fanuc Laser C Maintenance Manual

Computer Numerical Controls
GE Fanuc Aut omation Eu r ope
Laser C Series
Maintenance Manual
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E
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7
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TECHNOLOGY AND MORE
No part of this manual may be reproduced in any form.
All specifications and designs are subject to change without notice.
The products in this manual are controlled based on Japan’s “Foreign Exchange and Foreign Trade Law”. The export from Japan may be subject to an export license by the government of Japan. Further, re-export to another country may be subject to the license of the government of the country from where the product is re-exported. Furthermore, the product may also be controlled by re-export regulations of the United States government. Should you wish to export or re-export these products, please contact FANUC for advice.
In this manual we have tried as much as possible to describe all the various matters. However, we cannot describe all the matters which must not be done, or which cannot be done, because there are so many possibilities. Therefore, matters which are not especially described as possible in this manual should be regarded as ”impossible”.
This manual contains the program names or device names of other companies, some of which are registered trademarks of respective owners. However, these names are not followed by ® or in the main body.
B–70115EN/03

Table of Contents

1. OVERVIEW 1. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
1.1 ORGANIZATION OF THE MANUAL 2. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
1.2 APPLICABLE MODELS 3. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
1.3 RELATED MANUALS 4. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
1.4 TO USE THE LASER OSCILLATOR SAFETY 5. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2. SAFETY 6. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.1 LASER BEAM 7. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.2 HIGH VOLTAGE 12. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.3 SAFETY ENCLOSURE (AT YOUR WORK STATION) 20. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.4 FIRE 20. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.5 TOXIC FUME 20. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.6 HIGH TEMPERATURE 21. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.7 WARNING LABELS 29. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.8 KEY CONTROL 42. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.9 SHUTTER LOCK 42. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.10 EMERGENCY STOP BUTTON 43. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2.11 WARNING LIGHT (OPTIONAL) 43. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3. INTERNAL STRUCTURE 44. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.1 GENERAL 45. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3.2 COMPONENT DETAILS 53. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4. INSTALLATION 66. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.1 INSTALLATION PROCEDURE 67. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.2 PREPARATION PRIOR TO SHIPMENT 76. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.2.1 Packing for Transportation 76. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.2.2 Removing Cooling Water 77. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.3 DETAILS OF CHECKING 79. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.4 OSCILLATOR CONNECTIONS 87. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.4.1 Cooling Water 87. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.4.1.1 Specification of the cooling water 91. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.4.1.2 Water treating agent 92. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.4.1.3 Chemical cleaner 92. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.4.1.4 Anti–freezing agent 93. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.4.2 Laser Gas 94. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.4.2.1 Laser gas specification 94. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.4.2.2 Gas pipe 94. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.4.3 Electrical Connection 95. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.4.3.1 NC–to–oscillator connection and power supply cable connection 95. . . . . . . . . . . . . . . . . . . . . .
4.4.3.2 Details of safety circuit 101. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.4.4 Inter–unit Connections (C3000C Only) 108. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.4.4.1 Electrical cables 108. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.4.4.2 Connection 108. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.4.4.3 Connection of cooling water pipes 108. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
4.4.4.4 Gas piping 109. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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5. MAINTENANCE 1 10. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.1 DAILY INSPECTION 111. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.2 PERIODIC MAINTENANCE 112. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.3 DETAILS OF MAINTENANCE 114. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.3.1 Turbo Blower Oil 117. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.3.2 Exhaust Pump Oil 119. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.3.3 Exhaust Pump Filter 119. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.3.4 Exhaust System Filter 121. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.4 MAINTENANCE PARTS 123. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6. TROUBLESHOOTING 134. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.1 TROUBLESHOOTING PROCEDURE 135. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.2 ERROR MESSAGES AND COUNTERMEASURES 135. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.3 RESPONDING TO ALARM MESSAGES ON THE SCREEN 136. . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.4 MAJOR FAULTS 157. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.4.1 Laser Power Supply Alarm Display 157. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.4.2 Power Supply cannot be Switched off Using CRT/MDI Switch. 159. . . . . . . . . . . . . . . . . . . . . . .
6.4.3 Power Supply cannot be Switched on Using CRT/MDI Switch. 159. . . . . . . . . . . . . . . . . . . . . . .
6.4.4 Laser Output Just After Switch on is Low. 159. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.4.5 Display of Fluctuating Laser Output on CRT 160. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.4.6 Non–fuse Breaker for Cooling Fans, Electromagnetic Valves;
