fanuc C1000, C2000, C4000 Maintenance Manual

GE Fanuc Automation

Computer Numerical Control Products

Laser C1000 / C2000 / C4000―Model E for CE Mark

Maintenance Manual

GFZ-70315EN/01 May 2001

Warnings, Cautions, and Notes as Used in this Publication

Warning notices are used in this publication to emphasize that hazardous voltages, currents, temperatures, or other conditions that could cause personal injury exist in this equipment or may be associated with its use.

In situations where inattention could cause either personal injury or damage to equipment, a Warning notice is used.

Caution notices are used where equipment might be damaged if care is not taken.

GFL-001

Warning

Caution

Note

Notes merely call attention to information that is especially significant to understanding and operating the equipment.

This document is based on information available at the time of its publication. While efforts have been made to be accurate, the information contained herein does not purport to cover all details or variations in hardware or software, nor to provide for every possible contingency in connection with installation, operation, or maintenance. Features may be described herein which are not present in all hardware and software systems. GE Fanuc Automation assumes no obligation of notice to holders of this document with respect to changes subsequently made.

GE Fanuc Automation makes no representation or warranty, expressed, implied, or statutory with respect to, and assumes no responsibility for the accuracy, completeness, sufficiency, or usefulness of the information contained herein. No warranties of merchantability or fitness for purpose shall apply.

B-70315EN/01 TABLE OF CONTENTS

1 OVERVIEW

This manual describes the maintenance of the FANUC LASER C1000/C2000/C4000-MODEL E, as well as the structure, configuration, and operation of the laser oscillator. This manual is aimed at those personnel responsible for laser oscillator maintenance.

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1.OVERVIEW B-70315EN/01

1.1 ORGANIZATION OF THE MANUAL

This manual is organized as described below.

1. Overview This chapter describes the organization of this manual, applicable models, related manuals, and notes on reading this manual.

2. Safety This chapter describes the handling of lasers, and provides warnings, cautions and notes on high voltages, high temperatures, and toxicity. All users must read this chapter carefully to ensure safety.

3. Internal Structure This chapter describes the structure and operation of the laser oscillator.

4. Installation This chapter describes the installation and checking of the laser oscillator.

5. Maintenance This chapter provides information on when and how the consumable parts of the laser oscillator must be replaced.

6. Troubleshooting This chapter describes the actions to be applied in the event of a fault occurring in the laser oscillator.

7. Oscillator Connections This chapter describes the internal connections of the electrical system, cooling system, and gas system.

8. Unit Configuration This chapter describes the internal units of the laser oscillator.

9. Setting and Adjustment This chapter describes how to set and adjust the controls of the laser oscillator.

10. Replacement Procedures This chapter describes how to replace the individual units and parts of the laser oscillator.

11. Laser Optical System This chapter describes how to clean, replace, and align the optical components of the laser oscillator.

Appendix

1. Appearance of the Laser Oscillator

2. FANUC LASER C series Specifications

3. Error Code List

4. Parameters

5. Control Sequences in Laser Oscillator

6. Refixing and Replacing Gas Tube

7. Refixing and Replacing Water Tube

8. Glossary

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B-70315EN/01 1.OVERVIEW

1.2 APPLICABLE MODELS

This manual covers the following models :

Model Abbreviation

FANUC LASER C1000-MODEL E C1000-E FANUC LASER C2000-MODEL E C2000-E FANUC LASER C4000-MODEL E C4000-E

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1.OVERVIEW B-70315EN/01

1.3 RELATED MANUALS

The following manuals are available for the FANUC LASER C1000/ C2000/C4000-MODEL E :

DESCRIPTIONS B-63192EN CONNECTION MANUAL B-63193EN

FANUC Series 16i-LA

OPERATOR’S MANUAL B-63194EN MAINTENANCE MANUAL B-63195EN PARAMETER MANUAL B-63200EN

FANUC LASER C1000/C2000/C4000-MODEL E

OPERATOR’S MANUAL B-70314EN

MAINTENANCE MANUAL (This manual)

B-70315EN

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B-70315EN/01 1.OVERVIEW

1.4 TO USE THE LASER OSCILLATOR SAFETY

In this manual, the words Warning and Caution, corresponding to different levels of safety requirements, are provided to ensure the user's safety and protect against damage to the laser oscillator. Moreover, sections entitled Note are used to provide supplementary information. Before attempting to use the laser oscillator, read Section 2.1 to 2.11, and also the descriptions in the Warnings, Cautions, and Notes that appear in the text.

WARNING

Precautions to be applied in those situations where there is a danger of the operator being killed or seriously injured.

CAUTION

Precautions to be applied in those situations where there is a danger of the operator being slightly injured or the oscillator being damaged.

NOTE

Supplementary information other than precautions.

Before starting any maintenance work, take time to become familiar with the functions of the individual units constituting the laser oscillator, the relationships between the units, and the locations where the units are installed.

WARNING

Never attempt handling, adjustment, or replacement work using a method or procedure other than those described and specified in this manual. Otherwise, dangerous laser light may be emitted.

The function of the laser machining system depends not only on the laser oscillator but also on other system components such as the machine, power magnetics cabinet, servo system, CNC, and operator's panel. This manual covers the laser oscillator only. For information about equipment other than the laser oscillator, refer to the appropriate manuals provided by the machine tool builder.

Take time to become familiar with the contents of this manual. Store this manual in a safe place.

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2.SAFETY B-70315EN/01

2 SAFETY

C1000-E, C2000-E, and C4000-E produce the rated output laser power of 1000W, 2000W, and 4000W. The CO wavelength of 10.6 µm, far infrared, and is invisible to human eyes. The adequate care must be taken when CO therefore. When removing the panel, always turn the power source off and confirm no power is applied to the laser machine.

This oscillator fulfills the requirements of the relevant product safety standard of EN60825-1:1994.

laser beam is the

2

laser is operated,

2

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B-70315EN/01 2.SAFETY

2.1 LASER BEAM

1) Potential hazards Laser oscillator emits CO power and invisible.

• Being directly exposed to the CO

burn you.

• The CO

beam could bource off your workpiece and burn

2

your eyes or skin. LASER oscillator have a guide laser. The guide laser beam is visible (red color) and low power. It is used to ensure that the CO

beam is correctly positioned on your workpiece.

2

• The diode laser beam is not considered harmful to your skin.

But if you stared head on into the guide laser beam, it could harm your eyes.

2) Safety recommendations Never expose the eyes and skin to the laser beam. Be careful of the laser beam when performing the inspection and maintenance. Do not turn on the power supply to the oscillator when the panel open and do not drive. It is bleached to radiation of the laser beam and high voltage. Do the countermeasure (For instance, installs safety glasses and the protection gloves) to danger in case of stopped no finish and nor opening the panel while it energizes the oscillator. Install beam safety cover after mirror cleaning or replacement. And if not beam safety cover installation, do not operation and alignment. Confirm when it does alignment, the protection pipe (Safety cover) is installed. If it dose not install the protection pipe, it will put the finger in the laser beam and there is possibility to do the burn. When entering the area exposed to the scattered beam, wear the safety glasses. Mount the stand made of acrylic resin or any material which can absorb the CO personnel from the scattered beam. Avoid exposure of any part of your body to the CO When testing the beam output, any personnel other than the maintenance personnel should be out of the working environment. In designing a material processing machine utilizing laser oscillator, be sure that the CO workpiece only through the enclosed beam delivery system. This prevents the exposure to laser beam by the operator switch could otherwise take place. It is absolutely necessary to include the instructions given here in the manuals of the laser materialprocessing machine as a whole, which are to be read.

laser beam(10.6 µm), which is high

2

beam could severely

2

laser beam to protect the

2

laser beam.

2

laser beam goes from laser to the

2

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2.SAFETY B-70315EN/01

3) Position of laser beam emission Fig.2.1(a) is the position of panel that laser beam exposure is occurred without panel in C1000-E, when your maintenance. Fig.2.1(b) is the position of panel that laser beam exposure is occurred without panel in C2000-E, when your maintenance. Fig.2.1(c) is the position of panel that laser beam exposure is occurred without panel in C4000-E, when your maintenance. Fig.2.1(d) is the position of laser beam delivery in C1000-E. Fig.2.1(e) is the position of laser beam delivery in C2000-E. Fig.2.1(f) is the position of laser beam delivery in C4000-E.

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B-70315EN/01 2.SAFETY

Fig.2.1(a) Laser beam exposure position without panel as operating (C1000-E)

Fig.2.1(b) Laser beam exposure position without panel as operating (C2000-E)

Fig.2.1(c) Laser beam exposure position without panel as operating (C4000-E)

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2.SAFETY B-70315EN/01

Fig.2.1(d) The position of laser beam delivery (C1000-E)

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B-70315EN/01 2.SAFETY

Fig.2.1(e) The position of laser beam delivery (C2000-E)

Fig.2.1(f) The position of laser beam delivery (C4000-E)

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2.SAFETY B-70315EN/01

2.2 HIGH VOLTAGE

1) Potential hazards There is RF voltage of 3 to 4kVo-p in the cabinet of the laser oscillator. There is 200 VAC power in the relay panel, be careful not to touch the high voltage.

2) Safety recommendations When it checks the oscillator and exchange the unit, intercept a main breaker of the oscillator and the power supply. Lock the breaker to prevent misconnection and display the sign while working. Install safety cover after unit replacement or cable connection. Unless safety cover is installed, never perform operation. Follow standard industrial safety practices for working with high voltage. EXAMPLES

• Do not work on the laser oscillator if you are tired or have

taken medicine.

