INFICON BCG450 ATM User Manual

Operating Manual

TripleGauge™

Bayard-Alpert Pirani Capacitance Diaphragm Gauge

BCG450

BCG450-SD

BCG450-SP

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1

Product Identification

Validity

Intended Use

In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below.

INFICON AG, LI-9496 Balzers

Model:
PN:
SN:
V	W

This document applies to products with the following part numbers:

BCG450 (without display)

353-550 (vacuum connection DN 25 ISO-KF) 353-551 (vacuum connection DN 40 CF-R)

353-561 (vacuum connection DN 25 ISO-KF, with baffle)

BCG450 (with display)

353-552 (vacuum connection DN 25 ISO-KF) 353-553 (vacuum connection DN 40 CF-R)

BCG450-SD (with DeviceNet interface and switching functions)

353-557 (vacuum connection DN 25 ISO-KF) 353-558 (vacuum connection DN 40 CF-R)

353-562 (vacuum connection DN 25 ISO-KF, with baffle)

BCG450-SP (with Profibus interface and switching functions)

353-554 (vacuum connection DN 25 ISO-KF) 353-556 (vacuum connection DN 40 CF-R)

The part number (PN) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this document correspond to gauge with part number 353-552. They apply to the other gauges by analogy.

All BCG450 versions are shipped with an instruction sheet (→ [8]). BCG450-SD and BCG450-SP come with a supplementary instruction sheet describing the fieldbus interfaces and the switching functions (→ [9]).

We reserve the right to make technical changes without prior notice.

The BCG450, BCG450-SD and BCG450-SP gauges have been designed for vacuum measurement of gases in the pressure range 5×10-10 … 1500 mbar.

They must not be used for measuring flammable or combustible gases in mixtures containing oxidants (e.g. atmospheric oxygen) within the explosion range.

The gauges can be operated in connection with the INFICON Vacuum Gauge Controller VGC401, VGC402 or VGC403 or with other control devices.

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Functional Principle

Trademarks

Due to the combination of three sensor technologies incorporated in the gauge (Capacitance diaphragm sensor, Pirani sensor and hot cathode ionisation sensor (BA)), a minimized gas type dependence is achieved.

Between 10 mbar and atmospheric pressure, the capacitance diaphragm sensor operates without any gas type dependence. Below 1 mbar, the Pirani sensor and the hot cathode ionisation sensor take over with only a small gas type dependence.

Between 1 … 10 mbar and 5×10-3 … 2×10-2 mbar the gauges built in electronic circuits take care of continuous and smooth crossovers between the ranges. Over the whole measurement range, the measurement signal is output as a logarithm of the pressure.

The hot cathode is switched on by the Pirani measurement system only below the switching threshold of 2.4×10-2 mbar (to prevent filament burn-out). It is switched off when the pressure exceeds 3.2×10-2 mbar.

Gauge adjustment is carried out automatically, no manual adjustment is required.

A user programmable atmospheric pressure switching function is incorporated.

DeviceNet™	Open DeviceNet Vendor Association, Inc.
TripleGauge™	INFICON AG, Balzers

