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O P E R A T I N G M A N U A L
SQM-242™
Thin Film Deposition Controller
IPN 074-549-P1A
O P E R A T I N G M A N U A L
SQM-242™
Thin Film Deposition Controller
IPN 074-549-P1A
®
www.inficon.com reachus@inficon.com
©2011 INFICON
Trademarks
The trademarks of the products mentioned in this manual are held by the companies that produce them.
LabVIEW™ is a trademark of National Instruments.
Z-Match® and SQM-242™ are trademarks of INFICON GmbH.
Windows®, Microsoft®, Visual Basic® and ActiveX® are registered trademarks of Microsoft Corporation.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2011 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.
DECLARATION
OF
CONFORMITY
This is to certify that this equipment, designed and manufactured by:
INFICON Inc.
Two Technology Place
East Syracuse, NY 13057
USA
meets the essential safety requirements of the European Union and is placed on the market accordingly. It has been constructed in accordance with good engineering practice in safety matters in force in the Community and does not endanger the safety of persons, domestic animals or property when properly installed and maintained and used in applications for which it was made.
Equipment Description: |
SQM-242 (including all options) |
Applicable Directives: |
2006/95/EC (LVD) |
|
2004/108/EC (General EMC) |
|
2002/95/EC (RoHS) |
Applicable Standards: |
|
Safety: |
EN 61010-1:2001 |
Emissions: |
EN 61326-1:1997/A1: 1998/A2: 2001 (Radiated & Conducted Emissions) |
|
Class A: Emissions per Table 3 |
|
(EMC – Measurement, Control & Laboratory Equipment) |
Immunity: |
EN 61326-1:1997/A1: 1998/A2: 2001 (General EMC) |
|
Class A: Immunity per Table A1 |
|
(EMC – Measurement, Control & Laboratory Equipment) |
RoHS: |
Fully compliant |
CE Implementation Date: |
July 2003 (Updated February 2011) |
Authorized Representative: Steve Schill
Thin Film Business Line Manager
INFICON Inc.
ANY QUESTIONS RELATIVE TO THIS DECLARATION OR TO THE SAFETY OF INFICON'S PRODUCTS SHOULD BE DIRECTED, IN WRITING, TO THE AUTHORIZED REPRESENTATIVE AT THE ABOVE ADDRESS.
Warranty
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the reverse hereof, to be, for the period of warranty coverage specified below, free from defects of materials or workmanship under normal proper use and service. The period of warranty coverage is specified for the respective products in the respective Seller instruction manuals for those products but shall not be less than two (2) years from the date of shipment thereof by Seller. Seller's liability under this warranty is limited to such of the above products or parts thereof as are returned, transportation prepaid, to Seller's plant, not later than thirty (30) days after the expiration of the period of warranty coverage in respect thereof and are found by Seller's examination to have failed to function properly because of defective workmanship or materials and not because of improper installation or misuse and is limited to, at Seller's election, either (a) repairing and returning the product or part thereof, or (b) furnishing a replacement product or part thereof, transportation prepaid by Seller in either case. In the event Buyer discovers or learns that a product does not conform to warranty, Buyer shall immediately notify Seller in writing of such non-conformity, specifying in reasonable detail the nature of such non-conformity. If Seller is not provided with such written notification, Seller shall not be liable for any further damages which could have been avoided if Seller had been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD HEREUNDER. All other obligations and liabilities of Seller, whether in contract or tort (including negligence) or otherwise, are expressly EXCLUDED. In no event shall Seller be liable for any costs, expenses or damages, whether direct or indirect, special, incidental, consequential, or other, on any claim of any defective product, in excess of the price paid by Buyer for the product plus return transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed, used or operated contrary to Seller's written instruction manual or which has been subjected to misuse, negligence or accident or has been repaired or altered by anyone other than Seller or which has been used in a manner or for a purpose for which the Seller product was not designed nor against any defects due to plans or instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers. Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in connection with the installation, operation or maintenance of this equipment. Should you require further assistance, please contact INFICON.
