fanuc C1000i- A Maintenance Manual

GE Fanuc Automation

Computer Numerical Control Products

Laser C1000i―Model A

Maintenance Manual

GFZ-70255EN/01 December 2000

Warnings, Cautions, and Notes as Used in this Publication

Warning notices are used in this publication to emphasize that hazardous voltages, currents, temperatures, or other conditions that could cause personal injury exist in this equipment or may be associated with its use.

In situations where inattention could cause either personal injury or damage to equipment, a Warning notice is used.

Caution notices are used where equipment might be damaged if care is not taken.

GFL-001

Warning

Caution

Note

Notes merely call attention to information that is especially significant to understanding and operating the equipment.

This document is based on information available at the time of its publication. While efforts have been made to be accurate, the information contained herein does not purport to cover all details or variations in hardware or software, nor to provide for every possible contingency in connection with installation, operation, or maintenance. Features may be described herein which are not present in all hardware and software systems. GE Fanuc Automation assumes no obligation of notice to holders of this document with respect to changes subsequently made.

GE Fanuc Automation makes no representation or warranty, expressed, implied, or statutory with respect to, and assumes no responsibility for the accuracy, completeness, sufficiency, or usefulness of the information contained herein. No warranties of merchantability or fitness for purpose shall apply.

B-70255EN/01 TABLE OF CONTENTS

1 OVERVIEW

This manual describes the maintenance of the FANUC LASERMODEL C1000iA, as well as the structure, configuration, and operation of the laser oscillator. This manual is aimed at those personnel responsible for laser oscillator maintenance.

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1.OVERVIEW B-70255EN/01

1.1 ORGANIZATION OF THE MANUAL

This manual is organized as described below.

1. Overview This chapter describes the organization of this manual, applicable models, related manuals, and notes on reading this manual.

2. Safety This chapter describes the handling of lasers, and provides warnings, cautions and notes on high voltages, high temperatures, and toxicity. All users must read this chapter carefully to ensure safety.

3. Internal Structure This chapter describes the structure and operation of the laser oscillator.

4. Installation This chapter describes the installation and checking of the laser oscillator.

5. Maintenance This chapter provides information on when and how the consumable parts of the laser oscillator must be replaced.

6. Troubleshooting This chapter describes the actions to be applied in the event of a fault occurring in the laser oscillator.

7. Oscillator Connections This chapter describes the internal connections of the electrical system, cooling system, and gas system.

8. Unit Configuration This chapter describes the internal units of the laser oscillator.

9. Setting and Adjustment This chapter describes how to set and adjust the controls of the laser oscillator.

10. Replacement Procedures This chapter describes how to replace the individual units and parts of the laser oscillator.

11. Laser Optical System This chapter describes how to clean, replace, and align the optical components of the laser oscillator.

Appendix A. External View of Laser Oscillator B. Specifications C. Error Code List D. Paramter List E. Control Sequences in Laser Oscillator F. Refixing and Replacing Gas Tube G. Refixing and Replacing Water Tube H. Glossary

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B-70255EN/01 1.OVERVIEW

1.2 APPLICABLE MODELS

This manual covers the following models:

Model Abbreviation

FANUC LASER-MODEL C1000iA C1000iA

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1.OVERVIEW B-70255EN/01

1.3 RELATED MANUALS

The following manuals are available for the FANUC LASERMODEL C1000iA:

DESCRIPTIONS B-63192EN CONNECTION MANUAL B-63193EN

FANUC Series 16i-LA

FANUC LASER-MODEL C1000iA

OPERATOR’S MANUAL B-63194EN MAINTENANCE MANUAL B-63195EN PARAMETER MANUAL B-63200EN DESCRIPTIONS B-70252EN OPERATOR’S MANUAL B-70254EN MAINTENANCE MANUAL (This manual)

B-70255EN

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B-70255EN/01 1.OVERVIEW

1.4 TO USE THE LASER OSCILLATOR SAFETY

This manual contains precautions which must be observed during operation of the laser oscillator, to ensure the operator's safety and prevent damage to the oscillator. Each precaution is indicated by "Warning" or "Caution" according to its severity. Supplementary information is indicated by "Note". Read the contents of each "Warning", "Caution", and "Note" before attempting to use the oscillator.

