HEIDENHAIN Length Gauges User Manual

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Length Gauges

April 2015

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Length gauges from HEIDEN HAIN offer

high accuracy over long measuring ranges. These sturdily made gauges are available in application-oriented versions.

They have a wide range of applications in production metrology, in multipoint inspection stations, measuring equipment monitoring, and as position measuring devices.

This catalog supersedes all previous editions, which thereby become invalid. The basis for ordering from HEIDENHAIN is always the catalog edition valid when the contract is made.

Standards (ISO, EN, etc.) apply only where explicitly stated in the catalog.

The Interfaces of HEIDENHAIN Encoders brochure, ID 1078628-xx,

includes comprehensive descriptions of all available interfaces as well as general electrical information.

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Contents

Length gauges – applications and products

Technical features and mounting information

Speciﬁcations

Range of applications, application examples

Length gauges from HEIDENHAIN

Length gauge overview

Measuring principles

Measuring accuracy

Mounting

Setup

Gauging force and plunger actuation

HEIDENHAIN-ACANTO absolute length gauges

Accuracy Measuring range

± 2 µm 12 mm

30 mm

Accessories

Electrical connection

HEIDENHAIN-CERTO incremental length gauges

HEIDENHAIN-METRO incremental length gauges

HEIDENHAIN-SPECTO incremental length gauges

Measuring contacts, switch boxes, coupling

Gauge stands, ceramic suction plate, diaphragm compressor

Cable-type lifter, gauge stands

Interface electronics

Evaluation electronics units

± 0.1 µm; ± 0.03 µm* ± 0.1 µm; ± 0.05 µm*

± 0.2 µm 12 mm

± 0.5 µm ± 1 µm

± 1 µm 12 mm

For HEIDENHAIN-CERTO

For HEIDENHAIN-ACANTO, HEIDENHAIN-METRO and HEIDENHAIN-SPECTO

25 mm 60 mm

25 mm

60 mm 100 mm

30 mm

Interfaces

Cables and connecting elements

Service

Calibration according to DAkkS

* After linear length-error compensation in the evaluation electronics

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Areas of application

In quality assurance

Metrology and production control

Length gauges from HEIDENHAIN play a role in incoming goods inspection, fast dimension checking during production, statistical process control in production or quality assurance, or in any application where fast, reliable and accurate length measurement is required. Their large measuring lengths are a particular advantage: whether the part measures 5 mm or 95 mm, it is measured immediately with one and the same length gauge.

Whatever the application, HEIDENHAIN has the appropriate length gauge for the required accuracy. The HEIDENHAIN- CERTO length gauges offer a very high accuracy of ± 0.1 µm/± 0.05 µm*/ ± 0.03 µm* for extremely precise measurement. Length gauges from the HEIDENHAIN-METRO program have accuracy grades as ﬁne as ± 0.2 µm, while the HEIDENHAIN-SPECTO length gauges, with ± 1 µm accuracy, offer particularly compact dimensions.

Gauge block calibration and measuring device inspection

The regular inspection of measuring equipment called for by standards, and the inspection of gauge blocks in particular, necessitate a large number of reference standard blocks if the comparative measurement is performed using inductive gauges. The problem is the small measuring range of inductive gauges: they can measure length differences of only up to 10 µm. Length gauges, which offer large measuring ranges together with high accuracy, greatly simplify the calibration of measuring devices required to ensure traceability.

The length gauges of the HEIDENHAIN- CERTO program with measuring ranges of 25 mm with ± 0.1 µm/± 0.03 µm* accuracy and 60 mm with ± 0.1 µm/± 0.05 µm* accuracy are especially well suited for this task. It permits a signiﬁcant reduction in the required number of reference standard blocks, and recalibrating becomes much simpler.

* After linear length-error compensation in

the evaluation electronics

Thickness gauging of silicon wafers

Inspection of styli

Calibration of gauge blocks

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In production

Multipoint inspection apparatuses

Multipoint inspection apparatuses require durable length gauges with small dimensions. They should also have relatively large measuring ranges of several millimeters with consistent linear accuracy in order to simplify the construction of inspection devices—for example by enabling the construction of one device for several masters. A large measuring length also provides beneﬁts in master production, because simpler masters can be used.

Thanks to their small dimensions, the HEIDENHAIN-ACANTO absolute length gauges, like the HEIDENHAIN-SPECTO incremental length gauges, are specially designed for multi-point measuring stations. They feature accuracy grades up to ± 1 µm over measuring ranges up to 30 mm. Higher accuracy requirements up to ± 0.2 µm can be met with similarly compact HEIDENHAIN-METRO length gauges.

Unlike inductive gauges, HEIDENHAINSPECTO length gauges provide stable measurement over long periods— eliminating recalibration.

Position measurement

Length gauges from HEIDENHAIN are also ideal for position measurement on precision linear slides and X-Y tables. Working with measuring microscopes, for example, becomes much easier thanks to the digital readout and the ﬂexible datum setting.

Here, length gauges from the HEIDENHAIN-METRO and HEIDENHAIN-SPECTO program come into use with large measuring ranges of 30 mm, 60 mm or 100 mm at consistently high accuracy grades of ± 0.5 µm or ± 1 µm.

In this application as linear measuring device, the length gauge’s fast installation in accordance with the Abbe measuring principle by its clamping shank or planar mounting surface is of special beneﬁt.

Testing station for ﬂatness inspection

Position measurement on an X-Y table for lens mounting

Tolerance gauging of semiﬁnished products

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Length gauges from HEIDENHAIN

A number of arguments speak for HEIDENHAIN length gauges. These include not only their technical features, but also their high quality standard and the worldwide presence of HEIDENHAIN.

Large measuring ranges

HEIDENHAIN length gauges are available with measuring lengths of 12 mm, 25 mm, 30 mm, 60 mm or 100 mm. so that you can measure very different parts in one measuring setup and avoid frequently changing setups with expensive gauge blocks or masters.

High accuracy

The high accuracy speciﬁ ed for HEIDENHAIN length gauges applies over the entire measuring length. Whether the part measures 10 mm or 100 mm, its actual dimension is always measured with the same high quality. The high repeatability of HEIDENHAIN length gauges comes into play during comparative measurements, for example in series production.

In particular HEIDENHAIN-CERTO length gauges provide high linear accuracy and offer resolution in the nanometer range.

Robust design

HEIDENHAIN length gauges are built for an industrial environment. They feature consistently high accuracy over a long period of time as well as high thermal stability. They can therefore be used in production equipment and machines.

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Wide range of applications

HEIDENHAIN length gauges are suited for many applications. Automatic inspection equipment, manual measuring stations or positioning equipment—wherever lengths, spacing, thickness, height or linear motion are to be measured, HEIDENHAIN length gauges function quickly, reliably and accurately.

Absolute position measurement

HEIDENHAIN-ACANTO length gauges operate with absolute measurement over a range of 12 mm or 30 mm and with high repeatability. Its particular advantage is that the measured value is available immediately after switch-on.

Worldwide presence

HEIDENHAIN is represented in all important industrial countries—in most of them with wholly owned subsidiaries. Sales engineers and service technicians support the user on-site with technical information and servicing in the local language.

Know-how

The high quality of HEIDENHAIN length gauges is no coincidence. HEIDENHAIN has been manufacturing high-accuracy scales for over 70 years, and for many years it has developed measuring and testing devices for length and angle measurement for national standards laboratories. This know-how makes HEIDENHAIN an extraordinarily qualiﬁ ed partner for metrology questions.

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Length gauge overview

Accuracy Measuring range

Plunger actuation

Absolute position measurement

± 2 µm HEIDENHAIN-ACANTO

By measured object

Pneumatic

Incremental linear measurement

± 0.1 µm ± 0.05 µm ± 0.03 µm

± 0.2 µm HEIDENHAIN-METRO

± 0.5 µm ± 1 µm

± 1 µm HEIDENHAIN-SPECTO

After linear length-error compensation in the evaluation electronics

*) *)

HEIDENHAIN-CERTO

By motor

By external coupling

By cable lifter

or measured object

Pneumatic

HEIDENHAIN-METRO

By motor

By external coupling

By measured object

Pneumatic

CT 6000 CT 2500MT 101 MT 60

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AT 3000

AT 1200

12 mm 25 mm/

30 mm

60 mm 100 mm Page

AT 1218 EnDat

AT 1217 EnDat

AT 3018 EnDat

AT 3017 EnDat

CT 2501 » 11 µA

CT 2502 » 11 µA

CT 6001 » 11 µA

CT 6002 » 11 µA

MT 1271 « TTL MT 1281 » 1 V

MT 1287 » 1 V

MT 2571 « TTL MT 2581 » 1 V

MT 2587 » 1 V

MT 60 M » 11 µA

MT 60 K » 11 µA

MT 101 M » 11 µA

MT 101 K » 11 µA

ST 1278 « TTL ST 1288 » 1 V

ST 1277 « TTL ST 1287 » 1 V

ST 3078 « TTL ST 3088 » 1 V

ST 3077 « TTL ST 3087 » 1 V

ST 3000 ST 1200MT 2500 MT 1200

AT 3000

AT 1200

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Measuring principles

Measuring standard

HEIDENHAIN length gauges are characterized by long measuring ranges and consistently high accuracy. The basis for both is the photoelectrical scanning principle.

HEIDENHAIN length gauges use material measuring standards consisting of absolute or incremental graduations on substrates of glass or glass ceramic. These measuring standards permit large measuring ranges, are insensitive to vibration and shock, and have a deﬁned thermal behavior. Changes in atmospheric pressure or relative humidity have no inﬂuence on the accuracy of the measuring standard— which is the prerequisite for the high long- term stability of HEIDENHAIN length gauges.

HEIDENHAIN manufactures the precision graduations in specially developed, photolithographic processes.

