KEYENCE LT-9001 User Manual

96M12004

Surface Scanning Laser Confocal Displacement Meter

LT-9001 Series

User’s Manual

Introduction

This instruction manual describes the operation and functions of the Surface Scanning Laser Confocal Displacment Meter LT-9001 Series. To ensure safety, performance and the function of the LT-9001 Series, please read this manual carefully. Keep this manual in a safe place for future reference. Be sure that this manual eventually goes to the person who operates this product.

Symbols

These symbols alert you the matters that should be followed to prevent human injury and/or product damage.

DANGER

Failure to follow instructions may lead to death or serious injury.

WARNING

Failure to follow instructions may lead to injury.

CAUTION

Failure to follow instructions may lead to product damage.

Note

Provides additional information on proper operation.

Reference

Provides advanced and useful information for operation.

The contents of this manual pertain to operating the LT-9501/9010M or LT9501SO (5652)/LT-9030M. If you are using the LT-9001/LT-9010 or LT-9001SO (5653)/LT-9030, skip the articles on the microscope function. The profile mode cannot be used in the LT-9501SO (5652)/LT-9030 or LT9001SO (5653)LT-9030M.

Safety Precautions

General Precautions

• At startup and during operation, be sure to monitor the functions and performance of the LT-9001 Series.

• We recommend that you take substantial safety measures to avoid any damage in the event a problem occurs.

• Do not open or modify the LT-9001 Series or use it in any way other than described in the specifications.

• When the LT-9001 Series is used in combination with other devices, functions and performance may be degraded, depending on operating conditions and the surrounding environment.

• Do not use the LT-Series for the purpose of protecting the human body and lives.

• Do not change the temperature around the LT-Series including peripheral devices. Condensation may lead to malfunction.

Follow the safety precautions below to ensure operator safety.

• Apply the voltage correctly. Failure to do so may cause fire, electric shock or malfunction.

• Be sure to connect the earth ground terminal on the adaptor inlet of the controller. Failure to do so may cause electric shock and malfunction.

• Do not open or modify the unit. It may cause a fire or electric shock.

Handling the abnormalities

Turn off the power immediately in the following cases. Using the unit in an abnormal condition could cause fire, electric shock, or accident. Contact your nearest KEYENCE office for repair.

• If liquid including water, chemicals or debris enters the unit

• If the unit drops or the case is damaged.

• If abnormal smoke or smell occurs.

Follow the safety precautions below to ensure operator safety.

• Be sure to turn the power off when you plug/unplug the cable which connects the unit and the devices connected to the unit. Otherwise damage could result.

• Do not turn the power off while setting up the unit. Part or all of setting data may be lost.

• Do not block the vent holes on the unit and peripheral devices. Otherwise, excessive heat can build up and cause failure.

Installation environment

To use the LT-9001 Series correctly and safely, avoid installing it in the following locations:

• Locations that are humid, dusty or poorly ventilated.

• Locations with a high temperature such as a place exposed to direct sunlight

• Locations where there are flammable or corrosive gases.

• Locations where the unit may be directly subjected to vibration or impact.

• Location where water, oil or chemicals may splash onto the unit.

• Locations where the static electricity is easily generated.

96M12004E LT-9001-IM

Safety Precautions

Corrective action for noise

Do not install the LT-9001 Series near power sources or high tension cables, otherwise noise may cause the LT-9001 Series to malfunction. Take corrective action for noise by using noise filters, by separating these cables, by installing insulations to the controller and to the measuring unit.

Laser safety precautions

The LT-9001 is classified as a class1 laser product by IEC60825-1. (FDA class IIa)

• Caution - use of controls or adjustments or performance of procedures other than those specified herein may result in hazardous radiation exposure.

• Do not stare into the laser beam directly for a long time.

• Do not disassemble the LT-9001 Series.

The Influence of ambient temperature

A change in ambient temperature may cause measurement fluctuations. Be sure to keep the temperature stabilized. When the ambient temperature changes 10 °C, it takes 60 minutes to equalize the distribution of the inside temperature.

Warming up

Before using the LT-9001 Series, wait approximately 60 minutes after the power is turned on. Otherwise, the measured value may gradually fluctuate because the circuit is not stable immediately after the power is turned on.

The Influence of dust or dirt

The measurement may fluctuate due to dirt, dust or fluid such as water or oil in the following cases:

• On the LT-9001 optics: Blow the dirt off with clean air. If dirt persists, wipe the glass surface gently using soft cloth soaked with alcohol.

•On the target surface: Blow the dirt off with clean air or wipe it off.

• Airborne: Build a protective enclosure with an air purge system around the measurement area.

Note

Influence of vibration

When the measurement target is vibrating, the measured value may fluctuate. In this case, increase the number or times the measurement value is averaged to achieve more accurate measurements.

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Measurement target

The measured value may fluctuate when the shapes or surfaces of targets vary. In this case, use a known target and perform appropriate correction with the calibration function.

Scan straightness

The scan orbit of the LT-9001 Series makes a slight arc. Therefore, the measured value may fluctuate when the target is slanted.

