fanuc C1000, C2000, C4000 Operators Manual

GE Fanuc Automation
Computer Numerical Control Products
Laser C1000 / C2000 / C4000Model E for CE Mark
Operator's Manual
GFZ-70314EN/01 May 2001
Warnings, Cautions, and Notes as Used in this Publication
Warning notices are used in this publication to emphasize that hazardous voltages, currents, temperatures, or other conditions that could cause personal injury exist in this equipment or may be associated with its use.
In situations where inattention could cause either personal injury or damage to equipment, a Warning notice is used.
Caution notices are used where equipment might be damaged if care is not taken.
GFL-001
Warning
Caution
Note
Notes merely call attention to information that is especially significant to understanding and operating the equipment.
This document is based on information available at the time of its publication. While efforts have been made to be accurate, the information contained herein does not purport to cover all details or variations in hardware or software, nor to provide for every possible contingency in connection with installation, operation, or maintenance. Features may be described herein which are not present in all hardware and software systems. GE Fanuc Automation assumes no obligation of notice to holders of this document with respect to changes subsequently made.
GE Fanuc Automation makes no representation or warranty, expressed, implied, or statutory with respect to, and assumes no responsibility for the accuracy, completeness, sufficiency, or usefulness of the information contained herein. No warranties of merchantability or fitness for purpose shall apply.
©Copyright 2001 GE Fanuc Automation North America, Inc.
All Rights Reserved.
B-70314EN/01 PREFACE

PREFACE

This manual covers the following models:
Model Abbreviation
FANUC LASER C1000-MODEL E C1000-E FANUC LASER C2000-MODEL E C2000-E FANUC LASER C4000-MODEL E C4000-E
And, these models conform with EMC Directive 89/336/EEC, and Low Voltage Directive 73/23/EEC.
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B-70314EN/01 TABLE OF CONTENTS

TABLE OF CONTENTS

PREFACE
PREFACE................................
PREFACEPREFACE
1111 OVERVIEW
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OVERVIEW................................
OVERVIEWOVERVIEW
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1.1
1.2
1.3
1.4
1.5
2222 SAFETY
2.1
2.2
2.3
2.4
2.5
2.6
2.7
2.8
2.9
2.10
MANUAL CONTENTS ..................................................................................................................... 2
APPLICABLE MODELS................................................................................................................... 3
RELATED MANUALS...................................................................................................................... 4
FOR SAFE OPERATION.................................................................................................................. 5
NOTES ON READING THIS MANUAL ......................................................................................... 6
SAFETY ................................
SAFETYSAFETY
................................................................
................................................................
LASER BEAM ................................................................................................................................... 8
HIGH VOLTAGE............................................................................................................................. 13
SAFETY ENCLOSURE (AT YOUR WORK STATION) ............................................................... 17
FIRE ................................................................................................................................................. 18
TOXIC FUME.................................................................................................................................. 19
HIGH TEMPERATURE.................................................................................................................. 20
WARNING LABELS ....................................................................................................................... 24
HIGH-PRESSURE GAS.................................................................................................................. 35
KEY CONTROL............................................................................................................................... 36
SHUTTER LOCK ............................................................................................................................ 37
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2.11
2.12
2.13
3333 INSTALLATION
3.1
EMERGENCY STOP BUTTON ..................................................................................................... 38
WARNING LIGHT (OPTIONAL)................................................................................................... 39
INAPPOSITE USE OF LASER OSCILLATOR............................................................................. 40
INSTALLATION ................................
INSTALLATIONINSTALLATION
CONDITION.................................................................................................................................... 42
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3.1.1 Environmental Conditions ...................................................................................................... 42
3.1.2 Power Source............................................................................................................................ 42
3.1.3 Laser Gas.................................................................................................................................. 42
3.1.4 Cooling Water .......................................................................................................................... 43
3.2
TRANSPORTATION....................................................................................................................... 45
3.2.1 Lifting Laser Oscillator ........................................................................................................... 45
3.2.2 Packing ..................................................................................................................................... 46
3.2.3 Environmental Condition........................................................................................................ 50
3.3
STORAGE ........................................................................................................................................ 51
3.3.1 Environmental Condition........................................................................................................ 51
41
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TABLE OF CONTENTS B-70314EN/01
3.4
3.5
3.6
BASE OF OSCILLATOR ........................................................................................................................ 52
MAINTENANCE AREA ................................................................................................................. 54
WATER CONNECTION ................................................................................................................. 57
3.6.1 Chiller....................................................................................................................................... 57
3.6.2 Cooling Water Temperature ................................................................................................... 58
3.6.3 Cooling Water Flow Rate ........................................................................................................ 58
3.6.4 Plumbing .................................................................................................................................. 58
3.7
LASER GAS..................................................................................................................................... 59
3.7.1 Gas Bottle................................................................................................................................. 59
3.7.2 Laser Gas Tubing..................................................................................................................... 59
3.7.3 Gas Pipe.................................................................................................................................... 59
3.8
LASER BEAM ................................................................................................................................. 61
3.8.1 Position and Tolerance of Laser Beam Exit ........................................................................... 61
3.8.2 Beam Divergence ..................................................................................................................... 62
3.8.3 Tolerance of Beam Direction ................................................................................................... 62
3.8.4 Beam Guide.............................................................................................................................. 62
3.9
ELECTRIC CONNECTION............................................................................................................ 63
3.9.1 Power Cable (L1, L2, L3)......................................................................................................... 65
3.9.2 Ground Cable ........................................................................................................................... 65
3.9.3 I/O Signal Cable ....................................................................................................................... 65
3.9.4 Other Signal Cables to the IF PCB......................................................................................... 66
3.9.5 Safety Interlock........................................................................................................................ 67
3.9.6 EMC Countermeasure............................................................................................................. 71
4444 FUNCTIONS
FUNCTIONS................................
FUNCTIONSFUNCTIONS
4.1
INTERNAL STRUCTURE..............................................................................................................73
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4.1.1 Outline...................................................................................................................................... 76
4.2
4.3
4.4
5555 MAINTENANCE
5.1
5.2
COMPONENT DETAILS................................................................................................................ 78
OPERATION SEQUENCE .............................................................................................................85
LASER PROCESSING MACHINE SYSTEM................................................................................ 88
MAINTENANCE ................................
MAINTENANCEMAINTENANCE
DAILY INSPECTION ..................................................................................................................... 91
PERIODIC MAINTENANCE ......................................................................................................... 92
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..... 72
72
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7272
90
9090
5.3
DETAILS OF MAINTENANCE ..................................................................................................... 93
5.3.1 Maintenance Panels and Oil Gauge Position......................................................................... 93
5.3.2 Turbo Blower Oil...................................................................................................................... 97
5.3.3 Exhaust Pump Oil ................................................................................................................... 99
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B-70314EN/01 TABLE OF CONTENTS
5.3.4 Exhaust Pump Filter ............................................................................................................. 100
5.4
AGING ........................................................................................................................................... 101
5.4.1 Leak Check Method ............................................................................................................... 101
5.4.2 Aging Method ......................................................................................................................... 102
5.5
MAINTENANCE PARTS.............................................................................................................. 104
5.5.1 Spare Parts............................................................................................................................. 104
5.5.2 Maintenance Tools................................................................................................................. 105
6666 TROUBLESHOOTING
TROUBLESHOOTING ................................
TROUBLESHOOTINGTROUBLESHOOTING
6.1
6.2
APPENDIX
APPENDIX
APPENDIXAPPENDIX
AAAA EXTERNAL VIEW OF LASER OSCILLATOR
BBBB SPECIFICATIONS
CCCC ERROR CODE LIST
CHECKING ON FAULTS ............................................................................................................ 107
RESPONDING TO ALARM MESSAGES ON THE SCREEN ................................................... 108
EXTERNAL VIEW OF LASER OSCILLATOR................................
EXTERNAL VIEW OF LASER OSCILLATOREXTERNAL VIEW OF LASER OSCILLATOR
SPECIFICATIONS ................................
SPECIFICATIONSSPECIFICATIONS
ERROR CODE LIST ................................
ERROR CODE LISTERROR CODE LIST
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106
106106
123
123123
126
126126
127
127127
DDDD FANUC SERVICE NETWORK
FANUC SERVICE NETWORK ................................
FANUC SERVICE NETWORKFANUC SERVICE NETWORK
EEEE GLOSSARY
GLOSSARY ................................
GLOSSARYGLOSSARY
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B-70314EN/01 1.OVERVIEW

