INFICON UL5000 User Manual

TECHNICAL HANDBOOK

iina74e1-h (1408) Translation of the original handbook

Catalog-No.

550-500A,
550-501A

UL5000

Helium Leak Detector

from software version

V 5.14

Table of contents

1 General Information 6

1.1 Notes on the Use of this Handbook 6

1.1.1 Safety Symbols 6

1.1.2 Indications 7

1.1.3 Symbols of Vacuum Technology 7

1.1.4 Definition of Terms 7

1.2 Support from INFICON Service 9

1.2.1 Service Centers 10

1.3 Introduction 12

1.3.1 Purpose 12

1.3.2 Technical Data 13

1.3.2.1 Physical Data 13

1.3.2.2 Electrical Data 14

1.3.2.3 Other Data 14

1.3.2.4 Ambient Conditions 14

1.4 Unpacking 14

1.4.1 Supplied Equipment 15

1.4.2 Accessories and Options 16

1.4.2.1 Sniffer line SL200 16

1.4.2.2 Toolbox 16

1.4.2.3 Helium Bottle Holder 16

1.4.2.4 ESD Mat 16

1.4.2.5 RC1000 Remote control 17

2 Installation 18

2.1 Transportation 18

2.2 Working Location 20

2.3 Electrical Connections 21

2.3.1 Mains Power 21

2.3.2 Connections for the Data Acquisition Systems 23

2.3.2.1 Accessories 24

2.3.2.2 Digital Out 24

2.3.2.3 Digital In 25

2.3.2.4 Recorder 26

2.3.2.5 RS232 26

2.3.2.6 Remote Control RC1000 / Wireless Transmitter 26

2.4 Vacuum Connections 27

2.4.1 Inlet Port 27

2.4.2 Exhaust 27

2.4.3 Vent 27

2.4.4 Purge 27

2.5 Default parameters 28

3 First Operation Check 29

3.1 Needed Equipment 29

3.2 Description of the Initial Operation 29

iina74e 0.fm technical handbook(1408)

2 Table of contents

3.2.1 Startup and Measure 29

3.2.2 Internal Calibration 32

3.2.3 Verification 32

4 Description and Working Principle 33

4.1 Introduction 33

4.2 Components of the UL5000 33

4.2.1 Vacuum System 33

4.2.2 Control Panel 35

4.2.2.1 LC Display 35

4.2.2.2 START Button 35

4.2.2.3 STOP Button 36

4.2.2.4 ZERO Button 36

4.2.2.5 MENU Button 37

4.2.2.6 Soft Keys 37

4.2.2.7 Numerical Entries 38

4.3 Working Modes 39

4.3.1 Vacuum Mode 39

4.3.2 Sniffer Mode 40

5 Operation of the UL5000 41

5.1 Display 41

5.2 The Screen in Run-Up Mode 41

5.3 Display in stand-by mode 41

5.3.1 Purging 42

5.4 The Screen in Measurement Mode 42

5.4.1 Call for Calibration 42

5.4.2 Speaker Volume 43

5.4.3 Status Line in the Display 43

5.4.4 Numerical Display Mode 44

5.4.5 Trend Mode 44

5.4.6 HYDRO•S on / off 44

6 Description of the Menu 45

6.1 Main Menu 45

6.2 View 47

6.2.1 Scale linear/logarithmic 47

6.2.2 Display-range auto/manual 48

6.2.3 Time axis 48

6.2.4 Contrast 49

6.2.5 Background in Stand-by 49

6.2.6 Decimal places 50

6.2.7 Lower display limit 50

6.3 Mode 51

6.4 Trigger & Alarms 52

6.4.1 Trigger Level 1 52

6.4.2 Trigger Level 2 53

iina74e 0.fm technical handbook(1408)

6.4.3 Volume 53

6.4.4 Units 54

Table of contents 3

6.4.5 Alarm delay 54

6.4.6 Audio alarm type 55

6.4.6.1 Pinpoint 55

6.4.6.2 Leak rate prop. 55

6.4.6.3 Setpoint 56

6.4.6.4 Trigger alarm 56

6.5 Calibration 56

6.6 Settings 57

6.6.1 Vacuum settings 58

6.6.1.1 Automatic purge 58

6.6.1.2 Vent delay 59

6.6.1.3 Vacuum ranges 59

6.6.1.4 HYDRO•S 60

6.6.1.5 Leak rate internal test leak 60

6.6.1.6 Machine factor 61

6.6.1.7 Booster TMP mode 61

6.6.2 Zero & Background 61

6.6.2.1 Background Suppression 62

6.6.2.2 Calculate Inlet Area Background 62

6.6.2.3 Zero 63

6.6.3 Mass 63

6.6.4 Interfaces 64

6.6.4.1 Control Location 64

6.6.4.2 Recorder output 65

6.6.4.3 RS232 Protocol 66

6.6.4.4 Scaling Recorder Output 67

6.6.5 Miscellaneous 68

6.6.5.1 Time&Date 68

6.6.5.2 Language 68

6.6.5.3 Leak rate filter 69

6.6.5.4 Mains Frequency 69

6.6.5.5 Service interval exhaust filter 69

6.6.5.6 Service message exhaust filter 70

6.6.6 Parameter save / load 70

6.6.6.1 Save parameter set 71

6.6.6.2 Load parameter set 71

6.6.7 Monitoring functions 71

6.7 Information 74

6.7.1 Service 74

6.8 Access Control 75

6.8.1 Access to CAL function 75

6.8.2 Access to Trigger&Alarme menu 76

6.8.3 Change Device PIN 76

6.8.4 Change Menu-PIN 76

4 Table of contents

7 Calibration 77

7.1 Introduction 77

7.2 The calibration routines 77

7.2.1 Internal Calibration 78

7.2.1.1 Automatic Internal Calibration 78

iina74e 0.fm technical handbook(1408)

7.2.1.2 Manual Internal Calibration 78

7.2.2 External Calibration 78

7.3 Factor of Calibration - Range of Values 81

8 Error And Warning Messages 82

8.1 Hints 82

8.2 List of Errors & Warnings 83

9 Maintenance works 88

9.1 Hints 88

9.2 INFICON Service 89

9.3 Key for Maintenance Schedule 89

9.4 Maintenance Plan 90

9.5 Maintenance groups 91

9.5.1 1500 hours maintenance 91

9.5.2 4000 hours maintenance 92

9.5.3 8000 hours maintenance 93

9.5.4 16000 hours maintenance 94

9.6 Description of the maintenance work 95

9.6.1 Opening the UL5000 95

9.7 Check/Replace the filter cell 96

9.8 Replacing the Exhaust Silencer 98

9.9 Turbomolecular pump TMH 071 99

9.10 Scroll Pump 99

Appendix 100
Declaration of Conformity 102

iina74e 0.fm technical handbook(1408)

Table of contents 5

1 General Information

Caution

Warning

STO P

Danger

Skilled personnel

Notice: We recommend that you carefully read this technical handbook to ensure

optimum operating conditions right from the start.

This technical handbook contains important informations on the functions, insta l­lation, start-up and operation of the UL5000.

General

We reserve the right to modify the design and the specified data. The illustrations are
not binding.

1.1 Notes on the Use of this Handbook

1.1.1 Safety Symbols

Important remarks concerning operational safety and protection are emphasised as
follows:

Information on correct handling or use. Disregard can lead to malfunctions or minor
equipment damage.

Information on preventing extensive equipment and environmental damage.

Information on preventing any kind of physic al injury.

Indicates procedures that must be performed by skilled personnel only.

iina74e 01.fm technical handbook(1408)

6 General Information

1.1.2 Indications

Tipp Information on helpful procedures.

Notice: Information on special technical requirements that the user must comply

with.

The references to diagrams consists of the Chapter number, figure number and the
item number in this order. For example: Fig. 2-4/7 refers to item 7 in the figure 4 of
Chapter 2.

1.1.3 Symbols of Vacuum Technology

Given in the following are some important vacuum symbols which are used in this
manual.

Vacuum pump in general

Turbomolecular pump

Pressure gauge

1.1.4 Definition of Terms

Autoranging

The range of the preamplifier and the vacuum ranges are selected automatically.
The autoranging feature of the UL5000 covers the entire range or leak rates

depending on the selected operating mode. Not only the leak rate signal, but also the
pressure in the test sample (inlet pressure P1) and the fore vacuum pressure (P2)
are used for control purposes. Range switching between the main ranges is
performed via valves. Fine range switching within the main ranges is implemented
by switching over the gain factor of the preamplifier.

Autotune Mass alignment

This function automatically aligns the mass spectrometer so that a maximum leak
rate is displayed. The control processor changes the voltage which erates the ions
in the selected mass range until a maximum ion current is detected by the ion
detector. During each calibration the mass alignment is run automatically.

Valve

iina74e 01.fm technical handbook(1408)

General Information 7

Auto zero

Determination and automatic adaptation of the helium background.
Through this function, the internal zero level of the instrument is determined which is

then subtracted from the current leak rate signal. This function is run during the cali­bration process or when operating the start pushbutton, provided the UL5000 has
been running previously for at least 20 seconds in the standby or vent mode. If the
helium background previously suppressed shoul d drop so that for the du ration of the
zero time only the display limit will be displayed, the zero level is adapted automati­cally.

Menu

The menu allows the user to program the UL5000 according to his requirements. The
menu has a tree architecture.

Default

Status of the UL5000 when supplied by the factory.

GROSS

GROSS is a measurement mode which allows high inlet pressure (1 to 15 mbar).
The smallest detectable leak rate is 1×10

-6

mbar l/s.

FINE

FINE is the medium measurement mode with inlet pressure between 2 and 0 ,4 mbar.
Detection limit is 1×10

-10

mbar l/s.

ULTRA

ULTRA is the most sensitive measuring range with inlet pressures below 0,4 mbar.
The minimum detectable leak rate is < 5×10

-12

mbar l/s.

Foreline pressure

Pressure in the foreline between Turbo pump and scroll pump.

Minimum detectable leak rate

The smallest leak rate the UL5000 is able to detect ( 5E-12 mbar l/s).

Internal helium background

The existing helium partial pressure in the measurement system. The level of the
internal helium background is measured in the Stand-by mode and subtracted fr om
the measured signal.

Measure Measurement mode

The UL5000 measures the leak rate of the test sample.

8 General Information

iina74e 01.fm technical handbook(1408)

1.2 Support from INFICON Service

INFICON GmbH

Bonner Str. 498,50968 Cologne, Germany
Tel: [phone] Fax: [phone]

m

zisa01e1-a

Declaration of Contamination

Legally binding declaration:

I/we hereby declare that the information on this form is complete and accurate and that I/we will assume any further costs that may
arise. The contaminated product will be dispatched in accordance with the applicable regulations.

Organization/company

Address Post code, place

Phone Fax

Email

Name

Date and legally binding signature Company stamp

1) or not containing any amount
of hazardous residues that
exceed the permissible ex­ posure limits

Process related contamination of product:

toxic no 1) yes



caustic no 1) yes



biological hazard no yes 2)

explosive no yes  2)

radioactive no yes 2)

other harmful substances no1) yes



The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has
been submitted. Non-completion will result in delay.
This declaration may only be completed (in block letters) and signed by authorized and qualified staff.

Copies:
Original for addressee - 1 copy for accompanying documents - 1 copy for file of sender

Harmful substances, gases and/or by-products

Please list all substances, gases, and by-products which the product may have come into contact with:

Trade/product name

Chemical name
(or symbol)

Precautions associated
with substance

Action if human contact

Description of product

Type
Article Number
Serial Number

Reason for return

Operating fluid(s) used (Must be drained before shipping.)

The product is free of any sub­stances which are damaging to
health yes



This form can be downloaded
from our website.

2) Products thus contam i­ nated will not be ac­ cepted without written
evidence of decontami­ nation!

If an instrument is returned to INFICON or an authorised representative of INFICON,
please indicate whether the instrument is free of substances damaging to health or
whether it is contaminated. If it is contaminated also indicate the nature of the hazard.
INFICON must return any appliances without a Declaration of Contamination to the
sender’s address. A form for stating details as to the type of contamination is repro­duced in Fig. 1-1.

A maintenance and service contract is recommended.

iina74e 01.fm technical handbook(1408)

www.inficon.com [e-mail]

Fig. 1-1: Declaration of Contamina tion form

General Information 9

1.2.1 Service Centers

In case you urgently need assistance please get in touc h with the loca l IN FICON
Service in your country or the service hotline in Cologne, Germany:

Algeria [e-mail] Finland [e-mail]
Agramkow
Sonderborg
Belarus [e-mail] France [e-mail]
INFICON GmbH
Cologne
Belgium [e-mail] Germany [e-mail]
INFICON GmbH
Cologne
Brazil [e-mail] Hungary [e-mail]
PV Pest Vácuo Ltda.
Santa de Parnaíba
Bulgaria [e-mail] India [e-mail]
INFICON GmbH
Cologne
Canada [e-mail] Ireland [e-mail]
Vacuum Products Canada Ltd.
Ontario
Central America [e-mail] Italy [e-mail]
MEISA S.a. de C.V.
Querètaro
China [e-mail] Israel [e-mail]
INFICON LTD
Hong Kong
INFICON LTD
Beijing
INFICON LTD
Guangzhou
INFICON LTD
Shanghai
Czech Republic [e-mail] Korea [e-mail]
INFICON GmbH
Pilsen
Denmark [e-mail] INFICON Ltd.

Agramkow
Sonderborg
Egypt [e-mail] Latvia [e-mail]
Agramkow
Sonderborg
Estonia [e-mail] Lithuania [e-mail]
INFICON GmbH
Cologne

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]
Phone: [phone]
Fax: [phone]
Phone: [phone]
Fax: [phone]
Phone: [phone]
Fax: [phone]

Phone [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Agramkow
Sonderborg

OLV France
Orsay

INFICON GmbH
Cologne

Kontrade
Budaörs

Dashpute
400 064

INFICON
Blackburn

INFICON GmbH
Castelnuovo

Mark Technologies Ltd.
Kiriat Ono
Japan [e-mail]

INFICON Co. Ltd.
Yokohama

INFICON Ltd.
Sungnam city

Suwon City
INFICON Ltd.
Cheonan City

INFICON GmbH
Cologne

INFICON GmbH
Cologne

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]
Phone: [phone]
Fax: [phone]
Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

iina74e 01.fm technical handbook(1408)

10 General Information

Mexico [e-mail] Spain [e-mail]
MEISA S.a. de C.V.
Querètaro

Phone: [phone]
Fax: [phone]

Leybold Optics Ibérica
Barcelona

Phone: [phone]

Fax: [phone]
Netherlands [e-mail] Sweden [e-mail]
INFICON GmbH
Cologne

Phone: [phone]
Fax: [phone]

Agramkow
Sonderborg

Phone: [phone]

Fax: [phone]
Norway [e-mail] Syria [e-mail]
Agramkow
Sonderborg

Phone: [phone]
Fax: [phone]

INFICON GmbH
Cologne

Phone: [phone]

Fax: [phone]
Poland [e-mail] Taiwan [e-mail]
VAK-POL & GAZ Sp. zo.o
Pulawy

Phone: [phone]
Fax: [phone]

INFICON Company Limited
Chupei City, HsinChu Hsien

Phone: [phone]

Fax: [phone]
Portugal [e-mail] Tunisia [e-mail]
INFICON GmbH
Cologne

Phone: [phone]
Fax: [phone]

INFICON GmbH
Cologne

Phone: [phone]

Fax: [phone]
Republic of South Africa [e-mail] Turkey [e-mail]
Vacuquip
Randburg

Phone: [phone] Agramkow

Sonderborg

Phone: [phone]

Fax: [phone]
Russia [e-mail] Ukraine [e-mail]
INFICON GmbH
Cologne

Phone: [phone]
Fax: [phone]

INFICON GmbH
Cologne

Phone: [phone]

Fax: [phone]
Singapore [e-mail] United Kingdom [e-mail]
INFICON PTE LTD.
Singapur

Phone: [phone]
Fax: [phone]

INFICON
Blackburn

Phone: [phone]

Fax: [phone]
Slovakia [e-mail] United Arab Emirates [e-mail]
INFICON GmbH
Pilsen

Phone [phone]
Fax: [phone]

INFICON GmbH
Cologne

Phone: [phone]

Fax: [phone]
Slovenia [e-mail] USA [e-mail]
Medivac
Ljubljani
South America except Brazil [e-mail] Inficon Inc.

