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O P E R A T I N G M A N U A L
FabGuard Explorer™
Process Gas Characterization Software
IPN 074-528-P1A
O P E R A T I N G M A N U A L
FabGuard Explorer™
Process Gas Characterization Software
IPN 074-528-P1A
www.inficon.com reachus@inficon.com
©2010 INFICON
Trademarks
The trademarks of the products mentioned in this manual are held by the companies that produce them.
FabGuard®, FabGuard Explorer™, INFICON®, Preclude™, Stiletto®, Transpector®, Transpector CPM™, Transpector XPR™, and Quantus® are registered trademarks of INFICON GmbH.
Windows®, Windows Vista®, and Microsoft® are registered trademarks of Microsoft Corporation.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2010 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.
Warranty
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the reverse hereof, to be, for the period of warranty coverage specified below, free from defects of materials or workmanship under normal proper use and service. The period of warranty coverage is specified for the respective products in the respective Seller instruction manuals for those products but shall not be less than one (1) year from the date of shipment thereof by Seller. Seller's liability under this warranty is limited to such of the above products or parts thereof as are returned, transportation prepaid, to Seller's plant, not later than thirty (30) days after the expiration of the period of warranty coverage in respect thereof and are found by Seller's examination to have failed to function properly because of defective workmanship or materials and not because of improper installation or misuse and is limited to, at Seller's election, either (a) repairing and returning the product or part thereof, or (b) furnishing a replacement product or part thereof, transportation prepaid by Seller in either case. In the event Buyer discovers or learns that a product does not conform to warranty, Buyer shall immediately notify Seller in writing of such non-conformity, specifying in reasonable detail the nature of such non-conformity. If Seller is not provided with such written notification, Seller shall not be liable for any further damages which could have been avoided if Seller had been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD HEREUNDER. All other obligations and liabilities of Seller, whether in contract or tort (including negligence) or otherwise, are expressly EXCLUDED. In no event shall Seller be liable for any costs, expenses or damages, whether direct or indirect, special, incidental, consequential, or other, on any claim of any defective product, in excess of the price paid by Buyer for the product plus return transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed, used or operated contrary to Seller's written instruction manual or which has been subjected to misuse, negligence or accident or has been repaired or altered by anyone other than Seller or which has been used in a manner or for a purpose for which the Seller product was not designed nor against any defects due to plans or instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers. Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in connection with the installation, operation or maintenance of this equipment. Should you require further assistance, please contact INFICON.
www.inficon.com reachus@inficon.com
IPN 074-528-P1A
FabGuard Explorer Operating Manual
Table Of Contents
Chapter 1
Getting Started
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1.1.1 How to Contact Customer Support. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 1.2 Operating Manual Style Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3 1.2.1 Usage of the Modern Metric System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4 1.3 Inventory of Supplied Items . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5 1.4 Computer System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5 1.5 Supported Sensors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.5.1 Transpector Models Supported . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.5.1.1 Firmware. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.5.2 Other Supported Sensors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.6 Communication Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.6.1 RGA Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.6.1.1 Communications Baud Rate. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7 1.6.1.2 Communications Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7 1.6.1.3 USB to RS232 Standard Adapter Cable. . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.6.1.3.1 Single Sensor Version (RS232) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7 1.6.1.3.2 Multiple Sensor Version (RS485 Plus TCA485 Adapter) . . . . . . . . . . . . . . . 1-8 1.6.2 RFS100 Communications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9 1.6.3 Quantus Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9 1.6.4 Stiletto Communications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9 1.7 How To Install FabGuard Explorer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9 1.8 How To Start FabGuard Explorer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13 1.9 Where to Go From Here . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
Chapter 2
How the Software Works
2.1 Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.2 Navigating FabGuard Explorer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.2.1 Colors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2.2 Tabs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2.3 Menus. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.2.3.1 User Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.2.3.2 Screens Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.2.3.3 Run Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
2.2.3.4 Recipe Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
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2.2.3.5 Acquisition Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.2.3.6 Maintenance Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.2.3.7 Configure Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
2.2.3.8 Help Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
2.2.3.9 Context Sensitive Menus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
2.2.4 Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12
2.3 FabGuard Explorer Screens. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
2.3.1 Alarm . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
