INFICON UL1000 User Manual

TECHNICAL HANDBOOK
iina70e1-m (1408) Translation of the original handbook
Catalog-No.
UL 1000: 550 - 000A 550 - 001A 550 - 002A
from software version
UL1000 Fab and UL1000
Helium Leak Detector
V5.14
iina70e content.fm Technical Handbook(1408)
2
Table of Contents
1 General Information 7
1.1 Notes on the Use of this Handbook 7
1.1.1 Safety Symbols 7
1.1.2 Indications 8
1.1.3 Symbols of Vacuum Technology 8
1.1.4 Definiton of Terms 8
1.2 Support from INFICON Service 10
1.2.1 Service Centers 11
1.3 Introduction 13
1.3.1 Purpose 13
1.3.2 Technical Data 15
1.3.2.1 Physical Data 15
1.3.2.2 Electrical Data 15
1.3.2.3 Other Data 16
1.3.2.4 Ambient Conditions 16
1.4 Unpacking 16
1.4.1 Supplied Equipment 17
1.4.2 Accessories and Options 18
1.4.2.1 Sniffer line SL200 18
1.4.2.2 Toolbox 18
1.4.2.3 Helium Bottle Holder 18
1.4.2.4 ESD Mat 18
1.4.2.5 RC1000 Remote control 19
1.4.2.6 Test chamber TC1000 20
2 Installation 21
2.1 Transportation 21
2.2 Working Location 23
2.3 Electrical Connections 25
2.3.1 Mains Power 25
2.3.2 Connections for the Data Acquisition Systems 27
2.3.2.1 Accessories 28
2.3.2.2 Digital Out 28
2.3.2.3 Digital In 29
2.3.2.4 Recorder 30
2.3.2.5 RS232 31
2.3.2.6 Remote Control 31
2.4 Vaccum Connections 32
2.4.1 Inlet Port 32
2.4.2 Exhaust 32
2.4.3 Vent 32
2.4.4 Purge-connection (UL1000 Fab) / Gas ballast (UL1000) 32
2.5 Default parameters 33
iina70e content.fm Technical Handbook(1408)
Table of Contents 3
3 First Operation Check 34
3.1 Needed Equipment 34
3.2 Description of the Initial Operation 34
3.2.1 Start up and Measure 34
3.2.2 Internal Calibration 37
3.2.3 Verification 37
4 Description and Working Principle 38
4.1 Introduction 38
4.2 Components of the UL1000 and UL1000 Fab 38
4.2.1 Vacuum System 39
4.2.2 Control Panel 40
4.2.2.1 LC Display 41
4.2.2.2 START Button 41
4.2.2.3 STOP Button 41
4.2.2.4 ZERO Button 41
4.2.2.5 MENU Button 43
4.2.2.6 Soft Keys 43
4.2.2.7 Numerical Entries 43
4.3 Working Modes 45
4.3.1 Vacuum Mode 45
4.3.2 Sniffer Mode 47
4.3.3 Auto Leak Test Mode 47
5 Operation of the UL1000 and UL1000 Fab 48
5.1 Display 48
5.2 The Screen in Run-Up Mode 48
5.3 Display in stand-by mode 49
5.3.1 Purging 49
5.4 The Screen in Measurement Mode 49
5.4.1 Call for Calibration 49
5.4.2 Speaker Volume 50
5.4.3 Status Line in the Display 50
5.4.4 Numerical Display Mode 51
5.4.5 Trend Mode 51
6 Description of the Menu 52
6.1 Main Menu 52
6.2 View 54
6.2.1 Scale linear/logarithmic 55
6.2.2 Display-range auto/manual 55
6.2.3 Time axis 56
6.2.4 Contrast 56
6.2.5 Background in Stand-by 57
6.2.6 Decimal places 57
6.2.7 Lower display limit 58
6.3 Mode 58
6.3.1 Auto Leak Test 59
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4 Table of Contents
6.4 Trigger & Alarms 61
6.4.1 Trigger Level 1 61
6.4.2 Trigger Level 2 62
6.4.3 Volume 62
6.4.4 Units 63
6.4.5 Alarm delay 63
6.4.6 Audio alarm type 64
6.4.6.1 Pinpoint 64
6.4.6.2 Leak rate prop. 64
6.4.6.3 Setpoint 65
6.4.6.4 Trigger alarm 65
6.5 Calibration 65
6.6 Settings 66
6.6.1 Vacuum settings 67
6.6.1.1 Automatic purge (UL1000 Fab only) 67
6.6.1.2 Vent delay 67
6.6.1.3 Vacuum ranges 68
6.6.1.4 Leak rate internal test leak 69
6.6.1.5 Machine factor 69
6.6.1.6 Auto Leak Test adjustments 69
6.6.2 Zero & Background 73
6.6.2.1 Background Suppression 73
6.6.2.2 Zero 73
6.6.3 Mass 74
6.6.4 Interfaces 75
6.6.4.1 Control Location 75
6.6.4.2 RS232 Protocol 76
6.6.4.3 Recorder output 77
6.6.4.4 Scaling Recorder Output 78
6.6.5 Miscellaneous 79
6.6.5.1 Time&Date 79
6.6.5.2 Language 79
6.6.5.3 Leak rate filter 80
6.6.5.4 Mains Frequency 80
6.6.5.5 Service interval exhaust filter 80
6.6.5.6 Service message exhaust filter 81
6.6.6 Parameter save / load 81
6.6.6.1 Load parameter set 81
6.6.6.2 Save parameter set 82
6.6.7 Monitoring functions 82
6.7 Information 85
6.7.1 Service 85
6.8 Access Control 86
6.8.1 Access to CAL function 86
6.8.2 Access to Trigger&Alarme menu 87
6.8.3 Change Device PIN 87
6.8.4 Change Menu-PIN 87
7 Calibration 88
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7.1 Introduction 88
Table of Contents 5
7.2 The calibration routines 88
7.2.1 Internal Calibration 89
7.2.1.1 Automatic Internal Calibration 89
7.2.1.2 Manual Internal Calibration 89
