The trademarks of the products mentioned in this manual are held by the companies that
produce them.
INFICON
®
, Transpector® and FabGuard® are registered trademarks of INFICON GmbH.
Windows®, and Microsoft® are registered trademarks of Microsoft Corporation.
All other brand names, product names or trademarks belong to their respective holders.
Software Copyrights
This product contains embedded software protected under the following copyrights:
Copyright INFICON Inc.
Disclaimer
The information contained in this Operating Manual is believed to be accurate and
reliable. However, INFICON assumes no responsibility for its use and shall not be liable
for any special, incidental, or consequential damages related to the use of this product.
Due to our continuing program of product improvements, specifications are subject to
change without notice.
Transpector XPR 3+ Gas Analysis System is a quadrupole-based mass
spectrometer Residual Gas Analysis (RGA) instrument designed for use in high
vacuum environments, up to 20 mTorr, for monitoring trace contaminants and
process gases. Transpector XPR 3+ runs with the Windows
using a member of the FabGuard
This chapter provides an overview of Transpector XPR 3+ Gas Analysis System.
Topics include:
the purpose of Transpector XPR 3+
specifications
®
suite of programs.
Transpector XPR 3+ Operating Manual
®
operating system
a list of supplied items
installation instructions
customer support contact information.
Software information can be found either in the FabGuard Explorer Operating
Manual (PN 074-528-P1) or in the FabGuard help files (for all other FabGuard
programs).
1.2 Using This Manual
Please read this Operating Manual before operating Transpector XPR 3+.
1.2.1 Note and Hint Paragraphs
NOTE: This is a note paragraph. Notes provide additional information about the
current topic.
HINT: This is a hint paragraph. Hints provide insight into product usage.
1 - 1
1.2.2 Warning and Caution Paragraphs
CAUTION
WARNING
WARNING - Risk Of Electric Shock
The following Caution and Warning paragraphs are used to alert the reader of
actions which may cause either damage to the instrument or bodily injury.
This is an example of a Caution paragraph. It cautions
against actions which may cause an instrument
malfunction or the loss of data.
This is an example of a General Warning paragraph. It
warns against actions which may cause bodily injury.
Transpector XPR 3+ Operating Manual
This is an example of a Electrical Warning paragraph. It
warns of the presence of electrical voltages which may
cause bodily injury.
1.3 How To Contact Customer Support
Worldwide customer support information is available under Contact >> Support
Worldwide at www.inficon.com:
Sales and Customer Service
Technical Support
Repair Service
If you are experiencing a problem with Transpector XPR 3+, please have the
following information readily available:
the Transpector XPR 3+ serial number
a description of the problem
an explanation of any corrective action already attempted
1 - 2
the exact wording of any error messages
1.3.1 Returning Transpector XPR 3+ to INFICON
Do not return any component of Transpector XPR 3+ to INFICON before speaking
with a Customer Support Representative and obtaining a Return Material
Authorization (RMA) number. Transpector XPR 3+ will not be serviced without an
RMA number.
Prior to being given an RMA number, a Declaration Of Contamination (DOC) form
may need to be completed if the sensor has been exposed to process materials.
DOC forms must be approved by INFICON before an RMA number is issued.
INFICON may require that the sensor be sent to a designated decontamination
facility, not to the factory.
1.4 Quick Start
Read this Operating Manual in full prior to operating Transpector XPR 3+. Then,
follow the steps below to quickly start using Transpector XPR 3+.
1Ensure that all supplied items have been received. See Chapter 13,
Supplied Items.
Transpector XPR 3+ Operating Manual
2Install the hardware. See section 1.16, Hardware Installation, on page 1-8.
3Install the communication cable. See section 1.16.8, Installing Ethernet
Communications, on page 1-23.
4Install the software. Refer to the FabGuard Explorer Operating Manual for
information on installing the software.
NOTE: Transpector XPR 3+ requires FabGuard version 17.04.00 or higher for
operation.