Handling

Do not wipe with a wet cloth, benzene, or thinner. Doing so could change the color or shape of the lens. If the lens has a lot of dirt on it, wipe it off with a cloth moistened with a mild detergent, then wipe with a soft dry cloth.

Effect of atmospheric motions

Slow atmospheric motions may affect the measurement resulting in the measured value fluctuation. In such a case, take the following countermeasures.

• Enclose the measurement portion with the appropriate enclosure.

• Agitate the air between the measurement point and the workpiece strongly with the fan.

Best Management Practice for Perchlorate Materials - California only

When you sell, manufacture and/or waste the products containing perchlorate material in California, the following statement must appear on the exterior of all outer shipping packages and on consumer packages, based on California Code of Regulations.

E LT-9001-IM

"Perchlorate Material – special handling may apply, See www.dtsc.ca.gov/hazardouswaste/perchlorate."

Note: Alternative option is to indicate this statement on your MSDS or manual accompanying with each product.

This product includes a CR coin type cell containing perchlorate material. If you ship this product (or your product including this product) to California, you must ensure to comply with this regulation.

Precaution on CE Marking

It is confirmed that the LT-9001 Series satisfies the requirement of the EU

Directives when the following conditions are fulfilled. Therefore, users must fulfill

the following conditions when the LT-9001 Series is going to be used in EU

Member States.

Precautions

Precautions on EMC Directive

• Applicable standard (EMI) EN61326-1, Class A

• Applicable standard (EMS) EN61326-1

• Wind the following ferrite core twice on the cable at the position within 50 mm

from the analog output that is on the rear panel of the controller.

Model: ZCAT3035-1330 (Product of TDK)

• Wind the following ferrite core twice on the cable at the position within 200 mm

from the VIDEO output that is on the rear panel of the controller.

Model: ZCAT2035-0930 (Product of TDK)

Precautions on Low Voltage Directive

• Applicable standard EN61010-1

• Overvoltage category II

• Pollution degree 2

• The LT-9001 Series is classified as a class 1 laser product.

• When the LT-9001 Series is used in EU Member States, the power supply cable

conforming to the relevant EU standards and obtaining the certification by a

third-party certification organization, and its plug shape fitting to outlets of

respective countries must be used.

• Because the LT-9001 Series is designed as class I equipment, be sure to

connect the protective earthing terminal located in the inlet to the protective

earthing conductor in the building when installing it.

• When replacing the fuse, be sure to use the fuse that satisfies the following

rating and is approved by certification organization based on the appropriate

EU standard.

Fuse rating 250 V, 3.15 A, Time lag fuse

EN60825-1 Laser Class 1

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Organization of this Manual

Chapter

Appendices

Before Use

Basic Operations

Operations and Function Settings in the Displacement Mode

Operations and Function Settings in the Profile Mode

Common Operations and Function Settings

Environment Settings

I/O Terminal

RS-232C

Specifications

Index

Describes the cautions for use and the required preparation before use.

Describes how to use the remote control console and the basic operations of the LT-9001 Series.

Describes the operations and functions in the displacement mode.

Describes the operations and functions in the profile mode.

Describes operations and functions common to the displacement mode and the profile mode.

Describes the items for the basic settings and the setting procedures related to the overall unit that are required for operation.

Describes the specifications and timing chart of each I/O terminal.

Describes each function and setting method of the RS-232C interface.

Provides specifications, characteristics, and outer dimensions.

Describes the troubleshooting methods, contents of the error messages and optional products.

Chapter

Appendices

E LT-9001-IM

Safety Precautions......................................................1

General Precautions............................................1

WARNING............................................................1

CAUTION.............................................................1

Note .....................................................................3

Precaution on CE Marking..........................................4

Precautions..........................................................4

Organization of this Manual........................................5

Chapter 1 Before Use

Outline of the LT-9001 Series ..................................1-1

System Configuration ..............................................1-2

Checking the Package Contents.............................1-3

LT-9501 ............................................................1-3

LT-9010M .........................................................1-3

LT-C2/C10 ........................................................1-3

Identifying Part Names and Functions ...................1-4

Controller..........................................................1-4

Measuring Unit .................................................1-5

Remote Control Console ..................................1-6

Mounting and Connecting Parts..............................1-7

Mounting the Measuring Unit ...........................1-7

Installation of the Controller..............................1-8

Connection .......................................................1-8

Chapter 2 Basic Operations

Outline of Basic Operations ....................................2-1

Displacement Mode and Profile Mode....................2-2

Displacement Mode .........................................2-2

Profile Mode .....................................................2-2

Outline of Measurement and Settings ....................2-3

Run Mode.........................................................2-4

Program Mode .................................................2-5

Program Function.............................................2-8

Flow of Measurement .......................................2-9

Operations.............................................................2-10

How to Use the [ENTER] Button.....................2-10

Selecting an Item ...........................................2-11

Entering a Value .............................................2-11

Selection Method of the Run Mode .......................2-12

Operational Flow ............................................2-12

Using the Displacement Mode..............................2-13

Selecting the Displacement Mode ................2-13

Adjusting the Distance Between the Measuring

Unit and the Measurement Target .................2-14

Setting the Scanning Width/interval ..............2-14

Setting the Light Intensity Level ....................2-15

Measuring the Displacement ........................2-15

Using the Profile Mode ..........................................2-16

Selecting the Profile Mode ............................2-16

Adjusting the Distance Between the Measuring

Unit and the Measurement Target .................2-17

Setting the Scanning Width/interval ..............2-17

Setting the Upper and Lower Limits Display..2-18

Setting the Area..............................................2-18

Measuring the Level Differences ...................2-19

Basic Operations that Stabilize Measurement .....2-20

Changing the Scanning Width and the

FINE Mode .....................................................2-20

Changing the Light Intensity Level.................2-20

Resetting the Device to the Factory Settings ........2-22

Default Values and Settings Range (LT-9010 (M))....

