INFICON UHV Bakeable Sensor User Manual
C
over Page
OPERATING MANUAL
UHV Bakeable Sensor
PN 074-154N
Title P
age
www.inficon.com reachus@inficon.com
©2014 INFICON
®
OPERATING MANUAL
UHV Bakeable Sensor
PN 074-154N
Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
RateWatcher™ is a registered trademark of INFICON GmbH.
ConFlat® is a registered trademark of Varian Corporation.
Inconel® is a registered trademark of Inco Alloys International, Huntington, WV.
Swagelok® is a registered trademark of Swagelok Company.
VCR® is a registered trademark of Cajon Company.
Scotch-Brite™ is a trademark of 3M.
Teflon® is a registered trademark of E.I. du Pont de Nemours and Company.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2014 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.
Warranty
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
one (1) year from the date of shipment thereof by Seller. Seller's liability under this
warranty is limited to such of the above products or parts thereof as are returned,
transportation prepaid, to Seller's plant, not later than thirty (30) days after the
expiration of the period of warranty coverage in respect thereof and are found by
Seller's examination to have failed to function properly because of defective
workmanship or materials and not because of improper installation or misuse and
is limited to, at Seller's election, either (a) repairing and returning the product or
part thereof, or (b) furnishing a replacement product or part thereof, transportation
prepaid by Seller in either case. In the event Buyer discovers or learns that a
product does not conform to warranty, Buyer shall immediately notify Seller in
writing of such non-conformity, specifying in reasonable detail the nature of such
non-conformity. If Seller is not provided with such written notification, Seller shall
not be liable for any further damages which could have been avoided if Seller had
been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.
www.inficon.com reachus@inficon.com
Chapter 1
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.2 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.3 How to Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.3.1 Returning the UHV Bakeable Sensor to INFICON . . . . . . . . . . . . . . . . . . . .1-3
1.4 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
1.4.1 UHV Bakeable Sensor Configuration Overview and Parts. . . . . . . . . . . . . .1-4
1.5 Specifications for the UHV Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . . .1-5
1.5.1 UHV Bakeable Sensor without Shutter (PN BK-A0F). . . . . . . . . . . . . . . . . . 1-5
1.5.2 UHV Bakeable Sensor with Shutter (PN BK-A1F) . . . . . . . . . . . . . . . . . . . . 1-6
1.5.3 Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
1.5.4 Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
1.6 UHV Bakeable Sensor Drawings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
UHV Bakeable Sensor Operating Manual
Table Of Contents
Cover Page
Title Page
Trademarks
Disclaimer
Copyright
Warranty
Introduction and Specifications
Chapter 2
UHV Bakeable Sensor Installation
2.1 Pre-installation Sensor Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
PN 074-154N
2.1.1 Sensor Check with XTC/3, IC6, or Cygnus 2
Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.2 Sensor Check with STM-2XM, STM-3, SQM-160, SQC-310,
SQM-242, or IQM-233 Deposition Controller/Monitor . . . . . . . . . . . . . . . . .2-2
™
2.1.3 Sensor Check with Q-pod
or STM-2 Deposition Monitor. . . . . . . . . . . . . . 2-3
2.1.4 Sensor Shutter Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.2 Sensor Installation Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.3 Sensor Installation Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.3.1 Tube Bending . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
2.4 Providing Improved Cooling for the Sensor . . . . . . . . . . . . . . . . . . . . . . . .2-10
TOC - 1
Chapter 3
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 Installation with the UHV Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.3 Pneumatic Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3.4 Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Chapter 4
4.1 General Precautions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.1 Handle the Crystal with Care . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.2 Use the Optimum Crystal Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.3 Maintain the Temperature of the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.1.4 Crystal Concerns when Opening the Chamber . . . . . . . . . . . . . . . . . . . . . . 4-2
