KEYENCE LT-9001 User Manual

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96M12004

Surface Scanning Laser Confocal Displacement Meter

LT-9001 Series

User’s Manual

Page 2

Introduction

This instruction manual describes the operation and functions of the Surface Scanning Laser Confocal Displacment Meter LT-9001 Series. To ensure safety, performance and the function of the LT-9001 Series, please read this manual carefully. Keep this manual in a safe place for future reference. Be sure that this manual eventually goes to the person who operates this product.

Symbols

These symbols alert you the matters that should be followed to prevent human injury and/or product damage.

DANGER

Failure to follow instructions may lead to death or serious injury.

WARNING

Failure to follow instructions may lead to injury.

CAUTION

Failure to follow instructions may lead to product damage.

Note

Provides additional information on proper operation.

Reference

Provides advanced and useful information for operation.

The contents of this manual pertain to operating the LT-9501/9010M or LT9501SO (5652)/LT-9030M. If you are using the LT-9001/LT-9010 or LT-9001SO (5653)/LT-9030, skip the articles on the microscope function. The profile mode cannot be used in the LT-9501SO (5652)/LT-9030 or LT9001SO (5653)LT-9030M.

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Safety Precautions

General Precautions

• At startup and during operation, be sure to monitor the functions and performance of the LT-9001 Series.

• We recommend that you take substantial safety measures to avoid any damage in the event a problem occurs.

• Do not open or modify the LT-9001 Series or use it in any way other than described in the specifications.

• When the LT-9001 Series is used in combination with other devices, functions and performance may be degraded, depending on operating conditions and the surrounding environment.

• Do not use the LT-Series for the purpose of protecting the human body and lives.

• Do not change the temperature around the LT-Series including peripheral devices. Condensation may lead to malfunction.

Follow the safety precautions below to ensure operator safety.

• Apply the voltage correctly. Failure to do so may cause fire, electric shock or malfunction.

• Be sure to connect the earth ground terminal on the adaptor inlet of the controller. Failure to do so may cause electric shock and malfunction.

• Do not open or modify the unit. It may cause a fire or electric shock.

Handling the abnormalities

Turn off the power immediately in the following cases. Using the unit in an abnormal condition could cause fire, electric shock, or accident. Contact your nearest KEYENCE office for repair.

• If liquid including water, chemicals or debris enters the unit

• If the unit drops or the case is damaged.

• If abnormal smoke or smell occurs.

Follow the safety precautions below to ensure operator safety.

• Be sure to turn the power off when you plug/unplug the cable which connects the unit and the devices connected to the unit. Otherwise damage could result.

• Do not turn the power off while setting up the unit. Part or all of setting data may be lost.

• Do not block the vent holes on the unit and peripheral devices. Otherwise, excessive heat can build up and cause failure.

Installation environment

To use the LT-9001 Series correctly and safely, avoid installing it in the following locations:

• Locations that are humid, dusty or poorly ventilated.

• Locations with a high temperature such as a place exposed to direct sunlight

• Locations where there are flammable or corrosive gases.

• Locations where the unit may be directly subjected to vibration or impact.

• Location where water, oil or chemicals may splash onto the unit.

• Locations where the static electricity is easily generated.

96M12004E LT-9001-IM

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Safety Precautions

Corrective action for noise

Do not install the LT-9001 Series near power sources or high tension cables, otherwise noise may cause the LT-9001 Series to malfunction. Take corrective action for noise by using noise filters, by separating these cables, by installing insulations to the controller and to the measuring unit.

Laser safety precautions

The LT-9001 is classified as a class1 laser product by IEC60825-1. (FDA class IIa)

• Caution - use of controls or adjustments or performance of procedures other than those specified herein may result in hazardous radiation exposure.

• Do not stare into the laser beam directly for a long time.

• Do not disassemble the LT-9001 Series.

The Influence of ambient temperature

A change in ambient temperature may cause measurement fluctuations. Be sure to keep the temperature stabilized. When the ambient temperature changes 10 °C, it takes 60 minutes to equalize the distribution of the inside temperature.

Warming up

Before using the LT-9001 Series, wait approximately 60 minutes after the power is turned on. Otherwise, the measured value may gradually fluctuate because the circuit is not stable immediately after the power is turned on.

The Influence of dust or dirt

The measurement may fluctuate due to dirt, dust or fluid such as water or oil in the following cases:

• On the LT-9001 optics: Blow the dirt off with clean air. If dirt persists, wipe the glass surface gently using soft cloth soaked with alcohol.

•On the target surface: Blow the dirt off with clean air or wipe it off.

• Airborne: Build a protective enclosure with an air purge system around the measurement area.

Note

Influence of vibration

When the measurement target is vibrating, the measured value may fluctuate. In this case, increase the number or times the measurement value is averaged to achieve more accurate measurements.

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Measurement target

The measured value may fluctuate when the shapes or surfaces of targets vary. In this case, use a known target and perform appropriate correction with the calibration function.

Scan straightness

The scan orbit of the LT-9001 Series makes a slight arc. Therefore, the measured value may fluctuate when the target is slanted.

Handling

Do not wipe with a wet cloth, benzene, or thinner. Doing so could change the color or shape of the lens. If the lens has a lot of dirt on it, wipe it off with a cloth moistened with a mild detergent, then wipe with a soft dry cloth.

Effect of atmospheric motions

Slow atmospheric motions may affect the measurement resulting in the measured value fluctuation. In such a case, take the following countermeasures.

• Enclose the measurement portion with the appropriate enclosure.

• Agitate the air between the measurement point and the workpiece strongly with the fan.

Best Management Practice for Perchlorate Materials - California only

When you sell, manufacture and/or waste the products containing perchlorate material in California, the following statement must appear on the exterior of all outer shipping packages and on consumer packages, based on California Code of Regulations.

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"Perchlorate Material – special handling may apply, See www.dtsc.ca.gov/hazardouswaste/perchlorate."

Note: Alternative option is to indicate this statement on your MSDS or manual accompanying with each product.

This product includes a CR coin type cell containing perchlorate material. If you ship this product (or your product including this product) to California, you must ensure to comply with this regulation.

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Precaution on CE Marking

It is confirmed that the LT-9001 Series satisfies the requirement of the EU

Directives when the following conditions are fulfilled. Therefore, users must fulfill

the following conditions when the LT-9001 Series is going to be used in EU

Member States.

Precautions

Precautions on EMC Directive

• Applicable standard (EMI) EN61326-1, Class A

• Applicable standard (EMS) EN61326-1

• Wind the following ferrite core twice on the cable at the position within 50 mm

from the analog output that is on the rear panel of the controller.

Model: ZCAT3035-1330 (Product of TDK)

• Wind the following ferrite core twice on the cable at the position within 200 mm

from the VIDEO output that is on the rear panel of the controller.

Model: ZCAT2035-0930 (Product of TDK)

Precautions on Low Voltage Directive

• Applicable standard EN61010-1

• Overvoltage category II

• Pollution degree 2

• The LT-9001 Series is classified as a class 1 laser product.

• When the LT-9001 Series is used in EU Member States, the power supply cable

conforming to the relevant EU standards and obtaining the certification by a

third-party certification organization, and its plug shape fitting to outlets of

respective countries must be used.

• Because the LT-9001 Series is designed as class I equipment, be sure to

connect the protective earthing terminal located in the inlet to the protective

earthing conductor in the building when installing it.

• When replacing the fuse, be sure to use the fuse that satisfies the following

rating and is approved by certification organization based on the appropriate

EU standard.

Fuse rating 250 V, 3.15 A, Time lag fuse

EN60825-1 Laser Class 1

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Organization of this Manual

Chapter

Appendices

Before Use

Basic Operations

Operations and Function Settings in the Displacement Mode

Operations and Function Settings in the Profile Mode

Common Operations and Function Settings

Environment Settings

I/O Terminal

RS-232C

Specifications

Index

Describes the cautions for use and the required preparation before use.

Describes how to use the remote control console and the basic operations of the LT-9001 Series.

Describes the operations and functions in the displacement mode.

Describes the operations and functions in the profile mode.

Describes operations and functions common to the displacement mode and the profile mode.

Describes the items for the basic settings and the setting procedures related to the overall unit that are required for operation.

Describes the specifications and timing chart of each I/O terminal.

Describes each function and setting method of the RS-232C interface.

Provides specifications, characteristics, and outer dimensions.

Describes the troubleshooting methods, contents of the error messages and optional products.

Chapter

Appendices

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Safety Precautions......................................................1

General Precautions............................................1

WARNING............................................................1

CAUTION.............................................................1

Note .....................................................................3

Precaution on CE Marking..........................................4

Precautions..........................................................4

Organization of this Manual........................................5

Chapter 1 Before Use

Outline of the LT-9001 Series ..................................1-1

System Configuration ..............................................1-2

Checking the Package Contents.............................1-3

LT-9501 ............................................................1-3

LT-9010M .........................................................1-3

LT-C2/C10 ........................................................1-3

Identifying Part Names and Functions ...................1-4

Controller..........................................................1-4

Measuring Unit .................................................1-5

Remote Control Console ..................................1-6

Mounting and Connecting Parts..............................1-7

Mounting the Measuring Unit ...........................1-7

Installation of the Controller..............................1-8

Connection .......................................................1-8

Chapter 2 Basic Operations

Outline of Basic Operations ....................................2-1

Displacement Mode and Profile Mode....................2-2

Displacement Mode .........................................2-2

Profile Mode .....................................................2-2

Outline of Measurement and Settings ....................2-3

Run Mode.........................................................2-4

Program Mode .................................................2-5

Program Function.............................................2-8

Flow of Measurement .......................................2-9

Operations.............................................................2-10

How to Use the [ENTER] Button.....................2-10

Selecting an Item ...........................................2-11

Entering a Value .............................................2-11

Selection Method of the Run Mode .......................2-12

Operational Flow ............................................2-12

Using the Displacement Mode..............................2-13

Selecting the Displacement Mode ................2-13

Adjusting the Distance Between the Measuring

Unit and the Measurement Target .................2-14

Setting the Scanning Width/interval ..............2-14

Setting the Light Intensity Level ....................2-15

Measuring the Displacement ........................2-15

Using the Profile Mode ..........................................2-16

Selecting the Profile Mode ............................2-16

Adjusting the Distance Between the Measuring

Unit and the Measurement Target .................2-17

Setting the Scanning Width/interval ..............2-17

Setting the Upper and Lower Limits Display..2-18

Setting the Area..............................................2-18

Measuring the Level Differences ...................2-19

Basic Operations that Stabilize Measurement .....2-20

Changing the Scanning Width and the

FINE Mode .....................................................2-20

Changing the Light Intensity Level.................2-20

Resetting the Device to the Factory Settings ........2-22

Default Values and Settings Range (LT-9010 (M))....

Displacement Mode .......................................2-23

Profile Mode ...................................................2-24

Default Values and Setting Range ................2-25

Default Values and Settings Range (LT-9030 (M))

Displacement Mode .......................................2-26

Default Values and Setting Range ................2-27

2-23

....2-26

Chapter 3 Operations and Function

Settings in the Displacement Mode

Outline of Displacement Mode................................3-1

What is displacement mode?...........................3-1

Display Screens ......................................................3-2

Identifying Part Names and Functions of Screens ..3-3

Measurement Screen .......................................3-3

Light Intensity Screen.......................................3-4

Measurement Screen ..............................................3-5

Display of Measured Value ..............................3-5

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Display of the Trend Graph..............................3-5

Light Intensity Screen..............................................3-7

Display of Measured Values ............................3-7

Display of Received Light Intensity Graph.......3-7

Setting the Light Intensity Level .......................3-8

Setting the Measurement Target Surface ........3-8

Pause Screen ..........................................................3-9

Setting the Pause Screen ................................3-9

OUTPUT Settings ..................................................3-10

Functions of the OUTPUT Settings.................3-10

Basic Settings........................................................3-15

SCAN..............................................................3-15

DARK ALARM ................................................3-17

MASK .............................................................3-18

OPTIONAL Settings...............................................3-19

CORRECT (Auto slant correction) .............3-19

Chapter 4 Operations and Function

Settings in the Profile Mode

Outline of Profile Mode ............................................4-1

What is profile mode?.......................................4-1

Types of Screens.....................................................4-2

Identifying Part Names and Functions of Screens ..4-3

Measurement Screen .......................................4-3

Light Intensity Screen.......................................4-4

Measurement Screen ..............................................4-5

Display of Measured Value ..............................4-5

Display of Profile Waveform .............................4-6

Light Intensity Screen..............................................4-8

Display of Measured Value ..............................4-8

Display of Received Light Intensity Graph.......4-8

Setting the Light Intensity Level .......................4-8

Changing the Ranges of the Areas..................4-9

Pause Screen ........................................................4-10

Setting the Pause Screen...............................4-10

OUTPUT Settings ..................................................4-12

Functions of the OUTPUT Settings.................4-12

Basic Settings........................................................4-13

AREA ..............................................................4-13

SCAN..............................................................4-14

DARK ALARM ................................................4-16

SMOOTH (Smoothing) ...................................4-17

OPTIONAL Settings...............................................4-18

CORRECT (Auto Slant Correction) ............4-18

PROFILE OUT (Profile Output) .......................4-19

Chapter 5 Common Operations and

Function Settings

Outline of Common Operations and

Function Settings.....................................................5-1

Outline of Operations and Functions.......................5-2

Microscope Function...............................................5-2

Hold Function ..........................................................5-3

Auto-zero Function ..................................................5-4

Keylock Function .....................................................5-5

Program Change .....................................................5-6

OUTPUT Settings ....................................................5-7

LIMITS (Tolerance)...........................................5-7

OUTPUT (Output).............................................5-8

CALIB (Calibration) ........................................5-16

OPTIONAL Settings...............................................5-18

DISPLAY.........................................................5-18

I/O...................................................................5-20

GAIN (Sensitivity) ...........................................5-20

Chapter 6 Environment Settings

Setting up the Basic Settings for the Overall Unit ...6-1

Items to be Set in the Environment Setting .............6-2

Environment Setting Items ...............................6-2

List of Default Values........................................6-2

How to Set up Environment Settings .......................6-4

How to Set up Environment Settings ...............6-4

RS-232C Interface............................................6-5

Program............................................................6-6

Beep Sound .....................................................6-7

Interface Language..........................................6-7

Coefficient ........................................................6-7

Chapter 7 I/O Terminal

Controlling and Outputting from the I/O Terminal ...7-1

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Table of Contents

Identifying Names and Functions of

the I/O Terminal .......................................................7-2

Terminal Block..................................................7-2

Control I/O ........................................................7-3

VIDEO Output ..................................................7-5

Functions of the I/O Signals .............................7-5

Electrical Specifications ..................................7-8

Timing Chart ............................................................7-9

Normal Measurement

(When Profile Output is OFF) ...........................7-9

When Profile Output is ON (LT-9010 (M) only)

Timing Details (LT-9010 (M))..........................7-13

Timing Details (LT-9030 (M))..........................7-14

Timing Details

(Common to the LT-9001 Series) ...................7-15

....7-11

Chapter 8 RS-232C

Connecting to External Devices via RS-232C .........8-1

Specifications ..........................................................8-2

Pin Layout ........................................................8-2

Communication Specifications.........................8-2

Connecting to External Devices.......................8-2

Outputting Measured Values and

Changing Settings by Using Commands ...............8-3

Environment Settings Parameters ....................8-3

Outline of Command Format ............................8-3

Measurement Control Command and

Measurement Operation Command Formats...8-4

Command Details.............................................8-5

Change Parameter Command Format .............8-8

Command Details.............................................8-9

Check Parameter Command Format .............8-15

Timing Chart...................................................8-16

ASCII Code Table (Reference) ......................8-16

Outputting Measured Values by Using External

Synchronization .....................................................8-17

Environment Settings Parameters ..................8-17

Output Method ...............................................8-17

Timing Chart...................................................8-18

Output format .................................................8-18

Chapter 9 Specifications

Specifications of the LT-9001 Series.......................9-1

Specifications ..........................................................9-2

Specifications of the Controller ........................9-2

Specifications of the Measuring Unit ...............9-3

Status Table .....................................................9-4

Specifications of the cable between

measuring unit and controller ..........................9-5

Response Delay Time ....................................9-6

Display Update Cycle ......................................9-6

Outside Dimensions .........................................9-7

Appendices

Troubleshooting ......................................................A-2

Error Messages.......................................................A-4

Optional Product List ..............................................A-5

Parameter Memo.....................................................A-6

Displacement mode.........................................A-6

Profile mode.....................................................A-8

Environment Setting Parameter Memo .................A-10

Index .....................................................................A-11

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Outline of the LT-9001

Chapter

Before Use

Series

The LT-9001 Series is a double scan high-

accuracy sensor that employs a lens drive and a

tuning fork in the confocal displacement principle.

The LT-9001 Series can measure not only a highly

accurate displacement, but also the slanting

degree, the thickness of transparent object and

the shape.

This chapter describes the configuration of the

LT-9001 Series, cautions and the required

preparation before use.

System Configuration ..............................................1-2

Checking the Package Contents .............................1-3

Identifying Part Names and Functions.....................1-4

Mounting and Connecting Parts ..............................1-7

Chapter

Before Use

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System Configuration

control output and the measured

Chapter

The LT-9001 Series can be used for various purposes in combination with commercially available devices.