2.3.2 Main . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14
2.3.3 Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15
2.3.4 Live Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16
2.3.5 Runs In Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
2.3.6 Multi Run Viewer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
2.4 Basic Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19
2.4.1 Data Acquisition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19
2.4.2 Leak Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19
2.4.3 Tune . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19
2.4.4 Vacuum Diagnostics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20
2.5 Screen Specific Cascading Menus. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20
2.6 Opening Files in FabGuard Explorer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22
2.6.1 Importing Tware32 Files. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23
Chapter 3
Setup and Configuration
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1 3.1.1 Initial Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1 3.2 Communication Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1 3.2.1 Installation of Sensors Immediately After FabGuard Explorer is Opened . . 3-1 3.2.1.1 Transpector RGAs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2 3.2.1.2 RFS100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3 3.2.1.3 Stiletto Particle Detector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5 3.2.1.4 Quantus SPOES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6 3.2.1.4.1 Automatically Assigning the Quantus an IP Address (DHCP) . . . . . . . . . . . 3-7 3.2.1.4.2 Manually Assigning the Quantus an IP Address . . . . . . . . . . . . . . . . . . . . . 3-7 3.2.1.4.3 Setting up the Quantus in FabGuard Explorer . . . . . . . . . . . . . . . . . . . . . . . 3-8 3.2.1.5 Installation of Sensors Using I/O Connections . . . . . . . . . . . . . . . . . . . . . . . 3-9 3.2.1.5.1 Adding a Connection in the I/O Connections Menu . . . . . . . . . . . . . . . . . . 3-11 3.2.1.5.2 Edit/Test Connection Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12 3.3 Main Screen Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
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IPN 074-528-P1A
IPN 074-528-P1A
FabGuard Explorer Operating Manual
3.3.1 Tool Diagrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14 3.3.2 Customizable Background . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18 3.4 Sensor Configuration and Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19 3.4.1 RGA Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19 3.4.1.1 Ionizer and Detector Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19 3.4.1.1.1 Signal Units and References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21 3.4.1.1.2 What State to Leave the Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21 3.4.1.1.3 Settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22 3.4.1.2 RGA Configuration — Correction Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25 3.4.1.2.1 Over-Pressure Error Recovery (Hardware) . . . . . . . . . . . . . . . . . . . . . . . . 3-25 3.4.1.2.2 Baseline Subtraction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27 3.4.1.3 RGA Configuration — External I/O Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28 3.4.1.4 RGA Configuration — Calibration Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32 3.4.1.5 RGA Configuration — Life Time Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-36 3.4.1.5.1 Maintenance Life Times . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-37 3.4.1.5.2 Other Key Statistics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-39 3.4.1.6 RGA Configuration — CPM Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-40 3.4.1.6.1 Valves and Orifices. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-40 3.4.1.6.2 Gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-43 3.4.1.6.3 Pumping Timers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-43 3.4.2 RFS100 Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-44 3.4.3 Stiletto/Quantus Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-44 3.5 User Preferences . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-44 3.5.1 File Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-45 3.5.1.1 Date Order in File Path and Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-45 3.5.1.2 Run Save path . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-45 3.5.2 Acquisition Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-45 3.5.2.1 Keep Manually Acquired Runs in Memory . . . . . . . . . . . . . . . . . . . . . . . . . 3-45 3.5.2.2 Maximum Monitor and Maintenance Time . . . . . . . . . . . . . . . . . . . . . . . . . 3-46 3.5.2.3 Maximum Number of Data Points Per Run . . . . . . . . . . . . . . . . . . . . . . . . 3-46 3.5.3 Display Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-46 3.5.3.1 Use Dropdown List for Sub-Screen Selection . . . . . . . . . . . . . . . . . . . . . . 3-46 3.5.3.2 Shape of Displayed Scan . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-47 3.5.3.3 Real-Time Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-49 3.5.3.4 Auto-Scale . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-50 3.5.3.5 Use Time of Day. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-50 3.5.3.6 Selection of Bins in Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-50 3.6 Access Levels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-51
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FabGuard Explorer Operating Manual
Chapter 4
Data Acquisition
