Inficon VGC083B, VGC083A Operating Manual

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Informa

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2

tinb29e

(2016-11) VGC083A_B.

m

Liability and Warranty

NOTICE

Identifies information that is critical for successful application and understanding of
the product.

SHOCK HAZARD

Labels may be located on or inside the device to alert people that dangerous
voltages may be present.

INFICON assumes no liability and the warranty is rendered null and void if the end­user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.) on the product

• use the product with accessories not listed in the corresponding product docu-

mentation.

tinb29e1 (2016-11) VGC083A_B.om 3

Contents

Product Identification 2
Validity 2
Important User Information 2
Liability and Warranty 3

1 Introduction / General Information 6

1.1 VGC083A 6

1.2 VGC083B 7

2 Technical Data 8

3 Important Safety Information 11

3.1 Safety Precautions - General 11

3.2 Safety Precautions - Service and Operation 11

3.3 Electrical Conditions 12

3.3.1 Proper Equipment Grounding 13

3.3.2 Electrical Interface and Control 13

3.4 Overpressure and use with hazardous gases 13

3.5 Gases other than Nitrogen / air 13

4 Installation 15

4.1 Mechanical Installation - Controller 15

4.1.1 Panel Mount 15

4.1.2 Rack Mount 15

4.1.3 Mechanical Installation - Ionization Gauge 17

4.1.4 Mechanical Installation - Convection Gauge 17

4.2 Electrical Installation 18

4.2.1 Grounding 18

4.2.2 Installation 19

4.2.3 Connecting the Ionization Gauge Cable 19

4.2.3.1 Standard Nude and Glass IG Cable 20

4.2.3.2 Bakeable Nude IG Cable 21

4.2.3.3 Standard IG Cable Connector Pin Out 22

4.2.4 Connecting the PGE050 - connectors labeled "2" and "3" 23

4.2.5 Power Connection 24

4.2.6 Relay Connection 24

4.2.7 Analog Output Connection 24

4.2.8 Analog Input Connection (Capacitance Diaphragm Gauges, etc.) 24

4.2.9 Digital I/O Connection 25

4.2.10 RS232 / RS485 Serial Communications Connection 26

5 Operation - IG and CG 28

5.1 IG Emission Current 28

5.2 IG Degas 28

5.3 IG Filament Material Selection / Venting the Chamber 28

5.4 IG Over Pressure Shut Down 29

5.5 IG Over Temperature Shut Down 29

5.6 Convection Gauge (CG) Initial Setup 30

6 Setup and programming 31

6.1 Applying Power 31

6.2 Front Panel Display 31

6.3 User Interface Basics 32

6.4 Factory-Set Default Parameters 32

6.5 Programming 34

6.5.1 SETUP UNIT 34

6.5.2 ION GAUGE 35

6.5.3 ION GAUGE 40

6.5.4 RELAYS 40

6.5.5 Analog Output 42

6.5.6 SERIAL COMM 47

6.5.7 DISPLAY 47

4

tinb29e1 (2016-11) VGC083A_B.om

7 Analog Output Charts & Equations (Nitrogen/Air Only) 49

7.1 Analog Output wide range measurement for IG - CG1 0.5 - 7V

(Nitrogen / Air only) 49

7.2 Analog Output for IG LOG N - 10 (Nitrogen / Air only) 50

7.3 Analog Output for IG LOG N - 11 (Nitrogen / Air only) 51

7.4 Analog Output for IG LOG N - 12 (Nitrogen / Air only) 52

7.5 Analog Output for IG 1.8 - 8.7 V (Nitrogen / Air only) 53

7.6 Analog Output for IG LINEAR (Nitrogen / Air only) 54

7.7 Analog Output for CG1 or CG2 1 - 8 V (Nitrogen / Air only) 54

7.8 Analog Output for CG1 or CG2 0 - 7 V (Nitrogen / Air only) 56

7.9 Analog Output for CG1 or CG2 NON - LIN (Nitrogen / Air only) 57

7.10 Analog Output for CG1 or CG2 LINEAR (Nitrogen / Air only) 59

8 Using the Gauge with Different Gases 60

8.1 Ion Gauge Display Correction Factors for Selected Gases 60

8.2 Effects of Different Gases on Convection Gauge Display 61

8.3 Effects of Different Gases on Analog Output 64

8.3.1 Ion Gauge Analog Output Correction Factors for Selected Gases 64

8.3.2 IG - CG1 0.5 - 7V Analog Output Correction Factors for Selected Gases 64

8.3.2.1 IG-CG1 0.5 - 7V Analog Output Correction Factors -

Ion Gauge Range 64

8.3.2.2 IG-CG1 0.5 - 7V Analog Output Correction Factors -

Convection Gauge Range 66

8.3.3 Convection gauge analog output for selected gases 66

8.3.3.1 CG1 1 - 8 V or CG2 1 - 8 V Analog Output Correction Factors -

Convection Gauge 67

