Inficon VGC083B, VGC083A Operating Manual

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Informa

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2

tinb29e

(2016-11) VGC083A_B.

m

Liability and Warranty

NOTICE

Identifies information that is critical for successful application and understanding of
the product.

SHOCK HAZARD

Labels may be located on or inside the device to alert people that dangerous
voltages may be present.

INFICON assumes no liability and the warranty is rendered null and void if the end­user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.) on the product

• use the product with accessories not listed in the corresponding product docu-

mentation.

tinb29e1 (2016-11) VGC083A_B.om 3

Contents

Product Identification 2
Validity 2
Important User Information 2
Liability and Warranty 3

1 Introduction / General Information 6

1.1 VGC083A 6

1.2 VGC083B 7

2 Technical Data 8

3 Important Safety Information 11

3.1 Safety Precautions - General 11

3.2 Safety Precautions - Service and Operation 11

3.3 Electrical Conditions 12

3.3.1 Proper Equipment Grounding 13

3.3.2 Electrical Interface and Control 13

3.4 Overpressure and use with hazardous gases 13

3.5 Gases other than Nitrogen / air 13

4 Installation 15

4.1 Mechanical Installation - Controller 15

4.1.1 Panel Mount 15

4.1.2 Rack Mount 15

4.1.3 Mechanical Installation - Ionization Gauge 17

4.1.4 Mechanical Installation - Convection Gauge 17

4.2 Electrical Installation 18

4.2.1 Grounding 18

4.2.2 Installation 19

4.2.3 Connecting the Ionization Gauge Cable 19

4.2.3.1 Standard Nude and Glass IG Cable 20

4.2.3.2 Bakeable Nude IG Cable 21

4.2.3.3 Standard IG Cable Connector Pin Out 22

4.2.4 Connecting the PGE050 - connectors labeled "2" and "3" 23

4.2.5 Power Connection 24

4.2.6 Relay Connection 24

4.2.7 Analog Output Connection 24

4.2.8 Analog Input Connection (Capacitance Diaphragm Gauges, etc.) 24

4.2.9 Digital I/O Connection 25

4.2.10 RS232 / RS485 Serial Communications Connection 26

5 Operation - IG and CG 28

5.1 IG Emission Current 28

5.2 IG Degas 28

5.3 IG Filament Material Selection / Venting the Chamber 28

5.4 IG Over Pressure Shut Down 29

5.5 IG Over Temperature Shut Down 29

5.6 Convection Gauge (CG) Initial Setup 30

6 Setup and programming 31

6.1 Applying Power 31

6.2 Front Panel Display 31

6.3 User Interface Basics 32

6.4 Factory-Set Default Parameters 32

6.5 Programming 34

6.5.1 SETUP UNIT 34

6.5.2 ION GAUGE 35

6.5.3 ION GAUGE 40

6.5.4 RELAYS 40

6.5.5 Analog Output 42

6.5.6 SERIAL COMM 47

6.5.7 DISPLAY 47

4

tinb29e1 (2016-11) VGC083A_B.om

7 Analog Output Charts & Equations (Nitrogen/Air Only) 49

7.1 Analog Output wide range measurement for IG - CG1 0.5 - 7V

(Nitrogen / Air only) 49

7.2 Analog Output for IG LOG N - 10 (Nitrogen / Air only) 50

7.3 Analog Output for IG LOG N - 11 (Nitrogen / Air only) 51

7.4 Analog Output for IG LOG N - 12 (Nitrogen / Air only) 52

7.5 Analog Output for IG 1.8 - 8.7 V (Nitrogen / Air only) 53

7.6 Analog Output for IG LINEAR (Nitrogen / Air only) 54

7.7 Analog Output for CG1 or CG2 1 - 8 V (Nitrogen / Air only) 54

7.8 Analog Output for CG1 or CG2 0 - 7 V (Nitrogen / Air only) 56

7.9 Analog Output for CG1 or CG2 NON - LIN (Nitrogen / Air only) 57

7.10 Analog Output for CG1 or CG2 LINEAR (Nitrogen / Air only) 59

8 Using the Gauge with Different Gases 60

8.1 Ion Gauge Display Correction Factors for Selected Gases 60

8.2 Effects of Different Gases on Convection Gauge Display 61

8.3 Effects of Different Gases on Analog Output 64

8.3.1 Ion Gauge Analog Output Correction Factors for Selected Gases 64

8.3.2 IG - CG1 0.5 - 7V Analog Output Correction Factors for Selected Gases 64

8.3.2.1 IG-CG1 0.5 - 7V Analog Output Correction Factors -

Ion Gauge Range 64

8.3.2.2 IG-CG1 0.5 - 7V Analog Output Correction Factors -

Convection Gauge Range 66

8.3.3 Convection gauge analog output for selected gases 66

8.3.3.1 CG1 1 - 8 V or CG2 1 - 8 V Analog Output Correction Factors -

Convection Gauge 67

8.3.3.2 CG1 0 - 7 V or CG2 0 - 7 V Analog Output Correction Factors -

Convection Gauge 68

8.3.3.3 CG1 NON-LIN or CG2 NON-LIN Analog Output Correction Factors -

Convection Gauge 69

9 Communication Protocol (Serial Interface) 70

9.1 Device Specific Serial Communication Info 70

9.2 INFICON RS232 / RS485 Command Protocol Summary 70

9.3 INFICON RS232 and RS485 Command Protocol Summary 71

9.4 RS232 GP 307 and 358 Protocol 74

9.5 RS485 GP 307 and 358 Protocol 75

10 Service 77

10.1 Calibration 77

10.2 Troubleshooting - IG Operation 77

10.3 Troubleshooting - IG Error Messages 78

10.4 Clearing Error Messages - IG 78

10.5 Research Screen 78

10.5.1 Research Screen (Diagnostic Display - IG) 78

10.6 Maintenance 80

11 Repair 81

12 Accessories 81

13 Storage 82

14 Disposal 82

EU Declaration of Conformity 83

For cross-references within this document, the symbol (→  XY) is used; for cross-
references to further documents listed under ‘Literature’, use is made of the symbol
(→  [Z]).

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tinb29e1 (2016-11) VGC0

83A_B.om

7

2 Technical Data

Measurement range

Display

Functionality

IG sensor control

IG remote input signals
(digital I/O)

Setpoint relays

VGC083A

with BAG050
with PGE050

VGC083B

with BAG051 or BAG052/053
with PGE050

2×10
1×10

4×10
1×10

-11

-4

-10

-4

…1×10-3 Torr

…1000 Torr

…1×10-3 Torr

…1000 Torr

Units of measurement Torr, mbar, Pa (user selectable)

Pressure indication LED - 3 independent pressure display

channels, 3 digit plus 2 digit exponent per
channel

Set-up & programming screen OLED - displays state of all setpoint relays, IG

emission current, error messages for fault
conditions

VGC083A

(IG)

powers & operates one INFICON BAG050
nude UHV EB-Degas B-A hot cathode or other
equivalent brands

, (CG) powers & operates up to 2 INFICON PGE050

VGC083B

(IG)

convection or Granville-Phillips
Convectron

powers & operates one BAG051 or BAG052 /
053 or other equivalent brands of glass or nude

2

I

R B-A hot cathode

®

, (CG) powers & operates up to 2 INFICON PGE050

convection or Granville-Phillips
Convectron

®

®

(GP)

®

(GP)

IG sensor on/off, degas on/off and emission current can all be controlled via front
panel soft-keys, remote input signals (digital I/O) or serial communications. IG sen­sor can also be automatically turned on/off using measurements from one of the
user selectable convection or alternate gauges.

IG sensor on/off, degas on/off and emission current can also be set by applying
momentary continuity to ground. Also the 9-pin D-sub remote input DIGITAL I/O
connector provides pin-pin compatible signals with the GP 358 controller as well as
compatible signals with the GP 307.

Number 6

single-pole, double-throw (SPDT), user as­signable to any of the gauges

Contact rating 5 A at 30 V (dc), 5 A at 250 V (ac), resistive

load

8

tinb29e1 (2016-11) VGC083A_B.om

Analog output

Analog input

Serial communications

Status output

IG (Ionization Gauge)

Ambience

Housing

IG analog output

Log-linear

0 … 10 V (dc), 1 V/decade, or

1.7 … 9.3 V (dc) (nominal 1.8 … 8.7 V (dc)),

0.8 V/decade

Linear 0 … 10 V (dc) (useable over 3 decades)

Combination IG + CG analog

Log-linear

CG analog output

Log-linear

0.5 … 7 V (dc), 0.5 V/decade

1 … 8 V (dc), 1 V/decade, or

0 … 7 V (dc), 1 V/decade

Linear 0 … 10 V (dc) (useable over 3 decades)

Non-linear analog S-curve 0.375 … 5.659 V (dc)

CDG one 0 … 10 V (dc) analog input signal from a

CDG when used as an alternate gauge to CG2,
or analog input from one of the following
INFICON modules: PGE300, PGE500,
BAG300

Protocol RS485 / RS232 - ASCII protocol

IG sensor on/off status message is displayed on the front panel, by serial commu­nications and by SPDT relay (DIGITAL I/O Connector) rated at 1 A at 30 V (dc)
resistive, or 1 A at 30 V (ac) non-inductive.

IG degas on/off status or IG error conditions are displayed on the front panel, by
serial communications and by an open collector transistor output (ground emitter)
rated at 40 V max. VCE, 50 mA IC max.

IG filament switching User selectable between filament 1 or 2 using

the front panel soft-keys or RS232 / RS485
serial comm

IG emission current 100 μA, 4 mA, 10 mA or automatic switching of

emission current (auto ranging)

IG degas 40 W, resistive

-3

IG overpressure protection
(turns ion gauge off at the
following factory default settings)

1 × 10
5 × 10
1 × 10

Torr at 100 μA emission current

-4

Torr at 4 mA emission current

-4

Torr at 10 mA emission current

Temperature

Operation
Storage

0 … +40 °C
–40 … +50 °C

Relative humidity 0 … 95, non-condensing

Altitude

Operating
Storage

max. 2500 m (8200 ft.)
max. 12500 m (41000 ft.)

Pollution degree II

Degree of protection IP20

Housing aluminum extrusion - black powder paint finish

tinb29e1 (2016-11) VGC083A_B.om 9

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ations

C083B

oltage

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IG & CG
Digital I/O
Serial com
RS23
RS48
analog I/O,
power

m (inch)

unications

setpoint rela

s,

20 …
power

gauge
9-pin

9-pin
9-pin

plugg
includ

8 V (dc), 20

reversal and

cable assem

-sub male

-sub female

-sub male

ble terminal

d)

W protected

transient ove

blies provide

lock (mating

against

-voltages

by INFICON

connectors

eight

C083A, V

C083B

.7 kg (1.7 lb.)

0

10

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3.1 Safe
Gen

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mation

INFICO
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3.2 Safe
Serv

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use this

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arranty.

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d.

of the unit is

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itute any part
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ust be remov

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re exceeds 5.

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uxiliary or co
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t be periodic
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ngsten. The

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ded to period

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tage directly
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he following

t.

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Torr, Dega

initiate

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.

by a quali-

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conductors

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or killed by

t high vol-

contact with
essel).

-

-

r

12

tinb29e

(2016-11) VGC083A_B.

m

3.3.1 Pro

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rmine the tru

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tures and co
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ssure of a v
ted baromet
elease and

the gas ins

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ent vessel i

nd possible
olume to pre
gases.

use with gas
r data tables.

calibrated fo

ses such as

factors to bo

measured p

easure pres

in an explos

s. Do not us
r gas mixtur

uld become a

erious injury

acuum gaug

ic pressure

ossible over

ide the gaug

nment. To

gases that if

to the atmo
damage to e
ssure above

es other than

direct reado

rgon (Ar) or
h the display
essure. This

ure of gases

ive atmosphe

the IG to m

s. The sens
n ignition sou
or death.

device is a

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ic, pyrophor

allowed to le

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uipment. N

local atmos

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tinb29e1 (2016-11) VGC0

83A_B.om

13

eththte

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WARNIN

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e gauge nor
mperature c

a

nd gas mixtur

o

r death.

! Do not us

able gases,

explosive or

ally operate

uld exceed t

e. This could

the PGE050
apors or fum

combustible

at 125 °C, b
e ignition te

cause an exp

in an explosi

s. Do not us

ases or gas

t if malfuncti

perature of c

osion which

e atmospher

the PGE050

ixtures. The

n should occ

rtain combu

ould result in

or in the pre

to measure

sensor wire i

r, the wire

tible gases

serious injur

-

14

tinb29e

(2016-11) VGC083A_B.

m

4 Installation

4.1 Mechanical Installation ­Controller

4.1.1 Panel Mount

Procedure

The unit is intended for indoor use only. The unit is offered as a space saving half
rack design. It may also be used as a bench top device or easily installed in an
instrument panel. Optional EIA-standard rack mount panels are available for either
full rack or dual, side-by-side rack mount installation. When mounting multiple units
in your rack mount enclosure or mounting the unit below other electronic equip­ment in your rack, allow at least 1U of space (1.75 in., 45 mm) between the units to
ensure adequate ventilation.

 Make a cutout in your rack panel or instrument control panel as shown in

the drawing below. Be sure to allow clearance behind the panel for the in­strument as well as connectors and cables at the back of the instrument.
Optional EIA-standard, 19-inch, 2U height rack mount panels are available
from INFICON. The optional rack mount panels are provided with panel cut­outs and mounting holes to allow efficient mounting of your VGC083 unit.

 Drill four guide holes on each side of the panel cut out (two on each side)

with dimensions as shown in the panel cut-out drawing above.

 Slide the unit into the panel hole cut-out. Guide the four studs on the back of

the unit front panel face plate thru the four holes next to the panel cut-out.

 Use four # 10-32 Hex Nut (provided with instrument) to tighten the unit to

the panel.

4.1.2 Rack Mount

tinb29e1 (2016-11) VGC083A_B.om 15

Optional EIA-standard 19-inch wide, 2U height rack mount panels available from
INFICON (→  81):

Single cut-out panel

All dimensions in inches.

Single cut-out panel

All dimensions in inches.

The single cut-out and dual cut-out rack mountable panels shown above are availa­ble from INFICON. Panel color matches the front panel of VGC083 units. Screws
for mounting to rack enclosure are included.

16

tinb29e1 (2016-11) VGC083A_B.om

4.1.3 Mec

z

CVGC

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4.1.4 Mec

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NOTIC

BA

Mount t
ure. Lo
ween y
pressur
may als

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mount t
conden

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Vibratio
chanica

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or in a

For ele
vacuu
proper
lic-type

Fittings
installat

Use all
pected

For mo
the Op

Mount t
or restri
proces
change

Mounti
and co
cooling,

Mount t
reading
1 Torr,

or

G051

he ionization

g or restricte
ur process c

changes. M

o cause mea

ization gauge
he gauge wit

ation collecti

ount the ion
ns may caus
l stress to co

he ionization

puttering sys

trical safety

chamber. W

rounding. D

flange clamp

Flanges - foll

ion and use.

metal vacuu

o be below 1

e detailed inf

rating Manu

he PGE050a

cted, small di

chamber an

.

g the PGE05
trol instability

such as hea

he PGE050w

errors may o

ounting pos

he VGC083
B-degas Ba

rands of equ

BAG05

auge as clo
, small diam

amber and t

unting the io

urement and

can be moun
port down to

g in the gau

zation gauge

unstable rea

ponents in t

auge near io

em.

urposes the

en using KF

not attempt t

.

w the fitting/

fittings with

00 × 10-7 Tor

rmation abo

l for the PGE

close as po

meter tubing

the gauge.

too close to

. Do not mou

ers or air con

th its main ax

cur above 1

tion has little

can operate

ard-Alpert h

ivalent nude

, BAG053

e as possible

ter tubing wil
e gauge. Thi

nization gaug

control insta

ed in any ori
help minimiz
e.

where it will

ings, measu

e ionization

n or electron

ousing of the

langes, meta

modify your

lange manuf

etal seals w

(1.33 × 10-7

t the PGE05

50.

sible to the p

will create a

his may caus

gas source

t the PGE05

itioning vent

is horizontal (

orr if the uni

o no effect.

one INFICO

t cathode ion

HV EB-deg

The VG
one INFI
or one B
enclose
hot cath
or other
gauges.

to the pressu

l create a pre

may cause

e too close to

ility.

ntation, how

the effect of

e subjected t

rement errors

auge.

ources such

gauge must
l clamps mus
flange in ord

cturer's reco

en operating

mbar, 1.33 ×

convection

essure you

ressure diffe

e a delay in r

inlet may als

near a sourc
.

see diagram

is not mount

BAG050 nu

zation gauge

s B-A gauge

083B can op

ON BAG05

G052/053 gl

I2R Bayard-

de ionization

rands of equ

re you want t

sure differen
delay in res

a gas source

ver, if possib
any particles

excessive v

and possible

as an electro

e grounded t

be used to e

r to use non-

mendations

pressures ar

10-5 Pa).

auge, please

ant to measu

rence betwee

sponse to pr

cause meas

of heating o

elow). Press
d horizontall

e UHV

or other

.

rate

nude

ass

lpert

gauge

ivalent

meas­e bet­onse to

inlet

e,
or

bration.

me-

beam

o the
nsure
metal-

or

ex-

refer to

e. Long

n your

ssure

rement

r

re
. Below

tinb29e1 (2016-11) VGC0

83A_B.om

17

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o

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o

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oth

h

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n

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a

4.2

4.2.1

lectrical

Groundin

Installati

g

n

ount the PG

rticles or co

o not mount t

ns may cau

ress to comp

F

langes/ Fittin

f

llowing:

-

NPT fittings:

a

nt compound

raps of pipe t

g

uge into the

e gauge.

t

Be sure t

g

rounded to pr

fi

tings, especi

p

roduce a goo

c

nnected to.

easurement

t

earth groun
at you conne

e

rth ground c

e green colo

t

050 with por

densation fr

he PGE050

e unstable re

onents in the

s - follow the

hen connec

or wrap the t

hread seal ta

gauge port.

e vacuum g

otect personn

lly those wit

electrical co
se a ground
evice if nece

via a good q

ct a separate

nnection an

ed screw pro

down, if pos
m collecting i

here it will b

dings, meas

PGE050.

manufacture

ing the devic
readed porti

e such as P

o not use a

uges and the

el from shoc

O-rings whe

nnection bet

lug on the va
ssary. The V
uality equipm

12-AWG eart

the location

ided) on the

ible, to help

the gauge.

subjected to

rement error

's recommen

using a NP

n of the tubin

FE (Teflon®)

rench or othe

rest of your v

and injury. B
not used wit

een the gaug

uum connect

C083 control
nt earthing c

ing conduct

arked with t

ack panel of

inimize the

excessive vi

s and possibl

ations and n

fitting, apply

with one-an
tape and han
r tool which

acuum syste

aware that
h metal clam
e and the ch

ion flange of
unit should

onductor. It i

r between a

e earth grou

the VGC083.

ffect of any

ration. Vibra-

mechanical

te the

a thread seal

d-a-half to tw

tighten the

ay damage

are properl
ome vacuum
s, may not

mber it is
he pressure
e connected

encouraged

nown facility

d symbol (vi

18

tinb29e

(2016-11) VGC083A_B.

m

4.2.2 Inst

a

e

n

b

e

i

o

e

m

V

i

e

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e

llation

A good,
necting
on the

recommend

or disconnec

ack panel of

d practice is

ing it. The el

he device as

o remove po
ctrical conne
shown below

er from any

tions for the

.

able prior to

GC083 are l

on­cated

4.2.3 Con
Gau

necting th
ge Cable

Ionizatio

Good, r
ing or d
brands
propriat
low) fro
of the
easy or
low-lev
cable w
the BN

CAUTI
trolled
disconn
options
equipm

commended

isconnecting i

f equivalent

e length of io

the ion gau

GC083 label

entation of th

l ion current

ith the BNC c

connector l

N! When c

y the VGC08

ect power to

to devices or

nt damage o

practice is to
t. With INFIC

auges) conn

gauge cabl

e head on t

d "1". The cir

mating con

ignal from th

nnector at th

beled "COL".

anging or m

, you must fi
he VGC083b
removing/ins

r possible inj

remove pow

Ns nude B-

cted to your
(see various
e vacuum ch

ular plastic c

ectors. The

ion collector

e controller e

king cabling

st turn power

fore either c

alling option

ry to personn

r from any c

ionization g
vacuum cha
IG cable con

mber to the

onnector (CP

NC connecto

electrode of

d of your ca

onnections t

to the VGC0

anging cable

ards in the V

el.

ble prior to c
uge head (or

ber, connect

igurations sh

ack panel co

) is keyed t

r is for conne

he head. The

le is connect

any device c

3 OFF. Failu

connections

C083 may r

nnect­other
an ap-

wn be-

nector

allow

ting the

coaxial

d at

on­re to

rom

sult in

tinb29e1 (2016-11) VGC0

83A_B.om

19

1

B

VGC083A:

B

d

A

e

0

a

e

G

P

P

G

mvayo

y

→BAG

b

→

m

n

q

G

G

e

c

G

c

o

a

m

e

n

u

g

n

b

N

a

a

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d

y

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e

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e

n

n

o

1

G

s

S

t

@

i

y

o

VGC083B:
BAG052,

ba

BAG050 c

BAG051,

AG053 cabl

AG051 nud

kable cable 2

ble

IG

0 °C

art numbers

baka

art numbers

le cable 200

BAG

051 nude IG

 81.

050 nude I

 81.

50 °C

C

able

BA

BAG052

050 nude IG

50 °C

/ 053 glass I

50 °C

able

cable

4.2.3.

Standar

IG Cable

VGC083

Nude and

NOTE

lass

I

Cables not

anufacturers

rious versio
u have any

h

ads using I

F

or the nude I

scribed in th

d
s

stem, conne

anufactured

may be speci

s of the B-A i
uestions reg
cables not

, connect th

e previous pa

t the head e

by INFICON

fically constr

nization gau

rding the co

anufactured

IG cable (P

ge. After inst

d of the IG c

may differ in
cted for the t

e head. Con

nections to b

y INFICON.

→  81) at t
lling the nud

ble as show

BAG050
connecti

esign. Cable
pe of DEGA
act reachus

made to ion

e VGC083A
IG head on
below.

ude IG head

n

from certain

used in

inficon.com i

zation gauge

controller as

our vacuum

cable

f

20

tinb29e

(2016-11) VGC083A_B.

m

VG

k

e

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e

e

k

t

C

h

e

v

n

i

h

n

i

h

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d

m

d

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a

t

h

a

t

h

→

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h

h

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a

8

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s

A

v

s

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A

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U

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o

a

C

u

r

B

w

s

t

C083B

For the
describ
system,

For the
describ
system,

glass IG, con

d in the prev

connect the

nude IG, con

d in the prev

connect the

ect the IG c

ous page. Af

ead end of t

ect the IG c

ous page. Af

ead end of t

ble (PN → 

er installing t

e IG cable a

Gl

ble (PN → 
er installing t

e IG cable a

81) at the VG
e glass IG h

shown belo

ass IG head

81) at the VG
e nude IG h

shown belo

C083B contr

ad on your v
.

able connect

083A contr

ad on your v

.

ller as

cuum

on

ller as

cuum

4.2.3.2 Ba

VG

eable Nud

C083A: BA

IG Cable

050

The ba
connec
Bakeab
for 50 °
with eit
from th

When u
or equi

eable nude I

ion to the nu

le Cable wirin

ambient te
er single or
VGC083A c

sing the bake

alent Nude E

cable (PN

e gauge pins

g information

perature. All

ual filament i

ntroller.

able IG cable

B- degas IG

B
co

 81) is pro

(BAG050 pin
below). All ot
IG cables pro

n gauges an

(PN →  81)

ead accordin

G051 nude I

nnection

ided with pu

s) and is bak

er cables lis

vided by INFI

filament swi

connect the

to wire colo

head cable

h-on sockets
able to 200 °

ed above are

CON can be

ching is cont

GC083A to

s listed belo

for

(See

rated

sed

olled

AG050

.

