INFICON UL5000 User Manual

TECHNICAL HANDBOOK

iina74e1-h (1408) Translation of the original handbook

Catalog-No.

550-500A,
550-501A

UL5000

Helium Leak Detector

from software version

V 5.14

Table of contents

1 General Information 6

1.1 Notes on the Use of this Handbook 6

1.1.1 Safety Symbols 6

1.1.2 Indications 7

1.1.3 Symbols of Vacuum Technology 7

1.1.4 Definition of Terms 7

1.2 Support from INFICON Service 9

1.2.1 Service Centers 10

1.3 Introduction 12

1.3.1 Purpose 12

1.3.2 Technical Data 13

1.3.2.1 Physical Data 13

1.3.2.2 Electrical Data 14

1.3.2.3 Other Data 14

1.3.2.4 Ambient Conditions 14

1.4 Unpacking 14

1.4.1 Supplied Equipment 15

1.4.2 Accessories and Options 16

1.4.2.1 Sniffer line SL200 16

1.4.2.2 Toolbox 16

1.4.2.3 Helium Bottle Holder 16

1.4.2.4 ESD Mat 16

1.4.2.5 RC1000 Remote control 17

2 Installation 18

2.1 Transportation 18

2.2 Working Location 20

2.3 Electrical Connections 21

2.3.1 Mains Power 21

2.3.2 Connections for the Data Acquisition Systems 23

2.3.2.1 Accessories 24

2.3.2.2 Digital Out 24

2.3.2.3 Digital In 25

2.3.2.4 Recorder 26

2.3.2.5 RS232 26

2.3.2.6 Remote Control RC1000 / Wireless Transmitter 26

2.4 Vacuum Connections 27

2.4.1 Inlet Port 27

2.4.2 Exhaust 27

2.4.3 Vent 27

2.4.4 Purge 27

2.5 Default parameters 28

3 First Operation Check 29

3.1 Needed Equipment 29

3.2 Description of the Initial Operation 29

iina74e 0.fm technical handbook(1408)

2 Table of contents

3.2.1 Startup and Measure 29

3.2.2 Internal Calibration 32

3.2.3 Verification 32

4 Description and Working Principle 33

4.1 Introduction 33

4.2 Components of the UL5000 33

4.2.1 Vacuum System 33

4.2.2 Control Panel 35

4.2.2.1 LC Display 35

4.2.2.2 START Button 35

4.2.2.3 STOP Button 36

4.2.2.4 ZERO Button 36

4.2.2.5 MENU Button 37

4.2.2.6 Soft Keys 37

4.2.2.7 Numerical Entries 38

4.3 Working Modes 39

4.3.1 Vacuum Mode 39

4.3.2 Sniffer Mode 40

5 Operation of the UL5000 41

5.1 Display 41

5.2 The Screen in Run-Up Mode 41

5.3 Display in stand-by mode 41

5.3.1 Purging 42

5.4 The Screen in Measurement Mode 42

5.4.1 Call for Calibration 42

5.4.2 Speaker Volume 43

5.4.3 Status Line in the Display 43

5.4.4 Numerical Display Mode 44

5.4.5 Trend Mode 44

5.4.6 HYDRO•S on / off 44

6 Description of the Menu 45

6.1 Main Menu 45

6.2 View 47

6.2.1 Scale linear/logarithmic 47

6.2.2 Display-range auto/manual 48

6.2.3 Time axis 48

6.2.4 Contrast 49

6.2.5 Background in Stand-by 49

6.2.6 Decimal places 50

6.2.7 Lower display limit 50

6.3 Mode 51

6.4 Trigger & Alarms 52

6.4.1 Trigger Level 1 52

6.4.2 Trigger Level 2 53

iina74e 0.fm technical handbook(1408)

