Inficon VGC083C Operating Manual

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2

tinb4

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m

Liability and Warranty

SHOCK HAZARD

Labels may be located on or inside the device to alert people that dangerous
voltages may be present.

INFICON assumes no liability and the warranty is rendered null and void if the end­user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.) on the product

• use the product with accessories not listed in the corresponding product docu-

mentation.

tinb42e1 (2018-05) VGC083C.om 3

Contents

Product Identification 2
Validity 2
Important User Information 2
Liability and Warranty 3

1 Introduction / General Information 6

1.1 Description 6

2 Technical Data 7

2.1 VGC083C 7

2.2 Power Supply for VGC083C (Optional) 9

3 Important Safety Information 10

3.1 Safety Precautions - General 10

3.2 Safety Precautions - Service and Operation 10

3.3 Electrical Conditions 11

3.3.1 Proper Equipment Grounding 11

3.3.2 Electrical Interface and Control 11

3.4 Overpressure and use with hazardous gases 11

3.5 Gases other than Nitrogen / air 12

4 Installation 13

4.1 Mechanical Installation - Controller 13

4.1.1 Panel Mount 13

4.1.2 Rack Mount 13

4.1.3 Mechanical Installation - Ionization Gauge 14

4.1.4 Mechanical Installation - Convection Gauge 15

4.2 Electrical Installation 16

4.2.1 Grounding 16

4.2.2 Installation 16

4.2.3 Connecting MAG050 / MAG060 - connector labeled "1" 17

4.2.4 Connecting the PGE050 - connectors labeled "2" and "3" 17

4.2.5 Power Connection 18

4.2.6 Relay Connection 18

4.2.7 Analog Output Connection 18

4.2.8 Analog Input Connection (Capacitance Diaphragm Gauges, etc.) 18

4.2.9 Digital I/O Connection 19

4.2.10 RS232 / RS485 Serial Communications Connection 20

5 Operation - IG and CG 22

5.1 IG Over Pressure Shut Down 22

5.2 Convection Gauge (CG) Initial Setup 22

5.3 Cond Cathode Activation Delay 23

6 Setup and programming 24

6.1 Applying Power 24

6.2 Front Panel Display 24

6.3 User Interface Basics 25

6.4 Factory-Set Default Parameters 25

6.5 Programming 26

6.5.1 SETUP UNIT 27

6.5.2 ION GAUGE 28

6.5.3 CONVEC GAUGE 29

6.5.4 RELAYS 30

6.5.5 Analog Output 32

6.5.6 SERIAL COMM 36

6.5.7 DISPLAY 37

7 Analog Output Charts & Equations (Nitrogen/Air Only) 39

7.1 Analog Output wide range measurement for IG - CG1 0.5 - 7V

(Nitrogen / Air only) 39

7.2 Analog Output for IG LOG N - 10 (Nitrogen / Air only) 40

7.3 Analog Output for IG LOG N - 11 (Nitrogen / Air only) 41

7.4 Analog Output for IG LOG N - 12 (Nitrogen / Air only) 42

7.5 Analog Output for IG 1.8 - 8.7 V (Nitrogen / Air only) 43

7.6 Analog Output for IG LINEAR (Nitrogen / Air only) 44

7.7 Analog Output for CG1 or CG2 1 - 8 V (Nitrogen / Air only) 44

7.8 Analog Output for CG1 or CG2 0 - 7 V (Nitrogen / Air only) 46

7.9 Analog Output for CG1 or CG2 NON - LIN (Nitrogen / Air only) 47

7.10 Analog Output for CG1 or CG2 LINEAR (Nitrogen / Air only) 49

4 tinb42e1 (2018-05) VGC083C.om

8 Using the Gauge with Different Gases 50

8.1 Ion Gauge Display Correction Factors for Selected Gases 50

8.2 Effects of Different Gases on Convection Gauge Display 51

8.3 Effects of Different Gases on Analog Output 55

8.3.1 Ion Gauge Analog Output Correction Factors for Selected Gases 55

8.3.2 IG - CG1 0.5 - 7V Analog Output Correction Factors for Selected Gases 55

8.3.2.1 IG-CG1 0.5 - 7V Analog Output Correction Factors -

Ion Gauge Range 56

8.3.2.2 IG-CG1 0.5 - 7V Analog Output Correction Factors -

Convection Gauge Range 57

8.3.3 Convection gauge analog output for selected gases 57

8.3.3.1 CG1 1 - 8 V or CG2 1 - 8 V Analog Output Correction Factors -

Convection Gauge 58

8.3.3.2 CG1 0 - 7 V or CG2 0 - 7 V Analog Output Correction Factors -

Convection Gauge 59

8.3.3.3 CG1 NON-LIN or CG2 NON-LIN Analog Output Correction Factors -

Convection Gauge 60

9 Communication Protocol (Serial Interface) 61

9.1 Device Specific Serial Communication Info 61

9.2 INFICON RS232 / RS485 Command Protocol Summary 61

9.3 INFICON RS232 and RS485 Command Protocol Summary 62

9.4 RS232 GP 307 and 358 Protocol 65

9.5 RS485 GP 307 and 358 Protocol 66

10 Service 68

10.1 Calibration 68