4.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 4.2 Acquisition Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 4.2.1 Quick Manual Acquisition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 4.2.2 Manual Acquisition from Scratch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2 4.2.3 Manual Acquisition from Run in Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2 4.2.4 Manual Acquisition from Recipe. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3 4.3 Manual Acquisition Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4 4.3.1 Acquisition Control: Open Ion Source RGAs . . . . . . . . . . . . . . . . . . . . . . . . 4-5 4.3.1.1 Acquisition Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6 4.3.1.2 Scan Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6 4.3.1.3 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7 4.3.1.4 Ionizer Presets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7 4.3.1.5 Start Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8 4.3.1.5.1 Start Mode Type. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8 4.3.1.5.2 Data Threshold. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8 4.3.1.5.3 Emission and Multiplier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9 4.3.1.5.4 Relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9 4.3.1.6 Stop Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10 4.3.1.6.1 Stop Mode Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10 4.3.1.6.2 Data Threshold. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10 4.3.1.6.3 Maximum Step Duration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11 4.3.1.6.4 Emission and Multiplier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11 4.3.1.6.5 Relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11 4.3.1.7 Stabilization Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12 4.3.1.8 Dwell. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12 4.3.1.9 Delay Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12 4.3.1.10 Baseline and Peak Lock. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
4.3.1.10.1 Baseline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13 4.3.1.10.2 Peak Lock. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13 4.3.2 Acquisition Control: CPM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14 4.3.2.1 Acquisition Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15 4.3.2.2 Scan Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15 4.3.2.3 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16 4.3.2.4 Ionizer Presets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16 4.3.2.5 Start Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17 4.3.2.5.1 Start Mode Type. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17
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IPN 074-528-P1A
IPN 074-528-P1A
FabGuard Explorer Operating Manual
4.3.2.5.2 Data Threshold . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17
4.3.2.5.3 Emission and Multiplier. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18
4.3.2.6 Stop Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18
4.3.2.6.1 Stop Mode Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18
4.3.2.6.2 Data Threshold . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19
4.3.2.6.3 Maximum Step Duration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19
4.3.2.6.4 Emission and Multiplier. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19
4.3.2.7 Stabilization Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
4.3.2.8 Dwell. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
4.3.2.9 Delay Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
4.3.2.10 Baseline and Peak Lock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21
4.3.2.10.1 Baseline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21
4.3.2.10.2 Peak Lock. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21
4.3.2.11 Inlet. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22
4.3.2.11.1 Inlet Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22
4.3.3 Acquisition Control: RFS100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23
4.3.3.1 Acquisition Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23
4.3.3.2 Start Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23
4.3.3.2.1 Start Mode Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24
4.3.3.2.2 Data Threshold . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24
4.3.3.3 Stop Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24
4.3.3.3.1 Stop Mode Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24
4.3.3.3.2 Data Threshold . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24
4.3.3.3.3 Maximum Step Duration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25
4.3.3.4 Sampling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25
4.3.3.4.1 Sampling Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25
4.3.3.5 Acquisition Timing (Delay) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25
4.3.3.6 Extra . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25
4.3.4 Acquisition Control: Stiletto Particle Detector . . . . . . . . . . . . . . . . . . . . . . . 4-26
4.3.4.1 Acquisition Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27
4.3.4.2 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27
4.3.4.3 Start Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27
4.3.4.4 Stop Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27
4.3.4.5 Exposure Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28
4.3.4.6 Discriminator - Multiplier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28
4.3.5 Acquisition Control: Quantus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-29
4.3.5.1 Acquisition Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-30
4.3.5.2 Start Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-30
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4.3.5.2.1 Start Mode Type. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-30 4.3.5.2.2 Light Threshold. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-30 4.3.5.2.3 Plasma Emission . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-30 4.3.5.3 Stop Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31 4.3.5.3.1 Stop Mode Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31 4.3.5.3.2 Light Threshold. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31 4.3.5.3.3 Maximum Step Duration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31 4.3.5.3.4 Plasma Emission . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-32 4.3.5.4 Exposure Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-32 4.3.5.5 Acquisition Timing (Delay) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-32 4.3.6 Creation of Multi-Step Runs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-33 4.3.7 Bin Create . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-33 4.3.7.1 RGA Bin Creation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-34 4.3.7.1.1 Existing Bins. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-34 4.3.7.1.2 Adding Bins . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-37 4.3.7.2 RFS100 Bin Creation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-42 4.3.7.3 Stiletto Bin Creation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-43 4.3.7.4 Quantus Bin Creation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-44 4.3.8 Number of Acquisitions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-45 4.4 Acquisition Bin/Control Defaults . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-45 4.4.1 Acquisition Bin Defaults . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-45 4.4.2 Acquisition Control Defaults . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-46 4.5 Data Collection Screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-47 4.5.1 Spectrum and Trend Graph Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-50 4.5.1.1 Point Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-50 4.5.1.2 Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-51 4.5.1.3 Tag Scan Subtract . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-52 4.5.1.4 Export Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-52 4.5.1.5 Graph Formatting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-53 4.5.1.5.1 Logarithmic vs. Linear . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-53 4.5.1.5.2 Zooming . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-55 4.5.1.5.3 Rescaling the Axes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-55 4.5.1.5.4 Properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-56 4.5.2 Bin Legend Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-58 4.5.2.1 Bin Specific Right-Click Options For Actively Plotted Bins. . . . . . . . . . . . . 4-58 4.5.2.1.1 Bin: Switch to Right Axis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-58 4.5.2.1.2 Bin: Change Color . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-58 4.5.2.1.3 Bin: Un-Select . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-58
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IPN 074-528-P1A
FabGuard Explorer Operating Manual
4.5.2.1.4 Bin: Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-58 4.5.2.2 Bin Specific Right-Click Options For Inactive Bins . . . . . . . . . . . . . . . . . . . 4-58 4.5.2.2.1 Bin: Select on Left Axis with Auto Assigned Color . . . . . . . . . . . . . . . . . . . 4-58 4.5.2.2.2 Bin: Select on Left Axis with Chosen Color . . . . . . . . . . . . . . . . . . . . . . . . 4-58 4.5.2.2.3 Bin: Select on Right Axis with Auto Assigned Color . . . . . . . . . . . . . . . . . . 4-59 4.5.2.2.4 Bin: Select on Right Axis with Chosen Color . . . . . . . . . . . . . . . . . . . . . . . 4-59 4.5.2.3 Bin Legend Formatting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-59 4.5.2.3.1 Show All Bins . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-59 4.5.2.3.2 Show Selected Bins First and then Non-Selected Bins . . . . . . . . . . . . . . . 4-59 4.5.2.3.3 Show Only Selected Bins . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-59 4.5.2.4 Bin Graphing Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-59 4.5.2.4.1 Auto Select Bins . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-59 4.5.2.4.2 Clear All Bins . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-59 4.5.2.5 Enlarge Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-60 4.5.2.6 Display Preferences . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-60 4.5.2.6.1 Which Bins to Show . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-60 4.5.2.6.2 How to Automatically Assign Color. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-60 4.5.3 Data Collection Drop Down Menus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-61 4.6 Creating Recipes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-61 4.6.1 Creating Recipes From Scratch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-61 4.6.2 Creating Recipes From a Run . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-62 4.6.3 Editing a Recipe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-62 4.7 Configuration Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-62 4.7.1 Configuration Monitor Screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-63
4.7.1.1Transpector RGA: Open Ion Source
(High Performance, Compact, XPR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-63
4.7.1.2 Transpector RGA: CPM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-65
4.7.1.3 RFS100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-69
4.7.1.4 Stiletto. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-70
4.7.1.5 Quantus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-72
Chapter 5
Visualization
5.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2 Runs in Memory Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2.1 Run Summary. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.2.2 Add/Edit Comment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
5.2.3 Spectrum Graph Selection Bar. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
5.2.4 Bin Create Button . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
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FabGuard Explorer Operating Manual
5.2.5 Run Selection Drop Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4 5.2.6 Tag Button . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4 5.3 Tagging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4 5.3.1 Background Scan . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5 5.3.2 Reference Scan . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5 5.3.3 User Scan. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5 5.4 Chemistry Library . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6 5.4.1 Select Library to Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6 5.4.2 Bin Create . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8 5.5 Multi-Run Viewer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8 5.5.1 Result Shown . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9 5.5.2 Step . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9 5.5.3 X-Axis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10 5.5.3.1 X-Axis Options for Entire Run as Acquired or Specific Step . . . . . . . . . . . 5-11
5.5.3.2X-Axis Options for Entire Run, Step Aligned
and Step Aligned and Labeled . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11 5.5.4 Frame By . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12 5.5.5 Color By . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13 5.5.6 Select Bins to Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13 5.5.7 Separation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14 5.5.8 Displayed Runs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14
5.5.8.1 Emphasize Selected Run . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14 5.5.8.2 Add/Remove Runs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15 5.5.8.3 View Run . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-16 5.5.8.4 Compare Runs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-16 5.5.9 Multi Run Viewer Right Click Options. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17