www.inficon.com reachus@inficon.com
IPN 074-549-P1A
SQM-242 Operating Manual
Table Of Contents
Trademarks
Disclaimer
Copyright
Chapter 1
Introduction
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1.1.1 Related Manuals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 1.2 Instrument Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3 1.2.1 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . . 1-3 1.2.2 General Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4 1.3 How To Contact Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5 1.3.1 Returning Your Instrument to INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5 1.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.4.1 SQM-242 Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.4.2 SAM-242 Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.4.3 SQM-242/SAM-242 Outputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.4.4 Setup Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.4.5 External Communications (SQS-242 only). . . . . . . . . . . . . . . . . . . . . . . . . . 1-7 1.4.6 Computer Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7 1.4.7 General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7 1.4.8 Operating Environment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8 1.4.9 Storage Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8 1.4.10 Warm Up Period . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8 1.4.11 Size. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8 1.4.12 Connector Clearance Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8 1.4.13 Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8 1.5 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9 1.6 Parts and Options Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9 1.6.1 Base Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9 1.6.2 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9 1.6.3 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
TOC - 1
SQM-242 Operating Manual
Chapter 2
Installation
2.1 SQM-242 Card Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.2 SQM-242 Driver Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.3 Software Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.4 SQM-242 Card Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.5 SAM-242 Card Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
2.6 Digital I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Chapter 3
SQM-242 CoDep
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 Main Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.3 Edit: Auto/Manual Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.4 Edit: Recorder Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
3.5 File Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
3.6 View Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
3.6.1 View Menu: Readings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
3.6.2 View Menu: Input Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
3.6.3 View Menu: Card Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
Chapter 4
SQM-242 Monitor
4.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Chapter 5
SQM-242 Multi
5.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Chapter 6
Communications
6.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
6.2 DLL Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
6.3 Sample Files. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Chapter 7
Troubleshooting and Maintenance
7.1 Troubleshooting Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.1.1 Troubleshooting the SQM-242 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
7.1.2 Troubleshooting Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4
7.1.3 Troubleshooting Computer Communications . . . . . . . . . . . . . . . . . . . . . . . . 7-9
TOC - 2
IPN 074-549-P1A
IPN 074-549-P1A
SQM-242 Operating Manual
7.2 Replacing the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-10
7.2.1 Front Load . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-10
7.2.2 Cool Drawer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-11
7.2.3 Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-13
7.2.4 Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-14
7.2.5 Crystal Snatcher . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-15
7.3Crystal Sensor Emulator
IPN 760-601-G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-16
7.3.1 Diagnostic Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-17
7.3.1.1 Measurement System Diagnostic Procedure . . . . . . . . . . . . . . . . . . . . . . . 7-17
7.3.1.2Feed-Through Or In-Vacuum Cable
Diagnostic Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-18
7.3.1.3Sensor Head Or Monitor Crystal
Diagnostic Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-19
7.3.1.4System Diagnostics Pass But
Crystal Fail Message Remains. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-20
7.3.2 Sensor Cover Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-21
7.3.2.1 Compatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-21
7.3.2.2 Incompatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-21
7.3.3 Emulator Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-22
Chapter 8
Calibration
8.1 Importance of Density, Tooling and Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
8.2 Determining Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
8.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
8.4 Laboratory Determination of Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
8.5 Tuning the Control Loop . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
8.5.1 Fast Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-6
8.5.2 Slow Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-7
8.5.3 Loop Tuning Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-8
Chapter 9
Measurement and Control Theory
9.1 Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-1
9.1.1 Monitor Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-2
9.1.2 Period Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-4
9.1.3 Z-match Technique. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-5
9.1.4 Active Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-6
9.1.5 Control Loop Theory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-8
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SQM-242 Operating Manual
Appendix A
Material Table
A.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .A-1
IPN 074-549-P1A
TOC - 4
SQM-242 Operating Manual
Chapter 1
Introduction
1.1 Introduction
The SQM-242 Card is a powerful thin film deposition controller on a PCI card.
Significant features include:
Measure four 1 MHz to 10 MHz quartz crystal sensors simultaneously.
Controls two deposition source supplies simultaneously (co-deposition).
Install multiple cards for up to 24 sensors and 12 control outputs.
Measure four +/- 10 V analog inputs with optional (SAM-242) piggyback card.
Installs in any PC running Windows® 98/2000/ME/XP/7-32-bit with a vacant PCI slot.
