fanuc C1000, C2000, C4000 Maintenance Manual

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GE Fanuc Automation

Computer Numerical Control Products

Laser C1000 / C2000 / C4000―Model E

Maintenance Manual

GFZ-70265EN/01 February 2001

Page 2

Warnings, Cautions, and Notes as Used in this Publication

Warning notices are used in this publication to emphasize that hazardous voltages, currents, temperatures, or other conditions that could cause personal injury exist in this equipment or may be associated with its use.

In situations where inattention could cause either personal injury or damage to equipment, a Warning notice is used.

Caution notices are used where equipment might be damaged if care is not taken.

GFL-001

Warning

Caution

Note

Notes merely call attention to information that is especially significant to understanding and operating the equipment.

This document is based on information available at the time of its publication. While efforts have been made to be accurate, the information contained herein does not purport to cover all details or variations in hardware or software, nor to provide for every possible contingency in connection with installation, operation, or maintenance. Features may be described herein which are not present in all hardware and software systems. GE Fanuc Automation assumes no obligation of notice to holders of this document with respect to changes subsequently made.

GE Fanuc Automation makes no representation or warranty, expressed, implied, or statutory with respect to, and assumes no responsibility for the accuracy, completeness, sufficiency, or usefulness of the information contained herein. No warranties of merchantability or fitness for purpose shall apply.

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B-70265EN/01 TABLE OF CONTENTS

TABLE OF CONTENTS

1111 OVERVIEW

OVERVIEW................................

OVERVIEWOVERVIEW

................................................................

.........................................

................................................................

......... 1111

..................

1.1

1.2

1.3

1.4

2222 SAFETY

2.1

2.2

2.3

2.4

2.5

3333 INTERNAL STRUCTURE

3.1

3.2

4444 INSTALLATION

4.1

ORGANIZATION OF THE MANUAL ............................................................................................. 2

APPLICABLE MODELS................................................................................................................... 3

RELATED MANUALS...................................................................................................................... 4

TO USE THE LASER OSCILLATOR SAFETY .............................................................................. 5

SAFETY ................................

SAFETYSAFETY

INTERNAL STRUCTURE................................

INTERNAL STRUCTUREINTERNAL STRUCTURE

INSTALLATION ................................

INSTALLATIONINSTALLATION

................................................................

WARNING ......................................................................................................................................... 7

CAUTION ........................................................................................................................................ 10

NOTE ............................................................................................................................................... 11

WARNING LABELS ....................................................................................................................... 12

OPTICAL PATHS IN THE OSCILLATOR .................................................................................... 19

OUTLINE ........................................................................................................................................ 22

COMPONENT DETAILS................................................................................................................ 25

................................................................

INSTALLATION PROCEDURE .................................................................................................... 32

................................................................

...............................................................

................................................................

..............................................

................................................................

................................................

................................................................

.............. 6666

............................

................ 21

................................

............................... 31

..............................................................

2121

3131

4.2

PREPARATION PRIOR TO SHIPMENT ...................................................................................... 40

4.2.1 Packing for Transportation ..................................................................................................... 41

4.2.2 Removing Cooling Water......................................................................................................... 42

4.3

DETAILS OF CHECKING .............................................................................................................43

4.3.1 External Gas Piping Leakage Check (Clamp Test) ............................................................... 43

4.3.2 Parameter Check ..................................................................................................................... 45

4.3.3 Check for Leakage within the Oscillator................................................................................ 46

4.3.4 Locating a Leakage.................................................................................................................. 47

4.3.5 Oscillation Characteristics ...................................................................................................... 48

4.3.6 Discharge Margin Check ......................................................................................................... 49

4.3.7 Power Supply Margin Check (Pulse Check)........................................................................... 50

4.3.8 Beam Mode Check ................................................................................................................... 51

4.3.9 Discharge Aging....................................................................................................................... 52

4.4

OSCILLATOR CONNECTIONS .................................................................................................... 54

4.4.1 Cooling Water .......................................................................................................................... 54

4.4.2 Laser Gas.................................................................................................................................. 57

4.4.3 Electrical Connections ............................................................................................................. 58

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4.4.4 Inter-unit Connections ............................................................................................................ 58

5555 MAINTENANCE

MAINTENANCE ................................

MAINTENANCEMAINTENANCE

................................................................

..............................................................

................................................................

.............................. 59

............................................................

5959

5.1

5.2

5.3

DAILY INSPECTION ..................................................................................................................... 60

PERIODIC MAINTENANCE ......................................................................................................... 61

DETAILS OF MAINTENANCE ..................................................................................................... 62

5.3.1 Changing the Turbo Blower Oil ..............................................................................................62

5.3.2 Changing the Exhaust Pump Oil............................................................................................ 64

5.3.3 Replacing the Exhaust Pump Filter ....................................................................................... 66

5.4

6666 TROUBLESHOOTING

6.1

6.2

6.3

6.4

MAINTENANCE PARTS................................................................................................................ 67

TROUBLESHOOTING ................................

TROUBLESHOOTINGTROUBLESHOOTING

TROUBLESHOOTING PROCEDURE .......................................................................................... 72

ERROR MESSAGES AND COUNTERMEASURES .................................................................... 73

RESPONDING TO ALARM MESSAGES ON THE SCREEN ..................................................... 74

MAJOR FAULTS............................................................................................................................. 97

................................................................

.....................................................

................................................................

..................... 71

..........................................

6.4.1 Laser Power Supply Alarm Display ....................................................................................... 97

6.4.2 Power Supply Cannot Be Switched Off Using CRT/MDI Switch ......................................... 98

6.4.3 Power Supply Cannot Be Switched On Using CRT/MDI Switch.......................................... 98

6.4.4 Laser Output Just After Switch On Is Low ........................................................................... 98

7171

6.4.5 Display of Fluctuating Laser Output On CRT....................................................................... 98

6.4.6 Electromagnetic Contactor of Exhaust Pump Trips Thermally ........................................... 99

6.4.7 Main Breaker Trips ................................................................................................................. 99

6.4.8 Excessive Laser Gas Consumption ....................................................................................... 100

6.4.9 Inverter Alarm Display ......................................................................................................... 101

6.5

OBSERVING VOLTAGE OF POWER LINE .............................................................................. 104

6.5.1 Measurement of Voltage........................................................................................................ 104

6.5.2 Phase Relation ....................................................................................................................... 104

6.5.3 Measurement of Voltage of DC Power Supply Unit ............................................................ 104

6.5.4 Checking the IF PCB Signals................................................................................................ 106

6.5.5 Checking the Jumper Pins .................................................................................................... 106

6.6

INDICATION OF STATE BY MEANS OF SELF DIAGNOSTIC FUNCTION ........................ 107

6.6.1 Data Items Displayed on the Diagnosis Screen................................................................... 107

6.6.2 Laser Oscillator Status Display ............................................................................................ 108

7777 OSCILLATOR CONNECTIONS

OSCILLATOR CONNECTIONS ................................

OSCILLATOR CONNECTIONSOSCILLATOR CONNECTIONS

7.1

ELECTRICAL CONNECTIONS .................................................................................................. 117

................................................................

....................................

................................................................

.... 116

116

........

116116

7.2

COOLING WATER PIPING ......................................................................................................... 123

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7.3

8888 OSCILLATOR CONNECTIONS

8.1

8.2

8.3

8.4

9999 SETTING AND ADJUSTMENT

9.1

VACUUM GAS CONNECTION ................................................................................................... 125

OSCILLATOR CONNECTIONS ................................

OSCILLATOR CONNECTIONSOSCILLATOR CONNECTIONS

UNIT CONFIGURATION ............................................................................................................ 129

RELAY PCB B ............................................................................................................................... 136

GAS CONTROLLER (C1000-E).................................................................................................... 137

PRESSURE CONTROL UNIT (C2000-E, C4000-E) ...................................................................140

SETTING AND ADJUSTMENT ................................

SETTING AND ADJUSTMENTSETTING AND ADJUSTMENT

LASER POWER SUPPLY UNIT .................................................................................................. 144

................................................................

....................................

................................................................

....................................

................................................................

9.1.1 Preparatory Settings and Checks ......................................................................................... 144

9.1.2 Base Discharge Adjustment .................................................................................................. 145

9.1.3 Maximum Output Adjustment.............................................................................................. 146

9.1.4 Check ...................................................................................................................................... 146

9.1.5 RFI and DCV Value Recording and Adjustment ................................................................. 147

9.1.6 Alarm Processing after Modification of Intra-tube Pressure at Oscillation Time and

Bias Command Setting.......................................................................................................... 147

.... 128

128

........

128128

.... 143

143

........

143143

9.1.7 Checking of Electric Shutter Operation ............................................................................... 148

9.2

9.3

TURBO PCB .................................................................................................................................. 149

INVERTER .................................................................................................................................... 151

9.3.1 Adjusting the Inverter (A90L-0001-0500/8LF : C1000-E)................................................... 151

9.3.2 Adjusting the Inverter (A90L-0001-0465 Model Name JH300 : C2000-E, C4000-E) ..... 161

9.4

GAS CONTROLLER (C1000-E) ................................................................................................... 168

9.4.1 Setting the Gas Supply Pressure Sensor ............................................................................. 168

9.4.2 Setting the Atmospheric Pressure Sensor............................................................................ 168

9.4.3 Adjusting the Exhaust Unit (Adjusting the Laser Gas Consumption) .............................. 170

9.5

SETTING THE GAS SUPPLY PRESSURE SENSOR AND ATMOSPHERIC

PRESSURE SENSOR

(C1000-E).................................................................................................. 172

9.5.1 Names of Components ........................................................................................................... 172

9.5.2 Setting Procedure .................................................................................................................. 174

9.6

PRESSURE CONTROL UNIT (C2000-E, C4000-E) ................................................................... 177

9.6.1 Setting the Gas Supply Pressure Sensor ............................................................................. 177

9.6.2 Setting the Atmospheric Pressure Sensor............................................................................ 177

9.7

ADJUSTING THE EXHAUST CONTROL UNIT

9.8

9.9

(ADJUSTING THE LASER GAS

SETTING THE POWER INPUT COMPENSATION COEFFICIENT ...................................... 180

WATER FLOW SENSOR.............................................................................................................. 182

CONSUMPTION) (C2000-E, C4000-E) ................................ 179

9.9.1 Adjusting the Water Flow Sensor (C1000-E) ....................................................................... 182

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9.9.2 Adjusting the Flow Sensor (C2000-E, C4000-E).................................................................. 184

10 REPLACEMENT PROCEDURES

1010

REPLACEMENT PROCEDURES ................................

REPLACEMENT PROCEDURESREPLACEMENT PROCEDURES

................................................................

..............................................................

................................................................

.............................. 185

............................................................

185

185185

10.1

INPUT UNIT ................................................................................................................................. 186

10.1.1 Replacing the Stabilized Power Supply................................................................................ 186

10.1.2 Replacing the Input Unit Control PCB ................................................................................ 186

10.1.3 Replacing the IF PCB on the Oscillator Side ....................................................................... 187

10.2

10.3

10.4

10.5

10.6

10.7

10.8

10.9

10.10

10.11

REPLACING THE LASER POWER SUPPLY ............................................................................ 188

REPLACING THE MATCHING BOX ......................................................................................... 193

REPLACING THE TURBO BLOWER......................................................................................... 194

REPLACING THE TURBO PCB.................................................................................................. 196

REPLACING RELAY PCB B........................................................................................................ 197

REPLACING THE EXHAUST PUMP ......................................................................................... 198

REPLACING THE INTAKE UNIT AND PRESSURE CONTROL UNIT ................................. 200

REPLACING THE EXHAUST UNIT AND EXHAUST CONTROL UNIT................................ 203

REPLACING A DISCHARGE TUBE....................................................................................... 204

REPLACING A FAN UNIT ...................................................................................................... 205

10.11.1 Replacing a Fan Unit......................................................................................................... 205

10.11.2 Attaching and Detaching a Cable To and From the Terminal Block ............................. 206

10.11.3 Replacing a Fan-assisted Radiator ................................................................................... 207

10.12

10.13

REPLACING THE POWER SENSOR UNIT........................................................................... 208

REPLACING THE SHUTTER SECTION ............................................................................... 209

10.13.1 Replacing the Shutter Unit ............................................................................................... 210

10.13.2 Replacing the Shutter Mirror............................................................................................ 210

10.13.3 Replacing the Shutter Switch (Thermal and Photoelectric Switches) ........................... 210

10.13.4 REPLACING THE BEAM ABSORBER ........................................................................... 212

10.14

10.15

10.16

10.17

10.18

11 LASER OPTICAL SYSTEM

1111

11.1

REPLACING THE INVERTER................................................................................................ 214

REPLACING THE WATER DISTRIBUTION UNIT .............................................................. 215

REPLACING THE CONDENSATION SENSOR .................................................................... 218

REPLACING THE GUIDE LASER.......................................................................................... 219

REPLACING THE TRIGGER ELECTRODE .......................................................................... 220

LASER OPTICAL SYSTEM................................

LASER OPTICAL SYSTEMLASER OPTICAL SYSTEM

CLEANING AND REPLACING THE OPTICAL PARTS ........................................................... 223

................................................................

........................................

................................................................

11.1.1 Cleaning and Replacing the Output Mirror......................................................................... 224

11.1.2 Cleaning and Replacing the Rear Mirror............................................................................. 229

11.1.3 Cleaning and Replacing the Folding Mirrors....................................................................... 232

........ 222

222

................

222222

11.2

ALIGNMENT OF THE RESONATOR......................................................................................... 235

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11.2.1 Method of Obtaining a Maximum Power by Adjusting All Mirrors ................................... 239

11.2.2 Alignment Procedure during Installation after Transportation......................................... 241

11.2.3 Alignment Procedure at Mirror Cleaning Time................................................................... 242

11.2.4 Obtaining a Maximum Power ............................................................................................... 243

11.2.5 Burn pattern Collection and Beam Mode Evaluation ......................................................... 244

11.3

11.4

APPENDIX

APPENDIXAPPENDIX

AAAA EXTERNAL VIEW OF LASER OSCILLATOR

BBBB SPECIFICATIONS

CCCC ERROR CODE LIST

DDDD PARAMTER LIST

D.1

D.2

D.3

D.4

D.5

D.6

ALIGNMENT OF THE GUIDE LASER ...................................................................................... 246

ALIGNMENT OF THE BEAM FOLDING UNIT........................................................................ 248

EXTERNAL VIEW OF LASER OSCILLATOR................................

EXTERNAL VIEW OF LASER OSCILLATOREXTERNAL VIEW OF LASER OSCILLATOR

SPECIFICATIONS ................................

SPECIFICATIONSSPECIFICATIONS

ERROR CODE LIST ................................

ERROR CODE LISTERROR CODE LIST

PARAMTER LIST ................................

PARAMTER LISTPARAMTER LIST

PARAMETERS FOR ENABLING/DISABLING VARIOUS FUNCTIONS ...............................261

PARAMETERS FOR POWER SUPPLY SELECTION ............................................................... 268

PARAMETERS FOR CONTOURING CONDITIONS ................................................................ 269

PARAMETERS FOR EDGE MACHINING CONDITIONS ....................................................... 270

PARAMETERS FOR PIERCING CONDITIONS........................................................................ 272

PARAMETERS FOR POWER CONTROL................................................................................... 274

................................................................

..............................................

................................................................

.........................................................

................................................................

.......................................................

................................................................

...........................................................

................................................................

......................... 256

..................................................

........................... 260

......................................................