B

G050 nude

eq

uivalent B-A

HV EB-dega

auge pin pat

IG or

ern

tinb29e1 (2016-11) VGC0

83A_B.om

21

3

B

d

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B

a

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i

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o

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r

F

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e

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o

hanging cabl
not only bad

u

er of this eq

s

tuation, equi

s from one d

electronics h

ipment, may

ment damag

evice to anot

ndling proce

lead to erron

and possibl

er when pow

ure, it is not
ous measure
operator inju

er is applied t

dvised and,

ment results,

ry.

the module
f done by the
a hazardous

VGC083

: BAG051

CAUTIO

ent before c

he bakeable

c

nnection to t

akeable Cabl

r 50 °C ambi

ith either sin

om the VGC

hen using th

auge accordi

! It is always

nnecting or d

ude IG cabl
he nude gau
e wiring infor

nt temperatu
le or dual fila
83B controlle

bakeable I

ng to wire col

good industr

isconnecting

(PN →  81

e pins (BAG

ation below)

re. All IG cab

ent ion gau

r.

cable conne

rs listed bel

practice to t

ables.

is provided

51 pins) and i

All other cab

es provided

es and filam

t to BAG051

w.

rn off power

ith push-on s

s bakeable t

les listed abo

y INFICON c

nt switching i

or equivalent

o the instru-

ckets for

200 °C (See

e are rated
n be used
controlled

2

nude I

R B-A

4.2.3.

Standar

Connect

I2R Deg

IG Cable

r Pin Out

ase View
BAG051
s - single fila

BAG051 or e

ent

uivalent nud

hanging cabl

i

not only bad

u

er of this eq

tuation, equi

s

CAUTIO

ent before c

he informatio

nnection of

lready have i

ith INFICON

c

ble with the

he pin-out of

auge cables

bles such as

e control unit

c

ntact no. 7 f

s

itch filament

ble and phy

d

sired to swit

I2R (resistiv

s from one d

electronics h

ipment, may

ment damag

! It is always

nnecting or d

presented i
B-A type ion
stalled on yo

roduct desig

GC083.

he CPC con

s shown belo
those for us

, e.g., the VG

r FIL2. This t

s from the co

ically remov

h filaments.

degas) B-A

evice to anot

ndling proce

lead to erron

and possibl

good industr

isconnecting

this section i

ization gauge

r vacuum ve
s, and you

ector used o

w. When usin

with controll

083, there i

pe of cable

trol unit - the

, rotate and r

Base

BAG0

I

R Degas - d

auge pin pat

er when pow

ure, it is not
ous measure
operator inju

practice to t

ables.

intended to

head or an I

sel which m

ish to continu

Granville-Ph

INFICON t

rs capable of
an additiona
nd control un

e is no need

connect the

iew

51

al filament

tern

er is applied t

dvised and,

ment results,

ry.

rn off power

address the i

cable that y

y not be dire

e using eithe

illips® and IN

o-filament s
switching th
l pin / socket
it will allow th
to go to the h

able connect

the module
f done by the
a hazardous

o the instru-

stallation /
u may

tly compatibl

that head /

ICON Ion

itch capable

filament fro

onnection at

user to

ad end of th

r when it is

22

tinb29e

(2016-11) VGC083A_B.

m

4.2.4 Connecting the PGE050 ­connectors labeled "2"
and "3"

The view shown below is the CPC connector end of the IG cable:

VGC083 Connector End of Cable View

Pin/Socket

Contact

Description
(compatible with Granville-Phillips® ion gauge cables)

Number

1 Shield, chassis ground

7 FIL 2 (this contact is only present on dual filament IG cables

available from INFICON)

8 FIL COM

11 FIL 1

13 Grid Source (supply)

14 Grid return Used only for I2R degas design using the VGC083B

Not used for VGC083A EB-degas design

PN 399-580 … -582 are a custom cable assemblies provided in different lengths
from INFICON for connecting the VGC083 to INFICON PGE050 gauge or MKS
Instruments / Granville-Phillips® 275 Convectron® vacuum gauge sensor. Connect
the DE-9 D-subminiature connector to VGC083 and PGE050 connectors to "2" or
"3".

For your reference, the wiring chart for the PGE050 cable provided by INFICON is
shown below. In addition to INFICON provided standard cable assembly lengths,
INFICON will provide custom length cable assemblies upon request.

VGC083

pin no.

1

2

3

4

5

6

7

8

9

connects to PGE050 gauge pin no.

(INFICON molded, custom connector)



















NC

cable shield

3

3

2

5

1

1

NC

tinb29e1 (2016-11) VGC083A_B.om 23

4.2.5

o

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o

e

e

r

T

o(P

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A

e

R

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A

O

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e

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t

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h

h

t

t

a

aAna

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f

e

V

o

d

C

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p

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a

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s

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u

o

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e

1

R

0

a

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s

8

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n

n

t

a

n

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3

a

B

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e

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1

p

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o

9

a

y

o

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c

g

aCo

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o

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t

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d

o

o

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g

"

4.2.6

Power C

Relay Co

nnection

nection

he VGC083 r

e

ch 2-contact

the power c

t

N →  81).

Power

(

ontacts)

+

–

total of six s

p

luggable term

r

lay contactor

LY6. Each re

a

nd I (commo

LY1 thru RL

(contacts)

=

≠

I

quires an in

pluggable te

ntactors. Op

Con

Power input

tpoint relays

inal strip mati

s. The VGC0

lay has a con

).

Y6

Rela

ut power of 2

minal strip m

ional power s

tact Descripti

(20 … 28 V (

ower ground

re provided

ng connector

3 back pane

act labeled =

Contact De

Relay #1 to

(NORMAL

Relay #1 to

(NORMALLY

#1 to Relay

0 … 28 V (dc

ting connect

pplies are al

n

c), 200 W)

y the VGC0
are provide

relay connec

(Normally Op

cription

Relay #6

OPEN)

Relay #6

CLOSED)

#6 (COMMO

, 200 W to o

r is provided

o available f

Anal

Con

3. Two each
for easy con

tors are mark

en), ≠ (Norm

Rela

)

erate. One
for connectio
om INFICON

g Output

nectors

-contact
ection to the

ed RLY1 thru

lly Closed)

Connectors

4.2.7

4.2.8

Analog O
Connecti

Analog In
(Capacita
Gauges,

utput

n

put Conn

nce Diaph

tc.)

ction

agm

total of three

gnals are pro

cuum gauge

a

re provided f

p

nel analog o

h

s a contact l

O1 , AO2, A

(contacts)

+

–

ne analog in

his input can

FICON vacu

ct mating plu

nalog input c

1. Each conn
put ground)

A1

(

contacts)

+

–

D

analog outpu
portional to t
s. Three eac

r connection

utput connec

beled + (an

O3

An

ut is provide

be accepted
um module s
ggable termin

ntactor. The

ector has a c

nd D (power

A

Analog In

D

ts are provid

e displayed p
2-contact pl

o the analog
ors are mark
log output sig

Contact D

log Output #

log Output G

(Signal

by the VGC

rom one cap

ries PGE300

al strip conne

GC083 bac

ntact labeled

etect).

ontact Descri

alog Input (S

ut Ground (

tect (power d

d by the VG

ressure for a

ggable termi

utput contac

d AO1, AO2

nal) and – (a

scription

to #3 (Signa

ound #1 to #

eturn)

83 for using

citance diaph

PGE500 or

tor is provid

panel analo

+ (analog inp

tion

gnal)

ignal Return)

tect)

083. These
y of the user

al strip matin
tors. The VG
and AO3. Ea

alog output

An

l)

s an alternat

ragm gauge

AG302. On

d for connec

input conne

ut signal) an

An

utput voltage
assigned

connectors

083 back

h connector

round).

log Output

nnectors

gauge to "2

r other
each 3-con­ion to the

tor is marked
– (analog

alog Input

C

nnectors

.

24

tinb29e

(2016-11) VGC083A_B.

m

When using a capacitance manometer / diaphragm gauge or INFICON modules
such as the PGE300, PGE500, BAG302 as an ALTERNATE GAUGE, the gauge
must be connected to the VGC083 as shown below. The alternate gauge must be
provided power from an auxiliary power supply capable of providing the power re­quired by the alternate gauge connected to the VGC083. The D contact is used in
this configuration to protect the IG from being turned on at high pressure in case
power to the alternate gauge is lost.

4.2.9 Digital I/O Connection

Signal Type A - Control Input
Signals

Signal Type B - Status Output
Signal

Signal Type C - Status output
Signal

The IG can be controlled manually using the front panel soft-keys, via remote input
signals using the digital I/O connector or RS232/RS485 commands. The VCG083
can also be configured so that the IG sensor on/off is controlled by using the pres­sure measurements from CG1, CG2 or the alternate gauge. If the user prefers di­gital I/O as the means of controlling the IG, various control input and status output
signals are available from the 9-pin D-sub male DIGITAL I/O connector. The
DIGITAL I/O Connector also provides pin-pin compatible signals with the GP 358
vacuum gauge controller as well as compatible signals with the GP 307.

The DIGITAL I/O Connector provides three different types of signals as listed
below:

The IG sensor on/off, degas on/off and emission current selection can be set by
applying momentary continuity to ground. This requires a momentary ground of
less than 0.4 V (dc) at 10 µA for 25 msec (minimum) be applied. After this, the
input must be allowed to float higher than 3.5 V (dc) for 105 msec (minimum) be­fore another low can be applied.

Input signal: Apply momentary continuity to ground to turn IG sensor on or off

Apply momentary continuity to ground to turn degas on or off

Apply momentary continuity to ground to switch Emission Currents
(100 μA or 4 mA)

The IG on/off status relay is also available as both normally open and normally
closed to indicate IG is on or off. This is an output signal to other external instru­ments to confirm IG filament is on or off. The IG on / off status relay is a single
pole, double-throw (SPDT) relay rated at 1.0 A, 30 V (dc) resistive or 1.0 A,
30 V (ac) non-inductive.

A degas status or an error condition output signal is also available from the
DIGITAL I/O Connector. If programmed for DEGAS STATUS, this can be used as
an output signal to other external instruments to confirm that degas is on or off. If
programmed for an error condition, this can be used as an output signal to other
external instruments to confirm whether any error conditions exist.

tinb29e1 (2016-11) VGC083A_B.om 25

4.2.10 RS232 /

n

t

r

S5T

T

E

m9 R

T

m

a

a

y

=

=

p

n

d

i

o

o

s

d

s

o

o

o

h

m

h

s

t

.

o

.

r

c

e

s

n

d

n

D

a

y

y

a

w

n

r

p

b

n

o

o

n

n

p

h

e

o

d

y

C

y

o

o

t

s

G

r

a

o

o

b

a

/

o

t

m

c

n

c

s

s

m

a

n

o

r

n

p

t

D

1

V

n

/

e

R

c

a

e

V

i

h

n

E

2

o

f

Commu
Connec

RS485 Se

ications

ion

ial

ignal: Open c

mA IC max.

ransistor on
ransistor off

Pin

Descri

no.

1 IG Se

2 Groun

3 Emiss

4 IG on/

5 IG on/

Relay

6 Dega

7 Groun

8 Dega

9 IG on/

Relay

ither RS232

ands to/from
pole) connec

S485 serial c

p

rted.

1

. RS485 wit

derived fro

2

. RS232 wit

the same a

3

. RS232 pro

Controllers

4

. RS485prot

Controllers

he RS232 se

ale to female

p

rt. DO NOT

s

me time. Th

c

tions at the

ollector transi

Degas on or
Degas off or

9-

in (DE-9P)

ption

sor on/off

d

ion Current

ff Status rel

ff status rela

open = IG on

on/off

d

/error status,

ff status rela

closed = IG o

r RS485 seri

the VGC083.

tors that allo

ommunicatio

address, sta

the INFICO

start and sto

s the RS485

ocol compati

col compatib

ial port is co

, wired "pin-t

onnect both

VGC083 ca

ame time. O

stor (ground

error conditi
no error con

-subminiatu

y common

- Normally

Low = degas

- Normally

n

l communica
There are tw
independen
ports. Four

t and stop ch

N BAG302 I

p characters,

rotocol.

le with the G

le with the Gr

figured to all

- pin" to be c
f the RS232

not provide

ly one or the

mitter) rated

n exists,

ition exists

re DIGITAL I

losed

n or error

pen

ions may be
DE9 (D-sub
cable conne

erial commu

racters and

protocol.

but no addre

anville-Phillip

nville-Phillip

w, for exampl

nnected fro

and RS485 c

oth RS232 a

ther as prog

at 40 V max.

0 Connectio

Signal

Type

A

A

B

B

A

C

B

used to send
miniature, sh

tions to the
ication proto

ommand/res

sing is used.

s Series 307

Series 307

e, a 9-pin ext

the VGC083

bles to the

d RS485 ser

rammed by t

CE,

s

Digital I/O

Connector

receive com-

ll size E,
S232 and
ols are sup-

onse syntax

The syntax is

nd 358

nd 358

nsion cable,

to your serial

GC083 at the

al communi­e user.

An extensio

may be use

serial port on

our PC serial

cable wired
to connect t

the VGC083

port (a conve

in-to-pin

e RS232

directly to

rter may be

DE-9 Con

user su

communica

ectors for co

plied cables

ion port – D

E9S (RS23

nections to

or serial

9P (RS485),

)

ecessary).

26

tinb29e

(2016-11) VGC083A_B.

m

o

c

E

c

E

S

d

D

u

3

E

D

)

u

3

E

a

c

u

c

C

C

C

9-c

ntact (DE-9

) D-submini

ture RS232

onnections

Socket

no.

1

2

3

4

5

6

7

8

9

Conne
AT TH

Pin

no.

1

2

3

4

5

6

7

8

9

Conne
AT TH

Description

No connect

Transmitte

Received

No connect

Signal Gro

No connect

No connect

No connect

No connect

t either RS2

SAME TIM

9-

pin (DE-9P)

Description

DATA A (–)

DATA B (+

No connect

No connect

No connect

Signal Gro

No connect

No connect

No connect

t either RS2

SAME TIM

ion

Data (OUT)

ata (IN)

ion

nd

ion

ion

ion

ion

2 or RS485

-subminiat

ion

ion

ion

nd

ion

ion

ion

2 or RS485

able to VG

re RS485 Co

able to VG

RS232

Connector

083 - DO NO

nnections

RS485

Connector

083 - DO NO

T CONNECT

T CONNECT

BOTH

BOTH

tinb29e1 (2016-11) VGC083A_B.om

27

5 Operation - IG and CG

5.1 IG Emission Current

5.2 IG Degas

5.3 IG Filament Material
Selection / Venting the
Chamber

Yttria coated iridium filament

100 µA (0.1 mA), 4 mA, and 10 mA are available settings of emission current for
the hot cathode ion gauge.

1) In clean applications and when operating at higher pressure ranges
(5.00 × 10

-6

Torr to 1.00 × 10-3 Torr) the 100 µA emission setting is preferred.

2) At lower operating pressures (1.00 × 10-9 Torr to 5.00 × 10-4 Torr) the 4 mA
emission setting should be used.

3) Many vacuum measurement equipment users prefer to use the 10 mA emission
current setting when making measurements in the UHV pressure regime (below

1.00 × 10

-8

to 10

-11

Torr).

4) When using a diffusion pump or other pumps that use fluids, there is a possibili­ty of the pump oil vapors entering the IG head. These vapors may form an
insulator on the internal components of the head which can lead to instability or
failure in controlling the emission. In this case, 4 mA and 10 mA emission
current may provide improved operating lifetime and measurement perfor­mance.

5) The emission current can also be set to automatically switch between 100 μA,
4 mA and 10 mA. This results in optimal and stable pressure readings over the
entire measurement range from low to high vacuum. For example, if an applica­tion requires that pressure measurements be performed by the ion gauge from
pressures lower than

-6

VGC083A: 5.00 × 10
VGC083B: 1.00 × 10

Torr up to 1.00 × 10-3 Torr

-6

Torr up to 1.00 × 10-3 Torr,

then the user may want to consider selecting the auto switching feature of the
emission current.

Electron bombardment degas (VC083A) or I2R resistive degas (VGC083B) is used
to rid a hot cathode ion gauge sensor of adsorbed gas. The intervals at which de­gas should be applied vary for each application. The low pressure measurement
performance of the head will normally improve after each degassing cycle.

• Degas can only be applied while the filament is turned on and operating.

• Ensure that the vacuum pressure is at or less than 5.00 × 10

-5

Torr before

attempting to initiate degas.

• Degas will automatically turn off after 10 minutes when using factory default
settings. Degas can be programmed for duration of 2 to 30 minutes.

• The VGC083 will continue to measure approximate pressure while degas is in
progress.

• Degas will automatically turn off if the pressure exceeds 1.00 × 10

-4

Torr during

the degas cycle, off but the filament will remain turned on.

• Degas can be interrupted by turning the IG filament off.

The choice of which filament to use is primarily dependent upon the process and
process gases the ion gauge will be used with. For general vacuum applications,
dual yttria coated filaments are offered for use with air and inert gases such as N2,
argon, etc. Optional dual tungsten filaments are available for use with gases that
are not compatible with yttria coated iridium filaments.

In most general vacuum applications, the yttria coated iridium filament is the best
choice.

Yttria coated iridium filaments typically operate at a lower temperature than tung­sten filaments and thus have a lower outgassing rate at UHV and lower chemical
reactivity with active gases. Yttria coated iridium filaments typically have a longer
operating life than tungsten filaments in clean applications.

28

tinb29e1 (2016-11) VGC083A_B.om

Tungsten filament

NOTICE

NOTE

5.4 IG Over Pressure Shut
Down

5.5 IG Over Temperature
Shut Down

The yttria coated filament can survive occasional accidental start attempts at at­mosphere in air, but the overall life of the filament may be shortened during each
occurrence. Good vacuum practice is to use a separate pressure gauge such as
INFICON's PGE050 convection gauge to know when to turn on the ion gauge fila­ment.

Typically, a bare tungsten filament is a better choice in those applications where an
yttria coated filament is quickly damaged due to the gas type in use. For example,
processes such as ion implantation may only use tungsten filaments. Be aware that
corrosive applications are hard on any filament and filament life will be shortened
while operating in such environments. Tungsten filaments are easily damaged by
exposure to air/oxygen during accidental system vents or if considerable quantities
of water vapor are outgassed during pump-down and bake-out. It is very important
to make sure the tungsten filament is turned off before bringing the chamber up to
atmosphere, especially if air is being used to vent the chamber. The use of pure N2
gas is highly recommended to vent or purge your vacuum chamber. Testing has
shown that tungsten filaments can withstand limited high pressure excursions when

is present.

only N

2

Venting with air or other gases containing oxygen can damage the tungsten fila­ments. If you try to turn on an ion gauge with tungsten filaments while it is sitting on
your desk exposed to room air, you will immediately damage or destroy the fila­ment beyond repair.

Do not use another gauge to automatically turn off the ion gauge when the ion
gauge (IG) filament in use is constructed of tungsten (yttria coated filament is ok).
The response time of other gauges may not allow for timely turn off of the tungsten
filament leading to filament damage. Always turn off the IG filament manually be­fore pressure is allowed to rise above 1.00 × 10-3 Torr.

Both types of filaments will suffer eventual damage if operated at high pressures.
The type and amount of damage at high pressure is dependent upon the length of
operating time, the pressure and the gas present.

The VGC083 is provided with factory set default values for over pressure shut
down. The IG will shut off automatically should the pressure reach or rise above
the pressure shut down values shown below:

Factory set IG overpressure shut down values

Emission Current Overpressure Shut Down

Torr mbar Pa

100 µA (0.1 mA) 1.00 × 10-3 1.33 × 10-3 1.33 × 10-1

4 mA 5.00 × 10-4 6.65 × 10-4 6.65 × 10-2

10 mA 1.00 × 10-4 1.33 × 10-4 1.33 × 10-2

An over temperature condition may result inside the VGC083 controller when using
an ion gauge cable longer than 50 ft. When this over temperature condition exits
and if degas is on, the controller will automatically turn off degas first. If the temper­ature inside the controller continues to climb, the controller will then turn off the IG
filament and an "OVER TEMP" message will appear on the programming & setup
screen. When this extreme condition exists, the VGC083 may need airflow around
it to prevent the over temperature shut down.

tinb29e1 (2016-11) VGC083A_B.om 29

5.6 Convection Gauge (CG)
Initial Setup

Setting Zero (SET VAC)

Setting Atmosphere (SET ATM)

NOTE

Two of the most important steps for the initial setup of the convection gauges are to
set zero (SET VAC) and set atmosphere (SET ATM) as described in the CONVEC
GAUGE section 6.5.3. This will ensure proper operation of the gauge and accurate
pressure measurements. The gauge is calibrated at the factory using nitrogen. Fur­thermore, the gauge is also installed in a certain orientation when calibrated at the
factory. Without setting zero and atmosphere after the gauge is installed in your
system, the gauge may not display the expected and correct pressures. This could
be caused by the fact that you may be using a different gas than Nitrogen such as
air to setup and calibrate the gauge (most commonly the case) and the gauge
orientation is different than the orientation used at the factory. As such, it is very
important to perform your own initial setup and calibration by setting zero and at­mosphere with the gauge installed in your actual system. Please note the following:

Setting zero optimizes performance of the gauge when operating at a low pressure
range of 1.00 × 10
higher than 1.00 × 10

-4

Torr to 1.00 × 10-3 Torr. If your minimum operating pressure is

-3

Torr, it is not normally necessary to set zero and thus set­ting atmosphere should be adequate. If you are able to evacuate your system to
below 1.00 × 10-4 Torr, it is always a good practice to check and set zero if neces­sary. See "SET VAC CG1" or SET "VAC CG2" in CONVEC GAUGE section 6.5.3.

Setting atmosphere is the most important step for a newly installed gauge. If you
prefer to use air to set atmosphere, vent your vacuum system chamber to expose
the gauge to the local atmospheric pressure (air) and set atmosphere to match
your known local uncorrected barometric pressure (air). This is the reading of
ambient air pressure you will expect if you were to vent and open your vacuum
chamber to the atmosphere surrounding the outside of your chamber. At sea level,
this pressure is usually near 760 Torr. At elevations above sea level, the pressure
decreases. Check your local aviation authority or airport web sites or your current
local weather conditions online to help find your local uncorrected barometric pres­sure if you do not have this information. See "SET ATM CG1" or "SET ATM CG2"
CONVEC GAUGE section 6.5.3.

Setting zero and atmosphere is normally required only once during the initial setup
and maybe checked by the user periodically. After power has been applied to the
gauge during the initial setup, allow five minutes for the gauge to stabilize (warm­up) before setting zero and atmosphere.

The information presented in sections 5.1 through 5.6, above, is intended as an
introduction to the programming capabilities of the VGC083 for use in controlling
the selectable parameters and functions of the BAG050 IG (VGC083A), BAG051,
BAG052/053 IG (VGC083B) and PGE050 heads.

30

tinb29e1 (2016-11) VGC083A_B.om

p

y

t

y

y

y

o

e

s

y

y

M

y

c

y

C

a

d

i

a

t

t

e

o

A

e

e

e

e

n

a

u

e

s

e

G

T

e

e

G

t

p

d

t

5

t

t

t

f

d

m

a

s

p

A

s

e

n

w

n

r

p

g

i

m

p

n

s

6 Setu

6.1 Appl

6.2 Fron

Displa
ment

Displa

Displa

and pr

ing Pow

Panel Di

- Pressure

- Units of

- Setup S

gramm

r

play

Measure-

easure

reen

ing

Before
the VG
nected

The VG

• d

• d

• d

A white
uremen
front pa

The VG
screen.
convec
cators,
screen.

ou turn on p

083 to the B
nd secured.