Interfaces to your program with Windows DLL and ActiveX® interfaces.
Sample Visual Basic® and LabVIEW™ programs with source code are included.
Figure 1-1 SQM-242 Deposition Control Card
IPN 074-549-P1A
The sample software included with SQM-242 card allows you to:
Co-deposit up to six materials, using up to eight sensors.
Use analog inputs to control heaters, gas flow, and other process variables.
Use outputs for recording rate, thickness, power, or voltage.
Save film setup parameters and deposition data to disk.
Simulate deposition for developing and testing film setups.
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SQM-242 Operating Manual
The optional SQS-242 software allows multi-layer deposition recipes, graphics, flexible PLC-based digital I/O and RS-232/Ethernet external control.
The SQM-242 card is a PID loop process controller designed for use primarily in physical vapor deposition. The SQM-242 card monitors and/or controls the rate and thickness of thin film depositions. The SQM-242 reads frequency from an in-vacuum 1 to 10 MHz quartz crystal driven by a small external oscillator module. The oscillator module uses the in-vacuum crystal as the feedback element of an IC oscillator circuit to amplify the crystal signal to about 0.75 volts peak to peak. The SQM-242 card supplies 5 V (dc) to the oscillator module, and reads the module's frequency output signal on a single BNC cable. On the SQM-242, a 200 MHz reference oscillator sets a known measurement period. By counting the input transitions during the measurement period, a frequency is calculated.
Deposition rate and thickness are inferred from the frequency change induced by mass added to a quartz crystal. This technique positions sensors in the path between, or to the side of, the target substrate and the source of vaporized material. The sensor incorporates an exposed oscillating quartz crystal whose frequency decreases as material accumulates. The change in frequency provides information to determine rate and thickness and to continually control the evaporation power source. With user supplied time, thickness and power limits and with desired rates and material characteristics, the SQM-242 card is capable of automatically controlling the process in a precise and repeatable manner. User interaction is accomplished via the front panel or serial communications and consists of selection or entry of parameters to define the process.
When reading this SQM-242 Manual, please pay particular attention to the NOTES, CAUTIONS, and WARNINGS found throughout the text. The Notes, Cautions, and Warnings are defined in section 1.2.1 on page 1-3.
1.1.1 Related Manuals
Sensors are covered in separate manuals. PDF files of these manuals are contained in the 074-5000-G1 CD, part of the Ship Kit.
074-154 - Bakeable Sensor
074-156 - Front Load Sensor, Single/Dual
074-157 - Sputtering Sensor
147-800 - Cool Drawer Sensor, Single/Dual
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IPN 074-549-P1A
SQM-242 Operating Manual
1.2 Instrument Safety
1.2.1 Definition of Notes, Cautions and Warnings
When using this manual, please pay attention to the NOTES, CAUTIONS and WARNINGS found throughout. For the purposes of this manual they are defined as follows:
NOTE: Pertinent information that is useful in achieving maximum instrument efficiency when followed.
CAUTION
Failure to heed these messages could result in damage to the instrument.
WARNING
Failure to heed these messages could result in personal injury.
WARNING - Risk Of Electric Shock
Dangerous voltages are present which could result in personal injury.
IPN 074-549-P1A
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SQM-242 Operating Manual
1.2.2 General Safety Information
WARNING - Risk Of Electric Shock
The SQM-242/SAM-242 card(s) do not have any user serviceable components.
Dangerous voltages may be present whenever the PC is on or external input/relay connectors are present.
Refer all maintenance to technically qualified personnel.
WARNING - Risk Of Electric Shock
This instrument contains delicate circuitry which is susceptible to transient voltages/static.
Refer all maintenance to technically qualified personnel
WARNING
Failure to operate the SQM-242 card(s) in the manner intended by INFICON can circumvent the safety protection provided by the instrument and may result in personal injury.
IPN 074-549-P1A
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SQM-242 Operating Manual
1.3 How To Contact Customer Support
Worldwide support information regarding:
Technical Support, to contact an applications engineer with questions regarding INFICON products and applications, or
Sales and Customer Service, to contact the INFICON Sales office nearest you, or
Repair Service, to contact the INFICON Service Center nearest you,
is available at www.inficon.com.