7.2.2 External Calibration 89
7.3 Factor of Calibration - Range of Values 93
8 Error And Warning Messages 94
8.1 Hints 94
8.2 List of Errors & Warnings 95
9 Maintenance Work 99
9.1 General Information 99
9.2 Maintenance or Service at INFICON 100
9.3 Key to the Maintenance Plan 100
9.4 Maintenance Plan 101
9.5 Maintenance Groups 102
9.5.1 1500 Hours Maintenance 102
9.5.2 4000 Hours Maintenance 102
9.5.3 8000 Hours Maintenance 103
9.5.4 16000 Hours Maintenance 103
9.5.5 Notes refering the maintenance of the SplitFlow 80 104
9.6 Description of the Maintenance Work 104
9.6.1 Opening the Instrument for Maintenance Purposes 105
9.7 Checking and Replacing the Filter Insert 106
9.8 Replacing the Exhaust Silencer 108
9.9 Checking/Emptying the Exhaust Filter 109
9.9.1 Replacing the Filter Insert 109
9.10 Monitoring the Oil Level of the D16 B and Topping up the Oil 111
9.11 Oil Change for the D16B 112
9.12 Scroll Pumps (UL1000 and UL1000 Fab only) 114
6 Table of Contents
Appendix 115
A Diagram 115 B Index 116 C Declaration of Conformity 118
iina70e content.fm Technical Handbook(1408)
1 General Information
Caution
Warning
STO P
Danger
Skilled personnel
Notice: We recommend that you carefully read this technical handbook to ensure
optimum operating conditions right from the start.
This technical handbook contains important informations on the functions, installation, start-up and operation of th e UL 10 00 and UL1 0 00 Fa b.
General
We reserve the right to modify the design and the specified data. The illustrations are not binding.
1.1 Notes on the Use of this Handbook
1.1.1 Safety Symbols
Important remarks concerning operational safety and protection are emphasised as follows:
Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.
Information on preventing extensive equipment and environmental damage.
Information on preventing any kind of physical injury.
Indicates procedures that must be performed by skilled personnel only.
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General Information 7
1.1.2 Indications
Tipp Information on helpful procedures.
Notice: Information on special technical requirements that the user must comply
with.
The references to diagrams consists of the chapter number, figure number and the item number in this order. F or example : Fig. 2-4/ 7 refers to item 7 in t he figure 4 of chapter 2.
1.1.3 Symbols of Vacuum Technology
Given in the following are some important vacuum symbols which are used in this manual.
Vacuum pump in general
Turbomolecular pump
Measuring instrument
1.1.4 Definiton of Terms
Autoranging
The range of the preamplifier and the vacuum ranges are selected automatically. The autoranging feature of the UL1000 Fab covers the entire range or leak rates
depending on the selected operating mode. Not only the leak rate signal, but also the pressure in the test sample (inlet pressure P1) and the forevacuum pressure (P2) are used for control purposes. Range switching between the main ranges is performed via valves. Fine range switching within the m ain ranges is implemen ted by switching over the gain factor of the preamplifier.
Autotune Mass alignment
This function automatically aligns the mass spectrometer so that a maximum leak rate is displayed. The control processor changes the voltage which erates the ions in the selected mass range until a maximum ion current is detected by the ion detector. During each calibration the mass alignment is run automatically.
Valve
8 General Information
iina70e 01.fm technical handbook(1408)
Auto zero
Measurement and automatic adaptation to the helium background. This function determines the internal ZERO level of the unit which is then deducted
from the currently measured leak rate signal. This function is enabled by pressing the Start key provided the UL1000 or UL1000 Fab have ru n at least 20 s in "Standby" mode or in "Ventilation" mode.
If the before suppressed helium background further decreases and only the display limit appears, the ZERO-level will be adjusted automatically
Menu
The menu allows the user to program the UL10 00 and UL 100 0 Fab accordin g to his requirements. The menu has a tree architecture.
Default
Status of the UL1000 and UL1000 Fab when supplie d by the fa cto ry .
