FANUC SERVO MOTOR Alpha i, SERVO MOTOR Beta i PARAMETER MANUAL

FANUC AC SERVO MOTOR @* series

FANUC AC SERVO MOTOR #

FANUC LINEAR MOTOR L FANUC SY BUILT-IN SERVO MOTOR D

NCHRONOUS

*S series

PARAMETER MANUAL

* series

*S series

B-65270EN/06

• No part of this manual may be reproduced in any form.

• All specifications and designs are subject to change without notice.

The products in this manual are controlled based on Japan’s “Foreign Exchange and

Foreign Trade Law”. The export from Japan may be subject to an export license by the

government of Japan.

Further, re-export to another country may be subject to the license of the government of

the country from where the product is re-exported. Furthermore, the product may also be

controlled by re-export regulations of the United States government.

Should you wish to export or re-export these products, please contact FANUC for advice.

In this manual we have tried as much as possible to describe all the various matters.

However, we cannot describe all the matters which must not be done, or which cannot be

done, because there are so many possibilities.

Therefore, matters which are not especially described as possible in this manual should be

regarded as ”impossible”.

This manual contains the program names or device names of other companies, some of

which are registered trademarks of respective owners. However, these names are not

followed by  or  in the main body.

The parameters described in this manual must be set correctly according to the relevant

descriptions. If the parameters are not set correctly, vibrations and unpredictable motions

can occur. When setting and updating the parameters, place top priority on safety in

operation by taking actions, such as lowering the torque limit value, excessive error level,

and operation speed, and performing an operation so that an emergency stop can be

initiated immediately, until the settings are confirmed to be appropriate.

B-65270EN/06 DEFINITION OF WARNING, CAUTION, AND NOTE

DEFINITION OF WARNING, CAUTION, AND NOTE

This manual includes safety precautions for protecting the user and preventing damage to the machine. Precautions are classified into Warning and Caution according to their bearing on safety. Also, supplementary information is described as a Note. Read the Warning, Caution, and Note thoroughly before attempting to use the machine.

WARNING

Applied when there is a danger of the user being

injured or when there is a damage of both the user being injured and the equipment being damaged if the approved procedure is not observed.

CAUTION

Applied when there is a danger of the equipment

being damaged, if the approved procedure is not observed.

NOTE

The Note is used to indicate supplementary

information other than Warning and Caution.

- Read this manual carefully, and store it in a safe place.

s-1

B-65270EN/06 TABLE OF CONTENTS

DEFINITION OF WARNING, CAUTION, AND NOTE .................................s-1

1 OVERVIEW .............................................................................................1

1.1 SERVO SOFTWARE AND SERVO CARDS SUPPORTED BY EACH NC

MODEL.......................................................................................................... 2

1.2 ABBREVIATIONS OF THE NC MODELS COVERED BY THIS MANUAL .... 4

1.3 RELATED MANUALS.................................................................................... 5

2 SETTING αiS/αiF/βiS SERIES SERVO PARAMETERS......................7

2.1 INITIALIZING SERVO PARAMETERS.......................................................... 8

2.1.1 Before Servo Parameter Initialization ......................................................................8

2.1.2 Parameter Initialization Flow ...................................................................................9

2.1.3 Servo Parameter Initialization Procedure...............................................................10

2.1.4 Setting Servo Parameters when a Separate Detector for the Serial Interface is

Used........................................................................................................................29

2.1.5 Setting Servo Parameters when an Analog Input Separate Interface Unit is

Used........................................................................................................................40

2.1.6 Setting Parameters when an α

2.1.7 Setting Parameters when the PWM Distribution Module is Used .........................48

2.1.8 Actions for Illegal Servo Parameter Setting Alarms ..............................................51

iCZ Sensor is Used.................................................42

3 αiS/αiF/βiS SERIES PARAMETER ADJUSTMENT........................... 63

3.1 SERVO TUNING SCREEN.......................................................................... 64

3.2 ACTIONS FOR ALARMS ............................................................................ 67

3.3 ADJUSTING PARAMETERS FOR HIGH-SPEED AND HIGH-PRECISION

MACHINING ................................................................................................ 76

3.3.1 Servo HRV Control Adjustment Procedure ...........................................................76

3.3.2 High-Speed Positioning Adjustment Procedure.....................................................99

3.3.3 Rapid Traverse Positioning Adjustment Procedure..............................................102

3.3.4 Vibration in the Stop State ...................................................................................107

3.3.5 Vibration during Travel........................................................................................109

3.3.6 Stick Slip ..............................................................................................................111

3.3.7 Overshoot .............................................................................................................112

4 SERVO FUNCTION DETAILS ............................................................113

4.1 SERVO HRV CONTROL ........................................................................... 114

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TABLE OF CONTENTS B-65270EN/06

4.1.1 Servo HRV2 Control ............................................................................................117

4.2 HIGH-SPEED HRV CURRENT CONTROL............................................... 122

4.2.1 Servo HRV3 Control ............................................................................................122

4.2.2 Servo HRV4 Control ............................................................................................128

4.2.3 High-speed HRV Current Control........................................................................133

4.3 CUTTING/RAPID SWITCHING FUNCTION.............................................. 134

4.4 VIBRATION SUPPRESSION IN THE STOP STATE................................. 140

4.4.1 Velocity Loop High Cycle Management Function ..............................................140

4.4.2 Acceleration Feedback Function ..........................................................................142

4.4.3 Variable Proportional Gain Function in the Stop State ........................................144

4.4.4 N Pulses Suppression Function ............................................................................148

4.5 MACHINE RESONANCE ELIMINATION FUNCTION ............................... 150

4.5.1 Torque Command Filter (Middle-Frequency Resonance Elimination Filter) ......150

4.5.2 Resonance Elimination Filter Function

(High-Frequency Resonance Elimination Filter) .................................................152

