INFICON Transpector CPM Operating Manual

OPERATING MANUAL

®

Transpector CPM

Compact Process Monitor

IPN 074-430-P1F

OPERATING MANUAL

www.inficon.com [e-mail]

Due to our continuing program of product improvements, specifications are subject to change without notice.

©2007 INFICON

®

®

Transpector CPM

Compact Process Monitor

IPN 074-430-P1F

Trademarks

The trademarks of the products mentioned in this manual are held by the companies that
produce them.

INFICON®, Transpector®, and FabGuard® are registered trademarks and FabGuard Explorer™ is a
trademark of INFICON.

Windows®, Windows NT® and Microsoft® are registered trademarks of Microsoft Corporation.

Teflon® is a registered trademark of DuPont Co.

Swagelok® is a registered trademark of Swagelok Co.

All other brand and product names are trademarks or registered trademarks of their respective companies.

The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.

©2007 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

DECLARATION

OF
CONFORM

This is to certify that this equipment, designed and manufactured by:

INFICON Inc.

Two Technology Place

East Syracuse, NY 13057

USA

meets the essential safety requirem ents of the European Union and is plac ed on the market accordingly.
has been constructed in accordance with good engineering practice in safety matters in force in the
Community and does not endanger the safety of pers ons, domestic animals or property when properly
installed and maintained and used in applications for which it was made.

Equipment Description: CPM Pumping Packages including vacuum pumps and controllers.

ITY

It

Transpector and sensor not included.

Applicable Directives: 73/23/EEC as amended by 93/68/EEC

Applicable Standards: EN 61010-1:2001

CE Implementation Date: September 2, 2005

Authorized Representative: Duane H. Wright

INFICON Inc.

This DOC only covers systems that include a Pfeiffer Vacuum turbopump.

89/336/EEC as amended by 93/68/EEC

EN 61326-1:A1:1998/A2:2001, Class A, Emissions per Table 3;

Immunity per Table A.1

Quality Assurance Manager, ISS

ANY QUESTIONS RELATIVE TO THIS DECLARATION OR TO THE SAFETY OF INFICON'S PR ODUCTS SHOULD BE DIRECTED,
IN WRITING, TO THE QUALITY ASSURANCE DEPARTMENT AT THE ABOVE ADDRESS.

09/02/05

Warranty

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
one (1) year from the date of shipment thereof by Seller. Seller's liability under this
warranty is limited to such of the above products or parts thereof as are returned,
transportation prepaid, to Seller's plant, not later than thirty (30) days after the
expiration of the period of warranty coverage in respect thereof and are found by
Seller's examination to have failed to function properly because of defective
workmanship or materials and not because of improper installation or misuse and
is limited to, at Seller's election, either (a) repairing and returning the product or
part thereof, or (b) furnishing a replacement product or part thereof, transportation
prepaid by Seller in either case. In the event Buyer discovers or learns that a
product does not conform to warranty, Buyer shall immediately notify Seller in
writing of such non-conformity, specifying in reasonable detail the nature of such
non-conformity. If Seller is not provided with such written notification, Seller shall
not be liable for any further damages which could have been avoided if Seller had
been provided with immediate written notification.

THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.

No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.

This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.

NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.

www.inficon.com [e-mail]

Transpector CPM Operating Manual

Table Of Contents

Chapter 1

Getting Started

1.1 General Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1

1.2 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.2.1 Purpose of the CPM System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.2.2 Description of the CPM System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.3 Using this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3

1.3.1 Usage of the Modern Metric System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

1.4 How To Contact Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5

1.4.1 Returning Your Instrument to INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

1.5 CPM Performance Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.5.1 General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6

1.5.2 Hex Block Orifice Sampling Inlets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

1.5.3 Atmospheric Pressure (Capillary) Sampling . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

1.6 Physical Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9

1.6.1 Physical Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9

1.6.2 Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10

1.6.3 Ventilation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10

1.7 Electrical Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10

1.7.1 Required Supply Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

1.7.2 Acceptable Supply Voltage Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10

1.7.3 Required Frequency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10

1.7.4 Power Rating . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

1.7.5 Fuse Rating . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

1.7.6 Overvoltage Category. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

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1.7.7 Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