GROSS
GROSS is a measurement mode which allows high inlet pressure (1 to 15 mbar). The smallest detectable leak rate is 1x10
-6
mbar l/s.
FINE
FINE is the medium measurement mode with inlet pressure between 2 and 0,4mbar. Detection limit is 1x10
-10
mbar l/s.
ULTRA
ULTRA is the most sensitive measuring range with inlet pressures below 0,4 mbar. The minimum detectable leak rate is 5x10
-12
mbar l/s.
Foreline pressure
Pressure in the foreline between Turbo pump and scroll pump.
Minimum detectable leak rate
The smallest leak rate the UL1000 and UL1000 Fab is able to detect (5x10
-12
mbar l/s).
Internal helium background
The existing helium partial pressure in the measurement system. The level of the internal helium background is measured in the Stand-by mode and subtracted from the measured signal.
Measure Measurement mode
The UL1000 and UL1000 Fab measures the leak rate of the test sample.
iina70e 01.fm technical handbook(1408)
General Information 9
1.2 Support from INFICON Service
INFICON GmbH
Bonner Str. 498,50968 Cologne, Germany Tel: +49 221 3474 2222 Fax: +49 221 3474 2221
m
zisa01e1-a
Declaration of Contamination
Legally binding declaration:
I/we hereby declare that the information on this form is complete and accurate and that I/we will assume any further costs that may arise. The contaminated product will be dispatched in accordance with the applicable regulations.
Organization/company
Address Post code, place
Phone Fax
Email
Name
Date and legally binding signature Company stamp
1) or not containing any amount
of hazardous residues that exceed the permissible ex­ posure limits
Process related contamination of product:
toxic no 1) yes
caustic n o 1) yes
biological hazard no
yes 2)
explosive no
yes  2)
radioactive no
yes 2)
other harmful substances no1) yes
The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay. This declaration may only be completed (in block letters) and signed by authorized and qualified staff.
Copies: Original for addressee - 1 copy for accompanying documents - 1 copy for file of sender
Harmful substances, gases and/or by-products
Please list all substances, gases, and by-products which the product may have come into contact with:
Trade/product name
Chemical name (or symbol)
Precautions associated with substance
Action if human contact
Description of product
Type Article Number Serial Number
Reason for return
Operating fluid(s) used (Must be drained before shipping.)
The product is free of any sub­stances which are damaging to health yes
This form can be downloaded from our website.
2) Products thus contam i­ nated will not be ac­ cepted without written evidence of deconta mi­ nation!
If an instrument is returned to INFICON or an authorised representative of INFICON, please indicate wether the instrument is free of substances damaging to healths or wether it is contaminated. If it is contaminated also indicate the nature of the hazard. INFICON must return any appliances without a Declaration of Contamination to the sender’s address. A form for stating details as to the type of contamination is reproduced in Fig. 1-1.
A maintenance and service contract is recommended.
Fig. 1-1: Declaration of Contamination form
www.inficon.com leakdetection.service@inficon.co
iina70e 01.fm technical handbook(1408)
10 General Information
1.2.1 Service Centers
In case you urgently need assistance please get in touch with the local INFICON Service in your country or the service hotline in Cologne, Ge rm a ny:
Algeria jhj@agramkow.dk Finland jhj@agramkow.dk Agramkow Sonderborg Belarus leakdetection.service@inficon.com France Christophe.Zaffanella@oerlikon.com INFICON GmbH Cologne Belgium leakdetection.service@inficon.com Germany leakdetection.service@inficon.com INFICON GmbH Cologne Brazil fernandoz@prestvacuo.com.br Hungary adam.lovics@kon-trade.hu PV Pest Vácuo Ltda. Santa de Parnaíba Bulgaria leakdetection.service@inficon.com India asdash@hotmail.com INFICON GmbH Cologne Canada reachus@vpcinc.ca Ireland reach.unitedkingdom@inficon.com Vacuum Products Canada Ltd. Ontario Central America infoqro@meisa.com Italy davide.giovanetti@inficon.com MEISA S.a. de C.V. Querètaro China reach.china@inficon.com Israel urimark@mark-tec.co.il INFICON LTD Hong Kong INFICON LTD Beijing INFICON LTD Guangzhou INFICON LTD Shanghai Czech Republic filip.lisec@inficon.com Korea reach.korea@inficon.com INFICON GmbH Pilsen Denmark jhj@agramkow.dk INFICON Ltd.