• Do not wear anything metal, like a ring, bracelet, watch,

belt buckle, earrings, or keys.

• They might contact high voltage.

• Never stand on a wet surface.

• Do not touch electrical components in the cabinets with

both hands at once. Keep one hand in a pocket.

3) Position of high voltage Fig.2.2(a) is the position of high voltage in C1000-E (Front, maintenance side). Fig.2.2(b)is the position of high voltage in C1000-E (Back side). Fig.2.2(c) is the position of high voltage in C2000-E (Front, maintenance side). Fig.2.2(d)is the position of high voltage in C2000-E (Back side). Fig.2.2(e) is the position of high voltage in C4000-E (Front, maintenance side). Fig.2.2(f) is the position of high voltage in C4000-E (Back side).

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B-70315EN/01 2.SAFETY

Fig.2.2(a) Position of high voltage in C1000-E (Front, maintenance side)

Fig.2.2(b) Position of high voltage in C1000-E (Back side)

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2.SAFETY B-70315EN/01

Fig.2.2(c) Position of high voltage in C2000-E (Front, maintenance side)

Fig.2.2(d) Position of high voltage in C2000-E (Back side)

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B-70315EN/01 2.SAFETY

Fig.2.2(e) Position of high voltage in C4000-E (Front, maintenance side)

Fig.2.2(f) Position of high voltage in C4000-E (Back side)

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2.SAFETY B-70315EN/01

2.3 SAFETY ENCLOSURE (AT YOUR WORK STATION)

1) Potential hazards CO

beam is delivery from oscillator. Direct or scattered beam is

2

exposed.

2) Safety recommendations Mount the safety enclosure made of acrylic resin which can absorb the laser beam around the working environment. Mount the interlock switch on the safety enclosure door which extinguishes the laser beam output when the door is open. Never perform operation without safety cover of laser machine.

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B-70315EN/01 2.SAFETY

2.4 FIRE

1) Potential hazards When you work with the laser oscillator or machine, hot fragments or slag can scatter from your workpiece. The CO beam or a reflection of it could ignite flammable material.

2) Safety recommendations The direct or scattered laser beam can ignite flammable materials such as paper, cloth, and wood. Provide a beam absorber behind the workpiece and around it during maintenance. The absorber can be anodized aluminum, graphite or brick.Put a shield between yourself and the workpiece when the CO Even diffuse reflections can harm eyes and skin and may ignite flammable material.

beam is on.

2

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2.SAFETY B-70315EN/01

2.5 TOXIC FUME

1) Potential hazards Some materials such as certain plastics can emit toxic fume when they burn under the laser beam.

2) Safety recommendations Install the exhaust system to remove toxic fume from the work environment. Consult the manufacturer of the material you are processing to learn if it creates any fumes when heated or burned.

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B-70315EN/01 2.SAFETY

2.6 HIGH TEMPERATURE

1) Potential hazards When you touch a part of high temperature, your skin burn.

2) Safety recommendations The pipes of the gas circular system are very a high temperature. Do not touch pipes, heat exchanger and turbo blower because it does not do the burn. It is hot immediately after having stopped driving. After getting cold enough in case of removing, dismount it.

3) Position of high temperature Fig.2.6(a) is the position of high temperature in C1000-E (Front, maintenance side). Fig.2.6(b) is the position of high temperature in C1000-E (Back side). Fig.2.6(c) is the position of high temperature in C2000-E (Front, maintenance side). Fig.2.6(d) is the position of high temperature in C2000-E (Back side). Fig.2.6(e) is the position of high temperature in C4000-E (Front, maintenance side). Fig.2.6(f) is the position of high temperature in C4000-E (Back side).

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2.SAFETY B-70315EN/01

Fig.2.6(a) Position of high temperature in C1000-E (Front, maintenance side).

Fig.2.6(b) Position of high temperature in C1000-E (Back side).

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B-70315EN/01 2.SAFETY

Fig.2.6(c) Position of high temperature in C2000-E (Front, maintenance side).

Fig.2.6(d) Position of high temperature in C2000-E (Back side).

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2.SAFETY B-70315EN/01

Fig.2.6(e) Position of high temperature in C4000-E (Front, maintenance side).

Fig.2.6(f) Position of high temperature in C4000-E (Back side).

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B-70315EN/01 2.SAFETY

2.7 WARNING LABELS

Fig.2.7(a)-(f) show the location of the warning labels indicating the high voltage and laser beam path. Fig.2.7(a) is the location of the warning sticker (C1000-E:Front side). Fig.2.7(b) is the location of the warning sticker (C1000-E:Back side). Fig.2.7(c) is the location of the warning sticker (C2000-E:Front side). Fig.2.7(d) is the location of the warning sticker (C2000-E:Back side). Fig.2.7(e) is the location of the warning sticker (C4000-E:Front side). Fig.2.7(f) is the location of the warning sticker (C4000-E:Back side).

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2.SAFETY B-70315EN/01

Fig.2.7(a) Location of the warning sticker (C1000-E:Front side).

Fig.2.7(b) Location of the warning sticker (C2000-E:Back side).

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B-70315EN/01 2.SAFETY

Fig.2.7(c) Location of the warning sticker (C2000-E:Front side).

Fig.2.7(d) Location of the warning sticker (C2000-E:Back side).

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2.SAFETY B-70315EN/01

Fig.2.7(e) Location of the warning sticker (C4000-E:Front side).

Fig.2.7(f) Location of the warning sticker (C4000-E:Back side).

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B-70315EN/01 2.SAFETY

Detail of warning sticker

(1) Warning logotype (C1000-E)

(1) Warning logotype (C2000-E, C4000-E)

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2.SAFETY B-70315EN/01

(2) Warning logotype

(3) Label for defeasible non-interlocked protective housing

(4) Label for defeasible non-interlocked protective housing

(5) Caution label for lifting

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B-70315EN/01 2.SAFETY

(6) Aperture label

(7) Label of non-interlocked protective panel

(8) Identification label

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2.SAFETY B-70315EN/01

(9) Address label

(10) High voltage warning label

(11) Supply voltage label

(12) Label of over-current protective

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B-70315EN/01 2.SAFETY

(13) Label of motor and transformer (C1000-E)

(13) Label of motor and transformer (C2000-E)

(13) Label of motor and transformer (C4000-E)

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2.SAFETY B-70315EN/01

(14) Label of warning light

(15) Maintenance label

(16) Certification label

(17) Short-circuit interrupting capacity of main breaker (C1000-E)

(17) Short-circuit interrupting capacity of main breaker (C2000-E,

C4000-E)

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B-70315EN/01 2.SAFETY

(18) Label for regurating the atmospheric gases in the oscillator

housing

(19) Label for cooling water and laser gas

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2.SAFETY B-70315EN/01

2.8 HIGH-PRESSURE GAS

Do not allow any dangerous or high-pressure gas to get into the oscillator housing. The oscillator cabinet has a hermetic structure (dustproof and dripproof), it cannot be ventilated easily. Flammable gases such as oxygen can cause a fire or explosion. Toxic gases can harm operators during maintenance. Organic gases can degrade machining performance. High-pressure gases can damage a panel or the cabinet, resulting in injury from flying matters. If such a gas accidentally gets into the oscillator housing, remove a panel for ventilation. The installation room must be also well ventilated. To purge the oscillator housing, use purified, low-pressure air or nitrogen.

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B-70315EN/01 2.SAFETY

2.9 KEY CONTROL

All the laser products have to comply with the various kinds of laser safety regulations, which include the use of key control. For instance, FDA PART 1040 PERFORMANCE STANDARDS FOR LIGHTEMITTING PRODUCTS, Sec 1040. 10 (f), (4) states: "Each laser system classified as a Class IIIb or IV laser product shall incorporate a key-actuated master control. The key shall be removable and the laser shall not be operable when the key is removed" and EN60825-1:1994,

4.5 Key control state "Any laser system belonging to one of the

following classes shall incorporate a key operation master control: Class 4 and Class 3B, except for Class 3B with not more than five times the AEL of Class 2 in the wavelength range from 400 nm to 700 nm. The key shall be removable and the laser radiation shall not be accessible when the key is removed."

Because the laser package products offered by FANUC cannot produce the laser beam as they are in the state of shipment, the system integrator who incorporates FANUC products into the system, which generates the laser beam, is obliged to incorporate the master key as defined by the relevant regulation.

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2.SAFETY B-70315EN/01

2.10 SHUTTER LOCK

The shutter lock is prepared because it dose not put out the laser beam by mistake. If you do not put out the beam, lock the shutter.

Use the mechanical switch at shutter lock switch, not electrical component (Relay)or switching circuit (Transistor, FET). Use the one with the compulsion dissociation mechanism for the switch used for the shutter lock circuit and the switch for welding prevention.

To designer of laser processing machine

1 Use a mechanical switch for the switch used to lock

the shutter. Do not use an electric switch (For instance, transistor circuit, etc.). Moreover, use the one with the contact dissociation mechanism to prevent welding for a mechanical switch.

2 Put it in the series of the contact of the emergency

stop button in the shutter lock circuit. When the emergency stop switch is pushed, it is necessary to intercept the power supply to the shutter.

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B-70315EN/01 2.SAFETY

2.11 EMERGENCY STOP BUTTON

Press the emergency stop button when it is dangerous and breaks down. The oscillator is stopped discharging, gas pressure control and stand by purge state.

Use the one with the compulsion dissociation mechanism for the relay used for the emergency stop circuit and the switch for welding prevention.

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2.SAFETY B-70315EN/01

2.12 WARNING LIGHT (OPTIONAL)

Laser oscillator is equipped with the warning light optionally. The light is flashed during discharging and ready of laser beam emission. Be careful of laser beam and high voltage.