1 OVERVIEW

In this manual, we have tried as for as possible to address all issues. However, space restrictions prevent us from describing everything that must not be done, or which cannot be done, because there are so many possibilities. Therefore, all matters which are not specifically described as being possible should be regarded as being "impossible".
Contents of this chapter
1.1 MANUAL CONTENTS .............................................................. 2
1.2 APPLICABLE MODELS............................................................ 3
1.3 RELATED MANUALS............................................................... 4
1.4 FOR SAFE OPERATION ........................................................... 5
1.5 NOTES ON READING THIS MANUAL................................... 6
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1.OVERVIEW B-70314EN/01

1.1 MANUAL CONTENTS

This manual consists of the following chapters and appendixes:
1. OVERVIEW Chapter 1 covers the configuration of the manual, applicable models, related manuals, and provides notes on reading the manual.
2. SAFETY Chapter 2 covers the warnings and precautions related to laser beams, high voltages, high temperatures, and a toxic substances. To ensure safe operation, read this chapter first.
3. INSTALLATION Chapter 3 describes the condition for installation and connection of electrical cables, water tubes, gas tubes.
4. FUNCTIONS Chapter 4 describes the structure and operation of the laser oscillator.
5. MAINTENANCE Chapter 5 describes the periodic maintenance of the laser oscillator.
6. TROUBLESHOOTING Chapter 6 describes the actions to be taken if the oscillator malfunctions.
APPENDIX
A. EXTERNAL VIEW B. FANUC LASER C SERIES SPECIFICATIONS C. ERROR CODE LIST D. FANUC SERVICE NETWORK E. GLOSSARY
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B-70314EN/01 1.OVERVIEW

1.2 APPLICABLE MODELS

This manual covers the following models:
Model Abbreviation
FANUC LASER C1000-MODEL E C1000-E FANUC LASER C2000-MODEL E C2000-E FANUC LASER C4000-MODEL E C4000-E
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1.OVERVIEW B-70314EN/01

1.3 RELATED MANUALS

The following manuals are available for the FANUC LASER C1000/ C2000/C4000-MODEL E :
DESCRIPTIONS B-63192EN CONNECTION MANUAL B-63193EN
FANUC Series 16i-LA
FANUC LASER C1000/C2000/C4000-MODEL E
OPERATOR’S MANUAL B-63194EN MAINTENANCE MANUAL B-63195EN PARAMETER MANUAL B-63200EN OPERATOR’S MANUAL (This manual) MAINTENANCE MANUAL B-70315EN
B-70314EN
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B-70314EN/01 1.OVERVIEW

1.4 FOR SAFE OPERATION

This manual contains precautions which must be observed during operation of the laser oscillator, to ensure the operator's safety and prevent damage to the oscillator. Each precaution is indicated by "Warning" or "Caution" according to its severity. Supplementary information is indicated by "Note". Read the contents of each "Warning", "Caution", and "Note" before attempting to use the oscillator.
WARNING
Precautions to be applied in those situations where there is a danger of the operator being killed or seriously injured.
CAUTION
Precautions to be applied in those situations where there is a danger of the operator being slightly injured or the oscillator being damaged.
NOTE
Supplementary information other than precautions.
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1.OVERVIEW B-70314EN/01

1.5 NOTES ON READING THIS MANUAL

The functions of a laser machining system depend not only on the laser oscillator, but also on the machine, power magnetics cabinet, servo system, CNC, and operator's panel. This manual describes only the laser oscillator. For a description of the other components, refer to the corresponding manuals, supplied by the machine tool builder.
Read this manual thoroughly and store it in a safe place.
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B-70314EN/01 2.SAFETY

2 SAFETY

C1000-E, C2000-E, and C4000-E produce the rated output laser power of 1000W, 2000W, and 4000W. The CO wavelength of 10.6 µm, far infrared, and is invisible to human eyes. The adequate care must be taken when CO therefore. When removing the panel, always turn the power source off and confirm no power is applied to the laser machine.
This oscillator fulfills the requirements of the relevant product safety standard of EN60825-1:1994.
laser beam is the
2
laser is operated,
2
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2.SAFETY B-70314EN/01

2.1 LASER BEAM

1) Potential hazards Laser oscillator emits CO power and invisible.
Being directly exposed to the CO
burn you.
The CO
beam could bource off your workpiece and burn
2
your eyes or skin. LASER oscillator have a guide laser. The guide laser beam is visible (red color) and low power. It is used to ensure that the CO
beam is correctly positioned on your workpiece.
2
The diode laser beam is not considered harmful to your skin.
But if you stared head on into the guide laser beam, it could harm your eyes.
2) Safety recommendations Never expose the eyes and skin to the laser beam. Be careful of the laser beam when performing the inspection and maintenance. Do not turn on the power supply to the oscillator when the panel open and do not drive. It is bleached to radiation of the laser beam and high voltage. Do the countermeasure (For instance, installs safety glasses and the protection gloves) to danger in case of stopped no finish and nor opening the panel while it energizes the oscillator. Install beam safety cover after mirror cleaning or replacement. And if not beam safety cover installation, do not operation and alignment. Confirm when it does alignment, the protection pipe (Safety cover) is installed. If it dose not install the protection pipe, it will put the finger in the laser beam and there is possibility to do the burn. When entering the area exposed to the scattered beam, wear the safety glasses. Mount the stand made of acrylic resin or any material which can absorb the CO personnel from the scattered beam. Avoid exposure of any part of your body to the CO When testing the beam output, any personnel other than the maintenance personnel should be out of the working environment. In designing a material processing machine utilizing laser oscillator, be sure that the CO workpiece only through the enclosed beam delivery system. This prevents the exposure to laser beam by the operator switch could otherwise take place. It is absolutely necessary to include the instructions given here in the manuals of the laser material­processing machine as a whole, which are to be read.
laser beam(10.6 µm), which is high
2
beam could severely
2
laser beam to protect the
2
laser beam.
2
laser beam goes from laser to the
2
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B-70314EN/01 2.SAFETY
3) Position of laser beam emission Fig.2.1(a) is the position of panel that laser beam exposure is occurred without panel in C1000-E, when your maintenance. Fig.2.1(b) is the position of panel that laser beam exposure is occurred without panel in C2000-E, when your maintenance. Fig.2.1(c) is the position of panel that laser beam exposure is occurred without panel in C4000-E, when your maintenance. Fig.2.1(d) is the position of laser beam delivery in C1000-E. Fig.2.1(e) is the position of laser beam delivery in C2000-E. Fig.2.1(f) is the position of laser beam delivery in C4000-E.
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2.SAFETY B-70314EN/01
Fig.2.1(a) Laser beam exposure position without panel as operating (C1000-E)
Fig.2.1(b) Laser beam exposure position without panel as operating (C2000-E)
Fig.2.1(c) Laser beam exposure position without panel as operating (C4000-E)
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B-70314EN/01 2.SAFETY
Fig.2.1(d) The position of laser beam delivery (C1000-E)
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2.SAFETY B-70314EN/01
Fig.2.1(e) The position of laser beam delivery (C2000-E)
Fig.2.1(f) The position of laser beam delivery (C4000-E)
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B-70314EN/01 2.SAFETY

2.2 HIGH VOLTAGE

1) Potential hazards There is RF voltage of 3 to 4kVo-p in the cabinet of the laser oscillator. There is 200 VAC power in the relay panel, be careful not to touch the high voltage.
2) Safety recommendations When it checks the oscillator and exchange the unit, intercept a main breaker of the oscillator and the power supply. Lock the breaker to prevent misconnection and display the sign while working. Install safety cover after unit replacement or cable connection. Unless safety cover is installed, never perform operation. Follow standard industrial safety practices for working with high voltage. EXAMPLES
Do not work on the laser oscillator if you are tired or have
taken medicine.
Do not wear anything metal, like a ring, bracelet, watch,
belt buckle, earrings, or keys.
They might contact high voltage.
Never stand on a wet surface.
Do not touch electrical components in the cabinets with
both hands at once. Keep one hand in a pocket.
3) Position of high voltage Fig.2.2(a) is the position of high voltage in C1000-E (Front, maintenance side). Fig.2.2(b)is the position of high voltage in C1000-E (Back side). Fig.2.2(c) is the position of high voltage in C2000-E (Front, maintenance side). Fig.2.2(d)is the position of high voltage in C2000-E (Back side). Fig.2.2(e) is the position of high voltage in C4000-E (Front, maintenance side). Fig.2.2(f) is the position of high voltage in C4000-E (Back side).
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2.SAFETY B-70314EN/01
Fig.2.2(a) Position of high voltage in C1000-E (Front, maintenance side)
Fig.2.2(b) Position of high voltage in C1000-E (Back side)
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B-70314EN/01 2.SAFETY
Fig.2.2(c) Position of high voltage in C2000-E (Front, maintenance side)
Fig.2.2(d) Position of high voltage in C2000-E (Back side)
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2.SAFETY B-70314EN/01
Fig.2.2(e) Position of high voltage in C4000-E (Front, maintenance side)
Fig.2.2(f) Position of high voltage in C4000-E (Back side)
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B-70314EN/01 2.SAFETY