Displacement Mode .......................................2-23

Profile Mode ...................................................2-24

Default Values and Setting Range ................2-25

Default Values and Settings Range (LT-9030 (M))

Displacement Mode .......................................2-26

Default Values and Setting Range ................2-27

2-23

....2-26

Chapter 3 Operations and Function

Settings in the Displacement Mode

Outline of Displacement Mode................................3-1

What is displacement mode?...........................3-1

Display Screens ......................................................3-2

Identifying Part Names and Functions of Screens ..3-3

Measurement Screen .......................................3-3

Light Intensity Screen.......................................3-4

Measurement Screen ..............................................3-5

Display of Measured Value ..............................3-5

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Display of the Trend Graph..............................3-5

Light Intensity Screen..............................................3-7

Display of Measured Values ............................3-7

Display of Received Light Intensity Graph.......3-7

Setting the Light Intensity Level .......................3-8

Setting the Measurement Target Surface ........3-8

Pause Screen ..........................................................3-9

Setting the Pause Screen ................................3-9

OUTPUT Settings ..................................................3-10

Functions of the OUTPUT Settings.................3-10

Basic Settings........................................................3-15

SCAN..............................................................3-15

DARK ALARM ................................................3-17

MASK .............................................................3-18

OPTIONAL Settings...............................................3-19

CORRECT (Auto slant correction) .............3-19

Chapter 4 Operations and Function

Settings in the Profile Mode

Outline of Profile Mode ............................................4-1

What is profile mode?.......................................4-1

Types of Screens.....................................................4-2

Identifying Part Names and Functions of Screens ..4-3

Measurement Screen .......................................4-3

Light Intensity Screen.......................................4-4

Measurement Screen ..............................................4-5

Display of Measured Value ..............................4-5

Display of Profile Waveform .............................4-6

Light Intensity Screen..............................................4-8

Display of Measured Value ..............................4-8

Display of Received Light Intensity Graph.......4-8

Setting the Light Intensity Level .......................4-8

Changing the Ranges of the Areas..................4-9

Pause Screen ........................................................4-10

Setting the Pause Screen...............................4-10

OUTPUT Settings ..................................................4-12

Functions of the OUTPUT Settings.................4-12

Basic Settings........................................................4-13

AREA ..............................................................4-13

SCAN..............................................................4-14

DARK ALARM ................................................4-16

SMOOTH (Smoothing) ...................................4-17

OPTIONAL Settings...............................................4-18

CORRECT (Auto Slant Correction) ............4-18

PROFILE OUT (Profile Output) .......................4-19

Chapter 5 Common Operations and

Function Settings

Outline of Common Operations and

Function Settings.....................................................5-1

Outline of Operations and Functions.......................5-2

Microscope Function...............................................5-2

Hold Function ..........................................................5-3

Auto-zero Function ..................................................5-4

Keylock Function .....................................................5-5

Program Change .....................................................5-6

OUTPUT Settings ....................................................5-7

LIMITS (Tolerance)...........................................5-7

OUTPUT (Output).............................................5-8

CALIB (Calibration) ........................................5-16

OPTIONAL Settings...............................................5-18

DISPLAY.........................................................5-18

I/O...................................................................5-20

GAIN (Sensitivity) ...........................................5-20

Chapter 6 Environment Settings

Setting up the Basic Settings for the Overall Unit ...6-1

Items to be Set in the Environment Setting .............6-2

Environment Setting Items ...............................6-2

List of Default Values........................................6-2

How to Set up Environment Settings .......................6-4

How to Set up Environment Settings ...............6-4

RS-232C Interface............................................6-5

Program............................................................6-6

Beep Sound .....................................................6-7

Interface Language..........................................6-7

Coefficient ........................................................6-7

Chapter 7 I/O Terminal

Controlling and Outputting from the I/O Terminal ...7-1

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Table of Contents

Identifying Names and Functions of

the I/O Terminal .......................................................7-2

Terminal Block..................................................7-2

Control I/O ........................................................7-3

VIDEO Output ..................................................7-5

Functions of the I/O Signals .............................7-5

Electrical Specifications ..................................7-8

Timing Chart ............................................................7-9

Normal Measurement

(When Profile Output is OFF) ...........................7-9

When Profile Output is ON (LT-9010 (M) only)