C083 provid

isplay repres

hea

(IG).

splay repres

(CG

1).

isplay repres

an

lternate gaug

LED is illumi
ts in Torr, mb
nel; millibars

C083 provid

This screen i
ion vacuum g

mission curr

wer to the V

G05x nude I
urn on pow

s three indep

nts pressure

nts pressure

nts pressure

e (CG2 or C

ated next to

r or Pa (the
nit is written

s an indepen

used for set

auges. Other

nt and selec

C083 for the

and PGE0

r by pressing

ndent front p

measuremen

easuremen

measuremen

2-ALT).

he selected e

ascals unit o

s mbar).

ent setup an

up, program
useful inform
ed IG filamen

first time, en

0 convection

the Power ke

anel LED dis

s from the B

s from the fir

s from the s

ngineering u

measure is

programmi
ing and ope
tion such as

t are also dis

ure the cable

gauges are c

y.

lays:

G05x hot ion

t convection

cond convect

it indicating

ritten as 'Pa'

g OLED setu
ation of the io
relay status i

layed in the

s from
on-

gauge

auge

on or

eas-

on the

n and

di­etup

tinb29e1 (2016-11) VGC0

83A_B.om

31

6.3

U

F

P

S

f

e

r

T

c

T

Vid

Tse

oseth

Trara"N

Tsc

s

p

u

a

r

a

n

r

e

c

"

r

s

c

o

A

G

G

U

S

e

k

s

s

s

s

p

a

s

e

,

a

o

=

F

d

e

o

a

8

w

s

s

k

p

t

h

u

a

n

s

V

]

R

A

s

o

8

e

r

s

s

e

O

m

a

t

n

u

S

1

e

n

W

E

K

n

t

n

e

h

C

U

o

e

ser Inter

ace Basi

s

he setup and

ramming-key

g

GC083 front

entify what f

o begin progr

lect the desi

a

cess the par

t

the previous

tting additio

e desired pa

programming

located belo

anel. During

nction each

amming, pre

ed menu and

ameters and

menu or pre

al parameter

ameter then

of the VGC0

the OLED

programming

ey represent

s the MENU
change the

ave the new

s repeatedly

, scroll with t
ress ENTER

3 controller i

etup screen

of the VGC0

.

ey. Press th

arameters. P

ettings. Pre

o return to th

e UP and D

done via th

n the left ha

3, the OLED

UP and DO

ess the ENT

s the MENU

e main scree

WN keys un

four pro­d side of the

display will

N key to

R key to

ey to return

. To continu

il you reach

6.4

actory-S

aramete

ETUP UNI

t Default

s

NOTE

he value of c

nge or limit. I
nge of a spe

O CHANGE

a

nd enter a co

he following i

reen menu.

UNITS [Fa

•

INFO [Fact

•

•

SET CG2-

•

ALT GAU

ALT GAU

•

•

I - O STAT

•

DEFAULT
(not useabl

rtain menu p

f the user trie

ific menu, th
. In this case
rect value th

a summary

tory default

ry default =

LT [Factory

E [Factory d

E CAL [Fact

S [Factory d

[Factory def

e if IG sensor

rameters m
to program

setup scree

the user nee

t is within the

f all factory-

TORR]

IRMWARE

efault = CG2

fault = 10 TO

ry default = F

fault =DEG

ult = PRESS

is on)]

st be progra

value that is
will moment

s to access

allowable ra

et default val

ERSION]

R CDG]

ctory Set Nu

S STATUS]

ENTER TO

med within a
outside of th
arily display t

he specific m
ge.

es in the VG

mber]

ET OR MEN

allowable

allowable

e message

enu again,

083 setup

TO EXIT

32

tinb29e

(2016-11) VGC083A_B.

m

ION GAUGE

CONVEC GAUGE

RELAYS

ANALOG OUTPUT

SERIAL COMM

• EMISS SELECT [Factory default = IE = 100UA]

• AUTO IE1 TRIP [Factory default = DISABLED]

• AUTO IE2 TRIP [Factory default = DISABLED]

• SELECT FIL [Factory default = FILAMENT 1]

• DEGAS TIME [Factory default = 10 MINUTES]

• SENSITIVITY [Factory default = 25.00]

• OVER PRES 100 [Factory default = 1.00E-03]

• IG TRIP PRESSURE [Factory default = 1.00E-03]

• IG CONTROL [Factory default = MANUAL MODE]

• CAL FACTORS [Factory default = C0, C1, C2, C3, C4, C5 all factory-set to 50]

(VGC083A only)

• SET VAC CG1 [Factory default = 0.00E 00]

• SET ATM CG1 [Factory default = 7.60E 02 TORR]

• SET VAC CG2 [Factory default = 0.00E 00]

• SET ATM CG2 [Factory default = 7.60E 02 TORR]

• ASSIGN REL 1 [Factory default =ION GAUGE]

• ASSIGN REL 2 [Factory default =CG1]

• ASSIGN REL 3 [Factory default =CG2]

• ASSIGN REL 4 [Factory default =ION GAUGE]

• ASSIGN REL 5 [Factory default =CG1]

• ASSIGN REL 6 [Factory default =CG2]

• REL 1 LO TRIP [Factory default = 1.00E-06]

• REL 1 HI TRIP [Factory default = 2.00E-06]

• REL 2 LO TRIP [Factory default = 1.00E-01]

• REL 2 HI TRIP [Factory default = 2.00E-01]

• REL 3 LO TRIP [Factory default = 1.00E-01]

• REL 3 HI TRIP [Factory default = 2.00E-01]

• REL 4 LO TRIP [Factory default = 1.00E-06]

• REL 4 HI TRIP [Factory default = 2.00E-06]

• REL 5 LO TRIP [Factory default = 1.00E-01]

• REL 5 HI TRIP [Factory default = 2.00E-01]

• REL 6 LO TRIP [Factory default = 1.00E-01]

• REL 6 HI TRIP [Factory default = 2.00E-01]

• TEST RELAYS

• ANALOG OUT 1 [Factory default = IG - CG1 0.5 - 7V]

• ANALOG OUT 2 [Factory default = CG1 1 - 8 V ]

• ANALOG OUT 3 [Factory default = CG2 1 - 8 V ]

• AOUT CAL 1 [Factory default = Factory Set Number]

• AOUT CAL 2 [Factory default = Factory Set Number]

• AOUT CAL 3 [Factory default = Factory Set Number]

• AOUT LIN 1 [Factory default = 1.00E 00]

• AOUT LIN 2 [Factory default = 1.00E 00]

• AOUT LIN 3 [Factory default = 1.00E 00]

• COMM TYPE [Factory default = RS485]

• BAUDRATE [Factory default = 19200 BAUD]

• FRAMING [Factory default = 8 BITS NONE 1]

• ADDRESS [Factory default = 01]

tinb29e1 (2016-11) VGC083A_B.om 33

DISPLAY

6.5 Programming

6.5.1 SETUP UNIT

UNITS

INFO

SET CG2 - ALT

ALT GAUGE

• SCREEN SETUP [Factory default = NORMAL]

• SCREEN SAVER [Factory default = ON]

• BRIGHTNESS [Factory default = 0]

This section provides detailed information on programming and configuration of
various menus and submenus of the device.

This key, on the VGC083 front panel, is referred to as the 'ENTER'
key throughout this manual.

From the main menu (press the MENU key if the main menu is not shown), scroll
Up or Down to SETUP UNIT then press the ENTER key to access the SETUP
UNIT menu for configuring the VGC083 general parameters such as the units of
measure, selecting CG2 verses ALTERNATE GAUGE, etc. In certain instances,
during setup of the programmed functions and settings, you may need to press the
ENTER key until you reach the end of a program/setup sequence before pressing
the MENU key to return to the main menu or previous setup screen.

[Factory default = TORR]

This allows the user to display the pressure measurements in Torr, mbar or
pascals. The user must program all other programming values according to their
requirements.

[Factory default = FIRMWARE VERSION]

Provides the model number of VGC083, the firmware version numbers for both the
VGC083 controller and the IG connected to it.

[Factory default = CG2]

This allows the user to assign the type of gauge to the CG2/ALT display. The user
can either assign a second convection gauge CG2 (same type as CG1 using
INFICON's PGE050 convection gauge sensor) or analog input using a 0-10 V (dc)
analog input signal from an alternate gauge. The ANALOG INPUT selection allows
processing of one analog input voltage signal from other gauges such as a capaci­tance diaphragm gauge or INFICON vacuum gauge modules PGE300, PGE500 or
BAG302.

[Factory default = 10 TORR CDG]

Ignore this menu if you have selected CG2 in the SET CG2 - ALT menu above. If
you have selected ANALOG INPUT in the SET CG2 - ALT menu above, the ALT
GAUGE menu selection is used to assign the type of alternate gauge.

• Select 100 mTORR CDG for a 100 mTorr Capacitance Manometer / Diaphragm
Gauge (CDG) with 0-10 Vdc analog output.

• Select 1 TORR CDG for a 1 Torr CDG with 0-10 Vdc analog output.

• Select 10 TORR CDG for a 10 Torr CDG with 0-10 Vdc analog output.

• Select 100 TORR CDG for a 100 Torr CDG with 0-10 Vdc analog output.

• Select 1000 TORR CDG for a 1000 Torr CDG with 0-10 Vdc analog output.

• Select ITI LOG CG if you are using INFICON's convection gauge modules such

as the PGE300 or PGE500 with a Log-linear analog output.

• Select ITI LOG IG if you are using INFICON's ionization gauge module such as
the BAG302 IG with a Log-linear analog output.

• Select ITI NON-LINEA if you are using INFICON's convection gauge modules
such as the PGE300 or PGE500 with a non-linear analog output.

34

tinb29e1 (2016-11) VGC083A_B.om

ALT GAUGE CAL

- I - O STATUS

DEFAULTS

6.5.2 ION GAUGE

NOTE

NOTICE

[Factory default = Factory Set Number]

Ignore this menu if you have selected CG2 in the SET CG2 - ALT menu above. If
you have selected ANALOG INPUT in the SET CG2 - ALT menu above, the ALT
GAUGE CAL menu selection is used to optimize the analog input calibration. It is
recommended that the user not make this adjustment unless the displayed alter­nate gauge pressure (CG2/ALT display channel) do not closely match the expected
pressure from the analog input calculations.

Example - To perform ALT GAUGE CAL if ALT GAUGE menu is selected for a
1000 TORR CDG. Connect both the CDG and a high resolution voltmeter to the +
and – terminals of the VGC083 Analog Input Connector labeled AI. With CDG
exposed to atmosphere, measure the analog input from the CDG at the VGC083
Analog Input Connector and calculate the corresponding pressure. In the ALT
GAUGE CAL screen use the UP or DOWN keys to adjust the displayed pressure
by the VGC083 to match the calculated pressure from the CDG analog signal. For
example, if the analog input signal from the CDG is at 7.600 volts representing
760 Torr for a 1000 TORR CDG, then adjust the ALT GAUGE CAL so that the
VGC083 also displays 760 Torr. For other CDG ranges always use CDG's full
scale pressure value to perform calibration. For example, if you are using a
100 TORR CDG, evacuate your system pressure to 100 Torr and use the same
calibration procedure above.

Example - To perform ALT GAUGE CAL if ALT GAUGE menu is selected for ITI
LOG CG, ITI LOG IG or ITI NON-LINE. When using other INFICON vacuum gauge
modules such as PGE300, PGE500 or BAG302 as alternate gauges to CG2, the
analog output signals from these devices can be used to display pressure in the
CG2/ALT display channel. Connect the analog output from these devices to the +
and – terminals of the VGC083 Analog Input Connector labeled AI. In the ALT
GAUGE CAL screen use the UP or DOWN keys to adjust the displayed pressure
by the VGC083 to match the pressure reading on the modules.

As you adjust the analog output, the number being displayed in the ALT GAUGE
CAL screen represents the millivolts offset from zero volts that is being used inter­nally for the analog input gain adjustment.

[Factory default = DEGAS STATUS]

A degas status or an error condition output signal is available from the DIGITAL I/O
connector. If selected for DEGAS STATUS, this can be used as an output signal to
other external instruments to confirm that degas is on or off. If selected for ERROR
STATUS, this can be used as an output signal to other external instruments to con­firm whether there is an error condition.

[Factory default = PRESS ENTER TO SET OR MENU TO EXIT]

The system can be returned to the original factory settings by using the ENTER
key to set factory defaults. The IG filament must be off (sensors off) in order to
reset defaults.

If you reset all values to original factory default settings, you would need to repeat
the initial setup procedure for the convection gauges as described in section 5.6
and reprogram other parameters as required.

Before you activate the ion gauge/filament, make sure you understand all instruc­tions and information provided in this manual and the Operating Manual for the
PGE050 convection gauge. Furthermore, you should ensure you have fully config­ured the VGC083 control unit to your operational requirements before turning the
filaments on. Prior to turning on the ion gauge filament you should ensure the pres­sure is below 1.00E-03 Torr (1 mTorr) with emission current set at 100 μA;

5.00E-04 Torr with emission current set at 4 mA and 1.00E-04 Torr with emission
current set at 10 mA.

tinb29e1 (2016-11) VGC083A_B.om 35

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rr.

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filament lea

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rent is reco

us emission
rrent selecti

en operating

emission se
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equipment u

measureme

emission cur
A and 10 mA

measureme

would like th

or example,

by the ion g

may want to

f the emissi

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u would like t
A and 10 mA

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er may want

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function (see
sion current

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ould be able
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emission cur
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failure caus

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ion current to

ess ENTER
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e. Selection

f the emissio

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urrent settin

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ting is preferr

4 mA emissi
ers prefer to

ts in the UHV

ent can also

This results i

t range from

emission cu

f an applicati

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consider sele
n current. Th

100 μA to 4

below.

e emission c

For example

by the ion g
o consider s

emission cur

t will switch

O IE1 TRIP

l switch from

IP menu bel

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cting the AU

to use these

current as w

SELECT me
t to AUTO IE

ault = 1.00E-

t automaticall

value is set t

ent of 100 μ

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f 1.00E-05 T
TRIP point a

d by inadver
auge to auto
constructed

e of other ga

t damage es

t OFF manua

100 μA, 4 m

o save settin

nit with a fix

f AUTO IE 1

current. Th
the user’s p

s. See secti

sure ranges (
ed. At lower
on setting sh

use the 10 m

pressure reg

be set to aut
n optimal and

low to high v

rrent to auto

n requires th

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ting the AU

pressure tri

mA is define

urrent to auto
, if an applica

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lecting the A
ent. In this c

rom 100 μA t

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ll.

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perating pres

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atically switc

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matically

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ilable with

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trol the ion

t to 4 mA or

e AUTO IE1
user to se­m 100 μA to
rr, then the

sure mea­ent will then

he user has

en 1.00E-06

36

tinb29e

(2016-11) VGC083A_B.

m

AUTO

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IE2 TRIP

CT FIL

AS TIME

ITIVITY (V

NOTIC

C083A)

[Factor

The def
100 μA.
TRIP v
lect the
10 mA.
ion gau
progra
current
lower.
where
is set to
gramm
switche

[Factor

Allows

It is hig
filamen
an exte
tain em
filamen
that ha

[Factor

The len
cycle c

[Factor

The len
cycle c

When u
tivity to
25 per
Sensiti
based
measur

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where
emissio

1)

Sens
creat
emis
the r
reac
Typi

default = 1.

ault setting is

If the EMISS

lue program

pressure at

For example,

e will operat

med for the

will then auto

he user has t
etween 1.00

AUTO IE 10

d to select th

from 100 μ

default = FI

he user to se

ly recomme

s are the coa

ded period
ssion current
coating may

e outgassed

default = 10

th of time, in

n be selecte

default = 25.

th of time, in

n be selecte

sing the BAG
25 per Torr. I

orr, you may

ity constant u

n the followin

ment:

S × I

e

is Pressure,

n current.

itivity for the B-A

d and collected
ion current from
adout of pressur

[e-mail]

al sensitivity for t

0E-07]

DISABLED if

SELECT me

ed here (Fa

hich emissio

if the AUTO I

at the emis
UTO IE1 TR

atically swit

he choice of

-06 to 1.00E

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e desired pre

to 4 mA.

AMENT 1]

ect which fila

ded to period

ed iridium ty

f time can ca

This will bec
become pois

rom the proc

MINUTES]

minutes, deg
from 2 to 30

00]

minutes, deg
from 2 to 30

050 nude UH

you are usin

set the actua
sed by the o
g mathemati

S is Sensitivi

ype ionization ga
collector current)

hich the ion cur

when measured

or further discus

e nude UHV EB

EMISS SEL

u is set to A

tory default =

current auto

E2 TRIP valu

ion current of

P menu abo

h to 10 mA a

rogramming

08 Torr. Note

AUTO IE1 T

sure at whic

ent to opera

cally alternat
e. An inactiv

se failure of t

me more pr
ned by proc
ss materials.

ssing will ru

minutes in du

ssing will ru

minutes in du

EB-degas I

an IG with a

sensitivity fo
erating syste
al formula for

1)

; Ic is the

ge is a constant.
per unit measure
ent is generated.

by the ion gauge
ion on the use of

egas ionization

CT menu ab

TO IE 100-1

1.00E-07) all
atically swit

is set to 1.0

4 mA from th

e to 1.00E-0

t pressure of

he AUTO IE

that if the E

IP value abo

emission cu

te: either Fila

operating fil

, coated fila

hat filament t

blematic in a
ss gas bypro

after it is init

ration.

after it is init

ration.

or equivale

known sensi

r the IG head

for the pres

the B-A ion g

ollector curre

A number defin

of pressure per t

This setting can

for gases other t

this setting for c

auge used is 25

ve is set to 4

, then the A

ws the user

hes from 4

E-07 Torr, t
trip pressur

Torr. The e

.00E-07 Tor

TRIP point a

ISS SELEC

ve must still

rent automati

ent 1 or Fila

ments 1 and

ent not oper

establish an
plications w
ucts or mate

iated. The de

iated. The de

t nude IG, s

ivity other th

you are usin

ure calculati

auge pressur

t and Ie is th

d as the quantity

e controlled qua

e useful for com

an nitrogen/air.
mpensated readi
per torr (25 Torr

mA or

TO IE2
o se­A to
en the

value

ission

or
ny­ menu

e pro-

cally

ment 2.

2 if the
ted for

d main-

ere the

ials

as

as

t sensi­n
. The

n is

f ions
tity of

ensating

Consult

gs.

-

1

).

C

UTION! The
a value
to ensu
is used
damag
as a re

tinb29e1 (2016-11) VGC0

83A_B.om

not matching

e that the V

with may res

due to incor
ult of incorre

user assume
the actual he
C083A is pro

lt in pressure

ect pressure

t pressure m

all risks if th

d (sensor) s

rammed for

readings tha

eadings and

asurement r

SENSITIVI

nsitivity des

he actual se

are not true

improper sys

adings may

Y is program

ribed above.

sitivity of the

ressure. Equ
em control fu
esult.

ed to

ailure
head it
ipment

ctions

37

SENSITIVI

T

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Y (VGC08

B)

[

actory defaul

hen using th

g

lass enclosed

y

u are using

e actual sen

the operatin

athematical f

I

= P × S × Ie

here P is Pre

e

mission curre

1)

Sensitivity for
created and c
emission curr
the readout of

reachus@infic

Typical sensiti

t = 10.00]

resistive or

IG (BAG052

n IG with a k

itivity for the

g system for

ormula for th

ssure, S is S
nt.

he B-A type ioni

llected (collector

nt from which th
pressure when

on.com for furthe

ity for the resisti

2

R degas nu

/ 053, or equi

own sensitiv
G head you
he pressure
B-A ion gau

nsitivit

ation gauge is a
current) per unit
ion current is ge
easured by the i

discussion on th

1)

; Ic i

e or I2R degas io

e IG (Series

alent) set se
ty other than
re using. The

alculation is
e pressure m

the collecto

onstant. A numb

easure of press

erated. This setti

n gauge for gase

use of this setti
ization gauges u

AG051, or e
nsitivity to 10
10 per Torr,
Sensitivity c

ased on the

easurement:

current and

r defined as the
re per the contro

ng can be useful

other than nitro
g for compensat

sed is 10 per torr

uivalent) or
per Torr. If
ou may set

nstant used
ollowing

is the

e

uantity of ions
lled quantity of
for compensating

en/air. Consult

d readings.

-1).

(10 Tor

OVER PR

IG TRIP P

IG CONTR

S 100

ES

OL

NOTE

CAUTIO

a

value not ma

t

ensure that

used with m

d

mage due t

a result of i

a

[

actory defaul

his function a

hen the emis

he overpress

100 μA. Ho

1

.00E-03 Torr

fi

ations to det

easuring (B

1.00E-03 T

he overpress

1

.00E-04 Torr

nnot be cha

c

[

actory defaul

his setting all

a

lternate gaug

i

operating at

mission curre

ELECT = AU
LT GAUGE.

he IG TRIP P

.00E-03 Torr

1

tting the IG

s

ur ion gauge

uge head is

easuring a m

he user does

mA or 10 em

4

ed at 5.00E-

fi
1

mA respect

[

actory defaul

his function a

b

controlled f

AUGE (alter

elect MANU

e ion gauge

! The user a

tching the act

he VGC083

y result in pr

incorrect pre

correct pres

t = 1.00E-03]

llows the use

ion current i

re shut dow

ever, when s

1.00E-02 To
rmine the m

G05x series
rr).

re shut dow

hen emissio

ged by the u

t = 1.00E-03]

ws the user
can turn the

100 μA or 4

nt) or in the a

O IE) and th

RES default

ut it can be

RIP PRES v

head specifi

capable of m

aximum pres

not have the

ission current

4 Torr and 1

vely.

t = MANUAL

llows the use

om the Front

ate gauge).

L MODE if y

ead filament

sumes all ris

ual head (se

is programm

ssure readin

ssure readin

ure measure

to set the pr
running at 1

values are a

tting the ove

r maximum),

ximum press

eads are ca

value is fact

n current sel

er.

o select a pr

IG filament o

A emission

tomatic emi
IG CONTR

alue when u
et to value a

lue at a high

ations to det

asuring (BA
ure of 1.00E

hoice to sel

has been sel

.00E-04 whe

MODE]

to choose th

Panel (MAN

u wish to use
to the on or o

s if the SEN

sor) sensitivit

d for the act
s that are no

s and improp

ent readings

ssure at whi

0 μA.

justable whe
pressure val
eview your i

ure your ion
able of meas

ry set to 5.0

cted is 4 mA

ssure value

. This is app
urrent setting
sion current

L mode belo

ing an emissi
high as 1.00

r pressure th

rmine the m

05x series h

03 Torr).

ct a turn on p

cted. The IG
the emission

source of c

AL MODE),

the front pan

f state.

ITIVITY is pr

described a

al sensitivity

t true pressu

r system co

may result.

h the gauge

n emission c

e at a higher
n gauge hea
auge head is

ring a maxi

E-04 Torr an

r 10 mA res

t which CG1

licable only w

(not applicab

witching mod

w is set to C

on current of

-02 Torr. Ho

an 1.00E-03

ximum press

ads are cap

oint for the I

turn on and

current is se

ntrol for the I

G1, CG2 or

l programmi

grammed to

ove. Failure

of the head it

e. Equipment

trol functions

ill turn off

rrent selecte

pressure tha

speci­capable of

um pressure

ectively and

r CG2 or

en the gaug

e with 10 mA

(EMISSION

1, CG2 or

00 μA is

ever, when
orr, review
re your ion

ble of

when the

ff is always

for 4 mA or

. The IG ca

he ALT

g keys to tur

38

tinb29e

(2016-11) VGC083A_B.

m

CAL

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39

6.5.3 ION GAUGE

SET VAC CG1

SET ATM CG1

SET VAC CG2

SET ATM CG2

6.5.4 RELAYS

NOTICE

It is important to set vacuum and atmosphere when initially setting up the con­vection gauges. See Convection Gauge Initial Setup section 5.6

This programming menu allows the user to set the atmospheric pressure reading
(also known as the "span" adjustment) and vacuum reading ("zero" point) for con­vection gauges CG1 and CG2. INFICON advises that you first determine if the
"span" (ATM) adjustment of your measurement device is set properly before set­ting the "zero" (VAC) adjustment. It is good practice to perform the sequence of
checking and adjusting ATM (span) then VAC (zero) and then, finally re-checking
the ATM setting to ensure that the circuitry is properly balanced for use in measur­ing pressure throughout the intended measurement range. Press the ENTER key
to access the CONVEC GAUGE menu for configuring the convection gauges.