10.2 Maintenance 68

10.3 Troubleshooting - Operation 68

10.4 Troubleshooting - Error Messages 69

10.5 Clearing Error Messages 69

10.6 Research Screen 69

10.6.1 Research Screen (Diagnostic Display) 69

10.7 Cleaning the VGC083C 70

11 Repair 70

12 Accessories 70

13 Storage 71

14 Disposal 71

EU Declaration of Conformity 72

For cross-references within this document, the symbol (→  XY) is used; for cross-
references to further documents listed under ‘Literature’, use is made of the symbol
(→  [Z]).

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vacuum gaug

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auge Control

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GC083C is i

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6

tinb4

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m

2 Technical Data

2.1 VGC083C

Measurement range

Display

Functionality

IG sensor control

IG remote input signals
(digital I/O)

Setpoint relays

VGC083C

with MAG050 & PGE050
with MAG060 & PGE050

1.5×10

7.5×10

-9

… 1000 Torr

-11

… 1000 Torr

Units of measurement Torr, mbar, Pa (user selectable)

Pressure indication LED - 3 independent pressure display

channels, 3 digit plus 2 digit exponent per
channel

Programming & set-up screen OLED - displays state of all setpoint relays, IG

emission current, error messages for fault
conditions

IG powers & operates one INFICON MAG050 or

MAG060 passive Cold Cathode Gauge

CG , powers & operates up to 2 INFICON PGE050

convection or Granville-Phillips® (GP)
Convectron

®

Alternate gauge displays pressure from an alternate gauge such

as a Capacitance Diaphragm Gauge - CDG or
other INFICON gauges using the analog input
(external power source for these alternate
auxiliary devices will be required)

IG sensor on/off can all be controlled via front panel soft-keys, remote input signals
(digital I/O) or serial communications. IG sensor can also be automatically turned
on/off using measurements from one of the user selectable convection or alternate
gauges.

IG sensor on/off can also be set by applying momentary continuity to ground. Also
the 9-pin D-sub remote input DIGITAL I/O connector provides pin-pin compatible
signals with the GP 358 controller as well as compatible signals with the GP 307.

Number 6

single-pole, double-throw (SPDT), user as­signable to any of the gauges

Contact rating 5 A at 30 V (dc), 5 A at 250 V (ac), resistive

load

tinb42e1 (2018-05) VGC083C.om 7

Analog output

Analog input

Serial communications

Status output

IG overpressure protection

Ambience

Housing

IG analog output

Log-linear

0 … 10 V (dc), 1 V/decade, or

1)

1.7 … 9.3 V (dc) (nominal 1.8 … 8.7 V (dc)),

0.8 V/decade

Linear 0 … 10 V (dc) (useable over 3 decades)

Combination IG + CG or
IG + ALT analog
Log-linear

CG analog output

Log-linear

0.5 … 7 V (dc), 0.5 V/decade

1 … 8 V (dc), 1 V/decade 3), or

2)

0 … 7 V (dc), 1 V/decade 3)

Linear 0 … 10 V (dc) (useable over 3 decades)

Non-linear analog S-curve 0.375 … 5.659 V (dc)

1)

Various scaling selections also provide output compatibility with Granville-Phillips®

controller models 307, 350 and 358 controllers.

2)

Also compatible with GP 307 controller.

3)

Also compatible with GP 307, 350 and 358.

CDG one 0 … 10 V (dc) analog input signal from a

CDG when used as an alternate gauge to CG2

INFICON analog input from one of the following gauges:

PGE300, PGE500, BAG302

Protocol RS485 / RS232 - ASCII protocol

(command protocol compatibility with GP 307
and GP 358 controller is also provided)

IG sensor on/off status displayed as pressure reading on the front panel, by serial
communications and by SPDT relay (DIGITAL I/O Connector) rated at 1 A at
30 V (dc) resistive, or 1 A at 30 V (ac) non-inductive.

IG error conditions are displayed on the front panel, by serial communications and
by an open collector transistor output (ground emitter) rated at 40 V max. VCE,
50 mA IC max.

Turns ion gauge off at 5.00 × 10-3 or overpressure value programmed by the user.

Temperature

Operation
Storage

0 … +40 °C
–40 … +70 °C

Relative humidity 0 … 95, non-condensing

Altitude

Operating
Storage

max. 2500 m (8200 ft.)
max. 12500 m (41000 ft.)

