Silicon Piezoresistive
Absolute Pressure Sensor
Preliminary Data
Features
•Low pressure and temperature hysteresis
•Fast response
•High sensitivity and linearity
•Fatigue free monocrystaline silicon diaphragm giving high load cycle stability
•High long term stability
•Built in silicon temperature sensor
•Provided for further fabrication, protection cap
KPY 62-AK
KPY 69-AK
Similar to TO-39-2
Type and |
Symbol |
Pressure Range |
Unit |
Ordering Code |
|
Marking |
|
|
|
|
|
|
|
|
|
|
|
KPY 62 AK |
P0 … PN |
0 … 0.6 |
bar |
Q62705-K275 |
|
|
|
|
|
|
|
KPY 63 AK |
|
0 |
… 1.6 |
|
Q62705-K276 |
|
|
|
|
|
|
KPY 64 AK |
|
0 |
… 4 |
|
Q62705-K277 |
|
|
|
|
|
|
KPY 65 AK |
|
0 … 10 |
|
Q62705-K278 |
|
|
|
|
|
|
|
KPY 66 AK |
|
0 |
… 25 |
|
Q62705-K279 |
|
|
|
|
|
|
KPY 67 AK |
|
0 |
… 60 |
|
Q62705-K280 |
|
|
|
|
|
|
KPY 68 AK |
|
0 |
… 160 |
|
Q62705-K281 |
|
|
|
|
|
|
KPY 69 AK |
|
0 |
… 400 |
|
Q62705-K282 |
|
|
|
|
|
|
Pin Configuration
1 |
Temperature sensor |
|
(typ. R25 = 2 kΩ) |
|
|
2 |
Not connected |
|
|
3 |
+ VIN; Temperature sensor |
|
|
4 |
− VOUT |
5 |
Capillary tube |
|
|
6 |
Shielding, to be connected |
|
to + VIN |
|
|
7 |
− VIN |
|
|
8 |
+ VOUT |
Semiconductor Group
1 |
1998-05-08 |
KPY 62-AK
KPY 69-AK
Absolute Maximum Ratings
Parameter |
Symbol |
Limit Values |
Unit |
|
|
|
|
Pressure overload |
PMAX |
|
bar |
KPY 62 AK |
|
4 |
|
KPY 63 AK |
|
8 |
|
KPY 64 AK |
|
12 |
|
KPY 65 AK |
|
20 |
|
KPY 66 AK |
|
50 |
|
KPY 67 AK |
|
70 |
|
KPY 68 AK |
|
200 |
|
KPY 69 AK |
|
500 |
|
|
|
|
|
Operating temperature range |
TA |
− 40 … + 125 |
˚C |
|
|
|
|
Storage temperature range |
Tstg |
− 50 … + 125 |
˚C |
Supply voltage |
VIN |
12 |
V |
Electrical Characteristics
at TA = 25 ˚C and VIN = 5 V, unless otherwise specified.
Parameter |
Symbol |
|
Limit Values |
Unit |
||
|
|
|
|
|
|
|
|
|
min. |
|
typ. |
max. |
|
|
|
|
|
|
|
|
Bridge resistance |
RB |
4 |
|
− |
8 |
kΩ |
|
|
|
|
|
|
|
Sensitivity |
s |
|
|
|
|
mV/ |
KPY 62 AK |
|
23.3 |
|
43.0 |
73.3 |
Vbar |
KPY 63 AK |
|
11.3 |
|
20.0 |
30.0 |
|
KPY 64 AK |
|
6.5 |
|
11.0 |
15.5 |
|
KPY 65 AK |
|
3.6 |
|
5.2 |
8.0 |
|
KPY 66 AK |
|
1.1 |
|
2.1 |
3.0 |
|
KPY 67 AK |
|
0.63 |
|
1.0 |
1.4 |
|
KPY 68 AK |
|
0.38 |
|
0.53 |
0.66 |
|
KPY 69 AK |
|
0.16 |
|
0.22 |
0.27 |
|
|
|
|
|
|
|
|
Output voltage |
Vfin |
|
|
|
|
mV |
KPY 62 AK |
|
70 |
|
130 |
220 |
|
KPY 63 AK |
|
90 |
|
160 |
240 |
|
KPY 64 AK |
|
130 |
|
220 |
310 |
|
KPY 65 AK |
|
180 |
|
260 |
400 |
|
KPY 66 AK |
|
150 |
|
260 |
370 |
|
KPY 67 AK |
|
190 |
|
300 |
410 |
|
KPY 68 AK |
|
310 |
|
420 |
530 |
|
KPY 69 AK |
|
330 |
|
440 |
550 |
|
|
|
|
|
|
|
|
Semiconductor Group |
2 |
1998-05-08 |