1.8 Nitrogen Purge Gas (Corrosive System Only) . . . . . . . . . . . . . . . . . . . . . .1-11

1.9 Vent Gas Requirements for Two-Stage Foreline Pump . . . . . . . . . . . . . . . 1-12

1.10 Exhaust Gas. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13

1.11 Air Pressure Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13

1.11.1 Required Air Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13

1.11.2 Acceptable Range of Air Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13

1.11.3 Moisture Content of Compressed Air Supply . . . . . . . . . . . . . . . . . . . . . . .1-13

1.11.4 Air Pressure Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-14

1.12 Vacuum Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14

1.12.1 Required Vacuum. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-14

1.12.2 Acceptable Range Of Vacuum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-14

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Transpector CPM Operating Manual

1.13 Environmental Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14

1.13.1 Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14

1.13.2 Altitude Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14

1.13.3 Maximum Humidity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14

1.13.4 Pollution Degree. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15

1.13.5 Maximum Operating Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15

1.13.6 Minimum Operating Temperatures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15

1.13.7 Clean Room Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15

1.13.8 Anti-Static Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15

1.14 Computer System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15

1.14.1 Operating System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16

1.15 Installation Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16

1.16 Installing the CPM Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16

1.16.1 Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17

1.16.1.1 ConFlat® Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17

1.16.1.1.1 Assembling ConFlat Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17

1.16.1.2 Attaching the sensor to the UHV Manifold Tee . . . . . . . . . . . . . . . . . . . . . 1-19

1.17 Sniffer Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-20

1.18 Transpector2 Electronics Module Installation. . . . . . . . . . . . . . . . . . . . . . . 1-20

1.19 How to Set the DIP Switches

on the Transpector2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-21

1.19.1 RS-232C Communications on the Transpector2 . . . . . . . . . . . . . . . . . . . . 1-22

1.19.2 RS-232C link . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-22

1.19.2.1 Diagnostic link (SW8 - OFF). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-22

1.19.2.2 Primary link (SW8 - ON). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-23

1.19.3 RS-485 Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-23

1.19.3.1 RS-485 link (SW8 - OFF) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-24

1.20 Mounting the Pumping System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-27

1.20.1 Installing the Support Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-28

1.21 Installing the CPM Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-29

1.22 CPM Foreline Pump Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-31

1.23 Software Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-33

Chapter 2

How the CPM System Works

2.1 CPM Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

2.2 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

2.3 Instrument Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

2.3.1 System Block Diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

2.3.2 CPM Aux I/O Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

IPN 074-430-P1F

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Transpector CPM Operating Manual

2.3.2.1 Remote Control Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

2.3.3 Ultra-High Vacuum System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

2.3.3.1 Foreline Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6

2.3.4 Heater(s) Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7

2.3.5 CPM Controller Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

2.3.6 Solenoid Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

2.3.7 Transpector Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

2.4 Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-11

2.5 Sample Inlet Systems and Examples of Use . . . . . . . . . . . . . . . . . . . . . . . 2-12

2.5.1 Inlet System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12

2.5.2 High Pressure Sampling: Orifice Bypass (V4) . . . . . . . . . . . . . . . . . . . . . . 2-14

2.5.3 Dual-Capillary Sampling Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-15

2.6 Advice and Tips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16

2.6.1 Achieving Good Base Pressure in the CPM. . . . . . . . . . . . . . . . . . . . . . . . 2-16

2.6.2 Avoiding Trapped Gas when

Sampling Valves are Closed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16

Chapter 3

Theory and Application Guide

3.1 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.2 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-1

3.2.1 The Ion Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

3.2.2 The Quadrupole Mass Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4

3.2.2.1 Scanning Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

3.2.2.2 The Zero Blast . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

3.2.3 The Ion Detector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8

3.2.3.1 The Electron Multiplier (EM) Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-8

3.3 How to Interpret The Result . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-9

3.3.1 Qualitative Interpretation Of Mass Spectra. . . . . . . . . . . . . . . . . . . . . . . . . .3-9

IPN 074-430-P1F

3.3.1.1 Ionization Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

3.3.1.2 Isotope Ratios. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13

3.3.1.3 Electron Energy Effects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15

3.3.1.4 A Qualitative Interpretation Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-17

3.3.1.5 Dry Etching Chemistries . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-20

3.3.1.6 Tungsten CVD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23

3.3.1.7 Copper MOCVD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-23

3.3.2 Quantitative Interpretation of Mass Spectra

(Calculating Partial Pressures) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-24

