Capacitance Diaphragm Gauge
Porter™ CDG020D
Operating Manual
Incl. EC Declaration of Conformity
tina80e1 (2012-06) |
1 |
Product Identification
In all communications with INFICON, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.
Model: |
|
PN: |
|
SN: |
|
V |
W |
2 |
tina80e1 (2012-06) |
Validity
This document applies to products of the CDG020D series.
Part numbers of standard products are indicated below. OEM products have other part numbers and different parameter settings (e.g. customized measurement range) as defined in the corresponding ordering information.
3CAx-xxx-0x00
Receptacle
Flange
Unit
Measurement range (F.S.)
Accuracy
0 FCC
1 D-Sub, 9-pin
A Binder M12, 8-pin
1 DN 16 ISO-KF C 4VCR male D 4VCR female E 8VCR female
5 Torr (x 133 Pa; x 1.3 mbar)
6 mbar (x 100 Pa)
9 10 A 20 B 50 C 100 D 200 E 500
F 1000 (Torr only) G 1100 (mbar only)
3 1%
4 0.5%
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document correspond to gauges with D-Sub receptacle and the DN 16 ISO-KF vacuum connection. They apply to other gauges by analogy.
We reserve the right to make technical changes without prior notice.
All dimensions in mm.
tina80e1 (2012-06) |
3 |
Intended Use
The Capacitance Diaphragm Gauges of the CDG020D series are intended for absolute pressure measurement of gases in their respective pressure ranges (→ 3).
The gauges can be operated in connection with an INFICON Vacuum Gauge Controller (VGC series) or another appropriate measuring unit.
Function
The Capacitance Diaphragm Gauge consists of a capacitive sensor element made of aluminum oxide ceramics and electronics which convert the capacitance into a DC voltage output signal.
The output signal is linear to the measured pressure and independent of the gas type.
Trademarks
Porter™ |
INFICON GmbH |
VCR® |
Swagelok Marketing Co. |
Patents
EP 1070239 B1, 1040333 B1
US 6528008 B1, 6591687 B1, 7107855 B2, 7140085 B2, 7536915 B2
4 |
tina80e1 (2012-06) |
Contents
Product Identification |
2 |
||
Validity |
3 |
||
Intended Use |
4 |
||
Function |
4 |
||
Trademarks |
4 |
||
Patents |
4 |
||
1 |
Safety |
6 |
|
1.1 |
|
Symbols Used |
6 |
1.2 |
|
Personnel Qualifications |
6 |
1.3 |
|
General Safety Instructions |
7 |
1.4 |
|
Liability and Warranty |
7 |
2 |
Technical Data |
8 |
|
3 |
Installation |
13 |
|
3.1 |
|
Vacuum Connection |
13 |
3.2 |
|
Power Connection |
16 |
3.2.1 |
FCC68, 8-pin Connector |
17 |
|
3.2.2 |
D-Sub, 9-pin Connector |
18 |
|
3.2.3 |
Binder M12, 8-pin |
19 |
|
4 |
Operation |
20 |
|
4.2 |
|
Zeroing the Gauge |
20 |
4.2.1 |
Zero Adjustment |
20 |
|
5 |
Deinstallation |
22 |
|
6 |
Maintenance, Repair |
23 |
|
7 |
Returning the Product |
24 |
|
8 |
Disposal |
25 |
|
Further Information |
26 |
||
ETL Certification |
26 |
||
EC Declaration of Conformity |
27 |
||
For cross-references within this document, the symbol (→ XY) is used, for cross-references to further documents, listed under "Further Information", the symbol (→ [Z]).
tina80e1 (2012-06) |
5 |
1 Safety
1.1Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.
Notice
1.2Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.
6 |
tina80e1 (2012-06) |
1.3General Safety Instructions
•Adhere to the applicable regulations and take the necessary precautions for the process media used.
Consider possible reactions with the product materials.
•Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.
•Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
1.4Liability and Warranty
INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.) on the product
•use the product with accessories not listed in the product documentation.
The end-user assumes the responsibility in conjunction with the process media used.
Gauge failures due to contamination or wear and tear are not covered by the warranty.
tina80e1 (2012-06) |
7 |
2 |
Technical Data |
|
|
|
Measurement range |
→ "Validity" |
|
|
Accuracy 1) |
≤1% of reading |
|
|
3CA3-xxx-xxxx |
|
|
|
3CA4-xxx-xxxx |
≤0.5% of reading |
|
|
Temperature effect on zero |
0.02% F.S./ °C |
|
|
Temperature effect on span |
0.02% of reading/ °C |
|
|
Resolution |
0.05% F.S. |
|
|
Gas type dependence |
none |
|
|
Output signal analog |
|
|
|
(measuring signal) |
|
|
|
Voltage range |
–0.2 … +10.24 V |
|
|
Measuring range |
0 … +10 V |
|
|
Relationship voltage-pressure |
linear |
|
|
Output impedance |
10 Ω (short-circuit proof) |
|
|
Loaded impedance |
>10 kΩ |
|
|
Response time |
100 ms |
|
|
Gauge identification |
Resistance 13.2 kΩ refer- |
|
|
|
enced to supply common |
|
1)Non-linearity, hysteresis, repeatability in the calibrated range at 25 °C ambient operating temperature without temperature effects after operation of 2 h.
8 |
tina80e1 (2012-06) |
Supply
DANGER
The gauge may only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded protective extralow voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to be fused 2).
Supply voltage |
|
at the gauge |
+13 … +32 VDC |
|
Class 2 / LPS |
ripple |
≤50 mVpp |
Current consumption |
<20 mA |
Power consumption |
≤0.3 W |
Fuse required 2) |
1 AT (slow), automatic reset |
|
(Polyfuse) |
The gauge is protected against reverse polarity of the supply voltage.
Electrical connection |
|
3CAx-xxx-0xxx |
FCC68/RJ45, 8-pin, socket |
3CAx-xxx-1xxx |
D-Sub, 9-pin, male |
3CAx-xxx-Axxx |
Binder M12, 8-pin, male |
Sensor cable |
|
3CAx-xxx-0xxx |
8-pin plus shielding |
3CAx-xxx-1xxx |
9-pin plus shielding |
3CAx-xxx-Axxx |
8-pin plus shielding |
Cable length |
≤100 m (0.14 mm² conductor) |
For longer cables, larger conductor cross-sections are required.
|
|
Grounding concept |
|
|
|
|
|
Vacuum flange - signal common |
→ "Power Connection" |
|
|
|
|
Supply common - signal common |
conducted separately; for dif- |
|
|
|
|
|
ferential measurement (10 Ω) |
|
|
|
|
|
|
|
|
|
|
2) INFICON controllers fulfill this requirement. |
|
||
|
|
|
|
|
|
tina80e1 (2012-06) |
9 |
|
|||
Loading...