6.4.3 Volume 53

6.4.4 Units 54

Table of contents 3

6.4.5 Alarm delay 54

6.4.6 Audio alarm type 55

6.4.6.1 Pinpoint 55

6.4.6.2 Leak rate prop. 55

6.4.6.3 Setpoint 56

6.4.6.4 Trigger alarm 56

6.5 Calibration 56

6.6 Settings 57

6.6.1 Vacuum settings 58

6.6.1.1 Automatic purge 58

6.6.1.2 Vent delay 59

6.6.1.3 Vacuum ranges 59

6.6.1.4 HYDRO•S 60

6.6.1.5 Leak rate internal test leak 60

6.6.1.6 Machine factor 61

6.6.1.7 Booster TMP mode 61

6.6.2 Zero & Background 61

6.6.2.1 Background Suppression 62

6.6.2.2 Calculate Inlet Area Background 62

6.6.2.3 Zero 63

6.6.3 Mass 63

6.6.4 Interfaces 64

6.6.4.1 Control Location 64

6.6.4.2 Recorder output 65

6.6.4.3 RS232 Protocol 66

6.6.4.4 Scaling Recorder Output 67

6.6.5 Miscellaneous 68

6.6.5.1 Time&Date 68

6.6.5.2 Language 68

6.6.5.3 Leak rate filter 69

6.6.5.4 Mains Frequency 69

6.6.5.5 Service interval exhaust filter 69

6.6.5.6 Service message exhaust filter 70

6.6.6 Parameter save / load 70

6.6.6.1 Save parameter set 71

6.6.6.2 Load parameter set 71

6.6.7 Monitoring functions 71

6.7 Information 74

6.7.1 Service 74

6.8 Access Control 75

6.8.1 Access to CAL function 75

6.8.2 Access to Trigger&Alarme menu 76

6.8.3 Change Device PIN 76

6.8.4 Change Menu-PIN 76

4 Table of contents

7 Calibration 77

7.1 Introduction 77

7.2 The calibration routines 77

7.2.1 Internal Calibration 78

7.2.1.1 Automatic Internal Calibration 78

iina74e 0.fm technical handbook(1408)

7.2.1.2 Manual Internal Calibration 78

7.2.2 External Calibration 78

7.3 Factor of Calibration - Range of Values 81

8 Error And Warning Messages 82

8.1 Hints 82

8.2 List of Errors & Warnings 83

9 Maintenance works 88

9.1 Hints 88

9.2 INFICON Service 89

9.3 Key for Maintenance Schedule 89

9.4 Maintenance Plan 90

9.5 Maintenance groups 91

9.5.1 1500 hours maintenance 91

9.5.2 4000 hours maintenance 92

9.5.3 8000 hours maintenance 93

9.5.4 16000 hours maintenance 94

9.6 Description of the maintenance work 95

9.6.1 Opening the UL5000 95

9.7 Check/Replace the filter cell 96

9.8 Replacing the Exhaust Silencer 98

9.9 Turbomolecular pump TMH 071 99

9.10 Scroll Pump 99

Appendix 100
Declaration of Conformity 102

iina74e 0.fm technical handbook(1408)

Table of contents 5

1 General Information

Caution

Warning

STO P

Danger

Skilled personnel

Notice: We recommend that you carefully read this technical handbook to ensure

optimum operating conditions right from the start.

This technical handbook contains important informations on the functions, insta l­lation, start-up and operation of the UL5000.

General

We reserve the right to modify the design and the specified data. The illustrations are
not binding.

1.1 Notes on the Use of this Handbook

1.1.1 Safety Symbols

Important remarks concerning operational safety and protection are emphasised as
follows:

Information on correct handling or use. Disregard can lead to malfunctions or minor
equipment damage.

Information on preventing extensive equipment and environmental damage.

Information on preventing any kind of physic al injury.

Indicates procedures that must be performed by skilled personnel only.

iina74e 01.fm technical handbook(1408)

6 General Information

1.1.2 Indications

Tipp Information on helpful procedures.

Notice: Information on special technical requirements that the user must comply

with.

The references to diagrams consists of the Chapter number, figure number and the
item number in this order. For example: Fig. 2-4/7 refers to item 7 in the figure 4 of
Chapter 2.

1.1.3 Symbols of Vacuum Technology

Given in the following are some important vacuum symbols which are used in this
manual.

Vacuum pump in general

Turbomolecular pump

Pressure gauge

1.1.4 Definition of Terms

Autoranging

The range of the preamplifier and the vacuum ranges are selected automatically.
The autoranging feature of the UL5000 covers the entire range or leak rates

depending on the selected operating mode. Not only the leak rate signal, but also the
pressure in the test sample (inlet pressure P1) and the fore vacuum pressure (P2)
are used for control purposes. Range switching between the main ranges is
performed via valves. Fine range switching within the main ranges is implemented
by switching over the gain factor of the preamplifier.

Autotune Mass alignment

This function automatically aligns the mass spectrometer so that a maximum leak
rate is displayed. The control processor changes the voltage which erates the ions
in the selected mass range until a maximum ion current is detected by the ion
detector. During each calibration the mass alignment is run automatically.

Valve

iina74e 01.fm technical handbook(1408)

General Information 7

Auto zero

Determination and automatic adaptation of the helium background.
Through this function, the internal zero level of the instrument is determined which is

then subtracted from the current leak rate signal. This function is run during the cali­bration process or when operating the start pushbutton, provided the UL5000 has
been running previously for at least 20 seconds in the standby or vent mode. If the
helium background previously suppressed shoul d drop so that for the du ration of the
zero time only the display limit will be displayed, the zero level is adapted automati­cally.

Menu

The menu allows the user to program the UL5000 according to his requirements. The
menu has a tree architecture.

Default

Status of the UL5000 when supplied by the factory.

GROSS

GROSS is a measurement mode which allows high inlet pressure (1 to 15 mbar).
The smallest detectable leak rate is 1×10

-6

mbar l/s.

FINE

FINE is the medium measurement mode with inlet pressure between 2 and 0 ,4 mbar.
Detection limit is 1×10

-10

mbar l/s.

ULTRA

ULTRA is the most sensitive measuring range with inlet pressures below 0,4 mbar.
The minimum detectable leak rate is < 5×10

-12

mbar l/s.

Foreline pressure

Pressure in the foreline between Turbo pump and scroll pump.