3.3.3 Additional Information For

Interpreting Mass Spectra . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30

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Transpector CPM Operating Manual

3.3.3.1 Ion Source Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30

3.3.3.2 Scanning Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32

3.3.3.3 Fragmentation Factors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32

Chapter 4

Operation

4.1 CPM Controller Front Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.1.1 LED Indicators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.2 HexBlock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

4.2.1 HexBlock Inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

4.2.1.1 Hex Block Process Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

4.2.2 Calibration Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

4.2.3 Process Gauge (CDG) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

4.3 Heaters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7

4.4 Pumping System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7

4.4.1 Foreline Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7

4.4.2 Turbo Molecular Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

4.4.2.1 Turbo Molecular Pump Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9

4.5 Nitrogen Purge Valve for the Turbo Molecular Pump

4.6 Foreline Vent Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9

4.7 Filament Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

4.7.1 Interlock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

4.7.2 Total Pressure Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

4.7.3 Filament Lifetime . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11

4.8 Pneumatic Digital Pressure Switch and Pressure Gauge . . . . . . . . . . . . . 4-14

4.8.1 Setup Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14

4.8.2 How to Test for Proper Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16

4.8.3 How to Lock and Unlock the Settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16

Chapter 5

5.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

5.2 Safety Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

5.2.1 Toxic Material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

5.2.2 Radiation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

5.2.3 Electrical Voltages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

5.3 Required Environment, Tools,

5.3.1 Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

5.3.2 Tools Required for Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

on Corrosive Pumping Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9

IPN 074-430-P1F

Maintenance

Materials, or Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

TOC - 4

5.3.3 Parts Required For Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

5.4 Changing Diaphragms in the Foreline Pump . . . . . . . . . . . . . . . . . . . . . . . . 5-4

5.5 Transpector Sensor Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-11

5.5.1 How to Determine if a Filament

5.5.2 Transpector Filament Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-12

5.5.3 Transpector Sensor Ion Source Replacement . . . . . . . . . . . . . . . . . . . . . . 5-14

5.5.4 Transpector Sensor Electron Multiplier Replacement . . . . . . . . . . . . . . . . 5-17

5.6 HexBlock Inlet Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-18

5.6.1 Valve and Orifice Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-18

Chapter 6

6.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

6.2 CPM Symptom - Cause - Remedy Chart . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

6.3 If You Cannot Resolve Your Problem. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2

6.4 Event Log Files. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2

Transpector CPM Operating Manual

Replacement is Required . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-11

Diagnosing Problems

Chapter 7

Recommended Parts List

7.1 CPM Consumable Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-1

7.2 Preventative Maintenance Parts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-2

7.3 Replacement Spare Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-2

Chapter 8

FabGuard Explorer Operation

8.1 Operation (FabGuard Explorer) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1

8.2 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1

8.3 Hardware Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2

8.4 RGA Configuration - CPM Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-4

IPN 074-430-P1F

8.4.1 Valves and Orifices. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-5

8.4.2 Gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-7

8.4.3 Pumping Timers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-8

8.5 CPM Configuration Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-9

8.6 CPM Acquisition Control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-13

8.6.1 Acquisition Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-13

8.6.2 Scan Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-14

8.6.3 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-14

8.6.4 Ionizer Presets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-15

8.6.5 Start Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-15

8.6.5.1 Start Mode Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-15

TOC - 5

Transpector CPM Operating Manual

8.6.5.2 Data Threshold. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-16

8.6.5.3 Emission and Multiplier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-16

8.6.6 Stop Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-17

8.6.6.1 Stop Mode Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-17

8.6.6.2 Data Threshold. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-17

8.6.6.3 Maximum Step Duration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-18

8.6.6.4 Emission and Multiplier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-18

8.6.7 Stabilization Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-18

8.6.8 Dwell. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-19

8.6.9 Delay Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-19

8.6.10 Baseline and Peak Lock. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-20

8.6.10.1 Baseline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-20

8.6.10.2 Peak Lock. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-20

8.6.11 Inlet. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-21

8.6.11.1 Inlet Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-21

Chapter 9

Chapter 10

Index

Glossary

Bibliography

IPN 074-430-P1F

TOC - 6

1.1 General Safety Information

WARNING

WARNING - Risk Of Electric Shock

WARNING - Risk Of Electric Shock

WARNING - Risk Of Electric Shock

This product is not for use in a manner not specified by
the manufacturer.