Timing Details (LT-9010 (M))..........................7-13

Timing Details (LT-9030 (M))..........................7-14

Timing Details

(Common to the LT-9001 Series) ...................7-15

....7-11

Chapter 8 RS-232C

Connecting to External Devices via RS-232C .........8-1

Specifications ..........................................................8-2

Pin Layout ........................................................8-2

Communication Specifications.........................8-2

Connecting to External Devices.......................8-2

Outputting Measured Values and

Changing Settings by Using Commands ...............8-3

Environment Settings Parameters ....................8-3

Outline of Command Format ............................8-3

Measurement Control Command and

Measurement Operation Command Formats...8-4

Command Details.............................................8-5

Change Parameter Command Format .............8-8

Command Details.............................................8-9

Check Parameter Command Format .............8-15

Timing Chart...................................................8-16

ASCII Code Table (Reference) ......................8-16

Outputting Measured Values by Using External

Synchronization .....................................................8-17

Environment Settings Parameters ..................8-17

Output Method ...............................................8-17

Timing Chart...................................................8-18

Output format .................................................8-18

Chapter 9 Specifications

Specifications of the LT-9001 Series.......................9-1

Specifications ..........................................................9-2

Specifications of the Controller ........................9-2

Specifications of the Measuring Unit ...............9-3

Status Table .....................................................9-4

Specifications of the cable between

measuring unit and controller ..........................9-5

Response Delay Time ....................................9-6

Display Update Cycle ......................................9-6

Outside Dimensions .........................................9-7

Appendices

Troubleshooting ......................................................A-2

Error Messages.......................................................A-4

Optional Product List ..............................................A-5

Parameter Memo.....................................................A-6

Displacement mode.........................................A-6

Profile mode.....................................................A-8

Environment Setting Parameter Memo .................A-10

Index .....................................................................A-11

E LT-9001-IM

Outline of the LT-9001

Chapter

Before Use

Series

The LT-9001 Series is a double scan high-

accuracy sensor that employs a lens drive and a

tuning fork in the confocal displacement principle.

The LT-9001 Series can measure not only a highly

accurate displacement, but also the slanting

degree, the thickness of transparent object and

the shape.

This chapter describes the configuration of the

LT-9001 Series, cautions and the required

preparation before use.

System Configuration ..............................................1-2

Checking the Package Contents .............................1-3

Identifying Part Names and Functions.....................1-4

Mounting and Connecting Parts ..............................1-7

Chapter

Before Use

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1-1

System Configuration

control output and the measured

Chapter

The LT-9001 Series can be used for various purposes in combination with commercially available devices.

Before Use

Enables control and import of the measured value from the RS232C or the parallel I/O board.

Programmable controller

Enables timing control of the measurement and the switching of program No. as well as the

value import.

Recorder

Records the measurement result.

Indicator light/Buzzer

Produces an alarm sound by an output of the judgement.

Photoelectric/Proximity sensor

Transmits a signal to the TIMING input when the sensor detects a target.

LT-9001 Series

Monitor

CA-MN80

Controller

LT-9501

Measuring unit

LT-9010M

Stage system

The 2D shape or the 3D shape can be detected in combination with a manual or auto stage system.

1-2

Video printer

Prints the image of an LCD monitor.

E LT-9001-IM

Checking the Package Contents

This

product

is subje ct to th e e xport

regulations in

Japan. When you need to e xport this pr odu ct

from

your country, be sure to c

heck if thi

s pr

oduct is

ject to the e xport regulations w

ithin your c

ountry

not upon your own re sponsibility. If r

equired, please

take appropriate action for g aining app

roval f

or exp

ort

by the government or responsib le organization within

your country.

The LT-9001 Series consists of the following models. Check if the parts and equipment listed below are

included in the package of the models you purchased before using the unit.

LT-9501

Controller Remote control console Monitor connecting cable

(LT-9501) ×1 (Cable length 3 m) ×1 (PIN-to-PIN cable: 2 m) ×1 (2 m) ×1

User's Manual (This manual) ×1

96M1086

Doub

le Scan

High-Accuracy Laser Sensor

LT-9001 Serie

User’s Manual

Read this manual before using the system in order to achieve maximum performance.

Keep this manual in a safe place for future reference.

Monitor power supply cable

LT-9010M

Chapter

Before Use

Measuring Unit Hexagon socket head bolt Cautions for export

(LT-9010M) ×1 (M4 × 40 washer faced) ×3 (A6) ×1

LT-C2/C10

Cable between the controller and the measuring unit ×1

LT-C2: 2 m cable LT-C10: 10 m cable Up to three cables below the total length of 20 m can be connected.

* We have thoroughly inspected the package contents before shipment. However, in the event of defective or

broken items, contact your nearest KEYENCE office (Address listed in the end of this manual).

* The contents included in the LT-9001/LT-9010 are the same as the ones in the LT-9501/LT-9010M

respectively.

* The sensor head contained in the LT-9030M and LT-9030 is the LT-9030 and LT-9030, respectively. All of the

other contents included in the LT-9030M or LT-9030 are the same as those included in the LT-9010M.

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1-3

Identifying Part Names and Functions

Chapter

Before Use

This section describes the names and functions of the controller, measuring

unit, and remote control console.

Controller

Front

Power LED

Lights up when the power is ON.

Laser LED

Lights up during laser emission.