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3

Contents

Product Identification					2
Validity					2
Intended Use					2
Functional Principle					3
Trademarks					3
1	Safety				6
1.1		Symbols Used			6
1.2		Personnel Qualifications			6
1.3		General Safety Instructions			7
1.4		Liability and Warranty			7
2	Technical Data				8
3	Installation				13
3.1		Vacuum Connection			13
3.1.1 Removing and Installing the Electronics Unit					15
3.1.2 Using the Optional Baffle					16
3.2		Power Connection			17
3.2.1 Use With INFICON VGC40x Vacuum Gauge Controller					17
3.2.2 Use With Other Controllers					18
3.2.2.1 Making an Individual Sensor Cable					18
3.2.2.2 Making a DeviceNet Interface Cable (BCG450-SD)					21
3.2.2.3 Making a Profibus Interface Cable (BCG450-SP)					22
3.2.3 Using the Optional Power Supply (With RS232C Line)					23
4	Operation				25
4.1		Measuring Principle, Measuring Behavior			25
4.2		Operational Principle of the Gauge			27
4.3		Putting the Gauge Into Operation			28
4.4		Degas			28
4.5		Emission Control Mode			29
4.6		Atmosphere Switching Function			30
4.6.1			Functional Principle		30
4.6.2 Programming the Atmospheric Pressure Threshold					31
4.6.3 Wiring the relay "Atmospheric Pressure Reached" (BCG450)					32
4.7		Display (BCG450)			32
4.8		RS232C Interface			33
4.8.1 Description of the Functions					34
4.8.1.1				Output String (Transmit)	34
4.8.1.2				Input String (Receive)	36
4.9		DeviceNet Interface (BCG450-SD)			38
4.9.1 Description of the Functions					38
4.9.2			Operating Parameters		38
4.9.2.1				Operating Software	38
4.9.2.2				Node Address Setting	38
4.9.2.3				Data Rate Setting	39
4.9.3			Status Lights		39
4.10			Profibus Interface (BCG450-SP)		40
4.10.1 Description of the Functions					40
4.10.2				Operating Parameters	40
4.10.2.1				Operating Software	40
4.10.2.2				Node Address Setting	40
4.11			Switching Functions (BCG450-SD, -SP)		41
4.11.1 Setting the Switching Functions					41
5	Deinstallation				43

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6	Maintenance, Repair		45
6.1		Maintenance	45
6.1.1 Cleaning the Gauge			45
6.2		Adjusting the Gauge	45
6.3		Adjusting the Atmosphere Sensor	45
6.4		What to Do in Case of Problems	47
6.5		Replacing the Sensor	49
7	Options		50
8	Spare Parts		50
9	Storage		50
10		Returning the Product	51
11		Disposal	51
Appendix			52
A:		Relationship Measuring Signal – Pressure	52
B:		Gas Type Dependence	53
C:		Literature	55

Declaration of Contamination		56
For cross-references within this document, the symbol (→	XY) is used, for cross-
references to further documents and data sources, the symbol (→		[Z]).

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5

1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.

Notice

Hint, recommendation

The result is O.K.

The result is not as expected.

Optical inspection

Waiting time, reaction time

1.2 Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.

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1.3General Safety Instructions

1.4 Liability and Warranty

•Adhere to the applicable regulations and take the necessary precautions for the process media used.

Consider possible reactions between the materials (→ 11) and the process media.

Consider possible reactions of the process media (e.g. explosion) due to the heat generated by the product.

•Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.

•Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Communicate the safety instructions to all other users.

INFICON assumes no liability and the warranty becomes null and void if the enduser or third parties

•disregard the information in this document

•use the product in a non-conforming manner

•make any kind of interventions (modifications, alterations etc.) on the product

•use the product with accessories not listed in the corresponding product documentation.

The end-user assumes the responsibility in conjunction with the process media used.

Gauge failures due to contamination or wear and tear, as well as expendable parts (e.g. filament), are not covered by the warranty.

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2 Technical Data

Measurement principle

Measuring range

Emission

Degas

Output signal

Pressure range
10	…	1500 mbar	capacitance diaphragm sensor
1	…	10 mbar	crossover range
2×10-2	…	1 mbar	Pirani sensor
5×10-3	… 2×10-2 mbar		crossover range
5×10-10	…	5×10-3 mbar	hot cathode ionisation (BA)
Range (air, O2, CO, N2)			5×10-10 … 1500 mbar, continuous
Accuracy
1×10-8	…	50 mbar	±15% of reading
50	…	950 mbar	±5% of reading
950	… 1050 mbar		±2.5% of reading
			(after 10 min. stabilisation)
Repeatability			5% of reading, 10-8 … 10-2 mbar
			(after 10 min. stabilisation)
Gas type dependence			→ Appendix B
Switching on threshold			2.4×10-2 mbar
Switching off threshold			3.2×10-2 mbar
Emission current
p ≤7.2×10-6 mbar			5 mA
7.2×10-6 mbar < p < 3.2×10-2 mbar			25 µA
Emission current switching			7.2×10-6 mbar
25 µA 5 mA
5 mA 25 µA			3.0×10-5 mbar
Degas emission current			≈20 mA (Pdegas ≈4 W)
(p <7.2×10-6 mbar)
Control input signal			0 V/+24 VDC, active high
			(control via RS232 → 33)
Duration			max. 3 min, followed by automatic stop
			A new degas cycle can only be started
			after a waiting time of 30 minutes.