MEISA S.a. de C.V.
Querètaro

Phone: [phone]
Fax: [phone]

Phone: [phone]
Fax: [phone]

Inficon Inc.
East Syracuse, NY

San Jose, CA
Inficon Inc.
Austin, TX

Phone: [phone]

Fax: [phone]

Phone: [phone]

Fax: [phone]

Phone: [phone]

Fax: [phone]

iina74e 01.fm technical handbook(1408)

General Information 11

1.3 Introduction

STO P

Danger

STO P

Danger

Caution

1.3.1 Purpose

The UL5000 is a helium leak detector. This instrument may be used to detect the
location and the size of leaks on objects under test in two different ways:

• when the test sample has been evacuated first and is spraye d with helium on the

or

• when a helium overpressure is provided in the test sample and the test sample is

Caution: Danger of explosion:
Hydrogen forms a highly explosive gas mixture with air.
Great caution is necessary when using hydrogen! No smoking, no naked flames,
avoid sparks.

outside. It is required that a vacuum connection is provided between the UL5000
and the test sample (vacuum mode).

searched from the outside with a sniffer probe which is attached to the inlet port
(sniffer mode).

Dangerous gases pollute the machine.
So you must not use the machine for detecting toxical, acidly, microbiological,
explosive, radioactive or other noxious matters.

If you plan to detect noxious matters please contact the manufacturer. Rules for
decontamination will be developed then. If the leak detector already has been in
contact with dangerous gases please fill the declaration of contamination and sent it
back with the leak detector to INFICON.

When there are parts that have to be cleaned, please fill the declaration of deconta­mination, too, and send it to INFICON before you send the parts.

The UL5000 is to be used for leak detection only. It must not be used as a pumping
system (esp. pumping aggressive or humid gases.)

12 General Information

iina74e 01.fm technical handbook(1408)

1.3.2 Technical Data

Caution

1.3.2.1 Physical Data

Max. inlet pressure 15 mbar
Minimum detectable Helium leak rates

• in vacuum mode (ULTRA) 5×10

• in sniffer mode < 5×10
Maximum Helium leak rate which can be displayed 0.1 mbar l/s
Measurement range 12 decades
Time constant of the leak rate signal (blanked off,

63% of the final value)
Roughing capability 25 m

Pumping speed (Helium) at the inlet (EN 1518) 30m³/h, 21.1 cfm

• in vacuum mode

Detectable masses 2, 3 and 4
Mass spectrometer 180°

Ion source 2 filaments;

Inlet port DN 40 KF
Run-up time (after starting)  4min

following CAUTION)

<1 s

(50 Hz)

60 Hz

– GROSS mode 8 l/s
– FINE mode 20 l/s
– ULTRA mode >20 l/s

magnetic sector field

Iridium/Yttriumoxide

-12

mbar l/s (see

-8

mbar l/s

3

/h, 17.6 cfm

To get down to the minimum detected leak rate range some conditions must be
fulfilled:

• UL5000 has fully warmed up

• Ambient conditions must be stable (temperature, no vibration/
accelerations.)

• The part under test has been evacuated long enough (background
is no longer decreasing)

• ZERO must be active

iina74e 01.fm technical handbook(1408)

General Information 13

1.3.2.2 Electrical Data

1.3.2.3 Other Data

Power supply, single phase (model dependent)
Part no. 550 - 500A 230 V 50 Hz
Part no. 550 - 501A 115 V 60 Hz
Power consumption 1200 VA
Type of protection IP20
Power cords (EU, USA, UK) 3 m

Valves solenoid
Dimensions (L × W × H) incl. handle in mm 1068 × 525 × 1083
Dimensions (L × W × H) incl. handle in inches 42 × 21 × 43
Weight in kg 140
Weight in lbs 308
Noise level dB (A) < 70
Noise level dB (A) 0.5 m distance 55.9
Audio alarm dB (A) 90
Contamination level (to IEC 60664-1) 2
Overvoltage category (to IEC 60664-1) II

1.3.2.4 Ambient Conditions

For use within buildings
Permissible ambient temperatur e (d ur in g op er at ion) +10 °C … +40 °C
Permissible storage temperature 0 °C … +60 °C
Max. rel. humidity 80% non cond en sin g
Max. permissible height above sea level (during operation) 2000 m

1.4 Unpacking

Unpack the UL5000 immediately after delivery, even if it will be installed later on.
Examine the shipping container for any external damage. Completely remove the

packaging materials.
Check the UL5000 is complete (1.4.1 Supplied Equipment) and carefully examine

the UL5000 visually.
If any damage is discovered, report it immediately to the forwarding agent and

insurer. If the damaged part has to be replaced, please contact the orders
department.

Tipp Retain the packaging materials in the event of complaints about damage.
Tipp For unpacking please use the wedge which is part of the packaging.

14 General Information

iina74e 01.fm technical handbook(1408)

1.4.1 Supplied Equipment

• Helium Leak Detector UL5000

• Exhaust filter (mounted)

• Exhaust hose adapter with clamps (see arrow 1)

• power cord fixture (see arrow 2)

• Set of fuses (see arrow 3)

• Set of tools (see arrow 4)

• Bellow Clips (2 + 2) (see arrow 5)

• Folder with documents

– Technical Handbook UL5000
– Spare Parts List UL5000

• hooks to wrap power cord (with screws) (see arrow 6)

• Tool to open the UL5000 (see arrow 7)

• O-Ring with filter (for use at applications with particles)

• Tool box (detachable)

• ESD mat

iina74e 01.fm technical handbook(1408)

Fig. 1-2 Accessories

General Information 15

1.4.2 Accessories and Options

The following parts can be ordered additionally:

• Sniffer Line SL200 14005

• Adapter 40 / 25KF (required to connect SL200) 211-283

• Tool Box (detachable) 551-000

• Helium Bottle Holder 551-001

• ESD Mat 551-002

• Remote control in two versions:

• Spray gun with hose 16555

• Set of plugs 20099024

• Leak Ware (software package) 14090

1.4.2.1 Sniffer line SL200

By use of the sniffer line the UL5000 can easily be converted to a sniffer leak
detector. The length of the sniffer line is 4m (i.e. 12 feet).

1.4.2.2 Toolbox

The toolbox is a detachable compartment with a lockable lid. Fittings and small
fixtures can be stored plus the hand set (See Chapter 1.4.2.5). The storage volume
is approximately 5 l.

The toolbox is placed on the working surface and jammed by the handle.

– RC1000C wired
– RC1000WL wireless

Extension Cable, 10 m

551-010
551-015

14022

1.4.2.3 Helium Bottle Holder

The helium bottle holder allows you to carry a helium re servoir and a sp ray gun with
the UL5000. Only small and midsize bottles (max 10 l, 200 bar) will fit without influ­encing the stability of the UL5000.

1.4.2.4 ESD Mat

This mat is put on the working surface of the UL5000 and is cla mped a nd grou nded
by the inlet port ring. It avoids electrical discharges between the working surface and
sensitive test parts.

16 General Information

iina74e 01.fm technical handbook(1408)

1.4.2.5 RC1000 Remote control

The RC1000 is a wireless remote control that allows to operate the UL5000 from
distance up to 100 m. It provides the functions START, STOP/VENT, ZERO and
speaker volume, and displays leak rate in bargaraph or in chart mode. (see also
Technical Handbook RC1000.)

Measured values can be stored in an internal memory for up to 24 hours of recording
time. The data can easily be downloaded to a USB stick to save it.

An internal trigger can be set to provide a warning if the limit leak rates are exceeded.
An optical warning is shown on the display and an acoustic warning signal is
sounded on the integrated loudspeaker or the connected headphones.

The RC1000 remote control is housed in a robust housing to enable ergonomic
working. Magnets on the underside of the unit enable it to be attached to horizontal
or vertical metal surfaces.

The RC1000 also enables remote operation of the le ak test device in question using
a connection cable of up to 28 metres in length.

Fig. 1-3 RC1000WL wireless remote control

iina74e 01.fm technical handbook(1408)

General Information 17

2Installation

Caution

Caution

Caution

Caution

Caution

2.1 Transportation

The UL5000 is not equipped with any crane eyes and must therefore not be
transported using lifting equipment.

The UL5000 must only be pushed along u sing the handle provided for this purpose.
Don’t use the handle to lift.

Your feet can be pinched.
Keep your feet away from the rollers. .

Your feet can be run over.
Do not pull the unit, push it.

When transporting over longer distances the or iginal packaging must be u sed. The
castors must not be fixed when the UL5000 is shipped in a crate.

UL5000 with Triscroll TS 620

For transportation the chassis plate where the pump is mounted on has to be
secured by a transportation fixing.

This transportation fixing consists of 2 screws at ch assis of the UL5000 (one on each
side).

To get access to these screws remove the side covers of the UL5000.
There are orange labels on the bottom part pointing to the screws:

iina74e 02.fm technical handbook(1408)

18 Installation

Fig. 2-1
For transportation fixing the screws are tightened to the chassis plate. For operation

of the UL5000 the screws should be loosened.
To loosen the screws first loosen the counter nut that is accessible from underneath:

Fig. 2-2
Loosen the screws approximately 10 mm above the chass i s plat e an f tigh te n then

iina74e 02.fm technical handbook(1408)

the counter nuts again:

Installation 19

Fig. 2-3

Warning

Caution

Caution

Caution

For transportation tighten the screws again and fix them by the counter nuts.

2.2 Working Location

Move the UL5000 to the desired position and arrest the castors.

The UL5000 is designed for indoor use only.

Ensure a sufficient air cooling. The air inlet as well as the air discharge openings
must never be obstructed.

20 Installation

The UL5000 can be locked by arresting the castors of the front wheels to avoid
movements on skewness.

Make sure that you can always reach the mains plug.

iina74e 02.fm technical handbook(1408)

STO P

Danger

Caution: Exhaust gases and fumes:

STO P

Danger

Warning

Exhaust gases and fumes from oil-sealed pumps may be harmful to health.
For operation in poorly ventilated rooms, an exhaust pipe should be connected to
exhaust connection 5 depending on the application and gases used.

It is recommended that you check all major helium sources in the vicinity of the
UL5000 within a radius of about 10 m for the presence of any big leaks. You may use
the sniffer probe for this.

2.3 Electrical Connections

2.3.1 Mains Power

Notice: Generally the local regulations for electrical connections m ust be observed.

Caution: mains voltage:
Improperly grounded or fused products can lead to fatal injuries.
The product must be connected in accordance with local regulations and properly
grounded. Interruption of the ground conducto r within or outside of the device is not
permitted!
Only fuses of the specified type and rating are to be used as replacements.

Before connecting the UL5000 to the mains you must make sure that the mains
voltage rating of the UL5000 coincides with the locally available mains voltage. The
instrument must exclusively be connected to a single phase supply with fuses for
installation (Circuit breaker 16A max. according to IEC/EN 60898 with tripping
characteristic B).

The mains voltage rating for the UL5000 can be read off from the name plate beneath
the mains socket Fig. 2-6/7 at the back side. This voltage is fixed and can not be
changed.

A separate fuse for each of the mains conductors has been integrated into the main s
switch.

The mains voltage is applied to the instrument via the detachable mains cable which
is supplied with the instrument. A mains socket Fig. 2-6/7 is available for th is purpose
at the back side of the instrument.

iina74e 02.fm technical handbook(1408)

Installation 21

STO P

Danger

Only 3-core mains cables having a protection ground conductor must be used.
Operation of the UL5000 where the ground conductor has been left unconnected is
not permissible.

Tipp The power cord can be secured against coming out by using the power

cord fixture as shown:

Fig. 2-4. secure fixture power cord

22 Installation

Fig. 2-5. storing power cord

iina74e 02.fm technical handbook(1408)

2.3.2 Connections for the Data Acquisition Systems

Caution

Caution

1. Accessories

2. Digital Out

3. Digital In

4. Recorder

5. RS232

6. Remote Control RC1000 / Wireless

Transmitter

7. Mains Socket

8. Mains Switch

9. Hole to mount cable hooks.

10. Speaker

11. Vent

12. Purge

Fig. 2-6 Connections

Tipp The sockets: Accessories, Digital Out, Digital In and Recorder have pin 1

on top. The pin numbers are counted downwards. The socket 2 and 3 are
coded mechanically to avoid a confusion with the counter plug. For the
connection with the counter plug (set of plugs 20099024) remove the
plastic pins at the plug, accordingly the plug fits the socket.

Notice: The connections for external devices are safely separated from the mains

and safe low voltage.

The electronic of the device can be destroyed. So just connect de vices to the le ak
detector that are separated from the mains.

Only connect devices that don’t exceed 25V AC/1A

iina74e 02.fm technical handbook(1408)

Installation 23

2.3.2.1 Accessories

2.3.2.2 Digital Out

The following accessories may be connected to this port Fig. 2-6/1:

• external venting valve

• sniffer probe
Contact pins 1 and 3 are fused with a 0.8 A slow-blow fuse. The amount of power

which can be drawn is limited to 10 W. The contacts are numbered from top to
bottom.

Pin Assignment
1
2 GND24

3, 6 Input
4, 5, 7, 8 Output

+24 V, constantly applied, power supply for
the INFICON partial flow valve or sniffer line.

The following relay outputs are available for further signal processing. The maximum
rating for the relay contacts is 25V AC/1A.

Pin Assignment
1 +24V, bridged with pin 1

of socket „Digital In“
2 GND_24V 10 Error
3 Trigger 1 11 Warning
4 Trigger 2 12 Purge
5 Reserved 13 Measure
6 Zero active 14 Recorder Strobe
7 Ready 15 Common dig. out
8 CAL active 16 Reserved

Pin Assignment

9 CAL request

Description of the operation mode of the Digital Out.
Trigger 1:

Is open in case Trigger Level 1 is exceeded or the machine is not in condition of
measuring.

Trigger 2:
Is open in case Trigger Level 2 is exceeded or the machine is not in condition of
measuring.

Zero active:
Is closed in case Zero function is running.

Ready:
Is closed in case machine is ready for measurement (Emission on, no error).

CAL active

Closed when machine is in calibrating routine.

CAL Request

Is opened in case of calibration request. During external calibration an open output
indicates that the external calibrated leak has to be closed.

Error

Open when an error is shown.

24 Installation

Warning

Open when a warning is shown.

iina74e 02.fm technical handbook(1408)

2.3.2.3 Digital In

Purge

Closed when purge is active.

Measure

Closed in case a machine is in measure mode.

Recorder Strobe

Closed in case recorder output is invalid. Only used when record output is set on
„leak rate“.

These inputs can be used to control the UL5000 with a programmable logic control
(PLC).

Pin Assignment
1 +24V, bridged with pin 1

of socket „Digital Out“
2 GND_24V 9 Reserved
3 Start 10 Reserved
4 Stop 11 Common dig
5 Zero 15 Reserved
6 CAL 16 Reserved
7 Clear

Pin Assignment

8Purge

Description of operation mode of the Digital In.
Zero:

Change from low to high: activate zero
Change from high to low: deactivate zero

Start:
Change from low to high: activate START

Stop:
Change from low to high: activate STOP
Additionally the inlet is vented, when this input is longer high than the specified vent
delay.

Purge:
Change from low to high: activate purge
Change from high to low: deactivate purge

Clear:
Change from low to high: confirm error message

CAL:
Change from low to high:
When machine is in stand-by mode: start internal calibration. In case machine is
measurement mode: start external calibration. (Premise: external calibration test
leak has to be open and leak rate signal is stable)
Change from high to low:
External calibration: approve that external test leak is closed and leak rate signal is
stable.
High means: U > 13 V( ap pro xim at ely 7m A)
Low means: U < 7 V
The level of the logic signals must not exceed 35V.

iina74e 02.fm technical handbook(1408)

Notice: Signals at these inputs are only accepted if the location of control is set to

„PLC“ or „Local and PLC“. 6.6.4.2

Installation 25

2.3.2.4 Recorder

The recorder output Fig. 2-6/4 may be used to log the leak rate, the inlet pressure
and the forevacuum pressure.

The measured values are provided by way of an analogue signal in the range of 0 V
… 10 V. The resolution is limited to 10 mV. The instrument which is connected to the
recorder output (e. g. X(t) chart recorder) should have an input re sistance of no less
than 2.5 k. The measured values are available through pins 1 and 4. The reference
potential (GND) is available at pins 2 and 3. The contacts are numbered from top to
bottom.

Tipp A diagramm showing pressures and leakrate versus voltage is attached in

the appendix.

Notice: The chart recorder outputs are electrically isolated from other plugs. If, in

spite of this, hum interference is apparent it is recommended to operate the
UL5000 and the chart recorder from the same mains phase. If this is not
possible, you must make sure that the frame ground of both instruments
is kept at the same potential.

Pin Assignment
1 Analog 1
2GND
3GND
4 Analog 2

2.3.2.5 RS232

This RS232 C interface Fig. 2-6/5 is wired as data communication equipment (DCE)
and permits the connection of a personal computer (PC) for monitoring and data
logging. The connection is made through a 9 pin sub-D socket.