.............. 253

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....................... 258

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253

253253

256

256256

258

258258

260

260260

D.7

D.8

D.9

D.10

D.11

D.12

D.13

D.14

D.15

D.16

D.17

D.18

EEEE CONTROL SEQUENCES IN LASER OSCILLATOR

E.1

E.2

PARAMETERS FOR ASSIST GAS PRESSURE AND TIME SETTING................................... 277

PARAMETERS FOR LASER MAINTENANCE TIMING INDICATION FUNCTIONS.......... 280

PARAMETERS FOR THE OSCILLATOR................................................................................... 282

PARAMETERS FOR DISCHARGE.......................................................................................... 285

PARAMETERS FOR GAS CONTROL (1)................................................................................ 286

PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL ALARMS.................................. 289

PARAMETERS FOR LASER POWER/VOLTAGE DROP ...................................................... 290

PARAMETERS FOR POWER TABLE SETTING................................................................... 291

AUTOMATIC AGING FUNCTION.......................................................................................... 293

POWER CONTROL (2) ............................................................................................................. 296

LASER GAS MIXER FUNCTION ............................................................................................ 297

PARAMETERS FOR GAS PRESSURE CONTROL (2) .......................................................... 299

CONTROL SEQUENCES IN LASER OSCILLATOR ................................

CONTROL SEQUENCES IN LASER OSCILLATORCONTROL SEQUENCES IN LASER OSCILLATOR

OUTLINE OF LASER OSCILLATION SEQUENCES ............................................................... 301

INTRA-TUBE GAS PRESSURE CONTROL SEQUENCES ...................................................... 303

................................................................

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...................................

................................................................

... 300

......

300

300300

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TABLE OF CONTENTS B-70265EN/01

E.3

E.4

FFFF REFIXING AND REPLACING GAS TUBE

GGGG REFIXING AND REPLACING WATER TUBE

HHHH GLOSSARY

TUBE VOLTAGE CONTROL SEQUENCES .............................................................................. 305

OSCILLATION SEQUENCES FLOW CHART ........................................................................... 307

REFIXING AND REPLACING GAS TUBE................................

REFIXING AND REPLACING GAS TUBEREFIXING AND REPLACING GAS TUBE

REFIXING AND REPLACING WATER TUBE................................

REFIXING AND REPLACING WATER TUBEREFIXING AND REPLACING WATER TUBE

GLOSSARY ................................

GLOSSARYGLOSSARY

................................................................

...................................................

................................................................

.............................................

................................................................

.....................................

................................................................

................... 313

......................................

............. 315

..........................

..... 317

..........

313

313313

315

315315

317

317317

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B-70265EN/01 1.OVERVIEW

1 OVERVIEW

This manual describes the maintenance of the FANUC LASER C1000/C2000/C4000-MODEL E, as well as the structure, configuration, and operation of the laser oscillator. This manual is aimed at those personnel responsible for laser oscillator maintenance.

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1.OVERVIEW B-70265EN/01

1.1 ORGANIZATION OF THE MANUAL

This manual is organized as described below.

1. Overview This chapter describes the organization of this manual, applicable models, related manuals, and notes on reading this manual.

2. Safety This chapter describes the handling of lasers, and provides warnings, cautions and notes on high voltages, high temperatures, and toxicity. All users must read this chapter carefully to ensure safety.

3. Internal Structure This chapter describes the structure and operation of the laser oscillator.

4. Installation This chapter describes the installation and checking of the laser oscillator.

5. Maintenance This chapter provides information on when and how the consumable parts of the laser oscillator must be replaced.

6. Troubleshooting This chapter describes the actions to be applied in the event of a fault occurring in the laser oscillator.

7. Oscillator Connections This chapter describes the internal connections of the electrical system, cooling system, and gas system.

8. Unit Configuration This chapter describes the internal units of the laser oscillator.

9. Setting and Adjustment This chapter describes how to set and adjust the controls of the laser oscillator.

10. Replacement Procedures This chapter describes how to replace the individual units and parts of the laser oscillator.

11. Laser Optical System This chapter describes how to clean, replace, and align the optical components of the laser oscillator.

Appendix A. External View of Laser Oscillator B. Specifications C. Error Code List D. Parameter List E. Control Sequences in Laser Oscillator F. Refixing and Replacing Gas Tube G. Refixing and Replacing Water Tube H. Glossary

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B-70265EN/01 1.OVERVIEW

1.2 APPLICABLE MODELS

This manual covers the following models:

Model Abbreviation

FANUC LASER C1000-MODEL E C1000-E FANUC LASER C2000-MODEL E C2000-E FANUC LASER C4000-MODEL E C4000-E

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1.OVERVIEW B-70265EN/01

1.3 RELATED MANUALS

The following manuals are available for the FANUC LASER C1000/ C2000/C4000-MODEL E :

DESCRIPTIONS B-63192EN CONNECTION MANUAL B-63193EN

FANUC Series 16i-LA

OPERATOR’S MANUAL B-63194EN MAINTENANCE MANUAL B-63195EN PARAMETER MANUAL B-63200EN

FANUC LASER C1000/C2000/C4000-MODEL E

OPERATOR’S MANUAL B-70264EN

MAINTENANCE MANUAL (This manual)

B-70265EN

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B-70265EN/01 1.OVERVIEW

1.4 TO USE THE LASER OSCILLATOR SAFETY

This manual contains precautions which must be observed during operation of the laser oscillator, to ensure the operator's safety and prevent damage to the oscillator. Each precaution is indicated by "Warning" or "Caution" according to its severity. Supplementary information is indicated by "Note". Read the contents of each "Warning", "Caution", and "Note" before attempting to use the oscillator.

WARNING

Precautions to be applied in those situations where there is a danger of the operator being killed or seriously injured.

CAUTION

Precautions to be applied in those situations where there is a danger of the operator being slightly injured or the oscillator being damaged.

NOTE

Supplementary information other than precautions.

The functions of a laser machining system depend not only on the laser oscillator, but also on the machine, power magnetics cabinet, servo system, CNC, and operator's panel. This manual describes only the laser oscillator. For a description of the other components, refer to the corresponding manuals, supplied by the machine tool builder.

- Read this manual thoroughly and store it in a safe place.

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2.SAFETY B-70265EN/01

2 SAFETY

This chapter describes precautions to be observed to ensure the safe operation of the laser oscillator. Read this chapter thoroughly before attempting to use the laser oscillator. Also, read the safety precautions in the operator's manual supplied by the machine tool builder. The laser oscillator may present a danger not only to the operator but also to other people working around the oscillator, up to a considerable distance away. The laser oscillator must, therefore, be operated only by a person who has received appropriate training. Only persons who have understood the internal structure of the laser oscillator and have received appropriate training can maintain the laser oscillator. A warning label is put on each dangerous position of the laser oscillator. Be extremely careful about the labeled positions.

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B-70265EN/01 2.SAFETY

2.1 WARNING

(1) It is extremely dangerous to expose your eyes to direct, scattered,

or reflected CO while the laser is operating. Exposure to laser light can cause blindness. If your eyes are accidentally exposed, seek medical advice immediately.

(2) Do not turn on the laser oscillator while a panel is removed or a

door is open. Operating the laser with a door open or panel removed may result in the operator being directly exposed to CO radiation. Exposure to laser light can cause blindness and/or severe burns. If your eyes are accidentally exposed to laser light, seek medical advice immediately. Before turning on the power during maintenance if absolutely necessary, wear protective glasses and clothing to prevent accidents.

laser light. Always wear protective glasses

laser

(3) If the laser oscillator is operated with a panel open, ultraviolet

radiation is emitted from the high-frequency discharge section. Gazing the discharge section for a long time can cause visual disturbances such as impaired eyesight. Always wear protective glasses during work. If you feel trouble with your eyes, seek medical advice immediately.

(4) Surround the laser machining tool with a fence made of a

material which absorbs laser light well (such as acrylic). Place appropriate warning notices on the fence. The door in the safety fence shall be fitted with an interlock switch such that opening the door stops the laser. Failure to provide such a fence exposes persons in the vicinity of the machine tool to the danger of being exposed to CO

laser

radiation and the associated risk of blindness. If a person is accidentally exposed to laser light, seek medical advice immediately.

(5) The laser beam shall be no higher than average eye height.

Enclose the path of the laser beam with covers. Do not leave the end of the beam path open. Place laser- absorbing material at the end of the beam path to absorb the beam's energy. A CO

laser beam is directional and has a high energy density.

Exposure to laser light can cause blindness. Flammable material may burn or explode if exposed to the laser beam. If your eyes are accidentally exposed to laser light, seek medical advice immediately.

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2.SAFETY B-70265EN/01

(6) A high voltage of 3 to 4 kV

is applied to some places in the

0-p

laser oscillator cabinet. Therefore, do not turn the power to the oscillator on or operate the oscillator when an oscillator panel is open. Operating the laser oscillator with a panel open can cause a touch on a high-voltage place, resulting in electric shock. Before turning on the power during maintenance if absolutely necessary, take measures against accidents.

(7) Before daily inspection, the replacement of a maintenance part

or maintenance, open the main circuit breaker and turn the power supply off (double power-off). To prevent the power from being inadvertently turned on, lock the circuit breaker open, and affix an indication of work in progress. Failure to turn off the power during inspection or replacement exposes the operator to the danger of electric shock. Before turning on the power during maintenance if absolutely necessary, take measures against accidents.

(8) The oscillator output mirror and focusing lens on the machining

head both have a substrate made of ZnSe (zinc selenide), a toxic substance. Therefore, do not touch the mirror or lens with your bare hands. Inhaling ZnSe dust may cause difficulty in breathing, completely stopping the breathing of the victim in the worst case. If you accidentally touch the mirror or lens with your bare hands, wash your hands well under running water. If you accidentally inhale ZnSe dust or debris, seek medical advice immediately.

(9) Do not look at the machining point without eye protection.

Otherwise, your eyes may be exposed to reflected laser light, resulting in blindness. If your eyes are accidentally exposed to laser light, seek medical advice immediately.

(10) Before attempting to machine any material for the first time,

consult with the manufacturer of the material. Some materials generate toxic gases when cut or drilled by a laser beam. Should you accidentally inhale any toxic gas, seek medical advice immediately.

(11) If the laser oscillator must be moved, entrust the work to the

machine tool builder whenever possible. If performed by inexperienced personnel, the oscillator may topple or be dropped, resulting in a potentially fatal accident.

When the machine tool builder is not available to move the

oscillator, follow the procedure described on the hanging method label. While moving the oscillator, stand well clear and never pass under the oscillator.

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B-70265EN/01 2.SAFETY

(12) Do not allow any dangerous or high-pressure gas to get into the

oscillator housing. The oscillator cabinet has a hermetic structure (dustproof and dripproof), it cannot be ventilated easily. Flammable gases such as oxygen can cause a fire or explosion. Toxic gases can harm operators during maintenance. Organic gases can degrade machining performance. High-pressure gases can damage a panel or the cabinet, resulting in injury from flying matters. If such a gas accidentally gets into the oscillator housing, remove a panel for ventilation. The installation room must be also well ventilated. To purge the oscillator housing, use purified, low-pressure air or nitrogen.

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2.SAFETY B-70265EN/01

2.2 CAUTION

(1) If there is a possibility of being exposed to CO2 laser radiation

exceeding the maximum permissible exposure (MPE) level for skin, wear protective clothing. Otherwise, there is a danger of being burnt.

(2) Oscillator is fitted with a red semiconductor laser to indicate the

approximate position of invisible CO directly at the semiconductor laser beam. Otherwise, your eyes may be injured.

(3) The gas circulating system in the oscillator becomes very hot.

Do not touch the gas pipes, turbo blower, heat exchanger, or exhaust pump, until they have cooled down sufficiently after the oscillator has been turned off. Otherwise, you may be burnt.

(4) Do not pass your hand in the optical path of the laser machine or

under the laser head when the shutter of the oscillator is open. When the shutter is open, a laser beam may be emitted from the oscillator accidentally. Before work in the optical path or under the laser head, confirm that the shutter is closed.

laser beam. Do not look

(5) The workpiece becomes very hot during machining. Never touch

the workpiece with your bare hands. Otherwise, you may be burnt.

(6) During machining, extremely hot chips are likely to be

generated. Unless sufficient caution is exercised, there is a danger of the operator being burnt, or of a fire being started.

(7) Some materials may burn or explode when laser machined.

Before attempting to machine any material for the first time, consult with the manufacturer of the material, to prevent the danger of fire of or the possibility of operator injury.

(8) The oscillator contains cooling fan units. Although the fan units

are fitted with a finger guard, to prevent injury, keep your hands well away from the fans.

(9) The oscillator is controlled according to the CNC internal

parameter settings. If a numeric value different from a setting is entered and the oscillator is operated, the oscillator may malfunction. In the worst case, the oscillator may be damaged.

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B-70265EN/01 2.SAFETY

2.3 NOTE

(1) During installation or maintenance necessitating the opening of

an oscillator door or the removal of a panel, only persons who have undergone maintenance training should operate the laser. In such a case, extreme caution must be exercised.

(2) Warning labels are affixed to those parts of the oscillator where

there is a danger of exposure to laser radiation. Observe the precautions given on the labels. (Section 2.4 shows the warning labels.)

(3) Laser products shall conform to the regulations laid down in the

laser safety standard, including that stipulating control using a key. The oscillator start signal (RUN ON) shall be controlled with a key switch such that the oscillator cannot be turned on without a specific key. Control using a key ensures that other than the authorized personnel cannot operate the laser oscillator. It is extremely dangerous if a person who is unfamiliar with the equipment attempts to operate the laser oscillator.

(4) The shutter shall be unlocked only while a beam is being output.

Otherwise, keep the shutter locked to provide protection should the laser accidentally be turned on.

(5) Do not discard a used output mirror or focusing lens together

with regular waste. If the output mirror or focusing lens is replaced, return the original to the supplier or entrust it to a specialized disposal company.

(6) Do not place any flammable material (such as paper, cloth, or

wood) near the workpiece table.

(7) Keep a fire extinguisher beside the unit.

(8) Oscillator is equipped with an alarm lamp. The alarm lamp

blinks while discharge is in progress or whenever laser radiation is possible. While the alarm lamp is blinking, pay careful attention to laser radiation and high voltages.

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2.SAFETY B-70265EN/01

2.4 WARNING LABELS

The oscillator uses high voltages and laser beam radiation. Such hazards are indicated with warning labels attached to the positions shown in Fig.2.4 (a) to (f).

Fig.2.4(a) Warning label positions (C1000-E : front view)

Fig.2.4(b) Warning label positions (C1000-E : rear view)

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B-70265EN/01 2.SAFETY

Fig.2.4(c) Warning label positions (C2000-E : front view)

Fig.2.4(d) Warning label positions (C2000-E : rear view)

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2.SAFETY B-70265EN/01

Fig.2.4(e) Warning label positions (C4000-E : front view)

Fig.2.4(f) Warning label positions (C4000-E : rear view)

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B-70265EN/01 2.SAFETY

(1) Class indication label (JPN)

MAXIMUM OUTPUT C1000-E C2000-E C4000-E

2000W 5000W 8000W

(1) Class indication label (FDA)

C1000-E C2000-E C4000-E

MAXIMUM OUTPUT

2000W 5000W 8000W

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2.SAFETY B-70265EN/01

(2) Warning label

(3) Aperture label

(4) Suspension method label

(5) Access panel

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B-70265EN/01 2.SAFETY

(6) Label inside the access panel

(7) Discharge section label

(8) Certification label

(9) Equipment nameplate

(10) Manufacturer's address label

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2.SAFETY B-70265EN/01

(11) Label for regulating the atmospheric gases in the oscillator

housing

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B-70265EN/01 2.SAFETY

2.5 OPTICAL PATHS IN THE OSCILLATOR

The figures below show the laser optical paths inside the oscillator.

Fig.2.5(a) Optical paths in the C1000-E

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2.SAFETY B-70265EN/01

Fig.2.5(b) Optical paths in the C2000-E

Fig.2.5(c) Optical paths in the C4000-E

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B-70265EN/01 3.INTERNAL STRUCTURE

3 INTERNAL STRUCTURE

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3.INTERNAL STRUCTURE B-70265EN/01

3.1 OUTLINE

Figs.3.1(a) to (c) show the internal structure of the laser oscillator. The oscillator consists of a laser resonator, discharge drive unit, forced gas circulating system, pressure controller, CNC interface, and a protective housing.

