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O P E R A T I N G M A N U A L
STM-2XM
Rate and Thickness Monitor
PN 074-614-P1A
Title Page
O P E R A T I N G M A N U A L
STM-2XM
Rate and Thickness Monitor
PN 074-614-P1A
®
www.inficon.com reachus@inficon.com
©2014 INFICON
Trademarks
The trademarks of the products mentioned in this manual are held by the companies that produce them.
Windows® and Microsoft® are registered trademarks of Microsoft Corporation.
Inconel® is a registered trademark of Inco Alloys International, Huntington, WV.
LabVIEWTM is a trademark of National Instruments Corporation.
Sycon InstrumentsTM is a trademark of INFICON,
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2014 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.
Warranty
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the reverse hereof, to be, for the period of warranty coverage specified below, free from defects of materials or workmanship under normal proper use and service. The period of warranty coverage is specified for the respective products in the respective Seller instruction manuals for those products but shall not be less than two (2) years from the date of shipment thereof by Seller. Seller's liability under this warranty is limited to such of the above products or parts thereof as are returned, transportation prepaid, to Seller's plant, not later than thirty (30) days after the expiration of the period of warranty coverage in respect thereof and are found by Seller's examination to have failed to function properly because of defective workmanship or materials and not because of improper installation or misuse and is limited to, at Seller's election, either (a) repairing and returning the product or part thereof, or (b) furnishing a replacement product or part thereof, transportation prepaid by Seller in either case. In the event Buyer discovers or learns that a product does not conform to warranty, Buyer shall immediately notify Seller in writing of such non-conformity, specifying in reasonable detail the nature of such non-conformity. If Seller is not provided with such written notification, Seller shall not be liable for any further damages which could have been avoided if Seller had been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD HEREUNDER. All other obligations and liabilities of Seller, whether in contract or tort (including negligence) or otherwise, are expressly EXCLUDED. In no event shall Seller be liable for any costs, expenses or damages, whether direct or indirect, special, incidental, consequential, or other, on any claim of any defective product, in excess of the price paid by Buyer for the product plus return transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed, used or operated contrary to Seller's written instruction manual or which has been subjected to misuse, negligence or accident or has been repaired or altered by anyone other than Seller or which has been used in a manner or for a purpose for which the Seller product was not designed nor against any defects due to plans or instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers. Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in connection with the installation, operation or maintenance of this equipment. Should you require further assistance, please contact INFICON.
www.inficon.com reachus@inficon.com
PN 074-614-P1A
STM-2XM Operating Manual
Table Of Contents
Cover Page
Title Page
Trademarks
Disclaimer
Copyright
Declaration Of Conformity
Warranty
Chapter 1
Introduction and Specifications
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.1.1 Related Manuals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.2 Instrument Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.2.1 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.2.2 General Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
1.2.3 Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.3 How To Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.3.1 Returning STM-2XM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.1 Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.2 Film Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.3 System Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.4.4 Digital I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.4.5 Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
1.4.6 Operating Environment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
1.4.7 Size and Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
1.5 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
1.6 Parts and Options Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
1.6.1 Base Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
1.6.2 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
1.6.3 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
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Chapter 2
Installation
2.1 Installation Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1 2.1.1 Parts Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1 2.1.2 Ground Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2 2.1.3 Connection to Earth Ground. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3 2.2 Rear Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3 2.2.1 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3 2.2.2 Relay Outputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4 2.2.3 Analog Outputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5 2.2.4 Remote Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6 2.3 Basic Vacuum System Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7 2.4 Deposition System Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9 2.4.1 Sensor Head Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
Chapter 3
Operation
3.1 Front Panel Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.1.1 System Control Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3.1.2 Data Entry and Programming Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.1.3 Changing a Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
3.1.4 Runtime Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
3.2 Programming . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
3.2.1 Main Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
3.2.1.1 Edit Film . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
3.2.1.2 System Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
3.2.1.3 Setup Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
3.3 STM-2XM Operating Modes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
3.3.1 Simple . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
3.3.2 Backup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
3.3.3 Averaging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19
3.3.4 Alloy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
3.3.5 Independent . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21
3.4 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
3.4.1 No Shutter Delay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
3.4.2 Shutter Delay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
3.4.3 Test Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