4.5.3 Disturbance Elimination Filter Function

(Low-Frequency Resonance Elimination Filter) ..................................................158

4.5.4 Observer Function ................................................................................................162

4.5.5 Current Loop 1/2 PI Control Function .................................................................166

4.5.6 Vibration Damping Control Function ..................................................................168

4.5.7 Dual Position Feedback Function (Optional function).........................................170

4.5.8 Machine Speed Feedback Function......................................................................176

4.6 CONTOUR ERROR SUPPRESSION FUNCTION ....................................179

4.6.1 Feed-forward Function .........................................................................................179

4.6.2 Advanced Preview Feed-forward Function..........................................................183

4.6.3 RISC Feed-forward Function ...............................................................................186

4.6.4 Cutting/Rapid Feed-forward Switching Function ................................................188

4.6.5 Feed-forward Timing Adjustment Function.........................................................190

4.6.6 Backlash Acceleration Function...........................................................................193

4.6.7 Two-stage Backlash Acceleration Function.........................................................199

4.6.8 Static Friction Compensation Function................................................................214

4.6.9 Torsion Preview Control Function .......................................................................217

4.7 OVERSHOOT COMPENSATION FUNCTION ..........................................227

4.8 HIGH-SPEED POSITIONING FUNCTION ................................................ 233

4.8.1 Position Gain Switching Function........................................................................233

4.8.2 Low-speed Integral Function................................................................................237

4.8.3 Fine Acceleration/Deceleration (FAD) Function .................................................239

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B-65270EN/06 TABLE OF CONTENTS

4.9 SERIAL FEEDBACK DUMMY FUNCTIONS .............................................248

4.9.1 Serial Feedback Dummy Functions......................................................................248

4.9.2 How to Use the Dummy Feedback Functions for a Multiaxis Servo Amplifiers

when an Axis is not in Use...................................................................................250

4.10 BRAKE CONTROL FUNCTION................................................................. 251

4.11 QUICK STOP FUNCTION ......................................................................... 255

4.11.1 Quick Stop Type 1 at Emergency Stop ................................................................255

4.11.2 Quick Stop Type 2 at Emergency Stop ................................................................257

4.11.3 Lifting Function Against Gravity at Emergency Stop..........................................258

4.11.4 Quick Stop Function for Hardware Disconnection of Separate Detector.............262

4.11.5 Quick Stop Function at OVL and OVC Alarm ....................................................264

4.11.6 Overall Use of the Quick Stop Functions.............................................................265

4.12 UNEXPECTED DISTURBANCE TORQUE DETECTION FUNCTION

(Optional function) .....................................................................................266

4.12.1 Unexpected Disturbance Torque Detection Function ..........................................266

4.12.2 Cutting/Rapid Unexpected Disturbance Torque Detection Switching Function..277

4.13 FUNCTION FOR OBTAINING CURRENT OFFSETS AT EMERGENCY

STOP......................................................................................................... 279

4.14 LINEAR MOTOR PARAMETER SETTING................................................ 280

4.14.1 Procedure for Setting the Initial Parameters of Linear Motors ............................280

4.14.2 Detection of an Overheat Alarm by Servo Software when a Linear Motor and

a Synchronous Built-in Servo Motor are Used.....................................................307

4.14.3 Smoothing Compensation for Linear Motor ........................................................310

4.15 SYNCHRONOUS BUILT-IN SERVO MOTOR PARAMETER SETTING ... 320

4.15.1 Procedure for Setting the Initial Parameters of Synchronous Built-in Servo

Motors ..................................................................................................................320

4.15.2 Detection of an Overheat Alarm by Servo Software when a Synchronous

Built-in Servo Motor are Used .............................................................................346

4.15.3 Smoothing Compensation for Synchronous Built-in Servo Motor ......................346

4.16 TORQUE CONTROL FUNCTION .............................................................351

4.17 TANDEM DISTURBANCE ELIMINATION CONTROL

(POSITION TANDEM) (Optional function)................................................. 354

4.18 SYNCHRONOUS AXES AUTOMATIC COMPENSATION........................ 362

4.19 TORQUE TANDEM CONTROL FUNCTION (Optional function) ............... 366

4.19.1 Preload Function ..................................................................................................372

4.19.2 Damping Compensation Function........................................................................375

4.19.3 Velocity Feedback Average Function ..................................................................377

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TABLE OF CONTENTS B-65270EN/06

4.19.4 Servo Alarm 2-axis Simultaneous Monitor Function...........................................377

4.19.5 Motor Feedback Sharing Function .......................................................................379

4.19.6 Full-closed Feedback Sharing Function ...............................................................380

4.19.7 Adjustment ...........................................................................................................381

4.19.8 Cautions for Controlling One Axis with Two Motors..........................................385

4.19.9 Block Diagrams....................................................................................................387

4.20 SERVO TUNING TOOL SERVO GUIDE................................................... 388

4.20.1 SERVO GUIDE ...................................................................................................388

5 DETAILS OF PARAMETERS .............................................................400

5.1 DETAILS OF THE SERVO PARAMETERS FOR Series 30i, 31i, 32i,

15i, 16i, 18i, 21i, 0i, 20i, Power Mate i (SERIES 90D0, 90E0, 90B0,

90B1, 90B6, 90B5, AND 9096).................................................................. 401

6 PARAMETER LIST ............................................................................. 427

6.1 PARAMETERS FOR HRV1 CONTROL .................................................... 428

6.2 PARAMETERS FOR HRV2 CONTROL .................................................... 438

6.3 PARAMETERS FOR HRV1 CONTROL (FOR Series 0i-A)....................... 451

APPENDIX

A ANALOG SERVO INTERFACE SETTING PROCEDURE.................. 457

B PARAMETERS SET WITH VALUES IN DETECTION UNITS ............ 464

B.1 PARAMETERS FOR Series 15i ................................................................ 465