Pin Assignment
2RXD
3TXD
5GND
7RTS
8CTS

2.3.2.6 Remote Control RC1000 / Wireless Transmitter

This Remote Control interface Fig. 2-6/6 is a serial interface to control the UL5000
by the RC1000. The RC1000 Remote Control can be connected via the wireless
transmitter or via an extension cable with a RJ45 plug. Refer to the RC1000
Technical Handbook for more information.

Pin Assignment
2 +24V (fuse 0.8 A time lag)
30V
4 RXD (intern. RS232)
5 TXD (intern. RS232)

26 Installation

iina74e 02.fm technical handbook(1408)

2.4 Vacuum Connections

Warning

Warning

2.4.1 Inlet Port

The inlet port is located on the top of the UL5000. The size of the flange is DN 25 KF.

Risk of injury due to sucking connection flange (inlet port).
If the Vacuum-Mode of the UL5000 is activated, the connection flange may suck
bodily parts around the connection flange.
Keep bodily parts off the connection flange.

A test object or a test chamber has to be connected to the inlet port if the vacuum
mode is chosen (Refer to Chapter 6.3).

The inlet port is also used for the connection of the sniffer line.

2.4.2 Exhaust

The exhaust Fig. 2-6/12 flange is located underneath the UL5000 at the back side.
The size of the flange is DN 16 KF.

When shipped only the exhaust filter body is preassembled. The filter cartridge is
supplied together with the leak detector and can be installed at the exhaust.

Instead of this an exhaust line can be connected to the exhaust by the exhaust
adapter.

Depending on the chamber the UL5000 is attached to and the gas inside the
chamber lethal gases can be spoiled into the air through the exhaust.

2.4.3 Vent

Usually the parts under test are vented with ambient air when the test is finished. If
it is required the parts can be vented with a different gas (i. e. fresh air, dry air,
nitrogen, …) at max. 1050 mbar pressure. In this case a vent hose has to be
connected to the hose coupling Fig. 2-6/10.

2.4.4 Purge

For purge modes it is recommended to use Helium-free gases at atmospheric
pressure. Ambient air can be contaminated with Helium due to
In this case a gas supply line (i. e. nitrogen, fresh air, …) should be connected to the
hose coupling Fig. 2-6/11. The pressure of these gas line must not exceed

1050 mbar.

iina74e 02.fm technical handbook(1408)

The connector 10 and 11 in Fig. 2-6 are quick connectors for hose diameters of 8/
6mm.

spraying o r charging.

Installation 27

2.5 Default parameters

The following parameters are set like shown when in the menu of the UL 5000 under
Settings  Parameters saveload, „load default values“ is chosen.

Auto-scaling: On
Scaling logarithmic
Display range: 4 decades
Time axis: 32 seconds
LCD invers: OFF
Background in stand by mode: OFF
Automatic calibration request: OFF
Mass: 4 (helium)
Recorder Output: leak rate
Volume: 2
Zero time: 5 seconds
Leak rate unit: mbar l/s
Mode: Vacuum with

Trigger level 1: 1×10
Trigger level 2: 1×10
Leak rate external test leak (Vacuum): 1×10
Leak rate external test leak (Sniffer): 1×10
Vent delay: 2 seconds
Automatic purge: OFF
Pressure unit: mbar
Minimum volume: 0
Beep: ON
Maximum evacuation time: 30 m i nu te s
Audio Alarm Type: Trigger Alarm
Maximum inlet pressure when sniffing: 1 mbar
Minimum Inlet pressure when sniffing: 0,1 mbar
Number of decimal place at leak rate displayed: 1

HYDRO•S

-9

mbar l/s

-8

mbar l/s

-7

mbar l/s

-5

mbar l/s

28 Installation

Scroll display: On
Particle protection: Off
Direct access to calibration: On
Contamination protection: Off
Switch off limit for contamination protection: 1E-3 mbar l/s
Control location: Local
Alarm delay: 30 seconds
Leak rate filter: I•Cal
Zero: enable
HYDRO•S automatic enabled

iina74e 02.fm technical handbook(1408)

3 First Operation Check

Warning

Caution

The steps for an initial operation are descr ibed in this chapter. It is expla ined how to
switch on the UL5000, how to measure and how to carry out an internal calibration.

Notice: If anything unexpected happens during the initial operation or the leak

detector acts in a strange way the UL5000 can be switched off by the mains
switch at any time.

3.1 Needed Equipment

The following parts will be needed:

• A blind flange 40 KF (if not preassembled at the inlet port).

• A helium test leak with a DN 40 KF adapter (optional).

3.2 Description of the Initial Operation

Please proceed the following description step by step to sta rt th e initial op er at ion .
See Chapter 5 for a more detailed description.

3.2.1 Startup and Measure

1 Unpack the UL5000 and inspect it for any external damage (See Chapter 1.4

Unpacking).

2 Connect the instrument to the mains power (See Chapter 2.3.1 Mains Power).
3 Switch on the leak detector by using the mains switch Fig. 2-6/8.

Caution: Abrupt movements.
Abrupt movements can damage the running turbo pump.
Avoid abrupt movement and vibration of the instrument (e.g. running over cables,
door sills) during operation and up to 4 minutes after switching off since the turbo
pump can be damaged.

Don’t switch machine on when ambient temperature is below 10°C.

iina74e 03.fm technical handbook(1408)

After power on a welcoming picture appears on the screen of the control panel Fig.

3-1/1, then status information on the speed of the turbo pump, the foreline pressure,

the emission and the active filament are given.

First Operation Check 29

The start up procedure takes about 4 minutes and the end is indicated by a beep.

1
2

The UL5000 is in Stand-by mode now.

Fig. 3-1: Top view of the UL5000
Pos. Description Pos. Description

1 Control Panel 2 Inlet Port

4 Check if the inlet port Fig. 3-1/2 is blanked off. If not, please mount a blind flange with

O-Ring on the inlet port.

5 Press the START Button Fig. 3-2/6. The inlet will be evacuated and the measured

leak rate will be displayed a moment later.

This is the measurement mode. If a test part was connected you would start spraying
Helium to identify leaks.

30 First Operation Check

iina74e 03.fm technical handbook(1408)

Fig. 3-2: Control Panel

1

6

12

13
14

7

2
3
4
5

8
9
10
11

Pos. Description Pos. Description
1 LC Display 8 Soft Key no. 5
2 Soft Key no. 1 9 Soft Key no. 6
3 Soft Key no. 2 10 Soft Key no. 7
4 Soft Key no. 3 11 Soft Key no. 8
5 Soft Key no. 4 12 MENU Button
6 START Button 13 STOP Button
7 Control Panel 14 ZERO Button

6 To correct for any background signal (res idual Helium in the part under test) you may

press the ZERO Button Fig. 3-2/14. To undo ZERO please press the ZERO Button
for 2 … 3 seconds.

7 Press the STOP Button Fig. 3-2/13, the UL5000 will go to Stand-by. If you press

STOP a few seconds the inlet of the UL5000 will be vented.

8 To finish the startup procedure please proceed with #16. For ca libration proceed with

#9.

iina74e 03.fm technical handbook(1408)

First Operation Check 31

3.2.2 Internal Calibration

9 Proceed the internal calibration (See Chapter 7.2.1 Internal Calibration). For better

quantitative measurements please allow the unit to warm up (15 … 20 minutes).

• Press Calibration (Soft Key no. 5 Fig. 3- 2 /8) to get into the calibration menu.

•Select internal (Soft Key no. 4 Fig. 3-2/5) to choose the internal calibration.

•Select automatic (Soft Key no. 8 Fig. 3-2/11). The automatic procedure of the
internal calibration is started and takes about 30 seconds.

10 Press the STOP Button Fig. 3-2/13 until the message STAND-BY / VENTED appears

on the display. The inlet is vented now.

3.2.3 Verification

To verify the accuracy please proceed through the following steps. A test leak is
required. If a test leak is not available please continue with #16.

11 Remove the blind flange from the inlet port and conne ct the open helium test leak to

the inlet port.

12 Press the START Button Fig. 3-2/6 again. The inlet will be evacuated and the leak

rate of the test leak will be measured and displayed.

13 Press the STOP Button Fig. 3-2/13 to interrupt the measurement. The Stand-by

mode will be displayed.

14 Press the STOP Button Fig. 3-2/13 again until the message STAND-BY vented

appears an the display. The inlet is vented now.

15 Remove the helium test leak from the inlet port and put a blind flange onto the inlet

port again.

16 Switch off the leak detector by using the mains switch Fig. 2-6/8.

The first operation is finished.

iina74e 03.fm technical handbook(1408)

32 First Operation Check

4 Description and Working Principle

V4a

V4b

p

2

V2

MS

V3

V7

p

1

V1b

V1a

V5

p

3

2

4

6

3

4.1 Introduction

The UL5000 basically is a helium leak detector for vacuum applications, i.e. the part
under test is evacuated while the test is performed. The vacuum is achieved with a
pumping system that is part of the UL500 0. In addition the vacuum can be generated
by pumps with are set up in parallel to the leak detector.

Another operating mode of the UL5000 is the Sniff mode which can only be used
when a sniffer line (See Chapter 1.4.2 Accessories and Options) is hooked up.

4.2 Components of the UL5000

The UL5000 is a self-contained unit in a metal housing on wheels. This housing
contains the entire vacuum system and the according power supplie s. On top of the
unit is the inlet port and the display.

4.2.1 Vacuum System

The vacuum diagram below shows the major components inside the UL5000:

Fig. 4-1: Vacuum diagram UL5000
Pos. Description

1 MS: Mass Spectrometer, Helium sensor (180° magnetic field mass spectro-

meter)
2 Turbomolecular Pump (TMP, provides high vacuum conditions in the MS)
3 V1a … V8: Electromagnetic Valves to control the gas flows
4 Scroll pump (provides the foreline pressu re for the TMP and pumps down the

iina74e 04.fm technical handbook(1408)

parts under test)
5Inlet Port
6 Booster Turbomolecular pump

The mass spectrometer is mainly composed of the ion source, the magnetic sepa­rator and the ion collector.

Description and Working Principle 33

Gas molecules getting into the mass spectrometer are ionized by the ion source.
These positively charged particles are accelerated into the magnetic field following a
circular path, the radius of which depends on the mass-to-charge ratio of the ions.
Only helium ions can pass this filter and reach the ion collector where the stream of
the ions is measured as a electrical current.

For operation the mass spectrometer requires a vacuum level in the range of

-4

1×10

mbar and lower. This pressure is provided by the turbomolecular pump which

in turn is backed up by a scroll pump.
Besides maintaining the pressure in the mass spectrometer the pump system is used

to evacuate the test parts. It is made sure that the pressure in the mass spectrometer
is low enough under all circumstances. The valves V1a, V1b, V2, V4a, V4b control
the gas flows when measuring. Valves V5, and V8 are used to vent the system and
the Turbo pump. Valve V7 opens and closes the internal test leak during calibr ation.

With the pressure in the test part being lower than ambient pressure sprayed helium
can penetrate into the part in case of a le akage. As soon as the pressure conditions
allow it one of the valves to the TMP opens. Now Helium can penetrate into the mass
spectrometer contrary to the pumping direction of the TMP.

See Chapter 4.3 Working Modes for details.

34 Description and Working Principle

iina74e 04.fm technical handbook(1408)

4.2.2 Control Panel

1

6

12

13
14

7

2
3
4
5

8
9
10
11

The Control Panel Fig. 4-2/7 contains a liquid crystal display (LC Display), the
START, STOP, ZERO and MENU buttons and also eight Soft Keys for the different
menus and inputs.

The control panel itself is rotable.

Fig. 4-2: Control Panel
Pos. Description Pos. Description

1 LC Display 8 Soft Key no. 5
2 Soft Key no. 1 9 Soft Key no. 6
3 Soft Key no. 2 10 Soft Key no. 7
4 Soft Key no. 3 11 Soft Key no. 8
5 Soft Key no. 4 12 MENU Button
6 START Button 13 STOP Button
7 Control Panel 14 ZERO Button

4.2.2.1 LC Display

The LC Display Fig. 4-2/1 is the communication interface to the operator. It displays
the leak rates, the status report of the machine, messages, warnings and errors.

iina74e 04.fm technical handbook(1408)

4.2.2.2 START Button

Pushing the START Button Fig. 4-2/6 enables the UL5000 to start the measure
procedure. If the START button is pushed again in measurement mode, the
maximum leak rate indicator („hold“ function) is activated. This indicator shows the
maximum leak rate between „START“ and next „STOP“

Description and Working Principle 35

4.2.2.3 STOP Button

0

10

20

30

40

50

t2

leak rate

t

raw signal

leak rate displayed

saved value

t1

4.2.2.4 ZERO Button

Pushing the STOP Button Fig. 4- 2/13 interrupts the measure procedure. If the button
is pressed longer the inlet is vented according to the conditions defined in the menu

Vent delay. See Chapter 6.6.1.2 Vent delay to select the time parameters of the

venting.

Pushing the ZERO Button Fig. 4-2/14 enables the zero mode.
When pressing ZERO the currently measured leak rate is taken as a background

signal and is subtracted from all further measurements. As a result the displayed leak
rate then is

•1×10

•1×10

•1×10

-6

-10

-12

in GROSS
in FINE
in ULTRA

To reverse the ZERO function please keep the push button pressed for about 3
seconds.

After pressing ZERO the decreasing background is fitted to the course automa tically.
So it is possible to recognize leaks even when the signal is decreasing rapidly.

Please also refer to the pictures below.

Fig. 4-3 decreasing background
When the raw signal declines below the saved background value the background

value will automatically be equated with the raw signal. As soon as the raw signal is
increasing again the saved decreasing value remains constant. Increasings of the
signal are displayed clearly as a leak.

36 Description and Working Principle

iina74e 04.fm technical handbook(1408)

4.2.2.5 MENU Button

0

10

20

30

40

50

t3

leak rate

t

ZERO

> 3 s

raw signal

leak rate displayed

4.2.2.6 Soft Keys

Fig. 4-4 undo zero
When you want to see the raw signal (including undergroun d) please press the

ZERO button about 3 seconds. The saved value will be reset to zero. The under­ground signal will not be suppressed anymore.

The ZERO function can be selected to a special mode that allows to use it only when
the signal of a falling background becomes stable (see Chapter 6.6.2.3)

The menu appears on the LC Display after pushing the Fig. 4-2/12 during any
working mode.

If the menu is opened during the current session the operator will lead to the last
screen before the menu was left.

Pushing the MENU button again leads back to the screen of the previous working
mode. The software shows the last screen that was used before.

The function of the eight Soft Keys Fig. 4-2/2 … /5 and /8 … /11 depends on the
current menu. Only key 1 and 8 very often have the functions Back/Cancel
(Softkey no. 1) and OK (Softkey no. 8.).

iina74e 04.fm technical handbook(1408)

Special Functions

When inputs are allowed or when settings can be selected in a submenu two of the
Soft Keys always have the same function:

• Soft Keys no. 1 Fig. 4-2/2 is Cancel.

It allows to escape from the submenu without any changes of the present settin gs
and return to the previous menu page.

• Soft Keys no. 8 Fig. 4-2/11 is OK.

The selected settings or edited values will be stored and the previous menu page
will be displayed again.

Description and Working Principle 37

4.2.2.7 Numerical Entries

If you have opened a menu page where a number can be changed please proceed
in the following way:

• If you don’t want to change anything, press Soft Key no. 1 Cancel.

• The digit that can be changed is displayed inverted. With the arrows  (Soft Key

• To change a digit to a specific number press the corresponding pair of numbers.

• Having reached the last digit all corrections have to be confirmed by OK (Soft Key

Example

To change the trigger level 5.0 x 10
(Soft Key no. 3) Fig. 4-5.

no. 8) and  (Soft Key no. 4) you can choose which digit you need to change.

A submenu opens and the desired number can be selected. The submenu closes
automatically and the next digit of the total number now is inverted.

no. 8).

-9

mbar l/s to 3 x 10-9mbar l/s please press 2/3

Fig. 4-5: Numerical entry of the Trigger Level 1
In the submenu press 3 (Soft Key no. 4) Fig. 4-6.

Fig. 4-6: Submenu of the Numerical Entries (Example)

iina74e 04.fm technical handbook(1408)

38 Description and Working Principle

4.3 Working Modes

4.3.1 Vacuum Mode

As mentioned (See Chapter 4.2.1 Vacuum System) the sample has to be evacuated
to allow Helium which is sprayed on the outside to enter thro ugh any leaks due to the
pressure difference.