Before Use

Enables control and import of the measured value from the RS232C or the parallel I/O board.

Programmable controller

Enables timing control of the measurement and the switching of program No. as well as the

value import.

Recorder

Records the measurement result.

Indicator light/Buzzer

Produces an alarm sound by an output of the judgement.

Photoelectric/Proximity sensor

Transmits a signal to the TIMING input when the sensor detects a target.

LT-9001 Series

Monitor

CA-MN80

Controller

LT-9501

Measuring unit

LT-9010M

Stage system

The 2D shape or the 3D shape can be detected in combination with a manual or auto stage system.

1-2

Video printer

Prints the image of an LCD monitor.

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Checking the Package Contents

This

product

is subje ct to th e e xport

regulations in

Japan. When you need to e xport this pr odu ct

from

your country, be sure to c

heck if thi

s pr

oduct is

ject to the e xport regulations w

ithin your c

ountry

not upon your own re sponsibility. If r

equired, please

take appropriate action for g aining app

roval f

or exp

ort

by the government or responsib le organization within

your country.

The LT-9001 Series consists of the following models. Check if the parts and equipment listed below are

included in the package of the models you purchased before using the unit.

LT-9501

Controller Remote control console Monitor connecting cable

(LT-9501) ×1 (Cable length 3 m) ×1 (PIN-to-PIN cable: 2 m) ×1 (2 m) ×1

User's Manual (This manual) ×1

96M1086

Doub

le Scan

High-Accuracy Laser Sensor

LT-9001 Serie

User’s Manual

Read this manual before using the system in order to achieve maximum performance.

Keep this manual in a safe place for future reference.

Monitor power supply cable

LT-9010M

Chapter

Before Use

Measuring Unit Hexagon socket head bolt Cautions for export

(LT-9010M) ×1 (M4 × 40 washer faced) ×3 (A6) ×1

LT-C2/C10

Cable between the controller and the measuring unit ×1

LT-C2: 2 m cable LT-C10: 10 m cable Up to three cables below the total length of 20 m can be connected.

* We have thoroughly inspected the package contents before shipment. However, in the event of defective or

broken items, contact your nearest KEYENCE office (Address listed in the end of this manual).

* The contents included in the LT-9001/LT-9010 are the same as the ones in the LT-9501/LT-9010M

respectively.

* The sensor head contained in the LT-9030M and LT-9030 is the LT-9030 and LT-9030, respectively. All of the

other contents included in the LT-9030M or LT-9030 are the same as those included in the LT-9010M.

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Identifying Part Names and Functions

Chapter

Before Use

This section describes the names and functions of the controller, measuring

unit, and remote control console.

Controller

Front

Power LED

Lights up when the power is ON.

Laser LED

Lights up during laser emission.

Back

1 5

1-4

Measuring unit connector

The cable between the controller and the measuring unit is connected here.

Connector terminals (Control I/O)

Outputs binary data and tolerance judgment value, and switches the program No.

Remote control console connector

The supplied remote control console is connected here.

RS-232C connector

The RS-232C communication cable is connected here.

Video composite output terminal

The external monitor is connected here.

Terminal block

Used for power supply, analog output, and input of control signal to the monitor (CA-MN80).

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AC power inlet

Supplies power to the LT-9001 Series.

Power switch

Turns on/off the power.

Measuring Unit

Sensor unit (Emitter/Receiver)

Emits and receives a laser beam for measurement. It is protected with a cover glass.

Mounting holes

The measuring unit is mounted with the supplied hexagon socket head bolt.

Chapter

Before Use

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Connecting cable

The cable between the controller and the measuring unit can be connected to this cable, or the controller can be connected directly.

Laser emission LED

Lights up during laser emission.

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Identifying Part Names and Functions

Chapter

Before Use

Remote Control Console

[ENTER] button

Select the items by tilting the [ENTER] button up, down, right or left. Fix the selected item by pressing the button straight down.

Refer to "How to Use the [ENTER] button" (page 2-10).

[PROG/RUN] switch

Switch the run/program modes by sliding down the switch. Each sliding movement switches the modes.

[HOLD] button

Press the [HOLD] button to retain the measured value. This button has the same function with the TIMING input terminal on the back of the controller.

Refer to "Hold Function" (page 5-3).

3 4 5 6

1-6

[ESCAPE] button

Press the [ESCAPE] settings. Press this button to exit or abort the setting item. This button has the same function with the RESET input terminal on the back of the controller in the run mode.

[PROGRAM No.] button

Press the [PROGRAM No.] button to switch the display to the program No. selection screen.

[PAUSE] button

Press the [PAUSE] button to stop updating the graph display while in the measurement screen, and to switch to the pause screen.

[SCREEN] button

During measurement: Press the [SCREEN] button to switch the measurement screen to the light intensity screen. During setting: Press the [SCREEN] button to switch the selection status.

[ZERO] button

Press the [ZERO] button to use the Auto-zero function. This button has the same function with the ZERO input terminal on the back of the controller.

Refer to "Auto-zero Function" (page 5-4).

button

to return to the previous display or operation during

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Mounting and Connecting Parts

This section describes how to mount the controller and the measuring unit.

Mounting the Measuring Unit

Adjust the distance between the measuring unit and the measurement target and fix the measuring unit with screws in the three installation holes. The measurement range is shown in the figure below.

• Measurement range • How to mount the unit

■ LT-9010 (M)

Installation hole

Reference distance

6mm

0.3mm

Reference position

0mm

Measurement range

0.3mm

Chapter

Before Use

Note

The reference distance may vary within the range of 0.5 mm according to the manufacturing variation of individual measuring units.

■ LT-9030 (M)

Installation hole

Reference distance

30mm

Reference position

0mm

Note

1.0mm

Measurement range

1.0mm

The reference distance may vary within the range of 2.0 mm according to the manufacturing variation of individual measuring units.

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Mounting and Connecting Parts

Chapter

Before Use

Installation of the Controller

Use the controller on a level place.

Note

• Keep enough room around the controller for ventilation.

• When the temperature in the controlling system unit rise over 35 °C, decrease the ambient temperature no more than 35 °C by cooling it down with cool air or by make room around the system.

• Do not use the controller on other devices.

Connection

Connect the measuring unit, the controller, the remote control console, the

monitor and the power supply with cables.

Connecting to

LT-9501

24 V DC terminal

AC cable

Power supply cable for the monitor

Monitor

CA-MN80

Monitor connecting cable

1-8

Cable between the controller and the measuring unit

Remote control console

LT-9010M

Note

• Turn off the power supply of the controller before connecting/disconnecting cables. Failure to do so may cause malfunction.

• Eusure correct orientation of all connectors. Otherwise the pins may break and may lead to system breakdown.

• Before connecting the monitor power cable, ensure the correct polarity of the monitor power terminals. Failure to do so may cause malfunction.

• The 24 V DC terminal on the terminal block is a dedicated power supply unit to the monitor specified by KEYENCE only. This supply may not be used to power any additonal hardware.

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Outline of Basic

Chapter

Basic Operations

Operations

The LT-9001 Series performs settings concerning

the measurement method or displayed

information while in the program mode, and

displays the measurement result value or graph

while in the measurement mode.

You can also switch between displacement mode

and profile mode depending on the target.

This chapter describes the outlines of program

mode and run mode, and the procedures to

operate the LT-9001 Series in displacement mode

and profile mode using the remote control

console.

Displacement Mode and Profile Mode.....................2-2

Outline of Measurement and Settings .....................2-3

Operations .............................................................2-10

Selection Method of the Run Mode .......................2-12

Using the Displacement Mode...............................2-13

Using the Profile Mode ..........................................2-16

Basic Operations that Stabilize Measurement.......2-20

Resetting the Devices to the Factory Settings.......2-22

Default Value and Settings Range ........................2-23

Chapter

Basic Operations

* All the measurement screens used in this User's

Manual are those for the LT-9010(M). Some screens are different when you are using the LT-9030(M).

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Chapter

Basic Operations

Displacement Mode and Profile Mode

You can select either displacement mode or profile mode in the LT-9010(M).

(Only displacement mode is available in the LT-9030(M).

Displacement Mode

The displacement mode enables you to measure a targed in four ways such as displacement, transparent object thickness, slant, and Δslant of the target by measuring the changes in the distance from the reference point.

Profile Mode

The profile mode enables you to measure the target shape by using the measured value of each scanned point. You can also measure the average value, maximum value, minimum value, differential between the maximum and the minimum value, and area by specifying two different areas on the target.

Mesuring unit

Scanning width

Scanning interval

Measurement Target

Example of the measurement screen in the

displacement mode

A change in the distance from the reference point can be measured.

DISTANCE

The distance change from the reference distance on the measurement target is measured.

SLANT (LT-9010 (M) only)

The degree between the reference surface and the target surface is measured.

Measuring unit

Scanning width

Scanning interval

Measurement Target

Example of the measurement screen in the profile

mode

The profile of a target can be displayed in a waveform.

Example of setting areas

The following features can be selected and measured within the specified Area 1 and Area 2.

Distance

Measuring unit

SLANT (LT-9010 (M) only)

The relative degree between the target and a transparent target is measured.

Measuring unit

Transparent object

Measurement Target

change from the reference point

Measurement Target

Relative slant

2-2

Measuring unit

Measurement Target

THICK (Transparent object thickness)

The thickness of a transparent object is measured.

Measuring unit

Measurement Target (transparent object)

Degree in relation to the reference surface.

Thickness of the transparent object

Area setting range

MAX (maximum value)

AVG (average value)

MIN (minimum value)

DIFF (differential value)

AREA (amount of space)

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Page 21

Outline of Measurement and Settings

The LT-9001 Series has a run mode that performs a measurement, and a program mode that sets the measurement conditions. Measuring various targets is possible by combining several measurement conditions.

Run mode screen

DISTANCE (Displacement mode)

Measurement screen

Light intensity screen

Pause screen

Program mode screen

Chapter

Basic Operations

PROFILE (Profile mode)

Measurement screen

Light intensity screen

Pause screen

The run mode and the

program mode are switched every time the [PROG/RUN] switch is pushed down.

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2-3

Page 22

Outline of Measurement and Settings

Run Mode

Chapter

Basic Operations

The run mode displays the measurement screen, the light intensity screen, and the pause screen interchangeably.

MEASUREMENT

INT (Light intensity)

The measured value and the graph can be displayed.

Displacement mode Profile mode

Displays the temporal change of the measured value. Chapter 3 "Measurement Screen" (page 3-5)

Displays the profile of the target. Chapter 4 "Measurement Screen" (page 4-5)

The measured value and the graph of the amount of light the measurement surface receives can be displayed.

Displacement mode Profile mode

Pause

Displays up to four peaks of light intensity. Changes the light intensity level. Chapter 3 "Light Intensity Screen" (page 3-7)

Performs correction or measurement while suspending the update of

Displays the distribution of light intensity in reference with the scanning width. Changes the light intensity level. Chapter 4 "Light Intensity Screen" (page 4-8)

the displayed graph.

Displacement mode Profile mode

Chapter 3 "Pause Screen" (page 3-9) Chapter 4 "Pause Screen" (page 4-10)

2-4

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Page 23

Program Mode

Four types of settings (OUTPUT settings, BASIC settings, OPTIONAL settings, and Environment settings) can be performed in the program mode according to the target to measure.

OUTPUT settings

Performs settings for OUT1 and OUT2 respectively.

LIMITS (Tolerance)

OUTPUT

Sets the upper and lower limits of the tolerance.

Displacement mode Profile modeSetting item

UPPER LIMIT

LOWER LIMIT

Chapter 5 "OUT Settings" - "LIMITS" (page 5-7)

Sets the measurement method and the processing of the measured data.

Displacement mode Profile modeSetting item

MEASURMENT

SELECT SURFACE

AVERAGE HOLD MODE OFFSET ANALOG output

Chapter 3 "OUT Settings" "Measurement" (page 3-10)

Chapter 3 "OUT Settings" "SELECT SURFACE" (page 3-12)

Chapter 5 "OUT Settings" - "AVERAGE" (page 5-8) Chapter 5 "OUT Settings" - "HOLD MODE" (page 5-9) Chapter 5 "OUT Settings" - "OFFSET" (page 5-14) Chapter 5 "OUT Settings" - "ANALOG output" (page 5-15)

Chapter 4 "OUT Settings" "Measurement" (page 4-12)

Chapter

Basic Operations

CALIB (Calibration)

Calibrates the error caused by slant or refractive.

Displacement mode Profile modeSetting item

Measured value

and

calibrated value

Chapter 5 "OUTPUT Settings" - "CALIB" (page 5-16)

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2-5

Page 24

Chapter

Basic Operations

Outline of Measurement and Settings

BASIC settings

Performs settings for the preprocessing common to both OUT1 and OUT2.

AREA

Performs settings for the profile measurement method.

Displacement mode Profile modeSetting item

AREA1

AREA2

Chapter 4 "BASIC Settings" "AREA" (page 4-13)

SCAN

DARK

MASK

SMOOTH

Performs settings for the swing width of a spot.

Setting item

SCAN WIDTH

SCAN CENTER (LT-9010 only)

FINE MODE

Displacement mode Profile mode

Chapter 3 "BASIC Settings" "Scan width/interval" (page 3-15)

Chapter 3 "BASIC Settings" "Scan center" (page 3-16)

Chapter 4 "BASIC Settings" "Scan width/interval" (page 4-14)

Chapter 4 "BASIC Settings" "Scan center" (page 4-15)

Chapter 4 "BASIC Settings" "FINE mode" (page 4-15)

Performs settings for the processing for the case that the light intensity is lower than the setting range.

Displacement mode Profile modeSetting item

DARKOUT

SETTING RANGE

Chapter 3 "BASIC Settings" "DARK ALARM" (page 3-17)

Chapter 4 "BASIC Settings" "DARK ALARM" (page 4-16)

Performs settings for the range to be excluded from the measurement.

Displacement mode Profile modeSetting item

MASK

SETTING RANGE

Chapter 3 "BASIC Settings" "MASK" (page 3-18)

Performs settings for the functions that stabilize the profile waveform.

Displacement mode Profile modeSetting item

SMOOTHING

AVERAGING

Chapter 4 "BASIC Settings" "SMOOTH" (page 4-17)

2-6

MODE

Toggles between the displacement mode and the profile mode.

Profile modeSetting item

MODE

Displacement mode

Chapter 2 "Selection Method of the Run Mode" (page 2-12)

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Page 25

OPTIONAL settings

Perform settings for the additional functions common to both OUT1 and OUT2.

SLANT

Performs settings for the automatic slant correction on the target. (LT-9010 only)

Setting item

SLANT ADJ AUTO SLANT COR

Displacement mode Profile mode

Chapter 3 "OPTIONAL Settings"

- "SLANT" (page 3-19)

Chapter 4 "OPTIONAL Settings"

- "SLANT" (page 4-18)

Chapter

Basic Operations

DISPLAY

PROF OUT

I/O

Performs settings for the measured value display.

Setting item

CAMERA IMAGE FOCUS

GRAPH DISPLAY

SCROLL

DIGITS DISPLAY UNIT

Displacement mode Profile mode

Chapter 5 "OPTIONAL Settings" - "CAMERA IMAGE" (page 5-18) Chapter 5 "OPTIONAL Settings" - "FOCUS" (page 5-18)

Chapter 5 "OPTIONAL Settings" - "GRAPH DISPLAY" (page 5-18)

Chapter 5 "OPTIONAL Settings"

- "SCROLL" (page 5-18)

Chapter 5 "OPTIONAL Settings" - "DIGITS" (page 5-18) Chapter 5 "OPTIONAL Settings" - "DISPLAY UNIT" (page 5-19)

Performs settings to output the waveform data of the target shape.

Setting item

PROF OUT

Displacement mode Profile mode

Chapter 4 "OPTIONAL Settings"

- "PROFILE" (page 4-19)

Performs settings for the control I/O.

Setting item

I/O

Displacement mode Profile mode

Chapter 5 "OPTIONAL Settings" - "I/O" (page 5-20)

GAIN

E LT-9001-IM

Performs settings for the sensitivity toward light intensity to be received.

Displacement mode Profile modeSetting item

GAIN

Chapter 5 "OPTIONAL Settings" - "GAIN" (page 5-20)

2-7

Page 26

Outline of Measurement and Settings

Chapter

Basic Operations

Environment settings

Performs basic settings that are necessary in operating the LT-9001 Series.

1 RS-232C

Performs settings for the communication specifications of the RS-232C interface.

2 Program operations

Performs settings for the program number switching method, copying program settings, and resetting the program to default.

3 Others

Performs settings for the beep sound, user interface language, and span of the measuring unit.

Program Function

Eight programs can be toggled among program

numbers 0 to 7 in the LT-9001 Series.

You can register a set of parameters as a program

according to the run mode or the measurement

target.

The set parameters can easily be changed if

calling up the desired program as needed.

Program No.

2-8

<AUTO-ZERO parameter>

Reference

Refer to "Program Change" (page 5-6) for a

program switching method.

Note

Environment settings are not saved.

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Page 27

Flow of Measurement

The LT-9001 Series can display and output the measured value of OUT1 and OUT2.