• AURODUR: matte-etched lines on goldplated steel tape with typical graduation period of 40 µm

• METALLUR: contamination-tolerant graduation of metal lines on gold, with typical graduation period of 20 µm

• DIADUR: extremely robust chromium lines on glass (typical graduation period of 20 µm) or three-dimensional chromium structures (typical graduation period of 8 µm) on glass

• SUPRADUR phase grating: optically three dimensional, planar structure; particularly tolerant to contamination; typical graduation period of 8 µm and ﬁner

• OPTODUR phase grating: optically three dimensional, planar structure with particularly high reﬂectance, typical graduation period of 2 µm and less

Measurement procedure

With the incremental measuring method, the graduation consists of a

periodic grating structure. The position information is obtained by counting the individual increments (measuring steps) from some point of origin. Since an absolute reference is required to ascertain positions, the measuring standard is provided with an additional track that bears a reference mark. The absolute position on the scale, established by the reference mark, is gated with exactly one signal period.

The reference mark must therefore be scanned to establish an absolute reference or to ﬁnd the last selected datum.

With the absolute measuring method, the position value is available from the encoder immediately upon switch-on and can be called at any time by the subsequent electronics. There is no need to move the axes to ﬁnd the reference position. The absolute position information is read from the graduated disk, which is formed from a serial absolute code structure. A separate incremental track is interpolated for the position value and at the same time—depending on the interface version—is used to generate an optional incremental signal.

DIADUR phase grating with approx. 0.25 µm grating height

Photoelectric scanning

Most HEIDENHAIN encoders operate using the principle of photoelectric scanning. Photoelectric scanning of a measuring standard is contact-free, and as such, free of wear. This method detects even very ﬁne lines, no more than a few microns wide, and generates output signals with very small signal periods.

The ﬁner the grating period of a measuring standard is, the greater the effect of diffraction on photoelectric scanning. HEIDENHAIN uses two scanning principles with linear encoders:

• The imaging scanning principle for grating periods of 20 µm and 40 µm

• The interferential scanning principle for very ﬁne graduations with grating periods of, for example, 8 µm

DIADUR graduation

Along with these very ﬁne grating periods, these processes permit a high deﬁnition and homogeneity of the line edges. Together with the photoelectric scanning method, this high edge deﬁnition is a precondition for the high quality of the output signals.

The master graduations are manufactured by HEIDENHAIN on custom-built highprecision dividing engines.

5 µm

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Imaging principle

To put it simply, the imaging scanning principle functions by means of projected-light signal generation: two scale gratings with equal or similar grating periods are moved relative to each other—the scale and the scanning reticle. The carrier material of the scanning reticle is transparent, whereas the graduation on the measuring standard may be applied to a transparent or reﬂective surface.

When parallel light passes through a grating, light and dark surfaces are projected at a certain distance. An index grating is located here. When the two gratings move relative to each other, the incident light is modulated. If the gaps in the gratings are aligned, light passes through. If the lines of one grating coincide with the gaps of the other, no light passes through. An array of photovoltaic cells converts these variations in light intensity into electrical signals. The specially structured grating of the scanning reticle ﬁlters the light to generate nearly sinusoidal output signals.

The smaller the period of the grating structure is, the closer and more tightly toleranced the gap must be between the scanning reticle and scale.

Interferential scanning principle

The interferential scanning principle exploits the diffraction and interference of light on a ﬁne graduation to produce signals used to measure displacement.

A step grating is used as the measuring standard: reﬂective lines 0.2 µm high are applied to a ﬂat, reﬂective surface. In front of that is the scanning reticle—a transparent phase grating with the same grating period as the scale.

When a light wave passes through the scanning reticle, it is diffracted into three partial waves of the orders –1, 0, and +1, with approximately equal luminous intensity. The waves are diffracted by the scale such that most of the luminous intensity is found in the reﬂected diffraction orders +1 and –1. These partial waves meet again at the phase grating of the scanning reticle where they are diffracted again and interfere. This produces essentially three waves that leave the scanning reticle at different angles. Photovoltaic cells convert this alternating light intensity into electrical signals.

A relative motion of the scanning reticle to the scale causes the diffracted wave fronts to undergo a phase shift: when the grating moves by one period, the wave front of the ﬁrst order is displaced by one wavelength in the positive direction, and the wavelength of diffraction order –1 is displaced by one wavelength in the negative direction. Since the two waves interfere with each other when exiting the grating, the waves are shifted relative to each other by two wavelengths. This results in two signal periods from the relative motion of just one grating period.

Interferential encoders function with grating periods of, for example, 8 µm, 4 µm and ﬁner. Their scanning signals are largely free of harmonics and can be highly interpolated. These encoders are therefore especially suited for high resolution and high accuracy.

The HEIDENHAIN-CERTO and the HEIDENHAIN-METRO length gauges of the MT 1200 and MT 2500 series operating according to the interferential principle.

The HEIDENHAIN-ACANTO, HEIDENHAINSPECTO and the HEIDENHAIN-METRO length gauges of the MT 60 and MT 100 series operating according to the imaging principle.

Imaging principle

LED light source

Measuring standard

Condenser lens

Scanning reticle

Photovoltaic cell array

Interferential scanning principle (optics schematics) C Grating period y Phase shift of the light wave when passing through the scanning reticle  Phase shift of the light wave due to motion X of the scale

Photocells

LED light source

Condenser lens

Scanning reticle

Measuring standard

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Measuring accuracy

The accuracy of linear measurement is mainly determined by

• the quality of the graduation,

• the quality of the scanning process,

• the quality of the signal processing electronics,

• the eccentricity of the graduation to the bearing,

• the error from the scale guideway relative to the scanning unit, and

• the orthogonality of the length gauge to the bearing surface.

These factors of inﬂuence are comprised of encoder-speciﬁc error and applicationdependent issues. All individual factors of inﬂuence must be considered in order to assess the attainable overall accuracy.

Error speciﬁc to the measuring device

The error that is speciﬁc to the measuring device is shown in the Speciﬁcations as the system accuracy.

The extreme values of the total error F with reference to their mean value lie over the entire measuring length within the system accuracy ± a. They are measured during the ﬁnal inspection and documented in the calibration chart.

The system accuracy includes

• the homogeneity and period deﬁnition of the graduation,

• the alignment of the graduation,

• the error of the bearing, and

• the position error within one signal period.

Position error within one signal period

Position errors within one signal period already become apparent in very small motions and in repeated measurements. They are therefore considered separately.

The position error within one signal period ± u results from the quality of the scanning and—for encoders with integrated pulseshaping or counter electronics—the quality of the signal-processing electronics. For encoders with sinusoidal output signals, however, the errors of the signal processing electronics are determined by the subsequent electronics.

The following individual factors inﬂuence the result:

• The size of the signal period

• The homogeneity and period deﬁnition of the graduation

• The quality of scanning ﬁlter structures

• The characteristics of the sensors

• The stability and dynamics of further processing of the analog signals

These deviations are to be considered when specifying position error within one signal period.

Position error within one signal period ± u is speciﬁed in percent of the signal period. For length gauges, the value is typically better than ± 1% of the signal period. You will ﬁnd the speciﬁed values in the Speciﬁcations.

Short-range accuracy

The short-range accuracy describes an error that occurs within a distance of ± 100 µm from a measuring point. It includes electronic and mechanical inﬂuences of the gauge on the result of measurement. The values for short-range accuracy typically lie below the speciﬁed values.



Position error

Position error a over the measuring length ML

Position error within one signal period

Position

Position error u within one signal period



Position error



Signal level

Signal period

360 °elec.

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Application-dependent error

Other factors besides the system accuracy also inﬂuence the attainable total accuracy of measurement. These include in particular the ambient temperature and temperature ﬂuctuations during measurement as well as a stable, orthogonal measuring setup.

All components included in the measuring loop, such as the holder for the measured object, the gauge stand with holder, and the length gauge itself, inﬂuence the result of measurement. Expansion or deformation of the measuring setup through mechanical or thermal inﬂuences adds directly to the error.

Mechanical design

A stable measuring assembly must be ensured. Long lateral elements within the measuring loop are to be avoided. HEIDENHAIN offers a stable gauge stand as an accessory. The force resulting from the measurement must not cause any measurable deformation of the measuring loop.

Length gauges from HEIDENHAIN operate with small gauging force and have very little inﬂuence on the measuring setup.

Orthogonal mounting

The length gauge is to be mounted so that its plunger is exactly orthogonal to the measured object or the surface on which it rests. Deviations result in measuring error.

The accessory HEIDENHAIN gauge stands with holders for an 8 mm clamping shank ensure orthogonal mounting. Length gauges that provide planar mounting surfaces are to be adjusted in the direction parallel to the mounting surface (Y) to be perpendicular to the measuring plate. A quick and reliable adjustment is possible with the aid of a gauge block or a parallel block. The perpendicularity to the measuring table (X) is already ensured by the gauge stand.

Thermal characteristics

Temperature variations during measurement cause changes in length or deformation of the measuring setup. After a change in temperature of 5 K, a steel bar of 200 mm length expands by 10 µm.

Length changes resulting from a uniform deviation from the reference temperature can largely be compensated by resetting the datum on the measuring plate or a master; only the expansion of the scale and measured object go into the result of measurement.

Temperature changes during measurement cannot be ascertained mathematically. For critical components, HEIDENHAIN therefore uses special materials with low coefﬁcients of expansion, such as are found in the HEIDENHAIN-CERTO gauge stand. This makes it possible to guarantee the high accuracy of HEIDENHAIN-CERTO even at ambient temperatures of 19 °C to 21 °C and variations of ± 0.1 K during measurement.

In order to measure with complete accuracy, the length gauge should be switched on approximately 15 minutes before the ﬁrst measurement.