2.3 SAFETY ENCLOSURE (AT YOUR WORK STATION)

1) Potential hazards CO
beam is delivery from oscillator. Direct or scattered beam is
2
exposed.
2) Safety recommendations Mount the safety enclosure made of acrylic resin which can absorb the laser beam around the working environment. Mount the interlock switch on the safety enclosure door which extinguishes the laser beam output when the door is open. Never perform operation without safety cover of laser machine.
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2.SAFETY B-70314EN/01

2.4 FIRE

1) Potential hazards When you work with the laser oscillator or machine, hot fragments or slag can scatter from your workpiece. The CO beam or a reflection of it could ignite flammable material.
2) Safety recommendations The direct or scattered laser beam can ignite flammable materials such as paper, cloth, and wood. Provide a beam absorber behind the workpiece and around it during maintenance. The absorber can be anodized aluminum, graphite or brick.Put a shield between yourself and the workpiece when the CO Even diffuse reflections can harm eyes and skin and may ignite flammable material.
beam is on.
2
2
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B-70314EN/01 2.SAFETY

2.5 TOXIC FUME

1) Potential hazards Some materials such as certain plastics can emit toxic fume when they burn under the laser beam.
2) Safety recommendations Install the exhaust system to remove toxic fume from the work environment. Consult the manufacturer of the material you are processing to learn if it creates any fumes when heated or burned.
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2.SAFETY B-70314EN/01

2.6 HIGH TEMPERATURE

1) Potential hazards When you touch a part of high temperature, your skin burn.
2) Safety recommendations The pipes of the gas circular system are very a high temperature. Do not touch pipes, heat exchanger and turbo blower because it does not do the burn. It is hot immediately after having stopped driving. After getting cold enough in case of removing, dismount it.
3) Position of high temperature Fig.2.6(a) is the position of high temperature in C1000-E (Front, maintenance side). Fig.2.6(b) is the position of high temperature in C1000-E (Back side). Fig.2.6(c) is the position of high temperature in C2000-E (Front, maintenance side). Fig.2.6(d) is the position of high temperature in C2000-E (Back side). Fig.2.6(e) is the position of high temperature in C4000-E (Front, maintenance side). Fig.2.6(f) is the position of high temperature in C4000-E (Back side).
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B-70314EN/01 2.SAFETY
Fig.2.6(a) Position of high temperature in C1000-E (Front, maintenance side).
Fig.2.6(b) Position of high temperature in C1000-E (Back side).
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2.SAFETY B-70314EN/01
Fig.2.6(c) Position of high temperature in C2000-E (Front, maintenance side).
Fig.2.6(d) Position of high temperature in C2000-E (Back side).
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B-70314EN/01 2.SAFETY
Fig.2.6(e) Position of high temperature in C4000-E (Front, maintenance side).
Fig.2.6(f) Position of high temperature in C4000-E (Back side).
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2.SAFETY B-70314EN/01

2.7 WARNING LABELS

Fig.2.7(a)-(f) show the location of the warning labels indicating the high voltage and laser beam path. Fig.2.7(a) is the location of the warning sticker (C1000-E:Front side). Fig.2.7(b) is the location of the warning sticker (C1000-E:Back side). Fig.2.7(c) is the location of the warning sticker (C2000-E:Front side). Fig.2.7(d) is the location of the warning sticker (C2000-E:Back side). Fig.2.7(e) is the location of the warning sticker (C4000-E:Front side). Fig.2.7(f) is the location of the warning sticker (C4000-E:Back side).
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B-70314EN/01 2.SAFETY
Fig.2.7(a) Location of the warning sticker (C1000-E:Front side).
Fig.2.7(b) Location of the warning sticker (C1000-E:Back side).
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2.SAFETY B-70314EN/01
Fig.2.7(c) Location of the warning sticker (C2000-E:Front side).
Fig.2.7(d) Location of the warning sticker (C2000-E:Back side).
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B-70314EN/01 2.SAFETY
Fig.2.7(e) Location of the warning sticker (C4000-E:Front side).
Fig.2.7(f) Location of the warning sticker (C4000-E:Back side).
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2.SAFETY B-70314EN/01
Detail of warning sticker
(1) Warning logotype (C1000-E)
(1) Warning logotype (C2000-E, C4000-E)
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B-70314EN/01 2.SAFETY
(2) Warning logotype
(3) Label for defeasible non-interlocked protective housing
(4) Label for defeasible non-interlocked protective housing
(5) Caution label for lifting
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2.SAFETY B-70314EN/01
(6) Aperture label
(7) Label of non-interlocked protective panel
(8) Identification label
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B-70314EN/01 2.SAFETY
(9) Address label
(10) High voltage warning label
(11) Supply voltage label
(12) Label of over-current protective
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2.SAFETY B-70314EN/01
(13) Label of motor and transformer (C1000-E)
(13) Label of motor and transformer (C2000-E)
(13) Label of motor and transformer (C4000-E)
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B-70314EN/01 2.SAFETY
(14) Label of warning light
(15) Maintenance label
(16) Certification label
(17) Short-circuit interrupting capacity of main breaker (C1000-E)
(17) Short-circuit interrupting capacity of main breaker (C2000-E,
C4000-E)
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2.SAFETY B-70314EN/01
(18) Label for regurating the atmospheric gases in the oscillator
housing
(19) Label for cooling water and laser gas
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B-70314EN/01 2.SAFETY

2.8 HIGH-PRESSURE GAS

Do not allow any dangerous or high-pressure gas to get into the oscillator housing. The oscillator cabinet has a hermetic structure (dustproof and dripproof), it cannot be ventilated easily. Flammable gases such as oxygen can cause a fire or explosion. Toxic gases can harm operators during maintenance. Organic gases can degrade machining performance. High-pressure gases can damage a panel or the cabinet, resulting in injury from flying matters. If such a gas accidentally gets into the oscillator housing, remove a panel for ventilation. The installation room must be also well ventilated. To purge the oscillator housing, use purified, low-pressure air or nitrogen.
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2.SAFETY B-70314EN/01

2.9 KEY CONTROL

All the laser products have to comply with the various kinds of laser safety regulations, which include the use of key control. For instance, FDA PART 1040 PERFORMANCE STANDARDS FOR LIGHT­EMITTING PRODUCTS, Sec 1040. 10 (f), (4) states: "Each laser system classified as a Class IIIb or IV laser product shall incorporate a key-actuated master control. The key shall be removable and the laser shall not be operable when the key is removed" and EN60825-1:1994,
4.5 Key control state "Any laser system belonging to one of the
following classes shall incorporate a key operation master control: Class 4 and Class 3B, except for Class 3B with not more than five times the AEL of Class 2 in the wavelength range from 400 nm to 700 nm. The key shall be removable and the laser radiation shall not be accessible when the key is removed."
Because the laser package products offered by FANUC cannot produce the laser beam as they are in the state of shipment, the system integrator who incorporates FANUC products into the system, which generates the laser beam, is obliged to incorporate the master key as defined by the relevant regulation.
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B-70314EN/01 2.SAFETY

2.10 SHUTTER LOCK

The shutter lock is prepared because it dose not put out the laser beam by mistake. If you do not put out the beam, lock the shutter.
Use the mechanical switch at shutter lock switch, not electrical component (Relay)or switching circuit (Transistor, FET). Use the one with the compulsion dissociation mechanism for the switch used for the shutter lock circuit and the switch for welding prevention.
To designer of laser processing machine
1 Use a mechanical switch for the switch used to lock
the shutter. Do not use an electric switch (For instance, transistor circuit, etc.). Moreover, use the one with the contact dissociation mechanism to prevent welding for a mechanical switch.
2 Put it in the series of the contact of the emergency
stop button in the shutter lock circuit. When the emergency stop switch is pushed, it is necessary to intercept the power supply to the shutter.
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2.SAFETY B-70314EN/01