Housing aluminum extrusion

8 tinb42e1 (2018-05) VGC083C.om

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IG

CG

Digi

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RS232
RS485

anal

og I/O, setpoi

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20 … 28 V (
protected ag
over-voltage

gauge cable
9-pin D-sub

9-pin D-sub
9-pin D-sub

pluggable te

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ional)

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Conne

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Power

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tor

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utput

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2-pin plugga
VGC083C

100 … 240

24 V (dc), 2.

CE, RoHS,

ble terminal b

(ac), 50 …

A (60 W)

L (US/Cana

lock to mate

0 Hz

a), CCC (Chi

ith the

a)

tinb42e1 (2018-05) VGC0

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3 I

3.1

portan

afety Pr

eneral

Safety

cautions

nforma

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I

FICON has

p

rovided it is i

is manual. Pl

t

WA

o avoid seri

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b

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ailure to com

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RNING

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aintenance o

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arnings and

the safety i
ty procedur

operty dama

tes the safet

ON disclaim

tions.

consider mo

ncy that aris
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roduct durin
covers remo
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ty guidelines

instruction

formation i
s could res

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standards

all liability fo

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INFICON.

tentional rad

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iator, class A.

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3.2

afety Pr
ervice a

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WARNIN

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WARNIN

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safety featur

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safety check

re required,

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INFICON to

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uipment grou

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personnel.

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3.3 Elec

3.3.1 Pro
Gro

rical Con

er Equip

nding

itions

ent

Turn of
ing nor
vice pe
by this

It is imp
nection
electric

Do not
Contac
to INFI

If meas
“OVER

W
ening el
are mai
contact
a gase
ground
coming
tage po
the gas

W
present
which t
ground
groundi
intende
any co
earthin
pressur

power to the

ally accordi

sonnel for an

perating ma

ortant that th

and equipm
l insulation h

se if the unit

INFICON for

ON for evalu

red pressur

PRESSURE”

RNING! Wh

ectrical shoc

ntained at ea

with the gas

us environm

d conductor

in contact wit

ential. This c
inside the va

RNING! Ha

in many vac

e ion gauge
d. Consult a

ng. Proper gr

operation o

trol module

conductor.

measurem

unit if a cabl
g to this instr

service or tr

ual.

product be

nt grounding
s been com

has been dro

return author

ation.

exceeds 5.0

menu the se

n high volta

hazard may

th ground pot

ontained in v
nt may coupl

f electricity.

an exposed
ndition appli

uum chamb

ardous volta

um processe

nd the conv

ualified Elec

unding of yo

the equipme

ust be conne
se a ground l

nt devices if

or plug is da

ction manual

ubleshootin

eriodically in
. Do not use i

romised.

ped or the e

zation and in

× 10-3 Torr
sor will turn

e is present i

xist unless a
ntial. This a
cuum cham

dangerous

person coul

ungrounded

s to all produ

r (vacuum/pr

es that could

. Verify that t

ction gauges

rician if you a

r equipment
t. The vacuu
ted directly t

ug on the vac

ecessary.

aged or the

. Contact qua

condition th

pected for so
the equipme

closure has

tructions for

r the value p
ff.

any vacuu

ll exposed el

plies to all pr
ers. An elect
igh voltage d

be seriousl

electrical con

cts that may

ssure contai

seriously inju

he vacuum c

are mounted

re in doubt a
is essential f
m gauge hea

a good qual

uum connecti

product is no
lified INFICO

t may not be

und electrical

nt grounding

een damage

eturning the

ogrammed in

system, a lif

ctrical condu

ducts that c

ical discharg

irectly to any

injured or kill

ductor at hig

ome in conta
ment vessel)

re or cause d

nnection por

are electricall

out your equi

r safety as w

s and enclos

ity equipment

on flange of t

operat-

ser-

covered

con-

r

d.

roduct

the

threat-

tors

me in

within

n­d by

vol­ct with
.

ath are

s on

pment

ll as

ure of

e

3.3.2 Ele
Con

3.4 Over

with

trical Inte

trol

pressure
hazardou

face and

nd use

gases

W
harm,
trical d

It is the
and an
are use
any sig
your sy
taken t

W
pressu
system

In case
implem
an auto
pressur

The va
pressur
sure ins
heads
gases
are rate
tect the
overpre
pressio
fitting w

RNING! In
hield all con
scharges in

user’s respo

connections

in a safe m
als to autom
tem design

prevent injur

RNING! In

e inside you

component

where an e

nt fail-safe s

matic backfill

s if the pres

uum gauge h

s above 20

ide the senso

ave an admi

55 °C). If you

d for, you sh

gauge tube f

ssure conditi

fitting may f

ith only a few

rder to prot
ductors whi
or around th

sibility to ens
made to exte

nner. Always

te your proc

nd ensure sa

and propert

tall suitable

vacuum ch

are capable

uipment failu

stem operati

peration wh

ure relief dev

ads used wi

sia (1000 To

r. The MAG0

sible pressur

r chamber go

uld install an
om overpres

ns may be lo

rcibly releas

psi over local

ct personne

h are subjec

vacuum sy

re that the el

nal devices,

double chec
ss. Perform
eguards and

damage.