When you contact Customer Support, please have the following information readily available:
The firmware version displayed at power-up for your instrument and software version if you are calling about the optional applications software.
A description of your problem.
An explanation of any corrective action that you may have already attempted.
The exact wording of any error messages that you have received.
To contact Customer Support, see Support at www.inficon.com.
1.3.1 Returning Your Instrument to INFICON
Do not return any component of your instrument to INFICON without first speaking with a Customer Support Representative. You must obtain a Return Material Authorization (RMA) number from the Customer Support Representative.
If you deliver a package to INFICON without an RMA number, your package will be held and you will be contacted. This will result in delays in servicing your instrument.
Prior to being given an RMA number, you may be required to complete a Declaration Of Contamination (DOC) form. DOC forms must be approved by INFICON before an RMA number is issued. INFICON may require that the instrument be sent to a designated decontamination facility, not to the factory.
Before returning your instrument, create a record of all user-entered parameters so they may be re-entered, if required.
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SQM-242 Operating Manual
1.4 Specifications
1.4.1 SQM-242 Measurement
Crystal Frequency . . . . . . . . . . . . . . . . 1.0 MHz to 10.0 MHz Frequency Resolution. . . . . . . . . . . . . 0.06 Hz @ 6 MHz
Reference Frequency Accuracy. . . . 0.002% Reference Frequency Stability . . . . . ±2 ppm (0-50°C)
Thickness & Rate Resolution . . . . . . 0.027 Å, 0.044 Å/s @ 2 readings/s, material density = 2.7 gm/cc
Thickness Accuracy . . . . . . . . . . . . . dependent on process conditions, especially sensor location, material stress, temperature and density
Measurement Technique . . . . . . . . . Active Oscillation Number of Sensor . . . . . . . . . . . . . . 4
1.4.2 SAM-242 Inputs
Number of inputs . . . . . . . . . . . . . . . 4, non-isolated
Connectors. . . . . . . . . . . . . . . . . . . . BNC
Input Range . . . . . . . . . . . . . . . . . . . 0 to ± 10 V (dc)
Input Impedance . . . . . . . . . . . . . . . 20 kΩ
Resolution . . . . . . . . . . . . . . . . . . . . 15 bit (plus sign)
1.4.3 SQM-242/SAM-242 Outputs
Number of inputs . . . . . . . . . . . . . . . 2, non-isolated
Connectors. . . . . . . . . . . . . . . . . . . . 1/4" Dual Phone Jack
Output Voltage . . . . . . . . . . . . . . . . . 0 to ±10 V (dc)
Source Impedance . . . . . . . . . . . . . . 1 kΩ
Resolution . . . . . . . . . . . . . . . . . . . . 15 bit (plus sign)
1.4.4 Setup Parameters
Material Density . . . . . . . . . . . . . . . . 0.4 to 99.99 gm/cc
Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . 0.50 to 25.00
Sensor Tooling . . . . . . . . . . . . . . . . . 0 to 399%
Full Scale Voltage. . . . . . . . . . . . . . . 0 to ±10 V
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IPN 074-549-P1A
IPN 074-549-P1A
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SQM-242 Operating Manual |
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Power . . . . . . . . . . . . . . . . . . . . . . . . |
0 to 100% |
Slew Rate . . . . . . . . . . . . . . . . . . . . . |
0 to 100%/s |
P Term . . . . . . . . . . . . . . . . . . . . . . . |
0 to 9999 |
I Term . . . . . . . . . . . . . . . . . . . . . . . . |
0 to 99.9 s |
D Term . . . . . . . . . . . . . . . . . . . . . . . |
0 to 99.9 s |
Rate . . . . . . . . . . . . . . . . . . . . . . . . . |
0 to 999.9 s |
Final Thickness . . . . . . . . . . . . . . . . |
0 to 999.9 Å |
Mode . . . . . . . . . . . . . . . . . . . . . . . . |
Normal or Simulate |
Output Control . . . . . . . . . . . . . . . . . |
PID or Manual |
Sensor/Output map . . . . . . . . . . . . . |
Any sensor can control any output |
Analog/Output Map (SAM-242) . . . . |
Any analog input can control any output |
Measurement Period . . . . . . . . . . . . |
0.1 to 2 s |
1.4.5 External Communications (SQS-242 only)
Serial Port. . . . . . . . . . . . . . . . . . . . . RS-232C
Baud Rates. . . . . . . . . . . . . . . . . 9,600; 19,200; 38,400;
Ethernet TCP/IP Port . . . . . . . . . . . . Static address, DHCP not supported.