2.11 EMERGENCY STOP BUTTON

Press the emergency stop button when it is dangerous and breaks down. The oscillator is stopped discharging, gas pressure control and stand by purge state.
Use the one with the compulsion dissociation mechanism for the relay used for the emergency stop circuit and the switch for welding prevention.
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B-70314EN/01 2.SAFETY

2.12 WARNING LIGHT (OPTIONAL)

Laser oscillator is equipped with the warning light optionally. The light is flashed during discharging and ready of laser beam emission. Be careful of laser beam and high voltage.
To designer of laser processing machine
In EN60825-1, it needs the design with the fail safe or redundant for warning equipment. The redundant warning light is needed near the work-point of processing machine. The warning light is prepared for the oscillator. Select this as a warning light more than the second for the fail safe.
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2.SAFETY B-70314EN/01

2.13 INAPPOSITE USE OF LASER OSCILLATOR

Inapposite use and the result are described in each explanation place. Inapposite major use are described in the following.
(1) The gas with different composition and purity from the
specification is connected with the oscillator. The oscillator does not work normally and do the protection movement. In the worst case, the oscillator breaks down.
(2) The gas piping with different material and structure from the
specification is used. A leakage of the laser gas and a defective composition are occurred. In the worst case, the oscillator breaks down.
(3) The water piping of the material, which corrodes to water, is
used.Water is blocked by the generation of rust. If cooling water does not flow in a regulated amount, the oscillator will not work normally.
(4) Cooling water is not regularly exchanged.
Water is blocked by the generation of rust. Moreover, it is easy for the water fittings in the oscillator to corrode. In the worst case, the fittings are damaged and the water leak happens.
(5) The oil of turbo blower and the exhaust pump is not regularly
exchanged. Turbo blower is damaged and the oscillator does not work. The exhaust pump is damaged similarly.
(6) The filter of the exhaust pump is not regularly exchanged.
The exhaust ability of the exhaust pump decreases. Moreover, white smoke comes out from the pump exit and the oil leak happens. In the worst case, the oscillator does not work.
(7) You will touch an unrelated place when usually maintaining.
In the oscillator there are adjustment place. The adjustment place is the best value when shipping. When the adjustment shifts, the oscillator will not work normally. It is necessary to adjust it by service man that was trained.
(8) You open the panel immediately after the oscillator was stopped
and oil is exchanged.
(9) There is a place of the high temperature immediately after the
oscillator stopped. When you touches there, you will do the burn. After getting cold of the oscillator, open the panel. Refer to safety in Chapter 2 for the place of the high temperature.
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B-70314EN/01 3.INSTALLATION

3 INSTALLATION

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3.INSTALLATION B-70314EN/01

3.1 CONDITION

3.1.1 Environmental Conditions

(1) Ambient
+5 to 30°C
(2) Temperature drift
Max 1.1°C/min
(3) Humidity
< 75% (relative)
(4) Vibration
Acceleration < 0.05G Amplitude < 5µm
(5) Atmosphere
Free from dust and volatile vapor

3.1.2 Power Source

3.1.3 Laser Gas

(1) Input power and maximum current
Model Power Maximum current
C1000-E 18 KVA 60 A C2000-E 33 KVA 110 A C4000-E 55 KVA 190 A
(2) Voltage
200VAC+10%, -15%, 50/60Hz ± 1Hz, 3φ or 220VAC+10%, -15%, 60Hz ± 1Hz, 3φ
(3) Earth-ground
Ground (<10 ohm) Protective earth (PE)
For the laser gas, the following specifications are required.
(1) Composition and its accuracy
CO
:5±0.25% Purity > 99.99%
2
He : 40±2.00% > 99.99% N
:55±2.75% (Balance) > 99.99%
2
(2) Water vapor (H
(3) Hydrocarbon (CmHn) < 1ppm
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O) < 5ppm
2
B-70314EN/01 3.INSTALLATION

3.1.4 Cooling Water

(1) Cooling water specification
The quality of cooling water is specified in the table below. If tap water is used, it should be treated in an ion exchanger.
Refrigerator/air-conditioner cooling water quality standard
(JRA-9001-1980)
pH (25°C) 6.0 to 8.0 Conductivity (25°C) (µs/cm) 200 or less
Standard item
Reference item
(2) Anticorrosive
To avoid cooling water trouble and minimize the frequency of cooling water exchange, the following anticorrosive should be added to the cooling water. Consult the chiller manufacturer for use of the anticorrosive. Product name: CONTLIME K-6000 Manufacturer: MITSUBISHI GAS CHEMICAL. ISC Use: Refer to the description indicated on the product. Replace the cooling water every year, even if an anticorrosive has been added to it.
Chlorine ion Cl- (ppm) 20 or less Sulfate ion SO M alkalinity CaCO3 (ppm) 50 or less Total hardness CaCO Iron Fe (ppm) 0.3 or less Sulfur ion S2- (ppm) Not to be detected Ammonia ion NH Ionic silica SiO
2-
(ppm) 50 or less
4
(ppm) 50 or less
3
+
(ppm) 0.2 or less
4
(ppm) 30 or less
2
(3) Cleaning agent
The following cleaning agent should be used. Consult the chiller manufacturer for use of the cleaning agent. Product name: DESLIME Manufacturer: MITSUBISHI GAS CHEMICAL ISC Use: Refer to the description indicated on the product.
(4) Antifreezing solution
If the chiller is used in a cold district, it should be provided with an antifreezing function. When it is extremely cold, the chiller should be kept running. If it is necessary to use an antifreezing solution for lack of an alternative, the following antifreezing solution should be used. Its concentration should be 30% (usually) or 40% (in an extremely cold district). Use of an antifreezing solution should be restricted within four months in winter. Do not use antifreezing solution together with an anticorrosive. The following antifreezing solution is already added with an anticorrosive. Product name: AURORA BRINE Manufacturer: TOKYO FINE CHEMICAL Co. Use: Refer to the description indicated on the product.
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3.INSTALLATION B-70314EN/01
CAUTION
In winter or in a cold district, when the oscillator is at a rest and the ambient temperature gets to or below the freezing point, the cooling water in the oscillator freezes, possibly breaking the water pipe or damaging the chilling unit. When the oscillator is not in use, drain cooling water from it. To drain water, keep blowing compressed air at 0.5 MPa or less into the oscillator through the cooling water inlet for 15 minutes.
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B-70314EN/01 3.INSTALLATION

3.2 TRANSPORTATION

3.2.1 Lifting Laser Oscillator

In lifting the laser oscillator, be sure to use the four eyebolts screwed into the top surface of the cabinet as shown in the figure. Never lift using only the two bolts. The weight is shown following tables. The permissible impact value of the oscillator is 2G. When the impact which exceeds the permissible impact value is given, the resonator will warp and the shape of the beam mode worsens.
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Fig.3.2.1 Method of lifiting
3.INSTALLATION B-70314EN/01

3.2.2 Packing

1) Clamp When shipped from FANUC, the two components of the laser listed below are in the clamped position. Because this is for shipment only, remove the clamp during the installation. Be sure to use the clamp, when the machine is shipped again. (1) Optical resonator (2) Mechanical shutter. Fig.3.2.2(a)-(c) are clamp layout.
CAUTION
If the machine is not damped during transportation, the optical resonator may cause distortion or mat be damaged.
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B-70314EN/01 3.INSTALLATION
Fig.3.2.2(a) Clamp layout (C1000-E)
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3.INSTALLATION B-70314EN/01
Fig.3.2.2(b) Clamp layout (C2000-E)
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B-70314EN/01 3.INSTALLATION
Fig.3.2.2(c) Clamp layout (C4000-E)
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3.INSTALLATION B-70314EN/01
2) Water Be sure to drain water in the oscillator at shipment. Refer to the maintenance manual for draining.
CAUTION
If water remains in the oscillator, internal water pipes may be damaged in cold climates.

3.2.3 Environmental Condition

(1) Temperature
-20 to 50°C
CAUTION
Must be completed to drain in the oscillator. If water remain in the oscillator, water freeze during the transportation at cold district. Therefore oscillator is damaged.
(2) Humidity 75% (relative)
(3) Vibration
Acceleration 0.05G Amplitude 5mm
(4) Atmosphere
Free from the dust and the volatile vapor
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B-70314EN/01 3.INSTALLATION

3.3 STORAGE

The various kinds of clamps should be used only during the transportation. Especially the clamps used for resonator should be loosened during the storage. Storing the resonator as fixed with the clamps for a long time will cause its distortion. The clamps are provided for cavity, shutter unit. Do not keep the oscillator in the place of the high temperature humidity. Otherwise, it generates rust in the resonator.