Displacement mode

OUT1

Measured value processing

CALIB

AVERAGE

HOLD MODE

AUTO-ZERO

OFFSET

Measured value processing

CALIB

AVERAGE

HOLD MODE

AUTO-ZERO

OFFSET

Output

I/O

Input

Output

I/O

Input

Basic/Optional

Measurement condition

• INT parameter

• SCAN

• DARK

• SMOOTH CORRECT

•

Profile mode

Measurement

• DISTANCE

• SLANT

• ΔSLANT

• THICKNESS

Measurement

• DISTANCE

• SLANT

• THICKNESS

Select Surface

• MAX

• M1

• M2

• +4P to +1P

• –1P to –4P

OUT2

Select Surface

• MAX

• M1

• M2

• +4P to +1P

• –1P to –4P

I/O

Measured value

Judgment output (LIMITS)

Analog output

Binary output

RS-232C

TIMING

RESET

ZERO

Chapter

Basic Operations

Basic/Optional

Measurement condition

• INT parameter

• SCAN

• DARK

• SMOOTH

CORRECT

•

E LT-9001-IM

AREA1 (A1)

AREA

condition

• AREA range

• AVG

• MAX

• MIN

• DIFF

AREA2 (A2)

AREA

condition

• AREA range

• AVG

• MAX

• MIN

• DIFF

• AREA

OUT1

Select measurement

• A1

• A2

• A1–A2

• A1+A2

OUT2

Select measurement

• A1

• A2

• A1–A2

• A1+A2

Measured value processing

CALIB

AVERAGE

HOLD MODE

AUTO-ZERO

OFFSET

Measured value processing

CALIB

AVERAGE

HOLD MODE

AUTO-ZERO

OFFSET

Output

I/O

Input

Output

I/O

Input

I/O

Measured value

Judgment output (LIMITS)

Analog output

Binary output

RS-232C

TIMING

RESET

ZERO

2-9

Page 28

Operations

The LT-9001 Series is operated using the remote control console.

Chapter

Basic Operations

How to Use the [ENTER] Button

Pressing the button straight down

• For selecting a menu item

• For fixing a setting

Press

Tilting the button up, down, left or right

The button moves up, down, left and right. This is used to perform the following operations.

• Moving to another item

• Entering a value such as a tolerance

[ ] and [ ] buttons

Moves upward

Moves downward

[t] and [s] buttons

Moves to the left

Moves to the right

2-10

Reference

The operation to tilt the [ENTER] button up or down is described as [▲] or [▼] button in this manual. The operation to tilt the [ENTER] button left or right is described as [t] or [s] button.

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Selecting an Item

Entering a Value

The procedure used to select or to enter items/values such as parameters is explained as follows.

Place the cursor on the item you want to set

by using the [▲], [▼], [t] and [s] buttons.

Press the [ENTER] button.

The item on which the cursor was placed at step 1 is selected.

Repeat step 1 and 2 to change the selected

item or the parameter.

When you want to cancel the operation

If you press the [ESCAPE] button on the remote control console, the cursor moves to the item selected immediately before.

The procedure used to enter a value such as the tolerance is explained as follows.

Select the item whose value is to be entered.

Specify the digit of the entering value with the

[t] and [s] buttons.

Specify the value that you want to enter with

the [▲] and [▼] buttons.

Press the [ENTER] button after changing the

value.

The specified value is fixed.

When you want to cancel the changed value

Press the [ESCAPE] button before pressing the [ENTER] button in step 3 above.

Chapter

Basic Operations

E LT-9001-IM

Reference

If the [ZERO] button is pressed while changing the value, the value can be set to zero.

2-11

Page 30

Selection Method of the Run Mode

Chapter

Basic Operations

Select either the displacement mode or the profile

mode according to the measurement required.

(Only displacement mode is available in the LT-

9030 (M).

Operational Flow

The operational flow in selecting the displacement mode or the profile mode is as follows.

5, 6 2

Turn on the power of the controller.

Select [OK] with the [▲] and [▼] buttons and

press the [ENTER] button.

The mode is switched to the selected run mode.

Slide down the [PROG/RUN] switch on the

remote control console to display the run

mode screen.

Note

All parameters are reset to the default value if displacement mode/profile mode is changed.

Slide the [PROG/RUN] switch downward on

the remote control console to display the

program mode screen.

Select [BASIC] with the [▲] and [▼] buttons

and press the [ENTER] button.

The basic setting screen is displayed.

Place the cursor on [MODE] with the [▲] and

[▼] buttons and press the [ENTER] button.

The cursor moves to [MODE] on the mode setting screen.

Press the [ENTER] button and move the

cursor to the mode currently selected.

When the setting is performed for the first time, [DISTANCE] is displayed.

Select [PROFILE] or [DISTANCE] with the [▲]

and [▼ ] buttons and press the [ENTER]

button.

The confirmation screen is displayed.

2-12

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Using the Displacement Mode

This section describes how to measure the level

differences on the measurement target in the

displacement mode.

The operational flow is as follows.

Selecting the Displacement Mode

Set the suitable mode for the measurement required.

↓

Adjusting the Distance Between the

Measuring Unit and the Measurement Target

Adjust the position and height of the measuring unit according to the measurement target.

↓

Setting the Scan Width/Interval

Set the scan width and the pitch of the laser emission for stable measurement.

↓

Setting the Light Intensity Level

Selecting the Displacement Mode

Turn on the power of the controller.

Slide the [PROG/RUN] switch downward on

the remote control console to display the

program mode screen.

Select [BASIC] by using the [▲] and [▼ ]

buttons and press the [ENTER] button.

The basic settings screen appears.

Chapter

Basic Operations

Set the threshold level value for the amount of light intensity to be measured.

↓

Measuring the Displacement

The operational procedure is explained for the respective steps.

Place the cursor on [MODE] by using the [▲]

and [▼ ] buttons and press the [ENTER]

button.

The cursor moves to [MODE] on the mode setting screen.

Press the [ENTER] button and move the

cursor to the mode currently selected.

When this setting is performed for the first time, [DISTANCE] is displayed.

Select [DISTANCE] by using the [▲] and [▼]

buttons and press the [ENTER] button.

The run mode is changed.

Slide the [PROG/RUN] switch downward on

the remote control console to display the run

mode screen.

Selecting the displacement mode is completed. Adjusting the distance between the measuring unit and the measurement target is described next.

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Page 32

Using the Displacement Mode

Chapter

Basic Operations

Adjusting the Distance Between the Measuring Unit and the Measurement Target

Adjust the height and position of the

measuring unit and fix the distance and

position relating to the measurement target.

Setting the Scanning Width/interval

Slide the [PROG/RUN] switch downward on

the remote control console to display the

program mode.

Select [BASIC] by using the [▲] and [▼ ]

buttons and press the [Enter] button.

Place the cursor on [SCAN] by using the [▲]

and [▼ ] buttons and press the [ENTER]

button.

Reference

How to adjust the distance between a

measurement target and the measuring unit.

It will be easier to adjust by combining the three methods shown below. 1 Adjust the distance to obtain the smallest possible

red laser spot.

2 Adjust the distance to get the measurement target

into focus.

3 Adjust the distance while reading the light intensity

peaks graph on the light intensity screen.

Setting the scanning width/interval is described next.

2-14

Place the cursor on [SCAN WIDTH] by using

the [▲] and [▼ ] buttons and press the

[ENTER] button

Select [120/2] by using the [▲] and [▼ ]

buttons and press the [ENTER] button.

Slide the [PROG/RUN] switch downward on

the remote control console to display the run

mode screen.

Setting the scanning width/interval is completed. Setting the light intensity level is described next.

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Setting the Light Intensity Level

Measuring the Displacement

LOW HIGH

Press the [SCREEN] button on the

measurement screen to display the light

intensity screen.

Move the cursor by using the [t] or [s]

button to change the light intensity level.

Set the light intensity level to a higher level of light intensity, but less than the peak.

Press the [SCREEN] button to return to the

measurement screen.

When the measurement target moves, the measured value and the trend graph changes according to the target.

Press the [ENTER] button twice on the

measurement screen and place the cursor on the value of [UP LIMIT].

Specify the value by using the [t], [s], [▲]

and [▼] buttons and press the [ENTER] button.

The value +100.00 is specified in this example.

Place the cursor on [LO LIMIT] by using the

[▲] and [▼] buttons.

Chapter

Basic Operations

Setting the light intensity level is completed. How to measure the displacement is described next.

E LT-9001-IM

Place the cursor on the value by pressing the

[ENTER] button.

Specify the value by using the [t], [s], [▲]

and [▼] buttons and press the [ENTER] button.

The value –100.00 is specified in this example.

Press the [ESCAPE] button to return to the

measurement screen.

Set the current position as a reference point

by pressing the [ZERO] button.

The displacement based on this reference point is displayed on the screen after this setting.

Reference

The value based on the current position as the reference point is displayed on the measurement screen. When the measurement target moves, the value of the measured value display changes to the value of the level difference between the former reference point and the current reference point. Responding to the change of value, the trend graph changes.

2-15

Page 34

Using the Profile Mode

Chapter

Basic Operations

This section describes how to measure the level

differences on the measurement target in the

profile mode.

The operational flow is as follows.

Selecting the Profile Mode

Set the suitable mode for the measurement content.

↓

Adjusting the Distance Between the

Measuring Unit and the Measurement Target

Adjust the position and height of the sensor head according to the measurement target.

↓

Setting the Scan Width/interval

Set the range to be measured in the profile as the scanning width [WIDTH/INTERVAL] and the pitch between measurement points. Set the pitch in balance with the shape of the measurement target.

↓

Setting the Upper and Lower

Limits Display

Set the upper and lower limits display according to the shape of the measurement target in the profile waveform graph.

↓

Selecting the Profile Mode

Turn on the power of the controller.

Slide the [PROG/RUN] switch downward on

the remote control console, and select the

program mode screen.

Select [BASIC] by using the [▲] and [▼ ]

buttons and press the [ENTER] button.

The basic settings screen appears.

Place the cursor on [MODE] by using the [▲]

and [▼ ] buttons and press the [ENTER]

button.

The cursor moves to [MODE] on the mode setting screen.

Setting the Area

Change the two areas (Area1 and Area2) to any range, respectively, on the graph display.

↓

Measuring the Level Differences

The operational procedure is explained for the respective items.

2-16

Press the [ENTER] button and move the

cursor to the mode currently selected.

When this setting is performed for the first time, [DISTANCE] is displayed.

Select [PROFILE] by using the [▲] and [▼]

buttons and press the [ENTER] button.

The run mode is changed.

Slide the [PROG/RUN] switch downward on

the remote console to display the run mode

screen.

Selecting the profile mode is completed. Adjusting the distance between the measuring unit and the measurement target is described next.

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Page 35

Adjusting the Distance Between the Measuring Unit and the Measurement Target

Adjust the height and position of the

measuring unit and fix the distance and

position relating to the measurement target.

Setting the Scanning Width/interval

Slide the [PROG/RUN] switch downward on

the remote control console to display the

program mode screen.

Select [BASIC] by using the [▲] and [▼ ]

buttons and press the [Enter] button.

Place the cursor on [SCAN] by using the [▲]

and [▼ ] buttons and press the [ENTER]

button.

Chapter

Basic Operations

Reference

How to adjust the distance between a

measurement target and the measuring unit.

It will be easier to adjust by combining the three methods shown below. 1 Adjust the distance to obtain the smallest possible

red laser spot.

2 Adjust the distance to get the measurement target

into focus.

3 Adjust the distance while reading the profile

waveform graph on the measurement screen.

Setting the scanning width/interval is described next.

Place the cursor on [WIDTH/INTERVAL] by

using the [▲] and [▼] buttons and press the

[ENTER] button.

Select [1100/10] by using the [▲] and [▼]

buttons and press the [ENTER] button.

Slide the [PROG/RUN] switch downward on

the remote control console to display the run

mode screen.

The profile waveform appears.

Setting the scan width/interval is completed. Setting the upper and lower limits display is described next.

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Page 36

Using the Profile Mode

Chapter

Basic Operations

Setting the Upper and Lower Limits Display

Press the [ENTER] button twice on the

measurement screen and place the cursor on

the value of [UP LIMIT].

Specify the value by using the [t], [s], [▲]

and [▼ ] buttons and press the [ENTER]

button.

The value +100.00 is specified in this example.

Place the cursor on [LO LIMIT] by using the

[▲] and [▼] buttons.

Place the cursor on the value by pressing the

[ENTER] button.

Specify the value by using the [t], [s], [▲]

and [▼ ] buttons and press the [ENTER]

button.

The value –100.00 is specified in this example.

Press the [ESCAPE] button to return to the

measurement screen.

Setting the upper and lower limits display is completed. Setting the area is described next.

Setting the Area

Press the [SCREEN] button on the

measurement screen to display the light

intensity screen.

Set the area range on the light intensity screen.

Place the cursor on [A1] by pressing the

[ENTER] button.

Place the cursor on the value by pressing the

[ENTER] button.

Press the [SCREEN] button to select the

cursor on the left or the right.

Change the position of the cursor by using

the [▲] and [▼] buttons.

Set [A1] (Area1) for the range including the protruded part in this example.

Fix the setting value by pressing the [ENTER]

button.

Exit the setting by pressing the [ESCAPE]

button.

Press the [SCREEN] button to return to the

measurement screen.

2-18

Setting the area is completed. How to measure the level differences is described next.

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Page 37

Measuring Height Differences

Slide the [PROG/RUN] switch downward on

the remote control console to switch to the

program mode screen.

Select [BASIC] by using the [▲] and [▼ ]

buttons and press the [Enter] button.

Place the cursor on [AREA] by using the [▲]

and [▼ ] buttons and press the [ENTER]

button.

Place the cursor on [AREA 1] by using the [▲]

and [▼ ] buttons and press the [ENTER]

button.

Chapter

Basic Operations

Select [DIFF] by using the [▲] and [▼] buttons

and press the [ENTER] button.

The [DIFF] measures the differential between the maximum and minimum values within a userdefined area.

Slide the [PROG/RUN] switch downward on

the remote control console to display the

measure mode screen.

The measured value displayed is that of the

level differences (the differential between the

maximum and minimum values) set within

[AREA 1].

Reference

The value can be measured without moving the measurement target in the profile mode (maximum value, minimum value, differential between the maximum and minimum values and area).

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Page 38

Chapter

Basic Operations

Basic Operations that Stabilize Measurement

The LT-9001 has functions to stabilize measurement and prevent errors.

• Changing the scanning width and the FINE mode

• Changing the light intensity level

High-accuracy measurement can be obtained by using these functions properly.

The LT-9001 measures the value based on the amount of reflection from the laser (the received light intensity) on the measurement target surface. The received light intensity is at the maximum when the measurement target is in focus, but the reflective light is not necessarily stabilized. Depending on the shape of the material of the measurement target, the receiver might not receive light or might receive excess light from other than the focal point. If the target is measured under such circumstances, an error could occur.

Changing the Scanning Width and the FINE Mode

The LT-9001 scans the laser spot using a built-in oscillating function. Measurement can be stabilized by a scanning process that measures multiple points and cancels any points reflecting insufficient light. The scanning width can be changed in the displacement mode. FINE mode is used in the profile mode for stabilizing the measurement.

Refer to "SCAN" (page 3-15) for details on setting FINE mode in the displacement

mode. Refer to "SCAN" (page 4-14) for setting FINE mode in the profile mode.

Reference

Use the proper procedure for changing the setting for the light intensity level, even when the function for changing the scanning width is in use.

2-20

Changing the Light Intensity Level

The light intensity level is a threshold value defining an adequate amount of light for measurement. When the received light intensity is higher than the level, the target is measured. If it is lower, measurement is canceled. In such a case, the measured value remains as it was beforehand.

Light intensity level

Measuring

Make the settings so as to ignore undesirable light that affects the measurement results and to cancel any point with insufficient light for measurement.

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Page 39

Measuring the surface shape or displacement

Set the longest peak bar (the first peak), which shows that the measurement target is in the focus, so that it extends to the right side of the vertical cursor.

Light intensity level (vertical cursor)

Measuring the thickness or backside of a transparent object

When there is more than one light intensity peak, set the light intensity level bar so that at least two surface peaks extends to the right.

Chapter

Basic Operations

Light intensity level (vertical cursor)

Reference

Accuracy of the measurement differs depending on whether or not the light intensity level is set properly. For more accurate measurement, set the light intensity as high as possible within the range so as not to exceed adequate light for measurement. Be sure not to set it too high or the measured value will be retained and measurement will be disabled.

The displacement mode is used in this example. Stabilized measurement can be obtained in the profile mode by making the same settings.

Refer to "Setting the Light Intensity Level" (page 3-8) for setting of the

displacement mode.

Refer to "Setting the Light Intensity Level" (page 4-8) for setting of the profile

mode.

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Page 40

Chapter

Basic Operations

Resetting the Device to the Factory Settings

It is possible to delete all setting contents and

change to the LT-9001 default values set at the

factory.

To reset the device to the factory settings, follow

the procedure below.

Turn off the power switch of the controller.

Turn on the power switch of the controller

while holding down the [ZERO] button on the

console.

Select [OK] by using the [t] and [s] buttons

and press the [ENTER] button.

Initialization is executed.

Reference

The interface language and the coefficients set in the environment settings are not initialized.

2-22

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Page 41

Default Values and Settings Range (LT-9010 (M))

Displacement Mode

The default values and the setting range of the setting contents of the displacement mode are shown below.