Minimum detectable leak rate

The smallest leak rate the UL5000 is able to detect ( 5E-12 mbar l/s).

Internal helium background

The existing helium partial pressure in the measurement system. The level of the
internal helium background is measured in the Stand-by mode and subtracted fr om
the measured signal.

Measure Measurement mode

The UL5000 measures the leak rate of the test sample.

8 General Information

iina74e 01.fm technical handbook(1408)

1.2 Support from INFICON Service

INFICON GmbH

Bonner Str. 498,50968 Cologne, Germany
Tel: [phone] Fax: [phone]

m

zisa01e1-a

Declaration of Contamination

Legally binding declaration:

I/we hereby declare that the information on this form is complete and accurate and that I/we will assume any further costs that may
arise. The contaminated product will be dispatched in accordance with the applicable regulations.

Organization/company

Address Post code, place

Phone Fax

Email

Name

Date and legally binding signature Company stamp

1) or not containing any amount
of hazardous residues that
exceed the permissible ex­ posure limits

Process related contamination of product:

toxic no 1) yes



caustic no 1) yes



biological hazard no yes 2)

explosive no yes  2)

radioactive no yes 2)

other harmful substances no1) yes



The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has
been submitted. Non-completion will result in delay.
This declaration may only be completed (in block letters) and signed by authorized and qualified staff.

Copies:
Original for addressee - 1 copy for accompanying documents - 1 copy for file of sender

Harmful substances, gases and/or by-products

Please list all substances, gases, and by-products which the product may have come into contact with:

Trade/product name

Chemical name
(or symbol)

Precautions associated
with substance

Action if human contact

Description of product

Type
Article Number
Serial Number

Reason for return

Operating fluid(s) used (Must be drained before shipping.)

The product is free of any sub­stances which are damaging to
health yes



This form can be downloaded
from our website.

2) Products thus contam i­ nated will not be ac­ cepted without written
evidence of decontami­ nation!

If an instrument is returned to INFICON or an authorised representative of INFICON,
please indicate whether the instrument is free of substances damaging to health or
whether it is contaminated. If it is contaminated also indicate the nature of the hazard.
INFICON must return any appliances without a Declaration of Contamination to the
sender’s address. A form for stating details as to the type of contamination is repro­duced in Fig. 1-1.

A maintenance and service contract is recommended.

iina74e 01.fm technical handbook(1408)

www.inficon.com [e-mail]

Fig. 1-1: Declaration of Contamina tion form

General Information 9

1.2.1 Service Centers

In case you urgently need assistance please get in touc h with the loca l IN FICON
Service in your country or the service hotline in Cologne, Germany:

Algeria [e-mail] Finland [e-mail]
Agramkow
Sonderborg
Belarus [e-mail] France [e-mail]
INFICON GmbH
Cologne
Belgium [e-mail] Germany [e-mail]
INFICON GmbH
Cologne
Brazil [e-mail] Hungary [e-mail]
PV Pest Vácuo Ltda.
Santa de Parnaíba
Bulgaria [e-mail] India [e-mail]
INFICON GmbH
Cologne
Canada [e-mail] Ireland [e-mail]
Vacuum Products Canada Ltd.
Ontario
Central America [e-mail] Italy [e-mail]
MEISA S.a. de C.V.
Querètaro
China [e-mail] Israel [e-mail]
INFICON LTD
Hong Kong
INFICON LTD
Beijing
INFICON LTD
Guangzhou
INFICON LTD
Shanghai
Czech Republic [e-mail] Korea [e-mail]
INFICON GmbH
Pilsen
Denmark [e-mail] INFICON Ltd.

Agramkow
Sonderborg
Egypt [e-mail] Latvia [e-mail]
Agramkow
Sonderborg
Estonia [e-mail] Lithuania [e-mail]
INFICON GmbH
Cologne

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]
Phone: [phone]
Fax: [phone]
Phone: [phone]
Fax: [phone]
Phone: [phone]
Fax: [phone]

Phone [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Agramkow
Sonderborg

OLV France
Orsay

INFICON GmbH
Cologne

Kontrade
Budaörs

Dashpute
400 064

INFICON
Blackburn

INFICON GmbH
Castelnuovo

Mark Technologies Ltd.
Kiriat Ono
Japan [e-mail]

INFICON Co. Ltd.
Yokohama

INFICON Ltd.
Sungnam city

Suwon City
INFICON Ltd.
Cheonan City

INFICON GmbH
Cologne

INFICON GmbH
Cologne

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]
Phone: [phone]
Fax: [phone]
Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

iina74e 01.fm technical handbook(1408)

10 General Information

Mexico [e-mail] Spain [e-mail]
MEISA S.a. de C.V.
Querètaro

Phone: [phone]
Fax: [phone]

Leybold Optics Ibérica
Barcelona

Phone: [phone]

Fax: [phone]
Netherlands [e-mail] Sweden [e-mail]
INFICON GmbH
Cologne

Phone: [phone]
Fax: [phone]

Agramkow
Sonderborg

Phone: [phone]