3.4.4 Rate Sampling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
3.5 Film States . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
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STM-2XM Operating Manual
Chapter 4
Software
4.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 4.2 Installing INFICON STM-2XM FilmMaker Software . . . . . . . . . . . . . . . . . . . 4-1 4.2.1 Installing the Protocol Server . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 4.2.2 Installing INFICON STM-2XM FilmMaker Software . . . . . . . . . . . . . . . . . . . 4-2 4.2.3 Starting INFICON STM-2XM FilmMaker Software . . . . . . . . . . . . . . . . . . . . 4-3 4.2.3.1 Starting the Software in Windows XP or Windows 7 . . . . . . . . . . . . . . . . . . 4-3 4.2.3.2 Starting the Software in Windows 8 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3 4.3 STM-2XM Parameter Manager . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4 4.3.1 Main Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5 4.3.1.1 Main Setup Pane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5 4.3.1.2 Utilities Pane. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7 4.3.2 Films Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8 4.3.3 System Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10 4.3.3.1 Setup parameters Pane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11 4.3.3.2 System parameters Pane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16 4.3.4 Save/Load file Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17 4.3.5 Save/Load instrument Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18 4.3.6 About Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
Chapter 5
Communications
5.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2 Communications Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2.1 RS-232/RS-485 Connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2.2 RS-232 Point-to-Point Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.2.3 RS-485 TTL Differential Signaling Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.3 Electrical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
5.3.1 RS-485 Line Signal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
5.3.2 Bit Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
5.4 Bauds . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
5.5 Message Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
5.5.1 Sycon Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
5.5.1.1 Command Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
5.5.2 Sycon Multi-Drop Protocol (SMDP) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
5.5.2.1 Command Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
5.5.2.1.1 Checksum. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
5.5.2.1.2 Command Packet Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
5.5.2.1.3 Response Packet Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
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5.5.3 Optional Serial Command Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11 5.5.3.1 Optional Serial Command Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12 5.5.3.2 Additional Option to Serial Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12 5.6 Communication Library . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13 5.6.1 Methods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14 5.6.2 Communication Properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15 5.6.3 Other Properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15 5.7 Windows/SMDP Server Implementation . . . . . . . . . . . . . . . . . . . . . . . . . . 5-16 5.8 Communications Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17 5.8.1 Command: ?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18 5.8.2 Command: @ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18 5.8.3 Command: C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18 5.8.4 Command: E/F . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20 5.8.4.1 Analog Output Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24 5.8.4.2 Relay Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-26 5.8.4.3 Input Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-27 5.8.5 Command: G/H . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-28 5.8.6 Command: I/J . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-28 5.8.7 Command: K/L . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-30 5.8.8 Command: M/N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-30 5.8.9 Command: O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-31 5.8.10 Command: P . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-32
5.8.10.1 Alloy State Class . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-33 5.8.11 Command: Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-34 5.8.11.1 Raw Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-36 5.8.11.2 Raw Status 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-36 5.8.11.3 Film State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-37 5.8.12 Run Screen Lock Codes and Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . 5-38 5.8.13 Command Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-39 5.8.13.1 Query Software Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-39 5.8.13.2 Reboot SMDP Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-40
Chapter 6
Troubleshooting
6.1 Troubleshooting Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
6.2 Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
6.3 Spare Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
6.4 Persistent Crystal Fail Indication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
6.5 Diagnostics Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
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Chapter 7
Calibration Procedures
7.1 Importance of Density, Tooling and Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.2 Determining Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
7.4 Laboratory Determination of Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
Chapter 8
Measurement and Theory
8.1 Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
8.1.1 Monitor Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
8.1.2 Period Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
8.1.3 Z-match Technique. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-6
Appendix A
Material Table
A.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .A-1
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Chapter 1
Introduction and Specifications
1.1 Introduction
STM-2XM rate and thickness monitor (see Figure 1-1) will manage single sensor processes as well as codeposition and alloy processes through five modes of operation:
Simple mode (single film mode)
Backup mode (crystal switching)
Averaging mode
Alloy mode
Independent mode
Independent mode allows STM-2XM to function as two completely separate monitors with shutter delay. To extend crystal life for thicker films, the Alloy mode provides a linked shutter delay.
Time/Power allows films to complete even with a crystal failure. STM-2XM displays accumulated film mass or thickness and can also display a graph of rate, thickness, or rate deviation.
