INFICON Transpector CPM Operating Manual

OPERATING MANUAL

®

Transpector CPM

Compact Process Monitor

IPN 074-430-P1F

OPERATING MANUAL

www.inficon.com [e-mail]

Due to our continuing program of product improvements, specifications are subject to change without notice.

©2007 INFICON

®

®

Transpector CPM

Compact Process Monitor

IPN 074-430-P1F

Trademarks

The trademarks of the products mentioned in this manual are held by the companies that
produce them.

INFICON®, Transpector®, and FabGuard® are registered trademarks and FabGuard Explorer™ is a
trademark of INFICON.

Windows®, Windows NT® and Microsoft® are registered trademarks of Microsoft Corporation.

Teflon® is a registered trademark of DuPont Co.

Swagelok® is a registered trademark of Swagelok Co.

All other brand and product names are trademarks or registered trademarks of their respective companies.

The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.

©2007 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

DECLARATION

OF
CONFORM

This is to certify that this equipment, designed and manufactured by:

INFICON Inc.

Two Technology Place

East Syracuse, NY 13057

USA

meets the essential safety requirem ents of the European Union and is plac ed on the market accordingly.
has been constructed in accordance with good engineering practice in safety matters in force in the
Community and does not endanger the safety of pers ons, domestic animals or property when properly
installed and maintained and used in applications for which it was made.

Equipment Description: CPM Pumping Packages including vacuum pumps and controllers.

ITY

It

Transpector and sensor not included.

Applicable Directives: 73/23/EEC as amended by 93/68/EEC

Applicable Standards: EN 61010-1:2001

CE Implementation Date: September 2, 2005

Authorized Representative: Duane H. Wright

INFICON Inc.

This DOC only covers systems that include a Pfeiffer Vacuum turbopump.

89/336/EEC as amended by 93/68/EEC

EN 61326-1:A1:1998/A2:2001, Class A, Emissions per Table 3;

Immunity per Table A.1

Quality Assurance Manager, ISS

ANY QUESTIONS RELATIVE TO THIS DECLARATION OR TO THE SAFETY OF INFICON'S PR ODUCTS SHOULD BE DIRECTED,
IN WRITING, TO THE QUALITY ASSURANCE DEPARTMENT AT THE ABOVE ADDRESS.

09/02/05

Warranty

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
one (1) year from the date of shipment thereof by Seller. Seller's liability under this
warranty is limited to such of the above products or parts thereof as are returned,
transportation prepaid, to Seller's plant, not later than thirty (30) days after the
expiration of the period of warranty coverage in respect thereof and are found by
Seller's examination to have failed to function properly because of defective
workmanship or materials and not because of improper installation or misuse and
is limited to, at Seller's election, either (a) repairing and returning the product or
part thereof, or (b) furnishing a replacement product or part thereof, transportation
prepaid by Seller in either case. In the event Buyer discovers or learns that a
product does not conform to warranty, Buyer shall immediately notify Seller in
writing of such non-conformity, specifying in reasonable detail the nature of such
non-conformity. If Seller is not provided with such written notification, Seller shall
not be liable for any further damages which could have been avoided if Seller had
been provided with immediate written notification.

THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.

No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.

This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.

NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.

www.inficon.com [e-mail]

Transpector CPM Operating Manual

Table Of Contents

Chapter 1

Getting Started

1.1 General Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1

1.2 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.2.1 Purpose of the CPM System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.2.2 Description of the CPM System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.3 Using this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3

1.3.1 Usage of the Modern Metric System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

1.4 How To Contact Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5

1.4.1 Returning Your Instrument to INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

1.5 CPM Performance Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.5.1 General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6

1.5.2 Hex Block Orifice Sampling Inlets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

1.5.3 Atmospheric Pressure (Capillary) Sampling . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

1.6 Physical Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9

1.6.1 Physical Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9

1.6.2 Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10

1.6.3 Ventilation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10

1.7 Electrical Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10

1.7.1 Required Supply Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

1.7.2 Acceptable Supply Voltage Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10

1.7.3 Required Frequency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10

1.7.4 Power Rating . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

1.7.5 Fuse Rating . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

1.7.6 Overvoltage Category. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

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1.7.7 Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

1.8 Nitrogen Purge Gas (Corrosive System Only) . . . . . . . . . . . . . . . . . . . . . .1-11

1.9 Vent Gas Requirements for Two-Stage Foreline Pump . . . . . . . . . . . . . . . 1-12

1.10 Exhaust Gas. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13

1.11 Air Pressure Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13

1.11.1 Required Air Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13

1.11.2 Acceptable Range of Air Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13

1.11.3 Moisture Content of Compressed Air Supply . . . . . . . . . . . . . . . . . . . . . . .1-13

1.11.4 Air Pressure Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-14

1.12 Vacuum Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14

1.12.1 Required Vacuum. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-14

1.12.2 Acceptable Range Of Vacuum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-14

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Transpector CPM Operating Manual

1.13 Environmental Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14

1.13.1 Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14

1.13.2 Altitude Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14

1.13.3 Maximum Humidity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14

1.13.4 Pollution Degree. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15

1.13.5 Maximum Operating Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15

1.13.6 Minimum Operating Temperatures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15

1.13.7 Clean Room Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15

1.13.8 Anti-Static Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15

1.14 Computer System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15

1.14.1 Operating System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16

1.15 Installation Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16

1.16 Installing the CPM Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16

1.16.1 Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17

1.16.1.1 ConFlat® Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17

1.16.1.1.1 Assembling ConFlat Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17

1.16.1.2 Attaching the sensor to the UHV Manifold Tee . . . . . . . . . . . . . . . . . . . . . 1-19

1.17 Sniffer Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-20

1.18 Transpector2 Electronics Module Installation. . . . . . . . . . . . . . . . . . . . . . . 1-20

1.19 How to Set the DIP Switches

on the Transpector2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-21

1.19.1 RS-232C Communications on the Transpector2 . . . . . . . . . . . . . . . . . . . . 1-22

1.19.2 RS-232C link . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-22

1.19.2.1 Diagnostic link (SW8 - OFF). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-22

1.19.2.2 Primary link (SW8 - ON). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-23

1.19.3 RS-485 Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-23

1.19.3.1 RS-485 link (SW8 - OFF) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-24

1.20 Mounting the Pumping System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-27

1.20.1 Installing the Support Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-28

1.21 Installing the CPM Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-29

1.22 CPM Foreline Pump Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-31

1.23 Software Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-33

Chapter 2

How the CPM System Works

2.1 CPM Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

2.2 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

2.3 Instrument Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

2.3.1 System Block Diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

2.3.2 CPM Aux I/O Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

IPN 074-430-P1F

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Transpector CPM Operating Manual

2.3.2.1 Remote Control Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

2.3.3 Ultra-High Vacuum System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

2.3.3.1 Foreline Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6

2.3.4 Heater(s) Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7

2.3.5 CPM Controller Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

2.3.6 Solenoid Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

2.3.7 Transpector Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

2.4 Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-11

2.5 Sample Inlet Systems and Examples of Use . . . . . . . . . . . . . . . . . . . . . . . 2-12

2.5.1 Inlet System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12

2.5.2 High Pressure Sampling: Orifice Bypass (V4) . . . . . . . . . . . . . . . . . . . . . . 2-14

2.5.3 Dual-Capillary Sampling Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-15

2.6 Advice and Tips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16

2.6.1 Achieving Good Base Pressure in the CPM. . . . . . . . . . . . . . . . . . . . . . . . 2-16

2.6.2 Avoiding Trapped Gas when

Sampling Valves are Closed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16

Chapter 3

Theory and Application Guide

3.1 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.2 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-1