rotective d

mber to les

of withstan

e could caus

n. For exam
re a malfunct

ce was not in

h this product
r); DO NOT e

060 pass
of 130 psi (
s to higher p

isolation valv

ure condition

er; for exam
the gauge t
uncorrected

l from electri
t to potentia
stem.

ectrical signa

or example, r

the system
hazardous o

personnel sa

vices that w

than what t

ing.

a hazardous

le, use a pre

ion could res

talled on the

are not inten
xceed 35 psi
ive cold cath

bar absolute

ressures tha

or pressure

. With some

ple, a quick-c

be from the

arometric (a

c shock and
high voltag

s from this pr

lays and sol

et-up before
peration anal
ety measure

ll limit the le

e vacuum c

condition, al

sure relief d
lt in high inte
chamber.

ed for use at
(< 2 ½ bars)
de vacuum g

- limited to in
what these

relief device t

fittings, actua

nnect, O-rin
acuum cham
mospheric) p

bodily

elec-

duct
noids,
sing
sis of

are

el of

amber

ays

vice in

nal

pres-

uge

ert
eads

pro-

safe

com-

er

essure.

tinb42e1 (2018-05) VGC0

83C.om

11

3.5

G

N

h

osminflo

mex

p

wIN

D

wseththte

N

b

c

a

s

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m

a

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u

s

o

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d

s

n

y

ases ot

itrogen /

er than

air

CAUTIO

t

increase a

ure side), va

ay cause le
to the atmo

ammable ga

the vacuu

ent, could c

pose the g

ressure whe

WARNIN

ithout referrin

FICON gaug

o not attempt

nless you ha

u

nalog output

a

hen using co

! If the inte

ove local un

uum fitting
ks that woul
phere of the

es are exa
/pressure c

use bodily i

uge tube int

using haza

! Do not att

g to correctio

es and modu

to use with o

e applied cor
o determine t

vection gau

nal pressure

orrected ba
may releas
d allow the g

surroundin

ples of haza

ntainment v

jury and po

rnal volume
dous gases.

mpt to use w

factor data

es are calibr

her gases su
ection factor

e true meas

es to measur

of a vacuum
ometric pre
and possibl

s inside the
environmen
dous gases
ssel into the

sible dama

to pressure

th gases oth

ables.

ted for direct

h as argon (

to both the d

red pressure

pressure of

gauge devi

sure (atmos

overpress

gauge tube

t. Toxic, pyr

hat if allowe

atmospheri

e to equipm

bove local

r than nitrog

readout of nit

r) or carbon

isplayed pres
. This is parti
gases other t

e is allowed

pheric pres-

re condition

o release

phoric and

to leak out

environ-

nt. Never

tmospheric

n (N

) or air

2

ogen or air.

ioxide (CO2)
ure and the

ularly critical

an N2/Air.

WARNIN

nce of flam
e pressure o
e gauge nor
mperature c

a

nd gas mixtur

o

r death.

! Do not us

able gases,

explosive or

ally operate

uld exceed t

e. This could

the PGE050
apors or fum

combustible

at 125 °C, b
e ignition te

cause an exp

in an explosi

s. Do not us

ases or gas

t if malfuncti

perature of c

osion which

e atmospher

the PGE050

ixtures. The

n should occ

rtain combu

ould result in

or in the pre

to measure

sensor wire i

r, the wire
tible gases
serious injur

-

12

tinb4

e1 (2018-05) VGC083C.

m

4 Installation

4.1 Mechanical Installation ­Controller

4.1.1 Panel Mount

Procedure

The unit is intended for indoor use only. The unit is offered as a space saving half
rack design. It may also be used as a bench top device or easily installed in an
instrument panel. Optional EIA-standard rack mount panels are available for either
full rack or dual, side-by-side rack mount installation.

 Make a cutout in your rack panel or instrument control panel as shown in

the drawing below. Be sure to allow clearance behind the panel for the in­strument as well as connectors and cables at the back of the instrument.
Optional EIA-standard, 19-inch, 2U height rack mount panels are available
from INFICON. The optional rack mount panels are provided with panel cut­outs and mounting holes to allow efficient mounting of your VGC083C unit.