Fig.3.1(a) C1000-E internal structure

Fig.3.1(b) C2000-E internal structure

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B-70265EN/01 3.INTERNAL STRUCTURE

Fig.3.1(c) C4000-E internal structure

(1) Laser resonator

The laser resonator consists of several discharge tubes, connected in series using folding mirrors, with a rear mirror and output mirror placed at the open ends of the discharge tubes, thus sealing the tubes. The resonator is fitted with a gas pipe connecting port through which laser gas is fed into the discharge tubes. A discharge from the electrodes of the discharge tube energizes CO

molecules, which emit light. This light is amplified by

stimulated emission, repeated between the rear mirror and output mirror, a laser beam being emitted from the output mirror.

(2) Discharge drive unit

The discharge drive unit consists of a laser power supply, matching box, and discharge tubes. High-frequency output of 2 MHz that is controlled by the CNC discharges the laser gas flows through discharge tubes to energize CO

molecules.

(3) Forced gas circulating system

A gas circulating system is configured by connecting the resonator and turbo blower with a circulating pipe. Laser gas is forced through the discharge tubes at a speed of 200 m/s or higher. A water-cooled heat exchanger, used to cool the hightemperature gas from the discharge tubes, is provided at the inlet side of the turbo blower. At the outlet side of the turbo blower, another water-cooled heat exchanger dissipates the compression heat.

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3.INTERNAL STRUCTURE B-70265EN/01

(4) Pressure controller

The laser gas pressure within the forced gas circulating system is controlled by commands issued from the CNC, thus ensuring stable laser output.

(5) CNC interface

Interface used to connect a FANUC Series 16i-L. CNC commands that, control the operation of the laser oscillator, such as start/stop and laser output, are input via this interface.

(6) Protective housing

An enclosure that houses the above components. The housing, consisting of metal panels, completely encloses the laser oscillator, thus protecting the operator from exposure to laser radiation and from high voltages. All panels are screw-fixed and cannot be removed without an appropriate tool.

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B-70265EN/01 3.INTERNAL STRUCTURE

3.2 COMPONENT DETAILS

This section describes the internal structure of the oscillator more specifically. Figs.3.2(a) to (c) are internal structural drawing.

Fig.3.2(a) C1000-E structural drawing

Fig.3.2(b) C2000-E structural drawing

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3.INTERNAL STRUCTURE B-70265EN/01

Fig.3.2(c) C4000-E structural drawing

(1) Resonator

The resonator consists of an output mirror, rear mirror, folding mirrors, discharge tubes, power sensor unit, etc. It converts electrical energy first to laser gas, then to optical energy (10.6µm single-wavelength laser beam).

(2) Output mirror

A transmitting/reflecting mirror which outputs the laser beam after it has been amplified. The output mirror consists of a ZnSe (zinc selenide) substrate, coated with dielectric. ZnSe is tightly toxic. Be particularly careful, therefore, when handling the output mirror.

(3) Rear mirror

A reflecting mirror consisting of a Ge (germanium) substrate, coated with dielectric. Having a high reflectance of 99.5%, the rear mirror is used to reflect the laser beam within the resonator while transmitting

0.5% of the laser light so that the beam can be monitored externally.

(4) Folding mirror

A mirror unit which reflects the laser beam at a 90-degree angle. The folding mirror consists of a block with a surface tilting to a 45-degree angle and an Si (silicon) substrate, coated with multilayer dielectric film.

(5) Discharge tube

A pair of Ag (silver) electrodes are metallized on the surface of a hollow quartz glass pipe. A high-frequency discharge between these electrodes injects electrical energy into the laser gas. Each electrode is coated with ceramic, preventing it from degrading and thus improving system reliability.

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B-70265EN/01 3.INTERNAL STRUCTURE

(6) Trigger electrode

A predischarge placed outside the laser oscillation area can facilitate the start of the main discharge. With it, the laser output is zero when the beam is off.

(7) Power sensor

An optical sensor which detects the intensity of the laser beam, transmitted through the rear mirror, thus enabling monitoring of the laser output level.

(8) Gas circulating system

A gas circulating path including a turbo blower, heat exchangers, and circulating pipes, which circulates laser gas in the discharge tubes at high speed.

(9) Turbo blower

During laser oscillation, the laser gas pressure is 1330 – 9310 Pa. The turbo blower circulates this rough-vacuum gas at high speed without contaminating the gas.

(10) Heat exchanger (inlet)

Water-cooled heat exchanger used to cool the laser gas that has been heated by discharge, before it is drawn into the turbo blower.

(11) Heat exchanger (outlet)

Water-cooled heat exchanger used to cool the laser gas that has been heated by compression in the turbo blower, before being forced into the discharge tubes.

(12) Gas controller (C1000-E)

The gas controller always monitors the gas pressure in each discharge tube and supplies the fresh laser gas to the circulating system to keep the pressure constant. It also monitors the supply status of the laser gas, purge check for the circulating system, and other items and has a function of adjusting the amount of flow of the gas to be exhausted.

(13) Pressure control unit (C2000-E, C4000-E)

The pressure control unit always monitors the gas pressure in each discharge tube and supplies the fresh laser gas to the circulating system to keep the pressure constant. It also monitors the supply status of the laser gas, purge check for the circulating system, and other items.

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3.INTERNAL STRUCTURE B-70265EN/01

(14) Exhaust pump unit

This unit is used to vacuum-exhaust laser gas from the gas circulating system such that its pressure falls to that used for laser oscillation. Also, within this unit, a small amount of circulating gas is constantly being exchanged, to prevent degradation of the circulating gas. For the C1000-E, the exhaust pump is installed separately.

(15) Exhaust control unit (C2000-E, C4000-E)

The exhaust control unit is capable of controlling the flow rate of laser gas to be exhausted. It switches gas flow rates at gas replacement and for pressure control.

(16) Hour meter

The hour meter indicates the total number of hours that the laser oscillator has operated (how many hours the exhaust pump has operated), to indicate whether maintenance or inspection is necessary.

(17) Shutter

The shutter has a rotary arm operated by a rotary solenoid and an Au (gold)-evaporated reflecting mirror attached to the arm. It can be opened and closed by CNC commands. It also has a position sensor and a temperature sensor for safety and always monitors the open/close status and shutter temperature.

(18) Beam absorber

While the laser oscillator is operating with the shutter closed, the laser beam is guided into the beam absorber. The beam absorber absorbs nearly 100% of laser beam and is water-cooled, allowing it to safely absorb the beam for relatively long periods. For safety, the beam absorber is equipped with a temperature sensor which allows the system to monitor the temperature of the beam absorber.

(19) Distribution unit

This unit distributes cooling water, supplied from either a chiller unit or a temperature-regulated external water supply, to each unit in the laser oscillator. For safety, the water distribution unit is equipped with a flow sensor which allows the system to monitor the flow rate of the cooling water.

(20) Laser power supply

A power supply for generating a discharge in each discharge tube. The laser power supply receives the three-phase AC input at 200/220V and outputs 2-MHz high-frequency power controlled with stability by commands from the CNC. The RF inverter converts DC power to 3 to 4 kVPO-P highfrequency (2 MHz) power, then outputs it to the matching box.

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B-70265EN/01 3.INTERNAL STRUCTURE

(21) Matching box

The matching box contains a matching circuit, consisting of coils and capacitors, which ensures that power is effectively input to the discharge tubes.

(22) Intermediate PCB B

This PCB transmits signals output by the shutter section, such as those from the limit switch, absorber temperature sensor, power sensor, and condensation sensor, to the interface PCB.

(23) Input unit

The power magnetics cabinet distributes power, supplied from an external unit, to each unit in the laser oscillator. It also protects each unit from overcurrents.

(24) Input unit control PCB

This PCB has functions of transmitting the contactor open/close signals according to CNC commands and of notifying the CNC of the open/close status of the circuit breaker in the input unit.

(25) Interface PCB

Transfers signals to and from the CNC via the FANUC I/O Link (serial interface).

(26) Stabilized power supply

This unit converts the 200/220 VAC power source to DC power for the interface PCB and other units.

(27) Condensation sensor

The condensation sensor is mounted above the output mirror holder. If condensation occurs on this sensor, the resistance changes, an alarm (abnormal water temperature) occurs, and the oscillator is stopped. It prevents faults in each unit from occurring due to condensation.

(28) Inverter

This inverter drives the turbo blower. It is responsible for acceleration/deceleration control during start and stop of the blower.

(29) Turbo PCB

This PCB monitors overheating, the oil level, and frequency reached signal of the turbo blower.

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3.INTERNAL STRUCTURE B-70265EN/01

(30) Guide laser (laser diode)

A laser diode is overlaid on the same optical axis as a guide beam for checking the optical axis because the CO invisible to the unaided eye. The guide beam is emitted in synchronization with the mechanical shutter only when the shutter is closed. The guide laser can be used for roughly adjusting the optical path of an external optical system and for obtaining a guide for the machining point.

(31) Beam folding unit

This unit reverses the direction of the laser beam in the oscillator

laser beam is

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B-70265EN/01 4.INSTALLATION

4 INSTALLATION

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4.INSTALLATION B-70265EN/01

4.1 INSTALLATION PROCEDURE

Use the following procedure to make adjustments and checks during installation.

(1) Check the environment at the installation location. [Environmental conditions]

1 Ambient temperature +5 to +30 °C 2 Temperature variation 1.1°C /minute maximum 3 Humidity 75% or below (relative humidity) 4 Vibration Acceleration not to exceed 0.05G.

Vibration amplitude not to exceed 5µm.

5 Atmosphere Dust must be minimized.

There must be no organic volatile components.

6 Laser gas Composition

: 5 ± 0.25 % Purity

He : 40 ± 2.0 % 99.99 % N

: 55 ± 2.75 % or more

O : 5 ppm maximum

CmHn : 1 ppm maximum

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B-70265EN/01 4.INSTALLATION

(2) Remove resonator and shutter clamps.

The clamps are used only in transit. In particular, loosen the resonator clamp before it is stored. If the resonator is left for a long time with the clamp tightened, the resonator is likely to be deformed. The clamp locations are shown in Figs.4.1(a) to (c).

Shutter clamp

Resonator clamp

Details of resonator clamp and shutter clamp

Fig.4.1(a) Details of resonator and shutter clamps section (C1000-E)

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4.INSTALLATION B-70265EN/01

Shutter clamp

Resonator clamp

Details of resonator

Details of shutter clamp

Fig.4.1(b) Details of resonator and shutter clamps section (C2000-E)

clamp

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B-70265EN/01 4.INSTALLATION

Resonator clamp A

Resonator clamp B

Shutter clamp

Details of shutter clamp

Details of resonator clamp A

Fig.4.1(c) Details of resonator and shutter clamps section (C4000-E)

Details of resonator clamp B

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4.INSTALLATION B-70265EN/01

(3) Check the outsides of units installed in the oscillator as follows:

Check items

1 Check whether any printed circuit boards are loose or removed. 2 Check whether any cables are damaged (such as damaged sheathing). 3 Check whether any connectors are loose or detached. 4 Check that the discharge tubes are neither cracked nor damaged. 5 Check that the turbo blowers and other units are neither loose nor

missing.

6 Check that the power supply units and matching boxes are neither

loose nor missing. 7 Check that the input unit is neither loose nor missing. 8 Check that the connection to the electrode of each discharge tube is not

loose. 9 Check whether any joint part of the water piping and gas piping is loose.

10 Check all screw terminals in the units. 11 Check the oil level in the turbo blowers, and check for oil contamination.

(See Section 5.3 for details.)

(4) Connect the power and signal lines to the oscillator. (See

Subsection 4.4.3 for details.)

Check items

1 Signal cable between the NC and oscillator (optical fiber), 24V DC 2 Oscillator power cable 3 Grounding cable (class-1) 4 Exhaust pump power cable (See Subsection 4.4.4 for details.)

(only for C1000-E)

On the C1000-E, connect the power cable of the exhaust pump (to the oscillator and pump).

(5) Check the communication setting on the interface PCB. (See

Subsection 6.5.5 for details.) When a metal cable is used : LINK1 (JD1) When an optical fiber cable is used : LINK1 (COP)

(6) Laser gas and cooling water pipes. (See Subsections 4.4.1 and

4.4.2 for details.)

Check items

1 Laser gas pipe type

Recommended gas pipe

Nylon tube AS1, manufactured by Junko Co. Ltd. Polyprotube, manufactured by Imperial Co. Ltd. Stainless bright anneal pipe

2 There must be no gas leakage in the external piping between the gas

cylinder and oscillator. 3 Laser gas composition and purity (Check whether the specifications are

satisfied.) 4 Quality of cooling water (Tap water passed through an ion exchanger is

recommended.) 5 Flow of cooling water (IN, OUT) 6 Connection of the gas feeder piping of the exhaust pump

Connect the gas feeder piping of the exhaust pump (to the oscillator and pump).

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B-70265EN/01 4.INSTALLATION

(7) Check the input power supply voltage, frequency and phase

sequence. (See Section 6.5 for details.)

(8) Turn on the power, then check the operation of the fan motors in

the housing. The fan motors installed in the oscillator start as soon as the power to the CNC is turned on. Check the operation of each fan motor. Note, however, that the fan motor installed in the laser power supply does not start until the oscillator sequence reaches the turbo blower ON operation.

(9) Check the parameters and setting data.

Check the parameters against the data sheets attached to the oscillator. If a value other than those given on the data sheets is set, correct the setting. Note, however, that parameter No. 15270 and parameter No. 15204 are set automatically, so that these parameters need not be modified.

CAUTION

Each oscillator has unique parameters. Check the setting data according to the attached data sheets. Be particularly careful to store these data sheets safely.

(10) Check that cooling water is supplied normally, and that there is

no water leakage inside the oscillator or at any external connection points. (a) Turn off the main circuit breaker of the oscillator and

power supply.

(b) Check that the water inlet (IN) and outlet (OUT) of the

oscillator are connected correctly. If the water inlet and outlet are connected incorrectly, the flow sensor mounted on the outlet does not function, which prevents water from flowing.

water is not impeded. By manually operating the chiller unit, pass cooling water through the system at a flow rate of about 10 liters/minute. Then, check that there is no water leakage at the following locations:

1. The water inlet (IN) and outlet (OUT) of the oscillator

2. The water piping (including all tubes and joints) in the oscillator

(d) Provided no water leakage is observed in step 3) above,

allow cooling water to flow through the oscillator at the specified flow rate. Set the output pressure of the cooling water circulating unit to 0.5 MPa(5 bar). Then, check that there is no water leakage at the following locations:

1. The water inlet (IN) and outlet (OUT) of the oscillator

2. The water piping (including tubes and joints) in the oscillator

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4.INSTALLATION B-70265EN/01

(e) Stop the chiller unit, then switch the operation mode from

manual (local) mode to automatic (remote) mode.

(f) If there is no water leakage, set the RUN key to ON to start

the oscillator. Check that the cooling water circulating unit can be operated according to commands issued from the CNC. If the flow rate is less than the specified value, alarm No. 4072 (low cooling water flow rate) is issued soon after the chiller unit is started. If this alarm is issued, proceed as indicated in the guidance corresponding to this alarm.

(g) Check that the temperature of the cooling water is set to

room temperature plus 1°C. (The temperature of the cooling water may be set to about 27°C throughout the year.) The highest temperature that may be set is 30°C.

(11) Conduct an oscillator vacuum leakage test.

(a) Check the oscillator for any internal leakage.

The procedure for performing a leakage check is given in Subsection 4.3.3.

(b) When first starting the oscillator, check that gas is output

from the gas outlet of the oscillator. Depending on the parameter settings, it may take as long as one minute before gas is output. If no gas is output, the exhaust pump rotation may be reversed. Immediately turn off the circuit breaker to stop the exhaust pump. If this situation is left uncorrected, the exhaust pump may ultimately start to make an abnormal sound, and the thermal switch may trip. In the worst case, the gas circulating system may be contaminated with exhaust pump oil.

(12) Check that the laser gas pressure is controlled normally.

(a) Set all bits of parameter No. 15025 through parameter No.