and Stabilized Power Sources is Tripping. 160. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.4.7 Electromagnetic Contactor of Vane Pump Trips Thermally. 161. . . . . . . . . . . . . . . . . . . . . . . . . .
6.4.8 Main Breaker Trips. 161. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.4.9 Excessive Laser Gas Consumption 162. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.4.10 High–frequency Inverter Alarm Display 162. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.5 OBSERVING VOLTAGE OF POWER LINE 165. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.5.1 Measurement of Voltage 165. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.5.2 Phase Relation 165. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.5.3 Measurement of Voltage of DC Power Supply Unit 166. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.5.4 Checking the IF PCB Signals 170. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.5.5 Checking the Jumper Pins (FS16–L, 16i–L) 170. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.6 INDICATION OF STATE BY MEANS OF SELF DIAGNOSTIC FUNCTION 171. . . . . . . . . . . . . . .
6.6.1 Data Items Displayed on the Diagnosis Screen 171. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.6.2 Laser Oscillator Status Display (FS16–L, 16i–L) 173. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.6.3 Laser Oscillator Status Display (FS0–L) 180. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
7. OSCILLATOR CONNECTIONS 186. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
7.1 ELECTRICAL CONNECTIONS 187. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
7.2 COOLING WATER PIPING 194. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
7.3 GAS PIPING 202. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
8. UNIT CONFIGURATION 210. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
8.1 INPUT UNIT 211. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
8.2 INTERMEDIATE PCB B 228. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
8.3 PRESSURE CONTROL UNIT 229. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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9. SETTING AND ADJUSTMENT 232. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1 LASER POWER SUPPLY UNIT 233. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.1 Checking before Adjustment, and Setting 233. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.2 Base Discharge Adjustment 235. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.2.1 C1500B (without a trigger electrode) (step 1) 235. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.2.2 C2000B (step 1) 235. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.2.3 C3000C (step 1) 236. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.2.4 C2000B, C3000C (step 2) 236. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.2.5 C6000B 236. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.2.6 C1500B (with a trigger electrode), C2000C, C3000D 238. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.2.7 C4000A 238. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.3 Maximum Output Adjustment 240. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.4 Fine Adjustment of VR11 and VR13 240. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.5 Pulse Output Test 241. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.6 Completion of Adjustment 241. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.7 Alarm Level of Laser PSU 243. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.2 TURBO PCB 245. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.3 HIGH–FREQUENCY INVERTER 248. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.3.1 Adjusting the Inverter (A90L–0001–0382/C: Model Name: HFC–VAH2) 248. . . . . . . . . . . . . . .
9.3.2 Adjusting the Inverter (A90L–0001–0464/CE and 0465/CE: Model Name: JH300) 251. . . . . . .
9.4 PRESSURE CONTROL UNIT 258. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.4.1 Setting the Gas Supply Pressure Sensor 258. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.4.2 Setting the Atmospheric Pressure Sensor 258. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.5 ADJUSTING THE EXHAUST CONTROL UNIT
(ADJUSTING THE LASER GAS CONSUMPTION) 260. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.6 SETTING THE POWER INPUT COMPENSATION COEFFICIENT 261. . . . . . . . . . . . . . . . . . . . . .
9.7 WATER FLOW SENSOR 262. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.7.1 Adjusting the Water Flow Sensor for C1500B, C2000B, and C3000C 262. . . . . . . . . . . . . . . . . .
9.7.2 Adjusting the Flow Sensor of the C2000C, C3000D, C4000A, and C6000B 264. . . . . . . . . . . . .
9.8 DISCHARGE AGING 265. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10. REPLACEMENT PROCEDURES 272. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.1 INPUT UNIT 273. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.1.1 Replacing the Stabilized Power Supply 273. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.1.2 Replacing the Input Unit Control PCB 273. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.1.3 Replacing the FS0–L Interface PCB (A16B–1110–0223) on the Oscillator Side 273. . . . . . . . . .
10.1.4 Replacing the FS16–L, FS16i–L Interface PCBs on the Oscillator Side 274. . . . . . . . . . . . . . . . .
10.2 REPLACING THE LASER POWER SUPPLY 276. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.3 REPLACING THE MATCHING BOX 288. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.4 REPLACING THE TURBO BLOWER 289. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.5 REPLACING THE TURBO PCB 292. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.6 REPLACING INTERMEDIATE PCB B 292. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.7 REPLACING THE EXHAUST PUMP 293. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.8 REPLACING THE PRESSURE CONTROL UNIT 295. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.9 REPLACING THE EXHAUST CONTROL UNIT 296. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.10 REPLACING A DISCHARGE TUBE 299. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.11 REPLACING A FAN UNIT 300. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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TABLE OF CONTENTS
