Inficon VGC083C Operating Manual

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2

tinb4

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Liability and Warranty

SHOCK HAZARD

Labels may be located on or inside the device to alert people that dangerous voltages may be present.

INFICON assumes no liability and the warranty is rendered null and void if the enduser or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.) on the product

• use the product with accessories not listed in the corresponding product docu-

mentation.

tinb42e1 (2018-05) VGC083C.om 3

Contents

Product Identification 2 Validity 2 Important User Information 2 Liability and Warranty 3

1 Introduction / General Information 6

1.1 Description 6

2 Technical Data 7

2.1 VGC083C 7

2.2 Power Supply for VGC083C (Optional) 9

3 Important Safety Information 10

3.1 Safety Precautions - General 10

3.2 Safety Precautions - Service and Operation 10

3.3 Electrical Conditions 11

3.3.1 Proper Equipment Grounding 11

3.3.2 Electrical Interface and Control 11

3.4 Overpressure and use with hazardous gases 11

3.5 Gases other than Nitrogen / air 12

4 Installation 13

4.1 Mechanical Installation - Controller 13

4.1.1 Panel Mount 13

4.1.2 Rack Mount 13

4.1.3 Mechanical Installation - Ionization Gauge 14

4.1.4 Mechanical Installation - Convection Gauge 15

4.2 Electrical Installation 16

4.2.1 Grounding 16

4.2.2 Installation 16

4.2.3 Connecting MAG050 / MAG060 - connector labeled "1" 17

4.2.4 Connecting the PGE050 - connectors labeled "2" and "3" 17

4.2.5 Power Connection 18

4.2.6 Relay Connection 18

4.2.7 Analog Output Connection 18

4.2.8 Analog Input Connection (Capacitance Diaphragm Gauges, etc.) 18

4.2.9 Digital I/O Connection 19

4.2.10 RS232 / RS485 Serial Communications Connection 20

5 Operation - IG and CG 22

5.1 IG Over Pressure Shut Down 22

5.2 Convection Gauge (CG) Initial Setup 22

5.3 Cond Cathode Activation Delay 23

6 Setup and programming 24

6.1 Applying Power 24

6.2 Front Panel Display 24

6.3 User Interface Basics 25

6.4 Factory-Set Default Parameters 25

6.5 Programming 26

6.5.1 SETUP UNIT 27

6.5.2 ION GAUGE 28

6.5.3 CONVEC GAUGE 29

6.5.4 RELAYS 30

6.5.5 Analog Output 32

6.5.6 SERIAL COMM 36

6.5.7 DISPLAY 37

7 Analog Output Charts & Equations (Nitrogen/Air Only) 39

7.1 Analog Output wide range measurement for IG - CG1 0.5 - 7V

(Nitrogen / Air only) 39

7.2 Analog Output for IG LOG N - 10 (Nitrogen / Air only) 40

7.3 Analog Output for IG LOG N - 11 (Nitrogen / Air only) 41

7.4 Analog Output for IG LOG N - 12 (Nitrogen / Air only) 42

7.5 Analog Output for IG 1.8 - 8.7 V (Nitrogen / Air only) 43

7.6 Analog Output for IG LINEAR (Nitrogen / Air only) 44

7.7 Analog Output for CG1 or CG2 1 - 8 V (Nitrogen / Air only) 44

7.8 Analog Output for CG1 or CG2 0 - 7 V (Nitrogen / Air only) 46

7.9 Analog Output for CG1 or CG2 NON - LIN (Nitrogen / Air only) 47

7.10 Analog Output for CG1 or CG2 LINEAR (Nitrogen / Air only) 49

4 tinb42e1 (2018-05) VGC083C.om

8 Using the Gauge with Different Gases 50

8.1 Ion Gauge Display Correction Factors for Selected Gases 50

8.2 Effects of Different Gases on Convection Gauge Display 51

8.3 Effects of Different Gases on Analog Output 55

8.3.1 Ion Gauge Analog Output Correction Factors for Selected Gases 55

8.3.2 IG - CG1 0.5 - 7V Analog Output Correction Factors for Selected Gases 55

8.3.2.1 IG-CG1 0.5 - 7V Analog Output Correction Factors -

Ion Gauge Range 56

8.3.2.2 IG-CG1 0.5 - 7V Analog Output Correction Factors -

Convection Gauge Range 57

8.3.3 Convection gauge analog output for selected gases 57

8.3.3.1 CG1 1 - 8 V or CG2 1 - 8 V Analog Output Correction Factors -

Convection Gauge 58

8.3.3.2 CG1 0 - 7 V or CG2 0 - 7 V Analog Output Correction Factors -

Convection Gauge 59

8.3.3.3 CG1 NON-LIN or CG2 NON-LIN Analog Output Correction Factors -

Convection Gauge 60

9 Communication Protocol (Serial Interface) 61

9.1 Device Specific Serial Communication Info 61

9.2 INFICON RS232 / RS485 Command Protocol Summary 61

9.3 INFICON RS232 and RS485 Command Protocol Summary 62

9.4 RS232 GP 307 and 358 Protocol 65

9.5 RS485 GP 307 and 358 Protocol 66

10 Service 68

10.1 Calibration 68

10.2 Maintenance 68

10.3 Troubleshooting - Operation 68

10.4 Troubleshooting - Error Messages 69

10.5 Clearing Error Messages 69

10.6 Research Screen 69

10.6.1 Research Screen (Diagnostic Display) 69

10.7 Cleaning the VGC083C 70

11 Repair 70

12 Accessories 70

13 Storage 71

14 Disposal 71

EU Declaration of Conformity 72

For cross-references within this document, the symbol (→  XY) is used; for cross- references to further documents listed under ‘Literature’, use is made of the symbol (→  [Z]).

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6

tinb4

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2 Technical Data

2.1 VGC083C

Measurement range

Display

Functionality

IG sensor control

IG remote input signals (digital I/O)

Setpoint relays

VGC083C

with MAG050 & PGE050 with MAG060 & PGE050

1.5×10

7.5×10

-9

… 1000 Torr

-11

… 1000 Torr

Units of measurement Torr, mbar, Pa (user selectable)

Pressure indication LED - 3 independent pressure display

channels, 3 digit plus 2 digit exponent per channel

Programming & set-up screen OLED - displays state of all setpoint relays, IG

emission current, error messages for fault conditions

IG powers & operates one INFICON MAG050 or

MAG060 passive Cold Cathode Gauge

CG , powers & operates up to 2 INFICON PGE050

convection or Granville-Phillips® (GP) Convectron

®

Alternate gauge displays pressure from an alternate gauge such

as a Capacitance Diaphragm Gauge - CDG or other INFICON gauges using the analog input (external power source for these alternate auxiliary devices will be required)

IG sensor on/off can all be controlled via front panel soft-keys, remote input signals (digital I/O) or serial communications. IG sensor can also be automatically turned on/off using measurements from one of the user selectable convection or alternate gauges.

IG sensor on/off can also be set by applying momentary continuity to ground. Also the 9-pin D-sub remote input DIGITAL I/O connector provides pin-pin compatible signals with the GP 358 controller as well as compatible signals with the GP 307.

Number 6

single-pole, double-throw (SPDT), user assignable to any of the gauges

Contact rating 5 A at 30 V (dc), 5 A at 250 V (ac), resistive

load

tinb42e1 (2018-05) VGC083C.om 7

Analog output

Analog input

Serial communications

Status output

IG overpressure protection

Ambience

Housing

IG analog output

Log-linear

0 … 10 V (dc), 1 V/decade, or

1)

1.7 … 9.3 V (dc) (nominal 1.8 … 8.7 V (dc)),

0.8 V/decade

Linear 0 … 10 V (dc) (useable over 3 decades)

Combination IG + CG or IG + ALT analog Log-linear

CG analog output

Log-linear

0.5 … 7 V (dc), 0.5 V/decade

1 … 8 V (dc), 1 V/decade 3), or

2)

0 … 7 V (dc), 1 V/decade 3)

Linear 0 … 10 V (dc) (useable over 3 decades)

Non-linear analog S-curve 0.375 … 5.659 V (dc)

1)

Various scaling selections also provide output compatibility with Granville-Phillips®

controller models 307, 350 and 358 controllers.

2)

Also compatible with GP 307 controller.

3)

Also compatible with GP 307, 350 and 358.

CDG one 0 … 10 V (dc) analog input signal from a

CDG when used as an alternate gauge to CG2

INFICON analog input from one of the following gauges:

PGE300, PGE500, BAG302

Protocol RS485 / RS232 - ASCII protocol

(command protocol compatibility with GP 307 and GP 358 controller is also provided)

IG sensor on/off status displayed as pressure reading on the front panel, by serial communications and by SPDT relay (DIGITAL I/O Connector) rated at 1 A at 30 V (dc) resistive, or 1 A at 30 V (ac) non-inductive.

IG error conditions are displayed on the front panel, by serial communications and by an open collector transistor output (ground emitter) rated at 40 V max. VCE, 50 mA IC max.

Turns ion gauge off at 5.00 × 10-3 or overpressure value programmed by the user.

Temperature

Operation Storage

0 … +40 °C –40 … +70 °C

Relative humidity 0 … 95, non-condensing

Altitude

Operating Storage

max. 2500 m (8200 ft.) max. 12500 m (41000 ft.)

Housing aluminum extrusion

8 tinb42e1 (2018-05) VGC083C.om

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Turn of ing nor vice pe by this

It is imp nection electric

Do not Contac to INFI

If meas “OVER

W ening el are mai contact a gase ground coming tage po the gas

W present which t ground groundi intende any co earthin pressur

power to the

ally accordi

sonnel for an

perating ma

ortant that th

and equipm l insulation h

se if the unit

INFICON for

ON for evalu

red pressur

PRESSURE”

RNING! Wh

ectrical shoc

ntained at ea

with the gas

us environm

d conductor

in contact wit

ential. This c inside the va

RNING! Ha

in many vac

e ion gauge d. Consult a

ng. Proper gr

operation o

trol module

conductor.

measurem

unit if a cabl g to this instr

service or tr

ual.

product be

nt grounding s been com

has been dro

return author

ation.

exceeds 5.0

menu the se

n high volta

hazard may

th ground pot

ontained in v nt may coupl

f electricity.

an exposed ndition appli

uum chamb

ardous volta

um processe

nd the conv

ualified Elec

unding of yo

the equipme

ust be conne se a ground l

nt devices if

or plug is da

ction manual

ubleshootin

eriodically in . Do not use i

romised.

ped or the e

zation and in

× 10-3 Torr sor will turn

e is present i

xist unless a ntial. This a cuum cham

dangerous

person coul

ungrounded

s to all produ

r (vacuum/pr

es that could

. Verify that t

ction gauges

rician if you a

r equipment t. The vacuu ted directly t

ug on the vac

ecessary.

aged or the

. Contact qua

condition th

pected for so the equipme

closure has

tructions for

r the value p ff.

any vacuu

ll exposed el

plies to all pr ers. An elect igh voltage d

be seriousl

electrical con

cts that may

ssure contai

seriously inju

he vacuum c

are mounted

re in doubt a is essential f m gauge hea

a good qual

uum connecti

product is no lified INFICO

t may not be

und electrical

nt grounding

een damage

eturning the

ogrammed in

system, a lif

ctrical condu

ducts that c

ical discharg

irectly to any

injured or kill

ductor at hig

ome in conta ment vessel)

re or cause d

nnection por

are electricall

out your equi

r safety as w

s and enclos

ity equipment

on flange of t

operat-

ser-

covered

con-

r

d.

roduct

the

threat-

tors

me in

within

nd by

volct with .

ath are

s on

pment

ll as

ure of

e

3.3.2 Ele Con

3.4 Over

with

trical Inte

trol

pressure hazardou

face and

nd use

gases

W harm, trical d

It is the and an are use any sig your sy taken t

W pressu system

In case implem an auto pressur

The va pressur sure ins heads gases are rate tect the overpre pressio fitting w

RNING! In hield all con scharges in

user’s respo

connections

in a safe m als to autom tem design

prevent injur

RNING! In

e inside you

component

where an e

nt fail-safe s

matic backfill

s if the pres

uum gauge h

s above 20

ide the senso

ave an admi

55 °C). If you

d for, you sh

gauge tube f

ssure conditi

fitting may f

ith only a few

rder to prot ductors whi or around th

sibility to ens made to exte

nner. Always

te your proc

nd ensure sa

and propert

tall suitable

vacuum ch

are capable

uipment failu

stem operati

peration wh

ure relief dev

ads used wi

sia (1000 To

r. The MAG0

sible pressur

r chamber go

uld install an om overpres

ns may be lo

rcibly releas

psi over local

ct personne

h are subjec

vacuum sy

re that the el

nal devices,

double chec ss. Perform eguards and

damage.

rotective d

mber to les

of withstan

e could caus

n. For exam re a malfunct

ce was not in

h this product r); DO NOT e

060 pass of 130 psi ( s to higher p

isolation valv

ure condition

er; for exam the gauge t uncorrected

l from electri t to potentia stem.

ectrical signa

or example, r

the system hazardous o

personnel sa

vices that w

than what t

ing.

a hazardous

le, use a pre

ion could res

talled on the

are not inten xceed 35 psi ive cold cath

bar absolute

ressures tha

or pressure

. With some

ple, a quick-c

be from the

arometric (a

c shock and high voltag

s from this pr

lays and sol

et-up before peration anal ety measure

ll limit the le

e vacuum c

condition, al

sure relief d lt in high inte chamber.

ed for use at (< 2 ½ bars) de vacuum g

- limited to in what these

relief device t

fittings, actua

nnect, O-rin acuum cham mospheric) p

bodily

elec-

duct noids, sing sis of

are

el of

amber

ays

vice in

nal

pres-

uge

ert eads

pro-

safe

com-

er

essure.

tinb42e1 (2018-05) VGC0

83C.om

11

3.5

G

N

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osminflo

mex

p

wIN

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s

n

y

ases ot

itrogen /

er than

air

CAUTIO

t

increase a

ure side), va

ay cause le to the atmo

ammable ga

the vacuu

ent, could c

pose the g

ressure whe

WARNIN

ithout referrin

FICON gaug

o not attempt

nless you ha

u

nalog output

a

hen using co

! If the inte

ove local un

uum fitting ks that woul phere of the

es are exa /pressure c

use bodily i

uge tube int

using haza

! Do not att

g to correctio

es and modu

to use with o

e applied cor o determine t

vection gau

nal pressure

orrected ba may releas d allow the g

surroundin

ples of haza

ntainment v

jury and po

rnal volume dous gases.

mpt to use w

factor data

es are calibr

her gases su ection factor

e true meas

es to measur

of a vacuum ometric pre and possibl

s inside the environmen dous gases ssel into the

sible dama

to pressure

th gases oth

ables.

ted for direct

h as argon (

to both the d

red pressure

pressure of

gauge devi

sure (atmos

overpress

gauge tube

t. Toxic, pyr

hat if allowe

atmospheri

e to equipm

bove local

r than nitrog

readout of nit

r) or carbon

isplayed pres . This is parti gases other t

e is allowed

pheric pres-

re condition

o release

phoric and

to leak out

environ-

nt. Never

tmospheric

n (N

) or air

2

ogen or air.

ioxide (CO2) ure and the

ularly critical

an N2/Air.

WARNIN

nce of flam e pressure o e gauge nor mperature c

a

nd gas mixtur

o

r death.

! Do not us

able gases,

explosive or

ally operate

uld exceed t

e. This could

the PGE050 apors or fum

combustible

at 125 °C, b e ignition te

cause an exp

in an explosi

s. Do not us

ases or gas

t if malfuncti

perature of c

osion which

e atmospher

the PGE050

ixtures. The

n should occ

rtain combu

ould result in

or in the pre

to measure

sensor wire i

r, the wire tible gases serious injur

-

12

tinb4

e1 (2018-05) VGC083C.

m

4 Installation

4.1 Mechanical Installation Controller

4.1.1 Panel Mount

Procedure

The unit is intended for indoor use only. The unit is offered as a space saving half rack design. It may also be used as a bench top device or easily installed in an instrument panel. Optional EIA-standard rack mount panels are available for either full rack or dual, side-by-side rack mount installation.

 Make a cutout in your rack panel or instrument control panel as shown in

the drawing below. Be sure to allow clearance behind the panel for the instrument as well as connectors and cables at the back of the instrument. Optional EIA-standard, 19-inch, 2U height rack mount panels are available from INFICON. The optional rack mount panels are provided with panel cutouts and mounting holes to allow efficient mounting of your VGC083C unit.

 Drill four guide holes on each side of the panel cut out (two on each side)

with dimensions as shown in the panel cut-out drawing above.

 Slide the unit into the panel hole cut-out. Guide the four studs on the back of

the unit front panel face plate thru the four holes next to the panel cut-out.

 Use four # 10-32 Hex Nut (provided with instrument) to tighten the unit to

the panel.

4.1.2 Rack Mount

tinb42e1 (2018-05) VGC083C.om 13

Optional EIA-standard 19-inch wide, 2U height rack mount panels available from INFICON (→  70):

Single cut-

o

c

n

t

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o

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s

-

o

ut panel

ll dimensions

in inches.

4.1.3

Single cut-

Mechani Ionizatio

ut panel

al Installa

Gauge

ion -

ll dimensions

he single cut-

b

le from INFIC

f

r mounting t

For

in inches.

out and dual

ON. Panel co

rack enclosu

more detailed

ioni

ation gauge,

ut-out rack

or matches t

re are includ

information please refer t

ountable pan e front panel d.

bout the MA

the Operati

els shown ab

of VGC083C

050 / 060 co

g Manual for

ve are avail

units. Screw

d cathode this product.