B.2 PARAMETERS FOR Series 16i, 18i, AND 21i .......................................... 467

B.3 PARAMETERS FOR THE Power Mate i ................................................... 469

B.4 PARAMETERS FOR Series 30i, 31i, AND 32i .......................................... 471

C FUNCTION-SPECIFIC SERVO PARAMETERS ................................. 473

D PARAMETERS RELATED TO HIGH-SPEED AND

HIGH PRECISION OPERATIONS ......................................................481

D.1 MODEL-SPECIFIC INFORMATION ..........................................................482

D.1.1 Series 15i-MB.......................................................................................................482

D.1.2 Series 16i/18i/21i/0i/0i Mate-MB, 0i/0i Mate-MC/20i-FB ..................................485

D.1.3 Series 30i/31i/32i-A, 31i-A5 ................................................................................495

D.2 SERVO PARAMETERS RELATED TO HIGH-SPEED AND

HIGH PRECISION OPERATIONS............................................................. 498

E VELOCITY LIMIT VALUES IN SERVO SOFTWARE .........................505

F SERVO FUNCTIONS .......................................................................... 510

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B-65270EN/06 TABLE OF CONTENTS

G PARAMETERS FOR α AND OTHER SERIES ...................................513

G.1 MOTOR ID NUMBERS OF α SERIES MOTORS...................................... 514

G.2 MOTOR ID NUMBERS OF β SERIES MOTORS ...................................... 516

G.3 MOTOR ID NUMBERS OF CONVENTIONAL LINEAR MOTORS ............ 517

G.4 PARAMETERS FOR SERVO HRV2 CONTROL ....................................... 518

G.5 HRV1 CONTROL PARAMETERS FOR α SERIES, β SERIES, AND

CONVENTIONAL LINEAR MOTORS........................................................ 519

G.6 HRV2 CONTROL PARAMETERS FOR βM SERIES MOTORS................ 528

H DETAILS OF HIGH-SPEED AND HIGH-PRECISION

ADJUSTMENT .................................................................................... 530

I SERVO CHECK BOARD OPERATING PROCEDURE ...................... 555

c-5

B-65270EN/06 1.OVERVIEW

1 OVERVIEW

This manual describes the servo parameters of the CNC models using

FANUC AC SERVO MOTOR α descriptions include the servo parameter start-up and adjustment

procedures. The meaning of each parameter is also explained.

iS, αiF, and βiS series. The

- 1 -

1.OVERVIEW B-65270EN/06

1.1 SERVO SOFTWARE AND SERVO CARDS SUPPORTED

BY EACH NC MODEL

NC product name Series and edition of applicable servo software Servo card

Series 21i-MODEL B (Note1) Series 0i-MODEL B (Note1) Series 0i Mate-MODEL B (Note1) Power Mate i-MODEL D (Note1) Power Mate i-MODEL H (Note1) Series 15i-MODEL B Series 16i-MODEL B Series 18i-MODEL B

Series 0i-MODEL C Series 0i Mate-MODEL C Series 20i-MODEL B

Series 30i-MODEL A Series 31i-MODEL A

Series 32i-MODEL A

Series 9096/A(01) and subsequent editions (Supporting i series CNC and SERVO HRV1 control) (Note2)

Series 90B0/H(08) and subsequent editions Series 90B6/A(01) and subsequent editions (Supporting i series CNC and SERVO HRV1, 2, and 3 control) (Note3) Series 90B1/A(01) and subsequent editions (Note3)

Series 90B5/A(01) and subsequent editions (Supporting i series CNC and SERVO HRV1, 2, and 3 control) (Note4)

Series 90D0/A(01) and subsequent editions (Supporting i series CNC and SERVO HRV4 control) (Note5, Note6) Series 90E0/A(01) and subsequent editions (Supporting i series CNC and SERVO HRV2 and 3 control) (Note6)

320C52 servo card

320C5410 servo card

Servo card for FS30i

servo HRV4 control

Servo card for FS30i

servo HRV2 and 3

control

NOTE

1 The servo software series of the Series

21i-MODEL B, 0i-MODEL B, 0i Mate MODEL B, or Power Mate i-MODEL D/H depends on the incorporated servo card, as shown below:

Servo software Servo card

Series 9096 320C52 servo card

Series 90B0 or Series 90B6 320C5410 servo card

- 2 -

B-65270EN/06 1.OVERVIEW

Servo software series map

HRV1 supported,

i not supported

For Series 16i , and so on

For Series 30i , and so on

9090

HRV2 supported, αi not supported

90A0

HRV3 supported, αi supported

90B0

HRV1 supported, αi supported

9096

90A6

For Series 0i-C

90B1 90B6 90B5

HRV4 supported

90D0 90E0

NOTE

1 The servo software Series 9096 is compatible with the conventional servo software

Series 9090 except for the following function:

- Electric gear box (EGB) function can not be used. 2 The servo software Series 90B0 is upwardly compatible with the conventional servo

software Series 90A0. Series 90B6 is a successor of Series 90B0. Series 90B1 is a special series compatible with Series 90B0 and is required when a PWM distribution module or pulse input DSA is used.

3 Servo software Series 90B5, which is a successor of Series 90B0 and supports the

same functions as Series 90B6, is used in the Series 0i-MODEL C, 0i Mate-MODEL C, and 20i-MODEL B.