WARNING

Precautions to be applied in those situations where there is a danger of the operator being killed or seriously injured.

CAUTION

Precautions to be applied in those situations where there is a danger of the operator being slightly injured or the oscillator being damaged.

NOTE

Supplementary information other than precautions.

The functions of a laser machining system depend not only on the laser oscillator, but also on the machine, power magnetics cabinet, servo system, CNC, and operator's panel. This manual describes only the laser oscillator. For a description of the other components, refer to the corresponding manuals, supplied by the machine tool builder.

- Read this manual thoroughly and store it in a safe place.

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2.SAFETY B-70255EN/01

2 SAFETY

This chapter describes precautions to be observed to ensure the safe operation of the laser oscillator. Read this chapter thoroughly before attempting to use the laser oscillator. Also, read the safety precautions in the operator's manual supplied by the machine tool builder. The laser oscillator may present a danger not only to the operator but also to other people working around the oscillator, up to a considerable distance away. The laser oscillator must, therefore, be operated only by a person who has received appropriate training. Only persons who have understood the internal structure of the laser oscillator and have received appropriate training can maintain the laser oscillator. A warning label is put on each dangerous position of the laser oscillator. Be extremely careful about the labeled positions.

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B-70255EN/01 2.SAFETY

2.1 WARNING

(1) It is extremely dangerous to expose your eyes to direct, scattered,

or reflected CO while the laser is operating. Exposure to laser light can cause blindness. If your eyes are accidentally exposed, seek medical advice immediately.

(2) Do not turn on the laser oscillator while a panel is removed or a

door is open. Operating the laser with a door open or panel removed may result in the operator being directly exposed to CO radiation. Exposure to laser light can cause blindness and/or severe burns. If your eyes are accidentally exposed to laser light, seek medical advice immediately. Before turning on the power during maintenance if absolutely necessary, wear protective glasses and clothing to prevent accidents.

laser light. Always wear protective glasses

2

laser

2

(3) If the laser oscillator is operated with a panel open, ultraviolet

radiation is emitted from the high-frequency discharge section. Gazing the discharge section for a long time can cause visual disturbances such as impaired eyesight. Always wear protective glasses during work. If you feel trouble with your eyes, seek medical advice immediately.

(4) Surround the laser machining tool with a fence made of a

material which absorbs laser light well (such as acrylic). Place appropriate warning notices on the fence. The door in the safety fence shall be fitted with an interlock switch such that opening the door stops the laser. Failure to provide such a fence exposes persons in the vicinity of the machine tool to the danger of being exposed to CO

laser

2

radiation and the associated risk of blindness. If a person is accidentally exposed to laser light, seek medical advice immediately.

(5) The laser beam shall be no higher than average eye height.

Enclose the path of the laser beam with covers. Do not leave the end of the beam path open. Place laser- absorbing material at the end of the beam path to absorb the beam's energy. A CO

laser beam is directional and has a high energy density.

2

Exposure to laser light can cause blindness. Flammable material may burn or explode if exposed to the laser beam. If your eyes are accidentally exposed to laser light, seek medical advice immediately.

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2.SAFETY B-70255EN/01

(6) A high voltage of 3 to 4 kV

is applied to some places in the

0-p

laser oscillator cabinet. Therefore, do not turn the power to the oscillator on or operate the oscillator when an oscillator panel is open. Operating the laser oscillator with a panel open can cause a touch on a high-voltage place, resulting in electric shock. Before turning on the power during maintenance if absolutely necessary, take measures against accidents.