In degas mode, BCG450 gauges keep supplying measurement values, however their tolerances may be higher than during normal operation.

Output signal (measuring signal)	0 … +10.13 V
Measuring range	0.774 … +10.13 V
	(5×10-10 mbar … 1500 mbar
Relationship voltage-pressure	logarithmic, 0.75 V/decade
	(→ Appendix A)
Error signal	+0.1 V Diaphragm sensor or
	EEPROM error
	+0.3 V BA sensor error
	+0.5 V Pirani sensor error
	(→ 47)
Minimum load impedance	10 kΩ

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Display (BCG450)

Power supply

Sensor cable connection

Display panel	LCD matrix, 32×16 pixels
Background illumination	two colors red/green
Dimensions	16.0 mm × 11.2 mm
Pressure units (pressure p)	mbar (default), Torr, Pa
	(selecting the pressure unit → 33)

DANGER

The gauge may only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded extralow voltage (SELV). The connection to the gauge has to be fused (INFICON controllers fulfill these requirements).

	Operating voltage at the gauge			+24 VDC (+20 … +28 VDC) 1)
				ripple max. 2 Vpp
	Power consumption
			Standard	≤0.5 A
			Degas	≤0.9 A
			Emission start (<200 ms)	≤1.4 A
	Power consumption
			BCG450	≤18 W
			BCG450-SD	≤20 W
			BCG450-SP	≤20 W
	Fuse necessary			1.25 AT
			BCG450-SD requires an additional, separate power supply for the
			DeviceNet interface (→	21).
	Supply voltage at the DeviceNet con-
	nector, (Pin 2 and Pin 3)			+24 VDC (+11 … +25 VDC)
	Power consumption			<2 W

The gauge is protected against reversed polarity of the supply voltage.

For reasons of compatibility, the expression "sensor cable" is used for all BCG450 versions in this document, although the pressure reading of the gauges with fieldbus interface (BCG450-SD and BCG450-SP) is normally transmitted via the corresponding bus.

Electrical connector	D-Sub,15-pin, male
BCG450	→	19
BCG450-SD, -SP	→	20
Measuring cable	shielded, number of conductors de-
	pending on the functions used
Cable length (supply voltage 24 V 1))	(max. 15 conductors plus shielding)
Analog and fieldbus operation	≤35 m, conductor cross-section 0.25 mm²
	≤50 m, conductor cross-section 0.34 mm²
	≤100 m, conductor cross-section 1.0 mm²
RS232C operation	≤30 m
Gauge identification	42 kΩ resistor between Pin 10 and Pin 5
	(sensor cable)

1)Measured at sensor cable connector (consider the voltage drop as function of the sensor cable length).

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9

RS232C interface

DeviceNet interface (BCG450-SD)

Switching functions

BCG450

BCG450-SD, -SP

Adjustment range

Relay contact rating

Atmosphere switching function

BCG450

→ Atmosphere switching function 2 (setpoints A and B)

1×10-9 mbar … 100 mbar

Setpoints adjustable via potentiometers, one floating, normally open relay contact per setpoint (→ 20, 41)

(Adjusting the setpoints via field bus is described in the corresponding bus sections.)

≤60 VDC, ≤0.5 ADC

Atmospheric pressure threshold programmable via serial interfaces

(→ 30)

Atmospheric pressure threshold programmable via RS232

Relay contact rating BCG450-SD/SP

Floating, normally open relay contact "atmosphere pressure reached" available at the sensor cable connector

≤30 VAC/DC, ≤0.3 AC/DC

Atmospheric pressure threshold and relay function "atmosphere pressure reached" programmable via fieldbus interfaces (→ [1] or [2]).