15028 to 0 because only the pressure control operation is to be checked, without causing discharge. Set parameter No. 15240 to the standard value 10, then check the pressure control status of the laser oscillator. Start the oscillator (RUN ON), and check the pressure control status under the following parameters while checking DGN905:

1. Parameter No. 15241 for discharge start state

2. Parameter No. 15242 for base discharge state

If the pressure control status is abnormal, alarms No. 4073 and No. 4078 are issued. Proceed as indicated in the guidance corresponding to this alarm. Check also that the laser gas flow rate in the base discharge state satisfies the specified value.

(b) If the laser gas flow rate is abnormal, perform adjustment as

described in Section 9.4 or 9.6.

parameter No. 15028 to their original values.

This completes the check.

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B-70265EN/01 4.INSTALLATION

(13) Perform laser oscillation to achieve discharge aging. If the

oscillator is left unused for three days or more, discharge aging is required. See Subsection 4.3.9 for details of discharge aging.

(14) Check the oscillation characteristics and output. See Subsection

4.3.5 for details of the check method.

Check items

1 Oscillation characteristic check :

-Check that the correction coefficient is 1100 or less.

-Check that the discharge voltage is within the factory-set value plus 200 V.

If the correction coefficient or discharge voltage exceeds the maximum, repeat discharge aging.

2 Discharge margin check

- Check that a margin is provided.

3 Voltage margin check

- Check that no alarm is issued.

(15) Check the laser beam mode. For details of the check method, see

Subsec. 4.3.8.

Check items

1 Check that there is no significant difference from the

mode specified in the data sheets attached to the

oscillator. 2 Check that the mode shape is perfectly circular. 3 Check that no interference fringes can be observed

nearby.

(16) Set the hour meter.

Set 50 Hz for those localities where the power supply frequency is 50 Hz. Set 60 Hz for those localities where the power supply frequency is 60 Hz. (The frequency is factory-set to 50 Hz.)

(17) Optical axis adjustment

To perform optical axis adjustment as part of the installation, adjust the base table of the oscillator. Never place a heavy object on the beam outlet plate. Moreover, never make a direct mechanical connection between this plate and a part on the mechanical side.

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4.INSTALLATION B-70265EN/01

4.2 PREPARATION PRIOR TO SHIPMENT

For shipment and transportation, follow the steps explained below.

(1) Disconnect all CNC connecting cables.

(2) Disconnect the power cable and ground cable.

(3) Remove the laser gas pipes, and attach blanking plugs to the

pipes to prevent dust from entering.

(4) When shipping the oscillator or exhaust pump only on the

C1000-E, follow the steps explained below. (Following steps are unnecessary on the C2000-E or C4000-E.) If the oscillator and exhaust pump are mounted on the machine, and so the possibility that the exhaust pump may tumble does not exist, these steps are unnecessary. (a) Detach the exhaust pump power line. (b) Detach the gas piping from the exhaust pump, and plug up

the piping and exhaust pump to prevent foreign matter from entering the piping and pump.

from the exhaust pump. When installing the exhaust pump, supply new oil.

(5) Remove all cooling water from the oscillator by using

compressed air. For details of how to remove the cooling water, see Subsection 4.2.2.

CAUTION

Any residual cooling water may result in corrosion or

clogging; furthermore, if any residual cooling water

freezes, a pipe or the oscillator itself may be

damaged.

(6) Install all clamps and fit a blanking cap onto the beam outlet.

(7) Check the security of all connectors and printed circuit boards.

Install protective covers.

(8) Check that all removed mounting screws are reinstalled.

(9) Install the cabinet mounting panel.

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B-70265EN/01 4.INSTALLATION

4.2.1 Packing for Transportation

Prior to shipment and transportation, the packing and checking operations described below must be performed.

Specifications of the FANUC LASER C1000/C2000/C40000-MODEL E (1) External dimensions : See the Appendix A.

(2) Weights :

C1000-E : About 350 kg (oscillator section)

About 30 kg (exhaust pump section) C2000-E : About 700 kg C4000-E : About 900 kg

(3) Maximum allowable impact : 2G

Note that the maximum allowable impact in transit depends greatly on the means of transport employed, as indicated in Table 4.2.1.

Table 4.2.1 Maximum allowable impacts according to means of

transport (Units: G)

Means of transport

Airplane Ship Railroad Truck

Direction

Forwards/

backwards

Left/right Up/down

615125

2.5 12 5 4

(4) Notes on transportation

When lifting the oscillator for transportation, pass wires through the four eyebolts, and hook up the oscillator by crane. (See Fig.4.2.1.)

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Fig.4.2.1

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4.INSTALLATION B-70265EN/01

4.2.2 Removing Cooling Water

Remove cooling water according to the procedure below.

(1) Open the cooling water inlet (IN) and outlet (OUT), and leave

both open. Cooling water will stop draining from the unit after about 10 minutes.

(2) Once the cooling water has stopped draining, connect a

compressed air hose to the cooling water inlet (IN). Check that the cooling water outlet is open. The distributor unit of the C4000-E is equipped with a valve. Make sure that the valve is open. Gradually supply compressed air, allowing the pressure to build up to 0.1 to 0.2 MPa. Never apply full pressure suddenly.

(3) Continue to supply compressed air at this pressure for about 5

minutes. Increase the compressed air pressure to 0.3 to 0.4 MPa, and supply air until water inside the white water piping of the oscillator is completely removed. It takes about 10 minutes to remove water. For the C4000-E, close the valve and supply compressed air again until water is completely removed.

(4) Exchange the cooling water inlet (IN) and outlet (OUT) and

supply compressed air to execute steps (2) and (3).

CAUTION

The cooling water system of the C1000-E has a directional property, so you cannot feed water or air from the outlet side (OUT).

(5) Once all cooling water has been removed, disconnect the

compressed air tube. Then, seal the cooling water inlet (IN) and outlet (OUT) by attaching the blanking plugs provided with the oscillator to the PT plugs.

CAUTION

Also, the cooling water should be removed from the oscillator whenever the oscillator is to be stored over the winter, when there is a danger of the cooling water freezing. If the cooling water freezes, it may destroy the cooling water pipes or other cooling system components.

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B-70265EN/01 4.INSTALLATION

4.3 DETAILS OF CHECKING

4.3.1 External Gas Piping Leakage Check (Clamp Test)

(1) Using an approved gas pipe, connect the gas inlet of the

oscillator to the cluster piping, or to the secondary side of the regulator mounted on the gas cylinder.

CAUTION

As the external gas piping, use a pipe recommended by FANUC.(See Subsection 4.4.2.) Using a rubber hose, urethane tube, or brazed copper pipe lowers the quality of the laser gas guided to the oscillator, resulting in unstable discharging. This can lower the output level or cause a laser power supply abnormality.

(2) Open the adjustment valve of the regulator in advance. Then,

slowly open the main valve of the gas cylinder. Next, set the secondary pressure of the regulator to 0.175±0.025 MPa.

(3) Upon the completion of setting, close the main valve of the gas

cylinder. (a) If the primary pressure of the regulator is abruptly reduced

to 0, gas will leak from the gas piping. Open the main valve of the gas cylinder and locate the leaks using a liquid leakage checker. Then, correct the leaks.

(b) If the pressure is reduced gradually, gas will leak from the

gas piping. Recheck the joints. Very occasionally, gas may leak from the primary pressure side to the secondary pressure side of the regulator. In such a case, the primary pressure decreases, while the secondary pressure is increases.

normal.

CAUTION

If the amount of gas leakage from the gas piping is very small, the gas composition will change more rapidly when the pipe is longer, when the pipe diameter is larger, or when a smaller amount of gas is consumed. In such cases, the output will be reduced, and discharge will tend to turn off more easily.

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4.INSTALLATION B-70265EN/01

(d) Upon the completion of this check, close the main valve of

the gas cylinder.

CAUTION

Periodically check the external gas piping for leakage.

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B-70265EN/01 4.INSTALLATION

4.3.2 Parameter Check

Laser oscillator parameter data sheets are attached to each oscillator. Machine tool builders may prepare a parameter table including the laser oscillator parameter data. If the attached parameter data sheets are missing, contact your machine tool builder.

(1) On the CNC setting screen, enable parameter rewriting.

(2) Check the parameters, and enter the same values as those given

in the parameter table.

(3) On the CNC setting screen, disable parameter rewriting, then

press the reset key.

CAUTION

1 If the oscillator is started with an incorrect parameter

value specified, there is a risk of the oscillator being damaged or destroyed. Be particularly careful when entering and checking parameter values.

2 Some parameters may require modification to, for

example, suit the operating state of the oscillator or enable maintenance. When modifying the parameters, the user should record all changes (including dates, parameters before modification, parameters after modification, and reasons for modification) so that old parameters and invalid parameters are not used.

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4.INSTALLATION B-70265EN/01

4.3.3 Check for Leakage within the Oscillator

(1) Modify the parameters listed below.

PRM.No.15008 bit 6 1 → 0 (Automatic aging is disabled. PRM No.15240 Setting→ 0 (evacuation completion pressure)

(2) Set the oscillator start switch to ON. The gas pressure inside the

oscillator can be checked with DGN 905.

(3) Alarm No. 4080 is issued eleven minutes after the oscillator is

started.

(4) Set the main circuit breaker of the oscillator to OFF. Then, turn

off the power to the CNC.

(5) Set the CNC start switch (RUN ON KEY) to OFF, then turn on

the power to the CNC.

(6) Check the gas pressure on the diagnosis screen to determine

whether there is any increase in pressure over 15 minutes. An increase in pressure of within 10 is normal.

(7) After completing the check, turn on the start switch. Then, after

two to three seconds, turn off the switch. The oscillator will perform a purge operation.

(8) Finally, restore the parameter settings to their original values.

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B-70265EN/01 4.INSTALLATION

4.3.4 Locating a Leakage

When there is a gas leakage, locate the leakage by using a leakage checker or liquid leakage checker.

CAUTION

The turbo blower is not designed for pressure application. If pressure must be applied, the upper pressure limit is 0.08 MPa. Never apply pressure higher than 0.08 Mpa. Applying a high pressure may damage the connector, oil gage, and so on. To prevent the connector from being damaged, apply pressure with the cable left attached to the turbo blower.

(1) Turn on the power to the oscillator, then open the valve of the

gas cylinder.

(2) Set the secondary pressure of the regulator of the laser gas

cylinder to 0.05 MPa.

(3) To make the pressure in the oscillator higher than the

atmospheric pressure, increase the atmospheric pressure sensor (PWS2) setting by 0.02. (See Section 9.4 or 9.6.)

(4) Set the RUN key of the oscillator to ON, wait for two to three

seconds, then set the key to OFF. Wait until purge operation starts.

(5) Place the leakage checker at a possibly faulty position where gas

seems to leak. If there is a leakage, the checker indicates it by display or sound. When using the liquid leakage checker, drip the liquid on a possibly faulty position. If gas leaks, bubbles appear, so you can determine the location of a leakage.

NOTE

The leakage checker detects helium in the laser gas. If ambient air flows, detection becomes difficult. So, a gas leakage check should be made in a nearly nowind condition.

(6) After completing the check, reset the value set in (3) above to the

original setting.

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4.INSTALLATION B-70265EN/01

4.3.5 Oscillation Characteristics

(1) Modify the parameters listed below.

PRM No.15000 bit 4 Setting → 1 (Three-minute correction is enabled.) PRM.No.15008 bit 6 1 → 0 (Automatic aging is disabled.)

(2) Start the oscillator. When a discharge start switch is provided, do

not set the switch to ON until after LRDY has been set.

(3) When starting discharge, the oscillator enters the correction

mode in which output is specified automatically. Record the output observed before correction ends.

(4) Record the output, discharge voltage, and current values two

minutes after making the specification. The discharge voltage (RFV) is indicated in DGN909, and the current value (RFI) is indicated in DGN910.

(5) Record the output observed immediately before correction ends

since the output is specified.

(6) After ending the correction mode, record compensation

coefficient [parameter No. 15204].

(7) Three minutes after the termination of correction mode, record

the base discharge output, discharge voltage (RFV), and current (RFI) values.

Compare the measured values of (4) and (7), above, with the discharge voltage and current characteristics given in the data sheets. If the discharge voltage (RFV) is high, check the external piping of the laser gas and the laser gas composition, or perform aging.

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B-70265EN/01 4.INSTALLATION

4.3.6 Discharge Margin Check

(1) Modify the parameters listed below.

PRM No.15000 bit 4 1 → 0 (Power correction is disabled.) PRM.No.15008 bit 6 1 → 0 (Automatic aging is disabled.) PRM No.15208 Setting → 0 (Output feedback is turned off.) PRM No.15209 Setting → 0 (Output feedback is turned off.) PRM No.15223 Setting → Setting -60

(2) If the setting in parameter No. 15223 is changed, a warning

message indicating a parameter change appears when LRDY is set. Clear the message by resetting.

(3) Remove the top panel of the oscillator so that you can check the

discharge tubes and trigger electrode.

(4) Start the oscillator. When a discharge start switch is provided, do

not set this switch to ON until after LRDY has been set.

(5) Check that trigger electrode discharge maintains for 30 minutes

since the start of discharge.

(6) Upon the completion of the check, restore the parameters

modified in step (1) to their original values.

If discharge stops in step (5), check the external laser gas piping and laser gas composition, or perform aging.

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4.INSTALLATION B-70265EN/01

4.3.7 Power Supply Margin Check (Pulse Check)

(1) Modify the parameters listed below.

PRM No.15000 bit 2 0 → 1 (Use of assist gas is disabled at beam-on.) PRM No.15000 bit 3 0 → 1(Internal discharge is enabled in manual mode.) PRM No.15000 bit 4 1 → 0 (Power correction is disabled.) PRM No.15002 bit 0 0 → 1 PRM.No.15008 bit 6 1 → 0 (Automatic aging is disabled.) PRM No.15208 Setting → 0 (Output feedback is turned off.) PRM No.15209 Setting → 0 (Output feedback is turned off.) PRM No.15210 1000 → 1100 (C1000-E) 2000 → 2700 (C2000-E) 4000 → 4000 (C4000-E)

(Internal discharge is enabled in automatic operation mode.)

(2) Start the oscillator. When a discharge start switch is provided, do

not set this switch to ON until after LRDY has been set.

(3) Set the following values on the laser setting screen:

C1000-E : Pc=1100W Du=5% Fr=5Hz C2000-E : Pc=2700W Du=5% Fr=5Hz C4000-E : Pc=4400W Du=5% Fr=5Hz

(4) Set the manual mode, and perform internal discharge operation

under the above conditions.

(5) Check that no alarm occurs for 30 minutes after beam-on.

(6) Upon the completion of the check, restore the parameters modified

in step (1) to their original values.

An alarm, if issued in step (5), check the external laser gas piping and laser gas composition, or perform aging.

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B-70265EN/01 4.INSTALLATION

4.3.8 Beam Mode Check

(1) Remove the guide pipe or the first bend mirror located between

the exit of the laser beam of the oscillator and machine.

(2) Start the oscillator.

(3) First, check the beam position. Laser light, if allowed to

penetrate the acrylic material because of incorrect operation, is very dangerous. The paint of the machine is also likely to be damaged. So, attach as feel plate, then an acrylic plate, about 30cm × 30cm in size. Then, output laser light for 0.1 seconds, with Pc = 1000W output and Du = 100% set by programming. At this time, provide a flow of air with a drier. If a guide laser is used, confirm that CO as the guide laser.

(4) Next, attach an acrylic block to the position indicated by the

white acrylic mark. Ensure that the surface of the acrylic block is perpendicular to the direction of CO2 gas laser light. If a guide laser is used, the perpendicularity of the acrylic block surface can be checked by adjusting the block such that the guide laser is reflected from the acrylic block surface and returns to the beam outlet.

gas laser light is directed to the same spot

(5) Set the program as follows:

C1000-E : Output=1000W Duty=100% Duration=4.0 seconds C2000-E : Output=2000W Duty=100% Duration=4.0 seconds C4000-E : Output=4000W Duty=100% Duration=2.5 seconds

(6) Direct the drier so that it blows air at 45° to the acrylic block,

then output the beam. If air is not provided correctly, the acrylic vapor will catch fire.