 Drill four guide holes on each side of the panel cut out (two on each side)

with dimensions as shown in the panel cut-out drawing above.

 Slide the unit into the panel hole cut-out. Guide the four studs on the back of

the unit front panel face plate thru the four holes next to the panel cut-out.

 Use four # 10-32 Hex Nut (provided with instrument) to tighten the unit to

the panel.

4.1.2 Rack Mount

tinb42e1 (2018-05) VGC083C.om 13

Optional EIA-standard 19-inch wide, 2U height rack mount panels available from
INFICON (→  70):

Single cut-

o

o

c

n

t

A

A

T

o

T

ApMuwpm

T

oDVch

a

p

c

O

o

m

z

N

p

z

c

g

e

n

e

y

a

b

n

e

p

c

c

a

s

t

l

a

r

g

p

e

b

n

e

n

g

k

b

e

m

h

e

a

o

p

r

a

a

o

g

n

e

u

m

g

s

c

w

f

e

G

n

o

s

p

e

c

t

x

w

d

y

2

o

l

u

d

g

w

s

m

o

t

o

e

p

n

i

e

o

a

s

-

o

ut panel

ll dimensions

in inches.

4.1.3

Single cut-

Mechani
Ionizatio

ut panel

al Installa

Gauge

ion -

ll dimensions

he single cut-

b

le from INFIC

f

r mounting t

For

in inches.

out and dual

ON. Panel co

rack enclosu

more detailed

ioni

ation gauge,

ut-out rack

or matches t

re are includ

information
please refer t

ountable pan
e front panel
d.

bout the MA

the Operati

els shown ab

of VGC083C

050 / 060 co

g Manual for

ve are avail

units. Screw

d cathode
this product.

-

14

CAUTIO

nt. Take ap

n

ouching the p
lways use cle
roduct.

ount the ioni

re. Long or re

een your pro

ressure chan

ay also caus

he gauge ca

g

uge with por
llecting in th

c

o not mount t

ibrations ma

anical stress

F

or electrical s

v

cuum cham

p

roper groundi

(

lasma, ion b

n

cted to the v

ri

ngs and clam

-type flange

li

! Dirt and d
ropriate mea
roduct or par
an, lint free g

ation gauge

stricted, smal

ess chambe
es. Mountin

measureme

be mounted

t down to hel

gauge.

he gauge wh

cause unsta
to compone

afety purpos

er. When usi

ng. If the gau

am etc.), ma

acuum cham

ps. Do not att

lamps.

mage can im

ures to ensu

s with bare h

oves as well

s close as p

diameter tub

and the gau

the ionizatio

nt and control

in any orienta

minimize th

re it will be s
le readings,

ts in the gau

s the housing

g KF flange
e may come
e sure its va
er and do al

mpt to modi

air the functi

e cleanliness

nds increase

s clean tools

ssible to the

ing will creat

e. This may

gauge too cl

instability.

ion, however

effect of any

bjected to e

easurement

e.

of the gauge

, metal clamp

into contact

uum connect
ays use con

your flange

n of the vac

and prevent
s the desorpti
when workin

ressure you

a pressure d

ause a delay
ose to a gas

, if possible,

particles or c

cessive vibra

errors and p

must be grou
s must be us

ith charged

ions is galva

uctive metall

in order to us

tinb4

um compo-

amage.

on rate.

with this

ant to meas

ifference bet-

in response t

ource inlet

ount the

ndensation

ion.
ssible me-

nded to the

d to ensure
articles
ically con­c centering

non-metal-

e1 (2018-05) VGC083C.

m

4.1.4 Mec

s

a

m

t

e

c

o

h

o

e

n

e

h

m

h

s

m

a

o

s

g

t

m

o

n

g

m

.

v

m

n

d

e

m

e

0

u

w

c

i

w

a

t

s

l

c

m

r

a

f

m

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t

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y

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t

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e

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u

e

r

s

y

f

h

e

a

e

m

f

Con

hanical In
vection G

tallation ­uge

Use all
pected

Remov
manufa
tive lid f

Mount t
Long or
your pr
pressur

Mounti
measur
heating

Mount t
reading
1 Torr,

metal vacuu

o be below 1

the protecti

turer's reco

or future mai

For more
please ref

he PGE050 a

restricted, s

cess chamb

changes.

g the PGE05

ment and co

or cooling, s

he PGE050

errors may o

ounting pos

fittings with

00 × 10-7 Tor

e lid and inst

mendations
tenance.

etailed infor

r to the Oper

close as po

all diameter

r and the ga

too close to

ntrol instabilit

ch as heater

ith its main a

cur above 1

tion has little

etal seals w

(1.33 × 10-7

ll the product

r different fl

ation about t

ting Manual

sible to the p
ubing will cre
ge. This may

a gas source

. Do not mo

or air conditi

is horizontal

orr if the uni

o no effect.

en operating

mbar, 1.33 ×

to the vacuu

nges and fitti

e PEG050 c

for this produ

ressure you

te a pressur

cause a dela

inlet may als
nt the PGE0

ning vents.