8.3.3.2 CG1 0 - 7 V or CG2 0 - 7 V Analog Output Correction Factors -

Convection Gauge 68

8.3.3.3 CG1 NON-LIN or CG2 NON-LIN Analog Output Correction Factors -

Convection Gauge 69

9 Communication Protocol (Serial Interface) 70

9.1 Device Specific Serial Communication Info 70

9.2 INFICON RS232 / RS485 Command Protocol Summary 70

9.3 INFICON RS232 and RS485 Command Protocol Summary 71

9.4 RS232 GP 307 and 358 Protocol 74

9.5 RS485 GP 307 and 358 Protocol 75

10 Service 77

10.1 Calibration 77

10.2 Troubleshooting - IG Operation 77

10.3 Troubleshooting - IG Error Messages 78

10.4 Clearing Error Messages - IG 78

10.5 Research Screen 78

10.5.1 Research Screen (Diagnostic Display - IG) 78

10.6 Maintenance 80

11 Repair 81

12 Accessories 81

13 Storage 82

14 Disposal 82

EU Declaration of Conformity 83

For cross-references within this document, the symbol (→  XY) is used; for cross-
references to further documents listed under ‘Literature’, use is made of the symbol
(→  [Z]).

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tinb29e1 (2016-11) VGC0

83A_B.om

7

2 Technical Data

Measurement range

Display

Functionality

IG sensor control

IG remote input signals
(digital I/O)

Setpoint relays

VGC083A

with BAG050
with PGE050

VGC083B

with BAG051 or BAG052/053
with PGE050

2×10
1×10

4×10
1×10

-11

-4

-10

-4

…1×10-3 Torr

…1000 Torr

…1×10-3 Torr

…1000 Torr

Units of measurement Torr, mbar, Pa (user selectable)

Pressure indication LED - 3 independent pressure display

channels, 3 digit plus 2 digit exponent per
channel

Set-up & programming screen OLED - displays state of all setpoint relays, IG

emission current, error messages for fault
conditions

VGC083A

(IG)

powers & operates one INFICON BAG050
nude UHV EB-Degas B-A hot cathode or other
equivalent brands

, (CG) powers & operates up to 2 INFICON PGE050

VGC083B

(IG)

convection or Granville-Phillips
Convectron

powers & operates one BAG051 or BAG052 /
053 or other equivalent brands of glass or nude

2

I

R B-A hot cathode

®

, (CG) powers & operates up to 2 INFICON PGE050

convection or Granville-Phillips
Convectron

®

®

(GP)

®

(GP)

IG sensor on/off, degas on/off and emission current can all be controlled via front
panel soft-keys, remote input signals (digital I/O) or serial communications. IG sen­sor can also be automatically turned on/off using measurements from one of the
user selectable convection or alternate gauges.

IG sensor on/off, degas on/off and emission current can also be set by applying
momentary continuity to ground. Also the 9-pin D-sub remote input DIGITAL I/O
connector provides pin-pin compatible signals with the GP 358 controller as well as
compatible signals with the GP 307.

Number 6

single-pole, double-throw (SPDT), user as­signable to any of the gauges

Contact rating 5 A at 30 V (dc), 5 A at 250 V (ac), resistive

load

8

tinb29e1 (2016-11) VGC083A_B.om

Analog output

Analog input

Serial communications

Status output

IG (Ionization Gauge)

Ambience

Housing

IG analog output

Log-linear

0 … 10 V (dc), 1 V/decade, or

1.7 … 9.3 V (dc) (nominal 1.8 … 8.7 V (dc)),

0.8 V/decade

Linear 0 … 10 V (dc) (useable over 3 decades)

Combination IG + CG analog

Log-linear

CG analog output

Log-linear

0.5 … 7 V (dc), 0.5 V/decade

1 … 8 V (dc), 1 V/decade, or

0 … 7 V (dc), 1 V/decade

Linear 0 … 10 V (dc) (useable over 3 decades)

Non-linear analog S-curve 0.375 … 5.659 V (dc)

CDG one 0 … 10 V (dc) analog input signal from a

CDG when used as an alternate gauge to CG2,
or analog input from one of the following
INFICON modules: PGE300, PGE500,
BAG300

Protocol RS485 / RS232 - ASCII protocol

IG sensor on/off status message is displayed on the front panel, by serial commu­nications and by SPDT relay (DIGITAL I/O Connector) rated at 1 A at 30 V (dc)
resistive, or 1 A at 30 V (ac) non-inductive.

IG degas on/off status or IG error conditions are displayed on the front panel, by
serial communications and by an open collector transistor output (ground emitter)
rated at 40 V max. VCE, 50 mA IC max.

