ENI-PL
Versatile,
Low-Frequency
•
25-125kHz or 90-460kHz
Frequency Range
•
Forward & Load
R F Power
Sources For
Plasma
Applications
Power Leveling
•
Forced-Air Cooling
Solid State Reliability
•
•
Variable Frequency Control
•
Built-In
Matching Transformer
PL-2HF Front Panel
S-p-e-cifi
r
he Plasmaloc Series of RF Generators is designed to
1
.
provide dependable RF power for low-frequency
1
T
power leveling, variable frequency control, thermal and
mismatch protection, forced-air cooling, and fail-soft
capability, the Plasmaloc Series has set the standard for solid
state quality, versatility; and reliability.
plasma applications. Featuring forward and load
Versatile Operation
The Plasmaloc Series consists of six generators: three PL
models which cover the frequency range of 25-125kHz; and
three PL-HF models which cover the range of 90-460kHz.
The optimum frequency for a specific plasma reaction is
easily selected with the front panel variable frequency control.
Maximum forward power output ranges from 750 to 3,200
Watts, depending on the model. The front panel power meter
displays either the forward power leaving the generator or the
load power absorbed by the plasma.
FREQUENCY STABILITY:
0.1 % from 0° to 45° C ambient after 5-minute
warm-up.
POWER LEVELING:
(
Plasma), Switch Selectable
Forward or Load
PLASMA MATCHING:
7-position step transformer for plasma
i
mpedances between 50 and 600 ohms.
THERMAL PROTECTION:
automatic shutdown if transistors overheat
due to mismatch or cooling system failure.
Better than
Built-in variable
Provides
CONTROL INTERFACE:
Type D, 9-pin connector
RF OUTPUT IMPEDANCE:
50-600 ohms
Precise Power Control
Precise power control is provided by a sampling of the
output power, using a directional coupler. Both forward and
load power leveling are provided and may be set from either
the front panel or by a process computer through the
accessory input. Setability of the plasma power is better than
±0.4% of the maximum rated power, and absolute accuracy
is better than ±1.5% of the maximum rated power.
To eliminate the need for an external impedance
matching network, each Plasmaloc generator includes an
internal variable seven-position step transformer, designed for
plasma impedances between 50 and
front panel plasma impedance control knob and observing the
increase in load power, an optimum match can easily be
achieved.
A high degree of operational reliability is assured through
the use of conservatively rated solid state components. ENI's
hybrid combining of power amplifier modules couples the
output of a number of transistors to achieve the total generator
By adjusting the
600 ohms.
Quality-... Rehab
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