Motorola MPX5050GVSX, MPX5050GVP, MPX5050GS, MPX5050D, MPX5050GP Datasheet

MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

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		MPX5050
	Integrated Silicon Pressure Sensor	SERIES
	On-Chip Signal Conditioned,
	Temperature Compensated	OPERATING OVERVIEW
	and Calibrated
		INTEGRATED
		PRESSURE SENSOR
	The MPX5050 series piezoresistive transducer is a state±of±the±art monolithic silicon	0 to 50 kPa (0 to 7.25 psi)
	pressure sensor designed for a wide range of applications, but particularly those	0.2 to 4.7 Volts Output
	employing a microcontroller or microprocessor with A/D inputs. This patented, single
	element transducer combines advanced micromachining techniques, thin±film metalliza-
	tion, and bipolar processing to provide an accurate, high level analog output signal that
	is proportional to the applied pressure.
	Features
	• 2.5% Maximum Error over 0° to 85°C
	• Ideally suited for Microprocessor or Microcontroller±Based Systems
	• Temperature Compensated Over ± 40° to +125°C	BASIC CHIP CARRIER
	• Patented Silicon Shear Stress Strain Gauge	ELEMENT
		CASE 867±08, STYLE 1
	• Durable Epoxy Unibody Element
	• Easy±to±Use Chip Carrier Option

	VS
	3
	THIN FILM	GAIN STAGE #2
X±ducer	TEMPERATURE	AND	1
SENSING	COMPENSATION	GROUND		V
				out
ELEMENT	AND	REFERENCE		DIFFERENTIAL PORT OPTION
	GAIN STAGE #1	SHIFT CIRCUITRY		CASE 867C±05, STYLE 1

	2	NOTE: Pin 1 is the notched pin.
		PINS 4, 5 AND 6 ARE NO CONNECTS

GND		PIN NUMBER
Figure 1. Fully Integrated Pressure Sensor Schematic	1	Vout	4		N/C
	2	Grd	5		N/C
	3	VS	6		N/C

MAXIMUM RATINGS(1)

Parametrics	Symbol	Value	Unit
Overpressure(2) (P1 > P2)	Pmax	200	kPa
Burst Pressure(2) (P1 > P2)	P	700	kPa
	burst
Storage Temperature	Tstg	± 40° to +125°	°C
Operating Temperature	TA	± 40° to +125°	°C

1.TC = 25°C unless otherwise noted.

2.Exposure beyond the specified limits may cause permanent damage or degradation to the device.

NOTE: Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground.

Senseon and X±ducer are trademarks of Motorola, Inc.

REV 3

Motorola Sensor Device Data	1
Motorola, Inc. 1997

MPX5050 SERIES

OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2)

Characteristic		Symbol	Min	Typ	Max	Unit
Pressure Range(1)		P	0	Ð	50	kPa
		OP
Supply Voltage(2)		VS	4.75	5.0	5.25	Vdc
Supply Current		Io	Ð	7.0	10.0	mAdc
Minimum Pressure Offset(3)	(0 to 85°C)	V	0.088	0.20	0.313	Vdc
@ VS = 5.0 Volts		off
Full Scale Output(4)	(0 to 85°C)	V	4.587	4.70	4.813	Vdc
@ VS = 5.0 Volts		FSO
Full Scale Span(5)	(0 to 85°C)	V	Ð	4.50	Ð	Vdc
@ VS = 5.0 Volts		FSS
Accuracy(6)		Ð	Ð	Ð	"2.5	%V
						FSS
Sensitivity		V/P	Ð	90	Ð	mV/kPa
Response Time(7)		tR	Ð	1.0	Ð	mS
Output Source Current at Full Scale Output		Io+	Ð	0.1	Ð	mAdc
Warm±Up Time(8)		Ð	Ð	20	Ð	mSec
Offset Stability(9)		Ð	Ð	"0.5	Ð	%VFSS

Decoupling circuit shown in Figure 4 required to meet electrical specifications.

MECHANICAL CHARACTERISTICS

Characteristic	Symbol	Min	Typ	Max	Unit
Weight, Basic Element (Case 867)	Ð	Ð	4.0	Ð	Grams
Common Mode Line Pressure(10)	Ð	Ð	Ð	690	kPa

NOTES:

1.1.0kPa (kiloPascal) equals 0.145 psi.

2.Device is ratiometric within this specified excitation range.

3.Offset (Voff) is defined as the output voltage at the minimum rated pressure.

4.Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure.

5.Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure.

6.Accuracy (error budget) consists of the following:

•	Linearity:	Output deviation from a straight line relationship with pressure over the specified pressure range.
•	Temperature Hysteresis:	Output deviation at any temperature within the operating temperature range, after the temperature is
		cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
		applied.
•	Pressure Hysteresis:	Output deviation at any pressure within the specified range, when this pressure is cycled to and from
		minimum or maximum rated pressure at 25°C.
•	TcSpan:	Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
•	TcOffset:	Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative
		to 25°C.

•Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS at 25°C.

7.Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure.

8.Warm±up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.

9.Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

10.Common mode pressures beyond what is specified may result in leakage at the case±to±lead interface.

2	Motorola Sensor Device Data

Figure 3 illustrates the Differential/Gauge Sensing Chip in the basic chip carrier (Case 867). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm.

The MPX5050 series pressure sensor operating characteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. Media, other than dry air, may have adverse effects on sensor performance and long±term reliability. Contact the factory for in-

MPX5050 SERIES

formation regarding media compatibility in your application. Figure 4 shows a typical decoupling circuit for interfacing

the integrated sensor to the A/D input of a microprocessor. Proper decoupling of the power supply is recommended.

Figure 2 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0° to 85°C using the decoupling circuit below. (The output will saturate outside of the specified pressure range.)

	5.0	TRANSFER FUNCTION:
	4.5
		V		= V	*(0.018*P+0.04)			± ERROR
		out			S
	4.0	VS = 5.0 Vdc
	3.5	TEMP = 0 to 85°C
(V)
	3.0
OUTPUT										TYPICAL
	2.5
	2.0
									MIN
	1.5		MAX
	1.0
	0.5
	0			5	10	15	20	25	30	35	40	45	50	55
	0

DIFFERENTIAL PRESSURE (kPa)

Figure 2. Output versus Pressure Differential

FLUORO SILICONE		STAINLESS STEEL	MPX5050		A/D
	DIE		OUPUT
GEL DIE COAT	P1	METAL COVER	(PIN 1)
		EPOXY
WIRE BOND			50 pF	51 k
		PLASTIC			μ PROCESSOR
		CASE
LEAD FRAME		DIE
DIFFERENTIAL/GAUGE ELEMENT		BOND
	P2
Figure 3. Cross±Sectional Diagram			Figure 4. Typical Decoupling Filter for Sensor to
	(Not to Scale)			Microprocessor Interface

Motorola Sensor Device Data

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