Fax: [phone]
Norway [e-mail] Syria [e-mail]
Agramkow
Sonderborg

Phone: [phone]
Fax: [phone]

INFICON GmbH
Cologne

Phone: [phone]

Fax: [phone]
Poland [e-mail] Taiwan [e-mail]
VAK-POL & GAZ Sp. zo.o
Pulawy

Phone: [phone]
Fax: [phone]

INFICON Company Limited
Chupei City, HsinChu Hsien

Phone: [phone]

Fax: [phone]
Portugal [e-mail] Tunisia [e-mail]
INFICON GmbH
Cologne

Phone: [phone]
Fax: [phone]

INFICON GmbH
Cologne

Phone: [phone]

Fax: [phone]
Republic of South Africa [e-mail] Turkey [e-mail]
Vacuquip
Randburg

Phone: [phone] Agramkow

Sonderborg

Phone: [phone]

Fax: [phone]
Russia [e-mail] Ukraine [e-mail]
INFICON GmbH
Cologne

Phone: [phone]
Fax: [phone]

INFICON GmbH
Cologne

Phone: [phone]

Fax: [phone]
Singapore [e-mail] United Kingdom [e-mail]
INFICON PTE LTD.
Singapur

Phone: [phone]
Fax: [phone]

INFICON
Blackburn

Phone: [phone]

Fax: [phone]
Slovakia [e-mail] United Arab Emirates [e-mail]
INFICON GmbH
Pilsen

Phone [phone]
Fax: [phone]

INFICON GmbH
Cologne

Phone: [phone]

Fax: [phone]
Slovenia [e-mail] USA [e-mail]
Medivac
Ljubljani
South America except Brazil [e-mail] Inficon Inc.

MEISA S.a. de C.V.
Querètaro

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Inficon Inc.
East Syracuse, NY

San Jose, CA
Inficon Inc.
Austin, TX

Phone: [phone]

Fax: [phone]

Phone: [phone]

Fax: [phone]

Phone: [phone]

Fax: [phone]

iina74e 01.fm technical handbook(1408)

General Information 11

1.3 Introduction

STO P

Danger

STO P

Danger

Caution

1.3.1 Purpose

The UL5000 is a helium leak detector. This instrument may be used to detect the
location and the size of leaks on objects under test in two different ways:

• when the test sample has been evacuated first and is spraye d with helium on the

or

• when a helium overpressure is provided in the test sample and the test sample is

Caution: Danger of explosion:
Hydrogen forms a highly explosive gas mixture with air.
Great caution is necessary when using hydrogen! No smoking, no naked flames,
avoid sparks.

outside. It is required that a vacuum connection is provided between the UL5000
and the test sample (vacuum mode).

searched from the outside with a sniffer probe which is attached to the inlet port
(sniffer mode).

Dangerous gases pollute the machine.
So you must not use the machine for detecting toxical, acidly, microbiological,
explosive, radioactive or other noxious matters.

If you plan to detect noxious matters please contact the manufacturer. Rules for
decontamination will be developed then. If the leak detector already has been in
contact with dangerous gases please fill the declaration of contamination and sent it
back with the leak detector to INFICON.

When there are parts that have to be cleaned, please fill the declaration of deconta­mination, too, and send it to INFICON before you send the parts.

The UL5000 is to be used for leak detection only. It must not be used as a pumping
system (esp. pumping aggressive or humid gases.)

12 General Information

iina74e 01.fm technical handbook(1408)

1.3.2 Technical Data

Caution

1.3.2.1 Physical Data

Max. inlet pressure 15 mbar
Minimum detectable Helium leak rates

• in vacuum mode (ULTRA) 5×10

• in sniffer mode < 5×10
Maximum Helium leak rate which can be displayed 0.1 mbar l/s
Measurement range 12 decades
Time constant of the leak rate signal (blanked off,

63% of the final value)
Roughing capability 25 m

Pumping speed (Helium) at the inlet (EN 1518) 30m³/h, 21.1 cfm

• in vacuum mode

Detectable masses 2, 3 and 4
Mass spectrometer 180°

Ion source 2 filaments;

Inlet port DN 40 KF
Run-up time (after starting)  4min

following CAUTION)

<1 s

(50 Hz)

60 Hz

– GROSS mode 8 l/s
– FINE mode 20 l/s
– ULTRA mode >20 l/s

magnetic sector field

Iridium/Yttriumoxide

-12

mbar l/s (see

-8

mbar l/s

3

/h, 17.6 cfm

To get down to the minimum detected leak rate range some conditions must be
fulfilled:

• UL5000 has fully warmed up

• Ambient conditions must be stable (temperature, no vibration/
accelerations.)