(7) Observe the burn pattern, and record the directions (X direction,

Y direction) and output conditions.

Check items

1 Compare the recorded burn pattern with the burn

pattern data attached to the oscillator. Check that there is no significant difference. Note, however, that

the shape may vary, depending on the distance. 2 Check that the shape is perfectly circular. 3 Check that no interference fringes can be observed

nearby.

If a problem is detected, align the resonator of the oscillator or clean the mirror.

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4.INSTALLATION B-70265EN/01

4.3.9 Discharge Aging

If the oscillator is left unused for a long time (three days or more), or if the laser gas circulating system has been opened to the atmosphere (for example, to clean the mirrors or replace gas system components), aging is required. This involves warming up the discharge tubes and circulating gas by performing internal discharge to output absorbent contaminants as gas. If the laser gas circulating system has been opened to the atmosphere, perform a leakage check before attempting aging.

(1) Modify the parameters listed below.

PRM No.15000 bit 3 0 → 1 (Internal discharge is enabled in manual mode.) PRM No.15000 bit 4 1 → 0 (Power correction is disabled.) PRM No.15002 bit 0 0 → 1 (Internal discharge is enabled in automatic operation

mode.)

PRM No.15003 bit 2 1 → 0 (Evacuation is not performed after the RUN OFF.) PRM.No.15008 bit 6 1 → 0 (Automatic aging is disabled.) PRM No.15208 6144 → 0 (Output feedback is turned off.) PRM No.15209 100 → 0 (Output feedback is turned off.) PRM No.15242, 15243 Setting → -100 (The discharge gas pressure is changed.)

(2) Set the RUN key to ON to start the oscillator. Perform discharge

by setting the HV ON switch to ON.

(3) Then, perform internal discharge for thirty minutes using the

settings indicated below. Two methods of internal discharge are supported. One is automatic operation based on programming, while the other is manual operation using switches. C1000-E : Condition=700W, 100Hz, Duty=50% C2000-E : Condition=1500W, 100Hz, Duty=50% C4000-E : Condition=2000W, 100Hz, Duty=50%

• Automatic operation

1 Create the following program.

G32 P1 Q1 ; G24 S700 P100 Q50 R900.; S is a power command. G32 P0;

2 Lock the shutter, then start the program.

• Manual operation

This method can be used when the machine operator's panel has a switch enabling manual internal discharge. 1 On the setting screen, enter the output power and duty

ratio.

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B-70265EN/01 4.INSTALLATION

2 Press the internal discharge switch to perform internal

discharge.

(4) After 15 minutes has passed, set the RUN key to OFF to stop the

oscillator.

(6) Reset the discharge gas pressure to the normal value, perform

internal discharge operation with the specified output level for 15 minutes, then perform purge operation.

(7) Repeat step 6) until the discharge voltage becomes the factory-

set value plus up to 200 V.

(8) Upon the completion of aging, restore the parameter settings to

their original values.

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4.INSTALLATION B-70265EN/01

4.4 OSCILLATOR CONNECTIONS

The oscillator has connections for cooling water piping, laser gas piping, and power and signal cables. For details of the electrical connections for the CNC and machine, refer to the corresponding connection manual.

4.4.1 Cooling Water

4.4.1.1 Specification of the cooling water

The quality of cooling water is specified in the table below. If tap water is used, it should be treated in an ion exchanger.

Refrigerator/air-conditioner cooling water quality standard

(JRA-9001-1980)

pH (25°C) 6.0 to 8.0

Standard item

Reference item

Conductivity (25°C) 200µs/cm or less Chlorine ion Cl Sulfate ion SO M alkalinity CaCO Total hardness CaCO Iron Fe 0.3ppm or less Sulfur ion S Ammonia ion NH Ionic silica SiO

20ppm or less 50ppm or less 50ppm or less 50ppm or less

Not to be detected

0.2ppm or less 30ppm or less

4.4.1.2 Anticorrosive

Add the following anticorrosive to cooling water immediately after installation to prevent problems due to corroding cooling water and to decrease the frequency of replacement of cooling water. Consult the chiller manufacturer for use of the anticorrosive. Product name:

CONTLIME K-6000

Manufacturer:

MITSUBISHI GAS CHEMICAL. ISC

Use:

Add the anticorrosive to cooling water in concentration of 1000 ppm (100 cc/100 liters). Monthly check the concentration of the anticorrosive using concentration check paper dedicated to anticorrosives and add the anticorrosive to cooling water until the concentration reaches about 1000 ppm.

Concentration check paper:

Purchase a concentration check set (50 sheets of check paper, a dropping pipette, etc.) together with CONTLIME K-6000

(manufactured by Mitsubishi Gas Chemical ISC). If the above anticorrosive is added to cooling water and the concentration is controlled, also be sure to replace the cooling water every year.

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B-70265EN/01 4.INSTALLATION

[Reference] Cooling water capacity of the oscillator

Model Water capacity

C1000-E About 6 liters C2000-E About 7 liters C4000-E About 8 liters

4.4.1.3 Cleaning agent

To remove foreign matters such as fur that have adhered to the inside of the cooling water circulating path, wash the cooling water circulating path using the following detergent. Consult the chiller manufacturer for use of the detergent. Product name:

DESLIME Manufacturer:

MITSUBISHI GAS CHEMICAL ISC Use:

Add the detergent of 10% of the amount of cooling water,

circulate the water for an hour, then drain the water. After that,

rinse the cooling water circulating path thoroughly. Do not touch

a stock solution of DESLIME with your bare hands because the

solution is a strong chemical. If a stock solution accidentally

contacts your skin, wash the stock solution off your skin well

under running water.

If waste water used for washing is left standing, the main

ingredient, hydrogen peroxide, is decomposed. Wait until

hydrogen peroxide is decomposed, or dilute waste water with

water to reduce the concentration, then flush the waste water

down the drain.

4.4.1.4 Antifreezing solution

If the chiller is used in a cold district, it should be provided with an antifreezing function. When it is extremely cold, the chiller should be kept running. If it is necessary to use an antifreezing solution for lack of an alternative, he following antifreezing solution should be used. Its concentration should be 30% (usually) or 40% (in an extremely cold district). Use of an antifreezing solution should be restricted within four months in winter. Do not use antifreezing solution together with an anticorrosive. The following antifreezing solution is already added with an anticorrosive. Product name:

AURORA BRINE Manufacturer:

TOKYO FINE CHEMICAL Co. Use:

Refer to the description indicated on the product.

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4.INSTALLATION B-70265EN/01

4.4.1.5 Pure Water Supply Unit

It is recommended that a pure water supply unit (ion-exchange resin) be installed at the water inlet of the chiller. The pure water supply unit can prevent problems with the oscillator from occurring due to corrosion or a clogged pipe. Replace the water periodically because the quality of the circulating cooling water is lowered.

Product name:

Pure Water Supply Cartridge

Manufacturer:

ORUGANO Co. Ltd.

Use:

Refer to the description indicated on the product.

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B-70265EN/01 4.INSTALLATION

4.4.2 Laser Gas

4.4.2.1 Laser gas specification

Supply the laser oscillator with a mixture of gases that satisfy the conditions listed below.

(1) Composition ratio and accuracy

4.4.2.2 Gas pipe

He : 40±2.00%

(2) Water (H (3) Hydrocarbon (CnHm): 1 ppm or less (4) Gas purity: 99.99% or higher

Observe the following cautions for piping between the laser gas cylinder and laser oscillator.

:5±0.25%

:55±2.75% (N2 balance) O): 5 ppm or less

(1) Use nylon tube having an inside diameter of 8 mm or larger

(Junlon AS1 manufactured by Junkousha, or equivalent). Do not

use a rubber or urethane tube. (2) Use a swage-lock vacuum joint. Do not use a one-touch coupler,

quick coupler, or hose-band joint. (3) Minimize the length of tubing. It should be kept within 5 m.

Never exceed 15 m. For a length of 15 m or greater, use stainless

pipe. (4) If it is necessary to use metal pipe for lack of an alternative, use

stainless bright annealed pipe. Minimize the number of joints

used. Connect pipes, if necessary, using a swage-lock vacuum

joint or by TIG welding. Do not use silver soldering or copper

piping. Piping should be installed by a vacuum piping specialist.

Do not extend metal piping over 30 m. (5) Always keep the piping materials clean. Do not allow foreign

matter to get in the pipe. (6) Use a pressure reducer that is free from gas leakage. (7) After installing the pipe, check it for gas leakage, using a liquid

leak checker (Gyupoflex : A98L-0001-0856, detecting bubbles

caused by leaking gas) or a clamp test

NOTE)

NOTE

Open the valve of the gas cylinder to pressurize the inside of the pipe, then close the valve. Check to see if the pressure in the pipe becomes low with time. Monitor the primary pressure of the gas reducer for over 8 hours. If the gas pressure becomes lower by 10% within 8 hours, gas is likely to be leaking. Take an appropriate measure.

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4.INSTALLATION B-70265EN/01

4.4.3 Electrical Connections

Connect the cables to the laser oscillator as described below.

(1) Power cable

U(R)

V(S)

W(T)

Power supply: 200VAC +10% 50/60Hz ±1Hz 3φ -15%

or 220VAC +10% 60Hz ±1Hz 3φ -15% (2) Ground cable

Connect the ground cable to the ground connection section

(class 1 : Ground resistance is 10 ohms or less.) (3) Signal cables

When a metallic cable (shorter than 10 m) is used:

Connect the cable to IF JD1B. (Connect jumper pin LINK1 of IF to the JD1 side.)

When an optical fiber cable (10 m or longer) is used:

Connect the cable to IF COP1B. (Connect jumper pin LINK1 of IF to the COP side.)

(4) Signal lines

(a) Emergency stop input signals (ESP1, ESP2)

(b) OFF prohibit signals (OFI1,OFI2) - (EOF,COM) CNC side

A contact

controlled 24 VDC

4.4.4 Inter-unit Connections

The C1000-E has an oscillator section and exhaust pump section. Interconnection is made according to the procedure described below.

(1) Connection of the exhaust pump power cable

Use the supplied cable. Connect it correctly (with the correct

phase sequence). (2) Gas piping

Use the supplied gas pipe and joints.

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B-70265EN/01 5.MAINTENANCE

5 MAINTENANCE

In FANUC LASER C1000/C2000/C4000-MODEL E, periodic inspection items have been reduced, and adjustments have been made easy. To keep the oscillator in a satisfactory operating condition over a long period, however, it is necessary to carry out periodic maintenance (including daily maintenance) described in this chapter. The oscillator is designed to maintain the same performance and reliability as it has when it is installed, provided that maintenance is carried out as prescribed.

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5.MAINTENANCE B-70265EN/01

5.1 DAILY INSPECTION

Table 5.1 lists daily inspection items. Inspect the FANUC LASER C1000/C2000/C4000-MODEL E according to this table. When parts (including oil) have been used for a prescribed period, replace them quickly.

Table 5.1 Daily inspection items

Item Period Content and instruction

Check to see if the primary pressure is 1MPa or less as measured at the

1 Residual laser gas Daily

2 Exhaust pump oil Weekly

3 Exhaust pump oil leak Weekly

4 Turbo blower oil Daily

5 Turbo blower oil leak Weekly

6 Laser output Weekly

Daily

7 Cooling water

Weekly

regulator on the laser gas cylinder. If the primary pressure is 1 MPa or lower, replace the gas cylinder. Make sure that the oil level is between L (lower limit) and H (higher limit). If the oil level is below L, supply oil. Be sure to replace the oil periodically, every 1500 hours of operation, whichever is earlier. Make sure that no oil is leaking from the exhaust pump main body, drain valve and their periphery. If oil is leaking, immediately replace the exhaust filter, because it is likely to have been clogged. Be sure to replace the exhaust filter periodically, every 3000 hours of operation, whichever is earlier. Make sure that the oil level is between L (lower limit) and H (higher limit). If the oil level is below L, supply oil. Be sure to replace the oil periodically, every 1000 hours of operation, whichever is earlier. Make sure that no oil is leaking from the turbo blower main body, oil inlet, cock, and their periphery. If oil leaks for any reason other than a cock being open, call FANUC. If the laser output decreases within the oscillator, warning message No. 4085 is issued. If this message appears, clean or replace the mirror in the oscillator quickly. Make sure that the chiller discharge output is 0.5 MPa or less. At the start of the oscillator, also make sure that the water temperature is 20°C or higher. Check the quality of cooling water in the chiller. Be sure to replace the cooling water every two months. Adding an anticorrosive to cooling water can decrease the replacement frequency.

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B-70265EN/01 5.MAINTENANCE

5.2 PERIODIC MAINTENANCE

The FANUC LASER C1000/C2000/C4000-MODEL E contain consumables that must be replaced periodically. Table 5.2(a) or (b) lists such consumables and the related periodic maintenance work. Perform periodic maintenance as well as daily inspection described in Section 5.1 by using the listed periods as guidelines. Note, however, that the replacement and maintenance intervals are not guaranteed values but standard values based on field records.

Table 5.2(a) Periodic maintenance items and periods

Item Period of maintenance (operation hour)

1 0 shift mirror and circular polarizer mirror cleaning Every 1000, or when the machining power has degraded 2 Output mirror change Every 3000 to 4000 hours, or when the quality has degraded 3 Rear mirror change Every 3000 to 4000 hours, or when the quality has degraded 4 Folding mirror change Every 3000 to 4000 hours, or when the quality has degraded 5 Exhaust pump oil change Every 1500, or when the exhaust power has degraded 6 Exhaust pump filter change Every 3000, or when the exhaust power has degraded 7 Exhaust pump overhaul Every 10000, or when the exhaust power has degraded 8 Turbo blower oil change Every 1000, or when oil properties have changed

9 Turbo blower overhaul Every 12000, or when the power has degraded 10 Pressure controller gas filter change Every 12000, or when a pressure failure occurs 11 Discharge tube O-ring change Every 6000, or internal leakage occurs 12 Gas pipe O-ring replacement Every 6000, or internal leakage occurs 13 Cooling water change Every 1500, or when cooling water properties have changed 14 Water tubing cleaning Every 3000, or when the water pipe has clogged 15 Alarm lamp replacement Every 3000, or when the lamp fails to light

Table 5.2(b) Mirror cleaning periods

Item

C1000-E C2000-E C4000-E

Cleaning of output and rear mirrors only None Every 1500 to 2000 hours Every 800 to 1200 hours Cleaning of all internal mirrors Every 3000 to 4000 hours

Mirror cleaning periods

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5.MAINTENANCE B-70265EN/01

5.3 DETAILS OF MAINTENANCE

When opening the panels and doors during maintenance, keep the power turned off. Before replacing oil, be sure to check that purging is completed.

5.3.1 Changing the Turbo Blower Oil

Check method

Check the amount of oil in the turbo blower while referring to the figure below. The oil level should be between graduations H and L. This check should be made when the oscillator is at a rest. When the turbo blower is running, it is impossible to check the amount of oil correctly.

Replenishment method

Fig. 5.3.1 Turbo blower oil gauge

(1) Remove the hexagonal-head screw from the oil inlet with a 17

mm wrench. Be careful not to lose the O-ring on the screw. Before supplying turbo oil, stop the oscillator according to the correct procedure and turn off the power.

CAUTION

If the oscillator is not stopped by the correct procedure, the pressure in the turbo blower becomes negative. Opening the oil inlet under such a condition lets a large amount of air get in the turbo blower. This flow of air causes oil mist to get into the oscillator housing, resulting in contamination of internal mirrors.

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B-70265EN/01 5.MAINTENANCE

(2) Take out a bottle of oil from an oil kit (A04B-0800-K326).

Remove the nozzle from the bottle, and take off the inner lid, then put the nozzle back on the bottle. Put the supplied tube into the nozzle, insert the tube into the oil inlet, pour oil being careful to cause no foreign matters to get into oil. Pour oil while checking the oil level from the oil level window until the oil level reaches the three-quarter position from L between L and H. Either superfluous or insufficient oil can be a cause of trouble.