-

14

CAUTIO

nt. Take ap

n

ouching the p lways use cle roduct.

ount the ioni

re. Long or re

een your pro

ressure chan

ay also caus

he gauge ca

g

uge with por llecting in th

c

o not mount t

ibrations ma

anical stress

F

or electrical s

v

cuum cham

p

roper groundi

(

lasma, ion b

n

cted to the v

ri

ngs and clam

-type flange

li

! Dirt and d ropriate mea roduct or par an, lint free g

ation gauge

stricted, smal

ess chambe es. Mountin

measureme

be mounted

t down to hel

gauge.

he gauge wh

cause unsta to compone

afety purpos

er. When usi

ng. If the gau

am etc.), ma

acuum cham

ps. Do not att

lamps.

mage can im

ures to ensu

s with bare h

oves as well

s close as p

diameter tub

and the gau

the ionizatio

nt and control

in any orienta

minimize th

re it will be s le readings,

ts in the gau

s the housing

g KF flange e may come e sure its va er and do al

mpt to modi

air the functi

e cleanliness

nds increase

s clean tools

ssible to the

ing will creat

e. This may

gauge too cl

instability.

ion, however

effect of any

bjected to e

easurement

e.

of the gauge

, metal clamp

into contact

uum connect ays use con

your flange

n of the vac

and prevent s the desorpti when workin

ressure you

a pressure d

ause a delay ose to a gas

, if possible,

particles or c

cessive vibra

errors and p

must be grou s must be us

ith charged

ions is galva

uctive metall

in order to us

tinb4

um compo-

amage.

on rate.

with this

ant to meas

ifference bet-

in response t

ource inlet

ount the

ndensation

ion. ssible me-

nded to the

d to ensure articles ically conc centering

non-metal-

e1 (2018-05) VGC083C.

m

4.1.4 Mec

s

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Con

hanical In vection G

tallation uge

Use all pected

Remov manufa tive lid f

Mount t Long or your pr pressur

Mounti measur heating

Mount t reading 1 Torr,

metal vacuu

o be below 1

the protecti

turer's reco

or future mai

For more please ref

he PGE050 a

restricted, s

cess chamb

changes.

g the PGE05

ment and co

or cooling, s

he PGE050

errors may o

ounting pos

fittings with

00 × 10-7 Tor

e lid and inst

mendations tenance.

etailed infor

r to the Oper

close as po

all diameter

r and the ga

too close to

ntrol instabilit

ch as heater

ith its main a

cur above 1

tion has little

etal seals w

(1.33 × 10-7

ll the product

r different fl

ation about t

ting Manual

sible to the p ubing will cre ge. This may

a gas source

. Do not mo

or air conditi

is horizontal

orr if the uni

o no effect.

en operating

mbar, 1.33 ×

to the vacuu

nges and fitti

e PEG050 c

for this produ

ressure you

te a pressur

cause a dela

inlet may als nt the PGE0

ning vents.

(see diagram

is not mount

pressures ar

10-5 Pa).

system foll

gs. Keep th

nvection gau t.

ant to meas difference b

in response

cause

0 near a sou

below). Pres

d horizontall

ex-

wing

protec-

ge,

re.

tween

to

ce of

ure

. Below

tinb42e1 (2018-05) VGC0

83C.om

Mount t particle

Do not tions m stress t

Flange followin

- NPT fi ant co wraps gauge i the gau

he PGE050

or condens

ount the PG y cause uns component

/ Fittings - fol

:

ttings: When

pound or wra

f pipe thread

to the gauge

e.

ith port down tion from coll

E050 where i able reading

in the PGE0

ow the manu

onnecting th

p the threade

eal tape suc

port. Do not

if possible, t

cting in the g

will be subje

, measureme

0.

acturer's rec

device usin

portion of th as PTFE (T se a wrench

help minimi

auge.

ted to exces

nt errors and

mmendation

a NPT fittin

e tubing with

flon®) tape a

or other tool

e the effect o

ive vibration.

ossible mec

and note th

, apply a thre one-and-a-ha

d hand tight hich may da

any

Vibra-

anical

d seal-

lf to two

n the

age

15

4.2

E

o

t

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4.2.1

4.2.2

lectrical

Groundin

Installati

g

n

Be sure t

g

rounded to pr

fi

tings, especi

p

roduce a goo

c

nnected to. easurement earth groun at you conne

e

rth ground c e green colo

t

good, recom

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cting or disc

n the back pa

o

e vacuum g

otect personn

lly those wit

electrical co se a ground evice if nece

via a good q

ct a separate

nnection an

ed screw pro

mended prac

nnecting it.

nel of the de

uges and the

el from shoc

O-rings whe nnection bet lug on the va ssary. The V uality equipm

12-AWG eart

the location

ided) on the

ice is to rem

he electrical

ice as shown

rest of your v

and injury. B not used wit

een the gaug

uum connect

C083C cont nt earthing c

ing conduct

arked with t

ack panel of

ve power fro

onnections f

below.

acuum syste

aware that h metal clam e and the ch

ion flange of ol unit should onductor. It i

r between a

e earth grou

the VGC083

any cable p

r the VGC08

are properl

ome vacuum

s, may not mber it is he pressure

be connecte

encouraged

nown facility

d symbol (vi

.

ior to con-

C are locate

16

tinb4

e1 (2018-05) VGC083C.

m

4.2.3 Con

G

e

n

A

n

e

b

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A

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MA lab

necting M

060 - con

led "1"

G050 /

ector

C

ment b

The cu differen cold ca

Changi electro equipm equipm

UTION! It is

fore connecti

tom cable / c lengths from

hode ionizati

g cables fro

ics handling

nt, may lead nt damage a

lways good i

ng or disconn

nnector ass

INFICON for

n gauge sen

one device rocedure, it i

to erroneous

nd possible o

dustry practi

cting cables

mbly are cus connecting t

or.

o another wh

not advised

measuremen

erator injury.

e to turn off

om cable as e VGC083C

n power is a and, if done t results, a ha

ower to the i

emblies provi

o the MAG05

plied is not o

y the user of

zardous situa

stru-

ded in 0 / 060

nly bad

his ion,

4.2.4 Con con and

necting th

ectors la

"3"

PGE050

eled "2"

Part nu

PN 399 from IN Instrum the DE"3".

For you shown INFICO

VGC08

pin n

1

2

3

4

5

6

7

8

9

bers →  7

AG050 / MA akable cabl

580 … -582

ICON for co nts / Granvil

9 D-subminia

r reference, t

elow. In addi

N will provide

3C. connec



.

060 IG

250 °C

re a custom necting the

e-Phillips® 2

ure connecto

e wiring char ion to INFIC custom lengt

s to

cabl

M

able assemb

GC083C to I 5 Convectron r to VGC083

for the PGE

N provided s

cable asse

PG

(INFICON

.c.

shield

3

2

5

1

.c.

G050 / MA

80 °C

lies provided

FICON PG

®

vacuum ga

and PGE05

50 cable pro

tandard cabl

blies upon r

050 gauge pi

olded, custo

060 IG

in different le 050 gauge or

ge sensor. C

connectors

ided by INFI assembly le quest.

n no.

connector)

gths

MKS

nnect

o "2" or

ON is

gths,

tinb42e1 (2018-05) VGC0

83C.om

17

4.2.5 Power Connection

4.2.6 Relay Connection

The VGC083C requires an input power of 20 … 28 V (dc), 12 W to operate. One each 2-contact pluggable terminal strip mating connector is provided for connection to the power contactors. Optional power supplies are also available from INFICON (PN →  70).

Power

(contacts)

Contact Description Power Input

Connector

+ Power input (20 … 28 V (dc), 12 W)

– Power ground

A total of six setpoint relays are provided by the VGC083C. Two each 9-contact pluggable terminal strip mating connectors are provided for easy connection to the relay contactors. The VGC083C back panel relay connectors are marked RLY1 thru RLY6. Each relay has a contact labeled = (Normally Open), ≠ (Normally Closed) and I (common).

RLY1 thru RLY6

Contact Description Relay Connectors

(contacts)

= Relay #1 to Relay #6

(NORMALY OPEN)

≠ Relay #1 to Relay #6

(NORMALLY CLOSED)

I Relay #1 to Relay #6 (COMMON)

4.2.7 Analog Output Connection

4.2.8 Analog Input Connection (Capacitance Diaphragm Gauges, etc.)

A total of three analog outputs are provided by the VGC083C. These output voltage signals are proportional to the displayed pressure for any of the user assigned vacuum gauges. Three each 2-contact pluggable terminal strip mating connectors are provided for connection to the analog output contactors. The VGC083C back panel analog output connectors are marked AO1, AO2 and AO3. Each connector has a contact labeled + (analog output signal) and – (analog output ground).

AO1 , AO2, AO3

(contacts)

Contact Description Analog Output

Connectors

+ Analog Output #1 to #3 (Signal)

– Analog Output Ground #1 to #3

(Signal Return)

One analog input is provided by the VGC083C for using as an alternate gauge to "2". This input can be accepted from one capacitance diaphragm gauge or other INFICON vacuum module series PGE300, PGE500 or BAG302. One each 3-contact mating pluggable terminal strip connector is provided for connection to the analog input contactor. The VGC083C back panel analog input connector is marked A1. Each connector has a contact labeled + (analog input signal) and – (analog input ground) and D (power detect).

A1

(contacts)

Contact Description Analog Input

Connector

+ Analog Input (Signal)

– Analog Input Ground (Signal Return)

D Detect (power detect)

18 tinb42e1 (2018-05) VGC083C.om

When using a capacitance manometer / diaphragm gauge or INFICON modules such as the PGE300, PGE500, BAG302 as an ALTERNATE GAUGE, the gauge must be connected to the VGC083C as shown below. The alternate gauge must be provided power from an auxiliary power supply capable of providing the power required by the alternate gauge connected to the VGC083C. The D contact is used in this configuration to protect the IG from being turned on at high pressure in case power to the alternate gauge is lost.

4.2.9 Digital I/O Connection

Signal Type A - Control Input Signals

Signal Type B - Status Output Signal

Signal Type C - Error output Signal

The IG can be controlled manually using the front panel soft-keys, via remote input signals using the digital I/O connector or RS232/RS485 commands. The VCG083C can also be configured so that the IG sensor on/off is controlled by using the pressure measurements from CG1 , CG2 or the alternate gauge. If the user prefers digital I/O as the means of controlling the IG , various control input and status output signals are available from the 9-pin D-sub male DIGITAL I/O connector. The DIGITAL I/O Connector also provides pin-pin compatible signals with the GP 358 vacuum gauge controller as well as compatible signals with the GP 307.

The DIGITAL I/O Connector provides three different types of signals as listed below:

The IG sensor on/off can be set by applying momentary continuity to ground. This requires a momentary ground of less than 0.4 V (dc) at 10 µA for 25 msec (minimum) be applied. After this, the input must be allowed to float higher than

3.5 V (dc) for 105 msec (minimum) before another low can be applied.

Input signal: Apply momentary continuity to ground to turn IG sensor on or off

The IG on/off status relay is also available as both normally open and normally closed to indicate IG is on or off. This is an output signal to other external instruments to confirm IG filament is on or off. The IG on / off status relay is a single pole, double-throw (SPDT) relay rated at 1.0 A, 30 V (dc) resistive or 1.0 A, 30 V (ac) non-inductive.

This can be used as an output signal to other external instruments to confirm whether any error conditions exist.

Signal: Open collector transistor (ground emitter) rated at 40 V max. VCE,

50 mA IC max.

Transistor on = error condition exists, Transistor off = no error condition exists

tinb42e1 (2018-05) VGC083C.om 19

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tinb42e1 (2018-05) VGC083C.om

21

5 Operation - IG and CG

5.1 IG Over Pressure Shut Down

5.2 Convection Gauge (CG) Initial Setup

Setting Zero (SET VAC)

Setting Atmosphere (SET ATM)

NOTE

The MAG050 / MAG060 cold cathode ion gauge will shut off automatically should the pressure reach or rise above the overpressure shut down value shown below. If desired user can adjust the OVER PRESSURE value in the ION GAUGE menu:

Overpressure Shut Down

Torr mbar Pa

5.00 × 10-3 6.65 × 10-3 6.65

Two of the most important steps for the initial setup of the convection gauges are to set zero (SET VAC) and set atmosphere (SET ATM) as described in the CONVEC GAUGE section 6.5.3. This will ensure proper operation of the gauge and accurate pressure measurements. The gauge is calibrated at the factory using nitrogen. Furthermore, the gauge is also installed in a certain orientation when calibrated at the factory. Without setting zero and atmosphere after the gauge is installed in your system, the gauge may not display the expected and correct pressures. This could be caused by the fact that you may be using a different gas than Nitrogen such as air to setup and calibrate the gauge (most commonly the case) and the gauge orientation is different than the orientation used at the factory. As such, it is very important to perform your own initial setup and calibration by setting zero and atmosphere with the gauge installed in your actual system. Please note the following:

Setting zero optimizes performance of the gauge when operating at a low pressure range of 1.00 × 10 higher than 1.00 × 10

-4

Torr to 1.00 × 10-3 Torr. If your minimum operating pressure is

-3

Torr, it is not normally necessary to set zero and thus setting atmosphere should be adequate. If you are able to evacuate your system to below 1.00 × 10-4 Torr, it is always a good practice to check and set zero if necessary. See "SET VAC CG1" or SET "VAC CG2" in CONVEC GAUGE section 6.5.3.

Setting atmosphere is the most important step for a newly installed gauge. If you prefer to use air to set atmosphere, vent your vacuum system chamber to expose the gauge to the local atmospheric pressure (air) and set atmosphere to match your known local uncorrected barometric pressure (air). This is the reading of ambient air pressure you will expect if you were to vent and open your vacuum chamber to the atmosphere surrounding the outside of your chamber. At sea level, this pressure is usually near 760 Torr. At elevations above sea level, the pressure decreases. Check your local aviation authority or airport web sites or your current local weather conditions online to help find your local uncorrected barometric pressure if you do not have this information. See "SET ATM CG1" or "SET ATM CG2" CONVEC GAUGE section 6.5.3.

Setting zero and atmosphere is normally required only once during the initial setup and maybe checked by the user periodically. After power has been applied to the gauge during the initial setup, allow five minutes for the gauge to stabilize (warmup) before setting zero and atmosphere.

The information presented in sections 5.1 and 5.2, above, is intended as an introduction to the programming capabilities of the VGC083C for use in controlling the selectable parameters and functions of the MAG050 / MAG060 IG and PEG050 CG transducers. Refer to the Operating Manuals for the MAG050 / MAG060 ion gauge and PEG050 convection gauge for complete operation and setup instructions of these connected devices.

22 tinb42e1 (2018-05) VGC083C.om

5.3 Cond Cathode Activation Delay

The cold cathode gauge wil exhibit some level of activation time delay when the sensor is being activated at pressures below 1.00E-05 Torr. This is the time needed for the electrical discharge to establish itself at low pressures. The delay time increases at low pressures, and is typically:

-8

7.5×10

Torr ≈ 0.1 minute

-9

Torr ≈ 1 minute

-10

Torr ≈ 5 minutes

tinb42e1 (2018-05) VGC083C.om 23

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24

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tinb42e1 (2018-05) VGC0

83C.om

25

RELAYS

ANALOG OUTPUT

SERIAL COMM

DISPLAY

6.5 Programming

• ASSIGN REL 1 [Factory default =ION GAUGE]

• ASSIGN REL 2 [Factory default =CG1]

• ASSIGN REL 3 [Factory default =CG2]

• ASSIGN REL 4 [Factory default =ION GAUGE]

• ASSIGN REL 5 [Factory default =CG1]

• ASSIGN REL 6 [Factory default =CG2]

• REL 1 LO TRIP [Factory default = 1.00E-06]

• REL 1 HI TRIP [Factory default = 2.00E-06]

• REL 2 LO TRIP [Factory default = 1.00E-01]

• REL 2 HI TRIP [Factory default = 2.00E-01]

• REL 3 LO TRIP [Factory default = 1.00E-01]

• REL 3 HI TRIP [Factory default = 2.00E-01]

• REL 4 LO TRIP [Factory default = 1.00E-06]

• REL 4 HI TRIP [Factory default = 2.00E-06]

• REL 5 LO TRIP [Factory default = 1.00E-01]

• REL 5 HI TRIP [Factory default = 2.00E-01]

• REL 6 LO TRIP [Factory default = 1.00E-01]

• REL 6 HI TRIP [Factory default = 2.00E-01]

• TEST RELAYS

• ANALOG OUT 1 [Factory default = IG - CG1 0.5 - 7V]

• ANALOG OUT 2 [Factory default = CG1 1 - 8 V ]

• ANALOG OUT 3 [Factory default = CG2 1 - 8 V ]

• AOUT CAL 1 [Factory default = Factory Set Number]

• AOUT CAL 2 [Factory default = Factory Set Number]

• AOUT CAL 3 [Factory default = Factory Set Number]

• AOUT LIN 1 [Factory default = 1.00E 00]

• AOUT LIN 2 [Factory default = 1.00E 00]

• AOUT LIN 3 [Factory default = 1.00E 00]

• COMM TYPE [Factory default = RS485]

• BAUDRATE [Factory default = 19200 BAUD]

• FRAMING [Factory default = 8 BITS NONE 1]

• ADDRESS [Factory default = 01]

• SCREEN SETUP [Factory default = NORMAL]

• SCREEN SAVER [Factory default = ON]

• BRIGHTNESS [Factory default = 0]

This section provides detailed information on programming and configuration of various menus and submenus of the device.

This key, on the VGC083C front panel, is referred to as the 'ENTER' key throughout this manual.

From the main menu (press the MENU key if the main menu is not shown), scroll Up or Down to SETUP UNIT then press the ENTER key to access the SETUP UNIT menu for configuring the VGC083C general parameters such as the units of measure, selecting CG2 verses ALTERNATE GAUGE, etc. In certain instances, during setup of the programmed functions and settings, you may need to press the ENTER key until you reach the end of a program/setup sequence before pressing the MENU key to return to the main menu or previous setup screen.

26 tinb42e1 (2018-05) VGC083C.om

6.5.1 SETUP UNIT

UNITS

INFO

SET CG2 - ALT

ALT GAUGE

ALT GAUGE CAL

[Factory default = TORR]

This allows the user to display the pressure measurements in Torr, mbar or pascals. The user must program all other programming values according to their requirements.

[Factory default = FIRMWARE VERSION]

Displays type of ion gauge (IG) it operates as COLD CATHODE and the firmware version numbers associated with the VGC083C controller and the VGC083C internal board that operates the IG.