• The part under test has been evacuated long enough (background
is no longer decreasing)

• ZERO must be active

iina74e 01.fm technical handbook(1408)

General Information 13

1.3.2.2 Electrical Data

1.3.2.3 Other Data

Power supply, single phase (model dependent)
Part no. 550 - 500A 230 V 50 Hz
Part no. 550 - 501A 115 V 60 Hz
Power consumption 1200 VA
Type of protection IP20
Power cords (EU, USA, UK) 3 m

Valves solenoid
Dimensions (L × W × H) incl. handle in mm 1068 × 525 × 1083
Dimensions (L × W × H) incl. handle in inches 42 × 21 × 43
Weight in kg 140
Weight in lbs 308
Noise level dB (A) < 70
Noise level dB (A) 0.5 m distance 55.9
Audio alarm dB (A) 90
Contamination level (to IEC 60664-1) 2
Overvoltage category (to IEC 60664-1) II

1.3.2.4 Ambient Conditions

For use within buildings
Permissible ambient temperatur e (d ur in g op er at ion) +10 °C … +40 °C
Permissible storage temperature 0 °C … +60 °C
Max. rel. humidity 80% non cond en sin g
Max. permissible height above sea level (during operation) 2000 m

1.4 Unpacking

Unpack the UL5000 immediately after delivery, even if it will be installed later on.
Examine the shipping container for any external damage. Completely remove the

packaging materials.
Check the UL5000 is complete (1.4.1 Supplied Equipment) and carefully examine

the UL5000 visually.
If any damage is discovered, report it immediately to the forwarding agent and

insurer. If the damaged part has to be replaced, please contact the orders
department.

Tipp Retain the packaging materials in the event of complaints about damage.
Tipp For unpacking please use the wedge which is part of the packaging.

14 General Information

iina74e 01.fm technical handbook(1408)

1.4.1 Supplied Equipment

• Helium Leak Detector UL5000

• Exhaust filter (mounted)

• Exhaust hose adapter with clamps (see arrow 1)

• power cord fixture (see arrow 2)

• Set of fuses (see arrow 3)

• Set of tools (see arrow 4)

• Bellow Clips (2 + 2) (see arrow 5)

• Folder with documents

– Technical Handbook UL5000
– Spare Parts List UL5000

• hooks to wrap power cord (with screws) (see arrow 6)

• Tool to open the UL5000 (see arrow 7)

• O-Ring with filter (for use at applications with particles)

• Tool box (detachable)

• ESD mat

iina74e 01.fm technical handbook(1408)

Fig. 1-2 Accessories

General Information 15

1.4.2 Accessories and Options

The following parts can be ordered additionally:

• Sniffer Line SL200 14005

• Adapter 40 / 25KF (required to connect SL200) 211-283

• Tool Box (detachable) 551-000

• Helium Bottle Holder 551-001

• ESD Mat 551-002

• Remote control in two versions:

• Spray gun with hose 16555

• Set of plugs 20099024

• Leak Ware (software package) 14090

1.4.2.1 Sniffer line SL200

By use of the sniffer line the UL5000 can easily be converted to a sniffer leak
detector. The length of the sniffer line is 4m (i.e. 12 feet).

1.4.2.2 Toolbox

The toolbox is a detachable compartment with a lockable lid. Fittings and small
fixtures can be stored plus the hand set (See Chapter 1.4.2.5). The storage volume
is approximately 5 l.

The toolbox is placed on the working surface and jammed by the handle.

– RC1000C wired
– RC1000WL wireless

Extension Cable, 10 m

551-010
551-015

14022

1.4.2.3 Helium Bottle Holder

The helium bottle holder allows you to carry a helium re servoir and a sp ray gun with
the UL5000. Only small and midsize bottles (max 10 l, 200 bar) will fit without influ­encing the stability of the UL5000.

1.4.2.4 ESD Mat

This mat is put on the working surface of the UL5000 and is cla mped a nd grou nded
by the inlet port ring. It avoids electrical discharges between the working surface and
sensitive test parts.

16 General Information

iina74e 01.fm technical handbook(1408)

1.4.2.5 RC1000 Remote control

The RC1000 is a wireless remote control that allows to operate the UL5000 from
distance up to 100 m. It provides the functions START, STOP/VENT, ZERO and
speaker volume, and displays leak rate in bargaraph or in chart mode. (see also
Technical Handbook RC1000.)

Measured values can be stored in an internal memory for up to 24 hours of recording
time. The data can easily be downloaded to a USB stick to save it.

An internal trigger can be set to provide a warning if the limit leak rates are exceeded.
An optical warning is shown on the display and an acoustic warning signal is
sounded on the integrated loudspeaker or the connected headphones.

The RC1000 remote control is housed in a robust housing to enable ergonomic
working. Magnets on the underside of the unit enable it to be attached to horizontal
or vertical metal surfaces.

The RC1000 also enables remote operation of the le ak test device in question using
a connection cable of up to 28 metres in length.

Fig. 1-3 RC1000WL wireless remote control

iina74e 01.fm technical handbook(1408)

General Information 17

2Installation

Caution

Caution

Caution

Caution

Caution

2.1 Transportation

The UL5000 is not equipped with any crane eyes and must therefore not be
transported using lifting equipment.

The UL5000 must only be pushed along u sing the handle provided for this purpose.
Don’t use the handle to lift.

Your feet can be pinched.
Keep your feet away from the rollers. .

Your feet can be run over.
Do not pull the unit, push it.