(see diagram

is not mount

pressures ar

10-5 Pa).

system foll

gs. Keep th

nvection gau
t.

ant to meas
difference b

in response

cause

0 near a sou

below). Pres

d horizontall

ex-

wing

protec-

ge,

re.

tween

to

ce of

ure

. Below

tinb42e1 (2018-05) VGC0

83C.om

Mount t
particle

Do not
tions m
stress t

Flange
followin

- NPT fi
ant co
wraps
gauge i
the gau

he PGE050

or condens

ount the PG
y cause uns
component

/ Fittings - fol

:

ttings: When

pound or wra

f pipe thread

to the gauge

e.

ith port down
tion from coll

E050 where i
able reading

in the PGE0

ow the manu

onnecting th

p the threade

eal tape suc

port. Do not

if possible, t

cting in the g

will be subje

, measureme

0.

acturer's rec

device usin

portion of th
as PTFE (T
se a wrench

help minimi

auge.

ted to exces

nt errors and

mmendation

a NPT fittin

e tubing with

flon®) tape a

or other tool

e the effect o

ive vibration.

ossible mec

and note th

, apply a thre
one-and-a-ha

d hand tight
hich may da

any

Vibra-

anical

d seal-

lf to two

n the

age

15

4.2

E

o

o

t

o

mtoth

h

A

h

o

a

d

U

d

d

o

r

m

o

a

h

d

v

t

T

v

k

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s

p

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C

r

3

o

y

d

a

d

4.2.1

4.2.2

lectrical

Groundin

Installati

Installati

g

n

n

Be sure t

g

rounded to pr

fi

tings, especi

p

roduce a goo

c

nnected to.
easurement
earth groun
at you conne

e

rth ground c
e green colo

t

good, recom

n

cting or disc

n the back pa

o

e vacuum g

otect personn

lly those wit

electrical co
se a ground
evice if nece

via a good q

ct a separate

nnection an

ed screw pro

mended prac

nnecting it.

nel of the de

uges and the

el from shoc

O-rings whe
nnection bet
lug on the va
ssary. The V
uality equipm

12-AWG eart

the location

ided) on the

ice is to rem

he electrical

ice as shown

rest of your v

and injury. B
not used wit

een the gaug

uum connect

C083C cont
nt earthing c

ing conduct

arked with t

ack panel of

ve power fro

onnections f

below.

acuum syste

aware that
h metal clam
e and the ch

ion flange of
ol unit should
onductor. It i

r between a

e earth grou

the VGC083

any cable p

r the VGC08

are properl

ome vacuum

s, may not
mber it is
he pressure

be connecte

encouraged

nown facility

d symbol (vi

.

ior to con-

C are locate

16

tinb4

e1 (2018-05) VGC083C.

m

4.2.3 Con

G

e

n

A

n

e

b

-

A

e

s

t

t

n

n

e

e

m

M

b

-

F

e

b

o

a

o

o

m

p

0

e

a

n

l

t

h

t

t

n

e

s

t

s

c

V

7

t

t

O

n

e

n

c

.

t

h

e

t

A

N

®

C

0

t

m

E

m

p

s

t

p

b

G

E

u

0

v

e

e

m

n

t

t

n

o

t

C

n

t

o

MA
lab

necting M

060 - con

led "1"

G050 /

ector

C

ment b

The cu
differen
cold ca

Changi
electro
equipm
equipm

UTION! It is

fore connecti

tom cable / c
lengths from

hode ionizati

g cables fro

ics handling

nt, may lead
nt damage a

lways good i

ng or disconn

nnector ass

INFICON for

n gauge sen

one device
rocedure, it i

to erroneous

nd possible o

dustry practi

cting cables

mbly are cus
connecting t

or.

o another wh

not advised

measuremen

erator injury.

e to turn off

om cable as
e VGC083C

n power is a
and, if done
t results, a ha

ower to the i

emblies provi

o the MAG05

plied is not o

y the user of

zardous situa

stru-

ded in
0 / 060

nly bad

his
ion,

4.2.4 Con
con
and

necting th

ectors la

"3"

PGE050

eled "2"

Part nu

PN 399
from IN
Instrum
the DE­"3".

For you
shown
INFICO

VGC08

pin n

1

2

3

4

5

6

7

8

9

bers →  7

AG050 / MA
akable cabl

580 … -582

ICON for co
nts / Granvil

9 D-subminia

r reference, t

elow. In addi

N will provide

3C. connec



















.