IG filament switching User selectable between filament 1 or 2 using

the front panel soft-keys or RS232 / RS485
serial comm

IG emission current 100 μA, 4 mA, 10 mA or automatic switching of

emission current (auto ranging)

IG degas 40 W, resistive

-3

IG overpressure protection
(turns ion gauge off at the
following factory default settings)

1 × 10
5 × 10
1 × 10

Torr at 100 μA emission current

-4

Torr at 4 mA emission current

-4

Torr at 10 mA emission current

Temperature

Operation
Storage

0 … +40 °C
–40 … +50 °C

Relative humidity 0 … 95, non-condensing

Altitude

Operating
Storage

max. 2500 m (8200 ft.)
max. 12500 m (41000 ft.)

Pollution degree II

Degree of protection IP20

Housing aluminum extrusion - black powder paint finish

tinb29e1 (2016-11) VGC083A_B.om 9

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ations

C083B

oltage

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IG & CG
Digital I/O
Serial com
RS23
RS48
analog I/O,
power

m (inch)

unications

setpoint rela

s,

20 …
power

gauge
9-pin

9-pin
9-pin

plugg
includ

8 V (dc), 20

reversal and

cable assem

-sub male

-sub female

-sub male

ble terminal

d)

W protected

transient ove

blies provide

lock (mating

against

-voltages

by INFICON

connectors

eight

C083A, V

C083B

.7 kg (1.7 lb.)

0

10

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3.1 Safe
Gen

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mation

INFICO
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3.2 Safe
Serv

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use this

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arranty.

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d.

of the unit is

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itute any part
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ust be remov

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re exceeds 5.

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uxiliary or co
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t be periodic
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ngsten. The

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ded to period

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tage directly
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he following

t.

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Torr, Dega

initiate

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.

by a quali-

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conductors

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or killed by

t high vol-

contact with
essel).

-

-

r

12

tinb29e

(2016-11) VGC083A_B.

m

3.3.1 Pro

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rmine the tru

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tures and co
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ssure of a v
ted baromet
elease and

the gas ins

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ent vessel i

nd possible
olume to pre
gases.

use with gas
r data tables.

calibrated fo

ses such as

factors to bo

measured p

easure pres

in an explos

s. Do not us
r gas mixtur

uld become a

erious injury

acuum gaug

ic pressure

ossible over

ide the gaug

nment. To

gases that if

to the atmo
damage to e
ssure above

es other than

direct reado

rgon (Ar) or
h the display
essure. This

ure of gases

ive atmosphe

the IG to m

s. The sens
n ignition sou
or death.

device is a

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ic, pyrophor

allowed to le

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uipment. N

local atmos

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tinb29e1 (2016-11) VGC0

83A_B.om

13

eththte

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WARNIN

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e gauge nor
mperature c

a

nd gas mixtur

o

r death.

! Do not us

able gases,

explosive or

ally operate

uld exceed t

e. This could

the PGE050
apors or fum

combustible

at 125 °C, b
e ignition te

cause an exp

in an explosi

s. Do not us

ases or gas

t if malfuncti

perature of c

osion which

e atmospher

the PGE050

ixtures. The

n should occ

rtain combu

ould result in

or in the pre

to measure

sensor wire i

r, the wire

tible gases

serious injur

-

14

tinb29e

(2016-11) VGC083A_B.

m

4 Installation

4.1 Mechanical Installation ­Controller

4.1.1 Panel Mount

Procedure

The unit is intended for indoor use only. The unit is offered as a space saving half
rack design. It may also be used as a bench top device or easily installed in an
instrument panel. Optional EIA-standard rack mount panels are available for either
full rack or dual, side-by-side rack mount installation. When mounting multiple units
in your rack mount enclosure or mounting the unit below other electronic equip­ment in your rack, allow at least 1U of space (1.75 in., 45 mm) between the units to
ensure adequate ventilation.

 Make a cutout in your rack panel or instrument control panel as shown in

the drawing below. Be sure to allow clearance behind the panel for the in­strument as well as connectors and cables at the back of the instrument.
Optional EIA-standard, 19-inch, 2U height rack mount panels are available
from INFICON. The optional rack mount panels are provided with panel cut­outs and mounting holes to allow efficient mounting of your VGC083 unit.

 Drill four guide holes on each side of the panel cut out (two on each side)

with dimensions as shown in the panel cut-out drawing above.

 Slide the unit into the panel hole cut-out. Guide the four studs on the back of

the unit front panel face plate thru the four holes next to the panel cut-out.

 Use four # 10-32 Hex Nut (provided with instrument) to tighten the unit to

the panel.

4.1.2 Rack Mount

tinb29e1 (2016-11) VGC083A_B.om 15

Optional EIA-standard 19-inch wide, 2U height rack mount panels available from
INFICON (→  81):

Single cut-out panel

All dimensions in inches.

Single cut-out panel

All dimensions in inches.