Chapter 6
Maintenance
6.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
6.2 Leak Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
6.2.1 Leak Check Alarms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
6.2.2 Leak Check Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
6.2.3 Alarm Notices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
6.3 Vacuum Diagnostics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
6.4 Tune . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
6.4.1 Tune Graph Options. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
6.4.2 Scan Width . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
6.4.3 Tune Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
6.4.4 Markers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12
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IPN 074-528-P1A
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FabGuard Explorer Operating Manual
6.4.5 Calibration Methods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13
6.4.5.1 Manual Tuning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13
6.4.5.1.1 Adjusting Peak Resolution (Width) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13
6.4.5.1.2 Adjusting Peak Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
6.4.5.2 Automatic Tuning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
6.4.6 Cancelling Tune . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
6.5 Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15
6.5.1 Calibrate Total Pressure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15
6.5.1.1 Single Point Total Pressure Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16
6.5.2 Calibrate Electron Multiplier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17
6.5.2.1 EM Calibration Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18
6.5.2.2 Calibration Methods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19
6.5.2.3 How To Calibrate the EM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19
6.5.3 Calibrate Sensitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20
6.5.3.1 Partial Pressure Calculation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21
6.6 Degas . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22
6.7 Reset RF Frequency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22
6.8 Timed Bakeout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22
Chapter 7
Alarms
7.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.2 The Active Alarms Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.2.1 Alarm Display Preferences . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
7.2.2 Current Alarms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4
7.2.2.1 Alarm States . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4
7.2.2.2 Alarm Classes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4
7.2.2.3 Right-Click Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
7.2.3 Alarm Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
7.2.4 Removing Alarms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6
7.3 Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6
7.3.1 System Alarms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6
7.3.2 Driver Alarms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7
7.4 Typical Alarms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8
7.4.1 System Alarms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8
7.4.2 Driver Alarms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-9
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FabGuard Explorer Operating Manual
Chapter 8
When Things Go Wrong
8.1 Viewing the Status Log. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
8.2 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
8.2.1 Obtaining Version Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
8.2.2 General Problems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3
8.2.3 Transpector Issues. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
8.2.4 Communications Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-6
IPN 074-528-P1A
TOC - 10
IPN 074-528-P1A
FabGuard Explorer Operating Manual
Chapter 1
Getting Started
1.1 Introduction
FabGuard Explorer™ is a Microsoft® Windows®-based application that both controls and collects data from the INFICON® Transpector® family of Residual Gas Analysis (RGA), the INFICON RFS100 RF Sensor, the INFICON Stiletto® Scanning-Laser Particle Detector (SPD) and the INFICON Quantus® Process Gas Sensor instruments. FabGuard Explorer is compatible with Windows XP, Windows Vista® and Windows 7.
FabGuard Explorer provides RGA control and data collection capabilities for monitoring production processes and diagnosing tool malfunctions. The program makes use of a simple, intuitive user interface which clearly displays the data and facilitates the interpretation.
FabGuard Explorer utilizes simple one-button operation for functions such as data acquisition, leak check and tuning/calibration. This button based operation, along with more traditional menu tabs, cascading menus and right-click options, provide a high level of user interaction. The simplified recipe creation will also allow more novice users to make highly functioning multi-step recipes. Data is continuously saved whenever an acquisition is started and is tagged with a run summary which provides the user with a full log of operation parameters.
Currently FabGuard Explorer supports open ion source Transpector 2 instruments (both Compact and High Performance), Transpector XPR™ instruments, the Transpector CPM™ (Compact Process Monitor), the Preclude™ RGA, the HPR RGA, and the CIS2. Transpector 1 RGAs and XPR1 RGAs are not supported.
NOTE: FabGuard Explorer only works with Transpector 2 Firmware version 2.13 and greater. If the sensor has an older firmware than 2.13, contact a customer support representative to purchase a firmware upgrade.
CAUTION
Since FabGuard Explorer is a constantly evolving program, the screenshots featured within this manual may not directly match the screens of the installed FabGuard Explorer version.
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FabGuard Explorer Operating Manual
1.1.1 How to Contact Customer Support
Worldwide support information regarding:
Technical Support, to contact an applications engineer with questions regarding INFICON products and applications, or
Sales and Customer Service, to contact the INFICON Sales office nearest you, or
Repair Service, to contact the INFICON Service Center nearest you,
is available at www.inficon.com.