060 IG

250 °C

re a custom
necting the

e-Phillips® 2

ure connecto

e wiring char
ion to INFIC
custom lengt

s to

cabl

M

able assemb

GC083C to I
5 Convectron
r to VGC083

for the PGE

N provided s

cable asse

PG

(INFICON

.c.

shield

3

3

2

5

1

1

.c.

G050 / MA

80 °C

lies provided

FICON PG

®

vacuum ga

and PGE05

50 cable pro

tandard cabl

blies upon r

050 gauge pi

olded, custo

060 IG

in different le
050 gauge or

ge sensor. C

connectors

ided by INFI
assembly le
quest.

n no.

connector)

gths

MKS

nnect

o "2" or

ON is

gths,

tinb42e1 (2018-05) VGC0

83C.om

17

4.2.5 Power Connection

4.2.6 Relay Connection

The VGC083C requires an input power of 20 … 28 V (dc), 12 W to operate. One
each 2-contact pluggable terminal strip mating connector is provided for connection
to the power contactors. Optional power supplies are also available from INFICON
(PN →  70).

Power

(contacts)

Contact Description Power Input

Connector

+ Power input (20 … 28 V (dc), 12 W)

– Power ground

A total of six setpoint relays are provided by the VGC083C. Two each 9-contact
pluggable terminal strip mating connectors are provided for easy connection to the
relay contactors. The VGC083C back panel relay connectors are marked RLY1
thru RLY6. Each relay has a contact labeled = (Normally Open), ≠ (Normally
Closed) and I (common).

RLY1 thru RLY6

Contact Description Relay Connectors

(contacts)

= Relay #1 to Relay #6

(NORMALY OPEN)

≠ Relay #1 to Relay #6

(NORMALLY CLOSED)

I Relay #1 to Relay #6 (COMMON)

4.2.7 Analog Output
Connection

4.2.8 Analog Input Connection
(Capacitance Diaphragm
Gauges, etc.)

A total of three analog outputs are provided by the VGC083C. These output volt­age signals are proportional to the displayed pressure for any of the user assigned
vacuum gauges. Three each 2-contact pluggable terminal strip mating connectors
are provided for connection to the analog output contactors. The VGC083C back
panel analog output connectors are marked AO1, AO2 and AO3. Each connector
has a contact labeled + (analog output signal) and – (analog output ground).

AO1 , AO2, AO3

(contacts)

Contact Description Analog Output

Connectors

+ Analog Output #1 to #3 (Signal)

– Analog Output Ground #1 to #3

(Signal Return)

One analog input is provided by the VGC083C for using as an alternate gauge to
"2". This input can be accepted from one capacitance diaphragm gauge or other
INFICON vacuum module series PGE300, PGE500 or BAG302. One each 3-con­tact mating pluggable terminal strip connector is provided for connection to the
analog input contactor. The VGC083C back panel analog input connector is
marked A1. Each connector has a contact labeled + (analog input signal) and –
(analog input ground) and D (power detect).

A1

(contacts)

Contact Description Analog Input

Connector

+ Analog Input (Signal)

– Analog Input Ground (Signal Return)

D Detect (power detect)

18 tinb42e1 (2018-05) VGC083C.om

When using a capacitance manometer / diaphragm gauge or INFICON modules
such as the PGE300, PGE500, BAG302 as an ALTERNATE GAUGE, the gauge
must be connected to the VGC083C as shown below. The alternate gauge must be
provided power from an auxiliary power supply capable of providing the power re­quired by the alternate gauge connected to the VGC083C. The D contact is used in
this configuration to protect the IG from being turned on at high pressure in case
power to the alternate gauge is lost.

4.2.9 Digital I/O Connection

Signal Type A - Control Input
Signals

Signal Type B - Status Output
Signal

Signal Type C - Error output
Signal

The IG can be controlled manually using the front panel soft-keys, via remote input
signals using the digital I/O connector or RS232/RS485 commands. The VCG083C
can also be configured so that the IG sensor on/off is controlled by using the
pressure measurements from CG1 , CG2 or the alternate gauge. If the user
prefers digital I/O as the means of controlling the IG , various control input and
status output signals are available from the 9-pin D-sub male DIGITAL I/O con­nector. The DIGITAL I/O Connector also provides pin-pin compatible signals with
the GP 358 vacuum gauge controller as well as compatible signals with the
GP 307.