The measuring loop: All components involved in the measuring assembly, including the length gauge

Orthogonal mounting

Thermally induced change in length:

Expansion of the measuring loop components as a result of heat

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Calibration chart

All HEIDENHAIN length gauges are inspected before shipping for accuracy and proper function.

They are calibrated for accuracy during retraction and extension of the plunger. For HEIDENHAIN-CERTO gauges, the number of measuring positions is selected to ascertain very exactly not only the longrange error, but also the position error within one signal period.

The Quality Inspection Certiﬁ cate conﬁ rms the speciﬁ ed system accuracy of each length gauge. The calibration standards ensure the traceability—as required by EN ISO 9001—to recognized national or international standards.

For the HEIDENHAIN-METRO and HEIDENHAIN-CERTO series, a calibration chart documents the position error over the measuring range. It also shows the measuring step and the measuring uncertainty of the calibration measurement.

For HEIDENHAIN-METRO gauges the calibration chart shows the mean value of one forward and one backward measuring stroke.

The HEIDENHAIN-CERTO calibration chart shows the envelope curve of the measured error. The HEIDENHAIN-CERTO length gauges are supplied with two calibration charts, each for different operating attitudes.

Operating attitude for calibration chart 1

Example

Temperature range

The length gauges are inspected at a reference temperature of 20 °C. The system accuracy given in the calibration chart applies at this temperature.

Operating attitude for calibration chart 2

The operating temperature indicates the ambient temperature limits between which the length gauges will function properly. The storage temperature range of -20 °C to 60 °C applies for the device in its packaging.

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Repeatability

Whereas the system accuracy applies over the entire measuring range, for some applications the repeatability is the decisive factor. It plays an important role in repeated measurements.

Repeatability is deﬁned in the standards DIN 32876 and DKD-R 4-3, and describes a length gauge’s capability to supply very similar measured values for identical measurands and conditions.

HEIDENHAIN ascertains the repeatability of the length gauges with ﬁve measurements near the lower plunger stop. The plunger is completely extended and retracted at medium speed. Since the length gauge was already in operation for at least 10 minutes before this, it is already in a stable thermal state.

The repeatability of the length gauges is usually better than the values listed in the table. The characteristic statistical distribution is shown in the diagram, using the ST 1200 as an example.

Repeatability depends on the

• combinations of materials used in the components,

• installed electronics,

• optomechanics used, and the

• bearing of the plunger.

Series Repeatability

< x

± 2s

AT 1200

AT 3000

CT 2500

CT 6000

MT 101

MT 1200

MT 2500

MT 60

ST 1200

ST 3000

0.4 µm

0.8 µm

0.02 µm

0.03 µm

0.04 µm

0.03 µm

0.09 µm

0.06 µm

0.25 µm

0.7 µm



Frequency

ST 1200: Statistical distribution of the repeatability

Repeatability



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Mounting

Abbe principle

HEIDENHAIN length gauges enable you to work according to the Abbe measuring principle: The measured object and scale must be in alignment to avoid additional measuring error.

Fastening

The CT 6000, MT 60 and MT 101 length gauges are fastened by two screws onto a plane surface. This ensures a mechanically stable installation of even these large length gauges. Special holders are available for fastening the MT 60 and MT 101 to the MS 100 gauge stand for the HEIDENHAINMETRO (see Accessories).

The CT 2500 is mounted by its standard clamping shank with 16h8 diameter. A holder is available for fastening the HEIDENHAIN-CERTO to the gauge stand (see Accessories).

The AT, ST, MT 1200 and MT 2500 length gauges feature a standard clamping shank with 8h6 diameter. These HEIDENHAIN length gauges can therefore easily be used with existing measuring ﬁxtures and stands.

As an accessory, HEIDENHAIN offers a special clamping sleeve and screw. It facilitates fastening the length gauge securely without overstressing the clamping shank. Clamping sleeve ID 386811-01



CT 6000 MT 60 MT 101

 

CT 2500

 

 

–



Secured with clamping sleeve

Operating attitude for HEIDENHAINCERTO

The HEIDENHAIN-CERTO can be operated at any attitude. However, the mounting position with horizontal length gauge and upward facing mounting surface should be avoided because in such a case no guarantee can be made for accuracy.

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Setup

HEIDENHAIN length gauges function according to the Abbe measuring principle, i.e. the measuring standard and the plunger are exactly aligned. All components comprising the measuring loop, such as the measuring standard, plunger, holder and scanning head are designed in terms of their mechanical and thermal stability for the highest possible accuracy of the length gauge.

The plungers of the HEIDENHAIN length gauges are locked against rotation. Their optimally round form stays unchanged while stability and thermoconductivity remain unimpaired. They are provided with an M2.5 thread to hold measuring contacts (see Accessories)

The plungers of the HEIDENHAIN-ACANTO and HEIDENHAIN-SPECTO ST 1200 length gauges are protected by a rubber bellows. The bellows are characterized by high resistance to chemical and thermal inﬂuences and have a relatively low stiffness. Its inﬂuence on the gauge’s mechanical behavior and the measuring force is therefore low.

Thermal characteristics

HEIDENHAIN length gauges have a deﬁned thermal behavior. Since temperature variations during measurement can result in changes in the measuring loop, HEIDENHAIN uses special materials with low coefﬁcients of expansion Þ

for the compo-

therm

nents of the measuring loop, for example in the HEIDENHAIN-CERTO length gauges. The scale is manufactured of Zerodur (Þ

 0 K–1), and the plunger and holder

therm

are of Invar (Þ

 1 x 10–6 K–1). This

therm

makes it possible to guarantee its high measuring accuracy over a relatively large temperature range.

Acceleration

Length gauges from HEIDENHAIN feature a sturdy design. Even high vibration and shock loads have no negative inﬂuence on the accuracy.

However, shock and vibration of any kind is to be avoided during measurement so as not to impair the high accuracy of measurement. The maximum values given in the speciﬁcations for shock and vibration apply to the effect of external acceleration on the length gauge. They describe only the mechanical stability of the length gauge, and imply no guarantee of function or accuracy.

In the length gauge itself, unchecked extension of the spring-driven or noncoupled moving plunger can cause high acceleration onto the measured object or measuring plate surface. For the MT 1200 and MT 2500 series length gauges, use the cable-type lifter whenever possible (see Accessories). The cable lifter features adjustable pneumatic damping to limit the extension velocity to an uncritical value.

Design of CT 6000, MT 60

Measuring standard (scale)

Scanning unit with light source and photovoltaic cells

Holder

Ball-bush guide

Plunger

Design of ST 1200

Connecting cable

Scanning unit with light source, photocells and scanning electronics

Measuring standard

Ball-bush guide

Plunger

Rubber bellows

Measuring contact

Page 18

Plunger guideway

HEIDENHAIN length gauges are available with various plunger guides.

The plungers of the HEIDENHAIN-ACANTO length gauges work with sliding guides. The sliding guides have the following properties:

• Sturdiness thanks to few moving parts

• High tolerance to shock and vibration

• High plunger speeds and long service life thanks to high-quality ceramic bearings

• Less sensitivity to improper clamping

The HEIDENHAIN-METRO, HEIDENHAINCERTO, and HEIDENHAIN-SPECTO length gauges are equipped with a ball-bush guide. The following are some of the basic properties of ball guides in HEIDENHAIN length gauges:

• Low friction, which makes versions of length gauges with reduced gauging force possible

• Safe plunger extension and retraction even with high radial force

• High precision of the measuring loop thanks to a guide that is free of play (the bearing and plunger are specially ﬁtted during manufacture)

Expendable parts

HEIDENHAIN length gauges contain components that are subject to wear, depending on the application and handling. These include in particular the following parts:

• Guideway (tested for at least 60 million strokes*)

• Cable link for CT, MT 60 and MT 101 (tested for at least 1 million strokes*)

• Scraper rings

• Rubber bellows for AT and ST 1200

* With CT, MT 60 M and MT 101 M

only with actuation by switch box

Note

DIADUR is a registered trademark of DR. JOHANNES HEIDENHAIN GmbH, Traunreut, Germany. Zerodur®is a registered trademark of Schott Glaswerke in Mainz, Germany.

Sliding guide Ball-bush guide

Page 19

Gauging force – plunger actuation

Gauging force

Gauging force is the force that the plunger exercises on the measured object. An excessively large gauging force can cause deformation of the measuring contact and the measured object. If the gauging force is too small, an existing dust ﬁlm or other obstacle may prevent the plunger from fully contacting the measured object. The gauging force depends on the type of plunger actuation.

Plunger actuation by spring

For the AT 1218, AT 3018, MT 12x1, MT 25x1, ST 12x8 and ST 30x8, the integral spring extends the plunger to the measuring position and applies the gauging force. In its resting position, the plunger is extended. The gauging force depends on the following criteria:

• The operating attitude

• The plunger position, i.e. the force changes over the measuring range

• The measuring direction, i.e., whether the gauge measures with extending or retracting plunger

In the diagrams, the measuring force is shown over the measuring range for a retracting and extending plunger in a horizontal operating attitude.

The gauging forces can be divided into the following classes:

• Reduced MR: Approx. half the gauging force of the standard variant.

• Low MW: Gauging force at the beginning of the measuring range, approx 0.01 N

• Springless MG: Constant gauging force over the entire measuring range

In order not to inﬂuence the gauging force, the variants ST 1288 MR and ST 1288 MG are provided without a rubber bellows. Due to their low gauging force, the variants MT 1281 MW, MT 1281 MG and ST 1288 MG can only be used for measuring vertically downward. For this reason, the diagram shows only gauging forces for a vertical operating orientation.

Plunger actuation by measured object

The complete length gauge is moved relative to the measured object, normally while the plunger retracts.