3.3.1 Environmental Condition

(1) Temperature
-20 to 50°C
CAUTION
Must be completed to drain in the oscillator. If water remain in the oscillator, water freeze during the transportation at cold district. Therefore oscillator is damaged.
(2) Humidity < 75% (relative)
(3) Vibration
Acceleration < 0.05G Amplitude < 5mm
(4) Atmosphere
Free from the dust and the volatile vapor
(5) Location
Plain, no slope
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3.INSTALLATION B-70314EN/01

3.4 Base of oscillator

In laser oscillator, the two type of that is the four taps and hole are prepared in the base as shown in the figure for fixing the laser cabinet against the machine base.
Fig.3.4(a) Mounting (A)
Fig.3.4(b) Mounting (B)
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B-70314EN/01 3.INSTALLATION
Fig.3.4(c) Cabinet base (C1000-E)
Fig.3.4(d) Cabinet base (C2000-E, C4000-E)
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3.INSTALLATION B-70314EN/01

3.5 MAINTENANCE AREA

The maintenance areas of laser oscillator series are shown in the figures below. The customer is requested to prepare adequate space around the laser even for the sides, which are not requested in the figures.
Fig.3.5(a) Maintenace area (C1000-E)
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B-70314EN/01 3.INSTALLATION
Fig.3.5(b) Maintenace area (C2000-E : Short type)
Fig.3.5(c) Maintenace area (C2000-E : Long type)
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3.INSTALLATION B-70314EN/01
Fig.3.5(d) Maintenace area (C4000-E : Short type)
Fig.3.5(e) Maintenace area (C4000-E : Long type)
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B-70314EN/01 3.INSTALLATION

3.6 WATER CONNECTION

3.6.1 Chiller

Make the cooling water re-circulate in the closed loop using a chiller unit. The cooling requirements of the chiller are as below.
(1) Chiller capacity
Type Capacity
C1000-E > 11 KW C2000-E > 22.1 KW C4000-E > 44.2 KW
(2) Temperature control range 20 to 30 °C
(3) Temperature accuracy ±1°C
(4) Water pressure 0.5 MPa or less
(5) Heat exhaust Water cooling or air cooling
(6) Attachment
Water filter
Water valve
Flow switch
Interface to externally switch of chiller
Contact interface to send signal of normal operation of
chiller(CLRDY).
NOTE
Output the signal of "contact on" when everything is normal with cooling water flow rate, temperature, water level, overheat switch of chiller, high and low pressure switch, over-current relay, etc.
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3.INSTALLATION B-70314EN/01

3.6.2 Cooling Water Temperature

Throughout the year, set the chiller water temperature to 27°C in general regions and 30°C in humid regions.

3.6.3 Cooling Water Flow Rate

The flow rate should be chosen so that the temperature difference between the inlet and outlet of the chiller becomes less than 3°C. The customer can refer to the following table.
Type Flow rate
C1000-E 40 liters/min C2000-E 75 liters/min C4000-E 160 liters/min

3.6.4 Plumbing

The cooling water from chiller is temperature-regulated.
Choose the tubing material which can withstand corrosion, which will choke the water flow.
Make the hose length between the laser and chiller as short as possible. Along hose makes the pressure 1oss high and becomes a burden to the chiller pump.
Place a strainer at the water inlet of laser. It will prevent the f1owing in of the dust into the laser.
Place flow meters both at the inlet and outlet of the laser. Daily checking of the water f1ow contributes to the prevention of abrupt stop of laser operation.
The water fittings of the inlet and outlet of lasers are shown below.
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B-70314EN/01 3.INSTALLATION

3.7 LASER GAS

3.7.1 Gas Bottle

Use the gas bottle of the volume of 7m3. Store the necessary number of bottles according to the operation of the laser.

3.7.2 Laser Gas Tubing

Drawing of last chapter 1 shown laser gas connection of inlet and outlet. Inlet and outlet fittings on laser are female Rc 3/8".
(1) Gas inlet of oscillator
Use the tube designated. (FANUC recommends the use of
AS1 tube or Poly-fro Tube manufactured by Jyunkosha or Imperial Co. Ltd.) Do not use a tube possessing high permeability to He. (In the worst case, the laser will be damaged by improper gas composition.)
Use the gas of the correct composition.

3.7.3 Gas Pipe

(2) Gas outlet of oscillator
The oil mist and the dissociated gas come out from the exit of the gas. Tie the piping of 3/8 inches or more to the gas exit and put it out to outdoor. It will load the exhaust pump when thin piping or extremely 1ong and the exhaust ability decreases occasionally.
Observe the following cautions for piping between the laser gas cylinder and laser oscillator.
Use nylon tube having an inside diameter of 8 mm or larger (Junlon AS1 manufactured by Junkousha, or equivalent) or polyethylene (Polyfro-tube). Do not use a rubber or urethane tube.
Use a swage-lock vacuum joint. Do not use a one-touch coupler, quick coupler, or hose-band joint.
Minimize the length of tubing. It should be kept within 5 m. Never exceed 15 m. For a length of 15 m or greater, use stainless pipe.
If it is necessary to use metal pipe for lack of an alternative, use stainless bright annealed pipe. Minimize the number of joints used. Connect pipes, if necessary, using a swage-lock vacuum joint or by TIG welding. Do not use silver soldering or copper piping. Piping should be installed by a vacuum piping specialist. Do not extend metal piping over 30 m.
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3.INSTALLATION B-70314EN/01
Always keep the piping materials clean. Do not allow foreign matter to get in the pipe.
Use a pressure reducer that is free from gas leakage.
After installing the pipe, check it for gas leakage, using a liquid
leak checker (Gyupoflex: A98L-0001-0856, detecting bubbles caused by leaking gas) or a clamp test1).
NOTE
Open the valve of the gas cylinder to pressurize the inside of the pipe, then close the valve. Check to see if the pressure in the pipe becomes low with time. Monitor the primary pressure of the gas reducer for over 8 hours. If the gas pressure becomes lower by 10% within 8 hours, gas is likely to be leaking. Take an appropriate measure.
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B-70314EN/01 3.INSTALLATION

3.8 LASER BEAM

Here explanation are given for the convenience of designing machines.

3.8.1 Position and Tolerance of Laser Beam Exit

The following figures and attached tables show the positions and tolerances of beam.
Fig.3.8.1(a) Beam exit
Fig.3.8.1(b) Position of laser beam exit
Table 3.8.1 Position of laser beam exit
Model W1W2W3 H
C1000-E 350±5 60 290 657±5 C2000-E
Short path length type
C2000-E
Long path length type
C4000-E
Short path length type
310±5 65 375 876±5
390±5 65 455 876±5
310±5 65 375 811±5
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3.INSTALLATION B-70314EN/01
Table 3.8.1 Position of laser beam exit
Model W1W2W3 H
C4000-E
Long path length type
420±5 65 485 921±5

3.8.2 Beam Divergence

The beam divergence for LASER C1000/C2000/C4000-MODEL E is less than 2 mrad.

3.8.3 Tolerance of Beam Direction

The tolerance of beam direction is ±0.3 degrees. The customer is requested to prepare adjusting mechanism on the machine side to compensate for the beam direction error.

3.8.4 Beam Guide

The laser had better be isolated mechanically from the machine for preventing the coupling between them. The vibration might enter the opponent from each side. It is, however, absolutely necessary to provide the beam guide between them so that the operator is protected from the exposure to the laser beam all the time. The structure of the beam guide must permit the mechanical de-coupling required as shown in the figure.
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B-70314EN/01 3.INSTALLATION

3.9 ELECTRIC CONNECTION

The following cables should be connected to the laser. Refer to the Connecting Manual of the controller (CNC). Cable connection point and clamp of cable refer to Figs.3.9(a) to (c). All cable must be used the cable inlet.
Fig.3.9(a) Cable connection (C1000-E)
Fig.3.9(b) Cable connection (C2000-E)
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3.INSTALLATION B-70314EN/01
Fig.3.9(c) Cable connection (C4000-E)
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B-70314EN/01 3.INSTALLATION

3.9.1 Power Cable (L1, L2, L3)

3.9.2 Ground Cable

3.9.3 I/O Signal Cable

Use the cable with 4 cores. Conductor cross section must be more than 22mm (C2000-E, C4000-E). Outer diameter of cable must be between φ19mm to φ32mm (C1000- E), φ28mm to φ38mm (C2000-E) , φ34mm to φ44mm (C4000-E).
The one of earth cable should be connected to the Cu plate upon which the laser power supply units are mounted. (Earth [<10 ohm], Protective earth). The other of earth cable is protective earth and should be connected to the laser at left upper of input unit. This point is marked "PE".
Optical fiber cable should be connected to COP1B of IF PCB. (Connect Jumper pins LINK1 of IF to COP side.)
2
(C1000-E), 35mm
2
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3.INSTALLATION B-70314EN/01