[Factory default = 0.00E 00]

Press the ENTER key to access the SET VAC CG1 screen.

1. To properly set the vacuum reading (“zero” point), with CG1 installed on your
vacuum system, the gauge should be evacuated to a pressure below 1.00E­04 Torr (0.1 mTorr). [Factory default = 0.00E+0 Torr]

2. When the known vacuum system pressure is below 0.1 mTorr and If you want
to set zero at 0.00E+0, then press the ENTER key repeatedly until the SET
VAC CG1 appears on the display again. The zero point (displayed pressure
reading with gauge exposed to vacuum) is now set.

If you want to set the ‘zero’ pressure reading to a number higher than 0.00E+0,
then press the UP or DOWN keys at each of the high-lighted numeral locations
until the desired number is reached; then press the ENTER key repeatedly until
the SET VAC CG1 appears on the display again. The new "zero point" is now
set. Due to the nature of circuit operation and head electrical control that cover
a wide range of measurement by a convection gauge, it is advised that one first
check and adjust, if necessary, the "span" and "zero" to ensure that all
measurements made between these two, adjusted settings are as accurate as
possible.

[Factory default = 7.60E 02 TORR]

Press the ENTER key to access the SET ATM CG1 screen.

Backfill the vacuum vessel /chamber with nitrogen gas to a known pressure bet­ween 400 Torr and 1000 Torr. Alternatively, if your local uncorrected barometric
pressure (air) is known, simply vent your vacuum system chamber to expose the
gauge to the local atmospheric pressure. When desired system pressure is stable,
adjust the pressure on the screen to the known value using the UP or DOWN keys.
Press the ENTER key to move to the next digit and use the UP or DOWN keys to
decrease or increase the value of that digit. Continue pressing the ENTER key until
the SET ATM CG1 reappears on the display. The new atmosphere point is now
set. For example, if your known local uncorrected barometric pressure is 760 Torr,
enter 760 in the SET ATM screen. The main pressure measurement screen will
now display 760 Torr while the gauge is at atmosphere.

[Factory default = PRESS ENTER TO SET VAC]

Same as SET VAC CG1 above, except for CG2

[Factory default = 7.60E 02 TORR]

Same as SET ATM CG1 above, except for CG2.

Press the ENTER key to access the RELAYS menu for configuring the setpoint
relays.

40

tinb29e1 (2016-11) VGC083A_B.om

ASSIGN REL 1

ASSIGN REL 2

ASSIGN REL 3

ASSIGN REL 4

ASSIGN REL 5

ASSIGN REL 6

REL 1 LO TRIP

REL 1 HI TRIP

REL 2 LO TRIP

REL 2 HI TRIP

REL 3 LO TRIP

REL 3 HI TRIP

[Factory default = ION GAUGE]

This assigns Relay #1 to the ion gauge, CG1, CG2 or ALT GAUGE (alternate
gauge).

[Factory default = CG1]

ASSIGN RELAY 2; same choices as ASSIGN RELAY 1 above

[Factory default = CG2]

ASSIGN RELAY 3; same choices as ASSIGN RELAY 1 above

[Factory default = ION GAUGE]

ASSIGN RELAY 4; same choices as ASSIGN RELAY 1 above

[Factory default = CG1]

ASSIGN RELAY 5; same choices as ASSIGN RELAY 1 above

[Factory default = CG2]

ASSIGN RELAY 6; same choices as ASSIGN RELAY 1 above

[Factory default = 1.00E-06]

This setpoint corresponds to the turn on point for Relay #1. Relay #1 will turn on
when the pressure drops below this setting. If you are unable to increase the value
of REL 1 LO TRIP (VGC083 responding with the message "NO CHANGE"), you
must first access the REL 1 HI TRIP menu below and increase that value to a
number higher than the value of the REL 1 LO TRIP you are trying to set. Ensure
the REL 1 LO TRIP setpoint value you are programming is within the measurement
range of the specific gauge the relay is assigned to.

[Factory default = 2.00E-06]

This setpoint corresponds to the turn off point for Relay #1. Relay #1 will turn off
when the pressure rises above this setting. If you are unable to decrease the value
of REL 1 HI TRIP (VGC083 responding with the message "NO CHANGE"), you
must first access the REL 1 LO TRIP menu above and decrease that value to a
number lower than the value of the REL 1 HI TRIP you are trying to set. Ensure the
REL 1 HI TRIP setpoint value you are programming is within the measurement
range of the specific gauge the relay is assigned to.

[Factory default = 1.00E-01]

(RELAY 2 LO TRIP; same info as RELAY 1 LO TRIP above)

[Factory default = 2.00E-01]

(RELAY 2 HI TRIP; same info as RELAY 1 HI TRIP above)

[Factory default = 1.00E-01]

(RELAY 3 LO TRIP; same info as RELAY 1 LO TRIP above)

[Factory default = 2.00E-01]

(RELAY 3 HI TRIP; same info as RELAY 1 HI TRIP above)

tinb29e1 (2016-11) VGC083A_B.om 41

REL 4 LO TRIP

REL 4 HI TRIP

REL 5 LO TRIP

REL 5 HI TRIP

REL 6 LO TRIP

REL 6 HI TRIP

TEST RELAYS

6.5.5 Analog Output

ANALOG OUT 1

[Factory default = 1.00E-06]

(RELAY 4 LO TRIP; same info as RELAY 1 LO TRIP above)

[Factory default = 2.00E-06]

(RELAY 4 HI TRIP; same info as RELAY 1 HI TRIP above)

[Factory default = 1.00E-01]

(RELAY 5 LO TRIP; same info as RELAY 1 LO TRIP above)

[Factory default = 2.00E-01]

(RELAY 5 HI TRIP; same info as RELAY 1 HI TRIP above)

[Factory default = 1.00E-01]

(RELAY 6 LO TRIP; same info as RELAY 1 LO TRIP above)

[Factory default = 2.00E-01]

(RELAY 6 HI TRIP; same info as RELAY 1 HI TRIP above)

[Factory default = OFF]

This allows the user to manually toggle the relays on and off to test for correct
external circuit wiring and ensure polarity is as desired. Press ENTER to access
the TEST RELAYS menu. Select a specific relay by pressing the ENTER key so
that the relay number is highlighted. Press the UP or DOWN key to energize the
specific relay.

Relays will return to the previous state after exiting the TEST RELAYS menu.

The VGC083 provides three analog outputs proportional to the pressure measured
by the ionization gauge, the selected convection gauge (CG1 or CG2) or a continu­ous, combined output signal from the IG and CG1 (IG - CG1) for full range meas­urement. Press the ENTER key to access the ANALOG OUTPUT menu for config­uring the analog outputs.

[Factory default = CG1 - CG1]

This menu provides various scaling and gauge type selections for Analog Output
#1. Use the UP and DOWN keys to select the desired analog output configuration
from the following available choices.

IG - CG1 0.5 - 7V

IG LOG N - 10

Log-linear analog output combining IG & CG1 as one signal

Log-linear analog output for IG only, output also compatible
with GP 307, 350

- IG LOG N - 11

Log-linear analog output for IG only, output also compatible
with GP 307, 350, 358

IG LOG N - 12

Log-linear analog output for IG only, output also compatible
with GP 307, 350

IG 1.8 - 8.7V

IG LINEAR

Log-Linear analog output for IG only

Linear analog output for IG only, output also compatible with
GP 307

ALT LINEAR

ALT CG 1-8V

Linear analog output for alternate gauge only

Log-linear analog output if alternate gauge connected is an
INFICON PGE300 or PGE500

ALT IG LOGN10

Log-linear analog output if alternate gauge connected is an
INFICON BAG302

42

tinb29e1 (2016-11) VGC083A_B.om

CG1 1 - 8V

CG2 1 - 8V

CG1 0 - 7V

Log-linear analog output for CG1

Log-linear analog output for CG2

Log-linear analog output for CG1 , output also compatible
with GP 307,350,358

CG2 0 - 7V

Log-linear analog output for CG2 , output also compatible
with GP 307,350,358

CG1 NON - LIN

CG2 NON - LIN

CG1 LINEAR

CG2 LINEAR

Non-linear analog output for CG1

Non-linear analog output for CG2

Linear analog output for CG1

Linear analog output for CG2

Select "IG - CG1 0.5 - 7V" as the analog output type to set the analog output vol­tage proportional to the pressure measured by the combination of IG plus CG1.
This selection combines the analog output from the IG and CG1 as one signal to
provide a log-linear analog output voltage of 0.5 volts to 7 volts with a scaling factor
of 0.5 V/decade of measured pressure. The log-linear output signal and pressure
are related by the following formulas when Pressure Unit of measurement is in Torr
and mbar: P = 10

(volts – 5.5) / (0.5)

where P is the pressure in Torr or mbar, and V is
the output signal in volts. Refer to section 7.1 for details regarding this type of out­put signal.

Select "IG LOG N - 10" as the analog output type to set the analog output voltage
proportional to the pressure measured by the ion gauge only. This selection pro­vides an output voltage that is linear with respect to the common logarithm of pres­sure, i.e., log-linear analog output of 0 to 9 volts with a scaling factor of 1 V/decade
of measured pressure. The log-linear output signal and pressure are related by the
following formulas when Pressure Unit of measurement is in Torr and mbar:

(volts – 10)

P= 10

where P is the pressure in Torr or mbar, and V is the output signal in
volts. Refer to section 7.2 for details regarding this type of output signal. This
selection is compatible with the analog output scaling from the Granville-Phillips
307 and 350 controllers.

Select "IG LOG N - 11" as the analog output type to set the analog output voltage
proportional to the pressure measured by the ion gauge only. This selection pro­vides an output voltage that is linear with respect to the common logarithm of pres­sure, i.e., log-linear analog output of 0 to 10 volts with a scaling factor of 1 V / de­cade of measured pressure. The log-linear output signal and pressure are related
by the following formulas when Pressure Unit of measurement is in Torr and mbar:

10(volts – 11)

P=

where P is the pressure in Torr or mbar, and V is the output signal in
volts. Refer to section 7.3 for details regarding this type of output signal. This se­lection is also compatible with a certain analog output scaling from the Granville­Phillips 307, 350 and 358 controllers.

Select "IG LOG N - 12" as the analog output type to set the analog output voltage
proportional to the pressure measured by the ion gauge only. This selection pro­vides an output voltage that is linear with respect to the common logarithm of pres­sure, i.e., log-linear analog output of 0 to 11 volts with a scaling factor of 1 V / de­cade of measured pressure. The log-linear output signal and pressure are related
by the following formulas when Pressure Unit of measurement is in Torr and mbar:

10(volts – 12)

P=

where P is the pressure in Torr or mbar, and V is the output signal in
volts. Refer to section 7.4 for details regarding this type of output signal. This se­lection is also compatible with a certain analog output scaling from the Granville­Phillips 307 and 350 controllers.

Select "IG 1.8 - 8.7V" as the analog output type to set the analog output voltage
proportional to the pressure measured by the ion gauge only. This selection pro­vides an output voltage that is linear with respect to the common logarithm of pres­sure, i.e., log-linear analog output of 1.8 to 8.7 volts with a scaling factor of 0.8
V/decade of measured pressure. The log-linear output signal and pressure are re­lated by the following formulas when Pressure Unit of measurement is in Torr

((1.25 × volts) – 12.875))

P= 10

where P is the pressure in Torr and V is the output signal in

volts. Refer to section 7.5 for details regarding this type of output signal.

Select "IG LINEAR" as the analog output type to provide a 0-10 Vdc output signal
that has a direct linear relationship to the displayed pressure measured by the ion
gauge only. This selection covers 3 decades of pressure change. For example, if
the maximum pressure selected is 1.00E-03 Torr (value programmed for AOUT
LIN 1 or AOUT LIN 2 or AOUT LIN 3 menu below), then the instrument provides a
10 volt analog output signal when pressure is at 1.00E-03 Torr and the minimum
pressure is automatically set to 1.00E-06 Torr, with a corresponding minimum volt-

tinb29e1 (2016-11) VGC083A_B.om 43

age output of 0.01 volts. If your application requires the IG analog output voltage to
cover a pressure range exceeding three decades, then consider using the log­linear analog outputs. Refer to section 7.6 for details regarding this type of output
signal. This selection is also compatible with a certain analog output scaling from
the Granville-Phillips 307 controller.

Select "ALT LINEAR" only if you have selected ANALOG INPUT in the SET CG2 ­ALT menu intended for use with a CDG device as an alternate gauge to CG2. If
such is the case, this analog output type provides a 0-10 Vdc analog output signal
that has a direct linear relationship to the displayed pressure measured by the
alternate gauge. This selection covers 3 decades of pressure change. Essentially,
this allows retransmission of the same analog input signal being received by the
VGC083. For example, if ALT GAUGE selected is 1000 TORR CDG, the maximum
pressure should also be programmed as 1.00E03 Torr (value programmed for
AOUT LIN 1 or AOUT LIN 2 or AOUT LIN 3 menu below), then the instrument pro­vides a 10 volt analog output signal when pressure is at 1.00E03 Torr and the
minimum pressure is automatically set to 1.00 Torr, with a corresponding minimum
voltage output of 0.01 volts.

Select "ALT CG 1-8V" only if you have selected ANALOG INPUT in the SET CG2 ­ALT menu intended for use with an INFICON PGE300 or PGE500 convection
vacuum gauge module as an alternate gauge to CG2. Essentially, this allows re­transmission of the same analog input signal being received from the PGE300 or
PGE500. This selection provides an output voltage that is linear with respect to the
common logarithm of pressure, i.e., log-linear analog output of 1 to 8 volts with a
scaling factor of 1 V/decade of measured pressure. The log-linear output signal
and pressure are related by the following formulas when Pressure Unit of measure­ment is in Torr and mbar: P=

10(volts – 5)

where P is the pressure in Torr or mbar, and

V is the output signal in volts.

Select "ALT IG LOGN10" only if you have selected ANALOG INPUT in the SET
CG2 - ALT menu intended for use with an INFICON BAG302 ionization vacuum
gauge module as an alternate gauge to CG2. Essentially, this allows retransmis­sion of the same analog input signal being received from the BAG302. This selec­tion provides an output voltage that is linear with respect to the common logarithm
of pressure, i.e., log-linear analog output of 0 to 9 volts with a scaling factor of 1
V/decade of measured pressure. The log-linear output signal and pressure are
related by the following formulas when Pressure Unit of measurement is in Torr
and mbar: P= 10

(volts – 10)

where P is the pressure in Torr or mbar, and V is the

output signal in volts.

Select "CG1 1 - 8V" as the analog output type to set the analog output voltage
proportional to the pressure measured by convection gauge CG1. This selection
provides an output voltage that is linear with respect to the common logarithm of
pressure, i.e., log-linear analog output of 1 to 8 volts with a scaling factor of
1 V/decade of measured pressure. The log-linear output signal and pressure are
related by the following formulas when Pressure Unit of measurement is in Torr
and mbar: P= 10

(volts – 5)

where P is the pressure in Torr or mbar, and V is the
output signal in volts. Refer to section 7.7 for details regarding this type of output
signal.

Select "CG2 1 - 8V" for CG2. Same as CG1 1 - 8V above, except for CG2.

Select "CG1 0 - 7V" as the analog output type to set the analog output voltage
proportional to the pressure measured by convection gauge CG1. This selection
provides an output voltage that is linear with respect to the common logarithm of
pressure, i.e., log-linear analog output of 0 to 7 volts with a scaling factor of 1 V /
decade of measured pressure. The log-linear output signal and pressure are
related by the following formulas when Pressure Unit of measurement is in Torr
and mbar: P= 10

(volts – 4)

where P is the pressure in Torr or mbar, and V is the out­put signal in volts. Refer to section 7.8 for details regarding this type of output sig­nal. This selection is compatible with the analog output scaling from the Granville­Phillips 307, 350 and 358 controllers.

Select "CG2 0 - 7V" for CG2. Same as CG1 0 - 7V above, except for CG2.^

Select "CG1 NON - LIN" as the analog output type to set the analog output (non­linear) voltage proportional to the pressure measured by convection gauge CG1.
This produces a non-linear analog output signal of 0.375 to 5.659 V (dc) for 0 to
1000 Torr of N

, roughly in the shape of an "S" curve. Refer to section 7.9 for

2

details regarding this type of output signal. Note - This non-linear analog output is
also equivalent to the Granville- Phillips® Mini-Convectron® non-linear S-curve
analog output.

44

tinb29e1 (2016-11) VGC083A_B.om

ANALOG OUT 2

ANALOG OUT 3

AOUT CAL 1

Select "CG2 NON - LIN" for CG2. Same as CG1 NON - LIN above, except for
CG2.

Select "CG1 LINEAR" as the analog output type to provide a 0-10 Vdc output
signal that has a direct linear relationship to the displayed pressure measured by
CG1 only. This selection covers 3 decades of pressure change. For example, if the
maximum pressure selected is 1.00 Torr (value programmed for AOUT LIN 1 menu
below), then the instrument provides a 10 volt analog output signal when pressure
is at 1.00 Torr and the minimum pressure is automatically set to 1 mTorr
(1.00E-03 Torr), with a corresponding minimum voltage output of 0.01 volts. If your
application requires CG1 or the analog output voltage to cover a pressure range
exceeding three decades, then consider using the log-linear analog output type.
Refer to section 7.10 for details regarding this type of output signal.

Select "CG2 LINEAR" for CG2. Same as CG1 LINEAR above, except for CG2.

[Factory default = CG1 1 - 8V]

(Same selection choices as ANALOG OUT 1 above)

[Factory default = CG2 1 - 8V]

(Same selection choices as ANALOG OUT 1 above)

[Factory default = Factory Set]

This has been pre-set in the factory and is used to optimize the analog output
calibration. It is recommended that the user not make this adjustment unless the
displayed pressure on the VGC083 and the resulting pressure recorded from the
analog output do not match closely.

To perform AOUT CAL 1 adjustment if ANALOG OUTPUT 1 is programmed for IG
LOG, IG LINEAR or ALT IG LOGN10. Connect the IG to the VGC083 and connect
the VGC083 analog output 1 to a high resolution voltmeter, your system, PLC, etc.
Evacuate your vacuum system to a low enough pressure for the IG to operate.
Establish a system pressure so that the displayed IG reading is preferably at the
high end of any decade (for example 9.00E-05 as opposed to 1.00E-05). In the
AOUT CAL 1 screen use the UP or DOWN keys to adjust the analog output to
match the corresponding pressure displayed on the IG pressure measurement
display or the CG2/ALT display channel if using a BAG302 ion gauge module as
an alternate gauge to CG2.

Example: ANALOG OUTPUT 1 is programmed for "IG LOG N - 10". The VGC083
IG display is registering a pressure reading of 9.00E-05 Torr. Based on the
equation and table given in section 7.2 the expected analog output at 9.00E-05
Torr is 5.9542 V. While in the AOUT CAL 1 screen, use the UP or DOWN keys to
set the analog output to 5.9542 V as recorded by your voltmeter. Alternatively, if
the IG analog output is used to display the IG pressure on your PLC or system
display console, simply adjust the AOUT CAL 1 so that the IG pressure displayed
by your PLC (pressure established at the high end of any decade preferred)
matches the IG pressure displayed by the VGC083. Note - As you adjust the
analog output, the number being displayed in the AOUT CAL 1 screen represents
the millivolts offset from zero volts that is being used internally for the analog output
gain adjustment.

To perform AOUT CAL 1 adjustment if ANALOG OUTPUT 1 is programmed for IG

- CG1, CG1, CG2, CG1/CG2NON-LIN, CG1/CG2 LINEAR, ALT CG 1-8V. Connect
CG1 or CG2 to the VGC083 and connect the VGC083 analog output 1 to a high
resolution voltmeter, your system, PLC, etc. While in the AOUT CAL 1 screen and
with CG1 or CG2 exposed to atmosphere, use the UP or DOWN keys to adjust the
analog output to match the corresponding pressure displayed on CG1 or CG2
pressure measurement display.

Example: The VGC083 ANALOG OUTPUT 1 is programmed for "CG1 1 - 8V". The
VGC083 CG1 display is registering a pressure reading of 7.60E+02 Torr. Based on
the equation and table given in section 7.7 the expected analog output at 7.60E+02
Torr is 7.881 V. Use the UP or DOWN keys in the AOUT CAL 1 screen to set the
analog output to 7.881 V as recorded by your voltmeter. Alternatively, if the CG1
analog output is used to display the CG1 pressure on your PLC or system display
console, simply adjust the AOUT CAL 1 while the gauge is exposed to atmosphere
so that the CG1 atmospheric pressure displayed by your PLC matches the CG1
atmospheric pressure displayed by the VGC083. The AOUT CAL can be per-

tinb29e1 (2016-11) VGC083A_B.om 45

AOUT CAL 2

AOUT CAL 3

AOUT LIN 1

AOUT LIN 2

AOUT LIN 3

formed at any pressure between 400 Torr to 999 Torr (atmosphere recommended).
Note - As you adjust the analog output, the number being displayed in the AOUT
CAL 1 screen represents the millivolts offset from zero volts that is being used
internally for the analog output gain adjustment.

To perform AOUT CAL 1 adjustment if ANALOG OUTPUT 1 is programmed for
ALT LINEAR: Connect the CDG to the VGC083 and connect the VGC083 analog
output 1 to a high resolution voltmeter, your system, PLC, etc. While in the AOUT
CAL 1 screen and with the 1000 TORR CDG exposed to atmosphere, use the UP
or DOWN keys to adjust the analog output to match the corresponding pressure
displayed for the alternate gauge (CG2/ALT display channel).

Example: The VGC083 ANALOG OUTPUT 1 is programmed for "ALT LINEAR"
and a 1000 TORR CDG is connected to the VGC083. The VGC083 CG2/ALT dis­play channel is registering a pressure reading of 7.60E02 Torr. For a 1000 TORR
CDG with a 0-10 VDC output, the expected analog output at 760 Torr is 7.60 volts.
Use the UP or DOWN keys in the AOUT CAL 1 screen to set the analog output to

7.60 V as recorded by your voltmeter. Alternatively, if the alternate gauge analog
output is used to display the pressure on your PLC or system display console,
simply adjust the AOUT CAL 1 while the gauge is exposed to atmosphere so that
the alternate gauge atmospheric pressure displayed by your PLC matches the
atmospheric pressure displayed by the CG2/ALT display channel of the VGC083.

For other CDG ranges always use CDG's full scale pressure value to perform
calibration. For example, if you are using a 100 TORR CDG, evacuate your system
pressure to 100 Torr and use the same calibration procedure described above.

Note - As you adjust the analog output, the number being displayed in the AOUT
CAL 1 screen represents the millivolts offset from zero volts that is being used
internally for the analog output gain adjustment.

[Factory default = Factory Set]

(Same info as AOUT CAL 1 above, except for AOUT CAL 2)

[Factory default = Factory Set]

(Same info as AOUT CAL 1 above, except for AOUT CAL 3)

[Factory default = 1.00E00 TORR]

This programming parameter is only used if you have assigned IG LINEAR, CG1
LINEAR or CG2 LINEAR to ANALOG OUTPUT 1 above. This analog output type
provides a 0-10 Vdc output signal that has a direct linear relationship to the dis­played pressure measured by the IG, CG1 or CG2. The AOUT LIN 1 value pro­grammed here represents the maximum pressure as measured by the IG, CG1 or
CG2 corresponding to a voltage output of 10 volts. This selection covers, at most, a
3 decade range of pressure.

For example, if AOUT LIN 1 is programmed for 1.00E-03 Torr, then the instrument
provides a 10 volt analog output signal when pressure is at 1.00E-03 Torr. There­after, minimum pressure is automatically set to 1.00E-06 torr, with a corresponding
minimum voltage output of 0.01 volts. If your application requires the IG, CG1 or
CG2 analog output voltage to cover a pressure range exceeding three decades,
then consider using the log-linear analog outputs. Refer to section 7.6 and section

7.10 for details regarding this type of output signal.