Plunger actuation via cable-type lifter (MT 12x1, MT 25x1)

Through a cable mechanism, the plunger is retracted by hand and then extended onto the measured object. The measurement is made with extending plunger.

The integral pneumatic damping reduces the plunger extension speed to prevent bouncing, for example on very hard materials. This prevents measuring error through bouncing.

The MT 1281 and ST 1288 length gauges are available with various gauging forces. Particularly for fragile materials this makes it possible to measure without deformation.

Special variants 12 mm measuring range 25 mm/30 mm measuring range

0.35



0.30

0.25

0.20

Gauging force [N]

0.15

0.10

0.05

MT 1281 MW extending MT 1281 MW retracting MT 1281 MR extending MT 1281 MR retracting ST 1288 MR extending ST 1288 MR retracting



Gauging force [N]

MT 12x1 extending MT 12x1 retracting ST 12x8 extending ST 12x8 retracting AT 1218 extending AT 1218 retracting

2.0



1.8

1.6

1.4

1.2

Gauging force [N]

1.0

0.8

0.6

0.4

MT 25x1 extending MT 25x1 retracting ST 30x8 extending ST 30x8 retracting AT 3018 extending AT 3018 retracting

0.00

Distance [mm]

0.2



Distance [mm]



5 10 15 20 25 30

Distance [mm]



Page 20

Pneumatic plunger actuation

The pneumatically actuated plungers of the AT 1217, AT 3017, MT 1287, MT 2587, ST 12x7 and ST 30x7 length gauges are extended by the application of compressed air. When the air connection is ventilated, the integral spring retracts the plunger. to a protected resting position within the housing.

The gauging force can be adjusted to the measuring task through the level of air pressure. At constant pressure, it depends on the operating attitude and the plunger position.

The working pressure deﬁnes the pressure range of the ﬁrst complete plunger extension up to the maximum speciﬁed range.

Note

The compressed air introduced directly into the length gauges must be properly conditioned and must comply with the following quality classes as per ISO 8573-1 (1995 edition):

• Solid contaminants Class 1 (max. particle size 0.1 µm and max. particle density 0.1 mg/m

• Total oil content: Class 1 (max. oil concentration 0.01 mg/m at 1 · 10

Pa)

at 1 · 105 Pa)

• Max. pressure dew point: Class 4, but with reference conditions of +3 °C at 2 · 10

The diagrams show the respective measuring force for a horizontal operating attitude depending on the working pressure applied with the plunger fully extended and fully retracted. These are approximate values that are subject to changes due to tolerances and depend on seal wear.

12 mm measuring range (pneumatically actuated)

MT 12x7 retracted MT 12x7 extended ST 12x7 retracted ST 12x7 extended AT 1217 retracted AT 1217 extended



25 mm/30 mm measuring range (pneumatically actuated)

MT 2587 retracted MT 2587 extended ST 30x7 retracted ST 30x7 extended AT 3017 retracted

2.4



2.0

AT 3017 extended

HEIDENHAIN offers the DA 400 com- pressed air unit for purifying compressed air. The minimum ﬂow rate is 10 l/min.

For more information, ask for our DA 400 Product Information Sheet.

Except for special variants, the diagrams apply for the horizontal operating attitude. The following compensation values are to be taken into account for other operating attitudes.

Type

Operating attitude vertical

North South

Gauging force [N]

Pressure [bars]

1.6

AT 121x AT 301x

Gauging force [N]

1.2

MT 12xx MT 25x1

0.8

MT 2587

ST 12x7

0.4

0.0



0.8 1.2 1.6 2.0 2.4 2.8

0.4

Pressure [bars]



ST 12x8 ST 30xx

– 0.12 N – 0.18 N

– 0.13 N – 0.17 N – 0.19 N

– 0.07 N – 0.08 N – 0.11 N

+ 0.12 N + 0.18 N

+ 0.13 N + 0.17 N + 0.19 N

+ 0.07 N + 0.08 N + 0.11 N

Page 21

Motorized plunger actuation

The CT 2501, CT 6001, MT 60 M and MT 101 M length gauges feature an integral motor that moves the plunger. It is operated through the switch box either by push button or over the connection for external actuation. The plungers of the CT 2501, CT 6001 and MT 60 M length gauges must not be moved by hand if the switch box is connected.

The gauging force of the CT 2501, CT 6001, and MT 60 M motorized length gauges is adjustable in three stages through the switch box. The force remains constant over the measuring range but depends on the operating attitude. Regardless of the operating attitude— whether it measures vertically downward (with the SG 101 V switch box) or horizontally (with the SG 101 H switch box)—the MT 101 M exercises a constant gauging force.

CT 2501

MT 60 M MT 101 M

CT 6001

Gauging force

By motor By motor By motor

Vertically downward 1 N/1.25 N/1.75 N 1 N/1.25 N/1.75 N 0.7 N with SG 101 V

Vertically upward –/–/0.75 N –/–/0.75 N –

Horizontal –/0.75 N/1.25 N –/0.75 N/1.25 N 0.7 N with SG 101 H

External plunger actuation by coupling

For the CT 2502, CT 6002, MT 60 K, MT 101 K and special versions (without spring) of the MT 1200, MT 2500, and ST 1288, the plunger is freely movable. For position measurement, the plunger is connected by a coupling with a moving machine element. The force needed to move the plunger is speciﬁed as the required moving force. It depends on the operating attitude.

Gauging force

CT 2502 CT 6002

Moving force

MT 60 K MT 101 K

MT 1271 « TTL MT 1281 » 1 V

Moving force1)Moving force1)– – –

MT 2571 « TTL MT 2581 » 1 V

ST 1288

Vertically downward 0.6 N 0.35 N 1.7 N 0.13 N 0.17 N 0.2 N

Vertically upward 0.1 N 0.1 N 2 N – – –

Horizontal 0.6 N 0.5 N 0.4 N – – –

Force required to move the plunger or of its weight

Page 22

HEIDENHAIN-ACANTO

Absolute length gauges with EnDat interface

• Very compact dimensions

• Splash-proof

• Plain-bush guided plunger

AT 1200

AT 3000

Dimension changes under max. pressure (1.8 bars)

ML = Measuring length

 = Clamping area  = Air connection for 2 mm tube

Page 23

Mechanical data AT 1218 AT 3018 AT 1217 AT 3017

Plunger actuation

Position of plunger at rest

Measuring standard

System accuracy

By measured object Extended

Pneumatic Retracted

DIADUR grating on glass; grating period 188.4 µm

± 2 µm

Position error per signal period  ± 0.7 µm

Measuring range

Working pressure

Mech. permissible traversing speed

Radial force

Fastening

12 mm 30 mm 12 mm 30 mm

– 0.7 bar to 1.8 bars 1.1 bars to 1.8 bars

 80 m/min  120 m/min  80 m/min  120 m/min

 0.5 N (mechanically permissible)

Clamping shank ¬ 8h6

Operating attitude Any

Vibration 55 Hz to 2 000 Hz Shock 11 ms

Operating temperature

 100 m/s  500 m/s

10 °C to 40 °C; reference temperature 20 °C

(EN 60 068-2-6)

(EN 60 068-2-27)

Protection EN 60 529 IP 67 IP 64

IP 67 upon request

IP 64

Weight without cable 80 g 100 g 80 g 100 g

IP67 with sealing air

Electrical data EnDat

Interface

EnDat 2.2

Ordering designation EnDat 22

Resolution 23 nm 368 nm 23 nm 368 nm

Calculation time t

cal

Clock frequency

Electrical connection

 5 µs  8 MHz

M12 ﬂange socket (male) 8-pin

Cable length  100 m with HEIDENHAIN cable

Voltage supply 3.6 V to 14 V DC

Power consumption (max.) 3.6 V:  550 mW

14 V:  650 mW

Current consumption (typical) 5 V: 80 mA (without load)

Page 24

HEIDENHAIN-CERTO

Incremental length gauges with ± 0.1 µm/± 0.051) µm*/± 0.03 µm1) accuracy

• For very high accuracy

• For inspection of measuring equipment and gauge blocks

• Ball-bush guided plunger

CT 2500

CT 6000

 = Reference mark position

Page 25

Speciﬁcations CT 2501 CT 6001 CT 2502 CT 6002

Plunger actuation

Measuring standard

System accuracy

At 19 °C to 21 °C

By motor Via coupling with moving machine part

DIADUR phase grating on Zerodur glass ceramic; grating period 4 µm

± 0.1 µm, ± 0.03 µm

± 0.1 µm, ± 0.05 µm

± 0.1 µm, ± 0.03 µm

Position error per signal period  ± 0.02 µm

Short-range accuracy typically 0.03 µm

Reference mark

Measuring range

Radial force

Fastening

One, ≈ 1.7 mm below upper stop

25 mm 60 mm 25 mm 60 mm

 0.5 N (mechanically permissible)

Clamping shank ¬ 16h8

Plane surface Clamping shank

¬ 16h8

Operating attitude Any required (for preferred operating attitude see Mounting)

Vibration 55 to 2 000 Hz Shock 11 ms

Operating temperature

 100 m/s  1 000 m/s

10 °C to 40 °C; reference temperature 20 °C

(EN 60 068-2-6)

(EN 60 068-2-27)

± 0.1 µm, ± 0.05 µm

Plane surface

Protection EN 60 529 IP50

Weight without cable 520 g 700 g 480 g 640 g

Electrical data CT 2501 CT 6001 CT 2502 CT 6002

Interface

» 11 µA

Signal period 2 µm

Measuring velocity  24 m/min (depending on the subsequent electronics)

 12 m/min with the ND 28x display unit

Electrical connection*

• Cable 1.5 m with D-sub connector (male), 15-pin

• Cable 1.5 m with M23 connector (male), 9 pin Interface electronics are integrated in connector.