To designer of laser processing machine

In EN60825-1, it needs the design with the fail safe or redundant for warning equipment. The redundant warning light is needed near the work-point of processing machine. The warning light is prepared for the oscillator. Select this as a warning light more than the second for the fail safe.

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B-70315EN/01 3.INTERNAL STRUCTURE

3 INTERNAL STRUCTURE

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3.INTERNAL STRUCTURE B-70315EN/01

3.1 GENERAL

Figs.3.1(a) to (c) show the block diagram of the laser oscillator. The FANUC LASER C1000/C2000/C4000-MODEL E consists of a laser resonator, laser excitation power supply, forced gas circulating system, pressure controller, exhaust controller, CNC interface, and a protective housing.

Fig.3.1(a) Block diagram (C1000-E)

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B-70315EN/01 3.INTERNAL STRUCTURE

Fig.3.1(b) Block diagram (C2000-E)

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3.INTERNAL STRUCTURE B-70315EN/01

Fig.3.1(c) Block diagram (C4000-E)

(1) Laser resonator

The laser resonator consists of several discharge tubes, connected in series using folding mirrors, with a rear mirror and output mirror placed at the open ends of the discharge tubes, thus sealing the tubes. The resonator is fitted with a gas pipe connecting port through which laser gas is fed into the discharge tubes. A discharge from the electrodes of the discharge tube energizes CO

molecules, which emit light. This light is amplified by

2

stimulated emission, repeated between the rear mirror and output mirror, a laser beam being emitted from the output mirror.

(2) Laser excitation power supply

This is a 2 MHz high-frequency power supply, the output of which is controlled by the CNC. This power supply is used to create a discharge in the laser gas flowing through the discharge tubes, thus energizing CO

molecules.

2

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B-70315EN/01 3.INTERNAL STRUCTURE

(3) Forced gas circulating system

A gas circulating system is configured by connecting the resonator and turbo blower with a circulating pipe. Laser gas is forced through the discharge tubes at a speed of 200 m/s or higher. A water-cooled heat exchanger, used to cool the hightemperature gas from the discharge tubes, is provided at the inlet side of the turbo blower. At the outlet side of the turbo blower, another water-cooled heat exchanger dissipates the compression heat.

(4) Pressure control unit

The laser gas pressure within the forced gas circulating system is controlled by commands issued from the CNC, thus ensuring stable laser output.

(5) Exhaust control unit

The laser gas flow is controlled by commands issued from the CNC.

(6) CNC interface

Interface used to connect a FANUC Series 16i-L. CNC commands that, control the operation of the laser oscillator, such as start/stop and laser output, are input via this interface.

(7) Protective housing

An enclosure that houses the above components. The housing, consisting of metal panels and doors, completely encloses the laser oscillator, thus protecting the operator from exposure to laser radiation and from high voltages. All panels are screwfixed and cannot be removed without an appropriate tool. The doors are also designed to prevent an accident from occurring as a result of careless operation. The doors can be opened only when the main circuit breaker is open. A door interlock function is also supported.

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3.INTERNAL STRUCTURE B-70315EN/01

3.2 COMPONENT DETAILS

The following describes the details of each component of the laser oscillator. Figs.3.2(a) to (f) show the internal structure.

Fig.4.2(a) Internal structure of C1000-E (Front, maintenance side)

Fig.4.2(b) Internal structure of C1000-E (Back side)

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B-70315EN/01 3.INTERNAL STRUCTURE

Fig.4.2(c) Internal structure of C2000-E (Front, maintenance side)

Fig.4.2(d) Internal structure of C2000-E (Back side)

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3.INTERNAL STRUCTURE B-70315EN/01

Fig.4.2(e) Internal structure of C4000-E (Front, maintenance side)

Fig.4.2(f) Internal structure of C4000-E (Back side)

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B-70315EN/01 3.INTERNAL STRUCTURE

(1) Resonator

The resonator consists of an output coupler, rear mirror, folding mirrors, discharge tubes, power sensor unit, etc. It converts electrical energy first to laser gas, then to optical energy (10.6mm single-wavelength laser beam).

(2) Output coupler

A transmitting/reflecting mirror which outputs the laser beam after it has been amplified. The output coupler consists of a ZnSe (zinc selenide) substrate, coated with dielectric. ZnSe is tightly toxic. Be particularly careful, therefore, when handling the output coupler.

(3) Rear mirror

A reflecting mirror consisting of a Ge (germanium) substrate, coated with dielectric. Having a high reflectance of 99.5%, the rear mirror is used to reflect the laser beam within the resonator while transmitting 0.5% of the laser light so that the beam can be monitored externally.

(4) Folding mirror

The folding mirror, consisting of a 45° block and a gold-coated Si (silicon) substrate, is used to divert the laser beam through 90°. It also linearly polarizes the laser beam.

(5) Discharge tube

A pair of Ag (silver) electrodes are metallized on the surface of a hollow quartz glass pipe. A high-frequency discharge between these electrodes injects electrical energy into the laser gas. Each electrode is coated with ceramic, preventing it from degrading and thus improving system reliability.

(6) Trigger electrode

A predischarge placed outside the laser oscillation area can facilitate the start of the main discharge. With it, the laser output is completely zero when the beam is off.

(7) Power sensor

An optical sensor which detects the intensity of the laser beam, transmitted through the rear mirror, thus enabling monitoring of the laser output level.

(8) Gas circulating system

A gas circulating path including a turbo blower, heat exchangers, and circulating pipes, which supplies and exhausts laser gas to and from the discharge tubes at high speed.

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3.INTERNAL STRUCTURE B-70315EN/01

(9) Turbo blower

During laser oscillation, the laser gas pressure is 100 to 700 (1330 to 9310 Pa) when DGN. The turbo blower circulates this rough-vacuum gas at high speed (up to 200 m/s within the discharge tubes) without contaminating the gas.

(10) Heat exchanger (inlet)

Heat exchanger used to cool the laser gas that has been heated by discharge, before it is drawn into the turbo blower.

(11) Heat exchanger (outlet)

Heat exchanger used to cool the laser gas that has been heated by compression in the turbo blower, before being forced into the discharge tubes.

(12) Gas controller (C1000-E)

The gas controller always monitors the gas pressure in each discharge tube and supplies the fresh laser gas to the circulating system to keep the pressure constant. It also monitors the supply status of the laser gas, purge check for the circulating system, and other items and has a function of adjusting the amount of flow of the gas to be exhausted.

(13) Pressure controller (C2000-E, C4000-E)

This unit constantly monitors the gas pressure in the discharge tubes and supplies fresh laser gas to the gas circulating system, thus maintaining a constant pressure in the discharge tubes. This unit also monitors the laser gas supply state and the purging state in the gas circulating system.

(14) Exhaust pump unit

This unit is used to vacuum-exhaust laser gas from the gas circulating system such that its pressure falls to that used for laser oscillation. Also, within this unit, a small amount of circulating gas is constantly being exchanged, to prevent degradation of the circulating gas. For the C1000-E, the exhaust pump is installed separately.

(15) Exhaust controller (C2000-E, C4000-E)

The exhaust controller controls the flow rate of the laser gas exhausted by the exhaust pump unit. It adjusts the gas flow rate from that used for gas exchange to that used for pressure control. In the event of a power failure, the exhaust controller immediately returns the exhaust pump unit to atmospheric pressure, thus protecting the pump.

(16) Hour meter

The hour meter indicates the total number of hours that the laser oscillator has operated (how many hours the exhaust pump has operated), to indicate whether maintenance or inspection is necessary.

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B-70315EN/01 3.INTERNAL STRUCTURE

(17) Shutter

The shutter consists of a gold-coated reflecting mirror, mounted on the rotating arm of a rotary solenoid. The shutter can be opened and closed instantaneously by issuing a CNC command. For safety, the shutter is equipped with a temperature sensor which allows the system to monitor the temperature of the shutter.

(18) Beam absorber

While the laser oscillator is operating with the shutter closed, the laser beam is guided into the beam absorber. The beam absorber absorbs nearly 100% of laser beam and is water-cooled, allowing it to safely absorb the beam for relatively long periods. For safety, the beam absorber is equipped with a temperature sensor which allows the system to monitor the temperature of the beam absorber.

(19) Water distributor

This unit distributes cooling water, supplied from either a chiller unit or a temperature-regulated external water supply, to each unit in the laser oscillator. For safety, the water distribution unit is equipped with a flow sensor which allows the system to monitor the flow rate of the

(20) Laser power supply unit

This unit rectifies and smoothes the 3-phase 200/220-VAC input, then supplies DC power to the RF inverter by controlling the PWM DC-DC converter, as directed by commands received from the CNC. The RF inverter converts DC power to 3 to 4 kVP frequency (2 MHz) power, then outputs it to the matching box.

(21) Matching box

The matching box contains a matching circuit, consisting of coils and capacitors, which ensures that power is effectively input to the discharge tubes. The matching box is connected to the laser power supply unit via either a high-voltage cable or coaxial cable.

(22) Beam folding unit (C2000-E, C4000-E)

This unit reverses the direction of the laser beam in the oscillator. Two zero-shift mirrors are used to ensure that the polarization of the light remains constant. The C4000-E (short optical path type) employs a circular polarization mirror as upper one, such that a circularly polarized beam is produced.

(23) Intermediate PCB B

This PCB transmits signals output by the shutter section, such as those from the limit switch, absorber temperature sensor, power sensor, and condensation sensor, to the interface PCB.