[Factory default = CG2]

This allows the user to assign the type of gauge to the CG2/ALT display. The user can either assign a second convection gauge CG2 (same type as CG1 using INFICON's PGE050 convection gauge sensor) or an analog voltage input signal from an alternate gauge. The ANALOG INPUT selection allows processing of one analog input voltage signal from INFICON's capacitance diaphragm gauge (CDG) or other brands of CDGs with a 0-10 V (dc) output signal. The ANALOG INPUT selection can also provide processing of one analog input voltage signal from INFICON vacuum gauge modules PGE500, PGE300, BAG302. Note that using a CDG or the INFICON vacuum gauge modules listed above requires the user to provide an external power source to these devices.

[Factory default = 10 TORR CDG]

Ignore this menu if you have selected CG2 in the SET CG2 - ALT menu above. If you have selected ANALOG INPUT in the SET CG2 - ALT menu above, the ALT GAUGE menu selection is used to assign the type of alternate gauge.

• Select 100 mTORR CDG for a 100 mTorr Capacitance Manometer / Diaphragm Gauge (CDG) with 0-10 V (dc) analog output.

• Select 20 TORR CDG for a 20 Torr full scale CDG with 0-10 V (dc) analog output. Other full scale selections are 50 TORR CDG, 100 TORR CDG, 200 TORR CDG, 500 TORR CDG, 1000 TORR CDG, 10 mTORR CDG, 20 mTORR CDG, 50 mTORR CDG, 100 mTORR CDG, 250 mTORR CDG, 500 mTORR CDG, 1 TORR CDG, 2 TORR CDG and 5 TORR CDG.

• Select ITI LOG CG if you are using INFICON's convection gauge modules such as the PGE300 or PGE500 with a Log-linear analog output.

• ITI LOG IG7V is reserved for future use. Currently not applicable.

• Select ITI LOG IG if you are using INFICON's ionization gauge module such as

the BAG302 IG with a Log-linear analog output.

• Select ITI NON-LINEA if you are using INFICON's convection gauge modules such as the PGE300 or PGE500 with a non-linear analog output.

[Factory default = Factory Set Number]

Ignore this menu if you have selected CG2 in the SET CG2 - ALT menu above. If you have selected ANALOG INPUT in the SET CG2 - ALT menu above, the ALT GAUGE CAL menu selection is used to optimize the analog input calibration. It is recommended that the user not make this adjustment unless the displayed alternate gauge pressure (CG2/ALT display channel) do not closely match the expected pressure from the analog input calculations.

Example - To perform ALT GAUGE CAL if ALT GAUGE menu is selected for a 1000 TORR CDG. Connect both the CDG and a high resolution voltmeter to the + and – terminals of the VGC083C Analog Input Connector labeled AI. With CDG exposed to atmosphere, measure the analog input from the CDG at the VGC083C Analog Input Connector and calculate the corresponding pressure. In the ALT GAUGE CAL screen use the UP or DOWN keys to adjust the displayed pressure by the VGC083C to match the calculated pressure from the CDG analog signal. For example, if the analog input signal from the CDG is at 7.600 volts representing 760 Torr for a 1000 TORR CDG, then adjust the ALT GAUGE CAL so that the VGC083C also displays 760 Torr. For other CDG ranges always use CDG's full scale pressure value to perform calibration. For example, if you are using a

tinb42e1 (2018-05) VGC083C.om 27

DEFAULTS

6.5.2 ION GAUGE

HV TIMEOUT

SENSITIVITY

NOTE

NOTICE

100 TORR CDG, evacuate your system pressure to 100 Torr and use the same calibration procedure above.

Example - To perform ALT GAUGE CAL if ALT GAUGE menu is selected for ITI LOG CG, ITI LOG IG or ITI NON-LINE. When using other INFICON vacuum gauge modules such as PGE300, PGE500 or BAG302 as alternate gauges to CG2, the analog output signals from these devices can be used to display pressure in the CG2/ALT display channel. Connect the analog output from these devices to the + and – terminals of the VGC083C Analog Input Connector labeled AI. In the ALT GAUGE CAL screen use the UP or DOWN keys to adjust the displayed pressure by the VGC083C to match the pressure reading on the modules.

As you adjust the analog output, the number being displayed in the ALT GAUGE CAL screen represents the millivolts offset from zero volts that is being used internally for the analog input gain adjustment.

[Factory default = PRESS ENTER TO SET OR MENU TO EXIT]

The system can be returned to the original factory settings by using the ENTER key to set factory defaults.

If you reset all values to original factory default settings, you would need to repeat the initial setup procedure for the convection gauges as described in section 5.2 and reprogram other parameters as required.

Before you activate the ion gauge sensor, make sure you understand all instructions and information provided in this manual and the Operating Manuals for the MAG050 / MAG060 cold cathode ion gauge and the PGE050 convection gauge. Furthermore, you should ensure you have fully configured the VGC083C control unit to your operational requirements before turning the ion gauge sensor on. Prior to turning on the ion gauge sensor you should ensure the pressure is below the OVER PRESSURE value programmed in the VGC083C. Press the ENTER Key to access the ION GAUGE menu for configuring the MAG050 / MAG060 ionization gauge sensor.

[Factory default = 2 minutes]

Enter this menu choice to program the maximum wait period after the cold cathode sensor on command is invoked and the MAG050 / MAG060 starts to read pressure. This time period can be set from 1 to 60 minutes. Default setting is 2 minutes.

The cold cathode gauge will exhibit some level of activation time delay when the sensor is being activated at pressures below 1.00E-05 Torr. This is the time needed for the electrical discharge to establish itself at low pressures. The delay time increases at low pressures, and is typically:

-8

7.5×10

Torr ≈ 0.1 minute

-9

Torr ≈ 1 minute

-10

Torr ≈ 5 minutes

The HV TIMEOUT is the time allowed for the gauge to activate during which time the unit will attempt repeatedly to turn on the anode voltage. If the gauge has not been activated after this time has elapsed, the unit will stop attempting to turn on the anode voltage and the user will be prompted with "DISCHARGE FAIL" or "CURRENT FAIL" error messages. If this is the case, the user must clear the error and repeat the process of turning on the anode voltage again.

[Factory default = 10]

Factory pre-set SENSITIVITY for the MAG050 / MAG060 is always 10 and may be adjusted by the user if necessary. Ion gauge pressure readings are calibrated for air/nitrogen. If you use a different species of gas or mixture of gases you will be required to either make manual corrections to the pressure readout or compensate the reading. The SENSITIVITY value programmed in the VGC083C can be adjusted to compensate the reading for a gas other than nitrogen/air. Compensating

28 tinb42e1 (2018-05) VGC083C.om

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tinb42e1 (2018-05) VGC0

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29

SET VAC CG1

SET ATM CG1

SET VAC CG2

SET ATM CG2

6.5.4 RELAYS

ASSIGN REL 1

ASSIGN REL 2

ASSIGN REL 3

ASSIGN REL 4

[Factory default = 0.00E 00]

Press the ENTER key to access the SET VAC CG1 screen.

1. To properly set the vacuum reading (“zero” point), with CG1 installed on your vacuum system, the gauge should be evacuated to a pressure below

1.00E-04 Torr (0.1 mTorr). [Factory default = 0.00E+0 Torr]

2. When the known vacuum system pressure is below 0.1 mTorr and If you want to set zero at 0.00E+0, then press the ENTER key repeatedly until the SET VAC CG1 appears on the display again. The zero point (displayed pressure reading with gauge exposed to vacuum) is now set.

If you want to set the ‘zero’ pressure reading to a number higher than 0.00E+0, then press the UP or DOWN keys at each of the high-lighted numeral locations until the desired number is reached; then press the ENTER key repeatedly until the SET VAC CG1 appears on the display again. The new "zero point" is now set. Due to the nature of circuit operation and head electrical control that cover a wide range of measurement by a convection gauge, it is advised that one first check and adjust, if necessary, the "span" and "zero" to ensure that all measurements made between these two, adjusted settings are as accurate as possible.

[Factory default = 7.60E 02 TORR]

Press the ENTER key to access the SET ATM CG1 screen.

Backfill the vacuum vessel /chamber with nitrogen gas to a known pressure between 400 Torr and 1000 Torr. Alternatively, if your local uncorrected barometric pressure (air) is known, simply vent your vacuum system chamber to expose the gauge to the local atmospheric pressure. When desired system pressure is stable, adjust the pressure on the screen to the known value using the UP or DOWN keys. Press the ENTER key to move to the next digit and use the UP or DOWN keys to decrease or increase the value of that digit. Continue pressing the ENTER key until the SET ATM CG1 reappears on the display. The new atmosphere point is now set. For example, if your known local uncorrected barometric pressure is 760 Torr, enter 760 in the SET ATM screen. The main pressure measurement screen will now display 760 Torr while the gauge is at atmosphere.

[Factory default = PRESS ENTER TO SET VAC]

Same as SET VAC CG1 above, except for CG2

[Factory default = 7.60E 02 TORR]

Same as SET ATM CG1 above, except for CG2.

Press the ENTER key to access the RELAYS menu for configuring the setpoint relays.

[Factory default = ION GAUGE]

This assigns Relay #1 to the ion gauge, CG1, CG2 or ALT GAUGE (alternate gauge).

[Factory default = CG1]

ASSIGN RELAY 2; same choices as ASSIGN RELAY 1 above

[Factory default = CG2]

ASSIGN RELAY 3; same choices as ASSIGN RELAY 1 above

[Factory default = ION GAUGE]

ASSIGN RELAY 4; same choices as ASSIGN RELAY 1 above

30 tinb42e1 (2018-05) VGC083C.om

ASSIGN REL 5

ASSIGN REL 6

REL 1 LO TRIP

REL 1 HI TRIP

REL 2 LO TRIP

REL 2 HI TRIP

REL 3 LO TRIP

REL 3 HI TRIP

REL 4 LO TRIP

REL 4 HI TRIP

REL 5 LO TRIP

REL 5 HI TRIP

REL 6 LO TRIP

[Factory default = CG1]

ASSIGN RELAY 5; same choices as ASSIGN RELAY 1 above

[Factory default = CG2]

ASSIGN RELAY 6; same choices as ASSIGN RELAY 1 above

[Factory default = 1.00E-06]

This setpoint corresponds to the turn on point for Relay #1. Relay #1 will turn on when the pressure drops below this setting. If you are unable to increase the value of REL 1 LO TRIP (VGC083C responding with the message "NO CHANGE"), you must first access the REL 1 HI TRIP menu below and increase that value to a number higher than the value of the REL 1 LO TRIP you are trying to set. Ensure the REL 1 LO TRIP setpoint value you are programming is within the measurement range of the specific gauge the relay is assigned to.

[Factory default = 2.00E-06]

This setpoint corresponds to the turn off point for Relay #1. Relay #1 will turn off when the pressure rises above this setting. If you are unable to decrease the value of REL 1 HI TRIP (VGC083C responding with the message "NO CHANGE"), you must first access the REL 1 LO TRIP menu above and decrease that value to a number lower than the value of the REL 1 HI TRIP you are trying to set. Ensure the REL 1 HI TRIP setpoint value you are programming is within the measurement range of the specific gauge the relay is assigned to.

[Factory default = 1.00E-01]

(RELAY 2 LO TRIP; same info as RELAY 1 LO TRIP above)

[Factory default = 2.00E-01]

(RELAY 2 HI TRIP; same info as RELAY 1 HI TRIP above)

[Factory default = 1.00E-01]

(RELAY 3 LO TRIP; same info as RELAY 1 LO TRIP above)

[Factory default = 2.00E-01]

(RELAY 3 HI TRIP; same info as RELAY 1 HI TRIP above)

[Factory default = 1.00E-06]

(RELAY 4 LO TRIP; same info as RELAY 1 LO TRIP above)

[Factory default = 2.00E-06]

(RELAY 4 HI TRIP; same info as RELAY 1 HI TRIP above)

[Factory default = 1.00E-01]

(RELAY 5 LO TRIP; same info as RELAY 1 LO TRIP above)

[Factory default = 2.00E-01]

(RELAY 5 HI TRIP; same info as RELAY 1 HI TRIP above)

[Factory default = 1.00E-01]

(RELAY 6 LO TRIP; same info as RELAY 1 LO TRIP above)

tinb42e1 (2018-05) VGC083C.om 31

REL 6 HI TRIP

TEST RELAYS

6.5.5 Analog Output

ANALOG OUT 1

[Factory default = 2.00E-01]

(RELAY 6 HI TRIP; same info as RELAY 1 HI TRIP above)

[Factory default = OFF]

This allows the user to manually toggle the relays on and off to test for correct external circuit wiring and ensure polarity is as desired. Press ENTER to access the TEST RELAYS menu. Select a specific relay by pressing the ENTER key so that the relay number is highlighted. Press the UP or DOWN key to energize the specific relay.

Relays will return to the previous state after exiting the TEST RELAYS menu.

The VGC083C provides three analog outputs proportional to the pressure measured by the ionization gauge, the selected convection gauge (CG1 or CG2) or a continuous, combined output signal from the IG and CG1 (IG - CG1) for full range measurement. Press the ENTER key to access the ANALOG OUTPUT menu for configuring the analog outputs.

[Factory default = CG1 - CG1]

This menu provides various scaling and gauge type selections for Analog Output #1. Use the UP and DOWN keys to select the desired analog output configuration from the following available choices.

IG - CG1 0.5 - 7V

IG - CG2 0.5 - 7V

IG - ALT 0.5 - 7V

Log-linear analog output combining IG & CG1 as one signal

Log-linear analog output combining IG & CG2 as one signal Log-linear analog output combining IG & Alternate gauge as

one signal

IG LOG N - 10

Log-linear analog output for IG only, output also compatible with GP 307, 350

IG LOG N - 11

Log-linear analog output for IG only, output also compatible with GP 307, 350, 358

IG LOG N - 12

Log-linear analog output for IG only, output also compatible with GP 307, 350

IG 1.8 - 8.7V

IG LINEAR

Log-Linear analog output for IG only

Linear analog output for IG only, output also compatible with GP 307

ALT LINEAR

ALT CG 1-8V

Linear analog output for alternate gauge only

Log-linear analog output if alternate gauge connected is an INFICON PGE300 or PGE500

ALT IG LOGN10

Log-linear analog output if alternate gauge connected is an INFICON BAG302

CG1 1 - 8V

CG2 1 - 8V

CG1 0 - 7V

Log-linear analog output for CG1

Log-linear analog output for CG2

Log-linear analog output for CG1 , output also compatible with GP 307,350,358

CG2 0 - 7V

Log-linear analog output for CG2 , output also compatible with GP 307,350,358

CG1 NON - LIN

CG2 NON - LIN

CG1 LINEAR

CG2 LINEAR

Non-linear analog output for CG1

Non-linear analog output for CG2

Linear analog output for CG1

Linear analog output for CG2

32 tinb42e1 (2018-05) VGC083C.om

Select "IG - CG1 0.5 - 7V" as the analog output type to set the analog output voltage proportional to the pressure measured by the combination of IG plus CG1. This selection combines the analog output from the IG and CG1 as one signal to provide a log-linear analog output voltage of 0.5 volts to 7 volts with a scaling factor of 0.5 V/decade of measured pressure. The log-linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar: P = 10

(volts – 5.5) / (0.5)

where P is the pressure in Torr or mbar, and V is the output signal in volts. Refer to section 7.1 for details regarding this type of output signal.

Select "IG - CG2 0.5 - 7V" as the analog output type to set the analog output voltage proportional to the pressure measured by the combination of IG plus CG2. The analog output characteristics is the same as described for "IG - CG1 0.5 - 7V"

above.

Select "IG - ALT 0.5 - 7V" as the analog output type to set the analog output voltage proportional to the pressure measured by the combination of IG plus the Alternate gauge. The analog output characteristics is the same as described for "IG - CG1 0.5 - 7V" above. Note that the "IG - ALT 0.5 - 7V" selection is mainly intended for use with an alternate gauge which has a wide measurement range from atmosphere to the turn-on point for the ion gauge. INFICON convection gauges such as the PGE300 or PGE500 provide this capability. If you are using a capacitance diaphragm gauge (CDG) as an alternate gauge you may want to consider a different output since a single CDG may not provide measurements from atmosphere to the turn-on point for the ion gauge.

Select "IG LOG N - 10" as the analog output type to set the analog output voltage proportional to the pressure measured by the ion gauge only. This selection provides an output voltage that is linear with respect to the common logarithm of pressure, i.e., log-linear analog output of 0 to 9 volts with a scaling factor of 1 V/decade of measured pressure. The log-linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar:

(volts – 10)

P= 10

where P is the pressure in Torr or mbar, and V is the output signal in volts. Refer to section 7.2 for details regarding this type of output signal. This selection is compatible with the analog output scaling from the Granville-Phillips 307 and 350 controllers.

Select "IG LOG N - 11" as the analog output type to set the analog output voltage proportional to the pressure measured by the ion gauge only. This selection provides an output voltage that is linear with respect to the common logarithm of pressure, i.e., log-linear analog output of 0 to 10 volts with a scaling factor of 1 V / decade of measured pressure. The log-linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar:

10(volts – 11)

P=

where P is the pressure in Torr or mbar, and V is the output signal in volts. Refer to section 7.3 for details regarding this type of output signal. This selection is also compatible with a certain analog output scaling from the GranvillePhillips 307, 350 and 358 controllers.

Select "IG LOG N - 12" as the analog output type to set the analog output voltage proportional to the pressure measured by the ion gauge only. This selection provides an output voltage that is linear with respect to the common logarithm of pressure, i.e., log-linear analog output of 0 to 11 volts with a scaling factor of 1 V / decade of measured pressure. The log-linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar:

10(volts – 12)

P=

where P is the pressure in Torr or mbar, and V is the output signal in volts. Refer to section 7.4 for details regarding this type of output signal. This selection is also compatible with a certain analog output scaling from the GranvillePhillips 307 and 350 controllers.

Select "IG 1.8 - 8.7V" as the analog output type to set the analog output voltage proportional to the pressure measured by the ion gauge only. This selection provides an output voltage that is linear with respect to the common logarithm of pressure, i.e., log-linear analog output of 1.8 to 8.7 volts with a scaling factor of 0.8 V/decade of measured pressure. The log-linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr

((1.25 × volts) – 12.875))

P= 10

where P is the pressure in Torr and V is the output signal in

volts. Refer to section 7.5 for details regarding this type of output signal.