1.5 Purpose of Transpector XPR 3+ Gas Analysis System
Transpector XPR 3+ Gas Analysis System is a quadrupole-based residual gas
analyzer that operates at Physical Vapor Deposition (PVD) process pressures and
has an Electron Multiplier that can operate at 20 mTorr operating pressures. The
miniature quadrupole sensor analyzes gases by:
ionizing some of the gas molecules
separating the ions by their mass-to-charge ratio
measuring the quantity of ions at each mass
The masses, unique for each substance, allow the identification of the gas
molecules from which the ions were created. The magnitudes of these signals are
used to determine the partial pressures (amounts) of the respective gases.
Transpector XPR 3+ measures major components and impurities in a process with
a 10 ppm detection limit.
1 - 3
Transpector XPR 3+ Operating Manual
Transpector XPR 3+ is an important aid in the efficient use of a high-vacuum
system, detecting leaks, and contaminants. It can indicate the partial pressures of
gases in processes occurring within a vacuum or other vessel, and therefore, can
be used to investigate the nature of a process or monitor process conditions.
1.6 General Description of Transpector XPR 3+
Gas Analysis System
Transpector XPR 3+ Gas Analysis System is comprised of three parts:
Sensor
The sensor, which functions only in a high-vacuum environment with pressures
below 2x10
The sensor itself is comprised of three components:
the ion source (ionizer)
the quadrupole mass filter
the ion detector
The sensor is mounted on an electrical feedthrough flange, which is bolted to
the vacuum chamber where the gas analysis measurements are made.
Electronics Module
The electronics module controls the sensor and communicates to the operating
computer. The electronics module and sensor are sold matched in sets. The
electronics module attaches to and is supported by the sensor.
Software
The software controls the electronics module and displays the data
from the sensor.
-2
Torr (2.66 x 10-2 mbar) [2.66 Pascals].
1.7 Specifications for Transpector XPR 3+ Gas Analysis System
See Chapter 12 for Transpector XPR 3+ Gas Analysis System specifications.
1.8 Supplied Items
See Chapter 13 for items that are packaged with Transpector XPR 3+
Gas Analysis System.
1 - 4
1.9 Physical Requirements
The following sections show the physical dimensions, weight, mounting
requirements, ventilation requirements, and the perimeter required for
maintenance access for Transpector XPR 3+.
1.9.1 Physical Dimensions
Figure 1-2 shows the overall physical dimensions of Transpector XPR 3+ in inches
[millimeters].
Figure 1-1 Sensor dimensions
Transpector XPR 3+ Operating Manual
Figure 1-2 Physical dimensions of Transpector XPR 3+
1 - 5
1.9.2 Weight
Transpector XPR 3+ electronics module weighs 1.62 kg (3.58 lbs).
1.9.3 Mounting Requirements
The sensor is mounted to a high-vacuum chamber with a standard 2.75 in.
(69.9 mm) O.D. ConFlat flange.
The electronics module attaches to and is supported by the sensor.
Transpector XPR 3+ can be mounted in any position. See section 1.16.5, Sensor
Installation, on page 1-19 for information on installing Transpector XPR 3+ system.
1.9.4 Ventilation Requirements
At least 25.4 mm (1 in.) of open space around the Transpector XPR 3+ electronics
module must be maintained for proper ventilation.
1.9.5 Maintenance Access
Easy access to Transpector XPR 3+ should be maintained for installation and
maintenance activities.
Transpector XPR 3+ Operating Manual
1.10 Electrical Power Requirements
Transpector XPR 3+ must be connected to a source of power as specified in the
following sections.
1.10.1 Required Supply Voltage
20 to 30 V(dc), 24 V(dc) typical
1.10.2 Current Rating
1.25 A maximum
1.10.3 Electrical Connection
Latching, 4-pin DIN connector, internally isolated from system ground.
See Figure 1-3.
The following paragraphs explain the use, altitude range, humidity, pollution
degree, and operating temperature for Transpector XPR 3+.