[Factory default = 1.00E00 TORR]

(Same info as AOUT LIN 1 above, except for AOUT LIN 2)

[Factory default = 1.00E00 TORR]

(Same info as AOUT LIN 1 above, except for AOUT LIN 3)

46

tinb29e1 (2016-11) VGC083A_B.om

6.5.6 SERIAL COMM

COMM TYPE

BAUDRATE

FRAMING

ADDRESS

6.5.7 DISPLAY

The VGC083 provides both RS232 and RS485 serial communications. Press the
ENTER key to access the SERIAL COMM menu for configuring the serial com­munications.

[Factory default = RS485]

The VGC083 supports four different protocols listed below (See section 9 for
details).

• RS485 RS485 with start and stop characters and address, derived from
INFICON BAG302

• RS232 RS232 with start and stop characters, like RS485 above but
no address

• GP485 RS485 compatible with Granville-Phillips 307 and 358 controllers

• GP232 RS232 compatible with Granville-Phillips 307 and 358 controllers

[Factory default = 19200]

This sets the baud rate for the RS485 and the RS232 serial communications. The
baud rate can be set to various values listed below.

• 38400 BAUD

• 19200 BAUD

• 9600 BAUD

• 4800 BAUD

• 2400 BAUD

• 1200 BAUD

• 600 BAUD

• 300 BAUD

[Factory default = 8 BITS, NONE 1]

This sets the character framing by providing the user various selections to control
the number of characters, parity and number of stop bits. Character framing can be
set to one of the following.

• 8 BITS NONE 1 (This selection sets the character framing to 8 data bits, no
parity, 1 stop bit)

• 7 BITS ODD 2

• 7 BITS EVEN 2

• 7 BITS ODD 1

• 7 BITS EVEN 1

• 8 BITS ODD 1

• 8 BITS EVEN 1

[Factory default = 01]

This sets the two byte RS485 device address. For example, an ADDRESS of 05
will make the address 0x05 in hexadecimal. An address of 15 will set the
ADDRESS to 0x15 in hexadecimal.

The DISPLAY menu allows the user to configure the OLED setup screen. The user
can configure the set-up screen to normal or research mode for IG, enable or dis­able screen saver and adjust the display intensity. Press the ENTER key to access
the DISPLAY menu for configuring the setup screen.

tinb29e1 (2016-11) VGC083A_B.om 47

SCREEN

S

S

E

F

T

hfo

S

SIGtr

F

T

e

T

o

o

m

O

Tsa

F

Tsctr

T

f

t

O

u

H

A

t

A

g

s

c

h

e

S

p

w

e

O

n

r

h

n

e

]

s

s

d

h

u

o

w

c

h

h

f

V

e

r

h

s

i

a

e

s

i

f

f

c

w

D

c

n

l

d

t

E

y

m

0

y

m

e

u

s

s

e

x

h

o

a

o

a

e

c

t

b

c

1

C

m

d

y

o

v

e

1

f

e

a

g

t

n

o

n

e

n

c

c

e

ETUP

[

actory defaul

his menu con

b

configured

t

e UP and D
llowing men

•

NORMAL

•

RESEARC

elect "NORM

p

rameters in

t = NORMAL

figures the di

o display the

WN keys to

choices.

Normal

Researc

L" if you wo

he normal m

play mode fo

IG parameter

elect the des

isplay mode

display mod

ld like to con

de shown be

r the setup sc

in NORMAL

red setup scr

or IG

e for IG

igure the set
ow.

reen. The set
or RESEAR

en mode fro

p screen to

up screen ca

H mode. Us

the

isplay the IG

SCREEN

BRIGHTN

AVER

SS

NOTE

NOTE

elect "RESE

parameters

oubleshootin

[

actory defaul

he VGC083

p

riod of time

v

rses pixels t

o minimize th

g

ramming the

n turned on,

ti

isplay will ap

d

hours and

1
y

u like to hav

ti

e of the day

FF and then

o increase lo

ver function

[

actory defaul

he BRIGHTN

reen display.

ast) and 10 t

o increase lo

n

ss function r

RCH" if you

in the resear

IG issues.

t = ON]

et-up screen

an start to s
at are not. T

e burned-in e

CREEN SA

the setup scr

ear in the no

ill then switc

the 12 hour

, simply acce

N again. Th

gevity of the

remains ON

t = 0]

ESS menu all

The brightn

e highest.

gevity of the

emains at 0 a

ould like to

h mode sho

ses an OLE

ow divergen

is could resu

fect, a scree

ER menu se

en changes

mal mode wi

to a back-lit

period for the

s the SCRE

s initiates the

OLED displa

s shipped fro

ows the user
ss setting of

OLED displa
s shipped fro

onfigure the

n below. Thi

type display

between pi
t in pixels ex
saver functi

ection to ON.

isplay appe

h a dark back

ackground c
normal displ
N SAVER m
screen saver

, INFICON re

the factory.

o select the

provides the

, INFICON re

the factory.

etup screen t

is particularl

which over a

els that are

ibiting a burn
n can be acti
With the scr

rance every
ground color

olor for the n

y mode to st

nu and chan

function imm

commends th

rightness of

lowest bright

commends th

display the

helpful whe

n extended

n at all times
ed-in effect.

ated by pro-

en saver fun

2 hours. The
or the first
xt 12 hours. I
rt at a specifi

e setting to

diately.

at the screen

he setup

ess (con-

at the bright-

-

f

48

tinb29e

(2016-11) VGC083A_B.

m

o

o

e

C

o

u

t

e

7

s

a

c

C

h

l

m

o

a

v

P

s

o

a

v

P

n

T

d

x

t

G

o

e

p

p

t

s

u

u

u

u

v

e

a

e

0

a

t

e

h

e

A

t

a

n

c

-

d

t

×

d

t

×

s

w

o

y

n

0

a

e

G

t

w

p

r

Y

)

s

n

t

o

7

e

5

s

e

4

v

0

s

e

d

o

t

e

u

6

a

a

V

.

e

o

a

l

w

a

V[V

e

g

7 Anal

7.1 Anal
rang
IG ­(Nitr

g Outp

g Outpu
measur
G1 0.5 ­gen / Air

t Chart

wide

ment for
V

only)

& Equ

This se
the VG

When t
the ana
range
gen/air.

Analog

A) The
by the f
in Torr

P = 10

Where
output

B) The
by the f
in pasc

P = 10

Where
signal i

Notes:
+11 V (

1) The
and the

2) The
emissio
current,
BAG05
connec

3) Any
IG or C

The foll
pressur
the out

tions (N

tion provides

083.

e analog out

log output vol

easurement

output: Wid

log-linear out

llowing form

nd mbar:

(

olts - 5.5)/(0.5)

is the press

ignal in volts.

log-linear out

llowing form

ls:

(

olts - 4.5)/(0.5)

is the press

volts.

The output

c) under th

IG sensor is t

CG1 is dam

pressure exc
n current, 5.0

1.00 × 10-4 T
series ion g

ed.

IG or CG faul

range resp

wing chart s

measurem

ut signal is pl

itrogen/

various char

ut is setup,

age represe

. Refer to se

e Range Log

put signal an

las when uni

V = ((0.5

re in Torr or

put signal an

las when uni

V = ((0.5

re in pascal

oltage will s

following c

urned off, an

ged or disco

eds 1.00 × 1

× 10-4 Torr

orr at 10 mA

uges and C

s condition
ctively.

ows the gra

nts in Torr. P

otted on the

ir Only

s & equation

s described i
ts a combina
tion 8.3.2 if y

linear 0.5 to

pressure ar
s of measure

log10(P)) +

mbar, and V i

pressure ar
s of measure

log10(P)) +

, and V is the

itch to abo

nditions:

IG fault cond
nected.

-3

Torr at 10
t 4 mA emis
mission curr

1 is damage

hile operating

hical results

essure is plo

-axis on a lin

for analog o

section 6.5.

ion of the IG

u are using

V (dc), 0.5

related

ment is

.5

s the

related

ment is

.5

output

e

ition

µA

ion

nt for
or dis-

in the

f table and f

ted on the X-

ar scale.

tputs availab

for IG - CG1

nd CG1 for

gas other th

per decade

P

ressure

[Torr]

1

00E-10

1

.00E-9

1

.00E-8

.00E-7

1

.00E-6

1

.00E-5

1

.00E-4

1

.00E-3

1

.00E-2

1

.00E-1

1

00E+00

1.

00E+01

1.

00E+02

1.

00E+03

1.

e notes

s

rmulas abov

xis with a lo

e from

0.5-7V,
ide

n nitro-

oltage

(dc)]

0.5

1.0

1.5

2.0

2.5

3.0

3.5

4.0

4.5

5.0

5.5

6.0

6.5

7.0

≥11

for
scale;

tinb29e1 (2016-11) VGC0

83A_B.om

49

7.2

ALA

u

0

G

e

W

h

A

A

nPWoB

nPWsi

N

u

B T

msi

o

p

e

t

e

y

g

a

n

e

y

g

u

d

s

r

n

s

c

d

e

p

n

e

n

(

T

n

(

p

w

o

0

4

h

s

r

p

a

c

u

e

a

u

e

V

o

a

r

A

e

d

s

a

c

d

s

d

s

s

1

n

e

0

s

c

o

u

nalog O

OG N - 1

ir only)

tput for I

(Nitrog

n /

hen the anal

t

e analog out

g

n/air only. R

nalog outpu

) The log-lin

b

the followin

i

Torr and mb

(volts - 10)

= 10

here P is the

utput signal i

) The log-lin

b

the followin

pascals:

i

(volts - 8)

= 10

here P is the

gnal in volts.

otes: The o

+

11 V (dc) un

1

) The IG sen

2

) The pressu

e

mission curre

c

rrent, 1.00 ×

AG05x serie

g output is s

ut voltage re

fer to sectio

: IG Log-lin

ar output sig

formulas wh

ar:

V= log

pressure in

volts.

ar output sig

formulas wh

V= log

pressure in

tput voltage

er the follo

or is turned

e exceeds 1.

nt, 5.00 × 10

10-4 Torr at 1

ion gauges.

tup, as desc
resents the

8.3.1 if you

ar 0 to 9 V (d

al and press

en units of m

P) + 10

10

orr or mbar,

al and press

en units of m

P) + 8

10

ascals, and

will switch t

ing conditio

ff or any IG f

0 × 10-3 Tor

-

Torr at 4 m

0 mA emissio

ibed in sectio
ressured me
re using a ga

), 1 V per de

re are relate
asurement i

nd V is the

re are relate
asurement i

is the output

above

s:

ult condition.

at 100 µA
emission

n current for

n 6.5.6 for IG

sured by the

s other than

ade

Pressur

[Torr]

1.00E-1

1.00E-9

1.00E-8

1.00E-7

1.00E-6

1.00E-5

1.00E-4

1.00E-3

1.00E-2

5.00E-2

see note

LOG N - 10,
IG for nitro­itrogen/air.

Voltage

[V (dc)]

0.0

1.0

2.0

3.0

4.0

5.0

6.0

7.0

8.0

8.698

≥11

he following

easurements

gnal is plotte

hart shows t
in Torr. Pres

on the Y-axi

e graphical r

ure is plotte

s on a linear

sults of table

on the X-axi

cale.

and formulas

with a log s

above for

ale; the outp

t

50

tinb29e

(2016-11) VGC083A_B.

m

7.3 Anal

o

n

t

t

h

l

o

o

a

o

P

s

o

a

o

P

n

T

d

x

o

e

p

p

t

L

u

V

u

u

V

u

v

e

e

0

a

h

e

a

n

o

d

t

d

t

9

s

w

o

0

a

e

p

r

Y

n

r

n

V

e

s

e

v

n

0

s

e

o

t

e

6

d

.1.

5se

o

a

N

n

V[V

9

e

g

LOG
Air o

g Outpu

N - 11 (Ni

nly)

for IG

rogen /

When t
the ana
gen/air

Analog

A) The
by the f
in Torr

(v

P= 10

Where
output

B) The
by the f
in pasc

(v

P= 10

Where
signal i

Notes:
+11 V (

1) The

2) The
emissio
current,
BAG05

The foll
pressur
the out

e analog out

log output vol

nly. Refer to

output: IG

log-linear out

llowing form

nd mbar:

lts - 11)

is the press

ignal in volts.

log-linear out

llowing form

ls:

lts - 9)

is the press

volts.

The output

c) under th

IG sensor is t

pressure exc
n current, 5.0

1.00 × 10-4 T
series ion g

wing chart s

measurem

ut signal is pl

ut is setup,
age represe
section 8.3.1

og-linear 0 t

put signal an

las when uni

= log10(P) + 1

re in Torr or

put signal an

las when uni

= log10(P) +

re in pascal

oltage will s

following c

urned off or a

eds 1.00 × 1

× 10-4 Torr

orr at 10 mA

uges.

ows the gra

nts in Torr. P

otted on the

s described i
ts the pressu

if you are usi

10 V (dc), 1

pressure ar
s of measure

1

mbar, and V i

pressure ar
s of measure

, and V is the

itch to abo

nditions:

y IG fault co

-3

Torr at 10
t 4 mA emis
mission curr

hical results

essure is plo

-axis on a lin

section 6.5.

ed measure

g a gas othe

per decade

related

ment is

s the

related

ment is

output

e

dition.

µA

ion

nt for

f table and f

ted on the X-

ar scale.

for IG LOG

by the IG for

r than nitroge

P

ressure

[Torr]

1

00E-11

00E-10

1

.00E-9

1

.00E-8

.00E-7

1

.00E-6

1

.00E-5

1

.00E-4

1

.00E-3

1

.00E-2

1

.00E-2

e notes

rmulas abov

xis with a lo

- 11,

nitro-

/air.

oltage

(dc)]

0.0

1.0

2.0

3.0

4.0

5.0

6.0

7.0

8.0

9.0

.698

≥11

for
scale;

tinb29e1 (2016-11) VGC0

83A_B.om

51

7.4

ALA

u

2

G

e

W

h

A

A

nPWoB

nPWsi

N

u

B T

h

o

p

e

t

e

y

g

a

n

e

y

g

u

d

s

r

n

s

c

e

p

n

e

n

(

T

n

(

p

w

o

0

4

h

T

r

p

a

d

u

e

a

u

e

V

o

a

r

A

e

o

a

e

d

s

d

s

t

1

n

e

2

1

0

s

X

o

nalog O

OG N - 1

ir only)

tput for I

(Nitrog

n /

hen the anal

t

e analog out

g

n/air only. R

nalog outpu

) The log-lin

b

the followin

i

Torr and mb

(volts - 12)

= 10

here P is the

utput signal i

) The log-lin

b

the followin

pascals:

i

(volts - 10)

= 10

here P is the

gnal in volts.

otes: The o

+

11 V (dc) un

1

) The IG sen

2

) The pressu

e

mission curre

c

rrent, 1.00 ×

AG05x serie

g output is s

ut voltage re

fer to sectio

: IG Log-lin

ar output sig

formulas wh

ar:

V= log

pressure in

volts.

ar output sig

formulas wh

V= log

pressure in

tput voltage

er the follo

or is turned

e exceeds 1.

nt, 5.00 × 10

10-4 Torr at 1

ion gauges.

tup, as desc
resents the

8.3.1 if you

ar 0 to 11 V (

al and press

en units of m

P) + 12

10

orr or mbar,

al and press

en units of m

P) + 10

10

ascals, and

will switch t

ing conditio

ff or any IG f

0 × 10-3 Tor

-

Torr at 4 m

0 mA emissio

ibed in sectio
ressured me
re using a ga

c), 1 V per d

re are relate
asurement i

nd V is the

re are relate
asurement i

is the output

above

s:

ult condition.

at 100 µA
emission

n current for

n 6.5.6 for IG

sured by the

s other than

cade

Pressur

[Torr]

1.00E-1

1.00E-1

1.00E-1

1.00E-9

1.00E-8

1.00E-7

1.00E-6

1.00E-5

1.00E-4

1.00E-3

1.00E-2

5.00E-2

see note

LOG N - 12,
IG for nitro­itrogen/air.

Voltage

[V (dc)]

0.0

1.0

2.0

3.0

4.0

5.0

6.0

7.0

8.0

9.0

10.0

10.698

≥11

he following

p

ressure meas

e output sign

t

hart shows t
urements in

al is plotted o

e graphical r

orr. Pressure

the Y-axis

sults of table

is plotted on

n a linear sca

and formulas

-axis wit

the

le.

above for

h a log scale;

52

tinb29e

(2016-11) VGC083A_B.

m

7.5 Anal

o

V

t

e

8

h

l

o

r

0

1

)

t

u

s

s

u

T

a

o

e

p

p

t

L

n

8

)

a

a

e

s

1

A

a

h

e

a

n

o

u

V

V

8

h

i

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7

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only)

g Outpu

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for IG 1.

n / Air

When t
the ana
gen/air

Analog

The log-line
following fo

P (Torr)= 1

P (mbar)=

P (pascals

Where P is

Notes: The
+11 V (dc)

1) The IG

2) The pre
emission c

1.00 × 10-4
series ion g

The foll
pressur
the out

e analog out

log output vol

nly. Refer to

output: IG

ar output sig

mulas:

((1.25* volts) - 12.

((1.25*volts) - 12

0

((1.25*volts

= 10

the pressure

output volt

nder the fol

ensor is turn

sure exceed

rrent, 5.00 ×

orr at 10 m
uges.

wing chart s

measurem

ut signal is pl

ut is setup,
age represe
section 8.3.1

og-linear 0 t

al and press

75)

.75)

- 10.75)

= 1

= 1

V=

nd V is the o

ge will switc

lowing cond

d off or any I

1.00 × 10-3

0-4 Torr at 4

emission cur

ows the gra

nts in Torr. P

otted on the

s described i
ts the pressu

if you are usi

9.259 Vdc, 0

re are relate

0.3 + (0.8)×l

0.2 + (0.8)×l

.6 + (0.8)×lo

utput signal i

to above

tions:

fault conditi

orr at 100 µA

A emission

ent for BAG

hical results

essure is plo

-axis on a lin

section 6.5.

ed measure

g a gas othe

.8 V per deca

by the

g10(P)

g10(P)

(P)

10

volts.

n.

urrent,

5x

f table and f

ted on the X-

ar scale.

, for IG 1.8 –

by the IG for

r than nitroge

e

P

ressure

[Torr]

2

00E-11

20E-11

50E-10

.30E-8

.40E-7

.20E-6

.50E-5

1

.30E-3

.00E-2

fil

ment is
OFF

rmulas abov

xis with a lo

8.7V,
nitro-

/air.

oltage

(dc)]

1.741

2.0

3.0

4.0

5.0

6.0

7.0

8.0

.698

≥11

for
scale;

tinb29e1 (2016-11) VGC0

83A_B.om

53

7.6 Analog Output for IG
LINEAR (Nitrogen / Air
only)

When the analog output is setup, as described in section 6.5.6, for IG LINEAR, the
analog output voltage represents the pressure measured by the IG for nitrogen/air
only. The Linear analog output type provides a 0-10 V (dc) output signal that has a
direct linear relationship to the displayed pressure measured by the ion gauge only.
This selection covers 3 decades of pressure change. For example, if ANALOG
OUT 1 is programmed for IG LINEAR and the maximum pressure for AOUT LIN 1
selected is 1.00E-03 Torr, then the instrument provides a 10 volt analog output sig­nal when pressure as measured by IG is at 1.00E-03 Torr. Furthermore, the mini­mum pressure is automatically set to 1.00E-06 Torr, with a corresponding minimum
voltage output of 0.01 volts.

Constructing a table of these parameters may be useful in documenting the re­lationship of displayed pressure (measured by the IG) to the analog output voltage.
The following table is representative of a typical setup where the IG may be used in
a limited range of pressure measurement where a direct linear relationship exists
between the displayed pressure (mantissa) and the analog output signal.

Linear Analog Output Voltage - volts Measured (Displayed) Pressure - torr

0.01 1.00E-06

0.10 1.00E-05

1.00 1.00E-04

10.00 1.00E-03

If your application requires the analog output voltage to cover a pressure range
exceeding three decades, then consider using a log-linear analog output type for
the IG.

NOTE

The information discussed above regarding the Linear IG analog output applies
only to N2 / air. If you are using a gas other than N
Apply the Sensitivity Correction Factor by dividing the pressure derived (from using
the Linear IG output discussed above) by the specific Gas Sensitivity Correction
Factor to obtain the true pressure of the specific gas in your vacuum chamber.

Notes: The output voltage will switch to above +11 V (dc) under the following
conditions:

1) The IG sensor is turned off or any IG fault condition.

2) The pressure exceeds 1.00 × 10-3 Torr at 100 µA emission current,

5.00 × 10

-4

Torr at 4 mA emission current, 1.00 × 10-4 Torr at 10 mA emission

current for BAG05x series ion gauges.

7.7 Analog Output for CG1
or CG2 1 - 8 V (Nitrogen
/ Air only)

When the analog output is setup, as described in section 6.5.6, for CG1 1 – 8 V or
CG2 1 – 8 V, the analog output voltage represents the pressure measured by CG1
or CG2 for nitrogen/air only. Refer to section 8.3.3.1 if you are using a gas other
than nitrogen/air.

Analog output: Convection Gauge Log-linear 1 to 8 V (dc), 1 V per decade

A) The log-linear output signal and pressure are related by the following formulas
when units of measurement is in Torr and mbar:

(volts - 5)

P = 10

V = log10(P) + 5

Where P is the pressure in Torr or mbar, and V is the output signal in volts.
The output voltage is 1 V when pressure is at 1.00E-04 Torr.
The output voltage is 8 V when pressure is at 1.00E+03 Torr.

B) The log-linear output signal and pressure are related by the following formulas
when units of measurement is in pascals:

(volts - 3)

P = 10

V = log10(P) + 3

Where P is the pressure in pascals, and V is the output signal in volts.

Notes: An analog output of above +11 volts indicates a faulty convection
gauge or unplugged gauge cable.

54

/ air, refer to section 8.3.1.

2

tinb29e1 (2016-11) VGC083A_B.om

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]

0

0

9

0

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9

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Press

[Tor

1.00E-

2.00E-

5.00E-

1.00E-

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The foll
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04 1.0

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02 3.3

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wing chart s

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1 5.00

9 1.00

0 2.00

1 5.00

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0 2.00

1 5.00

9 1.00

0 2.00

ows the gra

nts in Torr.

Pres

[To

rr]

+00 5.

+00 5.

+00 5.

+01 6.

+01 6.

+01 6.

+02 7.

+02 7.

hical results

ure

Vol

-01 4.

-01 4.

age

[

]

01 3.0

99 4.0

00 5.0

01 6.0

99 7.0

00 7.6

01 8.0

99 9.0

00 1.0

01

f table and f

Pre

sure

[

orr]

E+02 7

E+02 7

E+02 7

E+02 7

E+02 7

E+02 7

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rmulas abov

V

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for

tinb29e1 (2016-11) VGC083A_B.om

55

7.8 Analog Output for CG1
or CG2 0 - 7 V (Nitrogen
/ Air only)

When the analog output is setup, as described in section 6.5.6, for CG1 0 – 7 V or
CG2 0 – 7 V, the analog output voltage represents the pressure measured by CG1
or CG2 for nitrogen/air only. Refer to section 8.3.3.2 if you are using a gas other
than nitrogen/air.

Analog output: Convection Gauge Log-linear 0 to 7 V (dc), 1 V per decade

A) The log-linear output signal and pressure are related by the following formulas
when units of measurement is in Torr and mbar:

(volts - 4)

P = 10

V = log10(P) + 4

Where P is the pressure in Torr or mbar, and V is the output signal in volts.
The output voltage is 0 V when pressure is at 1.00E-04 Torr.
The output voltage is 7 V when pressure is at 1.00E+03 Torr.

B) The log-linear output signal and pressure are related by the following formulas
when units of measurement is in pascals:

(volts - 2)

P = 10

V = log10(P) + 2

Where P is the pressure in pascals, and V is the output signal in volts.

Notes: An analog output of above +11 volts indicates a faulty convection
gauge or unplugged gauge cable.