There are no user serviceable components within the
instrument case.

Transpector CPM Operating Manual

Chapter 1

Getting Started

Potentially lethal voltages are present when the line cord
is connected.

Refer all maintenance to qualified personnel.

IPN 074-430-P1F

1 - 1

Transpector CPM Operating Manual

1.2 Introduction

This manual provides information regarding the operation of the INFICON® CPM
Gas Analysis System. This chapter provides an overview of the CPM system.

1.2.1 Purpose of the CPM System

The CPM system is designed to sample a representative fraction of a process
environment and direct the gas sample to the ionization region of a Residual Gas
Analyzer (RGA). The CPM has a dry pumping package that is small, light weight,
and portable. The CPM can detect levels of impurities in process gases at sub-ppm
levels for many components.

1.2.2 Description of the CPM System

The CPM system is comprised of:

 FabGuard® or FabGuard Explorer™ software, works with the CPM system

to provide automatic or manual control as well as status information. The
software provides automatic valve control through recipes and manual control
of all components. It includes a full array of basic residual gas analyzer (RGA)
features, including Spectrum or Selected Peaks scanning, Leak Detection and
Recipe Generation.

 Quadrupole Sensor, analyzes gases by: (1) ionizing the gas molecules, (2)

separating the ions by their mass-to-charge ratio, and (3) measuring the
quantity of ions at each mass. The sensor can indicate the partial pressures of
gases characteristic of processes occurring within a vacuum or other vessel,
and therefore can be used to investigate the nature of a process or to monitor
process conditions.

 Electronics Module (Transpector® 2), controls the sensor. The electronics

module and sensor are a matched set. The electronics module attaches to and
is supported by the sensor.

 CPM Controller, consolidates control functions into a single device that is self

standing or rack mountable. The CPM controller works in conjunction with the
Transpector2 to control valve activation, heaters, pumps, and power to all
elements of the system.

 Pumping System, is small, light weight, and efficient and can handle lighter

gases allowing process sampling from two atmospheres to high vacuum.

 Inlet Valves, a HexBlock™ inlet that can provide several sampling ranges, a

calibration reference, and a process pressure gauge.

IPN 074-430-P1F

1 - 2

1.3 Using this Manual

CAUTION

WARNING

WARNING - Risk Of Electric Shock

NOTE: Notes provide additional information about the current topic.

HINT: Hints provide insight into product usage.

CAUTION paragraphs caution against actions which may
bring about a malfunction or the loss of data.

WARNING paragraphs warn against actions that may
result in personal injury.

Transpector CPM Operating Manual

ELECTRICAL WARNING paragraphs warn of the
presence of potentially lethal voltages.

IPN 074-430-P1F

1 - 3

Transpector CPM Operating Manual

1.3.1 Usage of the Modern Metric System

In many places throughout this manual, American measurement units are given
along with their International System of Units eqivalences. However, providing all
measurement units in all discussions becomes cumbersome to the reader.
Therefore, equivalences are not given in all cases. You may perform the
conversion as follows:

 To convert from PSIG to bar

PSIG x 0.069 = bar

 To convert from PSIG to kPa

PSIG x 6.8947 = kPa

 To convert from Torr to mbar

Torr x 1.3332 = mbar

 To convert from Torr to Pascals (Pa)

Torr x 133.32 = Pa

 To convert from inches (in.) to millimeter (mm)

in. x 25.4 = mm

 To convert from feet (ft.) to meters (m)

ft. x 0.3048 = m

 When converting from pounds (lb.) to kilograms (kg)

lb. x 0.453593 = kg

IPN 074-430-P1F

1 - 4

Transpector CPM Operating Manual

1.4 How To Contact Customer Support

Worldwide support information regarding:

 Technical Support, to contact an applications engineer with questions

regarding INFICON products and applications, or

 Sales and Customer Service, to contact the INFICON Sales office nearest you,

or

 Repair Service, to contact the INFICON Service Center nearest you,

is available at www.inficon.com.