3.2.1 The Ion Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

3.2.2 The Quadrupole Mass Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4

3.2.2.1 Scanning Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

3.2.2.2 The Zero Blast . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

3.2.3 The Ion Detector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8

3.2.3.1 The Electron Multiplier (EM) Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-8

3.3 How to Interpret The Result . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-9

3.3.1 Qualitative Interpretation Of Mass Spectra. . . . . . . . . . . . . . . . . . . . . . . . . .3-9

IPN 074-430-P1F

3.3.1.1 Ionization Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

3.3.1.2 Isotope Ratios. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13

3.3.1.3 Electron Energy Effects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15

3.3.1.4 A Qualitative Interpretation Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-17

3.3.1.5 Dry Etching Chemistries . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-20

3.3.1.6 Tungsten CVD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23

3.3.1.7 Copper MOCVD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-23

3.3.2 Quantitative Interpretation of Mass Spectra

(Calculating Partial Pressures) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-24

3.3.3 Additional Information For

Interpreting Mass Spectra . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30

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Transpector CPM Operating Manual

3.3.3.1 Ion Source Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30

3.3.3.2 Scanning Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32

3.3.3.3 Fragmentation Factors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32

Chapter 4

Operation

4.1 CPM Controller Front Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.1.1 LED Indicators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.2 HexBlock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

4.2.1 HexBlock Inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

4.2.1.1 Hex Block Process Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

4.2.2 Calibration Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

4.2.3 Process Gauge (CDG) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

4.3 Heaters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7

4.4 Pumping System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7

4.4.1 Foreline Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7

4.4.2 Turbo Molecular Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

4.4.2.1 Turbo Molecular Pump Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9

4.5 Nitrogen Purge Valve for the Turbo Molecular Pump

4.6 Foreline Vent Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9

4.7 Filament Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

4.7.1 Interlock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

4.7.2 Total Pressure Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

4.7.3 Filament Lifetime . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11

4.8 Pneumatic Digital Pressure Switch and Pressure Gauge . . . . . . . . . . . . . 4-14

4.8.1 Setup Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14

4.8.2 How to Test for Proper Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16

4.8.3 How to Lock and Unlock the Settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16

Chapter 5

5.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

5.2 Safety Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

5.2.1 Toxic Material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

5.2.2 Radiation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

5.2.3 Electrical Voltages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

5.3 Required Environment, Tools,

5.3.1 Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

5.3.2 Tools Required for Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

on Corrosive Pumping Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9

IPN 074-430-P1F

Maintenance

Materials, or Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

TOC - 4

5.3.3 Parts Required For Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

5.4 Changing Diaphragms in the Foreline Pump . . . . . . . . . . . . . . . . . . . . . . . . 5-4

5.5 Transpector Sensor Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-11

5.5.1 How to Determine if a Filament

5.5.2 Transpector Filament Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-12

5.5.3 Transpector Sensor Ion Source Replacement . . . . . . . . . . . . . . . . . . . . . . 5-14

5.5.4 Transpector Sensor Electron Multiplier Replacement . . . . . . . . . . . . . . . . 5-17

5.6 HexBlock Inlet Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-18

5.6.1 Valve and Orifice Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-18

Chapter 6

6.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

6.2 CPM Symptom - Cause - Remedy Chart . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

6.3 If You Cannot Resolve Your Problem. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2

6.4 Event Log Files. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2

Transpector CPM Operating Manual

Replacement is Required . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-11

Diagnosing Problems

Chapter 7

Recommended Parts List

7.1 CPM Consumable Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-1

7.2 Preventative Maintenance Parts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-2

7.3 Replacement Spare Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-2

Chapter 8

FabGuard Explorer Operation

8.1 Operation (FabGuard Explorer) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1

8.2 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1

8.3 Hardware Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2

8.4 RGA Configuration - CPM Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-4

IPN 074-430-P1F

8.4.1 Valves and Orifices. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-5

8.4.2 Gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-7

8.4.3 Pumping Timers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-8

8.5 CPM Configuration Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-9

8.6 CPM Acquisition Control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-13

8.6.1 Acquisition Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-13

8.6.2 Scan Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-14

8.6.3 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-14

8.6.4 Ionizer Presets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-15

8.6.5 Start Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-15

8.6.5.1 Start Mode Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-15

TOC - 5

Transpector CPM Operating Manual

8.6.5.2 Data Threshold. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-16

8.6.5.3 Emission and Multiplier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-16

8.6.6 Stop Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-17

8.6.6.1 Stop Mode Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-17

8.6.6.2 Data Threshold. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-17

8.6.6.3 Maximum Step Duration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-18

8.6.6.4 Emission and Multiplier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-18

8.6.7 Stabilization Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-18

8.6.8 Dwell. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-19

8.6.9 Delay Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-19

8.6.10 Baseline and Peak Lock. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-20

8.6.10.1 Baseline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-20

8.6.10.2 Peak Lock. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-20

8.6.11 Inlet. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-21

8.6.11.1 Inlet Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-21

Chapter 9

Chapter 10

Index

Glossary

Bibliography

IPN 074-430-P1F

TOC - 6

1.1 General Safety Information

WARNING

WARNING - Risk Of Electric Shock

WARNING - Risk Of Electric Shock

WARNING - Risk Of Electric Shock

This product is not for use in a manner not specified by
the manufacturer.

There are no user serviceable components within the
instrument case.

Transpector CPM Operating Manual

Chapter 1

Getting Started

Potentially lethal voltages are present when the line cord
is connected.

Refer all maintenance to qualified personnel.

IPN 074-430-P1F

1 - 1

Transpector CPM Operating Manual

1.2 Introduction

This manual provides information regarding the operation of the INFICON® CPM
Gas Analysis System. This chapter provides an overview of the CPM system.

1.2.1 Purpose of the CPM System

The CPM system is designed to sample a representative fraction of a process
environment and direct the gas sample to the ionization region of a Residual Gas
Analyzer (RGA). The CPM has a dry pumping package that is small, light weight,
and portable. The CPM can detect levels of impurities in process gases at sub-ppm
levels for many components.

1.2.2 Description of the CPM System

The CPM system is comprised of:

 FabGuard® or FabGuard Explorer™ software, works with the CPM system

to provide automatic or manual control as well as status information. The
software provides automatic valve control through recipes and manual control
of all components. It includes a full array of basic residual gas analyzer (RGA)
features, including Spectrum or Selected Peaks scanning, Leak Detection and
Recipe Generation.

 Quadrupole Sensor, analyzes gases by: (1) ionizing the gas molecules, (2)

separating the ions by their mass-to-charge ratio, and (3) measuring the
quantity of ions at each mass. The sensor can indicate the partial pressures of
gases characteristic of processes occurring within a vacuum or other vessel,
and therefore can be used to investigate the nature of a process or to monitor
process conditions.

 Electronics Module (Transpector® 2), controls the sensor. The electronics

module and sensor are a matched set. The electronics module attaches to and
is supported by the sensor.

 CPM Controller, consolidates control functions into a single device that is self

standing or rack mountable. The CPM controller works in conjunction with the
Transpector2 to control valve activation, heaters, pumps, and power to all
elements of the system.

 Pumping System, is small, light weight, and efficient and can handle lighter

gases allowing process sampling from two atmospheres to high vacuum.

 Inlet Valves, a HexBlock™ inlet that can provide several sampling ranges, a

calibration reference, and a process pressure gauge.

IPN 074-430-P1F

1 - 2

1.3 Using this Manual

CAUTION

WARNING

WARNING - Risk Of Electric Shock

NOTE: Notes provide additional information about the current topic.

HINT: Hints provide insight into product usage.

CAUTION paragraphs caution against actions which may
bring about a malfunction or the loss of data.