Displacement mode

Program

Programs

OUT settings

(OUT1/OUT2)

Run

GRAPH DISPLAY

Tolerance

Output

Calibration

Setting contents

Light intensity level

OUT1 Upper limit

OUT1 Lower limit

OUT2 Upper limit

OUT2 Lower limit

Upper limit

Lower limit

Select

mesurement

Measurement surface

(One surface)

Measurement surface

(Two surfaces)

Number of measurement

times for averaging

Measurement mode

Offset

Analog +10V

Analog –10V

1st point/measured value

1st point/calibrated value

2nd point/measured value

2nd point/calibrated value

Default value

0~255

+300.00

–300.00

–9999.99 ~ +9999.99*

+300.00

–300.00

+200.00

–9999.99 ~ +9999.99*

–200.00

Displacement, Transparent object thickness,

Displacement

Slant ΔSlant

Maximum

[MAX]

MAX, M1, M2, +1P, +2P, +3P +4P, –1P, –2P, –3P, –4P

Maximum

[MAX]

2 ~ 128 (256 ~ 4096)

Normal [NORMAL], Auto peak hold [A.PEAK H], Auto bottom hold [A BOTM H], Auto P-P hold

Normal

[A P-P H], Average hold [AVER. H],Peak hold

[NORMAL]

[PEAK HLD], Bottom hold [BOTTOM H], P-P hold [P-P HOLD], Sample hold [SAMPLE H]

0.00

–9999.99 ~ +9999.99*

+200.00

–9999.99 ~ +9999.99*

–200.00

0.00

0.00 –9999.99 ~ +9999.99*

+100.00

Reference pagesSetting range

Chapter 3 “Light Intensity Screen” – “Setting the Light Intensity Level (page 3-8)

Chapter 3 “Measurement Screen” – “Setting the upper and lower limits of the trend graph display” (page 3-6)

Chapter 5 "OUT Settings" - "LIMITS" (page 5-7)

Chapter 3 "OUT Settings" - "MEASUREMENT" (page 3-10)

Chapter 3 "OUT Settings" - "SELECT SURFACE" (page 3-12)

Chapter 5 "OUT Settings" - "AVERAGE " (page 5-8)

Chapter 5 "OUT Settings" - "HOLD MODE" (page 5-9)

Chapter 5 "OUT Settings" - "OFFSET" (page 5-14)

Chapter 5 "OUT Settings" - "ANALOG output" (page 5-15)

Chapter 5 "OUT Settings" - "CALIB" (page 5-16)

Chapter

Basic Operations

OFF, 120/2, 120/5,

Basic

settings

Optional

settings

Scan

Dark

Mask

CORRECT

Display

I/O

GAIN

Scan Width

Scan center

Darkout

Darkout range (HI)

Darkout range (LO)

Mask

Mask range (HI)

Mask range (LO)

AUTO SLANT COR

Camera Image

Focus

Graph display

Scroll

Minimum number of non-displayed digits

Display unit

I/O

GAIN

120/10, 250/2, 250/5,

120/5

250/10, 500/2, 500/5, 500/10, 1100/2, 1100/5, 1100/10, 4/1

–550 ~ +550

OFF, ON

OFF

100

1 ~ 255

0 ~ 254

OFF

OFF, ON

+100

–400 ~ +400

–100

OFF

ON, OFF

Center fix, Maximum displacement, Minimum displacement,

Center fix

Average displacement

ON, OFF

Medium

Low, Medium, High

OFF, 1-Digit, 2-Digit

OFF

μm μm,mil

Binary

Binary, Judgment output

[BINARY]

Normal, High sensitivity

Standard

Chapter 3 "BASIC Settings" - "Scan Width" (page 3-15)

Chapter 3 "BASIC Settings" - "Scan center" (page 3-16)

Chapter 3 "BASIC Settings" - "DARK" (page 3-17)

Chapter 3 "BASIC Settings" - "MASK" (page 3-18)

Chapter 3 "OPTIONAL Settings" - "AUTO SLANT COR" (page 3-19)

Chapter 5 "OPTIONAL Settings" - "CAMERA IMAGE" (page 5-18)

Chapter 5 "OPTIONAL Settings" - "FOCUS" (page 5-18)

Chapter 5 "OPTIONAL Settings" - "GRAPH DISPLAY" (page 5-18)

Chapter 5 "OPTIONAL Settings" - "SCROLL" (page 5-18)

Chapter 5 "OPTIONAL Settings" - "DIGITS" (page 5-18)

Chapter 5 "OPTIONAL Settings" - "DISPLAY UNIT" (page 5-19)

Chapter 5 "OPTIONAL Settings" - "I/O" (page 5-20)

Chapter 5 "OPTIONAL Settings" - "GAIN" (page 5-20)

*The values differ according to the setting for the minimum number of non-displayed units and of the area.

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Default Values and Settings Range

Profile Mode

Chapter

Basic Operations

The default values and the settings range of the profile mode are shown below.

Profile mode

Program

Programs

OUT settings (OUT1/OUT2)

Basic

settings

Optional

settings

Run

GRAPH DISPLAY

Area ranges

Tolerance

Output

Calibration

Area

Scan

Dark

Smooth

CORRECT

Display

Profile output

I/O

GAIN

Setting contents Reference pagesSetting range

Light intensity level

Upper limit

Lower limit

Area1, range1

Area1, range2

Area2, range1

Area1, range2

Upper limit

Lower limit

Select

measurement

Number of measurement

times for averaging

Measurement mode

Offset

Analog +10V

Analog –10V

1st point/measured value

1st point/calibrated value

2nd point/measured value

2nd point/calibrated value

Area1

Area2

SCAN WIDTH

SCAN center

FINE Mode

Darkout

Smoothing

Averaging

AUTO SLANT COR

Camera Image

Focus

Graph display

Minimum number of non-displayed digits

Display unit

Profile output

I/O

GAIN

Default value

0~255

+300.00

–9999.99 ~ +9999.99*

–300.00

–400

–300

–550 to +550

+300

+400

+200.00

–9999.99 ~ +9999.99*

–200.00

A1(OUT1)

A1, A2, A1–A2, A1+A2

A2(OUT2)

2 ~ 128

Normal [NORMAL], Auto peak hold [A.PEAK H], Auto bottom hold [A BOTM H], Auto P-P hold

Normal

[A P-P H], Average hold [AVER. H],Peak hold

[NORMAL]

[PEAK HLD], Bottom hold [BOTTOM H], P-P hold [P-P HOLD], Sample hold [SAMPLE H]

–9999.99 ~ +9999.99*

0.00

+200.00

–9999.99 ~ +9999.99*

–200.00

0.00

0.00 –9999.99 ~ +9999.99*

+100.00

AVE

AVE, MAX, MIN, DIFF

AVE

AVE, MAX, MIN, DIFF, AREA

120/2, 120/5, 120/10, 250/2, 250/5, 250/10, 500/2, 500/5, 500/10,

1100/5

1100/2, 1100/5, 1100/10

–550 ~ +550

OFF

OFF, ON

OFF

OFF, 25%, 50%, 75%, 100%

2, 4, 16

OFF

ON, OFF

Center fix, Maximum displacement,

Center fix

Minimum displacement, Average displacement

ON, OFF

OFF

OFF, 1-Digit, 2-Digit

μm μm,mil

OFF

ON, OFF

Binary

Binary, Judgment output

[BINARY]

Normal, High sensitivity

Standard

Chapter 4 “Light Insity Screen” – “Setting the Light Intensity Level” (page 4-8)

Chapter 4 “Measurement Screen” – “Display of Profile Waveform” (page 4-6)

Chapter 4 “Light Intensity Screen” – “Changing the Ranges of the Areas” (page 4-9)

Chapter 5 "OUT Settings" - "LIMITS" (page 5-7)

Chapter 4 "OUT Settings" - "Measurement" (page 4-12)

Chapter 5 "OUT Settings" - "AVERAGE " (page 5-8)

Chapter 5 "OUT Settings" - "HOLD MODE" (page 5-9)

Chapter 5 "OUT Settings" - "OFFSET" (page 5-14)

Chapter 5 "OUT Settings" - "ANALOG output" (page 5-15)

Chapter 5 "OUT Settings" - "CALIB" (page 5-16)

Chapter 4 "BASIC Settings" - "AREA" (page 4-13)

Chapter 4 "BASIC Settings" - "SCAN WIDTH" (page 4-14)

Chapter 4 "BASIC Settings" - "SCAN center" (page 4-15)

Chapter 4 "BASIC Settings" - "FINE mode" (page 4-15)

Chapter 4 "BASIC Settings" - "DARK" (page 4-16)

Chapter 4 "BASIC Settings" - "SMOOTH" (page 4-17)

Chapter 4 "OPTIONAL Settings" - "AUTO SLANT COR" (page 4-18)

Chapter 5 "OPTIONAL Settings" - "CAMERA IMAGE" (page 5-18)

Chapter 5 "OPTIONAL Settings" - "FOCUS" (page 5-18)

Chapter 5 "OPTIONAL Settings" - "GRAPH DISPLAY" (page 5-18)

Chapter 5 "OPTIONAL Settings" - "DIGITS" (page 5-18)

Chapter 5 "OPTIONAL Settings" - "DISPLAY UNIT" (page 5-19)

Chapter 4 "OPTIONAL Settings" - "PROF OUT" (page 4-19)

Chapter 5 "OPTIONAL Settings" - "I/O" (page 5-20)

Chapter 5 "OPTIONAL Settings" - "GAIN" (page 5-20)

2-24

* The values differ according to the setting of the digit and the area.

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Default Values and Setting Range

The default values and setting range of the LT-9001 parameters are listed below.

Setting range

Lower limit Upper limit – 550 or lower – 550 or lower – 550 or lower – 550 or lower

– 9999.99 + 9999.99 0.00 – 9999.99 + 9999.99 0.00 – 9999.99 + 9999.99 + 100.00 – 9999.99 + 9999.99 + 100.00

– 999999 + 999999 0 – 999999 + 999999 0 – 999999 + 999999 + 10000 – 999999 + 999999 + 10000

+ 550 or higher + 550 or higher + 550 or higher + 550 or higher

Default value

– 400 – 300 + 300 + 400

Common

Units specified in the measurement selection and in the area setting

[µm

Setting contents

Measurement range 1 of area1

Area

Scan Center position – 550 + 550 0 center position] is within

Dark

Mask

Displacement, Transparent

Display

thickness, Profile

Tolerance

Offset Offset – 9999.99 + 9999.99 0.00

Analog

Calibration

[µm]

Display

Tolerance

Slant, ΔSlant

Offset Offset – 9999.99 + 9999.99 0.00

Analog

Calibration

[°]

Tolerance

Offset Offset – 999999 + 999999 0

Analog

Area

Calibration

]

Measurement range 2 of area1 Measurement range 1 of area2 Measurement range 2 of area2

Setting range of [HI] 1 255 100

Setting range of [LO] 0 254 20

Setting range of [HI] – 400 + 400 + 100

Setting range of [LO] – 400 + 400 – 100

Light intensity level 0 255 30

Upper limit – 9999.99 + 9999.99 + 300.00 Lower limit – 9999.99 + 9999.99 – 300.00 Upper limit – 9999.99 + 9999.99 + 200.00 Lower limit – 9999.99 + 9999.99 – 200.00

Analog + 10V – 9999.99 + 9999.99 + 200.00

Analog – 10V – 9999.99 + 9999.99 – 200.00

Measured value of the 1st point

Calibrated value of the 1st point

Measured value of the 2nd point

Calibrated value of the 2nd point

1 2 3 4

Upper limit – 9999.99 + 9999.99 + 300.00 Lower limit – 9999.99 + 9999.99 – 300.00 Upper limit – 9999.99 + 9999.99 + 200.00 Lower limit – 9999.99 + 9999.99 – 200.00

Analog + 10V – 9999.99 + 9999.99 + 200.00

Analog – 10V – 9999.99 + 9999.99 – 200.00

Measured value of the 1st point Calibrated value of the 1st point

Measured value of the 2nd point

Calibrated value of the 2nd point

Upper limit – 999999 + 999999 + 20000 Lower limit – 999999 + 999999 – 20000

Analog + 10V – 999999 + 999999 + 20000

Analog – 10V – 999999 + 999999 – 20000

2 Measured value of the 1st point Calibrated value of the 1st point

Measured value of the 2nd point

Calibrated value of the 2nd point

Notes

The setting ranges differ according

to the manufacturing variations of

individual measuring units.

[(scan width/2)+scanning

the range of ±550

LO<HI

Lower limit<Upper limit

– 20.00

( < and < )

and (0.5 Span value after the

calibration is done<4.0000)

Lower limit<Upper limit

( < and < )

and (0.5 Span value after

calibration<4.0000)

Lower limit<Upper limit

( < and < )

and (0.5 Span value after

calibration<4.0000)

2 43

– 20.00

3 2 4

– 20.00

2 43

Chapter

Basic Operations

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Page 44

Default Values and Settings Range (LT-9030 (M))

Displacement Mode

Chapter

Basic Operations

The default values and the setting range of the setting contents of the displacement mode are shown below.

Displacement mode

Program

Programs

OUT settings (OUT1/OUT2)

Run

GRAPH DISPLAY

Tolerance

Output

Calibration

Setting contents

Light intensity level

OUT1 Upper limit

OUT1 Lower limit

OUT2 Upper limit

OUT2 Lower limit

Upper limit

Lower limit

Select

mesurement

Measurement surface

(One surface)

Measurement surface

(Two surfaces)

Number of measurement

times for averaging

Measurement mode

Offset

Analog +10V

Analog –10V

1st point/measured value

1st point/calibrated value

2nd point/measured value

2nd point/calibrated value

Default value

0~255

+100.00

–100.00

–9999.99 ~ +9999.99*

+100.00

–100.00

+600.00

–9999.99 ~ +9999.99*

–600.00

Displacement, Transparent object thickness

Displacement

Maximum

[MAX]

MAX, M1, M2, +1P, +2P, +3P +4P, –1P, –2P, –3P, –4P

Maximum

[MAX]

2 ~ 128 (256 ~ 4096)

Normal [NORMAL], Auto peak hold [A.PEAK H], Auto bottom hold [A BOTM H], Auto P-P hold

Normal

[A P-P H], Average hold [AVER. H],Peak hold

[NORMAL]

[PEAK HLD], Bottom hold [BOTTOM H], P-P hold [P-P HOLD], Sample hold [SAMPLE H]

0.00

–9999.99 ~ +9999.99*

+200.00

–9999.99 ~ +9999.99*

–200.00

0.00

0.00 –9999.99 ~ +9999.99*

+100.00

Reference pagesSetting range

Chapter 3 “Light Intensity Screen” – “Setting the Light Intensity Level (page 3-8)

Chapter 3 “Measurement Screen” – “Setting the upper and lower limits of the trend graph display” (page 3-6)

Chapter 5 "OUT Settings" - "LIMITS" (page 5-7)

Chapter 3 "OUT Settings" - "MEASUREMENT" (page 3-10)

Chapter 3 "OUT Settings" - "SELECT SURFACE" (page 3-12)

Chapter 5 "OUT Settings" - "AVERAGE " (page 5-8)

Chapter 5 "OUT Settings" - "HOLD MODE" (page 5-9)

Chapter 5 "OUT Settings" - "OFFSET" (page 5-14)

Chapter 5 "OUT Settings" - "ANALOG output" (page 5-15)

Chapter 5 "OUT Settings" - "CALIB" (page 5-16)

2-26

Basic

settings

Optional

settings

Scan

Dark

Mask

Display

I/O

GAIN

Scan Width

Darkout

Darkout range (HI)

Darkout range (LO)

Mask

Mask range (HI)

Mask range (LO)

Camera Image

Focus

Graph display

Scroll

DIGITS

Display unit

I/O

GAIN

OFF, 120/2, 120/4, 120/8, 240/2, 240/4, 240/8, 400/2, 400/4,

120/4

400/8, 560/2, 560/4, 560/8, 4/1

OFF, ON

OFF

100

1 ~ 255

0 ~ 254

OFF, ON

OFF

+400

–1500 ~ +1500

–400

ON, OFF

Center fix, Maximum displacement, Minimum displacement,

Center fix

Average displacement

ON, OFF

Medium

Low, Medium, High

OFF, 1-Digit, 2-Digit

OFF

μm μm,mil

Binary

Binary, Judgment output

[BINARY]

Normal, High sensitivity

Standard

Chapter 3 "BASIC Settings" - "Scan Width" (page 3-15)

Chapter 3 "BASIC Settings" - "DARK" (page 3-17)

Chapter 3 "BASIC Settings" - "MASK" (page 3-18)

Chapter 5 "OPTIONAL Settings" - "CAMERA IMAGE" (page 5-18)

Chapter 5 "OPTIONAL Settings" - "FOCUS" (page 5-18)

Chapter 5 "OPTIONAL Settings" - "GRAPH DISPLAY" (page 5-18)

Chapter 5 "OPTIONAL Settings" - "SCROLL" (page 5-18)

Chapter 5 "OPTIONAL Settings" - "DIGITS" (page 5-18)

Chapter 5 "OPTIONAL Settings" - "DISPLAY UNIT" (page 5-19)

Chapter 5 "OPTIONAL Settings" - "I/O" (page 5-20)

Chapter 5 "OPTIONAL Settings" - "GAIN" (page 5-20)

*The values differ according to the setting of the digit and the area.