(3) Lightly wipe the area around the oil inlet, hexagonal-head screw

on the oil inlet, and O-ring with a clean cloth or paper, then check that there are no foreign matters. Foreign matters getting into oil may cause a turbo blower fault. Check that the O-ring is fit to the hexagonal-head screw on the oil inlet, then tighten the screw (recommended torque: 800Ncm)

CAUTION

If the O-ring on the oil inlet is damaged, oil leaks.

(4) If oil has spilled over, wipe it up. Otherwise, the peripheral

equipment may be affected adversely.

(5) If there is oil left over, put the inner lid back on the bottle, and

keep the bottle in a dark, cool place.

Replacement method

(1) Get a container for oil drain on hand, and put the tip of the drain

tube into the container.

(2) Turn the oil drain cock through 90 degrees, and the oil will start

draining. Opening the oil inlet during draining can drain oil fast.

(3) After all the oil has been drained, close the oil drain cock by

setting it back in the initial place.

(4) Supply oil by following the same procedure as for

replenishment.

CAUTION

After replacing the turbo blower oil, perform discharge aging.

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5.MAINTENANCE B-70265EN/01

5.3.2 Changing the Exhaust Pump Oil

Check method

Watch the oil gauge, and check that the oil level is between graduations L and H. Also check whether the oil is dark.If the oil level is below L, add oil to the turbo blower or replace the oil in it. If the oil level is above H, drain until the oil level becomes below H.

CAUTION

The exhaust of the turbo blower contains oil mist. The exhaust pump will capture oil mist, and the amount of exhaust pump oil increases with time. When the oil has increased too much, the filter gets immersed in the oil, possibly causing white mist to come out from the pump, or oil to leak. Furthermore, the exhaust capacity may get lowered, or the pump may be damaged.

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B-70265EN/01 5.MAINTENANCE

Replacement method

(1) Stop the oscillator, and turn off the power. (2) Remove the oil inlet plug. There is an O-ring on it. Be careful

not to damage it. A missing or damaged O-ring can lower the

exhaust capacity of the pump. (3) Insert the drain tube into a drain oil pot. (4) Open the drain cock. (5) After the oil has been drained up, close the cock. (6) Supply about 1.8 liters of new oil through the oil inlet, while

watching the oil gauge. (7) Attach the oil inlet plug.

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5.MAINTENANCE B-70265EN/01

5.3.3 Replacing the Exhaust Pump Filter

Replacement method

When the operation time reaches 3000 hours or the exhaust capacity gets lowered, replace the filter. A clogged filter may cause a whitish smoke of oil mist to come out of the pump or lower the exhaust capacity.

(1) Stop the oscillator, and turn off the power. (2) Remove the black screw from the exhaust pump unit, then

remove the filter cover and O-ring. (3) Remove the spring and washer. (4) Pull out the filter element. (5) Check the mounting orientation of a new filter element, then

insert the filter. A filter mounted improperly may cause oil mist

(whitish smoke) to come out of the exhaust pump gas outlet.

Therefore, check again that the filter is mounted properly.

Replacement work is now complete.

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B-70265EN/01 5.MAINTENANCE

5.4 MAINTENANCE PARTS

The maintenance parts are listed below. Refer to the following tables for maintenance unit and part specification information. The part specifications for oscillators compatible with CE marking are not listed below.

Maintenance parts [Nonrepairable parts]

Item Name Specification

1 A98L-0003-0045 1 0 0

Output mirror

2 A98L-0001-0960 0 1 0

4 A98L-0001-0750 1 0 0

Rear mirror

5 A98L-0001-0961 0 1 0

7 A98L-0003-0047 3 0 0

Folding mirror

9 Anti-reflection mirror A98L-0003-0019 0 (1) 0

10 0 shit mirror (only for short optical path length type) A98L-0001-0616/C 0 (2) (1)

Circular polarizer mirror (only for short optical path

length type)

12 A98L-0001-0619/2025 2 0 0

13 A98L-0001-0619/2030 0 2 2

O-ring (for output mirror and rear mirror)

14 A98L-0001-0619/1028 2 0 0

16 JB-OR4D-P38 3 0 0

O-ring (for folding mirror)

18 A290-4514-T001 4 0 0

Discharge tube

19 A290-4522-T001 0 4 0

21 A98L-0003-0004/P22.4S 8 0 0

O-ring (for discharge tube)

23 Trigger electrode A98L-0005-0187 4 4 8

24 O-ring (for trigger electrode) JB-OR4D-P10 4 4 8

25 Mounting screw (for trigger electrode) A98L-0004-0801/4-15 8 8 16

26 Exhaust pump filter A98L-0001-0911 1 1 1

27 Exhaust pump oil A98L-0040-0093/1.0L6 (3.6L) (3.6L) (3.6L)

28 Turbo blower oil A04B-0800-K326 (1/3) (1/3) (1/3)

29 O-ring (for turbo blower oil inlet) JB-OR4D-P10A 1 1 1

30 Condensation sensor A04B-0801-D012 1 1 1

Shutter sensor unit (including tempataure switch and

photoelectric switch) Photoelectric switch unit (including photoelectric

switch)

33 A04B-0808-D012 0 0 1

Tempataure sensor unit (including tempataure switch)

A98L-0003-0036 0 0 1

A98L-0003-0037 0 0 1

A98L-0001-0615/B 0 3 6

A98L-0001-0617/C 0 0 (1)

JB-OR4D-P38 0 2 2

JB-OR4D-G55 0 3 6

A290-4533-T001 0 0 8

A98L-0003-0004/P26S 0 8 16

A04B-0816-D002 1 0 0

A04B-0810-D010 0 1 1

A04B-0810-D011 0 1 0

C1000-E C2000-E C4000-E

Model (Q'ty)

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5.MAINTENANCE B-70265EN/01

Maintenance parts [Nonrepairable parts]

Item Name Specification

35 A57L-0001-0057/080 0 1 0

Tempataure switch (for shutter mirror)

37 Photoelectric switch (for shutter) A57L-0001-0091 2 0 0

38 A57L-0001-0095/B050 1 1 0

Tempataure switch (for beam absorber)

40 Flow switch A91L-0001-0216/50-E-00A 1 0 0

41 A91L-0001-0151/B 0 1 0

Flow sensor

43 Micro switch (only for short optical path length type) A55L-0001-0225/01CBS 0 (2) (2)

44 Semiconductor laser unit A04B-0811-D401 1 1 1

45 Fan for shutter A90L-0001-0349 0 1 0

46 Fan for shutter A90L-0001-0335/B 0 0 1

47 Cooling fan A90L-0001-0396 6 16 37

48 A91L-0001-0219 1 0 0

Hour meter

Circuit braker (JPN)

Tripping 24VDC

Circuit braker (UL)

Tripping 24VDC

Circuit braker (JPN)

Tripping 24VDC

Circuit braker (UL)

Tripping 24VDC

Circuit braker (JPN)

Tripping 24VDC

Circuit braker (UL)

Tripping 24VDC

56 A60L-0001-0391/V050

57 A60L-0001-0391/V030

58 A60L-0001-0391/V040 0 0

Circuit braker

59 A60L-0001-0308/X010

61 Motor starter A60L-0001-0389/J 0

62 A60L-0001-0262/5W

Circuit protector

A57L-0001-0057/090 1 0 1

A57L-0001-0095/B080 0 0 1

A91L-0001-0214/180 0 0 1

A91L-0001-0086/TH142 0 1 1

A60L-0001-0308/W075JH2

A60L-0001-0238/080B

A60L-0001-0308/N150JH2 0

A60L-0001-0326/150B 0

A60L-0001-0308/N200JH2 0 0

A60L-0001-0402/200B 0 0

A60L-0001-0308/V005

A60L-0001-0262/10W 0 0

C1000-E C2000-E C4000-E

Model (Q'ty)

QF1

QF22QF2,34QF2-5

QF3

QF42QF5,61QF7

QF5

QF6

QF1

QF4

QF7

QF1

QF6

QF9

QF8

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B-70265EN/01 5.MAINTENANCE

Maintenance parts [Nonrepairable parts]

Item Name Specification

64 A58L-0001-0243

65 A58L-0001-0313/A2A3P13

Electromagnetic conductor

67 A74L-0001-0008/10D50D

68 A74L-0001-0087/A

Surge absorber

69 A74L-0001-0100

71 Noise filter A70L-0001-0054 1 1 1

72 A97L-0201-0771/H-0.5-B 1 0 0

Gas filter

73 A97L-0200-0649/2-2-S 0 1 1

75 Nylon ferrule 1/4” A98L-0004-0348/2-N 6 16 18

76 Nylon ferrule 3/8” A98L-0004-0348/3-N 6 4 4

77 Nylon ferrule 1/2” A98L-0004-0348/4-N 2 4 4

78 A290-4514-X206 1 0 0

Shutter mirror

80 Shutter mirror (for guide laser) A98L-0001-0708 1 1 1

81 Heat exchanger (out) A97L-0201-0968 1 0 0

82 Heat exchanger (in) A97L-0201-0969 1 0 0

83 Heat exchanger (out) A97L-0201-0556/B 0 1 0

84 Heat exchanger (in) A97L-0201-0828 0 1 0

85 Heat exchanger (out) A97L-0201-0439/B 0 0 1

86 Heat exchanger (in) A97L-0201-0691/B 0 0 1

87 Heat exchanger (for use within the cabinet) A97L-0200-0849 2 2 4

88 Heat exchanger (for use within the cabinet) A97L-0201-0588 0 2 4

89 A97L-0200-0937/C 1 0 0

Beam absorber

91 Beam absorber assembly A290-4522-V200 0 1 0

92 A04B-0815-C324 1 0 1

Warning lamp

94 RF FET PCB 1 (for power supply B209) A20B-1007-0140 1 2 4

95 RF FET PCB 2 (for power supply B209) A20B-1007-0150 1 2 4

96 Ste-up transformer PCB (for power supply B209) A20B-1007-0132 1 2 4

97 Diode module (for power supply B209) A50L-2001-0342 1 2 4

98 Diode module (for power supply B209) A50L-2001-0439 8 16 32

99 Cooling fan (for power supply B209) A90L-0001-0396 2 4 8

100 Cooling fan (for maching box) A90L-0001-0396 1 2 4

A58L-0001-0330/A2A 0

A74L-0001-0091/B

A97L-0200-0649/2-0.5-S 0 1 1

A290-4516-X204 0 1 1

A97L-0201-0972 0 0 1

A290-4512-V400 0 1 0

C1000-E C2000-E C4000-E

Model (Q'ty)

KM1,23KM1-35KM1-5

KM3

Z1,2

Z1101Z1101Z110

Z1111Z1111Z111

KM4

Z1-5

Z1-6

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5.MAINTENANCE B-70265EN/01

Maintenance parts [Repairable parts]

item Name Specification

1 Laser power supply unit A14B-0082-B209 1 2 4

2 A14B-0082-B311 0 2 0

Matching box

3 A14B-0082-B315 0 0 4

IF PCB (for 16i-L)

6 Gas control PCB A16B-1700-0490 1 0 0

7 Relay PCB B A16B-1600-0361 1 1 1

8 A16B-1600-0660 1 0 0

Input unit control PCB

10 Turbo PCB A16B-1600-0670 1 1 1

11 Stabilized power supply A20B-1005-0124 1 1 1

12 A04B-0807-D001 0 1 1

Power sensor unit

14 A04B-0810-C410 0 1 0

Shutter unit

15 A04B-0815-C410 0 0 1

17 A04B-0800-C011 0 1 0

Turbo blower

18 A04B-0800-C013 1 0 0

20 A90L-0001-0500/8LF 1 0 0

Inverter

22 Intake unit (for gas controller) A04B-0816-D400 1 0 0

23 Exhaust unit (for gas controller) A04B-0816-D401 1 0 0

24 Sensor base (for gas controller) A290-4514-V040 1 0 0

25 Pressure control unit A04B-0811-C400 0 1 1

26 Pressure sensor (at shipping) A91L-0001-0217/0-T2 (1) 0 0

27 Pressure sensor A91L-0001-0201 1 0 0

28 Cable kit (for A91L-0001-0201) A04B-0816-K135 1 0 0

29 Pressure sensor A91L-0001-0201 0 1 1

30 A04B-0816-D402 1 0 0

Control valve

32 Exhaust pump A90L-0001-0425 1 1 1

33 Water distributer unit (in) A290-4514-V801 1 0 0

34 Water distributer unit (out) A04B-0816-C421 1 0 0

35 Water distributer unit A04B-0813-C420 0 1 0

36 Water distributer unit A04B-0815-C420 0 0 1

37 A04B-0810-C450 0 1 0

Beam holding unit

A14B-0082-B316 1 0 0

A16B-2100-0141 1 1 1

A16B-1600-0661 0 1 1

A91L-0001-0225 1 0 0

A04B-0816-D410 1 0 0

A04B-0800-C015 0 0 1

A90L-0001-0464 0 1 1

A97L-0200-0797/B 0 1 1

A04B-0811-C451 0 0 1

C1000-E C2000-E C4000-E

Model (Q’ty)

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B-70265EN/01 6.TROUBLESHOOTING

6 TROUBLESHOOTING

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6.TROUBLESHOOTING B-70265EN/01

6.1 TROUBLESHOOTING PROCEDURE

The troubleshooting procedure to be applied depends on the failure occurrence status as indicated below. Perform checking according to the items listed below.

(1) Action in response to alarm screen display (See Sections 6.2 and

6.3.)

(2) Major faults

(a) Laser power supply unit alarm display (See Section 6.4.1.)

(b) The power cannot be turned off with the CRT/MDI power

switch. (See Section 6.4.2.)

(d) The laser output level is low immediately after the power is

turned on. See Section 6.4.2.)

(e) The laser output displayed on the CRT screen is unstable.

(See Section 6.4.2.) (f) A cooling fan circuit breaker trips. (See Section 6.4.2.) (g) The magnetic contactor for a exhaust pump causes thermal

trip. (See Section 6.4.2.) (h) The main circuit breaker trips. (See Section 6.4.2.) (i) Excessive laser gas consumption. (See Section 6.4.2.) (j) A inverter related alarm is displayed. (See Section 6.4.2.)

CHECKING ON FAULTS

After identifying the following items, call the FANUC service center. In some cases, a symptom is not actually a fault in the oscillator, although it looks like a fault. So, check it with the following sections.

(1) Symptoms

(a) State of operation

(machining in progress, oscillator being started, etc.) (b) Timing of a fault (alarm) (c) Alarm number (d) How often the fault occurs (e) Oscillator serial number

(2) Other information

(a) Software system and edition indicated on the CRT screen

when power is turned on (b) Parameter settings;

check the current parameter settings with the corresponding

values indicated on the unit, and report your finding to the

FANUC service center.

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B-70265EN/01 6.TROUBLESHOOTING

6.2 ERROR MESSAGES AND COUNTERMEASURES

See the conceptual diagram of alarm processing and the list of error code in the Appendix C.

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6.TROUBLESHOOTING B-70265EN/01

6.3 RESPONDING TO ALARM MESSAGES ON THE SCREEN

The alarm numbers, DGNs, and parameter Nos. are of the FS16i-L.

ALM No.4061 AD converter 1 is not normal.

Alarm output condition

This alarm is issued when the A/D converter 1 does not return the conversion completion signal in the specified time after the start of conversion. This A/D converter is designed to read gas pressure and power data. Related parameters DGN. 981 Data when A/D1 conversion becomes abnormal.

No. Cause of trouble Solution

1 Anomaly of AD

converter 1

2 Anomaly of IF PCB If this alarm is still issued after the A/D

Replace AD converter 1 mounted on B8 on A16B-2100-0141.

converter 1 is replaced, replace the interface PCB (A16B-2100-0141).

ALM No.4062 AD converter 2 is not normal.

This alarm is issued when the A/D converter 2 does not return the conversion completion signal in the specified time after the start of conversion. This A/D converter is designed to read discharge tube voltage and current data. Related parameters DGN. 982 Data when A/D2 conversion becomes abnormal.