If you are experiencing a problem with your instrument, please have the following information readily available:
the FabGuard Explorer version number (available from the Help >> About the Program dialog box),
the type of computer that you are using and its specifications,
your MS Windows type and version number,
a description of your problem,
an explanation of any corrective action that you may have already attempted,
what you were doing when the problem occurred,
and the exact wording of any error messages that you may have received.
CAUTION
Please contact your Customer Support Representative before sending any files.
To contact Customer Support, see Support at www.inficon.com.
IPN 074-528-P1A
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1.2 Operating Manual Style Conventions
File names, environment variables, program names, screen prompts, command strings, and text that you must enter on your keyboard are presented in this font. For example, Enter d:\install.
Windows dialog options, title bars, and menu options are presented in this font. For example: select Run >> Load Run *...
When you must hold down a key then press another key, this is expressed as (for example) Press Ctrl+C
We assume that the CD/DVD-ROM you will be using is drive D. If you are using another drive, substitute your CD/DVD-ROM drive letter whenever you see "d:".
We also assume that your hard drive is drive C. Again, if you are using a different drive label, substitute your drive letter whenever you see "c:".
Often you will be required to select an option from a cascading menu. Instead of verbose statements such as, "position the mouse pointer over the word Run, press the left mouse button to display the cascading menu, then drag the pointer to highlight the words Load Run *... and release the left mouse button," you will read, "select Run >> Load Run *...."
You will also be required to use buttons and tabs. For example, instead of the statement, "position the mouse pointer over the Live Data tab, then press and release the left mouse button to select Live Data," you will read, "click the Live Data tab," or you may read, "select the Live Data tab."
Similarly, left-click means to press and release the left mouse button, and right-click means to press and release the right mouse button.
FabGuard Explorer operates in the Windows environment. We make the assumption that you know how to use the Windows Graphical User Interface (GUI). Therefore, actions in the FabGuard Explorer GUI that are common to the Windows GUI are not explained in detail in this manual. If you do need help with the Windows GUI, please refer to the Windows documentation supplied by Microsoft.
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FabGuard Explorer Operating Manual
When using this manual, please pay attention to the Notes, Cautions, and Warnings found throughout. For the purposes of this manual they are defined as follows:
NOTE: Pertinent information that is useful in achieving maximum FabGuard Explorer efficiency when followed.
CAUTION
Failure to heed these messages could result in the loss of data.
WARNING
Failure to heed these messages could result in personal injury.
1.2.1 Usage of the Modern Metric System
In many places throughout this manual, American measurement units are given along with their International System of Units equivalences. However, providing all measurement units in all discussions becomes cumbersome to the reader. Therefore, equivalences are not given in all cases. You may perform the conversion as follows:
When converting from psig to bar: psig x 0.069 = bar
When converting from psig to kPa: psig x 6.8947 = kPa
When converting from Torr to mbar: Torr x 1.3332 = mbar
When converting from Torr to Pascals Torr x 133.32 = Pascals
When converting from inches (in.) to millimeter (mm) in. x 25.4 = mm
When converting from feet (ft.) to meters (m) ft. x 0.3048 = m
When converting from pounds (lb.) to kilograms (kg): lb x 0.453593 = kg
When converting Temperature from Farenheit (TF) to Celsius (TC) (5/9) x (TF - 32) = TC
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1.3 Inventory of Supplied Items
One CD-ROM which contains the FabGuard Explorer program, the Operating
Manual, and the FabGuard Explorer Quick Use Guide.
1.4 Computer System Requirements
Table 1-1 Computer System Requirements
Parameters |
FabGuard Explorer |
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Requirements |
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Processor |
Pentium 4 2.0 GHz or greater |
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Ram |
512 MB or greater |
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Hard Disk Space |
500 MB for program, |
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additional space needed for |
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data collection |
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Resolution |
800 x 600 16-Bit color or |
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greater |
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Serial Port |
One free serial port for |
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RS232 or TCA-485 |
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connection |
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Operating System |
Windows XP or 7 |
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IPN 074-528-P1A
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FabGuard Explorer Operating Manual
1.5 Supported Sensors
1.5.1 Transpector Models Supported
FabGuard Explorer supports Transpector 2 High Performance and Compact sensors.