1.4.6 Computer Requirements
Processor . . . . . . . . . . . . . . . . . . . . . 1 GHz Pentium IV or comparable RAM . . . . . . . . . . . . . . . . . . . . . . . . . 256 MB RAM
Memory . . . . . . . . . . . . . . . . . . . . . . 30 MB hard disk space
Operating System. . . . . . . . . . . . . . . Windows 98/ ME/ NT/ 2000 SP4/ XP SP2/ 7 32-Bit
Comm Port . . . . . . . . . . . . . . . . . . . . PCI Slot, Serial or USB for PLC I/O communications (SQS-242 only)
1.4.7 General Specifications
SQM-242 Card Type . . . . . . . . . . . . PCI (32 bit, 5V, 33MHz)
SQM-242 Max. Cards/Computer . . . 6
SAM-242 Card Typer . . . . . . . . . . . . Slave to SQM-242 (ribbon cable)
SAM-242 Max. Cards/Computer . . . 1
Power Consumption . . . . . . . . . . . . . 5 W Max
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SQM-242 Operating Manual
1.4.8 Operating Environment
Usage. . . . . . . . . . . . . . . . . . . . . . . . Indoor only Temperature . . . . . . . . . . . . . . . . . . . 0 to 50°C (32-122°F)
Humidity . . . . . . . . . . . . . . . . . . . . . . 0 to 80% RH. @ 31°C, non-condensing Altitude . . . . . . . . . . . . . . . . . . . . . . . 0 to 2000 m
Installation (Overvoltage) . . . . . . . . . Category II Measurement Category . . . . . . . . . . II Pollution Degree. . . . . . . . . . . . . . . . 2
Equipment Type . . . . . . . . . . . . . . . . Class 1 (grounded type). Suitable for continuous operation
Protection . . . . . . . . . . . . . . . . . . . . . Not protected against harmful ingress of moisture
1.4.9 Storage Temperature
Storage Temperature . . . . . . . . . . . . -40 to 70°C (-40 to 158°F)
1.4.10 Warm Up Period
Warm Up Period. . . . . . . . . . . . . . . . None required;
For maximum stability allow 5 minutes.
1.4.11 Size
Not including user connectors
4.21 in. L x 5.91 in. W
(107 mm L x 150 mm W)
1.4.12 Connector Clearance Requirements
Rear . . . . . . . . . . . . . . . . . . . . . . . . . Less than 4.0 in. (102 mm)
1.4.13 Weight
1 card . . . . . . . . . . . . . . . . . . . . . . . . 0.2 kg / 0.4 lb.
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IPN 074-549-P1A
IPN 074-549-P1A
SQM-242 Operating Manual
1.5 Unpacking and Inspection
1If the SQM-242 card has not been removed from its packaging, do so now.
2Carefully examine the card for damage that may have occurred during shipping. This is especially important if you notice obvious rough handling on the outside of the container. Immediately report any damage to the carrier and to INFICON.
3Do not discard the packing materials until you have taken inventory and have at least performed successful installation.
4Take an inventory of your order by referring to your order invoice and the information contained in section 1.6.
5To install the card, see Chapter 2, Installation.
6For additional information or technical assistance, contact INFICON, refer to section 1.3 on page 1-5.