The DIGITAL I/O Connector provides three different types of signals as listed
below:

The IG sensor on/off can be set by applying momentary continuity to ground.
This requires a momentary ground of less than 0.4 V (dc) at 10 µA for 25 msec
(minimum) be applied. After this, the input must be allowed to float higher than

3.5 V (dc) for 105 msec (minimum) before another low can be applied.

Input signal: Apply momentary continuity to ground to turn IG sensor on or off

The IG on/off status relay is also available as both normally open and normally
closed to indicate IG is on or off. This is an output signal to other external instru­ments to confirm IG filament is on or off. The IG on / off status relay is a single
pole, double-throw (SPDT) relay rated at 1.0 A, 30 V (dc) resistive or 1.0 A,
30 V (ac) non-inductive.

This can be used as an output signal to other external instruments to confirm
whether any error conditions exist.

Signal: Open collector transistor (ground emitter) rated at 40 V max. VCE,

50 mA IC max.

Transistor on = error condition exists,
Transistor off = no error condition exists

tinb42e1 (2018-05) VGC083C.om 19

4.2.10 RS232 /

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tinb4

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Description

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No connect

Signal Gro

No connect

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DATA A (–)

DATA B (+

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tinb42e1 (2018-05) VGC083C.om

21

5 Operation - IG and CG

5.1 IG Over Pressure Shut
Down

5.2 Convection Gauge (CG)
Initial Setup

Setting Zero (SET VAC)

Setting Atmosphere (SET ATM)

NOTE

The MAG050 / MAG060 cold cathode ion gauge will shut off automatically should
the pressure reach or rise above the overpressure shut down value shown below. If
desired user can adjust the OVER PRESSURE value in the ION GAUGE menu:

Overpressure Shut Down

Torr mbar Pa

5.00 × 10-3 6.65 × 10-3 6.65

Two of the most important steps for the initial setup of the convection gauges are to
set zero (SET VAC) and set atmosphere (SET ATM) as described in the CONVEC
GAUGE section 6.5.3. This will ensure proper operation of the gauge and accurate
pressure measurements. The gauge is calibrated at the factory using nitrogen. Fur­thermore, the gauge is also installed in a certain orientation when calibrated at the
factory. Without setting zero and atmosphere after the gauge is installed in your
system, the gauge may not display the expected and correct pressures. This could
be caused by the fact that you may be using a different gas than Nitrogen such as
air to setup and calibrate the gauge (most commonly the case) and the gauge
orientation is different than the orientation used at the factory. As such, it is very
important to perform your own initial setup and calibration by setting zero and at­mosphere with the gauge installed in your actual system. Please note the following:

Setting zero optimizes performance of the gauge when operating at a low pressure
range of 1.00 × 10
higher than 1.00 × 10

-4

Torr to 1.00 × 10-3 Torr. If your minimum operating pressure is

-3

Torr, it is not normally necessary to set zero and thus set­ting atmosphere should be adequate. If you are able to evacuate your system to
below 1.00 × 10-4 Torr, it is always a good practice to check and set zero if neces­sary. See "SET VAC CG1" or SET "VAC CG2" in CONVEC GAUGE section 6.5.3.

Setting atmosphere is the most important step for a newly installed gauge. If you
prefer to use air to set atmosphere, vent your vacuum system chamber to expose
the gauge to the local atmospheric pressure (air) and set atmosphere to match
your known local uncorrected barometric pressure (air). This is the reading of
ambient air pressure you will expect if you were to vent and open your vacuum
chamber to the atmosphere surrounding the outside of your chamber. At sea level,
this pressure is usually near 760 Torr. At elevations above sea level, the pressure
decreases. Check your local aviation authority or airport web sites or your current
local weather conditions online to help find your local uncorrected barometric pres­sure if you do not have this information. See "SET ATM CG1" or "SET ATM CG2"
CONVEC GAUGE section 6.5.3.

Setting zero and atmosphere is normally required only once during the initial setup
and maybe checked by the user periodically. After power has been applied to the
gauge during the initial setup, allow five minutes for the gauge to stabilize (warm­up) before setting zero and atmosphere.

The information presented in sections 5.1 and 5.2, above, is intended as an intro­duction to the programming capabilities of the VGC083C for use in controlling the
selectable parameters and functions of the MAG050 / MAG060 IG and PEG050
CG transducers. Refer to the Operating Manuals for the MAG050 / MAG060 ion
gauge and PEG050 convection gauge for complete operation and setup
instructions of these connected devices.

22 tinb42e1 (2018-05) VGC083C.om

5.3 Cond Cathode
Activation Delay

The cold cathode gauge wil exhibit some level of activation time delay when the
sensor is being activated at pressures below 1.00E-05 Torr. This is the time
needed for the electrical discharge to establish itself at low pressures. The delay
time increases at low pressures, and is typically:

-8

7.5×10

7.5×10

7.5×10

Torr ≈ 0.1 minute

-9

Torr ≈ 1 minute

-10

Torr ≈ 5 minutes

tinb42e1 (2018-05) VGC083C.om 23