FabGuard Explorer does NOT support Transpector 1 sensors.
FabGuard Explorer also supports XPR2, XPR3, CPM, CIS2 and Preclude sensors.
1.5.1.1 Firmware
FabGuard Explorer supports Transpector 2 firmware Version 2.13 or Higher.
1.5.2 Other Supported Sensors
FabGuard Explorer also supports RFS100 sensors, Quantus sensors and Stiletto Particle Detectors.
1.6 Communication Interface
1.6.1 RGA Communications
For RGAs, the communication interfaces supported by FabGuard Explorer are RS-232 for a single Transpector and RS-485 via a TCA-485 (Transpector Control Adaptor) for multiple Transpectors.
The TCA-485 (see Table 1-2) is required for RS-485 communication. One end of the TCA-485 connects to the serial port of the computer and the other end connects to the RS-485 bus cable. An external power supply is also required and supplied for the TCA-485. See the instructions that come with the TCA-485 for details.
Table 1-2 Part numbers for Various Versions of TCA-485
Description |
INFICON Part Number |
|
|
|
|
TCA-485 |
US Version |
916-600-G2 |
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|
TCA-485 |
German Version |
916-600-G3 |
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|
TCA-485 |
Japanese Version |
916-600-G4 |
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|
TCA-485 |
UK Version |
916-600-G5 |
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|
IPN 074-528-P1A
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1.6.1.1Communications Baud Rate
RS-232 — selectable: 9600, 4800, 2400
RS-485 — not selectable: 57.6K (57,600)
1.6.1.2Communications Cable
Communications cables are required to connect FabGuard Explorer to the Transpector. Cables are different and dependant on the Communications Interface.
If a single Transpector system was purchased, normally RS-232 Communications are used which requires a single communications cable. Refer to the Transpector Operating Manual (IPN 074-276) section titled "RS-232 Communications" for detailed information concerning RS-232 cabling.
If multiple Transpector sensors were purchased, RS-485 Communications must be used, which requires two cables per Transpector. Refer to the Transpector Operating Manual (IPN 074-276) section titled "RS-485 Communications" for detailed information regarding RS-485 cabling
Maximum Length
RS-232 — 50 feet (15 meters)
RS-485 — 1000 feet (305 meters)
1.6.1.3 USB to RS232 Standard Adapter Cable
For FabGuard Explorer computer installations requiring a USB connection rather than a serial port connection, INFICON offers a USB to RS-232 Standard Adapter Cable. The USB Serial Adapter, INFICON IPN 911-451-P1, provides an external DB9 serial interface to systems that support USB. This adapter cable works with both the Single Sensor version of FabGuard Explorer (with RS-232 cable) and the Multiple Sensor version of FabGuard Explorer (with RS-485 cable plus TCA485 adapter). Refer to the instructions included with this cable for specific installation directions.
1.6.1.3.1 Single Sensor Version (RS232)
Attach the male DB9 connector on the USB to RS-232 Standard Adapter Cable to the female DB9 connector on the Transpector RS-232 cable (IPN 600-1001-Px). Connect the USB connector on the USB to RS-232 Standard Adapter Cable to the computer. See Figure 1-1 on page 1-8 for the rest of the RS-232 cabling.
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FabGuard Explorer Operating Manual
Figure 1-1 RS-232 Connection
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1.6.1.3.2 Multiple Sensor Version (RS485 Plus TCA485 Adapter)
Attach the male DB9 connector on the USB to RS-232 Standard Adapter Cable to the female DB9 connector on the Transpector TCA485 Cable (IPN 600-1118-P1). Connect the USB connector on the USB to RS-232 Standard Adapter Cable to the computer. See Figure 1-2 for the rest of the RS-485 cabling.
Figure 1-2 |
RS-485 Installation |
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TCA Cable |
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USB |
USB/232 Adapter |
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1 - 8
IPN 074-528-P1A
IPN 074-528-P1A
FabGuard Explorer Operating Manual
1.6.2 RFS100 Communications
The INFICON RFS100 sensor uses RS-232 Communications with a Baud Rate of 19.2K (19,200).
For more information about RFS100 Communications, please see the RFS100 Operating Manual (IPN 074-423).
1.6.3 Quantus Communications
The INFICON Quantus sensor uses an Ethernet (TCP/IP Modbus) connection for communication to FabGuard Explorer.