When pressing the START Button Valves V1a and V1b open and the sample is
pumped down by the scroll pump. The booster turbo pump starts. At the same time
valve V2 is closed to avoid an unacceptable pressure increase in the turbo pump and
the mass spectrometer. With valve V2 being closed the turbomolecular pump is
operated without being backed up by the scroll pump. Since the mass spectrometer
is already under vacuum no further gas is pumped. Thus the pressure p
constant or increases only slowly.

The following diagrams show the gas flow during evacuation and during the modes
GROSS, FINE and ULTRA.

remains

2

Fig. 4-7: left: Evacuation (no measurement), right: GROSS Mode
The condition for the evacuation process described is maintained until the inlet

pressure p

has dropped below 15 mbar. Now valve V2 opens. Possibly present

1

helium may now flow upstream against the pumping direction of the turbo molecular
pump into the mass spectrometer where it is detected. This mode is called GROSS,
the detection limit is 1×10

-7

mbar l/s. At 1 mbar the booster turbo pump becomes

effective.
Since the scroll pump continues to evacuate the test sample the in let pressure p

1

will
continue to drop. Below 2 mba r the UL5000 will switch to FINE mode, i.e. V1a and
V4a will open and valve V1b will close. The gas stream enters the turbo pump at an
intermediate level. The sensitivity of the system now is higher, the detection limit is

-10

1×10

iina74e 04.fm technical handbook(1408)

mbar l/s.

Description and Working Principle 39

4.3.2 Sniffer Mode

Fig. 4-8: left: FINE Mode, right: ULTRA Mode
Now the lower part of the turbo pump further evacuates the sample and after the

pressure p

has reduced below 0.4 mbar the UL5000 switches into ULTRA mode, i.e.

1

V1a and V4a close and V4b opens. The entrance into the turbo pump is on a higher
level now. The pumping speed at the inlet port is now 20 l/s, the detection limit is

-12

<5×10

mbar l/s.

Tipp A special set up of the UL5000 stopps the autoranging procedure as

described above. With the mode Gross only (See Chapter 6.3 Mode) the
unit will stay in GROSS Mode Fig. 4-7 (right) regardless the inlet pressure.

In sniff mode a sniffer line (preferably the INFICON standard sniffer line 14005) is
connected to the inlet port. When pressing the START Button the system starts to
pump air through the sniffer line. Due to the constant gas flow through the sniffer line
the software will range through GROSS into FINE mode and stay there. The inlet
pressure will not drop further down. By measuring the inlet pressure the system
software makes sure that the flow through the sniffer line is at the right level.
Otherwise warning messages are generate d . The detection limit in sniff mode is

-7

<1×10

mbar l/s.

INFICON’s sniffersystem QT100 may also be used to sniff. Since the QT100
provides a lower inlet pressure it is recommended to keep the system in vacuum
mode to avoid a wrong generation of pressure warnings.

40 Description and Working Principle

iina74e 04.fm technical handbook(1408)

5 Operation of the UL5000

The UL5000 is switched on by pushing the mains switch (See Chapter 3.2.1 Startup

and Measure). After about 2.5 min the run-up procedure is finished; the un it is in

Stand-by-mode and ready to measure.
Please connect the part to be tested to the inlet port and press START. The UL 5000

starts to evacuate the part. The evacuation time depends on the volume of the test
part. During evacuation the screen shows the inlet pressure online.

Once the pressure of 15 mbar (11 Torr or 1500 Pa) is reached the unit switches to
measurement mode. The corresponding leak rate is displayed. For further explana­tions of the screen please refer to Fig. 5-1.

The displayed leak rate corresponds to the helium background concentration in the
part under test. Since the UL5000 continues to pump down the part this background
leak rate will further reduce. As soon as the leak rate is low enough in respect to your
requirements you may start spraying Helium to search for possible leaks.

When you are finished please press STOP and hold the button a few seconds to vent
the part under test.

5.1 Display

The display is used to either show leak rate signals or program specific set-ups and
get information by means of the software menu (See Chapter 6 Description of the

Menu). In addition messages and maintenance instructions are displayed on the

screen (See Chapter 8 Er ro r And Warnin g Me ss ag es).

5.2 The Screen in Run-Up Mode

In run-up mode the display shows:

• Speed of the turbo molecular pump

• Foreline pressure

• State of emission

• Active filament

• A bar graph which shows the run-up progress

Notice: If the display is too bright or too dark, please refer to Chapter 6.2.4.

5.3 Display in stand-by mode

In stand by mode the states are shown in the lower edge of the display (See Chapter

5.4.3). Furthermore calibration (See Chapter 7) can also be started in stand by mode

and purging, too (See Chapter 5.3.1).

iina74e 05.fm technical handbook(1408)

Operation of the UL5000 41

5.3.1 Purging

Every time when the UL5000 changes into stand by mod e it starts purging automa­tically after 20 seconds. During this purging the scroll pum p is flushed through purge
connection (See Fig. 2-1/11).

When the machine is in stand by mode this operation a lso can be activated manually
(Key 7). By pressing the key again the purging will be discontinued. By pressing
START the activity will be discontinued, too.

5.4 The Screen in Measurement Mode

In measurement mode the leak rates can be displayed in two different modes:

• Numerically, combined with a bargraph Fig. 5-1

• Trend mode (leak rate versus time) Fig. 5-2
In the lower right corner of the display (next to the Soft Key no. 8) you will find a

symbol that allows to switch between the display modes by pressing Soft Key no. 8.
See Chapter 5.4.4 Numerical Display Mode and refer to chapter 5.4.5 for explana­tions of the different display modes.

Access to calibration (Soft Key no. 5) and access to the speaker volume (Soft Keys
no. 2 and no. 3) is the same in all modes. Also the status icons in the bottom line are
in common in all display modes.

Fig. 5-1: Display, measurement mode

5.4.1 Call for Calibration

In all modes the Soft Key no. 5 is used to get to the calibration routine. See Chapter

7 Calibration for further information regarding calibration.

42 Operation of the UL5000

iina74e 05.fm technical handbook(1408)

5.4.2 Speaker Volume

STO P

Danger

The hearing can be harmed by the audio alarm.
The accoustic output can exceed a level of 85dB(A).
Do only expose to the audio alarm for a short time or use ear protection.

On the left hand side two loud speaker symbols are shown, combined with the signs
+ and -. By pressing the corresponding softkeys (Soft Keys no. 2 and no. 3) the
volume can be adjusted for convenient loudness. In the bottom line of the display
another loud speaker symbol is shown, combined with a number. This number indi­cates the level of the current loudness (ranges from 0 to 15).

See Chapter 6.4.3 Volume for information on loudness, alarms, and sound tracks.

5.4.3 Status Line in the Display

The status line at the bottom of the display informs about (reading from left to right):

Symbol of display Meaning Explanation

• Volume level

See Chapter 5.4.2 Speaker Volume.

S1 • Trigger 1

S2 • Trigger 2

•• • Detected mass

• Warning triangle

VAC • Working mode

ULTRA • GROSS/FINE/

ULTRA

ZERO • ZERO
HYDRO•S • HYDRO•S

I•ZERO • I•ZERO
STABLE • Signal stable

If the trigger values are exceeded these
signs are inverted. (White on black
background.)

see: Trigger 1
Number of dots indicates the mass

number
(4 dots = Helium, 2 dots = Hydrogen)

See Chapter 8.1

VAC or SNIFF indicate which working
mode was selected (see Chapter 6.3

Mode).

Depending on the inlet pressure the
UL5000 may be in GROSS, FINE or
ULTRA, which is indicated here (see
Chapter 4.3 Working Modes).

Indicates if ZERO-function is active.
Indicates if HYDRO•S function is

active. See Chapter 5.4.6.
Indicates if I•ZERO function is active.

Indicates if background signal is stable
(see Chapter 6.6.2.3).

iina74e 05.fm technical handbook(1408)

Operation of the UL5000 43

5.4.4 Numerical Display Mode

The display shows the leak rate in big digital figures, see Fig. 5-1. The unit of the leak
rate is shown, too. Underneath the leak rate the inlet pressure is displayed in smaller
digits. The units of leak rate and pressure can be defined in the menu (Se e Chapter

6.4.4 Units).

Below this the same leak rate is shown graphically as a bar. The scale of this bar, i.e.
the number of decades included in this bar can be defined in the menu (See Chapte r

6.2.2 Display-range auto/manual). The programmed trigge r levels (See Chapter

6.4.1 and 6.4.2) are indicated at the bar by sh ort ve rtical lines: a solid lin e for trigge r

1 and a dotted line for trigger 2.
In addition the inlet pressure is displayed in smaller figures above the bargraph.

5.4.5 Trend Mode

In trend mode the leak rates are displayed over time Fig. 5-2. In addition the actual
leak rate and inlet pressure also are displayed digitally. The time axis can be defined
in the menu (See Chapter 6.2.3). The intensity axis (y-axis) is defined the same way
as the bargraph (Please refer to Chapter 6.2.1 ff).

Fig. 5-2: Display, trend mode

5.4.6 HYDRO•S on / off

If working mode is set to „Vacuum: HYDRO•S: automatic ON or automatic OFF“ (See
Chapter 6.3) you can switch HYDRO•S on or off with softkey 4. If HYDRO•S is on,
the status line indicates „HYDRO•S“, if HYDRO•S is off, the status line indicates
„VAC“. Also refer to Chapter 6.6.1.4

Notice: In the HYDRO•S mode the lower detection limit is 1 x 10

-10

mbar l/s

iina74e 05.fm technical handbook(1408)

44 Operation of the UL5000

6 Description of the Menu

By pressing the MENU push button Fig. 6-1 the main menu will be displayed
regardless of the current working mode.

Fig. 6-1: The Main Menu
The main menu Fig. 6-1 leads the operator to several submenus described in the

following chapters.

6.1 Main Menu

The main menu shows 7 sub-menus. In these sub-menus groups of technical
features are put together logically. From here the next levels of the menu tree can be
reached.

Tipp All following chapters show the path to get to the described menu line right

underneath the headline. This path is indicated by a dot (•) and printed in
italics.

Key No. Name Description

1 Back Return to the previous screen.

Display settings like scaling, contrast, system

2 View

3 Mode

4 Trigger & Alarms

5 Calibration

6 Settings

7 Information

8 Access Control

background.
Please refer to Chapter 6.2.

Selection of different working modes like
Vacuum, Gross only, Sniff
Please refer to Chapter 6.3.
Settings of units, trigger levels and alarms.
Please refer to Chapter 6.4.
Calibration of the UL5000.
Please refer to Chapter 6.5.
Settings of internal machine parameters.
Please refer to Chapter 6.6.
Information on the UL5000 (electrical and
vacuum data) and service menu.
Please refer to Chapter 6.7.
Access restrictions.
Please refer to Chapter 6.8.

The next page gives an overview of the entire menu architecture Fig. 6-2.

iina74e 06.fm technical handbook(1408)

Description of the Menu 45

Main Menu

1. Level 2. Level 3. Level

Scale linear/logarithmic
Display-range auto/manual
Time axis

View (See 6.2)

Mode (See 6.3) Sniff/Vacuum

Trigger & Alarms (See 6.4)

Calibration (See 6.5)

Settings (See 6.6)

Information (See 6.7)

Access Control (See 6.8)

Contrast
Background in Stand-by
Decimal places

Lower display limit

Trigger Level 1
Trigger Level 2
Volume
Units
Alarm delay
Audio alarm type

internal

external

Vacuum settings

Zero & Background

Mass

Interfaces

Miscellaneous

Parameter save / load

Monitoring functions

View settings
View internal data
Vacuum diagram
View error list
Calibration history
Calibration factors

Service
Access to CAL function
Change Device PIN
Change Menu-PIN

manual
automatic
Edit leakrate
Start

Automatic purge
Vent delay
HYDRO•S
Vacuum ranges
Leak rate internal test leak
Machine factor
Booster TMP mode
Background Suppression
Calculate Inlet Area Background
Zero

Control Location
Recorder output
RS232 Protocol
Scaling Recorder Output
Time&Date
Language
Leak rate filter
Mains Frequency
Service interval exhaust filter
Service message exhaust filter
Save parameter set
Load parameter set

Calibration request
Particle Protection
Contamination protection
Pressure limits for vacuum ranges
Pressure limits for sniff mode
Maximum evacuation time

Fig. 6-2: Menu Structure overview

iina74e 06.fm technical handbook(1408)

46 Description of the Menu

6.2 View

• Main Menu > View
In this menu Fig. 6-3 all features that influence the wa y data are displayed ar e put

together.

Fig. 6-3: The View Menu

Key No. Name Description
1 Back Return to the main menu.

2 Scale linear/logarithmic

3 Display-range auto/manual

4 Time axis

5 Contrast

6 Background in Stand-by

7 Decimal places
8 Lower display limit Please refer to Chapter 6.2.7

Settings for bargraph and trend mode.
Please refer to Chapter 6.2.1.

Manual or automatic scaling. Please refer to
Chapter 6.2.2
Time axis in trend. Please refer to Chapter

6.2.3

Display contrast. Please refer to Chapter

6.2.4

Background displayed or not. Please refer to
Chapter 6.2.5
Number of decimal places. Please refer to
Chapter 6.2.6

6.2.1 Scale linear/logarithmic

• Main Menu > View > Scale linear/logarithmic
These settings apply to the bargraph (= bar underneath the digital figures in the

measurement mode) and Y-axis in the trend mode.
The scale of the bargraph can either be linear or logarithmic. With the arrows (up and

down) it can be determined how many decades the bargraph covers.
Usually a logarithmic scale is recommended because leak rates may change easily

over several decades.

Softkey 2: Linear
Pressing this key switches the display to a linear scale, starting at zero.

Softkey 6: Log
The scaling will be displayed logarithmically.

iina74e 06.fm technical handbook(1408)

Description of the Menu 47

6.2.2 Display-range auto/manual

• Main Menu > View > Display-range auto/manual
The upper limit of the displayed leak rate range can be set manually or automatically.

These settings apply to the bargraph (=bar underneath the digital figures in the
measurement mode and y-axis in the trend mode).

With the upper limit defined here the lower limit is set to a value based on the number
of decades (

Softkey 2: Manual
The upper limit of the displayed range can be set manually.

Softkey 3: Arrow down
.Decrease the upper limit if manual is chosen. The minimum value is

-11

10
Softkey 6: Automatic

The limit of the displayed range will be chosen automatically.
Softkey 7: Arrow up

Increase the upper limit if manual is chosen. The maximum value is

+3

10

Softkey 8:

Save the settings and return to the previous menu.

Please refer to Chapter 6.2.1).

mbar l/s.

mbar l/s.

6.2.3 Time axis

If linear scale is selected, the lower limit is always zero. The upper limit is only a
default value. You can change this on the measurement screen with the Soft Key 6
and 7 if you have chosen manual display ranging.

• Main Menu > View > Time axis
The length of the time axis in trend mode can be changed in steps of 16 … 960 s.

Softkey 3: Arrow down
Decrease the length of the time axis. The minimum value is 16 seconds.

Softkey 4: Scroll on / off
In „scroll on“ the display is written continiously in trend mode. In „scroll off“

the display will be overwritten after the adjusted action is finished.
Softkey 5: ?

Help
Softkey 7: Arrow up

Increase the length of the time axis. The maximum adjustable value is 960
seconds.

48 Description of the Menu

iina74e 06.fm technical handbook(1408)

6.2.4 Contrast

• Main Menu > View > Contrast
The contrast of the display can be changed. The chan ges are applied synchronously.

The recommended value under regular conditions is 50 (or close to it).

Tipp If by accident the display has been set too bright or too dark so that it can

not be read off, this may be changed as follows:

Switch off the UL5000 and turn it on again. During the run-up phase
press the key no. 3 or 7 so long until the display can be read properly
again. This setting is saved to the EPROM only after confirming this
through the contrast menu. If this setting is not confirmed, the former
setting will be applied after switching on the instrument on again.

Softkey 3: Arrow down
Fade the contrast to dark. The minimum values is 0.

Softkey 4: Invert display
Invert the contrast of the screen.

Softkey 5: ?
Help

Softkey 7: Arrow up
Fade the contrast to light. The maximum value is 99.

6.2.5 Background in Stand-by

• Main Menu > View > Background in Stand-by
The internal background leak rate can be displayed in Stand-by mode (ON) or not

(OFF).The default setting is OFF.

Softkey 3: Off
The background leak rate will not be shown.

Softkey 5: ?
Help

Softkey 7: ON
The background leak rate will be shown.

