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OPERATING MANUAL

Transpector XPR 3+

Gas Analysis System

PN 074-687-P1A

Declaration Of Conformity

Page 1

Trademarks

The trademarks of the products mentioned in this manual are held by the companies that produce them.

INFICON

, Transpector® and FabGuard® are registered trademarks of INFICON GmbH.

Windows®, and Microsoft® are registered trademarks of Microsoft Corporation.

All other brand names, product names or trademarks belong to their respective holders.

Software Copyrights

This product contains embedded software protected under the following copyrights:

Disclaimer

The information contained in this Operating Manual is believed to be accurate and reliable. However, INFICON assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product.

Due to our continuing program of product improvements, specifications are subject to change without notice.

Transpector XPR 3+ Operating Manual

Table Of Contents

Trademarks

Software Copyrights

Disclaimer

Chapter 1

Getting Started

1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

1.2 Using This Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

1.2.1 Note and Hint Paragraphs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

1.2.2 Warning and Caution Paragraphs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.3 How To Contact Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.3.1 Returning Transpector XPR 3+ to INFICON . . . . . . . . . . . . . . . . . . . . . . . . 1-3

1.4 Quick Start . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

1.5 Purpose of Transpector XPR 3+ Gas Analysis System . . . . . . . . . . . . . . . . 1-3

1.6 General Description of Transpector XPR 3+

Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

1.7 Specifications for Transpector XPR 3+ Gas Analysis System . . . . . . . . . . . 1-4

1.8 Supplied Items . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

1.9 Physical Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

1.9.1 Physical Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

1.9.2 Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.9.3 Mounting Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.9.4 Ventilation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.9.5 Maintenance Access . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.10 Electrical Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.10.1 Required Supply Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.10.2 Current Rating . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.10.3 Electrical Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.11 Overvoltage Category . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

1.12 Required Vacuum. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

1.13 Environmental Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

1.13.1 Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

1.13.2 Altitude Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

1.13.3 Pollution Degree. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

1.13.4 Operating Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

TOC - 1

Transpector XPR 3+ Operating Manual

1.13.5 Humidity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8

1.14 Computer System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8

1.15 Software Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

1.16 Hardware Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8

1.16.1 Avoiding Process Metal Deposition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9

1.16.2 Installing the Isolation Valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

1.16.3 Mounting the Pirani Interlock Weldment Assembly . . . . . . . . . . . . . . . . . . 1-17

1.16.4 Mounting the Pirani Gauge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-18

1.16.5 Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-19

1.16.6 Electronics Module Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-22

1.16.7 Initial Start-up Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-23

1.16.8 Installing Ethernet Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-23

1.16.9 Connecting the 24 V(dc) Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-24

1.16.10 Connecting the Pirani Interlock Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-24

1.16.11 Attaching Heating Jackets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-25

1.17 Input/Output (I/O) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-25

1.17.1 Two Digital Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-26

1.17.2 One Status Relay Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-26

1.17.3 One Analog Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-28

Chapter 2

2.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

2.2 General Networking Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1

2.2.1 IP Addresses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

2.2.2 Subnetworking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3

2.3 Transpector XPR 3+ IP Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

2.3.1 Changing Transpector XPR 3+ IP Address . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

2.4 Connecting Transpector XPR 3+ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

2.4.1 Connecting a Single Transpector XPR 3+ . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

2.4.2 Installing Multiple Transpector XPR 3+ Sensors . . . . . . . . . . . . . . . . . . . . 2-11

Chapter 3

3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.2 Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-1

3.3 Patents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.4 Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-3

3.4.1 The Ion Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

3.4.2 The Quadrupole Mass Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-6

3.4.3 The Ion Detector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-8

Connecting Transpector XPR 3+

How The Instrument Works

TOC - 2

3.5 Scanning Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

3.6 The Zero Blast . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

3.7 High Pressure Effects. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

Chapter 4

4.1 How to Interpret the Result. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.1.1 Qualitative Interpretation of Mass Spectra . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.1.2 Quantitative Interpretation of Mass Spectra

4.1.3 Additional Information for Interpreting Mass Spectra . . . . . . . . . . . . . . . . . 4-15

Chapter 5

5.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

5.2 Precautions for Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

5.3 Pirani Interlock Protection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

5.4 FabGuard Control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

5.4.1 Transpector XPR 3+ Configuration— I/O Tab . . . . . . . . . . . . . . . . . . . . . . . 5-2

5.4.2 Transpector XPR 3+ BKM for Pirani Interlock Operation . . . . . . . . . . . . . . . 5-6

5.5 Using Transpector XPR 3+ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7

5.5.1 Leak Detection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7

5.5.2 Recipe Generation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7

5.5.3 Mass Scale Tuning. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8

5.5.4 Transpector XPR 3+ Filament . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8

5.5.5 High Pressure Electron Multiplier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8

Transpector XPR 3+ Operating Manual

Applications Guide

(Calculating Partial Pressures). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9

Transpector XPR 3+ Operation and Best Known Methods

Chapter 6

TOC - 3

Transpector XPR 3+ Low Pressure EM

6.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

6.2 Transpector XPR 3+ Filament Caution . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

6.3 Electron Multiplier Caution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

6.4 Quick Start . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2

6.5 Purpose of the Transpector XPR 3+ Low Pressure EM Option

Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2

6.6 General Description of Transpector XPR 3+ Low Pressure EM

Option Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3

6.7 Specifications for Transpector XPR 3+ Low Pressure EM Option

Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4

6.8 Supplied Items . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

6.9 XPR 3+ Low Pressure EM Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

6.10 XPR 3+ Low Pressure EM Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

Chapter 7

7.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1

7.2 Safety Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1

7.2.1 Toxic Material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1

7.2.2 Radiation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1

7.2.3 Electrical Voltages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-2

7.3 General Instructions For All Repair Procedures . . . . . . . . . . . . . . . . . . . . . . 7-2

7.4 Maintenance Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3

7.4.1 Bakeout of Quadrupole. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3

7.4.2 Spare Heating Jacket Part Numbers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3

7.5 Repair Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-4

7.5.1 Tools Required . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4

7.5.2 How to Determine if a Filament Kit Replacement is Required . . . . . . . . . . . 7-5

7.5.3 Filament Kit Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5

7.5.4 How to Determine the Condition of the Ion Source . . . . . . . . . . . . . . . . . . . 7-7

7.6 Mass Calibration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-9

7.6.1 Mass Alignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-9

7.7 Pirani Interlock Adjustment Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-10

7.7.1 INFICON PSG500 Adjustment Instructions . . . . . . . . . . . . . . . . . . . . . . . . 7-10

Transpector XPR 3+ Operating Manual

Maintenance

Chapter 8

8.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1

8.2 Symptom-Cause-Remedy Chart . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1

8.3 Communication Problems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-6

Chapter 9

Chapter 10

Chapter 11

11.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-1

11.2 Transpector XPR 3+ Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-1

11.3 Transpector XPR 3+ Spare Parts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-2

11.3.1 Preventative Maintenance Parts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-2

11.3.2 Replacement Spare Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-2

Diagnosing Problems

Bibliography

Glossary

Transpector XPR 3+ Accessories and Spare Parts

TOC - 4

Chapter 12

12.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-1

12.2 Mass Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-1

12.3 Detector Type. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-1

12.4 Resolution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-1

12.5 Temperature Coefficient. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-1

12.6 Sensitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-2

12.7 Minimum Detectable Partial Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-2

12.8 Maximum Operating Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-2

12.9 Maximum Sensor Operating Temperature . . . . . . . . . . . . . . . . . . . . . . . . . 12-2

12.10 Maximum Bakeout Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3

12.11 Operating Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3

12.12 Power Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3

12.13 Ethernet Communication Interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3

12.14 Relay Outputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3

12.15 Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3

12.16 Indicators (Green) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3

Transpector XPR 3+ Operating Manual

Specifications

Chapter 13

13.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-1

13.1.1 Ship Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-1

13.1.2 Electronics Module. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-2

13.1.3 Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-2

13.1.4 Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-3

13.1.5 Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-3

13.1.6 Heating Jacket System (Optional) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-3

13.1.7 Interlock Kit (Optional) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-3

13.1.8 Angle Valve (Optional) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-4

Index

Supplied Items

TOC - 5

Chapter 1 Getting Started

1.1 Introduction

Transpector XPR 3+ Gas Analysis System is a quadrupole-based mass spectrometer Residual Gas Analysis (RGA) instrument designed for use in high vacuum environments, up to 20 mTorr, for monitoring trace contaminants and process gases. Transpector XPR 3+ runs with the Windows using a member of the FabGuard

This chapter provides an overview of Transpector XPR 3+ Gas Analysis System. Topics include:

 the purpose of Transpector XPR 3+

 specifications

suite of programs.

Transpector XPR 3+ Operating Manual

operating system

 a list of supplied items

 installation instructions

 customer support contact information.

Software information can be found either in the FabGuard Explorer Operating Manual (PN 074-528-P1) or in the FabGuard help files (for all other FabGuard programs).

1.2 Using This Manual

Please read this Operating Manual before operating Transpector XPR 3+.

1.2.1 Note and Hint Paragraphs

NOTE: This is a note paragraph. Notes provide additional information about the

current topic.

HINT: This is a hint paragraph. Hints provide insight into product usage.

1 - 1

1.2.2 Warning and Caution Paragraphs

CAUTION

WARNING

WARNING - Risk Of Electric Shock

The following Caution and Warning paragraphs are used to alert the reader of actions which may cause either damage to the instrument or bodily injury.

This is an example of a Caution paragraph. It cautions against actions which may cause an instrument malfunction or the loss of data.

This is an example of a General Warning paragraph. It warns against actions which may cause bodily injury.

Transpector XPR 3+ Operating Manual

This is an example of a Electrical Warning paragraph. It warns of the presence of electrical voltages which may cause bodily injury.

1.3 How To Contact Customer Support

Worldwide customer support information is available under Contact >> Support Worldwide at www.inficon.com:

 Sales and Customer Service

 Technical Support

 Repair Service

If you are experiencing a problem with Transpector XPR 3+, please have the following information readily available:

 the Transpector XPR 3+ serial number

 a description of the problem

 an explanation of any corrective action already attempted

1 - 2

 the exact wording of any error messages

1.3.1 Returning Transpector XPR 3+ to INFICON

Do not return any component of Transpector XPR 3+ to INFICON before speaking with a Customer Support Representative and obtaining a Return Material Authorization (RMA) number. Transpector XPR 3+ will not be serviced without an RMA number.

Prior to being given an RMA number, a Declaration Of Contamination (DOC) form may need to be completed if the sensor has been exposed to process materials. DOC forms must be approved by INFICON before an RMA number is issued. INFICON may require that the sensor be sent to a designated decontamination facility, not to the factory.

1.4 Quick Start

Read this Operating Manual in full prior to operating Transpector XPR 3+. Then, follow the steps below to quickly start using Transpector XPR 3+.

1 Ensure that all supplied items have been received. See Chapter 13,

Supplied Items.

Transpector XPR 3+ Operating Manual

2 Install the hardware. See section 1.16, Hardware Installation, on page 1-8.

3 Install the communication cable. See section 1.16.8, Installing Ethernet

Communications, on page 1-23.

4 Install the software. Refer to the FabGuard Explorer Operating Manual for

information on installing the software.

NOTE: Transpector XPR 3+ requires FabGuard version 17.04.00 or higher for

operation.

1.5 Purpose of Transpector XPR 3+ Gas Analysis System

Transpector XPR 3+ Gas Analysis System is a quadrupole-based residual gas analyzer that operates at Physical Vapor Deposition (PVD) process pressures and has an Electron Multiplier that can operate at 20 mTorr operating pressures. The miniature quadrupole sensor analyzes gases by:

 ionizing some of the gas molecules

 separating the ions by their mass-to-charge ratio

 measuring the quantity of ions at each mass

The masses, unique for each substance, allow the identification of the gas molecules from which the ions were created. The magnitudes of these signals are used to determine the partial pressures (amounts) of the respective gases. Transpector XPR 3+ measures major components and impurities in a process with a 10 ppm detection limit.

1 - 3

Transpector XPR 3+ Operating Manual

Transpector XPR 3+ is an important aid in the efficient use of a high-vacuum system, detecting leaks, and contaminants. It can indicate the partial pressures of gases in processes occurring within a vacuum or other vessel, and therefore, can be used to investigate the nature of a process or monitor process conditions.

1.6 General Description of Transpector XPR 3+ Gas Analysis System

Transpector XPR 3+ Gas Analysis System is comprised of three parts:

Sensor

The sensor, which functions only in a high-vacuum environment with pressures below 2x10

The sensor itself is comprised of three components:

 the ion source (ionizer)

 the quadrupole mass filter

 the ion detector

The sensor is mounted on an electrical feedthrough flange, which is bolted to the vacuum chamber where the gas analysis measurements are made.

Electronics Module

The electronics module controls the sensor and communicates to the operating computer. The electronics module and sensor are sold matched in sets. The electronics module attaches to and is supported by the sensor.

Software

The software controls the electronics module and displays the data from the sensor.

-2

Torr (2.66 x 10-2 mbar) [2.66 Pascals].

1.7 Specifications for Transpector XPR 3+ Gas Analysis System

See Chapter 12 for Transpector XPR 3+ Gas Analysis System specifications.

1.8 Supplied Items

See Chapter 13 for items that are packaged with Transpector XPR 3+ Gas Analysis System.

1 - 4

1.9 Physical Requirements

The following sections show the physical dimensions, weight, mounting requirements, ventilation requirements, and the perimeter required for maintenance access for Transpector XPR 3+.

1.9.1 Physical Dimensions

Figure 1-2 shows the overall physical dimensions of Transpector XPR 3+ in inches

[millimeters].

Figure 1-1 Sensor dimensions

Transpector XPR 3+ Operating Manual

Figure 1-2 Physical dimensions of Transpector XPR 3+

1 - 5

1.9.2 Weight

Transpector XPR 3+ electronics module weighs 1.62 kg (3.58 lbs).

1.9.3 Mounting Requirements

The sensor is mounted to a high-vacuum chamber with a standard 2.75 in. (69.9 mm) O.D. ConFlat flange.

The electronics module attaches to and is supported by the sensor. Transpector XPR 3+ can be mounted in any position. See section 1.16.5, Sensor

Installation, on page 1-19 for information on installing Transpector XPR 3+ system.

1.9.4 Ventilation Requirements

At least 25.4 mm (1 in.) of open space around the Transpector XPR 3+ electronics module must be maintained for proper ventilation.

1.9.5 Maintenance Access

Easy access to Transpector XPR 3+ should be maintained for installation and maintenance activities.

Transpector XPR 3+ Operating Manual

1.10 Electrical Power Requirements

Transpector XPR 3+ must be connected to a source of power as specified in the following sections.

1.10.1 Required Supply Voltage

20 to 30 V(dc), 24 V(dc) typical

1.10.2 Current Rating

1.25 A maximum

1.10.3 Electrical Connection

Latching, 4-pin DIN connector, internally isolated from system ground. See Figure 1-3.

1 - 6

Figure 1-3 Transpector XPR 3+ connections

Electrical Connection

1.11 Overvoltage Category

Transpector XPR 3+ Operating Manual

Overvoltage Category II (per EN61010-1)

1.12 Required Vacuum

Transpector XPR 3+: < 2.0x10-2 Torr (2.66x10-2 mbar) [2.66 Pascals]

1.13 Environmental Requirements

The following paragraphs explain the use, altitude range, humidity, pollution degree, and operating temperature for Transpector XPR 3+.

1.13.1 Use

Transpector XPR 3+ is designed for indoor use only.

1.13.2 Altitude Range

Transpector XPR 3+ can be used up to a maximum altitude range of 2000 m (6561 ft.).