When transporting over longer distances the or iginal packaging must be u sed. The
castors must not be fixed when the UL5000 is shipped in a crate.

UL5000 with Triscroll TS 620

For transportation the chassis plate where the pump is mounted on has to be
secured by a transportation fixing.

This transportation fixing consists of 2 screws at ch assis of the UL5000 (one on each
side).

To get access to these screws remove the side covers of the UL5000.
There are orange labels on the bottom part pointing to the screws:

iina74e 02.fm technical handbook(1408)

18 Installation

Fig. 2-1
For transportation fixing the screws are tightened to the chassis plate. For operation

of the UL5000 the screws should be loosened.
To loosen the screws first loosen the counter nut that is accessible from underneath:

Fig. 2-2
Loosen the screws approximately 10 mm above the chass i s plat e an f tigh te n then

iina74e 02.fm technical handbook(1408)

the counter nuts again:

Installation 19

Fig. 2-3

Warning

Caution

Caution

Caution

For transportation tighten the screws again and fix them by the counter nuts.

2.2 Working Location

Move the UL5000 to the desired position and arrest the castors.

The UL5000 is designed for indoor use only.

Ensure a sufficient air cooling. The air inlet as well as the air discharge openings
must never be obstructed.

20 Installation

The UL5000 can be locked by arresting the castors of the front wheels to avoid
movements on skewness.

Make sure that you can always reach the mains plug.

iina74e 02.fm technical handbook(1408)

STO P

Danger

Caution: Exhaust gases and fumes:

STO P

Danger

Warning

Exhaust gases and fumes from oil-sealed pumps may be harmful to health.
For operation in poorly ventilated rooms, an exhaust pipe should be connected to
exhaust connection 5 depending on the application and gases used.

It is recommended that you check all major helium sources in the vicinity of the
UL5000 within a radius of about 10 m for the presence of any big leaks. You may use
the sniffer probe for this.

2.3 Electrical Connections

2.3.1 Mains Power

Notice: Generally the local regulations for electrical connections m ust be observed.

Caution: mains voltage:
Improperly grounded or fused products can lead to fatal injuries.
The product must be connected in accordance with local regulations and properly
grounded. Interruption of the ground conducto r within or outside of the device is not
permitted!
Only fuses of the specified type and rating are to be used as replacements.

Before connecting the UL5000 to the mains you must make sure that the mains
voltage rating of the UL5000 coincides with the locally available mains voltage. The
instrument must exclusively be connected to a single phase supply with fuses for
installation (Circuit breaker 16A max. according to IEC/EN 60898 with tripping
characteristic B).

The mains voltage rating for the UL5000 can be read off from the name plate beneath
the mains socket Fig. 2-6/7 at the back side. This voltage is fixed and can not be
changed.

A separate fuse for each of the mains conductors has been integrated into the main s
switch.

The mains voltage is applied to the instrument via the detachable mains cable which
is supplied with the instrument. A mains socket Fig. 2-6/7 is available for th is purpose
at the back side of the instrument.

iina74e 02.fm technical handbook(1408)

Installation 21

STO P

Danger

Only 3-core mains cables having a protection ground conductor must be used.
Operation of the UL5000 where the ground conductor has been left unconnected is
not permissible.

Tipp The power cord can be secured against coming out by using the power

cord fixture as shown:

Fig. 2-4. secure fixture power cord

22 Installation

Fig. 2-5. storing power cord

iina74e 02.fm technical handbook(1408)

2.3.2 Connections for the Data Acquisition Systems

Caution

Caution

1. Accessories

2. Digital Out

3. Digital In

4. Recorder

5. RS232

6. Remote Control RC1000 / Wireless

Transmitter

7. Mains Socket

8. Mains Switch

9. Hole to mount cable hooks.

10. Speaker

11. Vent

12. Purge

Fig. 2-6 Connections

Tipp The sockets: Accessories, Digital Out, Digital In and Recorder have pin 1

on top. The pin numbers are counted downwards. The socket 2 and 3 are
coded mechanically to avoid a confusion with the counter plug. For the
connection with the counter plug (set of plugs 20099024) remove the
plastic pins at the plug, accordingly the plug fits the socket.

Notice: The connections for external devices are safely separated from the mains

and safe low voltage.

The electronic of the device can be destroyed. So just connect de vices to the le ak
detector that are separated from the mains.

Only connect devices that don’t exceed 25V AC/1A

iina74e 02.fm technical handbook(1408)

Installation 23

2.3.2.1 Accessories

2.3.2.2 Digital Out

The following accessories may be connected to this port Fig. 2-6/1:

• external venting valve

• sniffer probe
Contact pins 1 and 3 are fused with a 0.8 A slow-blow fuse. The amount of power

which can be drawn is limited to 10 W. The contacts are numbered from top to
bottom.

Pin Assignment
1
2 GND24

3, 6 Input
4, 5, 7, 8 Output

+24 V, constantly applied, power supply for
the INFICON partial flow valve or sniffer line.

The following relay outputs are available for further signal processing. The maximum
rating for the relay contacts is 25V AC/1A.