4 When using servo HRV4 control with Series 30i-MODEL A and 31i-MODEL A, use

Series 90D0.

5 Servo software Series 90D0 and 90E0 is upwardly compatible with conventional

servo software Series 90B0 except the following functions:

- Fine Acc./Dec. (FAD) function can not be used.

- HRV1 control can not be used.

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1.OVERVIEW B-65270EN/06

1.2 ABBREVIATIONS OF THE NC MODELS COVERED BY

THIS MANUAL

In this manual, the NC product names are abbreviated as follows.

NC product name Abbreviations

FANUC Series 30i-MODEL A Series 30i-A Series 30i FANUC Series 31i-MODEL A Series 31i-A Series 31i FANUC Series 32i-MODEL A Series 32i-A Series 32i

FANUC Series 15i-MODEL B Series 15i-B Series 15i

FANUC Series 16i-MODEL B Series 16i-B Series 16i FANUC Series 18i-MODEL B Series 18i-B Series 18i

FANUC Series 20i-MODEL B Series 20i-B

FANUC Series 21i-MODEL B Series 21i-B Series 21i FANUC Series 0i-MODEL C Series 0i-C FANUC Series 0i Mate-MODEL C Series 0i Mate-C FANUC Series 0i-MODEL B Series 0i-B FANUC Series 0i Mate-MODEL B Series 0i Mate-B

FANUC Power Mate i-MODEL D

FANUC Power Mate i-MODEL H

Power Mate i-D PMi-D Power Mate i-H PMi-H

Series 20i FS20i

Series 0i FS0i

Power Mate i Power Mate i-D/H

NOTE

In this manual, Power Mate i refers to the Power

Mate i-D, and Power Mate i-H.

(Note 1)

Series 30i FS30i

Series 15i FS15i

Series 16i and so on Series 16i etc. FS16i and so on FS16i etc.

- 4 -

B-65270EN/06 1.OVERVIEW

1.3 RELATED MANUALS

The following seven kinds of manuals are available for FANUC AC

SERVO MOTOR α In the table, this manual is marked with an asterisk (*).

Table 1.3 Related manuals of SERVO MOTOR αiS/αiF/βiS series

Document name

FANUC AC SERVO MOTOR αi series DESCRIPTIONS FANUC AC SERVO MOTOR βi series DESCRIPTIONS

FANUC LINEAR MOTOR LiS series

DESCRIPTIONS FANUC SYNCHRONOUS BUILT-IN SERVO MOTOR D

DESCRIPTIONS FANUC SERVO AMPLIFIER αiSV series DESCRIPTIONS

FANUC SERVO AMPLIFIER βiSV series DESCRIPTIONS

FANUC AC SERVO MOTOR αi series FANUC AC SPINDLE MOTOR αi series FANUC SERVO AMPLIFIER αi series MAINTENANCE MANUAL FANUC AC SERVO MOTOR βi series FANUC AC SPINDLE MOTOR βi series FANUC SERVO AMPLIFIER βi series MAINTENANCE MANUAL

FANUC AC SERVO MOTOR αi series FANUC AC SERVO MOTOR βi series

FANUC LINEAR MOTOR L

FANUC SYNCHRONOUS BUILT-IN SERVO MOTOR D

PARAMETER MANUAL FANUC AC SPINDLE MOTOR αi series FANUC AC SPINDLE MOTOR βi series FANUC BUILT-IN SPINDLE MOTOR

Bi series PARAMETER MANUAL

iS series

Document

number

B-65262EN

B-65302EN

B-65222EN

B-65332EN

B-65282EN

B-65322EN

B-65285EN

B-65325EN

B-65270EN *

B-65280EN

iS, αiF or βiS series.

Major contents Major usage

• Specification

• Characteristics

• External dimensions

• Connections

• Specifications and functions

• Installation

• External dimensions and

maintenance area

• Connections

• Start up procedure

• Troubleshooting

• Maintenance of motor

• Initial setting

• Setting parameters

• Description of parameters

• Selection of motor

• Connection of motor

• Selection of amplifier

• Connection of

amplifier

• Start up the system (Hardware)

• Troubleshooting

• Maintenance of

motor

• Start up the system (Software)

• Turning the system (Parameters)

- 5 -

1.OVERVIEW B-65270EN/06

Other manufactures’ products referred to in this manual

* IBM is registered trademark of International Business Machines

Corporation.

* MS-DOS and Windows are registered trademarks of Microsoft

Corporation. All other product names identified throughout this manual are trademarks or registered trademarks of their respective companies.

In this manual, the servo parameters are explained using the following notation:

(Example)

Series 15i Servo parameter function name

No.1875(FS15i)

No.2021(FS30i, 16i)

Series 30i, 31i, 32i, 16i, 18i, 21i, 0i, Power Mate i

The following α

i/βi Pulsecoders are available.

Pulsecoder name Resolution Type

αiA1000 αiI1000 αiA16000 βiA128 βiA64

1,000,000 pulse/rev Absolute

1,000,000 pulse/rev Incremental

16,000,000 pulse/rev Absolute

131,072 pulse/rev Absolute

65,536 pulse/rev Absolute

When parameters are set, these pulse coders are all assumed to have a resolution of 1,000,000 pulses per motor revolution.

NOTE

Load inertia ratio

The effect of α

iA16000 can be increased when

used together with AI nano contour control.

