Motorola MPX2200GS, MPX2200GSX, MPX2200GVP, MPX2200GVS, MPX2200D Datasheet

MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

Order this document by MPX2200/D

200 kPa

On-Chip Temperature Compensated & Calibrated Pressure Sensors

The MPX2200 and MPX2201 series device is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output Ð directly proportional to the applied pressure. The sensor is a single monolithic silicon diaphragm with the strain gauge and a thin±film resistor network integrated on±chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. They are designed for use in applications such as pump/motor controllers, robotics, level indicators, medical diagnostics, pressure switching, barometers, altimeters, etc.

Features

•Temperature Compensated Over 0°C to +85°C

•Patented Silicon Shear Stress Strain Gauge

•±0.25% Linearity (MPX2200D)

•Easy to Use Chip Carrier Package

•Available in Absolute, Differential and Gauge Configurations

Application Examples

•Pump/Motor Controllers

•Robotics

•Level Indicators

•Medical Diagnostics

•Pressure Switching

•Barometers

•Altimeters

Figure 1 illustrates a block diagram of the internal circuitry on the stand±alone pressure sensor chip.

		VS
		3
		THIN FILM	2
	X±ducer	TEMPERATURE		Vout+
		COMPENSATION
	SENSING
		AND
	ELEMENT		4	Vout±
		CALIBRATION
		CIRCUITRY
		1
		GND

MPX2200

MPX2201

SERIES

Motorola Preferred Device

0 to 200 kPa (0 to 29 psi)

40 mV FULL SCALE SPAN (TYPICAL)

BASIC CHIP

CARRIER ELEMENT

CASE 344±15, STYLE 1

DIFFERENTIAL

PORT OPTION

CASE 344C±01, STYLE 1

NOTE: Pin 1 is the notched pin.

PIN NUMBER

1	Gnd	3	VS
2	+Vout	4	±Vout

Figure 1. Temperature Compensated Pressure Sensor Schematic

VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE

The differential voltage output of the X±ducer is directly proportional to the differential pressure applied.

The absolute sensor has a built±in reference vacuum. The output voltage will decrease as vacuum, relative to ambient, is drawn on the pressure (P1) side.

The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly, output voltage increases as increasing vacuum is applied to the vacuum (P2) side relative to the pressure (P1) side.

Preferred devices are Motorola recommended choices for future use and best overall value.

Senseon and X±ducer are trademarks of Motorola, Inc.

REV 7

Motorola Sensor Device Data	1
Motorola, Inc. 1997

MPX2200 MPX2201 SERIES

MAXIMUM RATINGS

Rating			Symbol				Value			Unit
Overpressure(8) (P1 > P2)			Pmax			400				kPa
Burst Pressure(8) (P1 > P2)			Pburst			2000				kPa
Storage Temperature			Tstg			± 40 to +125				°C
Operating Temperature			TA			± 40 to +125				°C
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristics			Symbol	Min			Typ		Max		Unit
Pressure Range(1)			P	0			Ð		200		kPa
			OP
Supply Voltage			VS	Ð			10		16		Vdc
Supply Current			Io	Ð			6.0		Ð		mAdc
Full Scale Span(3)	MPX2200A, MPX2200D, MPX2201D		V	38.5			40		41.5		mV
	MPX2201A		FSS	37.5			40		42.5
Offset(4)	MPX2200A, MPX2200D		Voff	±1.0			Ð		1.0		mV
	MPX2200A			± 2.0			Ð		2.0
	MPX2201A			± 3.0			Ð		3.0
Sensitivity			V/ P	Ð			0.2		Ð		mV/kPa
Linearity(5)	MPX2200D		Ð	± 0.25			Ð		0.25		%VFSS
	MPX2200A			± 1.0			Ð		1.0
	MPX2201D			± 0.5			Ð		0.5
	MPX2201A			± 2.0			Ð		2.0
Pressure Hysteresis(5) (0 to 200 kPa)			Ð	Ð			± 0.1		Ð		%V
											FSS
Temperature Hysteresis(5) (± 40°C to +125°C)			Ð	Ð			± 0.5		Ð		%V
											FSS
Temperature Effect on Full Scale Span(5)			TCV	±1.0			Ð		1.0		%V
			FSS								FSS
Temperature Effect on Offset(5)			TCVoff	±1.0			Ð		1.0		mV
Input Impedance			Zin	1300			Ð		2500		Ω
Output Impedance			Zout	1400			Ð		3000		Ω
Response Time(6) (10% to 90%)			tR	Ð			1.0		Ð		ms
Warm±Up			Ð	Ð			20		Ð		ms
Offset Stability(9)			Ð	Ð			± 0.5		Ð		%V
											FSS
MECHANICAL CHARACTERISTICS
Characteristics			Symbol	Min			Typ		Max		Unit
Weight, (Basic Element Case 344±15)			Ð	Ð			2.0		Ð		Grams
Common Mode Line Pressure(7)			Ð	Ð			Ð		690		kPa
NOTES:

1.1.0 kPa (kiloPascal) equals 0.145 psi.

2.Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self±heating.

3.Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure.

4.Offset (Voff) is defined as the output voltage at the minimum rated pressure.

5.Accuracy (error budget) consists of the following:

•	Linearity:	Output deviation from a straight line relationship with pressure, using end point method, over the specified
		pressure range.
•	Temperature Hysteresis:	Output deviation at any temperature within the operating temperature range, after the temperature is
		cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
		applied.
•	Pressure Hysteresis:	Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
		minimum or maximum rated pressure, at 25°C.
•	TcSpan:	Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
•	TcOffset:	Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
		to 25°C.

6.Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure.

7.Common mode pressures beyond specified may result in leakage at the case±to±lead interface.

8.Exposure beyond these limits may cause permanent damage or degradation to the device.

9.Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

2	Motorola Sensor Device Data

LINEARITY

Linearity refers to how well a transducer's output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 2) or (2) a least squares best line fit. While a least squares fit gives the ªbest caseº linearity error (lower numerical value), the calculations required are burdensome.

Conversely, an end point fit will give the ªworst caseº error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Motorola's specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure.

		MPX2200	MPX2201		SERIES
		LEAST SQUARES FIT
	OUTPUT	EXAGGERATED
		PERFORMANCE
		CURVE	LEAST	STRAIGHT LINE
				DEVIATION
	VOLTAGE
		SQUARE
		DEVIATION
	RELATIVE	END POINT
		STRAIGHT LINE FIT
		OFFSET
	0	50		100

PRESSURE (% FULLSCALE)

Figure 2. Linearity Specification Comparison

ON±CHIP TEMPERATURE COMPENSATION and CALIBRATION

Figure 3 shows the output characteristics of the MPX2200 series at 25°C. The output is directly proportional to the differential pressure and is essentially a straight line.

The effects of temperature on Full Scale Span and Offset are very small and are shown under Operating Characteristics.

40

35

	(mVdc)	30
	OUTPUT	25
		20
		15

10

5

0

± 5 kPa 0

PSI

VS = 10 Vdc

TA = 25°C

P1 > P2

TYP

SPAN MAX RANGE (TYP)

				MIN
25	50	75	100	125	150	175	200				OFFSET
	7.25		14.5		21.75		29

PRESSURE

Figure 3. Output versus Pressure Differential

SILICONE GEL	DIFFERENTIAL/GAUGE	STAINLESS STEEL	SILICONE GEL	ABSOLUTE	STAINLESS STEEL
DIE COAT	DIE	METAL COVER	DIE COAT	DIE	METAL COVER
	P1
		EPOXY		P1	EPOXY
WIRE BOND			WIRE BOND
		CASE			CASE
LEAD FRAME		DIE	LEAD FRAME		DIE
DIFFERENTIAL/GAUGE ELEMENT		BOND
				ABSOLUTE ELEMENT	BOND
	P2			P2

Figure 4. Cross±Sectional Diagrams (Not to Scale)

Figure 4 illustrates an absolute sensing die (right) and the differential or gauge die in the basic chip carrier (Case 344±15). A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm.

The MPX2200 series pressure sensor operating charac-

teristics and internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long term reliability. Contact the factory for information regarding media compatibility in your application.

Motorola Sensor Device Data

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