10.11.1 Replacing a Fan Unit 300. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.11.2 Replacing a Fan–assisted Radiator 300. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.12 REPLACING THE POWER SENSOR UNIT 301. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.13 REPLACING THE SHUTTER SECTION 302. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.13.1 Replacing the Shutter Unit 302. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.13.2 Replacing the Shutter Mirror 302. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.13.3 Replacing the Shutter Switch 302. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.14 REPLACING THE BEAM ABSORBER 305. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.15 REPLACING THE HIGH–FREQUENCY INVERTER 309. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.16 REPLACING THE WATER DISTRIBUTION UNIT 310. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.17 REPLACING THE FLOW SENSOR 319. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.18 REPLACING THE DEW SENSOR 321. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.19 REPLACING THE SEMICONDUCTOR LASER 321. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.20 REPLACING THE TRIGGER ELECTRODE 322. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
B–70115EN/03
1 1. LASER OPTICAL SYSTEM 324. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.1 CLEANING OPTICAL PARTS 325. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.1.1 Cleaning and Replacing the Output Coupler 330. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.1.2 Cleaning and Replacing the Rear Mirror 334. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.1.3 Cleaning and Replacing the Folding Mirrors 336. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.1.4 Cleaning and Replacing the Zero–shift Mirror and Circular Polarization Mirror 339. . . . . . . . . .
11.2 OPTICAL AXIS ADJUSTMENT 341. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.2.1 Alignment of the Resonator (Maximum Power Method) 341. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.2.1.1 Method of obtaining a maximum power by adjusting all mirrors 341. . . . . . . . . . . . . . . . . . . . . .
11.2.1.2 Alignment procedure during installation after transportation 343. . . . . . . . . . . . . . . . . . . . . . . . .
11.2.1.3 Alignment procedure at mirror cleaning time 344. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.2.1.4 Obtaining a maximum power 345. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.2.1.5 Burn pattern collection and beam mode evaluation 346. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.2.2 Alignment of the Laser Diode 354. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.2.2.1 Adjusting the beam center of the laser diode beam superimposed on the CO2 laser beam 354. .
11.2.2.2 Adjusting the diameter of the laser diode beam 354. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.2.3 Alignment of the Beam Folding Unit 356. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
APPENDIX
A. EXTERNAL VIEW 363. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
B. FANUC LASER C SERIES SPECIFICATIONS 379. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
C. ERROR CODE LIST 383. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D. PARAMETERS 385. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D.1 PARAMETERS FOR ENABLING/DISABLING VARIOUS FUNCTIONS 386. . . . . . . . . . . . . . . . . .
D.2 PARAMETERS FOR DISCHARGE TUBE SELECTION 392. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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D.3 PARAMETERS FOR CONTOURING CONDITIONS 393. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D.4 PARAMETERS FOR EDGE MACHINING CONDITIONS 394. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D.5 PARAMETERS FOR PIERCING CONDITIONS 396. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D.6 PARAMETERS FOR HIGH–SPEED PIERCING CONDITIONS 397. . . . . . . . . . . . . . . . . . . . . . . . . .
D.7 PARAMETERS FOR POWER CONTROL 399. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D.8 PARAMETERS FOR ASSIST GAS PRESSURE AND TIME SETTING 402. . . . . . . . . . . . . . . . . . . .
D.9 PARAMETERS FOR LASER MAINTENANCE TIMING INDICATION FUNCTIONS 405. . . . . . .
D.10 PARAMETERS FOR THE OSCILLATOR 406. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D.11 PARAMETERS FOR DISCHARGE 410. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D.12 PARAMETERS FOR GAS CONTROL (1) 412. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D.13 PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL ALARMS 416. . . . . . . . . . . . . . . . . . . . .
D.14 PARAMETERS FOR LASER POWER/VOLTAGE DROP 417. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D.15 PARAMETERS FOR POWER TABLE SETTING 419. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D.16 AUTOMATIC AGING FUNCTION 421. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D.17 PARAMETERS FOR TRACING (DETECTION) 426. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D.18 PARAMETERS FOR TRACING (DISPLAY) 428. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D.19 PARAMETERS FOR TRACING (INTEGRAL PROCESSING) 429. . . . . . . . . . . . . . . . . . . . . . . . . . .
D.20 PARAMETERS FOR TRACING (PHASE COMPENSATION) 430. . . . . . . . . . . . . . . . . . . . . . . . . . .
D.21 PARAMETERS FOR TRACING (DISPLACEMENT) 431. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D.22 PARAMETERS FOR TRACING (FEEDRATE COMMAND) 433. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D.23 PARAMETERS FOR TRACING (APPROACH) 434. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D.24 PARAMETERS FOR CONSTANT OPTICAL PATH LENGTH CONTROL 435. . . . . . . . . . . . . . . . .
D.25 LASER GAS MIXER FUNCTION 437. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
D.26 PARAMETERS FOR GAS CONTROL (2) 439. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TABLE OF CONTENTS
E. CONTROL SEQUENCES IN LASER OSCILLATOR 441. . . . . . . . . . . . . . . . . . . . . . . . . . .
E.1 OUTLINE OF LASER OSCILLATION SEQUENCES 442. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
E.2 INTRA–TUBE GAS PRESSURE CONTROL SEQUENCES 444. . . . . . . . . . . . . . . . . . . . . . . . . . . . .
E.3 TUBE VOLTAGE CONTROL SEQUENCES 447. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
E.4 OSCILLATION SEQUENCES FLOW CHART 450. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
F. REFIXING AND REPLACING GAS TUBE 456. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
F.1 REFIXING TUBE 457. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
F.2 REPLACING TUBE 458. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
G. REFIXING AND REPLACING WATER TUBE 459. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
G.1 REFIXING TUBE TO BRASS FITTING 460. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
G.2 REPLACING TUBE 461. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
H. GLOSSARY 462. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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1. OVERVIEW
1
B–70115EN/03