- 6 -

B-65270EN/06 2. SETTING αiS/αiF/βiS SERIES SERVO PARAMETERS

2 SETTING αiS/αiF/βiS SERIES SERVO

PARAMETERS

- 7 -

2. SETTING αiS/αiF/βiS SERIES SERVO PARAMETERS B-65270EN/06

2.1 INITIALIZING SERVO PARAMETERS

2.1.1 Before Servo Parameter Initialization

Before starting servo parameter initialization, confirm the following: <1> NC model (ex.: Series 16i-B)

<2> Servo motor model (ex.: α

<3> Pulsecoder built in a motor (ex.: <4> Is the separate position detector used? (ex.: Not used)

<5> Distance the machine tool moves per revolution of the motor (ex.:10 mm per one revolution) <6> Machine detection unit (ex.:0.001 mm) <7> NC command unit (ex.:0.001 mm)

iF8/3000)

αiA1000)

- 8 -

B-65270EN/06 2. SETTING αiS/αiF/βiS SERIES SERVO PARAMETERS

)

2.1.2 Parameter Initialization Flow

On the servo setting and servo adjustment screens, set the following:

In emergency stop state, switch on NC.

Initialization bits Motor ID No.

MR CMR Move direction Reference counter Velocity gain

Make settings for using separate detector. No. 1807#3 = 1, 1815#1 = 1 (Series 15i) No. 1815#1 = 1 (Series 30i, Series 16i and so on)

Set flexible feed gear.

Number of velocity pulses

8192

00000000 See (2) and (8)-(b)-3 in Subsec. 2.1.3. See (3) in Subsec. 2.1.3. See (4) in Subsec. 2.1.3. See (5) in Subsec. 2.1.3. See (7) in Subsec. 2.1.3. See (9) in Subsec. 2.1.3. Set 150% if the machine inertia is unknown. (Equivalent to load inertia ratio parameter)

Semi-closed loop Closed loop

Which system is being used?

← See (6) in Subsec. 2.1.3. →

Number of velocity pulses

Set flexible feed gear.

8192

Number of position pulses

Ns (Note 1

Number of position pulses

Turn power off then on.

End of parameter setting

12500

NOTE

1 When a separate detector of A/B phase parallel type and a serial linear scale are

used, Ns indicates the number of feedback pulses per motor revolution, sent from the separate detector.

When a serial rotary scale is used, the number of pulses is calculated using

following expression: 12500 × (gear reduction ratio between the motor and table)

See (8)-(b)-2 in Subsec. 2.1.3.

- 9 -

2. SETTING αiS/αiF/βiS SERIES SERVO PARAMETERS B-65270EN/06

2.1.3 Servo Parameter Initialization Procedure

(1) Preparation

Switch on the NC in an emergency stop state. Enable parameter writing (PWE = 1). Initialize servo parameters on the servo setting screen. For a Power Mate i with no CRT, specify a value for an item number on the servo setting screen. See Fig. 2.1.3. To display the servo setting screen, follow the procedure below, using the key on the NC.

- Series 15i

Press the

SYSTEM

key several times, and the servo setting screen will

appear.

- Series30i,31i,32i,16i,18i,21i,20i,0i

→ [SYSTEM] → [ ] → [SV-PRM]

If no servo screen appears, set the following parameter as shown, and switch the NC off and on again.

#7 #6 #5 #4 #3 #2 #1 #0

3111 SVS

SVS (#0) 1: Displays the servo screen.

When the following screen appears, move the cursor to the item you want to specify, and enter the value directly.

Power Mate

No.2000 No.2020 No.2001 No.1820 No.2084 No.2085 No.2022 No.2023 No.2024 No.1821

X axis

1 100 111

8192 12500 10000

01000 N0000

Z axis

00001010

00000000

1 100 111

8192 12500 10000

Servo set

INITIAL SET BITS Motor ID No. AMR CMR Feed gear N (N/M) M Direction Set Velocity Pulse No. Position Pulse No. Ref. counter

Fig. 2.1.3 Servo setting screen Correspondence of Power Mate i

00001010

00000000

- 10 -

B-65270EN/06 2. SETTING αiS/αiF/βiS SERIES SERVO PARAMETERS

(2) Initialization

Start initialization.

Do not power off the NC until step (11).

#7 #6 #5 #4 #3 #2 #1 #0

INITIAL SET BIT PRMC DGPR PLC0

( Note)

Reset initialization bit 1 to 0. DGPR(#1)=0 After initialization is completed, DGPR (#1) is set to 1.

NOTE

Once initialization has been completed, bit 3

(PRMC) for initialization is automatically set to 1. (Except Series 30i, 31i and 32i)

(3) Motor ID No. setting

Specify the motor ID number. Select the motor ID number of a motor to be used according to the motor model and motor specification (the middle four digits in A06B-**** When using servo HRV3 or HRV4 control, please use the motor ID number for servo HRV2 control. It is available with the series and editions listed in the table and later editions. The mark "x" indicates a value that varies depending on the used options. The mark "-" indicates that automatic loading of standard parameters is not supported as of December, 2005.

NOTE

• Series 30i, 31i and 32i Specify the motor ID number for servo HRV2 control.

• Other than the Series 30i, 31i and 32i When a pair of the values set in parameter No. 1023 (servo axis number) are

consecutive odd and even numbers, set motor ID numbers for servo HRV control of

the same type. (Correct examples) Servo axes when parameter No.1023= 1,2: Motor ID number for servo HRV2 control Servo axes when parameter No.1023= 3,4: Motor ID number for servo HRV1 control (Wrong examples) Servo axes when parameter No.1023= 1: Motor ID number for servo HRV2 control Servo axes when parameter No.1023= 2,3: Motor ID number for servo HRV1 control

-B***) listed in the following tables.