(7) Before daily inspection, the replacement of a maintenance part

or maintenance, open the main circuit breaker and turn the power supply off (double power-off). To prevent the power from being inadvertently turned on, lock the circuit breaker open, and affix an indication of work in progress. Failure to turn off the power during inspection or replacement exposes the operator to the danger of electric shock. Before turning on the power during maintenance if absolutely necessary, take measures against accidents.

(8) The oscillator output mirror and focusing lens on the machining

head both have a substrate made of ZnSe (zinc selenide), a toxic substance. Therefore, do not touch the mirror or lens with your bare hands. Inhaling ZnSe dust may cause difficulty in breathing, completely stopping the breathing of the victim in the worst case. If you accidentally touch the mirror or lens with your bare hands, wash your hands well under running water. If you accidentally inhale ZnSe dust or debris, seek medical advice immediately.

(9) Do not look at the machining point without eye protection.

Otherwise, your eyes may be exposed to reflected laser light, resulting in blindness. If your eyes are accidentally exposed to laser light, seek medical advice immediately.

(10) Before attempting to machine any material for the first time,

consult with the manufacturer of the material. Some materials generate toxic gases when cut or drilled by a laser beam. Should you accidentally inhale any toxic gas, seek medical advice immediately.

(11) If the laser oscillator must be moved, entrust the work to the

machine tool builder whenever possible. If performed by inexperienced personnel, the oscillator may topple or be dropped, resulting in a potentially fatal accident.

When the machine tool builder is not available to move the

oscillator, follow the procedure described on the hanging method label. While moving the oscillator, stand well clear and never pass under the oscillator.

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B-70255EN/01 2.SAFETY

(12) Do not allow any dangerous or high-pressure gas to get into the

oscillator housing. The oscillator cabinet has a hermetic structure (dustproof and dripproof), it cannot be ventilated easily. Flammable gases such as oxygen can cause a fire or explosion. Toxic gases can harm operators during maintenance. Organic gases can degrade machining performance. High-pressure gases can damage a panel or the cabinet, resulting in injury from flying matters. If such a gas accidentally gets into the oscillator housing, remove a panel for ventilation. The installation room must be also well ventilated. To purge the oscillator housing, use purified, low-pressure air or nitrogen.

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2.SAFETY B-70255EN/01

2.2 CAUTION

(1) If there is a possibility of being exposed to CO2 laser radiation

exceeding the maximum permissible exposure (MPE) level for skin, wear protective clothing. Otherwise, there is a danger of being burnt.

(2) FANUC LASER-MODEL C1000iA is fitted with a red

semiconductor laser to indicate the approximate position of invisible CO semiconductor laser beam. Otherwise, your eyes may be injured.

(3) The gas circulating system in the oscillator becomes very hot.

Do not touch the gas pipes, turbo blower, heat exchanger, or exhaust pump, until they have cooled down sufficiently after the oscillator has been turned off. Otherwise, you may be burnt.

(4) Do not pass your hand in the optical path of the laser machine or

under the laser head when the shutter of the oscillator is open. When the shutter is open, a laser beam may be emitted from the oscillator accidentally. Before work in the optical path or under the laser head, confirm that the shutter is closed.

laser beam. Do not look directly at the

2

(5) The workpiece becomes very hot during machining. Never touch

the workpiece with your bare hands. Otherwise, you may be burnt.

(6) During machining, extremely hot chips are likely to be

generated. Unless sufficient caution is exercised, there is a danger of the operator being burnt, or of a fire being started.

(7) Some materials may burn or explode when laser machined.

Before attempting to machine any material for the first time, consult with the manufacturer of the material, to prevent the danger of fire of or the possibility of operator injury.

(8) The oscillator contains cooling fan units. Although the fan units

are fitted with a finger guard, to prevent injury, keep your hands well away from the fans.

(9) The oscillator is controlled according to the CNC internal

parameter settings. If a numeric value different from a setting is entered and the oscillator is operated, the oscillator may malfunction. In the worst case, the oscillator may be damaged.