WARNING paragraphs warn against actions that may
result in personal injury.

Transpector CPM Operating Manual

ELECTRICAL WARNING paragraphs warn of the
presence of potentially lethal voltages.

IPN 074-430-P1F

1 - 3

Transpector CPM Operating Manual

1.3.1 Usage of the Modern Metric System

In many places throughout this manual, American measurement units are given
along with their International System of Units eqivalences. However, providing all
measurement units in all discussions becomes cumbersome to the reader.
Therefore, equivalences are not given in all cases. You may perform the
conversion as follows:

 To convert from PSIG to bar

PSIG x 0.069 = bar

 To convert from PSIG to kPa

PSIG x 6.8947 = kPa

 To convert from Torr to mbar

Torr x 1.3332 = mbar

 To convert from Torr to Pascals (Pa)

Torr x 133.32 = Pa

 To convert from inches (in.) to millimeter (mm)

in. x 25.4 = mm

 To convert from feet (ft.) to meters (m)

ft. x 0.3048 = m

 When converting from pounds (lb.) to kilograms (kg)

lb. x 0.453593 = kg

IPN 074-430-P1F

1 - 4

Transpector CPM Operating Manual

1.4 How To Contact Customer Support

Worldwide support information regarding:

 Technical Support, to contact an applications engineer with questions

regarding INFICON products and applications, or

 Sales and Customer Service, to contact the INFICON Sales office nearest you,

or

 Repair Service, to contact the INFICON Service Center nearest you,

is available at www.inficon.com.

If you are experiencing a problem with your instrument, please have the following
information readily available:

 the serial number for your instrument,

 a description of your problem,

 an explanation of any corrective action that you may have already attempted,

 and the exact wording of any error messages that you may have received.

To contact Customer Support, see Support at www.inficon.com.

1.4.1 Returning Your Instrument to INFICON

Do not return any component of your instrument to INFICON without first speaking
with a Customer Support Representative. You must obtain a Return Material
Authorization (RMA) number from the Customer Support Representative.

If you deliver a package to INFICON without an RMA number, your package will be
held and you will be contacted. This will result in delays in servicing your
instrument.

Prior to being given an RMA number, you will be required to complete a Declaration
Of Contamination (DOC) form if your instrument has been exposed to process
materials. DOC forms must be approved by INFICON before an RMA number is

IPN 074-430-P1F

issued. INFICON may require that the instrument be sent to a designated
decontamination facility, not to the factory.

1 - 5

Transpector CPM Operating Manual

1.5 CPM Performance Specifications

1.5.1 General Specifications

Table 1-1 General Specifications

Mass Range (AMU) 1 - 100 1 - 200 1 - 300

Resolution <1 AMU wide @ 10% peak height over entire mass range

(per AVS 1993 recommended practice)

Total Pressure Range

Total Pressure Accuracy

1

5x10-7 - 1x10-3 Torr (6.6x10-7 - 1.3x10-3 mbar)

2

+/-25% 1x10-6 - 1x10-3 Torr (1.3x10-6 - 1.3x10-3 mbar)

Maximum Ion Source
Operating Pressure

3

Nominal Operating
Pressure

4

System Operating

1x10-3 Torr (1.3x10-3 mbar)

2x10-4 Torr (2.6x10

-8

1x10

Torr (1.3x10-8 mbar) - 2 atmospheres (with proper inlet configuration)

-4

mbar)

Pressure

10

5

6

8

9

> 10,000 (@ 1225 Volts)

Amps/Torr (Amps/mbar)

-6

>4x10
>2x10

1x10
(1.3x10

7

< 5 ppm < 10 ppm < 100 ppm

(>3x10-6)

-5

(>1.5x10-5)

-13

Tor r

-13

mbar)

Amps/Torr (Amps/mbar)

-6

>2x10
>1x10

2x10
(2.6x10

(>1.5x10-6)

-5

(>7.6x10-6)

-13

To rr

-13

mbar)

< 2 ppm < 25 ppm < 200 ppm

< 1 ppm < 2 ppm < 4 ppm

+/- 20%

-8

1x10

To rr

(1.3x10

-8

mbar)

150°C

Multiplier Gain

Sensitivity
@ Low Emission
@ High Emission

Minimal Detectable
Partial Pressure

Abundance Sensitivity

Zero Blast

Detection Limit

Linearity

Minimum Background
Pressure

Maximum Sensor and
Inlet Temperature

1

Ion source pressure reading @ low emission using total pressure lens

2

Total pressure accuracy @ low emission

3

Maximum ion source operating pressure @ low emission

4

-4

2x10

5

Minimum EM gain at maximum EM voltage

6

MDPP with EM on and 1 second dwell time

7

Mass 40 contribution onto 41 AMU

8

Zero blast contribution onto 2 AMU

9

Minimal detectable concentration with Krypton in air @ a 1 second dwell time

10

Torr in the ion source will produce about 1x10

Linearity @ low emission at 0.1 to 2 times the nominal orifice pressure

-5

Torr in the quadrupole region

Amps/Torr (Amps/mbar)

-6

> 1x10
> 5x10

4x10
(5.3x10

(>7.6x10-7)

-6

(>3.8x10-6)

-13

Tor r

-13

mbar)

IPN 074-430-P1F

1 - 6

1.5.2 Hex Block Orifice Sampling Inlets

Table 1-2 HexBlock Inlets and available Orifices (Maximum nominal pressure for orifice)

Inlet Orifices

V1 (LP) 3mT (no orifice)

V2 (HP) 3mT (no orifice)

1T Sniffer (bypass)

3T Sniffer (bypass)

7T Sniffer (bypass)

10T Sniffer (bypass

30T Sniffer (bypass)

100T Sniffer (bypass)

Transpector CPM Operating Manual

10mT

15mT

100mT

360mT

1T

10mT

15mT

100mT

360mT

1T(bypass)

3T (bypass)

10T (bypass)

30T(bypass)

V3 (HC) 1mT (High Conductance)

IPN 074-430-P1F

1 - 7

Transpector CPM Operating Manual

1.5.3 Atmospheric Pressure (Capillary) Sampling

Table 1-3 Capillary Sampling Option

Process Pressure Range 300 to 1400 Torr (400 to 1867 mbar)

Capillary Size and Lengths 1/16" O.D. x 1.5 m SS capillary

1/16" O.D. x 3.0 m SS capillary

Process Gas Consumption 2 sccm @ 300 Torr (400 mbar)

10 sccm @ 760 Torr (1013 mbar)
30 sccm @ 1400 Torr (1867 mbar)

Response Time for Composition Changes
(response to normal inert gases)

Capillary Delay: t(1.5m) = 0.3 s
t(3.0m) = 1 s
Intermediate Volume Tau = 0.7 s
CPM Isolation time constant = 75 s

1 - 8

IPN 074-430-P1F

1.6 Physical Requirements

3.0 in.

76 mm

6.0 in.

152 mm

14.8 in.

376 mm

18.6 in.

472 mm

7.2 in.

183 mm

11.4 in.

290 mm

1.6.1 Physical Dimensions

Figure 1-1 Pumping System Dimensions

Transpector CPM Operating Manual

IPN 074-430-P1F

Pumping System dimensions

18.6 in x 6.0 in x 14.8 in (472 mm x 152 mm x 376 mm)

CPM Controller dimensions

3.5 in x 6 in x 12 in (89 mm x 152 mm x 305 mm)

Foreline Pump dimensions

4.1 in x 7.1 in x 4.6 in (104 mm x 180 mm x 116 mm)
(See Figure 2-4 in section section 2.3.3.1 for connections):

1 - 9

Transpector CPM Operating Manual

CAUTION

1.6.2 Weight

The weight of the CPM system (without the Foreline Pump and the CPM controller)
is 32 lb (14.5 kg).