Pin Assignment
1 +24V, bridged with pin 1

of socket „Digital In“
2 GND_24V 10 Error
3 Trigger 1 11 Warning
4 Trigger 2 12 Purge
5 Reserved 13 Measure
6 Zero active 14 Recorder Strobe
7 Ready 15 Common dig. out
8 CAL active 16 Reserved

Pin Assignment

9 CAL request

Description of the operation mode of the Digital Out.
Trigger 1:

Is open in case Trigger Level 1 is exceeded or the machine is not in condition of
measuring.

Trigger 2:
Is open in case Trigger Level 2 is exceeded or the machine is not in condition of
measuring.

Zero active:
Is closed in case Zero function is running.

Ready:
Is closed in case machine is ready for measurement (Emission on, no error).

CAL active

Closed when machine is in calibrating routine.

CAL Request

Is opened in case of calibration request. During external calibration an open output
indicates that the external calibrated leak has to be closed.

Error

Open when an error is shown.

24 Installation

Warning

Open when a warning is shown.

iina74e 02.fm technical handbook(1408)

2.3.2.3 Digital In

Purge

Closed when purge is active.

Measure

Closed in case a machine is in measure mode.

Recorder Strobe

Closed in case recorder output is invalid. Only used when record output is set on
„leak rate“.

These inputs can be used to control the UL5000 with a programmable logic control
(PLC).

Pin Assignment
1 +24V, bridged with pin 1

of socket „Digital Out“
2 GND_24V 9 Reserved
3 Start 10 Reserved
4 Stop 11 Common dig
5 Zero 15 Reserved
6 CAL 16 Reserved
7 Clear

Pin Assignment

8Purge

Description of operation mode of the Digital In.
Zero:

Change from low to high: activate zero
Change from high to low: deactivate zero

Start:
Change from low to high: activate START

Stop:
Change from low to high: activate STOP
Additionally the inlet is vented, when this input is longer high than the specified vent
delay.

Purge:
Change from low to high: activate purge
Change from high to low: deactivate purge

Clear:
Change from low to high: confirm error message

CAL:
Change from low to high:
When machine is in stand-by mode: start internal calibration. In case machine is
measurement mode: start external calibration. (Premise: external calibration test
leak has to be open and leak rate signal is stable)
Change from high to low:
External calibration: approve that external test leak is closed and leak rate signal is
stable.
High means: U > 13 V( ap pro xim at ely 7m A)
Low means: U < 7 V
The level of the logic signals must not exceed 35V.

iina74e 02.fm technical handbook(1408)

Notice: Signals at these inputs are only accepted if the location of control is set to

„PLC“ or „Local and PLC“. 6.6.4.2

Installation 25

2.3.2.4 Recorder

The recorder output Fig. 2-6/4 may be used to log the leak rate, the inlet pressure
and the forevacuum pressure.

The measured values are provided by way of an analogue signal in the range of 0 V
… 10 V. The resolution is limited to 10 mV. The instrument which is connected to the
recorder output (e. g. X(t) chart recorder) should have an input re sistance of no less
than 2.5 k. The measured values are available through pins 1 and 4. The reference
potential (GND) is available at pins 2 and 3. The contacts are numbered from top to
bottom.

Tipp A diagramm showing pressures and leakrate versus voltage is attached in

the appendix.

Notice: The chart recorder outputs are electrically isolated from other plugs. If, in

spite of this, hum interference is apparent it is recommended to operate the
UL5000 and the chart recorder from the same mains phase. If this is not
possible, you must make sure that the frame ground of both instruments
is kept at the same potential.

Pin Assignment
1 Analog 1
2GND
3GND
4 Analog 2

2.3.2.5 RS232

This RS232 C interface Fig. 2-6/5 is wired as data communication equipment (DCE)
and permits the connection of a personal computer (PC) for monitoring and data
logging. The connection is made through a 9 pin sub-D socket.

Pin Assignment
2RXD
3TXD
5GND
7RTS
8CTS

2.3.2.6 Remote Control RC1000 / Wireless Transmitter

This Remote Control interface Fig. 2-6/6 is a serial interface to control the UL5000
by the RC1000. The RC1000 Remote Control can be connected via the wireless
transmitter or via an extension cable with a RJ45 plug. Refer to the RC1000
Technical Handbook for more information.

Pin Assignment
2 +24V (fuse 0.8 A time lag)
30V
4 RXD (intern. RS232)
5 TXD (intern. RS232)

26 Installation

iina74e 02.fm technical handbook(1408)

2.4 Vacuum Connections

Warning

Warning

2.4.1 Inlet Port

The inlet port is located on the top of the UL5000. The size of the flange is DN 25 KF.

Risk of injury due to sucking connection flange (inlet port).
If the Vacuum-Mode of the UL5000 is activated, the connection flange may suck
bodily parts around the connection flange.
Keep bodily parts off the connection flange.

A test object or a test chamber has to be connected to the inlet port if the vacuum
mode is chosen (Refer to Chapter 6.3).

The inlet port is also used for the connection of the sniffer line.