1.13.3 Pollution Degree

Pollution Degree 2 (per EN61010-1)

1 - 7

1.13.4 Operating Temperature

Transpector XPR 3+ is designed to operate within a temperature range of 5°C to 50°C (41°F to 122°F).

1.13.5 Humidity

Transpector XPR 3+ is designed to operate in an environment with up to 98% relative humidity.

1.14 Computer System Requirements

Refer to the FabGuard Explorer Operating Manual (PN 074-528-P1) for computer system requirements.

1.15 Software Installation

Refer to the FabGuard Explorer Operating Manual (PN 074-528-P1) for information on installing the software and setting up the protocols necessary to ensure proper software operation.

Transpector XPR 3+ Operating Manual

1.16 Hardware Installation

The following steps must be performed to install Transpector XPR 3+ Gas Analysis System.

1 If the optional Isolation Valve option was purchased with the

Transpector XPR 3+ install the Isolation Valve, see section 1.16.2 on page

1-11.

2 If the optional Pirani Gauge Interlock was purchased with the

Transpector XPR 3+ mount the Pirani Interlock Weldment Assembly, see

section 1.16.3 on page 1-17.

3 If the optional Pirani Gauge Interlock was purchased with the

Transpector XPR 3+ mount the Pirani Gauge, see section 1.16.4 on page

1-18.

4 Install the Transpector XPR 3+ Sensor, see section 1.16.5 on page 1-19.

5 Install the Transpector Electronics Module, see section 1.16.6 on page 1-22.

6 Install the Communications cables, see section 1.16.8 on page 1-23.

7 Install the 24 V DC Power Supply, see section 1.16.9 on page 1-24.

8 If the optional Pirani Gauge Interlock was purchased with the

Transpector XPR 3+ install the Transpector XPR 3+ Interlock Cable, see

section 1.16.10 on page 1-24.

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9 If the optional Pirani Gauge Interlock and/or the optional Isolation Valve were

CAUTION

purchased with the Transpector XPR 3+ attach the Heating Jackets, see

section 1.16.11 on page 1-25

10 Install the Software.

1.16.1 Avoiding Process Metal Deposition

Conductive deposits on the ceramic ion source plate from the process can cause electrical short circuits and a general failure of Transpector XPR 3+. The use of a 90 valve between the process and the sensor will alleviate this condition. The installation of a 90 in ConFlat Flanges.

The sensor is installed on a vacuum system with a 2.75 in. DN40 ConFlat flange. ConFlat flanges, and similar compatible types made by other manufacturers, are used for attaching devices to ports on high vacuum systems. If there are no concerns with the installation of this type of flange, proceed to section 1.16.5.1,

Attaching the Sensor to the Vacuum Chamber, on page 1-19.

Transpector XPR 3+ Operating Manual

valve is described

NOTE: If the system does not have a port with a compatible mating flange, an

adapter will be necessary.

To install these flanges without leaks, follow proper operating procedures. These flanges are sealed with a metal gasket and can be heated for bakeout to temperatures of up to 200°C. For bakeout temperatures when a sensor is installed, see Table 1-1 on page 1-21.

1.16.1.1 Assembling ConFlat Flanges

To assemble a pair of ConFlat flanges:

1 Wipe the sealing areas of the flanges with a laboratory towel using a clean

solvent, such as water free alcohol. These areas must be clean and free of particulate matter.

Do not touch any surface on the gasket and flange faces with bare fingers. If it is necessary to touch any of these parts, always wear clean linen, nylon, powder free latex or vinyl laboratory gloves.

1 - 9

Transpector XPR 3+ Operating Manual

CAUTION

Flange

Copper Gasket

2 Install the copper gasket between the two flanges. (See Figure 1-4.) Always

use a new gasket. Do not attempt to use gaskets more than once.

Figure 1-4 Gasket and flange assembly

3 Bring the two flanges together making sure that the gasket fits in the recess in

both flanges. Flange faces should be parallel. If the gasket is properly seated, it should not be possible to slide the two flanges laterally with respect to each other.

4 Install supplied silver-coated stainless steel bolts in the bolt holes of the flanges

and finger-tighten.

NOTE: If the factory-supplied silver-coated stainless steel hardware is not

used and the flanges are going to be baked, coat the bolt threads with

an anti-seize compound (FelPro

C 100 or equivalent).

Do not get any of the anti-seize compound on the gaskets or vacuum parts of the flange.

5 After the bolts have been finger-tightened and the flange faces are parallel,

tighten the bolts gradually and evenly in a star pattern until the flange faces are brought into even contact with each other.

1 - 10

1.16.2 Installing the Isolation Valve

WARNING

Tool

Interlock Weldment

IPN 914-416-G1

16.71 in. (42.5 cm)

Pirani Gauge

8.3 in.

(21 cm)

7.2 in.

(18 cm)

Transpector XPR 3+

8.0 in.

(20.4 cm)

The 90° Isolation Valve is located between the Tool Chamber and Transpector XPR 3+.

IPN 918-401-P1

Manual

Air Operated

Heating Jackets

Transpector XPR 3+ should be installed on a 90° high-conductance isolation valve (1.5 in. [38 mm] outer diameter) mounted on the process chamber. This prevents line-of-sight deposits, from the plasma, from reaching the Transpector XPR 3+ Sensor. (See Figure 1-5.) The isolation valve may be provided by the user, or purchased from INFICON (see below). The isolation valve must be bakeable and needs to be fitted with a heating jacket designed for baking the valve.

 1½" Right Angle Valve Hand Operated with Heating Jacket:

IPN 914-024-G1

 1½" Right Angle Valve Air Operated with 24 V(dc) Solenoid and

Heating Jacket: IPN 961-025-G1

 Valve Heating Jacket (150 °C; 120/230 V(ac) Operation):

IPN 914-407-P1

Figure 1-5 Typical Connection of a Transpector XPR 3+ to the process chamber

Transpector XPR 3+ Operating Manual

1.16.2.1 Notes for Air Operated Valve

The INFICON supplied air operated valve is a 1/8 in. ported, 3-way, single solenoid, 2-position spring return, Normally Open (NO) or Normally Closed (NC), general purpose air valve. It is configured for 2-way, NC use, whereby the EXH port is plugged and the air supply (60 - 100 psig) must be connected to the port labeled IN. (See Figure 1-6.)

The air pressure supplied to the valve must not exceed 100 psig.

1 - 11

CAUTION

The air pressure supplied to the valve must be at least

EXH

OUT

EXH

2 WAY NORMALLY CLOSED

PLUGGED

INLET

AIR

60 psig.

Figure 1-6 INFICON supplied air valve

Transpector XPR 3+ Operating Manual

1.16.2.2 Port Identification for 2-Way, Normally Closed Use

See Figure 1-7.

IN . . . . . . . . . . . . . . . . . . . . . . . . . . . Pressure supply port

OUT . . . . . . . . . . . . . . . . . . . . . . . . . Delivery port to valve

EXH . . . . . . . . . . . . . . . . . . . . . . . . . Exhaust port, plugged

Figure 1-7 Port identification

1 - 12

1.16.2.3 Valve Parts List

WARNING

Item Description

1 Solenoid Coil

2 Connector Gasket

3 Connector

4 Connector Elbow

5Nut

6 Washer

7 Compression Ring

8Screw

This valve has an operational voltage rating of 24 V(dc) +10% to -15%.

Figure 1-8 Valve parts list

Transpector XPR 3+ Operating Manual

1 - 13

1.16.2.4 Wiring Instructions

1 Remove the screw (8).

Figure 1-9 Removing connector assembly

Transpector XPR 3+ Operating Manual

2 Remove the clear plastic connector elbow (4).

Figure 1-10 Removing connector elbow

1 - 14

3 Remove the connector (3) from the solenoid assembly, be careful to not

remove the connector gasket (2).

Transpector XPR 3+ Operating Manual

Figure 1-11 Removing connector terminal

4 Remove the black plastic nut (5) from the connector elbow (4), the washer (6)

and the compression ring (7) can stay in place.

Figure 1-12 Connect elbow assembly

5 Take the MMSP Valve/Relay Interface Cable (IPN 600-1450-P2) and run the

cables through the nut (5), washer (6), compression ring (7) and the connector elbow (4).

1 - 15

Transpector XPR 3+ Operating Manual

Figure 1-13 Cable and connector elbow feed

6 Connect the red and black wires to terminals 1 and 2 in either order. This can

be done by soldering the wires in place or using the appropriate screw terminals on the connector (3) assembly.

Figure 1-14 Connecting the red and black wires to the terminal

1 - 16

7 Press the connector (3) back into the connector elbow (4) screw the nut (5)

securely into place. Connect the connector (3) to the solenoid coil (1) noting the connection scheme NOTE: When fitting the connector (3) into the connector elbow (4) note the orientation of the connection to the solenoid coil (1). Ideally the elbow should be facing away from the inlet air connection point as it can interfere with the connection of the inlet air.

Transpector XPR 3+ Operating Manual

Figure 1-15 Connecting the connector

8 Screw the assembly back into the solenoid coil using the screw (8) removed in

step 1.

Figure 1-16 Screw the assembly back into the solenoid coil

1.16.3 Mounting the Pirani Interlock Weldment Assembly

Transpector XPR 3+ Interlock Weldment Assembly with a Pirani gauge port has a

1.5 in. (38 mm) inner diameter for the Transpector XPR 3+ sensor. Both CF-40 flanges rotate to provide flexibility in orientation of the Pirani gauge with respect to the Transpector electronics module, the isolation valve, and the tool.

1 Evaluate, or pre-fit, Transpector XPR 3+ on the tool port to determine the

orientation of the Transpector electronics module with respect to the tool, and the Pirani gauge with respect to a side of the Transpector electronics module. Typically, the Pirani gauge is placed under the Transpector electronics module if the axis of Transpector XPR 3+ is horizontal, as shown in Figure 1-17.

NOTE: For measurements of 2x10

of the Transpector XPR 3+ filament, the Pirani gauge retains its accuracy in any orientation.

-2

Torr or less, that are involved in protection

1 - 17

Transpector XPR 3+ Operating Manual

Figure 1-17 Orientations for mounting an Transpector XPR 3+ on a tool

2 Attach the Interlock Weldment Assembly to the 1½ in. Right Angle Valve with a

Cu gasket using ¼-28 x 1¼ in. 12 pt SS silver plated bolts, with the nut plates on the Valve side. Tighten the bolts finger tight.

3 Check for orientation and alignment: the Pirani gauge tube should be oriented

so that the VCR fitting is facing away from the valve.

4 Tighten all the bolts evenly and gradually in a star pattern until the flange faces

come into contact.

1.16.4 Mounting the Pirani Gauge

The Pirani gauge is UHV compatible with a SS body, ceramic electrical feed-through and a 8-VCR female mounting flange.

1 Connect the Pirani gauge flange to the port on the Interlock Weldment

Assembly using a Ni-8-VCR -2 silver plated Ni gasket.

2 Adjust the orientation of the Pirani gauge and tighten the gland finger tight. Use

a 1-1/16 in. open end wrench for the female nut and a 15/16 in. open end for the male nut.

NOTE: For Ni gaskets, tighten an additional 1/8 turn (45 degrees) beyond finger

tight with the wrenches to seal the Pirani gauge fitting. Rotation of the Pirani gauge can be inhibited by rotating the male nut and keeping the female nut wrench fixed.

1 - 18

1.16.5 Sensor Installation

CAUTION

Do not touch any surface on the vacuum side of the sensor with bare fingers. If it is necessary to touch any of these parts, always wear clean linen, nylon, powder free latex or vinyl laboratory gloves.

Before installing the sensor on your system, check for any signs of loose or broken parts.

Do not attempt to clean the sensor in any kind of solvent. Cleaning the sensor requires its disassembly. If the sensor is contaminated and needs cleaning, contact INFICON.

Transpector XPR 3+ Operating Manual

1.16.5.1 Attaching the Sensor to the Vacuum Chamber

The sensor may be mounted in any position when attaching it to the vacuum vessel or chamber.

1 Attach the Transpector XPR 3+ Sensor Flange to the Pirani Interlock Weldment

Assembly CF-40 Flange with a Cu gasket using ¼-28 x 1¼ in. 12pt SS silver plated bolts, with the nut plates on the Transpector XPR 3+ side of the Flange. Tighten the bolts finger tight.

2 Tighten all the bolts evenly and gradually in a star pattern until the flange faces

come into contact.

1 - 19

Transpector XPR 3+ Operating Manual

CAUTION

Avoid mounting the sensor near any magnetic fields greater than two gauss.

It is important that the connection between the sensor and the vacuum chamber does not interfere with gas exchange to ensure that the gas composition accurately reflects that existing in the vacuum chamber.

If materials are evaporated or coatings are deposited in the vacuum chamber, the sensor must be protected against the deposition of these materials on its surfaces by installing a baffle or deflector.

In systems which are baked, include the sensor in the bakeout zone or provide it with separate heaters.

Dimensions of the quadrupole sensors are shown in Figure 1-18.

Figure 1-18 Sensor dimensions

1 - 20

Transpector XPR 3+ Operating Manual

CAUTION

WARNING

The silver-plated bolts used for mounting the sensor to the vacuum system must be oriented such that the bolt heads are on the same side of the sensor as the electronics box. Otherwise, there may be interference between the black INFICON Transpector mounting nut and sensor mounting hardware.

Maximum bakeout temperature for sensors is shown in

Table 1-1.

Table 1-1 Sensor maximum bakeout temperature

Maximum Operating

Sensor

Transpector XPR 3+ 150°C 200°C

Temperature

Maximum Bakeout

Temperature

Electronics Removed

Transpector XPR 3+ electronics module must be removed prior to bakeout at temperatures greater than 150°C (FC).

Do not turn on the Electron Multiplier (EM) at sensor temperatures above 150°C. Turning on the EM at elevated temperature could result in permanent damage to the detector.

During or immediately after bakeout, the heating jacket and metal surfaces in the vicinity of the heating jacket may be extremely hot. These surfaces may exceed 100°C at the maximum ambient operating temperature (50°C), which will cause burns if touched directly without using the proper personal protection equipment.

1 - 21

1.16.6 Electronics Module Installation

121.67 mm

60.32 mm

57.48 mm

114.96 mm

(4.79 in.)

(2.375 in.)

(2.263 in.)

4.526 in.

Transpector XPR 3+ electronics module must be mounted in an area where the ambient temperature does not exceed 50°C and there is free air circulation around the electronics module. Best performance will be achieved if the electronics module is not located close to major heat sources where it is subjected to wide temperature variations. (See Figure 1-19.)

After the sensor has been installed on the vacuum system, the Transpector XPR 3+ electronics module must be mounted on the sensor:

1 The Transpector XPR 3+ sensor mounting connector assembly includes a

mounting nut, a flat teflon ring, and an O-ring. When the mounting nut is tightened, the O-ring compresses making a tight fit on the sensor housing. For proper installation, place the nut over the end of the sensor and roll the O-ring back to the groove on the sensor.

2 Note the alignment pin or key pin and match the sensor feedthrough to the

electronics module and carefully slide the Transpector XPR 3+ module onto the sensor. Ensure the Transpector XPR 3+ electronics module slides on fully.

Transpector XPR 3+ Operating Manual

3 Hand tighten the mounting nut on the Transpector XPR 3+ sensor.

4 Continue to section 1.16.8 and install the communications cable.

Figure 1-19 Electronics module dimensions

1 - 22

1.16.7 Initial Start-up Procedure

Ethernet Port

Once the Transpector XPR 3+ sensor, electronics, valve and Pirani are installed, the valve should be opened to allow Transpector XPR 3+ to obtain high vacuum. It is strongly recommended that Transpector XPR 3+ be kept under high vacuum conditions for at least eight hours before the filament is turned on. It is also strongly recommended that Transpector XPR 3+ be baked out with the supplied heating jacket (which operates at 150 °C), for a period of at least eight hours. This eight hour minimum bakeout reduces residual water vapor levels that may be higher due to local surface outgassing effects. These recommendations should be followed whenever the Transpector XPR 3+ sensor is exposed to atmosphere for long periods of time and will serve to increase sensor life.