NOTE: These weights do not include connecting cables.

1.6.3 Ventilation Requirements

For adequate ventilation, maintain at least 1 in. (25.4 mm)
clearance around the Transpector2 electronics module
and the CPM heaters and pumping system.

If the CPM pumping system and/or the CPM controller is inside an enclosure, the
enclosure must be large or ventilated to provide adequate cooling by the fan on the
CPM pumping system and the fan in the CPM controller.

1.7 Electrical Power Requirements

The CPM system components that require AC power input are:

CPM controller . . . . . . . . . . . . . . . . . Universal input, any voltage in the range

Personal computer . . . . . . . . . . . . . . Universal input, any voltage in the range

1.7.1 Required Supply Voltage

Except for the AC power input requirements, all other required supply voltages are
supplied by the CPM controller.

1.7.2 Acceptable Supply Voltage Range

AC Power requirements are 100, 120, or 230 V(ac), ±10%

NOTE: If the input power is less than 100 V(ac), the time required for the heaters

to reach their nominal temperature may be extended.

1.7.3 Required Frequency

specified in section 1.7.2 is acceptable.

specified in section 1.7.2 is acceptable.

IPN 074-430-P1F

50 or 60 Hz, ±5%

1.7.4 Power Rating

CPM controller . . . . . . . . . . . . . . . . . 500 VA

1 - 10

Transpector CPM Operating Manual

CAUTION

1.7.5 Fuse Rating

3.15 A @ 250 V(ac) T (5 x 20 mm)

1.7.6 Overvoltage Category

Overvoltage Category II (per EN61010-1:2001)

1.7.7 Electrical Connections

110 V(ac), three-pronged, grounded plug. Or,

230 V(ac), European style, two-pronged plug with ground contact.

1.8 Nitrogen Purge Gas (Corrosive System Only)

The corrosive service Turbo Molecular Pump requires 10 to 25 sccm of purge gas
flow through the bearing region to protect the bearings from corrosion and loss of
bearing lubricant by evaporation. Dry nitrogen is recommended as the purge gas.
The CPM has a regulator that is preset in the factory using a flow meter to produce
10 sccm of nitrogen purge. To produce 10 sccm, the nitrogen regulator should be
set between 10 and 15 PSIG.

For the corrosive service Turbo Molecular Pump
(CVD/Etch), the nitrogen purge gas is required at all times
the system is operational.

Normally, dry nitrogen is supplied at the acceptable pressure range for the Air
Pressure, section 1.11.1 on page 1-13. In this manner, dry nitrogen can be supplied
directly to the solenoid valve block and to the pressure regulator via the supplied
1/4" (6.35 mm) tee. The provided regulator will then supply dry nitrogen at a

IPN 074-430-P1F

reduced pressure for the purge.

1 - 11

Transpector CPM Operating Manual

WARNING

CAUTION

Dry Compressed Air

Dry Nitrogen

58 - 100 PSIG

20 - 125 PSIG
Bearing Purge
Corrosive System Only

Figure 1-2 Compressed Air Supply Connection

The acceptable range of pressure is 58 PSIG to 100 PSIG (4 to 6.9 bar)
[400 kPa to 690 kPa].

The nitrogen pressure must not exceed 100 PSIG
(6.9 bar) [690 kPa].

The nitrogen pressure must be at least 58 PSIG (4 bar)
[400 kPa].

1.9 Vent Gas Requirements for Two-Stage Foreline Pump

Venting with dry Nitrogen is not required unless sampling Hydrogen, although it is
recommended when sampling reactive gases to minimize reactions with surface
areas. Dry Nitrogen should be used for venting with a supply of < 2 PSIG. Simple
1/4" (6.35 mm) plastic tubing can be connected to dry Foreline Pump for venting.

IPN 074-430-P1F

1 - 12

NOTE: The four-stage Foreline Pump does not utilize a vent valve.

1.10 Exhaust Gas

WARNING

CAUTION

For corrosive applications, exhausting the Turbo Molecular Pump is required. For
non-corrosive applications, exhausting of the Turbo Molecular Pump can be done
in accordance to the facility's requirements. The dry Foreline Pump has a 1/4" (6.35
mm) Swagelok® tube adapter for an exhaust fitting.

1.11 Air Pressure Requirements

The CPM air pressure requirements are discussed in the following sections. Refer
to Figure 1-2 for compressed air supply connection.

1.11.1 Required Air Pressure

Dry compressed air (or dry nitrogen) is used to operate the electro-pneumatic inlet
valves. The minimum air pressure required to operate the inlet valves is 58 PSIG
(4 bar) [400 kPa].

1.11.2 Acceptable Range of Air Pressure

Transpector CPM Operating Manual

The acceptable range of air pressure is 58 PSIG to 100 PSIG (4 to 6.9 bar)
[400 kPa to 690 kPa].

The air pressure must not exceed 100 PSIG
(6.9 bar) [690 kPa].

The air pressure must be at least 58 PSIG (4 bar)
[400 kPa].

IPN 074-430-P1F

1.11.3 Moisture Content of Compressed Air Supply

The compressed air supply used for inlet valve operation should be dried to the
extent that changes in pressure of the compressed air during operation does not
produce condensation in lines, solenoids or valve actuators. Moisture
condensation can cause corrosion.

1 - 13

Transpector CPM Operating Manual

CAUTION

1.11.4 Air Pressure Connections

The compressed air supply connects to the CPM solenoid with 1/4 in.
(6.35 mm) polymer hose. The 1/4 in. (6.35 mm) connector is a friction lock right
angle fitting to adapt the supply hose to the 10-32 threads of the solenoid base.

1.12 Vacuum Requirements

The CPM vacuum requirements are as follows.

1.12.1 Required Vacuum

The CPM System creates vacuum with the Turbo Molecular Pump and Foreline
Pump. If you provide the Foreline Pump, it must provide < 10 Torr (13 mbar) when
there is up to 30 sccm of N

If the Foreline Pump pressure exceeds 10 Torr (13 mbar),
degradation of the data and the CPM system is possible.

purge plus process gas bypass flow.

2

1.12.2 Acceptable Range Of Vacuum

The CPM manifold can achieve < 1x10-8 Torr (1.33x10-8 mbar) of base pressure
(no sample flow) after bakeout and cool down. Achieving this level of vacuum
requires a foreline pressure of < 10 Torr (13 mbar).

1.13 Environmental Requirements

The CPM Environmental requirements are discussed in the following sections.

1.13.1 Use

The CPM is intended for indoor use only.

1.13.2 Altitude Range

The CPM can be used up to a maximum altitude of 6561 ft (2000) m. For operation
at higher altitudes, please consult the factory.

1.13.3 Maximum Humidity

80% relative humidity (no condensation).

IPN 074-430-P1F

1 - 14

1.13.4 Pollution Degree

Pollution Degree 2 (per EN61010-1:2001)

1.13.5 Maximum Operating Temperature

104°F (40°C) (electronics module)

1.13.6 Minimum Operating Temperatures

68°F (20°C)

1.13.7 Clean Room Requirements

The CPM system construction is clean room compatible (including silicone rubber
heaters).

1.13.8 Anti-Static Conditions

The CPM unit has been tested for static susceptibility and passes standard
EN 61326-1:2000.

Transpector CPM Operating Manual

1.14 Computer System Requirements

INFICON can supply a complete computer system for operation of the Transpector
software that will operate the Transpector Gas Analysis instrument connected to a
CPM System.