For more information about Quantus Communications, please see the Quantus Operating Manual (IPN 074-510).
1.6.4 Stiletto Communications
The INFICON Stiletto particle detector (SPD) uses an Ethernet (TCP/IP Modbus) connection for communication to FabGuard Explorer
For more information about Stiletto Communications, please see the Stiletto Operating Manual (IPN 074-374).
1.7 How To Install FabGuard Explorer
Install FabGuard Explorer from within Windows as follows:
NOTE: This description assumes the CD/DVD ROM drive is drive "d". If it is not "d", substitute the appropriate drive letter.
1Insert the CD in the CD/DVD ROM Drive
2Select Start >> Run... to display the Run dialog.
3In the Open field, type d:\FabGuard_EX_Single_Installer.exe
for the Single Sensor version of FabGuard Explorer or type d:\FabGuard_EX_Multi_Installer.exe for the Multi-Sensor version of FabGuard Explorer.
4Select OK.
1 - 9
FabGuard Explorer Operating Manual
5 At the following prompt, click Next > to continue (see Figure 1-3 on page 1-10).
Figure 1-3 Initial Installation
6 Read the License Agreement and choose Yes to continue (see Figure 1-4).
Figure 1-4 License Agreement
IPN 074-528-P1A
1 - 10
FabGuard Explorer Operating Manual
7Choose what sensor drivers to install. Then click Next > to continue (see Figure 1-5 on page 1-11).
NOTE: ONLY install drivers for sensors that are currently installed on the system. The additional sensor drivers are available for install through the FabGuard installation CD at any time if a new sensor type is installed.
Figure 1-5 Sensor Type Selection
8Enter a user name and company. Then click Next > to continue (see Figure 1-6).
Figure 1-6 User Name and Company
IPN 074-528-P1A
9Select Start >> Run... to display the Run dialog.
10In the Open field, type d:\FabGuardHelp_Installer.exe
11At the following prompt, click Next > to continue (see Figure 1-7)
1 - 11
FabGuard Explorer Operating Manual
Figure 1-7 FabGuard Help Installation
12 Read the License Agreement and select Yes to continue (see Figure 1-8).
Figure 1-8 Help License Agreement
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528-P1A |
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074- |
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13 |
Enter a user name and company then click Next > to continue (see Figure 1-9 |
IPN |
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on page 1-13)
1 - 12
FabGuard Explorer Operating Manual
Figure 1-9 Customer Information
IPN 074-528-P1A
14When installation is complete, put the original CD in a safe storage area.
1.8How To Start FabGuard Explorer
There are several different ways to start FabGuard Explorer. The easiest way is to double-click on the icon that FabGuard Explorer installed on the desktop (see Figure 1-10).
Figure 1-10 FabGuard Icon
The first time FabGuard Explorer is run on a computer, it will start at the main screen with a prompt to setup connection to the installed sensors. See Chapter 3 for information on how to configure the communications interface, individual sensors, and user preferences on the system.
1 - 13
FabGuard Explorer Operating Manual
1.9 Where to Go From Here
This Operating Manual is intended to make the process of setting up, installing and using FabGuard Explorer a pleasurable and trouble-free experience. Please, take a few moments to look through it and become familiar with its contents.
The information in this manual is organized into the following chapters: Chapter 1, Getting Started
An introduction to the FabGuard Explorer application, provides instructions on how to install and run FabGuard Explorer and explains how to use this Operating Manual.
Chapter 2, How the Software Works
A discussion of the underlying principles of FabGuard Explorer’s operation and some general descriptions of the FabGuard Explorer user Interface.
Chapter 3, Setup and Configuration
A description of how to set up the software for installation and customize it to the user’s preferences.
Chapter 4, Data Acquisition
Discusses the methods of data acquisition inside of FabGuard Explorer. Chapter 5, Visualization
Discusses the visualization functions inside of FabGuard Explorer. Chapter 6, Maintenance
Explains the maintenance functions inside of FabGuard Explorer. This chapter helps keep the operating sensors in peak condition.
Chapter 7, Alarms
Introduces and explains the alarm functionality present in FabGuard Explorer. Chapter 8, When Things Go Wrong
Includes discussions about errors in FabGuard Explorer.
IPN 074-528-P1A
1 - 14
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