OVERVIEW

This manual describes the maintenance of the FANUC LASER C series, as well as the structure, configuration, and operation of the laser oscillator . This manual is aimed at those personnel responsible for laser oscillator maintenance.
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1. OVERVIEW
1.1

ORGANIZATION OF THE MANUAL

This manual is organized as described below.
1. Overview This chapter describes the organization of this manual, applicable models, related manuals, and notes on reading this manual.
2. Safety This chapter describes the handling of lasers, and provides warnings, cautions and notes on high voltages, high temperatures, and toxicity. All users must read this chapter carefully to ensure safety.
3. Internal Structure This chapter describes the structure and operation of the laser oscillator.
4. Installation This chapter describes the installation and checking of the laser oscillator.
5. Maintenance This chapter provides information on when and how the consumable parts of the laser oscillator must be replaced.
6. Troubleshooting This chapter describes the actions to be applied in the event of a fault occurring in the laser oscillator.
7. Oscillator Connections This chapter describes the internal connections of the electrical system, cooling system, and gas system.
8. Unit Configuration This chapter describes the internal units of the laser oscillator.
9. Setting and Adjustment This chapter describes how to set and adjust the controls of the laser oscillator.
10.Replacement Procedures This chapter describes how to replace the individual units and parts of the laser oscillator.
11.Laser Optical System This chapter describes how to clean, replace, and align the optical components of the laser oscillator.
Appendix
1. Appearance of the Laser Oscillator
2. FANUC LASER C series Specifications
3. Error Code List
4. Parameters
5. Control Sequences in Laser Oscillator
6. Refixing and Replacing Gas Tube
7. Refixing and Replacing Water Tube
8. Glossary
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1. OVERVIEW
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1.2