1.16.8 Installing Ethernet Communications

Communication cables are required to connect Transpector XPR 3+ to the computer. Ethernet communication is the default communication method for Transpector XPR 3+. Communication cables are required to connect Ethernet communication uses standard RJ45, Cat5e Ethernet cables. To use Ethernet communications, attach the supplied Cat5e Ethernet cable to the LAN port on the back of the Transpector XPR 3+ electronics module. (See Figure 1-20.)

Transpector XPR 3+ Operating Manual

For networking information, see section 2.2.

Figure 1-20 Ethernet port

1 - 23

1.16.9 Connecting the 24 V(dc) Power Supply

Auxilliary I/O

1 Connect the +24 V (dc) power supply cable to the 24V connector on the

Transpector XPR 3+ electronics module by sliding back the latch, installing the cable, and then releasing the latch.

NOTE: The latch locks the connector to the electronics module, and must be

slid back to detach the cable from the Transpector XPR 3+ electronics module.

2 Plug the AC line cord into the mating IEC320 connector on the power supply

module.

NOTE: The AC Line Input for the +24 V(dc) Power Supply must be rated:

90-260 V(ac), 40 W maximum, 47-63 Hz.

3 Plug the AC line cord into an appropriate AC outlet.

4 Verify that the green power indicator on the Transpector XPR 3+ back panel is

illuminated. If the green indicator is not illuminated, check the power connections.

Transpector XPR 3+ Operating Manual

1.16.10 Connecting the Pirani Interlock Cable

The Pirani gauge is fully powered by the Transpector XPR 3+ Auxilliary I/O connection. Install the RJ-45 connection of the interlock cable into the gauge and connect the 15-pin D-Sub connection to the Auxilliary I/O port of Transpector XPR 3+. See Figure 1-21.

Figure 1-21 Assembled interlock

1 - 24

1.16.11 Attaching Heating Jackets

WARNING

Heating Jackets for the Transpector XPR 3+ Pirani Interlock Weldment and the Isolation Valve are installed separately but share a common power cord.

The dual element heater can be operated with 120/230 V(ac) by choosing the power cord with the appropriate power source connector. Part numbers for the heaters and power cords are:

 Dual element heater for Interlock Weldment

IPN 914-415-P1

 Dual element heater for Isolation Valve

IPN 914-407-P1

 Power cord for 120 V(AC) operation

IPN 600-1487-P1 and 068-0433

 Power cord for 230 V(AC) operation

IPN 600-1487-P2 and 068-0434

The operating temperature of the heater is nominally 150 °C. Thermal over-temperature protection is built into the heater.

Transpector XPR 3+ Operating Manual

During or immediately after bakeout, the heating jacket and metal surfaces in the vicinity of the heating jacket may be hot. These surfaces may exceed 100 °C at the maximum ambient operating temperature (i.e., 50 °C), which will cause burns if touched directly without using the proper personal protection equipment.

1.17 Input/Output (I/O)

This section describes the input and output (I/O) for Transpector XPR 3+.

The Transpector XPR 3+ electronics module supports the following I/O functions through the AUX I/O connector located on the back panel. See Figure 1-22.

1 - 25

1.17.1 Two Digital Inputs

CAUTION

Logic Inputs 1 and 2 are by default set to remotely control emission status. Connecting Pin 14 (Logic Input 1) to Pin 15 (Ground) will turn on the emission. Connecting Pin 13 (Logic Input 2) to Pin 15 will turn off the emission. See Table 1-2.

Table 1-2 Digital inputs

Emission ON PIN 14

Emission OFF PIN 13

GND PIN 15

Controlling emission through the digital inputs bypasses all software or hardware interlocks. When using digital inputs for controlling Transpector XPR 3+ emission, develop an interlock that will not allow the emission to turn on if the pressure is too high for operation of Transpector XPR 3+.

Transpector XPR 3+ Operating Manual

1.17.2 One Status Relay Output

One status relay output is active (closed) when the emission is on. See Table 1-3.

Table 1-3 Status relay output

EMISSION ON Relay closed. PIN 2 and PIN 1connected

EMISSION OFF Relay open

CONTACT RATING 24 V(dc) at 0.5 A

1 - 26

Transpector XPR 3+ Operating Manual

Figure 1-22 Pinout connectors

1 - 27

1.17.3 One Analog Input

One analog input is differential and can handle inputs between 0 to +10 volts and common mode voltages of 100 volts. See Table 1-4.

Table 1-4 Analog inputs

ANALOG INPUT 1 (+) PIN 9

ANALOG INPUT 1 (-) PIN 10

Transpector XPR 3+ Operating Manual

NOTE:

The analog input is supported through FabGuard software. If the Pirani interlock option is configured the Pirani gauge reading will use analog input 1.

1 - 28

Chapter 2 Connecting Transpector XPR 3+

2.1 Introduction

Transpector XPR 3+ uses Ethernet as its default communications method.

Transpector XPR 3+ has an IP address and a MAC address.

IP addresses are used as a means of identifying individual devices on a network. IP addresses are unique on a network but not universally, that is, meaning that only one device on a network can have a specific IP address but two devices on separate networks can have the same IP address.

MAC addresses are another identifier that are unique for each device. MAC addresses are never duplicated. FabGuard uses IP addresses to locate and identify sensors on a network.

2.2 General Networking Information

Transpector XPR 3+ Operating Manual

This section will discuss some of the general networking variables that can affect the connection of Transpector XPR 3+.

2.2.1 IP Addresses

IP addresses can be set either manually or automatically:

 Static (manual) IP addresses are set by the user and are manually changeable

by the user

 Dynamic (automatic) IP addresses are automatically set by a Host

INFICON recommends using Static IP addresses for Transpector XPR 3+ but allows for Dynamic IP addresses set through DHCP (Dynamic Host Communication Protocol).

NOTE: When using Static IP addresses, a block of addresses should be reserved

for Static use and prohibited from being assigned by the DHCP server (Host). This will avoid duplicate IP address conflicts from occurring.

2 - 1

Transpector XPR 3+ Operating Manual

CAUTION

Since FabGuard uses the IP address to identify each connected Transpector XPR 3+, the IP address must not change during operation of Transpector XPR 3+.

Using DHCP, the host may generate a new IP address every time Transpector XPR 3+ is taken offline and then returns online.

DHCP may also change the IP address automatically if there is an IP address conflict on the network.

If the Transpector XPR 3+ IP address is randomly changed during data acquisition, FabGuard will not automatically reconnect to the Transpector XPR 3+ sensor because it does not know the newly assigned IP address. This will lead to loss of communication and loss of data.

Static IP addresses do not change unless the IP address is manually changed. Static IP addresses help protect Transpector XPR 3+ from losing communication and data.

Transpector XPR 3+ uses IPv4 IP addresses. IPv4 IP addresses consist of 32 bits that are traditionally displayed in dot-decimal notation which consists of four decimal numbers each ranging from 0 to 255 separated by dots. An example of an IP address in dot-decimal notation would be 192.168.1.100. Each part represents an octet. Normally, the IP address consists of a Network Prefix and a Host Protocol.

2 - 2

2.2.2 Subnetworking

A subnetwork (or subnet) is a logically visible subdivision of an IP (Internet Protocol) network. Splitting an IP network into multiple subnets is referred to as subnetting. Subnetting sets the region of the IP address that will be used as a Network Prefix for all IP addresses inside of a subnet. This is accomplished through a subnet mask. Different types of subnet masks and their implications to IP addresses are shown in Table 2-1.

Table 2-1 Subnetting

IP address 192.168.1.104 192.168.1.105 192.168.1.150

Subnet mask 255.255.255.0 255.255.0.0 255.255.255.192

Network prefix 192.168.1.0 192.168.0.0 192.168.1.128

Host Protocol 0.0.0.104 0.0.1.105 0.0.0.22

As seen in Table 2-1, the subnet masks determine which octets of the IP address are used as the network prefix.

Transpector XPR 3+ Operating Manual

Example 1 Example 2 Example 3

In order for two network devices to communicate, they must be on the same subnet. This means that they must not only be connected to the same internet network, but must also have the same network prefix. If two devices have two different network prefixes, this means that the two devices are on different subnets.

2.3 Transpector XPR 3+ IP Address

By default, Transpector XPR 3+ ships with an IP address of 192.168.1.100 with a subnet mask of 255.255.0.0.

NOTE: When connecting Transpector XPR 3+ to an existing local network, there

must be a static IP address for each Transpector XPR 3+ being installed. Contact the network administrator for IP address assignments.

2.3.1 Changing Transpector XPR 3+ IP Address

There are two different methods of changing the Transpector XPR 3+ IP address.

The first method utilizes the onboard Transpector Web UI to change the IP address. Instructions for changing the IP address via Transpector Web UI can be found in section 2.3.1.1.1 on page 2-5.

Alternatively, the IP address can be changed through a standalone executable as discussed next in section 2.3.1.1 on page 2-4.

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Transpector XPR 3+ Operating Manual

2.3.1.1 Using the INFICON Mass Spectrometer Search Utility to Change the IP Address

The alternative method of changing the Transpector XPR 3+ IP address employs the INFICON Mass Spectrometer Search Utility (IMSSU), a standalone executable found on the software installation disk and the RGA Manuals CD that ships with each Transpector XPR 3+. To use the IMSSU, locate and double-click INFICONMassSpecSearch.exe. The program does not need to be installed to work. Upon double-clicking, the IMSSU will display as shown in Figure 2-1.

Figure 2-1 INFICON Mass Spectrometer Search Utility

2 - 4

When the IMSSU first opens, nothing will be displayed. The IMSSU detects all Transpector XPR 3+ installed on the network regardless of IP address. The IMSSU will start automatically, or it can be manually started by clicking Search (Clears List). The IMSSU will then display the:

 Genus (which will display XPR 3+ for Transpector XPR 3+ sensors)

 Transpector XPR 3+ Serial Number

 Current IP address of Transpector XPR 3+

 MAC address of Transpector XPR 3+

 DHCP status of Transpector XPR 3+ (On or Off)

 Description (which is user editable)

2.3.1.1.1 IMSSU Capabilities

The IMSSU has multiple built-in functions. All of these functions are available by right-clicking on the sensor inside of the IMSSU. The right-click menu can be seen in Figure 2-2, and the different functions are described in the following sections.

Figure 2-2 IMSSU right-click menu

Changing Transpector XPR 3+ IP Address

To change the IP address, right-click on the sensor and select Change IP Address. The TCP/IP Properties window will display, see Figure 2-3.

Figure 2-3 IMSSU TCP/IP Properties window

Transpector XPR 3+ Operating Manual

The TCP/IP Properties window will display:

 Transpector XPR 3+ MAC Address

 the current Transpector XPR 3+ IP address

 a Change To text box, to enter the new Transpector XPR 3+ IP address

 a selection of either DHCP On or DHCP Off

To change the IP address, type the new IP address in the Change To box and click Apply. Transpector XPR 3+ will automatically reboot and will return online with the

new IP address.

Alternatively, the IP address can be automatically assigned to Transpector XPR 3+ by selecting DHCP On (this is not recommended).

Launching Transpector Web UI

Transpector Web UI can be launched from inside of the IMSSU.

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Transpector XPR 3+ Operating Manual

Find Device

Find Device On will flash the power LED so that the device can be located. The

LED will flash for up to 60 seconds and then return to the fully On state.

Find Device Off will stop the flashing if executed within 60 seconds of turning the Find Device On.

Show Settings

Click Show Settings to open a display on the right-side of the IMSSU that will display multiple settings of Transpector XPR 3+. This is an excellent tool for troubleshooting. The following settings are displayed:

 Serial Number

 Gateway

 IP Address

 DHCP Status

 MAC Address

 Description

 Subnet Mask

 Name

 Description

 Structure Version

 Name

 Box Type

 Port

 Firmware Version

 TCP/IP Source

2 - 6

2.3.1.2 Changing the Computer IP Address

An alternative to changing the Transpector XPR 3+ IP address is to change the host computer’s IP address to allow for communication between the host computer and Transpector XPR 3+. To change the computer’s IP address, follow these instructions:

2.3.1.2.1 Windows 7 Instructions

NOTE: Changing the IP address of the host computer requires administrator

rights. You will need to use an administrator account to change the IP address.

1 Click Start to display the Start menu, then click Control Panel. Start is located

on the taskbar on the Windows 7 desktop. See Figure 2-4.

Figure 2-4 Start menu

Transpector XPR 3+ Operating Manual

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Transpector XPR 3+ Operating Manual

2 In the Network and Internet group. click View network status and tasks.

See Figure 2-5.

Figure 2-5 View network status and tasks

3 On the network status and tasks window, click Change adapter settings. See

Figure 2-6.

Figure 2-6 Change adapter settings

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Transpector XPR 3+ Operating Manual

4 If the host computer is connected to Transpector XPR 3+ through the Ethernet

port of the computer, right-click Local Area Connection and select Properties. See Figure 2-7.

Figure 2-7 Changing adapter settings

5 Select Internet Protocol Version 4 (TCP/IPv4), then click Properties.

See Figure 2-8.

Figure 2-8 TCP/IPv4

6 In the TCP/IPv4 properties menu, select Use the following IP address.

See Figure 2-9.

Figure 2-9 Use the following IP address

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Transpector XPR 3+ Operating Manual

7 In IP address: type 192.168.1.XXX. The last octet can be any number as long

as it is unique to the network. See Figure 2-10.

8 In Subnet mask: type 255.255.0.0.

9 Click OK.

Figure 2-10 Changing the computer IP address

10 The IP address will now be set to the manual IP address chosen in step 7.

Exit all of the menus and then connect to Transpector XPR 3+.

11 To change the IP address back to its default settings, follow steps 1 through 6

and return the IPv4 properties to their original settings.

2.4 Connecting Transpector XPR 3+

Before connecting Transpector XPR 3+, decide:

1 Is Transpector XPR 3+ going to be set up on:

 a private network (installed directly on to either a computer or a router that

is not hooked up to the internet), or

 an internal network where multiple computers are connected with ac c e s s t o

the internet?

2 Is more than one Transpector XPR 3+ sensor being installed at the same time?

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Transpector XPR 3+ Operating Manual

CAUTION

2.4.1 Connecting a Single Transpector XPR 3+

2.4.1.1 Single Transpector XPR 3+ Direct Connection Installation

When installing a single Transpector XPR 3+ on a private network or directly connected to a computer, changing the IP address of Transpector XPR 3+ is only necessary if the computer being used to connect to Transpector XPR 3+ has a different network prefix than Transpector XPR 3+.

The network prefix of Transpector XPR 3+ is 192.168.x.x. The IP address of the host computer used to control Transpector XPR 3+ must have a subnet mask of

255.255.0.0 and a network prefix of 192.168.x.x.

If this is not the case, change the computer IP address to match the network prefix of Transpector XPR 3+. For example, giving the computer an IP address of

192.168.1.101 will allow Transpector XPR 3+ to communicate directly with the computer. Refer to section 2.3.1.2, Changing the Computer IP Address, on page

2-7.

2.4.1.2 Installing a Single Transpector XPR 3+ on an Existing Local Network

When installing a single Transpector XPR 3+ on an existing local network, the default IP address of Transpector XPR 3+ may not be compatible with the network.

Transpector XPR 3+ can have either a Static IP address (recommended) or a Dynamic IP address set by DHCP (not recommended).

