc.

REV 2

Motorola Sensor Device Data	1
Motorola, Inc. 1997

MPX5700 SERIES

OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2)

	Characteristic	Symbol	Min	Typ	Max	Unit
Pressure Range(1)		P	0	Ð	700	kPa
		OP
Supply Voltage(2)		VS	4.75	5.0	5.25	Vdc
Supply Current		Io	±	7.0	10	mAdc
Zero Pressure Offset(3)	(0 to 85°C)	V	0.088	0.2	0.313	Vdc
		off
Full Scale Output(4)	(0 to 85°C)	V	4.587	4.7	4.813	Vdc
		FSO
Full Scale Span(5)	(0 to 85°C)	V	Ð	4.5	Ð	Vdc
		FSS
Accuracy(6)	(0 to 85°C)	Ð	Ð	Ð	± 2.5	%V
						FSS
Sensitivity		V/P	Ð	6.4	Ð	mV/kPa
Response Time(7)		tR	Ð	1.0	Ð	ms
Output Source Current at Full Scale Output		IO+	Ð	0.1	Ð	mAdc
Warm±Up Time(8)		Ð	Ð	20	Ð	ms

Decoupling circuit shown in Figure 4 required to meet electrical specifications.

MECHANICAL CHARACTERISTICS

Characteristic	Symbol	Min	Typ	Max	Unit
Weight, Basic Element (Case 867)	Ð	Ð	4.0	Ð	Grams
Cavity Volume	Ð	Ð	Ð	0.01	IN3
Volumetric Displacement	Ð	Ð	Ð	0.001	IN3
NOTES:

1.1.0 kPa (kiloPascal) equals 0.145 psi.

2.Device is ratiometric within this specified excitation range.

3.Offset (Voff) is defined as the output voltage at the minimum rated pressure.

4.Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure.

5.Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure.

6.Accuracy (error budget) consists of the following:

•	Linearity:	Output deviation from a straight line relationship with pressure over the specified pressure range.
•	Temperature Hysteresis:	Output deviation at any temperature within the operating temperature range, after the temperature is
		cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
		applied.
•	Pressure Hysteresis:	Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
		minimum or maximum rated pressure, at 25°C.
•	TcSpan:	Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
•	TcOffset:	Output deviation with minimum rated pressure applied, over the temperature range of 0° to 85°C, relative
		to 25°C.

•Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25°C.

7.Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure.

8.Warm±up is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized.

9.P2 max is 500 kPa.

2	Motorola Sensor Device Data

MPX5700 SERIES

ON±CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING

Figure 3 illustrates both the Differential/Gauge and the Absolute Sensing Chip in the basic chip carrier (Case 867). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. (For use of the MPX5700D in a high pressure, cyclic application, consult the factory.)

The MPX5700 series pressure sensor operating characteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. Media, other than dry air, may have adverse effects on sensor performance and

long±term reliability. Contact the factory for information regarding media compatibility in your application.

Figure 4 shows a typical decoupling circuit for interfacing the sensor to the A/D input of a microprocessor. Proper decoupling of the power supply is recommended.

Figure 2 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0° to 85°C using the decoupling circuit below. (The output will saturate outside of the specified pressure range.)

	5.0	TRANSFER FUNCTION:
	4.5
		V	= V	*(0.0012858*P+0.04)		± ERROR
	4.0	out	S
		VS = 5.0 Vdc
(V)	3.5	TEMP = 0 to 85°C
	3.0
OUTPUT							TYPICAL
	2.5
	2.0
						MIN
	1.5	MAX
	1.0
	0.5
	0		100	200	300	400	500	600	700	800
	0
				DIFFERENTIAL PRESSURE (kPa)

Figure 2. Output versus Pressure Differential

	FLUORO SILICONE
	DIE COAT	STAINLESS STEEL
	DIE	METAL COVER	MPX5700
	P1				A/D
			OUTPUT
WIRE BOND			(PIN 1)
			50 pF	51 k	μ PROCESSOR
LEAD		RTV DIE
FRAME	P2	BOND
	EPOXY CASE

Figure 3. Cross±Sectional Diagram	Figure 4. Typical Decoupling Filter for Sensor to
(Not to Scale)	Microprocessor Interface

Motorola Sensor Device Data

3