STM-2XM has eight programmable digital inputs, eight programmable digital outputs, and four analog outputs.
Figure 1-1 STM-2XM rate/thickness monitor
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1.1.1 Related Manuals
Sensors are covered in separate manuals. PDF files of these manuals are contained in the Thin Film Manuals CD (PN 074-5000-G1), part of the Ship Kit.
PN 074-154—Bakeable Sensor
PN 074-156—Front Load Sensor, Single/Dual
PN 074-157—Sputtering Sensor
PN 074-609—Cool Drawer Sensor, Single/Dual
1.2Instrument Safety
1.2.1 Definition of Notes, Cautions and Warnings
When using this manual, please pay attention to the NOTES, CAUTIONS, and WARNINGS found throughout. For the purposes of this manual they are defined as follows:
NOTE: Pertinent information that is useful in achieving maximum STM-2XM efficiency when followed.
CAUTION
Failure to heed these messages could result in damage to STM-2XM.
WARNING
Failure to heed these messages could result in personal injury.
WARNING - Risk Of Electric Shock
Dangerous voltages are present which could result in personal injury.
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1.2.2 General Safety Information
WARNING - Risk Of Electric Shock
Dangerous voltages may be present whenever the power cord or external input/relay connectors are present.
Refer all maintenance to qualified personnel.
CAUTION
STM-2XM contains delicate circuitry which is susceptible to transient power line voltages. Disconnect the line cord whenever making any interface connections. Refer all maintenance to qualified personnel.
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1.2.3 Earth Ground
STM-2XM is connected to earth ground through a sealed three-core (three-conductor) power cable, which must be plugged into a socket outlet with a protective earth terminal. Extension cables must always have three conductors including a protective earth terminal.
WARNING - Risk Of Electric Shock
Never interrupt the protective earth circuit.
Any interruption of the protective earth circuit inside or outside STM-2XM, or disconnection of the protective earth terminal is likely to make STM-2XM dangerous.
This symbol indicates where the protective earth ground is connected inside STM-2XM. Never unscrew or loosen this connection.
CAUTION
There are no user serviceable components within the
STM-2XM case.
Refer all maintenance to qualified personnel.
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1.3 How To Contact INFICON
Worldwide customer support information is available under Support >> Support Worldwide at www.inficon.com:
Sales and Customer Service
Technical Support
Repair Service
If experiencing a problem with STM-2XM, please have the following information readily available:
The Sales Order or Purchase Order number of the instrument purchase.
The version of STM-2XM firmware.
The version of Windows operating system.
A description of the problem.
An explanation of any corrective action that may have already been attempted.
The exact wording of any error messages that may have been received.
1.3.1Returning STM-2XM
Do not return any component of STM-2XM to INFICON before speaking with a Customer Support Representative and obtaining a Return Material Authorization (RMA) number. STM-2XM will not be serviced without an RMA number.
Packages delivered to INFICON without an RMA number will be held until the customer is contacted. This will result in delays in servicing STM-2XM.
If returning STM-2XM with a crystal sensor or another component potentially exposed to process materials, prior to being given an RMA number, a completed Declaration Of Contamination (DOC) form will be required. DOC forms must be approved by INFICON before an RMA number is issued. INFICON may require that the component be sent to a designated decontamination facility, not to the factory.