Contact your network administrator for information regarding valid IP addresses and have them assign an IP address for Transpector XPR 3+. See section 2.3.1,

Changing Transpector XPR 3+ IP Address, on page 2-3.

2.4.2 Installing Multiple Transpector XPR 3+ Sensors

Since each Transpector XPR 3+ is shipped with the same default IP address, the IP address of each Transpector XPR 3+ must be changed one at a time so that each sensor has a unique IP address. See section 2.3.1, Changing

Transpector XPR 3+ IP Address, on page 2-3.

Do not connect multiple Transpector XPR 3+ to a network at the same time without first changing the IP addresses. Since the IP addresses are not unique, connecting multiple units at the same time will cause IP address conflicts on the network.

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Transpector XPR 3+ Operating Manual

2.4.2.1 Installing Multiple Transpector XPR 3+ Directly to a Host Computer

If multiple Transpector XPR 3+ sensors are to be connected to a single host computer and not to an existing local area network, a private local network must be created. Transpector XPR 3+ will have to be installed on either a router or Ethernet switch. The router or switch is then connected to the host computer through the LAN port of the router/switch.

2.4.2.2 Installing Multiple Transpector XPR 3+ on an Existing Local Network

If multiple Transpector XPR 3+ sensors are to be connected to an existing local network, use an Ethernet switch instead of a router.

NOTE: Routers can cause conflicts with local networks because the router will

attempt to set IP addresses for all network connected devices.

Since Transpector XPR 3+ sensors will be network connected devices, each sensor must have an IP address assigned to it by a network administrator. After changing each IP address manually, connect all of the sensors to the Ethernet switch and connect the switch to the local network.

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Chapter 3 How The Instrument Works

3.1 Introduction

This section explains how Transpector XPR 3+ produces its measurements.

3.2 Overview

Transpector XPR 3+ Gas Analysis System is a miniature quadrupole partial pressure analyzer which measures the partial pressures of gases in a mixture. It is controlled by an external computer. Transpector XPR 3+ Gas Analysis System consists of these parts: a sensor that functions only in a high-vacuum environment, an electronics module which operates the sensor, and the software which resides on an external computer and controls the electronics module.

Transpector XPR 3+ Operating Manual

NOTE: The high-vacuum environment means pressures below 2.6 Pascals, or

3.3 Patents

The following patents are applicable to the design and operation of Transpector XPR 3+ system.

"Method of manufacturing a miniature quadrupole using electrode-discharge machining" [US 5,852,270]

Abstract

A method for manufacturing a miniature quadrupole from a single blank includes fastening four lengthwise insulating strips into parallel slots formed in the blank. A lengthwise axial hole is cut through the blank for the guide wire used in the EDM process. The blank is machined lengthwise into four electrodes using the EDM process so that the electrodes are spaced apart in a width-wise direction and each electrode is connected to an adjacent electrode by one of the insulating strips. During the cutting, the electrodes are held in place by the insulating strips.

approximately 2x10

-2

Torr [approx. 2.6x10-2 mbar].

3 - 1

Transpector XPR 3+ Operating Manual

"Method for linearization of ion currents in a quadrupole mass analyzer" [US 5,889,281]

Abstract

A method of linearizing the sensitivity of a quadrupole mass spectrometric system to allow the sensor to more accurately report partial pressures of a gas in high pressure areas in which the reported data is effected by a number of loss mechanisms. According to the invention, correction factors can be applied empirically or software in a quadrupole mass analyzer system can be equipped with correcting software to expand the useful range of the mass spectrometer.

"Ion collector assembly" [US 6,091,068]

Abstract

An ion collector includes a Faraday Cup collector having a conductive surface disposed substantially parallel to and spaced from the axis of an entering particle beam containing charged and uncharged particles. A grounded plate disposed in the path of the particle beam allows incoming uncharged particles to impinge thereupon. Preferably, the application of a suitable potential to the conductive plate manipulates incoming charged ions to impinge upon either the electron multiplier or the Faraday collector. The ion collector can further include an electron multiplier used in conjunction with the Faraday collector to allow separate modes of operations. Application of a suitable first potential to the electron multiplier can cause charged particles to be deflected directly to the Faraday collector in one mode, and application of a second potential can cause deflection of charged particles to the electron multiplier, with the effects of the uncharged particles on the output of the detector being minimized.

3 - 2

"Apparatus of measuring total pressure and partial pressure with common electron beam" [US Patent Application 20020153820]

Abstract

An apparatus for determining both total and partial pressures of a gas using one common electron beam includes a partial pressure ionization region and a total pressure ionization region separated by a grid or aperture. A filament produces a plurality of electrons which are focused into an electron beam by a repeller and an aperture or an anode. The interactions between the electron beam and molecules of said gas within the partial pressure and total pressure regions produces first and second ion streams. A focus plate is biased such that the first ion stream is directed to an analyzer which calculates the partial pressure of the gas. An ion collector collects the ions from the second ion stream, where the resulting reference current is used to determine the total pressure of the gas.

3.4 Sensor

The Transpector XPR 3+ sensor (see Figure 3-2) analyzes gases by ionizing some of the gas molecules (in the ion source), separating the ions by mass (in the mass filter), and measuring the quantity of ions at each mass (in the detector). The masses, unique for each substance, identify the gas molecules from which the ions were created. The magnitudes of these signals are used to determine the partial pressures (amounts) of the respective gases.

The Sensor consists of three main parts:

 ion source (ionizer)

 quadrupole mass filter

 ion detector

All of these parts are mounted on an electrical feed-through flange, which is bolted to the vacuum chamber where the gas analysis measurements are made.

The sensor works only in a high-vacuum environment because the ions, once created, must not collide with other gas molecules as they move through the sensor; otherwise, they might not be detected. The miniature design of Transpector XPR 3+ allows it to operate at pressures higher than those necessary for traditional RGA sensors.

Transpector XPR 3+ Operating Manual

3 - 3

Figure 3-1 Transpector XPR 3+ sensor

Electrometer

-1275 V

-50 to -500 V

Micro-Channel

Plate

Ions

Collector

Plate

Electrons

Total Pressure

Ion Chamber

Partial Pressure

Ion Chamber

Dual Filament

2O3

/ Ir

Hyperbolic Quadrupole 18mm Long

Transpector XPR 3+ Operating Manual

3 - 4

3.4.1 The Ion Source

The Transpector XPR 3+ sensor’s ion source, optimized for detecting residual gases in a vacuum system, has a fairly open construction that facilitates the flow of gas molecules into the ionizing region.

The ion source of Transpector XPR 3+ operates on the same principles as the larger ion sources of standard open ion source sensors. However, Transpector XPR 3+ is built with a dual ion source which supplies one ion stream to the quadrupole filter and a second ion stream to a total pressure collector. This design allows the total pressure collector to be well isolated from other electrodes in the ion source so that the small ion currents from the Transpector XPR 3+ source can be measured accurately.

Inside the ion source, a heated filament emits electrons, which bombard the gas molecules, giving them an electrical charge. While this charge may be either positive or negative, Transpector XPR 3+ detects only positive ions. Once a molecule is charged, or ionized, electric fields can be used to manipulate it.

The filament is an iridium wire with yttrium-oxide coating. The Transpector XPR 3+ filament can be protected by the Pirani Interlock, which controls emission within safe operating parameters.

Transpector XPR 3+ Operating Manual

The term “emission current” refers to the stream of electrons emitted by the filament. The filament is heated with a DC current from the emission regulator circuit, with the resulting temperature of the filament used as the means of controlling the emission current.

The potential (voltage) on the anode is positive with respect to the potential on the filament. The potential difference between the filament and the anode determines the kinetic energy (usually called the electron energy) of the emitted electrons. The electron energy in turn determines how gas molecules will ionize when struck by the electrons.

A three-sided repeller is centered around the filament and is connected to the low voltage side of the filament. This geometry and potential focuses the electrons through the partial pressure region and on into the total pressure ion region as shown in Figure 3-2. The ions formed within the cage on the anode are pulled away by the potential on the focus lens and formed into a beam. (The focus lens is sometimes called an extractor, since it extracts the ions from the region in which they are created.) The focus lens also serves to focus the ion beam into the quadrupole. To attract positive ions, the focus lens is biased negatively with respect to the anode.

The ion beam generated in the partial pressure chamber passes through the hole in the focus lens and is injected into the mass filter. The ion beam generated in the total pressure chamber strikes the exit lens and is neutralized, resulting in a current flow. The magnitude of this current is related to the pressure in the ion source, and

3 - 5

can therefore, be used as a measure of the total pressure. When this current

CAUTION

exceeds a preset level, the voltages operating the sensor are turned off, thus helping to protect the sensor from damage due to an over-pressure condition.

Although this over-pressure protection feature using the internally measured total pressure is available in Transpector XPR 3+, it is recommended to use only the Pirani Interlock for controlling emission to the sensor. Exposing the Transpector XPR 3+ sensor to over-pressure or trying to turn the emission on at high pressures exceeding the Transpector XPR 3+ operating specifications will cause the filaments to prematurely fail.

3.4.2 The Quadrupole Mass Filter

The ions produced in the ion source are injected into the mass filter, which rejects all ions except those of a specific mass-to-charge ratio. Most ions contain only one unit of charge. In Transpector XPR 3+, the mass filter is a quadrupole type, to which is applied a combination of RF and DC potentials. The RF frequency and amplitude determine the mass, and the RF/DC ratio determines the filter selectivity. See Figure 3-2.

Transpector XPR 3+ Operating Manual

Figure 3-2 Sensor’s Quadrupole Mass Filter

The mass filter’s four rods (hence the term “quadrupole”) are alternately charged to direct ions of specific masses down through the center, deflecting all larger, and smaller masses (hence the term “mass filter”).

The mass filter consists of four parallel rods, or poles, in a square array. The rods, and the insulators in which they are mounted, form an extremely precise mechanical assembly. The distance between the center of the square array and the

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Transpector XPR 3+ Operating Manual

XV 2ftcos U PZ++=

YV 2ft +cos U–PZ+=

closest rod surface is known as the quadrupole radius, with the symbol r0. Ideally, the rod should have a hyperbolic shape (towards the center of the assembly) rather than round. The Transpector XPR 3+ quadrupole is machined to have the hyperbolic shape and thus has an optimum electric field for mass filtering ions.

Opposite rods are electrically connected together. The ions are directed into the space between the poles, in a direction nominally parallel to the length of the rods. There the ions are separated according to their mass-to-charge ratios by the lateral forces resulting from the potentials applied to the poles.

The applied potentials consist of an RF component and a DC component. The RF potential on one set of rods is out of phase by 180° with respect to the RF potential on the other set of rods, but of the same amplitude. For one pair of rods, the “X” pair, the DC potential is positive. For the other, the “Y” pair, the DC potential is of the same magnitude but negative. The DC and RF potentials are referenced to a “center voltage” (sometimes called the “pole zero”). The following equations summarize the potentials applied to the rods:

[1]

[2]

where:

V is the RF amplitude,

f is the RF frequency,

t is time,

U is the DC potential,

PZ is the pole zero.

The RF component removes the low-mass ions from the beam. Ions of sufficiently low mass have their motions remain in phase with that of the applied RF. These ions will gain energy from the field and oscillate with increasingly large amplitudes. Eventually, as they travel along the length of the rods, they will strike one of the rods and be neutralized. On the other hand, high-mass ions are focused by the RF component to an area close to the quadrupole’s long axis, the “Z” axis.

The DC component is superimposed on the RF to remove high-mass ions from the beam. The DC field deflects the high-mass ions toward the negative poles, opposing the focusing effects of the RF field. Eventually, these high-mass ions strike the negative rods and are neutralized. By a suitable choice of DC-to-RF ratio, the mass filter can be made to discriminate against both high and low-mass ions to the desired degree.

The kinetic energy directed along the Z axis of the mass filter (usually called the ion energy) is primarily dependent on the difference between the potential at which the ions were formed (approximately the anode voltage), and the pole zero. The ion energy is usually only slightly modified by the electric field (the “fringing” field)

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Transpector XPR 3+ Operating Manual

V 14.438M f2r

between the source exit aperture and the quadrupole. Imbalances in the amplitude of the two phases of RF applied to the rod pairs, and of the DC voltages also applied, result in a further modification of the ion energy.

The mass of the ions passed by the filter is determined by the RF amplitude, the RF frequency, and the quadrupole radius, as shown by the following equation:

[3]

where:

V is the peak-to-peak RF amplitude in Volts,

M the mass of the ion in atomic mass units (AMU) per electron charge,

f the RF frequency in megahertz,

the quadrupole radius in centimeters.

The mass of ions transmitted ( (provided mass ions will be made to oscillate in phase with the RF field and thus gain sufficient energy to strike the poles. Of course, the DC voltage must also be increased to maintain the high-mass rejection properties of the filter. A mass spectrum can therefore be obtained by sweeping the RF amplitude, along with the DC voltage.

The variation in the efficiency of transmission of ions through the filter with mass is discussed in section 3.5 on page 3-10. Following that, section 3.6 on page 3-10 discusses the behavior of the filter at very low masses where the applied voltages approach zero.

f is constant). As the RF amplitude is increased, progressively higher

3.4.3 The Ion Detector

The ion detector region of the sensor consists of the quadrupole exit lens and the detector itself. Often, the quadrupole exit aperture is biased negatively with respect to the anode, focusing ions that have been transmitted through the quadrupole into the detector element. The detector can be a simple Faraday Cup (FC), an Electron Multiplier (EM), or a combination of both. Transpector XPR 3+ is a combination of Faraday Cup and Electron Multiplier.

M) is directly proportional to the RF amplitude

3.4.3.1 The Faraday Cup Detector

3 - 8

The Faraday Cup detector is typically a metal plate or a cup-shaped electrode, on which the ion beam impinges. Ions strike the detector and are neutralized, thus drawing a current from the circuitry connected to the electrode. Usually, the current flow that results is exactly equal to the incident ion current. In the Transpector family of instruments, the Faraday Cup is at ground potential.

Transpector XPR 3+ Operating Manual

The sensitivity for Transpector XPR 3+ instruments operating in Faraday Cup mode is typically > 4x10

-7

amps per Torr. The minimum detectable partial

pressures, therefore, can be as small as 1x10

3.4.3.2 The Electron Multiplier (EM) Detector

The Electron Multiplier (EM) acts as an in situ preamplifier for improved sensitivity. Although there are several different types of EM, their operating principals are the same. Incoming ions are accelerated into the input of the EM by a high negative voltage. When an ion strikes the surface of the EM, one or more secondary electrons are emitted. These electrons are accelerated to a second surface which is at a more positive potential, where additional electrons are generated.

This process repeats itself until a pulse of electrons emerges from the output of the EM and is collected on a Faraday Cup. The result is that as many as a million electrons or more can be produced by each incident ion. The current from a Faraday detector is positive (for positive ions) while an EM detector puts out a negative signal.

The ratio of the electron output current to the incident ion current is known as the EM gain. The gain primarily depends on the EM type, the voltage applied to the EM input, the voltage applied across the EM, the condition of the EM, and, to a lesser extent, the mass and chemical nature of the incident ion. In general, the EM gain decreases as the ion mass increases.

-9

Torr in Faraday Cup mode.

The advantage of the EM Sensor is its higher sensitivity, thus making it possible to measure lower partial pressures. A typical Transpector XPR 3+ has an FC sensitivity of about 4x10 pressure of 1x10

-9

has a sensitivity of greater than 4x10 detectable partial pressure of 6x10

-7

amps/Torr, resulting in a minimum detectable partial

Torr. Operating in EM mode, the Transpector XPR 3+ Sensor

-3

amps/Torr, resulting in a minimum

-12

Torr.