The single cut-out and dual cut-out rack mountable panels shown above are availa­ble from INFICON. Panel color matches the front panel of VGC083 units. Screws
for mounting to rack enclosure are included.

16

tinb29e1 (2016-11) VGC083A_B.om

4.1.3 Mec

z

CVGC

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4.1.4 Mec

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NOTIC

BA

Mount t
ure. Lo
ween y
pressur
may als

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mount t
conden

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Vibratio
chanica

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or in a

For ele
vacuu
proper
lic-type

Fittings
installat

Use all
pected

For mo
the Op

Mount t
or restri
proces
change

Mounti
and co
cooling,

Mount t
reading
1 Torr,

or

G051

he ionization

g or restricte
ur process c

changes. M

o cause mea

ization gauge
he gauge wit

ation collecti

ount the ion
ns may caus
l stress to co

he ionization

puttering sys

trical safety

chamber. W

rounding. D

flange clamp

Flanges - foll

ion and use.

metal vacuu

o be below 1

e detailed inf

rating Manu

he PGE050a

cted, small di

chamber an

.

g the PGE05
trol instability

such as hea

he PGE050w

errors may o

ounting pos

he VGC083
B-degas Ba

rands of equ

BAG05

auge as clo
, small diam

amber and t

unting the io

urement and

can be moun
port down to

g in the gau

zation gauge

unstable rea

ponents in t

auge near io

em.

urposes the

en using KF

not attempt t

.

w the fitting/

fittings with

00 × 10-7 Tor

rmation abo

l for the PGE

close as po

meter tubing

the gauge.

too close to

. Do not mou

ers or air con

th its main ax

cur above 1

tion has little

can operate

ard-Alpert h

ivalent nude

, BAG053

e as possible

ter tubing wil
e gauge. Thi

nization gaug

control insta

ed in any ori
help minimiz
e.

where it will

ings, measu

e ionization

n or electron

ousing of the

langes, meta

modify your

lange manuf

etal seals w

(1.33 × 10-7

t the PGE05

50.

sible to the p

will create a

his may caus

gas source

t the PGE05

itioning vent

is horizontal (

orr if the uni

o no effect.

one INFICO

t cathode ion

HV EB-deg

The VG
one INFI
or one B
enclose
hot cath
or other
gauges.

to the pressu

l create a pre

may cause

e too close to

ility.

ntation, how

the effect of

e subjected t

rement errors

auge.

ources such

gauge must
l clamps mus
flange in ord

cturer's reco

en operating

mbar, 1.33 ×

convection

essure you

ressure diffe

e a delay in r

inlet may als

near a sourc
.

see diagram

is not mount

BAG050 nu

zation gauge

s B-A gauge

083B can op

ON BAG05

G052/053 gl

I2R Bayard-

de ionization

rands of equ

re you want t

sure differen
delay in res

a gas source

ver, if possib
any particles

excessive v

and possible

as an electro

e grounded t

be used to e

r to use non-

mendations

pressures ar

10-5 Pa).

auge, please

ant to measu

rence betwee

sponse to pr

cause meas

of heating o

elow). Press
d horizontall

e UHV

or other

.

rate

nude

ass

lpert

gauge

ivalent

meas­e bet­onse to

inlet

e,
or

bration.

me-

beam

o the
nsure
metal-

or

ex-

refer to

e. Long

n your

ssure

rement

r

re
. Below

tinb29e1 (2016-11) VGC0

83A_B.om

17

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o

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o

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oth

h

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n

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a

4.2

4.2.1

lectrical

Groundin

Installati

g

n

ount the PG

rticles or co

o not mount t

ns may cau

ress to comp

F

langes/ Fittin

f

llowing:

-

NPT fittings:

a

nt compound

raps of pipe t

g

uge into the

e gauge.

t

Be sure t

g

rounded to pr

fi

tings, especi

p

roduce a goo

c

nnected to.

easurement

t

earth groun
at you conne

e

rth ground c

e green colo

t

050 with por

densation fr

he PGE050

e unstable re

onents in the

s - follow the

hen connec

or wrap the t

hread seal ta

gauge port.

e vacuum g

otect personn

lly those wit

electrical co
se a ground
evice if nece

via a good q

ct a separate

nnection an

ed screw pro

down, if pos
m collecting i

here it will b

dings, meas

PGE050.

manufacture

ing the devic
readed porti

e such as P

o not use a

uges and the

el from shoc

O-rings whe

nnection bet

lug on the va
ssary. The V
uality equipm

12-AWG eart

the location

ided) on the

ible, to help

the gauge.

subjected to

rement error

's recommen

using a NP

n of the tubin

FE (Teflon®)

rench or othe

rest of your v

and injury. B
not used wit

een the gaug

uum connect

C083 control
nt earthing c

ing conduct

arked with t

ack panel of

inimize the

excessive vi

s and possibl

ations and n

fitting, apply

with one-an
tape and han
r tool which

acuum syste

aware that
h metal clam
e and the ch

ion flange of
unit should

onductor. It i

r between a

e earth grou

the VGC083.