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1.4 Specifications
1.4.1 Measurement
Sensor Inputs . . . . . . . . . . . . . . . . . . 2
Compatible Sensors. . . . . . . . . . . . . Single/shuttered single or dual QCM sensor Measurement Frequency Range . . . 6.0 to 5.0 MHz (fixed)
Frequency Resolution . . . . . . . . . . . ± 0.03 Hz @ 6 MHz Reference Frequency Stability . . . . . ± 2 ppm
Thickness and Rate
Resolution/Measurement . . . . . . . . . ± 0.037 Å @ tooling/density = 100/1 Fundamental frequency = 6 MHz
Measurement Interval . . . . . . . . . . . 0.10 s
1.4.2 Film Parameters
Stored Films . . . . . . . . . . . . . . . . . . . 15
Name . . . . . . . . . . . . . . . . . . . . . . . . 8 characters, 0 to 9, A to Z, _ and [space] Density . . . . . . . . . . . . . . . . . . . . . . . 0.4 to 99.99 g/cm3
Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . 0.100 to 9.999 Tooling . . . . . . . . . . . . . . . . . . . . . . . 10 to 999.9% Setpoint Thickness. . . . . . . . . . . . . . 0.000 to 999.999 kÅ End Thickness . . . . . . . . . . . . . . . . . 0.000 to 999.999 kÅ Use Backup Crystal . . . . . . . . . . . . . Yes/No
Setpoint Time . . . . . . . . . . . . . . . . . . 0:00:00 to 9:59:59 h:mm:ss Deposit Rate . . . . . . . . . . . . . . . . . . 0.0 to 999.9 Å/s
Coast Enable . . . . . . . . . . . . . . . . . . Yes/No Crystal Life Minimum . . . . . . . . . . . . 0 to 99% Force Crystal Fail . . . . . . . . . . . . . . . Yes/No Temporal Average . . . . . . . . . . . . . . 1 to 50 Good Rate Tolerance . . . . . . . . . . . . 0 to 50
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1.4.3 System Parameters
Operation Modes . . . . . . . . . . . . . . . Simple mode (single film mode) Backup mode (crystal switching) Averaging mode
Alloy mode Independent mode
Test Mode. . . . . . . . . . . . . . . . . . . . . On/Off
Active Source . . . . . . . . . . . . . . . . . . Channel 1/Channel 2 Display Mode . . . . . . . . . . . . . . . . . . Thickness/Mass
Plot Type . . . . . . . . . . . . . . . . . . . . . None/Rate Deviation/Rate/Thickness Plot Time Interval . . . . . . . . . . . . . . . 0:00:00 to 9:59:59 h:mm:ss
LCD Contrast . . . . . . . . . . . . . . . . . . 10 to 85 LCD Brightness . . . . . . . . . . . . . . . . 1 to 99 Beeper . . . . . . . . . . . . . . . . . . . . . . . On/Off
Communications Protocol . . . . . . . . Sycon 9600 (Sycon Protocol @ 9.6 Kbps) SMDP L (SMDP Protocol @ 9.6 Kbps) SMDP M (SMDP Protocol @ 38.4 Kbps) SMDP H (SMDP Protocol @ 115.2 Kbps)
SMDP Address. . . . . . . . . . . . . . . . . 16 to 254
1.4.4 Digital I/O
Digital Inputs. . . . . . . . . . . . . . . . . . . 8
Digital Input Functions . . . . . . . . . . . Open Shutter Close Shutter Zero Thickness Disabled
Select crystal as active (dual mode)
NOTE: To select crystal one, use on a Channel 1 input (1.x). To select crystal two, use on a Channel 2 input (2.x).
Allow sync
NOTE: Allows simultaneous shutter delay of both films.
Digital Outputs . . . . . . . . . . . . . . . . . 8
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Digital Output Functions. . . . . . . . . . Manual (front panel) Source shutter Substrate shutter Sensor shutter Crystal fail
Setpoint time Setpoint thick Forced active
Controlled via serial communications Rate is steady and within tolerance
Analog Outputs. . . . . . . . . . . . . . . . . 4
Analog Output Functions . . . . . . . . . Rate:
Rate 1000 Å/s, 10.00 µg scale Rate 10.0 Å/s, 0.10 µg scale
Rate deviation:
Rate deviation 1000 Å/s, 10.00 µg scale Rate deviation 10.0 Å/s, 0.10 µg scale
Thickness:
Thickness recorder 999 Å scale Thickness recorder 99.9 Å scale
Disabled
Controlled via serial communications Fixed positive/negative full scale
Analog Output Rating. . . . . . . . . . . . -10 to +10 V, 10 mA
Relay Rating. . . . . . . . . . . . . . . . . . . up to 48 V (dc) • V (ac), 2 A
1.4.5 Power
Rated Supply Voltage. . . . . . . . . . . . 100 to 240 V (ac) ± 10%, 50/60 Hz, 2.5 VA Fuse Rating . . . . . . . . . . . . . . . . . . . 1 A 250 V, 5 x 20 mm, Fast-acting
Mains Power Cable Rating
STM-2XM-G1 . . . . . . . . . . . . . . . 10 A 125 V
STM-2XM-G2 . . . . . . . . . . . . . . . 10 A 250 V Power Consumption. . . . . . . . . . . . . less than 10 W Overvoltage . . . . . . . . . . . . . . . . . . . Category II Temporary Overvoltage
Short Term . . . . . . . . . . . . . . . . . 1200 V, < 5 s
Long Term . . . . . . . . . . . . . . . . . 250 V, > 5 s
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1.4.6 Operating Environment
Usage . . . . . . . . . . . . . . . . . . . . . . . . Indoor use only
Operating Temperature . . . . . . . . . . 0 to 50°C (32 to 122°F)
Storage Temperature . . . . . . . . . . . . -10 to 60°C (14 to 140°F)
Humidity . . . . . . . . . . . . . . . . . . . . . . Up to 85% RH, non-condensing
Altitude . . . . . . . . . . . . . . . . . . . . . . . Up to 2000 meters
Pollution Degree. . . . . . . . . . . . . . . . 2
1.4.7 Size and Weight
Rack Dimensions (HxWxD) . . . . . . . 8.9 x 24.1 x 25.4 cm (3.5 x 9.5 x 10 in.) Weight . . . . . . . . . . . . . . . . . . . . . . . 1.25 kg (2.75 lb.)