2.4.2 Exhaust

The exhaust Fig. 2-6/12 flange is located underneath the UL5000 at the back side.
The size of the flange is DN 16 KF.

When shipped only the exhaust filter body is preassembled. The filter cartridge is
supplied together with the leak detector and can be installed at the exhaust.

Instead of this an exhaust line can be connected to the exhaust by the exhaust
adapter.

Depending on the chamber the UL5000 is attached to and the gas inside the
chamber lethal gases can be spoiled into the air through the exhaust.

2.4.3 Vent

Usually the parts under test are vented with ambient air when the test is finished. If
it is required the parts can be vented with a different gas (i. e. fresh air, dry air,
nitrogen, …) at max. 1050 mbar pressure. In this case a vent hose has to be
connected to the hose coupling Fig. 2-6/10.

2.4.4 Purge

For purge modes it is recommended to use Helium-free gases at atmospheric
pressure. Ambient air can be contaminated with Helium due to
In this case a gas supply line (i. e. nitrogen, fresh air, …) should be connected to the
hose coupling Fig. 2-6/11. The pressure of these gas line must not exceed

1050 mbar.

iina74e 02.fm technical handbook(1408)

The connector 10 and 11 in Fig. 2-6 are quick connectors for hose diameters of 8/
6mm.

spraying o r charging.

Installation 27

2.5 Default parameters

The following parameters are set like shown when in the menu of the UL 5000 under
Settings  Parameters saveload, „load default values“ is chosen.

Auto-scaling: On
Scaling logarithmic
Display range: 4 decades
Time axis: 32 seconds
LCD invers: OFF
Background in stand by mode: OFF
Automatic calibration request: OFF
Mass: 4 (helium)
Recorder Output: leak rate
Volume: 2
Zero time: 5 seconds
Leak rate unit: mbar l/s
Mode: Vacuum with

Trigger level 1: 1×10
Trigger level 2: 1×10
Leak rate external test leak (Vacuum): 1×10
Leak rate external test leak (Sniffer): 1×10
Vent delay: 2 seconds
Automatic purge: OFF
Pressure unit: mbar
Minimum volume: 0
Beep: ON
Maximum evacuation time: 30 m i nu te s
Audio Alarm Type: Trigger Alarm
Maximum inlet pressure when sniffing: 1 mbar
Minimum Inlet pressure when sniffing: 0,1 mbar
Number of decimal place at leak rate displayed: 1

HYDRO•S

-9

mbar l/s

-8

mbar l/s

-7

mbar l/s

-5

mbar l/s

28 Installation

Scroll display: On
Particle protection: Off
Direct access to calibration: On
Contamination protection: Off
Switch off limit for contamination protection: 1E-3 mbar l/s
Control location: Local
Alarm delay: 30 seconds
Leak rate filter: I•Cal
Zero: enable
HYDRO•S automatic enabled

iina74e 02.fm technical handbook(1408)

3 First Operation Check

Warning

Caution

The steps for an initial operation are descr ibed in this chapter. It is expla ined how to
switch on the UL5000, how to measure and how to carry out an internal calibration.

Notice: If anything unexpected happens during the initial operation or the leak

detector acts in a strange way the UL5000 can be switched off by the mains
switch at any time.

3.1 Needed Equipment

The following parts will be needed:

• A blind flange 40 KF (if not preassembled at the inlet port).

• A helium test leak with a DN 40 KF adapter (optional).

3.2 Description of the Initial Operation

Please proceed the following description step by step to sta rt th e initial op er at ion .
See Chapter 5 for a more detailed description.

3.2.1 Startup and Measure

1 Unpack the UL5000 and inspect it for any external damage (See Chapter 1.4

Unpacking).

2 Connect the instrument to the mains power (See Chapter 2.3.1 Mains Power).
3 Switch on the leak detector by using the mains switch Fig. 2-6/8.

Caution: Abrupt movements.
Abrupt movements can damage the running turbo pump.
Avoid abrupt movement and vibration of the instrument (e.g. running over cables,
door sills) during operation and up to 4 minutes after switching off since the turbo
pump can be damaged.

Don’t switch machine on when ambient temperature is below 10°C.

iina74e 03.fm technical handbook(1408)

After power on a welcoming picture appears on the screen of the control panel Fig.

3-1/1, then status information on the speed of the turbo pump, the foreline pressure,

the emission and the active filament are given.

First Operation Check 29

The start up procedure takes about 4 minutes and the end is indicated by a beep.

1
2

The UL5000 is in Stand-by mode now.

Fig. 3-1: Top view of the UL5000
Pos. Description Pos. Description

1 Control Panel 2 Inlet Port

4 Check if the inlet port Fig. 3-1/2 is blanked off. If not, please mount a blind flange with

O-Ring on the inlet port.

5 Press the START Button Fig. 3-2/6. The inlet will be evacuated and the measured

leak rate will be displayed a moment later.

This is the measurement mode. If a test part was connected you would start spraying
Helium to identify leaks.

30 First Operation Check

iina74e 03.fm technical handbook(1408)