1.6Parts and Options Overview
1.6.1 Base Configurations
SQM-242 Card . . . . . . . . . . . . . . . . . . . . .782-SQM-242
SQS-242 Software . . . . . . . . . . . . . . . . . .782-SQS-242, Optional
SAM-242 Card . . . . . . . . . . . . . . . . . . . . .782-SAM-242, Optional
Technical Manual . . . . . . . . . . . . . . . . . . .074-549 on 074-5000-G1 CD
1.6.2 Accessories
Each sensor requires an oscillator kit to interface to the controller: SQM-242 10' Oscillator Kit . . . . . . . . 782-934-003-10
SQM-242 25' Oscillator Kit . . . . . . . . 782-934-003-25
SQM-242 50' Oscillator Kit . . . . . . . . 782-934-003-50
SQM-242 100' Oscillator Kit . . . . . . . 782-934-003-99
Above kits consist of oscillator 782-900-010, 6 inch BNC oscillator to feedthrough cable 782-902-011 and BNC controller to oscillator cable 782-902-012-10, 782-902-012-25, 782-902-012-50 or 782-902-012-99. These kits are designed for use with the standard in-vacuum cables ranging in length from 6 inches (15.2 cm) to 36 inches (91.4 cm). The 007-044 standard in-vacuum cable supplied with the front load style sensors are 30.75 inches (78.1 cm) long.
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SQM-242 Operating Manual
1.6.3 Sensors
Front Load Single Sensor . . . . . . . . . . . . . . . . . . . . SL-XXXXX
Front Load Dual Sensor . . . . . . . . . . . . . . . . . . . . . . DL-AXXX Cool Drawer Single Sensor . . . . . . . . . . . . . . . . . . . CDS-XXFXX Cool Drawer Dual Sensor . . . . . . . . . . . . . . . . . . . . CDD-XFXX Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . 750-618-G1 Front Load UHV Bakeable Sensor. . . . . . . . . . . . . . BK-AXF
NOTE: All shuttered sensors require a feedthrough with an air line and a pneumatic shutter actuator control valve.
Pneumatic Shutter Actuator Control Valve . . . . . . . . 750-420-G1
NOTE: Multi-crystal (rotary) sensors should not be used with the SQM-242 NOTE: Consult individual sensor manuals for part muber configurations.
IPN 074-549-P1A
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IPN 074-549-P1A
SQM-242 Operating Manual
Chapter 2
Installation
2.1 SQM-242 Card Installation
Jumper each SQM-242 card before installation as shown in Figure 2-1.
Figure 2-1 Jumper Configurations
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Card 1 |
Card 2 |
Card 3 |
Card 4 |
Card 5 |
Card 6 |
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JP5 |
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JP5 |
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JP5 |
JP5 |
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If you are installing a SAM-242 analog piggyback card, it must be connected to Card 1. Set the Card 1 jumper as shown in Figure 2-2 when the optional SAM-242 card is used.
Figure 2-2 SAM-242 Card Installation
Card 1 Jumper |
Card 1 with SAM-242 |
with SAM-242 Card installed |
Ribbon Cable installed |
JP5
The SAM-242 card can go on
either side of SQM-242 Card as long as the ribbon cable not twisted (red stripe on one
side of both cards).
Once each card is jumpered:
1Turn off the computer, unplug the power cord, and remove the computer cover.
2Locate an empty PCI slot and remove the screw holding the blank bracket for the slot. Remove the blank bracket.
3With the card’s gold contacts down, place it above the PCI slot with the BNC connectors on the card extending through the back of the computer. Press down on the card to seat it into the connector. Repeat with each card.
4Replace the screw at the top of the card bracket to secure the card. Replace the cover on the computer and plug in the power cord.
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SQM-242 Operating Manual
2.2SQM-242 Driver Installation
1Turn on the computer and start Windows. Windows will find new hardware and prompt to Install Device Drivers.
2If you are prompted for the location of the Device Drivers, insert the INFICON CD-ROM and direct Windows to D:\SQM242 Card\SQM242_V100_DRIVERS (assuming D is your CD drive).
3When driver installation is complete, you may be prompted to restart your computer.
4Check the README.txt file in the \SQM242 Card\SQM242_V100_DRIVERS folder of the INFICON CD-ROM for additional steps that are specific to your version of Windows.
5Verify that the card was installed properly in Device Manager. Right-click on My Computer, then left-clicking on Properties. Click on the Device Manager tab (Hardware tab in Windows 2000 or XP, then Device Manager). You should see Sigma Instruments listed, with the SQM-242 cards in the sub folder.