The main disadvantage of the EM Sensor is that the EM gain is less stable and is less precisely known for quantitative measurements.

3.4.3.3 The Transpector XPR 3+ Microchannel Plate, High Pressure Electron Multiplier

Transpector XPR 3+ uses a Microchannel plate (MCP) High Pressure Electron Multiplier (HPEM)/Faraday Cup detector. The MCP is a small plate (approximately 1/2" (12.7 mm) square by 1/16" (1.6 mm) thick) consisting of an array of over 10,000 very small continuous dynode multipliers, each with a 0.001" (0.03 mm) inside diameter. Refer to Figure 3-2 on page 3-6.

The main advantage of the MCP over other multiplier designs is its smaller size. Also, the required operating voltage is lower.

The MCP does not have to be kept under a vacuum. However, because of the large surface area, the MCP can absorb water vapor and should be protected from exposure to high levels of moisture over extended periods.

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Transpector XPR 3+ Operating Manual

When the MCP is grounded, the ions exiting the quadrupole through the exit lens are collected on the Faraday Cup. The resulting current is conducted through the signal output to the detection amplifier. When -1275 V is applied to the front of the MCP, and between -500 and -50 V is applied to the back of the MCP, the ions impinge on the front side of the MCP. The resulting electron current is collected by the same Faraday electrode.

The front of the MCP is fixed at -1275 V in the EM mode for two reasons. First, the ion beam exiting the quadrupole can be strongly divergent, -1275 V ensures that the entire ion beam is deflected into the MCP. Second, if the ion’s kinetic energy as it strikes the entrance of the EM is too low, severe mass discrimination effects can occur. The -1275 V avoids both issues.

Use the minimum MCP voltage required to obtain the necessary peak amplitudes and/or signal-to-noise ratio—a gain of 300 is recommended. Operating at higher voltages than necessary will result in premature aging of the Electron Multiplier, requiring early replacement. As the MCP ages, the voltage needed to get a specific EM gain will increase.

3.5 Scanning Characteristics

As described above, the quadrupole acts as a mass filter for a mixed beam of ions, rejecting those of both high and low mass, while passing those of an intermediate mass. The selectivity of the mass filter is expressed in terms of resolution, R, which is numerically given by the ratio of the center mass, M, to the width, M (both in AMU), of the pass band. Since the number of the ions passed by the filter falls off gradually as the edge of the pass band is approached, the width is defined at the point where the ion current falls to some specified fraction (usually 1/2 or 1/10) of the maximum value. The width of the pass band is determined by the DC-to-RF ratio.

While the quadrupole drive circuits can be designed so that R varies in any desired manner with M, it is usually most convenient to keep M constant at a value, which ensures adequate separation of masses that are 1 AMU apart. This mode of scanning is called Constant M. As a result, R is proportional to M, and therefore the efficiency with which ions of mass M are transmitted through the quadrupole decreases with M. Thus, the sensitivity of the sensor decreases as M increases.

3.6 The Zero Blast

When the mass filter is tuned to very low masses, the RF and DC voltages applied to the rods approach zero. The quadrupole then ceases to act as a filter, and a large current of unseparated ions is detected. This current is called the “zero blast."

3 - 10

The zero blast, present in all quadrupole-based sensors, can interfere with the



----=

observation of masses 1 and 2 when significant quantities of higher-mass ions are present. In some instruments, the magnitude of the zero blast is concealed by preventing the voltages from reaching zero.

3.7 High Pressure Effects

Since Transpector XPR 3+ is designed to operate at pressures in the milliTorr range, it has some special operating features. The principal difference is that the interaction of ions with the neutral gas molecules in the sensor cannot be neglected.

The interaction of ions with ambient gas molecules is described by the mean-free-path property of the gas environment. The mean-free-path is the average distance that an ion travels before interacting with a gas molecule. The numerical value of the mean-free-path is dependent on the type of ion, the type of gas atmosphere and the gas pressure (i.e. the concentration of gas molecules).

Transpector XPR 3+ Operating Manual

[1]

where:

 is the mean-free-path,

K is a constant depending on the ion and gas species,

P is the pressure of the gas

The mean-free-path grows proportionally shorter as the gas pressure in the sensor increases. The effect of collisions of ions with the gas molecules is to prevent the ions from reaching the collector and being measured. Thus the sensor output is no longer directly proportional to the concentration of the gas species being measured.

3 - 11

Transpector XPR 3+ Operating Manual

------



----–





exp=

------P

X K

----





–





exp=

IFP1AP+exp=

The fraction of ions that are able to travel a distance X in a gas is given as:

[2]

where:

n is the remaining number of ions after travelling distance X,

is the original number of ions.

Therefore:

[3]

That is, the fraction of ions in the beam traveling from the ion source decreases with increasing pressure, P, and increasing length, X, of the ion path. This relationship indicates that a high pressure sensor must be made small in order to avoid the loss of ions.

Since the fraction of ion current that is lost is predictable, the data can be linearized by mathematically compensating for the current loss, provided that the current output An additional linearization term, (1+AP), is used to compensate for the effects of ion space charge in the ion source. Transpector XPR 3+ is equipped to make this linearizing calculation using the total pressure reading of the ion source. The linearization factors for each Transpector XPR 3+ Sensor for the gas being measured and the electron energy used. The linearized ion current ( source,

where:

I of the ion source is proportional to the partial pressure of the ion of interest.

F=X/K and A, the ionizer constant, are empirically determined

) is proportional to the original ions in the

, is displayed using the equation:

[4]

I is the measured raw ion current,

P is the Transpector XPR 3+ total pressure,

A is the ionizer constant,

F is the linearization factor.

3 - 12

Chapter 4 Applications Guide

4.1 How to Interpret the Result

This section explains how to interpret the measurements Transpector XPR 3+ produces. It is divided into three main parts:

 Section 4.1.1, Qualitative Interpretation of Mass Spectra, on page 4-1, explains

how to determine which substances are present in the gas sample being analyzed.

 Section 4.1.2, Quantitative Interpretation of Mass Spectra (Calculating Partial

Pressures), on page 4-9, shows how to estimate how much of each substance

is present.

 Section 4.1.3, Additional Information for Interpreting Mass Spectra, on page

4-15, provides additional information that may help you interpret mass spectra.

Transpector XPR 3+ Operating Manual

For a discussion of how Transpector XPR 3+ produces its measurements, refer to

Chapter 3, How The Instrument Works.

4.1.1 Qualitative Interpretation of Mass Spectra

The basic graphical output of a residual gas analyzer is the mass spectrum. A mass spectrum is a pattern of peaks on a plot of ion intensity as a function of ion mass-to-charge ratio. Each chemical substance has a characteristic mass spectrum. Different instruments will give slightly different spectra for the same substance. The particular characteristics of the ionizer, mass filter, and detector, not to mention the manner in which the sample is introduced into the mass spectrometer, all influence the spectrum that is produced.

Rarely will a mass spectrum be obtained for a pure substance. Most of the time (especially for residual gas analyzers), the spectrum obtained will be a composite of the individual substances which together comprise the actual sample present. (See Figure 4-1.)

4 - 1

Figure 4-1 Mass spectrum

Transpector XPR 3+ Operating Manual

Figure 4-1 is an example of a mass spectrum with an arbitrarily selected number

of 170 scans. The top graph shows the data taken during the 170 scans and the selected mass peaks. The bottom graph is a trend analysis showing the most important masses verses time. The prominent peaks for air are mass 28 from Nitrogen, mass 32 from Oxygen, mass 40 from Argon, and mass 18 from water vapor.

4.1.1.1 Ionization Process

When a sufficiently energetic electron strikes a gas molecule, there are many processes that can occur, just some of which are summarized in Table 4-1.

Table 4-1 Electron impact ionization processes

XYZ + e- 

XYZ

+ 2e

XYZ

+ 3e

XY + Z

+ Z + 2e

+ YZ + 2e

X + YZ

XZ + Y

+ Y + 2e

+ 2e

(1)

(2)

(3)

(4)

(5)

(6)

(7)

(8)

4 - 2

Transpector XPR 3+ Operating Manual

In all cases, the reactants are a high energy electron, e-, and a gas molecule, XYZ. The products of the first reaction are the molecule with a single electron removed (the so-called parent ion) and two low energy electrons. In the second reaction, two electrons are removed from the gas molecule, resulting a doubly charged ion. Triply (or even more highly) charged ions are also possible, provided the incident electron has enough energy.

Reactions 3 through 8 are all examples where the original molecule is broken into fragments, at least one of which is positively charged (negative ions can also be produced in this manner). Only the positive ion fragments are observed; the neutral (i.e., uncharged) fragments are not detected. The mass spectrum obtained when the parent molecule breaks apart under electron impact is commonly referred to as the fragmentation pattern (or, sometimes, the cracking pattern). For example, a fragmentation pattern for Nitrogen shows

14N15N+

(29 AMU).

14N+

(14 AMU), 14N

(28 AMU), and

In general, peaks from multiply charged species will be less intense than those for the corresponding singly charged ion. For example, the doubly charged peak for argon is typically less than one fifth as intense as the singly charged peak (it should be noted that this intensity ratio is sensitive to the incident electron energy).

There are some situations when it is difficult to determine whether the ion is singly or multiply charged. When a molecule is composed of two atoms of the same element the typical partial pressure analyzer cannot distinguish between the singly charged one-atom fragment ion and the doubly charged two-atom molecular ion, which will both have the same mass-to-charge ratio. Refer to Figure 4-2 on page

4-6; the peak at 28 AMU is the parent ion, N

spectrum if the peak at 14 AMU is from N

. It is not discernible from this

or N

. It has been demonstrated, by

other means, that the 14 AMU peak in the nitrogen spectrum is from the singly charged fragment ion.

Most ions (with the important exception of complex hydrocarbons) have masses very close to integer values. When the mass of an ion is not evenly divisible by the number of charges on it, the mass-to-charge ratio will not be an integer. Thus, Ar

will appear at 13.33 AMU, while F

will show up at 9.5 AMU.

4 - 3

4.1.1.2 Isotope Ratios

An additional cause of multiple peaks in the mass spectrum of a pure substance is that most (but not all) elements are composed of more than one isotope. For example, 99.63% of all nitrogen atoms in nature have a mass of 14 AMU; only

0.37% have a mass of 15 AMU. Carefully examine the nitrogen spectrum in Figure

4-2 on page 4-6. The largest peak at 28 AMU is the parent ion, N

29 AMU is the isotope peak, the parent peak since there are two nitrogen atoms in the ion, each one of which has a 0.37% chance of being 15 AMU.

Some elements have many intense isotopes (e.g., xenon is 0.096% mass 124,

0.090% mass 126, 1.92% mass 128, 26.44% mass 129, 4.08% mass 130, 21.18% mass 131, 26.89% mass 132, 10.44% mass 134, and 8.87% mass 136.

Isotope ratios, like fragmentation patterns, are a very useful aid in recognizing specific materials. Under normal partial pressure analyzer ionization conditions, the peak height ratios for the various isotopes of an element will be the same as the ratios of their natural abundance’s. That is, the probability of ionizing, for example, the mass 35 isotope of chlorine ( ionizing the mass 37 isotope ( from HCl will be 3.07 to 1 (75.4% / 24.6%).

Transpector XPR 3+ Operating Manual

. The peak at

14N15N+

, and is 0.74% (two times 0.37%) as high as

Cl) is the same as the probability of

Cl). Thus, the peak height ratio of mass 35 to 37

For a listing of the isotopic ratios for the lighter elements, see Table 4-2. For a complete listing of the natural abundances for the isotopes of all the elements, see the Handbook of Chemistry and Physics from CRC Press.

4 - 4

Table 4-2 Isotope ratios

Isotope Ratios

Relative

Element Mass No.

Abundance

H1 99.985

20.015

He 3 0.00013

4 ~100.0

B 10 19.78

11 80.22

C12 98.892

13 1.108

N 14 99.63

15 0.37

O16 99.759

17 0.0374

18 0.2039

F19 100.0

Ne 20 90.92

21 0.257

22 8.82

Na 23 100.0

Al 27 100.0

Si 28 92.27

29 4.68

30 3.05

P31 100.0

S 32 95.06

33 0.74

34 4.18

36 0.016

Cl 35 75.4

37 24.6

Ar 36 0.337

38 0.063

40 99.600

Transpector XPR 3+ Operating Manual

4 - 5

4.1.1.3 Electron Energy Effects

As was previously mentioned, the exact fragmentation pattern observed will depend on the energy of the bombarding electrons. Figure 4-2 (from a paper by W. Bleakney, Physical Review, 36, p. 1303, published in 1930) graphs the number of argon ions (of different charge states) produced per incident electron per Torr of gas pressure as a function of electron energy.

Figure 4-2 Electron energy effects

Transpector XPR 3+ Operating Manual

This graph shows the number of argon ions, N, formed per electron per Torr at 0 °C versus electron energy.

The appearance potential (i.e., the minimum electron energy required to produce a specific ion) for Ar

is 15.7 eV. The number of argon ions produced rises steeply with energy until a maximum is reached at about 55 eV. As the electron energy rises above this level, the rate of Ar

The appearance potential for Ar

production slowly decreases.

is 43.5 eV, and the ion production rate does not

maximize until the electron energy exceeds 100 eV. The appearance potential for

is approximately 85 eV, while the appearance potential for Ar4+ is over 200 eV.

Transpector XPR 3+ normally is set for 40 eV (Low Emission) setting to produce

ions. The low electron energy (40 eV) model of Transpector XPR 3+ operation suppresses production of being principally a measure of H

36Ar2+

ions at mass 18, resulting in the mass 18 current

4 - 6

4.1.1.4 A Qualitative Interpretation Guide

To use a partial pressure analyzer to identify unknown substances, you must recognize three characteristics: fragmentation patterns, multiply charged ions, and isotope ratios. Simple spectra are, in general, relatively easy to interpret and will yield useful identifications. The analysis of complicated mixtures of substances is much more difficult.

Table 4-3 is intended as a spectrum interpretation guide which may be of use when

first examining an unknown spectrum. The guide lists the masses of peaks, possible ion identities for each of these masses, and common sources for each of these ions.

NOTE: This list is by no means all-inclusive.