APPLICABLE MODELS

This manual covers the following models :
Models Abbreviation
FANUC LASER–MODEL C1500B C1500B FANUC LASER–MODEL C2000B C2000B FANUC LASER–MODEL C2000C C2000C FANUC LASER–MODEL C3000C C3000C FANUC LASER–MODEL C3000D C3000D FANUC LASER–MODEL C4000A C4000A FANUC LASER–MODEL C6000B C6000B
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1. OVERVIEW
1.3

RELATED MANUALS

The following manuals are available for the FANUC LASER C series : FANUC Series 0–L DESCRIPTIONS B–61572E
CONNECTION MANUAL B–61573E OPERATOR’S MANUAL B–61574E MAINTENANCE MANUALB–61575E
FANUC Series 16–LA DESCRIPTIONS B–61852E
CONNECTION MANUAL B–61853E OPERATOR’S MANUAL B–61854E MAINTENANCE MANUALB–61855E PARAMETER MANUAL B–61810E
FANUC Series 16–LB DESCRIPTIONS B–62442E
CONNECTION MANUAL (HARDWARE) B–62443E CONNECTION MANUAL (FUNCTION) B–62443E–1 OPERATOR’S MANUAL B–62594EN MAINTENANCE MANUALB–62445E PARAMETER MANUAL B–62600EN
FANUC Series 16i–LA DESCRIPTIONS B–63192EN
CONNECTION MANUAL B–63193EN OPERATOR’S MANUAL B–63194EN MAINTENANCE MANUALB–63195EN PARAMETER MANUAL B–63200EN
FANUC LASER C Series OPERATOR’S MANUAL B–70114EN
MAINTENANCE MANUALB–70115EN
(This manual)
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1. OVERVIEW
B–70115EN/03
1.4

TO USE THE LASER OSCILLATOR SAFETY

In this manual, the words Warning and Caution, corresponding to different levels of safety requirements, are provided to ensure the user’s safety and protect against damage to the laser oscillator. Moreover, sections entitled Note are used to provide supplementary information. Before attempting to use the laser oscillator, read Section 2.1 to 2.1 1, and also the descriptions in the W arnings, Cautions, and Notes that appear in the text.
Warning : Warnings are provided where there is a danger of death or
serious injury if the laser oscillator is handled incorrectly.
Caution : Cautions are provided where there is a danger of injury or
damage to the laser oscillator if the laser oscillator is handled incorrectly.
Note : Notes provide supplementary information other than
Warnings and Cautions.
Before starting any maintenance work, take time to become familiar with the functions of the individual units constituting the laser oscillator, the relationships between the units, and the locations where the units are installed.
WARNING
Never attempt handling, adjustment, or replacement work using a method or procedure other than those described and specified in this manual. Otherwise, dangerous laser light may be emitted.
The function of the laser machining system depends not only on the laser oscillator but also on other system components such as the machine, power magnetics cabinet, servo system, CNC, and operator’s panel. This manual covers the laser oscillator only . For information about equipment other than the laser oscillator, refer to the appropriate manuals provided by the machine tool builder.
T ake time to become familiar with the contents of this manual. Store this manual in a safe place.
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2

SAFETY

2. SAFETY
C1500B, C2000C (C2000B), C3000D (C3000C), C4000A, C6000B produce the rated output laser power of 1500W , 2000W, 3000W , 4000W, 6000W. The CO and is invisible to human eyes. The adequate care must be taken when
laser is operated, therefore. When removing the panel, always turn
CO
2
the power source of f and confirm no power is applied to the laser machine. This oscillator fulfills the requirements of the relevant product safety
standard of EN60825–1:1994.
laser beam is the wavelength of 10.6 mm, far infrared,
2
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2. SAFETY
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2.1