Cable length  30 m

Voltage supply 5 V DC ± 0.25 V/< 170 mA 5 V DC ± 0.25 V/< 120 mA

Required accessories* For CT 2501 For CT 6001

Switch box

* Please select when ordering

After linear length-error compensation in the evaluation electronics

Force required to move the plunger or of its weight

SG 25 M SG 60 M

Page 26

HEIDENHAIN-METRO

Incremental length gauges with ± 0.2 µm accuracy

• High repeatability

• Plunger actuation by cable release, by the workpiece or pneumatically

• Ball-bush guided plunger

MT 1200

MT 12x1 MT 1287

18.5 22.0

10.1 6.2

8.1 4.2

MT 2500

MT 1287 MT 2587

MT 25x1 MT 2587

37.0 41.0

10.1 6.2

8.1 4.2

 = Reference mark position  = Beginning of measuring length  = Clamping area  = Air connection for 2 mm tube

Page 27

Mechanical data

Plunger actuation

Position of plunger at rest

Measuring standard

System accuracy

MT 1271 « TTL MT 1281 » 1 V

By cable or measured object Extended

DIADUR phase grating on Zerodur glass ceramic; grating period 4 µm

± 0.2 µm

MT 2571 « TTL MT 2581 » 1 V

MT 1287 » 1 VPPMT 2587 » 1 V

Pneumatic Retracted

Position error per signal period  ± 0.02 µm

Short-range accuracy typically 0.03 µm 0.04 µm 0.03 µm 0.04 µm

Reference mark

Measuring range

Working pressure

Radial force

Fastening

≈ 1.7 mm below upper stop

12 mm 25 mm 12 mm 25 mm

– 0.9 bar to 1.4 bars

 0.8 N (mechanically permissible)

Clamping shank ¬ 8h6

Operating attitude Any; for version without spring and with low gauging force: vertically downward

Vibration 55 Hz to 2 000 Hz Shock 11 ms

Operating temperature

 100 m/s  1 000 m/s

10 °C to 40 °C; reference temperature 20 °C

(EN 60 068-2-6)

(EN 60 068-2-27)

Protection EN 60 529 IP50 IP64 (with sealing air)

Weight without cable 100 g 180 g 110 g 190 g

Electrical data MT 1271

MT 2571

MT 128x MT 258x

Interface

« TTL » 1 V

Integrated interpolation* 5-fold 10-fold –

Signal period 0.4 µm 0.2 µm 2 µm

Mech. permissible traversing speed

Edge separation a at scanning frequency*/traverse speed

200 kHz  24 m/min 100 kHz  12 m/min 50 kHz  6 m/min 25 kHz  3 m/min

Electrical connection*

(Interface electronics integrated in connector)

 30 m/min

 0.23 µs  0.48 µs  0.98 µs

–

 0.23 µs  0.48 µs  0.98 µs

Cable 1.5 m with D-sub connector (male), 15-pin

–

Cable 1.5 m with

• D-sub connector (male), 15-pin

• M23 connector (male), 12-pin

Cable length  30 m with HEIDENHAIN cable

Voltage supply 5 V DC ± 0.5 V/< 160 mA (without load) 5 V DC ± 0.25 V/< 130 mA

* Please select when ordering

At the corresponding cutoff or scanning frequency

Page 28

HEIDENHAIN-METRO

Incremental length gauges with ± 0.5 µm/± 1 µm accuracy

• Large measuring ranges

• For dimensional and positional measurement

• Ball-bush guided plunger

MT 60 M

MT 60

MT 101 M

MT 101

 = Reference mark position

Page 29

Speciﬁcations MT 60 M MT 101 M MT 60 K MT 101 K

Plunger actuation

Measuring standard

System accuracy

By motor Via coupling with moving machine part

DIADUR grating on silica glass; grating period 10 µm

± 0.5 µm ± 1 µm ± 0.5 µm ± 1 µm

Position error per signal period  ± 0.1 µm

Reference mark

Measuring range

≈ 1.7 mm from top ≈ 10 mm from top ≈ 1.7 mm from top ≈ 10 mm from top

60 mm 100 mm 60 mm 100 mm

Radial force mech. permissible  0.5 N  2 N  0.5 N  2 N

Fastening

Operating attitude Any Vertically downward

Plane surface

Any with SG 101 V Horizontal with SG 101 H

Vibration 55 Hz to 2 000 Hz Shock 11 ms

Operating temperature

 100 m/s  1 000 m/s

10 °C to 40 °C; reference temperature 20 °C

(EN 60 068-2-6)

(EN 60 068-2-27)

Protection EN 60 529 IP50

Weight without cable 700 g 1400 g 600 g 1200 g

Electrical data MT 60 M MT 101 M MT 60 K MT 101 K

Interface

» 11 µA

Signal period 10 µm

Measuring velocity  18 m/min  60 m/min  18 m/min  60 m/min

Electrical connection*

Cable 1.5 m with 15-pin D-sub connector (male) or with 9-pin M23 connector (male)

Cable length  30 m with HEIDENHAIN cable

Voltage supply 5 V DC ± 0.25 V

Current requirement < 120 mA < 70 mA

Required accessories* For MT 60 M For MT 101 M

Switch box

SG 60 M Vertical orientation: SG 101 V

Horizontal orientation: SG 101 H

power supply unit

* Please select when ordering

Force required to move the plunger or of its weight

– Required (see Accessories)

Page 30

HEIDENHAIN-SPECTO

Incremental length gauges with ± 1 µm accuracy

• Very compact dimensions

• Splash-proof

• Ball-bush guided plunger

ST 1200

ST 3000 ST 12x7

ST 30x7





–































 = Reference mark position  = Beginning of measuring length  = Clamping area  = Air connection for 2 mm tube

Page 31

Mechanical data

ST 1278 « TTL ST 1288 » 1 V

Plunger actuation

Position of plunger at rest

Measuring standard

System accuracy

By measured object Extended

DIADUR grating on glass; grating period 20 µm

± 1 µm

Position error per signal period  ± 0.2 µm

Short-range accuracy typically 0.3 µm

ST 3078 « TTL ST 3088 » 1 V

ST 1277 « TTL

ST 1287 » 1 V

Pneumatic

Retracted

ST 3077 « TTL ST 3087 » 1 V

Reference mark

Measuring range

Working pressure

Radial force

Fastening

≈ 5 mm below upper stop

12 mm 30 mm 12 mm 30 mm

– 0.7 bar to 2.5 bars 0.8 bar to 2.5 bars

 0.8 N (mechanically permissible)

Clamping shank ¬ 8h6

Operating attitude Any

Vibration 55 Hz to 2 000 Hz Shock 11 ms

Operating temperature

 100 m/s  1 000 m/s

10 °C to 40 °C; reference temperature 20 °C

(EN 60 068-2-6)

(EN 60 068-2-27)

Protection EN 60 529 IP67/IP64 IP 64

Weight without cable 40 g 50 g 40 g 50 g

Electrical data ST 127x

ST 307x

Interface

« TTL » 1 V

ST 128x

ST 308x

Integrated interpolation* 5-fold 10-fold –

Signal period 4 µm 2 µm 20 µm

Edge separation a at scanning frequency*/traverse speed

100 kHz  72 m/min

50 kHz  60 m/min 25 kHz  30 m/min

Electrical connection*

 0.48 µs  0.98 µs  1.98 µs

Cable 1.5 m with D-sub connector (male), 15-pin (integrated interface electronics)

 0.23 µs  0.48 µs  0.98 µs

–

Cable 1.5 m with

• D-sub connector (male), 15-pin

• M23 connector (male), 12-pin

Cable outlet* Axial or radial

Cable length  30 m with HEIDENHAIN cable

Voltage supply 5 V DC ± 0.5 V

Current requirement < 195 mA (without load) < 55 mA

* Please select when ordering

Mechanically limited

At the corresponding cutoff or scanning frequency

Page 32

Accessories

Measuring contacts

Ball-type contact

Steel ID 202504-01 Carbide ID 202504-02 Ruby ID 202504-03

Pin-type contact

Steel ID 202505-01

Domed contact

Carbide ID 229232-01

Knife-edge contact

Steel ID 202503-01

Flat contact

Steel ID 270922-01 Carbide ID 202506-01

Roller contact, steel For a low-friction contact with moving surfaces

Crowned ID 202502-03 Cylindrical ID 202502-04

Adjustable contact, carbide

For exact parallel alignment to the measuring plate surface

Flat ID 202507-01 Knife-edged ID 202508-01

Page 33

Switch boxes, coupling

Switch boxes for CT 2501, CT 6001, MT 60 M, MT 101 M

Switch boxes are required for length gauges with motorized plunger actuation. The plunger is controlled through two push buttons or by external signal. The SG 25 M and SG 60 M switch boxes can adjust the gauging force in three stages.

SG 25 M

ID 317436-01

SG 60 M

ID 317436-02

SG 1 01 V

For the MT 101 M in vertical operation ID 361140-01

SG 101 H

For the MT 101 M in horizontal operation ID 361140-02

Connector (female) 3-pin

For external operation of the switch box ID 340646-05

Separate power supply required

Power adapter for SG 101 V/H

An adapter to be connected to the switch box powers the MT 101 M.

Voltage range 100 V to 240 V AC Exchangeable plug adapter (U.S. and Euro connectors included in delivery)

ID 648029-01

Coupling

For connecting the plunger of the length gauge (speciﬁcally for the MT 60 K, MT 101 K, CT 2502 and CT 6002) to a moving machine element

ID 206310-01

Page 34

Accessories for HEIDENHAIN-CERTO

Gauge stand

CS 200 gauge stand

For length gauges CT 2501* CT 6001

ID 221310-01

Overall height 350 mm Base ¬ 250 mm Column ¬ 58 mm Weight 15 kg

*) With special holder

The ﬂatness of the CS 200 is determined with the aid of a Fizeau interferometer.