Relay contact rating	≤60 VDC, 0.5 ADC (same as SP A/B)
Data rate	9600 Baud
Data format	binary
	8 data bits
	one stop bit
	no parity bit
	no handshake
Connections (sensor cable connector)
TxD (Transmit Data)	Pin 13
RxD (Receive Data)	Pin 14
Supply common (GND)	Pin	5
Function and communication protocol of the RS232C interface → 33
Fieldbus name	DeviceNet
Standard applied	→	[6]
Communication protocol, data format	→	[1], [4]
Interface, physical	CAN bus
Data rate (adjustable via "RATE"	125 kBaud
switch)	250 kBaud
	500 kBaud (default)
	"P" (125 kBaud, 250 kBaud, 500 kBaud
	programmable via DeviceNet
	(→	[1])
Node address (MAC ID)	0 … 63dec (default = 63dec)
(Adjustable via "ADDRESS", "MSD",	"P" (0 … 63 programmable via
"LSD" switches)	DeviceNet, →		[1])
DeviceNet connector	Micro-Style, 5-pin, male
Cable	Shielded, special DeviceNet cable,
	5 conductors (→		21 and	[4])
Cable length, system wiring	According to DeviceNet specifications
	(→	[6], [4])

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Profibus interface (BCG450-SP)

Materials used

Ambiance

Fieldbus name	Profibus
Standard applied	→	[7]
Communication protocol data format	→	[9], [7]
Interface, physical	RS485
Data rate	≤12 MBaud (→		[2])
Node address
Local
(Adjustable via hexadecimal
"ADDRESS", "MSD", "LSD"	00 … 7Dhex (0 … 125dec)
switches)
Default setting	5Chex
Via Profibus
(hexadecimal "ADDRESS" switches
set to >7dhex (>125dec))	00 … 7Dhex (0 … 125dec)
Profibus connection	D-Sub, 9-pin, female
Cable	Shielded, special Profibus cable
	(→	22 and	[5])
Cable length, system wiring	According to Profibus specifications
	(→	[7], [5])
Materials exposed to vacuum
Housing, supports, screens	stainless steel
Feedthroughs	NiFe, nickel plated
Insulator	glass
Cathode	iridium, yttrium oxide (Y2O3)
Cathode holder	molybdenum
Pirani element	tungsten, copper
Sensor diaphragm	ceramic (Al2O3)
Sensor contacts	SnAg
Internal volume	≈24 cm3
DN 25 ISO-KF
DN 40 CF-R	≈34 cm3
Pressure max.	5 bar (absolute)
Admissible temperatures
Storage	-20 … 70 °C
Operation	0 … 50 °C
Bakeout	+150 °C (at vacuum connection, without
	electronics unit, horizontally mounted
Relative humidity
(year's mean / during 60 days)	≤65 / 85% (no condensation)
Use	indoors only
	altitude up to 2000 m NN
Mounting orientation	any
Degree of protection	IP 30

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Dimensions [mm]

4-40UNC 2B

4-40UNC 2B

DN 25 ISO-KF

DN 40 CF-R

Gauges with DeviceNet connector are 14 mm longer.

Weight	353-550, 353-552, 353-561	≈
	353-551, 353-553	305 g
		≈
	353-554, 353-557, 353-562	565 g
		≈
	353-556, 353-558	445 g
		≈
		710 g

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3 Installation

3.1 Vacuum Connection

DANGER

DANGER: overpressure in the vacuum system >1 bar

Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized.

Do not open any clamps while the vacuum system is pressurized. Use the type of clamps which are suited to overpressure.

DANGER

DANGER: overpressure in the vacuum system >2.5 bar

KF flange connections with elastomer seals (e.g. O-rings) cannot withstand such pressures. Process media can thus leak and possibly damage your health.

Use O-rings provided with an outer centering ring.

DANGER

The gauge must be electrically connected to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection according to EN 61010:

•CF connections fulfill this requirement

For gauges with a KF vacuum connection, use a conductive metallic clamping ring.

Caution

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages.

Caution

Caution: dirt sensitive area

Touching the product or parts thereof with bare hands increases the desorption rate.

Always wear clean, lint-free gloves and use clean tools when working in this area.