Table 4-3 Spectrum Interpretation Guide

Spectrum Interpretation Guide

AMU # Chemical Symbol Sources

1 H Water F or Hydrogen F

Transpector XPR 3+ Operating Manual

3 HD,

, D Hydrogen, Deuterium (2H)

H Hydrogen-Deuterium, Tritium (3H)

4 He Helium

5 No known elements

6 C Doubly Ionized

7N DI

8O DI

N (Rare)

O (Rare)

C (Rare)

9 No known elements

10 Ne,

BDI

11 Ne, 11BDI

Ne (Rare), BF3, BCl

Ne (Rare), 11BF3, BCl

12 C Carbon, Carbon Monoxide F, Carbon Dioxide F

13 CH,

14 N, CH

15 CH

16 O, CH

C Methane F, Carbon Isotope

, NH

Nitrogen, Methane F or Note 1

Methane F or Note 1

Oxygen or Carbon Monoxide F, Ammonia

17 OH, NH

18 H

O Water

Water F, Ammonia F

19 F Fluorine or Freon F

20 Ar

, Ne, HF Argon Dl, Neon, Hydrofluoric Acid

4 - 7

Transpector XPR 3+ Operating Manual

Table 4-3 Spectrum Interpretation Guide (continued)

Spectrum Interpretation Guide

AMU # Chemical Symbol Sources

Ne, CO

Neon, DI CO

24 C

25 C

26 C

27 C

28 N

29 CH

30 C

H See Note 1

2H2

2H3

, CO, C2H4, Si Nitrogen, Carbon Monoxide, Ethylene P, Silicon

3CH2

2H6

31 P, CH

32 O

, S Oxygen, Sulfur, Methanol P

CN See Note 1, Hydrogen Cyanide F

, Al, HCN See Note 1, Aluminum, Hydrogen Cyanide

, NO Ethane P, Nitric Oxide

OH, Oxygen, Methanol F,

See Note 1

Ethane F or Ethanol F or Isopropyl Alcohol

33 HS Hydrogen Sulfide F

34 H

S, 34S, O

Hydrogen Sulfide P, Sulfur Isotope, Oxygen Isotope

35 Cl Chlorine Isotope, See Note 2

36 HCl,

Ar, C

Cl, C3H Chlorine Isotope, See Note 2, Hydrocarbons

HCl, C3H

Hydrochloric Acid, Argon Isotope, Hydrocarbons

Hydrochloric Acid or See Note 2, Hydrocarbons

4 - 8

39 C

3H3

40 Ar, C

41 C

42 C

43 C

44 CO

45 CH

46 CH

47 C

48 HC

3H5

3H6

3H7

3CH2

See Note 3, Hydrocarbons

3H4

Argon, See Note 1, Hydrocarbons

See Note 1, Hydrocarbons

, CH3CO Note 1, Acetone F or Methyl Ethyl Ketone F

, C3H

Carbon Dioxide, See Note 3

O Ethanol F or Isopropyl Alcohol F

OH Ethanol P

Cl See Note 2

Cl, SO See Note 2, Sulfur Dioxide F

Table 4-3 Spectrum Interpretation Guide (continued)

abIab

=

AbIab=

Spectrum Interpretation Guide

AMU # Chemical Symbol Sources

49 C37Cl See Note 2

50 C

NOTES: (1) Fragments of several hydrocarbons, such as mechanical pump oil,

Cl, CF2, C4H

diffusion pump oil, vacuum grease, cutting oil, and organic solvents. (2) Fragments of several chlorinated hydrocarbons, such as carbon tetrachloride, tichloroethylene, and many freons. (3) Fragments from both straight chain hydrocarbons and benzene ring hydrocarbons. (4) F = Fragment ion; P = Parent ion; DI = Doubly ionized

See Note 2, Freon F, Note 3

4.1.2 Quantitative Interpretation of Mass Spectra (Calculating Partial Pressures)

Partial pressure is defined as the pressure of a designated component in a gas mixture. By Dalton’s Law, the sum of all the partial pressures is the total pressure. The partial pressure analyzer is designed so that the height of a peak in a mass spectrum is proportional to the number of ions giving rise to that peak. Also by design, the number of ions is more or less proportional to the partial pressure of the substance giving rise to that peak (over some specified operating pressure range). Therefore, the height of a peak is proportional to the partial pressure of the substance giving rise to that peak.

Transpector XPR 3+ Operating Manual

The following equation shows the relationship between the partial pressure of substance determined by measuring the ion current at mass b:

[1]

The partial pressure of substance a is symbolized by PP proportionality constant for the peak at mass b from substance a, and I

, while Kab is the

is the ion

current at mass b from substance a.

The proportionality constant, K

, depends on the nature of the substance being

detected and on the characteristics of the partial pressure analyzer. The substance-dependent part is called the material factor, M instrument-dependent part is called the analyzer factor, A

. The

, and depends primarily

on the ion mass, b. Therefore, the original equation [1] can therefore be rewritten as follows:

[2]

4 - 9

Transpector XPR 3+ Operating Manual



------------------------------=

The material factor, Mab, depends on the fragmentation pattern for the particular substance, the fragmentation pattern for a reference gas (usually nitrogen), and the ease with which the substance can be ionized relative to the same reference gas. The relationship involved is shown in equation [3]:

[3]

The term FF the fraction of the total current of all ions from substance a which have a mass b. Finally, XF

=1). That is, it is the ratio of total ion current (for all masses) from substance

a to the total ion current from nitrogen, both measured at the same true partial pressure. Both fragmentation factors and ionization probabilities depend strongly on the energy of the ionizing electrons. If the correct values of these factors are not known for the exact conditions of the particular analyzer being used, they can be approximated using published values for other conditions with, generally, only a small loss in accuracy.

Fragmentation factors can be calculated from fragmentation patterns given in the general references cited in Chapter 9. Other valuable references include the Index of Mass Spectral Data from ASTM, and EPA/NIH Mass Spectral Data Base by Heller and Milne and an extensive library of spectra is available from the National Institute of Standards and Technology (formerly the National Bureau of Standards).

Table 4-4 lists the fragmentation factors (FF) for the major peaks for selected

substances.

NOTE: Actual fragmentation factors vary significantly depending especially on the

is the fragmentation factor for substance a at mass b. It is equal to

is the ionization probability of substance a, relative to nitrogen (i.e.,

ionizer, electron energy, and mass filter turning. For best accuracy, measure fragmentation factors with the same instrument used for the analysis, under the same tuning conditions.

4 - 10

Transpector XPR 3+ Operating Manual

Table 4-4 Typical fragmentation factors for the major peaks of some common substances

Mass FF Mass FF Mass FF

Acetone (CH

CO Helium He Oxygen O

3)2

43 .63 4 1.00 32 .95

58 .23 16 .05

42 .04 Hydrogen H

27 .03 2 1.00 Toulene C2H5CH

91 .46

Argon Ar 92 .34

40 .83 Krypton Kr 60 .07

20 .17 84 .45 65 .05

86 .13

Benzene C

6H6

82 .10 Trichlorethylene C2HCl

78 .53 83 .10 95 .22

51 .11 130 .22

52 .11 Methane CH

132 .21

50 .10 16 .46 97 .14

15 .40 60 .13

Carbon Dioxide CO

14 .07

44 .70 13 .04 Water H

28 .11 18 .75

16 .06 Methanol CH

OH 17 .19

12 .01 31 .43 1 .05

32 .23 16 .02

Carbon Monoxide CO 29 .18

28 .91 28 .03 Xenon Xe

12 .05 132 .26

16 .03 Neon Ne 129 .26

20 .90 131 .22

Ethanol C

OH 22 .10 134 .11

2H5

31 .49 136 .09

45 .21 Nitrogen N

27 .09 28 1.00

29 .07 14 .12

29 .01

4 - 11

Transpector XPR 3+ Operating Manual

Ionization probability factors can be approximated by substituting the relative ion gauge sensitivities for various gases. Table 4-5 gives relative ion gauge sensitivities for some common gases.

NOTE: This table lists relative ionization gauge sensitivities for selected

molecules. The data was compiled from Empirical Observations on the Sensitivity of Hot Cathode Ionization Type Vacuum Gauges by R. L. Summers (NASA Technical Note NASA TN D5285, published in 1969). Similar, although more limited, lists of ionization sensitivities can be found in the books by O’Hanlon (Chapter 8, Section 1.1) and Drinkwine and Lichtman (Table I, page 5).

HINT: Actual ionization probabilities vary significantly depending especially on the

ionizer and the electron energy. For best accuracy, measure the relative ionization probability using a hot cathode ionization gauge (calibrated for nitrogen) to monitor a known pressure of the substance of interest. The ratio of the gauge reading to the known true pressure is the relative ionization probability. To determine the true pressure, use a gauge which is gas species independent (for example, a capacitance manometer) or a gauge with a known sensitivity factor (for example, a spinning rotor gauge).

4 - 12

Table 4-5 Ionization probabilities for some common substances

Transpector XPR 3+ Operating Manual

Relative

Substance Formula

Ionization

Gauge

Substance Formula

Sensitivity

Acetone (CH

CO 3.6 Hydrogen chloride HCl 1.6

3)2

Air 1.0 Hydrogen fluoride HF 1.4

Ammonia NH

Argon Ar 1.2 Hydrogen sulfide H

Benzene C

Benzoic acid C

Bromine Br

Butane C

Carbon dioxide CO

Carbon disulfide CS

6H6

COOH 5.5 Lithium Li 1.9

6H5

4H10

1.3 Hydrogen iodide HI 3.1

S2.2

5.9 Krypton Kr 1.7

3.8 Methane CH

4.9 Methanol CH3OH 1.8

1.4 Neon Ne 0.23

4.8 Nitrogen N

Carbon monoxide CO 1.05 Nitric oxide NO 1.2

Carbon tetrachloride CCl

Chlorobenzene C

Chloroethane C

6H5

2H5

Chloroform CHCl

Chloromethane CH

Cyclohexane C

Deuterium D

Dichlorodifluormethane CCl

Dichloromethane CH

Dintrobenzene C

6H4

Ethane C

Ethanol C

2H5

Ethylene oxide (CH

Cl 7.0 Oxygen O

Cl 4.0 n-Pentane C5H

Cl 3.1 Phosphine PH

6H12

2F2

2Cl2

(NO2)

2H6

OH 3.6 Trinitrobenzene C6H3(NO2)

O 2.5 Water H2O1.0

2)2

6.0 Nitrous oxide N2O1.7

4.8 Phenol C6H5OH 6.2

6.4 Propane C3H

0.35 Silver perchlorate AgClO

2.7 Stannic iodide Snl

7.8 Sulfur dioxide SO

7.8 Sulfur hexafluoride SF

2.6 Toluene C6H5CH

Helium He 0.14 Xenon Xe 3.0

Relative

Ionization

Gauge

Sensitivity

1.6

1.0

6.0

2.6

3.7

3.6

6.7

2.1

2.3

6.8

9.0

Hexane C

Hydrogen H

6H14

6.6 Xylene C6H4(CH3)

0.44

7.8

4 - 13

Transpector XPR 3+ Operating Manual

TFbDF

 G S

---------------------------------------------------=

N28

 TF

 DF

 G S

-------------------------------------------------------------------------------------------







Iab=

The analyzer factor, Ab, depends on the transmission and detection characteristics of the analyzer, the Electron Multiplier gain (if the analyzer is so equipped), and the basic sensitivity, as indicated in equation [4]:

[4]

Here, TF factor is the fraction of ions at mass b which pass through the mass filter, relative to nitrogen ions at mass 28. Nominally, the transmission factor is equal to 28 divided by the mass of the ion, b.

The detection factor, DF Multiplier, the detection factor is a function of the mass of the ion and its chemical nature, and is measured relative to that of a reference gas, typically nitrogen. In general, as the mass ion increases, the Electron Multiplier detection factor decreases.

The gain of the Electron Multiplier, G, measured at mass 28 for nitrogen, is the Electron Multiplier output current divided by the Faraday mode output current, under otherwise identical conditions. The multiplier gain is a strong function of the high voltage applied.

The sensitivity of the instrument, S, is the ratio of Faraday mode ion current for a given pressure of pure nitrogen measured at mass 28, and is typically expressed in amps/Torr.

The overall relation between partial pressure and ion current, given in equation [5], is quite general. The constants for this equation can be obtained from various tables, but for the best accuracy, they should be measured for each instrument.

is the transmission factor of the mass filter at mass b. The transmission

, is equal to 1 for a Faraday Cup detector. For an Electron

A brief discussion of each of the terms follows:

. . . . . . . . . . . . . . . . . . . . . . . . . . Partial pressure of substance a (usually in

Torr).

. . . . . . . . . . . . . . . . . . . . . . . . . . Fragmentation factor, or fraction of total ion

current from substance a having mass b (dimensionless; see Table 4-4 on page

4-11).

. . . . . . . . . . . . . . . . . . . . . . . . Fragmentation factor for N2+ ions at 28 AMU

N28

from nitrogen (dimensionless; typically around 0.9).

4 - 14

[5]

Transpector XPR 3+ Operating Manual

XFa . . . . . . . . . . . . . . . . . . . . . . . . . . Ionization probability of substance a relative

to nitrogen; approximately the same as the relative ion gauge sensitivity as shown in (dimensionless).

. . . . . . . . . . . . . . . . . . . . . . . . . . Transmission factor, the fraction of total ions

at mass b which pass through the mass filter, relative to ions with a mass of 28 AMU; nominally, T

. . . . . . . . . . . . . . . . . . . . . . . . . Detection factor for mass b ions from

= 28 / M (dimensionless).

substance a, relative to nitrogen at 28 AMU; assumed to be 1.00 for Faraday detectors, but varies for Electron Multiplier detectors (dimensionless).

G. . . . . . . . . . . . . . . . . . . . . . . . . . . . Electron Multiplier gain for nitrogen ions at 28

AMU (dimensionless; set equal to 1 for a Faraday Cup detector).

S . . . . . . . . . . . . . . . . . . . . . . . . . . . . Sensitivity of instrument to nitrogen, the ion

current at 28 AMU per unit of nitrogen partial pressure (usually in amps/Torr).

. . . . . . . . . . . . . . . . . . . . . . . . . . . Ion current of mass peak b resulting from

substance a ( in amps ; a ss umes th at th er e a re no other substances present which contribute significantly to the total current at mass peak b).

4.1.3 Additional Information for Interpreting Mass Spectra

The following paragraphs contain additional information which may be of use when interpreting mass spectra.

4.1.3.1 Ion source Characteristics

It is important to recognize that the partial pressure analyzer (especially the ion source) and the vacuum system configuration can both have an effect on the relative concentrations of the gases detected. In order to minimize these effects, it is necessary to have the right type of ionizer, the right type of filament, and the right configuration of the vacuum system. This is particularly true when a differential pumping arrangement is used because the pressure of the gas to be sampled is too high for the Sensor to operate. J. O’Hanlon’s book, A User’s Guide to Vacuum Technology, has a brief discussion (in Chapter 8, Section 2) of some of these concerns.

4 - 15

Transpector XPR 3+ Operating Manual

CAUTION

There are four classes of interactions between the sensor and the immediate vacuum environment which can have a significant effect on the detected gas composition.

First, the analyzer itself is a source of gas molecules because of outgassing from its surfaces. Usually, the outgassing levels can be reduced by baking the analyzer in vacuum. When operating in the ultrahigh vacuum (UHV) region, it is best to bake the sensor overnight at the maximum permissible temperature with the electronics removed. See the bakeout temperature specifications for the Transpector XPR 3+ sensor. A second overnight bakeout should be performed at the maximum sensor operating temperature. (It can take more than three hours for all parts of the sensor to reach maximum temperature during a bakeout, and more than six hours to cool back down.)

Make sure that the Electron Multiplier high voltage is turned off for this (second) bakeout temperature, otherwise, permanent damage to the EM may result.

Second, it is possible that the opposite of outgassing can occur; that is, gas molecules can be captured by the surfaces of the sensor. This effect is called “pumping.” In such cases, the magnitude of the signals of the gases pumped will be lower than is properly representative of the composition of the gas in the vacuum chamber.

Third, reactions involving gas molecules on surfaces of the analyzer can result in a change of composition. Gases can either be consumed by the surfaces, or produced by the surfaces. One example of gas consumption is the reaction of oxygen with a hot filament, particularly when tungsten filaments are used. The typical result is an anomalously low concentration of oxygen detected. See O’Hanlon’s book (Chapter 8, Section 2) for more information on filament materials and their interactions with the gas being analyzed. An example of gases being produced from surfaces is the liberation of carbon monoxide molecules from a thorium oxide coated iridium filament by a sputtering mechanism in the presence of significant quantities of argon. This latter mechanism makes the combination of a pressure reduction system and an RGA Sensor unsuitable for measuring nitrogen contamination in argon at the low parts-per-million (PPM) level from a sputter deposition process. A special type of inlet system and ion source (often referred to as a Closed Ion Source [CIS]) should be used for this type of application.

Fourth, there are cases where at least some of the ions detected are emitted from surfaces in the ion source under electron bombardment, and are not generated in the gas phase from neutral molecules. This process is known as electron stimulated desorption (ESD), or sometimes as electron induced desorption (EID).