1.5 Unpacking and Inspection
1If STM-2XM has not been removed from its packaging, do so now.
2Carefully examine STM-2XM for damage that may have occurred during shipping. It is especially important to note obvious rough handling on the outside of the container. Immediately report any damage to the carrier and to INFICON.
3Do not discard the packaging material until inventory has been taken and installation has been successful.
4Refer to the invoice to take inventory (see section 1.6).
5To install STM-2XM, see Chapter 2, Installation.
6For additional information or technical assistance, contact INFICON (refer to section 1.3 on page 1-5).
1.6Parts and Options Overview
1.6.1 Base Configurations
STM-2XM with US Power Cord . . . . PN STM-2XM-G1
STM-2XM with
European Power Cord . . . . . . . . . . . PN STM-2XM-G2
Thin Film Manuals CD . . . . . . . . . . . PN 074-5000-G1
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1.6.2 Accessories
3 m (10 ft.) Oscillator Kit. . . . . . . . . . PN 783-500-109-10 7.6 m (25 ft.) Oscillator Kit . . . . . . . . PN 783-500-109-25 15.2 m (50 ft.) Oscillator Kit . . . . . . . PN 783-500-109-50 22.9 m (75 ft.) Oscillator Kit . . . . . . . PN 783-500-109-75
NOTE: Each sensor requires an oscillator kit to interface to STM-2XM. Oscillator kits include:
Oscillator . . . . . . . . . . . . . . . . . . PN 783-500-013 15.2 cm (6 in.) BNC cable . . . . . PN 782-902-011 One of the following:
3 m (10 ft.) BNC Cable . . . . . PN 782-902-012-10 7.6 m (25 ft.) BNC Cable . . . PN 782-902-012-25 15.2 m (50 ft.) BNC Cable . . PN 782-902-012-50 22.9 m (75 ft.) BNC Cable . . PN 782-902-012-75
These kits are designed for use with the standard in-vacuum cables ranging in length from 15.2 cm (6 in.) to 78.1 cm (30.75 in.).
48.3 cm (19 in.) rack mount kits are available in the following configurations: One STM-2XM . . . . . . . . . . . . . . PN 783-014-008
Two STM-2XM . . . . . . . . . . . . . . PN 783-014-009
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1.6.3 Sensors
Front Load Single Sensor. . . . . . . . . . . . . . . . . . . . . PN SL-XXXXX
Front Load Dual Sensor . . . . . . . . . . . . . . . . . . . . . . PN DL-AXXX Cool Drawer Single Sensor . . . . . . . . . . . . . . . . . . . PN CDS-XXFXX Cool Drawer Dual Sensor. . . . . . . . . . . . . . . . . . . . . PN CDD-XFXX Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . PN 750-618-G1 UHV Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . . PN BK-AXF Low Profile Single Sensor . . . . . . . . . . . . . . . . . . . . PN 783-500-042 Low Profile Dual Sensor. . . . . . . . . . . . . . . . . . . . . . PN 783-500-093 Low Profile Bakeable Single Sensor . . . . . . . . . . . . PN 783-500-009 Low Profile Bakeable Dual Sensor. . . . . . . . . . . . . . PN 783-500-050
NOTE: Low Profile Sensors also have shuttered options as well as options without cooling lines.