O-P

high-

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3.INTERNAL STRUCTURE B-70315EN/01

(24) Input unit

The input unit consists of an interface PCB, stabilized power supply, and power magnetics cabinet. It transfers signals between the laser oscillator and CNC, and supply power to each unit.

(25) Interface PCB

I/O LINK (serial interface). Because this is a serial interface, optical fiber cable can be used to enable long-distance transmission.

(26) Stabilized power supply

This unit converts the 200/220 VAC power source to DC power for the interface PCB and other units.

(27) Input unit (Control PCB)

This PCB sends the contractor open/close signal to the power magnetics cabinet, as directed by commands received from the CNC. It also notifies the CNC of the open/close status of the circuit breaker in the power magnetics cabinet.

(28) Condensation sensor unit

This unit is mounted on the output mirror holder. If the sensor detects that the amount of dew has exceeded the maximum allowable level, an alarm (abnormal water temperature) is issued and laser output is stopped, thus preventing a fault from occurring.

(29) Inverter

This inverter drives the turbo blower. It is responsible for acceleration/deceleration control during start and stop of the blower.

(30) Guide laser (laser diode unit)

A CO

laser beam is invisible to the naked eyes. The

2

semiconductor light source, therefore, is provided to enable checking of the laser beam optical axis by superimposing a visible semiconductor laser beam on the same optical axis. The operation of this light source is linked to the mechanical shutter. The semiconductor laser beam is output only while the shutter is closed. Using this beam, the optical axis of the external optical system can be adjusted roughly and a reference position for the machining point determined.

(31) Turbo PCB

This PCB relays signals between the turbo blower and inverter, interface PCB.

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B-70315EN/01 3.INTERNAL STRUCTURE

(32) Safety box

This is consisted of relay and indicator for interlock circuit. (Run ON, HV ON, Shutter open)

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4.INSTALLATION B-70315EN/01

4 INSTALLATION

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B-70315EN/01 4.INSTALLATION

4.1 INSTALLATION PROCEDURE

Use the following procedure to make adjustments and checks during installation.

(1) Check the environment at the installation location.

• Environmental conditions

1) Ambient temperature : +5° C to +30°C

2) Temperature variation : 1.1°C/minute maximum

3) Humidity : 75% or below (relative humidity)

4) Vibration : Acceleration not to exceed 0.05G. Vibration amplitude not to exceed 5mm.

5) Atmosphere : Dust must be minimized. There must

be no organic volatile components.

6) Laser gas : Composition

CO He : 40±2.0% N H C

Purity : 99.99% or more

:5±0.25%

2

:55±2.75%

2

O : 5 ppm or less

2

: 1 ppm or less

mHn

(2) Remove all clamps.

The clamps are used only in transit. In particular, loosen the resonator clamp before it is stored. If the resonator is left for a long time with the clamp tightened, the resonator is likely to be deformed. The clamp locations are shown in Fig. 4.1 (a) to Fig.

4.1 (c).

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4.INSTALLATION B-70315EN/01

Fig.4.1(a) Clamp layout (C1000-E)

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B-70315EN/01 4.INSTALLATION

Fig.4.1(b) Clamp layout (C2000-E)

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4.INSTALLATION B-70315EN/01

Fig.4.1(c) Clamp layout (C4000-E)

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B-70315EN/01 4.INSTALLATION

(3) Check the units installed in the main unit cabinet.

• Check items

1) Check whether any printed circuit boards are loose or

removed.

2) Check whether any cables are damaged (such as

damaged sheathing).

3) Check whether any connectors are loose or detached.

4) Check that the discharge tubes are neither cracked nor

damaged.

5) Check that the turbo blowers, exhaust pump, and other

units are neither loose nor missing.

6) Check that the power supply units and matching boxes

are neither loose nor missing.

7) Check that the input unit is neither loose nor missing.

8) Check that the connection to the electrode (copper

plate) of each discharge tube is not loose.

9) Check that the water and gas pipes are not loose.

(4) Check all screw terminals in the units.

• Check items

1) Terminal block of the input unit

2) Power supply units and matching boxes

(5) Check the oil level in the turbo blowers and exhaust pump, and

check for oil contamination. For details of how to supply and replace the oil, see Section 5.3.

(6) Connect the power and signal lines to the oscillator.

See Section 4.4.3 for details.

• Check items

1) Cable between the CNC and oscillator

To connect this cable, apply the procedure described in the "FANUC Series 16i-L Connection Manual."

2) Oscillator power cable

3) Grounding cable (< 10Ω)

4) Inter-unit connection between the oscillator and

exhaust pump (C1000-E)

(7) Check all printed circuit board settings.

• Check items

1) Setting pins on the oscillator IF PCB

See Section 6.5.5 for an explanation of the setting pins on the IF PCB.

(8) Laser gas and cooling water pipes.

See Section 4.4.1 and Section 4.4.2 for details.

• Check items

1) Laser gas pipe material

Recommended gas pipe Nylon tube AS1, manufactured by Junko Co. Ltd. Polyfrotube, manufactured by Imperial Co. Ltd.

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4.INSTALLATION B-70315EN/01

2) Gas leakage from external piping

3) Laser gas composition and purity (See Section

4.4.1.2.)

4) Quality of cooling water (See Section 4.4.1.1.)

5) Flow of cooling water (IN, OUT)

6) Exhaust pump connection (See Subsec.4.4.4.)

(9) Check the input power supply voltage, frequency and phase

sequence.

• Check items

1) 200/220 VAC +10%, -15%, 50/60 Hz ±1 Hz, 3-phase.

Note, however, that the combination of 220 V and 50 Hz is not supported.

2) Input power supply rating

3) Direction of phase rotation

(10) Turn on the power, then check the operation of the fan motors in

the housing. The fan motors installed in the housing of the oscillator start as soon as the power to the CNC is turned on. Check the operation of each fan motor. Note, however, that the fan motor installed in the laser power supply does not start until the oscillator sequence reaches the turbo blower ON operation.

(11) Check the parameters and setting data.

Check the parameters against the data sheets attached to the oscillator. If a value other than those given on the data sheets is set, correct the setting. Note, however, that parameter No. 15270 and parameter No. 15204 are set automatically, so that these parameters need not be modified.

CAUTION

Each oscillator has unique parameters. Check the setting data according to the attached data sheets. Be particularly careful to store these data sheets safely.

(12) Check that cooling water is supplied normally, and that there is

no water leakage inside the oscillator or at any external connection points.

• Check items

1) Turn off the main circuit breaker of the oscillator and

power supply.

2) Check that the water inlet (IN) and outlet (OUT) of the

oscillator are connected correctly. If the connections are reversed, the flow sensor installed at the outlet will not function. When a valve is attached to the distributor unit (C4000-E : see Fig. 4.2.2), check that the valve is open.

3) Fully open the valves on the exhaust side so that the

flow of water is not impeded. By manually operating

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B-70315EN/01 4.INSTALLATION

the chiller unit, pass cooling water through the system at a flow rate of about 10liters/minute. Then, check that there is no water leakage at the following locations:

1. The water inlet (IN) and outlet (OUT) of the oscillator

2. The water piping (including all tubes and joints) in the oscillator

4) Provided no water leakage is observed in step 3) above, allow cooling water to flow through the oscillator at the specified flow rate. Set the output pressure of the cooling water circulating unit to 0.5 MPa. Then, check that there is no water leakage at the following locations:

1. The water inlet (IN) and outlet (OUT) of the

oscillator

2. The water piping (including tubes and joints) in

the oscillator

5) Stop the chiller unit, then switch the operation mode from manual (local) mode to automatic (remote) mode.

6) Provided no water leakage is observed, start the oscillator, then set the RUN key to ON. Check that the cooling water circulating unit can be operated according to commands issued from the CNC. At this time, check whether the cooling water is flowing at the specified flow rate through each pipe in the oscillator. If the flow rate is less than the specified value, alarm No. 4072 (low cooling water flow rate) is issued soon after the chiller unit is started. If this alarm is issued, proceed as indicated in the guidance corresponding to this alarm.

7) Check that the temperature of the cooling water is set to room temperature plus 1°C. (The temperature of the cooling water may be set to about 27°C throughout the year.) The highest temperature that may be set is 30°C.

(13) Conduct an oscillator vacuum leakage test.

1) Check the oscillator for any internal leakage. The procedure for performing a leakage check is given in Section 4.3 (3).

2) When first starting the oscillator, check that gas is output from the gas outlet of the oscillator. Depending on the parameter settings, it may take as long as one minute before gas is output. If no gas is output, the exhaust pump rotation may be reversed. If this situation is left uncorrected, the exhaust pump may ultimately start to make an abnormal sound, and the thermal switch may trip. In the worst case, the gas circulating system may be contaminated with exhaust pump oil.

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4.INSTALLATION B-70315EN/01

(14) Check that the laser gas pressure is controlled normally.

1) Set all bits of parameter No. 15025 through parameter No. 15028 to 0 because only the pressure control operation is to be checked, without causing discharge. Set parameter No. 15240 to the standard value 10, then check the pressure control status of the laser oscillator. Turn on RUN (pressure control signal), then check the pressure control status against the following parameters, while referring to DGN 905:

1. Parameter No. 15241 for discharge start state

2. Parameter No. 15242 for base discharge state If the pressure control status is abnormal, alarm No. 4073, No. 4081, or No. 4078 is issued. Proceed as indicated in the guidance corresponding to this alarm. Check also that the laser gas flow rate in the base discharge state satisfies the specified value.

2) If the laser gas flow rate is abnormal, perform adjustment as described in Sections 9.4.3 and 9.5.

3) Reset the values of the bits of parameter No. 15025 through parameter No. 15028 to their original values. This completes the check.