4.2 Crystal Replacement Instructions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
4.3 UHV Bakeable Sensor Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
4.3.1 Adjusting the Leaf Spring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
4.3.2 Cleaning the Crystal Holder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.3.3 Adjusting the Crystal Holder Retainer Spring. . . . . . . . . . . . . . . . . . . . . . . . 4-7
4.3.4 Lubricating the Clamping Mechanism . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
4.3.5 Lubricating the Shutter Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
4.4 Replacement Parts and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
UHV Bakeable Sensor Operating Manual
Solenoid Valve Assembly Installation
Maintenance and Spare Parts
Chapter 5
Troubleshooting
5.1 Troubleshooting Tools . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.1.1 Symptom, Cause, Remedy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.1.2 Diagnostic Tools. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
5.1.2.1 PN 782-902-023 Oscillator with 5.5 MHz Test Crystal. . . . . . . . . . . . . . . . . 5-4
5.1.2.2 OSC-100 Test Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
5.1.2.3 PN 761-601-G2 Crystal Sensor Emulator . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
5.1.2.4 XIU Test Function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
5.1.3 Digital Multimeter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
5.1.3.1 Electrical Isolation Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
5.1.3.2 Electrical Continuity Check. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
PN 074-154N
TOC - 2
1.1 Introduction
The INFICON UHV Bakeable Sensor (see Figure 1-1) is designed to withstand
continuous bakeout temperatures up to 450°C (for bakeout only, water flow
required for actual deposition monitoring). The front load design allows for easy
insertion of the crystal holder in applications lacking sufficient room for side
insertion. All UHV Bakeable Sensors are welded to a CF40 (2-3/4 in. ConFlat®)
feedthrough. Sensor length must be specified in a sensor length specification form
provided by INFICON, which must be completed when ordering the UHV Bakeable
Sensor.
Figure 1-1 UHV Bakeable Sensor
UHV Bakeable Sensor Operating Manual
Chapter 1
Introduction and Specifications
The UHV Bakeable Sensor is available in a standard configuration where the water
tubes are parallel to the crystal face.
Optionally, sensors can be ordered with a pneumatically driven crystal shutter to
protect the crystal during source warm up, when not used during deposition of an
alternate material, or to extend crystal life when used with RateWatcher™ or rate
PN 074-154N
sampling.
NOTE: Maximum bakeout temperature for sensors with the optional crystal shutter
is reduced to 400°C.
The exposed crystal electrode is fully grounded to effectively eliminate problems
due to RF interference.
1 - 1
UHV Bakeable Sensor Operating Manual
CAUTION
WARNING
1.2 Definition of Notes, Cautions and Warnings
Before using this manual, please take a moment to understand the Cautions and
Warnings used throughout. They provide pertinent information that is useful in
achieving maximum instrument efficiency while ensuring personal safety.
NOTE: Notes provide additional information about the current topic.
Failure to heed these messages could result in damage
to the instrument.
Failure to heed these messages could result in personal
injury.
1.3 How to Contact INFICON
Worldwide customer support information is available under Support >> Support
Worldwide at www.inficon.com:
Sales and Customer Service
Technical Support
Repair Service
When communicating with INFICON about a UHV Bakeable Sensor, please have
the following information readily available:
The Sales Order or Purchase Order number of the UHV Bakeable Sensor
purchase.
The Lot Identification Code, located on the side surface of the sensor head.
A description of the problem.
The exact wording of any error messages that may have been received.
An explanation of any corrective action that may have already been attempted.
PN 074-154N
1 - 2
UHV Bakeable Sensor Operating Manual
1.3.1 Returning the UHV Bakeable Sensor to INFICON
Do not return any sensor component to INFICON without first speaking with a
Customer Support Representative and obtaining a Return Material Authorization
(RMA) number. UHV Bakeable Sensors will not be serviced without an RMA
number.
Packages delivered to INFICON without an RMA number will be held until the
customer is contacted. This will result in delays in servicing the UHV Bakeable
Sensor.