1.13.1 Use
Transpector XPR 3+ is designed for indoor use only.
1.13.2 Altitude Range
Transpector XPR 3+ can be used up to a maximum altitude range of
2000 m (6561 ft.).
1.13.3 Pollution Degree
Pollution Degree 2 (per EN61010-1)
1 - 7
1.13.4 Operating Temperature
Transpector XPR 3+ is designed to operate within a temperature range of
5°C to 50°C (41°F to 122°F).
1.13.5 Humidity
Transpector XPR 3+ is designed to operate in an environment with up to
98% relative humidity.
1.14 Computer System Requirements
Refer to the FabGuard Explorer Operating Manual (PN 074-528-P1) for computer
system requirements.
1.15 Software Installation
Refer to the FabGuard Explorer Operating Manual (PN 074-528-P1) for information
on installing the software and setting up the protocols necessary to ensure proper
software operation.
Transpector XPR 3+ Operating Manual
1.16 Hardware Installation
The following steps must be performed to install Transpector XPR 3+
Gas Analysis System.
1If the optional Isolation Valve option was purchased with the
Transpector XPR 3+ install the Isolation Valve, see section 1.16.2 on page
1-11.
2If the optional Pirani Gauge Interlock was purchased with the
Transpector XPR 3+ mount the Pirani Interlock Weldment Assembly, see
section 1.16.3 on page 1-17.
3If the optional Pirani Gauge Interlock was purchased with the
Transpector XPR 3+ mount the Pirani Gauge, see section 1.16.4 on page
1-18.
4Install the Transpector XPR 3+ Sensor, see section 1.16.5 on page 1-19.
5Install the Transpector Electronics Module, see section 1.16.6 on page 1-22.
6Install the Communications cables, see section 1.16.8 on page 1-23.
7Install the 24 V DC Power Supply, see section 1.16.9 on page 1-24.
8If the optional Pirani Gauge Interlock was purchased with the
Transpector XPR 3+ install the Transpector XPR 3+ Interlock Cable, see
section 1.16.10 on page 1-24.
1 - 8
9If the optional Pirani Gauge Interlock and/or the optional Isolation Valve were
CAUTION
CAUTION
purchased with the Transpector XPR 3+ attach the Heating Jackets, see
section 1.16.11 on page 1-25
10Install the Software.
1.16.1 Avoiding Process Metal Deposition
Conductive deposits on the ceramic ion source plate
from the process can cause electrical short circuits and
a general failure of Transpector XPR 3+. The use of a 90
valve between the process and the sensor will alleviate
this condition. The installation of a 90
in ConFlat Flanges.
The sensor is installed on a vacuum system with a 2.75 in. DN40 ConFlat flange.
ConFlat flanges, and similar compatible types made by other manufacturers, are
used for attaching devices to ports on high vacuum systems. If there are no
concerns with the installation of this type of flange, proceed to section 1.16.5.1,
Attaching the Sensor to the Vacuum Chamber, on page 1-19.
Transpector XPR 3+ Operating Manual
o
o
valve is described
NOTE: If the system does not have a port with a compatible mating flange, an
adapter will be necessary.
To install these flanges without leaks, follow proper operating procedures. These
flanges are sealed with a metal gasket and can be heated for bakeout to
temperatures of up to 200°C. For bakeout temperatures when a sensor is installed,
see Table 1-1 on page 1-21.
1.16.1.1 Assembling ConFlat Flanges
To assemble a pair of ConFlat flanges:
1Wipe the sealing areas of the flanges with a laboratory towel using a clean
solvent, such as water free alcohol. These areas must be clean and free of
particulate matter.
Do not touch any surface on the gasket and flange faces
with bare fingers. If it is necessary to touch any of these
parts, always wear clean linen, nylon, powder free latex
or vinyl laboratory gloves.