Back

1 5

1-4

Measuring unit connector

The cable between the controller and the measuring unit is connected here.

Connector terminals (Control I/O)

Outputs binary data and tolerance judgment value, and switches the program No.

Remote control console connector

The supplied remote control console is connected here.

RS-232C connector

The RS-232C communication cable is connected here.

Video composite output terminal

The external monitor is connected here.

Terminal block

Used for power supply, analog output, and input of control signal to the monitor (CA-MN80).

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AC power inlet

Supplies power to the LT-9001 Series.

Power switch

Turns on/off the power.

Measuring Unit

Sensor unit (Emitter/Receiver)

Emits and receives a laser beam for measurement. It is protected with a cover glass.

Mounting holes

The measuring unit is mounted with the supplied hexagon socket head bolt.

Chapter

Before Use

E LT-9001-IM

Connecting cable

The cable between the controller and the measuring unit can be connected to this cable, or the controller can be connected directly.

Laser emission LED

Lights up during laser emission.

1-5

Identifying Part Names and Functions

Chapter

Before Use

Remote Control Console

[ENTER] button

Select the items by tilting the [ENTER] button up, down, right or left. Fix the selected item by pressing the button straight down.

Refer to "How to Use the [ENTER] button" (page 2-10).

[PROG/RUN] switch

Switch the run/program modes by sliding down the switch. Each sliding movement switches the modes.

[HOLD] button

Press the [HOLD] button to retain the measured value. This button has the same function with the TIMING input terminal on the back of the controller.

Refer to "Hold Function" (page 5-3).

3 4 5 6

1-6

[ESCAPE] button

Press the [ESCAPE] settings. Press this button to exit or abort the setting item. This button has the same function with the RESET input terminal on the back of the controller in the run mode.

[PROGRAM No.] button

Press the [PROGRAM No.] button to switch the display to the program No. selection screen.

[PAUSE] button

Press the [PAUSE] button to stop updating the graph display while in the measurement screen, and to switch to the pause screen.

[SCREEN] button

During measurement: Press the [SCREEN] button to switch the measurement screen to the light intensity screen. During setting: Press the [SCREEN] button to switch the selection status.

[ZERO] button

Press the [ZERO] button to use the Auto-zero function. This button has the same function with the ZERO input terminal on the back of the controller.

Refer to "Auto-zero Function" (page 5-4).

button

to return to the previous display or operation during

E LT-9001-IM

Mounting and Connecting Parts

This section describes how to mount the controller and the measuring unit.

Mounting the Measuring Unit

Adjust the distance between the measuring unit and the measurement target and fix the measuring unit with screws in the three installation holes. The measurement range is shown in the figure below.

• Measurement range • How to mount the unit

■ LT-9010 (M)

Installation hole

Reference distance

6mm

0.3mm

Reference position

0mm

Measurement range

0.3mm

Chapter

Before Use

Note

The reference distance may vary within the range of 0.5 mm according to the manufacturing variation of individual measuring units.

■ LT-9030 (M)

Installation hole

Reference distance

30mm

Reference position

0mm

Note

1.0mm

Measurement range

1.0mm

The reference distance may vary within the range of 2.0 mm according to the manufacturing variation of individual measuring units.

E LT-9001-IM

1-7

Mounting and Connecting Parts

Chapter

Before Use

Installation of the Controller

Use the controller on a level place.

Note

• Keep enough room around the controller for ventilation.

• When the temperature in the controlling system unit rise over 35 °C, decrease the ambient temperature no more than 35 °C by cooling it down with cool air or by make room around the system.

• Do not use the controller on other devices.

Connection

Connect the measuring unit, the controller, the remote control console, the

monitor and the power supply with cables.

Connecting to

LT-9501

24 V DC terminal

AC cable

Power supply cable for the monitor

Monitor

CA-MN80

Monitor connecting cable

1-8

Cable between the controller and the measuring unit

Remote control console

LT-9010M

Note

• Turn off the power supply of the controller before connecting/disconnecting cables. Failure to do so may cause malfunction.

• Eusure correct orientation of all connectors. Otherwise the pins may break and may lead to system breakdown.

• Before connecting the monitor power cable, ensure the correct polarity of the monitor power terminals. Failure to do so may cause malfunction.

• The 24 V DC terminal on the terminal block is a dedicated power supply unit to the monitor specified by KEYENCE only. This supply may not be used to power any additonal hardware.

E LT-9001-IM

Outline of Basic

Chapter

Basic Operations

Operations

The LT-9001 Series performs settings concerning

the measurement method or displayed

information while in the program mode, and

displays the measurement result value or graph

while in the measurement mode.

You can also switch between displacement mode

and profile mode depending on the target.

This chapter describes the outlines of program

mode and run mode, and the procedures to

operate the LT-9001 Series in displacement mode

and profile mode using the remote control

console.

Displacement Mode and Profile Mode.....................2-2

Outline of Measurement and Settings .....................2-3

Operations .............................................................2-10

Selection Method of the Run Mode .......................2-12

Using the Displacement Mode...............................2-13

Using the Profile Mode ..........................................2-16

Basic Operations that Stabilize Measurement.......2-20

Resetting the Devices to the Factory Settings.......2-22

Default Value and Settings Range ........................2-23

Chapter

Basic Operations

* All the measurement screens used in this User's

Manual are those for the LT-9010(M). Some screens are different when you are using the LT-9030(M).