ffect of any

ration. Vibra-

mechanical

te the

a thread seal

d-a-half to tw

tighten the

ay damage

are properl
ome vacuum
s, may not

mber it is
he pressure
e connected

encouraged

nown facility

d symbol (vi

18

tinb29e

(2016-11) VGC083A_B.

m

4.2.2 Inst

a

e

n

b

e

i

o

e

m

V

i

e

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e

llation

A good,
necting
on the

recommend

or disconnec

ack panel of

d practice is

ing it. The el

he device as

o remove po
ctrical conne
shown below

er from any

tions for the

.

able prior to

GC083 are l

on­cated

4.2.3 Con
Gau

necting th
ge Cable

Ionizatio

Good, r
ing or d
brands
propriat
low) fro
of the
easy or
low-lev
cable w
the BN

CAUTI
trolled
disconn
options
equipm

commended

isconnecting i

f equivalent

e length of io

the ion gau

GC083 label

entation of th

l ion current

ith the BNC c

connector l

N! When c

y the VGC08

ect power to

to devices or

nt damage o

practice is to
t. With INFIC

auges) conn

gauge cabl

e head on t

d "1". The cir

mating con

ignal from th

nnector at th

beled "COL".

anging or m

, you must fi
he VGC083b
removing/ins

r possible inj

remove pow

Ns nude B-

cted to your
(see various
e vacuum ch

ular plastic c

ectors. The

ion collector

e controller e

king cabling

st turn power

fore either c

alling option

ry to personn

r from any c

ionization g
vacuum cha
IG cable con

mber to the

onnector (CP

NC connecto

electrode of

d of your ca

onnections t

to the VGC0

anging cable

ards in the V

el.

ble prior to c
uge head (or

ber, connect

igurations sh

ack panel co

) is keyed t

r is for conne

he head. The

le is connect

any device c

3 OFF. Failu

connections

C083 may r

nnect­other
an ap-

wn be-

nector

allow

ting the

coaxial

d at

on­re to

rom

sult in

tinb29e1 (2016-11) VGC0

83A_B.om

19

1

B

VGC083A:

B

d

A

e

0

a

e

G

P

P

G

mvayo

y

→BAG

b

→

m

n

q

G

G

e

c

G

c

o

a

m

e

n

u

g

n

b

N

a

a

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d

y

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e

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e

n

n

o

1

G

s

S

t

@

i

y

o

VGC083B:
BAG052,

ba

BAG050 c

BAG051,

AG053 cabl

AG051 nud

kable cable 2

ble

IG

0 °C

art numbers

baka

art numbers

le cable 200

BAG

051 nude IG

 81.

050 nude I

 81.

50 °C

C

able

BA

BAG052

050 nude IG

50 °C

/ 053 glass I

50 °C

able

cable

4.2.3.

Standar

IG Cable

VGC083

Nude and

NOTE

lass

I

Cables not

anufacturers

rious versio
u have any

h

ads using I

F

or the nude I

scribed in th

d
s

stem, conne

anufactured

may be speci

s of the B-A i
uestions reg
cables not

, connect th

e previous pa

t the head e

by INFICON

fically constr

nization gau

rding the co

anufactured

IG cable (P

ge. After inst

d of the IG c

may differ in
cted for the t

e head. Con

nections to b

y INFICON.

→  81) at t
lling the nud

ble as show

BAG050
connecti

esign. Cable
pe of DEGA
act reachus

made to ion

e VGC083A
IG head on
below.

ude IG head

n

from certain

used in

inficon.com i

zation gauge

controller as

our vacuum

cable

f

20

tinb29e

(2016-11) VGC083A_B.

m

VG

k

e

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e

e

k

t

C

h

e

v

n

i

h

n

i

h

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d

m

d

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a

t

h

a

t

h

→

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h

h

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a

8

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s

A

v

s

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A

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U

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o

a

C

u

r

B

w

s

t

C083B

For the
describ
system,

For the
describ
system,

glass IG, con

d in the prev

connect the

nude IG, con

d in the prev

connect the

ect the IG c

ous page. Af

ead end of t

ect the IG c

ous page. Af

ead end of t

ble (PN → 

er installing t

e IG cable a

Gl

ble (PN → 
er installing t

e IG cable a

81) at the VG
e glass IG h

shown belo

ass IG head

81) at the VG
e nude IG h

shown belo

C083B contr

ad on your v
.

able connect

083A contr

ad on your v

.