Pressure

[Torr]

Voltage

[V]

Pressure

[Torr]

Voltage

[V]

Pressure

[Torr]

Voltage

[V]

1.00E-04 0.000 2.00E-01 3.300 3.00E+02 6.480

2.00E-04 0.301 5.00E-01 3.700 4.00E+02 6.600

5.00E-04 0.699 1.00E+00 4.000 5.00E+02 6.700

1.00E-03 1.000 2.00E+00 4.300 6.00E+02 6.780

2.00E-03 1.300 5.00E+00 4.700 7.00E+02 6.850

5.00E-03 1.700 1.00E+01 5.000 7.60E+02 6.880

1.00E-02 2.000 2.00E+01 5.300 8.00E+02 6.900

2.00E-02 2.300 5.00E+01 5.700 9.00E+02 6.950

5.00E-02 2.700 1.00E+02 6.000 1.00E+03 7.000

1.00E-01 3.000 2.00E+02 6.300

The following chart shows the graphical results of table and formulas above for
measurements in Torr.

56

tinb29e1 (2016-11) VGC083A_B.om

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7.9 Anal
or C
(Nitr

g Outpu
2 NON -

gen / Air

for CG1

IN

only)

When t
or CG2
CG1 or
other th

The firs
controll
"S-curv
proporti
Phillips
later ye
various
VGC08

1.00 ×

In gene
terpolat
the pre
analog
a speci
calculat
sented
output
curve"
order p
tion list

e analog out
NON - LIN, t
CG2 for nitro

an nitrogen/a

convection

r for the Con
" which repr

onal to the pr

Convectron

rs, the non-li

signal spans

duplicates t

0-4 torr to 5.6

ral, one may
ion technique

sure using th

utput voltag
ic pressure.
e the N

y the non-lin

oltage for th
sing a multi-

lynomial fun
d on the follo

2

air p

ut is setup,

e analog out

en/air only.

r.

nhanced pira

ectron® pro

sented the a

ssure inside

controllers

near voltage

f the original

e original S-

59 volts at 10

se linear in-

to calculate

e non-linear

measured a
ou may also
essure repre

ar analog

original "S-

egment, nth

tion calcula-

wing page.

s described i

ut voltage re
efer to sectio

i head introd

ided an anal

tual voltage
the pressure
ere designed

pplied to the

"S-curve". T

urve of 0.375

0 torr, nitrog

section 6.5.

resents the

n 8.3.3.3 if y

uced was the

g output sign
pplied acros

head enclosu

to output this

head was sc

e non-linear

volts at pres

n or air.

, for CG1 N
ressure mea

u are using a

Convectron

al referred to

the head cir

e. The Gran
head voltage
led to provid

nalog output

ure less than

N - LIN

ured by
gas

®

The

as the

uit,

ille-

and in

of the

tinb29e1 (2016-11) VGC0

83A_B.om

57

Pressure

[Torr]

Voltage

[V]

Pressure

[Torr]

0.000 0.3751 1.00E-01 0.8780 2.00E+02 5.0190

1.00E-04 0.3759 2.00E-01 1.1552 3.00E+02 5.1111

2.00E-04 0.3768 5.00E-01 1.6833 4.00E+02 5.2236

5.00E-04 0.3795 1.00E+00 2.2168 5.00E+02 5.3294

1.00E-03 0.3840 2.00E+00 2.8418 6.00E+02 5.4194

2.00E-03 0.3927 5.00E+00 3.6753 7.00E+02 5.4949

5.00E-03 0.4174 1.00E+01 4.2056 7.60E+02 5.5340

1.00E-02 0.4555 2.00E+01 4.5766 8.00E+02 5.5581

2.00E-02 0.5226 5.00E+01 4.8464 9.00E+02 5.6141

5.00E-02 0.6819 1.00E+02 4.9449 1.00E+03 5.6593

Note - An analog output of above +11 volts indicates a faulty convection
gauge or unplugged gauge cable.

The equations and coefficients for the nth order polynomial equation defined for
various pressure measurement ranges for the Non-linear analog output (S-curve)
for CG1 or CG2 for N2/air described above are given in the following table:

For 0 mTorr to about 2 Torr, the Non-Linear Analog Output voltage range of

0.375 to 2.842 volts, use this table.

Coefficients for y(x) = a + bx + cx2 + dx3 + ex4 +fx5

a -0.02585

b 0.03767

c 0.04563

d 0.1151

e -0.04158

f 0.008738

For 2 torr to about 100 torr, the Non-Linear Analog Output voltage range of 2.842

to 4.945 volts, use this table.

Coefficients for 󰇛󰇜=





a 0.1031

b -0.3986

c -0.02322

d 0.07438

e 0.07229

f -0.006866

For 100 torr to 1000 torr, the Non-Linear Analog Output voltage range of 4.94 to

5.659 volts, use this table.

Coefficients for 󰇛󰇜=





a 100.624

b -0.37679

c -20.5623

d 0.0348656

Where y(x) = pressure in Torr, x= measured analog output in volts

Example: Measured analog output voltage is 0.3840 V.
From first table shown above use equation:
y(x) = a + bx + cx2 + dx3 + ex4 +fx5

x = 0.3840 volts
a = -0.02585, b=0.03767, c=0.04563, d=0.1151, e=-0.04158, f=0.008738

y(x) = Pressure = 1.0E-03 Torr

58

Voltage

[V]







Pressure

[Torr]

tinb29e1 (2016-11) VGC083A_B.om

Voltage

[V]

7.10 Analog Output for CG1
or CG2 LINEAR
(Nitrogen / Air only)

When the analog output is setup, as described in section 6.5.6 , for CG1 LINEAR
or CG2 LINEAR, the analog output voltage represents the pressure measured by
the CG1 or CG2 for nitrogen/air only. The Linear analog output type provides a 0­10 V (dc) output signal that has a direct linear relationship to the displayed pres­sure measured by the CG1 or CG2 only. This selection covers 3 decades of pres­sure change. For example, if ANALOG OUT 1 is programmed for CG1 LINEAR
and the maximum pressure for AOUT LIN 1 selected is 1.00 Torr, then the instru­ments provides a 10 volt analog output signal when pressure as measured by CG1
is at 1.00 Torr. Furthermore, the minimum pressure is automatically set to 1.00E-03
torr, with a corresponding minimum voltage output of 0.01 volts.

Constructing a table of these parameters may be useful in documenting the re­lationship of displayed pressure (measured by the IG) to the analog output voltage.
The following table is representative of a typical setup where the CG may be used
in a limited range of pressure measurement where a direct linear relationship exists
between the displayed pressure (mantissa) and the analog output signal.

Linear Analog Output Voltage - volts Measured (Displayed) Pressure - torr

0.01 1.00E-03

0.10 1.00E-02

1.00 1.00E-01

10.00 1.00E+00

If your application requires the analog output voltage to cover a pressure range
exceeding three decades, then consider using a log-linear analog output type for
CG1 or CG2.

Note - An analog output of above +11 volts indicates a faulty convection
gauge or unplugged gauge cable.

tinb29e1 (2016-11) VGC083A_B.om 59

8 Using the Gauge with Different Gases

The following tables and explanation contain important information regarding the
use of ionization and convection gauges when used to measure pressure of gases
other than nitrogen /air. For both types of gauge heads, corrections must be
applied to both the display and analog outputs. This is particularly critical when
using convection gauges at higher pressures than measured by the ion gauge
when using gases other than N

8.1 Ion Gauge Display
Correction Factors for
Selected Gases

There are two methods that can be used for monitoring the IG display when using
gases other than nitrogen/air:

1) If you are using a gas other than N
tivity correction factor to the IG displayed measurement. Post a label on your ion
gauge display showing the correction factor to be used for the pressure of the gas
type you are measuring. The table below provides typical correction factors for ion
gauges when used with gas types other than N
surements, divide the displayed measured pressure by the correction factor for the
gas type you are measuring:

Ion Gauge Gas Sensitivity Correction Factors for selected gases

Gas Sensitivity

CorrectionFactor

He 0.18 H2O 1.12

Ne 0.30 NO 1.16

D2 0.35 Ar 1.29

H2 0.46 CO2 1.42

N2 1.00 Kr 1.94

Air 1.00 SF6 2.50

O2 1.01 Xe 2.87

CO 1.05 Hg 3.64

For example, if the gas in use is argon (Ar) and the ion gauge measured pressure
is displayed as 4.00 × 10
mined by the following equation:

/air.

2

/ air, you must manually apply a gas sensi-

2

/ air. To correct the display mea-

2

Gas Sensitivity

Correction Factor

-7

Torr, the actual, true pressure of argon is then deter-

2) Alternatively, you may correct the display for a direct reading of pressure for the
type of gas you are using by adjusting the sensitivity factor for the IG. If you adjust
the sensitivity factor for your ion gauge to compensate the readout of pressure for a
gas type other than nitrogen / air, the displayed pressure readout for that device
must be annotated to indicate that the displayed pressure is for the gas type the
readout is compensated for.

In the above example, if the N

sensitivity of the ion gauge being used is 10 torr-1

2

("10 per torr"), the sensitivity factor programmed during setup of the VGC083 could
be set for 12.9 (~13) so that the pressure readout would directly indicate the true
pressure of argon. Again, the display line for that particular device pressure read­out would require annotation (a user applied label) so as to not conflict with the gas
type selection/notation of nitrogen (N

).

2

60

tinb29e1 (2016-11) VGC083A_B.om

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Gas
Gau

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s on Con

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Convec
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sensor
roundin
mal co
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are nor
tion mu
gas in u
play fro

For nitr
agreem
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gases
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an INFICO

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ent between i

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re similar. Th

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conductivitie

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om true pres

ecome the p

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ry and mounti

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these two g

or example,

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auge head.

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the calibratio

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s is usually a

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and mixtures

gs and outpu

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how differen

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throughout t
alibration cur

tween indicat

nction of the

ure readings

res, convecti
ss from the s

1 torr depen

s properties.

s far as ther

ences in read

mosphere us

chamber is o

the partial pr

thermal con
es heat loss i
ty of the gas

have differe
s will also be

t loss type g

N2 is used, c

tween N2 an

gases affect

hows excelle

e range from

es for the di
d and true p
ifference be

ay diverge
n currents in
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s on gauge t

al conductivit
ings at highe
ing N2, you m

ened and air
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uctivity

a
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gradu-

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The Y­manom
gas co
gauge
(CVG)
the res

tinb29e1 (2016-11) VGC0

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ter, a diaphr

position. Th

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X-axis is the
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Phillips® Con

of these typ

tual pressur

t measures
pressure rea
readings for

ectron® gaug

s of gauges i

as measure

rue total pres

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virtually indi

by a capacit

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by the conve

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61

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Risk of o

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Using a t

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xercise cauti

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ictated by the

d

r. An O-ring

b
f

om the fitting

this data ap
ee Table 1 b

he gas is nitr

500 Torr.

he gas is arg

9 Torr.

filling your va

Torr true pr

ill your syste

essurize you

he gas is heli

when press
atmosphere
t. You proba

amber to atm

ssure, may p

t may be insi

mples illustr

gas conversi

nel and/or d

cautions w

ssure relief v
the dangers

ing label on

rr Indicated

at an operat

ot exceed a

sume this da
same.

er pressurizi

ing pressure

pressure rel

ssel to less t

ssure syste

ermal condu

result in de

hen measur

n when admi

) of gas into

pressure ves

the devices

n some case

type of conn

compression

if internal pre

lies to other

low and note

gen (N2), wh

n (Ar), when

uum system

ssure your g

, attempting

chamber wh

m (He), the

re reaches a

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ly will not ca

sphere with

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de the cham

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lve or burst

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our gauge re

ressure" (fill

r using the v

afe operatin

a applies to

g a gas cont

easurement

ief device to

an the maxi

and all devi

tivity gauge

th or serious

ng pressures

ting positive

ny enclosed

el or chamb

nd vessel in
, the maximu
ctions or fitti
itting type de

sure exceed

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the following

n the true to

he true pres

with Ar, when

uge will be r
to increase th
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auge will rea

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pressure.

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devices that

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injury. Be sur

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volume. Insta
r to limit the
ernal volume

allowable

gs used to at

ice may be f

the local ba

ges which m

examples:

al pressure i

ure is 100 T

your system

ading about
e reading up
nt a hazard.

d 1.10E+03 (

ue pressure

her hazards
your vacuu
amber press
h personnel i

r than nitroge

ecautions co

n N2:

amber to pr

urizing the ch

"Do Not Exc
r the gas typ

r system an

n gauges, w

l and attache

re calibrated

internal pres

working pre

the system.

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to use gas

r than N2 / ai

ve local am

ll pressure re

aximum allo

to less than t

orking press

ach devices

rcibly releas

ometric, amb

ay or may no

500 Torr, th

rr, the gauge

reaches a

3 Torr. Con-

o 760 Torr,

verpressure
nd opening

or both peo-

system, but

re at only

the proximit

(N2) without

ld result in

vide pro-

mber.

ed
you are
connected

ich may or

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for a specific
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sure rating f

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able workin
e lowest
re may be

o your cham-

d (ejected)

ent pressure.

r

62

tinb29e

(2016-11) VGC083A_B.

m

The table below shows the convection gauge displayed readings at various
pressures for several commonly used gas types:

True

Pressure

N2 Ar He O2 CO2 Kr Freon12 Freon22 D2 Ne CH4

(Torr)

1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4

2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4

5.00E-4 5.00E-4 5.00E-4 5.00E-4 5.00E-4 5.00E-4 3.00E-4 5.00E-4 5.00E-4 5.00E-4 5.00E-4 5.00E-4

1.00E-3 1.00E-3 7.00E-4 8.00E-4 1.00E-3 1.10E-3 4.00E-4 1.50E-3 1.50E-3 1.30E-3 7.00E-4 1.70E-3

2.00E-3 2.00E-3 1.40E-3 1.60E-3 2.00E-3 2.30E-3 1.00E-3 3.10E-3 3.10E-3 2.40E-3 1.50E-3 3.30E-3

5.00E-3 5.00E-3 3.30E-3 4.00E-3 5.00E-3 4.40E-3 2.30E-3 7.60E-3 7.00E-3 6.00E-3 3.50E-3 7.70E-3

1.00E-2 1.00E-2 6.60E-3 8.10E-3 9.70E-3 1.10E-2 4.80E-3 1.47E-2 1.35E-2 1.21E-2 7.10E-3 1.53E-2

2.00E-2 2.00E-2 1.31E-2 1.61E-2 1.98E-2 2.22E-2 9.50E-3 2.99E-2 2.72E-2 2.43E-2 1.41E-2 3.04E-2

5.00E-2 5.00E-2 3.24E-2 4.05E-2 4.92E-2 5.49E-2 2.35E-2 7.25E-2 6.90E-2 6.00E-2 3.48E-2 7.72E-2

1.00E-1 1.00E-1 6.43E-2 8.20E-2 9.72E-2 1.07E-1 4.68E-2 1.43E-1 1.36E-1 1.21E-1 7.00E-2 1.59E-1

2.00E-1 2.00E-1 1.26E-1 1.65E-1 1.94E-1 2.10E-1 9.11E-2 2.75E-1 2.62E-1 2.50E-1 1.41E-1 3.15E-1

5.00E-1 5.00E-1 3.12E-1 4.35E-1 4.86E-1 4.89E-1 2.17E-1 6.11E-1 5.94E-1 6.87E-1 3.59E-1 7.81E-1

1.00E+0 1.00E+0 6.00E-1 9.40E-1 9.70E-1 9.50E-1 4.00E-1 1.05E+0 1.04E+0 1.55E+0 7.45E-1 1.60E+0

2.00E+0 2.00E+0 1.14E+0 2.22E+0 1.94E+0 1.71E+0 7.00E-1 1.62E+0 1.66E+0 4.13E+0 1.59E+0 3.33E+0

5.00E+0 5.00E+0 2.45E+0 1.35E+1 4.98E+0 3.34E+0 1.28E+0 2.45E+0 2.62E+0 2.46E+2 5.24E+0 7.53E+0

1.00E+1 1.00E+1 4.00E+0 OP 1.03E+1 4.97E+0 1.78E+0 2.96E+0 3.39E+0 OP 2.15E+1 2.79E+1

2.00E+1 2.00E+1 5.80E+0 OP 2.23E+1 6.59E+0 2.29E+0 3.32E+0 3.72E+0 OP 5.84E+2 3.55E+2

5.00E+1 5.00E+1 7.85E+0 OP 7.76E+1 8.22E+0 2.57E+0 3.79E+0 4.14E+0 OP OP 8.42E+2

1.00E+2 1.00E+2 8.83E+0 OP 2.09E+2 9.25E+0 2.74E+0 4.68E+0 4.91E+0 OP OP OP

2.00E+2 2.00E+2 9.79E+0 OP 2.95E+2 1.23E+1 3.32E+0 5.99E+0 6.42E+0 OP OP OP

3.00E+2 3.00E+2 1.13E+1 OP 3.80E+2 1.69E+1 3.59E+0 6.89E+0 7.52E+0 OP OP OP

4.00E+2 4.00E+2 1.35E+1 OP 4.85E+2 2.24E+1 3.94E+0 7.63E+0 8.42E+0 OP OP OP

5.00E+2 5.00E+2 1.61E+1 OP 6.04E+2 2.87E+1 4.21E+0 8.28E+0 9.21E+0 OP OP OP

6.00E+2 6.00E+2 1.88E+1 OP 7.30E+2 3.64E+1 4.44E+0 8.86E+0 9.95E+0 OP OP OP

7.00E+2 7.00E+2 2.18E+1 OP 8.59E+2 4.61E+1 4.65E+0 9.42E+0 1.07E+1 OP OP OP

7.60E+2 7.60E+2 2.37E+1 OP 9.41E+2 5.39E+1 4.75E+0 9.76E+0 1.11E+1 OP OP OP

8.00E+2 8.00E+2 2.51E+1 OP 9.97E+2 5.94E+1 4.84E+0 9.95E+0 1.14E+1 OP OP OP

9.00E+2 9.00E+2 2.85E+1 OP OP 7.95E+1 4.99E+0 1.05E+1 1.20E+1 OP OP OP

1.00E+3 1.00E+3 3.25E+1 OP OP 1.11E+2 5.08E+0 1.11E+1 1.27E+1 OP OP OP

Values listed under each gas type are in Torr units
Over Pressure (OP)= 1.10E+03 Torr

When using gases other than nitrogen/air, you must use the above look-up table to
determine the true pressures of selected gases as measured by convection
gauges. For example, if the gas you are using in your vacuum system chamber is
predominately argon (Ar), a displayed pressure of 1.14E+00 Torr means the actual
true pressure of argon is 2.00E+00 Torr based on the conversion information pro­vided in the above table.

Example: If the gas is argon (Ar), when the true pressure is 100 Torr, the gauge will
read only about 9 torr.

tinb29e1 (2016-11) VGC083A_B.om 63

8.3

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8.3.1

ffects of

ases on

Ion Gaug
Correctio
Selected

Example

Different
Analog O

Analog

n Factors

ases

utput

utput
or

he following t

u

e of ionizati

pes of gauge

t

hen using a

llowing steps

rrection fact

) Refer to s

ceiving instr

) Apply the

e pressure v

b

low:

n Gauge Ga

I

Gas

He

Ne

D2

H2

N2

Air

O2

CO

NALOG OUT

4 volts. Pres

(nitrogen) =

(4 - 10)

= 10

= 1.00 x 10

bles and ex

n and conve

s, corrections

y of the anal

to convert th

rs for select

ction 7 and u
ment to pres

ensitivity Co

lue obtained

Sensitivity

Sensitivity

orrectionFac

0.18

0.30

0.35

0.46

1.00

1.00

1.01

1.05

1 selected is

sure unit is to

(volts - 10)

0

-6

Torr (based

lanation cont
tion gauges

must be appl

g outputs as

analog outp

d gases:

e the related

ure. This pre

rection Facto
in step A. Us

orrection Fac

or

IG LOG N-1

r.

n nitrogen)

ied to the an

. The gas in

ins importan

n gases othe

igned to ion

t to pressure

equation to c
sure value is

for the parti
correction f

ors for select

Gas

C

H2O

NO

Ar

CO2

Kr

SF6

Xe

Hg

information
than N2 / Air

log outputs.

auge only, u

: Ion gauge a

onvert the vo

based on nit

ular gas you
ctors and ex

d gases

Sensitivity

rrection Fact

1.12

1.16

1.29

1.42

1.94

2.50

2.87

3.64

se is argon.

egarding the

For both

e the

alog output

tage in your
ogen gas.

re using to
mple listed

r

oltage outpu

8.3.2

8.3.2.

IG - CG1
Output C
Factors f
Gases

IG-CG1

Output C

- Ion Ga

.5 - 7V An
rrection
r Selecte

.5 - 7V An

orrection F

ge Range

alog

log

ctors

pplying the S

a

bove,

he correction

nge measur

hen using th

r gases othe

d

ifferent press

) Pressure r

li

ted in sectio

termine pre

) Pressure r

1

00 Torr Use

p

ressure from

) When usin

d

cade) for ga

utput to press

o
t

overpressur

) Refer to se

iving instru

nsitivity Cor

factor must b

d by the ion

IG - CG1 a

than N2 / Air

re ranges as

nge for IG fr

5.4, use the

sure from th

nge of over

the correctio

he voltage fo

the IG - CG

es other tha

ure for IG wh

shut down

tion 7.1 and

ent to pressu

ection Factor

applied to t

auge.

alog output
the analog o

discussed b

m 4.00 × 10
correction fa

voltage for s

ressure shut

factors liste
selected ga

analog outp
N2 / Air, use

n operating i

alues listed i

elated equati
e. This press

of 1.29 for ar

e analog out

ode (Log-Lin

tput is interp

low:

-1

0

Torr to over

tors listed in

lected gases

own value li

in section 8.

es (convecti

t mode (Log-

the following

the pressur

section 5.4.

n to convert

ure value is b

on listed in t

ut over the e

ar 0.5 - 7 V,

reted differen

ressure shut

ection 8.3.2.

(ion gauge r

ted in sectio

3.2.2 below t
n gauge rang

Linear 0.5 - 7
steps to conv

range of 4.0

the voltage i

ased on nitro

e table

tire pressur

.5 V/decade

ly over two

down value
below to
nge).

5.4 to

determine

e).

V, 0.5 V /

rt the analo

-10

0 × 10

your re-

en.

Torr

64

tinb29e

(2016-11) VGC083A_B.

m

Exa

m

e

u

s

m

e

v

n

t

000

0

o

(

e

g

p

r

s

r

s

o

11.11.21.41.92.52.83.6

n

e

g

a

ple

C) App
pressur
below).

Ion Ga

Gas

He

Ne

D

2

H

2

N

2

Air

O

2

CO

The ga

ly the sensiti

value obtai

ge Gas Sens

Sen

Correc

in use is arg

ity correction

ed in step A

itivity Correcti

sitivity
ionFactor

.18

.30

.35

.46

1

.00

1

.00

1

.01

1

.05

n. Output vo

actor for the

Use correctio

n Factors fo

Gas

H2O

NO

Ar

CO

2

Kr

SF

6

Xe

Hg

tage is 3 volt

particular gas

n factors and

selected ga

Sens

Correcti

1.