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Page 45

Default Values and Setting Range

The default values and setting range of the LT-9001 parameters are listed below.

Setting contents

Dark

Mask

Display

Tolerance

Offset Offset – 9999.99 + 9999.99 0.00

Analog

Calibration

Setting range of [HI] 1 255 100

Setting range of [LO] 0 254 20

Setting range of [HI] – 1500 + 1500 + 400

Setting range of [LO] – 1500 + 1500 – 400

Light intensity level 0 255 30

Upper limit – 9999.99 + 9999.99 + 1000.00 Lower limit – 9999.99 + 9999.99 – 1000.00 Upper limit – 9999.99 + 9999.99 + 6000.00 Lower limit – 9999.99 + 9999.99 – 6000.00

Analog + 10V – 9999.99 + 9999.99 + 200.00

Analog – 10V – 9999.99 + 9999.99 – 200.00

Measured value of the 1st point

Calibrated value of the 1st point

Measured value of the 2nd point

Calibrated value of the 2nd point

Setting range

Lower limit Upper limit

– 9999.99 + 9999.99 0.00 – 9999.99 + 9999.99 0.00 – 9999.99 + 9999.99 + 100.00 – 9999.99 + 9999.99 + 100.00

Default value

Notes

LO<HI

Lower limit<Upper limit

– 20.00

( < and < )

and (0.5 Span value after the

calibration is done<4.0000)

2 43

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Basic Operations

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Page 46

Chapter

Basic Operations

MEMO

2-28

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Outline of Displacement

Chapter

Operations and Function Settings in the Displacement Mode

Mode

What is displacement mode?

The displacement is the distance change from

one reference point to another. The LT-9001 is

capable of measuring not only the displacement

but also the slant and thickness of a transparent

object. This chapter describes the operations and

function settings in the displacement mode. Refer

to “Chapter 5 Outline of Common Operations and

Function Settings" for settings and functions

common to displacement mode and profile mode.

Display Screens.......................................................3-2

Identifying Part Names and Functions of Screens ..3-3

Measurement Screen ..............................................3-5

Light Intensity Screen ..............................................3-7

Pause Screen ..........................................................3-9

OUTPUT Settings..................................................3-10

Functions of the OUTPUT Settings ................3-10

Basic Settings........................................................3-15

SCAN .............................................................3-15

DARK ALARM ................................................3-17

MASK .............................................................3-18

OPTIONAL Settings ..............................................3-19

CORRECT

(Correction feature for angled targets) ...........3-19

Chapter

Operations and Function Settings in the Displacement Mode

E LT-9001-IM

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Page 48

Display Screens

Six types of screens are displayed in the displacement mode as shown below.

Run mode

Chapter

Operations and Function Settings in the Displacement Mode

Program mode

• Measurement screen Displays the distance change from one reference point to another (displacement) as a measured value. The displacement change in time shifts is also displayed as a trend graph.

• Light intensity screen

Displays the measured value and the peak of reflective light from a target in a bar graph. When there are multiple peaks of reflective light intensity, the four highest values are displayed.

• Pause screen

Stops the update of a trend graph and measures the displacement at any position.

3-2

• Program change screen

You can register a set of parameter settings to perform measurement as a program. The registered program number can be changed on this screen.

• Program mode screen

Makes the respective settings for measurement.

• Environment setting screen

Makes the basic settings to operate the LT-9001, such as the communication parameters.

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Identifying Part Names and Functions of Screens

This section identifies the part names and describes the functions of the

measurement screen and the light intensity screen.

Measurement Screen

Identifying part names and functions of the measurement screen.

Chapter

Operations and Function Settings in the Displacement Mode

1 Display of measured value

Displays a measured value. You can select single or double display of OUT1/OUT2. When you select single display, the judgment result is displayed.

2 Mode display

Displays the program number (P 0 to 7), displacement/profile mode and run/program mode.

3 Menu display

Displays the respective menus.

4 Light intensity graph display bar

Displays the measurement target surface (only target surface 1). The light intensity level is displayed as a white line.

5 Scanning settings display bar

Displays the scan width with the bar graph in gray. The light intensity level is displayed as a white line.

6 Trend graph display

Displays the displacement change in the graph, which takes the horizontal axis as time and the vertical axis as displacement. You can change the scroll speed using the horizontal axis. The upper and lower limits, which are set in the vertical axis, can be changed.

7 Measurement target position display bar

The position of the measurement target surface is displayed as a light blue line. The thickness of a transparent object and the Δ slant is displayed as a light blue bar. When the displacement is measured, the upper and lower limits of the trend graph will be displayed as a white line. The display range of the display bar is the measurement range of the measuring unit.

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Chapter

Identifying Part Names and Functions of Screens

Light Intensity Screen

This section identifies the part names and describes the functions of the light intensity screen.

Operations and Function Settings in the Displacement Mode

1 Display of measured value

Displays a measured value. You can select single or double display of OUT1/OUT2. When you select single display, the judgment is displayed.

2 Measurement target surface display

Displays the settings of the measurement target. When measuring the displacement and the slant, only target surface 1 is displayed. The thickness of a transparent object and the Δ slant is measured, target surface 1 is displayed on the left side and target surface 2 is on the right side.

3 Mode display

Displays the program number (P 0 to 7), displacement/profile mode and run/program mode.

4 Menu display

Displays the respective menus.

5 Light intensity value display

Displays the light intensity on the target surface. When measuring the displacement and the slant, only target surface 1 is displayed. When the thickness of a transparent object and the Δ slant is measured, target surface 1 and 2 are displayed.

6 Light intensity level display

Displays the light intensity level.

7 Dark setting display bar

When you set the Dark, the setting range is displayed as a gray bar graph.

8 Light intensity graph display

Displays the position of the measurement target surface and the reflective light intensity from the target surface in the graph. The horizontal axis displays the displacement and the vertical axis displays the value of the light intensity peak. The cursor for the light intensity level is displayed in yellow. For the upper and lower limits, the vertical axis is the measurement range of the measuring unit. The value for the horizontal axis is 0 to 255.

3-4

9 Mask range setting display bar

When you set the mask, the setting range is displayed as a gray bar graph.

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Measurement Screen

The measured value and the trend graph can be

displayed in the measurement screen.

Reference

The graph, which is called a trend graph, displays the change of measured values taking the vertical axis as displacement and the horizontal axis as time.

Display of Measured Value

You can specify two types of settings, OUT1 and

OUT2, modifying the measured value for the

respective purpose such as averaging, offset and

calibration. These values can be displayed.

Refer to “OUT Settings" (page 3-10) for details.

Single display of OUT1 or OUT2

Displays OUT1 or OUT2 individually. Also displays the measured value and the judgment determined by limits.

Measured value Measured value display The areas within the range

between the upper and lower limits of [LIMITS] (Tolerance)

Over the upper limit [LIMITS] (Tolerance)

Under the lower limit [LIMITS] (Tolerance)

Judgment displays [GO] in green.

Judgment displays [HI] in red.

Judgment displays [LO] in red.

Switching the single and double display

The single and double display of OUT1/OUT2 can be switched by pressing the [▲] and [▼] buttons.

OUT1 Single display

OUT2 Single display

OUT1/ OUT2 Double display

Display of the Trend Graph

The changes of the measured value in time can be

displayed as a trend graph.

Chapter

Operations and Function Settings in the Displacement Mode

Double display of OUT1 and OUT2

Displays OUT1 and OUT2 at the same time. You can see two types of measured value on the screen.

Measured value Measured value display The areas within the range between

the upper and lower limits Displayed in green.

[LIMITS] (Tolerance) Over the upper and lower limits

[LIMITS] (Tolerance)

E LT-9001-IM

Displayed in red.

• The trend graph is displayed within the area between the [UP LIMIT] and [LO LIMIT].

• The trend graph indicates the values of OUT1 or OUT2 measured according to the respective settings.

Reference

Refer to “SCROLL" (page 5-18) for the scroll speed of the trend graph.

3-5

Page 52

Measurement Screen

Chapter

Switching the display of OUT1 and OUT2

The trend graph of OUT1 and OUT2 can be switched by using the [▲] and [▼] buttons.

OUT1 display

Operations and Function Settings in the Displacement Mode

OUT2 display

Setting the upper and lower limits of the trend graph display

Any part of the graph can be zoomed in by scaling the upper and lower limits.

300

100

300

The procedure used to set [UP LIMIT] and [LO LIMIT] is explained as follows.

Select [UP LIMIT] using the [ENTER] button.

The cursor is placed on [UP LIMIT].

Select [UP LIMIT] or [LO LIMIT] by using the

[▲ ] and [▼] buttons and press the [Enter]

button.

100

OUT1 display

OUT2 display

3-6

Press the [ENTER] button after changing the

value.

The value you entered is fixed.

Refer to "Default Values and Setting Range"(page

2-25) for the setting range and limitations.

Reference

If the [ZERO] button is pressed while entering the value, the parameter is set to "0".

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Light Intensity Screen

Setting the position

It is difficult to see the trend graph when it is out of the display area. In such a case, select [POSITION] and press the [ENTER] button. The [UP LIMIT] and [LO LIMIT] are adjusted automatically and the trend graph is displayed in the center of the screen.

The [ENTER] button

On the light intensity screen, the reflective light

from a measurement target is indicated.

The measured value and the light intensity peak

can be displayed in a bar graph. Also, the light

intensity level and the measurement target

surface can be set.

Refer to "Chapter 5 Common Operations and Function Settings" (page 5-1) for common settings used with the profile mode.

Display of Measured Values

This section describes the display of measured

value.

There are two types of displays on the light intensity screen, similar to the measurement screen.

• Single display of OUT1 or OUT2

• Double display of OUT1 and OUT2

Reference

Refer to "Display of Measured Value" (page 3-5) for switching the single and double display.

Chapter

Operations and Function Settings in the Displacement Mode

Display of Received Light Intensity Graph

This screen displays the received light intensity

from the measurement target surface in the graph.

The four highest values in the measured light intensity peaks are displayed in the graph. Target surface 1 is displayed in yellow-green and target surface 2 is in light blue.

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Page 54

Light Intensity Screen

Chapter

Setting the Light Intensity Level

The value, which is set as a threshold for the

amount of light to be measured or not, is called

the light intensity level.

Operations and Function Settings in the Displacement Mode

The light intensity level is set by using the

buttons to move the vertical yellow cursor on the

[s] light intensity screen. On the light intensity screen, the light intensity level is displayed in [LVL] and the received light intensity is displayed in [INT].

and

[t]

Light intensity level

Setting the Measurement Target Surface

Select the measurement target surfaces from the

four highest values of light intensity.

The procedure for setting the measurement target surface is explained as follows.

Select [M1] (measurement target surface 1) by

pressing the [ENTER] button on the light

intensity screen.

The cursor is placed on [M1].

When [MEASUREMENT] is set to [ΔSLANT] or

[THICKNESS], select measurement target

surface 1 or 2 by using the [t] or [s] button.

When [MEASUREMENT] is set to [DISTANCE] or [SLANT], only the measurement target surface 1 can be set and you may skip this procedure.

Refer to "MEASUREMENT" (page 3-10).

3-8

Select the measurement target using the [▲]

and [▼] buttons.

Press the [ENTER] button.

The measurement target surface is fixed.

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Pause Screen

The pause screen stops the update of a trend graph. You can measure the displacement of any point or perform slant adjustment of a graph on the pause screen.

Setting the Pause Screen

This section describes the functions of the pause screen.

There are three functions in the pause screen.

• Measuring any point on the trend graph

• Calculating the differential between the values of any two points

• Correcting the slant of the trend graph

Reference

• On the pause screen, only the trend graph display is retained and the measured value and the image of the measurement target is continuously displayed.

Measuring any point or the differential between two points.

The differential between any two points can be measured.

Slant adjust

If the trend graph is slanted, the displacement might not be measured correctly. In such a case, the slant adjustment function makes it possible to measure properly.

The [ENTER] button

Chapter

Operations and Function Settings in the Displacement Mode

Differential between two points

The measurement procedure is explained as follows.

Press the [PAUSE] button on the remote

control console.

The trend graph display is retained and two vertical cursors appear.

Select either the yellow-green cursor or the light

blue one by pressing the [SCREEN] button.

Move the vertical cursor by using the [t] or

[s] button to any point.

Any point and the differential between two points are displayed.

E LT-9001-IM

The slant adjustment procedure is explained as follows.

Press the [PAUSE] button on the remote

control console.

The update of the graph display is retained and two vertical cursors appear.

Place the two vertical cursors on any

positions.

Refer to "Measuring any point or the differential between two points" (page 3-9) for the operation of vertical cursors.

Press the [ENTER]

The slant is corrected.

Move the vertical cursors and measure any

point or the differential between any two points.

button

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Pause Screen

OUTPUT Settings

Chapter

Manual correction after performing slant correction

You can manually correct a slant after the slant correction is performed. The procedure is explained as follows.

Operations and Function Settings in the Displacement Mode

Press the [PAUSE] button on the remote

control console.

Set [SLNT ADJ] to [ON] by using the [ENTER]

button.

The slant is corrected automatically.

Place the two vertical cursors on any

positions.

Refer to "Measuring any point or the differential between two points" (page 3-9) for the operation of vertical cursors.

Correct the slant manually by using the [▲]

and [▼] buttons.

Reference

• The center of the corrected position is to be the midpoint of the two intersecting points where the two vertical cursors and the trend graph meet.

• Press the [PAUSE] button to recover from the pause screen.

• The information about the slant correction is lost.

The processes performed on the measured value

such as averaging, offsetting, or calibrating are

referred to as OUTPUT settings. Each process can

be set in OUT1 and OUT2 independently.

Functions of the OUTPUT Settings

This section describes [MEASUREMENT] and

[SELECT SURFACE]. Refer to "OUTPUT Settings"

( page 5-7) for other functions.

Refer to "LIMITS (Tolerance)" (page 5-7). Refer to "CALIB (Calibration)" (page 5-16).

MEASUREMENT

The following four types of measurements can be performed in the measurement specifications.*

Distance The distance change from the reference

position on the measurement target is measured.

Slant The degree between the reference surface

and the target surface is measured.

ΔSlant The relative degree between the target and

a transparent target is measured.

THICK The thickness of a transparent object is

measured.

* When the LT-9030(M) is used, "Distance" and "THICK" can

be specified. (Functions to measure "Slant" and "ΔSlant" are not supported.)

Distance

3-10

Measuring unit

Distance change from the reference position

Measurement target

The reference position refers to the position that was adjusted at the factory.

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Slant

Measuring unit

Degree in relation to the reference surface

Measurement target

The reference surface refers to the surface position that was adjusted at the factory.

ΔSlant

The procedure to set [MEASUREMENT] is explained as follows.

Select [OUTPUT] from [OUT1] or [OUT2] on

the program mode screen.

The screen appears for setting the output.

Move the cursor over the items for

[MEASUREMENT] by using the [▲] , [▼] and

[ENTER] buttons.

Chapter

Operations and Function Settings in the Displacement Mode

Measuring unit

Transparent target

Relative slant

Measurement target

You can select either surface as a reference surface. When the target is slanted against the reference surface in a counterclockwise direction, the value is regarded as "+", and when the target is slanted in a clockwise direction, the value is regarded as "–".

Thickness of transparent object (THICK)

Measuring unit

Thickness of the transparent object

Measuring target (transparent)

The value is always regarded as "+".

Select either [DISTANCE], [SLANT], [ΔSLANT]

or [THCIK] by using the [▲] and [▼] buttons.

Press the [ENTER] button.

[MEASUREMENT] setting is fixed.

Reference

An error may occur in the thickness measurement of a transparent object depending on the refractive index. In such a case, you can use the calibration function to obtain the proper value.

Refer to "CALIB (calibration)" (page 5-16) for the

calibration function.

Note

The [SLANT] can be set in OUT1 only and cannot be set in OUT2. The [SLANT] and [ΔSLANT] can be selected only when the scanning width is set to anything other than [OFF] and [4/1].

Refer to "SCAN" (page 3-15) for setting scanning width. The measuring unit should be viewed in the direction shown in the drawing. (+/–)

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OUT Settings

Chapter

SELECT SURFACE

Select one or two surfaces to be measured from a maximum of four measurement target surfaces. The number of surfaces to be selected differs according to the setting of [MEASUREMENT].

Operations and Function Settings in the Displacement Mode

MEASUREMENT Number of surfaces to select [DISTANCE] and [SLANT] 1 [ΔSLANT] and [THICK] 2

[MAX] (Maximum)

[MAX] measures the target surface of the highest light intensity peak picked up from the peaks that exceed the light intensity level. [MAX] can be performed on many measurement targets including an opaque object to measure its displacement and slant.

Mesuring unit

[M1], [M2]

[M1] and [M2] measure the highest and the secondhighest light intensity peaks picked up from the peaks that exceed the light intensity level. The one nearer to the measuring unit is measured as M1 and the other as M2. It is useful to measure the surface displacement, backside displacement and thickness of a target such as transparent glass that has very close measured values on the surface and backside.

Measuring unit

Reflection on the first surface

Transparent glass

Reflection on the second surface

Opaque medium

3-12

MAX

Light intensity level

Note

To measure in [M1] and [M2], more than one light intensity peak exceeding the light intensity level is needed.