- 11 -

2. SETTING αiS/αiF/βiS SERIES SERVO PARAMETERS B-65270EN/06

αiS series servo motor

Motor model

αiS2/

5000

αiS

2/6000

αiS4

/5000

αiS

8/4000

αiS

8/6000

αiS

12/4000

αiS

22/4000

αiS

30/4000

αiS

40/4000

αiS5

0/3000

αiS

50/3000 FAN

αiS

100/2500

αiS

200/2500

αiS

300/2000

αiS

500/2000

Motor

specification

0212 162 262 A H A A A

0218 - 284 G - B B -

0215 165 265 A H A A A

0235 185 285 A H A A A

0232 - 290 G - B B -

0238 188 288 A H A A A

0265 215 315 A H A A A

0268 218 318 A H A A A

0272 222 322 A H A A A

0275-Bx0x 224 324 B V A A F

0275-Bx1x 225 325 A N A A D

0285 235 335 A T A A F

0288 238 338 A T A A F

0292 115 342 B V A A -

0295 245 345 A T A A F

Motor ID No.

HRV1 HRV2

90D0 90E0

90B0

90B5 90B6

90B1 9096

Motor model

αiF1/5000 αiF2/5000 αiF4/4000

αiF8/3000 αiF12/3000 αiF22/3000 αiF30/3000 αiF40/3000

αiF40/3000

FAN

αiF series servo motor

Motor

specification

0202 152 252 A H A A A

0205 155 255 A H A A A

0223 173 273 A H A A A

0227 177 277 A H A A A

0243 193 293 A H A A A

0247 197 297 A H A A A

0253 203 303 A H A A A

0257-Bx0x 207 307 A H A A A

0257-Bx1x 208 308 A I A A C

Motor ID No.

HRV1 HRV2

90D0 90E0

90B0

90B5 90B6

90B1 9096

- 12 -

B-65270EN/06 2. SETTING αiS/αiF/βiS SERIES SERVO PARAMETERS

αiS series servo motor (for 400-V driving)

Motor model

αiS2/ αiS

2/6000HV

αiS

4/5000HV

αiS

8/4000HV

αiS

8/6000HV

αiS

12/4000HV

αiS

22/4000HV

αiS

30/4000HV

αiS

40/4000HV

αiS

50/3000HV FAN

αiS

50/3000HV

αiS

100/2500HV

αiS

200/2500HV

αiS

300/2000HV

αiS

500/2000HV

αiS

1000/2000HV

αiS

2000/2000HV

5000HV

(Note 1)

Motor

specification

0213 163 263 A Q A A D

0219 - 287 G - B B -

0216 166 266 A Q A A D

0236 186 286 A N A A D

0233 - 292 G - B B -

0239 189 289 A N A A D

0266 216 316 A N A A D

0269 219 319 A N A A D

0273 223 323 A N A A D

0276-Bx1x 226 326 A N A A D

0276-Bx0x 227 327 B V A A F

0286 236 336 B V A A F

0289 239 339 B V A A F

0293 243 343 B V A A F

0296 246 346 B V A A F

0298 248 348 B V A A F

0091 - 340 J - B B -

Motor ID No.

HRV1 HRV2

90D0 90E0

90B0

90B5 90B6

90B1 9096

NOTE

1 The model needs manual setting. (See Subsection 2.1.7, "Setting

Parameters when the PWM Distribution Module is used".)

When using the torque control function, contact FANUC.

Motor model

αiF

4/4000HV

αiF

8/3000HV

αiF

12/3000HV

αiF

22/3000HV

Motor model

αC4/3000i αC8/2000i

αC12/2000i αC22/2000i αC30/1500i

αiF series servo motor (for 400-V driving)

Motor

specification

0225 175 275 A Q A A E

0229 179 279 A Q A A E

0245 195 295 A Q A A E

0249 199 299 A Q A A E

Motor ID No.

HRV1 HRV2

90D0 90E0

90B0

90B5 90B6

90B1 9096

αCi series servo motor

Motor

specification

0221 171 271 A H A A A 0226 176 276 A H A A A 0241 191 291 A H A A A 0246 196 296 A H A A A 0251 201 301 A H A A A

Motor ID No.

HRV1 HRV2

90D0 90E0

90B0

90B5 90B6

90B1 9096

- 13 -

2. SETTING αiS/αiF/βiS SERIES SERVO PARAMETERS B-65270EN/06

βiS series servo motor

Motor model

βiS0.2/

5000

βiS0.3/

5000

βiS0.4/

5000

βiS0.5/

6000

βiS1/

6000

βiS2/

4000

βiS4/

4000

βiS8/

3000

βiS12/

2000

βiS12/

3000

βiS22/

2000

Motor

specification

(Note 1)

0111

(Note 1)

0112

(Note 1)

0114

0115 20A 181 281 G - B B -

0116 20A 182 282 G - B B -

(Note 2)

0061

(Note 2)

0063

(Note 2)

0075

(Note 2)

0077

0078 40A 172 272 B V A A F

0085 40A 174 274 B V A A F

mplifier

driving

4A - 260 A N A A

4A - 261 A N A A

20A - 280 A N A A

20A 153 253 B V A A F 40A 154 254 B V A A F 20A 156 256 B V A A F 40A 157 257 B V A A F 20A 158 258 B V A A F 40A 159 259 B V A A F

20A 169 269 - - D - -

Motor ID No.

HRV1 HRV2

90D0 90E0

90B0

90B5 90B6

90B1 9096

＊

NOTE

1 HRV1 control cannot be used with these motors. So, these motors

cannot be used with Series 9096.

2 For a motor specification suffixed with “-Bxx6”, be sure to use

parameters dedicated to FS0i.