If you are experiencing a problem with your instrument, please have the following
information readily available:

 the serial number for your instrument,

 a description of your problem,

 an explanation of any corrective action that you may have already attempted,

 and the exact wording of any error messages that you may have received.

To contact Customer Support, see Support at www.inficon.com.

1.4.1 Returning Your Instrument to INFICON

Do not return any component of your instrument to INFICON without first speaking
with a Customer Support Representative. You must obtain a Return Material
Authorization (RMA) number from the Customer Support Representative.

If you deliver a package to INFICON without an RMA number, your package will be
held and you will be contacted. This will result in delays in servicing your
instrument.

Prior to being given an RMA number, you will be required to complete a Declaration
Of Contamination (DOC) form if your instrument has been exposed to process
materials. DOC forms must be approved by INFICON before an RMA number is

IPN 074-430-P1F

issued. INFICON may require that the instrument be sent to a designated
decontamination facility, not to the factory.

1 - 5

Transpector CPM Operating Manual

1.5 CPM Performance Specifications

1.5.1 General Specifications

Table 1-1 General Specifications

Mass Range (AMU) 1 - 100 1 - 200 1 - 300

Resolution <1 AMU wide @ 10% peak height over entire mass range

(per AVS 1993 recommended practice)

Total Pressure Range

Total Pressure Accuracy

1

5x10-7 - 1x10-3 Torr (6.6x10-7 - 1.3x10-3 mbar)

2

+/-25% 1x10-6 - 1x10-3 Torr (1.3x10-6 - 1.3x10-3 mbar)

Maximum Ion Source
Operating Pressure

3

Nominal Operating
Pressure

4

System Operating

1x10-3 Torr (1.3x10-3 mbar)

2x10-4 Torr (2.6x10

-8

1x10

Torr (1.3x10-8 mbar) - 2 atmospheres (with proper inlet configuration)

-4

mbar)

Pressure

10

5

6

8

9

> 10,000 (@ 1225 Volts)

Amps/Torr (Amps/mbar)

-6

>4x10
>2x10

1x10
(1.3x10

7

< 5 ppm < 10 ppm < 100 ppm

(>3x10-6)

-5

(>1.5x10-5)

-13

Tor r

-13

mbar)

Amps/Torr (Amps/mbar)

-6

>2x10
>1x10

2x10
(2.6x10

(>1.5x10-6)

-5

(>7.6x10-6)

-13

To rr

-13

mbar)

< 2 ppm < 25 ppm < 200 ppm

< 1 ppm < 2 ppm < 4 ppm

+/- 20%

-8

1x10

To rr

(1.3x10

-8

mbar)

150°C

Multiplier Gain

Sensitivity
@ Low Emission
@ High Emission

Minimal Detectable
Partial Pressure

Abundance Sensitivity

Zero Blast

Detection Limit

Linearity

Minimum Background
Pressure

Maximum Sensor and
Inlet Temperature

1

Ion source pressure reading @ low emission using total pressure lens

2

Total pressure accuracy @ low emission

3

Maximum ion source operating pressure @ low emission

4

-4

2x10

5

Minimum EM gain at maximum EM voltage

6

MDPP with EM on and 1 second dwell time

7

Mass 40 contribution onto 41 AMU

8

Zero blast contribution onto 2 AMU

9

Minimal detectable concentration with Krypton in air @ a 1 second dwell time

10

Torr in the ion source will produce about 1x10

Linearity @ low emission at 0.1 to 2 times the nominal orifice pressure

-5

Torr in the quadrupole region

Amps/Torr (Amps/mbar)

-6

> 1x10
> 5x10

4x10
(5.3x10

(>7.6x10-7)

-6

(>3.8x10-6)

-13

Tor r

-13

mbar)