Select "IG LINEAR" as the analog output type to provide a 0-10 Vdc output signal that has a direct linear relationship to the displayed pressure measured by the ion gauge only. This selection covers 3 decades of pressure change. For example, if the maximum pressure selected is 1.00E-03 Torr (value programmed for AOUT LIN 1 or AOUT LIN 2 or AOUT LIN 3 menu below), then the instrument provides a 10 volt analog output signal when pressure is at 1.00E-03 Torr and the minimum pressure is automatically set to 1.00E-06 Torr, with a corresponding minimum volt-

tinb42e1 (2018-05) VGC083C.om 33

age output of 0.01 volts. If your application requires the IG analog output voltage to cover a pressure range exceeding three decades, then consider using the loglinear analog outputs. Refer to section 7.6 for details regarding this type of output signal. This selection is also compatible with a certain analog output scaling from the Granville-Phillips 307 controller.

Select "ALT LINEAR" only if you have selected ANALOG INPUT in the SET CG2 ALT menu intended for use with a CDG device as an alternate gauge to CG2. If such is the case, this analog output type provides a 0-10 Vdc analog output signal that has a direct linear relationship to the displayed pressure measured by the alternate gauge. This selection covers 3 decades of pressure change. Essentially, this allows retransmission of the same analog input signal being received by the VGC083C. For example, if ALT GAUGE selected is 1000 TORR CDG, the maximum pressure should also be programmed as 1.00E03 Torr (value programmed for AOUT LIN 1 or AOUT LIN 2 or AOUT LIN 3 menu below), then the instrument provides a 10 volt analog output signal when pressure is at 1.00E03 Torr and the minimum pressure is automatically set to 1.00 Torr, with a corresponding minimum voltage output of 0.01 volts.

Select "ALT CG 1-8V" only if you have selected ANALOG INPUT in the SET CG2 ALT menu intended for use with an INFICON PGE300 or PGE500 convection vacuum gauge module as an alternate gauge to CG2. Essentially, this allows retransmission of the same analog input signal being received from the PGE300 or PGE500. This selection provides an output voltage that is linear with respect to the common logarithm of pressure, i.e., log-linear analog output of 1 to 8 volts with a scaling factor of 1 V/decade of measured pressure. The log-linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar: P=

10(volts – 5)

where P is the pressure in Torr or mbar, and

V is the output signal in volts.

Select "ALT IG LOGN10" only if you have selected ANALOG INPUT in the SET CG2 - ALT menu intended for use with an INFICON BAG302 ionization vacuum gauge module as an alternate gauge to CG2. Essentially, this allows retransmission of the same analog input signal being received from the BAG302. This selection provides an output voltage that is linear with respect to the common logarithm of pressure, i.e., log-linear analog output of 0 to 9 volts with a scaling factor of 1 V/decade of measured pressure. The log-linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar: P= 10

(volts – 10)

where P is the pressure in Torr or mbar, and V is the

output signal in volts.

Select "CG1 1 - 8V" as the analog output type to set the analog output voltage proportional to the pressure measured by convection gauge CG1. This selection provides an output voltage that is linear with respect to the common logarithm of pressure, i.e., log-linear analog output of 1 to 8 volts with a scaling factor of 1 V/decade of measured pressure. The log-linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar: P= 10

(volts – 5)

where P is the pressure in Torr or mbar, and V is the output signal in volts. Refer to section 7.7 for details regarding this type of output signal.

Select "CG2 1 - 8V" for CG2. Same as CG1 1 - 8V above, except for CG2.

Select "CG1 0 - 7V" as the analog output type to set the analog output voltage proportional to the pressure measured by convection gauge CG1. This selection provides an output voltage that is linear with respect to the common logarithm of pressure, i.e., log-linear analog output of 0 to 7 volts with a scaling factor of 1 V / decade of measured pressure. The log-linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar: P= 10

(volts – 4)

where P is the pressure in Torr or mbar, and V is the output signal in volts. Refer to section 7.8 for details regarding this type of output signal. This selection is compatible with the analog output scaling from the GranvillePhillips 307, 350 and 358 controllers.

Select "CG2 0 - 7V" for CG2. Same as CG1 0 - 7V above, except for CG2.^

Select "CG1 NON - LIN" as the analog output type to set the analog output (nonlinear) voltage proportional to the pressure measured by convection gauge CG1. This produces a non-linear analog output signal of 0.375 to 5.659 V (dc) for 0 to 1000 Torr of N details regarding this type of output signal. Note - This non-linear analog output is also equivalent to the Granville- Phillips

, roughly in the shape of an "S" curve. Refer to section 7.9 for

2

®

Mini-Convectron® non-linear S-curve

analog output.

Select "CG2 NON - LIN" for CG2. Same as CG1 NON - LIN above, except for CG2.

34 tinb42e1 (2018-05) VGC083C.om

ANALOG OUT 2

ANALOG OUT 3

AOUT CAL 1

Example

Select "CG1 LINEAR" as the analog output type to provide a 0-10 Vdc output signal that has a direct linear relationship to the displayed pressure measured by CG1 only. This selection covers 3 decades of pressure change. For example, if the maximum pressure selected is 1.00 Torr (value programmed for AOUT LIN 1 menu below), then the instrument provides a 10 volt analog output signal when pressure is at 1.00 Torr and the minimum pressure is automatically set to 1 mTorr (1.00E-03 Torr), with a corresponding minimum voltage output of 0.01 volts. If your application requires CG1 or the analog output voltage to cover a pressure range exceeding three decades, then consider using the log-linear analog output type. Refer to section 7.10 for details regarding this type of output signal.

Select "CG2 LINEAR" for CG2. Same as CG1 LINEAR above, except for CG2.

[Factory default = CG1 1 - 8V]

(Same selection choices as ANALOG OUT 1 above)

[Factory default = CG2 1 - 8V]

(Same selection choices as ANALOG OUT 1 above)

[Factory default = Factory Set]

This has been pre-set in the factory and is used to optimize the analog output calibration. It is recommended that the user not make this adjustment unless the displayed pressure on the VGC083C and the resulting pressure recorded from the analog output do not match closely.

To perform AOUT CAL 1 adjustment if ANALOG OUTPUT 1 is programmed for IG LOG, IG LINEAR or ALT IG LOGN10. Connect the IG to the VGC083C and connect the VGC083C analog output 1 to a high resolution voltmeter, your system, PLC, etc. Evacuate your vacuum system to a low enough pressure for the IG to operate. Establish a system pressure so that the displayed IG reading is preferably at the high end of any decade (for example 9.00E-05 as opposed to 1.00E-05). In the AOUT CAL 1 screen use the UP or DOWN keys to adjust the analog output to match the corresponding pressure displayed on the IG pressure measurement display or the CG2/ALT display channel if using a BAG302 ion gauge module as an alternate gauge to CG2.

ANALOG OUTPUT 1 is programmed for "IG LOG N - 10". The VGC083C IG display is registering a pressure reading of 9.00E-05 Torr. Based on the equation and table given in section 7.2 the expected analog output at 9.00E-05 Torr is

5.9542 V. While in the AOUT CAL 1 screen, use the UP or DOWN keys to set the analog output to 5.9542 V as recorded by your voltmeter. Alternatively, if the IG analog output is used to display the IG pressure on your PLC or system display console, simply adjust the AOUT CAL 1 so that the IG pressure displayed by your PLC (pressure established at the high end of any decade preferred) matches the IG pressure displayed by the VGC083C. Note - As you adjust the analog output, the number being displayed in the AOUT CAL 1 screen represents the millivolts offset from zero volts that is being used internally for the analog output gain adjustment.

To perform AOUT CAL 1 adjustment if ANALOG OUTPUT 1 is programmed for IG

- CG1, CG1, CG2, CG1/CG2NON-LIN, CG1/CG2 LINEAR, ALT CG 1-8V. Connect CG1 or CG2 to the VGC083C and connect the VGC083C analog output 1 to a high resolution voltmeter, your system, PLC, etc. While in the AOUT CAL 1 screen and with CG1 or CG2 exposed to atmosphere, use the UP or DOWN keys to adjust the analog output to match the corresponding pressure displayed on CG1 or CG2 pressure measurement display.

The VGC083CANALOG OUTPUT 1 is programmed for "CG1 1 - 8V". The VGC083 CG1 display is registering a pressure reading of 7.60E+02 Torr. Based on the equation and table given in section 7.7 the expected analog output at 7.60E+02 Torr is 7.881 V. Use the UP or DOWN keys in the AOUT CAL 1 screen to set the analog output to 7.881 V as recorded by your voltmeter. Alternatively, if the CG1 analog output is used to display the CG1 pressure on your PLC or system display console, simply adjust the AOUT CAL 1 while the gauge is exposed to atmosphere so that the CG1 atmospheric pressure displayed by your PLC matches the CG1 atmospheric pressure displayed by the VGC083C. The AOUT CAL can be performed at any pressure between 400 Torr to 999 Torr (atmosphere recommended). Note - As you adjust the analog output, the number being displayed in the AOUT

tinb42e1 (2018-05) VGC083C.om 35

AOUT CAL 2

AOUT CAL 3

AOUT LIN 1

AOUT LIN 2

AOUT LIN 3

6.5.6 SERIAL COMM

CAL 1 screen represents the millivolts offset from zero volts that is being used internally for the analog output gain adjustment.

To perform AOUT CAL 1 adjustment if ANALOG OUTPUT 1 is programmed for ALT LINEAR: Connect the CDG to the VGC083C and connect the VGC083C analog output 1 to a high resolution voltmeter, your system, PLC, etc. While in the AOUT CAL 1 screen and with the 1000 TORR CDG exposed to atmosphere, use the UP or DOWN keys to adjust the analog output to match the corresponding pressure displayed for the alternate gauge (CG2/ALT display channel).

Example: The VGC083C ANALOG OUTPUT 1 is programmed for "ALT LINEAR" and a 1000 TORR CDG is connected to the VGC083C. The VGC083C CG2/ALT display channel is registering a pressure reading of 7.60E02 Torr. For a 1000 TORR CDG with a 0-10 VDC output, the expected analog output at 760 Torr is

7.60 volts. Use the UP or DOWN keys in the AOUT CAL 1 screen to set the analog output to 7.60 V as recorded by your voltmeter. Alternatively, if the alternate gauge analog output is used to display the pressure on your PLC or system display console, simply adjust the AOUT CAL 1 while the gauge is exposed to atmosphere so that the alternate gauge atmospheric pressure displayed by your PLC matches the atmospheric pressure displayed by the CG2/ALT display channel of the VGC083C.

For other CDG ranges always use CDG's full scale pressure value to perform calibration. For example, if you are using a 100 TORR CDG, evacuate your system pressure to 100 Torr and use the same calibration procedure described above.

Note - As you adjust the analog output, the number being displayed in the AOUT CAL 1 screen represents the millivolts offset from zero volts that is being used internally for the analog output gain adjustment.

[Factory default = Factory Set]

(Same info as AOUT CAL 1 above, except for AOUT CAL 2)

[Factory default = Factory Set]

(Same info as AOUT CAL 1 above, except for AOUT CAL 3)

[Factory default = 1.00E00 TORR]

This programming parameter is only used if you have assigned IG LINEAR, CG1 LINEAR or CG2 LINEAR to ANALOG OUTPUT 1 above. This analog output type provides a 0-10 Vdc output signal that has a direct linear relationship to the displayed pressure measured by the IG, CG1 or CG2. The AOUT LIN 1 value programmed here represents the maximum pressure as measured by the IG, CG1 or CG2 corresponding to a voltage output of 10 volts. This selection covers, at most, a 3 decade range of pressure.

For example, if AOUT LIN 1 is programmed for 1.00E-03 Torr, then the instrument provides a 10 volt analog output signal when pressure is at 1.00E-03 Torr. Thereafter, minimum pressure is automatically set to 1.00E-06 Torr, with a corresponding minimum voltage output of 0.01 volts. If your application requires the IG, CG1 or CG2 analog output voltage to cover a pressure range exceeding three decades, then consider using the log-linear analog outputs. Refer to section 7.6 and section

7.10 for details regarding this type of output signal.

[Factory default = 1.00E00 TORR]

(Same info as AOUT LIN 1 above, except for AOUT LIN 2)

[Factory default = 1.00E00 TORR]

(Same info as AOUT LIN 1 above, except for AOUT LIN 3)

The VGC083C provides both RS232 and RS485 serial communications. Press the ENTER key to access the SERIAL COMM menu for configuring the serial communications.

36 tinb42e1 (2018-05) VGC083C.om

COMM TYPE

BAUDRATE

FRAMING

ADDRESS

6.5.7 DISPLAY

[Factory default = RS485]

The VGC083C supports four different protocols listed below (See section 9 for details).

• RS485 RS485 with start and stop characters and address, derived from INFICON BAG302

• RS232 RS232 with start and stop characters, like RS485 above but no address

• GP485 RS485 compatible with Granville-Phillips 307 and 358 controllers

• GP232 RS232 compatible with Granville-Phillips 307 and 358 controllers

[Factory default = 19200]

This sets the baud rate for the RS485 and the RS232 serial communications. The baud rate can be set to various values listed below.

• 38400 BAUD

• 19200 BAUD

• 9600 BAUD

• 4800 BAUD

• 2400 BAUD

• 1200 BAUD

• 600 BAUD

• 300 BAUD

[Factory default = 8 BITS, NONE 1]

This sets the character framing by providing the user various selections to control the number of characters, parity and number of stop bits. Character framing can be set to one of the following.

• 8 BITS NONE 1 (This selection sets the character framing to 8 data bits, no parity, 1 stop bit)

• 7 BITS ODD 2

• 7 BITS EVEN 2

• 7 BITS ODD 1

• 7 BITS EVEN 1

• 8 BITS ODD 1

• 8 BITS EVEN 1

[Factory default = 01]

This sets the two byte RS485 device address. For example, an ADDRESS of 05 will make the address 0x05 in hexadecimal. An address of 15 will set the ADDRESS to 0x15 in hexadecimal.

The DISPLAY menu allows the user to configure the OLED setup screen. The user can configure the set-up screen to normal or research mode for IG, enable or disable screen saver and adjust the display intensity. Press the ENTER key to access the DISPLAY menu for configuring the setup screen.

tinb42e1 (2018-05) VGC083C.om 37

SCREEN

S

E

F

T

hfo

S

SIGtr

F

T

e

T

o

otim

O

T

a

F

T

c

r

T

f

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p

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y

m

0

y

m

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a

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t

b

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2

C

m

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1

f

e

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c

e

ETUP

[

actory defaul

his menu con

b

configured

t

e UP and D llowing men

•

NORMAL

•

RESEARC

elect "NORM

p

rameters in

t = NORMAL

figures the di

o display the

WN keys to

choices.

Normal

Researc

L" if you wo

he normal m

play mode fo

IG parameter

elect the des

isplay mode

display mod

ld like to con

de shown be

r the setup sc

in NORMAL

red setup scr

or IG

e for IG

igure the set ow.

reen. The set or RESEAR

en mode fro

p screen to

up screen ca

H mode. Us

the

isplay the IG

SCREEN

BRIGHTN

AVER

SS

NOTE

elect "RESE

parameters

oubleshootin

[

actory defaul

he VGC083C

p

riod of time

v

rses pixels t

o minimize th

g

ramming the

n turned on,

ti

isplay will ap

d

hours and

1 y

u like to hav

e of the day

FF and then

o increase lo

s

ver function

[

actory defaul

he BRIGHTN

s

reen display.

t

ast) and 10 t

o increase lo

n

ss function r

RCH" if you

in the resear

IG issues.

t = ON]

set-up scree

an start to s at are not. T

e burned-in e

CREEN SA

the setup scr

ear in the no

ill then switc

the 12 hour

, simply acce

N again. Th

gevity of the

remains ON

t = 0]

ESS menu all

The brightn

e highest.

gevity of the

emains at 0 a

ould like to

h mode sho

uses an OL

ow divergen

is could resu

fect, a scree

ER menu se

en changes

mal mode wi

to a back-lit

period for the

s the SCRE

s initiates the

OLED displa

s shipped fro

ows the user ss setting of

OLED displa s shipped fro

onfigure the

n below. Thi

D type displ

between pi t in pixels ex saver functi

ection to ON.

isplay appe

h a dark back

ackground c normal displ N SAVER m screen saver

, INFICON re

the factory.

o select the

provides the

, INFICON re

the factory.

etup screen t

is particularl

y which over

els that are

ibiting a burn n can be acti With the scr

rance every ground color

olor for the n

y mode to st

nu and chan

function imm

commends th

rightness of

lowest bright

commends th

display the

helpful whe

an extended n at all times ed-in effect.

ated by pro-

en saver fun

2 hours. The

or the first

xt 12 hours. I

rt at a specifi

e setting to

diately.

at the screen

he setup

ess (con-

at the bright-

-

f

38

tinb4

e1 (2018-05) VGC083C.

m

o

e

C

o

u

t

e

7

s

a

c

C

h

5

n

y

o

a

v

P

s

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a

v

P

n

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o

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p

o

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t

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-

d

t

×

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M

t

w

p

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)

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n

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a

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e

5

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C

o

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u

6

e

V

.

e

o

a

l

a

V[V

e

g

7 Anal

7.1 Anal rang IG (Nitr

g Outp

g Outpu

measur G1 0.5 gen / Air

t Chart

wide

ment for V

only)

& Equ

This se the VG

When t ALT 0. or IG a

8.3.2 if

Analog

A) The by the f in Torr

P = 10

Where output

B) The by the f in pasc

P = 10

Where signal i

Note: T +11 V (

1) The and the

2) The PRESS damag

3) Any IG or C

The foll pressur the out

tions (N

tion provides

083C.

e analog out

-7V, the anal d CG2 or IG

ou are using

output: Wid

log-linear out

llowing form

nd mbar:

(

olts - 5.5)/(0.5)

is the press

ignal in volts.

log-linear out

llowing form

ls:

(

olts - 4.5)/(0.5)

is the press

volts.

he output v

c) under th

IG sensor is t

CG1 is dam

pressure exc URE menu fo

d or disconn

IG or CG faul

range resp

wing chart s

measurem

ut signal is pl

itrogen/

various char

ut is setup,

g output volt

nd ALT gau

a gas other t

e Range Log

put signal an

las when uni

V = ((0.5

re in Torr or

put signal an

las when uni

V = ((0.5

re in pascal

ltage will sw

following c

urned off, an

ged or disco

eds the valu

r MAG050 /

cted.

s condition ctively.

ows the gra

nts in Torr. P

otted on the

ir Only

s & equation

s described i

ge represent

for wide ran

an nitrogen/

linear 0.5 to

pressure ar s of measure

log10(P)) +

mbar, and V i

pressure ar s of measure

log10(P)) +

, and V is the

tch to abov

nditions:

IG fault cond nected.

of OVER AG060 and

hile operating

hical results

essure is plo

-axis on a lin

for analog o

section 6.5.

s a combinati

e measurem

ir.