(15) Perform laser oscillation to achieve discharge aging. If the

oscillator is left unused for one week or more, discharge aging is required. See Section 9.10 for details of discharge aging.

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B-70315EN/01 4.INSTALLATION

(16) Check the oscillation characteristics and output. See Section

4.3(1) for details of the check method.

• Check items

1) Oscillation characteristic check :

- Check that the correction coefficient is 1100 or less.

- Check that the discharge voltage is within the factory-set value plus 200 V.

If the correction coefficient or discharge voltage exceeds the maximum, repeat discharge aging.

2) Discharge margin check

- Check that a margin is provided.

3) Voltage margin check

- Check that no alarm is issued.

(17) Check the laser beam mode. For details of the check method, see

Section 4.3 (4).

• Check items

1) Check that there is no significant difference from the mode specified in the data sheets attached to the oscillator.

2) Check that the mode shape is perfectly circular.

The beam mode (resonator alignment) may be displaced due to transportation and storage. In such a case, make an adjustment according to Section 11.2.1.

(18) Set the hour meter.

Set 50 Hz for those localities where the power supply frequency is 50 Hz. Set 60 Hz for those localities where the power supply frequency is 60 Hz.

(19) Optical axis adjustment

To perform optical axis adjustment as part of the installation, adjust the base table of the oscillator. Never place a heavy object on the beam outlet plate. Moreover, never make a direct mechanical connection between this plate and a part on the mechanical side.

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4.INSTALLATION B-70315EN/01

4.2 PREPARATION PRIOR TO SHIPMENT

Prior to shipment and transportation, the packing and checking operations described below must be performed.

(1) Disconnect all CNC connecting cables.

(2) Disconnect the power cable and ground cable of the input unit in

the main unit cabinet.

(3) Remove the laser gas pipes, and attach blanking plugs to the

pipes to prevent dust from entering.

(4) Remove all cooling water from the oscillator by using

compressed air. For details of how to remove the cooling water, see Section 4.2.2. Any residual cooling water may result in corrosion or clogging; furthermore, if any residual cooling water freezes, a pipe or the oscillator itself may be damaged.

(5) Install all clamps and fit a blanking cap onto the beam outlet.

(6) Check the security of all connectors and printed circuit boards.

Install protective covers.

(7) Check that all removed mounting screws are reinstalled.

(8) Install the cabinet mounting panel and door panel.

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B-70315EN/01 4.INSTALLATION

4.2.1 Packing for Transportation

For transportation, the packing requirements described below must be observed.

FANUC LASER C1000/C2000/C4000-MODEL E

Fig. 4.2.1 Lifiting of oscillator

(1) External dimensions: See the external views.

(2) Weights: 400kg (C1000-E), 700kg (C2000-E), 900kg (C4000-E)

(3) Maximum allowable impact: 2 G

Note that the maximum allowable impact in transit depends greatly on the means of transport employed, as indicated in Table 4.2.1.

Table 4.2.1 Maximum allowable impacts according to means of

transport (Units: G)

Means of transport

Airplane Ship Railroad Truck

Direction

Forwards/

backwards

Left/right Up/down

615125

2.5 12 5 4

(4) Notes on transportation

When transporting a unit, always observe the notes provided on the sticker attached to the unit. To lift a unit, run wires or slings through the four eyebolts, then use a crane to lift the unit.

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4.INSTALLATION B-70315EN/01

4.2.2 Removing Cooling Water

Remove cooling water according to the procedure below.

(1) Open the cooling water inlet (IN) and outlet (OUT), and leave

both open. Cooling water will stop draining from the unit after about 10 minutes.

(2) Once the cooling water has stopped draining, connect a

compressed air hose to the cooling water inlet (IN). Check that the cooling water outlet is open. Gradually supply compressed air, allowing the pressure to build up to 0.1 to 0.2 MPa. Never apply full pressure suddenly.

(3) Continue to supply compressed air at this pressure for about 5

minutes. Increase the compressed air pressure to 0.3 to 0.4 MPa, and supply air until water inside the white water piping of the oscillator is completely removed.

(4) When water is no longer output, set the compressed air pressure

to 0. When a drain valve is attached to the distributor unit (C4000-E: Fig. 4.2.2), open the valve, and supply air according to the same procedure as (2) and (3). When water is no longer output, set the compressed air pressure to 0, then close the valve.

Fig 4.2.2 Detail of Distributor (C4000A)

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B-70315EN/01 4.INSTALLATION

(5) Next, connect the compressed air hose to the cooling water

outlet (OUT). At this time, ensure that cooling water inlet is open. Remove water in the same procedure as (2), (3), and (4).

(6) Once all cooling water has been removed, disconnect the

compressed air tube. Then, seal the cooling water inlet (IN) and outlet (OUT) by attaching the blanking plugs provided with the oscillator to the PT plugs.

(7) When a valve is attached to the distributor unit (C4000-E), check

that the valve is open. Leave the valve open (for operation, storage, or transport of the oscillator) except when water is removed.

CAUTION

Also, the cooling water should be removed from the oscillator whenever the oscillator is to be stored over the winter, when there is a danger of the cooling water freezing. If the cooling water freezes, it may destroy the cooling water pipes or other cooling system components.

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4.INSTALLATION B-70315EN/01

4.3 DETAILS OF CHECKING

(1) Oscillation characteristics

1) Check that bit 4 of parameter No. 15000 is set to 1.

2) Start the oscillator. When a discharge start switch is provided, do not set the switch to ON until after LRDY has been set.

3) The oscillator enters correction mode for three minutes after start of discharge, and the rated output is automatically specified. At this time, record the peak output.

4) Record the output, discharge voltage, and current values two minutes after making the specification. Discharge voltages (RFV) and currents (RFI) are indicated in DGN 909 through 924, in order from RF No.1 to RF No. 8. When one power supply unit is used to drive two discharge tubes, however, the RFV and RFI values for No. 1 through 4 are the same as those for No. 5 through 8.

5) Record the output values immediately before the elapse of three minutes after the specification.

6) Upon the termination of three-minute correction mode, record the correction coefficient (parameter No. 15024).

7) Three minutes after the termination of correction mode, record the base discharge output, discharge voltage (RFV), and current (RFI) values. Compare the measured values of 4) and 7), above, with the discharge voltage and current characteristics given in the data sheets. A discharge voltage (RFV) is abnormal if it exceeds the data sheet value by 200 V or more. In such a case, check the external laser gas piping and laser gas composition, or perform aging.

(2) Discharge margin check

1) Modify the parameters listed below. Bit 4 of parameter No. 15000;

1 → 0 (Correction is not performed.)

Parameter No. 15208:

Setting → 0 (Output feedback is turned off.)

Parameter No. 15209:

Setting → 0 (Output feedback is turned off.)

Parameter No. 15223:

Setting → Setting -60

2) Remove the maintenance panel from the oscillator so that the discharge tubes can be checked.

3) Start the oscillator. When a discharge start switch is provided, do not set this switch to ON until after LRDY has been set. Before discharging, warning message is occurred. Press the reset key.

4) Check that the discharge tubes do not stop discharging or trigger discharging for 30 minutes after the start of discharge.

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B-70315EN/01 4.INSTALLATION

5) Upon the completion of the check, restore the parameters modified in step 1) to their original values. If discharge stops in step 5) , it indicates a discharge margin error. Check the external laser gas piping and laser gas composition, or perform aging.

(3) Power supply margin check (pulse check)

1) Modify the parameters listed below. Bit 2 of parameter No. 15000:

0 → 1 (Use of assist gas is disabled at beam-on.)

Bit 3 of parameter No. 15000:

0 → 1 (Internal discharge is enabled in manual mode.)

Bit 0 of parameter No. 15002:

0 → 1 (Internal discharge is enabled in automatic operation mode.)

Bit 4 of parameter No. 15000:

1 → 0 (Correction is not performed.)

Parameter No. 15208:

→ 0 (Output feedback is turned off.)

Parameter No. 15209:

Setting → 0 (Output feedback is turned off.)

Parameter No. 15210:

1000→ 1100 (C1000-E) 2000→ 2700 (C2000-E) 4000→ 4400 (C4000-E)

2) Start the oscillator. When a discharge start (HV ON) switch is provided, do not set this switch to ON until after LRDY has been set.

3) Set the following values on the laser setting screen: Pc = 1100 W Du = 5% Fr = 5 Hz (C1000-E)

2700 W Du = 5% Fr = 5 Hz (C2000-E) 4400 W Du = 5% Fr = 5 Hz (C4000-E)

4) Perform internal discharge in manual mode.

5) Check that no abnormality occurs for 30 minutes after beam-on.

6) Upon the completion of the check, restore the parameters modified in step 1) to their original values. An alarm, if issued in step 5), indicates an error. Check the external laser gas piping and laser gas composition, or perform aging.

(4) Beam mode check

1) Remove the guide pipe connecting the laser light outlet of the oscillator to the machine.

2) Start the oscillator.

3) First, check the beam position. Laser light, if allowed to penetrate the acrylic material because of incorrect operation, is very dangerous. The paint of the machine is also likely to be damaged. So, attach as feel plate, then an acrylic plate, about 30 cm × 30 cm in size. Then, output laser light for 0.1

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4.INSTALLATION B-70315EN/01

seconds, with Pc = rated output and Du = 100% set by programming. At this time, provide a flow of air with a drier. If a guide laser is used, confirm that CO light is directed to the same spot as the guide laser.

4) Next, attach an acrylic block to the position indicated by the white acrylic mark. Ensure that the surface of the acrylic block is perpendicular to the direction of CO If a guide laser is used, the perpendicularity of the acrylic block surface can be checked by adjusting the block such that the guide laser is reflected from the acrylic block surface and returns to the beam outlet.