1 - 9
Transpector XPR 3+ Operating Manual
CAUTION
Flange
Flange
Copper Gasket
2Install the copper gasket between the two flanges. (See Figure 1-4.) Always
use a new gasket. Do not attempt to use gaskets more than once.
Figure 1-4 Gasket and flange assembly
3Bring the two flanges together making sure that the gasket fits in the recess in
both flanges. Flange faces should be parallel. If the gasket is properly seated, it
should not be possible to slide the two flanges laterally with respect to each other.
4Install supplied silver-coated stainless steel bolts in the bolt holes of the flanges
and finger-tighten.
NOTE: If the factory-supplied silver-coated stainless steel hardware is not
used and the flanges are going to be baked, coat the bolt threads with
®
an anti-seize compound (FelPro
C 100 or equivalent).
Do not get any of the anti-seize compound on the gaskets
or vacuum parts of the flange.
5After the bolts have been finger-tightened and the flange faces are parallel,
tighten the bolts gradually and evenly in a star pattern until the flange faces are
brought into even contact with each other.
1 - 10
1.16.2 Installing the Isolation Valve
WARNING
Tool
Interlock Weldment
IPN 914-416-G1
16.71 in. (42.5 cm)
Pirani Gauge
8.3 in.
(21 cm)
7.2 in.
(18 cm)
Transpector XPR 3+
8.0 in.
(20.4 cm)
The 90° Isolation Valve is
located between the Tool
Chamber and Transpector XPR 3+.
IPN 918-401-P1
Manual
Air Operated
Heating Jackets
Transpector XPR 3+ should be installed on a 90° high-conductance isolation valve
(1.5 in. [38 mm] outer diameter) mounted on the process chamber. This prevents
line-of-sight deposits, from the plasma, from reaching the Transpector XPR 3+
Sensor. (See Figure 1-5.) The isolation valve may be provided by the user, or
purchased from INFICON (see below). The isolation valve must be bakeable and
needs to be fitted with a heating jacket designed for baking the valve.
1½" Right Angle Valve Hand Operated with Heating Jacket:
IPN 914-024-G1
1½" Right Angle Valve Air Operated with 24 V(dc) Solenoid and
Figure 1-5 Typical Connection of a Transpector XPR 3+ to the process chamber
Transpector XPR 3+ Operating Manual
1.16.2.1 Notes for Air Operated Valve
The INFICON supplied air operated valve is a 1/8 in. ported, 3-way, single solenoid,
2-position spring return, Normally Open (NO) or Normally Closed (NC), general
purpose air valve. It is configured for 2-way, NC use, whereby the EXH port is
plugged and the air supply (60 - 100 psig) must be connected to the port
labeled IN. (See Figure 1-6.)
The air pressure supplied to the valve must not exceed
100 psig.
1 - 11
CAUTION
The air pressure supplied to the valve must be at least
EXH
IN
OUT
IN
OUT
EXH
2 WAY NORMALLY CLOSED
PLUGGED
INLET
AIR
60 psig.
Figure 1-6 INFICON supplied air valve
Transpector XPR 3+ Operating Manual
1.16.2.2 Port Identification for 2-Way, Normally Closed Use
This valve has an operational voltage rating of
24 V(dc) +10% to -15%.
Figure 1-8 Valve parts list
Transpector XPR 3+ Operating Manual
1 - 13
1.16.2.4 Wiring Instructions
1Remove the screw (8).
Figure 1-9 Removing connector assembly
Transpector XPR 3+ Operating Manual
2Remove the clear plastic connector elbow (4).
Figure 1-10 Removing connector elbow
1 - 14
3Remove the connector (3) from the solenoid assembly, be careful to not
remove the connector gasket (2).
Transpector XPR 3+ Operating Manual
Figure 1-11 Removing connector terminal
4Remove the black plastic nut (5) from the connector elbow (4), the washer (6)
and the compression ring (7) can stay in place.
Figure 1-12 Connect elbow assembly
5Take the MMSP Valve/Relay Interface Cable (IPN 600-1450-P2) and run the
cables through the nut (5), washer (6), compression ring (7) and the connector
elbow (4).