No. Cause of trouble Solution

1 Anomaly of AD

converter 2

2 Anomaly of IF PCB If this alarm is still issued after the A/D

ALM No.4063 Anomaly of laser power supply unit

This message appears when the laser power supply unit becomes abnormal or performs protective operation. For the causes of trouble and their solutions, see the table below and Section 6.4. The power supply unit performs protective operation even when a part other than the power supply unit becomes abnormal, so sufficient investigation is required. If just the power supply unit is replaced without removing the fundamental cause, the alarm will recur.

This alarm is issued when any or all of the signals from bits 0 to 7 at address 06H in DI of the laser interface are set to 0 in LRDY or a later step of the sequence. Note that the bits not set in parameter No. 15025 or 15027 are not checked.

Alarm output condition

Replace AD converter 2 mounted on D7 on A16B-2100-0141. Call the FANUC service center.

converter 2 is replaced, replace the interface PCB (A16B-2100-0141).

Alarm output condition

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B-70265EN/01 6.TROUBLESHOOTING

Related parameters PRM.15025, 15027 Power supply selection DGN.966 #0-#7 Power supply unit operation status DGN.970 #0-#7 Power supply unit selection signal DGN.974 #0-#7 Power supply unit alarm display

(1) Preliminary inquiry

Check item Cause of trouble, Solution

1 Checking

parameters

2 Checking the

discharge tubes

3 Checking the trigger

electrode

4 Checking the

matching box

5 Checking cooling

water temperature

6 Checking cable

connectors

7 Insufficient

discharge aging

Confirm that all the parameters described in the attached parameter sheets are correctly set. In case there exists any error, correct it.

1) Check whether the mounting bracket of a discharge tube are loose or missing.

2) Check whether the electrode has separated.

3) Check whether the inside and outside of a discharge tube is dirty.

4) Check the discharge tubes for a crack.

5) Check the O-ring of each discharge tube for damage.

Check whether the trigger electrode is dirty.

1) Check whether the matching box fan stops.

2) Check whether any coil in the matching box becomes black.

Confirm that the cooling water temperature is in the range of 20 to 30°C. Check the cables and connectors connected to the power supply for looseness. Perform another aging operation according to Item in the Section 4.3.9.

(2) Confirming operation and investigating the cause of a fault

Switch on the failing power unit, observe the condition and clarity the cause referring to the following tables.

Phenomenon Presumption cause

1 An alarm is issued when the LED of a laser

power supply unit is not turned on.

2 An alarm occurs before discharge begins. (The

time when 200 VAC is supplied to the power supply)

3 The RF current is small in comparison with

other power supply units and the discharge tends to disappear.

4 The RF discharge current is large in

comparison with other units. The alarm is DCV alarm.

5 The RF voltage of all the units is high during

discharge and the laser power is low. The discharge tends to disappear. When the purge is repeatedly performed, the RF voltage gradually decreases and the laser power recovers. This phenomenon often appears after the laser was not used for a long period.

The IF PCB is faulty. Poor cable contact The laser power supply is defective.

The laser power supply is maladjusted.

The external laser gas pipe is abnormal. The gas composition is not normal due to leakage of a gas.

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6.TROUBLESHOOTING B-70265EN/01

Phenomenon Presumption cause

6 The RF voltage of all the units is high during

discharge and the laser power is low. The discharge is tends to disappear. Even though the purge is repeatedly performed, the situation does not recover.

7 The RF voltage of all the units is high during

discharge but the laser power is normal. The discharge is tends to disappear. The output is high for the high output command, and it is lower than the standard for the low output command.

8 The RF voltage of all the units is low during

discharge and the laser power is low. The discharge is widely spread. In the high laser power region, the power is low but in the low power region, it is higher than the normal value. The alarm is DCV alarm.

9 Although the RFV, RFI, and output are normal,

an alarm may occur.

Internal leakage of oscillator Internal leakage of water of the oscillator

The intra-tube pressure of the laser gas is high or the gas composition is not normal (excessive amount of N The intra-tube pressure of the laser gas is high or the gas composition is not normal (excessive amount of He). Anomaly of the Laser power-supply unit itself (anomaly of alarm circuit).

(3) Solution

Cause of trouble Solution

1 IF PCB abnormal Replace the IF PCB. 2 Laser power supply

abnormal

3 Laser power supply

maladjusted

4 External laser gas

pipe abnormal

5 Laser gas

composition ratio abnormal

6 Pressure sensor

abnormal

7 Internal leakage,

leakage of water

Locate the faulty component, then replace it.

Adjust the laser power supply as explained in Chapter 9. Identify the faulty location, then repair the external pipe as explained in Chapter 4. Replace the laser gas with one that satisfies the specifications. If there is a leakage in the external piping and a gas cylinder is attached to the piping for a long time, the gas composition may have changed. Replace the pressure sensor.

Check the faulty location, and replace the faulty part so that the leakage is within the allowable range (not more than 10/15 minutes set as the amount of change in DGN. 905).

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B-70265EN/01 6.TROUBLESHOOTING

ALM No.4065 Shutter anomaly

Alarm output condition

This alarm is issued when the shutter open command and the shutter status do not match in LRDY or a later step of the sequence. Shutter open signal SHOP (bit 0 at address 05H of DO of the laser interface) Shutter status signal SHOF (bit 5 at address 01H of DI of the laser interface) SHON (bit 4 at address 01H of DI of the laser interface) If SHOP = 1, SHON = 1 and SHOF = 0 are regarded as normal. If SHOP = 0, SHON = 0 and SHOF = 1 are regarded as normal. Any state other than the above causes an alarm. When the SHOP status changes, the alarm monitor is masked for the time set in parameter No. 15152 (default: 3 seconds). Related parameters DGN.961 #4 SHON Shutter open detection DGN.961 #5 SHOF Shutter close detection DGN.973 #5 SHOP Shutter open command F200 #4 Shutter ON signal F200 #3 Shutter OFF signal

See the following table, and check the operation status.

[Open] command

DGN No.973.bit0=1

[Open] detector state signal DGN No.961 bit 4 [Close] detector state signal DGN No.961 bit 5 Normal(N)/Abnormal(A) N AAAAAAN

11001100

01010101

[Close] command

DGN No.973.bit0=0

Cause of trouble Solution

1 Shutter clamp not removed. Remove the shutter clamp. 2 Anomaly of position detector Replace the position detector. 3 Shutter cam loosened. Tighten the screw again. 4 Shutter arm section caught Eliminate the cause of the problem. If

the problem cannot be solved, replace the unit.

5 Relay PCB B (A16B-1600-

0361) is faulty.

6 Anomaly of cables connecting

each PCB.

Replace the relay PCB B.

Check the connection of each cable.

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6.TROUBLESHOOTING B-70265EN/01

ALM No.4066 Discharge starting anomaly

After HV is turned on(start discharge), the discharge starts. This alarm occurs when at least one discharge tube discharges hard and causes high voltage.

Alarm output condition

When HV is turned on, discharge starts six seconds later to reach the maximum bias command value. After the time set in parameter No. 15222 is passed, the voltage value of each discharge tube is compared with the value set in parameter No. 15221. If any voltage is higher than the parameter setting, this alarm is issued. Related parameters PRM.15220 Maximum bias command value PRM.15221 Discharge start check voltage PRM.15222 Discharge wait time PRM.15223 Bias command DGN.909-914 Discharge tube voltage and current

Cause of trouble Solution

1 Anomaly of parameter

setting

2 Anomaly of laser gas

composition

3 Discharge tube electrode

mounting bracket loosened

4 Leakage in vacuum

system or water leakage

5 The gas flow control

valve is closed 6 Matching box abnormal Replace the matching box. 7 Crack or pinhole in

discharge tube

Make a setting using the values of parameters listed in the parameter table attached to the machine. Use the laser gas with the specified composition accuracy. Check the electrode contacts, and secure any loose mounting brackets.

Locate the leakage, and replace the defective part. Adjust the gas flow control valve to obtain the specified gas flow rate.

Replace the discharge tube.

ALM No.4067 Overheating laser oscillator housing

The temperature of the input side of the electrode cooling fan is monitored and sends alarm when it exceeds 60 temperature decreases, the alarm state is solved automatically. Before that it cannot be reset. The C1000-E does not have the sensor.

This alarm is issued when the cabinet temperature signal becomes 0 during the time from RUN-ON to immediately before purge completion. Cabinet temperature signal CAT (bit 1 at address 01H of DI of the laser interface) Related parameters DGN.961 #1 *CAT Temperature sensor in the cabinet

°C. When the

Alarm output condition

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B-70265EN/01 6.TROUBLESHOOTING

Cause of trouble Solution

1 Excessive environmental

temperature

2 Excessive cooling water

temperature

3 Anomaly of cooling fan

motor

4 Anomaly of temperature

sensor

5 Anomaly of oscillator IF

PCB(A16B-2100-0141)

6 Anomaly of connecting

cables between the PCBs.

Lower the ambient temperature by ventilation (5 to 30°C)

Set the temperature of the cooling water to within an appropriate range (20 to 30°C).

Replace the cooling fan motor.

Check the continuity of the temperature sensor. If any disconnection is found, replace the temperature sensor. Replace the faulty PCB.

Check the connection of each cable.

ALM No.4068 Too much incident laser beam back to the resonator.

This alarm is issued, if a workpiece reflects laser beam more than the rating to the laser oscillator. This can happen when the laser beam is used to drill, cut, or weld materials (such as copper, brass, and aluminum) having a high reflectivity to the laser beam (10.6

µm).

Alarm output condition

This alarm is issued when the actual laser output is in one of the following conditions at the time of beam output: (1) The actual laser output is higher than the average command power

(power × duty) by more than the value set in parameter No. 15265.

(2) The actual laser output exceeds the value set in parameter No. 15266. The actual laser output is not monitored for five seconds after the beam is turned on or the output is changed. Related parameters PRM.15215 Power input compensation coefficient PRM.15265 Allowable output increase value PRM.15266 Output limit DGN.906 Actual output

Cause of trouble Solution

1 Excessive returning

beam back into the resonator

2 Anomaly of parameter

for alarm detection

3 Anomaly of parameter

for output power table

4 Anomaly of parameter

for input calibration coefficient

Lower the output specified in the command, or take an action to reduce the reflected laser beam.

Check the settings of parameter Nos. 15265 and 15266 with the corresponding values in the parameter table attached to the unit. Check the settings of parameter Nos.15280 to 15308 with the corresponding values in the parameter table attached to the unit. shown in the attached table. After replacing the rear mirror or power sensor, it is necessary to change this parameter setting. See Chapter 9.

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6.TROUBLESHOOTING B-70265EN/01

ALM No.4069 Anomaly of power supply unit voltage of IF PCB

This alarm appears when there occurs the anomaly in the stabilized power unit voltage +5,

This alarm is issued when the enable signal in the interface becomes 0 during the time from RUN-ON to immediately before purge completion. Enable signal in the interface EN (bit 0 at address 00H of DI of the laser interface) Related parameters DGN.960#0 *ENB Enable signal in the interface

Cause of trouble Solution

1 Fuse blowing Correct the cause of the blown fuse, then

2 Anomaly of stabilized

power source unit

3 Anomaly of power unit of

IF PCB (A16B-2100-0141)

4 Laser oscillator main

circuit breaker abnormal

±15, +24V of IF PCB for NC interface.

Alarm output condition

replace the fuse. Check the output voltage (24V ±5%) of the stabilized power source unit. If the allowable voltage range is exceeded, replace the unit. See Section 6.5 for details of the normal supply voltage. If the allowable voltage range is exceeded, replace the IF PCB. Check whether the main circuit breaker is conducting (ON).

ALM No.4070 Anomaly of chiller unit

Setting the RUN ON switch to ON causes the CNC to output a chiller unit start signal to the machine, which will respond with a chiller unit ready signal. The CNC monitors this signal. If the chiller ready signal stops, the CNC issues this alarm. Check the DGN status to confirm the signal from the chiller unit. If the signal is abnormal, check the chiller unit.

Alarm output condition

Monitoring starts four seconds after the chiller start signal is output, and monitoring is ended by setting RUN-OFF. If the chiller ready signal CLRDY (G221#6) becomes 0 during monitoring, this alarm is issued. Related parameters G221#6 CLRDY Chiller ready signal F221#4 CLON Chiller start request signal

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B-70265EN/01 6.TROUBLESHOOTING

ALM No.4071 Anomaly of assist gas

When starting machining, the CNC monitors for a ready signal from the assist gas supply unit in the machine. If this signal is not sent normally, the CNC issues this alarm. Check the DGN status to confirm the signal from the assist gas supply unit. If the signal is abnormal, check the assist gas supply unit. This alarm is issued also when in G32P

αQβ, α is not 0 to 3, or β is not

1 to 7 during program execution.

Alarm output condition

This alarm is issued when the assist gas ready signal (G221#7) becomes 0 during the assist gas output command. Related parameters G221#7 AGRDY Assist gas ready signal G222#5 AGST Assist gas start signal F222#2-#0 AG1-AG3 Assist gas selection signal

ALM No.4072 Shortage of cooling water

This alarm appears when the water shortage takes place.

Alarm output condition

When the chiller water level signal becomes 0 once during the time from RUN-ON until RUN-OFF, signal re-checking is made five seconds later. If the recheck still shows the 0 state, this alarm is issued. Chiller water level signal MVW (bit 0 at address 01H of DI of the laser interface) Related parameters DGN.961#0 *MVW W ater level sensor

Cause of trouble Solution

1 Shortage of

cooling water

2 Anomaly of sensor

cable

3 Anomaly of water

flow rate sensor

1) The capacity of the chiller unit is insufficient, or the water flow rate is reduced due to a clogged pipe. Use a chiller unit having sufficient capacity, or clean the piping.

2) Check whether the cooling water is distributed normally throughout between the external optical system and the laser oscillator. Ensure that cooling water is supplied to the laser oscillator at the specified flow rate.

Check the connection of each cable.

If this alarm is issued even when the specified flow rate is satisfied, clean or replace the water flow rate sensor.

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6.TROUBLESHOOTING B-70265EN/01

ALM No.4073 Decrease of laser gas pressure

The pressure of the laser gas supplied to the laser oscillator is monitored. This alarm is issued, if this pressure becomes lower than the permissible level.

Alarm output condition

(1) This alarm is issued when the laser gas pressure signal becomes 0

during the time from RUN-ON until RUN-OFF. The alarm monitor is masked while the purge valve is open and for five seconds after the valve is closed, and while the exhaust valve of the external piping is open and for five seconds after the valve is closed.

(2) This alarm is issued when purge operation is not completed in three

minutes after the start of purge operation.

(3) When a laser gas mixing device is provided, this alarm is issued if the

tank pressure signal becomes 0. Laser gas pressure signal MGP (bit 5 at address 00H of DI of the laser interface) Tank pressure signal MI12 (bit 2 at address 10H of DI of the laser interface) Related parameters PRM.15009#7 TEM Tank supply pressure DGN.960#5 *MGP Laser gas supply pressure sensor

Cause of trouble Solution

1 Tool low supply pressure

of laser gas

2 No laser gas. Check whether the gas cylinder is empty or

3 Leakage from the gas tube

leading to the oscillator

4 Gas supply pressure

sensor or cable abnormal

whether the connection valve is closed. If empty, replace the gas cylinder. Check that the gas pipe joint is secure. Also check whether the tube or pipe is broken. If so, replace it. Check whether the gas supply pressure sensor is set correctly. If not, set the sensor as explained in Chapter 9. If the sensor cannot be reset, replace the sensor.

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B-70265EN/01 6.TROUBLESHOOTING

ALM No.4075 Condensation

A condensation sensor is mounted near the output mirror holder in the oscillator. This alarm occurs when the sensor detects condensation. After this alarm occurs, the alarm status cannot be reset until the condensation status is released. Do not blow hot air of 60 on the condensation sensor.

Alarm output condition

This alarm is issued when the chiller water temperature signal becomes 0 during the time from RUN-ON until RUN-OFF. Chiller water temperature signal WT1 (bit 2 at address 01H of DI of the laser interface) Related parameters DGN.961#2 *WT1 Condensation sensor

Cause of trouble Solution

1 Tool low cooling water

temperature

2 Connecting anomaly of

condensation sensor cable

3 Anomaly of condensation

sensor

Set the water temperature near the room temperature (plus about 1°C).