V (dc), 0.5

.5

s the

.5

output

ition

G1 is

in the

f table and f

ted on the X-

ar scale.

tputs availab

for IG - CG1

n of the IG nts. Refer to

per decade

P

ressure

[Torr]

1

00E-10

1

.00E-9

.00E-8

1

.00E-7

1

.00E-6

1

.00E-5

1

.00E-4

1

.00E-3

1

.00E-2

1

.00E-1

1

00E+00

1.

00E+01

1.

00E+02

1.

00E+03

1.

e notes

s

rmulas abov

xis with a lo

e from

/ CG2 / nd CG1

section

oltage

(dc)]

0.5

1.0

1.5

2.0

2.5

3.0

3.5

4.0

4.5

5.0

5.5

6.0

6.5

7.0

≥11

for scale;

tinb42e1 (2018-05) VGC0

83C.om

39

7.2

ALA

u

0

G

e

Wth

A

nPWoB

n

P

W

i

N

T

msi

o

p

e

t

e

y

g

a

n

e

y

g

p

d

s

c

d

e

p

n

e

n

(

T

n

(

p

w

o

h

s

r

p

a

c

u

e

a

u

e

V

a

e

d

s

a

c

d

s

d

s

2

n

e

0

s

c

o

u

nalog O

OG N - 1

ir only)

tput for I

(Nitrog

n /

hen the anal

e analog out

g

n/air only. R

nalog outpu

) The log-lin

b

the followin

i

Torr and mb

(volts - 10)

= 10

here P is the

utput signal i

) The log-lin

b

the followin

i

pascals:

(volts - 8)

= 10

here P is the

s

gnal in volts.

ote: The out

+

11 V (dc) un

) The IG sen

1

he following

easurements

gnal is plotte

g output is s

ut voltage re

fer to sectio

: IG Log-lin

ar output sig

formulas wh

ar:

V= log

pressure in

volts.

ar output sig

formulas wh

V= log

pressure in

ut voltage

er the follo

or is turned

hart shows t in Torr. Pres

on the Y-axi

tup, as desc resents the

8.3.1 if you

ar 0 to 9 V (d

al and press

en units of m

P) + 10

10

orr or mbar,

al and press

en units of m

P) + 8

10

ascals, and

ill switch to

ing conditio

ff or any IG f

e graphical r

ure is plotte

s on a linear

ibed in sectio ressured me re using a ga

), 1 V per de

re are relate asurement i

nd V is the

re are relate asurement i

is the output

above

s:

ult condition.

sults of table

on the X-axi

cale.

n 6.5.6 for IG

sured by the

s other than

ade

Pressur

[Torr]

1.00E-1

1.00E-9

1.00E-8

1.00E-7

1.00E-6

1.00E-5

1.00E-4

1.00E-3

1.00E-2

5.00E-2

see note

and formulas

with a log s

LOG N - 10, IG for nitroitrogen/air.

Voltage

[V (dc)]

0.0

1.0

2.0

3.0

4.0

5.0

6.0

7.0

8.0

8.698

≥11

above for

ale; the outp

t

40

tinb4

e1 (2018-05) VGC083C.

m

7.3 Anal

o

n

t

h

l

o

a

o

P

s

o

a

o

P

n

d

o

e

p

t

L

u

V

u

V

u

o

e

h

e

a

n

o

d

t

d

t

9

s

o

p

r

Y

n

r

n

V

e

s

e

n

o

t

e

6

d

.1.

5se

o

a

N

n

V[V

9

e

g

LOG Air o

g Outpu

N - 11 (Ni

nly)

for IG

rogen /

When t the ana gen/air

Analog

A) The by the f in Torr

(v

P= 10

Where output

B) The by the f in pasc

(v

P= 10

Where signal i

Note: T +11 V (

1) The

The foll pressur the out

e analog out

log output vol

nly. Refer to

output: IG

log-linear out

llowing form

nd mbar:

lts - 11)

is the press

ignal in volts.

log-linear out

llowing form

ls:

lts - 9)

is the press

volts.

he output v

c) under th

IG sensor is t

wing chart s

measurem

ut signal is pl

ut is setup, age represe section 8.3.1

og-linear 0 t

put signal an

las when uni

= log10(P) + 1

re in Torr or

put signal an

las when uni

= log10(P) +

re in pascal

ltage will sw

following c

urned off or a

ows the gra

nts in Torr. P

otted on the

s described i ts the pressu

if you are usi

10 V (dc), 1

pressure ar s of measure

1

mbar, and V i

pressure ar s of measure

, and V is the

tch to abov

nditions:

y IG fault co

hical results

essure is plo

-axis on a lin

section 6.5.

ed measure

g a gas othe

per decade

s the

output

dition.

f table and f

ted on the X-

ar scale.

for IG LOG

by the IG for

r than nitroge

P

ressure

[Torr]

1

00E-11

00E-10

1

.00E-9

.00E-8

1

.00E-7

1

.00E-6

1

.00E-5

1

.00E-4

1

.00E-3

1

.00E-2

1

.00E-2

e notes

rmulas abov

xis with a lo

- 11,

nitro-

/air.

oltage

(dc)]

0.0

1.0

2.0

3.0

4.0

5.0

6.0

7.0

8.0

9.0

.698

≥11

for scale;

tinb42e1 (2018-05) VGC0

83C.om

41

7.4

ALA

u

2

G

e

Wth

A

nPWoB

n

P

W

i

N

T

h

o

p

e

t

e

y

g

a

n

e

y

g

p

d

s

c

e

p

n

e

n

(

T

n

(

p

w

o

h

T

r

p

a

d

u

e

a

u

e

V

a

e

o

a

e

d

s

d

s

t

2

n

e

2

1

0

s

X

o

nalog O

OG N - 1

ir only)

tput for I

(Nitrog

n /

hen the anal

e analog out

g

n/air only. R

nalog outpu

) The log-lin

b

the followin

i

Torr and mb

(volts - 12)

= 10

here P is the

utput signal i

) The log-lin

b

the followin

i

pascals:

(volts - 10)

= 10

here P is the

s

gnal in volts.

ote: The out

+

11 V (dc) un

) The IG sen

1

he following

p

ressure meas

e output sign

t

g output is s

ut voltage re

fer to sectio

: IG Log-lin

ar output sig

formulas wh

ar:

V= log

pressure in

volts.

ar output sig

formulas wh

V= log

pressure in

ut voltage

er the follo

or is turned

hart shows t urements in

al is plotted o

tup, as desc

resents the

8.3.1 if you

ar 0 to 11 V (

al and press

en units of m

P) + 12

10

orr or mbar,

al and press

en units of m

P) + 10

10

ascals, and

ill switch to

ing conditio

ff or any IG f

e graphical r

orr. Pressure

the Y-axis

ibed in sectio ressured me re using a ga

c), 1 V per d

re are relate asurement i

nd V is the

re are relate asurement i

is the output

above

s:

ult condition.

sults of table

is plotted on

n a linear sca

n 6.5.6 for IG

sured by the

s other than

cade

Pressur

[Torr]

1.00E-1

1.00E-9

1.00E-8

1.00E-7

1.00E-6

1.00E-5

1.00E-4

1.00E-3

1.00E-2

5.00E-2

see note

and formulas

the

-axis wit

le.

LOG N - 12, IG for nitroitrogen/air.

Voltage

[V (dc)]

0.0

1.0

2.0

3.0

4.0

5.0

6.0

7.0

8.0

9.0

10.0

10.698

≥11

above for

h a log scale;

42

tinb4

e1 (2018-05) VGC083C.

m

7.5 Anal

o

V

t

e

8

h

l

o

r

0

1

)

t

o

f

s

o

e

p

t

L

n

8

)

a

g

n

e

h

e

a

n

o

u

V

8

G

p

r

Y

n

r

n

d

o

g

n

1

o

t

e

6

d

.4.7.124715

a

o

a

n

V[V

9

e

g

- 8.7 only)

g Outpu

(Nitrog

for IG 1.

n / Air

When t the ana gen/air

Analog

The log-line following fo

P (Torr)= 1

P (mbar)=

P (pascals

Where P is

Note: The under the

1) The IG

The foll pressur the out

e analog out

log output vol

nly. Refer to

output: IG

ar output sig

mulas:

((1.25* volts) - 12.

((1.25*volts) - 12

0

((1.25*volts

= 10

the pressure

utput volta

ollowing co

ensor is turn

wing chart s

measurem

ut signal is pl

ut is setup, age represe section 8.3.1

og-linear 0 t

al and press

75)

.75)

- 10.75)

= 1

V=

nd V is the o

e will switch ditions:

d off or any I

ows the gra

nts in Torr. P

otted on the

s described i ts the pressu

if you are usi

9.259 Vdc, 0

re are relate

0.3 + (0.8)×l

0.2 + (0.8)×l

.6 + (0.8)×lo

utput signal i

to above +1

fault conditi

hical results

essure is plo

-axis on a lin

section 6.5.

ed measure

g a gas othe

.8 V per deca

by the

g10(P)

(P)

10

volts.

V (dc)

n.

f table and f

ted on the X-

ar scale.

, for IG 1.8 –

by the IG for

r than nitroge

e

P

ressure

[Torr]

2

00E-11

20E-11

50E-10

.30E-8

.40E-7

.20E-6

.50E-5

.30E-3

.00E-2

fil

ment is OFF

rmulas abov

xis with a lo

8.7V, nitro-

/air.

oltage

(dc)]

1.741

2.0

3.0

4.0

5.0

6.0

7.0

8.0

.698

≥11

for scale;

tinb42e1 (2018-05) VGC0

83C.om

43

7.6 Analog Output for IG LINEAR (Nitrogen / Air only)

NOTE

7.7 Analog Output for CG1 or CG2 1 - 8 V (Nitrogen / Air only)

When the analog output is setup, as described in section 6.5.6, for IG LINEAR, the analog output voltage represents the pressure measured by the IG for nitrogen/air only. The Linear analog output type provides a 0-10 V (dc) output signal that has a direct linear relationship to the displayed pressure measured by the ion gauge only. This selection covers 3 decades of pressure change. For example, if ANALOG OUT 1 is programmed for IG LINEAR and the maximum pressure for AOUT LIN 1 selected is 1.00E-03 Torr, then the instrument provides a 10 volt analog output signal when pressure as measured by IG is at 1.00E-03 Torr. Furthermore, the minimum pressure is automatically set to 1.00E-06 Torr, with a corresponding minimum voltage output of 0.01 volts.

Constructing a table of these parameters may be useful in documenting the relationship of displayed pressure (measured by the IG) to the analog output voltage. The following table is representative of a typical setup where the IG may be used in a limited range of pressure measurement where a direct linear relationship exists between the displayed pressure (mantissa) and the analog output signal.

Linear Analog Output Voltage - volts Measured (Displayed) Pressure - Torr

0.01 1.00E-06

0.10 1.00E-05

1.00 1.00E-04

10.00 1.00E-03

If your application requires the analog output voltage to cover a pressure range exceeding three decades, then consider using a log-linear analog output type for the IG.

The information discussed above regarding the Linear IG analog output applies only to N2 / air. If you are using a gas other than N

/ air, refer to section 8.3.1 to

2

optain the true pressure of the specific gas in your vacuum chamber.

Note: The output voltage will switch to above +11 V (dc) under the following conditions:

1) The IG sensor is turned off or any IG fault condition.

When the analog output is setup, as described in section 6.5.6, for CG1 1 – 8 V or CG2 1 – 8 V, the analog output voltage represents the pressure measured by CG1 or CG2 for nitrogen/air only. Refer to section 8.3.3.1 if you are using a gas other than nitrogen/air.

Analog output: Convection Gauge Log-linear 1 to 8 V (dc), 1 V per decade

A) The log-linear output signal and pressure are related by the following formulas when units of measurement is in Torr and mbar:

(volts - 5)

P = 10

V = log10(P) + 5

Where P is the pressure in Torr or mbar, and V is the output signal in volts. The output voltage is 1 V when pressure is at 1.00E-04 Torr. The output voltage is 8 V when pressure is at 1.00E+03 Torr.

B) The log-linear output signal and pressure are related by the following formulas when units of measurement is in pascals:

(volts - 3)

P = 10

V = log10(P) + 3

Where P is the pressure in pascals, and V is the output signal in volts.

44 tinb42e1 (2018-05) VGC083C.om

A

o

u

r

o

e

t

d

]

0

9

0

9

0

9

0

h

e

s

E

p

d

t[V

3

6

0

3

6

0

3

6

0

3

o

s[T

0

o

e

Note: gauge

Press

[Tor

1.00E-

2.00E-

5.00E-

1.00E-

2.00E-

5.00E-

1.00E-

2.00E-

5.00E-

1.00E-

The foll pressur

n analog ou

r unplugge

re

Volta

]

04 1.0

04 1.3

04 1.6

03 2.0

03 2.3

03 2.6

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tinb42e1 (2018-05) VGC083C.om

45

7.8 Analog Output for CG1 or CG2 0 - 7 V (Nitrogen / Air only)

When the analog output is setup, as described in section 6.5.6, for CG1 0 – 7 V or CG2 0 – 7 V, the analog output voltage represents the pressure measured by CG1 or CG2 for nitrogen/air only. Refer to section 8.3.3.2 if you are using a gas other than nitrogen/air.

Analog output: Convection Gauge Log-linear 0 to 7 V (dc), 1 V per decade

A) The log-linear output signal and pressure are related by the following formulas when units of measurement is in Torr and mbar:

(volts - 4)

P = 10

V = log10(P) + 4

Where P is the pressure in Torr or mbar, and V is the output signal in volts. The output voltage is 0 V when pressure is at 1.00E-04 Torr. The output voltage is 7 V when pressure is at 1.00E+03 Torr.

B) The log-linear output signal and pressure are related by the following formulas when units of measurement is in pascals:

(volts - 2)

P = 10

V = log10(P) + 2

Where P is the pressure in pascals, and V is the output signal in volts.

Note: An analog output of above +11 volts indicates a faulty convection gauge or unplugged gauge cable.

Pressure

[Torr]

Voltage

[V]

Pressure

[Torr]

Voltage

[V]

Pressure

[Torr]

Voltage

[V]

1.00E-04 0.000 2.00E-01 3.300 3.00E+02 6.480

2.00E-04 0.301 5.00E-01 3.700 4.00E+02 6.600

5.00E-04 0.699 1.00E+00 4.000 5.00E+02 6.700

1.00E-03 1.000 2.00E+00 4.300 6.00E+02 6.780

2.00E-03 1.300 5.00E+00 4.700 7.00E+02 6.850

5.00E-03 1.700 1.00E+01 5.000 7.60E+02 6.880

1.00E-02 2.000 2.00E+01 5.300 8.00E+02 6.900

2.00E-02 2.300 5.00E+01 5.700 9.00E+02 6.950

5.00E-02 2.700 1.00E+02 6.000 1.00E+03 7.000

1.00E-01 3.000 2.00E+02 6.300

The following chart shows the graphical results of table and formulas above for measurements in Torr.

46 tinb42e1 (2018-05) VGC083C.om

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7.9 Anal or C (Nitr

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for CG1

IN

only)

When t or CG2 CG1 or other th

The firs controll "S-curv proporti Phillips later ye various VGC08

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e analog out NON - LIN, t CG2 for nitro

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the original

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tinb42e1 (2018-05) VGC0

83C.om

47

Pressure

[Torr]

Voltage

[V]

Pressure

[Torr]

Voltage

[V]

Pressure

[Torr]

Voltage

[V]

0.000 0.3751 1.00E-01 0.8780 2.00E+02 5.0190

1.00E-04 0.3759 2.00E-01 1.1552 3.00E+02 5.1111

2.00E-04 0.3768 5.00E-01 1.6833 4.00E+02 5.2236

5.00E-04 0.3795 1.00E+00 2.2168 5.00E+02 5.3294

1.00E-03 0.3840 2.00E+00 2.8418 6.00E+02 5.4194

2.00E-03 0.3927 5.00E+00 3.6753 7.00E+02 5.4949

5.00E-03 0.4174 1.00E+01 4.2056 7.60E+02 5.5340

1.00E-02 0.4555 2.00E+01 4.5766 8.00E+02 5.5581

2.00E-02 0.5226 5.00E+01 4.8464 9.00E+02 5.6141

5.00E-02 0.6819 1.00E+02 4.9449 1.00E+03 5.6593

Note - An analog output of above +11 volts indicates a faulty convection gauge or unplugged gauge cable.

The equations and coefficients for the nth order polynomial equation defined for various pressure measurement ranges for the Non-linear analog output (S-curve) for CG1 or CG2 for N

/air described above are given in the following table:

2

For 0 mTorr to about 2 Torr, the Non-Linear Analog Output voltage range of

0.375 to 2.842 volts, use this table.

Coefficients for y(x) = a + bx + cx2 + dx3 + ex4 +fx5

a -0.02585

b 0.03767

c 0.04563

d 0.1151

e -0.04158

f 0.008738

For 2 Torr to about 100 Torr, the Non-Linear Analog Output voltage range of

2.842 to 4.945 volts, use this table.

Coefficients for 󰇛󰇜=









a 0.1031

b -0.3986

c -0.02322

d 0.07438

e 0.07229

f -0.006866

For 100 Torr to 1000 Torr, the Non-Linear Analog Output voltage range of 4.94 to

5.659 volts, use this table.