NOTE: "X" in part number indicates customer-selectable option, see www.inficon.com for Sensor Datasheets.
NOTE: Shuttered sensors require a feedthrough with an air line and solenoid valve PN 750-420-G1.
NOTE: Multi-crystal (rotary) sensors should not be used with STM-2XM.
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Chapter 2
Installation
2.1 Installation Requirements
2.1.1Parts Requirements
STM-2XM Monitor
CAUTION
Use the supplied mains power cable.
If this cable must be replaced, the replacement cable must meet or exceed the ratings of the supplied cable.
One crystal sensor/feedthrough
One Oscillator Kit for each crystal sensor
Quartz crystals appropriate for the application
CAUTION
To maintain proper STM-2XM performance, use only the 15.2 cm (6 in.) BNC cable that is included to connect the oscillator to the crystal sensor.
The length of the in-vacuum cable (Front Load and Sputtering sensors) or electrical conduit tube
(Cool Drawer and Bakeable sensors) should not exceed 78.1 cm (30.75 in.).
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2.1.2 Ground Requirements
CAUTION
A ground post is provided on the rear panel. This point should be connected to the common ground with a grounding strap.
Use low impedance cables or straps to connect the chassis of all control components to a common ground point on the vacuum chamber. The common ground point must be connected to earth ground (see section 2.1.3, Connection to Earth Ground, on page 2-3).
Solid copper straps are recommended, where RF is present. Use a strap of the shortest possible length, minimum width of 12.7 mm (0.5 in.), approximately 0.56 mm (0.22 in.) thick. This is particularly important in high-noise electron beam (e-beam) systems. See Figure 2-1 for the recommended grounding method.
NOTE: The oscillator is grounded to STM-2XM and crystal sensor through the BNC cables.
The crystal sensor is typically grounded to the wall of the vacuum system. If the sensor feedthrough is not properly grounded to earth through the vacuum system, connect a copper strap between the feedthrough and the common ground point on the vacuum system.
Figure 2-1 Recommended grounding |
|
|
Sensor |
Substrate |
|
Source |
|
-614-P1A |
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PN 074 |
|
|
|
|
7.62 cm (3 in.) |
Evaporator |
|
Wide Copper |
||
Ground |
|
Power Supply |
Strap |
|
|
|
Earth |
12.7 mm (0.5 in.) |
|
Wide Copper |
|
|
|
Ground |
|
|
Straps |
2.4 m (8 ft.) Copper Ground Rods |
|
|
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2.1.3 Connection to Earth Ground
If an earth ground is not established:
1Where soil conditions allow, drive two 2.4 m (8 ft.) copper clad steel rods into the ground 1.8 m (6 ft.) apart. Follow local regulations and codes.
2Pour a copper sulfate or a salt solution around each rod to improve the ground conductivity.
3Measure the resistance. A near zero resistance between the two rods indicates that a good earth ground is achieved.
4After verifying a near zero resistance between the rods, connect the rods together with a 7.62 cm (3 in.) wide copper strap.
2.2Rear Panel
Figure 2-2 STM-2XM rear panel
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CAUTION
Connecting cables must be routed away from any potential source of electrical noise.
2.2.1 Sensors
The Sensors input provides the remote sensor oscillator interface to STM-2XM, providing both the signal and power path to the oscillator.
NOTE: Sensors connection requires coaxial cable type RG58 or RG59. The maximum BNC cable length connecting the oscillator to STM-2XM is 30 m (98 ft.).
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2.2.2 Relay Outputs
STM-2XM has eight normally open (NO) relay contact outputs. These outputs are intended for low voltage (see section 1.4.4, Digital I/O, on page 1-7).
Table 2-1 Relay output contact pin numbers
Relay |
Contacts on pins |
|
|
1 |
12,13 |
|
|
2 |
23,24 |
|
|
3 |
9,10 |
|
|
4 |
20,21 |
|
|
5 |
6,7 |
|
|
6 |
17,18 |
|
|
7 |
3,4 |
|
|
8 |
14,15 |
|
|
Figure 2-3 Relay output contact pin numbers
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