5) Set the program as follows: Output 1000 W Duty 100% Duration 4.0 seconds(C1000-E) Output 2000 W Duty 100% Duration 4.0 seconds(C2000-E) Output 4000 W Duty 100% Duration 2.2 seconds(C4000-E)

6) Direct the drier so that it blows air at 455 to the acrylic block, then output the beam. If air is not provided correctly, the acrylic vapor will catch fire.

7) Observe the burn pattern, and record the directions (X direction, Y direction) and output conditions.

1. Compare the recorded burn pattern with the burn

pattern data attached to the oscillator. Check that there is no significant difference. Note, however, that the shape may vary, depending on the distance.

2. Check that the shape is perfectly circular.

3. Check that no interference fringes can be observed

nearby. If a problem is detected, align the resonator of the oscillator.

gas laser

2

gas laser light.

2

(5) External gas piping leakage check (clamp test)

1) Using an approved gas pipe, connect the gas inlet of the oscillator to the cluster piping, or to the secondary side of the regulator mounted on the gas cylinder.

CAUTION

Rubber hoses were once commonly used for laser gas piping, but these hoses allowed helium in the laser gas to leak. The composition of the laser gas thus deteriorated, reducing the output level and preventing continuous discharge, such that the oscillator malfunctioned. Moreover, when a brazed copper pipe was used, contaminants in the brazing bled into the laser gas, thus preventing continuous discharge. It is essential, therefore, that the specified gas pipes and SUS pipes be used.

2) Open the valve of the regulator, then open the main valve of the gas cylinder. Next, set the secondary pressure of the regulator to 0.175±0.025 MPa.

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B-70315EN/01 4.INSTALLATION

3) Upon the completion of setting, close the main valve of the gas cylinder.

1. If the primary pressure of the regulator is abruptly

reduced to 0, gas will leak from the gas piping. Open the main valve of the gas cylinder and locate the leaks using a liquid leakage checker. Then, correct the leaks.

2. If the pressure is reduced gradually, gas will leak from

the gas piping. Recheck the joints. Very occasionally, gas may leak from the primary pressure side to the secondary pressure side of the regulator. In such a case, the primary pressure decreases, while the secondary pressure is increases.

3. A primary pressure reduction of within 10% to 15%

over 8 hours is normal.

CAUTION

If the amount of gas leakage from the gas piping is very small, the gas composition will change more rapidly when the pipe is longer, when the pipe diameter is larger, or when a smaller amount of gas is consumed. In such cases, the output will be reduced, and discharge will tend to turn off more easily.

4) Upon the completion of this check, close the main valve of the gas cylinder.

(6) Check for leakage within the oscillator

• Negative pressure method

1) On the setting screen, enable parameter rewriting.

2) On the parameter screen, change the setting of

parameter No. 15240 to 0.

3) Set the oscillator start switch to ON. The gas pressure

inside the oscillator can be checked with DGN 905.

4) Alarm No. 4082 is issued several minutes after the

oscillator is started.

5) Set the main circuit breaker of the oscillator to OFF.

Then, turn off the power to the CNC.

6) Set the CNC start switch (RUN ON KEY) to OFF,

then turn on the power to the CNC.

7) Check the gas pressure on the diagnosis screen to

determine whether there is any increase in pressure over 15 minutes. An increase in pressure of within 10 (133Pa) is normal.

8) Upon the completion of this check, set the start switch

to ON, then immediately return the switch to OFF. The oscillator will perform a purge operation after 75 seconds.

9) Finally, restore the parameter settings to their original

values.

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4.INSTALLATION B-70315EN/01

CAUTION

A large increase in pressure indicates that, gas is leaking from the oscillator. The cause of the leak may be:

1.O-ring deterioration or failure

- Discharge tube section

- Mirror section

- Gas circulating piping

2.Failure to close the turbo oil inlet and outlet

3.Failure to lose the values after filter replacement

4.Water leakage from the heat exchanger

5.Water leakage from a location other than the above

6.Output mirror cracking

7.Discharge tube cracking

8.Cracking in a weld of the gas circulating system

• Pressurization

CAUTION

The turbo blower is not designed to withstand pressurization. So, whenever possible, do not perform a leakage check by pressurizing the turbo blower. Even when internal pressurization is inevitable, never apply a pressure in excess of

0.08MPa. Otherwise, components such as connectors or the oil gauge may be damaged. To minimize the risk of connector damage, connect all cables to the turbo blower when applying pressure.

1) Turn on the power to the oscillator, then open the valve of the gas cylinder.

2) Set the secondary pressure of the gas cylinder regulator to

0.05 MPa.

3) To increase the internal pressure of the oscillator to a level exceeding atmospheric pressure, turn the trimmer of the atmospheric pressure sensor (installed in the pressure sensor section) clockwise by half a division.

4) Set the RUN key on the oscillator to ON, then immediately return the RUN key to OFF.

5) Apply leakage check liquid to possible leak points. Bubbles will be seen if there is a leak. Thus, any leak points can be identified.

6) Upon the completion of the above processing, return the trimmer rotated in step 3) to its original setting.

(7) Parameter check

Laser oscillator parameter data is attached to each oscillator. Machine tool builders may prepare a parameter table including the laser oscillator parameter data. If the attached parameter data sheets are missing, contact your machine tool builder.

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B-70315EN/01 4.INSTALLATION

1) On the NC setting screen, enable parameter rewriting.

2) Check the parameters, and enter the same values as those given in the parameter table.

3) On the NC setting screen, disable parameter rewriting, then press the reset key.

CAUTION

1 If the oscillator is started with an incorrect parameter

value specified, there is a risk of the oscillator being damaged or destroyed. Be particularly careful when entering and checking parameter values.

2 Some parameters may require modification to, for

example, suit the operating state of the oscillator or enable maintenance. When modifying the parameters, the user should record all changes (including dates, parameters before modification, parameters after modification, and reasons for modification) so that old parameters and invalid parameters are not used.

(8) Discharge aging

If the oscillator is left unused for a long time (three days or more), or if the laser gas circulating system has been opened to the atmosphere (for example, to clean the mirrors or replace gas system components), aging is required. This involves warming up the discharge tubes and circulating gas by performing internal discharge to output absorbent contaminants as gas. If the laser gas circulating system has been opened to the atmosphere, perform a leakage check before attempting aging. The aging procedure is described below.

1) Modify the parameters listed below. (Be sure to record the settings. The settings may be different from the data sheet values.) Bit 3 of parameter No. 15000: 0 → 1(Internal discharge is enabled in manual mode.) Bit 4 of parameter No. 15000: 1 → 0 (Power correction is not performed.) Bit 0 of parameter No. 15002: 0 → 1 (Internal discharge is enabled in automatic

operation mode.)

Bit 2 of parameter No. 15003: 1 → 0 (Evacuation is not performed after the RUN OFF.) Parameter No. 15201 Setting → 0 Parameter No. 15208: Setting → 0 (Output feedback is turned off.) Parameter No. 15209: Setting → 0 (Output feedback is turned off.) Parameter No. 15242, No. 15243: Setting → Setting -100

2) Set the RUN key to ON to start the oscillator.

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4.INSTALLATION B-70315EN/01

3) Perform discharge by setting the HV ON switch to ON. Check that discharge is performed continuously.

4) Then, perform internal discharge using the settings indicated below. Two methods of internal discharge are supported. One is automatic operation based on programming, while the other is manual operation using switches. 700 W Duty 50% (C1000-E:15 minutes) 1500 W Duty 50% (C2000-E:15 minutes) 2500 W Duty 50% (C4000-E:15 minutes) The frequency is 100 Hz for all of the above. [Automatic operation]

1. Create the following program:

G32 P1 Q1; G24 S1000 Q50 R900.; S specifies an output (W), QG32 P0.; Q specifies a duty cycle (%),

and R specifies a time (seconds).

2. Lock the shutter, then start the program. [Manual]

This method can be used when the machine operator's panel has a switch enabling manual internal discharge.

1. On the setting screen, enter the output power and duty ratio.

2. Press the internal discharge switch to perform internal discharge.

5) When a time determined above has elapsed, turn off the RUN ON key to stop the oscillator. (With the new software, discharge can be stopped with HV OFF.)

6) Return the discharge gas pressure to the normal setting, and perform internal discharge with the settings below, then perform purging. Parameter No. 15242, No. 15243 Setting-100 → Setting 700 W Duty 50% (C1000-E:15 minutes) 1500 W Duty 50% (C2000-E:15 minutes) 2500 W Duty 50% (C4000-E:15 minutes) The frequency is 100 Hz for all of the above.

7) Repeat step 6) until the output power reaches the specified value minus 2% or more, and the discharge voltage becomes the factory-set value plus up to 200 V.

8) Upon the completion of aging, restore the parameter settings to their original values.

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B-70315EN/01 4.INSTALLATION

4.4 OSCILLATOR CONNECTIONS

The oscillator has connections for cooling water piping, laser gas piping, and power and signal cables. For details of the electrical connections for the NC and machine, refer to the corresponding connection manuals.

FANUC Series 16i-LA CONNECTION MANUAL B-63193EN

4.4.1 Cooling Water

Figs.4.4.1(a) to (c) shows the location where cooling water for the oscillator is to be connected.

Fig. 4.4.1(a) Waterconnection and gas connection (C1000-E)

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4.INSTALLATION B-70315EN/01

Fig. 4.4.1(b) Waterconnection and gas connection (C2000-E)

Fig. 4.4.1(c) Waterconnection and gas connection (C4000-E)

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B-70315EN/01 4.INSTALLATION

4.4.1.1 Specification of the cooling water

The quality of cooling water is specified in the table below. If tap water is used, it should be treated in an ion exchanger.