The internal background is generated by residual gas (e. g. helium) that has not been
pumped away yet. Sources for residual gas are air or absorbed gases from the inner
surfaces of the leak detector. This internal background will never disappear totally.
Very clean systems which have been pumped for a long time will show a background
in the 10
10

When pressing START the current internal background is subtracted from all further
measured signals automatically. Thus it is made sure that only the net leak rate from

iina74e 06.fm technical handbook(1408)

the part under test is measured.

-11

-10

mbar l/s range. Under normal conditions the background level is in the

mbar l/s or low 10-9mbar l/s range.

Description of the Menu 49

When switched to Stand-by / Vent again a new internal background is calculated
after 25 s. The updated value is underlined. This means that if you press START
when the value is underlined, the actual background signal will be subtracted. If you
press START when the value is not underlined, the old background signal from the
last Stand-by will be subtracted.

6.2.6 Decimal places

• Main Menu > View > Decimal places
The number of the decimal places of the displayed leak rate can be chosen. The

default setting is 1.

Softkey 3: 1
The leak rate will be displayed with one decimal place.

Softkey 7: 2
The leak rate will be displayed with two decimal places.

Two decimals are especially useful, when the I•CAL leak rate filter (

Chapter

6.6.5.3) is used.

6.2.7 Lower display limit

• Main Menu > View > Lower display limit
This parameter defines the lower leak rate limit in the measurement ranges. This is

valid for vacuum modes only.

Softkey 3, 7: Changing of the lower detection limit between 1 ×10

Softkey 5: ?

Help

12

Please refer to

-5

and 1×10

-

50 Description of the Menu

iina74e 06.fm technical handbook(1408)

6.3 Mode

• Main Menu > Mode
The mode menu Fig. 6-4 enables the submenu to select the different working mode s.

Fig. 6-4: The Mode Menu

Key No. Name Description

1 Cancel

7 Vacuum

5 Not used in this menu.
3Sniff

8OK

Return to the main menu without any changes
of the present settings.

The normal vacuum mode will be used.
Vacuum mode with the possibility to use
HYDRO•S.

HYDRO•S improves your time to test. Water
vapor desorption in a test object generates an
unwanted background signal. HYDRO•S
separates and eliminates this signal from the
helium signal, so testing can begin sooner.
After changing to this mode, a new calibration
necessary. Please refer to Chapter 6.6.1.4,
HYDRO•S automatic ON.

The sniff mode will be used. Please refer to
Chapter 4.3.2 Sniffer Mode.

Save the settings and return to the previous
menu.

iina74e 06.fm technical handbook(1408)

Description of the Menu 51

6.4 Trigger & Alarms

• Main Menu > Trigger & Alarms
The trigger levels, the volume of the loudspeaker and the units of leak rates and

pressures can be set in this menu Fig. 6-5.

Fig. 6-5: The Trigger & Alarms Menu

Key No. Name Description

1 Back Return to the main menu.
2 Trigger Level 1 Definition of Trigger level 1. Please refer to Chapter 6.4.1
3 Trigger Level 2 Definition of Trigger level 2. Please refer to Chapter 6.4.2
4 Volume Please refer to Chapter 6.4.3

5 Units
6 Not used in this menu.

7 Alarm delay Please refer to Chapter 6.4.5
8 Audio alarm type

Selection of leak rate and pressure units. Please refer to
Chapter 6.4.4

Choice of different alarm types. Please refer to Chapter

6.4.6

6.4.1 Trigger Level 1

• Main Menu > Trigger & Alarms > Trigger Level 1
The value of the first trigger level can be set.

for the description of the entry.
Trigger 1 and Trigger 2 are programmable leak rate levels. If these levels are

exceeded some outputs of the UL5000 will react, especially if Trigger 1 is exceeded.

Display

In the status line of the display the signs for Trigger 1 and Trigger 2 are displayed
inverted if the leak rate exceeds (becomes higher than) the programmed value.

Relay Output

The relays on the I/O interface Fig. 2-6/2 will switch.
for further details.

Alarm/Loudspeaker

Trigger level 1 defines at which level the various alarm types react (

Audio alarm type)

See Chapter 4.2.2.7 Numerical Entries

See Chapter 2.3.2.2 Digital Out

See Chapter 6.4.6

iina74e 06.fm technical handbook(1408)

52 Description of the Menu

6.4.2 Trigger Level 2

• Main Menu > Trigger & Alarms > Trigger Level 2
The value of the second trigger level can be set.

Entries for the description of the entry.

If Trigger 2 is exceeded the corresponding relay will switch. This is also indicated at
the display.

6.4.3 Volume

• Main Menu > Trigger & Alarms > Volume
The minimum loudness and the regular volume of the loudspeaker can be adjusted.
The minimum loudness is the minimum speaker volume that cannot be excee ded to

even lower values. Thus it is avoided that the actual volume is accidentally reduced
to a value that is below the noise level of the environment.

The actual volume can be adjusted between 15 (maximum) and th e value defined as
minimum loudness.

Softkey 2: Arrow down
Decrease the minimum loudness. The minimum value is 0.

Softkey 3: Arrow down
Decrease the actual volume. The minimum value is the value de fined under

minimum volume.

See Chapter 4.2.2.7 Numerical

Softkey 4: Beep off / Beep on
Softkey 5: Help for volume

Help
Softkey 6: Arrow up

Increase the minimum volume. The maximum value is 15.
Softkey 7: Arrow up

Increase the regular volume. The maximum value is 15.

iina74e 06.fm technical handbook(1408)

Description of the Menu 53

6.4.4 Units

6.4.5 Alarm delay

• Main Menu > Trigger & Alarms > Units
The preferred leak rate unit can be selected. There is the choice of 4 (mbar, Pa, Torr,

atm)pressure units and 5 leak rate units (mbar l/s, Pa m
Notice: In Sniff mode the following measuring units are selectable additio nally

(Refer to Chapter Chapter 6.3): ppm, g/a eq (helium leak rate is equivalent
with leak rate R134a), oz/gr eq (helium leak rate is equivalent with leak rate
R134a).

Softkey 2: Arrow up
Scroll up to select a pressure unit.

Softkey 3: Arrow down
Scroll down to select a pressure unit.

Softkey 6: Arrow up
Scroll up to select a leak rate unit.

Softkey 7: Arrow down
Scroll down to select a leak rate unit.

3

/s-1, Torr l/s, atm cc/s).

• Main Menu > Trigger & Alarms > Alarm delay
In some applications (for instance during pump down in a „chamber test system“) it

might be necessary to block an alarm for some time after pressing START.
This delay time of the alarm can be changed.

Softkey 3: Arrow down
Decrease the delay time. The minimum value is 0 seconds.

Softkey 7: Arrow up
Increase the delay time. The maximum value is 10 minutes up to infinity.

After pressing START the loudspeaker is activated as soon as the leak rate
drops below trigger level 1 or after the entered alarm delay time has elapsed.
This setting is only active for the audio alarm types SETPOINT and
TRIGGER ALARM (

See Chapter 6.4.6).

54 Description of the Menu

iina74e 06.fm technical handbook(1408)

6.4.6 Audio alarm type

• Main Menu > Trigger & Alarms > Audio alarm type
The trigger of the audio alarm can be switched on or off.

Softkey 2: Pinpoint

See Chapter 6.4.6.1

Softkey 3: Leak rate prop.

The sound will be proportional to the leak rate signal.

Softkey 6: Setpoint

See Chapter 6.4.6.3

Softkey 7: Trigger alarm

An alarm sounds when the trigger 1 is exceeded.

6.4.6.1 Pinpoint

The tone of the acoustical signal changes its frequency only in a LR-window Fig. 6-

6 which ranges from one decade below the Trigger level 1 up to one decade above

the Trigger level 1. Below the window the tone is constantly
it is constantly high.

Example: The Trigger level 1 is 4×10
changes reaches from 4×10

See Chapter 6.4.6.2

See Chapter 6.4.6.4

-7

-8

mbar l/s up to 4×10-6mbar l/s.

mbar l/s. So the window where the tone

low, above the window

Fig. 6-6: Pinpoint

6.4.6.2 Leak rate prop.

The frequency of the accoustic output is proporti onal to the rea ding on the bargr aph
display. The frequency ranges from 200 Hz to 1300 Hz. See Chapter 6.2.1 Scale

linear/logarithmic for the definition of the number of decades.

iina74e 06.fm technical handbook(1408)

Description of the Menu 55

6.4.6.3 Setpoint

6.4.6.4 Trigger alarm

The tone is off as long as the leak rate is below the Trigg er leve l 1. Ab ove Trigger 1
the tone varies proportional to the leak rate Fig. 6-7.

Fig. 6-7: Setpoint

As soon as the leak rate increases above trigger level 1, a multi-tone signal is gene­rated. The tone does not vary with the leak rate.

6.5 Calibration

• Main Menu > Calibration

See Chapter 7 for a detailed description of the calibration Fig. 6-8.

Fig. 6-8: The Calibration Menu

Softkey 4: internal
Softkey 8: external

56 Description of the Menu

iina74e 06.fm technical handbook(1408)

6.6 Settings

• Main Menu > Settings
This menu Fig. 6-9 allows to observe and to change the settings of the internal

machine controls.

Fig. 6-9: The Settings Menu

Key No. Name Description

1 Back Return to the main menu.
2 Vacuum settings
3 Zero & Background See Chapter 6.6.2
4 Mass
5 Interfaces See Chapter 6.6.4

6 Miscellaneous See Chapter 6.6.5
7 Parameter save / load See Chapter 6.6.6

8 Monitoring functions

Settings of vacuum system related functions. See
Chapter 6.6.1

Switching between helium and hydrogen. See
Chapter 6.6.3

Choose functions of protection of the UL5000 in
with this mode. See Chapter 6.6.6

iina74e 06.fm technical handbook(1408)

Description of the Menu 57

6.6.1 Vacuum settings

• Main Menu > Settings > Vacuum settings
This menu allows to observe and to change the settings belonging to the vacuum

system.

Softkey 2: Automatic purge (Purging)
Refer to Chapter

Softkey 3: Vent delay

Please refer to Chapter 6.6.1.2
Softkey 4: Booster TMP mode

Please refer to Chapter 6.6.1.7
Softkey 5: Vacuum ranges

See Chapter 6.6.1.3

Softkey 6: Leak rate internal test leak

Please refer to Chapter 6.6.1.5

Softkey 7: Machine factor

Please refer to Chapter 6.6.1.6

6.6.1.1

Softkey 8: Booster TMP mode
Please refer to Chapter 6.6.1.7

6.6.1.1 Automatic purge

• Main Menu > Settings > Vacuum settings > Automatic purge
Through this menu it is possible to program the automatic purge (

Chapter

Softkey 3: OFF
Automatic purge is switched off at standby mode.

Softkey 7: ON
Automatic purge is activated. When switching from measurement to STAND-

BY the forepump is rinsed automatically for 20 seconds.

Please refer to

5.3.1) for 20 seconds when switching from measuring to standby mode.

58 Description of the Menu

iina74e 06.fm technical handbook(1408)

6.6.1.2 Vent delay

• Main Menu > Settings > Vacuum settings > Vent delay
Through this menu item it is possible to define the delay time until the inlet port is

vented when operating the STOP button. When the STOP button is pressed for a
period of time which is shorter than the delay time specified here, the UL5000 will just
change to Stand-by mode.

When the STOP button is pressed for a period of time which is long er than the delay
time specified here, the UL5000 will vent the inlet port.

Softkey 2: Immediately
The inlet port will be vented immediately after pressing the STOP button.

Softkey 3: After 1 second
The inlet port will be vented with a time delay of 1 second.

Softkey 4: After 1.5 seconds
The inlet port will be vented with a time delay of 1.5 seconds.

Softkey 6: after 2 seconds
The inlet port will be vented with a time delay of 2 seconds.

Softkey 7: No vent
The inlet port cannot be vented with the STOP button.

6.6.1.3 Vacuum ranges

• Main Menu > Settings > Vacuum settings > Vacuum ranges
With this menu you can adjust different modes conc er nin g th e ac tivity of leak

detection. This setting is only active in mode vacuum (see Chapter 6.3).

Softkey No. 2: ULTRA ONLY
In this mode the UL5000 remains in the area ULTRA after running under

0,4 mbar at the inlet flange (see Chapter 4.3.1). When showing the pressure at
the inlet flange > 0,4 mbar the UL5000 switches immediately into evacuation
mode.

Softkey No. 3: FINE only
In this mode the UL5000 remains after falling below 2 mbar at the inlet flange in

FINE mode. Valve V1a will be closed. When the pressure at the inlet flange is
increasing > 1 mbar the UL5000 switches immediately into evacuation mode.
The lower detection limit of FINE ONLY is 1×10

-10

mbar l/s.
The advantage of FINE ONLY is that while this mode is running no valve will
switch.

Softkey No. 5: ?
Help

Softkey No. 7: all areas (default settings)
This is the default setting. The activity runs as explained in Chapter 4.3.1.

iina74e 06.fm technical handbook(1408)

Description of the Menu 59

6.6.1.4 HYDRO•S

Warning

Main Menu > Settings > Vacuum settings > HYDRO•S

Notice: This setting is only valid, if mass mode is set to „

4

He“. See Chapter 6.3.

Softkey 7: enable
If HYDRO•S automatic is enabled, the UL5000 switches HYDRO•S on and

off at the following conditions:
HYDRO•S is switched on, if

• ZERO is off and

• p1<0,3mbar and

• Leak rate is between 2×10

-10

mbar l/s and 3×10

-10

mbar l/s and

• HYDRO•S was not switched on manually

-10

The lower detecting limit for HYDRO•S is 1×10

mbar l/s

You can always switch HYDRO•S on and off manually, even if automatic is enabled.

Notice: Switching HYDRO•S manually, deactivates the automatic until the next

measuring cycle (STOP/START).

Softkey 3: disable
HYDRO•S is disabled. Leak rate higher than 3×10

-10

mbar l/s

If HYDRO•S is disabled, it can not be switched on/off manually anytime.
Softkey 5: Automatic OFF

HYDRO•S can be switched on/off manually by Softkey 4 in display mode
(See Chapter 5.4.6)

6.6.1.5 Leak rate internal test leak

• Main Menu > Settings > Vacuum settings > Leak rate internal test leak
The value of the internal test leak can be set. See Chapter 4.2.2.7 Numerical Entries

for the description of the entry.

Normally there is no reason to edit the leak rate of the internal test leak besides after
a change of the internal test leak. A wrong leak rate of the internal test leak will lead
to wrong leak rate readings!

60 Description of the Menu

iina74e 06.fm technical handbook(1408)

6.6.1.6 Machine factor

• Main Menu > Settings > Vacuum settings > Machine factor
The machine factor takes into account that an additional external pu mp set is used.

Based on an internal calibration only, all measured leak rate would be measured too
small. The measured leak rate is multiplied with the machine factor and the result is
displayed. This factor is only used for vacuum measurement modes (not for sniff
mode). See Chapter 4.2.2.7 Numerical Entries for the description of the entry.

Adjust the machine factor to the value 400 when using the helium sniffer QUICK
TEST .

6.6.1.7 Booster TMP mode

• Main Menu > Settings > Vacuum settings > Booster TMP mode
Softkey 3: Off

Booster TMP will not start.
Softkey 7: automatic

Booster TMP starts automatically when evacuating.

6.6.2 Zero & Background

• Main Menu > Settings > Zero & Background

The kind of background suppression inside the UL5 000 and the function of the Z ero
button can be selected.

Softkey 3: Background suppression
Refer to Chapter 6.6.2.1

Softkey 4: Calculate inlet area background
Refer to Chapter 6.6.2.2

Softkey 7: Zero
Refer to Chapter 6.6.2.3

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Description of the Menu 61

6.6.2.1 Background Suppression

• Main Menu > Settings > Zero & Background > Background Suppression
By this mode the internal helium background of the UL5000 will be subtracted at

every measurement after pressing START. This function helps to save clean up of
the UL5000 after a helium contamination.

Softkey 3: Off
Background suppression is switched off

Softkey 6 Inlet area
In addition to the internal background subtraction the background from the

inlet port area will be subtracted at every measurement after pressing
START. When the function “Inlet Area” is selected, the value of the i nlet port
area background can be determined before using the UL5000 for testing
(See Chapter 6.6.2.2).

If the actual background is higher than 1×10
suppression does not work. The high background must then be pumped
down.

Softkey 7 Internal only
The internal background (see Chapter 6.2.5) will be calculated when swit-

ching to STAND-BY mode. This value will be subtracted when pressing
START.