Coefficients for 󰇛󰇜=







a 100.624

b -0.37679

c -20.5623

d 0.0348656

Where y(x) = pressure in Torr, x= measured analog output in volts

Example: Measured analog output voltage is 0.3840 V. From first table shown above use equation: y(x) = a + bx + cx

2

+ dx3 + ex4 +fx5

x = 0.3840 volts a = -0.02585, b=0.03767, c=0.04563, d=0.1151, e=-0.04158, f=0.008738

y(x) = Pressure = 1.0E-03 Torr

48 tinb42e1 (2018-05) VGC083C.om

7.10 Analog Output for CG1 or CG2 LINEAR (Nitrogen / Air only)

When the analog output is setup, as described in section 6.5.5 , for CG1 LINEAR or CG2 LINEAR, the analog output voltage represents the pressure measured by the CG1 or CG2 for nitrogen/air only. The Linear analog output type provides a 0-10 V (dc) output signal that has a direct linear relationship to the displayed pressure measured by the CG1 or CG2 only. This selection covers 3 decades of pressure change. For example, if ANALOG OUT 1 is programmed for CG1 LINEAR and the maximum pressure for AOUT LIN 1 selected is 1.00 Torr, then the instruments provides a 10 volt analog output signal when pressure as measured by CG1 is at 1.00 Torr. Furthermore, the minimum pressure is automatically set to

1.00E-03 Torr, with a corresponding minimum voltage output of 0.01 volts.

Constructing a table of these parameters may be useful in documenting the relationship of displayed pressure (measured by the IG) to the analog output voltage. The following table is representative of a typical setup where the CG may be used in a limited range of pressure measurement where a direct linear relationship exists between the displayed pressure (mantissa) and the analog output signal.

Linear Analog Output Voltage - volts Measured (Displayed) Pressure - Torr

0.01 1.00E-03

0.10 1.00E-02

1.00 1.00E-01

10.00 1.00E+00

If your application requires the analog output voltage to cover a pressure range exceeding three decades, then consider using a log-linear analog output type for CG1 or CG2.

Note - An analog output of above +11 volts indicates a faulty convection gauge or unplugged gauge cable.

tinb42e1 (2018-05) VGC083C.om 49

8 Using the Gauge with Different Gases

The following tables and explanation contain important information regarding the use of ionization and convection gauges when used to measure pressure of gases other than nitrogen /air. For both types of gauge heads, corrections must be applied to both the display and analog outputs. This is particularly critical when using convection gauges at higher pressures than measured by the ion gauge when using gases other than N

8.1 Ion Gauge Display Correction Factors for Selected Gases

The measurement value is gas dependent. The pressure reading applies to dry air,

, CO and N2. For other gases, the measurements have to be corrected. There

O

2

are two methods that can be used for monitoring the IG display when using gases other than nitrogen/air:

1) If you are using a gas other than N correction factor to the IG displayed measurement. Post a label on your ion gauge display showing the correction factor to be used for the pressure of the gas type you are measuring. The table below provides typical correction factors (k) for cold cathode ion gauges when used with various gas. To correct the display measurements, multiply the displayed measured pressure by the correction factor for the gas type you are measuring:

Indicated pressure (gauge calibrated for air/N

/air.

2

/ air, you must manually apply a gas

2

)

2

In the range below 10-5 Torr the pressure indication is linear. For gases other than air / N2, the pressure can be determined by means of the following conversion formula:

p

= K × indicated pressure

eff

where:

Gas type K Gas type K

Air (N2, O2, CO) 1.0 H2 2.4

Xe 0.4 Ne 4.1

Kr 0.5 He 5,9

Ar 0.8

These gas correction factors are average values.

50 tinb42e1 (2018-05) VGC083C.om

Example

8.2 Effects of Different Gases on Convection Gauge Display

NOTE

If the gas in use is argon (Ar) and the VGC083C controller indicates a measured pressure of 7.6 x 10-6 Torr:

p

= 0.8 × 7.60 × 10-6 = 6.08 × 10-7 Torr true pressure of argon gas

Cold cathode gauges exhibit a non-linear response in the pressure range of 1×10 ware and calibration for air/N

eff

-4

Tor and higher. This non-liner response is corrected in the controller firm-

. Since this internal correction is applicable to air/N2

2

only, it is recommended to use the pressure measurements from the convection gauge when operating in the pressure range of 1×10-4 Tor and higher for other gases. With both cold cathode and convection gauges the appropriate gas correction factors must be applied.

2) Alternatively, you may correct the display for a direct reading of pressure for the type of gas you are using by adjusting the sensitivity value for the IG. If you adjust the sensitivity value of your ion gauge to compensate the readout of pressure for a gas type other than nitrogen / air, the displayed pressure readout for that device must be annotated to indicate that the displayed pressure is for the gas type the readout is compensated for.

In the above example, if the sensitivity value of the cold cathode ion gauge being used is 10 Torr

-1

("10 per Torr"), the sensitivity value can be programmed to

12.5 (10/0.8 =12.5) so that the pressure readout would directly indicate the true pressure of argon. Again, the display line for that particular device pressure readout would require annotation (a user applied label) so as to not conflict with the gas type selection/notation of nitrogen (N2). See Note above for pressure measurements of 1×10

.

air/N

2

-4

Tor and higher when using the cold cathode with gases other than

Convection gauge operation is based on the physical effect of thermal conductivity of the gas inside the gauge head. The convection gauge senses heat loss in a sensor wire. This heat loss depends on the thermal conductivity of the gas surrounding the sensor wire. Since different gases, and mixtures, have different thermal conductivities, the indicated pressure readings and outputs will also be different. INFICON convection gauges (and most other thermal, heat loss type gauges) are normally calibrated using nitrogen. When a gas other than N2 is used, correction must be made for the difference in thermal conductivity between N

and the

2

gas in use. The charts and tables below indicate how different gases affect the display from an INFICON convection gauge.

For nitrogen gas (N agreement between indicated and true pressure throughout the range from 10

) the calibration of the convection gauge shows excellent

2

-4

to 1000 Torr. At pressures below about 1 Torr, the calibration curves for the different gases are similar. The difference in readings (between indicated and true pressure) at these low pressures is usually a constant; a function of the difference between thermal conductivities of the gases.

At pressures above about 1 Torr, indicated pressure readings may diverge signifycantly from true pressure. At these higher pressures, convection currents in the gauge become the predominant cause of heat loss from the sensor. Calibration and performance at pressures higher than about 1 Torr depends on gauge tube geometry and mounting orientation as well as gas properties.

Generally, air and N

are considered the same as far as thermal conductivity goes,

2

but even these two gases will exhibit slight differences in readings at higher pressures. For example, when venting a system to atmosphere using N2, you may see readings change by about 30 to 40 Torr after the chamber is opened and air gradually displaces the N2 in the gauge. This is due to the partial pressure of oxygen (O2) contained in atmospheric air.

tinb42e1 (2018-05) VGC083C.om 51

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is 500 Torr, t

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52

tinb4

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CAUTIO

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Be sure to u es other than

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tinb42e1 (2018-05) VGC083C.om

53

The table below shows the convection gauge displayed readings at various pressures for several commonly used gas types:

True

Pressure

N2 Ar He O2 CO2 Kr Freon12 Freon22 D2 Ne CH4

(Torr)

1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4

2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4

5.00E-4 5.00E-4 5.00E-4 5.00E-4 5.00E-4 5.00E-4 3.00E-4 5.00E-4 5.00E-4 5.00E-4 5.00E-4 5.00E-4

1.00E-3 1.00E-3 7.00E-4 8.00E-4 1.00E-3 1.10E-3 4.00E-4 1.50E-3 1.50E-3 1.30E-3 7.00E-4 1.70E-3

2.00E-3 2.00E-3 1.40E-3 1.60E-3 2.00E-3 2.30E-3 1.00E-3 3.10E-3 3.10E-3 2.40E-3 1.50E-3 3.30E-3

5.00E-3 5.00E-3 3.30E-3 4.00E-3 5.00E-3 4.40E-3 2.30E-3 7.60E-3 7.00E-3 6.00E-3 3.50E-3 7.70E-3

1.00E-2 1.00E-2 6.60E-3 8.10E-3 9.70E-3 1.10E-2 4.80E-3 1.47E-2 1.35E-2 1.21E-2 7.10E-3 1.53E-2

2.00E-2 2.00E-2 1.31E-2 1.61E-2 1.98E-2 2.22E-2 9.50E-3 2.99E-2 2.72E-2 2.43E-2 1.41E-2 3.04E-2

5.00E-2 5.00E-2 3.24E-2 4.05E-2 4.92E-2 5.49E-2 2.35E-2 7.25E-2 6.90E-2 6.00E-2 3.48E-2 7.72E-2

1.00E-1 1.00E-1 6.43E-2 8.20E-2 9.72E-2 1.07E-1 4.68E-2 1.43E-1 1.36E-1 1.21E-1 7.00E-2 1.59E-1

2.00E-1 2.00E-1 1.26E-1 1.65E-1 1.94E-1 2.10E-1 9.11E-2 2.75E-1 2.62E-1 2.50E-1 1.41E-1 3.15E-1

5.00E-1 5.00E-1 3.12E-1 4.35E-1 4.86E-1 4.89E-1 2.17E-1 6.11E-1 5.94E-1 6.87E-1 3.59E-1 7.81E-1

1.00E+0 1.00E+0 6.00E-1 9.40E-1 9.70E-1 9.50E-1 4.00E-1 1.05E+0 1.04E+0 1.55E+0 7.45E-1 1.60E+0

2.00E+0 2.00E+0 1.14E+0 2.22E+0 1.94E+0 1.71E+0 7.00E-1 1.62E+0 1.66E+0 4.13E+0 1.59E+0 3.33E+0

5.00E+0 5.00E+0 2.45E+0 1.35E+1 4.98E+0 3.34E+0 1.28E+0 2.45E+0 2.62E+0 2.46E+2 5.24E+0 7.53E+0

1.00E+1 1.00E+1 4.00E+0 OP 1.03E+1 4.97E+0 1.78E+0 2.96E+0 3.39E+0 OP 2.15E+1 2.79E+1

2.00E+1 2.00E+1 5.80E+0 OP 2.23E+1 6.59E+0 2.29E+0 3.32E+0 3.72E+0 OP 5.84E+2 3.55E+2

5.00E+1 5.00E+1 7.85E+0 OP 7.76E+1 8.22E+0 2.57E+0 3.79E+0 4.14E+0 OP OP 8.42E+2

1.00E+2 1.00E+2 8.83E+0 OP 2.09E+2 9.25E+0 2.74E+0 4.68E+0 4.91E+0 OP OP OP

2.00E+2 2.00E+2 9.79E+0 OP 2.95E+2 1.23E+1 3.32E+0 5.99E+0 6.42E+0 OP OP OP

3.00E+2 3.00E+2 1.13E+1 OP 3.80E+2 1.69E+1 3.59E+0 6.89E+0 7.52E+0 OP OP OP

4.00E+2 4.00E+2 1.35E+1 OP 4.85E+2 2.24E+1 3.94E+0 7.63E+0 8.42E+0 OP OP OP

5.00E+2 5.00E+2 1.61E+1 OP 6.04E+2 2.87E+1 4.21E+0 8.28E+0 9.21E+0 OP OP OP

6.00E+2 6.00E+2 1.88E+1 OP 7.30E+2 3.64E+1 4.44E+0 8.86E+0 9.95E+0 OP OP OP

7.00E+2 7.00E+2 2.18E+1 OP 8.59E+2 4.61E+1 4.65E+0 9.42E+0 1.07E+1 OP OP OP

7.60E+2 7.60E+2 2.37E+1 OP 9.41E+2 5.39E+1 4.75E+0 9.76E+0 1.11E+1 OP OP OP

8.00E+2 8.00E+2 2.51E+1 OP 9.97E+2 5.94E+1 4.84E+0 9.95E+0 1.14E+1 OP OP OP

9.00E+2 9.00E+2 2.85E+1 OP OP 7.95E+1 4.99E+0 1.05E+1 1.20E+1 OP OP OP

1.00E+3 1.00E+3 3.25E+1 OP OP 1.11E+2 5.08E+0 1.11E+1 1.27E+1 OP OP OP

Values listed under each gas type are in Torr units Over Pressure (OP)= 1.10E+03 Torr

When using gases other than nitrogen/air, you must use the above look-up table to determine the true pressures of selected gases as measured by convection gauges. For example, if the gas you are using in your vacuum system chamber is predominately argon (Ar), a displayed pressure of 1.14E+00 Torr means the actual true pressure of argon is 2.00E+00 Torr based on the conversion information provided in the above table.

Example: If the gas is argon (Ar), when the true pressure is 100 Torr, the gauge will read only about 9 Torr.

54 tinb42e1 (2018-05) VGC083C.om

8.3 Effects of Different Gases on Analog Output

The following tables and explanation contains important information regarding the use of ionization and convection gauges on gases other than N

/ Air. For both

2

types of gauges, corrections must be applied to the analog outputs.

8.3.1 Ion Gauge Analog Output

Correction Factors for Selected Gases

When using any of the analog outputs assigned to ion gauge only, use the following steps to convert the analog output to pressure: Ion gauge analog output correction factors for selected gases:

A) Refer to section 7 and use the related equation to convert the voltage in your receiving instrument to pressure. This pressure value is based on nitrogen gas.

B) Apply the Gas Correction Factor for the particular gas you are using to the pressure value obtained in step A. Use correction factors and example listed below:

In the range below 10

-5

Torr the pressure indication is linear. For gases other than air / N2, the pressure can be determined by means of the following conversion formula:

p

= K × indicated pressure

eff

where:

Gas type K Gas type K

Air (N2, O2, CO) 1.0 H2 2.4

Xe 0.4 Ne 4.1

Kr 0.5 He 5,9

Ar 0.8

These gas correction factors are average values.

Example

ANALOG OUT 1 selected is IG LOG N-10. The gas in use is argon. Voltage output is 4 volts. Pressure unit is Torr.

p (nitrogen) = 10

(4 - 10)

p = 10

(volts - 10)

p = 1.00 × 10-6 Torr (based on nitrogen)

Applying the Gas Correction Factor of 0.8 for argon listed in the table above,

p (argon) = 0.8 × 1 × 10-6 = 8 × 10-7 Torr true pressure of argon gas

NOTE

Cold cathode gauges exhibit a non-linear response in the pressure range of

-4

1×10

Tor and higher. This non-liner response is corrected in the controller firmware and calibration for air/N only, it is recommended to use the pressure measurements from the convection gauge when operating in the pressure range of 1×10

. Since this internal correction is applicable to air/N2

2

-4

Tor and higher for other gases.With both cold cathode and convection gauges the appropriate gas correction factors must be applied.

8.3.2 IG - CG1 0.5 - 7V Analog Output Correction Factors for Selected Gases

When using the IG - CG1 or IG - CG2 analog output mode (Log-Linear 0.5 - 7 V,

0.5 V/decade) for gases other than air/N

, the analog output is interpreted differ-

2

ently over two different pressure ranges as discussed below:

A) Pressure range from high vacuum to the OVER PRESSURE value programmed in the VGC083C (cold cathode ion gauge range): Use the correction factors listed in section 8.3.2.1 below to determine pressure from the voltage for selected gases (ion gauge range). As discussed previously cold cathode gauges exhibit a non-linear response in the pressure range of

-4

Tor and higher. This non-liner response is corrected in the controller firm-

1×10 ware and calibration for air/N only, it is recommended to use the pressure measurements from the convection gauge when operating in the pressure range of 1×10

. Since this internal correction is applicable to air/N2

2

-4

Tor and higher for other gases. However in the analog output combination mode IG - CG1 or IG - CG2, the analog output is derived from measurements by the cold cathode gauge over the pressure range of 1×10

-4

Tor to the OVER PRESSURE shut down value. As such, we recommend not using the IG - CG1 or IG - CG2 mode when using gases other than air/N

tinb42e1 (2018-05) VGC083C.om 55

. Instead, consider using individual analog outputs for the cold cathode

2

8.3.2.1 IG-CG1 0.5 - 7V Analog Output Correction Factors

- Ion Gauge Range

Example

and the convection gauge and use the measurements from the convection gauge in the range of 1×10 ments from the cold cathode gauge above 1×10

-4

Tor and higher thus disregarding the pressure measure-

-4

Tor. With both cold cathode and

convection gauges the appropriate gas correction factors must be applied.

B) Pressure range from the ion gauge OVER PRESSURE value programmed in the VGC083C to 1,000 Torr: Use the correction factors listed in section 8.3.2.2 below to determine pressure from the voltage for selected gases (convection gauge range).

A) When using the IG - CG1 or IG - CG2 analog output mode (Log-Linear 0.5-7 V,

0.5 V/decade) for gases other than air/N

, use the following steps to convert the

2

analog output to pressure for MAG050/060 when operating from high vacuum to the to OVER PRESSURE shut down value programmed in the VGC083C.

B) Refer to section 7.1 and related equation to convert the voltage in your receiving instrument to pressure. This pressure value is based on nitrogen.

C) Apply the gas correction factor (k) for the particular gas you are using to the pressure value obtained in step A (Use correction factors and example listed below).

-5

In the range below 10

Torr the pressure indication is linear. For gases other than air / N2, the pressure can be determined by means of the following conversion formula:

p

= K × indicated pressure

eff

where:

Gas type K Gas type K

Air (N2, O2, CO) 1.0 H2 2.4

Xe 0.4 Ne 4.1

Kr 0.5 He 5,9

Ar 0.8

These gas correction factors are average values.

The gas in use is argon. Output voltage is 3 volts. Pressure unit is Torr.

p (nitrogen) = 10 p = 1×10

-5

Torr (based on nitrogen)

p

= 0.8 × 1 × 10-5 = 8 × 10-6 Torr true pressure of argon gas

(argon)

.

.

= 10

(3.0 – 5.5) / (0.5)

As described in section 8.3.2 cold cathode gauges exhibit a non-linear response in the pressure range of 1×10 in the controller firmware and calibration for air/N applicable to air/N

only, it is recommended to use the pressure measurements

2

from the convection gauge when operating in the pressure range of 1×10

-4

Tor and higher. This non-liner response is corrected

. Since this internal correction is

2

-4

Tor and higher for other gases. However in the analog output combination mode IG - CG1 or IG - CG2, the analog output is derived from measurements by the cold cathode gauge over the pressure range of 1×10

-4

Tor to the OVER PRESSURE shut down value. As such, we recommend not using the IG - CG1 or IG - CG2 mode when using gases other than air/N the cold cathode and the convection gauge and use the measurements from the convection gauge in the range of 1×10 pressure measurements from the cold cathode gauge above 1×10

. Instead, consider using individual analog outputs for

2

-4

Tor and higher thus disregarding the

-4

Tor. With both cold cathode and convection gauges the appropriate gas correction factors must be applied.