Holder for CS 200

For the CT 2501 with ¬ 16 mm clamping shank

ID 324391-01

No chips or ﬂaws

Page 35

Ceramic suction plate, diaphragm pump

Ceramic suction plate

Wear-resistant working surface with high surface quality speciﬁcally for inspecting gauge blocks

ID 223100-01

The gauge block (class 1 or 2)—or any other object with a plane surface—is drawn by suction onto the top of the ceramic plate. The ceramic plate is likewise drawn to the granite base and held in place through negative gauge pressure.

Parts for connecting the ceramic suction plate with the diaphragm pump are among the items supplied:

Pressure tubing 3 m T-joint Connecting piece

Diaphragm pump

Source of suction for drawing the measured object and ceramic suction plate

Power consumption 20 W Weight 2.3 kg Line voltage 230 V AC/50 Hz ID 754220-01

Line voltage 115 V AC/60 Hz ID 754220-02

Page 36

Accessories for HEIDENHAIN-ACANTO, HEIDENHAIN-METRO

and HEIDENHAIN-SPECTO Cable-type lifter, gauge stands

Cable lifter

For manual plunger actuation of MT 1200 and MT 2500. The integral pneumatic damping reduces the plunger extension speed to prevent bouncing, for example on very hard materials.

ID 257790-01

MS 200 gauge stand

For length gauges AT ST MT 1200 MT 2500 MT 60 M MT 101 M

ID 244154-01

Total height 346 mm Base ¬ 250 mm Column ¬ 58 mm Weight 18 kg

With special holder

Holder for MS 200

For mounting the length gauges with ¬ 8 mm clamping shank, e.g. AT, ST, MT 1200, MT 2500

ID 324391-02

Clamping sleeve

For length gauges AT, ST MT 1200 MT 2500 For ﬁxing the length gauge reliably without overloading the 8h6 clamping shank. Consisting of: Sleeve, clamping screw ID 386811-01 (1 piece) ID 386811-02 (10 pieces)

Page 37

MS 45 gauge stand

For length gauges AT ST MT 1200 MT 2500

ID 202162-02

Overall height 196.5 mm Measuring plate ¬ 49 mm Column ¬ 22 mm Weight 2.2 kg

MS 100 gauge stand

For length gauges AT ST MT 1200 MT 2500 MT 60 M MT 101 M

ID 202164-02

Overall height 385 mm Measuring plate 100 mm x 115 mm Column ¬ 50 mm Weight 18 kg

With special holder

Holder for MS 100

For mounting the MT 60 M ID 207479-01

For mounting the MT 101 M ID 206260-01

Page 38

Interface electronics

Interface electronics from HEIDENHAIN adapt the encoder signals to the interface of the subsequent electronics. They are used when the subsequent electronics cannot directly process the output signals from HEIDENHAIN encoders, or if additional interpolation of the signals is necessary.

Input signals of the interface electronics

Interface electronics from HEIDENHAIN can be connected to encoders with sinusoidal signals of 1 V or 11 µA the serial interfaces EnDat or SSI can also be connected to various interface electronics.

Output signals of the interface electronics

Interface electronics with the following interfaces to the subsequent electronics are available:

• TTL square-wave pulse trains

• EnDat 2.2

• DRIVE-CLiQ

• Fanuc Serial Interface

• Mitsubishi high speed interface

• Yaskawa Serial Interface

• Proﬁ bus

Interpolation of the sinusoidal input signals

In addition to being converted, the sinusoidal encoder signals are also interpolated in the interface electronics. This permits ﬁ ner measuring steps and, as a result, higher control quality and better positioning behavior.

(current signals). Encoders with

(voltage signals)

Box design

Plug design

Version for integration

Formation of a position value

Some interface electronics have an integrated counting function. Starting from the last reference point set, an absolute position value is formed when the reference mark is traversed, and is transferred to the subsequent electronics.

Top-hat rail design

Page 39

Outputs Inputs Design – Protection class Interpolation1) or

subdivision

Interface Qty. Interface Qty.

Model

« TTL 1 » 1 V

» 11 µA

« TTL/ » 1 V

2 » 1 V

Adjustable

1 Box design – IP 65 5/10-fold

20/25/50/100-fold

Without interpolation

25/50/100/200/400-fold

Plug design – IP 40 5/10/20/25/50/100-fold

Version for integration –

5/10-fold

IP 00

20/25/50/100-fold

1 Box design – IP 65 5/10-fold

20/25/50/100-fold

Without/5-fold

25/50/100/200/400-fold

Version for integration –

5-fold

IP 00

1 Box design – IP 65 2-fold

5/10-fold

IBV 101

IBV 102

IBV 600

IBV 660 B

APE 371

IDP 181

IDP 182

EXE 101

EXE 102

EXE 602 E

EXE 660 B

IDP 101

IBV 6072

IBV 6172

EnDat 2.2 1 » 1 V

1 Box design – IP 65  16 384-fold subdivision

Plug design – IP 40  16 384-fold subdivision

2 Box design – IP 65  16 384-fold subdivision

DRIVE-CLiQ 1 EnDat 2.2 1 Box design – IP 65 –

Fanuc Serial

1 » 1 V

1 Box design – IP 65  16 384-fold subdivision

Interface

Plug design – IP 40  16 384-fold subdivision

2 Box design – IP 65  16 384-fold subdivision

Mitsubishi high

1 » 1 V

1 Box design – IP 65  16 384-fold subdivision

speed interface

Plug design – IP 40  16 384-fold subdivision

2 Box design – IP 65  16 384-fold subdivision

Yaskawa Serial

1 EnDat 2.2

1 Plug design – IP 40 –

Interface

PROFIBUS-DP 1 EnDat 2.1

Switchable

Only LIC 4100 with 5 nm measuring step, LIC 2100 with 50 nm and 100 nm measuring steps

EnDat 2.2 1 Top-hat rail design –

;

5/10-fold and 20/25/50/100fold

IBV 6272

EIB 192

EIB 392

EIB 1512

EIB 2391 S

EIB 192 F

EIB 392 F

EIB 1592 F

EIB 192 M

EIB 392 M

EIB 1592 M

EIB 3391 Y

PROFIBUS Gateway

Page 40

Evaluation electronics units

For measuring and testing tasks

Evaluation electronics from HEIDENHAIN combine measured value acquisition with intelligent, application-speciﬁ c further processing. They are used in many metrological applications, ranging from simple measuring stations to complex inspection systems with multiple measuring points.

Evaluation units feature interfaces for various encoder signals. They include units with integrated display—which can be used independently—and units that require a PC for operation.

Unit with integrated display – e.g. ND 2100 G GAGE-CHEK

ND 200

Evaluation unit for

• Measurement equipment

• Adjustment and inspection equipment

• SPC inspection stations

ND 1100 QUADRA-CHEK

Evaluation electronics for

• Positioning equipment

• Measuring ﬁ xtures

The overview table lists evaluation electronics for measuring and testing tasks. You can ﬁ nd comprehensive information, including on other evaluation units for 2-D and 3-D measuring tasks, on the Internet under www.heidenhain.de or in the product catalog Evaluation Electronics for Metrology Applications.

Digital readouts for manual machine tools optimally support the operator with

cycles for milling, drilling and turning. You can ﬁ nd these digital readouts on the Internet at www.heidenhain.de or in the product catalog Digital Readouts and

Linear Encoders for Manually Operated Machine Tools.

Modular design – MSE 1000

Table-top design – EIB 700

ND 2100 G GAGE-CHEK

Evaluation electronics for

• Multipoint inspection apparatuses

• SPC inspection stations

MSE 1000

Modular evaluation electronics for

• Multipoint inspection apparatuses

• SPC inspection stations

EIB 700

Evaluation electronics for

• Testing stations

• Multipoint inspection apparatuses

• Mobile data acquisition

IK 220

Evaluation electronics for installation in computer systems with PCI interface for

• Measuring and testing stations

Version for integration – IK 220

Optional for ND 287

Page 41

Functions Input Interpolation or

Interface Qty. Interface

subdivision

Output Model

– » 1 V

• Metrological and statistical functions (sorting and tolerance checking, measurement series, SPC)

• Second encoder

for sum/difference display,

» 11 µA EnDat

temperature compensation

• Measurement series with min./max. value storage

• Connection for touch probe

• Programming of up to 100 parts

• Graphic display of measurement results

• Sorting and tolerance checking using tolerance and

» 1 V « TTL

EnDat

warning limits

• Measurement series with min./max. value storage

• Entry of formulas and combinations

• Functions for statistical process control (SPC)

• Modular design

• Conﬁgurable as desired

• Various interfaces

• Fast communication with higher-level computer system

• Universal outputs

» 1 V « TTL

EnDat Analog LVDT HBT

1 4096-fold RS-232-C/V-24

Up to 2

2 10-fold (at 1 V

) RS-232-C/V-24

4 10-fold (at 1 V

) RS-232-C/V-24

Up to 250 4096-fold Ethernet

USB Ethernet

USB

ND 280

ND 287

ND 1102

ND 1103

ND 1104

ND 2104 G

ND 2108 G

MSE 1000

• Precise position measurement up to 50 kHz updating rate

• Programmable measured-value inputs

• Internal and external measured-value triggers

• Measured-value memory for approx. 250 000 measured values per channel

• Connection over standard Ethernet interface to higher-level computer systems

• Programmable measured-value inputs

• Internal and external measured-value triggers

• Measured-value memory for 8192 measured values per channel

• Optional assemblies for encoder outputs and external inputs/outputs

» 1 V

» 11 µA EnDat SSI

4 4096-fold Ethernet

2 4096-fold PCI bus

EIB 741 EIB 742

IK 220

Page 42

Interfaces

Incremental signals » 11 µA

HEIDENHAIN encoders with » 11 µAPP interface provide current signals. They are intended for connection to ND position display units or EXE pulse-shaping electronics from HEIDENHAIN.

