Olympus MX61A User Manual

ASSEMBLY/SETUP

MANUAL

MX61A

MOTORIZED 300 mm COMPATIBLE SEMICONDUCTOR/FPD INSPECTION MICROSCOPE

This manual is for assembly and setup of the Olympus MX61A Semiconductor/FPD Inspection Microscopes. To ensure the safety, obtain optimum performance and familiarize yourself fully with the use of this microscope, we recommend that you study this manual thoroughly before operating the microscope. As this manual will be needed when you replace the lamp or fuses or modify a setup, retain it in an easily accessible place near the work desk for future reference.

A X 7 6 7 7

MX61A

CONTENTS

IMPORTANT – Be sure to read this section for safe use of the equipment. – 1-8

1 NOMENCLATURE

2ASSEMBLY

9-11

12-25

2-1	Assembly Diagram ...............................................................................................................................	............................................ 12
2-2	Detailed Assembly Procedures ...........................................................................................................................	13-24
2-3	Modules Installed by Olympus......................................................................................................................................	25

3	SETUP OF MX-OPU61A OPERATION UNIT						26-36
	1			Initialization	2	USER Screen Setup
	3			CONFIG 1/6 Screen Setup	4	CONFIG 2/6 Screen Setup
	5			CONFIG 3/6 Screen Setup	6	CONFIG 4/6 Screen Setup
	7			CONFIG 5/6 Screen Setup	8	CONFIG 6/6 Screen Setup
4	CENTRATION OF REFLECTED LIGHT APERTURE IRIS DIAPHRAGM						37
5	CENTRATION OF MERCURY/XENON BURNER						38,39
6	EXTERNAL CONTROL OF REVOLVING NOSEPIECE						40
	1			Connector Used	2	Pin Layout and Signal Names
	3			Revolving Nosepiece Position Numbers (Index Nos. on the Center of Revolving Nosepiece)
7	MAINTENANCE PARTS LIST						41
			PROPER SELECTION OF THE POWER SUPPLY CORD				42,43

IMPORTANT

This microscope employs a UIS2 (UIS) (Universal Infinity System) optical design, and should be used only with eyepieces, objectives, observation tubes, etc. specified for use with the UIS2 (UIS) optics. Less-than-optimal performance may result if inappropriate accessories are used.

The MX61A microscope is compatible with stage strokes of 200 mm (8 inches) and 300 mm (12 inches). Its control can be motorized by using the MX-OPU61A Operation Unit (with built-in computer) and a PC in which the MX2-BSW Control Software is installed. The motorized control is also available using the MX-HS61A Hand Switch with the jog dial control capability (the MX-OPU61A or the MX2-BSW software should also be used in combination with the MX-HS61A Hand Switch).

SAFETY PRECAUTIONS

1.Always use the power cord provided by Olympus. If no power cord is provided, please select the power cord by referring to the section “PROPER SELECTION OF THE POWER SUPPLY CORD” at the end of this instruction manual. If the proper power cord is not used, Olympus can no longer warrant the electrical safety performance of the equipment. Lay out the power cord at a sufficient distance from the sources of heat such as the power supply unit/light source and lamp housing to avoid contact with these heat sources.

2.To avoid potential shock hazard, always set the main switch of the BX-UCB control box to “” (OFF) and disconnect the power cord before replacing the bulb/burner or connecting/disconnecting motorized parts. And since the system contains

motorized parts, do not plug in the power cord until all of the assembly procedures have completed.

}Always use the lamp bulb or burner supplied by Olympus.

	Bulb/Burner	Model	Average Life
	Halogen bulb	· 12V100WHAL-L (Long life type)	2000 hrs.
		(PHILIPS 7724)
		· 12V100WHAL (High-resolution type)	50 hrs.
		(PHILIPS 7023)
	Mercury burner	· USH-103OL	300 hrs.
		(USHIO)
		· HBO103W/2	300 hrs.
		(OSRAM)
	Xenon burner	· UXL-75XB-A	200 hrs.
		(USHIO)
	Halogen bulb for light guide	· JCR12V-100WB	1000 hrs.
	light source	(USHIO)

3.Do not light the mercury or xenon burner while it is not mounted on the microscope because the UV rays in their light are harmful to your eyes.

The used mercury burner should be disposed of as an industrial waste.

4.The eye point of this microscope can be adjusted in the range between 408 and 560 mm above the desktop surface (with basic combination). According to the SEMI standard guidelines (SEMI S8-0705), prepare a microscope desk with an optimum height for the application of the customer.