Agramkow Sonderborg Egypt jhj@agramkow.dk Latvia leakdetection.service@inficon.com Agramkow Sonderborg Estonia leakdetection.service@inficon.com Lithuania leakdetection.service@inficon.com INFICON GmbH Cologne
iina70e 01.fm technical handbook(1408)
Phone: +45 741 236 36 Fax: +45 744 336 46
Phone: +49 221 56788-112 Fax: +49 221 56788-9112
Phone: +49 221 56788-112 Fax: +49 221 56788-9112
Phone: +55 114 154 4888 Fax: +55 114 154 4888
Phone: +49 221 56788-112 Fax: +49 221 56788-9112
Phone: +905.672.7704 Fax: +905.672.2249
Phone: +52 44 22 25 42 80 Fax: +52 44 22 25 41 57
Phone: +852.2862.8863 Fax: +852.2865.6883 Phone: +86.10.6590.0164 Fax: +86.10.6590.0521 Phone: +86.20.8723.6889 Fax: +86.20.8723.6003 Phone: +86.21.6209.3094 Fax: +86.21.6295.2852
Phone +420 734 331 758 Fax: +420 604 203 037
Phone: +45 744 336 36 Fax: +45 744 336 46
Phone: +45 741 236 36 Fax: +45 744 336 46
Phone: +49 221 56788-112 Fax: +49 221 56788-9112
Agramkow Sonderborg
OLV France Orsay
INFICON GmbH Cologne
Kontrade Budaörs
Dashpute 400 064
INFICON Blackburn
INFICON GmbH Castelnuovo
Mark Technologies Ltd. Kiriat Ono Japan reach.japan@inficon.com
INFICON Co. Ltd. Yokohama
INFICON Ltd. Sungnam city
Suwon City INFICON Ltd. Cheonan City
INFICON GmbH Cologne
INFICON GmbH Cologne
Phone: +45 741 236 36 Fax: +45 744 336 46
Phone: +33 476 351 584 Fax: +33 476 351 584
Phone: +49 221 56788-112 Fax: +49 221 56788-9112
Phone: +36 23 50 38 80 Fax: +36 23 50 38 96
Phone: +91 22 888 0324 Fax: +91 22 888 0324
Phone: +44 1254 678 250 Fax: +44 1254 698 577
Phone: +39 045 6 40 25 56 Fax: +39 045 6 40 24 21
Phone: +972 35 34 68 22 Fax: +972 35 34 25 89
Phone: +81.45.471.3396 Fax: +81.45.471.3387
Phone: +82 312 062 890 Fax: +82 312 063 058 Phone: +82 312 062 890 Fax: +82 312 063 058 Phone: +82 312 062 890 Fax: +82 312 063 058
Phone: +49 221 56788-112 Fax: +49 221 56788-9112
Phone: +49 221 56788-112 Fax: +49 221 56788-9112
General Information 11
Mexico infoqro@meisa.com Spain richard.cunill@leyboldoptics.com MEISA S.a. de C.V. Querètaro Netherlands leakdetection.service@inficon.com Sweden jhj@agramkow.dk INFICON GmbH Cologne Norway jhj@agramkow.dk Syria leakdetection.service@inficon.com Agramkow Sonderborg Poland kamola@vakpol.com Taiwan Susan.Chang@inficon.com VAK-POL & GAZ Sp. zo.o Pulawy Portugal leakdetection.service@inficon.com Tunisia leakdetection.service@inficon.com INFICON GmbH Cologne Republic of South Africa vacuquip@hotmail.com Turkey jhj@agramkow.dk Vacuquip Randburg Russia leakdetection.service@inficon.com Ukraine leakdetection.service@inficon.com INFICON GmbH Cologne Singapore reach.singapore@inficon.com United Kingdom reach.unitedkingdom@inficon.com INFICON PTE LTD. Singapur Slovakia filip.lisec@inficon.com United Arab Emirates leakdetection.service@inficon.com INFICON GmbH Pilsen Slovenia medivak@siol.net USA service.usa@inficon.com Medivac Ljubljani South America except Brazil infoqro@meisa.com Inficon Inc.
MEISA S.a. de C.V. Querètaro
Phone: +52 442 225 42 80 Fax: +52 442 225 41 57
Phone: +49 221 56788-112 Fax: +49 221 56788-9112
Phone: +45 741 236 36 Fax: +45 744 336 46
Phone: +48 60 23 15 212 Fax: +48 60 23 15 212
Phone: +49 221 56788-112 Fax: +49 221 56788-9112
Phone: +27 73 15 78 355 Agramkow
Phone: +49 221 56788-112 Fax: +49 221 56788-9112
Phone: +65.890.6250 Fax: +65.890.6266
Phone +420 734 331 758 Fax: +420 604 203 037
Phone: +386 15 63 91 50 Fax: +386 17 22 04 51
Phone: +52 44 22 12 36 15 Fax: +52 44 22 12 19 40
Leybold Optics Ibérica Barcelona
Agramkow Sonderborg
INFICON GmbH Cologne
INFICON Company Limited Chupei City, HsinChu Hsien
INFICON GmbH Cologne
Sonderborg
INFICON GmbH Cologne
INFICON Blackburn
INFICON GmbH Cologne
Inficon Inc. East Syracuse, NY
San Jose, CA Inficon Inc. Austin, TX
Phone: +34 93 66 60 778 Fax: +34 93 66 64 612
Phone: +45 741 236 36 Fax: +45 744 336 46
Phone: +49 221 56788-112 Fax: +49 221 56788-9112
Phone: +886.3.5525.828 Fax: +886.3.5525.829
Phone: +49 221 56788-112 Fax: +49 221 56788-9112
Phone: +45 741 236 36 Fax: +45 744 336 46
Phone: +49 221 56788-112 Fax: +49 221 56788-9112
Phone: +44 1254 678 250 Fax: +44 1254 698 577
Phone: +49 221 56788-112 Fax: +49 221 56788-9112
Phone: +1.315.434.1167 Fax: +1.315.434.2551 Phone: +1.408.361.1200 Fax: +1.408.362.1556 Phone: +1.512.448.0488 Fax: +1.512.448.0398
12 General Information
iina70e 01.fm technical handbook(1408)
1.3 Introduction
STO P
Danger
Caution
1.3.1 Purpose
The UL1000 and UL1000 Fab are helium leak detectors. These instruments may be used to detect the location and the size of leaks on objects under test in two different ways:
when the test sample has been evacuated first and is sprayed with helium on the
or
when a helium overpressure is provided in the test sample and the test sample is
Caution: Danger of explosion Hydrogen forms a highly explosive gas mixture with air.