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B-70255EN/01 2.SAFETY

2.3 NOTE

(1) During installation or maintenance necessitating the opening of

an oscillator door or the removal of a panel, only persons who have undergone maintenance training should operate the laser. In such a case, extreme caution must be exercised.

(2) Warning labels are affixed to those parts of the oscillator where

there is a danger of exposure to laser radiation. Observe the precautions given on the labels. (Section 2.4 shows the warning labels.)

(3) Laser products shall conform to the regulations laid down in the

laser safety standard, including that stipulating control using a key. The oscillator start signal (RUN ON) shall be controlled with a key switch such that the oscillator cannot be turned on without a specific key. Control using a key ensures that other than the authorized personnel cannot operate the laser oscillator. It is extremely dangerous if a person who is unfamiliar with the equipment attempts to operate the laser oscillator.

(4) The shutter shall be unlocked only while a beam is being output.

Otherwise, keep the shutter locked to provide protection should the laser accidentally be turned on.

(5) Do not discard a used output mirror or focusing lens together

with regular waste. If the output mirror or focusing lens is replaced, return the original to the supplier or entrust it to a specialized disposal company.

(6) Do not place any flammable material (such as paper, cloth, or

wood) near the workpiece table.

(7) Keep a fire extinguisher beside the unit.

(8) The FANUC LASER-MODEL C1000iA is equipped with an

alarm lamp. The alarm lamp blinks while discharge is in progress or whenever laser radiation is possible. While the alarm lamp is blinking, pay careful attention to laser radiation and high voltages.

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2.SAFETY B-70255EN/01

2.4 WARNING LABELS

The oscillator uses high voltages and laser beam radiation. Such hazards are indicated with warning labels attached to the positions shown in Fig. 2.4 (a) to (b).

Fig. 2.4 (a) Warning label positions (C1000iA : front view)

Fig. 2.4 (a) Warning label positions (C1000iA : rear view)

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B-70255EN/01 2.SAFETY

(1) Class indication label (JPN)

(1) Class indication label (FDA)

(2) Warning label

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2.SAFETY B-70255EN/01

(3) Aperture label

(4) Suspension method label

(5) Access panel

(6) Label inside the access panel

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B-70255EN/01 2.SAFETY

(7) Discharge section label

(8) Certification label

(9) Equipment nameplate

(10) Manufacturer's address label

(11) Label for regulating the atmospheric gases in the oscillator

housing

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2.SAFETY B-70255EN/01

2.5 OPTICAL PATHS IN THE OSCILLATOR

The figures below show the laser optical paths inside the oscillator.

Fig.2.5(a) Optical paths in the C1000iA

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B-70255EN/01 3.INTERNAL STRUCTURE

3 INTERNAL STRUCTURE

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3.INTERNAL STRUCTURE B-70255EN/01

3.1 OUTLINE

Fig. 3.1 show the internal structure of the laser oscillator. The C1000iA consists of a laser resonator, discharge drive unit, forced gas circulating system, pressure controller, CNC interface, and a protective housing.

Fig. 3.1 C1000iA internal structure

(1) Laser resonator

The laser resonator consists of several discharge tubes, connected in series using folding mirrors, with a rear mirror and output mirror placed at the open ends of the discharge tubes, thus sealing the tubes. The resonator is fitted with a gas pipe connecting port through which laser gas is fed into the discharge tubes. A discharge from the electrodes of the discharge tube energizes CO

molecules, which emit light. This light is amplified by

2

stimulated emission, repeated between the rear mirror and output mirror, a laser beam being emitted from the output mirror.

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B-70255EN/01 3.INTERNAL STRUCTURE

(2) Discharge drive unit

The discharge drive unit consists of a laser power supply, matching box, and discharge tubes. High-frequency output of 2 MHz that is controlled by the CNC discharges the laser gas flows through discharge tubes to energize CO

molecules.