Prior to being given an RMA number, a completed Declaration Of Contamination
(DoC) form may be required. DoC forms must be approved by INFICON before an
RMA number is issued. INFICON may require that the sensor be sent to a
designated decontamination facility, not to the factory.
1.4 Unpacking and Inspection
1 If the UHV Bakeable Sensor has not been removed from its packaging, do so
now. The sensor and accessories are packaged in a single cardboard carton
with a rigid foam insert. Carefully remove the packaged accessories before
removing the sensor.
2 Examine the sensor for damage that may have occurred during shipping. It is
especially important to note obvious rough handling on the outside of the
container. Immediately report any damage to the carrier and to INFICON.
NOTE: Do not discard the packaging material until inventory has been taken
and installation is successful.
3 Refer to the invoice and the information contained in section 1.4.1 to take
inventory.
4 To install the sensor, see Chapter 2, UHV Bakeable Sensor Installation.
5 For additional information or technical assistance, refer to section 1.3, How to
PN 074-154N
Contact INFICON, on page 1-2.
1 - 3
UHV Bakeable Sensor Operating Manual
F
0
1
B K –
A
NOTE 1:
Orders cannot be entered without a completed sensor length
specication form (provided by INFICON). Once order is conrmed,
it cannot be canceled.
NOTE 2:
Sensor lengths are measured from the center of the crystal to
the vacuum side (sealing surface) of the feedthrough (see length
specication form).
NOTE 3:
All UHV Bakeable Sensors are welded to a CF40 feedthrough.
NOTE 4:
Shutter air tube is connected to the feedthrough tube using a
VCR® tting.
Type of Sensor
(crystals sold separately)
Standard
(water lines parallel to crystal face)
Shutter Assembly
None
Standard shutter
Length of Sensor
Standard length –
Shuttered sensors
From 17 to 101.6 cm (6.7 to 40 in.)
Non-shuttered sensors
From 10.2 to 101.6 cm (4 to 40 in.)
subject to an additional charge, as well
as 2-4 weeks additional lead time.
1.4.1 UHV Bakeable Sensor Configuration Overview and Parts
UHV Bakeable Sensor . . . . . . . . . . . . . . BK-AXF (see Figure 1-2)
Figure 1-2 UHV Bakeable Sensor configurations
1 - 4
Thin Film Manuals CD . . . . . . . . . . . . . . . . . . . . . . . PN 074-5000-G1
Crystal Snatcher. . . . . . . . . . . . . . . . . . . . . . . . . . . . PN 008-007
Molybdenum Disulfide in Isopropyl Alcohol . . . . . . . PN 750-191-G1
Graphite in Isopropyl Alcohol
(provided only with shuttered sensors) . . . . . . . . . . PN 009-175
PN 074-154N
UHV Bakeable Sensor Operating Manual
1.5 Specifications for the UHV Bakeable Sensor
Figure 1-3 UHV Bakeable Sensor
1.5.1 UHV Bakeable Sensor without Shutter (PN BK-A0F)
Maximum Temperature. . . . . . . . . . . 450°C continuous bakeout
NOTE: Water flow recommended
for deposition.
Sensor Head Size
(maximum envelope) . . . . . . . . . . . . 34 x 35 x 24 mm
(1.35 x 1.38 x 0.94 in.)
Tubes
Water . . . . . . . . . . . . . . . . . . . . . 3.2 mm (0.125 in.) OD (vacuum side)
6.4 mm (0.25 in.) OD (atmosphere side)
Coax . . . . . . . . . . . . . . . . . . . . . . 4.8 mm (0.188 in.) OD
Crystal exchange . . . . . . . . . . . . . . . Front loading, self-contained package,
cam-type locking handle
PN 074-154N
Mounting. . . . . . . . . . . . . . . . . . . . . . Four #4-40 tapped holes
(on back of sensor body)
4.57 mm (0.18 in.) thread depth
Crystal
(not included with sensor) . . . . . . . . 14 mm (0.550 in.) diameter
1 - 5
UHV Bakeable Sensor Operating Manual
1.5.2 UHV Bakeable Sensor with Shutter (PN BK-A1F)
Maximum Temperature . . . . . . . . . . 400°C continuous bakeout
NOTE: Water flow recommended
for deposition.