The minimum system requirements for FabGuard Explorer Operating Software are
listed in Table 1-4:

Table 1-4 Minimum Computer Requirements for FabGuard Explorer

Parameters FabGuard Explorer

Requirements

IPN 074-430-P1F

Processor Pentium 4 2.0 GHz or greater

Memory 512 MB or greater

Hard Drive

Resolution

Cable Required RS-232C Cable (for single

500 MB for program,
additional space needed for

data collection

800 x 600 16-Bit color or
greater

sensor operation) or RS-485
cable for multiple sensor
operation (both cables are
included with the CPM)

1 - 15

Transpector CPM Operating Manual

The minimum system requirements for FabGuard Sensor Integration and Analysis
Software are listed in Table 1-5:

Table 1-5 Minimum Computer Requirements for FabGuard

Processor Dual Xeon, 2.0 GHz

Memory 512 MB

Hard Drive 36 GB

Resolution 17" (1280 x 1024)

1.14.1 Operating System

FabGuard Explorer software requires either Windows XP, Vista or 7 operating
systems for operation.

FabGuard Sensor Integration and Analysis Software requires the Windows XP
operating system or higher.

Minimum Requirement

Refer to Chapter 8 for FabGuard Explorer software operation or refer to the
FabGuard CD for software operation.

1.15 Installation Overview

1 Install the sensor as explained in section 1.16 on page 1-16.

2 Install the electronics module as instructed in section 1.18 on page 1-20.

3 Set the Transpector2 DIP switches as explained in section 1.19 on page 1-21.

4 Install sniffers, if applicable. See section 1.17 on page 1-20.

5 Mount CPM to process tool, if applicable. See section 1.20 on page 1-27.

6 Install the CPM controller and the communications cables from the

Transpector2 electronics module to the computer and the CPM controller as
shown in Figure 1-10 on page 1-30.

7 Install the CPM Foreline Pump as instructed in section 1.22 on page 1-31.

8 Install the software, see section 1.23, Software Installation, on page 1-33.

1.16 Installing the CPM Sensor

IPN 074-430-P1F

1 - 16

1 First, install the sensor as explained in section 1.16.1 on page 1-17.

2 Then, install the Transpector2 electronics module as instructed in section 1.18

on page 1-20.

1.16.1 Sensor Installation

CAUTION

CAUTION

When you are installing a sensor, follow these general rules.

Do not touch any surface on the vacuum side of the
sensor with your fingers. If it is necessary to touch any of
these parts, always wear clean linen or nylon laboratory
gloves.

Before installing the sensor on your system, check for
any signs of loose or broken parts.

Do not attempt to clean the sensor in any kind of solvent.
Cleaning the sensor requires its disassembly. If the
sensor is contaminated and needs cleaning, contact the
INFICON Service Department for specific instructions.
Refer to section 1.4 on page 1-5.

Transpector CPM Operating Manual

1.16.1.1 ConFlat® Flanges

The sensor (and extension flange for a High Performance sensor) is installed on
the CPM UHV manifold tee with a 2.75 in (69.85 mm) O.D. ConFlat flange
(DN40CF). ConFlat flanges, and similar compatible types made by other
manufacturers, are widely used for attaching devices to ports on high vacuum
systems.

In order to install these flanges without leaks, it is important to follow the proper
installation procedures. These flanges are sealed with a metal gasket and can be
heated for bakeout to temperatures of 150°C.

1.16.1.1.1 Assembling ConFlat Flanges

IPN 074-430-P1F

To assemble a pair of ConFlat flanges, follow these steps:

1 Wipe the sealing areas of the flanges with a laboratory towel using a clean

solvent, such as water free alcohol. These areas must be clean and free of
particulate matter. Also clean the copper gasket between the flanges in the
same manner.

Do not touch the gasket and flange faces with your
fingers during the installation process.

1 - 17

Transpector CPM Operating Manual

Flange

Flange

Copper Gasket

2 Install the copper gasket between the two flanges. See Figure 1-3. Always use

a new gasket. Do not attempt to use gaskets more than once.

Figure 1-3 Gasket and flange assembly

3 Bring the two flanges together making sure that the gasket fits in the recess in

both flanges. Flange faces should be parallel. If the gasket is properly seated,
it should not be possible to slide the two flanges laterally with respect to each
other.

4 Install stainless steel bolts in the bolt holes of the flanges and finger tighten.

5 After the bolts have been finger tightened and the flange faces are parallel,

tighten the bolts gradually and evenly in a criss-cross pattern until the flange
faces are brought into even contact with each other.

IPN 074-430-P1F

1 - 18

Transpector CPM Operating Manual

CAUTION

CAUTION

The bolts used for mounting the sensor to the UHV
Manifold Tee and/or extension flange must be oriented
with the threads away from the Transpector, otherwise
there may be interference between the Transpector
mounting nut and mounting flange bolts. The
Transpector ground strap needs to be installed with
sensor mounting flange bolts.

CPM Tee

Sensor Flange

Transpector2

0.500 max.

Electronics
Module

1.16.1.2 Attaching the sensor to the UHV Manifold Tee

The sensor will be mounted to the CPM UHV manifold tee. See Figure 1-4.

Avoid mounting the sensor and CPM near any magnetic
fields greater than 2 gauss.

It is important that the connection between the sensor
and the vacuum chamber does not interfere with gas
exchange to ensure that the gas composition accurately
reflects that existing in the vacuum chamber.

If materials are evaporated or coatings are deposited in
the vacuum chamber, you must protect the sensor
against the deposition of these materials on its surfaces
by installing a baffle or deflector.

IPN 074-430-P1F

In systems which are baked, include the sensor in the
bakeout zone or provide it with separate heaters
(included with the CPM system).

Figure 1-4 Sensor and Transpector2 Mounting

1 - 19

Transpector CPM Operating Manual

CAUTION

WARNING - Risk Of Electric Shock

The Transpector sensor should be removed from the
manifold and placed in its original plastic shipping
container when shipping the CPM system.

1.17 Sniffer Installation

Install the sniffer into the Swagelok® fitting on the hexblock using the 1/4" (6.35
mm) nut and vespel ferrule supplied with the sniffer.

1.18 Transpector2 Electronics Module Installation

NOTE: The Transpector2 electronics module was calibrated at the factory and

matched to a specific sensor. If mounted to a different sensor of the same
type, the Transpector2 electronics module may have to be recalibrated.

The Transpector2 electronics module should be mounted in an area where the
ambient temperature does not exceed 50°C, and where there is free air circulation
around the unit. Best performance will be achieved if the module is not located
close to major heat sources where it is subjected to wide temperature variations.

1 The Transpector2 sensor mounting connector assembly has an O-ring in it.

When the mounting nut is tightened the O-ring compresses making a tight fit on
the sensor housing. Before attempting to mount the sensor, make sure
mounting nut on Transpector2 is loose so the O-ring is not compressed.

2 Note the alignment pin on the sensor feed-through and the Transpector2

mounting connector. Carefully slide the Transpector2 onto the sensor. Make
sure the Transpector2 electronics module slides on all the way.

3 Hand tighten the mounting nut on the Transpector2 electronics module.

4 Tightly fasten the 6 in (152.4 mm) ground strap from the Transpector2

electronics module to the sensor ConFlat flange mounting bolt.

You must install the ground strap to ensure a good
safety ground. Failure to make this connection could
result in a shock hazard and/or personal injury.

IPN 074-430-P1F

1 - 20

1.19 How to Set the DIP Switches on the Transpector2

The DIP switches are used to address the Transpector2 for communications on the
RS-485 network. The Transpector2 address is configured using the DIP switches
located on the front panel of the Transpector2. They are binary switches and
should be configured between address 1 and address 31. Typically, the address is
between 1 and 8.