2

(3) Forced gas circulating system

A gas circulating system is configured by connecting the resonator and turbo blower with a circulating pipe. Laser gas is forced through the discharge tubes at a speed of 200 m/s or higher. A water-cooled heat exchanger, used to cool the hightemperature gas from the discharge tubes, is provided at the inlet side of the turbo blower. At the outlet side of the turbo blower, another water-cooled heat exchanger dissipates the compression heat.

(4) Pressure controller

The laser gas pressure within the forced gas circulating system is controlled by commands issued from the CNC, thus ensuring stable laser output.

(5) CNC interface

Interface used to connect a FANUC Series 16i-L. CNC commands that, control the operation of the laser oscillator, such as start/stop and laser output, are input via this interface.

(6) Protective housing

An enclosure that houses the above components. The housing, consisting of metal panels, completely encloses the laser oscillator, thus protecting the operator from exposure to laser radiation and from high voltages. All panels are screw-fixed and cannot be removed without an appropriate tool.

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3.INTERNAL STRUCTURE B-70255EN/01

3.2 COMPONENT DETAILS

This section describes the internal structure of the C1000iA more specifically. Fig. 3.2 is an internal structural drawing.

Fig. 3.2 C1000iA structural drawing

(1) Resonator

The resonator consists of an output mirror, rear mirror, folding mirrors, discharge tubes, power sensor unit, etc. It converts electrical energy first to laser gas, then to optical energy (10.6mm single-wavelength laser beam).

(2) Output mirror

A transmitting/reflecting mirror which outputs the laser beam after it has been amplified. The output mirror consists of a ZnSe (zinc selenide) substrate, coated with dielectric. ZnSe is tightly toxic. Be particularly careful, therefore, when handling the output mirror.

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B-70255EN/01 3.INTERNAL STRUCTURE

(3) Rear mirror

A reflecting mirror consisting of a Ge (germanium) substrate, coated with dielectric. Having a high reflectance of 99.5%, the rear mirror is used to reflect the laser beam within the resonator while transmitting

0.5% of the laser light so that the beam can be monitored externally.

(4) Folding mirror

A mirror unit which reflects the laser beam at a 90-degree angle. The folding mirror consists of a block with a surface tilting to a 45-degree angle and an Si (silicon) substrate, coated with multilayer dielectric film.

(5) Discharge tube

A pair of Ag (silver) electrodes are metallized on the surface of a hollow quartz glass pipe. A high-frequency discharge between these electrodes injects electrical energy into the laser gas. Each electrode is coated with ceramic, preventing it from degrading and thus improving system reliability.

(6) Trigger electrode

A predischarge placed outside the laser oscillation area can facilitate the start of the main discharge. With it, the laser output is completely zero when the beam is off.

(7) Power sensor

An optical sensor which detects the intensity of the laser beam, transmitted through the rear mirror, thus enabling monitoring of the laser output level.

(8) Gas circulating system

A gas circulating path including a turbo blower, heat exchangers, and circulating pipes, which circulates laser gas in the discharge tubes at high speed.

(9) Turbo blower

During laser oscillation, the laser gas pressure is 1330 – 9310 Pa. The turbo blower circulates this rough-vacuum gas at high speed without contaminating the gas.

(10) Heat exchanger (inlet)

Water-cooled heat exchanger used to cool the laser gas that has been heated by discharge, before it is drawn into the turbo blower.

(11) Heat exchanger (outlet)

Water-cooled heat exchanger used to cool the laser gas that has been heated by compression in the turbo blower, before being forced into the discharge tubes.

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3.INTERNAL STRUCTURE B-70255EN/01

(12) Gas controller

The gas controller always monitors the gas pressure in each discharge tube and supplies the fresh laser gas to the circulating system to keep the pressure constant. It also monitors the supply status of the laser gas, purge check for the circulating system, and other items and has a function of adjusting the amount of flow of the gas to be exhausted.