-8

mbar l/s the inlet area

6.6.2.2 Calculate Inlet Area Background

• Main Menu > Settings > Zero & Background > Calculate Inlet Area Background
This function calculates the value of the internal helium background that will be

subtracted from the measured signal when pressing START.
To start the calculation the UL5000 must be in the following state of condition:

• Mode Vacuum (refer to Chapter 6.3)

• Inlet port blanked off

• UL5000 is in STAND-BY mode for at least 1 minute

• UL5000 operates at least 20 minutes since powered on

The condition that is not yet fulfilled before doing the calculation will be back lighted
on the display. If all conditions are fulfilled “OK” shows up at the display and the
calculation can be started by pressing softkey no. 8. The procedure of the calculation
takes about 2 minutes, the status is displayed during the process. The helium back­ground is indicated as the measured ion current in the mass spectrometer.

If the above perequisites are met, you can also calculate the inlet area background
by choosing the button CAL function.

Notice: It is recommended to update the inlet area background calculation from

time to time because the UL5000 is pumping down an existing inlet area
background after a while.

62 Description of the Menu

iina74e 06.fm technical handbook(1408)

6.6.2.3 Zero

• Main Menu > Settings > Zero & Background > Zero

This setting enables (respectively disables) the ZERO button at the control panel.

Softkey 2: Zero at ULTRA
With “Zero at ULTRA” the ZERO functions executes automatically as soon as the

measuring range ULTRA is reched for the first time after START. In this mode the
ZERO function also can be executed manually via the ZERO button.

Softkey 3: Disable: ZERO function
Softkey 5: Help
Softkey 6: I•Zero

The Zero function is locked as long as the leak rate signal is not stable enough to
detect a leak of the programmed value of Trigger 1.

The function „I•Zero“ enables the ZERO button only at stable leak rate signals. This
is displayed in the status bar through the STABLE signal.

By the standard Zero function the actual background value will subtracted when
pressing ZERO. At falling background signals smaller leaks could be missed
because the subtracted background value is higher than the leakrate signal at the
moment of measuring.
By „I•Zero“ the drift of the falling background signal is checked, if it is higher than

0.5 x trigger value 1 (adjusted to the desired rejection level).
If I•ZERO function is active, the configured trigger value 1 is displayed.

6.6.3 Mass

Softkey 7: Enable: ZERO function

• Main Menu > Settings > Mass

The requested mass of the measured gas can be selected. The UL5000 must be in
Stand-by.

Softkey 2: H

(2 amu)

2

Hydrogen with the mass of 2 amu will be measured.

Softkey 3:

3

He (3 amu)

Isotope of helium with the mass of 3 amu will be measured.

Softkey 7:

4

He (4 amu)

Helium with the mass of 4 amu will be measured.

Notice: HYDRO•S can only be used at this mass setting.

iina74e 06.fm technical handbook(1408)

Description of the Menu 63

6.6.4 Interfaces

• Main Menu > Settings > Interfaces
The parameters of the interface can be set.

Softkey 3: Control Location

Please refer to Chapter 6.6.4.1

Softkey 4: RS232 Protocol

Please refer to Chapter 6.6.4.3

Softkey 7: Recorder output

Please refer to Chapter 6.6.4.2

Softkey 8: Scaling Recorder Output

Please refer to Chapter 6.6.4.4

6.6.4.1 Control Location

• Main Menu > Settings > Interfaces > Control Location
Softkey 2: PLC

The UL5000 is controlled via the Digital In connector (See Chapter 6.6.4.2).
The START, STOP and ZERO buttons at the control panel are locked.

Softkey 3: RS232
The UL5000 is controlled via RS232 interface by an external computer. In

this mode the UL5000 can not be controlled via keyboard. The START,
STOP and ZERO button at the machine are deactivated.

Softkey 5: Local & PLC
The UL5000 is controlled via the Digital In connector or the START, STOP

and ZERO buttons at the control panel.
Softkey 6: Local & RS232

The UL5000 is controlled via the Digital In connector or the START, STOP
and ZERO buttons at the control panel.

Softkey 7: Local
The UL5000 is controlled via the START, STOP and ZERO buttons at the

control panel. The Digital In connector is not used.

64 Description of the Menu

iina74e 06.fm technical handbook(1408)

6.6.4.2 Recorder output

• Main Menu > Settings > Interfaces > Recorder output
The signals to be recorded can be selected in this submenu.

Softkey 1: Cancel
Return to the previous menu withou t any changes of the present settings.

Softkey 2: Arrow up
Adress recorder output 1 or 2

Softkey 3: Arrow down
Adress recorder output 1 or 2

Softkey 5: Help
Softkey 6: Arrow up

Behaviour recorder output. For further information see keywords below.
Softkey 7: Arrow down

Behaviour recorder output. For further information see keywords below.
Softkey 8: OK

Saving off chosen parameters

Fig. 6-10

Off

The recorder output is switched off.

p

/ p

1

2

The fundamental output voltage is scaled logarithmic. The inlet pressure p1 or the
forevacuum pressure p

The signals p

and p2 have the characteristics of the Pirani gauge TPR265 (see char t

1

can be recorded.

2

in appendix).

iina74e 06.fm technical handbook(1408)

Description of the Menu 65

LR lin

012345678910V

-12 -10 -8 -6

10 10 10 10 LR in channel 1

-4 -2 0 +2

10 10 10 10

The leak rate output voltage is scaled linear. The fundamental voltage is 0-10 V in
scalable steps from 0.5 to 10 volts per decade.

For information about scaling see chapter 6.6.4.4

LR log

The leakrate is recorded on a logarithmic scale. The voltage output ranges from
1 … 10 V with steps of 0.5 V per decade.

Fig. 6-11 Example of range of leak rate, log, 0.5 V/decade
For adjusting of scaling see chapter 6.6.4.4.

LR mantissa:

The leak rate mantissa is recorded linearly from 1 … 10 V.

LR exponent

The exponent is recorded. Step function: U = 1 … 10 V with steps of 0.5 V per
decade, starting with 1 V = 1×10

6.6.4.3 RS232 Protocol

• Main Menu > Settings > Interfaces > RS232 Protocol

-12

.

Softkey 3: Diagnostics
Gives the chance to read parameters, e.g. during maintenance.

Softkey 4: Printer Manual
Leak rates measured by this function can be sent to RS232 printers or PC. The

measured value can be displayed via hyperterminal programs. The baudra te of this
printer function is set to 9600, 8N1. Connected data loggers must be set to these
parameters.

Format of the leak rate output:
LR = 1. 00 E -1 0 09: Apr .0 7 08 :2 5 MEAS
LR: Leak rate

The measured value is equal to the number which then follows. In case
of overflow or underflow the symbol < (leak rate is less then the stated
value) or > (leak rate is greater than the stated value) is output accor­dingly.

1.00E-10: Output of the measured value in the unit set up, followed by date and

time.
MEAS: The UL5000 is in the measure mode.
When pressing the START button once again in the measure mode or activation of

the START input at the DIGITAL IN port the leak rate will be send out.

iina74e 06.fm technical handbook(1408)

66 Description of the Menu

Softkey 5: ?
Help

Softkey 6: UL2xx Leak Ware
Gives the chance to control and read measurement values when connecting to a

computer.
Notice: The calibration function of the Leak Wa re is not appropriate to operate with

the UL5000.
Please execute the function „STORE DATE“ in the operating mode „Single
Part Measurement“ for starting the record of the measured values.

Softkey 7: ASCII
Gives the chance to use the UL5000 via a RS232 terminal.

6.6.4.4 Scaling Recorder Output

• Main Menu > Settings > Interfaces > Scaling Recorder Output
Here the scaling of the recorder output can be adjusted. This adjustment is only valid

for the setting “LR lin” or ”LR log” (refer to Chapter 6.6.4.2 Recorder output).

Softkey 2: Arrow up
Adjust decade of the upper limit value

Softkey No. 3: Arrow down

Scaling of the previously adjusted value in steps of 0.5, 1, 2, 2.5, 5, 10 Volt/decade. The
complete voltage range is 10 V. (Only for signal “LRlog”)

Softkey No. 6: Arrow up

Adjust decade of the upper limit value

Softkey No. 7: Arrow down

Scaling of the previously adjusted value in steps of 0.5, 1, 2, 2.5, 5, 10 Volt/decade. The
complete voltage range is 10 V. (Only for signal “LRlog”)

Example:
Chart recorder output: “LRlog”
Upper limit value is adjusted to 10
Scaled to 5 V /decade
Lower limit value consequently is 10

-5

(= 10V)

-7

(= 0 V)

iina74e 06.fm technical handbook(1408)

Description of the Menu 67

6.6.5 Miscellaneous

• Main Menu > Settings > Miscellaneous
The actual date and time, the prefered language and the mains freq uency can be set

in this submenu.

Softkey 2: Time&Date

See Chapter 6.6.5.1

Softkey 3: Language

See Chapter 6.6.5.2

Softkey 4: Leak rate filter

See Chapter 6.6.5.3

Softkey 5: Background Suppression

See Chapter 6.6.2.1

Softkey 6: Mains Frequency

See Chapter 6.6.5.4
Softkey 7: Service interval exhaust filter.

See Chapter 6.6.5.5

6.6.5.1 Time&Date

6.6.5.2 Language

Softkey 8: Service message exhaust filter.
See Chapter 6.6.5.6

• Main Menu > Settings > Miscellaneous > Time&Date
Date and time can be changed on two subsequent pages. See Chapter 4.2.2.7

Numerical Entries for the description of the entry.

• Main Menu > Settings > Miscellaneous > Language
The prefered language can be selected by pressing Softkey 3 and 7. The default

setting is english.
Selectable languages: English, German, French, Italian, Spanish, Polish, Chinese

(Mandarin), Japanese (Katakana), Korean.

Notice: The default setting can be resetted by pressing the softkey 2 and 6

simultaneously during run-up of the leak detector.

68 Description of the Menu

iina74e 06.fm technical handbook(1408)

6.6.5.3 Leak rate filter

• Main Menu > Settings > Miscellaneous > Leak rate filter
The kind of the leak rate filter can be chosen. The default value is I•CAL.

Softkey 3: Fixed
A filter with a fixed time constant will be used.

Softkey 7: I•CAL
I•CAL makes sure that the averaging time is optimal based on the leak rate

level.

I•CAL stands for I
signals are averaged in optimized time intervals, based on the leak rate intensity.
I•CAL also eliminates noise peaks which are not related to leak rate signals and
provides unexpected short response times for low leak rate signals.

The algorithm used provide excellent sensitivity and response time and is there for
the recommended setting.

6.6.5.4 Mains Frequency

• Main Menu > Settings > Miscellaneous > Mains Frequency
The mains frequency takes the different pumping speed of the scroll pump into

account. The frequency of the mains power supply can be selected. The default
setting is 50 Hz for 230 V and 60 Hz for 115 V.

Softkey 3: 50 Hz
The UL5000 will be run at a mains frequency of 50 Hz.

Softkey 6: 60 Hz
The UL5000 will be run at a mains frequency of 60 Hz.

6.6.5.5 Service interval exhaust filter

ntelligent Calculation Algorithm of leak rates. It makes sure that the

Here you can enter the service interval of the exhaust filter.

Softkey 3: Down
Decrease of the service interval steps of within 500 hours.

Softkey 5: ?
Help

Softkey 7: Up
Increase of the service interval within steps of 500 hours. The limit is 4000

hours.

iina74e 06.fm technical handbook(1408)

Description of the Menu 69

6.6.5.6 Service message exhaust filter

Warning

The exhaust filter must be maintained at regular intervals to ensure the correct
function of the UL5000. If the service message is activated, the UL5000 reminds you
of the required maintenance.

Softkey 3: Off
Softkey 5: Help
Softkey 7: On

If the service messages are ignored and the exhaust is not replaced a risk for
overheating the pump motor exists.

6.6.6 Parameter save / load

• Main Menu > Settings > Parameter save / load
Enables to save and load individual settings or reload the default settings.

Softkey 2: Save as „PARA SET 1“
See Chapter

Softkey 3: Save as „PARA SET 2“
See Chapter

Softkey 4: Save as „PARA SET 3“
See Chapter

Softkey 5: Load default
Reload the default settings.

Softkey 6: Load „PARA SET 1“
See Chapter 6.6.6.2

Softkey 7: Load „PARA SET 2“
See Chapter 6.6.6.2

Softkey 8: Load „PARA SET 3“
See Chapter 6.6.6.2

6.6.6.1

6.6.6.1

6.6.6.1

70 Description of the Menu

iina74e 06.fm technical handbook(1408)

6.6.6.1 Save parameter set

• Main Menu > Settings > Parameter save / load > Save
Save the current parameter settings.

Softkey 4: Edit a file name
Rename the parameter set.

6.6.6.2 Load parameter set

• Main Menu > Settings > Parameter save / load > Save parameter set
The settings of the

reloaded.

Softkey 6: Arrow up
Upward to the previous screen.

Softkey 7: Arrow down
Downward to the next screen.

6.6.7 Monitoring functions

• Main Menu > Settings > Monitoring functions

Calibration request

• Main Menu > Settings > Monitoring functions > Calibration request
It can be selected whether the operator is reminded of the fact that a calibr ation may

has become necessary or not. The default value is off.

Softkey 3: Off
The calibration request will be switched off.

selected saved parameter set will be displayed and can be

Softkey 7: ON
The calibration request will be switched on.

If the calibration request is switched on, a corresponding message will appear when
30 minutes have elapsed after power on or if the temperature of the UL5000 has
changed by more than 5 °C (9 °F) since the last calibration.

Particle protection

• Main Menu > Settings > Monitoring functions > Particle protection
This mode can be switched on and off.
If switched on the UL5000 will not start pumping down before the inlet ha

dropped below 1 mbar. I. e. it is assumed that the part under test is pumped by
another pump in parallel.

Purpose: When the leak detector does not pump at high pressures no gas stream

iina74e 06.fm technical handbook(1408)

possibly carrying particles gets into the leak detector.

Description of the Menu 71

s not

,

Contamination protection

• Main Menu > Settings > Monitoring functions > Contamination protection
If this mode is switched on the UL5000 closes all inlet valves as soon as the

measured leak rate exceeds the programmed leak rate. Thus no more Helium gets
into the mass spectrometer. Helium that has gotten into the tool under test can be
pumped away by the tool pump. If no extra pump is available it is recommended to
vent the part before the test is continued.

Pressure limits for vacuum ranges

• Main Menu > Settings > Monitoring functions > Press ure limits for vacuum
ranges

With this function you can adjust the switching point between the modes GROSS­FINE-ULTRA. This can be essential when other gases than air are pumped with the
UL5000. The control signal of the Pirani may vary at other gases than air. Therefore
it may be necessary to adjust the switching points.

Softkey No. 2, 6: Change over threshold EVAC-GROSS
.15-3 mbar (Default value 15 mbar)

Softkey No. 3, 7: Change over threshold GROSS-FINE
2-0,5 mbar (Default value 2 mbar).

When changing this values the change over FINE-ULTRA threshold will
automatically be retightend to 0,4 - 0,1 mbar.

Softkey No. 4 Adjustment for ARGON
Press again the softkey for default values for air.

Softkey No. 5: ?
Help

Pressure limits for sniff mode

• Main Menu > Settings > Monitoring functions > Pressure limits for sniff mode

This function is automatically activated in sniff mode. The pressure limits define an
upper and lower limit of the inlet pressure. The upper limit is 2 mbar, the lower limit
is 0.02 mbar. If the pressure is not in this range error messages are generated:

P > uppe r lim it: C apillary brok en
P < lower limit: Flow through capillary too low (Capillary blocked)

72 Description of the Menu

iina74e 06.fm technical handbook(1408)

Maximum evacuation time

• Main Menu > Settings > Monitoring functions > Maximun evacuation time
This menu item is used to define when the gross leak message is to occur. The gross

leak detection process operates in two steps and the limits can be adapted as
required.

This menu item is particularly useful in series testing under the same conditions at
all times.

After pressing the start button the test sample is evacuated. If the pressure condi­tions (p1 < 100 mbar) are not attained, or if the pressure does not drop low enough
within the periods of time specified here, the pumpdown process is terminated and
the display will indicate a message (see 8.2, W76).

The periods which are selected in each case depend firstly on the desired reaction
time for the gross leak message, and secondly on the volume of the test sample and
the effective pumping speed.

Caution: If the evacuation time was set to endless, the oil level of the mechanical
pump should be checked more often.

Softkey No. 2: 
Decreasing maximum evacuation time until p1 < 100 mbar. Within this period of time

the inlet pressure at the test flange must have dropped below 100 mbar. The
duration may be selected freely between 1 second and 9 minutes or can be set to
endless. The default is 30 seconds.

Softkey No. 3: 
Decreasing maximum time until measurement Within the period of this time the

status of measurement readiness must have been attained, i.e. the inlet pressure
must have dropped below 15 mbar. The duration may be freely selected between 5
seconds and 30 minutes or can be set to endless.