LASER BEAM

1) Potential hazards Laser oscillator emits CO
laser beam(10.6 mm), which is high power
2
and invisible. D Being directly exposed to the CO
laser beam could severely burn
2
you.
D The CO
laser beam could be scattered by your workpiece and burn
2
your eyes or skin. FANUC LASER C series have a laser diode. The laser diode beam is visible (red) and low power. It is used to ensure that the CO beam is correctly positioned on your workpiece.
D The laser diode beam is not considered harmful to your skin. But
if you stared head on into the laser diode beam, it could harm your eyes.
2) Safety recommendations Never expose the eyes and skin to the laser beam. Be careful of the laser beam when the inspection and maintenance.
Do not turn on the power supply to the oscillator when the door and panel open and do not drive. It is exposed to radiation of the laser beam and high voltage.
Do the countermeasure (For instance, installing safety glasses and the protection gloves) to danger in case of stopping no finish and nor opening the panel while it energizes the oscillator.
laser
2
Install beam safety cover after mirror cleaning or replacement. If not beam safety cover installation, do not operation and alignment.
Confirm the protection pipe (Safety cover) is installed. If it dose not install the protection pipe, it will put the finger in the laser beam and there is possibility to be burned.
When entering the area exposed to the scattered beam, wear the safety glasses. Mount the stand made of acrylic resin or any material which can absorb the CO
laser beam to protect the personnel from the
2
scattered beam. Avoid exposure of any part of your body to the CO
laser beam.
2
When testing the beam output, any personnel other than the maintenance personnel should be out of the working environment.
In designing a material processing machine utilizing F ANUC LASER C series, be sure that the CO
laser beam goes from laser to the
2
workpiece only through the enclosed beam delivery system. This prevents the exposure to laser beam by the operator switch could otherwise take place. It is absolutely necessary to include the instructions given here in the manuals of the laser material–processing machine as a whole, which are to be read.
3) Position of laser beam emission Fig. 2.1 (a) is the position of panel that laser beam exposure is
occurred without panel in C1500B, C2000B, C2000C, C3000C, C3000D, when you maintain the oscillator.
Fig. 2.1 (b) is the position of panel that laser beam exposure is
occurred without panel in C4000A, when you maintain the oscillator.
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2. SAFETY
Fig. 2.1 (c) is the position of panel that laser beam exposure is
occurred without panel in C6000B, when you maintain the oscillator.
Fig. 2.1 (d) is the beam path in the cabinet of C1500B, C2000B,
C2000C. Fig. 2.1 (e) is the beam path in the cabinet of C3000C, C3000D. Fig. 2.1 (f) is the beam path in the cabinet of C4000A. Fig. 2.1 (g) is the beam path in the cabinet of C6000B.
Fig. 2.1 (a) The position of panel that laser beam exposure is occurred without panel in
C1500B, C2000B, C2000C, C3000C, C3000D.
Fig. 2.1 (b) The position of panel that laser beam exposure is occurred without panel in C4000A.
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2. SAFETY
Fig. 2.1 (c) The position of panel that laser beam exposure is occurred without panel in C6000B.
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Fig. 2.1 (d) The beam path in the cabinet of C1500B, C2000B, C2000C.
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2. SAFETY
Fig. 2.1 (e) The beam path in the cabinet of C3000C, C3000D.
Fig. 2.1 (f) The beam path in the cabinet of C4000A.
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2. SAFETY
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Fig. 2.1 (g) The beam path in the cabinet of C6000B.
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2. SAFETY
2.2