IPN 074-430-P1F

1 - 6

1.5.2 Hex Block Orifice Sampling Inlets

Table 1-2 HexBlock Inlets and available Orifices (Maximum nominal pressure for orifice)

Inlet Orifices

V1 (LP) 3mT (no orifice)

V2 (HP) 3mT (no orifice)

1T Sniffer (bypass)

3T Sniffer (bypass)

7T Sniffer (bypass)

10T Sniffer (bypass

30T Sniffer (bypass)

100T Sniffer (bypass)

Transpector CPM Operating Manual

10mT

15mT

100mT

360mT

1T

10mT

15mT

100mT

360mT

1T(bypass)

3T (bypass)

10T (bypass)

30T(bypass)

V3 (HC) 1mT (High Conductance)

IPN 074-430-P1F

1 - 7

Transpector CPM Operating Manual

1.5.3 Atmospheric Pressure (Capillary) Sampling

Table 1-3 Capillary Sampling Option

Process Pressure Range 300 to 1400 Torr (400 to 1867 mbar)

Capillary Size and Lengths 1/16" O.D. x 1.5 m SS capillary

1/16" O.D. x 3.0 m SS capillary

Process Gas Consumption 2 sccm @ 300 Torr (400 mbar)

10 sccm @ 760 Torr (1013 mbar)
30 sccm @ 1400 Torr (1867 mbar)

Response Time for Composition Changes
(response to normal inert gases)

Capillary Delay: t(1.5m) = 0.3 s
t(3.0m) = 1 s
Intermediate Volume Tau = 0.7 s
CPM Isolation time constant = 75 s

1 - 8

IPN 074-430-P1F

1.6 Physical Requirements

3.0 in.

76 mm

6.0 in.

152 mm

14.8 in.

376 mm

18.6 in.

472 mm

7.2 in.

183 mm

11.4 in.

290 mm

1.6.1 Physical Dimensions

Figure 1-1 Pumping System Dimensions

Transpector CPM Operating Manual

IPN 074-430-P1F

Pumping System dimensions

18.6 in x 6.0 in x 14.8 in (472 mm x 152 mm x 376 mm)

CPM Controller dimensions

3.5 in x 6 in x 12 in (89 mm x 152 mm x 305 mm)

Foreline Pump dimensions

4.1 in x 7.1 in x 4.6 in (104 mm x 180 mm x 116 mm)
(See Figure 2-4 in section section 2.3.3.1 for connections):

1 - 9

Transpector CPM Operating Manual

CAUTION

1.6.2 Weight

The weight of the CPM system (without the Foreline Pump and the CPM controller)
is 32 lb (14.5 kg).

NOTE: These weights do not include connecting cables.

1.6.3 Ventilation Requirements

For adequate ventilation, maintain at least 1 in. (25.4 mm)
clearance around the Transpector2 electronics module
and the CPM heaters and pumping system.

If the CPM pumping system and/or the CPM controller is inside an enclosure, the
enclosure must be large or ventilated to provide adequate cooling by the fan on the
CPM pumping system and the fan in the CPM controller.

1.7 Electrical Power Requirements

The CPM system components that require AC power input are:

CPM controller . . . . . . . . . . . . . . . . . Universal input, any voltage in the range

Personal computer . . . . . . . . . . . . . . Universal input, any voltage in the range

1.7.1 Required Supply Voltage

Except for the AC power input requirements, all other required supply voltages are
supplied by the CPM controller.

1.7.2 Acceptable Supply Voltage Range

AC Power requirements are 100, 120, or 230 V(ac), ±10%

NOTE: If the input power is less than 100 V(ac), the time required for the heaters

to reach their nominal temperature may be extended.

1.7.3 Required Frequency

specified in section 1.7.2 is acceptable.

specified in section 1.7.2 is acceptable.