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+1P, +2P, +3P, +4P

–1P, –2P, –3P, –4P

The measurement targets are all values of the light intensity peak that exceed the light intensity level. The surfaces are measured as +1P, +2P, +3P and +4P in order of distance to the measuring unit. The surface nearest to the measuring unit is +1P. Also in order of distance, the surfaces are measured as –1P, –2P, –3P and –4P. The surface furthest from the measuring unit is –1P. You can select any target surface and measure it.

Selecting the measurement target surface (one

surface)

The procedure used to select one measurement target surface is explained as follows.

Select [OUTPUT] from [OUT1] or [OUT2] on

the program mode screen.

The screen appears for setting the output.

Select [DISTANCE] on [MEASUREMENT].

The displacement of an opaque object is to be measured in this example.

Press the [ENTER] button on [SELECT

SURFACE].

The screen for selecting the target surface appears.

Chapter

Operations and Function Settings in the Displacement Mode

E LT-9001-IM

Ineligible peak

Light intensity level

Select [MAX] by using the [▲] and [▼] buttons.

Select the highest light intensity peak in this example.

Press the [ENTER] button.

The measurement target surface is fixed.

Reference

•

The graph of the selected surface is displayed in green when its value exceeds the light intensity level.

• The highest and the second-highest peaks of light

intensity among the non-selected peaks are displayed in white, and ones lower than those (among non-selected) are in gray.

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OUT Settings

Chapter

Selecting the measurement target surface (two

surfaces)

The procedure used to select two measurement target surfaces is explained as follows.

Select [OUTPUT] from [OUT1] or [OUT2] on

Operations and Function Settings in the Displacement Mode

the program mode screen.

The screen appears for setting the output.

Select [THICK] on [SELECT SURFACE].

The thickness of a transparent object is to be measured in this example.

Press the [ENTER] button on

[MEASUREMENT]

The screen for selecting the target surface appears.

Reference

• The graphs of the selected surfaces are displayed in yellow-green and in light blue separately.

• The highest and the second-highest peaks of light intensity among the non-selected peaks are displayed in white, ones lower than those (among non-selected) are in gray.

Note

Any surface can be selected when [SELECT SURFACE] is set to [DISTANCE] and [SLANT]. Any two surfaces can be selected when [SELECT SURFACE] is set to [THICK] and [ΔSLANT]. However, if [SLANT] is set to OUT2, when OUT1 is [ΔSLANT], the target surface for OUT2 is only selected from the surfaces that are already specified for OUT1.

Select [M1] by using the [▲] and [▼] buttons.

Set target surface 1 as [M1].

Select target surface 2 by using the [s] button.

Select [M2] by using the [▲] and [▼] buttons.

Set target surface 2 as [M2].

Press the [ENTER] button.

The measurement target surface is fixed.

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Basic Settings

This section describes the basic settings for

displacement measurement.

SCAN

This section describes the scanning function for stable measuring.

Scan width/interval

You can see irregularities on a zoomed in surface even if the measurement target surface looks flat. Depending on the irregularity, measurement cannot be done correctly because of insufficient reflective light. Stable measuring can be realized by making the laser beam swing (scan) and canceling any points that do not have enough reflective light.

■ LT-9010 (M)

Meauring unit

Scan width

(Width : OFF, 4,120, 250, 500,100μm)

Pitch (Interval : 1, 2, 5, 10μm)

Select a combination of scanning width and pitch from the table shown below.

■ LT-9010 (M)

OFF No scanning 120/2 120/5 120/10 250/2 250/5 250/10 Scan width (Width):120/250/500/1100µm 500/2 Pitch (Interval): 2/5/10 µm 500/5 Select a combination from the above. 500/10 1100/2 1100/5 1100/10 4/1 Fine-scanning: about 4 µm

■ LT-9030 (M)

OFF No scanning 120/2 120/4 120/8 240/2 240/4 240/8 Scan width (Width):120/240/400/560µm 400/2 Pitch (Interval): 2/4/8 µm 400/4 Select a combination from the above. 400/8 560/2 560/4 560/8 4/1 Fine-scanning: about 4 µm

Chapter

Operations and Function Settings in the Displacement Mode

■ LT-9030 (M)

Meauring unit

E LT-9001-IM

Measurement targetMeasurement target

Scan width

(Width : OFF, 4,120, 240, 400, 560μm)

Pitch (Interval : 1, 2, 4, 8μm)

Measurement target

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Basic Settings

Chapter

The procedure used to set the scan width/interval is explained as follows.

Select [SCAN] from [BASIC] on the program

mode screen.

The scan setting screen appears.

Operations and Function Settings in the Displacement Mode

Select [SCAN WIDTH].

Select the scanning width and pitch by using

the [▲] and [▼] buttons.

Press the [ENTER] button.

The scan width/interval is fixed.

Scan center (Supported only in the LT-9010 (M))

Set the scan center for scanning.

Refer to "Default Values and Setting Range"

(page 2-25) for the setting range and limitations.

The procedure used to set the scan center is explained as follows.

Select [SCAN] from [BASIC] on the program

mode screen.

The scan setting screen appears.

Select [SCAN CENTER] and press the

[ENTER] button.

The measurement screen appears and the center position is indicated by the vertical cursor displayed in yellow.

Reference

When the scan width is wide and the pitch is narrow, the bigger the differential between the two settings becomes, the more time that is needed for measuring. Determine the required stability and set the scanning width and pitch accordingly. The displacement mode calculates the data of multiple points obtained from a single scan and calculates the displacement data. Use the profile mode to measure the shape.

Refer to "Operations and Function Settings in the

Profile Mode" (page 4-1).

Move the vertical cursor (yellow) by using the

[t] and [s] buttons and set the scan center.

Press the [ENTER] button.

The scan center is fixed.

Reference

If the [ZERO] button is pressed while setting the scan center, the parameter is set to "0".

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DARK ALARM

Displays and outputs the DARK ALARM when the

light intensity peaks are not measured within the

set range.

When every light intensity peak is under the lower limit of the set range, the system goes into the DARK ALARM status. It recovers when the light intensity peak of one or more surfaces exceed the upper limit.

Place the cursor on [SETTING RANGE] and

select by pressing the [ENTER] button.

The range setting screen appears.

Select the cursor for either the upper or lower

limit by using the [SCREEN] button.

The selected cursor turns to yellow-green.

Set the position for the cursor of the upper or

lower limit by using the [t] or [s] button.

Chapter

Operations and Function Settings in the Displacement Mode

The procedure used to set the DARK ALARM is explained as follows.

Select [DARK] from [BASIC] on the program

mode screen.

The dark status setting screen appears.

Select [DARKOUT].

Set [DARKOUT] to [ON] by using the [▲] and

[▼] buttons.

Set to [OFF] when you are not using this function.

Press the [ENTER] button.

The dark setting is fixed.

Refer to "Default Values and Setting Range"

(page 2-25) for the setting range and limitations.

The dark status takes priority over any other status. Refer to "Status Table" (page 9-4) for the respective display/output statuses.

Reference

You can confirm the setting range with the dark setting display bar while measuring. You can confirm whether a target is within the measurement range or not if DARK ALARM is set to be displayed/output when the target is out of the range and the light intensity become deficient.

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Basic Settings

Chapter

MASK

Mask is the function used to ignore light intensity peaks within a user-defined range to eliminate them from the measurement result. This function is useful when measuring the displacement of a target through

Operations and Function Settings in the Displacement Mode

glass or measuring the thickness of laminated glass. The glass between a target and the measuring unit or the contact surface of glass will be ignored.

Make the settings on the light intensity screen in the measurement direction (the direction of displacement). When the values of the measurement target are within the mask range, the measurement value from beforehand is maintained within the masked range.

Use the followoing procedure to set the mask.

Select [MASK] from [BASIC] on the program

mode screen.

The mask setting screen appears.

Select [MASK].

Place the cursor on the [SETTING RANGE]

and select by pressing the [ENTER] button.

The range setting screen appears.

Select the cursor for either the upper or lower

limit by using the [SCREEN] button.

The selected cursor turns to light blue.

Set the position for the cursor of the upper or

lower limit by using the [▲] or [▼] button.

Press the [ENTER] button.

The mask setting is fixed.

Set [MASK] to [ON] by using the [▲] and [▼]

buttons.

Set to [OFF] when you are not using this function.

Reference

The desired measurement range can be set by switching the upper and lower limits.

Refer to "Default Values and Setting Range"

(page 2-25) for the setting range and limitations.

Reference

You can confirm the setting range on the light intensity screen with the mask setting display bar while measuring.

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OPTIONAL Settings

This section describes the auto slant correction

function used to correct measurement errors

caused by tilted or angled targets.

CORRECT (Auto slant correction)

Measurement errors will result when measuring

the thickness of a tilted or angled target. The auto

slant correction detects slanting of the target and

corrects the value.

(Supported only in the LT-9010(M))

Auto slant correction

The auto slant correction prevents measurement errors caused by slanting when measuring the thickness of a transparent object.

SLANT ADJUST

SLANT ADJUST OFF

Press the [ENTER] button.

Auto slant correction is set to ON.

Note

The setting is active only when [MEASUREMENT] is set to [THICK] and [WIDTH/INTERVAL] is set to anything other than [OFF] and [4/1].

Reference

The slant correction is calculated based on the surface that is set in OUT1 as measurement target surface 1.

Chapter

Operations and Function Settings in the Displacement Mode

The procedure used to set the auto slant correction is explained as follows.

Select [ CORRECT] from [OPTIONAL] on the

program mode screen.

The correction setting screen appears.

Select [AUTO SLANT COR].

Select [ON] by using the [▲] and [▼] buttons.

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Chapter

MEMO

Operations and Function Settings in the Displacement Mode

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Outline of Profile Mode

Chapter

Operations and Function Settings in the Profile Mode

What is profile mode?

The shape of the target is measured by scanning

its displacement section by section. This chapter

describes the operations and function settings of

the profile mode for measuring the target

displacement as the shape. Refer to "Chapter 5

Outline of Common Operations and Function

Settings" for settings and functions common to

profile mode and displacement mode.

Types of Screens.....................................................4-2

Identifying Part Names and Functions of Screens ..4-3

Measurement Screen ..............................................4-5

Light Intensity Screen ..............................................4-8

Pause Screen ........................................................4-10

OUTPUT Settings..................................................4-12

Functions of the OUTPUT Settings ................4-12

Basic Settings........................................................4-13

AREA..............................................................4-13

SCAN .............................................................4-14

DARK ALARM ................................................4-16

SMOOTH (Smoothing) ...................................4-17

OPTIONAL Settings ..............................................4-18

SLANT (Correction)........................................4-18

PROF OUT (Profile Output) ...........................4-19

Chapter

Operations and Function Settings in the Profile Mode

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Profile mode is not available in the LT-9030 (M).

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Page 68

Chapter

Types of Screens

Six types of screens are displayed in the profile mode as shown below.

Run mode

Operations and Function Settings in the Profile Mode

switch switch

Program mode

• Measurement screen

Displays the measured profile as a value according to the settings. The point data (the data measured for the respective points) within the scanning width is also displayed as a profile waveform graph.

• Light intensity screen

Displays the measured value and how the light intensity of the point data is distributed within the scanning width in a bar graph.

• Pause screen

Stops the update of a profile waveform graph and measures the displacement at any position.

4-2

• Program change screen

You can register a set of parameter settings to perform measurement as a program. The registered program number can be changed on this screen.

• Program mode screen

Makes the respective settings for measurement, such as the measurement selection.

• Environment setting screen

Makes the basic settings for operating the LT-9001, such as the communication parameters.

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Identifying Part Names and Functions of Screens

This section identifies the part names and describes the functions of the

measurement screen and light intensity screen.

Measurement Screen

Identifying part names and functions of the measurement screen.

1. Display of measured value

Displays a measured value. You can select single or double display of OUT1/OUT2.When you select single display, the judgment is displayed.

Chapter

Operations and Function Settings in the Profile Mode

2. Mode display

Displays the program number (P 0 to 7), profile/displacement mode and run/program mode.

3. Menu display

Displays the respective menus.

4. Area settings display

Displays how the point data in an area is calculated (such as maximum value, minimum value, and average).

5. Area settings display bar

Displays the range of Area 1 and Area 2.

6. Profile graph display

Displays the shape of the target. The upper and lower limits of the vertical axis can be arbitrarily set. The horizontal axis is restricted within the range of the microscope that is on the measuring unit.

7. Measurement target position display bar

The average positions of the point data in Area 1 and Area 2 are displayed as a light blue line. The upper and lower limits are displayed as a white line. The display range of the display bar is the same as the measurement range of the measuring unit.

8. Area 1

This is the range in which the green vertical cursor appears. The point data in this area can be calculated for maximum value, minimum value, average value and so on.

E LT-9001-IM

9. Area 2

This is the range in which the blue vertical cursor appears. The point data can be calculated as in Area 1.

10. Scanning width cursor

Displays the scanning width.

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Chapter

Identifying Part Names and Functions of Screens

Light Intensity Screen

This section identifies the part names and describes the functions of the light intensity screen.

Operations and Function Settings in the Profile Mode

1. Display of measured value

Displays a measured value. You can select single or double display of OUT1/OUT2. When you select single display, the judgment is displayed.

2. Mode display

Displays the program number (P 0 to 7), profile/displacement mode, and run/program mode

3. Menu display

Displays the respective menus.

4. Area settings display

Displays the area range and how the point data in an area is calculated (such as maximum value, minimum value, and average).

5. Light intensity graph display

Displays the light intensity of the respective point data within a scanning range.

6. Area settings display bar

Displays the range of Area 1 and Area 2.

7. Profile waveform graph display

Displays the shape of the target.

8. Range of light intensity graph

The light intensity graph is displayed in this area. The upper and lower limits are set from 0 to 255.

9. Range of profile graph

The profile graph is displayed in this area. The upper and lower limits are the same as in the measurement range of the measuring unit.

4-4

10. Light intensity level display

Displays the light intensity level.

11. Dark setting display bar

When you set the dark status, the setting range is displayed in a gray bar.

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Measurement Screen

The measured value and the profile of the

measuring target can be displayed in the

measurement screen.

Display of Measured Value

You can specify two types of settings, OUT1 and

OUT2, modifying the measured value for the

respective purposes such as averaging, offset

and calibration. These values can be displayed.

Refer to "OUT settings" (page 4-12) for details.

Single display of OUT1 or OUT2

Displays OUT1 or OUT2 individually. Also displays the measured value and the judgment determined by the tolerance.

Measured value Measured value display The areas within the range Judgment displays [GO] in

between the upper and green. lower limits [ LIMITS] (Tolerance)

Over the upper limit Judgment displays [HI] in red. [LIMITS] (Tolerance)

Under the lower limit Judgment displays [LO] in red. [LIMITS] (Tolerance)

Switching the single and double display

The single display and double display of OUT1/OUT2 can be switched by pressing the [▲] and [▼] buttons.

OUT1 Single display

OUT2 Single display

OUT1/ OUT2 Double display

Chapter

Operations and Function Settings in the Profile Mode

Double display of OUT1 and OUT2

Displays OUT1 and OUT2 at the same time. You can see two types of measured values on the screen.

Measured value Measured value display The areas within the range Displayed in green.

between the upper and lower limits [LIMITS] (Tolerance)

Over the upper and Displayed in red. lower limits [LIMITS] (Tolerance)

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Measurement Screen

Chapter

Display of Profile Waveform

The profile waveform is a graph consisting of point data within the scanning width, placed in line. The profile waveform of the measured target within the range of the scanning width can be displayed.

Refer to "SCAN" (page 4-14) for scanning

width/interval.

Operations and Function Settings in the Profile Mode

The profile of a measurement target is displayed as shown below.

Setting the upper and lower limits of the profile waveform graph display

It is possible to set the upper and lower limits display according to the shape of the measurement target in the profile waveform graph. Any part of the graph can be zoomed in on by scaling the upper and lower limits.

300

The procedure used to set [UP LIMIT] and [LO LIMIT] is explained as follows.

Select [UP LIMIT] with the [ENTER] button.

The cursor is placed on [UP LIMIT].

Select [UP LIMIT] or [LO LIMIT] by using the

[▲ ] and [▼] buttons and press the [Enter]

button.

100

200

Reference

The measurement target surface of the highest light intensity is measured in the profile mode.

4-6

Press the [ENTER] button after changing the

value.

The value you entered is fixed.

Refer to "Default Values and Setting Range"

(page 2-25) for the setting range and limitations.

Reference

If the [ZERO] button is pressed while entering the value, the parameter is set to "0".

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Setting the position

It is difficult to see the profile waveform graph when it is out of the display area. In such a case, select [POSITION] and press the [ENTER] button. The [UP LIMIT] and [LO LIMIT] are adjusted automatically and the trend graph is displayed in the center of the screen.

The [ENTER] button

Chapter

Operations and Function Settings in the Profile Mode

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Light Intensity Screen

Chapter

On the light intensity screen, the measured value

and the received light intensity waveform graph

can be displayed. The light intensity level and

area range can be set on this screen.

Refer to "Chapter 5 Common Operations and Function Settings" (page 5-1) for common settings used with the displacement mode.

Display of Measured Value

Operations and Function Settings in the Profile Mode

This section describes the display of a measured

value.