Motor model

βiS2/

4000HV

βiS4/4

000HV

βiS8/3000HV βiS12/

3000HV

βiS22/

2000HV

βiS series servo motor (for 400-V driving)

Motor

specification

0062 10A 151 251 J - B C -

0064 10A 164 264 J - B C -

0076 10A 167 267 J - B C -

0079 20A 170 270 J - B C -

0086 20A 178 278 J - B C -

mplifier

driving

Motor ID No.

HRV1 HRV2

90D0 90E0

90B0

90B5 90B6

90B1 9096

The mark "-" indicates that automatic loading of standard parameters is not supported as of December, 2005.

- 14 -

B-65270EN/06 2. SETTING αiS/αiF/βiS SERIES SERVO PARAMETERS

βiS series servo motor (dedicated to FS0i)

Motor model

βiS2/

4000

βiS4/

4000

βiS8/

3000

βiS12/2

βiS22/

000

1500

Motor

specification

0061-Bxx6

0063-Bxx6

0075-Bxx6

0077-Bxx6

0084-Bxx6

mplifier

driving

20A 206 306 D 40A 210 310 D 20A 211 311 D 40A 212 312 D 20A 183 283 D 40A 194 294 D 20A

20A 202 302 D 40A 205 305 D

Motor ID No.

HRV1 HRV2

198 298 D

90B5

The motor models above can be driven only with Series 90B5.

- 15 -

2. SETTING αiS/αiF/βiS SERIES SERVO PARAMETERS B-65270EN/06

Linear motor

Linear motor parameters for servo HRV2 control Note: The following linear motors are driven by 200V.

Motor model

LiS300A1/4 LiS600A1/4

LiS900A1/4 LiS1500B1/4 LiS3000B2/2 LiS3000B2/4 LiS4500B2/2 LiS6000B2/2 LiS6000B2/4 LiS7500B2/2 LiS7500B2/4 LiS9000B2/2 LiS9000B2/4

LiS3300C1/2

LiS9000C2/2 LiS11000C2/2 LiS15000C2/2 LiS15000C2/3 LiS10000C3/2 LiS17000C3/2

Note: The following linear motors are driven by 400V.

Motor model

LiS1500B1/4 LiS3000B2/2

LiS4500B2/2HV

LiS4500B2/2

LiS6000B2/2HV

LiS6000B2/2

LiS7500B2/2HV

LiS7500B2/2 LiS9000B2/2 LiS3300C1/2 LiS9000C2/2

LiS11000C2/2HV

LiS11000C2/2

LiS15000C2/3HV

LiS10000C3/2 LiS17000C3/2

Motor

specification

0441-B200 351 G - B B 0442-B200 353 G - B B 0443-B200 355 G - B B 0444-B210 357 G - B B 0445-B110 360 G - B B 0445-B210 362 G - B B 0446-B110 364 G - B B 0447-B110 368 G - B B 0447-B210 370 G - B B 0448-B110 372 G - B B 0448-B210 374 G B B 0449-B110 376 G - B B 0449-B210 378 G - B B 0451-B110 380 G - B B 0454-B110 384 G - B B 0455-B110 388 G - B B 0456-B110 392 G - B B 0456-B210 394 G - B B 0457-B110 396 G - B B 0459-B110 400 G - B B -

Motor

specification

0444-B210 358 G - B B 0445-B110 361 G - B B 0446-B010 363 G - B B 0446-B110 365 G - B B 0447-B010 367 G - B B 0447-B110 369 G - B B 0448-B010 371 G - B B 0448-B110 373 G - B B 0449-B110 377 G - B B 0451-B110 381 G - B B 0454-B110 385 G B B 0455-B010 387 G - B B 0455-B110 389 G - B B 0456-B010 391 G - B B 0457-B110 397 G - B B 0459-B110 401 G - B B -

Motor ID No.

90D0 90E0

90B0

90B5 90B6

90B1 9096

- 16 -

B-65270EN/06 2. SETTING αiS/αiF/βiS SERIES SERVO PARAMETERS

Linear motor parameters for servo HRV1 control

Motor model

LiS1500B1/4 LiS3000B2/2 LiS6000B2/2 LiS9000B2/2 LiS1500C2/2 LiS3000B2/4 LiS6000B2/4 LiS9000B2/4

LiS15000C2/3

LiS300A1/4 LiS600A1/4 LiS900A1/4

LiS6000B2/4

LiS9000B2/2

LiS9000B2/4

LiS15000C2/2

Motor

specification

0444-B210 90 A A A A A 0445-B110 91 A A A A A 0447-B110 92 A A A A A 0449-B110 93 A A A A A 0456-B110 94 A A A A A 0445-B210 120 A A A A A 0447-B210 121 A A A A A 0449-B210 122 A A A A A 0456-B210 123 A A A A A 0441-B200 124 A A A A A 0442-B200 125 A A A A A 0443-B200 126 A A A A A

0412-B811

0413

0413-B811

0414

Motor ID No.

127

(160-A driving)

128

(160-A driving)

129

(360-A driving)

130

(360-A driving)

90D0

90B0

90E0

A R A A D

A N A A D

A Q A A D

90B5 90B6

90B1 9096

(Reference) The parameter table presented in Chapter 6 has two motor ID Nos. for the same linear motor. One of the two is for driving the α series servo amplifiers (130A and 240A). Be careful not to use the wrong ID No.

αi servo amplifier driving

Amplifier

maximum

current [A]

Motor ID No.

Motor model

LiS6000B2/4 LiS9000B2/2 LiS9000B2/4

LiS15000C2/2

α servo amplifier driving

Amplifier

maximum

current [A]

240 121 160 127 130 93 160 128 240 122 360 129 240 94 360 130

Motor ID No.