1 - 15
Transpector XPR 3+ Operating Manual
4
6
5
7
Figure 1-13 Cable and connector elbow feed
6Connect the red and black wires to terminals 1 and 2 in either order. This can
be done by soldering the wires in place or using the appropriate screw
terminals on the connector (3) assembly.
Figure 1-14 Connecting the red and black wires to the terminal
1 - 16
7Press the connector (3) back into the connector elbow (4) screw the nut (5)
securely into place. Connect the connector (3) to the solenoid coil (1) noting the
connection scheme NOTE: When fitting the connector (3) into the connector
elbow (4) note the orientation of the connection to the solenoid coil (1). Ideally
the elbow should be facing away from the inlet air connection point as it can
interfere with the connection of the inlet air.
Transpector XPR 3+ Operating Manual
Figure 1-15 Connecting the connector
8Screw the assembly back into the solenoid coil using the screw (8) removed in
step 1.
Figure 1-16 Screw the assembly back into the solenoid coil
1.16.3 Mounting the Pirani Interlock Weldment Assembly
Transpector XPR 3+ Interlock Weldment Assembly with a Pirani gauge port has a
1.5 in. (38 mm) inner diameter for the Transpector XPR 3+ sensor. Both CF-40
flanges rotate to provide flexibility in orientation of the Pirani gauge with respect to
the Transpector electronics module, the isolation valve, and the tool.
1Evaluate, or pre-fit, Transpector XPR 3+ on the tool port to determine the
orientation of the Transpector electronics module with respect to the tool, and
the Pirani gauge with respect to a side of the Transpector electronics module.
Typically, the Pirani gauge is placed under the Transpector electronics module
if the axis of Transpector XPR 3+ is horizontal, as shown in Figure 1-17.
NOTE: For measurements of 2x10
of the Transpector XPR 3+ filament, the Pirani gauge retains its
accuracy in any orientation.
-2
Torr or less, that are involved in protection
1 - 17
Transpector XPR 3+ Operating Manual
Figure 1-17 Orientations for mounting an Transpector XPR 3+ on a tool
2Attach the Interlock Weldment Assembly to the 1½ in. Right Angle Valve with a
Cu gasket using ¼-28 x 1¼ in. 12 pt SS silver plated bolts, with the nut plates
on the Valve side. Tighten the bolts finger tight.
3Check for orientation and alignment: the Pirani gauge tube should be oriented
so that the VCR fitting is facing away from the valve.
4Tighten all the bolts evenly and gradually in a star pattern until the flange faces
come into contact.
1.16.4 Mounting the Pirani Gauge
The Pirani gauge is UHV compatible with a SS body, ceramic electrical
feed-through and a 8-VCR female mounting flange.
1Connect the Pirani gauge flange to the port on the Interlock Weldment
Assembly using a Ni-8-VCR -2 silver plated Ni gasket.
2Adjust the orientation of the Pirani gauge and tighten the gland finger tight. Use
a 1-1/16 in. open end wrench for the female nut and a 15/16 in. open end for
the male nut.
NOTE: For Ni gaskets, tighten an additional 1/8 turn (45 degrees) beyond finger
tight with the wrenches to seal the Pirani gauge fitting. Rotation of the
Pirani gauge can be inhibited by rotating the male nut and keeping the
female nut wrench fixed.
1 - 18
1.16.5 Sensor Installation
CAUTION
Do not touch any surface on the vacuum side of the
sensor with bare fingers. If it is necessary to touch any of
these parts, always wear clean linen, nylon, powder free
latex or vinyl laboratory gloves.
Before installing the sensor on your system, check for
any signs of loose or broken parts.
Do not attempt to clean the sensor in any kind of solvent.
Cleaning the sensor requires its disassembly. If the
sensor is contaminated and needs cleaning, contact
INFICON.