The sinusoidal incremental signals I I

are phase-shifted by 90° elec. and have

signal levels of typically 11 µA illustrated sequence of output signals—I lagging I plunger.

The reference mark signal I ambiguous assignment to the incremental signals.

—applies for the retracting

The Interfaces of HEIDENHAIN Encoders brochure, ID 1078628-xx, includes comprehensive descriptions of all available interfaces as well as general electrical information.

has an un-

. The

and

Signal period

360° elec.

(rated value)

Pin layout

9-pin HEIDENHAIN connector

Voltage supply Incremental signals

3 4

housing

4 2 6 1 9 3 11 14 7

Brown White – White/

= Power supply

Vacant pins or wires must not be used!

0 V External

shield

9 1 2 5 6 7 8

Internal

shield

Brown

I1+ I1– I2+ I2– I0+ I0–

Green Yellow Blue Red Gray Pink

Shield on housing Color assignment applies only to extension cable.

15-pin D-sub connector

For ND 28x/PWM 20 or on encoder

Page 43

Interfaces

Incremental signals » 1 V

HEIDENHAIN encoders with » 1 VPP interface provide voltage signals that can be highly interpolated.

The sinusoidal incremental signals A and B are phase-shifted by 90° elec. and have amplitudes of typically 1 V sequence of output signals—with B lagging A—applies for the direction of motion shown in the dimension drawing.

The reference mark signal R has an un- ambiguous assignment to the incremental signals. The output signal might be somewhat lower next to the reference mark.

The Interfaces of HEIDENHAIN Encoders brochure, ID 1078628-xx, includes comprehensive descriptions of all available interfaces as well as general electrical information.

The illustrated

P P.

Signal period

360° elec.

(rated value)

A, B, R measured with oscilloscope in differential mode

Alternative signal shape

Pin layout

12-pin coupling, M23 12-pin connector, M23

Voltage supply Incremental signals Other signals

Brown/

Shield on housing; U Sensor: The sensor line is connected in the encoder with the corresponding power line.

Vacant pins or wires must not be used! Color assignment applies only to extension cable.

12 2 10 11 5 6 8 1 3 4 9 7 /

4 12 2 10 1 9 3 11 14 7 5/6/8/15 13 /

Green

Sensor

Blue White/

= Power supply

0 V Sensor

0 V

White Brown Green Gray Pink Red Black / Violet Yellow

Green

A+ A– B+ B– R+ R– Vacant Vacant Vacant

15-pin D-sub connector

For ND 28x/PWM 20 or on encoder

Page 44

Incremental signals « TTL

HEIDENHAIN encoders with « TTL interface incorporate electronics that digitize sinusoidal scanning signals with or without interpolation.

The incremental signals are transmitted as the square-wave pulse trains U U

, phase-shifted by 90° elec. The

and

reference mark signal consists of one or more reference pulses U

, which are

gated with the incremental signals. In addition, the integrated electronics produce their inverted signals ¢, £ and ¤ for noise-proof transmission. The illustrated sequence of output signals—with U lagging U

—applies to the direction of

motion shown in the dimension drawing.

The fault detection signal ¥ indicates fault conditions such as an interruption in the supply lines, failure of the light source, etc.

Signal period 360° elec.

The inverse signals ¢, £, ¤ are not shown.

The distance between two successive edges of the incremental signals U U

through 1-fold, 2-fold or 4-fold

and

evaluation is one measuring step.

Fault

Measuring step after 4-fold evaluation

The Interfaces of HEIDENHAIN Encoders brochure, ID 1078628-xx,

provides comprehensive descriptions of all available interfaces as well as general electrical information.

Pin layout

15-pin D-sub connector

Voltage supply Incremental signals Other signals

Brown/

Shield on housing; U Sensor: The sensor line is connected in the encoder with the corresponding power line.

ERO 14xx: Vacant

12 2 10 11 5 6 8 1 3 4 7 / 9

4 12 2 10 1 9 3 11 14 7 13 5/6/8 15

Green

Sensor

0 V Sensor

Blue White/

Green

= Power supply

Exposed linear encoders: Switchover TTL/11 µAPP for PWT

0 V

White Brown Green Gray Pink Red Black Violet – Yellow

Vacant pins or wires must not be used! Color assignment applies only to extension cable.

12-pin HEIDENHAIN connector

Vacant

Page 45

Interfaces

Position values

The EnDat interface is a digital, bidirectional interface for encoders. It is capable both of transmitting position values as well as transmitting or updating information stored in the encoder, or saving new information. Thanks to the serial

transmission method, only four signal lines are required. The DATA data is

transmitted in synchronism with the CLOCK signal from the subsequent electronics. The type of transmission (position values, parameters, diagnostics, etc.) is selected through mode commands that the subsequent electronics send to the encoder. Some functions are available only with EnDat 2.2 mode commands.

The Interfaces of HEIDENHAIN Encoders brochure, ID 1078628-xx, includes comprehensive descriptions of all available interfaces as well as general electrical information.

Ordering designation Command set Incremental signals

EnDat01

EnDat 2.1 or

With

EnDat 2.2

EnDat21 Without

EnDat02 EnDat 2.2 With

EnDat22

EnDat 2.2 Without

Versions of the EnDat interface

Absolute encoder Subsequent electronics

Operating

parameters

Operating

status

Parameters of the OEM

Incremental

signals *)

Absolute

position value

Parameters of the encoder manufacturer for

EnDat 2.1 EnDat 2.2

» 1 V » 1 V

EnDat interface

*) Depends on

encoder

A*)

B*)

Pin layout

8-pin coupling, M12

Brown/Green Blue White/Green White Gray Pink Violet Yellow

15-pin D-sub connector, male

For IK 215/PWM 20

Voltage supply Absolute position values

8 2 5 1 3 4 7 6

4 12 2 10 5 13 8 15

Sensor U

0 V

Sensor 0 V

DATA DATA CLOCK CLOCK

Page 46

Cables and connecting elements

General information

Connector (insulated): Connecting element with coupling ring; available with male or female contacts (see symbols).

Symbols

M12

M12 right-angle connector

M23

Coupling (insulated): Connecting element with external thread;

available with male or female contacts (see symbols).

Symbols

Mounted coupling with central fastening

Mounted coupling with ﬂange

Flange socket: with external thread;

permanently mounted on a housing, available with male or female contacts.

M12

Cutout for mounting

M23

D-sub connector for HEIDENHAIN

controls, counters and IK absolute value cards.

Symbols

Interface electronics integrated in connector

Symbols

The pins on connectors are numbered in the direction opposite to those on couplings or ﬂange sockets, regardless of whether the connecting elements have

male contacts or

female contacts.

When engaged, the connections are pro- tected to IP 67 (D-sub connector: IP 50; EN 60 529). When not engaged, there is no protection.

Accessory for ﬂange sockets and M23 mounted couplings

Threaded metal dust cap

ID 219926-01

Accessory for M12 connecting element Insulation spacer

ID 596495-01

Page 47

Cables and connecting elements

Connecting elements

15-pin

Connector on connecting cable to connector on encoder cable

Mating element on connecting cable to connector on encoder cable

Connector on cable for connection to

subsequent electronics

Coupling on connecting cable

Flange socket for mounting on

subsequent electronics

Mounted couplings

D-sub connector, female for cable ¬ 8 mm

Coupling (female) for cable ¬ 8 mm

Connector (male) for cable ¬ 8 mm

Coupling (male) for cable ¬ 8 mm

Flange socket (female)

With ﬂange (female) ¬ 8 mm

315650-14

12-pin 9-pin

291698-02 291698-01

291697-08 291697-04

291698-04 291698-24

315892-08 315892-06

291698-07 291698-06

With ﬂange (male) ¬ 8 mm

With central fastener (male) ¬ 6 to 10 mm

Adapter » 1 VPP/11 µA

For converting the 1 VPP signals to 11 µAPP; M23 connector (female, 12-pin) and M23 connector (male, 9-pin)

291698-31 –

741045-01 –

364914-01 –

Page 48

Connecting cables 1 VPP, TTL, 11 µAPP 12-pin 9-pin M23 M23

PUR connecting cable [3(2 x 0.14 mm2) + (2 x 1 mm2)]; AP = 1 mm

PUR connecting cable [6(2 x 0.19 mm2)]; AP = 0.19 mm

PUR connecting cable [4(2 x 0.14 mm2) + (4 x 0.5 mm2)]; AP = 0.5 mm

Complete

With D-sub connector (female) and M23 connector (male)

With one connector

with D-sub connector (female), 15-pin

Complete

With D-sub connector (female) and D-sub connector (male), 15-pin, for ND 28x, EIB 741; only 1 V

Complete

With D-sub connector (female) and D-sub connector (female), 15-pin, for ND 780, PT 880, IK 220

Cable only

: ND 11xx, ND 12xx

331693-xx 355215-xx –

332433-xx 355209-xx –

335074-xx 355186-xx –

335077-xx 349687-xx –

816317-xx 816323-xx –

1 VPP, TTL 11 µA

¬ 8 mm ¬ 6 mm

¬ 8 mm

Complete

With M23 coupling (female) and D-sub connector (male), 15-pin, for ND 28x, EIB 741; only 1 V

Complete

With M23 coupling (female) and D-sub connector (male), 19-pin, for ND 11xx, ND 12xx (not 1 V

Complete

With M23 coupling (female) and D-sub connector (female), 15-pin, for ND 780, PT 880, IK 220

With one connector

With M23 coupling (female)

Complete

With M23 coupling (female) and M23 connector (male)

Max. cable length 9 m

: Cross section of power supply lines

: ND 11xx, ND 12xx

)

309784-xx – 653231-xx

617513-xx – 716905-xx

309783-xx – 368172-xx

298402-xx – 309780-xx

298400-xx – 309774-xx

Page 49

Cables and connecting elements

Connecting cables EnDat 8-pin M12

PUR connecting cable [4 × (2 × 0.09 mm

PUR connecting cable [(4 × 0.14 mm2) + (4 × 0.34 mm2)]; AP = 0.34 mm

Complete

With connector (female) and coupling (male)

Complete With right-angle connector (female) and coupling (male)

Complete

With connector (female) and D-sub connector (female), 15-pin, for TNC (position inputs)

Complete With connector (female) and D-sub connector (male), 15-pin, for IK 215, PWM 20, EIB 741, etc.