HIGH VOLTAGE

1) Potential hazards There is RF voltage of 3 to 4kV
in the cabinet of the laser oscillator .
o–p
There is 200 VAC power in the relay panel, be careful not to touch the high voltage.
2) Safety recommendations When it checks the oscillator and exchange the unit, intercept a main breaker of the oscillator and the power supply. Lock the breaker to prevent misconnection and display the sign while working.
Install safety cover after unit replacement or cable connection. Unless safety cover is installed, never start operation.
Follow standard industrial safety practices for working with high voltage.
EXAMPLES
D Do not work on the laser oscillator if you are tired or have taken
medicine.
D Use the buddy system. D Do not wear anything metal, like a ring, bracelet, watch, belt
buckle, earrings, or keys.
D They might contact high voltage. D Never stand on a wet surface. D Do not touch electrical components in the cabinets with both hands
at once. Keep one hand in a pocket.
3) Position of high voltage Fig. 2.2 (a) is the position of high voltage in C1500B (Front side,
Back side).
Fig. 2.2 (b) is the position of high voltage in C2000B (Front side,
Back side).
Fig. 2.2 (c) is the position of high voltage in C2000C (Front side,
Back side).
Fig. 2.2 (d) is the position of high voltage in C3000C (Front side,
Back side,AUX ).
Fig. 2.2 (e) is the position of high voltage in C3000D (Front side,
Back side).
Fig. 2.2 (f) is the position of high voltage in C4000A (Front side,
Back side).
Fig. 2.2 (g) is the position of high voltage in C6000B (Front side,
Back side).
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2. SAFETY
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Front side
Back side
Fig. 2.2. (a) The position of high voltage in C1500B (Front side, Back side)
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2. SAFETY
Front side
Back side
Fig. 2.2. (b) The position of high voltage in C2000B (Front side, Back side)
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2. SAFETY
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Front side
Back side
Fig. 2.2.(c) The position of high voltage in C2000C (Front side, Back side)
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Front side
Back side
Auxiliary unit
Fig. 2.2.(d) The position of high voltage in C3000C(Front , Back , AUX )
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Front side
Back side
Fig. 2.2.(e) The position of high voltage in C3000D(Front side, Back side)
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Front side
Back side
Fig. 2.2.(f) The position of high voltage in C4000A (Front side, Back side)
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Front side
Back side
Fig. 2.2.(g) The position of high voltage in C6000B (Front side, Back side)
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2.3

SAFETY ENCLOSURE (AT YOUR WORK STATION)

2.4

FIRE

1) Potential hazards
laser beam is delivery from oscillator. Direct or scattered beam
CO
2
is exposed.
2) Safety recommendations Mount the safety enclosure made of acrylic resin which can absorb the laser beam around the working environment. Mount the interlock switch on the safety enclosure door which extinguishes the laser beam output when the door is open. Never perform operation without safety cover of laser machine.
1) Potential hazards When you work with the laser oscillator or machine, hot fragments or slag can scatter from your workpiece. The CO reflection of it could ignite flammable material.
2) Safety recommendations The direct or scattered laser beam can ignite flammable materials such as paper, cloth, and wood. Provide a beam absorber behind the workpiece and around it during maintenance. The absorber can be anodized aluminum, graphite or brick. Put a shield between yourself and the workpiece when the CO beam is on. Even diffuse reflections can harm eyes and skin and may ignite flammable material.
laser beam or a
2
laser
2
2.5

TOXIC FUME

1) Potential hazards Some materials such as certain plastics can emit toxic fume when they burn under the laser beam.
2) Safety recommendations Install the exhaust system to remove toxic fume from the work environment.
Consult the manufacturer of the material you are processing to learn if it creates any fumes when heated or burned.
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2.6

HIGH TEMPERATURE

1) Potential hazards When you touch a part of high temperature, your skin burn.
2) Safety recommendations The pipes of the gas circular system are very a high temperature. Do not touch pipes, heat exchanger and turbo blower because it does not do the burn. It is hot immediately after having stopped driving. After getting cold enough in case of removing, dismount it.
3) Position of high temperature Fig. 2.6 (a) is the position of high temperature in C1500B (Front side,
Back side).
Fig. 2.6 (b) is the position of high temperature in C2000B (Front side,
Back side).
Fig. 2.6 (c) is the position of high temperature in C2000C (Front side,
Back side).
Fig. 2.6 (d) is the position of high temperature in C3000C (Front side,
Back side, Aux).
Fig. 2.6 (e) is the position of high temperature in C3000D (Front side,
Back side).
Fig. 2.6 (f) is the position of high temperature in C4000A (Front side,
Back side).
Fig. 2.6 (g) is the position of high temperature in C6000B (Front side,
Back side).
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Front side
Back side
Fig. 2.6 (a) The position of high temperature in C1500B (Front side, Back side)
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Front side
Back side
Fig. 2.6 (b) The position of high temperature in C2000B (Front side, Back side)
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