3.9.4 Other Signal Cables to the IF PCB

1) Emergency stop signal input (ESP1, ESP2) This terminal is shorted usually.
2) OFF prohibition signal (OFI1,OFI2) - (EOF, COM) CNC side A contact Closing the contact to inhibit the OFF switch operation. Connection parallel with the OFF switch. Contact capacity 250VAC, 3A or 30 VDC, 5A.
3) Laser power unit ON/OFF signal (CP1A) When a door interlock is used. Connect 24 VDC whose ON/OFF is controlled by CNC Capacity 24 VDC, 10mA
Fig.3.9.4(a) Layout of IF PCB
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B-70314EN/01 3.INSTALLATION

3.9.5 Safety Interlock

The diagram of safety interlock circuit is shown in Figs.(a) to (c).
Fig.3.9.5(a) Safety interlock circuit (C1000-E)
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3.INSTALLATION B-70314EN/01
Fig.3.9.5(b) Safety interlock circuit (C2000-E)
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B-70314EN/01 3.INSTALLATION
Fig.3.9.5(c) Safety interlock circuit (C4000-E)
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3.INSTALLATION B-70314EN/01
Meaning of signals
1) PF1, PF2 : These are the voltage release terminals of a main
breaker (QF1). Impress the voltage of 24VDC. PF1 : +24V PF2: 0V
2) SHL1, SHL2: When these terminals short, the shutter can be opened. It short of these terminals when shipping.
3) IB1, IB2: When these terminals short, diode laser will turn on.
4) RUN1, RUN2: Connect the RUN key of the operator's panel with the series to these terminals. When the emergency stop switch is pushed, the oscillator will stop the discharge and the pressure control.
5) EMS1, EMS2: Input of emergency stop signal of operator's panel.
6) A1, A2: Power supply for SAFETY BOX from machine side. A1: +24V, A2: 0V, 240 mA MAX.
7) SC: Shutter close state signal Connected load capacity: 24 VDC 3 to 100 mA
To designer of laser processing machine
Use the Emergency Stop Terminal (EMS1, EMS2) of CNL1, in case of stopping the laser oscillator to the interlock switch of machine side.
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B-70314EN/01 3.INSTALLATION

3.9.6 EMC Countermeasure

Cable shield
Install the appended Cable Shield (A04B-0811-D021) in power cable.
Fig.3.9.6 Cable shield
Main power cable (220/200VAC 3φ) is wrapped with CABLE SHIELD and the earth cable of CABLE SHIELD is grounded. In that case, there is no space between CODE GRIP and CABLE SHIELD.
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4.FUNCTIONS B-70314EN/01

4 FUNCTIONS

This chapter describes the internal structure, components, and operating sequence of the laser oscillator.
Contents of this chapter
1.1 INTERNAL STRUCTURE ....................................................... 73
1.2 COMPONENT DETAILS ......................................................... 78
1.3 OPERATION SEQUENCE ....................................................... 85
1.4 LASER PROCESSING MACHINE SYSTEM ......................... 88
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B-70314EN/01 4.FUNCTIONS

4.1 INTERNAL STRUCTURE

Figs.4.1(a) to (c) show the internal structure of the laser oscillator.
Fig.4.1(a) Block diagram (C1000-E)
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4.FUNCTIONS B-70314EN/01
Fig.4.1(b) Block diagram (C2000-E)
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B-70314EN/01 4.FUNCTIONS
Fig.4.1(c) Block diagram (C4000-E)
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4.FUNCTIONS B-70314EN/01

4.1.1 Outline

The FANUC C1000/C2000/C4000-MODEL E consists of a laser resonator, laser excitation power supply, forced gas circulating system, pressure controller, exhaust controller, CNC interface, and a protective housing.
Laser resonator
The laser resonator consists of several discharge tubes, connected in series using folding mirrors, with a rear mirror and output mirror placed at the open ends of the discharge tubes, thus sealing the tubes. The resonator is fitted with a gas pipe connecting port through which laser gas is fed into the discharge tubes. A discharge from the electrodes of the discharge tube energizes CO molecules, which emit light. This light is amplified by stimulated emission, repeated between the rear mirror and output mirror, a laser beam being emitted from the output mirror.
Laser excitation power supply
This is a 2-MHz high-frequency power supply, the output of which is controlled by the CNC. This power supply is used to create a discharge in the laser gas flowing through the discharge tubes, thus energizing CO
molecules.
2
2
Forced gas circulating system
A gas circulating system is configured by connecting the resonator and turbo blower with a circulating pipe. Laser gas is forced through the discharge tubes at a speed of 200 m/s or higher. A water-cooled heat exchanger, used to cool the high-temperature gas from the discharge tubes, is provided at the inlet side of the turbo blower. At the outlet side of the turbo blower, another water-cooled heat exchanger dissipates the compression heat.
Pressure controller
The laser gas pressure within the forced gas circulating system is controlled by commands issued from the CNC, thus ensuring stable laser output.
Exhaust controller
The laser gas flow is controlled by commands issued from the CNC.
CNC interface
Interface used to connect a FANUC Series 16i-L CNC commands that, control the operation of the laser oscillator, such as start/stop and laser output, are input via this interface.
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B-70314EN/01 4.FUNCTIONS
Protective housing
An enclosure that houses the above components. The housing, consisting of metal panels and doors, completely encloses the laser oscillator, thus protecting the operator from exposure to laser radiation and from high voltages. All panels are screw-fixed and cannot be removed without an appropriate tool.
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4.FUNCTIONS B-70314EN/01