E LT-9001-IM

2-1

Chapter

Basic Operations

Displacement Mode and Profile Mode

You can select either displacement mode or profile mode in the LT-9010(M).

(Only displacement mode is available in the LT-9030(M).

Displacement Mode

The displacement mode enables you to measure a targed in four ways such as displacement, transparent object thickness, slant, and Δslant of the target by measuring the changes in the distance from the reference point.

Profile Mode

The profile mode enables you to measure the target shape by using the measured value of each scanned point. You can also measure the average value, maximum value, minimum value, differential between the maximum and the minimum value, and area by specifying two different areas on the target.

Mesuring unit

Scanning width

Scanning interval

Measurement Target

Example of the measurement screen in the

displacement mode

A change in the distance from the reference point can be measured.

DISTANCE

The distance change from the reference distance on the measurement target is measured.

SLANT (LT-9010 (M) only)

The degree between the reference surface and the target surface is measured.

Measuring unit

Scanning width

Scanning interval

Measurement Target

Example of the measurement screen in the profile

mode

The profile of a target can be displayed in a waveform.

Example of setting areas

The following features can be selected and measured within the specified Area 1 and Area 2.

Distance

Measuring unit

SLANT (LT-9010 (M) only)

The relative degree between the target and a transparent target is measured.

Measuring unit

Transparent object

Measurement Target

change from the reference point

Measurement Target

Relative slant

2-2

Measuring unit

Measurement Target

THICK (Transparent object thickness)

The thickness of a transparent object is measured.

Measuring unit

Measurement Target (transparent object)

Degree in relation to the reference surface.

Thickness of the transparent object

Area setting range

MAX (maximum value)

AVG (average value)

MIN (minimum value)

DIFF (differential value)

AREA (amount of space)

E LT-9001-IM

Outline of Measurement and Settings

The LT-9001 Series has a run mode that performs a measurement, and a program mode that sets the measurement conditions. Measuring various targets is possible by combining several measurement conditions.

Run mode screen

DISTANCE (Displacement mode)

Measurement screen

Light intensity screen

Pause screen

Program mode screen

Chapter

Basic Operations

PROFILE (Profile mode)

Measurement screen

Light intensity screen

Pause screen

The run mode and the

program mode are switched every time the [PROG/RUN] switch is pushed down.

E LT-9001-IM

2-3

Outline of Measurement and Settings

Run Mode

Chapter

Basic Operations

The run mode displays the measurement screen, the light intensity screen, and the pause screen interchangeably.

MEASUREMENT

INT (Light intensity)

The measured value and the graph can be displayed.

Displacement mode Profile mode

Displays the temporal change of the measured value. Chapter 3 "Measurement Screen" (page 3-5)

Displays the profile of the target. Chapter 4 "Measurement Screen" (page 4-5)

The measured value and the graph of the amount of light the measurement surface receives can be displayed.

Displacement mode Profile mode

Pause

Displays up to four peaks of light intensity. Changes the light intensity level. Chapter 3 "Light Intensity Screen" (page 3-7)

Performs correction or measurement while suspending the update of

Displays the distribution of light intensity in reference with the scanning width. Changes the light intensity level. Chapter 4 "Light Intensity Screen" (page 4-8)

the displayed graph.

Displacement mode Profile mode

Chapter 3 "Pause Screen" (page 3-9) Chapter 4 "Pause Screen" (page 4-10)

2-4

E LT-9001-IM

Program Mode

Four types of settings (OUTPUT settings, BASIC settings, OPTIONAL settings, and Environment settings) can be performed in the program mode according to the target to measure.

OUTPUT settings

Performs settings for OUT1 and OUT2 respectively.

LIMITS (Tolerance)

OUTPUT

Sets the upper and lower limits of the tolerance.

Displacement mode Profile modeSetting item

UPPER LIMIT

LOWER LIMIT

Chapter 5 "OUT Settings" - "LIMITS" (page 5-7)

Sets the measurement method and the processing of the measured data.

Displacement mode Profile modeSetting item

MEASURMENT

SELECT SURFACE

AVERAGE HOLD MODE OFFSET ANALOG output

Chapter 3 "OUT Settings" "Measurement" (page 3-10)

Chapter 3 "OUT Settings" "SELECT SURFACE" (page 3-12)

Chapter 5 "OUT Settings" - "AVERAGE" (page 5-8) Chapter 5 "OUT Settings" - "HOLD MODE" (page 5-9) Chapter 5 "OUT Settings" - "OFFSET" (page 5-14) Chapter 5 "OUT Settings" - "ANALOG output" (page 5-15)

Chapter 4 "OUT Settings" "Measurement" (page 4-12)

Chapter

Basic Operations

CALIB (Calibration)

Calibrates the error caused by slant or refractive.

Displacement mode Profile modeSetting item

Measured value

and

calibrated value

Chapter 5 "OUTPUT Settings" - "CALIB" (page 5-16)

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2-5

Chapter

Basic Operations

Outline of Measurement and Settings

BASIC settings

Performs settings for the preprocessing common to both OUT1 and OUT2.