There are two types of display on the light intensity screen, similar to the measurement screen.

• Single display of OUT1 or OUT2

• Double display of OUT1 and OUT2

Reference

Refer to "Display of Measured Value" (page 4-5) for switching the single and double displays.

Display of Received Light Intensity Graph

This screen displays the received light intensity

from the measurement target surface in the graph.

The screen is divided into two areas and displays the profile waveform graph in the upper area and the received light intensity graph in the lower area.

Setting the Light Intensity Level

The value, which is set as a threshold for the

amount of light to be measured or not, is called

the light intensity level.

The light intensity level is set by using the [t] and [s] buttons to move the horizontal yellow cursor on the light intensity screen. On the light intensity screen, the light intensity level is displayed in [LVL].

Lignt intensity level

Reference

• Set the light intensity level as high as possible within the range where the profile can be measured correctly.

• The measurement target surface of the highest light intensity is measured in the profile mode.

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Changing the Ranges of the Areas

You can change the range of the vertical green

cursor (Area 1) and that of the vertical blue cursor

(Area 2) to any range.

The procedure used to change the ranges of the areas is explained as follows.

Press the [ENTER] button on the light

intensity screen.

The cursor is placed on [A1].

Select the area (from A1 and A2) by using the

[▲] and [▼] buttons.

[A1] is selected in this example.

Specify the upper limit as well as the lower

limit.

The upper limit is changed to "–150" in this example.

Press the [ENTER] button.

The area is fixed.

Reference

• You can switch the positions of the upper and lower limits. The area that is not indicated by the cursor is selected in such a case.

• The area setting display bar is displayed in yellow within an area where the ranges of Area 1 and Area 2 overlap each other.

Chapter

Operations and Function Settings in the Profile Mode

Place the cursor on the lower limit of [A1] (the

area indicated in green) by pressing the

[ENTER] button.

The cursor moves to "–400" in this example.

Specify the lower limit by moving the vertical

cursor with the [t] and [s] buttons.

Place the cursor on the upper limit by using

the [SCREEN] button.

The cursor moves to "–300" in this example.

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Pause Screen

Chapter

The pause screen stops the update of a profile

waveform graph on the measurement screen. You

can measure the displacement of any point or

perform slant correction of the profile waveform on

the pause screen.

Setting the Pause Screen

This section describes the functions of the pause

Operations and Function Settings in the Profile Mode

screen.

There are three functions in the pause screen.

• Measuring any point on the profile waveform graph.

• Calculating the differential between the values of any two points.

• Correcting the slant of the profile waveform graph.

Reference

• On the pause screen, only the graph display is retained and the measured value and the image of the measurement target is continuously displayed.

Measuring any point or the differential between two points

The differential between any two points can be measured.

Differential between two points

The measurement procedure is explained as follows.

Press the [PAUSE] button on the remote

control console.

The update of the graph display is retained and two vertical cursors appear.

Select either the yellow-green cursor or the

light blue one by pressing the [SCREEN]

button.

Move the vertical cursor to any point by

using the [t] or [s] button.

Any point and the differential between two points are displayed.

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Slant correction

If the profile waveform is slanted, the profile cannot be measured correctly. In such a case, the slant correction function makes it possible to measure properly.

The [ENTER] button

Manual correction after performing slant correction

You can manually correct a slant after the slant correction is performed. The procedure is explained as follows.

Press the [PAUSE] button on the remote

control console.

Set [SLNT ADJ] to [ON] by using the [ENTER]

button.

The slant is corrected.

Place the two vertical cursors on any positions.

Refer to "Measuring any point or the differential between two points" (page 4-10) for the operation of vertical cursors.

Chapter

Operations and Function Settings in the Profile Mode

The slant correction procedure is explained as follows.

Press the [PAUSE] button on the remote

control console.

The update of the graph display is retained and two vertical cursors appear.

Place the two vertical cursors on any positions.

Refer to "Measuring any point or the differential between two points" (page 4-10) for the operation of vertical cursors.

Press the [ENTER] button.

The slant is corrected.

Correct the slant manually by using the [▲]

and [▼] buttons.

Reference

• The center of the corrected position is to be the midpoint of the two intersecting points where the two vertical cursors and the profile waveform graph meet.

• Press the [PAUSE] button to recover from the pause screen.

• The specified slant correction is active even after the screen changes to the measurement one.

• The specified slant correction is common among all of the program numbers.

• The specified slant correction is retained even while the power is off.

• When the slant correction is specified, the auto slant correction function becomes invalid.

Move the vertical cursors and measure any

point or the differential between any two points.

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OUTPUT Settings

Chapter

You can specify two types of settings, OUT1 and

OUT2, modifying the measured value for the

respective purposes such as averaging, offset

and calibration. These values can be displayed.

Functions of the OUTPUT Settings

This section describes [MEASUREMENT] from

functions of "Output". Refer to "Output Settings" (page

Operations and Function Settings in the Profile Mode

5-7) for other functions.

Refer to "LIMITS (Tolerance)" (page 5-7). Refer to "CALIB (Calibration)" (page 5-16) for

calibration.

The procedure used to set the [MEASUREMENT] is explained as follows.

Select [OUTPUT] from [OUT1] or [OUT2] on

the program mode screen.

The [OUTPUT] setting screen appears. The OUT1 settings are performed in this example.

Move the cursor to [MEASUREMENT] by

using the [▲] or [▼ ] button and press the

[ENTER] button for selecting from the

options.

Select the option of [MEASUREMENT] by

using the [▲] and [▼] buttons.

Select one from among A1, A2, A1+A2 and A1–A2.

MEASUREMENT

Selects the area or calculates the value with those of the areas in OUT1/OUT2. Four types of measurement can be performed in the measurement specifications.

A1 Area 1 is measured. A2 Area 2 is measured. A1–A2 Measures and calculates the differential

between Area 1 and Area 2.

A1+A2 Measures and calculates the sum of Area 1 and

Area 2.

Press the [ENTER] button.

[MEASUREMENT] is fixed.

Note

When [AREA] is set to [A2] (Area 2), the calculation with [A1] and [A2] cannot be performed.

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Basic Settings

This section describes area, scanning, dark, and

smoothing.

AREA

The following measurements can be performed

using the data that is obtained in the area

specified within the scanning range.

Two areas can be set: [A1 (Area 1)] and [A2 (Area

2)].

Using the respective values measured in [A1] and [A2], following measurements can be calculated.

AVG Measures an average value DIFF Measures a differential between the maximum

MIN Measures a minimum value MAX Measures a maximum value DIME Measures an area (µm2or mil2)

and minimum value

Area setting range

MAX (maximum value)

AVG (average value)

MIN (minimum value)

DIFF (differential value)

DIME (Area measurement)

The procedure used to set the ranges of the areas is explained as follows.

Select [AREA] from [BASIC] on the program

mode screen.

The area setting screen appears.

Select [AREA 1].

Select a measurement method for [AREA1].

Select from among [AVG], [MAX], [MIN] and [DIFF].

Select [AREA2].

Select a measurement method for [AREA2] in the same manner.

Press the [ENTER] button.

The areas are fixed.

Note

[DIME] (Area measurement) can only be set for Area2. However, it cannot be set when a calculation (A1–A2 and A1+A2) is set for [MEASUREMENT].

Chapter

Operations and Function Settings in the Profile Mode

E LT-9001-IM

Reference

Area setting for the area measurement

Switch the upper and lower limits of Area 1 and set both ends of the scanning range in Area 1. Measure the area of Area 2 using the approximated line of Area 1 as a reference.

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Basic Settings

Chapter

SCAN

WIDTH/INTERVAL

Set the range to be measured as scanning width. Set the pitch used to measure as [INTERVAL]. Set the pitch in balance with the shape of the measurement target.

• The smaller the pitch becomes, the more time that

Operations and Function Settings in the Profile Mode

is needed for measuring; however, the measurement results become sharper. Considering the stability required, set the scanning width and pitch.

Select a combination of scanning width an pitch from the table shown below

120/2 120/5 120/10 250/2 250/5 250/10 Pitch (Interval): 2/5/10 μm 500/2 Select a combination from the above. 500/5 500/10 1100/2 1100/5 1100/10

The procedure used to set the width/interval is explained as follows.

Select [SCAN] from [BASIC] on the program

mode screen.

The scan setting screen appears.

Select [WIDTH/INTERVAL].

Scan width (Width): 120/250/500/1100 μm

4-14

Select the scanning width and the pitch by

using the [▲] and [▼] buttons.

Press the [ENTER] button.

The width/interval is fixed.

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Scan center

Set the scan center for scanning.

Refer to "Default Values and Setting Range"

(page 2-25) for the setting range and limitations.

The procedure used to set the scan center is explained as follows.

Select [SCAN] from [BASIC] on the program

mode screen.

The scan setting screen appears.

Select [SCAN CENTER] and press the

[ENTER] button.

The measurement screen appears and the center position is indicated by the vertical cursor displayed in yellow.

FINE mode

Depending on the irregularity of the surface, measurement cannot be performed correctly because of insufficient reflective light. FINE mode is the function used to scan the [WIDTH/INTERVAL] (pitch) set in the scanning setting with a greater degree of fine pitch to obtain sharper results. This function provides more stable measurement of the profile waveform. The procedure used to set the FINE mode is explained as follows.

Select [SCAN] from [BASIC] on the program

mode screen.

The scan setting screen appears.

Set [WIDTH/INTERVAL] of the scanning.

Refer to "SCAN" (page 4-14) for setting of

[WIDTH/INTERVAL].

Select [FINE MODE].

Chapter

Operations and Function Settings in the Profile Mode

Mark for the maximum scanning range (white)

Mark for the vertical cursor (yellow)

Mark for the current scan center (white) and scanning width bar (orange)

Move the vertical cursor (yellow) to any point

by using the [t] or [s] button to set the

measurement center.

Press the [ENTER] button.

The scan center is fixed.

Reference

If the [ZERO] button is pressed while setting the scan center, the parameter is set to "0".

E LT-9001-IM

Select [ON] by using the [▲] and [▼] buttons.

Press the [ENTER] button.

FINE mode is set.

Reference

When [FINE MODE] is [ON], more accurate profile measurement can be performed, but the button response and measurement takes longer than usual. Set this function considering the required degree of accuracy.

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Basic Settings

Chapter

DARK ALARM

When the light intensity peaks of the respective

point data dip below the lower limit of the set

range, it is determined as the dark alarm status

and reflected on the profile waveform.

When a light intensity peak dips below the lower limits of the set range, the system goes into the

Operations and Function Settings in the Profile Mode

[DARK ALARM] status. It recovers when the light intensity peak exceeds the upper limit. In the profile mode, the point data within a scanning range is determined individually.

The procedure used to set the dark alarm status is explained as follows.

Select [DARK] from [BASIC] on the program

mode screen.

The dark status setting screen appears.

Select [DARK OUT].

Select one among [OFF], [100%], [75%], [50%]

and [25%].

Select [SETTING RANGE].

The range setting screen appears.

When the number of items of point data in the dark status exceeds the set ratio in Areas 1 and 2, respectively, the result is to be determined as dark. The display for [DARK] appears on the screen and the result is output. When the point data in the dark status does not reach the set ratio, the normal point data is used for measurement.

Dark-out of

profile waveform OFF No dark-out No dark-out 25, 50, 75% Can be When the number

100% dark-out of items of point

Dark-out of areas

data in the dark status exceeds the set ratio, it goes into dark-out status.

4-16

Select the cursor for either the upper or lower

limit by using the [SCREEN] button.

Set the position for the cursor of the upper or

lower limit by using the [▲] or [▼] button.

Press the [ENTER] button.

The dark status setting is fixed.

Reference

• Dark data of the profile waveform is taken as the range exceeding the lower limit.

Refer to "Default Values and Setting Range"

(page 2-25) for the setting range and limitations.

The dark status takes priority over any other status. Refer to "Status Table" (page 9-4) for the respective display/output statuses.

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SMOOTH (Smoothing)

The smoothing function is used to refine the stability of the waveform. The LT-9001 Series has two types of smoothing function as shown below.

Smoothing Smoothing picks up point data obtained

Averaging Averaging calculates the average of the

The procedure used to set smoothing is explained as follows.

Select [SMOOTH] from [BASIC] on the

program mode screen.

The smoothing setting screen appears.

by a single scan and calculates the moving average of them. The number of points to be picked up (smoothing points) is 2, 4 or 16. The larger the number of smoothing points you specify, the less rugged the profile waveform becomes. The response time is not affected.

respective items of point data after a specified number of scans. Pick the number of times to perform scanning for averaging from among 2, 4 and 16. Even if you specify the largest number of times for averaging , the sharpness of the profile waveform is not reduced. The response time becomes longer.

Press the [ENTER] button.

The smoothing setting is fixed.

Reference

• The larger the number selected, the more stabilized the value of smoothing and averaging becomes.

• In smoothing, select the number of data points to be picked up for calculation of moving average.

• Select the number of times to perform scanning for averaging.

Note

The data of both ends of the scanning range could be ignored while performing scanning.

Chapter

Operations and Function Settings in the Profile Mode

Select [SMOOTHING].

Select one among [2], [4] and [16] by using

the [▲] and [▼] buttons.

Select [AVERAGING].

Select one among [2], [4] and [16] in the same manner.

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OPTIONAL Settings

Chapter

This section describes auto slant correction for

profile output.

CORRECT (Auto Slant Correction)

Measurement errors may result on angled targets.

The AUTO SLANT CORRECTION detects slanting

of the target and corrects the value.

Operations and Function Settings in the Profile Mode

Auto slant correction

The auto slant correction corrects a profile waveform within the scanning range to make the approximated line horizontal in Area 1.

Example 1

• The target is set with an upward slope

The procedure used to set the adjustment is explained as follows.

Select [ CORRECT] from [OPTIONAL] on the

program mode screen.

The slant setting screen appears.

Select [AUTO SLANT COR].

Select [ON] by using the [▲] or [▼] button.

Press the [ENTER] button.

The auto slant correction is set.

The slant correction and measurement can be performed without error even if the target is set in a downward sloping position.

Example 2

Switch the upper and lower limits of Area 1 and set both ends of the scanning range in Area 2.

Example 3

Reference

The correction is performed accurately when the major portion of Area 1 is smooth and straight or it includes both ends of the scanning range.

Note

The slant adjustment is ignored when slant correction on the pause screen is set to [ON].

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PROF OUT (Profile Output)

This is the function used to display the measured shape of the target on a data logger or oscilloscope. The profile is output as binary data from the analog output terminal of the terminal block on the rear panel of the controller or from the I/O output terminal of the connector.

Refer to "Chapter 7 I/O Terminal" (page 7-1) for

the terminals and connector.

The procedure used to set the output is explained as follows.

Select [PROF OUT] from [OPTIONAL] on the

program mode screen.

The [PROF OUT] setting screen appears.

Reference

You do not need to set [PROF OUT] when the profile waveform data is output using the RS-232C interface.

Refer to "Chapter 8 RS-232C" (page 8-1).

Note

When the profile waveform is output as binary data, set [I/O] to [BINARY] on the optional setting screen.

Refer to "I/O" (page 5-20) for binary setting.

Chapter

Operations and Function Settings in the Profile Mode

Select [PROF OUT].

Select [ON] or [OFF] by using the [▲] or [▼]

button.

The profile waveform data is output when you select [ON]. The measurement results of OUT1 and OUT2 are output when you select [OFF].

Press the [ENTER] button.

The [PROF OUT] is set.

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Chapter

MEMO

Operations and Function Settings in the Profile Mode

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Outline of Common Operations

Chapter

Common Operations and Function Settings

and Function Settings

This chapter describes the operations and

functions common to the displacement mode and

profile mode. Refer to "Chapter 3 Operations and

Function Settings in the Displacement Mode"

(page 3-1) for the functions unique to the

displacement mode, and "Chapter 4 Operations

and Function Settings in the Profile Mode" (page

4-1) for the functions unique to the profile mode.

Outline of Operations and Functions ......................5-2

Microscope Function. ..............................................5-2

Hold Function ..........................................................5-3

Auto-zero Function ..................................................5-4

Keylock Function .....................................................5-5

Program Change .....................................................5-6

OUTPUT Settings....................................................5-7

LIMITS (Tolerance) ..........................................5-7

OUTPUT (Output) ............................................5-8

CALIB (Calibration) ........................................5-16

OPTIONAL Settings ..............................................5-18

DISPLAY ........................................................5-18

I/O...................................................................5-20

GAIN (Sensitivity). ..........................................5-20

Chapter

Common Operations and Function Settings

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Outline of Operations and Functions

Microscope Function

Chapter

The LT-9001 Series has two types of run modes;

displacement mode and profile mode. This

section describes the operations and functions

common to both modes.

The operations and functions can be classified into the groups as follows.

Functions during Microscope function ( page 5-2) measurement Hold function ( page 5-3)

Common Operations and Function Settings

Program function Program Change ( page 5-6) Setting function OUTPUT settings ( page 5-7)

Auto-zero function ( page 5-4) Keylock function ( page 5-5)

OPTIONAL settings ( page 5-18)

Microscope Function

You can check the target in the measurement area by the image captured by the image sensor camera that is built-in in the measuring unit. Thus, you can measure the desired measurement point without fail.