- 17 -

2. SETTING αiS/αiF/βiS SERIES SERVO PARAMETERS B-65270EN/06

Synchronous built-in servo motor Synchronous built-in servo motor for servo HRV2 control NOTE: The following synchronous built-in servo motors are

driven by 200V.

Motor model

DiS85/400 DiS110/300 DiS260/600 DiS370/300

Motor

specification

0483-B20x 423 K - - - -

0484-B10x 425 K - - - -

0484-B31x 429 K - - -

0484-B40x 431 K - - -

Motor ID No.

90D0

90E0

90B0

90B5 90B6

90B1 9096

NOTE: The following synchronous built-in servo motors are

driven by 400V.

Motor model

DiS85/400

DiS110/300 DiS260/600 DiS370/300

Motor

specification

0483-B20x 424 K - - - -

0484-B10x 426 K - - - -

0484-B31x 430 K - - -

0484-B40x 432 K - - -

Motor ID No.

90D0

90E0

90B0

90B5 90B6

90B1 9096

(4) AMR setting

For AMR, set 00000000. When using a linear motor, set AMR according to the description in Section 4.14, "LINEAR MOTOR PARAMETER SETTING". When using a synchronous built-in servo motor, set AMR according to the description in Section 4.15, "SYNCHRONOUS BUILT-IN SERVO MOTOR PARAMETER SETTING".

αiS/αiF/βiS motor

00000000

(5) CMR setting

Set, as CMR, a specified magnification for the amount of movement from the NC to the servo system. CMR = Command unit / Detection unit

CMR 1/2 to 48 Setting value = CMR × 2

Usually, set CMR with 2, because command unit = detection unit (CMR = 1).

- 18 -

B-65270EN/06 2. SETTING αiS/αiF/βiS SERIES SERVO PARAMETERS

(6) Flexible feed gear setting

Specify the flexible feed gear (F⋅FG). This function makes it easy to specify a detection unit for the leads and gear reduction ratios of various ball screws by changing the number of position feedback pulses from the Pulsecoder or separate detector. It converts the incoming number of pulses from the position detector so that it matches the commanded number of pulses. When using a linear motor, set F⋅FG according to the description in Section 4.14, "LINEAR MOTOR PARAMETER SETTING". When using a synchronous built-in servo motor, set F⋅FG according to the description in Section

4.15, "SYNCHRONOUS BUILT-IN SERVO MOTOR PARAMETER SETTING".

(a) Semi-closed feedback loop

Setting for the αi Pulsecoder

↓ (Note 1) Necessary position feedback pulses F⋅FG numerator (≤ 32767) per motor revolution = (as irreducible fraction) F⋅FG denominator (≤ 32767) 1,000,000 ← (Note 2)

NOTE

1 For both F⋅FG numerator and denominator, the maximum setting

value (after reduced) is 32767.

2 αi Pulsecoders assume one million pulses per motor revolution,

irrespective of resolution, for the flexible feed gear setting.

3 If the calculation of the number of pulses required per motor

revolution involves π, such as when a rack and pinion are used, assume π to be approximately 355/113.

Example of setting

If the ball screw used in direct coupling has a lead of 5 mm/rev and the detection unit is 1 µm The number of pulses generated per motor turn (5 mm) is: 5/0.001 = 5000 (pulses) Because the αi Pulsecoder feeds back 1000000 pulses per motor turn: FFG = 5000 / 1000000 = 1 / 200

Other FFG (numerator/denominator) setting examples, where the gear reduction ratio is assumed to be 1:1

Ball screw lead Detection

unit

1µm 6 / 1000 8 / 1000 10 / 1000 12 / 1000 16 / 1000 20 / 1000

0.5µm 12 / 1000 16 / 1000 20 / 1000 24 / 1000 32 / 1000 40 / 1000

0.1µm 60 / 1000 80 / 1000 100 / 1000 120 / 1000 160 / 1000 200 / 1000

6mm 8mm 10mm 12mm 16mm 20mm

- 19 -

2. SETTING αiS/αiF/βiS SERIES SERVO PARAMETERS B-65270EN/06

Example of setting

If the gear reduction ratio between the rotary axis motor and table is 10:1 and the detection unit is 1/1000 degrees The table rotates through 360/10 degrees when the motor makes one turn. The number of position pulses necessary for the motor to make one turn is: 360/10 ÷ (1/1000) = 36,000 pulses

F⋅FG numerato

36,000 36

= = F⋅FG denominator 1,000,000 1,000

If the gear reduction ratio between the rotary axis motor and table is 300:1 and the detection unit is 1/10000 degrees The table rotates through 360/300 degrees when the motor makes one turn. The number of position pulses necessary for the motor to make one turn is: 360/300 ÷ (1/10000) = 12,000 pulses

F⋅FG numerator 12,000 12 = =

F⋅FG denominator 1,000,000 1,000

(b) Full-closed feedback loop

Setting for use of a separate detector (full-closed)

Number of position pulses corresponding F⋅FG numerator (≤ 32767) to a predetermined amount of travel = (as irreducible fraction) F⋅FG denominator (≤ 32767) Number of position pulses corresponding to a predetermined amount of travel from a separate detector

Example of setting

To detect a distance of 1-µm using a 0.5-µm scale, set the following: (L represents a constant distance.)

umerator of F⋅FG L/1 1

= =

Denominator of F⋅FG L/0.5 2

Other FFG (numerator/denominator) setting examples

Detection unit

1µm 1 / 1 1 / 2 1 / 10 1 / 20

0.5µm - 1 / 1 1 / 5 1 / 10

0.1µm - - 1 / 1 1 / 2

1 µm 0.5 µm 0.1 µm 0.05 µm

Scale resolution

- 20 -

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