4.2 COMPONENT DETAILS

The following describes the details of each component of the laser oscillator. Figs.4.2(a) to (f) show the internal structure.
Fig.4.2(a) Internal structure of C1000-E (Front, maintenance side)
Fig.4.2(a) Internal structure of C1000-E (Back side)
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B-70314EN/01 4.FUNCTIONS
Fig.4.2(c) Internal structure of C2000-E (Front, maintenance side)
Fig.4.2(d) Internal structure of C2000-E (Back side)
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4.FUNCTIONS B-70314EN/01
Fig.4.2(e) Internal structure of C4000-E (Front, maintenance side)
Fig.4.2(f) Internal structure of C4000-E (Back side)
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B-70314EN/01 4.FUNCTIONS
(1) Resonator
The resonator consists of an output coupler, rear mirror, folding mirrors, discharge tubes, power sensor unit, etc. It converts electrical energy first to laser gas, then to optical energy (10.6-m single-wavelength laser beam).
(2) Output coupler
A transmitting/reflecting mirror which outputs the laser beam after it has been amplified. The output coupler consists of a ZnSe (zinc selenide) substrate, coated with dielectric. ZnSe is tightly toxic. Be particularly careful, therefore, when handling the output coupler.
(3) Rear mirror
A reflecting mirror consisting of a Ge (germanium) substrate, coated with dielectric. Having a high reflectance of 99.5%, the rear mirror is used to reflect the laser beam within the resonator while transmitting 0.5% of the laser light so that the beam can be monitored externally.
(4) Folding mirror
The folding mirror, consisting of a 45° block and a gold-coated Si (silicon) substrate, is used to divert the laser beam through 90°. It also linearly polarizes the laser beam.
(5) Discharge tube
A pair of Ag (silver) electrodes are metallized on the surface of a hollow quartz glass pipe. A high-frequency discharge between these electrodes injects electrical energy into the laser gas. Each electrode is coated with ceramic, preventing it from degrading and thus improving system reliability.
(6) Power sensor
An optical sensor which detects the intensity of the laser beam, transmitted through the rear mirror, thus enabling monitoring of the laser output level.
(7) Gas circulating system
A gas circulating path including a turbo blower, heat exchangers, and circulating pipes, which supplies and exhausts laser gas to and from the discharge tubes at high speed.
(8) Turbo blower
During laser oscillation, the laser gas pressure is 100 to 700 (1330 to 9310 Pa) when DGN. The turbo blower circulates this rough-vacuum gas at high speed (up to 200 m/s within the discharge tubes) without contaminating the gas.
(9) Heat exchanger (inlet)
Heat exchanger used to cool the laser gas that has been heated by discharge, before it is drawn into the turbo blower.
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4.FUNCTIONS B-70314EN/01
(10) Heat exchanger (outlet)
Heat exchanger used to cool the laser gas that has been heated by compression in the turbo blower, before being forced into the discharge tubes.
(11) Gas controller (C1000-E)
The gas controller always monitors the gas pressure in each discharge tube and supplies the fresh laser gas to the circulating system to keep the pressure constant. It also monitors the supply status of the laser gas, purge check for the circulating system, and other items and has a function of adjusting the amount of flow of the gas to be exhausted.
(12) Pressure controller (C2000-E, C4000-E)
This unit constantly monitors the gas pressure in the discharge tubes and supplies fresh laser gas to the gas circulating system, thus maintaining a constant pressure in the discharge tubes. This unit also monitors the laser gas supply state and the purging state in the gas circulating system.
(13) Exhaust pump unit
This unit is used to vacuum-exhaust laser gas from the gas circulating system such that its pressure falls to that used for laser oscillation. Also, within this unit, a small amount of circulating gas is constantly being exchanged, to prevent degradation of the circulating gas.
(14) Exhaust controller (C2000-E, C4000-E)
The exhaust controller controls the flow rate of the laser gas exhausted by the exhaust pump unit. It adjusts the gas flow rate from that used for gas exchange to that used for pressure control. In the event of a power failure, the exhaust controller immediately returns the exhaust pump unit to atmospheric pressure, thus protecting the pump.
(15) Hour meter
The hour meter indicates the total number of hours that the laser oscillator has operated (how many hours the exhaust pump has operated), to indicate whether maintenance or inspection is necessary.
(16) Shutter
The shutter consists of a gold-coated reflecting mirror, mounted on the rotating arm of a rotary solenoid. The shutter can be opened and closed instantaneously by issuing a CNC command. For safety, the shutter is equipped with a temperature sensor which allows the system to monitor the temperature of the shutter.
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B-70314EN/01 4.FUNCTIONS
(17) Beam absorber
While the laser oscillator is operating with the shutter closed, the laser beam is guided into the beam absorber. The beam absorber absorbs nearly 100% of laser beam and is water-cooled, allowing it to safely absorb the beam for relatively long periods. For safety, the beam absorber is equipped with a temperature sensor which allows the system to monitor the temperature of the beam absorber.
(18) Water distribution unit
This unit distributes cooling water, supplied from either a chiller unit or a temperature-regulated external water supply, to each unit in the laser oscillator. For safety, the water distribution unit is equipped with a flow sensor which allows the system to monitor the flow rate of the
(19) Laser power supply unit
This unit rectifies and smooths the 3-phase 200/220-VAC input, then supplies DC power to the RF inverter by controlling the PWM DC-DC converter, as directed by commands received from the CNC. The RF inverter converts DC power to 3 kVP
high-frequency
O-P
(2 MHz) power, then outputs it to the matching box.
(20) Matching box
The matching box contains a matching circuit, consisting of coils and capacitors, which ensures that power is effectively input to the discharge tubes. The matching box is connected to the laser power supply unit via either a high-voltage cable or coaxial cable.
(21) Beam folding unit
This unit reverses the direction of the laser beam in the oscillator. Two zero-shift mirrors are used to ensure that the polarization of the light remains constant. The C4000-E (short optical path type) employs a circular polarization mirror as upper one, such that a circularly polarized beam is produced.
(22) Intermediate PCB B
This PCB transmits signals output by the shutter section, such as those from the limit switch, absorber temperature sensor, power sensor, and condensation sensor, to the interface PCB.
(23) Input unit
The input unit consists of an interface PCB, stabilized power supply, and power magnetics cabinet. It transfers signals between the laser oscillator and CNC, and supply power to each unit.
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4.FUNCTIONS B-70314EN/01
(24) Interface PCB
I/O LINK (serial interface). Because this is a serial interface, optical fiber cable can be used to enable long-distance transmission.
(25) Stabilized PSU
This unit converts the 200/220 VAC power source to DC power for the interface PCB and other units.
(26) Input unit (Control PCB)
This PCB sends the contractor open/close signal to the power magnetics cabinet, as directed by commands received from the CNC. It also notifies the CNC of the open/close status of the circuit breaker in the power magnetics cabinet.
(27) Condensation sensor unit (Dew sensor)
Condensation sensor unit is mounted on the output mirror holder. If the sensor detects that the amount of condensation has exceeded the maximum allowable level, an alarm (abnormal water temperature) is issued and laser output is stopped, thus preventing a fault from occurring.
(28) Inverter
This inverter drives the turbo blower. It is responsible for acceleration/deceleration control during start and stop of the blower.
(29) Guide laser (Lase diode unit)
A CO
laser beam is invisible to the naked eyes. The
2
semiconductor light source, therefore, is provided to enable checking of the laser beam optical axis by superimposing a visible semiconductor laser beam on the same optical axis. The operation of this light source is linked to the mechanical shutter. The semiconductor laser beam is output only while the shutter is closed. Using this beam, the optical axis of the external optical system can be adjusted roughly and a reference position for the machining point determined.
(30) Turbo PCB
This PCB relays signals between the turbo blower and inverter, interface PCB.
(31) Trigger electrode
With preparatory discharge outside the laser oscillation area, main discharge can be started easily, and the laser output becomes completely zero at beam-off time.
(32) Safety box
This is consisted of relay and indicator for interlock circuit. (Run ON, HV ON, Shutter open)
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B-70314EN/01 4.FUNCTIONS
(
)

4.3 OPERATION SEQUENCE

Laser oscillator is controlled by CNC. When you turn on the start key (run key), start sequence and calibrate laser power automatically. You make program of material processing only. When you turn off the start key, stop sequence and oscillator stops automatically. It is not necessary for you that daily calibration or periodic calibration. Following shows outline of laser sequences.
(1) Outline of laser oscillation sequences
SEQ 0
PURGE = 0
LRDY = 0
PTLP = 0 LSTR = 0
CNC POWER ON CNC POWER OFF
SEQ 10
(START KEY)
RUN ON
(WAIT=1)
HV ON
(RFHV=1)
PURGE = 1
LRDY = 0 PTLP = 0 LSTR = 0
SEQ 20
PURGE = 0
LRDY = 1
PTLP = 0 LSTR = 0
SEQ 30
PURGE = 0
LRDY = 0
PTLP = 1 LSTR = 1
READY OF DISCHARGING
READY OF BEAM ONOSCILLATION
INITIAL
(WAIT=1)
START KEY
RUN OFF
(RFHV=0)
HV OFF
As is shown in the flow chart, the laser oscillation sequences can be divided into four steps. Throughout this description the following notation are used. RUN Oscillator start switch PURGE Purge in tube completion signal LRDY Discharge preparation completion signal PTLP Warning light signal LSTR Oscillation preparation completion signal
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4.FUNCTIONS B-70314EN/01
[SEQ0] POWER OFF state
This is the state prior to power on where all the signals are in off state.
[SEQ10] INITIAL state
After power is turned on, laser comes into PURGE=1 state. This signal is on when atmospheric pressure sensor monitors that the intra-tube pressure equals atmospheric pressure. Usually when this signal is on, purge completion lamp on operational board is lit.
[SEQ20] READY OF DISCHARGING state
When oscillator start switch is turned on, evacuation is carried on and then gas pressure control begins. When gas pressure reaches the set value, laser comes into discharge preparation completion (LRDY) state and it becomes possible to turn on HV.
[SEQ30] READY OF BEAM ON OPERATION state
When HV (high voltage command) is turned on, high voltage is applied to discharge tube. Then with the command from CNC, base discharge is established. Further intra-tube pressure control is performed. When this is completed normally, laser comes into oscillation preparation complete state.
(2) Display of laser sequence
A number indicating a sequence status is displayed on diagnosis screen DGN. 908.
RUN ON Sequence
No. Status of laser sequence
10 Purge complete (Oscillator stop) 16 Rough evacuating from turbo blower (Exhaust pump ON) 17 Arrival wait of PRM.15240 18 Arrival wait of turbo blower rated rotation (Turbo blower ON) 20 LRDY
HV ON (High voltage ON)
No. Status of laser sequence
26 HVON (Discharge at low pressure) 27 Discharge pressure increase 28 Calibrating of laser power 30 LSTR
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B-70314EN/01 4.FUNCTIONS
RUN OFF Sequence
No. Status of laser sequence
30 LSTR 23 Switch over to gas pressure of LRDY from gas pressure of
LSTR 20 LRDY 14 75 sec wait 49 Exhaust after turning off the RUN KEY 50 75s wait at run restrart 12 Purge wait 10 Purge complete
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4.FUNCTIONS B-70314EN/01