Sensor Head Size
(maximum envelope) . . . . . . . . . . . . 34 x 35 x 31 mm
(1.35 x 1.38 x 1.21 in.)
Tubes
Water . . . . . . . . . . . . . . . . . . . . . 3.2 mm (0.125 in.) OD (vacuum side)
6.4 mm (0.25 in.) OD (atmosphere side)
Air. . . . . . . . . . . . . . . . . . . . . . . . 3.2 mm (0.125 in.) OD (vacuum side)
4.8 mm (0.188 in.) OD (atmosphere side)
Coax. . . . . . . . . . . . . . . . . . . . . . 4.8 mm (0.188 in.) OD
Crystal Exchange . . . . . . . . . . . . . . . Front loading, self-contained package,
cam-type locking handle
Mounting . . . . . . . . . . . . . . . . . . . . . Four #4-40 tapped holes
Crystal
(not included with sensor) . . . . . . . . 14 mm (0.550 in.) diameter
1.5.3 Materials
Body and Holder . . . . . . . . . . . . . . . 304 stainless steel
Springs . . . . . . . . . . . . . . . . . . . . . . . Molybdenum and Inconel® X-750
Tubes . . . . . . . . . . . . . . . . . . . . . . . . Seamless 304 stainless steel
Other Mechanical Parts . . . . . . . . . . 18-8 or 304 stainless steel
Insulators . . . . . . . . . . . . . . . . . . . . . >99% Al
Wire . . . . . . . . . . . . . . . . . . . . . . . . . 1) Ni (in vacuum)
Braze . . . . . . . . . . . . . . . . . . . . . . . . Vacuum process high temperature
(on back of sensor body)
4.57 mm (0.18 in.) thread depth
PN 074-154N
2O3
2) Ni plated Cu (atmosphere)
Ni-Cr alloy
1 - 6
1.5.4 Installation Requirements
CAUTION
WARNING
Feedthrough . . . . . . . . . . . . . . . . . . . CF40 (2-3/4 in. ConFlat) feedthrough,
Other . . . . . . . . . . . . . . . . . . . . . . . . XIU or Oscillator to match specific
Water Flow Rate. . . . . . . . . . . . . . . . Minimum water flow 150 to 200 cm
Water Quality . . . . . . . . . . . . . . . . . . Coolant should not contain chlorides as
UHV Bakeable Sensor Operating Manual
integral with sensor head
controller/monitor
BK-A1F only: Solenoid Valve for air,
PN 750-420-G1 (see Chapter 3, Solenoid
Valve Assembly Installation)
30°C maximum
NOTE: User should provide means of easily
disconnecting the 6.35 mm (1/4 in.)
water tubes during bakeout.
stress corrosion cracking may occur.
Extremely dirty water may result in loss of
cooling capacity.
3
/min,
Do not allow water tubes to freeze. This may happen if the
tubes pass through a cryogenic shroud and the flow of
fluid is interrupted.
Air (BK-A1F only) . . . . . . . . . . . . . . . 70 psi (gauge) {85 psi (absolute)}
(5.8 bar (absolute)) [584 kPa (absolute)]
(minimum)
80 psi (gauge) {95 psi (absolute)}
(6.5 bar (absolute)) [653 kPa (absolute)]
PN 074-154N
(maximum)
Do not exceed 100 psi (gauge) {115 psi (absolute)}
(7.9 bar (absolute)) [791 kPa (absolute)].
Connection to excessive pressure may result in personal
injury or equipment damage.
1 - 7
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