ller as

cuum

on

ller as

cuum

4.2.3.2 Ba

VG

eable Nud

C083A: BA

IG Cable

050

The ba
connec
Bakeab
for 50 °
with eit
from th

When u
or equi

eable nude I

ion to the nu

le Cable wirin

ambient te
er single or
VGC083A c

sing the bake

alent Nude E

cable (PN

e gauge pins

g information

perature. All

ual filament i

ntroller.

able IG cable

B- degas IG

B
co

 81) is pro

(BAG050 pin
below). All ot
IG cables pro

n gauges an

(PN →  81)

ead accordin

G051 nude I

nnection

ided with pu

s) and is bak

er cables lis

vided by INFI

filament swi

connect the

to wire colo

head cable

h-on sockets
able to 200 °

ed above are

CON can be

ching is cont

GC083A to

s listed belo

for

(See

rated

sed

olled

AG050

.

B

G050 nude

eq

uivalent B-A

HV EB-dega

auge pin pat

IG or

ern

tinb29e1 (2016-11) VGC0

83A_B.om

21

3

B

d

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B

a

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i

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o

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r

F

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e

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o

hanging cabl
not only bad

u

er of this eq

s

tuation, equi

s from one d

electronics h

ipment, may

ment damag

evice to anot

ndling proce

lead to erron

and possibl

er when pow

ure, it is not
ous measure
operator inju

er is applied t

dvised and,

ment results,

ry.

the module
f done by the
a hazardous

VGC083

: BAG051

CAUTIO

ent before c

he bakeable

c

nnection to t

akeable Cabl

r 50 °C ambi

ith either sin

om the VGC

hen using th

auge accordi

! It is always

nnecting or d

ude IG cabl
he nude gau
e wiring infor

nt temperatu
le or dual fila
83B controlle

bakeable I

ng to wire col

good industr

isconnecting

(PN →  81

e pins (BAG

ation below)

re. All IG cab

ent ion gau

r.

cable conne

rs listed bel

practice to t

ables.

is provided

51 pins) and i

All other cab

es provided

es and filam

t to BAG051

w.

rn off power

ith push-on s

s bakeable t

les listed abo

y INFICON c

nt switching i

or equivalent

o the instru-

ckets for

200 °C (See

e are rated
n be used
controlled

2

nude I

R B-A

4.2.3.

Standar

Connect

I2R Deg

IG Cable

r Pin Out

ase View
BAG051
s - single fila

BAG051 or e

ent

uivalent nud

hanging cabl

i

not only bad

u

er of this eq

tuation, equi

s

CAUTIO

ent before c

he informatio

nnection of

lready have i

ith INFICON

c

ble with the

he pin-out of

auge cables

bles such as

e control unit

c

ntact no. 7 f

s

itch filament

ble and phy

d

sired to swit

I2R (resistiv

s from one d

electronics h

ipment, may

ment damag

! It is always

nnecting or d

presented i
B-A type ion
stalled on yo

roduct desig

GC083.

he CPC con

s shown belo
those for us

, e.g., the VG

r FIL2. This t

s from the co

ically remov

h filaments.

degas) B-A

evice to anot

ndling proce

lead to erron

and possibl

good industr

isconnecting

this section i

ization gauge

r vacuum ve
s, and you

ector used o

w. When usin

with controll

083, there i

pe of cable

trol unit - the

, rotate and r

Base

BAG0

I

R Degas - d

auge pin pat

er when pow

ure, it is not
ous measure
operator inju

practice to t

ables.

intended to

head or an I

sel which m

ish to continu

Granville-Ph

INFICON t

rs capable of
an additiona
nd control un

e is no need

connect the

iew

51

al filament

tern

er is applied t

dvised and,

ment results,

ry.

rn off power

address the i

cable that y

y not be dire

e using eithe

illips® and IN

o-filament s
switching th
l pin / socket
it will allow th
to go to the h

able connect

the module
f done by the
a hazardous

o the instru-

stallation /
u may

tly compatibl

that head /

ICON Ion

itch capable

filament fro

onnection at

user to

ad end of th

r when it is

22

tinb29e

(2016-11) VGC083A_B.

m

4.2.4 Connecting the PGE050 ­connectors labeled "2"
and "3"

The view shown below is the CPC connector end of the IG cable:

VGC083 Connector End of Cable View

Pin/Socket

Contact

Description
(compatible with Granville-Phillips® ion gauge cables)

Number

1 Shield, chassis ground

7 FIL 2 (this contact is only present on dual filament IG cables

available from INFICON)

8 FIL COM

11 FIL 1

13 Grid Source (supply)

14 Grid return Used only for I2R degas design using the VGC083B

Not used for VGC083A EB-degas design

PN 399-580 … -582 are a custom cable assemblies provided in different lengths
from INFICON for connecting the VGC083 to INFICON PGE050 gauge or MKS
Instruments / Granville-Phillips® 275 Convectron® vacuum gauge sensor. Connect
the DE-9 D-subminiature connector to VGC083 and PGE050 connectors to "2" or
"3".