4 - 16

Transpector XPR 3+ Operating Manual

When the sensor has been exposed to fluorine containing substances (such as sulfur hexafluoride, chlorofluorocarbons, perfluorotributylamine, or perfluorokerosene) for extended periods of time, it is not uncommon for a strong F peak at 19 AMU to remain even after the fluorine containing substance has been removed. When operating in the UHV region, EID/ESD of H

, C+, O+, and CO+ (and other ions) is not uncommon. The clue to diagnosing this problem is that the observed fragmentation patterns do not match known gas phase patterns. See pages five and six, and typical spectra TS2 through 5, 16, 28, and 30 of Partial Pressure Analyzers and Analysis by Drinkwine and Lichtman for more information on EID/ESD.

Partial pressure analyzers are also characterized by varying degrees of mass discrimination; that is, the sensitivity of the instrument is a function of mass. Ion sources show mass discrimination because various substances offer different degrees of difficulty of ionization. Generally, heavy, large molecules are ionized more readily than light, small molecules. There is a rough correlation between the number of electrons in a molecule and its ease of ionization. Although the total ion yield (i.e., the sum of ions of all masses) is electron energy and ionizer dependent, a reasonable estimate for the number of ions produced (relative to some standard, usually nitrogen) in a partial pressure analyzer is the relative ionization gauge sensitivity.

4.1.3.2 Scanning Characteristics

Quadrupole mass filters can also exhibit mass discrimination characteristics depending on how the control voltages are varied during the sweep through the mass range. Most instruments are designed to operate with a constant peak width (constant M) which results in a resolution which is proportional to the mass. This characteristic provides a good degree of peak separation throughout the mass spectrum, but results in an ion transmission efficiency (i.e., the fraction of all ions of the selected mass entering the mass filter which are transmitted through it) that decreases as mass increases.

The way the mass scale is “calibrated” or “tuned” (i.e., the way the peak positions and widths are adjusted) can have a significant effect on the transmission efficiency of the mass filter across the mass spectrum. If the adjustments are not made properly, the ratios of peak heights across the mass range will not be correct.

4 - 17

4.1.3.3 Fragmentation Factors

The fragmentation factor is the fraction of the total ion current contributed by ions of the chosen mass. Only peaks contributing at least one percent to the total ion current are included in the list. The sum of the factors for all the peaks in a mass spectrum cannot exceed 1.00. The sum can be less than 1.00 if only some of the peaks are listed (either there are many peaks, or some of the ions produced lie outside the mass range of the particular instrument used).

The data presented earlier in Table 4-4 on page 4-11, Typical fragmentation factors

for the major peaks of some common substances, is compiled from more than one

source and is for illustrative purposes only. For maximum accuracy in determining partial pressures, the fragmentation factors for the substances of interest should be measured with the same instrument, and the same adjustments, as the samples to be analyzed.

4.1.3.4 High Pressure Effects

As described in Section 3.7, High Pressure Effects, on page 3-11, when approaching the high pressure limit of operation the ion current does not increase linearly with pressure because of ion losses that are pressure dependent. The degree of ion loss depends on the nature of the ion in question and the nature of the total gas environment in the sensor. If conditions are sufficiently defined, i.e. the type of major gases and the interaction with the ion of interest, it is possible to compensate mathematically for the non-linear behavior at the high pressure end of the range. Transpector XPR 3+ permits the user to make such a compensation using the total pressure sensed by the ion source and an empirically determined factor for specific gases. Even when the exact factor is not known, the compensated results are typically more nearly accurate than the raw data.

Transpector XPR 3+ Operating Manual

4 - 18

Transpector XPR 3+ Operating Manual

CAUTION

WARNING

Chapter 5 Transpector XPR 3+ Operation and Best Known Methods

5.1 Introduction

Once the Transpector XPR 3+ Sensor, Electronics Module, Isolation Valve, and Pirani Interlock are installed, the isolation valve should be opened to allow Transpector XPR 3+ to obtain high vacuum. It is strongly recommended that Transpector XPR 3+ be kept under high vacuum conditions for at least eight hours before the filament is turned on. It is also recommended that Transpector XPR 3+ be baked out with the supplied heating jacket (which operates at 150 °C), for a period of at least eight hours. This eight hour minimum bakeout is required to reduce residual water vapor levels that may be higher due to local surface outgassing effects. These recommendations should be followed whenever Transpector XPR 3+ Sensor is exposed to atmosphere for long periods of time and will serve to increase sensor life.

Table 5-1 Transpector XPR 3+ Sensor maximum bakeout temperature

Maximum Operating

Sensor

Transpector XPR 3+ 150 °C 200 °C

Do not turn on electron multiplier high voltage at sensor temperatures above 150 °C. Permanent damage to the electron multiplier could result.

Temperature

Maximum Bakeout

Temperature

Electronics Removed

5 - 1

5.2 Precautions for Operation

There are some precautions that the operator should take to maintain sensor performance and extend filament life. It is recommended that the Transpector XPR 3+ filament emission be turned off manually, before maintenance, to allow cooling before exposure to the vent gas. If manual shutdown does not happen, the interlock will turn off the filament when the vent gas is introduced.

The point of greatest risk to air exposure is after maintenance where the process chamber has been exposed to air. Recommended operation after maintenance is to pump down the chamber and Transpector XPR 3+ Sensor followed by a bakeout with the Transpector XPR 3+ Sensor heater (and isolation valve heater, if present). Following bakeout and cool down, the base pressure should be < 10 turn on of the filament.

See Chapter 7 for specific Maintenance Procedures.

5.3 Pirani Interlock Protection

Transpector XPR 3+ Operating Manual

-6

Torr for safe

Filament interlock protection for Transpector XPR 3+ allows the XPR 3+ filament emission to operate at safe pressures (< 2x10 Emission OFF Interlock function. Protection is provided by a Pirani gauge, which directly monitors pressure at the XPR 3+. Interlock protection turns off the XPR 3+ filament if the pressure increases above a maximum operating limit (< 2x10 and does not allow the filament to be turned on when pressures exceed this limit. This chapter describes the interlock apparatus and its operation.

Interlock Protection:

 prevents inadvertent turn on of the XPR 3+ emission at high pressures,

 safely turns off the XPR 3+ filament when process pressures exceed a selected

pressure (the default / maximum value is 20 mTorr), and

 (optionally) turns the XPR 3+ emission on at a different safe pressure (the

default for this option is OFF).

-2

5.4 FabGuard Control

5.4.1 Transpector XPR 3+ Configuration— I/O Tab

Transpector XPR 3+ RGAs have one analog input for bringing in data from devices such as external pressure gauges. The I/O section configures the analog input.

Torr) by action of the Pirani

-2

Torr)

5 - 2

Figure 5-1 RGA Configuration - External I/O tab

Transpector XPR 3+ Operating Manual

Name

In the Name box, enter a name for the analog input. (See Figure 5-2.)

Figure 5-2 Name

5 - 3

Signal Type

In the item list, click the signal type.

Figure 5-3 Signal type

0 Volt Input

Figure 5-4 0 volt input =

Transpector XPR 3+ Operating Manual

Defines what an input of 0 volts means in user units. If the Signal Type is INFICON Pirani, MxG, or BxG, the 0 volt input = value cannot be changed.

10 Volt Input

Figure 5-5 10 volt input

Defines what an input of 10 volts means in user units. If the Signal Type is INFICON Pirani, MxG, or BxG, the 10 volt input = value cannot be changed.

High Trip Action

Figure 5-6 High Trip Action

5 - 4

High Trip Action is typically used to stop emission from turning on at pressures too high for safe operation.

NOTE: High Trip Action offers protection in addition to the Total Pressure

Interlock in Transpector firmware if Emission and EM Off are selected.

Transpector XPR 3+ Operating Manual

High Trip Level

Figure 5-7 High trip level

Defines the High Trip Level. If INFICON Pirani, MxG, or BxG option is selected as the Signal Type, the value will be in Torr or millibar depending upon the units selected in the Signal Type list.

Low Trip Action

Figure 5-8 Low trip action

Defines the action that occurs when the Low Trip Level is reached. Low Trip Action is typically used to protect the sensor in case the pressure gauge fails, or

the pressure gauge cable becomes disconnected.

NOTE: Low Trip Action will act as an emission interlock when set to a pressure

value below the minimum value possible for the pressure gauge, and Emission and EM Off are selected.

Low Trip Level

Figure 5-9 Low Trip Level

Defines the Low Trip Level. If INFICON Pirani, MxG, or BxG option is chosen as the Signal Type, the value will be in units of Torr or millibar depending upon the units selected in Signal Type.

Flex Trip Action

Figure 5-10 Flex Trip Action

5 - 5

Transpector XPR 3+ Operating Manual

Defines the action that occurs when the Flex Trip Level is reached. Flex Trip Level is typically used in FabGuard to turn the Emission and Electron Multiplier

back on after safe vacuum conditions are achieved.

NOTE: Flex Trip Action can turn the Emission or Electron Multiplier, or both, back

on during a process that cycles between base vacuum and higher pressures.

Flex Trip Mode

Figure 5-11 Flex trip mode

Defines the Flex Trip mode.

Flex Trip Level

Figure 5-12 Flex trip level

Defines the level of the Flex Trip. If INFICON Pirani, MxG, or BxG option is chosen as the Signal Type, the value entered here will be in units of Torr or millibar depending upon the units selected in Signal Type.

5.5 Using Transpector XPR 3+

Once the sensor has been conditioned, by baking it out and then keeping it under vacuum, the emission can be turned on.

5.5.1 Leak Detection

Using FabGuard Explorer, there is no recipe required for operating in Leak Mode. Select the Leak Mode button to default to sampling Helium (mass 4) over time. When leak checking a vacuum system that has a pressure of 1x10 the High Pressure Electron Multiplier should be used. The HPEM voltage that is necessary is based on the level of the leak that you are searching for. Adjust the HPEM voltage so that the Helium (Mass 4) signal can be observed, but do not exceed an intensity of 1E-7 amps. Refer to the FabGuard Explorer Operating Manual for complete information on Leak Detection Mode.

-5

Torr or lower,

5 - 6

5.5.2 Recipe Generation

CAUTION

Using Transpector XPR 3+ for background monitoring or process monitoring is accomplished by creating and running a recipe. Refer to the FabGuard Explorer operating manual for complete information on Recipe Generation.

5.5.3 Mass Scale Tuning

Another part of preventive maintenance is checking the functional operation of Transpector XPR 3+. This includes the mass position and mass resolution of the instrument.

Refer to section 7.6, Mass Calibration, on page 7-9 for information on tuning Transpector XPR 3+.

5.5.4 Transpector XPR 3+ Filament

The Transpector XPR 3+ filaments should last a minimum of 4000 hours when following these Best Known Methods. It is strongly recommended that the filaments be replaced after 4000 hours of operation (approximately six months of continuous operation).

Transpector XPR 3+ Operating Manual

If the filaments are not replaced and are allowed to burn out, coating from the filament could contaminate the ion source plate and create electrical shorts preventing operation with a new set of filaments.

The yttria-coated filament (part number 914-022-G2) is field replaceable. Replacement instructions are included in the filament kit and are also found at Section 6.5.3 in this manual.

5.5.5 High Pressure Electron Multiplier

Since the HPEM is used at background and process pressure, the EM hours will mirror those of the emission hours. The HPEM gain may degrade over time and it is recommended to replace the EM when the EM voltage can no longer be adjusted to achieve a 300 gain. It is expected that the HPEM will last greater than 1 year, when used continuously.

5 - 7

Transpector XPR 3+ Operating Manual

CAUTION

The HPEM degrades from monitoring high ion currents. Avoid measuring ion currents above 1E-7 Amps while operating with the HPEM on.

5 - 8

Transpector XPR 3+ Operating Manual

CAUTION

Chapter 6 Transpector XPR 3+ Low Pressure EM

6.1 Introduction

This chapter provides information concerning the Transpector XPR 3+ Low Pressure EM option. Information concerning the software is located in the FabGuard Explorer Operating Manual or the FabGuard help files, included with your Transpector XPR 3+ Gas Analysis System.

6.2 Transpector XPR 3+ Filament Caution

Sampling atmosphere or oxygen above 1x10-4 Torr using Transpector XPR 3+ is not recommended. To obtain maximum useful life from the Transpector XPR 3+ filaments observe the following caution.

Attempting to turn on the emission above 10 mTorr (20 mTorr with Pirani Interlock option) may result in premature failure of filaments.

Utilize the Pirani Interlock option or other measures to operate the Transpector XPR 3+ within a safe pressure range.

Failure to observe this caution will result in premature failure of filaments. Filament replacement is not covered by warranty under these conditions.

Please read Chapter 3, How The Instrument Works, before using the Transpector XPR 3+ filament and follow the recommendations in the Transpector XPR 3+ Operating Manual, Chapter 6, Best Known Methods.

6.3 Electron Multiplier Caution

Operating the Electron Multiplier at a total pressure greater than 1x10 than 5x10 reduce its lifetime.

-7

Amps, will damage the Electron Multiplier and

-4

Torr, or with an output current greater

6 - 1

Transpector XPR 3+ Operating Manual

6.4 Quick Start

To quickly put Transpector XPR 3+ Low Pressure EM Gas Analysis System to work, perform the following tasks.

1 Check to ensure that everything has been receive.

See section 6.8, Supplied Items, on page 6-5.

2 Install the Hardware. See Chapter 1 Getting Started.

3 Install the Software. See Chapter 1 Getting Started.

4 Review the Transpector XPR 3+ Operating Manual, Chapter 5, Operation,

before using Transpector XPR 3+ Low Pressure EM.

6.5 Purpose of the Transpector XPR 3+ Low Pressure EM Option Gas Analysis System

Transpector XPR 3+ Low Pressure EM Gas Analysis System is a quadrupole-based residual gas analyzer that operates at process pressures up to 10 mTorr (20 mTorr with the Pirani Interlock option). It has an Electron Multiplier that can operate at pressures up to 1x10 analyzes gases by:

-4

Torr. The miniature quadrupole sensor

 ionizing some of the gas molecules

 separating the ions by mass

 measuring the quantity of ions at each mass

The masses allow the identification of the gas molecules from which the ions were created. The magnitudes of these signals are used to determine the partial pressures (amounts) of the respective gases.

Transpector XPR 3+ is an important aid in the efficient use of a high-vacuum system, detecting leaks and contaminants. It can indicate the partial pressures of gases characteristic of processes occurring within a vacuum or other vessel, and therefore, can be used to investigate the nature of a process or to monitor process conditions.

6 - 2

Transpector XPR 3+ Operating Manual

6.6 General Description of Transpector XPR 3+ Low Pressure EM

Option Gas Analysis System

Transpector XPR 3+ Low Pressure EM Gas Analysis System is comprised of:

Sensor

The sensor, which functions only in a vacuum environment with pressures below

-2

1x10

The sensor itself is comprised of three parts:

 ion source (ionizer)

 quadrupole mass filter

 ion detector

Torr (2x10-2 Torr with Pirani Interlock option).

Transpector XPR 3+ Low Pressure EM detector includes a continuous dynode electron multiplier (CDEM) that can operate at a total pressure up to 1x10 The CDEM voltage range is 775 to 1,225 volts.

The sensor is mounted on an electrical feed-through flange, which is bolted to the vacuum space where the gas analysis measurements are made.

Electronics Module

The electronics module controls the sensor. The electronics module and sensor are matched, sold, and operated as a set. The electronics module attaches to and is supported by the sensor.

Pirani Interlock (Optional)

The optional Pirani Interlock controls sensor emission.