. Pressure u

you are usin

example liste

es

tivity
n Factor

2

6

9

2

4

0

7

4

it is torr.

to the

d

The sa
measur

e correction
d by the ion

factor must b

auge.

applied ove

the entire pr

ssure range

s

tinb29e1 (2016-11) VGC0

83A_B.om

65

8.3.2.2 IG-CG1 0.5 - 7V Analog
Output Correction Factors

- Convection Gauge
Range

True

Pressure

N2 Ar He O2 CO2 KR Freon12 Freon22 D2 Ne CH4

(Torr)

1.00E-3 4.000 3.923 3.952 4.000 4.021 3.801 4.088 4.088 4.057 3.923 4.115

2.00E-3 4.151 4.073 4.102 4.151 4.181 4.000 4.246 4.246 4.190 4.088 4.259

5.00E-3 4.349 4.259 4.301 4.349 4.322 4.181 4.440 4.423 4.389 4.272 4.443

1.00E-2 4.500 4.410 4.454 4.493 4.521 4.341 4.584 4.565 4.541 4.426 4.592

2.00E-2 4.651 4.559 4.603 4.648 4.673 4.489 4.738 4.717 4.693 4.575 4.741

5.00E-2 4.849 4.755 4.804 4.846 4.870 4.686 4.930 4.919 4.889 4.771 4.944

1.00E-1 5.000 4.904 4.957 4.994 5.015 4.835 5.078 5.067 5.041 4.923 5.101

2.00E-1 5.151 5.050 5.109 5.144 5.161 4.980 5.220 5.209 5.199 5.075 5.249

5.00E-1 5.349 5.247 5.319 5.343 5.345 5.168 5.393 5.387 5.418 5.278 5.446

1.00E+0 5.500 5.389 5.487 5.493 5.489 5.301 5.511 5.509 5.595 5.436 5.602

2.00E+0 5.651 5.528 5.673 5.644 5.616 5.423 5.605 5.610 5.808 5.601 5.761

5.00E+0 5.849 5.695 6.065 5.849 5.762 5.554 5.695 5.709 6.695 5.860 5.938

1.00E+1 6.000 5.801 6.006 5.848 5.625 5.736 5.765 6.166 6.223

2.00E+1 6.151 5.882 6.174 5.909 5.680 5.761 5.785 6.883 6.775

5.00E+1 6.349 5.947 6.445 5.957 5.705 5.789 5.809 6.963

1.00E+2 6.500 5.973 6.660 5.983 5.719 5.835 5.846

2.00E+2 6.651 5.995 6.735 6.045 5.761 5.889 5.904

3.00E+2 6.739 6.027 6.790 6.114 5.778 5.919 5.938

4.00E+2 6.801 6.065 6.843 6.175 5.798 5.941 5.963

5.00E+2 6.849 6.103 6.891 6.229 5.812 5.959 5.982

6.00E+2 6.889 6.137 6.932 6.281 5.824 5.974 5.999

7.00E+2 6.923 6.169 6.967 6.332 5.834 5.987 6.015

7.60E+2 6.940 6.187 6.987 6.366 5.838 5.995 6.023

8.00E+2 6.952 6.200 6.999 6.387 5.842 5.999 6.028

9.00E+2 6.977 6.227 6.450 5.849 6.011 6.040

1.00E+3 7.000 6.256 6.523 5.853 6.023 6.052

Example

8.3.3 Convection gauge analog

output for selected gases

When using the IG - CG1 analog output mode (Log-Linear 0.5 - 7 V, 0.5 V/decade)
for gases other than N

/ Air, use the following look-up table and information to

2

convert the analog output to pressure when operating in the pressure range of
overpressure shutdown value listed in section 5.4 to 1000 Torr. The look-up table
has been derived from equation listed in section 7.1.

Analog output IG - CG1 when in the pressure range of overpressure shutdown
value to 1000 Torr

Values listed under each gas type are in volts (V).

The gas in use is O2. Voltage output is 5.144 volts.
True pressure of O

is 2.00E-01 Torr

2

If you intend to use any of the analog outputs to represent measurements from
CG1 or CG2 for gases other than N

/ Air, you must also apply corrections to the

2

analog output. Use the following tables to determine pressure from voltage for
gases other than nitrogen or air.

66

tinb29e1 (2016-11) VGC083A_B.om

8.3.3.1 CG1 1 - 8 V or CG2 1 - 8 V
Analog Output Correction
Factors - Convection
Gauge

True

Pressure

N2 Ar He O2 CO2 KR Freon12 Freon22 D2 Ne CH4

(Torr)

1.00E-4 1.000 1.000 1.000 1.000 1.000 1.000 1.000 1.000 1.000 1.000 1.000

2.00E-4 1.301 1.301 1.301 1.301 1.301 1.301 1.301 1.301 1.301 1.301 1.301

5.00E-4 1.699 1.699 1.699 1.699 1.699 1.477 1.699 1.699 1.699 1.699 1.699

1.00E-3 2.000 1.845 1.903 2.000 2.041 1.602 2.176 2.176 2.114 1.845 2.230

2.00E-3 2.301 2.146 2.204 2.301 2.362 2.000 2.491 2.491 2.380 2.176 2.519

5.00E-3 2.699 2.519 2.602 2.699 2.643 2.362 2.881 2.845 2.778 2.544 2.886

1.00E-2 3.000 2.820 2.908 2.987 3.041 2.681 3.167 3.130 3.083 2.851 3.185

2.00E-2 3.301 3.117 3.207 3.297 3.346 2.978 3.476 3.435 3.386 3.149 3.483

5.00E-2 3.699 3.511 3.607 3.692 3.740 3.371 3.860 3.839 3.778 3.542 3.888

1.00E-1 4.000 3.808 3.914 3.988 4.029 3.670 4.155 4.134 4.083 3.845 4.201

2.00E-1 4.301 4.100 4.217 4.288 4.322 3.960 4.439 4.418 4.398 4.149 4.498

5.00E-1 4.699 4.494 4.638 4.687 4.689 4.336 4.786 4.774 4.837 4.555 4.893

1.00E+0 5.000 4.778 4.973 4.987 4.978 4.602 5.021 5.017 5.190 4.872 5.204

2.00E+0 5.301 5.057 5.346 5.288 5.233 4.845 5.210 5.220 5.616 5.201 5.522

5.00E+0 5.699 5.389 6.130 5.697 5.524 5.107 5.389 5.418 7.391 5.719 5.877

1.00E+1 6.000 5.602 6.013 5.696 5.250 5.471 5.530 6.332 6.446

2.00E+1 6.301 5.763 6.348 5.819 5.360 5.521 5.571 7.766 7.550

5.00E+1 6.699 5.895 6.890 5.915 5.410 5.579 5.617 7.925

1.00E+2 7.000 5.946 7.320 5.966 5.438 5.670 5.691

2.00E+2 7.301 5.991 7.470 6.090 5.521 5.777 5.808

3.00E+2 7.477 6.053 7.580 6.228 5.555 5.838 5.876

4.00E+2 7.602 6.130 7.686 6.350 5.595 5.883 5.925

5.00E+2 7.699 6.207 7.781 6.458 5.624 5.918 5.964

6.00E+2 7.778 6.274 7.863 6.561 5.647 5.947 5.998

7.00E+2 7.845 6.338 7.934 6.664 5.667 5.974 6.029

7.60E+2 7.881 6.375 7.974 6.732 5.677 5.989 6.045

8.00E+2 7.903 6.400 7.999 6.774 5.685 5.998 6.057

9.00E+2 7.954 6.455 6.900 5.698 6.021 6.079

1.00E+3 8.000 6.512 7.045 5.706 6.045 6.104

Example

When using the Log-Linear convection gauge analog output mode (Log-Linear
1 - 8 V, 1 V/decade) for gases other than N

/ Air, use the following look-up table

2

and information to convert the analog output to pressure. The look-up table has
been derived from the equation provided in section 7.7

Analog Output for Log-Linear CG1 1-8V or CG2 1-8V

Values listed under each gas type are in volts (V).

The gas in use is O2. Voltage output is 4.288 volts.
True pressure of O

is 2.00E-01 Torr

2

tinb29e1 (2016-11) VGC083A_B.om 67

8.3.3.2 CG1 0 - 7 V or CG2 0 - 7 V
Analog Output Correction
Factors - Convection
Gauge

True

Pressure

N2 Ar He O2 CO2 KR Freon12 Freon22 D2 Ne CH4

(Torr)

1.00E-4 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000

2.00E-4 0.301 0.301 0.301 0.301 0.301 0.301 0.301 0.301 0.301 0.301 0.301

5.00E-4 0.699 0.699 0.699 0.699 0.699 0.477 0.699 0.699 0.699 0.699 0.699

1.00E-3 1.000 0.845 0.903 1.000 1.041 0.602 1.176 1.176 1.114 0.845 1.230

2.00E-3 1.301 1.146 1.204 1.301 1.362 1.000 1.491 1.491 1.380 1.176 1.519

5.00E-3 1.699 1.519 1.602 1.699 1.643 1.362 1.881 1.845 1.778 1.544 1.886

1.00E-2 2.000 1.820 1.908 1.987 2.041 1.681 2.167 2.130 2.083 1.851 2.185

2.00E-2 2.301 2.117 2.207 2.297 2.346 1.978 2.476 2.435 2.386 2.149 2.483

5.00E-2 2.699 2.511 2.607 2.692 2.740 2.371 2.860 2.839 2.778 2.542 2.888

1.00E-1 3.000 2.808 2.914 2.988 3.029 2.670 3.155 3.134 3.083 2.845 3.201

2.00E-1 3.301 3.100 3.217 3.288 3.322 2.960 3.439 3.418 3.398 3.149 3.498

5.00E-1 3.699 3.494 3.638 3.687 3.689 3.336 3.786 3.774 3.837 3.555 3.893

1.00E+0 4.000 3.778 3.973 3.987 3.978 3.602 4.021 4.017 4.190 3.872 4.204

2.00E+0 4.301 4.057 4.346 4.288 4.233 3.845 4.210 4.220 4.616 4.201 4.522

5.00E+0 4.699 4.389 6.130 4.697 4.524 4.107 4.389 4.418 6.391 4.719 4.877

1.00E+1 5.000 4.602 5.013 4.696 4.250 4.471 4.530 5.332 5.446

2.00E+1 5.301 4.763 5.348 4.819 4.360 4.521 4.571 6.766 6.550

5.00E+1 5.699 4.895 5.890 4.915 4.410 4.579 4.617 6.925

1.00E+2 6.000 4.946 6.320 4.966 4.438 4.670 4.691

2.00E+2 6.301 4.991 6.470 5.090 4.521 4.777 4.808

3.00E+2 6.477 5.053 6.580 5.228 4.555 4.838 4.876

4.00E+2 6.602 5.130 6.686 5.350 4.595 4.883 4.925

5.00E+2 6.699 5.207 6.781 5.458 4.624 4.918 4.964

6.00E+2 6.778 5.274 6.863 5.561 4.647 4.947 4.998

7.00E+2 6.845 5.338 6.934 5.664 4.667 4.974 5.029

7.60E+2 6.881 5.375 6.974 5.732 4.677 4.989 5.045

8.00E+2 6.903 5.400 6.999 5.774 4.685 4.998 5.057

9.00E+2 6.954 5.455 5.900 4.698 5.021 5.079

1.00E+3 7.000 5.512 6.045 4.706 5.045 5.104

Example

When using the Log-Linear convection gauge analog output mode (Log-Linear
0 - 7 V, 1 V/decade) for gases other than N

/ Air, use the following look-up table

2

and information to convert the analog output to pressure. The look-up table has
been derived from the equation provided in section 7.8

Values listed under each gas type are in volts (V (dc)).

The gas in use is O2. Voltage output is 3.288 volts.
True pressure of O

is 2.00E-01 Torr

2

68

tinb29e1 (2016-11) VGC083A_B.om

8.3.3.3 CG1 NON-LIN or CG2
NON-LIN Analog Output
Correction Factors ­Convection Gauge

True

Pressure

(Torr)

0 0.3751 0.375 0.375 0.375 0.375 0.375 0.375 0.375 0.375 0.375 0.375

1.00E-4 0.3759 0.3757 0.3755 0.376 0.376 0.3755 0.376 0.376 0.376 0.3757 0.3766

2.00E-4 0.3768 0.376 0.3765 0.377 0.377 0.3768 0.378 0.378 0.377 0.3763 0.378

5.00E-4 0.3795 0.378 0.379 0.38 0.381 0.3772 0.382 0.381 0.381 0.3782 0.3825

1.00E-3 0.384 0.381 0.382 0.384 0.385 0.379 0.388 0.388 0.386 0.381 0.3896

2.00E-3 0.3927 0.387 0.389 0.392 0.395 0.384 0.401 0.4 0.396 0.388 0.403

5.00E-3 0.4174 0.403 0.409 0.417 0.412 0.395 0.437 0.432 0.425 0.405 0.438

1.00E-2 0.4555 0.429 0.441 0.453 0.462 0.415 0.488 0.48 0.47 0.433 0.492

2.00E-2 0.5226 0.477 0.497 0.521 0.536 0.451 0.581 0.566 0.549 0.484 0.584

5.00E-2 0.6819 0.595 0.637 0.679 0.705 0.544 0.778 0.764 0.727 0.608 0.796

1.00E-1 0.878 0.745 0.814 0.868 0.9 0.668 1.009 0.99 0.944 0.768 1.053

2.00E-1 1.1552 0.962 1.068 1.141 1.179 0.847 1.315 1.291 1.265 1.002 1.392

5.00E-1 1.6833 1.386 1.589 1.664 1.668 1.194 1.826 1.805 1.914 1.469 2.014

1.00E+0 2.2168 1.818 2.164 2.195 2.172 1.536 2.257 2.247 2.603 1.976 2.632

2.00E+0 2.8418 2.333 2.939 2.814 2.695 1.921 2.647 2.666 3.508 2.631 3.313

5.00E+0 3.6753 3.028 4.387 3.672 3.316 2.429 3.029 3.09 5.059 3.715

1.00E+1 4.2056 3.48 5.774 4.225 3.67 2.734 3.204 3.33 6.361 4.605 4.699

2.00E+1 4.5766 3.801 7.314 4.62 3.903 2.966 3.308 3.414 5.406 5.172

5.00E+1 4.8464 4.037 4.916 4.071 3.075 3.43 3.509 6.159 5.583

1.00E+2 4.9449 4.122 5.026 4.154 3.134 3.618 3.66 6.483 5.72

2.00E+2 5.019 4.192 5.106 4.336 3.269 3.827 3.883 6.661 5.86

3.00E+2 5.1111 4.283 5.2 4.502 3.384 3.938 4.005 6.726

4.00E+2 5.2236 4.386 5.315 4.621 3.466 4.016 4.088 6.767 6.103

5.00E+2 5.3294 4.477 5.422 4.708 3.526 4.076 4.151 6.803

6.00E+2 5.4194 4.55 5.515 4.775 3.573 4.124 4.203 6.843 6.342

7.00E+2 5.4949 4.611 5.592 4.83 3.613 4.166 4.247 6.89

7.60E+2 5.534 4.643 5.633 4.86 3.632 4.19 4.271 6.92

8.00E+2 5.5581 4.663 5.658 4.877 3.645 4.203 4.286 6.942 6.519

9.00E+2 5.6141 4.706 5.713 4.919 3.674 4.237 4.321 7

1.00E+3 5.6593 4.745 5.762 4.955 3.69 4.27 4.354 7.056 6.642

N2 Ar He O2 CO2 KR Freon12 Freon22 D2 Ne CH4

When using the Non-Linear convection gauge analog output mode for gases other
than N

/ Air, use the following look-up table and information to convert the analog

2

output to pressure. The look-up table has been derived from the equation provided
in section 7.9

Values listed under each gas type are in volts (V (dc)).

tinb29e1 (2016-11) VGC083A_B.om 69

9 Communication Protocol (Serial Interface)

9.1 Device Specific Serial
Communication Info

The VGC083 provides RS232 and RS485 serial communications capability. The
following information and the command protocol summaries listed in the following
sub-sections of this chapter can be used to establish serial communications with
the device. Four distinct protocols (COM type) are defined: INFICON RS232 and
RS485 protocol as well as the RS232 and RS485 protocols compatible with GP
Series 307 and 358 controllers. The user has access from the front panel main
menu to change settings for COM Type, Baud Rate, Data Bits, Parity, Stop Bits
and device Address (when using RS485).

Baud Rate is selectable at 300, 600, 1200, 2400, 4800, 9600, 19200 or
38400 baud.

Data bits may be set to either 7 or 8.

Parity selection may be set to None, Even or Odd.

Either 1 or 2 Stop Bits may be selected.

The device address when using RS485 can be within the range 00 to FF hexadeci­mal (Default = 01).

There is a finite period of time between the time a command is sent from a terminal
(PC COM Port, for example) and the point in time in which the VGC083 starts to
send a response to that command. This delay is dependent upon the command
sent and the baud rate.

9.2 INFICON RS232 / RS485
Command Protocol
Summary

The maximum command repetition rate will depend on the length of the command
sent and the response received, as well as the baud rate. The maximum repetition
rate for the baud rate you are using can be found in the following table:

Selected Baud

Rate

38400 38 ms 26 μs

19200 46 ms 52 μs

9600 61 ms 1.0 ms

4800 93 ms 2.0 ms

2400 156 ms 4.1 ms

1200 280 ms 8.3 ms

600 530 ms 16 ms

300 1030 ms 33 ms

The following notes are intended to be understood by the user when using
INFICON's RS232 and RS485 command protocol with the VGC083.

1. Default settings are 19,200 baud rate, 8 data bits, No Parity, 1 stop bit.

2. The baud rate can be set to different values using the front panel soft-keys.

3. All Responses are 13 characters long.

4. 'xx' is the address of the device (00 thru FF). For RS232, 'xx' is replaced with
two space characters.

Repetition Rate Receive to Transmit

Time

70

tinb29e1 (2016-11) VGC083A_B.om

9.3 INFICON RS232 and
RS485 Command
Protocol Summary

COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES

READ ION GAUGE
PRESSURE

READ CGn
PRESSURE

READ AI Pressure Read the current pressure

Read the current displayed
pressure of the ion gauge in
the same units of measure
on display

Read the current pressure
for CGn in the same units of
measure on display

for AI in the same units of
measure on display

5. <CR> is a carriage return, a non-printable character. Do not enter <CR> from
your keyboard. A carriage return, non-printable character may be entered as
the Unicode C0 controls specified value: 0D hexadecimal (13 decimal). From
your keyboard, a key entry sequence of CNTL-M may be used to obtain the
required character for a carriage return when using certain terminal emulator
programs.

6. '_' represents a 'space' character. Press the space bar on your keyboard. Do
not enter a '_' (underscore) character.

7. All commands sent to the module start with a '#' character, and all normal
responses from the module start with a '*' character. Error responses start with
a "?".

8. A valid address must be used [Factory default = 01] when using the RS485
protocol. The VGC083 will not respond to a command with an invalid address
while using RS485.

9. The command syntax examples used in the protocol summary table for ASCII
are shown in scientific notation. However, floating point notation is acceptable
as long as a leading digit is entered as '0.' or '1.', etc. There must be a digit to
the left of the decimal point. For example, when constructing the syntax for the
command to set the CGn zero value (e.g., #xxTZn_x.xxE-pp<CR> when using
scientific notation), use either #xxTZn_0.00<CR>, or #xxTZn_0<CR>. A simple
'0' is valid for the pressure entry.

The RS232 mode is the same as RS485, except ADDRESS is ignored in RS232
mode and can be eliminated from the command string or replaced with space
characters. Responses will not return ADDRESS; the ADDRESS is replaced with
space characters. All pressure measurement responses are in absolute pressure
units as selected by the user.

Table "INFICON RS232 and RS485 Command Protocol Summary"

#xxRDIG<CR>

e.g., : #01RDIG<CR>

where, xx = the two digit
address of the device (node)

*xx_y.yyEzpp<CR>

where,

y.yy = mantissa,

z = sign of the exponent +/-

and pp = the exponent e.g., :
*01_1.53E-06<CR> When IG is
off: *01_1.10E+03

When IG is not connected:

*01_9.90E+09

#xxRDCGn<CR>

e.g., : #01RDCG1<CR>

where, n=1 or 2 (CG1 or CG2)

*xx_ y.yyEzpp <CR>

e.g., : *01_7.60E+02<CR>

When CG is over ranged:
*01_1.10E+03

#xxRDAI<CR>

e.g., : #01RDAI<CR>

*xx_ y.yyEzpp <CR>

e.g., : *01_7.60E+02<CR>

When AI is over ranged or not
powered: *01_1.10E+03

(continued)

tinb29e1 (2016-11) VGC083A_B.om 71

Table "INFICON RS232 and RS485 Command Protocol Summary" (continued)

COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES

READ all Process
Control (PC, or
Relay) states

Read the current state of all
process control setpoint
relays

#xxRL<CR>

e.g., : #01RL<CR>

*xx_003F_RL_<CR>

In the example response above,
the 'F' represents the first 4 re­lays; relays 5 and 6 are the sec­ond digit (the '3') of the response.
This example shows that all
relays are ON, i.e., energized.
The '3F' would represent the
binary string of

0011 1111, where 0011 is the 3
and 1111 is the F in '3F'

A response of 0003 means that
only RL1 and RL2 are ON, i.e.,
energized

READ one PC state Read the current state of

one process control setpoint

#xxRLn<CR>

where n = 1,2,3,4,5 or 6

*xx_0_RL_OFF<CR>

*xx_1_RL_ON_<CR>

e.g., : #01RL1<CR>

READ IG on/off
STATUS

Find out if Ion Gauge is
turned to ON and gauge is
reading pressure

#xxIGS<CR>

e.g., : #01IGS<CR>

*xx_0_IG_OFF<CR>
*xx_1_IG_ON_<CR>
When IG device is not connected:
?01_INVALID_<CR>

TURN IG ON Turn the Ion Gauge ON #xxIG1<CR>

e.g., : #01IG1<CR>

#xxIGy<CR>

where,

Y=1= Turn ON;

y=0= Turn OFF

*xx_PROGM_OK<CR>

When IG error exists:
?01_INVALID_<CR>

When IG controlled by CG:
?01_INVALID_<CR>

When IG is not connected:
?01_INVALID_<CR>

To clear IG errors send an IG
OFF command: y=0=IG OFF
(this clears IG errors and allows
user to reactivate IG control)

TURN IG OFF Turn the Ion Gauge OFF #xxIG0<CR>

e.g., : #01IG0<CR>

#xxIGy<CR>

where,

Y=1= Turn ON;

y=0= Turn OFF

READ DEGAS on/off
STATUS

Find out if Degas is ON or
OFF

#xxDGS<CR>

e.g., : #01DGS<CR>

*xx_PROGM_OK<CR>

Even though the IG will already
be OFF, when an IG Error
occurs, sending the IG OFF
command will clear errors When
IG device is not connected:
?01_INVALID_<CR>

*xx_0_DG_OFF<CR>
*xx_1_DG_ON_<CR>

When IG device is not connected:
?01_INVALID_<CR>

TURN ON Degas Turn ON the Ion Gauge

Degas

TURN OFF Degas Turn OFF the Ion Gauge

Degas

#xxDG1<CR>

e.g., : #01DG1<CR>

#xxDGy<CR>

where,

Y=1= Turn ON;

y=0= Turn OFF

#xxDG0<CR>

e.g., : #01DG0<CR>

#xxDGy<CR>

*xx_PROGM_OK<CR>

When IG off:
?01_INVALID_<CR>

When device does not exist:
?01_INVALID_<CR> When P >
5E-05 Torr:

?01_INVALID_<CR>

*xx_PROGM_OK<CR>

When IG device is not connected:
?01_INVALID_<CR>

where,

Y=1= Turn ON;

y=0= Turn OFF

(continued)

72

tinb29e1 (2016-11) VGC083A_B.om

Table "INFICON RS232 and RS485 Command Protocol Summary" (concluded)

COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES

SET EMISSION
Current

Choose 10 mA, 4mA or
100uA emission current

#xxSEy<CR>

e.g., : #01SE1<CR>

where, y=1=4mA; y=0=100μA
y=2=10mA

xx_PROGM_OK<CR>

When IG device is not
connected: ?01_INVALID_<CR>
When in Auto I

mode:

e

?01_INVALID_<CR>

SET FILAMENT Choose Filament 1 or 2 #xxSFy<CR>

*xx_PROGM_OK<CR>

e.g., : #01SF1<CR>

where, y=1 for F1; y=2 for F2

Read EMISSION
Current

Read emission current
setting

#xxSES<CR>

e.g., : #01SES<CR>

*xx_0.1MA_EM<CR>

*xx_4.0MA_EM<CR>

*xx_10_MA_EM<CR>

When IG device is not connected:
?01_INVALID_<CR>

READ IG STATUS Finds out the cause of the

specified device inactive
reading

#xxRSIG<CR>

e.g., : #01RSIG<CR>

When IG or device is not
connected, response is:
?01_INVALID_<CR>

*xx_00_ST_OK (IG status is OK)

*xx_01_OVPRS (overpressure­system pressure is too high)

*xx_02_EMISS (Ie control fail)

*xx_04_ FLVLO (low filament
voltage condition)

*xx_08_ FLOPN (selected
filament is open circuit)

*xx_10_ DEGAS (IG is in DEGAS
mode of operation)

*xx_20_ ICLOW (IG collector
current is below normal range)

*xx_40_ FLIHI (filament drive

current is too high)

*xx_80_ OVTMP

READ SW VERSION Read the part number and

revision number (version) of
the firmware

SET CGn ZERO Set the zero or vacuum

calibration point for CGn

#xxVER<CR>

e.g., : #01VER<CR>

#xxTZCGn <CR>

e.g., : #01TZCG1_0<CR>

e.g., : #01TZCG2_1.23E-02

<CR>

where,

n=1 or 2 (for, CG1 or CG2)

y.yy = mantissa,

*xx_mmmmm-vv

e.g., : *01_01306-11 <CR>

*xx_PROGM_OK<CR>

When P > 100 mTorr:
?01_INVALID_<CR>

When device is not connected:
?01_INVALID_<CR>

When requested gauge number
<1 or >2:
?01_SYNTX_ER <CR>

z = sign of the exponent +/- and
pp = the exponent

SET CGn SPAN Set the span or atmosphere

calibration point for CGn

#xxTSCGn_y.yyEzpp<CR>

e.g., : #01TSCG1_

7.60E+02<CR>

where,

n=1 or 2 (for, CG1 or CG2)

y.yy = mantissa,

z = sign of the exponent +/- and
pp = the exponent

*xx_PROGM_OK<CR>

When P < 400 Torr:
?01_INVALID_<CR>

When requested P < 400Torr:
?01_INVALID_<CR>

When requested P > 1000mT:
?01_INVALID_<CR>

When device is not connected:
?01_INVALID_<CR> When
requested gauge number <1 or
>2:

?01_SYNTX_ER <CR>

tinb29e1 (2016-11) VGC083A_B.om 73

9.4 RS232 GP 307 and 358
Protocol

COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES

READ IGn
or, READ IG

READ CGn Read the current CG pres-

READ PCs in long
form

READ PCs in binary
form

READ individual PC Read the current

IG ON Turn specified IG filament

Read the current IG
pressure in units of Torr only,
1 = fil1, 2 = fil2

If you have selected filament
1 to operate with the IG ON
(see 'IG ON' below), then
enter IG1 in the READ IGn
command; use IG2 if
filament 2 is turned ON

sure in units of Torr only

Read the current Process
Control setpoint relay status

Read the current Process
Control setpoint relay status

{continued on next page}

{continued from previous

page}

individual Process Control
setpoint relay status

ON

Note that the functions of IG
ON/OFF and Filament Se­lection are combined in the
single IG ON/OFF command.
When turning the IG to ON,
the specific filament chosen
is selected when sending the
IG ON/OFF commands.