For your reference, the wiring chart for the PGE050 cable provided by INFICON is
shown below. In addition to INFICON provided standard cable assembly lengths,
INFICON will provide custom length cable assemblies upon request.

VGC083

pin no.

1

2

3

4

5

6

7

8

9

connects to PGE050 gauge pin no.

(INFICON molded, custom connector)



















NC

cable shield

3

3

2

5

1

1

NC

tinb29e1 (2016-11) VGC083A_B.om 23

4.2.5

o

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o

e

e

r

T

o(P

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A

e

R

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A

O

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e

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t

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h

h

t

t

a

aAna

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f

e

V

o

d

C

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p

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a

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s

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u

o

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e

1

R

0

a

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s

8

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n

n

t

a

n

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3

a

B

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e

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1

p

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o

9

a

y

o

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c

g

aCo

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o

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t

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d

o

o

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g

"

4.2.6

Power C

Relay Co

nnection

nection

he VGC083 r

e

ch 2-contact

the power c

t

N →  81).

Power

(

ontacts)

+

–

total of six s

p

luggable term

r

lay contactor

LY6. Each re

a

nd I (commo

LY1 thru RL

(contacts)

=

≠

I

quires an in

pluggable te

ntactors. Op

Con

Power input

tpoint relays

inal strip mati

s. The VGC0

lay has a con

).

Y6

Rela

ut power of 2

minal strip m

ional power s

tact Descripti

(20 … 28 V (

ower ground

re provided

ng connector

3 back pane

act labeled =

Contact De

Relay #1 to

(NORMAL

Relay #1 to

(NORMALLY

#1 to Relay

0 … 28 V (dc

ting connect

pplies are al

n

c), 200 W)

y the VGC0
are provide

relay connec

(Normally Op

cription

Relay #6

OPEN)

Relay #6

CLOSED)

#6 (COMMO

, 200 W to o

r is provided

o available f

Anal

Con

3. Two each
for easy con

tors are mark

en), ≠ (Norm

Rela

)

erate. One
for connectio
om INFICON

g Output

nectors

-contact
ection to the

ed RLY1 thru

lly Closed)

Connectors

4.2.7

4.2.8

Analog O
Connecti

Analog In
(Capacita
Gauges,

utput

n

put Conn

nce Diaph

tc.)

ction

agm

total of three

gnals are pro

cuum gauge

a

re provided f

p

nel analog o

h

s a contact l

O1 , AO2, A

(contacts)

+

–

ne analog in

his input can

FICON vacu

ct mating plu

nalog input c

1. Each conn
put ground)

A1

(

contacts)

+

–

D

analog outpu
portional to t
s. Three eac

r connection

utput connec

beled + (an

O3

An

ut is provide

be accepted
um module s
ggable termin

ntactor. The

ector has a c

nd D (power

A

Analog In

D

ts are provid

e displayed p
2-contact pl

o the analog
ors are mark
log output sig

Contact D

log Output #

log Output G

(Signal

by the VGC

rom one cap

ries PGE300

al strip conne

GC083 bac

ntact labeled

etect).

ontact Descri

alog Input (S

ut Ground (

tect (power d

d by the VG

ressure for a

ggable termi

utput contac

d AO1, AO2

nal) and – (a

scription

to #3 (Signa

ound #1 to #

eturn)

83 for using

citance diaph

PGE500 or

tor is provid

panel analo

+ (analog inp

tion

gnal)

ignal Return)

tect)

083. These
y of the user

al strip matin
tors. The VG
and AO3. Ea

alog output

An

l)

s an alternat

ragm gauge

AG302. On

d for connec

input conne

ut signal) an

An

utput voltage
assigned

connectors

083 back

h connector

round).

log Output

nnectors

gauge to "2

r other
each 3-con­ion to the

tor is marked
– (analog

alog Input

C

nnectors

.

24

tinb29e

(2016-11) VGC083A_B.

m

When using a capacitance manometer / diaphragm gauge or INFICON modules
such as the PGE300, PGE500, BAG302 as an ALTERNATE GAUGE, the gauge
must be connected to the VGC083 as shown below. The alternate gauge must be
provided power from an auxiliary power supply capable of providing the power re­quired by the alternate gauge connected to the VGC083. The D contact is used in
this configuration to protect the IG from being turned on at high pressure in case
power to the alternate gauge is lost.

4.2.9 Digital I/O Connection

Signal Type A - Control Input
Signals

Signal Type B - Status Output
Signal

Signal Type C - Status output
Signal

The IG can be controlled manually using the front panel soft-keys, via remote input
signals using the digital I/O connector or RS232/RS485 commands. The VCG083
can also be configured so that the IG sensor on/off is controlled by using the pres­sure measurements from CG1, CG2 or the alternate gauge. If the user prefers di­gital I/O as the means of controlling the IG, various control input and status output
signals are available from the 9-pin D-sub male DIGITAL I/O connector. The
DIGITAL I/O Connector also provides pin-pin compatible signals with the GP 358
vacuum gauge controller as well as compatible signals with the GP 307.