Great caution is necessary when using hydrogen! No smoking, no naked flames, avoid sparks.
outside. It is required that a vacuum connection is provided between the UL1000 and UL1000 Fab and the test sample (vacuum mode).
searched from the outside with a sniffer probe which is attached to the inlet port (sniffer mode).
The UL1000/UL1000 Fab is only allowed to be used as a leak detector. It ma y not be used as a pump system (especially not for pumping off aggressive or humid gasses)
For UL1000 use only:
Notice: Pumping condensable gases and steams: When pumping test sample
water vapour that is inside can attain to the fore pump. With the water vapor that is in the air - especially in humid areas or wh en using humid or wet test samples - the acceptable compatibility of water vapor or capacity of water vapor respectively can be exceeded.
The steam in the oil of the pump condenses when the water vapor rises over the acceptable value. So the attribute of the oil ch anges and danger of corrosion occures for the pump.
While using the leak detector with condensable gases and steams the oil of the fore pump has to be controlled regularly. So you can recognize a condensation of water vapor in the pump. Usually the oil is light and lucent. When water vapor is inside it gets blear and milky at operating state temperature.
When turning the pump off water vapor condensates and rases the part of water in the oil.
iina70e 01.fm technical handbook(1408)
General Information 13
Warning
The leak detector must not directly be switched off after the process, in which
Caution
Caution
STO P
Danger
condensable gases or steams are pumped, is finished. It must be ru nning (at least 20 minutes) with opend gas ballast valve (see Chapte r 5.3.1) until the oil of the pump is free from detachted steams.
When not taking care of this instruction there can be a corrosion within the pump. So damages will occure.
The height of the oil of the pump has to be controlled regularly. The normal intervalls of changing the oil from the producer have to be taken care of. See instructions of the rotary vane pump.
Gases that contain halogen melecules (i.e. fluorine, chlorine), i.e. refrigerants and SF6, should not be pumped by the leak detector in higher contact rations an d over a longer time period. The coating layer of the cathodes (at the ion source) can be affected. This could cause a burn out of the cathodes.
For UL1000 Fab use only:
Condensable gases and steams can attain the inside of the leak detector and destruct the fore pump. With the water vapor that is in the air - especially in humid areas or when using humid or wet test samples - the acceptable compatibility of water vapor or capacity of water vapor respectively can be exceeded.
Dangerous gases pollute the machine. So you must not use the machine for detecting toxical, acidity, microbiological,
explosive, radioactive or other noxious matters.
If you plan to detect noxious matters please contact the manufacturer. Rules for decontamination will be developed then. If the leak detector alreay has been in contact with dangerous gases please fill the declaration of contamination, too, and send it to INFICON before you send the parts.
iina70e 01.fm technical handbook(1408)
14 General Information
1.3.2 Technical Data
1.3.2.1 Physical Data
Max. inlet pressure 15 mbar Minimum detectable Helium leak rates
in vacuum mode (ULTRA) <5×10
limit of detection in sniffer mode <5×10 Maximum displayable helium leak rate in ULTRA 0.1 mbar l/s Measurement range 12 decades Time constant of the leak rate signal (blanked off,
63% of the final value) Pumping speed (Helium) at the inlet Max. roughing capability 25 m
in vacuum mode
Detectable masses 2, 3 and 4 Mass spectrometer 180° magnetic sector field Ion source 2 filaments;
Inlet port DN 25 KF Run-up time (after starting) 3 min
<1 s
17.6 cfm (50 Hz) 30 m
21.1 cfm (60 Hz)
GROSS mode 8 l/sFINE mode 7 l/sULTRA mode 2.5 l/s
Iridium/Yttria-oxide
-12
mbar l/s
-8
mbar l/s
3
/h (50 Hz)
3
/h (60 Hz)
Hinweis To get down to the minimum detected leak rate range some conditions
must be fulfilled:
UL1000 and UL1000 Fab has fully warmed up
Ambient conditions must be stable (temperature, no vibration/accelerations.)