4.4 LASER PROCESSING MACHINE SYSTEM

The material processing machine using FANUC LASER C1000/C2000/C4000-MODEL E is usually composed in the configuration shown in the figure. In the figure the rectangular parts of the solid line are FANUC products. In the below each component are explained.
(1) Laser oscillator
FANUC provides C1000-MODEL E, C2000-MODEL E, and C4000-MODEL E.
(2) Beam bender
This is the laser beam guide connecting beam path between the oscillator and the focussing unit.
Laser gas
unit
Chiller
unit
I/O device
Guide Laser (Laser diode)
FANUC LASER
Laser
Oscillator
FANUC
Series 16i-L
PMC
CNC
Beam Beam
200/220VAC
Bender
Assist gas unit
Machine
Operator
Panel
CRT/MDI
Focussing
unit
Beam
AC Servo
Motor
Fig. 4.4 System configurations
NOTE
Components encircled by solid lines are provided by FANUC
(3) Focussing unit
This outgoing beam from the beam bender is focussed to a minute spot using a focussing element of this unit. Usually this unit takes the form integrated with a nozzle for assist gas injection.
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B-70314EN/01 4.FUNCTIONS
(4) Guide laser (Laser diode)
A diode laser is used for coarse-control of the optical system axis after a light beam is output from the oscillator. This laser can also be used to identify the point to be machined.
(5) Assist gas unit
In laser material processing the injection of assist gas is required onto the cutting spot. It work to cause exothermic reaction, blow off molt or cool the work.
(6) Laser gas unit
Pre-mixed laser gas consisting of CO2, N2, and He is introduced to the laser oscillator from this unit.
(7) Chiller unit
This unit supplies cooling water to laser resonator, power unit, and optics. As the cooling water temperature affects the stability of laser output power, the chiller works to control the water temperature within the required range.
(8) CNC
This CNC regulates FANUC LASER C1000/C2000/C4000­MODEL E and the work table.
(9) PMC
The CNC for FANUC LASER C1000/C2000/C4000-MODEL E requires the use of PMC regulating the interface between CNC and machine.
(10) CRT/MDI
The CRT/MDI units for FANUC LASER C1000/C2000/C4000­MODEL E are either a 9 inches monochrome CRT or 14 inches multicolor one.
(11) Operator's panel
For operating laser oscillator as well as CNC, an operator's panel are required.
(12) AC servomotor
The customer can select among FANUC AC servomotors for their use.
(13) I/O device
The CNC is provided with a reader/puncher interface and can be connected with any among FANUC I/O devices.
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5.MAINTENANCE B-70314EN/01

5 MAINTENANCE

In FANUC LASER C1000/C2000/C4000-MODEL E, periodic inspection items have been reduced, and adjustments have been made easy. To keep the oscillator in a satisfactory operating condition over a long period, however, it is necessary to carry out periodic maintenance (including daily maintenance) described in this chapter. The oscillator is designed to maintain the same performance and reliability as it has when it is installed, provided that maintenance is carried out as prescribed.
Contents of this chapter
5.1 DAILY INSPECTION............................................................... 91
5.2 PERIODIC MAINTENANCE................................................... 92
5.3 DETAILS OF MAINTENANCE............................................... 93
5.3.1Maintenance Panels and Oil Gauge Position..................... 93
5.3.2Turbo Blower Oil............................................................... 97
5.3.3Exhaust Pump Oil .............................................................. 97
5.3.4Exhaust Pump Filter ........................................................ 100
5.4 AGING..................................................................................... 101
5.4.1Leak Check Method......................................................... 101
5.4.2Aging Method.................................................................. 102
5.5 MAINTENANCE PARTS....................................................... 104
5.5.1Spare Parts ....................................................................... 104
5.5.2Maintenance Tools .......................................................... 105
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B-70314EN/01 5.MAINTENANCE

5.1 DAILY INSPECTION

Table 5.1 lists daily inspection items. Inspect the FANUC LASER C1000/C2000/C4000-MODEL E according to this table. When parts (including oil) have been used for a prescribed period, replace them quickly.
Table 5.1 Daily inspection items for FANUC LASER C1000/C2000/C4000-MODEL E
Item Period Content and instruction
Check to see if the primary pressure is 10 MPa or less as measured at the
1 Residual laser gas Daily
2 Exhaust pump oil Weekly
3 Exhaust pump oil leak Weekly
4 Turbo blower oil W e ekly
5 Turbo blower oil leak Weekly
6 Laser output Weekly
Daily Make sure that the chiller discharge output is 0.5 MPa or less.
7 Cooling water
Weekly
regulator on the laser gas cylinder. If the primary pressure is 10 MPa or lower, replace the gas cylinder. See Section 5.6 for the gas specifications. Make sure that the oil level is between L (minimum) and H (maximum). Usually, oil is supplied until the oil level is in the middle between L and H. If the oil level is below L, supply oil according to Section 5.3.3. Be sure to replace the oil periodically, every 6 months of use or every 1500 hours of operation, whichever is earlier. Make sure that no oil is leaking from the vane pump main body, drain cock and their periphery. If oil is leaking, immediately replace the exhaust filter according to Section 5.3.4, because it is likely to have been clogged. Be sure to replace the exhaust filter periodically, every one year of use or every 3000 hours of operation, whichever is earlier. Make sure that the oil level is between L (minimum) and H (maximum) according to Fig. 5.3.2. Usually , oil is suppled until the oil level is at 3/4 above L. If the oil level is below L, supply oil according to Section 5.3.2. Be sure to replace the oil periodically, every 4 months of use or 1000 hours of operation, whichever is earlier. Make sure that no oil is leaking from the turbo blower main body, oil inlet, cock, and their periphery. If oil is leaking, locate the leak. If oil leaks for any reason other than a cock being open, call FANUC.
1. Check to see if the laser output measured at the outlet of the short optical path oscillator is 5% or more lower than the specified output. If this is the case, clean or replace the optical components in the external reflection unit.
2. If the laser output decreases within the oscillator, warning message No. 4085 is issued. If this message appears, clean or replace the mirror in the oscillator quickly.
Check the quality of cooling water circulating in the chiller. If the water is colored badly, replace it completely. Be sure to replace the cooling water every two months. Adding an anticorrosive to cooling water can decrease the replacement frequency. See Section 5.5 for descriptions about the anticorrosive.
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5.MAINTENANCE B-70314EN/01

5.2 PERIODIC MAINTENANCE

Table 5.2 shows the periodic maintenance items and the periods. The operation hour can be known from the indication of hour meter. When the indicated periods are more than one, employ the one whichever comes first.
Table 5.2(a) Periodic maintenance items and periods
Item
C1000-E C2000-E C4000-E
1 Output mirror cleaning 2 Rear mirror cleaning 3 Folding mirror cleaning 3000 to 4000 h 4 0-shift mirror cleaning 1000h or processing quality go wrong 5 Output mirror change 6 Rear mirror change 7 Folding mirror change 4000h or inferior beam mode 8 0-shift mirror change 3000h or inferior beam mode
9 Exhaust pump oil change 1500h or low exhaust ability 10 Exhaust pump filter change 3000h or low exhaust ability 11 Exhaust pump overhaul 10000h or low exhaust ability 12 Turbo blower oil change 1000h or inferior turbo blower oil 13 Turbo blower overhaul 12000h or low turbo blower ability 14 Pressure control filter change 12000h or pressure alarm occurs 15 Discharge tube O-ring change 6000h or intra-cavity leakage occurs 16 Cooling water 1500h or inferior water quality 17 Water tubing cleaning 3000h or water flow is blocked 18 Beam absorber 15000h or over heat alarm occurs 19 Nylon tube 15000h 20 Cable 15000h
1500 to 2000 h 1500 to 2000 h 800 to 1200 h
Interval of maintenance (Operation hour)
4000h or inferior beam mode
3000h or inferior beam
mode
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B-70314EN/01 5.MAINTENANCE

5.3 DETAILS OF MAINTENANCE

When opening the panels during maintenance, keep the power turn off.

5.3.1 Maintenance Panels and Oil Gauge Position

Be sure to open the panel indicated in Figs.5.3.1(a) to (c) before replacing oil or the filter during daily maintenance.
Fig.5.3.1(a) Maintenance panel (C1000-E)
Fig.5.3.1(b) Maintenance panel (C2000-E)
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5.MAINTENANCE B-70314EN/01
Fig.5.3.1(c) Maintenance panel (C4000-E)
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