Check whether the cable is securely connected to the condensation sensor. If not, reattach the cable. If the sensor operates when there is no condensation around the sensor, the sensor is abnormal. Replace the sensor.

°C or higher

ALM No.4076 Laser output decrease

This alarm is issued, if the monitored laser output is much lower than the specified laser output, that is the monitored laser output is lower than the specified output by a value specified in parameter No. 15271.

Alarm output condition

This alarm is issued when the actual laser output level is lower than the average command power (power x duty) by more than the value set in parameter No. 15271. Monitoring, however, is not performed for three seconds after the beam is turned or after the output is changed. Related parameters PRM.15271 Allowable output drop value DGN.906 Actual output

Cause of trouble Solution

1 Lack of output from

laser power sensor unit

2 Connecting anomaly

of the cable of laser power sensor unit.

The thermocouple inside the power sensor unit may be damaged, or there may be a poor terminal connection. Measure the direct current resistance between the terminals of the power sensor unit, and check that the measured value falls within 100 to 500 ohms. If the measured value falls outside this range, replace the power sensor unit. Check whether the cable is securely connected to the power sensor unit. If not, reattach the cable.

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6.TROUBLESHOOTING B-70265EN/01

Cause of trouble Solution

3 Anomaly of

intermediate PCB B (A16B-1600-0361)

If the above checks do not reveal any abnormality, and there is no output from intermediate PCB B, replace the PCB.

ALM No.4077 Overheat of beam absorber

Laser beam is introduced into the beam absorber, when the oscillation takes place with shutter closed. This absorber is water-cooled and sends alarm when the temperature of the absorber exceeds a critical one. In the usual operation, the irradiation of the absorber takes place only during the calibration after the oscillator start.

Alarm output condition

This alarm is issued when the absorber temperature signal becomes 0 during the time from RUN-ON to immediately before purge completion. Absorber temperature signal ABT (bit 7 at address 01H of DI of the laser interface) Related parameters DGN.961#7 *ABT Absorber temperature switch

Cause of trouble Solution

1 Insufficient cooling

water

2 Temperature sensor

wired incorrectly

3 Temperature sensor

abnormal

4 Absorber abnormal If the temperature rises when water is flowing,

ALM No.4078 Gas pressure anomaly in discharge tube

The gas pressure is monitored after the discharge start ready condition (LRDY) is established. This alarm is issued, if the monitored gas pressure deviates by

This alarm is issued when the actual gas pressure deviates by ±100 or more from the set level in LRDY or a later step. Monitoring, however, is not performed during the time from HV OFF until LRDY. Related parameters DGN.905 Actual gas pressure

The amount of cooling water being supplied to the beam absorber may be insufficient. Check whether the cooling water tube between the water branch unit and beam absorber is clogged. If the tube is clogged, replace the tube. Check if the cable is securely connected to the temperature sensor. If not, reattach the cable. The temperature sensor is designed to be actuated by temperatures of 80°C or higher. If the temperature sensor is actuated at lower temperatures, replace the sensor.

replace the absorber.

±100 (1330Pa) from the set gas pressure.

Alarm output condition

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Cause of trouble Solution

1 Anomaly of parameter

setting of gas pressure control

2 Leakage in circulating

system

3 Stopped turbo blower Check the turbo blower and inverter. 4 Abnormal supply laser

gas pressure setting

5 Anomaly of pressure

sensor

6 The gas flow control

valve is closed.

7 Anomaly of gas control

unit

Check whether the values of PRM NO. 15000/bit1,15244,15245,15246 are set as indicated in the attached data sheets. If a different value is set, set the value specified in the data sheets.

1) Check whether any joints in the gas circulating system are loose. If a loose joint is found, tighten the joint firmly.

2) Check whether any components of the gas circulating system are cracked. If a cracked component is found, replace that component.

3) Check whether there is a hole in a discharge tube. If a hole is found in a discharge tube, replace the discharge tube.

Adjust the secondary pressure at the regulator on the gas cylinder so that the pressure of laser gas supplied to the laser oscillator is 0.15 to

0.20 MPa (rating) as measured at the entry of

the oscillator. If the distance between the gas cylinder and the oscillator is larger than 5 m, it is necessary to set the pressure slightly higher. Replace the pressure sensor.

Adjust the gas flow control valve to supply gas at the specified flow rate. If the above checks do not reveal any abnormality, replace the pressure controller.

ALM No.4079 Press the RESET key

If the emergency stop button is pressed after the discharge start ready condition (LRDY) is set up, the shutter is closed, discharge stops, and the LRDY condition is resumed, then this alarm is displayed. To reset the alarm, remove the cause of trouble, release the emergency stop button, and press the reset key on the operator's panel.

Alarm output condition

This alarm is issued when an emergency stop occurs in LRDY or a later step. Related parameters DGN.960#1 *ESAL Emergency stop processing signal

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6.TROUBLESHOOTING B-70265EN/01

ALM No.4080 Leakage of gas tube/anomaly of exhaust pump

When the RUN (pressure control start) button is pressed, the exhaust pump starts evacuating the gas in the circulating system to place the oscillator in the low-pressure state. This alarm occurs when the pressure does not reach the exhaust completion pressure specified for parameter No. 15240 until the specified time (default: 10 minutes) has elapsed after the start of exhaust.

Alarm output condition

After RUN-ON, evacuation starts. When the laser gas pressure does not reach the level set in parameter No. 15240 within the time set in parameter No. 15259 after the start of evacuation, this alarm is issued. Related parameters PRM.15240 Evacuation completion negative pressure

Cause of trouble Solution

1 Incorrect gas pressure

control parameter setting

2 Anomaly of IF PCB

(A16B-2100-0141)

3 Gas leakage from piping 1)Check whether any component joints in the

4 Anomaly of exhaust

pump

Check if the value of PRM No. 15240 is set as indicated in the attached data sheets. If a different value is set, set the value specified in the data sheets. If the gas pressure of the gas circulating system does not decrease at all, the IF PCB may be faulty. Check whether the CP89(Solenoid valve signal) connector on the PCB is loose. Also check the signals of the IF PCB. If an abnormal signal is detected, replace the IF PCB.

gas circulating system are loose. If a loose joint is found, tighten the joint firmly.

2)Check whether any components in the gas

circulating system are cracked. If a cracked component is found, replace that component.

3)Check whether the O-ring of each discharge

tube is worn. Replace any O-rings that exhibit excessive wear. If a Teflon O-ring is ever removed, it must be replaced with a new one.

4)Check whether there is a hole or crack in a

discharge tube. If a hole is found in a

discharge tube, replace the discharge tube. Check whether the piping between the oscillator and exhaust pump is normal.

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Cause of trouble Solution

5 Anomaly of exhaust

pump

If the above checks do not reveal any abnormality, the performance of the exhaust pump has deteriorated. Check the following items.

1)The oil level is too low. Supply oil as

explained in Chapter 5.

2)Other than the approved type of oil is being

used. Supply the approved type of oil as

explained in Chapter 5.

3)The exhaust filter is clogged. Replace the

exhaust filter as explained in Chapter 5.

4)The exhaust pump outlet is locked or clogged

to disable exhaust operation. Remove the

cause of the locking or clogging.

5)Check whether the exhaust pump turns in the

reverse direction because of a problem in

phase rotation. If the steps above do not clear the fault, replace the exhaust pump.

ALM No.4081 Anomaly of gas pressure control

Pressing the RUN (pressure control start) button starts expelling air from the laser gas tube. When a specified degree of vacuum is attained, laser gas is supplied into the laser gas tube, and gas pressure control begins. Whether the pressure is within for parameter No.15241 is checked, 45 seconds after the start of gas pressure control. This alarm occurs when the pressure does not fall within this range. When no error occurs, the turbo blower rotates and the discharge start ready condition (LRDY) is established.

±20 (266 Pa) of the pressure specified

Alarm output condition

This alarm is issued when the actual gas pressure is not within ±20 of the parameter setting (parameter No. 15241) after 45 seconds have passed since the start of gas pressure control. Related parameters PRM.15241 Gas pressure at the start of discharge DGN.905 Actual gas pressure

Cause of trouble Solution

1 Anomaly of

parameter setting of gas pressure control

Check whether the values of PRM Nos. 15000#1, 15244, 15245, 15246 are set as indicated in the attached data sheets. If a different value is set, set the value specified in the data sheets.

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6.TROUBLESHOOTING B-70265EN/01

Cause of trouble Solution

2 Gas leakage from

piping

3 Anomaly of supply

laser gas pressure

4 Anomaly of IF PCB

(A16B-2100-0141)

5 Anomaly of

pressure sensor

6 Anomaly of

pressure control valve

1)Check whether any component joints of the gas circulating system are loose. If a loose joint is found, tighten the joint firmly.

2)Check whether any components of the gas circulating system are cracked. If a cracked component is found, replace that component.

3)Check whether there is any hole in a discharge tube. If a hole is found in a discharge tube, replace the discharge tube.

Adjust the secondary pressure at the regulator on the gas cylinder so that the pressure of laser gas supplied to the laser oscillator is 0.15 to 0.20 MPa (rating) as measured at the entry of the oscillator. If the distance between the gas cylinder and the oscillator is larger than 5 m, it is necessary to set the pressure slightly higher. Measure the pressure monitor voltage (about 0 V to 9 V at the LTP test terminal) and command voltage (about 5 V to 10 V at the GPC test terminal) being output by the IF PCB. If a measured voltage is abnormal, replace the IF PCB. If the pressure indication (DGN 905) varies significantly at irregular intervals, the pressure sensor is faulty. Replace the sensor. If the above checks do not reveal any abnormality, replace the pressure control valve.

ALM No.4082 Anomaly of pressure sensor

This alarm appears when the signal of the pressure sensor used for pressure control detector vanishes.

Alarm output condition

This alarm is issued when the actual gas pressure lowers to 0 twice successively during the time from RUN-ON until RUN-OFF. Related parameters DGN.905 Actual gas pressure

Cause of trouble Solution

1 Open or poor contact

in connection cable between pressure sensor and IF PCB

2 Anomaly of IF PCB

(A16B-2100-0141)

3 Anomaly of pressure

sensor

Check the cable connection. If the connection is abnormal, replace the cable.

If a signal is received from the pressure sensor, but there is no output from the IF PCB, the IF PCB is faulty. Replace the IF PCB. If the power supply (+15 V) for the pressure sensor is normal, but there is no output, the pressure sensor is faulty. Replace the pressure sensor.

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ALM No.4085 Decrease of laser output power

This alarm appears when the laser output power decreases and takes an abnormally higher calibration coefficient.

Alarm output condition

This alarm is issued when the power compensation coefficient exceeds the power compensation limit during execution of power compensation. Power compensation coefficient = (Pc/Pa) x 1024 Pc: Parameter No. 15200 or 15201 Pa: Actual laser output Related parameters PRM.15200 Power compensation command output for a half of the discharge tubes PRM.15201 Power compensation command output for all discharge tubes PRM.15203 Power compensation limit PRM.15204 Power compensation coefficient

Cause of trouble Solution

1 An optical part in the laser

resonator is out of position.

2 An optical part in the laser

resonator is dirty.

3 The supplied laser gas is

not the one specified.

4 Cooling water temperature

out of specified range

5 Laser oscillator ambient

temperature out of specified range

Align the laser resonator.

Clean or replace the optical part.

Replace the laser gas with the specified one, that is CO with a composition ratio accuracy of ±5%. Check whether the temperature of cooling water falls within the range of 20 to 30°C. Check whether the ambient temperature falls within the range of 5 to 30

:He = 5:55:40% (volume ratio)

2:N2

°C.

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ALM No.4087 Shutter temperature abnormal

This alarm is issued when the temperature of the shutter mirror exceeds a preset maximum (80°C)

Alarm output condition

This alarm is issued when the shutter temperature signal becomes 0 in LRDY or a later step. Shutter temperature signal SHT (bit 6 at address 01H of DI of the laser interface) Related parameters PRM.961#6 *SHT Shutter temperature sensor

The table below lists the causes of faults and the corresponding countermeasures.

Cause of trouble Solution

1 Contamination of shutter mirror Clean the shutter mirror. If this alarm

recurs after the shutter mirror is

cleaned, replace the mirror. 2 Anomaly of temperature sensor Replace the temperature sensor. 3 Temperature sensor cable

broken

4 Relay PCB (A16B-1600-0361) or

IF PCB(A16B-2100-0141) is faulty.

5 Anomaly of PCB connection

cables

Replace the cable.

Replace the faulty PCB.

Check the connection of each cable.

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ALM No.4088 Discharge tube voltage drop

This alarm is issued, if the voltage applied to the discharge tube drops largely. More specific, the discharge tube voltage for reference discharge is set up automatically to parameter No. 15270 each time the RUN button is pressed. This alarm is issued, if the automatically set discharge tube voltage is lower than the discharge voltage specified at the previous RUN time, by at least the amount specified in parameter No. 15272.

Alarm output condition

During beam output, this alarm is issued when the actual laser output is in one of the following conditions: (1) Immediately before LSTR, the RF voltage of the power supply of the

discharge tube having the smallest number among the selected discharge tubes is compared with the parameter setting (parameter No. 15270 to 15272). If the discharge tube voltage is lower than the parameter setting, this alarm is issued. If the discharge tube voltage is not lower than the parameter setting, the discharge tube voltage is set in parameter No. 15270.

(2) When external power control is not performed during power

compensation or during LSTR, the discharge tube voltage is compared with parameter setting (parameter No. 15270 to 15272). If the discharge tube voltage is once lower than the parameter setting, a comparison is made again 1024 msec later. If the second comparison also shows that the discharge tube voltage is lower than the parameter setting, this

alarm is issued. Related parameters DGN.909-924 Discharge tube voltage and current PRM.15270 Discharge tube voltage in normal condition PRM.15271 Allowable discharge tube voltage drop

Cause of trouble Solution

1 The laser gas

composition is not as specified.

2 Anomaly of

discharge tube voltage detection system

3 Degradation of

turbo blower gas circulating performance

Replace the laser gas with the specified one, that is CO

:He = 5:55:40% (volume ratio) with a

2:N2

composition ratio accuracy of If discharge is performed, but the monitored discharge tube voltage is extremely low, replace the matching box.

Check whether the turbo blower and high-frequency inverter are normal. Replace the turbo blower or inverter if found to be faulty.

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ALM No.4089 Assist gas not output

This alarm is issued, if an attempt is made to radiate a laser beam, when no assist gas is selected, or an assist gas condition is not set up.

Alarm output condition

This alarm is issued when no assist gas is output during beam output. Assist gas signal

AG1 to AG3（F0222#0 to #2）

Related parameters F222#0 to #2 Assist gas selection signal

ALM No.4090 Laser beam not generated

This alarm is issued, if an attempt is made to radiate a laser beam, when the laser oscillator is not in the LSTR state (discharging state).

Alarm output condition

This alarm is issued when LSTR is not set during beam output. Related parameters F221#6 Oscillation in-progress signal

ALM No.4094 Vacuum pump operation abnormal

This alarm occurs when the thermal switch of the magnetic contactor for the exhaust pump is tripped.

This alarm is issued when the exhaust pump operation signal RPAL becomes 0 during the time from RUN-ON to immediately before purge completion. Exhaust pump operation signal RPAL (bit 3 at address 01H of DI of the laser interface) Related parameters DGN.972 RPA Exhaust pump start DGN.961#3 *RPAL Exhaust pump alarm

Cause of trouble Solution

1 Exhaust pump

operation abnormal

2 Anomaly of IF PCB If the thermal switch of the contactor does not trip, the

3 Signal cable broken Replace the cable.

ALM No.4095 AD converter 3 is not normal.

This alarm is issued when A/D converter 3 does not return the conversion completion signal in the specified time after the converter starts conversion. This A/D converter is designed for reading the amount of tracing displacement.

Alarm output condition

Replace the exhaust pump.

interface PCB is abnormal. Replace it.

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