The part under test has been evacuated long enough (background is no longer
decreasing)
ZERO must be active
1.3.2.2 Electrical Data
Part no. 550 - 000A, 550 - 100A 230 V 50 Hz Part no. 550 - 001A, 550 - 101A 115 V 60 Hz Part no. 550 - 00 2A 100 V 50/60 Hz
Power consumption 1100 VA Type of protection IP20 Power cords (EU, USA, UK) 3 m
iina70e 01.fm technical handbook(1408)
General Information 15
1.3.2.3 Other Data
Valves solenoid Dimensions (L × W × H) incl. handle in mm 1068 × 525 × 850 Dimensions (L × W × H) incl. handle in inches 42 × 21 × 33 Weight in kg 110 Weight in lbs 242 Noise level dB (A) < 70 Noise level dB (A) 0.5m distance < 56 Audio alarm dB (A) 90 Contamination level (to IEC 60664-1) 2 Overvoltage category (to IEC 60664-1) II
1.3.2.4 Ambient Conditions
For use within buildings Permissible ambient temperatur e (d ur in g op er at ion) +10 °C … +40 °C Permissible storage temperature 0 °C … +60 °C Max. rel. humidity 80% non condensing Max. permissible height above sea level (during operation) 2000 m
1.4 Unpacking
Unpack the UL1000 and UL1000 Fab immediately after delivery, even if it will be installed later on.
Examine the shipping container for any external damage. Completely remove the packaging materials.
Check if the UL1000 and UL1000 Fab is complete (See Chapter 1.4.1) and carefu lly examine the leak detector visually.
If any damage is discovered, report it immediately to the forwarding agent and insurer. If the damaged part has to be replaced, please contact the orders department.
Notice: Before starting up make sure that the transportation fixing is loosened.
(Please refer to chapter 2.1)
Tipp Retain the packaging materials in the event of complaints about damage.
Tipp For unpacking please use the wedge which is part of the packaging.
16 General Information
iina70e 01.fm technical handbook(1408)
1.4.1 Supplied Equipment
Helium Leak Detector UL1000 or UL1000 Fab
Exhaust hose adapter with clamps (see arrow 1)
power cord fixture
Set of fuses (see arrow 2)
Set of tools (see arrow 7)
Bellow Clips (2 + 2) (see arrow 5)
Folder with documents
Technical Handbook UL1000 and UL1000 Fab Spare Parts List UL1000 and UL1000 Fab
hooks to wrap power cord (with screws) (see arrow 6)
Tool to open the UL1000 and UL1000 Fab (see arrow 7)
O-Ring with filter (for use at applications with particles)
iina70e 01.fm technical handbook(1408)
Fig. 1-2
General Information 17
1.4.2 Accessories and Options
The following parts can be ordered additionally:
Sniffer Line SL200 14005
Leak Ware 14090
Helium Sniffer QUICK-TEST QT100 15594
Tool Box (detachable) 551-000
Helium Bottle Holder 551-001
ESD Mat 551-002
RC1000 Remote control
Test chamber TC1000 551-005
spray gun with hose 16555
set of plugs 20099024
LeakWare (software package) 14090
1.4.2.1 Sniffer line SL200
By use of the sniffer line the UL1000 and UL1000 Fab can easily be converted to a sniffer leak detector. The length of the sniffer line is 4m (i.e. 12 feet).
1.4.2.2 Toolbox
The toolbox is a detachable compartment with a lockable lid. Fittings and small fixtures can be stored plus the hand set (Please refer to Chapter 1.4.2.5). The storage volume is approximately 5 l.
The toolbox is placed on the working surface and jammed by the handle.
RC1000WL wireless versionRC1000C cable versionExtension Cable, 8 m
551-015 551-010 14022
1.4.2.3 Helium Bottle Holder
The helium bottle holder allows you to carry a helium reservoir a nd a spray g un with the UL1000 and UL1000 Fab. Only small and midsize bottles (max 10 l, 200 bar) will fit without influencing the stability of the UL1000 and UL1000 Fab.
1.4.2.4 ESD Mat
This mat is put on the working surface of the UL1000 and UL1000 Fab and is clamped and grounded by the inlet port ring. It avoids electrical disch arge s between the working surface and sensitive test parts.
18 General Information
iina70e 01.fm technical handbook(1408)
1.4.2.5 RC1000 Remote control
The RC1000 is a wireless remote control that allows to operate the UL1000 and UL1000 Fab from distance up to 100 m. It provides the functions START, STOP/ VENT, ZERO and speaker volume, and displays leak rate in bargaraph or in chart mode. (see also Technical Handbook RC1000.)
Measured values can be stored in an internal memory for up to 24 hours of recording time. The data can easily be downloaded to a USB stick to save it.
An internal trigger can be set to provide a warning if the limit leak rates are exceeded. An optical warning is shown on the display and an acoustic warning signal is sounded on the integrated loudspeaker or the connected headphones.
The RC1000 remote control is housed in a robust housing to enable ergonomic working. Magnets on the underside of the unit enable it to be attached to horizontal or vertical metal surfaces.
The RC1000 also enables remote operation of the leak test device in question using a connection cable of up to 28 metres in length.