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MX61A

5.The desktop surface on which the microscope system is installed should be almost horizontal with a tilting angle of less than 20’ with a 300 mm (12-inch) stage or less than 1° with a 200 mm (8-inch) stage (to prevent spontaneous displacement of the stage) and rigid.

(Weight of the microscope system with the basic combination for reflected light observation: 14x12-inch stage combination

— approx. 52 kg, 8x8-inch stage combination — approx. 45 kg)

}Although this microscope is designed with excellent vibration resistance, its maximum performance can be achieved when an anti-vibration bench is used.)

6.The lamp housing surface at the rear of the microscope frame will become very hot during operation. When installing the microscope, ensure that there are ample free spaces (of more than 100 mm) around and in particular above and below the lamp housing. Also, the power cord and other cables should be laid out at distances from the microscope because contact with them may result in their fusion and an electric shock due to it.

7.To avoid a potential shock hazard, make sure that the power cord is safety grounded/earthed.

8.To allow each microscope manifest its full performance, reserve an installation space having the minimum dimensions

described below before assembly and installation of the microscope. (Sizes in

)

}The dimensions of the area enclosed in alternate long and two short dashes lines indicate the stage movement range. The dimensions marked * are variable depending on the lamp housing used.

}When maintenance is required, a larger workspace can be prepared by changing the observation tube orientation or moving the stage.

}The following installation space is set according to the SEMI standard guidelines (SEMI S8-0705). It is recommended that you set the optimum installation space for each customer based on the SEMI standard guidelines (SEMI S8-0705).

MX61A installation space: When the 14x12-inch stage is combined

Unit: mm

MX61A

Stage movement range

Installation footprint

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MX61A installation space: When the 8x8-inch stage is combined

Unit: mm

MX61

Stage movement range

Installation space

MX61A external view, eye point and center of gravity: When the 14x12-inch stage is combined

Unit: mm

Eye point

Position of center of gravity

(Bottom view of microscope)

(Note) The center of gravity is an approximate position when the microscope is equipped with the basic combination for reflected light oservation. Note that the position is variable depending on the weight of specimen, position of the

stage and other modules used.

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MX61A

MX61A external view, eye point and center of gravity: When the 8x8-inch stage is combined

Unit: mm

Eye point

Position of center of gravity

(Bottom view of microscope)

(Note) The center of gravity is an approximate position when the microscope is equipped with the standard module combination for transmitted light observation. Note that the position is variable depending on the weight of specimen, position of the stage and other modules used.

9.To prevent toppling of the microscope system, keep the total height of the microscope below 1 meter (3.3 ft) when attachments (including Olympus optional modules and the CCD camera prepared by the customer) are mounted.

10.Each microscope has screw holes (M5, depth 10 mm) for prevention of

@	²	toppling (in the case of an earthquake or microscope imbalance) on the
		side panels @ (x 2 holes) and the rear panel ² (x 2 holes). Clamp the
		microscope using L-shaped clamps and these screw holes as required.
		When clamping the microscope using L-shaped clamps prepared
		by the customer, be sure to use steel bolts (strength category 12.9)
		with as long as possible threaded sections (8 mm or more is rec-
		ommended).
	Fig. 1

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Safety Symbols

The following symbols are found on the microscope. Study the meaning of the symbols and always use the equipment in the safest possible manner.

Symbol	Explanation

Be careful not to have your finger caught by the stage or stage holder.

Be careful against high voltage (1 kV or more) applied inside the unit.

Indicates that the surface becomes hot, and should not be touched with bare hands.

Before use, carefully read the instruction manual. Improper handling could result in injury to the user and/or damage to the equipment.

lIndicates that the main switch is ON.

Indicates that the main switch is OFF.

Caution indications

Caution indications are affixed at parts where special precaution is required when handling and using the microscope. Always heed the cautions.

		Lamp housing	[High temperature caution]
		/power supply unit
		Light guide light source	[High temperature caution]
	Caution indication	(LG-PS2)
	positions	Front of base	[Caution against finger
		(MX61A)	catching]
		Power supply unit	[High voltage caution]

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MX61A

1Getting Ready

@²

Fig. 2

1.Do not use the microscope where it is subjected to direct sunlight, high temperature and humidity, dust or vibrations. (For the operating conditions, refer to the INSTRUCTIONS manual’s chapter 8, “SPECIFICATIONS” on page 43.)

2.A microscope is a precision instrument. Handle it with care and avoid subjecting it to sudden or severe impacts. Never attempt to rotate the motorized revolving nosepiece by hand; otherwise, the gear or other parts may be damaged.