RS232 protocol compatible with the GP Series 307 and 358 VGC is as defined in
the following table. Please see qualifying notes at bottom of table.

Table "RS232 GP 307 and 358 Protocol"

DS_ IGn<CR> <LF>

e.g., : DS_ IG1<CR><LF>

or

DS_ IG<CR> <LF>

e.g., : DS_ IG1<CR><LF>

y.yyEzpp<CR><LF>

e.g., : 1.53E-06<CR><LF>

where, y.yy = mantissa,
z = sign of the exponent +/­and pp = the exponent

When IG device is not
connected: 9.90E+09

When IG is off: 9.90E+09

DS_ CGn<CR> <LF>

e.g., : DS_ CG1<CR><LF>
where, n = 1 for device CG1
and n = 2 for CG2

y.yyEzpp<CR><LF>

e.g., : 1.53E+02<CR><LF>
When device is not connected:

9.90E+09

When CG is over ranged:

9.90E+09

PCS<CR> <LF>

e.g., : PCS<CR><LF>

x,x,x,x,x,x<CR><LF>

e.g., : 1,1,0,0,0,0<CR><LF>

Relays 1 and 2 are energized;
order is Relay No.1,2,3,4,5,6
from left to right.

PCS_B<CR> <LF>

e.g., : PCS_B<CR><LF>

x<CR><LF>

e.g., : C<CR><LF>

The Latin alphabet character
"C" corresponds to binary
01000011 or, 43hex, which re­presents relay 1 and relay 2 are
energized (ON). Note that the
positions of the relay order in the
returned code character are
reversed from the long form as
described for the READ PCs in
long form command above.

In binary form, the order is Relay
No.6, 5, 4, 3, 2, and 1 as read
from left to right.

PCS_n<CR> <LF>

e.g., : PCS_1<CR><LF>

s<CR><LF>

where, s=state of relay:
1 = ON; 0 = OFF

e.g., : 1<CR><LF> (PC Relay 1
is energized, or 0 when not)

IGn_ON<CR> <LF>

e.g., : IG1_ON<CR><LF>

where,
n = 1 = fil1, 2 = fil2

OK<CR><LF>

e.g., : OK<CR><LF> When IG is
already ON: INVALID

When IG device is not
connected: INVALID

(continued)

74

tinb29e1 (2016-11) VGC083A_B.om

COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES

IG OFF Turn specified IG filament

OFF

IG DEGAS ON Turn IG Degas ON DG_ON<CR> <LF>

IG DEGAS OFF Turn IG Degas OFF DG_OFF<CR> <LF>

IG Degas Status Detect Degas on/off status DGS<CR> <LF>

9.5 RS485 GP 307 and 358
Protocol

COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES

READ IGn
or, READ IG

Read the current IG
pressure in units of Torr only

Table "RS232 GP 307 and 358 Protocol" (concluded)

IGn_OFF<CR> <LF>

e.g., : IG1 OFF<CR><LF>

where,

n = 1 = fil1, 2 = fil2

OK<CR><LF>

e.g., : OK<CR><LF>

When IG is already OFF:
INVALID

When IG device is not
connected: INVALID

OK<CR><LF>

e.g., : DG ON<CR><LF>

e.g., : OK<CR><LF>

When Degas is already ON:
INVALID

When IG device is not
connected: INVALID When IG is
OFF: INVALID

OK<CR><LF>

e.g., : DG OFF<CR><LF

e.g., : OK<CR><LF>

When Degas is already OFF:
INVALID

When IG device is not
connected: INVALID

1<CR><LF>

e.g., : DGS<CR><LF>

e.g., : 1<CR><LF> when IG is
ON, or 0<CR><LF> when off

When IG device is not con­nected: INVALID

NOTES:

1. <CR> is a carriage return (0x0D).

2. <LF> is a line feed (0x0A); this is the terminator character.

3. The '_' used in certain defined commands represent a space character. Space
characters may be omitted from commands.

4. GP 307 and 358 protocol response strings are variable length.

5. Hardware handshake controls do not exist on VGC083 (e.g., RTS, CTS, DTR).

RS485 protocol compatible with the GP Series 307 and 358 VGC is as defined in
the following table. Please see the qualifying notes listed at bottom of table.

Table "RS485 GP 307 and 358 Protocol"

#xxDS_IGn<CR>

e.g., : #01DS IG1<CR>

where, n = 1 = fil1, 2 = fil2

or

DS_ IG<CR> <LF>

e.g., : DS_ IG1<CR><LF>

y.yyEzpp<CR>

e.g., : 1.53E-06<CR>

where, y.yy = mantissa,
z = sign of the exponent +/-
and pp = the exponent

When IG device is not con­nected: 9.90E+09

When IG is off: 9.90E+09

(continued)

tinb29e1 (2016-11) VGC083A_B.om 75

Table "RS485 GP 307 and 358 Protocol" (concluded)

COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES

READ CGn Read the current CG

pressure in units of Torr only

#xxDS_CGn<CR>

e.g.,: #01DS CG1<CR>

where,

n = 1 or 2 (CG1 or CG2)

y.yyEzpp<CR>

where, y.yy = mantissa,
z = sign of the exponent +/-
and pp = the exponent

e.g., : 1.53E+02<CR>

When device is not connected:

9.90E+09

When CG is over ranged:

9.90E+09

READ PCs long form Read the current PC setpoint

status

#xxPCS<CR>

e.g., : #01PCS<CR>

x,x,x,x,x,x<CR>

e.g., : 1,1,0,0,0,0<CR> (Relays

1 and 2 are energized; Relays 3 ­6 are not energized)

READ PCs binary
form

Read the current PC setpoint
status

#xxPCS_B<CR>

e.g. , : #01PCS B<CR>

x<CR>

e.g., : C<CR> (where ‘C’ is the
Unicode character C, expressed
as 01000011 in binary notation
or 43 hexadecimal)

READ individual PC Read the current individual

PC setpoint status

#xxPCS_x<CR>

e.g., : #01PCS_1<CR><LF>

x<CR>

e.g., : 1<CR> (where ‘1’
indicates PC 1 is energized; 0
when not)

IG ON Turn specified IG filament

ON

IG OFF Turn specified IG filament

OFF

#xxIGn_ON<CR>

e.g., : #01IG1 ON<CR>

where,

n = 1 = fil1, 2 = fil2

#xxIGn_OFF<CR>

e.g., : #01IG1 OFF<CR>

n = 1 = fil1, 2 = fil2

OK<CR>

e.g., : OK<CR>

When IG already ON: INVALID
When IG device is not con­nected: INVALID

OK<CR>

e.g., : OK<CR>

When IG already OFF: INVALID

When IG device is not con­nected: INVALID

IG DEGAS ON Turn IG Degas ON #xxDG_ON<CR> <LF>

e.g., : #01DG_ON<CR

OK<CR>

e.g., : OK<CR>

When Degas already ON:
INVALID

When IG device is not con­nected: INVALID

When IG is OFF: INVALID

IG DEGAS OFF Turn IG Degas OFF #xxDG_OFF<CR>

e.g.,: #01DG_OFF<CR>

OK<CR>

e.g., : OK<CR>

When Degas already OFF:
INVALID

When IG device is not
connected: INVALID

IG Degas Status Detect Degas on/off status #xxDGS<CR>

e.g., : #01DGS<CR>

1<CR>

e.g., : 1<CR> (or 0 when off)
When IG device is not
connected: INVALID

NOTES:

1. <CR> is a carriage return (0x0D).

2. The '_' used in certain defined commands represent a space character. Space
characters may be omitted from commands.

3. GP 307 and 358 protocol response strings are variable length.

76

tinb29e1 (2016-11) VGC083A_B.om

10 Service

10.1 Calibration

10.2 Troubleshooting - IG
Operation

Indication Possible Cause Possible Solution

Display on VGC083 controller indicates
OFF

The connector may not be wired

Readings appear very different from
expected pressure

Sensor has been dropped causing

The gauge sensor tube is contaminated Degas the sensor or replace the sensor

Leak in the vacuum system Re-check for leak in the system. Re-

Ion gauge cannot be turned on Pressure exceeds 1.00 × 10-3 Torr at

Pressure exceeds 5.00 × 10-4 Torr at

Emission Control not functioning Switch to the other filament, replace ion

Research Screen shows filament voltage
is present but filament current stays at

0.00

Research Screen shows filament voltage
and filament current are present but
gauge is shutting off

Unable to initiate degas System pressure above 5.00 × 10-5 Torr Decrease pressure below the required

Voltage to filament too high Filament contaminated or near end of its

Setpoint does not actuate Incorrect setup Check setpoint setup

Every INFICON module is calibrated prior to shipment using nitrogen. Care should
be exercised when using gases other than nitrogen (N
regarding the use of gases other than N

/air).

2

) / air (see previous sections

2

No power Check cable connections and verify that

power is being supplied

Check cable connections and verify that

correctly

Sensor not in the proper location on
vacuum system

The process gas is different from the gas
(Nitrogen) used to calibrate the IG

power is being supplied

Ensure the sensor is located in
appropriate location on vacuum chamber

Apply gas sensitivity correction factor if
applicable

Replace the ion gauge sensor tube

mechanical damage

check that all metal seals are used when
operating below 1.00 × 10-7 TORR

Decrease pressure below required value

0.10 mA (100 µA) emission current

Decrease pressure below required value

4 mA emission current

Pressure exceeds 1.00 × 10

-4

Torr at

Decrease pressure below required value

10 mA emission current

gauge sensor tube due to possible fila­ment failure or contamination

Filament is open Switch to the other filament, replace

sensor or electronics

Filament is contaminated or burned out Switch to the other filament or replace

sensor

value

Switch to the other filament or replace

life

sensor

tinb29e1 (2016-11) VGC083A_B.om 77

10.3 Troubleshooting - IG
Error Messages

Indication Possible Cause Possible Solution

OVERPRESSURE The calculated pressure is greater than

EMIS FAIL The desired emission current (IE) could not

LV Failure The Filament voltage could not be estab-

F1 or F2 OPEN Filament 1 or 2 is open Switch to the other filament or replace the

F1 or F2 OPEN Faulty electronics Replace electronics

CONNECT IG

COMM IO FAIL

OVER TEMP Ion gauge cable is longer than 50 ft. Reduce cable length to less than 50 ft. or

10.4 Clearing Error
Messages - IG

10.5 Research Screen

10.5.1 Research Screen

(Diagnostic Display - IG)

Change to 100 µA emission current which

maximum setting for emission current

System pressure too high

will operate at higher pressures

Reduce pressure

Switch to 4 mA or 10 mA emission cur-

be established

Gauge contamination, possible coating on
filament or grid surfaces

End of filament life

System pressure too high

rent and attempt repeated filament starts
to clean filament

Switch to second filament, degas

Replace the Ion gauge sensor tube

Reduce pressure

Contact INFICON

lished; Electronics Failure

Ion gauge sensor tube

IG not connected

Faulty cable

Internal PCB not communicating

Plug in IG

Replace cable

Contact INFICON

provide airflow around the VGC083

Once the cause of the IG error has been determined and resolved, the IG error
must be cleared before the IG filament can be turned on again. To clear errors,
simply press the IG ON/OFF key.

The OLED setup screen of the VGC083 can be configured to display important, cri­tical operating parameters of the ionization gauge. These parameters can be dis­played in the Research display mode as described below.

In addition to the normal pressure measurement screen VGC083 provides a diag­nostic display screen that allows you to monitor the measurements of the critical
electrical parameters used for measurement of very low pressures, i.e., high
vacuum, made by the ionization gauge.

Over time, the hot cathode (filament) of the ionization gauge may degrade. The IG
coated iridium filaments are made using yttrium oxide to lower the work function of
the heated wire material and enable substantial emission of electrons from the hot
cathode. These electrons are accelerated in an electric field toward the grid struc­ture of the ionization gauge device. The electron emission is commonly referred to
as the 'Emission Current'. As the emission current electrons orbit within the electric
field formed by the bias voltages applied to the grid, collector and filament elec­trodes, the molecules that the gas is comprised of will be ionized by these ener­getic electrons.

The positive ions that are created within the grid structure are captured in another
electric potential field created by the grid structure (at +180 V (dc) with respect to
ground potential) and the collector wire (at zero volts, i.e., ground potential). In
simple terms, the ions collected by the collector electrode (a small diameter wire
within the grid electrode structure) are measured with an electrometer circuit
connected to the collector. The amount of ion current measured is directly pro­portional to the density of the gas within the ion gauge head. This ion current is
commonly referred to as the 'Collector Current'.

78

tinb29e1 (2016-11) VGC083A_B.om

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he ion gauge

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Ion current is

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am-

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rent. Th
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to mak
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ment c
require
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over ti
device

In case
conditio
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able to
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operati
VGC08

The foll
you in u
ion gau
conditio
use a si
general
Screen
a partic

ssure, Ion C
ionization ga

d. In the ab

alculation of
ters leads to
Ion Current,

ion gauge se

ssure indicati

e pressure a

portant infor

en in the Res

ment design
n and operati
is the power
e interpretati

ill change o
possibly eve
note of thes
g lifetime of t

n gauge ma

rrent. By incr

ent may inc

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and will var

f the filamen
readings) wil
e and give y

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where the i

n after you h

pressure for

onitor the v

ON / stay O

g levels for fi

control circ

wing table (

sing the infor

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ns. There are
ngle measur

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over time, yo

lar failure m

rrent (Collect

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ve example,

easured pr

he calculatio

is the Emis

E

nsor.

n may be ch

indicated by

ation such

arch display

type, materia

g emission
issipation (V
n of these di

er time depe

n surface pro

values at ini

e ion gauge

operate at 1

asing the e

ease to 4.5 A

alues you m
over time an
heating pow
aid you in m

u an indicati
assembly. M

n gauge sen

ve made sur

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lues display

trouble is rel
ament voltag
itry will sens

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various caus

ment param

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de, may pro

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erating and

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ion Current

cked by usin

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s Filament V
screen. Thes

used for con

urrent. The p

A) required t
played value
dent upon th

erties of the

ial installatio

ensor.

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ission curren
Again, the v

y see for the
from device
r (given by th

nitoring the
n of when to
aximum filam

or does not t

that the pre
current settin
d in the RES

ted to filame

and current;
the condition

Gauge Diag

d in this disp

pected unde

s of trouble t

ter as an indi

recorded the
to detect a p
e to be a valu

d Emission

ressure (vac

tical, measur

layed. The r

iven by P = I

nd S is the S

g the display

isplay line o

ltage and Fil

values vary

structing the

oduct of the

maintain th

is a qualitati

pressure, fil

rid electrode

and from tim

n current wit
to 10 mA, th

lues mentio

ion gauge yo

to device. In
e Filament V
ondition of y

chedule repl

ent current is

rn ON or do

sure is belo

you have c

ARCH scree
nt condition.
if either of th

and force an

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lay as a mea

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hat at times

ator of what

values displ

ttern or tren

able indicatio

urrent are ind

um) is being
d quantities

lationship of

× (IE × S)-1
nsitivity of th

d values and

the VGC083

ment Curren

widely depen

ilament, filam

ilament volta

set emission

e measure.

ment coatin
. It is a good
e-to-time duri

only 3.5 A o

filament cur
ed here are r

are using wi

eneral, keep

ltage and Fil

ur gauge fila

cement of ei

6.5 A.

s not stay in t

the maximu

osen, you wil

n and determ

here are ma

se is exceed

OFF conditio

) is intended

s to ascertai
chamber op

ay make it di

he problem i

yed in the Re

that, if correl

n of probable

ications

equired
hese
where

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are

ding

nt

e and

cur-

he

condi-

ractice

g the

fila-

ent

pre-

ll be

ng a

ment
ents

her the

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ne if

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n.

o assist

if the

rating

ficult to

. In
search
ated to

cause.

tinb29e1 (2016-11) VGC0

83A_B.om

79

The values of filament voltage and current presented below are approximate
values that one may see in the Research Screen. The representative, average
values used in this table may vary depending on the condition of the filament,
length of ion gauge cable, and the vacuum chamber environment. The readings
taken should be viewed with the notion that there may be an indication of reaching
end-of-useful filament lifetime if the power required to sustain emission current
continues to increase over time.

Indication Possible Cause Possible Solution

Filament voltage values are present
for several seconds immediately
after turning IG ON, but then the
values are zero

Filament is contaminated or filament
has reached end-of-useful operating
life for required emission current
setting

Switch emission current setting from initial setting
and re-start the IG; make several attempts to
establish emission current at 100 μA, 4 mA or
10 mA.

Switch to second filament or replace ion gauge
sensor

All parameters in the RESEARCH

Failed electronics Replace or repair the VGC083
screen are zero after IG turn ON is
attempted

IG filament current is greater than

6.5 A

IG filament voltage is greater than
16 V

Filament nearing end-of-useful-

operating-life

Excessive voltage drop in ion gauge

cable

Switch to second filament or replace ion gauge
sensor

The ion gauge cable maybe too long, wire gauge
is too small or a defect in the cable or connectors

10.6 Maintenance

In general, maintenance is not required for your INFICON ion gauge module, con­vection gauge and control unit. Periodic performance checks may be done by com­paring the gauge to a known reference standard. When using the head in gases
containing contaminants or materials that react with the filaments of the hot
cathode ion gauge, periodic degas and switching to the alternate filament from
time-to-time is recommended for longest useable head lifetime. When the hot
cathode (filament) of the ionization gauge head is at or near end-of-life, head
(sensor) replacement is recommended.

Cleaning the VGC083

For cleaning the outside of the unit a slightly moist cloth will usually do. Do not use
any aggressive or scouring cleaning agents.

80

tinb29e1 (2016-11) VGC083A_B.om

11 Repair

12 Accessories

Power supply

Rack mount adapter

Cables 200 °C
BAG050, BAG051

Cables 50 °C
BAG050, BAG051

Cables 50 °C
BAG052, BAG053

Return defective products to your nearest INFICON service center for repair.

INFICON assumes no liability and the warranty is rendered null and void if repair
work is carried out by the end-user or by third parties.

Ordering number

Power supply to VGC083A & B 399-710

Ordering number

Rack mount adapter for 19" 2U for one VGC083 399-714

Rack mount adapter for 19" 2U for two VGC083 399-715

Ordering number

Cable 3 m / 10 ft, 200 °C, BAG050, BAG051 399-770

Cable 8 m / 25 ft, 200 °C, BAG050, BAG051 399-771

Cable 15 m / 50 ft, 200 °C, BAG050, BAG051 399-772

Ordering number

Cable 3 m / 10 ft, 50 °C, BAG050, BAG051 399-780

Cable 8 m / 25 ft, 50 °C, BAG050, BAG051 399-781

Cable 15 m / 50 ft, 50 °C, BAG050, BAG051 399-722

Ordering number

Cable 3 m / 10 ft, 50 °C, BAG052, BAG053 399-790

Cable 8 m / 25 ft, 50 °C, BAG052, BAG053 399-791

Cable 15 m / 50 ft, 50 °C, BAG052, BAG053 399-792

tinb29e1 (2016-11) VGC083A_B.om 81

13 Storage

14 Disposal

Caution: electronic components.

Inappropriate storage (static electricity, humidity etc.) may damage
electronic components.

Store the product in an antistatic bag or container. Observe the rele­vant specifications under Technical Data (→  9).

Caution

Separating the components

Electronic and non-electronic
components

WARNING

WARNING: substances detrimental to the environment.

Products or parts thereof (mechanical and electric components,
operating fluids etc.) may be detrimental to the environment.

Please dispose of such materials in accordance with the relevant local

After disassembling the product, separate its components in accordance with the
following criteria:

Such components must be separated according to their materials and recycled.

regulations.

82

tinb29e1 (2016-11) VGC083A_B.om

EU Declaration of Conformity

We, INFICON, hereby declare that the equipment mentioned below complies with
the provisions of the Directive relating to electromagnetic compatibility 2014/30/EU

Product

Part numbers

Standards

Manufacturer / Signatures

and the Directive on the restriction of the use of certain hazardous substances in
electrical and electronic equipment 2011/65/EU.

Vacuum Gauge Controller

VGC083A, VGC083B

399-700
399-701

Harmonized and international/national standards and specifications:

• EN 61000-6-2:2005

• EN 61000-6-4:2007 + A1:2011

• EN 61010-1:2010

• EN 61326-1:2013; Group 1, Class A

INFICON AG, Alte Landstraße 6, LI-9496 Balzers

22 November 2016 22 November 2016

(EMC: generic immunity standard for industrial environments)

(EMC: generic emission standard for industrial environments)

(Safety requirements for electrical equipment for measurement, control and laboratory use)

(EMC requirements for electrical equipment for measurement, control and laboratory use)

Dr. Benhard Andreaus
Director Product Evolution

Markus Truniger
Product Manager

tinb29e1 (2016-11) VGC083A_B.om 83

LI–9496 Balzers
Liechtenstein
Tel +423 / 388 3111
Fax +423 / 388 3700

Original: English [e-mail]

t i nb29e1

www.inficon.com