Complete With right-angle connector (female) and D-sub connector (male), 15-pin, for IK 215, PWM 20, EIB 741, etc.

)]; AP = 0.09 mm

368330-xx 801142-xx

373289-xx 801149-xx

535627-xx –

EnDat without incremental signals

¬ 6 mm ¬ 3.7 mm

524599-xx 801129-xx

722025-xx 801140-xx

With one connector With connector (female)

With one connector With right-angle connector (female)

Max. cable length 6 m

: Cross section of power supply lines

634265-xx –

606317-xx –

Page 50

Calibration according to DAkkS

As part of the quality management standard ISO 9001, inspection equipment relevant to quality must be monitored regularly, and must also be traceable to a national standard in concordance with the International System of Units (SI).

HEIDENHAIN supports its customers in this task with its own calibration laboratory for digital linear and angle encoders, which has been accredited since 1994.

The calibration laboratory at HEIDEN- HAIN operates according to DIN EN ISO/ IEC 17025, and has been accredited by the German Accreditation Body (DAkkS). HEIDENHAIN calibration certiﬁcates— granted by the accredited laboratory—document the traceability to the International System of Units (SI).

The DAkkS is a signatory to the multilateral agreement of the European co-operation for Accreditation (EA) and of the International Laboratory Accreditation Cooperation (ILAC) for the mutual recognition of calibration certiﬁcates. Calibration certiﬁcates from HEIDENHAIN are recognized in most industrial countries.

The calibration certiﬁcate from HEIDENHAIN gives the user certainty about the accuracy of the encoder, and also certiﬁes the traceability to the International System of Units (SI) necessary for ISO 9001.

The calibration laboratory at HEIDENHAIN is equipped for all digital linear and angle encoders where accuracy is of extreme importance:

• AT, CT, MT, ST and length gauges (also in conjunction with ND 28x, EXE or IBV subsequent electronics)

• LC, LF, LIDA, LIP, and LS linear encoders

• ECN, ROC, ROD, and RON angle encoders

Length gauges from HEIDENHAIN can be calibrated no matter what interface they have. If the measuring chain includes a subsequent electronics unit from HEIDENHAIN, this unit can also be included in the calibration.

The following are measured and certiﬁed:

• Deviation span with retracting plunger

• Deviation span in the part measuring span

• Repeatability with ﬁve measurements (extended plunger)

Ͳ<ͲϭϵϬϱϳͲϬϭͲϬϬ

Excerpt from a sample calibration certiﬁcate

Page 51

Page 52

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



   





Vollständige und weitere Adressen siehe www.heidenhain.de

For complete and further addresses see www.heidenhain.de

DE HEIDENHAIN Vertrieb Deutschland

83301 Traunreut, Deutschland

 08669 31-3132 | 08669 32-3132

E-Mail: hd@heidenhain.de

HEIDENHAIN Technisches Büro Nord

12681 Berlin, Deutschland  030 54705-240

HEIDENHAIN Technisches Büro Mitte

07751 Jena, Deutschland  03641 4728-250

HEIDENHAIN Technisches Büro West

44379 Dortmund, Deutschland  0231 618083-0

HEIDENHAIN Technisches Büro Südwest

70771 Leinfelden-Echterdingen, Deutschland  0711 993395-0

HEIDENHAIN Technisches Büro Südost

83301 Traunreut, Deutschland  08669 31-1345

AR NAKASE SRL.

B1653AOX Villa Ballester, Argentina www.heidenhain.com.ar

AT HEIDENHAIN Techn. Büro Österreich

83301 Traunreut, Germany www.heidenhain.de

AU FCR Motion Technology Pty. Ltd

Laverton North 3026, Australia E-mail: vicsales@fcrmotion.com

BE HEIDENHAIN NV/SA

1760 Roosdaal, Belgium www.heidenhain.be

BG ESD Bulgaria Ltd.

Soﬁa 1172, Bulgaria www.esd.bg

BR DIADUR Indústria e Comércio Ltda.

04763-070 – São Paulo – SP, Brazil www.heidenhain.com.br

BY GERTNER Service GmbH

220026 Minsk, Belarus www.heidenhain.by

CA HEIDENHAIN CORPORATION

Mississauga, OntarioL5T2N2, Canada www.heidenhain.com

CH HEIDENHAIN (SCHWEIZ) AG

8603 Schwerzenbach, Switzerland www.heidenhain.ch

CN DR. JOHANNES HEIDENHAIN

(CHINA) Co., Ltd.

Beijing 101312, China www.heidenhain.com.cn

CZ HEIDENHAIN s.r.o.

102 00 Praha 10, Czech Republic www.heidenhain.cz

DK TP TEKNIK A/S

2670 Greve, Denmark www.tp-gruppen.dk

ES FARRESA ELECTRONICA S.A.

08028 Barcelona, Spain www.farresa.es

FI HEIDENHAIN Scandinavia AB

02770 Espoo, Finland www.heidenhain.ﬁ

FR HEIDENHAIN FRANCE sarl

92310 Sèvres, France www.heidenhain.fr

GB HEIDENHAIN (G.B.) Limited

Burgess Hill RH15 9RD, United Kingdom www.heidenhain.co.uk

GR MB Milionis Vassilis

17341 Athens, Greece www.heidenhain.gr

HK HEIDENHAIN LTD

Kowloon, Hong Kong E-mail: sales@heidenhain.com.hk

HR Croatia  SL

HU HEIDENHAIN Kereskedelmi Képviselet

1239 Budapest, Hungary www.heidenhain.hu

ID PT Servitama Era Toolsindo

Jakarta 13930, Indonesia E-mail: ptset@group.gts.co.id

IL NEUMO VARGUS MARKETING LTD.

Tel Aviv 61570, Israel E-mail: neumo@neumo-vargus.co.il

IN HEIDENHAIN Optics & Electronics

India Private Limited

Chetpet, Chennai 600 031, India www.heidenhain.in

IT HEIDENHAIN ITALIANA S.r.l.

20128 Milano, Italy www.heidenhain.it

JP HEIDENHAIN K.K.

Tokyo 102-0083, Japan www.heidenhain.co.jp

KR HEIDENHAIN Korea LTD.

Gasan-Dong, Seoul, Korea 153-782 www.heidenhain.co.kr

MX HEIDENHAIN CORPORATION MEXICO

20290 Aguascalientes, AGS., Mexico E-mail: info@heidenhain.com

MY ISOSERVE SDN. BHD.

43200 Balakong, Selangor E-mail: isoserve@po.jaring.my

NL HEIDENHAIN NEDERLAND B.V.

6716 BM Ede, Netherlands www.heidenhain.nl

NO HEIDENHAIN Scandinavia AB

7300 Orkanger, Norway www.heidenhain.no

PH Machinebanks` Corporation

Quezon City, Philippines 1113 E-mail: info@machinebanks.com

PL APS

02-384 Warszawa, Poland www.heidenhain.pl

PT FARRESA ELECTRÓNICA, LDA.

4470 - 177 Maia, Portugal www.farresa.pt

RO HEIDENHAIN Reprezentant¸a˘ Romania

Bras¸ov, 500407, Romania www.heidenhain.ro

RS Serbia  BG

RU OOO HEIDENHAIN

115172 Moscow, Russia www.heidenhain.ru

SE HEIDENHAIN Scandinavia AB

12739 Skärholmen, Sweden www.heidenhain.se

SG HEIDENHAIN PACIFIC PTE LTD.

Singapore 408593 www.heidenhain.com.sg

SK KOPRETINA TN s.r.o.

91101 Trencin, Slovakia www.kopretina.sk

SL NAVO d.o.o.

2000 Maribor, Slovenia www.heidenhain.si

TH HEIDENHAIN (THAILAND) LTD

Bangkok 10250, Thailand www.heidenhain.co.th

TR T&M Mühendislik San. ve Tic. LTD. S¸TI·.

34775 Y. Dudullu – Ümraniye-Istanbul, Turkey www.heidenhain.com.tr

TW HEIDENHAIN Co., Ltd.

Taichung 40768, Taiwan R.O.C. www.heidenhain.com.tw

UA Gertner Service GmbH Büro Kiev

01133 Kiev, Ukraine www.heidenhain.ua

US HEIDENHAIN CORPORATION

Schaumburg, IL 60173-5337, USA www.heidenhain.com

VE Maquinaria Diekmann S.A.

Caracas, 1040-A, Venezuela E-mail: purchase@diekmann.com.ve

VN AMS Co. Ltd

HCM City, Vietnam E-mail: davidgoh@amsvn.com

ZA MAFEMA SALES SERVICES C.C.

Midrand 1685, South Africa www.heidenhain.co.za

Zum Abheften hier falzen! / Fold here for ﬁling!

*I_208945-2D*

208945-2E · 10 · 4/2015 · H · Printed in Germany

HEIDENHAIN Length Gauges User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Length gauges from HEIDENHAIN

Length gauge overview

Measuring accuracy

Mounting

Setup

Evaluation electronics units

Interfaces

Cables and connecting elements