The Table 1-6 shows the switch configurations for addresses 1 through 8.

Table 1-6 Network Addresses 1 through 8 (located on the Transpector2)

SW1 SW2 SW3 SW4 SW5 ADDRESS

OFF OFF OFF OFF ON 1

OFF OFF OFF ON OFF 2

OFF OFF OFF ON ON 3

OFF OFF ON OFF OFF 4

OFF OFF ON OFF ON 5

Transpector CPM Operating Manual

OFF OFF ON ON OFF 6

OFF OFF ON ON ON 7

OFF ON OFF OFF OFF 8

Switches 6 - 8 are reserved and must be set in the zero or off position.

NOTE: The typical CPM configuration is RS-232C for single sensor operation. The

Transpector SW8 should be set to ON for RS-232C operation. See section

1.19.1, RS-232C Communications on the Transpector2, on page 1-22.

IPN 074-430-P1F

1 - 21

Transpector CPM Operating Manual

1.19.1 RS-232C Communications on the Transpector2

When RS-232C communication is used by FabGuard Explorer:

 SWITCH 8 must be ON.

 SWITCH 6 and 7 must be set to select the proper baud rate as selected in the

application software. The software default is 9600 baud. See Table 1-7.

Table 1-7 RS-232C Communications Baud Rates

SW6 SW7 Baud

OFF OFF 9600

ON OFF 4800

OFF ON 2400

ON ON 1200

Connect the communications interface cable from the Transpector2 electronics
module to the proper serial channel on the host computer, e.g., COM1 or COM2.

NOTE: The application software may be configured to the COM channel used for

communication to the Transpector2 electronics module. Make sure the
interface cable is connected to the COM port that is selected in the
application program. (Refer to the FabGuard Explorer Operating Manual
for more information.)

1.19.2 RS-232C link

This interface connector allows the interface of the Transpector2 to a host
computer via RS-232C. The connector pinout is shown in Figure 1-6 on page 1-26.

The RS-232C link is full duplex, meets a subset of EIA-232-D standards, and
supports 4 baud rates (1200, 2400, 4800, 9600). The baud is selected by
configuration switch 6 and 7 as specified in Figure 1-6. The frame size is 10 bits,
consisting of 1 start, 8 data and 1 stop bits.

There are two modes of RS-232C communication: an ASCII Diagnostic Mode and
a Primary Mode. The mode of operation is selected by configuration
switch 8.

1.19.2.1 Diagnostic link (SW8 - OFF)

When switch 8 is OFF, the RS-232C port communicates in an ASCII mode. This
facilitates service diagnostics.

IPN 074-430-P1F

1 - 22

1.19.2.2 Primary link (SW8 - ON)

If switch 8 is ON, the Transpector2 runs in a binary mode, using the RS-232C serial
link as the primary source of communication. Data is exchanged with the host
computer in binary format. The host computer must be operating with the proper
INFICON software (or user written software) to use this communication mode.

1.19.3 RS-485 Communications

RS-485 Communication is used by the multi-sensor version of FabGuard Explorer
or FabGuard software.

 RS-485 baud is fixed at 57600.

 SWITCH 8 must be OFF

 SWITCHES 1-5 must be set for a unique address as shown below.

Each Transpector2 electronics module on the network must have a unique address
between 1-31.

1 Connect the RS-485 center connector on the RS-485 “Y” cable to the RS-485

connector on the back of the Transpector2.

Transpector CPM Operating Manual

2 Connect the female end of the RS-485 interface cable to the male end of the

“Y” cable.

3 If this is a multiple Transpector2 installation, connect the RS-485 interface

cable from the next Transpector2. See Figure 1-5 on page 1-25.

If the RS-485 interface is to be used, the host computer must have the TCA485
Communication Adapter installed. See the TCA instruction sheet (IPN
074-304) for installation details. Refer to your computer manual for information
on how to install the optional TCA485 Communication Adapter onto your
computer.

4 Connect the RS-232/TCA485 cable from the TCA485 adapter to the COM port

of choice on the host computer

IPN 074-430-P1F

5 Connect the power transformer to the TCA485 adapter.

1 - 23

Transpector CPM Operating Manual

1.19.3.1 RS-485 link (SW8 - OFF)

When switch 8 is OFF, the Transpector2 operates using RS-485 for the primary
source of communication. Data is exchanged with the host computer in binary
format. The host computer must be operating with the proper INFICON software
(or user written software) to use this communication mode.

The RS-485 link implements a ninth bit protocol allowing a single computer to
operate up to thirty-one Transpector2 electronics modules. This link is full duplex,
meets EIA-485 standards, and operates at 57600 baud. The frame size is 11 bits,
with 1 start, 8 data, 1 address/data flag and 1 stop bit.

The host computer must be equipped with a TCA485 Communications Adapter.

To select this mode configuration, switch 8 must be in the OFF position. The
Transpector2 electronics module must have a unique address between 1 and 8
selected by configuration switches 1 through 5.

NOTE: Address 0 is reserved. Address 0 is used as a GLOBAL address by the

application program.

1 - 24

IPN 074-430-P1F

9600 Baud

Host Computer

RS232 Port

RS232

RS232

RS232

RS232

CNFG

CNFG

CNFG

CNFG

Aux I/O

Aux I/O

Aux I/O

Aux I/O

RS485

RS485

RS485

RS485

PowerPowerPower

Power

600-1118-P1

TCA Cable

*600-1002-P#

RS485 Interface Cable

*600-1002-P#

RS485 Interface Cable

911-039-P1 911-039-P1911-039-P1

Transpector #1

Transpector #2 Transpector #N

AC Input

90 - 260 V(ac)

AC Input

90 - 260 V(ac)

AC Input

90 - 260 V(ac)

(Male) (Male)

(Female)

AC Input

90 - 260 V(ac)

Address 2

SW 8 - Off

Address 1

SW 8 - Off

Address N

SW 8 - Off

+24V Supply

+24V Supply

+24V Supply

+24V Supply

911-039-P1

600-1003-P1

RS485 “Y” Cable

*600-1001-P#

RS232 Interface Cable

RS232

9600 Baud

SW 8 - On

SW 6, 7 - Off

RS485 Installation

RS232 Installation

TCA

COM

Host Computer

*Cable Length

P# - # of feet

P15 - 15 ft. (4.6 m)

P30 - 30 ft. (9.1 m)

AC Input

90 - 260 V(ac)

Adapter

Port

(Female)

*600-1002-P#

RS485 Interface Cable

Transpector CPM Operating Manual

IPN 074-430-P1F

Figure 1-5 RS232 and RS485 Communication Connections

1 - 25

Transpector CPM Operating Manual

1 - 26

Figure 1-6 Standard Transpector Electronics pin-outs

IPN 074-430-P1F

Transpector CPM Operating Manual

1.20 Mounting the Pumping System

When directly mounted to a tool or vacuum vessel, the HexBlock can support the
system without any additional supports. A simple support kit is supplied for those
customers who require it due to extended flange configurations. The support kit,
part number 922-209-G1, consists of two 4 ft (1.22 m) support legs, two adjustable
feet and mounting hardware.

The support kit is not required for an atmospheric sampling system. A CPM
configured for atmospheric sampling will come with a small, free standing, support
frame, which will house the CPM controller and Foreline Pump. See Figure 1-7.

Figure 1-7 CPM Configured for Atmospheric Pumping

IPN 074-430-P1F

1 - 27

Transpector CPM Operating Manual

1.20.1 Installing the Support Kit

1 Measure the support leg to make sure there is ample room for installation. The

leg may be cut to in smaller spaces.