The gauge may be mounted in any orientation. To keep condensates and particles from getting into the measuring chamber, preferably choose a horizontal to upright position. See dimensional drawing for space requirements (→ 12).

•The gauge is supplied with a built-in grid. For potentially contaminating applications and to protect the electrodes against light and fast charged particles, in-

stallation (→ 16) of the optional baffle is recommended (→ 50).

•The sensor can be baked at up to 80 °C (at vacuum connection, horizontally mounted). At temperatures exceeding 50 °C, the electronics unit has to be removed (→ 15).

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Procedure

Remove the protective lid.

The protective lid will be needed for maintenance..

Make the flange connection to the vacuum system

INFICON recommends to install the gauge without applying vacuum grease.

Seal with centering ring

or

Seal with centering ring and baffle (Option)

When installing the gauge, make sure that the area around the connector is accessible for the tools required for adjustment while the gauge is mounted (→ 41, 45).

When installing the gauge, allow for installing/deinstalling the connectors and accommodation of cable loops.

If you are using a gauge with display, make sure easy reading of the display is possible.

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3.1.1 Removing and Installing

the Electronics Unit

Required tools/material	• Allen key, AF 2.5
Removing the electronics unit	Unscrew the hexagon socket set screw (1) on the side of the electronics
	unit (2).
	2
	1

Remove the electronics unit without twisting it.

Installing the electronics unit

Place the electronics unit (2) on the sensor (3) (be careful to correctly align the pins and notch (4)).

4

2

3

Slide the electronics unit in to the mechanical stop and lock it with the hexagon socket set screw.

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3.1.2 Using the Optional Baffle	In severely contaminating processes and to protect measurement electrodes opti-
	cally against light and fast charged particles, replacement of the built-in grid by the
	optional baffle (→ 50) is recommended.
Requirement	The gauge is deinstalled (deinstallation gauge → 43).
Required tools / material	•	Baffle (→ 50)
	•	Pointed tweezers
	•	Pin (e.g. pencil)
	•	Screwdriver No 1

Installation

Carefully remove the grid with tweezers.

Carefully place the baffle onto the sensor opening.

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Deinstallation

3.2 Power Connection

3.2.1Use With INFICON VGC40x Vacuum Gauge Controller

Using a pin, press the baffle down in the center until it catches.

Carefully remove the baffle with the screwdriver.

If the gauge is used with an INFICON VGC40x controller, a corresponding sensor cable is required (→ [3]). The sensor cable permits supplying the gauge with power, transmitting measurement values and gauge statuses, and making parameter settings.

Caution

Caution: data transmission errors

The attempt to operate a fieldbus gauge (BCG450-SD / -SP) with the VGC40x Vacuum Gauge Controller (RS232C) causes data transmission errors.

Fieldbus gauges must not be operated with an INFICON VGC40x controller.

Required material

• Sensor cable (→

[3], INFICON sales literature)

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17

Procedure

3.2.2Use With Other Controllers

3.2.2.1Making an Individual Sensor Cable

Cable type

Procedure

Plug the sensor connector into the gauge and secure it with the locking screws.

Connect the other end of the sensor cable to the INFICON controller and secure it.

The gauge can now be operated with the VGC40x controller.

The gauge can also be operated with other controllers.

Especially the fieldbus versions BCG450-SD (DeviceNet) and BCG450-SP (Profibus) are usually operated as part of a network, controlled by a master or bus controller. In such cases, the control system has to be operated with the appropriate software and communication protocol.

For reasons of compatibility, the expression "sensor cable" is used for all BCG450 versions in this document, although the pressure reading of the gauges with fieldbus interface (BCG450-SD or BCG450-SP) is normally transmitted via DeviceNet or Profibus.

The sensor cable is required for supplying all BCG450 types with power. It also permits access to the relay contacts of the switching functions (→ 20).

The application and length of the sensor cable have to be considered when determining the number and cross sections of the conductors (→ 9).

Open the cable connector (D-Sub, 15-pin, female).

Prepare the cable and solder/crimp it to the connector as indicated in the diagram of the gauge used:

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