3.When moving the microscope, detach the observation tube, stage, lamp

housing and specimen to reduce the total system weight, then insert the two provided carrying rods @ firmly into each of the left and right side panels, and attach the two provided guarding parts ² on the two carrying rods on the front.

If the guarding parts are not attached, the person holding the front carrying rods may have a finger caught between the carrying rod and the desktop.

Two persons are needed to carry the microscope; one should hold the

@

two front carrying rods and the other person should hold the rear carrying rods. Be sure to move the microscope cautiously. (The microscope frame weight is about 31 kg, or 68.2 lbs.)

}After movement, remove the guarding parts and carrying rods and retain them carefully without losing. The carrying rods can be inserted in the four threaded holes on the rear of the microscope. For the screw holes left by removing the carrying rods, attach the provided screw caps on the holes for the rear carrying rods and the cap seals on the holes for the front carrying rods.

#Do not change the position of the microscope by sliding it on the desktop surface; otherwise, the rubber feet will be damaged.

4.Be sure to attach the transport clamping plate(s) to the stage before transporting it.

With the 14x12-inch stage combination, the center of gravity varies greatly depending on the position of the stage. To ensure extra stability, keep the two provided carrying rods attached to the mounting holes on the front right side when using the microscope.

2Maintenance and Storage

1.To clean the lenses and other glass components, simply blow dirty away using a commercially available blower and wipe gently using a piece of cleaning paper (or clean gauze).

If a lens is stained with fingerprints or oil smudges, wipe it gauze slightly moistened with commercially available absolute alcohol.

Since the absolute alcohol is highly flammable, it must be handled carefully.

Be sure to keep it away from open flames or potential sources of electrical sparks –– for example, electrical equipment that is being switched on or off.

Also remember to always use it only in a well-ventilated room.

2.If any part of the equipment (other than glass components) gets dirty, with it with a clean cloth.

If the part is extremely dirty, do not attempt to use organic solvents to clean it; instead, use a soft, lint-free cloth slightly moistened with a diluted neutral detergent.

3.Never disassemble any part other than instructed of the microscope. This could result in malfunctions or reduced performance.

4.When not using the microscope, keep it covered with a dust cover. Make sure the lamp housing is cool before covering the microscope.

5.When disposing of the microscope. Check the regulations and rules of your local government and be sure to observe them.

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3Applicable Standards

1.This device is in compliance with or certified by the following standards.

2.Although this device is designed for use in industrial environments, its full performances may not be manifested if it is not operated properly. Be sure to handle it properly as instructed in this manual.

This device is designed for use in industrial environments (Class A device).

Using it in a residential environment may affect other equipment in the environment.

CE marking

This device complies with the requirements of both directive 89/336/EEC, 2004/108/EC concerning electromagnetic compatibility and directive 2006/95/EC concerning low voltage. The CE marking indicates compliance with the above directives.

FCC

This device has been subjected to the compliance evaluation of the following FCC regulation:

· FCC Part 15, Subpart B ClassA: Radio Frequency Equipment (Commercial and industrial areas)

NOTE: This equipment has been tested and found to comply with the limits for a Class A digital device, pursuant to Part 15 of the FCC Rules. These limits are designed to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment. This equipment generates, uses, and can radiate radio frequency energy and, if not installed and used in accordance with the instruction manual, may cause harmful interference to radio communications. Operation of this equipment in a residential area is likely to cause harmful interference in which case the user will be required to correct the interference at his own expense.

FCC WARNING: Changes or modifications not expressly approved by the party responsible for compliance could void the user’s authority to operate the equipment.

CALIFORNIA USA ONLY

This operation unit uses a Lithium Battery which contains Perchlorate Material - special handling may apply, See www.dtsc.ca.gov/hazardouswaste/perchlorate.

SEMI

This device has been subjected to the compliance evaluations of the following guidelines under the S8 Standard.

·S2-0706: Safety Guidelines for Semiconductor Manufacturing Equipment

·S8-0705: Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment

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MX61A

If the microscope is used in a manner not specified by this manual, the safety of the user may be imperiled. In addition, the equipment may also be damaged. Always use the equipment as outlined in this instruction manual.

The following symbols are used to set off text in this instruction manual.

: Indicates that failure to follow the instructions in the warning could result in bodily harm to the user and/or damage to equipment (including objects in the vicinity of the equipment).

<Reference>

#: Indicates that failure to follow the instructions could result in damage to equipment. }: Indicates commentary (for ease of operation and maintenance).

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NOMENCLATURE

}The modules shown below are examples of those used in a typical system. Certain modules are usable even when they are not mentioned below. For these modules, refer to the latest catalogues or contact Olympus.