56 tinb42e1 (2018-05) VGC083C.om

8.3.2.2 IG-CG1 0.5 - 7V Analog Output Correction Factors

- Convection Gauge Range

True

Pressure

N2 Ar He O2 CO2 KR Freon12 Freon22 D2 Ne CH4

(Torr)

1.00E-3 4.000 3.923 3.952 4.000 4.021 3.801 4.088 4.088 4.057 3.923 4.115

2.00E-3 4.151 4.073 4.102 4.151 4.181 4.000 4.246 4.246 4.190 4.088 4.259

5.00E-3 4.349 4.259 4.301 4.349 4.322 4.181 4.440 4.423 4.389 4.272 4.443

1.00E-2 4.500 4.410 4.454 4.493 4.521 4.341 4.584 4.565 4.541 4.426 4.592

2.00E-2 4.651 4.559 4.603 4.648 4.673 4.489 4.738 4.717 4.693 4.575 4.741

5.00E-2 4.849 4.755 4.804 4.846 4.870 4.686 4.930 4.919 4.889 4.771 4.944

1.00E-1 5.000 4.904 4.957 4.994 5.015 4.835 5.078 5.067 5.041 4.923 5.101

2.00E-1 5.151 5.050 5.109 5.144 5.161 4.980 5.220 5.209 5.199 5.075 5.249

5.00E-1 5.349 5.247 5.319 5.343 5.345 5.168 5.393 5.387 5.418 5.278 5.446

1.00E+0 5.500 5.389 5.487 5.493 5.489 5.301 5.511 5.509 5.595 5.436 5.602

2.00E+0 5.651 5.528 5.673 5.644 5.616 5.423 5.605 5.610 5.808 5.601 5.761

5.00E+0 5.849 5.695 6.065 5.849 5.762 5.554 5.695 5.709 6.695 5.860 5.938

1.00E+1 6.000 5.801 6.006 5.848 5.625 5.736 5.765 6.166 6.223

2.00E+1 6.151 5.882 6.174 5.909 5.680 5.761 5.785 6.883 6.775

5.00E+1 6.349 5.947 6.445 5.957 5.705 5.789 5.809 6.963

1.00E+2 6.500 5.973 6.660 5.983 5.719 5.835 5.846

2.00E+2 6.651 5.995 6.735 6.045 5.761 5.889 5.904

3.00E+2 6.739 6.027 6.790 6.114 5.778 5.919 5.938

4.00E+2 6.801 6.065 6.843 6.175 5.798 5.941 5.963

5.00E+2 6.849 6.103 6.891 6.229 5.812 5.959 5.982

6.00E+2 6.889 6.137 6.932 6.281 5.824 5.974 5.999

7.00E+2 6.923 6.169 6.967 6.332 5.834 5.987 6.015

7.60E+2 6.940 6.187 6.987 6.366 5.838 5.995 6.023

8.00E+2 6.952 6.200 6.999 6.387 5.842 5.999 6.028

9.00E+2 6.977 6.227 6.450 5.849 6.011 6.040

1.00E+3 7.000 6.256 6.523 5.853 6.023 6.052

Example

NOTE

8.3.3 Convection gauge analog

output for selected gases

When using the IG - CG1 or IG - CG2 analog output mode (Log-Linear 0.5 - 7 V,

0.5 V/decade) for gases other than air/N

, use the following look-up table and

2

information to convert the analog output to pressure when operating in the pressure range of overpressure shutdown value listed in section 5.4 to 1000 Torr. The look-up table has been derived from equation listed in section 7.1.

Analog output IG - CG1 or IG - CG2 when in the pressure range of overpressure shutdown value to 1000 Torr

Values listed under each gas type are in volts (V).

The gas in use is O2. Voltage output is 5.144 volts. True pressure of O

is 2.00E-01 Torr

2

If you are using the IG - ALT 0.5 - 7V analog output mode refer to the User Manual of your alternate gauge to determine the correction factors for various gases.

If you intend to use any of the analog outputs to represent measurements from CG1 or CG2 for gases other than air/N

, you must also apply corrections to the

2

analog output. Use the following tables to determine pressure from voltage for gases other than nitrogen or air.

tinb42e1 (2018-05) VGC083C.om 57

8.3.3.1 CG1 1 - 8 V or CG2 1 - 8 V Analog Output Correction Factors - Convection Gauge

True

Pressure

N2 Ar He O2 CO2 KR Freon12 Freon22 D2 Ne CH4

(Torr)

1.00E-4 1.000 1.000 1.000 1.000 1.000 1.000 1.000 1.000 1.000 1.000 1.000

2.00E-4 1.301 1.301 1.301 1.301 1.301 1.301 1.301 1.301 1.301 1.301 1.301

5.00E-4 1.699 1.699 1.699 1.699 1.699 1.477 1.699 1.699 1.699 1.699 1.699

1.00E-3 2.000 1.845 1.903 2.000 2.041 1.602 2.176 2.176 2.114 1.845 2.230

2.00E-3 2.301 2.146 2.204 2.301 2.362 2.000 2.491 2.491 2.380 2.176 2.519

5.00E-3 2.699 2.519 2.602 2.699 2.643 2.362 2.881 2.845 2.778 2.544 2.886

1.00E-2 3.000 2.820 2.908 2.987 3.041 2.681 3.167 3.130 3.083 2.851 3.185

2.00E-2 3.301 3.117 3.207 3.297 3.346 2.978 3.476 3.435 3.386 3.149 3.483

5.00E-2 3.699 3.511 3.607 3.692 3.740 3.371 3.860 3.839 3.778 3.542 3.888

1.00E-1 4.000 3.808 3.914 3.988 4.029 3.670 4.155 4.134 4.083 3.845 4.201

2.00E-1 4.301 4.100 4.217 4.288 4.322 3.960 4.439 4.418 4.398 4.149 4.498

5.00E-1 4.699 4.494 4.638 4.687 4.689 4.336 4.786 4.774 4.837 4.555 4.893

1.00E+0 5.000 4.778 4.973 4.987 4.978 4.602 5.021 5.017 5.190 4.872 5.204

2.00E+0 5.301 5.057 5.346 5.288 5.233 4.845 5.210 5.220 5.616 5.201 5.522

5.00E+0 5.699 5.389 6.130 5.697 5.524 5.107 5.389 5.418 7.391 5.719 5.877

1.00E+1 6.000 5.602 6.013 5.696 5.250 5.471 5.530 6.332 6.446

2.00E+1 6.301 5.763 6.348 5.819 5.360 5.521 5.571 7.766 7.550

5.00E+1 6.699 5.895 6.890 5.915 5.410 5.579 5.617 7.925

1.00E+2 7.000 5.946 7.320 5.966 5.438 5.670 5.691

2.00E+2 7.301 5.991 7.470 6.090 5.521 5.777 5.808

3.00E+2 7.477 6.053 7.580 6.228 5.555 5.838 5.876

4.00E+2 7.602 6.130 7.686 6.350 5.595 5.883 5.925

5.00E+2 7.699 6.207 7.781 6.458 5.624 5.918 5.964

6.00E+2 7.778 6.274 7.863 6.561 5.647 5.947 5.998

7.00E+2 7.845 6.338 7.934 6.664 5.667 5.974 6.029

7.60E+2 7.881 6.375 7.974 6.732 5.677 5.989 6.045

8.00E+2 7.903 6.400 7.999 6.774 5.685 5.998 6.057

9.00E+2 7.954 6.455 6.900 5.698 6.021 6.079

1.00E+3 8.000 6.512 7.045 5.706 6.045 6.104

Example

When using the Log-Linear convection gauge analog output mode (Log-Linear 1 - 8 V, 1 V/decade) for gases other than air/N

, use the following look-up table and

2

information to convert the analog output to pressure. The look-up table has been derived from the equation provided in section 7.7

Analog Output for Log-Linear CG1 1-8V or CG2 1-8V

Values listed under each gas type are in volts (V).

The gas in use is O2. Voltage output is 4.288 volts. True pressure of O

is 2.00E-01 Torr

2

58 tinb42e1 (2018-05) VGC083C.om

8.3.3.2 CG1 0 - 7 V or CG2 0 - 7 V Analog Output Correction Factors - Convection Gauge

True

Pressure

N2 Ar He O2 CO2 KR Freon12 Freon22 D2 Ne CH4

(Torr)

1.00E-4 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000

2.00E-4 0.301 0.301 0.301 0.301 0.301 0.301 0.301 0.301 0.301 0.301 0.301

5.00E-4 0.699 0.699 0.699 0.699 0.699 0.477 0.699 0.699 0.699 0.699 0.699

1.00E-3 1.000 0.845 0.903 1.000 1.041 0.602 1.176 1.176 1.114 0.845 1.230

2.00E-3 1.301 1.146 1.204 1.301 1.362 1.000 1.491 1.491 1.380 1.176 1.519

5.00E-3 1.699 1.519 1.602 1.699 1.643 1.362 1.881 1.845 1.778 1.544 1.886

1.00E-2 2.000 1.820 1.908 1.987 2.041 1.681 2.167 2.130 2.083 1.851 2.185

2.00E-2 2.301 2.117 2.207 2.297 2.346 1.978 2.476 2.435 2.386 2.149 2.483

5.00E-2 2.699 2.511 2.607 2.692 2.740 2.371 2.860 2.839 2.778 2.542 2.888

1.00E-1 3.000 2.808 2.914 2.988 3.029 2.670 3.155 3.134 3.083 2.845 3.201

2.00E-1 3.301 3.100 3.217 3.288 3.322 2.960 3.439 3.418 3.398 3.149 3.498

5.00E-1 3.699 3.494 3.638 3.687 3.689 3.336 3.786 3.774 3.837 3.555 3.893

1.00E+0 4.000 3.778 3.973 3.987 3.978 3.602 4.021 4.017 4.190 3.872 4.204

2.00E+0 4.301 4.057 4.346 4.288 4.233 3.845 4.210 4.220 4.616 4.201 4.522

5.00E+0 4.699 4.389 6.130 4.697 4.524 4.107 4.389 4.418 6.391 4.719 4.877

1.00E+1 5.000 4.602 5.013 4.696 4.250 4.471 4.530 5.332 5.446

2.00E+1 5.301 4.763 5.348 4.819 4.360 4.521 4.571 6.766 6.550

5.00E+1 5.699 4.895 5.890 4.915 4.410 4.579 4.617 6.925

1.00E+2 6.000 4.946 6.320 4.966 4.438 4.670 4.691

2.00E+2 6.301 4.991 6.470 5.090 4.521 4.777 4.808

3.00E+2 6.477 5.053 6.580 5.228 4.555 4.838 4.876

4.00E+2 6.602 5.130 6.686 5.350 4.595 4.883 4.925

5.00E+2 6.699 5.207 6.781 5.458 4.624 4.918 4.964

6.00E+2 6.778 5.274 6.863 5.561 4.647 4.947 4.998

7.00E+2 6.845 5.338 6.934 5.664 4.667 4.974 5.029

7.60E+2 6.881 5.375 6.974 5.732 4.677 4.989 5.045

8.00E+2 6.903 5.400 6.999 5.774 4.685 4.998 5.057

9.00E+2 6.954 5.455 5.900 4.698 5.021 5.079

1.00E+3 7.000 5.512 6.045 4.706 5.045 5.104

Example

When using the Log-Linear convection gauge analog output mode (Log-Linear 0 - 7 V, 1 V/decade) for gases other than air/N

, use the following look-up table and

2

information to convert the analog output to pressure. The look-up table has been derived from the equation provided in section 7.8

Values listed under each gas type are in volts (V (dc)).

The gas in use is O2. Voltage output is 3.288 volts. True pressure of O

is 2.00E-01 Torr

2

tinb42e1 (2018-05) VGC083C.om 59

8.3.3.3 CG1 NON-LIN or CG2 NON-LIN Analog Output Correction Factors Convection Gauge

True

Pressure

(Torr)

0 0.3751 0.375 0.375 0.375 0.375 0.375 0.375 0.375 0.375 0.375 0.375

1.00E-4 0.3759 0.3757 0.3755 0.376 0.376 0.3755 0.376 0.376 0.376 0.3757 0.3766

2.00E-4 0.3768 0.376 0.3765 0.377 0.377 0.3768 0.378 0.378 0.377 0.3763 0.378

5.00E-4 0.3795 0.378 0.379 0.38 0.381 0.3772 0.382 0.381 0.381 0.3782 0.3825

1.00E-3 0.384 0.381 0.382 0.384 0.385 0.379 0.388 0.388 0.386 0.381 0.3896

2.00E-3 0.3927 0.387 0.389 0.392 0.395 0.384 0.401 0.4 0.396 0.388 0.403

5.00E-3 0.4174 0.403 0.409 0.417 0.412 0.395 0.437 0.432 0.425 0.405 0.438

1.00E-2 0.4555 0.429 0.441 0.453 0.462 0.415 0.488 0.48 0.47 0.433 0.492

2.00E-2 0.5226 0.477 0.497 0.521 0.536 0.451 0.581 0.566 0.549 0.484 0.584

5.00E-2 0.6819 0.595 0.637 0.679 0.705 0.544 0.778 0.764 0.727 0.608 0.796

1.00E-1 0.878 0.745 0.814 0.868 0.9 0.668 1.009 0.99 0.944 0.768 1.053

2.00E-1 1.1552 0.962 1.068 1.141 1.179 0.847 1.315 1.291 1.265 1.002 1.392

5.00E-1 1.6833 1.386 1.589 1.664 1.668 1.194 1.826 1.805 1.914 1.469 2.014

1.00E+0 2.2168 1.818 2.164 2.195 2.172 1.536 2.257 2.247 2.603 1.976 2.632

2.00E+0 2.8418 2.333 2.939 2.814 2.695 1.921 2.647 2.666 3.508 2.631 3.313

5.00E+0 3.6753 3.028 4.387 3.672 3.316 2.429 3.029 3.09 5.059 3.715

1.00E+1 4.2056 3.48 5.774 4.225 3.67 2.734 3.204 3.33 6.361 4.605 4.699

2.00E+1 4.5766 3.801 7.314 4.62 3.903 2.966 3.308 3.414 5.406 5.172

5.00E+1 4.8464 4.037 4.916 4.071 3.075 3.43 3.509 6.159 5.583

1.00E+2 4.9449 4.122 5.026 4.154 3.134 3.618 3.66 6.483 5.72

2.00E+2 5.019 4.192 5.106 4.336 3.269 3.827 3.883 6.661 5.86

3.00E+2 5.1111 4.283 5.2 4.502 3.384 3.938 4.005 6.726

4.00E+2 5.2236 4.386 5.315 4.621 3.466 4.016 4.088 6.767 6.103

5.00E+2 5.3294 4.477 5.422 4.708 3.526 4.076 4.151 6.803

6.00E+2 5.4194 4.55 5.515 4.775 3.573 4.124 4.203 6.843 6.342

7.00E+2 5.4949 4.611 5.592 4.83 3.613 4.166 4.247 6.89

7.60E+2 5.534 4.643 5.633 4.86 3.632 4.19 4.271 6.92

8.00E+2 5.5581 4.663 5.658 4.877 3.645 4.203 4.286 6.942 6.519

9.00E+2 5.6141 4.706 5.713 4.919 3.674 4.237 4.321 7

1.00E+3 5.6593 4.745 5.762 4.955 3.69 4.27 4.354 7.056 6.642

N2 Ar He O2 CO2 KR Freon12 Freon22 D2 Ne CH4

When using the Non-Linear convection gauge analog output mode for gases other than air/N

, use the following look-up table and information to convert the analog

2

output to pressure. The look-up table has been derived from the equation provided in section 7.9

Values listed under each gas type are in volts (V (dc)).

60 tinb42e1 (2018-05) VGC083C.om

9 Communication Protocol (Serial Interface)

9.1 Device Specific Serial Communication Info

The VGC083C provides RS232 and RS485 serial communications capability. The following information and the command protocol summaries listed in the following sub-sections of this chapter can be used to establish serial communications with the device. Four distinct protocols (COMM type) are defined: INFICON RS232 and RS485 protocol and RS232 and RS485 protocols compatible with GP series 307 and 358 controllers. The user has access from the front panel main menu to change settings for COM Type, Baud Rate, Data Bits, Parity, Stop Bits and device Address (when using RS485).

Baud Rate is selectable at 300, 600, 1200, 2400, 4800, 9600, 19200 or 38400 baud.

Data bits may be set to either 7 or 8.

Parity selection may be set to None, Even or Odd.

Either 1 or 2 Stop Bits may be selected.

The device address when using RS485 can be within the range 00 to FF hexadecimal (Default = 01).

There is a finite period of time between the time a command is sent from a terminal (PC COM Port, for example) and the point in time in which the VGC083C starts to send a response to that command. This delay is dependent upon the command sent and the baud rate.

9.2 INFICON RS232 / RS485 Command Protocol Summary

The maximum command repetition rate will depend on the length of the command sent and the response received, as well as the baud rate. The maximum repetition rate for the baud rate you are using can be found in the following table:

Selected Baud

Rate

38400 38 ms 26 μs

19200 46 ms 52 μs

9600 61 ms 1.0 ms

4800 93 ms 2.0 ms

2400 156 ms 4.1 ms

1200 280 ms 8.3 ms

600 530 ms 16 ms

300 1030 ms 33 ms

The following notes are intended to be understood by the user when using INFICON's RS232 and RS485 command protocol with the VGC083C.

1. Default settings are 19,200 baud rate, 8 data bits, No Parity, 1 stop bit.

2. The baud rate can be set to different values using the front panel soft-keys.

3. All Responses are 13 characters long when COMM TYPE menu selected is RS485 or RS232.

4. 'xx' is the address of the device (00 thru FF). For RS232, 'xx' is replaced with two space characters.

Repetition Rate Receive to Transmit

Time

tinb42e1 (2018-05) VGC083C.om 61

9.3 INFICON RS232 and RS485 Command Protocol Summary

COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES

READ ION GAUGE PRESSURE

READ CGn PRESSURE

READ AI Pressure Read the current pressure

Read the current displayed pressure of the ion gauge in the same units of measure on display

Read the current pressure for CGn in the same units of measure on display

for AI in the same units of measure on display

5. <CR> is a carriage return, a non-printable character. Do not enter <CR> from your keyboard. A carriage return, non-printable character may be entered as the Unicode C0 controls specified value: 0D hexadecimal (13 decimal). From your keyboard, a key entry sequence of CNTL-M may be used to obtain the required character for a carriage return when using certain terminal emulator programs.