Fig. 1-3 RC1000 wireless remote control
iina70e 01.fm technical handbook(1408)
General Information 19
1.4.2.6 Test chamber TC1000
This test chamber turns the UL1000 / UL1000 Fab into a workstation to test hermetically sealed components.
Testing according to MIL-STD 883 can be done easily, fast and accurate. The test starts automatically when the chamber lid is closed, test parameters like cycle time and rejectant level can be setted in the menu Auto Leak Test (see 6.6.1.6). The test cycle runs automatically, the test result is also displayed by red / green LEDs directly at the chamber.
Fig. 1-4 Test chamber TC1000
20 General Information
iina70e 01.fm technical handbook(1408)
2 Installation
Caution
Warning
Caution
Caution
Caution
2.1 Transportation
The UL1000 and UL1000 Fab is not equipped with any crane eyes and must therefore not be transported using lifting equipment.
The UL1000 and UL1000 Fab must only be pushed or pulled along using the handle provided for this purpose. Don’t use the handle to lift.
Your feet can be pinched. Keep your feet away from the rollers. .
Your feet can be run over. Do not pull the unit, push it
When transporting over longer distances the original pa ckaging must be used . The castors must not be fixed when the UL1000 and UL1000 Fab is sh ipped in a crate.
UL1000 Fab with Triscroll TS 620
For transportation the chassis plate where the pump is mounted on has to be secured by a transportation fixing.
This transportation fixing consists of 2 screws at chassis of the UL1000 Fab (one on each side).
To get access to these screws remove the side covers of the UL1000 Fab. There are orange labels on the bottom part pointing to the screws:
iina70e 02.fm technical handbook(1408)
Installation 21
Fig. 2-1 For transportation fixing the screws are tightened to the chassis plate. For oper ation
of the UL1000 Fab the screws should be loosened. To loosen the screws first loosen the counter nut that is accessible from und erneath:
22 Installation
Fig. 2-2
iina70e 02.fm technical handbook(1408)
Loosen the screws approximately 10 mm above the chassis plate and tighten then
STO P
Danger
Caution
the counter nuts again:
Fig. 2-3 For transportation tighten the screws again and fix them by the counter nuts.
2.2 Working Location
Move the UL1000 and UL1000 Fab to the desired position and arrest the castors.
Caution: Exhaust gases and fumes: Exhaust gases and fumes from oil-sealed pumps may be harmful to health. For operation in poorly ventilated rooms, an exhaust pipe should be connected to exhaust connection 5 depending on the application and gases used.
Make sure that you can always reach the mains plug.
iina70e 02.fm technical handbook(1408)
Installation 23
Warning
The UL1000 and UL1000 Fab must not be operated while standing in water or
Warning
Warning
Caution
Caution
when exposed to drip water. The same applies to all other kinds of liquids.
Avoid contact with bases, acids or solvents as well as exposure to extreme climatic conditions.
The UL1000 and UL1000 Fab is designed for indoor use only.
Ensure a sufficient air cooling. The air inlet as well the air discharg e openings must never be obstructed.
The UL1000 and UL1000 Fab can be locked by arresting the castors of the front wheels to avoid movements on skewness.
It is recommended that you check all major helium sources in the vicinity of the UL1000 and UL1000 Fab within a radius of about 10 m for the presence of any big leaks. You may use the sniffer probe for this.
iina70e 02.fm technical handbook(1408)
24 Installation
2.3 Electrical Connections
Warning
STO P
Danger
2.3.1 Mains Power
Notice: Generally the local regulations for electrical connections m ust be observed.
Before connecting the UL1000 and UL1000 Fab to the mains you mu st make sure that the mains voltage rating of the UL1000 and UL1000 Fab coincides with the locally available mains voltage. The instrument must exclusively be connected to a single phase supply with fuses for installation (Circuit breaker 16A max. according to IEC/EN 60898 with tripping characteristic B).
The mains voltage rating for the UL1000 and UL1000 Fab can be read off from the name plate beneath the mains socket Fig. 2-6/7 at the back side. This vo ltage is fixed and can not be changed.
A separate fuse for each of the mains conductors has been integ rated into the mains switch.
The mains voltage is applied to the instrument via the detachable mains ca ble which is supplied with the instrument. A mains socket Fig. 2-6/7 is available for this purpose at the back side of the instrument.
Caution: mains voltage: Improperly grounded or fused products can lead to fatal injuries. Only 3-core mains cables having a protection ground conductor must be used. Operation of the UL1000 and UL1000 Fab where the ground conductor has been left unconnected is not permissible.
Notice: The cable can be secured like shown in the following Figure.
iina70e 02.fm technical handbook(1408)
Installation 25
Fig. 2-4 secure fixture power cord
Notice: If the machine is not operating the cable can be stored at the cable holders.