Refrigerator/air-conditioner cooling water quality standard

(JRA-9001-1980)

pH (25°C) 6.0 to 8.0 Conductivity (25°C) (µs/cm) 200 or less

Standard item

Reference item

Chlorine ion Cl- (ppm) 20 or less Sulfate ion SO M alkalinity CaCO3 (ppm) 50 or less Total hardness CaCO Iron Fe (ppm) 0.3 or less Sulfur ion S2- (ppm) Not to be detected Ammonia ion NH Ionic silica SiO

2-

(ppm) 50 or less

4

(ppm) 50 or less

3

+

(ppm) 0.2 or less

4

(ppm) 30 or less

2

4.4.1.2 Water treating agent

To avoid cooling water trouble and minimize the frequency of cooling water exchange, the following anticorrosive should be added to the cooling water. Consult the chiller manufacturer for use of the anticorrosive. Product name : CONTLIME K-6000 Manufacturer : MITSUBISHI GAS CHEMICAL. Inc. Use : Add the anticorrosive to the cooling water

to obtain a concentration of 1000 ppm (100 ml per 100 l). Every month, check the concentration of the anticorrosive using concentration test paper designed specifically for the anticorrosive. Add anticorrosive, as required, to maintain the concentration at about 1000 ppm.

Concentration test paper : A concentration test paper set (including

50 sheets of paper and a dropper) is available together with the CONTLIME K-6000, manufactured by MITSUBISHI

GAS CHEMICAL, Inc. Even when the concentration of the anticorrosive is controlled as explained above, the cooling water must, nevertheless, be replaced every year.

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4.INSTALLATION B-70315EN/01

4.4.1.3 Chemical cleaner

To remove contaminants adhering to the inside surfaces of the cooling water system, clean the system using the cleaning agent indicated below. Consult with the chiller manufacturer prior to using the cleaning agent. Product name : DESLIME Manufacturer : MITSUBISHI GAS CHEMICAL. Inc. Use : Replace up to 10% of the cooling water with this

agent, then circulate the cooling water for one hour. Next, drain the cooling water and thoroughly flush the cooling system. Note that DESLIME is highly toxic in its undiluted form. Never touch DESLIME. If you get any DESLIME on your skin, wash it with copious amounts of water. Never dispose of any waste liquid until the hydrogen peroxide, which is a major component, has decomposed such that its concentration is reduced.

4.4.1.4 Anti-freezing agent

If the chiller is used in a cold district, it should be provided with an antifreezing function. When it is extremely cold, the chiller should be kept running. If it is necessary to use an antifreezing solution for lack of an alternative, the following antifreezing solution should be used. Its concentration should be 30% (usually) or 40% (in an extremely cold district). Use of an antifreezing solution should be restricted within four months in winter. Do not use antifreezing solution together with an anticorrosive. The following antifreezing solution is already added with an anticorrosive. Product name : AURORA BRINE Manufacturer : TOKYO FINE CHEMICAL Co. Use : Refer to the description indicated on the product.

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B-70315EN/01 4.INSTALLATION

4.4.2 Laser Gas

4.4.2.1 Laser gas specification

Supply the laser oscillator with a mixture of gases that satisfy the conditions listed below. (1) Composition ratio and accuracy

4.4.2.2 Gas pipe

CO He : 40 ± 2.00% N

2

(2) Water (H (3) Hydrocarbon (CnHm) : 1 ppm or less (4) Gas purity : 99.99% or higher

Observe the following cautions for piping between the laser gas cylinder and laser oscillator.

• Use nylon tube having an inside diameter of 8 mm or larger

(Junlon AS1 manufactured by Junkousha, or polyfro-tube manufactured by Imperial Co.). Do not use a rubber or urethane tube.

• Use a swage-lock vacuum joint Do not use a one-touch coupler,

quick coupler, or hose-band joint.

• Minimize the length of tubing. It should be kept within 5 m.

Never exceed 15 m. For a length of 15 m or greater, use stainless pipe.

• If it is necessary to use metal pipe for lack of an alternative, use

stainless bright annealed pipe. Minimize the number of joints used. Connect pipes, if necessary, using a swage-lock vacuum joint or by TIG welding. Do not use silver soldering or copper piping. Piping should be installed by a vacuum piping specialist. Do not extend metal piping over 30 m.

• Always keep the piping materials clean. Do not allow foreign

matter to get in the pipe.

• Use a pressure reducer that is free from gas leakage.

• After installing the pipe, check it for gas leakage, using a liquid

leak checker (Gyupoflex: A98L-0001-0856, detecting bubbles caused by leaking gas) or a clamp test1).

NOTE

Open the valve of the gas cylinder to pressurize the inside of the pipe, then close the valve. Check to see if the pressure in the pipe becomes low with time. Monitor the primary pressure of the gas reducer for over 8 hours. If the gas pressure becomes lower by 10% within 8 hours, gas is likely to be leaking. Take an appropriate measure.

:5 ± 0.25%

2

: 55 ± 2.75% (N2 balance) O) : 5 ppm or less

2

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4.INSTALLATION B-70315EN/01

4.4.3 Electrical Connection

The laser oscillator incorporates a safety circuit. The safety circuit is enabled by using a terminal board (CNL1).

4.4.3.1 NC-to-oscillator connection and power supply cable

connection

Figs.4.4.3.1(a) to (e) show the cable inlet and the point of connection. Attach the following cable to the laser oscillator. Also refer to the applicable NC connection manual.

1) Power supply cable (L1, L2, L3)

Power supply, 200 VAC +10%, -15% 50/60 Hz ± 1 Hz, 3φ Alternatively, 220 VAC +10%, -15% 60 Hz ± 1 Hz, 3φ

• Cable specifications

Use a four-conductor heavy-duty cable.

Oscillator Conductor cross-sectional area Cable diameter

C1000-E 22 mm C2000-E 28 to 38 mm C4000-E

35 mm

2

19 to 32 mm

34 to 44 mm

2) Grounding cable

There are two grounding locations. One of the locations is for class-1 grounding. The other location is for protective grounding. Install a grounding wire to the location marked "PE."

3) Interface connection cable

a) I/O signals

16i-L Connect an optical fiber cable to COP1B on the interface PCB.

b) Emergency stop signals (ESP1 and ESP2)

These signals are not used. Strap the corresponding points.

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B-70315EN/01 4.INSTALLATION

Fig.4.4.3.1(a) Cable connection (C1000-E)

Fig.4.4.3.1(b) Location of CNL1 (C1000-E)

Fig.4.4.3.1(c) Cable connection of (C2000-E)

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4.INSTALLATION B-70315EN/01

Fig.4.4.3.1(d) Cable connection (C4000-E)

Fig.4.4.3.1(e) Location of CNL1 (C2000-E, C4000-E)

c) OFF interlock signals (OFI1 and OFI2)

Making the power supply for the oscillator ready to be switched off turns off these signals. Connect them in parallel with an CNC OFF switch. Contact current-carrying capacity : 3 A on 250 VAC or 5 A on 30 VDC

d) Laser oscillator ON/OFF signal (ON, OFF)

Connect 200 VAC in synchronization with the CNC ON/OFF switch to this signal. Current-carrying capacity : 10 mA on 200 VAC

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B-70315EN/01 4.INSTALLATION

4) CNL1 terminal

B8 PF2 A8 PF1 B7 OFI2 A7 OFI1 B6 A2 A6 A1 B5 EMS2 A5 EMS1 B4 RUN2 A4 RUN1 B3 SHL2 A3 SHL B2 A2 SC B1 IB2 A1 IB1

CNL1 pin arrangement (as viewed from the wiring surface) a) PF1 and PF2

These terminals are for QF1 voltage tripping. Connect +24 VDC and 0 V to PF1 and PF2, respectively.

b) SHL1 and SHL2

These terminals are for shutter interlocking. Strapping these terminals enables the shutter to be opened and closed. Contact current-carrying capacity : At least 1.2 A on 24 VDC Wire: 1.25 mm2, 25 m or shorter

c) IB1 and IB2

These terminals are for semiconductor laser interlocking. Strapping these terminals enables the semiconductor laser to be turned on. Contact current-carrying capacity: At least 10 mA on 30 VDC

d) A1 and A2

These terminals are for supplying power to the safety box in the laser oscillator and switching on and off the laser oscillator power supply. Connect +24 VDC and 0 V to A1 and A2, respectively. Current-carrying capacity: At least 250 mA

e) SC

This terminal is for outputting a shutter-closed signal. It outputs the signal when the shutter is closed. Connectable load capacity: 3 to 100 mA on 24 VDC Note that the voltage applied to the load varies with the current flowing through the load.

f) RUN1 and RUN2

Connect these terminals in series with the laser oscillator start signal.

g) EMS1 and EMS2

Connect these terminals to emergency stop switch contact signals.

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4.INSTALLATION B-70315EN/01

4.4.3.2 Details of safety circuit

The figure shows the safety circuit for each oscillator.

Fig.4.4.3.2(a) Safety circuit of C11000-E

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B-70315EN/01 4.INSTALLATION

Fig.4.4.3.2(b) Safety circuit of C2000-E

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4.INSTALLATION B-70315EN/01

Fig.4.4.3.2(c) Safety circuit of C4000-E

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B-70315EN/01 4.INSTALLATION

4.4.4 Inter-unit Connections

The C1000-E has an oscillator section and exhaust pump section. Interconnection is made according to the procedure described below.