NOTE: Only one end of the support leg has a threaded hole for the adjustable

foot. When cutting the leg make sure that this end is utilized for the
support.

2 Completely screw the adjustable foot into the bottom of the support leg.

3 Install the right angle bracket onto the support leg using the T-nut and bolts

provided making sure the hardware is only finger tight. Install the second bolt
and T-nut into the bracket leaving it very loose.

4 Slide the T-nut into the CPM foreline block groove and adjust the position of the

leg so that it is perpendicular to the floor with the adjustable foot about 1/2"
(12.7 mm) from the floor. Tighten all hardware and install the safety cap. See

Figure 1-8.

Figure 1-8 Adjusting Leg Position

1 - 28

IPN 074-430-P1F

5 Unscrew the adjustable foot until it starts to support the CPM and relieve

pressure from the flange.

6 Tighten the lock nut on the adjustable foot against the support leg.

1.21 Installing the CPM Controller

RS 485 (for service)

Turbo Pump Fuse

Main
Power
On/Off

Electrical

Input

Ground

Aux I/O CPM I/O Foreline

Power

TSP

Power

Heater

The CPM controller is a standard 1/2 rack, 2U height rack mountable unit. The
controller has feet supplied and can sit on the floor within the customer selected
cable length distance from the CPM pumping system. The CPM controller has
various cables extending from the rear of the unit to various places on the CPM
system as shown in Figure 1-10 on page 1-30. A drawing of the rear panel of the
CPM controller is shown in Figure 1-9 for further reference.

All the cables are keyed for proper orientation and connection. For the initial CPM
installation, the cables will be attached to the CPM controller, solenoid valve block,
Transpector electronics, Foreline Pump, Turbo Molecular Pump, heaters and
power via a qualified INFICON representative.

If not already installed, first install the sensor and Transpector2 electronics module,
refer to section 1.16 on page 1-16 and section 1.18 on page 1-20.

Figure 1-9 CPM Controller Rear Panel

Transpector CPM Operating Manual

IPN 074-430-P1F

1 - 29

Transpector CPM Operating Manual

SSERP

HCTIWS

UENP

SEVLAV

XEH

™KCOLB

TELNI

GDC

OBRUT

RALUCELOM

PMUP

232SR

RWP PST

O/I XUA

O/I MPC

584SR

OI XUA MPC

PMT

ECIVRES

PMUP-F

RWP PST

PMUP OBRUT

MPC

ECAFRETNI

RTH

TEKCAJ RETAEH

CP OT

m01 RO ,m5,m3.m1

)xx-8721-006(

ELDNUB

NAF

TURBO

CONTR'

TINU RELLORTNOC MPC

FORELINE

PMUP

KCOLB ENILEROF

xx-4611-006

xx-4611-006

xx-6511-006

xx-5721-006

xx-5721-006

x-6511-006

x-1001-006

xx-1811

-006

1811-006

xx-1911-006

600-1191-xx

1811-006

A FO STIGID OWT TSAL EHT
HTGNEL OT REFER # ELBAC

XX-

DNG

0311-006

x-3001-006

PARTS DNG

ROSNES MPC

Figure 1-10 CPU Cable Connections

IPN 074-430-P1F

1 - 30

Transpector CPM Operating Manual

WARNING

Foreline

Connection

Electro-Magnetic

(Vent Valve)

1/4" Swagelok
Exhaust Port

Nitrogen
Vent
Supply
(< 2 PSIG)

1.22 CPM Foreline Pump Installation

The Foreline Pump for the CPM system is a 24 V(dc) dry Foreline Pump. It obtains
power from the CPM controller and has the following connections: (see Figure

1-11).

 Electrical connection from the CPM controller.

 Foreline hose connection from the UHV Turbo Molecular Pump foreline block.

 Exhaust port connection — Required for corrosive or toxic gas sampling, see

Warning on page 1-31.

 Vent valve connection on two-stage Foreline Pump — Recommended when

sampling corrosive or toxic gases. Dry nitrogen at less than 2 PSIG is the
recommendation for the vent valve connection.

Figure 1-11 Two-Stage Foreline Pump Components

IPN 074-430-P1F

If the proper exhaust connections are not installed,
sampling toxic, corrosive or any hazardous gases could
result in lethal amounts of gas being exhausted from this
pump.

1 - 31

Transpector CPM Operating Manual

CAUTION

CAUTION

Foreline

Connection

1/4" Swagelok

Exhaust Port

Figure 1-12 Four-Stage Foreline Pump Components

1 - 32

For corrosive applications, it is recommended to supply
dry nitrogen to the vent valve on the two-stage Foreline
Pump to minimize surface reactions in the foreline due to
venting

If a Customer Supplied pump is used, it must supply a
continuous foreline pressure in the range from 10

-2

to 10Torr.

IPN 074-430-P1F

Torr

1.23 Software Installation

See the appropriate software manual (FabGuard Explorer or FabGuard) for
information regarding the installation of the software.

Transpector CPM Operating Manual

IPN 074-430-P1F

1 - 33

Transpector CPM Operating Manual

This page is intentionally blank.

1 - 34

IPN 074-430-P1F

2.1 CPM Components

7

5

4

3

2

1

13

12

11

9

10

6

1 . . . . . . Process Pressure Gauge

2 . . . . . . Process Connection (CF40, KF40 or KF25)

3 . . . . . . HexBlock™ Inlet

4 . . . . . . Optional Calibration Reference

5 . . . . . . CPM Sensor (inside manifold)

6 . . . . . . Sensor Manifold and Heater

7 . . . . . . CPM Electronics Module

8 . . . . . . Pressure Switch

9 . . . . . . Valve Solenoids

10 . . . . . Nitrogen Regulator (for nitrogen purge and valve operation)

11 . . . . . Integrated Foreline Block

12 . . . . . UHV Turbo Molecular Pump

13 . . . . . Bypass Connection for High Pressure Applications

8

A fully configured corrosive pumping system CPM is illustrated in Figure 2-1. (The
CPM controller is not shown)

Figure 2-1 CPM Pumping System Components

Transpector CPM Operating Manual

Chapter 2

How the CPM System Works

IPN 074-430-P1F

2 - 1

Transpector CPM Operating Manual

CAUTION

2.2 Theory of Operation

Many gas analysis applications involving pressures too high for direct exposure to
the quadrupole sensor (pressures greater than 1.0E-4 Torr/mbar) require a
pressure converter to reduce the pressure and keep the sensor at high vacuum.
With a pressure converter, a quadrupole sensor may be used for high pressure
applications such as sputtering, Chemical Vapor Deposition (CVD), etch, vacuum
furnace analysis, and laser gas analysis.

The CPM has a closed ion source (CIS) and the pressure indicated is the pressure
inside the closed source. The nominal operating pressure inside the closed ion
source is approximately 2E-4 Torr. Since the conductance between the closed
source and the sensor manifold is 0.7 l/sec and given the effective pumping
achieved using the Turbo Molecular Pump attached to this manifold, the pressure
in the mass analyzer region is approximately 23 times lower than in the closed
source. Thus, with the source at ~2E-4 Torr, the pressure in the manifold is
approximately 1.0E-5 Torr.

Pressure converters use orifices and/or capillaries to reduce the partial pressure of
the gas-mixture, typically by a fixed proportion, with minimum mass discrimination.
An orifice, which is a small disk with a defined hole, acts as a conductance
limitation. When both the volume and the high vacuum pump speed are constant,
the orifice hole size determines the pressure at the quadrupole sensor. Orifices are
available in various sizes to cover various pressure ranges.