(13) Exhaust pump unit

This unit is used to vacuum-exhaust laser gas from the gas circulating system such that its pressure falls to that used for laser oscillation. Also, within this unit, a small amount of circulating gas is constantly being exchanged, to prevent degradation of the circulating gas.

(14) Hour meter

The hour meter indicates the total number of hours that the laser oscillator has operated (how many hours the exhaust pump has operated), to indicate whether maintenance or inspection is necessary.

(15) Shutter

The shutter has a rotary arm operated by a rotary solenoid and an Au (gold)-evaporated reflecting mirror attached to the arm. It can be opened and closed by CNC commands. It also has a position sensor and a temperature sensor for safety and always monitors the open/close status and shutter temperature.

(16) Beam absorber

While the laser oscillator is operating with the shutter closed, the laser beam is guided into the beam absorber. The beam absorber absorbs nearly 100% of laser beam and is water-cooled, allowing it to safely absorb the beam for relatively long periods. For safety, the beam absorber is equipped with a temperature sensor which allows the system to monitor the temperature of the beam absorber.

(17) Distribution unit

This unit distributes cooling water, supplied from either a chiller unit or a temperature-regulated external water supply, to each unit in the laser oscillator. For safety, the water distribution unit is equipped with a flow sensor which allows the system to monitor the flow rate of the cooling water.

(18) Laser power supply

A power supply for generating a discharge in each discharge tube. The laser power supply receives the three-phase AC input at 200/220V and outputs 2-MHz high-frequency power controlled with stability by commands from the CNC.

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B-70255EN/01 3.INTERNAL STRUCTURE

(19) Matching box

The matching box contains a matching circuit, consisting of coils and capacitors, which ensures that power is effectively input to the discharge tubes.

(20) Intermediate PCB B

This PCB transmits signals output by the shutter section, such as those from the limit switch, absorber temperature sensor, power sensor, and condensation sensor, to the interface PCB.

(21) Input unit

The power magnetics cabinet distributes power, supplied from an external unit, to each unit in the laser oscillator. It also protects each unit from overcurrents.

(22) Input unit control PCB

This PCB has functions of transmitting the contactor open/close signals according to CNC commands and of notifying the CNC of the open/close status of the circuit breaker in the input unit.

(23) Interface PCB

Transfers signals to and from the CNC via the FANUC I/O Link (serial interface).

(24) Stabilized power supply

This unit converts the 200/220 VAC power source to DC power for the interface PCB and other units.

(25) Condensation sensor

The condensation sensor is mounted above the output mirror holder. If condensation occurs on this sensor, the resistance changes, an alarm (abnormal water temperature) occurs, and the oscillator is stopped. It prevents faults in each unit from occurring due to condensation.

(26) High-frequency inverter

This inverter drives the turbo blower. It is responsible for acceleration/deceleration control during start and stop of the blower.

(27) Turbo PCB

This PCB monitors overheating, the oil level, and frequency reached signal of the turbo blower.

(28) Guide laser (diode laser)

A diode laser is overlaid on the same optical axis as a guide beam for checking the optical axis because the CO

laser beam is

2

invisible to the unaided eye. The guide beam is emitted in synchronization with the mechanical shutter only when the shutter is closed. The guide laser can be used for roughly

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fanuc C1000i- A Maintenance Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

TABLE OF CONTENTS

1 OVERVIEW

1.1 ORGANIZATION OF THE MANUAL

1.2 APPLICABLE MODELS

1.3 RELATED MANUALS

1.4 TO USE THE LASER OSCILLATOR SAFETY

2 SAFETY

2.1 WARNING

2.2 CAUTION

2.3 NOTE

2.4 WARNING LABELS

2.5 OPTICAL PATHS IN THE OSCILLATOR

3 INTERNAL STRUCTURE

3.1 OUTLINE

3.2 COMPONENT DETAILS