Software

The software controls the electronics module.

-4

Torr.

6 - 3

Transpector XPR 3+ Operating Manual

6.7 Specifications for Transpector XPR 3+ Low Pressure EM Option Gas Analysis System

Table 6-1 details the specifications for Transpector XPR 3+ Low Pressure EM.

Table 6-1 Transpector XPR 3+ Low Pressure EM specifications

Mass Range (amu) 1-100

Resolution (per 1993 AVS Recommended Practice)

Mass Filter Type Quadrupole

Detector Type Faraday Cup and Electron Multiplier

Temperature Coefficient (as FC, 1E-4 Torr of Ar)

Mass Position Stability (as FC 1E-4 Torr of Ar, Constant Temperature)

Peak Ratio Stability (28/40) as FC Better than 2% over 24 hours

Sensitivity (nominal) As FC at 40 eV / 200 µA Emission As EM at 70 eV / 400 µA

Minimum Detectable Partial Pressure* As FC at 40 eV / 200 µA As EM at 70 eV / 400 µA

Minimum Detectable Concentration 50 ppm

Maximum Operating Pressure With Pirani Interlock Option Without Pirani Interlock Linear Operation

< 1 @ 10% measured at mass 4, 20, 28 and 40

< 1% of peak height per °C

< 0.1 amu over 24 hours**

 4E-7 amps/Torr  8E-3 amps/Torr

 1E-9 Torr  6E-12 Torr

20 mTorr 10 mTorr 10 mTorr

6 - 4

Maximum Sensor Operating Tempe r ature

Maximum Bakeout Temperature (Electronics Removed)

Operating Temperature (Ambient) 5-50 °C

Power Input 20-30 V(dc), 24 V(dc) Typical, Latching,

Ethernet Communication Interface Standard: Cat5e Ethernet Cable

150 °C

200 °C

4-pin Din connector, internally isolated from system ground

Connection

CAUTION

Table 6-1 Transpector XPR 3+ Low Pressure EM specifications (continued)

Relay Outputs 1 relay, 24 V at 0.5 amps

Inputs 1 Analog Input, 2 Digital Inputs

NOTE: All specifications after a 30 minute warm up.

* MDPP (Minimum Detectable Partial Pressure) is calculated as the standard deviation of the noise (minimum detectable signal) divided by the sensitivity of the Sensor measured at a four-second dwell time.

** Peak Lock active for 24-hour mass position stability.

6.8 Supplied Items

See Chapter 12, Supplied Items for a what should be included with the Transpector XPR 3+ system.

6.9 XPR 3+ Low Pressure EM Installation

Transpector XPR 3+ Operating Manual

See Chapter 1 Getting Started for instructions on how to install the Transpector XPR 3+ system.

6.10 XPR 3+ Low Pressure EM Operation

For proper operation of the Transpector XPR 3+ system please refer to Chapter 5 Transpector XPR 3+ Operation.

Transpector XPR 3+ Low Pressure EM Gas Analysis System has an Electron Multiplier that can operate at pressures up to 1x10-4 Torr.

6 - 5

Chapter 7

WARNING - Risk Of Electric Shock

Maintenance

7.1 Introduction

The Transpector XPR 3+ sensor is subject to aging in normal use and some of its components will eventually require repair or replacement.

The Transpector XPR 3+ electronics module does not normally require repair or maintenance.

Transpector XPR 3+ Operating Manual

Opening the Transpector XPR 3+ Electronic Module should only be done by qualified service personnel. There are no user-serviceable parts inside the Electronic Module.

INFICON provides complete maintenance service for both sensors and Electronic Modules. Refer to section 1.3, How To Contact Customer Support, on page 1-2.

7.2 Safety Considerations

If Transpector XPR 3+ is used in a manner not specified by INFICON, protection provided by the equipment may be impaired.

7.2.1 Toxic Material

The Transpector XPR 3+ sensor does not contain any toxic material. However, if the Transpector XPR 3+ sensor is used in an application wherein toxic material is used or generated, residue of the toxic material will likely be present on the surface of the Transpector XPR 3+ sensor. Appropriate safety precautions must be taken when handling contaminated sensors in order to assure safety of maintenance personnel.

To return the sensor to INFICON for repair, refer to section 1.3.1, Returning

Transpector XPR 3+ to INFICON, on page 1-3.

The Transpector XPR 3+ electronics module is RoHS compliant.

7.2.2 Radiation

Transpector XPR 3+ Gas Analysis systems are not known to produce harmful radiation.

7 - 1

Transpector XPR 3+ Operating Manual

WARNING - Risk Of Electric Shock

CAUTION

7.2.3 Electrical Voltages

Transpector XPR 3+ does not present electrical hazards when enclosed and grounded according to the specifications given in the installation instructions.

If the Transpector XPR 3+ electronics module is operated while open, hazardous electrical voltages may be present. Such operation should not be attempted except by qualified service personnel.

7.3 General Instructions For All Repair Procedures

Perform any servicing in a clean, well illuminated area.

Wear clean, nylon, lint free lab gloves or finger cots.

Do not touch the vacuum side of the sensor with unprotected fingers.

Use clean tools.

7 - 2

7.4 Maintenance Procedures

CAUTION

7.4.1 Bakeout of Quadrupole

If the symptoms in section 8.2, Symptom-Cause-Remedy Chart, on page 8-1, suggest that the sensor is contaminated, try first to restore normal performance by baking the sensor under a high vacuum [1.333 x 10 the maximum bakeout temperatures.

If baking the sensor doesn’t increase the sensor performance, it may be necessary to perform the tasks described in section 7.5.3, Filament Kit Replacement, on page

7-5.

If the procedures explained above do not solve the problem, contact INFICON. Refer to section 1.3, How To Contact Customer Support, on page 1-2.

Table 7-1 Maximum bakeout temperatures

-3

Pa]—for several hours, preferably overnight. Table 7-1 represents

Transpector XPR 3+ Operating Manual

—at least 1 x 10

While

Operating

-5

Torr (1.333 x 10-5 mbar)

With

Electronics

Removed

Transpector XPR 3+

Electron Multiplier Faraday Cup Combination

EM Mode FC Mode

When heating the sensor above 150 C, the electronics module and the signal contact must be removed from the sensor.

7.4.2 Spare Heating Jacket Part Numbers

INFICON offers several heating jackets to help in baking a sensor. These heating jackets operate at a maximum temperature of 150

Heating jacket part numbers are shown in Table 11-1 on page 11-1.

150 150

C C

C.

200 200

C C

7 - 3

7.5 Repair Procedures

Included in the

filament kit.

7.5.1 Tools Required

 The hand tools shown in Figure 7-1.

 A DMM capable of measuring 30M or above.

Figure 7-1 Tools required

Transpector XPR 3+ Operating Manual

7 - 4

Transpector XPR 3+ Operating Manual

Key Pin

F - HV Out

G - Filament

H - Anode Lead

I - Extractor

J - RF1 Lead

Signal Contact

E - Filament

D - Total

Pressure

C - HV (EM)

NC (FC)

B - RF2 Lead

A - Ground Lead

7.5.2 How to Determine if a Filament Kit Replacement is Required

Follow these steps to determine if a filament replacement is required.

1 Measure the filament resistance. This can be accomplished while the sensor is

under vacuum by measuring the resistance between pins G and E. (See Figure

7-2.) A failed filament will measure open. An intact filament assembly will read

approximately 0.5 

Figure 7-2 Transpector XPR 3+ sensor pin location

NOTE: Although the following measurements may measure below 30 M with the

filament assembly and ceramic shield in place, they must be above 30 M when measured with the filament assembly and ceramic shield removed.

2 Measure the resistance of each of the pins with respect to ground (pin A).

These measurements should be above 30M.

3 Measure the resistance of each of the pins with respect to each other. All of

these measurements should also be above 30M, with the exception of across the filament if the filament has not failed.

7.5.3 Filament Kit Replacement

A filament replacement kit can be purchased from INFICON. This kit contains a new filament assembly mounted on a shipping fixture and a small Allen wrench. Perform the following steps to replace the filament.

NOTE: Refer to section 7.5.1, Tools Required, on page 7-4, before continuing.

7 - 5

Transpector XPR 3+ Operating Manual

CAUTION

Faces to center of ion source plate

Repeller

Do not, under any circumstances, remove the quadrupole assembly from the ion source base plate. Doing so will require factory realignment.

Use finger cots or talc free latex gloves when changing the filament assembly. Do not use nylon gloves when handling a Transpector XPR 3+ Sensor.

The Total Pressure circuit must be recalibrated after changing the filament.

Neither the filament assembly or the ion source can be cleaned. When dirty, they must be replaced.

1 Install the filament so that the face of the repeller is parallel to the face of the

anode and the filament is approximately centered to the two mounting screws (per steps 2 and 3 below). See Figure 7-3.

Figure 7-3 Filament assembly

2 Align the holes in the filament blocks with those on the base plate.

3 Place the lock washers on the screws, and then insert the screws through the

filament assembly and into the holes in the ion source base plate. Alternately tighten the screws until the screw heads just touch the lock washers. See

Figure 7-4.

NOTE: Both screws must have lock washers to maintain mechanical

connection and therefore electrical connection from the traces to the filament assembly.

7 - 6

Figure 7-4 Filament in place on sensor

CAUTION

Face of repeller parallel to face of anode

Transpector XPR 3+ Operating Manual

4 While holding the short end of the hex wrench, alternately tighten the screws

until the hex wrench begins to flex. Alternately use a torque-limiting screwdriver (IPN 02-389-P1 or equivalent), torque the screws to 10-12 oz In. (0.0384 Nm to 0.0461 Nm).

Do not touch the filament wires.

7.5.4 How to Determine the Condition of the Ion Source

1 Remove the Transpector XPR 3+ sensor from the vacuum system.

2 Completely loosen the two 1-72 x 0.31 in. long gold plated cap head screws

that hold the filament assembly to the ion source plate. Remove the filament assembly and screws. See Figure 7-5.

7 - 7

Figure 7-5 Top view of the Transpector XPR 3+ sensor

Filament

Assembly

Screws

AnodeRepeller

Transpector XPR 3+ Operating Manual

3 Measure the resistance of each of the pins with respect to ground (refer to pin

A in Figure 7-2). These measurements should be above 30M.

4 Measure the resistance of each of the pins with respect to each other. All of

these measurements should also be above 30M.

 If any of the measurements in steps 3 and 4 are less than 30M

 the ion source

is contaminated and requires cleaning or replacement before the new filament is installed. Contact the nearest INFICON Service Center for assistance with returning the unit to the factory for repair. Refer to section 1.3, How To Contact

Customer Support, on page 1-2.

If the resistance measurements in steps 3 and 4 above are greater than 30 M

 refer to section 7.5.3, Filament Kit Replacement.

7 - 8

7.6 Mass Calibration

CAUTION

7.6.1 Mass Alignment

Transpector XPR 3+ is tuned such that it generates a known RF/DC ratio that allows one mass to exit the quadrupole at a time. When tuning the mass scale of Transpector XPR 3+, the RF/DC ratio is fine tuned to each tune mass.

Another part of preventive maintenance is checking the functional operation of Transpector XPR 3+. This includes the mass position and mass resolution of the instrument. While this mass scale tuning is accomplished in a similar fashion to any other Transpector, Transpector XPR 3+ does have some slightly different values for peak width adjustment.

For more detailed information reagrding mass tuning using FabGuard, please refer to the FabGuard Explorer operating manual

7.6.1.1 Factory Tuning

The gases that are used for factory tuning of these masses are:

 Hydrogen (mass 1 and 2)

Transpector XPR 3+ Operating Manual

 Helium (mass 4)

 Nitrogen (mass 28)

 Argon (mass 40)

 Krypton (mass 86)

7.6.1.2 Mass Scale Tuning at Base Pressure

Mass scale tuning can be done at base pressure using the background peaks of water vapor (18 AMU) and nitrogen (28 AMU). The following procedure should be used to check peak location and peak widths at mass 18 and mass 28 and to make adjustments as needed.

Do not attempt to remove masses 1, 2, 4, or 86 AMU from the Tune Table or adjust the resolution at these masses.

7 - 9

Inficon Transpector XPR3 User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Chapter 1 Getting Started

1.1 Introduction

1.2 Using This Manual

1.2.1 Note and Hint Paragraphs

1.2.2 Warning and Caution Paragraphs

This is an example of a Caution paragraph. It cautions against actions which may cause an instrument malfunction or the loss of data.

This is an example of a General Warning paragraph. It warns against actions which may cause bodily injury.

This is an example of a Electrical Warning paragraph. It warns of the presence of electrical voltages which may cause bodily injury.

1.3 How To Contact Customer Support

1.3.1 Returning Transpector XPR 3+ to INFICON

1.4 Quick Start

1.5 Purpose of Transpector XPR 3+ Gas Analysis System

1.6 General Description of Transpector XPR 3+ Gas Analysis System

Sensor

Electronics Module

Software

1.7 Specifications for Transpector XPR 3+ Gas Analysis System

1.8 Supplied Items

1.9 Physical Requirements

1.9.1 Physical Dimensions

Figure 1-1 Sensor dimensions

Figure 1-2 Physical dimensions of Transpector XPR 3+

1.9.2 Weight

1.9.3 Mounting Requirements

1.9.4 Ventilation Requirements

1.9.5 Maintenance Access

1.10 Electrical Power Requirements

1.10.1 Required Supply Voltage

1.10.2 Current Rating

1.10.3 Electrical Connection

Figure 1-3 Transpector XPR 3+ connections

1.11 Overvoltage Category

1.12 Required Vacuum

1.13 Environmental Requirements

1.13.1 Use

1.13.2 Altitude Range

1.13.3 Pollution Degree

1.13.4 Operating Temperature

1.13.5 Humidity

1.14 Computer System Requirements

1.15 Software Installation

1.16 Hardware Installation

1.16.1 Avoiding Process Metal Deposition

1.16.1.1 Assembling ConFlat Flanges

Do not touch any surface on the gasket and flange faces with bare fingers. If it is necessary to touch any of these parts, always wear clean linen, nylon, powder free latex or vinyl laboratory gloves.

Figure 1-4 Gasket and flange assembly

Do not get any of the anti-seize compound on the gaskets or vacuum parts of the flange.

1.16.2 Installing the Isolation Valve

Figure 1-5 Typical Connection of a Transpector XPR 3+ to the process chamber

1.16.2.1 Notes for Air Operated Valve

The air pressure supplied to the valve must not exceed 100 psig.

Figure 1-6 INFICON supplied air valve

1.16.2.2 Port Identification for 2-Way, Normally Closed Use

Figure 1-7 Port identification

1.16.2.3 Valve Parts List

This valve has an operational voltage rating of 24 V(dc) +10% to -15%.

Figure 1-8 Valve parts list

1.16.2.4 Wiring Instructions

Figure 1-9 Removing connector assembly

Figure 1-10 Removing connector elbow

Figure 1-11 Removing connector terminal

Figure 1-12 Connect elbow assembly

Figure 1-13 Cable and connector elbow feed

Figure 1-14 Connecting the red and black wires to the terminal

Figure 1-15 Connecting the connector

Figure 1-16 Screw the assembly back into the solenoid coil

1.16.3 Mounting the Pirani Interlock Weldment Assembly

Figure 1-17 Orientations for mounting an Transpector XPR 3+ on a tool

1.16.4 Mounting the Pirani Gauge

1.16.5 Sensor Installation

1.16.5.1 Attaching the Sensor to the Vacuum Chamber

Figure 1-18 Sensor dimensions

1.16.6 Electronics Module Installation

Figure 1-19 Electronics module dimensions

1.16.7 Initial Start-up Procedure

1.16.8 Installing Ethernet Communications