If the card is not listed (or has a red x or yellow exclamation point), repeat the installation procedures above carefully.
NOTE: Occasionally it may be necessary to completely uninstall and reinstall a card. Highlight the improperly installed card in Device Manager and press <Delete>. Next, run the "clean" program in the \SQM242 Card\SQM242_V100_DRIVERS folder of the INFICON CD-ROM. Reboot the computer, then follow the steps above carefully.
2.3 Software Installation
SQM-242 Card programs are also on the INFICON CD-ROM. Insert the CD-ROM, click the Windows Start button, and then select Run. Type D:\SQM242 Card\Setup.exe and click OK.
Accept the default installation prompts. When installation completes, you may be prompted to restart your computer. This installer will install three programs: SQM-242 CoDep, SQM-242 Monitor, and SQM-242 Multi.
To run the any software program, click Start, then Program, then Sigma Instruments and select the program.
To verify the SQM-242 cards are properly installed, start SQM-242 CoDep. Select the View menu, then Card Setup. If the card revision for each installed card is greater than 0.00, then it is installed properly.
NOTE: If the version is shown as 0.00, then reinstall the Windows drivers as explained in section 2.2. Pay particular attention to any Windows version specific instructions in the README file.
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IPN 074-549-P1A
SQM-242 Operating Manual
2.4 SQM-242 Card Connections
The control output and sensor input connectors to the SQM-242 card are shown below. Refer to this drawing in the subsequent hookup instructions.
Figure 2-3 SQM-242 Setup
IPN 074-549-P1A
Sensor Connections |
Power Supply |
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A BNC cable connects the SQM-242 sensor input to the |
Control Outputs |
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Sensor 1 |
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"instrument" connector on the remote oscillator. The |
Sensor 2 |
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maximum length is 50 feet (15 meters). |
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Sensor 3 |
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To ensure proper operation of the SQM-242, use oscillators |
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Sensor 4 |
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manufactured by INFICON [PN 782-900-010]. |
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The connection from the remote oscillator "feedthru"
connector to the vacuum chamber feedthrough is made using a short 6 inch (15 cm) cable with BNC male to female
connectors [PN 782-902-011]. Inside the vacuum chamber, your in-vac cable must be no longer than 36 inches (91.4 cm). It connects from the feed-through to the crystal sensor.
NOTE: The SQM-242 will not work with INFICON ModeLock oscillators.
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SQM-242 Operating Manual
Output Connections
The SQM-242 output connection is via a 1/4" Stereo Phone Jack. A standard 1/4" Stereo Phone Plug is shown below (with outer collar removed to show the contacts). Output 1 is on the ring, Output 2 is on the tip, and a common ground is on the sleeve.
Figure 2-4 1/4" Stereo Phone Jack
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Chan. 1 (Ring) |
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SLEEVE |
Ground |
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(Sleeve) |
Chan. 2 (Tip) |
Connect the SQM-242 output to your evaporation power supply, recorder, or other equipment as described in the equipment’s operating manual.
CAUTION
Special care must be taken in connecting the SQM-242 card output to the input connector of your equipment. Failure to understand and follow the equipment manufacturer’s instructions can result in damage to the equipment and/or SQM-242 card.
The SQM-242 output is 0 to +/- 10 V (dc). See section 3.3 of this manual for instructions on setting the SQM-242 output Full Scale level to match your power supply. If your equipment needs a 4-20 mA control signal, you must obtain a voltage-to-current converter.
NOTE: If you are using the SQM-242 as a monitor only, no output connection is needed.
Ground Connection
The chassis of all control components should be tied to a common earth ground using a low resistance cable. This is particularly important in high noise E-Beam systems.
IPN 074-549-P1A
2 - 4
IPN 074-549-P1A
SQM-242 Operating Manual
2.5 SAM-242 Card Connections
The input and output and connectors on the SAM-242 card are identical to those on the SQM-242 card.
Figure 2-5 SAM-242 Card
Input Connections
BNC cables connect the SAM-242 input to the signals to be measured. The SAM-242 accepts input voltages within +/- 10 V (dc).
NOTE: You can not connect sensors to these inputs.