AREA

Performs settings for the profile measurement method.

Displacement mode Profile modeSetting item

AREA1

AREA2

Chapter 4 "BASIC Settings" "AREA" (page 4-13)

SCAN

DARK

MASK

SMOOTH

Performs settings for the swing width of a spot.

Setting item

SCAN WIDTH

SCAN CENTER (LT-9010 only)

FINE MODE

Displacement mode Profile mode

Chapter 3 "BASIC Settings" "Scan width/interval" (page 3-15)

Chapter 3 "BASIC Settings" "Scan center" (page 3-16)

Chapter 4 "BASIC Settings" "Scan width/interval" (page 4-14)

Chapter 4 "BASIC Settings" "Scan center" (page 4-15)

Chapter 4 "BASIC Settings" "FINE mode" (page 4-15)

Performs settings for the processing for the case that the light intensity is lower than the setting range.

Displacement mode Profile modeSetting item

DARKOUT

SETTING RANGE

Chapter 3 "BASIC Settings" "DARK ALARM" (page 3-17)

Chapter 4 "BASIC Settings" "DARK ALARM" (page 4-16)

Performs settings for the range to be excluded from the measurement.

Displacement mode Profile modeSetting item

MASK

SETTING RANGE

Chapter 3 "BASIC Settings" "MASK" (page 3-18)

Performs settings for the functions that stabilize the profile waveform.

Displacement mode Profile modeSetting item

SMOOTHING

AVERAGING

Chapter 4 "BASIC Settings" "SMOOTH" (page 4-17)

2-6

MODE

Toggles between the displacement mode and the profile mode.

Profile modeSetting item

MODE

Displacement mode

Chapter 2 "Selection Method of the Run Mode" (page 2-12)

E LT-9001-IM

OPTIONAL settings

Perform settings for the additional functions common to both OUT1 and OUT2.

SLANT

Performs settings for the automatic slant correction on the target. (LT-9010 only)

Setting item

SLANT ADJ AUTO SLANT COR

Displacement mode Profile mode

Chapter 3 "OPTIONAL Settings"

- "SLANT" (page 3-19)

Chapter 4 "OPTIONAL Settings"

- "SLANT" (page 4-18)

Chapter

Basic Operations

DISPLAY

PROF OUT

I/O

Performs settings for the measured value display.

Setting item

CAMERA IMAGE FOCUS

GRAPH DISPLAY

SCROLL

DIGITS DISPLAY UNIT

Displacement mode Profile mode

Chapter 5 "OPTIONAL Settings" - "CAMERA IMAGE" (page 5-18) Chapter 5 "OPTIONAL Settings" - "FOCUS" (page 5-18)

Chapter 5 "OPTIONAL Settings" - "GRAPH DISPLAY" (page 5-18)

Chapter 5 "OPTIONAL Settings"

- "SCROLL" (page 5-18)

Chapter 5 "OPTIONAL Settings" - "DIGITS" (page 5-18) Chapter 5 "OPTIONAL Settings" - "DISPLAY UNIT" (page 5-19)

Performs settings to output the waveform data of the target shape.

Setting item

PROF OUT

Displacement mode Profile mode

Chapter 4 "OPTIONAL Settings"

- "PROFILE" (page 4-19)

Performs settings for the control I/O.

Setting item

I/O

Displacement mode Profile mode

Chapter 5 "OPTIONAL Settings" - "I/O" (page 5-20)

GAIN

E LT-9001-IM

Performs settings for the sensitivity toward light intensity to be received.

Displacement mode Profile modeSetting item

GAIN

Chapter 5 "OPTIONAL Settings" - "GAIN" (page 5-20)

2-7

Outline of Measurement and Settings

Chapter

Basic Operations

Environment settings

Performs basic settings that are necessary in operating the LT-9001 Series.

1 RS-232C

Performs settings for the communication specifications of the RS-232C interface.

2 Program operations

Performs settings for the program number switching method, copying program settings, and resetting the program to default.

3 Others

Performs settings for the beep sound, user interface language, and span of the measuring unit.

Program Function

Eight programs can be toggled among program

numbers 0 to 7 in the LT-9001 Series.

You can register a set of parameters as a program

according to the run mode or the measurement

target.

The set parameters can easily be changed if

calling up the desired program as needed.

Program No.

2-8

<AUTO-ZERO parameter>

Reference

Refer to "Program Change" (page 5-6) for a

program switching method.

Note

Environment settings are not saved.

E LT-9001-IM

Flow of Measurement

The LT-9001 Series can display and output the measured value of OUT1 and OUT2.