IPN 074-430-P1F

50 or 60 Hz, ±5%

1.7.4 Power Rating

CPM controller . . . . . . . . . . . . . . . . . 500 VA

1 - 10

Transpector CPM Operating Manual

CAUTION

1.7.5 Fuse Rating

3.15 A @ 250 V(ac) T (5 x 20 mm)

1.7.6 Overvoltage Category

Overvoltage Category II (per EN61010-1:2001)

1.7.7 Electrical Connections

110 V(ac), three-pronged, grounded plug. Or,

230 V(ac), European style, two-pronged plug with ground contact.

1.8 Nitrogen Purge Gas (Corrosive System Only)

The corrosive service Turbo Molecular Pump requires 10 to 25 sccm of purge gas
flow through the bearing region to protect the bearings from corrosion and loss of
bearing lubricant by evaporation. Dry nitrogen is recommended as the purge gas.
The CPM has a regulator that is preset in the factory using a flow meter to produce
10 sccm of nitrogen purge. To produce 10 sccm, the nitrogen regulator should be
set between 10 and 15 PSIG.

For the corrosive service Turbo Molecular Pump
(CVD/Etch), the nitrogen purge gas is required at all times
the system is operational.

Normally, dry nitrogen is supplied at the acceptable pressure range for the Air
Pressure, section 1.11.1 on page 1-13. In this manner, dry nitrogen can be supplied
directly to the solenoid valve block and to the pressure regulator via the supplied
1/4" (6.35 mm) tee. The provided regulator will then supply dry nitrogen at a

IPN 074-430-P1F

reduced pressure for the purge.

1 - 11

Transpector CPM Operating Manual

WARNING

CAUTION

Dry Compressed Air

Dry Nitrogen

58 - 100 PSIG

20 - 125 PSIG
Bearing Purge
Corrosive System Only

Figure 1-2 Compressed Air Supply Connection

The acceptable range of pressure is 58 PSIG to 100 PSIG (4 to 6.9 bar)
[400 kPa to 690 kPa].

The nitrogen pressure must not exceed 100 PSIG
(6.9 bar) [690 kPa].

The nitrogen pressure must be at least 58 PSIG (4 bar)
[400 kPa].

1.9 Vent Gas Requirements for Two-Stage Foreline Pump

Venting with dry Nitrogen is not required unless sampling Hydrogen, although it is
recommended when sampling reactive gases to minimize reactions with surface
areas. Dry Nitrogen should be used for venting with a supply of < 2 PSIG. Simple
1/4" (6.35 mm) plastic tubing can be connected to dry Foreline Pump for venting.

IPN 074-430-P1F

1 - 12

NOTE: The four-stage Foreline Pump does not utilize a vent valve.

1.10 Exhaust Gas

WARNING

CAUTION

For corrosive applications, exhausting the Turbo Molecular Pump is required. For
non-corrosive applications, exhausting of the Turbo Molecular Pump can be done
in accordance to the facility's requirements. The dry Foreline Pump has a 1/4" (6.35
mm) Swagelok® tube adapter for an exhaust fitting.

1.11 Air Pressure Requirements

The CPM air pressure requirements are discussed in the following sections. Refer
to Figure 1-2 for compressed air supply connection.

1.11.1 Required Air Pressure

Dry compressed air (or dry nitrogen) is used to operate the electro-pneumatic inlet
valves. The minimum air pressure required to operate the inlet valves is 58 PSIG
(4 bar) [400 kPa].

1.11.2 Acceptable Range of Air Pressure

Transpector CPM Operating Manual

The acceptable range of air pressure is 58 PSIG to 100 PSIG (4 to 6.9 bar)
[400 kPa to 690 kPa].

The air pressure must not exceed 100 PSIG
(6.9 bar) [690 kPa].

The air pressure must be at least 58 PSIG (4 bar)
[400 kPa].

IPN 074-430-P1F

1.11.3 Moisture Content of Compressed Air Supply

The compressed air supply used for inlet valve operation should be dried to the
extent that changes in pressure of the compressed air during operation does not
produce condensation in lines, solenoids or valve actuators. Moisture
condensation can cause corrosion.

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Transpector CPM Operating Manual

CAUTION

1.11.4 Air Pressure Connections

The compressed air supply connects to the CPM solenoid with 1/4 in.
(6.35 mm) polymer hose. The 1/4 in. (6.35 mm) connector is a friction lock right
angle fitting to adapt the supply hose to the 10-32 threads of the solenoid base.