Transpector XPR 3+ Operating Manual
1.16.5.1 Attaching the Sensor to the Vacuum Chamber
The sensor may be mounted in any position when attaching it to the vacuum vessel
or chamber.
1Attach the Transpector XPR 3+ Sensor Flange to the Pirani Interlock Weldment
Assembly CF-40 Flange with a Cu gasket using ¼-28 x 1¼ in. 12pt SS silver
plated bolts, with the nut plates on the Transpector XPR 3+ side of the Flange.
Tighten the bolts finger tight.
2Tighten all the bolts evenly and gradually in a star pattern until the flange faces
come into contact.
1 - 19
Transpector XPR 3+ Operating Manual
CAUTION
Avoid mounting the sensor near any magnetic fields
greater than two gauss.
It is important that the connection between the sensor
and the vacuum chamber does not interfere with gas
exchange to ensure that the gas composition accurately
reflects that existing in the vacuum chamber.
If materials are evaporated or coatings are deposited in
the vacuum chamber, the sensor must be protected
against the deposition of these materials on its surfaces
by installing a baffle or deflector.
In systems which are baked, include the sensor in the
bakeout zone or provide it with separate heaters.
Dimensions of the quadrupole sensors are shown in Figure 1-18.
Figure 1-18 Sensor dimensions
1 - 20
Transpector XPR 3+ Operating Manual
CAUTION
CAUTION
CAUTION
WARNING
The silver-plated bolts used for mounting the sensor to
the vacuum system must be oriented such that the bolt
heads are on the same side of the sensor as the
electronics box. Otherwise, there may be interference
between the black INFICON Transpector mounting nut
and sensor mounting hardware.
Maximum bakeout temperature for sensors is shown in
Table 1-1.
Table 1-1 Sensor maximum bakeout temperature
Maximum
Operating
Sensor
Transpector XPR 3+150°C200°C
Temperature
Maximum Bakeout
Temperature
Electronics Removed
Transpector XPR 3+ electronics module must be
removed prior to bakeout at temperatures greater than
150°C (FC).
Do not turn on the Electron Multiplier (EM) at sensor
temperatures above 150°C. Turning on the EM at elevated
temperature could result in permanent damage to the
detector.
During or immediately after bakeout, the heating jacket
and metal surfaces in the vicinity of the heating jacket
may be extremely hot. These surfaces may exceed 100°C
at the maximum ambient operating temperature (50°C),
which will cause burns if touched directly without using
the proper personal protection equipment.
1 - 21
1.16.6 Electronics Module Installation
121.67 mm
60.32 mm
57.48 mm
114.96 mm
(4.79 in.)
(2.375 in.)
(2.263 in.)
4.526 in.
Transpector XPR 3+ electronics module must be mounted in an area where the
ambient temperature does not exceed 50°C and there is free air circulation around
the electronics module. Best performance will be achieved if the electronics
module is not located close to major heat sources where it is subjected to wide
temperature variations. (See Figure 1-19.)
After the sensor has been installed on the vacuum system, the
Transpector XPR 3+ electronics module must be mounted on the sensor:
1The Transpector XPR 3+ sensor mounting connector assembly includes a
mounting nut, a flat teflon ring, and an O-ring. When the mounting nut is
tightened, the O-ring compresses making a tight fit on the sensor housing. For
proper installation, place the nut over the end of the sensor and roll the O-ring
back to the groove on the sensor.
2Note the alignment pin or key pin and match the sensor feedthrough to the
electronics module and carefully slide the Transpector XPR 3+ module onto the
sensor. Ensure the Transpector XPR 3+ electronics module slides on fully.
Transpector XPR 3+ Operating Manual
3Hand tighten the mounting nut on the Transpector XPR 3+ sensor.
4Continue to section 1.16.8 and install the communications cable.
Figure 1-19 Electronics module dimensions
1 - 22
Loading...
+ 100 hidden pages
You need points to download manuals.
1 point = 1 manual.
You can buy points or you can get point for every manual you upload.