CAUTION
The BNC connector shield of each SAM-242 input is connected to a common analog ground. Input signals to the SAM-242 must be within +/-10 V (dc) and share a common ground. Failure to observe this constraint can result in damage to your equipment and/or the SAM-242 card,
Output Connection
The SAM-242 outputs are identical to the SQM-242. See the previous section for hookup instructions.
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SQM-242 Operating Manual
2.6 Digital I/O
The SQM-242 card and SQM-242 software do not support the digital I/O required to automatically open and close shutters, rotate source pockets, etc.
The optional SQS-242 Codeposition software adds this capability to the SQM-242 card. Using an inexpensive PLC, the SQS-242 software provides virtually unlimited digital I/O capabilities.
Contact INFICON for more information on interfacing the SQM-242 card to your system's digital I/O.
IPN 074-549-P1A
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SQM-242 Operating Manual
Chapter 3
SQM-242 CoDep
3.1 Introduction
The SQM-242 CoDep program illustrates most of the capabilities of the SQM-242 card. It is intended as a learning tool for new users, and a programming example for interfacing to user applications.
3.2 Main Dialog Box
With no cards installed (or with two SQM-242 cards and an SAM-242 card installed) you will see the dialog box shown in Figure 3-1. The number of "output frames" shown will change depending on the number of cards installed in your system. For example, with only one SQM-242 card installed, the main dialog box shows only two output frames.
Figure 3-1 SQM-242 Codep Main Dialog Box
IPN 074-549-P1A
Each output frame corresponds to a physical output on an SQM-242 card. In Figure 3-1, the first three outputs are each configured to use quartz sensors to measure rate and thickness.
The frame labeled "Gas Flow" is a little different. This output uses an analog input on the SAM-242 card to control backfill gas. The SAM-242 card can use any analog voltage for control. More about this feature later.
3 - 1
SQM-242 Operating Manual
Output A1 above is turned off, while Output A2 is used as a recorder output. The output labels are easily edited to provide descriptive names. Dialog boxes within each output frame will change, depending on the function of that output.
Outputs configured for quartz sensor inputs, like the first three in the sample dialog box, display rate and thickness information. The first display is the Thickness Measurement for the material (in kÅ). Immediately below the Thickness Measurement display is the Thickness Setpoint setting. You can edit the Thickness Setpoint at any time. When the Thickness Reading reaches the Thickness Setpoint, the deposition will stop.
NOTE: To adjust a Setpoint, click on the setting and type a new setting. Press <Enter> to send the setting without moving to another field. To move to another field, use the <Tab> key or your mouse. Each time you move to another field, the setting is updated.
Below the thickness displays are the Rate Reading and Rate Setpoint displays (in Å/s). In Auto mode, the SQM-242 control loop continuously adjusts the output power to maintain the deposition Rate Reading at the desired Rate Setpoint.
Below the rate displays are the output Power Reading and manual Power Setpoint. The Power Reading displays the current output power (in % Full Scale). In Manual mode, the Power Setpoint can be edited to manually adjust output power.
The option buttons control the function of each output. As mentioned previously, Auto mode uses a PID control loop to control rate. Manual mode, allows you to manually adjust the output power. That can be useful for material preconditioning or error conditions.
The Record button configures the output as an analog recorder. A recorder output provides a signal that is proportional to thickness, rate, power, or analog voltage. Finally, the Off button sets the output to 0 volts and hides the displays.
Start/Stop . . . . . . . . . . . . . . . . . . . . When Start is displayed, starts SQM-242 readings and PID output control. When Stop is displayed, stops readings and sets the power outputs to zero. When Stop is displayed, a Hold button is also visible.
Hold/Resume . . . . . . . . . . . . . . . . . Clicking Hold sets all output power levels to zero, and changes the button legend to Resume. Clicking Resume continues deposition without zeroing thickness.
Zero All . . . . . . . . . . . . . . . . . . . . . . Sets all material (i.e., output) thickness readings to zero.
Zero . . . . . . . . . . . . . . . . . . . . . . . . . Sets the selected material thickness reading to zero.
Edit . . . . . . . . . . . . . . . . . . . . . . . . . Displays a dialog box with additional settings for an output.
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IPN 074-549-P1A
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