The DIGITAL I/O Connector provides three different types of signals as listed
below:

The IG sensor on/off, degas on/off and emission current selection can be set by
applying momentary continuity to ground. This requires a momentary ground of
less than 0.4 V (dc) at 10 µA for 25 msec (minimum) be applied. After this, the
input must be allowed to float higher than 3.5 V (dc) for 105 msec (minimum) be­fore another low can be applied.

Input signal: Apply momentary continuity to ground to turn IG sensor on or off

Apply momentary continuity to ground to turn degas on or off

Apply momentary continuity to ground to switch Emission Currents
(100 μA or 4 mA)

The IG on/off status relay is also available as both normally open and normally
closed to indicate IG is on or off. This is an output signal to other external instru­ments to confirm IG filament is on or off. The IG on / off status relay is a single
pole, double-throw (SPDT) relay rated at 1.0 A, 30 V (dc) resistive or 1.0 A,
30 V (ac) non-inductive.

A degas status or an error condition output signal is also available from the
DIGITAL I/O Connector. If programmed for DEGAS STATUS, this can be used as
an output signal to other external instruments to confirm that degas is on or off. If
programmed for an error condition, this can be used as an output signal to other
external instruments to confirm whether any error conditions exist.

tinb29e1 (2016-11) VGC083A_B.om 25

4.2.10 RS232 /

n

t

r

S5T

T

E

m9 R

T

m

a

a

y

=

=

p

n

d

i

o

o

s

d

s

o

o

o

h

m

h

s

t

.

o

.

r

c

e

s

n

d

n

D

a

y

y

a

w

n

r

p

b

n

o

o

n

n

p

h

e

o

d

y

C

y

o

o

t

s

G

r

a

o

o

b

a

/

o

t

m

c

n

c

s

s

m

a

n

o

r

n

p

t

D

1

V

n

/

e

R

c

a

e

V

i

h

n

E

2

o

f

Commu
Connec

RS485 Se

ications

ion

ial

ignal: Open c

mA IC max.

ransistor on
ransistor off

Pin

Descri

no.

1 IG Se

2 Groun

3 Emiss

4 IG on/

5 IG on/

Relay

6 Dega

7 Groun

8 Dega

9 IG on/

Relay

ither RS232

ands to/from
pole) connec

S485 serial c

p

rted.

1

. RS485 wit

derived fro

2

. RS232 wit

the same a

3

. RS232 pro

Controllers

4

. RS485prot

Controllers

he RS232 se

ale to female

p

rt. DO NOT

s

me time. Th

c

tions at the

ollector transi

Degas on or
Degas off or

9-

in (DE-9P)

ption

sor on/off

d

ion Current

ff Status rel

ff status rela

open = IG on

on/off

d

/error status,

ff status rela

closed = IG o

r RS485 seri

the VGC083.

tors that allo

ommunicatio

address, sta

the INFICO

start and sto

s the RS485

ocol compati

col compatib

ial port is co

, wired "pin-t

onnect both

VGC083 ca

ame time. O

stor (ground

error conditi
no error con

-subminiatu

y common

- Normally

Low = degas

- Normally

n

l communica
There are tw
independen
ports. Four

t and stop ch

N BAG302 I

p characters,

rotocol.

le with the G

le with the Gr

figured to all

- pin" to be c
f the RS232

not provide

ly one or the

mitter) rated

n exists,

ition exists

re DIGITAL I

losed

n or error

pen

ions may be
DE9 (D-sub
cable conne

erial commu

racters and

protocol.

but no addre

anville-Phillip

nville-Phillip

w, for exampl

nnected fro

and RS485 c

oth RS232 a

ther as prog

at 40 V max.

0 Connectio

Signal

Type

A

A

B

B

A

C

B

used to send
miniature, sh

tions to the
ication proto

ommand/res

sing is used.

s Series 307

Series 307

e, a 9-pin ext

the VGC083

bles to the

d RS485 ser

rammed by t

CE,

s

Digital I/O

Connector

receive com-

ll size E,
S232 and
ols are sup-

onse syntax

The syntax is

nd 358

nd 358

nsion cable,

to your serial

GC083 at the

al communi­e user.

An extensio

may be use

serial port on

our PC serial

cable wired
to connect t

the VGC083

port (a conve

in-to-pin

e RS232

directly to

rter may be

DE-9 Con

user su

communica

ectors for co

plied cables

ion port – D

E9S (RS23

nections to

or serial

9P (RS485),

)

ecessary).

26

tinb29e

(2016-11) VGC083A_B.

m