Fig. 2-5 storing power cord
26 Installation
iina70e 02.fm technical handbook(1408)
2.3.2 Connections for the Data Acquisition Systems
Caution
Caution
1. Accessories
2. Digital Out
3. Digital In
4. Recorder
5. RS232
6. Remote Control / Wireless transmitter
7. Mains Socket
8. Mains Switch
9. Hole to mount cable hooks.
10. Speaker
11. Vent
12. Purge (UL1000 Fab) / Gas ballast (UL1000)
Fig. 2-6
Tipp The sockets: Accessories, Digital Out, Digital In and Recorder have pin 1
on top. The pin numbers are counted downwards. The socket 2 and 3 are coded mechanically to avoid a confusion with the counter plug. For the connection with the counter plug (set of plugs 20099024) remove the plastic pins at the plug, accordingly the plug fits the socket.
Tipp The connections for external devices are safely seperated from the mains
and safe low voltage.
The electronic of the device can be destroyed. So just connect de vices to the le ak detector that are seperated from the mains.
Just connect devices that don’t excess 25V AC/Amp.
iina70e 02.fm technical handbook(1408)
Installation 27
2.3.2.1 Accessories
2.3.2.2 Digital Out
The following accessories may be connected to the sniffer line SL200 (P lease refe r to Chapter Fig. 2-6/1) or the test chamber TC1000:
Contact pins 1 and 3 are fused with a 0.8 A slow-blow fuse. The amount of power which can be drawn is limited to 10 W. The contacts are numbered from top to bottom.
Pin Assignment 1 +24 V, constantly applied, power supply for the sniffer line SL200. 2 GND24 3, 6 Input 4, 5, 7, 8 Output
The following relay outputs are available for further signal processing. The maximum rating for the relay contacts is 60V AC/1A.
Pin Assignment 1 +24V, bridged with pin 1 of socket „Digital In“ 2 GND_24V 3 Trigger 1 4 Trigger 2 5Free 6 Zero active 7 Ready 8 CAL active 9 Cal request 10 Error 11 Warning 12 Purge 13 Measure 14 Recorder Strobe 15 Common dig. out 16 Free
28 Installation
Description of the operation mode of the Digital Out. Trigger 1:
Is open in case Trigger Level 1 is exceeded or the machine is not in condition of measuring.
Trigger 2: Is open in case Trigger Level 2 is exceeded or the machine is not in condition of measuring.
Zero active: Is closed in case Zero function is running.
Ready: Is closed in case machine is ready for measurement (Emission on, no error).
CAL active
Closed when machine is in calibrating routine.
iina70e 02.fm technical handbook(1408)
2.3.2.3 Digital In
CAL Request
Is opend in case of calibration request. During external calibration a open output indicates that the external calibrated leak has to be clos ed .
Error
Open when an error is shown.
Warning
Open when a warning is shown.
Purge
Closed when purge is active.
Measure
Closed in case a machine is in measure mode.
Recorder Strobe
Closed in case recorder output is invalid. Only used when record output is set on „leak rate“.
These inputs can be used to control the UL1000 and UL1000 Fab with a programmable logic control (PLC).
Pin Assignment 1 +24V, bridged with pin 1 of socket „Digital Out“ 2 GND_24V 3Start 4Stop 5Zero 6CAL 7 Clear 8 Purge 9Free 10 Free 11 Common dig 12 Free 13 Free 14 Free 15 Free 16 Free
Description of operation mode of the Digital In. Zero:
Change from low to high: activate zero Change from high to low: deactivate zero
Start: Change from low to high: activate START
Stop: Change from low to high: activate STOP When this inlet is longer high than anounced in chapter 6.6.1.2 then ventilate it additionaly.
iina70e 02.fm technical handbook(1408)
Installation 29
2.3.2.4 Recorder
Purge: Change from low to high: activate purge Change from high to low: deactivate purge
Clear: Change from low to high: confirm error message
CAL: Change from low to high: When machine is in stand-by mode: start internal calibration. In case machine is measurement mode: start external calibration. (Premise: external calibration test leak has to be open and leak rate signal is stable) Change from high to low: External calibration: approve that external test leak is closed and leak rate signal is stable. High means: U > 13 V(approximately 7mA) Low means: U < 7 V The level of the logic signals must not exceed 35V.
Notice: Signals at these inputs are only accepted if the location of control is set to
„PLC“ or „Local and PLC“. Refer to Chapter 6.6.4.1
The recorder output see Fig. 2-6/4 may be used to log th e leak rate, the inlet pressure and the forevacuum pressure.
The measured values are provided by way of an analogu e signal in the ran ge of 0 V … 10 V. The resolution is limited to 10 mV. The instrument which is connected to the recorder output (e. g. X(t) chart recorder) should have an input resistance of no less than 2.5 k. The measured values are available through pins 1 and 4. The reference potential (GND) is available at pins 2 and 3. The contacts are numbered from top to bottom.
Tipp A diagramm showing pressures and leakrate versus voltage is attach ed in
the appendix.
Notice: The chart recorder outputs are electrically isolated from other plugs. If, in
spite of this, hum interference is apparent it is recommended to operate the UL1000 and UL1000 Fab and the chart recorder from the same mains phase. If this is not possible, you must make sure that the frame ground of both instruments is kept at the same potential.
Pin Assignment 1 Analog 1 2GND 3GND 4 Analog 2
iina70e 02.fm technical handbook(1408)
30 Installation
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