6. '_' represents a 'space' character. Press the space bar on your keyboard. Do not enter a '_' (underscore) character.

7. All commands sent to the controller start with a '#' character, and all normal responses from the controller start with a '*' character. Error responses start with a "?".

8. A valid address must be used [Factory default = 01] when using the RS485 protocol. The VGC083C will not respond to a command with an invalid address while using RS485.

9. The command syntax examples used in the protocol summary table for ASCII are shown in scientific notation. However, floating point notation is acceptable as long as a leading digit is entered as '0.' or '1.', etc. There must be a digit to the left of the decimal point. For example, when constructing the syntax for the command to set the CGn zero value (e.g., #xxTZn_x.xxE-pp<CR> when using scientific notation), use either #xxTZn_0.00<CR>, or #xxTZn_0<CR>. A simple '0' is valid for the pressure entry.

The RS232 mode is the same as RS485, except ADDRESS is ignored in RS232 mode and must be eliminated from the command string or replaced with space characters. Responses will not return ADDRESS; the ADDRESS is replaced with space characters. Response is 13 characters including carriage return. All pressure measurement responses are in absolute pressure units as selected by the user. Please see qualifying notes at bottom of table.

Table "INFICON RS232 and RS485 Command Protocol Summary"

#xxRDIG<CR>

e.g.: #01RDIG<CR>

where, xx = the two digit address of the device (node)

*xx_y.yyEzpp<CR>

where,

y.yy = mantissa,

z = sign of the exponent +/-

and pp = the exponent e.g.: *01_1.53E-06<CR>

When IG is off: *01_1.10E+03

#xxRDCGn<CR>

e.g.: #01RDCG1<CR>

where, n=1 or 2 (CG1 or CG2)

*xx_ y.yyEzpp <CR>

e.g.: *01_7.60E+02<CR>

When CG is over ranged: *01_1.10E+03

#xxRDAI<CR>

e.g.: #01RDAI<CR>

*xx_ y.yyEzpp <CR>

e.g.: *01_7.60E+02<CR>

When AI is over ranged or not powered: *01_1.10E+03

(continued)

62 tinb42e1 (2018-05) VGC083C.om

Table "INFICON RS232 and RS485 Command Protocol Summary" (continued)

COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES

READ all Process Control (PC, or Relay) states

Read the current state of all process control setpoint relays

#xxRL<CR>

e.g.: #01RL<CR>

*xx_003F_RL_<CR>

In the example response above, the 'F' represents the first 4 relays; relays 5 and 6 are the second digit (the '3') of the response. This example shows that all relays are ON, i.e., energized. The '3F' would represent the binary string of

0011 1111, where 0011 is the 3 and 1111 is the F in '3F'

A response of 0003 means that only RL1 and RL2 are ON, i.e., energized

READ one PC state Read the current state of

one process control setpoint

#xxRLn<CR>

where n = 1,2,3,4,5 or 6

*xx_0_RL_OFF<CR>

*xx_1_RL_ON_<CR>

e.g.: #01RL1<CR>

READ IG on/off STATUS

TURN IG ON Turn the Ion Gauge ON #xxIG1<CR>

Find out if Ion Gauge is turned to ON and gauge is reading pressure

#xxIGS<CR>

e.g.: #01IGS<CR>

e.g.: #01IG1<CR>

#xxIGy<CR>

*xx_0_IG_OFF<CR> *xx_1_IG_ON_<CR>

*xx_PROGM_OK<CR>

When IG error exists: ?01_INVALID_<CR>

where,

Y=1= Turn ON;

y=0= Turn OFF

TURN IG OFF Turn the Ion Gauge OFF #xxIG0<CR>

e.g.: #01IG0<CR>

#xxIGy<CR>

where,

*xx_PROGM_OK<CR>

Even though the IG will already be OFF, when an IG Error occurs, sending the IG OFF command will clear errors

Y=1= Turn ON;

y=0= Turn OFF

SET CGn ZERO Set the zero or vacuum

calibration point for CGn

#xxTZCGn <CR>

e.g.: #01TZCG1_0<CR>

e.g.: #01TZCG2_1.23E-02

<CR>

where,

n=1 or 2 (for, CG1 or CG2)

y.yy = mantissa,

*xx_PROGM_OK<CR>

When P > 100 mTorr: ?01_INVALID_<CR>

When CG is not connected: ?01_INVALID_<CR>

When requested gauge number <1 or >2: ?01_SYNTX_ER <CR>

z = sign of the exponent +/- and pp = the exponent

(continued)

tinb42e1 (2018-05) VGC083C.om 63

Table "INFICON RS232 and RS485 Command Protocol Summary" (concluded)

COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES

SET CGn SPAN Set the span or atmosphere

calibration point for CGn

#xxTSCGn_y.yyEzpp<CR>

e.g.: #01TSCG1_

7.60E+02<CR>

where,

n=1 or 2 (for, CG1 or CG2)

y.yy = mantissa,

z = sign of the exponent +/- and pp = the exponent

*xx_PROGM_OK<CR>

When P < 400 Torr: ?01_INVALID_<CR>

When requested P < 400Torr: ?01_INVALID_<CR>

When requested P > 1000mT: ?01_INVALID_<CR>

When CG is not connected: ?01_INVALID_<CR>

When requested gauge number <1 or >2: ?01_SYNTX_ER <CR>

(continued)

NOTES:

1. <CR> is a carriage return (0x0D). This is the terminator character.

2. The '_' used in certain defined commands represent a space character. Space characters may be omitted from commands.

3. Hardware handshake controls do not exist on VGC083C (e.g., RTS, CTS, DTR).

64 tinb42e1 (2018-05) VGC083C.om

9.4 RS232 GP 307 and 358 Protocol

COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES

READ IGn or, READ IG

READ CGn Read the current CG pres-

READ PCs in long form

READ PCs in binary form

READ individual PC Read the current

IG ON Turn specified IG filament

Read the current IG pressure in units of Torr only, 1 = fil1, 2 = fil2

If you have selected filament 1 to operate with the IG ON (see 'IG ON' below), then enter IG1 in the READ IGn command; use IG2 if filament 2 is turned ON

sure in units of Torr only

Read the current Process Control setpoint relay status

{continued on next page}

{continued from previous

page}

individual Process Control setpoint relay status

ON

Note that the functions of IG ON/OFF and Filament Selection are combined in the single IG ON/OFF command. When turning the IG to ON, the specific filament chosen is selected when sending the IG ON/OFF commands.

RS232 protocol compatible with the GP Series 307 and 358 VGC is as defined in the following table. Please see qualifying notes at bottom of table.

Table "RS232 GP 307 and 358 Protocol"

DS_ IGn<CR> <LF>

e.g.: DS_ IG1<CR><LF>

or

DS_ IG<CR> <LF>

e.g.: DS_ IG1<CR><LF>

DS_ CGn<CR> <LF>

e.g.: DS_ CG1<CR><LF> where, n = 1 for device CG1 and n = 2 for CG2

y.yyEzpp<CR><LF>

e.g.: 1.53E-06<CR><LF>

where, y.yy = mantissa, z = sign of the exponent +/and pp = the exponent

When IG is off: 9.90E+09

y.yyEzpp<CR><LF>

e.g.: 1.53E+02<CR><LF> When CG is not connected:

9.90E+09

When CG is over ranged:

9.90E+09

PCS<CR> <LF>

e.g.: PCS<CR><LF>

x,x,x,x,x,x<CR><LF>

e.g.: 1,1,0,0,0,0<CR><LF>

Relays 1 and 2 are energized; order is Relay No.1,2,3,4,5,6 from left to right.

PCS_B<CR> <LF>

e.g.: PCS_B<CR><LF>

x<CR><LF>

e.g.: C<CR><LF>

The Latin alphabet character "C" corresponds to binary 01000011 or, 43hex, which represents relay 1 and relay 2 are energized (ON). Note that the positions of the relay order in the returned code character are reversed from the long form as described for the READ PCs in long form command above.

In binary form, the order is Relay No.6, 5, 4, 3, 2, and 1 as read from left to right.

PCS_n<CR> <LF>

e.g.: PCS_1<CR><LF>

s<CR><LF>

where, s=state of relay: 1 = ON; 0 = OFF

e.g.: 1<CR><LF> (PC Relay 1 is energized, or 0 when not)

IGn_ON<CR> <LF>

e.g.: IG1_ON<CR><LF>

where,

OK<CR><LF>

e.g.: OK<CR><LF>

When IG is already ON: INVALID

n = 1 = fil1, 2 = fil2

(continued)

tinb42e1 (2018-05) VGC083C.om 65

COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES

IG OFF Turn specified IG filament

OFF

9.5 RS485 GP 307 and 358 Protocol

COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES

READ IGn or, READ IG

READ CGn Read the current CG

READ PCs long form Read the current PC setpoint

READ PCs binary form

READ individual PC Read the current individual

Read the current IG pressure in units of Torr only

pressure in units of Torr only

status

Read the current PC setpoint status

PC setpoint status

Table "RS232 GP 307 and 358 Protocol" (concluded)

IGn_OFF<CR> <LF>

e.g.: IG1 OFF<CR><LF>

where,

n = 1 = fil1, 2 = fil2

OK<CR><LF>

e.g.: OK<CR><LF>

When IG is already OFF: INVALID

NOTES:

1. <CR> is a carriage return (0x0D).

2. <LF> is a line feed (0x0A); this is the terminator character.

3. The '_' used in certain defined commands represent a space character. Space characters may be omitted from commands.

4. GP 307 and 358 protocol response strings are variable length.

5. Hardware handshake controls do not exist on VGC083C (e.g., RTS, CTS, DTR).

RS485 protocol compatible with the GP Series 307 and 358 VGC is as defined in the following table. Please see the qualifying notes listed at bottom of table.

Table "RS485 GP 307 and 358 Protocol"

#xxDS_IGn<CR>

e.g.: #01DS IG1<CR>

where, n = 1 = fil1, 2 = fil2

or

DS_ IG<CR> <LF>

y.yyEzpp<CR>

e.g.: 1.53E-06<CR>

where, y.yy = mantissa, z = sign of the exponent +/- and pp = the exponent

When IG is off: 9.90E+09

e.g.: DS_ IG1<CR><LF>

#xxDS_CGn<CR>

e.g.: #01DS CG1<CR>

where,

n = 1 or 2 (CG1 or CG2)

y.yyEzpp<CR>

where, y.yy = mantissa, z = sign of the exponent +/- and pp = the exponent

e.g.: 1.53E+02<CR>

When CG is not connected:

9.90E+09

When CG is over ranged:

9.90E+09

#xxPCS<CR>

e.g.: #01PCS<CR>

x,x,x,x,x,x<CR>

e.g.: 1,1,0,0,0,0<CR> (Relays

1 and 2 are energized; Relays 3 6 are not energized)

#xxPCS_B<CR>

e.g.: #01PCS B<CR>

x<CR>

e.g.: C<CR> (where ‘C’ is the Unicode character C, expressed as 01000011 in binary notation or 43 hexadecimal)

#xxPCS_x<CR>

e.g.: #01PCS_1<CR><LF>

x<CR>

e.g.: 1<CR> (where ‘1’ indicates PC 1 is energized; 0 when not)

(continued)

66 tinb42e1 (2018-05) VGC083C.om

Table "RS485 GP 307 and 358 Protocol" (concluded)

COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES

IG ON Turn specified IG filament

ON

#xxIGn_ON<CR>

e.g.: #01IG1 ON<CR>

where,

OK<CR>

e.g.: OK<CR>

When IG already ON: INVALID

n = 1 = fil1, 2 = fil2

IG OFF Turn specified IG filament

OFF

#xxIGn_OFF<CR>

e.g.: #01IG1 OFF<CR>

n = 1 = fil1, 2 = fil2

OK<CR>

e.g.: OK<CR>

When IG already OFF: INVALID

NOTES:

1. <CR> is a carriage return (0x0D). This is the terminator character.

2. The '_' used in certain defined commands represent a space character. Space characters may be omitted from commands.

3. GP 307 and 358 protocol response strings are variable length.

tinb42e1 (2018-05) VGC083C.om 67

10 Service

10.1 Calibration

10.2 Maintenance

10.3 Troubleshooting Operation

Indication Possible Cause Possible Solution

Display on VGC083C controller indicates OFF

Displayed pressure appears very different from expected pressure

Sensor has been dropped causing

Gauge is contaminated Clean or replace sensor

Leak in the vacuum system Re-check for leak in the system. Check

Incorrect Sensitivity or CAL FACTORS Ensure correct values programmed

Displayed pressure is significantly lower than expected pressure

Incorrect Sensitivity and CAL FACTORS Ensure correct values programmed

Gauge cannot be activated (unable to turn anode voltage on)

Chamber pressure higher than

Gauge will not start at low pressure Pressure is too low to initiate discharge Repeat step to activate sensor

Research Screen shows anode Voltage is present but total current stays at zero

Every INFICON module is calibrated prior to shipment using nitrogen. Care should be exercised when using gases other than nitrogen (N regarding the use of gases other than N

/air).

2

) / air (see previous sections

2

Periodic performance checks may be done by comparing the vacuum gauges to a known reference standard. When using the transducer in gases containing contaminants periodic cleaning of the cold cathode sensor is recommended. Refer to the Operating Manual of MAG050 / MAG060 for such cleaning instructions.

No power Check cable connections and verify that

power is being supplied

Sensor not in the proper location to measure system pressure

The process gas is different from the gas

Ensure the sensor is located in appropriate location

Apply gas correction factor if applicable (Nitrogen) used to calibrate the MAG050 / MAG060

Replace the cold cathode sensor mechanical damage

that all metal seals are used when

operating below 1.00 × 10-7 Torr

The gauge sensor is contaminated Clean or replace sensor

Pressure exceeds value programmed for

Decrease pressure below required value OVER PRESSURE in the SETUP IG menu

Decrease chamber pressure below

value programmed for OVER

5.00×10

-3

Torr

PRESSURE in the ION GAUGE menu

Increase HV TIMEOUT to allow more

time for sensor activation

Increase pressure

Defective electronics Repair or replace electronics

68 tinb42e1 (2018-05) VGC083C.om

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69

10.7 Cleaning the VGC083C

11 Repair

general, your system base pressure may be relatively stable (assuming no leaks have developed and that the vacuum pump is operating at normal pumping capacity). The base or ultimate pressure of your vacuum system may be a good pressure level to periodically check and record the readings displayed in the RESEARCH Screen.

For cleaning the outside of the unit a slightly moist cloth will usually do. Do not use any aggressive or scouring cleaning agents.

Return defective products to your nearest INFICON service center for repair.

INFICON assumes no liability and the warranty is rendered null and void if repair work is carried out by the end-user or by third parties.

12 Accessories

Power supply

Rack mount adapter

Cables 250 °C MAG050, MAG060

Cables 80 °C MAG050, MAG060

Cables 50 °C PEG050

Ordering number

Power supply to VGC083C (no power cord included 1)) 399-711

1)

The conventional IEC60320 AC receptacle allows use with any

user supplied AC mains power cord set available worldwide.

Ordering number

Rack mount adapter for 19" 2U for one VGC083C 399-714

Rack mount adapter for 19" 2U for two VGC083C 399-715

Ordering number

Cable 3 m / 10 ft, 250 °C, MAG050, MAG060 399-830

Cable 8 m / 25 ft, 250 °C, MAG050, MAG060 399-831

Cable 15 m / 50 ft, 250 °C, MAG050, MAG060 399-832

Ordering number

Cable 3 m / 10 ft, 80 °C, MAG050, MAG060 399-820

Cable 8 m / 25 ft, 80 °C, MAG050, MAG060 399-821

Cable 15 m / 50 ft, 80 °C, MAG050, MAG060 399-822

Ordering number

Cable 3 m / 10 ft, 50 °C, PEG050 399-580

Cable 8 m / 25 ft, 50 °C, PEG050 399-581

Cable 15 m / 50 ft, 50 °C, PEG050 399-582

70 tinb42e1 (2018-05) VGC083C.om

13 Storage

14 Disposal

Electronic components.

Inappropriate storage (static electricity, humidity etc.) may damage electronic components.

Store the product in an antistatic bag or container. Observe the relevant specifications under Technical Data (→  8).

Caution

Separating the components

Electronic and non-electronic components

WARNING

Substances detrimental to the environment.

Products or parts thereof (mechanical and electric components, operating fluids etc.) may be detrimental to the environment.

Please dispose of such materials in accordance with the relevant local

After disassembling the product, separate its components in accordance with the following criteria:

Such components must be separated according to their materials and recycled.

regulations.

tinb42e1 (2018-05) VGC083C.om 71

EU Declaration of Conformity

We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the following directives:

Product

Part numbers

Standards

Manufacturer / Signatures

• 2014/30/EU, OJ L 96/79, 29.3.2014

• 2011/65/EU, OJ L 174/88, 1.7.2011

Vacuum Gauge Controller

VGC083C

399-702

Harmonized and international/national standards and specifications:

• EN 61000-6-2:2005

• EN 61000-6-4:2007 + A1:2011

• EN 61010-1:2010

• EN 61326-1:2013; Group 1, Class A

INFICON AG, Alte Landstraße 6, LI-9496 Balzers

Dr. Benhard Andreaus Director Product Evolution

(EMC Directive; Directive relating to electromagnetic compatibility)

(RoHS Directive; Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment)

(EMC: generic immunity standard for industrial environments)

(EMC: generic emission standard for industrial environments)

(Safety requirements for electrical equipment for measurement, control and laboratory use)

(EMC requirements for electrical equipment for measurement, control and laboratory use)

Markus Truniger Product Manager

72 tinb42e1 (2018-05) VGC083C.om

Notes

tinb42e1 (2018-05) VGC083C.om 73

LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700

Original: English reachus@inficon.com

t i nb42e1

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Inficon VGC083C Operating Manual

Specifications and Main Features

Frequently Asked Questions

User Manual