(1) Connection of the exhaust pump power cable

Use the supplied cable. Connect it correctly (with the correct phase sequence).

(2) Gas piping

Fig.4.4.4 Connection of exhaust pump (C1000-E)

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5.MAINTENANCE B-70315EN/01

5 MAINTENANCE

In FANUC LASER C1000/C2000/C4000-MODEL E, periodic inspection items have been reduced, and adjustments have been made easy. To keep the oscillator in a satisfactory operating condition over a long period, however, it is necessary to carry out periodic maintenance (including daily maintenance) described in this chapter. The oscillator is designed to maintain the same performance and reliability as it has when it is installed, provided that maintenance is carried out as prescribed.

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B-70315EN/01 5.MAINTENANCE

5.1 DAILY INSPECTION

Table 5.1 lists daily inspection items. Inspect the FANUC LASER C1000/C2000/C4000-MODEL E according to this table. When parts (including oil) have been used for a prescribed period, replace them quickly.

Table 5.1 Daily inspection items for FANUC LASER C1000/C2000/C4000-MODEL E

Item Period Content and instruction

Check to see if the primary pressure is 1.0 MPa or less as measured at the

1 Residual laser gas Daily

2 Exhaust pump oil Weekly

3 Exhaust pump oil leak Weekly

4 Turbo blower oil We ekly

5 Turbo blower oil leak Weekly

6 Laser output Weekly

Daily Make sure that the chiller discharge output is 0.5 MPa or less.

7 Cooling water

Weekly

regulator on the laser gas cylinder. If the primary pressure is 1.0 MPa or lower, replace the gas cylinder. See Section 4.4.2 for the gas specifications. Make sure that the oil level is between L (minimum) and H (maximum). Usually, oil is supplied until the oil level is in the middle between L and H. If the oil level is below L, supply oil according to Section 5.3.2. Be sure to replace the oil periodically, every 6 months of use or every 1500 hours of operation, whichever is earlier. Make sure that no oil is leaking from the vane pump main body, drain cock and their periphery. If oil is leaking, immediately replace the exhaust filter according to Section 5.3.3, because it is likely to have been clogged. Be sure to replace the exhaust filter periodically, every one year of use or every 3000 hours of operation, whichever is earlier. Make sure that the oil level is between L (minimum) and H (maximum) according to Fig. 5.3.1. Usually , oil is suppled until the oil level is at 3/4 above L. If the oil level is below L, supply oil according to Section 5.3.1. Be sure to replace the oil periodically, every 4 months of use or 1000 hours of operation, whichever is earlier. Make sure that no oil is leaking from the turbo blower main body, oil inlet, cock, and their periphery. If oil is leaking, locate the leak. If oil leaks for any reason other than a cock being open, call FANUC.

1. Check to see if the laser output measured at the outlet of the short optical path oscillator is 5% or more lower than the specified output. If this is the case, clean or replace the optical components in the external reflection unit.

2. If the laser output decreases within the oscillator, warning message No. 4085 is issued. If this message appears, clean or replace the mirror in the oscillator quickly.

Check the quality of cooling water circulating in the chiller. If the water is colored badly, replace it completely. Be sure to replace the cooling water every two months. Adding an anticorrosive to cooling water can decrease the replacement frequency. See Section 4.4.1.2 for descriptions about the anticorrosive.

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5.MAINTENANCE B-70315EN/01

5.2 PERIODIC MAINTENANCE

Table 5.2 shows the periodic maintenance items and the periods. The operation hour can be known from the indication of hour meter. When the indicated periods are more than one, employ the one whichever comes first.

Table 5.2(a) Periodic maintenance items and periods

Item

1 Output mirror cleaning 2 Rear mirror cleaning 3 Folding mirror cleaning 3000 to 4000 h 4 0-shift mirror cleaning 1000h or processing quality go wrong 5 Output mirror change 6 Rear mirror change 7 Folding mirror change 4000h or inferior beam mode 8 0-shift mirror change 3000h or inferior beam mode

9 Exhaust pump oil change 1500h or low exhaust ability 10 Exhaust pump filter change 3000h or low exhaust ability 11 Exhaust pump overhaul 10000h or low exhaust ability 12 Turbo blower oil change 1000h or inferior turbo blower oil 13 Turbo blower overhaul 12000h or low turbo blower ability 14 Pressure control filter change 12000h or pressure alarm occurs 15 Discharge tube O-ring change 6000h or intra-cavity leakage occurs 16 Cooling water 1500h or inferior water quality 17 Water tubing cleaning 3000h or water flow is blocked 18 Beam absorber 15000h or over heat alarm occurs 19 Nylon tube 15000h 20 Cable 15000h

C1000-E C2000-E C4000-E

1500 to 2000 h 1500 to 2000 h 800 to 1200 h

Interval of maintenance (Operation hour)

4000h or inferior beam mode

3000h or inferior beam

mode

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B-70315EN/01 5.MAINTENANCE

5.3 DETAILS OF MAINTENANCE

When opening the panels and doors during maintenance, keep the power turned off. Before replacing oil, be sure to check that purging is completed.

Fig.5.3(a) Oil gauge of turbo blower and exhaust pump (C1000-E)

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5.MAINTENANCE B-70315EN/01

Fig.5.3(b) Oil gauge of turbo blower and exhaust pump (C2000-E)

Fig.5.3(c) Oil gauge of turbo blower and exhaust pump (C4000-E)

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B-70315EN/01 5.MAINTENANCE

5.3.1 Turbo Blower Oil

(1) Check method

Check the amount of oil in the turbo blower while referring to the figure below. The oil level should be between graduations H and L. This check should be made when the oscillator is at a rest. When the turbo blower is running, it is impossible to check the amount of oil correctly.

(2) Replenishment method

1) Remove the hexagonal-head screw from the oil inlet with a 17 mm wrench. Be careful not to lose the O-ring on the screw. Before supplying turbo oil, stop the oscillator according to the correct procedure and turn off the power. If the oscillator is not stopped by the correct procedure, the pressure in the turbo blower becomes negative. Opening the oil inlet under such a condition lets a large amount of air get in the turbo blower. An air flow caused this way can bring oil mist into the oscillator, possibly resulting in the optical mirror getting dirty.

2) Take a bottle of oil from the oil kit (A04B-0800-K326). Unscrew the nozzle from the bottle, remove the inner cap, then replace the nozzle. Insert the nozzle into the oil inlet and supply oil. Be careful not to allow dust to enter through the inlet. This task is made easier by attaching the tube (included in the oil kit) onto the nozzle. Supply oil until the oil reaches the 3/4 level relative to the L indication when viewed through the oil window. Note that both too little and too much oil can result in mechanical failure.

3) Clean the oil inlet, hexagonal-head screw of the oil inlet, and O-ring by wiping with a clean cloth or paper. Ensure that these parts are completely free of dust. If the oil is contaminated with dust, the turbo blower may fail. Set the O-ring in the groove around the hexagonal-head screw of the oil inlet, then tighten the hexagonal-head screw. Note that if the O-ring is not set correctly, or if the hexagonalhead screw is not tightened fully, the turbo blower may not be air-tight.

4) If oil has spilled over, wipe it up. Otherwise, the peripheral equipment may be affected adversely.

5) If there is oil left over, put the inner lid back on the bottle, and keep the bottle in a dark, cool place.

(3) Replacement method

1) Get a container for oil drain on hand, and put the tip of the drain tube into the container.

2) Turn the oil drain cock through 905 clockwise, and the oil will start draining.

3) After all the oil has been drained, close the oil drain cock by setting it back in the initial place.

4) Supply oil by following the same procedure as for replenishment.

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5.MAINTENANCE B-70315EN/01

NOTE

Execute discharge ageing after changing turbo blower oil.

Fig.5.3.1 Turbo blower oil check points

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fanuc C1000, C2000, C4000 Maintenance Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

TABLE OF CONTENTS

1 OVERVIEW

1.1 ORGANIZATION OF THE MANUAL

1.2 APPLICABLE MODELS

1.3 RELATED MANUALS

1.4 TO USE THE LASER OSCILLATOR SAFETY

2 SAFETY

2.1 LASER BEAM

2.2 HIGH VOLTAGE

2.3 SAFETY ENCLOSURE (AT YOUR WORK STATION)

2.4 FIRE

2.5 TOXIC FUME

2.6 HIGH TEMPERATURE

2.7 WARNING LABELS

2.8 HIGH-PRESSURE GAS

2.9 KEY CONTROL

2.10 SHUTTER LOCK

2.11 EMERGENCY STOP BUTTON

2.12 WARNING LIGHT (OPTIONAL)

3 INTERNAL STRUCTURE

3.1 GENERAL

3.2 COMPONENT DETAILS

4 INSTALLATION

4.1 INSTALLATION PROCEDURE

4.2 PREPARATION PRIOR TO SHIPMENT

4.2.1 Packing for Transportation

4.2.2 Removing Cooling Water

4.3 DETAILS OF CHECKING

4.4 OSCILLATOR CONNECTIONS

4.4.1 Cooling Water

4.4.1.1 Specification of the cooling water

4.4.1.2 Water treating agent

4.4.1.3 Chemical cleaner

4.4.1.4 Anti-freezing agent

4.4.2 Laser Gas

4.4.2.1 Laser gas specification

4.4.2.2 Gas pipe

4.4.3 Electrical Connection

4.4.3.2 Details of safety circuit

4.4.4 Inter-unit Connections

5 MAINTENANCE

5.1 DAILY INSPECTION

5.2 PERIODIC MAINTENANCE

5.3 DETAILS OF MAINTENANCE

5.3.1 Turbo Blower Oil