Softkey No. 5: ?
Help text

Softkey No. 6: 
Increasing maximum evacuation time until p1 < 100 mbar

Softkey No. 7 
Increasing maximum time until measurement.

iina74e 06.fm technical handbook(1408)

Description of the Menu 73

6.7 Information

• Main Menu > Information

The Information Menu Fig. 6-12 enables submenus to select different kinds of
information belonging to the UL5000.

Fig. 6-12: The Information Menu

Softkey 2: View settings
The current settings will be displayed on 4 pages, e.g. trigger levels, test leak

mass, date and time.
Softkey 3: View internal data

Information on measured internal data is provided on 4 screens.

6.7.1 Service

Softkey 4: Vacuum diagram
The vacuum diagram of the UL5000 will be displayed. Opened and closed

valves are also shown.
Softkey 5: View error list

The list of occurred errors and warnings will be displayed.
Softkey 6: Calibration history

The carried out calibrations will be listed.
Softkey 7: Calibration factors

The vacuum diagram of the UL5000 is shown. Here you can see which
valves are opend or closed momentarily and more.

Softkey 8: Service (See Chapter 6.7.1)

• Main Menu > Information > Service

This screen allows to get into the service menu. Enter the password first. The initial
service password is not provided with the shipment, only after a specific service
training. Please refer to Chapter 4.2.2.7 for the description of the entry.

The service menu appears after the successful input of the password. Special
functions (e. g. switching the valves manually) are possible in this menu only.
For further information please refer to Service Menu (iipa74e1-b).

74 Description of the Menu

iina74e 06.fm technical handbook(1408)

6.8 Access Control

• Main Menu > Access Control
In this sub-menu some functions can be assigned to specific users.

Fig. 6-13: The Access Control Menu

Softkey 2: Access to CAL function

Please refer to Chapter 6.8.1

Softkey 3: Access to Trigger&Alarme menu
Please refer to Chapter 6.8.2

Softkey 7: Change Device PIN
Please refer to Chapter 6.8.3

Softkey 8: Change Menu-PIN

Please refer to Chapter 6.8.4

6.8.1 Access to CAL function

• Main Menu > Access Control > Access to CAL function
It can be selected whether the access to the calibration menu is restricted or not.

Softkey 3: Off
The calibration function is only available at the main menu.

See Chapter 6.8.4) is activated you need this PIN to start a calibration.

(

Softkey 7: ON
The calibration function is available at the main menu and in Stand-by and

the measure mode.
Softkey 8: OK

Save the settings and return to the previous menu.

If the Menu-PIN

iina74e 06.fm technical handbook(1408)

Description of the Menu 75

6.8.2 Access to Trigger&Alarme menu

• Main Menu > Access Control > Access to Trigger&Alarme menu

That allows access to this function (see Chapter 6.4) even at a blocked menu access
(see Chapter 6.8.4).

6.8.3 Change Device PIN

• Main Menu > Access Control > Change Device PIN

The access to the UL5000 can be restricted by a Device-PIN. If the Device-PIN is not
0000 the UL5000 will ask for this PIN directly after power on. Without device-PIN the
UL5000 does not even switch on the pumps.

Notice: Under all circumstances memorize the PINs! The PIN can only be reset by

INFICON’s service organization.

6.8.4 Change Menu-PIN

• Main Menu > Access Control > Change Menu-PIN

The access to the menu can be restricted by entering or changing the personal
identification number (PIN). No PIN will be checked if 0000 is entered.

See Chapter 4.2.2.7 for the description of the entry.

Notice: Under all circumstances memorize the PINs! The PIN can only be reset by

INFICON’s service organization.

76 Description of the Menu

iina74e 06.fm technical handbook(1408)

7 Calibration

7.1 Introduction

The UL5000 can be calibrated in two different ways:

• Internal calibration by means of a built-in leak standard.

• External calibration by means of an additional leak standard which then is

During the calibration procedure the mass spectrometer is tuned to the maximum
helium signal and this signal is referred to the known leak rate of the internal or
external leak standard. Although the UL5000 is a very stable in strument a calibration
is recommended from time to time to make sure that ambient temperature chan ge s
or dirt or other impacts don’t adulterate the measurements.

When the unit is used constantly the calibration should be performed at least once a
day. Otherwise the frequency of calibration depends on the freq uency of use.

Notice: To get an optimized calibration the machine has to warm up at least 20

Test leaks for calibration should not have a range lower than 1×10-9mbar l/s to
ensure a stable calibration signal.

attached to the inlet port or the component under test.

minutes before use

.

7.2 The calibration routines

There are 3 ways to get into the calibration routine:

• In Stand-by mode (i.e. at the end of the run-up rou tine or after pressing the STOP

Button) the calibration function can be initiated with CAL (Soft Key no. 5).

• Also in measurement mode the calibration routine can be started by pressing CAL
(Soft Key no. 5).

• In the main menu the calibration again can be started with CAL (Soft Key no. 5).

A calibration may be terminated at any time by pressing the STOP Button or using
the Soft Key no. 1 (Cancel).

Once the calibration mode is activated the user must choose between an internal and
an external calibration. Please press the corresponding Soft Key.

iina74e 07.fm technical handbook(1408)

Calibration 77

7.2.1 Internal Calibration

For internal calibrations the UL5000 differentiates between two possibilities:

• If the unit is blanked off or disconnected from any chamber by a valve on the Inlet

Port the automatic calibration can be chosen (Soft Key no. 8).

• If the unit is connected to a chamber or a bigger component the calibratio n has to
be performed manually because the reaction times on opening or closing the
internal leak standard vary depending on the volume of the chamber.

Notice: It is recommended to use the automatic calibration if possible.

7.2.1.1 Automatic Internal Calibration

Once this procedure is started the entire procedure is performed automatically. At the
end (after about 25 s) a beep is released. Thereafter the unit is ready for further use.

7.2.1.2 Manual Internal Calibration

When Manual Internal Calibration is selected it is assumed that the UL5000 is
connected to a component under test (if not please go to Automatic Internal Calib-

ration).

After starting the Manual Internal Calibration the UL5000 pumps down the test part
(if not already under vacuum) and opens the internal leak standard. Depending on
the volume of the part it may take some time for the helium signal to stabilize.
Therefore the user has to confirm that the signal has reach ed a stable level (Soft Key
no. 8).

The unit now runs through the tuning process and closes the internal leak standard
automatically. Again the volume of the test part determines how long it take s to pump
down the helium and to reach a stable background level, which ha s to be co nfirmed
by the user.

Thereafter the unit is calibrated.

7.2.2 External Calibration

For an external calibration a leak standard has to be attached to the part under test
or the inlet port directly.

Notice: The shown leak rate can diverge of the printed values of the external

calibrated leak because of uncertainties and temperature coefficients.

iina74e 07.fm technical handbook(1408)

78 Calibration

After External Calibration (Soft Key no. 8) has been chosen the following messages
are displayed and the described actions are required:

• Make sure that the test leak is connected and opened.

• Check the leak rate printed on the test leak and compare it with the leak rate at
the display. If the leak rates are not identical press Edit leak rate (Soft Key no.

4) and correct the value.

• If the leak rates are okay press START (Soft Key no. 8).

Fig. 7-1: External Calibration, Step 1

• No action required.

Fig. 7-2: External Calibration, Step 2

• The bargraph display shows a signal which must not vary much. If so please
press OK (Soft Key no. 8).

Fig. 7-3: External Calibration, Step 3

iina74e 07.fm technical handbook(1408)

Calibration 79

• No action required.

Fig. 7-4: External Calibration, Step 4

• No action required.

Fig. 7-5: External Calibration, Step 5

• Close the external leak standard and confirm with OK (Soft Key no. 8).

Fig. 7-6: External Calibration, Step 6

80 Calibration

iina74e 07.fm technical handbook(1408)

• The bargraph display shows a signal which must not decrease any more. T here
might be a small fluctuation which is okay. There If so please press OK (Soft Key
no. 8).

Fig. 7-7: External Calibration, Step 7

• The UL5000 displays the old and the calculated new calibration factor.

Fig. 7-8: External Calibration, Step 8

7.3 Factor of Calibration - Range of Values

To avoid a faulty calibration the factor of calibration is tested for plausibility at the end
of the calibration routine:

When the new factor of calibration is not considerably higher or lower (< factor 2)
than the previous factor of calibration the new factor will be accepted automatically.
When the new factor of calibration diverges stronger from the previous factor the
user can decide if he wants to accept it anyway (e. g. after changing the system confi­guration) or not (e. g. because of a maloperation).

Notice: When calibration is started via SPS or RS232 no testing for plausibility is

performed.

When calibrating internal it is also monitored if the newly calculated factor of calib­ration is higher than 10 or lower than 0.1. In this case a war ning (see W81 resp. W82
in Chapter 8.2) is displayed and the calibration will be interrupted.

iina74e 07.fm technical handbook(1408)

Calibration 81

8 Error And Warning Messages

The UL5000 is equipped with a comprehensive self-diagnostic facilities. If an error or
warning condition is detected it is indicated via the LC display to the operator.

An audio signal is generated when an error or warning occurs. The frequency
changes every 400 ms from 500 Hz to 1200 Hz and vice versa so that the signal
stands out well from ambient noises normally encountered.

Error and warning messages are logged and can also be displayed at a later time
through the menu information (See Chap te r 6.7)

8.1 Hints

Warning Messages

Warnings will be indicated

• when the UL5000 detects an abnormal condition or

• when it wants to remind the operator of something (e.g. a request for calibration
or a service timer has expired).

The UL5000 will indicate a message on the LC display and will remain in the Stand­by or the measurement mode.

Warning messages will remain on the LC display until the warning has been acknow­ledged by pressing „OK“ (Key no. 8). After that the UL5000 can be used again
(possibly with some restrictions). As long as a warning status exists the status line
shows a warning triangle (See Chapter 5.4.3).

The warning messages can be displayed in STANDBY by pressing the button
(shows up when warning message occured).

Error Messages

Errors are events which force the UL5000 to interrupt its measurement operations.
In this case the UL5000 closes all valves (Stand-by mode).

Error messages remain on the LC display until the message has been acknowledged
by pressing „Restart“ (key no. 8). After that, the UL 50 00 resta rt s with a ne w run- up
procedure. In some cases it may be helpful to check some settings or measured
values before the UL5000 restarts. Therefore it is also possible to press „Menu“ (key
no. 4 or Menu key) to enter the UL5000 menu. After leaving the menu the same erro r
message will be displayed again.

Notice: Under extreme conditions (unknown software errors, excessively high

electromagnetic interference levels) the built-in „watchdog“ circuit will
prevent uncontrolled operation of the UL5000. This watchdog will cause
the UL5000 to restart. After having done so, the instrument will be running
in the Stand-by mode. No error message will be output.

iina74e 08.fm technical handbook(1408)

82 Error And Warning Messages

8.2 List of Errors & Warnings

The following pages contain a list of all errors and warnings displayed at the contr ol
panel. Warning messages are indicated by numbers with a leading W. Error
messages are indicated by numbers with a leading E

No. Displayed Message Description and possible solutions

W15 Leak rate is too high! Machine

switched into stand-by to
prevent contamination

W16 Turbo molecular pump

service interval expired!

W17 Forepump service interval

expired!

W18 Exhaust filter service interval

expired!

W21 EEPROM write timeout! EEPROM defective

W22 EEPROM parameter queue

overflow!

E23 24V of the OPTION socket is

too high

E24 24V at socket OPTION is too

low

E25 Receded valve voltage too

low (< 7V)

W28 Real time clock reset! Please

enter date and time!

E29 24V supply for fans is too low

(< 20V)

E30 24 V of the remote control is

too low (> 20V).

W31 The offset voltage of the

preamplifier is too high
(> 5mV)

W32 Preamplifier temperature is

too high (> 60°C)

W33 Preamplifier temperature is

too low (< 2°C)

The survey function „contaminati on “ is activated. A leak rate higher than
the adjusted value was detected.

•Gross leak

• Switch off limit is set too low

• Alarm delay time too short
The service interval for the turbo molecular pump is expired.

The service interval for the fore pump is expired.

The service interval for the exhaust filter is expired.

MC 68 defective
EEPROM defective

MC 68 defective
The tension 24V at socket OPTION is too high.

• Fuse F2 on the I/O board has blown

• I/O board is faulty.

• Battery at MC68 is discharged or faulty.

• MC68 had been replaced.

• Fuse F1 on wiring backplane has blown.

• Fuse F1 on the I/O-board has blown.

• The preamplifier is faulty.

• Ambient temperature is too high.

• Air filter dirty.

• Ambient temperature is too low.

• Temperature sensor is faulty.

.

iina74e 08.fm technical handbook(1408)

Error And Warning Messages 83

No. Displayed Message Description and possible solutions

E34 24V voltage at MSV board is

too low!

Signal MVPZN on the MSV board is active. 24 V signal voltage is too low,
U < 18.3 V.

• Fuse F1 on the MSV board has blown.

• 24 V power supply voltage is missing.

Switch off the UL5000!

The missing voltage will cause the exhaust valve on the scroll pump to
close which in turn can lead to a contamination of the vacuum system.

• Reference voltage UREF on the MSV board XT7/1 is too high , U > 5 V.

E35 Anode-cathode voltage is too

high!

E36 Anode-cathode voltage is too

low.

E37 Suppressor voltage reference

value too high!

• MSV board is faulty.

• Anode-cathode voltage is higher than 130 V.

• MSV board is faulty.

• Anode-cathode voltage is lower than 30 V.
Signal MFSZH on MSV board is active. Suppressor signal command

variable is too high.

• Suppressor voltage has a short circuit.

• MSV is faulty.

E38 Supp re sso r po te nt ial to o

high!

E39 Suppressor potential is too

low

E40 The anode potential exceeds

its nominal value by over
10%!

E41 The anode potential has

dropped below its nominal
value by over 10%!

Suppressor potential is higher than 363V.

• MSV board is faulty.
Suppressor potential is lower than 297V.

• MSV board is faulty.
The actual anode potential exceeds its nominal value by 10%. The

nominal value can be displayed in the service menu.

• MSV is faulty.
The actual anode potential has dropped below its nominal value by 10%.

The nominal value can be displayed in the service menu.

• Air inrush.

• MSV is faulty.

E42 Nominal value of the anode

potential is too high!

Signal MFAZH on MSV board is active.

• Anode voltage has been short circuited.

• Nominal value of the anode voltage is too high. Anode voltage is limited
to about 1,200 V.

E43 Cathode current is too high! • Signal MPKZH on MSV board is active. Cathode current is too high, I

> 3.6 A.

• MSV is faulty.

E44 Cathode current is too low! • Signal MPKZN on MSV board is active. Cathode current is to o low, I >

0.2 A.

• MSV is faulty.

W45 Emission for cathode 1 can

not be switched on!

Signal MSIBE on MSV board is not active. Emission for cathode 1 can not
be switched on. UL5000 switches to cathode 2. Please order a new ion
source.

W46 Emission for cathode 2 can

can not be switched

Signal MSIBE on MSV board is not active. Emission for cathode 2 can not
be switched on. UL5000 switches to cathode 1. Order a new ion source.

84 Error And Warning Messages

iina74e 08.fm technical handbook(1408)

No. Displayed Message Description and possible solutions

E47 Emission for both cathodes

can not be switched on!

Signal MSIBE on MSV board is not active. Emission can not be switched
on. Exchange the cathode by changing the ion source. After having
exchanged the ion source it must be possible to switch on both cathodes
manually via the service menu.

E48 Anode heater is faulty! Signal MSAFD on MSV board is active. Anode heater fuse has blown.

Replace fuse F2 on the MSV board.

E50 No communication with turbo

pump

Clock from the frequency converter has failed. No communication to the
frequency converter.

E52 TMP frequency is too low! • TMP frequency is too low!

• Frequency converter is faulty.

• Turbomolecular pump is faulty.

W53 Temperature at electronic

unit is too high (>55°C)

• Ambient temperature too high.

• Ventilation failure.

• Air filter dirty and have to be changed.

E54 Temperature at electronic

unit is too high (>60°C)

• Ambient temperature is too high.

• Internal ventilation has failed.

• Air filters are dirty and must be exchanged.

W55 Temperature at electronic

unit is too low (< 2°C)

• The temperature sensor on the wiring plane indicates T < 2 °C. Run-up
time for the forevacuum pump will be longer.

• Temperature sensor is faulty.

E56 Inlet pressure p1 too low! U < 0,27 V; Pressure sensor faulty.

Change thermovac-sensor that measures p1.

E58 Foreline pressure p2 too low! U < 0,27 V; Pressure sensor faulty.