1.12 Vacuum Requirements

The CPM vacuum requirements are as follows.

1.12.1 Required Vacuum

The CPM System creates vacuum with the Turbo Molecular Pump and Foreline
Pump. If you provide the Foreline Pump, it must provide < 10 Torr (13 mbar) when
there is up to 30 sccm of N

If the Foreline Pump pressure exceeds 10 Torr (13 mbar),
degradation of the data and the CPM system is possible.

purge plus process gas bypass flow.

2

1.12.2 Acceptable Range Of Vacuum

The CPM manifold can achieve < 1x10-8 Torr (1.33x10-8 mbar) of base pressure
(no sample flow) after bakeout and cool down. Achieving this level of vacuum
requires a foreline pressure of < 10 Torr (13 mbar).

1.13 Environmental Requirements

The CPM Environmental requirements are discussed in the following sections.

1.13.1 Use

The CPM is intended for indoor use only.

1.13.2 Altitude Range

The CPM can be used up to a maximum altitude of 6561 ft (2000) m. For operation
at higher altitudes, please consult the factory.

1.13.3 Maximum Humidity

80% relative humidity (no condensation).

IPN 074-430-P1F

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1.13.4 Pollution Degree

Pollution Degree 2 (per EN61010-1:2001)

1.13.5 Maximum Operating Temperature

104°F (40°C) (electronics module)

1.13.6 Minimum Operating Temperatures

68°F (20°C)

1.13.7 Clean Room Requirements

The CPM system construction is clean room compatible (including silicone rubber
heaters).

1.13.8 Anti-Static Conditions

The CPM unit has been tested for static susceptibility and passes standard
EN 61326-1:2000.

Transpector CPM Operating Manual

1.14 Computer System Requirements

INFICON can supply a complete computer system for operation of the Transpector
software that will operate the Transpector Gas Analysis instrument connected to a
CPM System.

The minimum system requirements for FabGuard Explorer Operating Software are
listed in Table 1-4:

Table 1-4 Minimum Computer Requirements for FabGuard Explorer

Parameters FabGuard Explorer

Requirements

IPN 074-430-P1F

Processor Pentium 4 2.0 GHz or greater

Memory 512 MB or greater

Hard Drive

Resolution

Cable Required RS-232C Cable (for single

500 MB for program,
additional space needed for

data collection

800 x 600 16-Bit color or
greater

sensor operation) or RS-485
cable for multiple sensor
operation (both cables are
included with the CPM)

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Transpector CPM Operating Manual

The minimum system requirements for FabGuard Sensor Integration and Analysis
Software are listed in Table 1-5:

Table 1-5 Minimum Computer Requirements for FabGuard

Processor Dual Xeon, 2.0 GHz

Memory 512 MB

Hard Drive 36 GB

Resolution 17" (1280 x 1024)

1.14.1 Operating System

FabGuard Explorer software requires either Windows XP, Vista or 7 operating
systems for operation.

FabGuard Sensor Integration and Analysis Software requires the Windows XP
operating system or higher.

Minimum Requirement

Refer to Chapter 8 for FabGuard Explorer software operation or refer to the
FabGuard CD for software operation.

1.15 Installation Overview

1 Install the sensor as explained in section 1.16 on page 1-16.

2 Install the electronics module as instructed in section 1.18 on page 1-20.

3 Set the Transpector2 DIP switches as explained in section 1.19 on page 1-21.

4 Install sniffers, if applicable. See section 1.17 on page 1-20.

5 Mount CPM to process tool, if applicable. See section 1.20 on page 1-27.

6 Install the CPM controller and the communications cables from the

Transpector2 electronics module to the computer and the CPM controller as
shown in Figure 1-10 on page 1-30.

7 Install the CPM Foreline Pump as instructed in section 1.22 on page 1-31.

8 Install the software, see section 1.23, Software Installation, on page 1-33.

1.16 Installing the CPM Sensor

IPN 074-430-P1F

1 - 16

1 First, install the sensor as explained in section 1.16.1 on page 1-17.

2 Then, install the Transpector2 electronics module as instructed in section 1.18

on page 1-20.