Displacement mode

OUT1

Measured value processing

CALIB

AVERAGE

HOLD MODE

AUTO-ZERO

OFFSET

Measured value processing

CALIB

AVERAGE

HOLD MODE

AUTO-ZERO

OFFSET

Output

I/O

Input

Output

I/O

Input

Basic/Optional

Measurement condition

• INT parameter

• SCAN

• DARK

• SMOOTH CORRECT

•

Profile mode

Measurement

• DISTANCE

• SLANT

• ΔSLANT

• THICKNESS

Measurement

• DISTANCE

• SLANT

• THICKNESS

Select Surface

• MAX

• M1

• M2

• +4P to +1P

• –1P to –4P

OUT2

Select Surface

• MAX

• M1

• M2

• +4P to +1P

• –1P to –4P

I/O

Measured value

Judgment output (LIMITS)

Analog output

Binary output

RS-232C

TIMING

RESET

ZERO

Chapter

Basic Operations

Basic/Optional

Measurement condition

• INT parameter

• SCAN

• DARK

• SMOOTH

CORRECT

•

E LT-9001-IM

AREA1 (A1)

AREA

condition

• AREA range

• AVG

• MAX

• MIN

• DIFF

AREA2 (A2)

AREA

condition

• AREA range

• AVG

• MAX

• MIN

• DIFF

• AREA

OUT1

Select measurement

• A1

• A2

• A1–A2

• A1+A2

OUT2

Select measurement

• A1

• A2

• A1–A2

• A1+A2

Measured value processing

CALIB

AVERAGE

HOLD MODE

AUTO-ZERO

OFFSET

Measured value processing

CALIB

AVERAGE

HOLD MODE

AUTO-ZERO

OFFSET

Output

I/O

Input

Output

I/O

Input

I/O

Measured value

Judgment output (LIMITS)

Analog output

Binary output

RS-232C

TIMING

RESET

ZERO

2-9

Operations

The LT-9001 Series is operated using the remote control console.

Chapter

Basic Operations

How to Use the [ENTER] Button

Pressing the button straight down

• For selecting a menu item

• For fixing a setting

Press

Tilting the button up, down, left or right

The button moves up, down, left and right. This is used to perform the following operations.

• Moving to another item

• Entering a value such as a tolerance

[ ] and [ ] buttons

Moves upward

Moves downward

[t] and [s] buttons

Moves to the left

Moves to the right

2-10

Reference

The operation to tilt the [ENTER] button up or down is described as [▲] or [▼] button in this manual. The operation to tilt the [ENTER] button left or right is described as [t] or [s] button.

E LT-9001-IM

Selecting an Item

Entering a Value

The procedure used to select or to enter items/values such as parameters is explained as follows.

Place the cursor on the item you want to set

by using the [▲], [▼], [t] and [s] buttons.

Press the [ENTER] button.

The item on which the cursor was placed at step 1 is selected.

Repeat step 1 and 2 to change the selected

item or the parameter.

When you want to cancel the operation

If you press the [ESCAPE] button on the remote control console, the cursor moves to the item selected immediately before.

The procedure used to enter a value such as the tolerance is explained as follows.

Select the item whose value is to be entered.

Specify the digit of the entering value with the

[t] and [s] buttons.

Specify the value that you want to enter with

the [▲] and [▼] buttons.

Press the [ENTER] button after changing the

value.

The specified value is fixed.

When you want to cancel the changed value

Press the [ESCAPE] button before pressing the [ENTER] button in step 3 above.

Chapter

Basic Operations

E LT-9001-IM

Reference

If the [ZERO] button is pressed while changing the value, the value can be set to zero.

2-11

Selection Method of the Run Mode

Chapter

Basic Operations

Select either the displacement mode or the profile

mode according to the measurement required.

(Only displacement mode is available in the LT-

9030 (M).

Operational Flow

The operational flow in selecting the displacement mode or the profile mode is as follows.

5, 6 2

Turn on the power of the controller.

Select [OK] with the [▲] and [▼] buttons and

press the [ENTER] button.

The mode is switched to the selected run mode.

Slide down the [PROG/RUN] switch on the

remote control console to display the run

mode screen.

Note

All parameters are reset to the default value if displacement mode/profile mode is changed.

Slide the [PROG/RUN] switch downward on

the remote control console to display the

program mode screen.

Select [BASIC] with the [▲] and [▼] buttons

and press the [ENTER] button.

The basic setting screen is displayed.

Place the cursor on [MODE] with the [▲] and

[▼] buttons and press the [ENTER] button.

The cursor moves to [MODE] on the mode setting screen.

Press the [ENTER] button and move the

cursor to the mode currently selected.

When the setting is performed for the first time, [DISTANCE] is displayed.

Select [PROFILE] or [DISTANCE] with the [▲]

and [▼ ] buttons and press the [ENTER]

button.

The confirmation screen is displayed.

2-12

E LT-9001-IM

+ 146 hidden pages

KEYENCE LT-9001 User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Introduction

Safety Precautions

General Precautions

Note

Precaution on CE Marking

Precautions

Organization of this Manual

Table of Contents

System Configuration

Checking the Package Contents

LT-9501

LT-9010M

LT-C2/C10

Identifying Part Names and Functions

Controller

Measuring Unit

Remote Control Console

Mounting and Connecting Parts

Mounting the Measuring Unit

Installation of the Controller

Connection

Displacement Mode and Profile Mode

Displacement Mode

Profile Mode

Outline of Measurement and Settings

Run Mode

Program Mode

Program Function

Flow of Measurement

Operations

How to Use the [ENTER] Button

Selecting an Item

Entering a Value

Selection Method of the Run Mode

Operational Flow