Change thermovac-sensor that measures p2.

E60 p2>10mbar after 5 minutes

since power on

PV > 3.8 mbar after t > 5 minutes since switching on. Run-up time of the
forevacuum pump is too long.

• Forepump is faulty.

• Valve V2 does not open.

E61 Emission fail Emission should be switched on. MSV subassembly indicates a fault.

MENB emission current not within range.

W62 Flow through capillary to low In the sniffer mode the intake pressure of the sniffer line is controlled. If the

pressure falls below the minimum limit, the flow through the capillary is too
low (contamination) or the capillary is blocked (foreign objects, particles).

The minimum limit can be set by the menu. Default value is 0.1 mbar. See
Chapter 6.6.1.5.

W63 Capillary broken In the sniffer mode the intake pressure of the sniffer line is controlled. If the

pressure exceeds the maximum limit, the flow through the capillary is too
high (no leak tightness, broken capillary).

The maximum limit can be set by the menu. Default value is 1.0 mbar. See
Chapter 6.6.1.5.

W65 Booster-TMP failure! "Frequency converter is faulty",

"Booster-TMP is faulty",

iina74e 08.fm technical handbook(1408)

Error And Warning Messages 85

No. Displayed Message Description and possible solutions

W66 Gate interrupt of the booster-

TMP converter is missing!

W67 Booster-TMP runup time

exceeded!

W69 Booster-TMP frequency is

too high!

"Frequency converter is faulty",
"Booster-TMP is faulty",

"Frequency converter is faulty",
"Booster-TMP is faulty",

"Frequency converter is faulty",
"Booster-TMP is faulty",

E73 Emission off (p2 too high) PV >> 0.2 or 3 mbar due to an inrush, e. g. The UL5000 will again try to

resume the measurement mode.

W76 Maximum of evacuation time

was exceeded.

• Test sample has got a GROSS leak.

• False adjustments of the max. time of evacuation.

W77 Peak not in Range The signal maximum has shifted to mass range alignment limits.

• Signal of leak rate was instable during mass adjustment. Calibrate
again.

• Check the basic setting for the anode voltage through the service
menu.

• Check calibrated leak.

W78 Differences of signal between

test leak open and closed is

The amplifier voltage difference between opened and closed calibrated
leak is less than 10 mV. Calibrated leak has not been closed properly.

too low.

W79 Signal of test leak is too small Calibrated leak is too small o r has not b een opene d. Pre amplifie r voltag e

< 10 mV.

W80 Please calibrate machine

newly

The automatic request of calibration is activated (See Chapter 7.2.1.1) and
has fulfilled at least one of the conditions:

• 30 minutes are passed since energizing.

• Temperature of the pre-amplifier has chan ged more than 5°C since the
last calibration.

• Mass adjustments were changed.

W81 CAL Factor too low The calculated factor falls out of the valid range (<0,1). The old factor is

retained.
Possible fault cause:

• The conditions for calibration have not been maintained.

• The leak rate of the internal calibrated leak which was en tered is much
too small.

• The internal test leak is defect.

W82 CAL Factor too high The calculated factor is out of the valid range (>10). The old factor is

retained.
Possible fault cause:

• The conditions for calibration have not been maintained.

• The leak rate of the internal calibrated leak which was en tered is much
too high or much too small.

iina74e 08.fm technical handbook(1408)

86 Error And Warning Messages

No. Displayed Message Description and possible solutions

W83 All EEPROM parameter lost.

Please check your settings.

• EEPROM on back plane is empty and was initialized with default
valves. Enter all parameters again.

• The EEPROM might be faulty when warning comes up again after
power up.

W85 Lost EEPROM parameter!

Please check your settings!

• Writing access was interrupted. Please check all adjustments.

• An update of software was done. In this case the notice can be ignored.

• When warning comes up again after powering up the EEPROM mi ght
be faulty.

W86 AC/DC factor too low Calibration conditions not maintained

Value of leak rate not entered correctly
Test leak faulty

W87 AC/DC factor too high Calibration conditions not maintained

Value of leak rate not entered correctly
Test leak faulty

iina74e 08.fm technical handbook(1408)

Error And Warning Messages 87

9 Maintenance works

Warning

Warning

STO P

Danger

Caution

9.1 Hints

Maintenance works of level II and III at the UL5000 should be per formed exclusively
by an person authorized from INFICON GmbH in Cologne.

Key for the correspondingly repair level:

• I Repair level I Customer

• II Repair level II Customer with technical training

• III Repair level III INFICON service engineer

Please observe the security remark in this chapter.

Make sure the tools and the vicinity by working on vacuum systems are kept clean.

For all maintenance on the UL5000 the mains power must be disconnect first.

The UL5000 may be damaged due to lack of inspections.
In order to prevent subsequent damages, check the exterior of the SmartTest
frequently relating to optical damages, and follow the Maintenance Instructions
frequently.

Notice: Maintenance work must be performed as described in the following

maintenance plan. If the maintenance rates will not be followed the UL5000
will loose the warranty

A maintenance contract is recommended.
When it is time to maintenance the machine after 1500/4000/8000 hours it will be

shown as a warning message at the display of the UL5000. The message will be
displayed until the maintenance rate is met.

The 1500 hours maintenance can vary depending on the application of the leak
detector.

88 Maintenance works

iina74e 09.fm technical handbook(1408)

Warning

Presumed Risk:

Warning

If it is to be assumed that safe operation is no longer possible, the device is to be
taken out of service and secured against unsupervised operation.

Hinweis This can e. g. be the case if:

• the unit has visible damage,

• fluid has gotten into the device,

• the device is no longer working,

• the device has been stored for an extended period of time under unfavorable
conditions or

after significant moving or transportation stresses.

Oil can damage the environnement. Therefore dispose the oil according to the local
environnement prescriptions.

9.2 INFICON Service

If equipment is returned to INFICON, indicate whether the eq uipment is free of subs­tances damaging on health or whether it is contaminated. If it is contaminated also
indicate the nature of the hazard. For this you must use a Declarati on of Contami-
nation form Fig. 1-1 which has been prepared by us which we will provide upon
request or you may copy the form which has been reproduced on the next to the last
page of this handbook.

Please attach this form to the equipment or enclos e it with th e eq uipm en t.
This Declaration of Contamination is required to meet German Law and to protect our

personnel. INFICON must return any equipment without a Declaration of Contami-
nation to the sender’s address.

9.3 Key for Maintenance Schedule

• I Repair level I Customer

• II Repair level II Customer with technical training

• III Repair level III INFICON service engineer

•X

•X

• 1 depends on environment and application

iina74e 09.fm technical handbook(1408)

•2

Perform maintenance work after operating hours
only operating hours, no limit of time

1

depends on process

Maintenance works 89

9.4 Maintenance Plan

Required maintenance Operation hours/Years Repair

Assembly UL5000 1500 4000 8000 16000 Part no.

1/4 1 2

Vacuum system

Scroll pump IWATA Exchange the scrollmodule X III 200000021R
ISP 500

level

Scroll pump Varian Exchange the Tip Seal X

1

III 200001671

TS 620 Exchange the scrollmodule X III 200001665R

TMH 071 Replace the lubricant reservoir X* II u. III 200000577

Exchange of bearings X III

Valve bloc Clean the valves, replace seals for valves 2 X III 200000594

Take apart the valve bloc and clean it 2 X III 200000593
Replace filters for vent- and purge line 1 X

1

I, II ,III 200000683

Adjust the Pirani X III

Silencer Exchange the silencer X

1

I, II, III 20099183

Electric

Fans assembly Clean fans at chassis plate and side wall

1 X

1

I

e.g by pressurized air
Exchange spare filter cell for fans chassis

1 X

1

I 20000685

plate

*) every 2 years regardless of operation hours

90 Maintenance works

iina74e 09.fm technical handbook(1408)

9.5 Maintenance groups

The maintenance plan for the UL5000 can be subdivided in 4 mainte nance groups.

• 1500 hours maintenance

• 4000 hours maintenance

• 8000 hours maintenance

• 16000 hours maintenance

9.5.1 1500 hours maintenance

The 1500 hours maintenance can be performed by an operator or a mainten ance
person.

The filter cell in front of the fans should be checked and replaced if dirty. By operating
under worth conditions, the maintenance rates can be appropriatly reduced.

Replace the silencer at the exhaust of the leak detector.

Notice: An obstructed silencer can lead to damaging the scroll pump

Work to be performed Required materials P/N
Check and/or replace filters

• Spare filter cell for the fans

200000685

Replace silencer

• Silencer for the exhaust

20099183

iina74e 09.fm technical handbook(1408)

Maintenance works 91

9.5.2 4000 hours maintenance

The 4000 hours maintenance should be performed by an INFICON service tech­nician or another authorised person at least yearly.

Independently of 4000 working hours the lubricant reservoir of the Turbomolecular
pump and the oil in the Fore pump should be replaced at least yearly.

Notice: The internal Helium standard leak certificate is valid for one year after

delivery. The annual refurbishing of the internal Helium standard leak is
recommended and an other certificate will be delivered. The internal
Helium standard leak can be refurbished at INFICON GmbH in Cologne
exclusively.

Work to be performed Required materials P/N
Replace the Lubricant Reservoir of the

Turbomolecular Pump TMH 071
(every 2 years)

Check and/or replace Filters • Spare Filter Cell for the fans

• Lubricant Reservoir for TMH 071 200000577

200000685

Functional check and adjustement

The maintenance work will take approximately 3 hours.

• Spare Filter for venting and purge line

• Silencer for exhaust (only UL1000 Fab)

• Filter cell for oil filter.

200000683
20099183
200000694

92 Maintenance works

iina74e 09.fm technical handbook(1408)

9.5.3 8000 hours maintenance

The 8000 hours maintenance should be performed by an INFICON service tech­nician or an other authorized person.

The scroll module of the scroll pump IWATA should be replaced every 8000 working
hours, at least every 2 years.

After 8000 working hours, the „Tip Seal“ of the scroll module of the Varian pump
should be replaced by an INFICON service technician. If the „Tip Seal“ has not been
replaced, then after 12000 working hours the scroll module must be exchanged.

Work to be performed Required materials P/N
Exchange the scroll module (IWATA ISP-

500B)
Replace the Tip Seal (Varian TS 620) • Tip Seal 2000001671

Restore the Lubricant Reservoir TMH 071 • Lubricant Reservoir for TMH 071 200000577
Replace the seals for valves • Set of seals for valves 200000594
Check and/or replace Filters • Spare Filter Cell for the fans

• Scroll module for IWATA ISP-500B 200000217R

200000685

Functional check and adjustement

The maintenance work will take approximately 6.0 hours.

• Spare Filter for venting and purge line

• Silencer for exhaust

200000683
20099183

iina74e 09.fm technical handbook(1408)

Maintenance works 93

9.5.4 16000 hours maintenance

The 8000 hours maintenance should be performed by an INFICON service tech­nician or an other authorized person.

After 16000 working hours the bearing of the turbo pump and the different kind of fore
pump will reach their expecting life time.

The scroll module (IWATA ISP 500 or Varian TS 620) and the turbo pump must be
replaced.

Work to be performed Required materials P/N
Exchange the scroll module (IWATA ISP-

500B)

• Scroll module for IWATA ISP-500B 200000217R

Exchange the scroll module (Varian TS

• Scroll module for Varian TS 620 200001665R

620)
Replace TMH 071 • Turbo pump TMH 071 200000569R
Take apart the valve bloc and clean it

Replace the seals for valves
Check and/or replace Filters • Spare Filter Cell for the fans

• Set of seals for valve bloc

• Set of seals for valves

• Spare Filter for venting and purge line

• Silencer for exhaust (only UL1000 Fab)

200000593
200000594

200000685
200000683
20099183

Functional check and adjustement

The maintenance work will take approximately 10.0 hours.

94 Maintenance works

iina74e 09.fm technical handbook(1408)

9.6 Description of the maintenance work

STO P

Danger

STO P

Danger

Only trained specialist staff can performe more changes at the UL5000 than the
normally maintenance work.

The protective conductor screw at the chassis plate should not be loosened. The
operator is not protected against electric shock by working without a protective
conductor line.

9.6.1 Opening the UL5000

Required tool

Wedge (Accessories).

Disconnect the power cord from the UL5000 before opening the side cover.

• Separate the UL5000 from other vacuum components at the inlet port.

• Remove the side covers by using the wedge ( Fig. 9-1). Push down the wedge to
release the side covers.

• The location for the wedge is marked with two dot marks at the top side of the side
covers (See Fig. 9-1/2).

• Open the both side covers in the same way.

iina74e 09.fm technical handbook(1408)

Maintenance works 95

Fig. 9-1 Opening the UL5000

1

2

STO P

Danger

Pos. Description Pos. Description
1 Wedge 2 Side cover

9.7 Check/Replace the filter cell

The filter cell in front of the fans should be checked every three m onths (under worth
conditions mobthly). If the filters cells are dirty then you shou ld re plced the m. They
allow to reduce the cooling power of the turbo pump and the leak detector.

Required tool

Wedge (Accessories).

Required material

Spare Filter cell P/N 200000685

Disconnect the power cord from the UL5000 before opening one of the side covers.

96 Maintenance works

• Please refer to section 9.6.1 to open the unit.

• Catch the filter cell by using your two fingers ( Fig. 9-2/a) and pull it out of the
guide plate. You can also press the filter to the front with an appropriate tool throw
the ejection drilling (Fig. 9-2/3) located at the back side.

iina74e 09.fm technical handbook(1408)

a

a

2

1

3

Fig. 9-2 Replace the filter cell
Pos. Description Pos. Description

a Filter handle 2 Guide plate of the filter cell
1 Filter cell 3 Ejection drilling

• Observe the rigth direction by replacing the new filter cell. The direction is
indicated in Fig. 9-2 with a black arrow.

Notice: The white surface of the filter cell which is marked with „clean air side“ must

show towards the fans.

iina74e 09.fm technical handbook(1408)

• Push the filter cell into the guide plate and close the UL5000 by pressing the side
cover.

Maintenance works 97

9.8 Replacing the Exhaust Silencer

1

2
3

4

5

6

Required material

Exhaust silencer P/N 20099183

• Switch off the UL5000.

• Unscrew the exhaust filter from the exhaust. Screw the new exhaust filter onto the
thread of the exhaust and tight it.

Fig. 9-3 Replacing the exhaust silencer
Pos. Description Pos. Description

1 Silencer 4 Reduc ing pie ce
2 Silencer adapter 5 Centering ring DN 25
3 O-Ring 20 x 3 6 Clamping ring

• Unscrew the hexagon screw from the bottom side of the plexiglas cabinet and
drain off using an adequate vessel.

• Please turn in and tighten the screw after draining.

• Check the oil level of the rotary vane pump D16 Band fill it up if necessary.

iina74e 09.fm technical handbook(1408)

98 Maintenance works

9.9 Turbomolecular pump TMH 071

The PFEIFFER turbomolecular pump requ ir es a main te na nc e an n ua lly or ev er y
4000 working hours. Please refer to the PFEIFFER operating instructions PM 800
504 BN/F and PT 0017 BN/B for more detailled informations. The maintenance work
should be performed by the INFICON service or an authorized INFICON service
partner.

9.10 Scroll Pump

Take the maintenance rates of the different scro ll pump (IWATA, VARIAN) from the
maintenance plan in chapter 9.4.

The maintenance of the scroll pump should be exclusively performed by the
INFICON service or an authorized INFICON service partner.

iina74e 09.fm technical handbook(1408)

Maintenance works 99

Appendix

A

Accessories 23
alarm 55
Ambient temperature 14
Audio alarm 14
Automatic Internal Calibration 78

B

background 49
built-in leak standard 77

C

Calculate Inlet Area Background 62
calibration 29
contract

• maintenance and service 9
contrast 49
Control Panel 35

D

Detectable masses 13
Digital In 25
Digital Out 23–24
Dimensions 14

E

Electrical Connections 21
Exhaust 27
exhaust filter 68
external calibration 78

F

FINE 39
FINE only 59

G

GROSS 39

H

Hand Set 23, 26
Helium leak rate 13
Humidity 14

I

I CAL 69
INFICON Service 10
information 74
Inlet area background suppression 61
Inlet port 13, 27
Inlet pressure 13
Installation 18
Ion source 13
ion source 34

L

language 68
Leak rate 13
loud speaker 43

M

Machine factor 61
maintenance contract 9
Manual Internal Calibration 78
Mass spectrometer 13
mass spectrometer 34
Measurement range 13
MENU 35
menu 51
Mode

•Sniffer

• Vacuum 13

13

N

Noise level 14

P

password 74

iina74e SIX.fm technical handbook(1408)

100 Appendix