For the modules marked *, refer to their instruction manuals.

Motorized Revolving Nosepiece

U-D6BDREMC

U-D5BDREMC

U-D6REMC

U-P5BDREMC

Eyepieces

SWH series (FN 26.5)

Objectives

UIS2 (UIS) series

DIC Slider

U-DICRM* U-DICR

(Not motorized) U-DICRH

(Not motorized) U-DICRHC (Not motorized)

Observation Tube

MX-SWETTR (FN 26.5)

U-SWETTR-5 (FN 26.5)

Lamp Housing

U-LH100-3/LH100IR (Halogen bulb) U-LH100HG/LH100HGAPO (Mercury burner)

U-LH75XEAPO* (Xenon burner) (Note) The MX-HGAD adapter is

required for the mercury burner and xenon burner.

Intermediate Attachment (Only one of the following can be attached.)

U-UVF248IM*

U-AFA2M* (+ MX-ANM)

U-CFU*

Breath Shield

MX-BSH

MX-BSH-ESD-2

Operation Unit
MX-OPU61A
or
PC + MX2-BSW	Hand Switch
	MX-HS61A
		**
	Microscope Frame	Transmitted Light	Light Source
	MX61A-F	Module	LG-PS2*
	Stage	Flexible Light Guide		Control Box
	MX-SIC1412R2	LG-SF		BX-UCB

(For transmitted light/reflected light observation)

MX-SIC8R

(For transmitted light/reflected light observation)

** Regarding the transmitted light module, please ask your Olympus dealer.

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MX61A

8x8-Inch Stage and Holder System

Rotary Wafer Holder Plate

MX-WHPR86 (For 6-8 inch wafers)

5-Inch Mask Holder

BH3-MH5

4-Inch Mask Holder

BH3-MH4

Black Plate

BH3-SP6

Glass Plate

BH3-SPG6

8x8-Inch Stage

MX-SIC8R

10

14x12-Inch Stage and Holder System

	6-Inch Mask Holder		Glass Plate		Rotary Wafer Holder for 8-inch
					and 12-inch wafers
	MX-MH6		MX-SPG1412
					MX-WHPR128

14x12-Inch Stage

MX-SIC1412R2

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MX61A

ASSEMBLY

	2-1 Assembly Diagram
	}The diagram below shows where the various modules should be	Tools Used
	mounted. Study the assembly instructions for only the modules to be	(Provided with the microscope frame)
	employed.	Allen screwdriver (3 mm)
	For the connection of cables and power cord, see page 21.
	#When assembling the equipment, make sure that all parts are free	Allen wrench (3 mm)
	of dust and dirt and avoid scratching any parts or touching glass
	surfaces.
	Video/digital camera	Tool holder
	Photomicrography system

	Eyepieces		Lamp Housing
	SWH series	Observation Tube
			for Halogen Bulb
		MX-SWETTR
			U-LH100-3
		U-SWETTR-5
			LH100IR
		Intermediate Attachment	Halogen bulb
		(Only one of the following	12V100WHAL-L
	Motorized Revolving	can be attached.)	12V10WHAL
		U-UVF248IM
	Nosepiece		High-Intensity
		U-AFA2M
	U-D6BDREMC
			Lamp Housing
		(+ MX-ANM)
	U-D5BDREMC
			U-LH75XEAPO
		U-CFU
	U-D6REMC
			U-LH100HG
DIC Slider
	U-P5BDREMC
			LH100HGAPO
U-DICRM
U-DICR			Adapter
U-DICRH			MX-HGAD
U-DICRHC

Breath Shield

MX-BSH

MX-BSH-ESD-2

Brightfield

Objective

Adapter

BD-M-AD

	Brightfield/	Brightfield
	darkfield
		objective
	objective
		Holders
	(See pages 10 & 11.)

Stage

MX-SIC1412R2

MX-SIC8R

Microscope Frame

MX61A-F

Filters

U-25D6-2

U-25ND25-2

U-25LBD

U-25IF550, etc.

Analyzer

U-AN360-3

Polarizer

U-PO3

Hand Switch

MX-HS61A

Control Board U-ZPCB or U-AFA2M-CB + U-DICPCB

Control Box

BX-UCB

Operation Unit

MX-OPU61A

Control Software

PC + MX2-BSW

}The tools used can be stored in the holes on the tool holder provided with the microscope frame. Use the double-sided adhesive tape of the tool holder to attach it to a position that does not hinder operation.

Do not attach the tool holder anywhere near the bottom of the lamp housing since it generates high-temperature heat.

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