■ LT-9010 (M)

■ LT-9030 (M)

X : 2500 μm Y : 2000 μm

Microscope image

Orientation of the image and the field of view

The positional relation between the measurement target and the image is shown below. The display range is 1300 μm (X) × 1050 μm (Y). (The display range is 2500 μm (X) × 2000 μm (Y) for LT-9030 (M).)

5-2

Reference

• The magnification is approximately 85 × when the CA-MN80 is used. (8.4" diagonal screen size) (The magnification is approximately 44x for LT-9030(M).)

• You can select whether to show or hide the image and change the focus position.

"DISPLAY" (page 5-18)

The image is updated even when the graph is in

• pause status or the measured value is in hold status.

Refer to "Display Update Cycle" (page 9-6) for

the update cycle of the image.

Note

• Although the spot of the laser beam normally cannot be displayed, it may slightly be displayed depending on the measurement target.

• The image may be swung left and right fast depending on the settings.

•

The display range differs according to the manufacturing variations of individual measuring units.

• The LT-9001/LT-9010 and LT-9001SO (5653)/LT9030 have no microscope function.

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Hold Function

You can freeze the measured value on the display. Maximum value and minimum value can also be measured by using the hold function in combination with the measurement mode.

Reference

The type of measured value that is retained with the holding function varies depending on the measurement mode.

"HOLD MODE" (page 5-9)

• The hold function retains only the display of the measured value. The graph is continuously displayed even if the hold function is enabled.

• On the pause screen, only the graph display is retained and the measured value is continuously displayed.

"Pause Screen" (page 4-10)

Note

The hold function is enabled or disabled in OUT1 and OUT2 at the same time. It cannot be enabled or disabled in OUT1 or OUT2 independently.

The hold function can be operated by using the following means:

• Remote control console

• External I/O terminal

• RS-232C

External I/O terminal

If you short-circuit the [TIMING] input and the [COM1] terminal on the back of the controller, the hold function is enabled.

Refer to "Chapter 7 I/O Terminal" (page 7-1) for

the external I/O terminal to be used.

RS-232C

You can send the command by using the RS-232C interface to set or cancel the hold function.

Refer to "Chapter 8 RS-232C" (page 8-1) for the

commands.

Chapter

Common Operations and Function Settings

Remote control console

If you press the [HOLD] button on the remote control console, the measured value is retained. If you press the [HOLD] button again, the hold function is canceled. When the hold function is enabled, the measured value is retained and the "HOLD" display appears on the screen.

Reference

If you press the [ESCAPE] function is enabled, the measured value is reset.

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button

while the hold

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Auto-zero Function

Chapter

Sets the measured value display to zero (0.00). Using this function, you can set the zero point after changing the measurement target or perform offset adjustment by enabling the offset function at the same time.

Reference

• Auto-zero value is retained even if the power is turned off.

• Auto-zero value is retained in each program No.

• This function can be enabled or disabled in OUT1 and OUT2 independently.

• When the Auto-zero function is canceled, the Auto-

Common Operations and Function Settings

zero value is reset.

• In dark status, Auto-zero is set for the internal measured value.

Note

Auto-zero cannot be set in the judgment standby mode.

The Auto-zero function can be operated by using following means:

• Remote control console

• External I/O terminal

• RS-232C

Remote control console

If you press the [ZERO] button on the remote control console, the measured value is set to zero. If you press the [ZERO] button again, the Auto-zero function is canceled. When the Auto-zero function is enabled, the "ZERO" display appears on the screen.

External I/O terminal

If you short-circuit the [ZERO] input terminal and the [COM1] terminal on the back of the controller, the measured value is set to zero.

Refer to "Chapter 7 I/O Terminal" (page 7-1) for

the external I/O terminal to be used.

Note

Auto-zero cannot be canceled by using the external I/O terminal. The function must be enabled or disabled in OUT1 and OUT2 at the same time. It cannot be enabled or disabled in OUT1 or OUT2 independently.

RS-232C

You can send the command by using the RS-232C interface to set or cancel the Auto-zero function.

Refer to "Chapter 8 RS-232C" (page 8-1) for the

commands.

Reference

• Performing offset adjustment by using the offset

function (Auto offset function)

Set the dimensions of the master workpiece as an offset value beforehand. If you enable the Auto-zero while measuring the master workpiece, the displayed values are set to those of the master workpiece dimensions (offset values).

"OFFSET" (page 5-14)

Reference

If you enable the Auto-zero function for either OUT1 or OUT2 independently, the measured value display mode must be set to single display. If you enable the Auto-zero function for both OUT1 and OUT2 at the same time, the measured value display mode must be set to double display.

Refer to "Display of Measured Value" (page 3-5,

page 4-5) for switching the measured value display.

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Keylock Function

This feature disables the handheld console,

preventing unauthorized operation.

Reference

The keylock mode is retained even if the power is turned off or the program number is changed.

The keylock function can be operated by using following means:

• Remote control console

• RS-232C

Remote control console

Press the [ESCAPE] button and the [ZERO] button for five seconds at the same time to enter the [LOCK] (keylock) mode. In the [LOCK] mode, any operation other than canceling the keylock mode cannot be performed. To cancel the keylock mode, press the [ESCAPE] button and the [ZERO] button for five seconds at the same time. When the keylock function is enabled, the "LOCK" display appears on the screen.

Chapter

Common Operations and Function Settings

RS-232C

You can send the command by using the RS-232C interface to set or cancel the Keylock function.

Refer to "Chapter 8 RS-232C" (page 8-1) for the

commands.

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Program Change

Chapter

You can register a set of parameters as a program

to perform measurement. The measurement

conditions can easily be changed by switching

the program from one to another. This section

describes how to switch the programs.

"Chapter 2 Basic Operations" (page 2-1)

The Program Change function can be operated by using following means:

• Remote control console

• External I/O terminal

Common Operations and Function Settings

• RS-232C interface

Note

The operation method that can be employed to switch the program varies depending on the "PSELECT" setting in the environment settings.

P-SELECT Operation method CONSOLE Remote control console or RS-232C interface TERMINAL External I/O terminal

Refer to "Items that can be set" (page 6-6) for

environment settings.

External I/O terminal

You can select the program No. by using the [P1] to [P3] input terminals and the [COM2] terminal.

Refer to "Chapter 7 I/O Terminal" (page 7-1) for

the external I/O terminal to be used.

RS-232C

You can send the command by using the RS-232C interface to select the program No.

Refer to "Chapter 8 RS-232C" (page 8-1) for the

commands.

Remote control console

The procedure used to change the program by using the remote control console is explained as follows.

Press the [PROGRAM No.] button on the

remote control console on the measurement

screen or on the light intensity screen.

The screen appears for changing the program.

Select the program No. by using the [▲] and

[▼] buttons and press the [ENTER] button.

The program No. change is fixed.

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OUTPUT Settings

The processes performed on the measured value

such as averaging, offsetting, and calibrating are

referred to as OUT settings. Each process can be

set in OUT1 and OUT2 independently.

This section describes the OUT settings common

to the displacement mode and profile mode.

Refer to "OUT Settings" (page 3-10) for the

functions unique to the displacement mode.

Refer to "OUT Settings" (page 4-12) for the

functions unique to the profile mode.

LIMITS (Tolerance)

Acceptability of the measured value can be

determined. The range of measured value for this

judgment is called limits.

Set the upper and lower limits. The relationship between the criteria of HI, GO, and LO range and the measured value is shown below.

HI Upper limit < Measured value GO Lower limit ≤ Measured value ≤ Upper limit LO Measured value ≤ Lower limit

The procedure used to set the LIMITS is explained as follows.

Select [LIMITS] from [OUT1] or [OUT2] on the

program mode screen.

The screen appears for setting the tolerance.

Select [UPPER LIMIT].

Specify the value for [UPPER LIMIT] and

press the [ENTER] button.

The change of the upper limit is fixed.

Select [LOWER LIMIT].

Set the lower limit in the same manner.

Chapter

Common Operations and Function Settings

If the measured value is out of the tolerance range, indications appear as follows.

Display mode Measured value status

Over the upper limit Judgment of tolerance displays [HI] in

Single display The areas within the Judgment displays

range between the [GO] in green. upper limit and lower limit

Over the lower limit of Judgment displays tolerance [LO] in red.

Over the upper or lower Displayed in red. limits of the tolerance

Double display The areas within the Displayed in

range between the green. upper limit and lower limit

"Default Values and Setting Range" (page 2-25)

Measured value display

red.

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OUTPUT Settings

Chapter

OUTPUT

You can perform processes on the measured value and output it. This section describes the details of the processes.

(Output)

AVERAGE

Averages the measured value (moving-average). Number of measurement times for averaging can be selected from the following options:

2, 4, 8, 16, 32, 64, and 128

* When the scanning width/interval is set to "OFF" in

Common Operations and Function Settings

the displacement mode, average can be selected also from 256, 512, 1024, 2048, and 4096 in

addition to the options above. Select the large number of times if you want to stabilize the measured value by averaging the variations. Select the small number of times if you want to measure at a high speed.

Example when selecting 8 for AVERAGE

Internal data

12 34567 89

Average measurement time

Output data

Sampling cycle

10 11

ABC

Update

cycle

Sampling data

Average the data 1 to 8 and output the data A.

Average the data 2 to 9 and output the data B.

Average the data 3 to 10 and output the data C.

The procedure used to set the [AVERAGE] is explained as follows.

Select [OUTPUT] from the [OUT1] or [OUT2]

screen.

The screen appears for setting the output.

Select [AVERAGE].

Select number of times for averaging by using

the [▲] and [▼] buttons.

Press the [ENTER] button.

The number of measurement times for averaging is fixed.

• The sampling cycle, average measurement

time, and update cycle vary depending on the settings. ( Page 7-13).

Refer to "Response Delay Time" (page 9-6) for

the measurement response time.

Note

• If you select a large number of times for averaging,

the data is stabilized but the response time becomes longer.

• Select 2 for the number of measurement times for

averaging when the measurement mode is set to average hold. If the sampling data obtained in any sampling cycle

•

dips below the light intensity level, that data is not included in the averaging process. For example, when only the sampling data of (#4) is less than the light intensity level, the data from (#1) to (#3) and from (#5) to (#9) (8 data in total) is averaged.

5-8

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HOLD MODE (Measurement mode)

Function of the hold mode

You can select how to output the measured value from the options such as outputting the measured value along with performing the measurement or outputting the maximum or minimum value at a given interval from the continuously changing measured value. The LT-9001 Series has nine types of hold modes as follows.

Normal [NORMAL]

Displays and outputs the measured value as needed.

Auto bottom hold [A.BOTTOM]

Displays and outputs the minimum value that is measured as needed.

Minimum value

Average hold [AVG.H]

Displays and outputs the average value of

Measured value

the measured values in the specified interval.

Sampling time

Bottom hold [BOTTOM]

Displays and outputs the minimum

Measured value

measured value in the specified interval.

Average value

Minimum value

Sampling time

Auto peak hold [A.PEAK]

Displays and outputs the maximum value that is measured as needed.

Auto peak-to-peak hold [A.P-P]

Displays and outputs the maximum and minimum values that are measured as needed.

Peak hold [PEAK]

Displays and outputs the maximum

Maximum value

Measured value

measured value in the specified interval.

Peak-to-peak hold [P-P]

Displays and outputs the maximum and

Measured value

minimum measured values in the specified interval.

Maximum value

Differential

* between maximum and minimum values

Sampling time

*Differential between maximum and minimum values

Sampling time

Chapter

Common Operations and Function Settings

Sample hold [SAMPLE]

Displays and outputs the measured value at the specified moment.

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TIMING input

Sample hold value

[ ] is what is actually indicated on the screen.

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Chapter

OUTPUT Settings

Normal [NORMAL]

Measures continuously, and displays and outputs the measured value as needed.

Measured value

Upper limit of tolerance

Lower limit of tolerance

Common Operations and Function Settings

•

The ON status of each output means that the NPN open-collector output is ON.

•

The ON status of each input means that the input and the COM terminal is shortcircuited.

• The RS-232C output is synchronized with the TIMING input when the "D-MODE" in the environment setting is

set to any option other than OFF. ( Page 8-17)

Refer to "Binary Output" (page 7-10) for details of the binary output.

Reference

• If setting the RESET input to ON when the TIMING input is ON, the judgment standby status is displayed ("- - -

-" is indicated) until the TIMING input becomes OFF.

• The TIMING input and RESET input can be controlled by using the RS-232C. ( Page 8-6)

• The TIMING input and the RESET input can be controlled by using the [HOLD] button and the [ESCAPE]

button respectively. ( Page 5-3)

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Peak hold [PEAK]

Measures the maximum value in the time period (sampling time) specified by the external TIMING input to display/output it.

• Bottom hold [BOTTOM]...................Measures the minimum value in the specified time period (sampling time).

• Peak-to-peak hold [P-P] ..................Measures the differential between the maximum and minimum values in

the specified time period (sampling time).

• Average hold [AVG.H].....................Measures the average value in the specified time period (sampling time).

Measured value

Judgment standby status

Judgment

Chapter

Common Operations and Function Settings

• The sampling time is the time period in which the TIMING input is OFF. The maximum value in the sampling

time right before the TIMING input becomes ON is output.

• In the following cases, the judgment standby status ("- - - -" is indicated) is displayed until the first measured

value is fixed.

When you turn on the power, change the settings, change the program No., input RESE, and input Auto-zero.

• Judgment outputs are output according to the measured value.

• The ON status of each output means that the NPN open-collector output is ON.

• The ON status of each input means that the input and the COM terminal are short-circuited.

• The RS-232C output is synchronized with the timing input when the "D-MODE" in the environment setting is set

to any option other than OFF. ( Page 8-17)

• Refer to "Binary Output" ( page 7-10) for details of the binary output.

• If the TIMING input becomes ON during the reset processing is in progress, the judgment standby status

("- - - -" is indicated) is displayed.

Reference

• The TIMING input and RESET input can be controlled using the RS-232C. ( Page 8-6)

• The TIMING input and the RESET input can be controlled by using the [HOLD] button and the [ESCAPE]

button respectively. ( Page 5-3)

Note

Select 2 for the number of times for averaging if the measurement mode is set to average hold.

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OUTPUT Settings

Auto peak hold [A.PEAK]

Measures continuously, and displays and outputs the measured value as needed.

• Auto bottom hold [A.BOTTOM]..........Displays and outputs the minimum value as needed that is measured

continuously.

• Auto peak-to-peak hold [A.P-P].........Displays and outputs the differential between the maximum and

minimum value as needed that are measured continuously.

Measured value

Common Operations and Function Settings

Judgment standby status

Judgment

• Judgment outputs are output according to the measured value.

• The ON status of each output means that the NPN open-collector output is ON.

• The ON status of each input means that the input and the COM terminal are short-circuited.

• The RS-232C output is synchronized with the timing input when the "D-MODE" in the environment setting is set

to any option other than OFF. ( page 8-17)

Refer to "Binary Output" (page 7-10) for details.

Reference

• If setting the RESET input to ON when the TIMING input is ON, the judgment standby status is displayed ("- - -

-" is indicated) until the TIMING input becomes OFF.

• The TIMING input and RESET input can be controlled using the RS-232C. ( Page 8-6)

• The TIMING input and the RESET input can be controlled by using the [HOLD] button and the [ESCAPE]

button respectively. ( Page 5-3)

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Sample hold [SAMPLE]

Displays and outputs the measured value at the instant of being specified by the external TIMING input.

Measured value

Judgment standby status

Judgment

• Retains and outputs the internal measured value at the time when the TIMING input becomes ON.

• In the following cases, the judgment standby status ("_ _ _ _" is indicated) is displayed until the first measured value is fixed.

When you turn on the power, change the settings, change the program No., input RESET, and input Autozero.

• Judgment outputs are output according to the measured value.

• The ON status of each output means that the NPN open-collector output is ON.

• The ON status of each input means that the input and the COM terminal are short-circuited.

• The RS-232C output is synchronized with the timing input when the "D-MODE" in the environment setting is set to any option other than OFF. ( Page 8-17)

Chapter

Common Operations and Function Settings

Reference

• The TIMING input and RESET input can be controlled using the RS-232C. ( Page 8-6)

• The TIMING input and the RESET input can be controlled by using the [HOLD] button and the [ESCAPE] button respectively. ( Page 5-3)

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OUTPUT Settings

Chapter

The procedure used to set the measurement mode is explained as follows.

Select [OUTPUT] from the [OUT1] or [OUT2]

screen.

The screen appears for setting the output.

Select [MEASUREMENT].

Common Operations and Function Settings

Select the mode by using the [▲] and [▼]

buttons.

Press the [ENTER] button.

The measurement mode is fixed.

OFFSET

OFFSET function

You can add/subtract any offset value to/from the measured value. Specify the positive value when adding and negative value when subtracting.

The procedure used to set the offset is explained as follows.

Select [OUTPUT] from the [OUT1] or [OUT2]

screen.

Select [OFFSET].

Specify the offset value.

Press the [ENTER] button.

The offset value is fixed.

Refer to "Default Values and Setting Range"

(page 2-25) for the setting range and limitation.

Reference

Performing offset adjustment by using Auto-zero

function (Auto Offset function)

If you enable the Auto-zero while measuring the master workpiece, the displayed values are set to those of the master workpiece dimensions (offset values).

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