The software (either FabGuard Explorer or FabGuard)
displays the internal total pressure of the ion source.
Optimum performance is obtained when the total
pressure display reads ~2x10
low energy mode (40eV, 200 A). Operating in high
energy mode (70eV, 2000 A) will give an inaccurate total
pressure reading.

2.3 Instrument Overview

2.3.1 System Block Diagram

A schematic representation of a CPM is shown in Figure 2-2.

-4

Torr. This is measured in

IPN 074-430-P1F

2 - 2

Transpector CPM Operating Manual

Figure 2-2 CPM Block Diagram

IPN 074-430-P1F

2 - 3

Transpector CPM Operating Manual

CAUTION

2.3.2 CPM Aux I/O Connector

User I/O is accomplished through a 15 pin DSUB connector on the CPM controller
labeled CPM Aux I/O, see Figure 2-3 for a pinout diagram. The controller is shipped
with a protective cap covering the CPM Aux I/O connector.

Grounding valve control pins on CPM Aux I/O opens
electropneumatic valves regardless of system state

A mating DB15 Male connector is supplied in the ship kit for connecting to the
desired CPM Aux I/O connections.

Figure 2-3 CPM Aux I/O Pinout Diagram

2 - 4

IPN 074-430-P1F

2.3.2.1 Remote Control Functions

CAUTION

Grounding valve control pins on the CPM controller Aux
I/O opens electropneumatic valves regardless of system
state. To eliminate any conflicts, only one method of
valve control should be used

Electropneumatic valves can be remotely controlled by grounding contacts. These
relays have normally open contacts, which have a contact rating of
24 V(dc) at 0.5 Amps. See Table 2-1.

Table 2-1 Valves/Setpoint Relays

Name Pin Function

V1 (LP) 4 pulled to ground valve open

V2 (HP) 11 pulled to ground valve open

Transpector CPM Operating Manual

V3 (HC) 3 pulled to ground valve open

V4 (BYPASS) 10 pulled to ground valve open

V5 (CAL) 2 pulled to ground valve open

IPN 074-430-P1F

2 - 5

Transpector CPM Operating Manual

2.3.3 Ultra-High Vacuum System

The vacuum system for the CPM is required to provide low pressure to
(1) establish a sample flow from the process by pressure difference, and
(2) provide a low pressure for optimum operation of the ion source, mass analyzer
and ion detector.

A dry pumping system is used to minimize hydrocarbons in the residual gas
background. This is achieved with a Turbo Molecular Pump and a Foreline Pump
to provide the foreline pressure. This Turbo Molecular Pump has a high
compression ratio between the high vacuum side and the Foreline Pump side for
all gases including hydrogen. Hydrogen is the ultimate major residual gas
component in ultra-high vacuum, therefore the high compression ratio for hydrogen
is important for producing the desired low base pressure.

2.3.3.1 Foreline Subsystem

The foreline components of the CPM include a flexible foreline hose of various
lengths (
connection. The Foreline Pump typically produces base pressures (no gas flow) of
2 Torr which is significantly less than the 10 Torr needed for the Turbo Molecular
Pump operation. To assure reliable startup of the Foreline Pump, the foreline is
vented to near atmosphere on shutdown. The vent valve can be programmed, via
the control software, for delay and venting time.

10 m), the Foreline Pump and a vent valve at the Foreline Pump

The 2 Torr operating pressure for the foreline is in viscous flow such that the
foreline does not require a large diameter. The inside diameter of the Teflon®
foreline is 1/4" (6 mm) which produces a 2 Torr pressure drop across a 10 m length
of foreline with 20 sccm of gas flow.

NOTE: The vent valve located on the Foreline Pump will open for the configured

time period when the CPM is shutdown. The default time period is 10
seconds. Additionally, the vent valve is opened briefly when the CPM
controller is first powered up and remains open until communications are
established. This opening is usually a few seconds.

NOTE: The four-stage Foreline Pump does not utilize a vent valve.

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2 - 6

2.3.4 Heater(s) Subsystem

WARNING

The CPM is designed with dual temperature (150°C and 90°C) heaters. A tee
heater comes with the CPM. The tee heater is a snap-on assembly. All heaters are
dual element silicone rubber pad heaters with silicon rubber foam insulation. Power
for the heaters is controlled by the CPM controller, which automatically powers the
dual elements appropriately according to whether 120 V(ac) or 230 V(ac) is
provided. Control of the heater(s) is via the appropriate software package. The
software will allow control of the heater(s) at low temperature (90°C) or high
temperature (150°C). The status of the heaters is also displayed via LEDs on the
front panel of the CPM controller.

During or immediately after bakeout, the heating jacket
and metal surfaces in the vicinity of the heating jacket
may be hot. These surfaces may exceed 100°C at the
maximum ambient operating temperature (i.e., 50°C),
which will cause burns if touched directly without using
the proper personal protection equipment.

Transpector CPM Operating Manual

IPN 074-430-P1F

2 - 7

Transpector CPM Operating Manual

2.3.5 CPM Controller Subsystem

The CPM controller contains all of the AC components, the AC-DC converter which
supplies the +24 V(dc) for the Transpector, the Foreline Pump, the Turbo Molecular
Pump controller, and valve control for solenoid operations.

The AC-DC converter has an universal input which accepts input voltages in the
range of 85 - 253 V(ac).The output of this converter is 24 V(dc) @ 8A. This 24 V(dc)
is fed to the Transpector electronics through the CPM controller interface cable.

The Turbo Molecular Pump controller card also requires +24 V(dc). A high-side
switch is located between the AC-DC converter and this card. A control line from
the CPM I/O connector controls the Turbo Molecular Pump input power.

The heater drive circuit controls the AC voltage to the heaters. The heaters used in
the CPM system contain two heating elements. Since the AC input to the AC-DC
converter is a universal input, an automatic configuration of the heater elements is
implemented, therefore no manual configuration of the CPM controller is required
for operating on the various line voltages. For AC line input of 100-120 V(ac), the
two heating elements are set in a parallel configuration, and for 230 V(ac) input, the
elements are set in a series configuration. This automatic configuration circuit
consists of a voltage detector circuit which monitors the AC input and generates a
signal which controls a DPDT relay for the heaters, which configures the elements
either in series or parallel. The heaters are interlocked to not turn on if the pump is
not up to speed or if there are any faults.

2 - 8

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2.3.6 Solenoid Valves

The solenoid valves are physically mounted to a bracket on the Turbo Molecular
Pump foreline block. The solenoid valves are a group of valves joined together as
one manifold assembly. These solenoids control all the valves on the CPM system
(electropneumatic version pumping systems). They are controlled by the CPM
controller rocker switches or via the valves/Aux I/O connector.

When the actual solenoid valves are activated, they allow the compressed air to
travel from the input air supply (70-110 PSIG (4.8 to 7.6 bar) [480 kPa to 760 kPa])
to the appropriate valve for opening the valve. All the valves are
electropneumatically operated except for the vent valve, which is electromagnetic.
There are four solenoid valves which control the following valves: (See Figure 2-4.)

V0 . . . . . . . . . . . . . . . . . . . . . . . . . . . Foreline Isolation valve and Nitrogen

V1 . . . . . . . . . . . . . . . . . . . . . . . . . . . Low Pressure orifice valve for the HexBlock

Transpector CPM Operating Manual

purge valve on corrosive systems.
Automatically opened and closed by the
Start/Stop of the pumping system.

or for the capillary sampling option.
Configured depending on the application.
Typically used for background monitoring.

V2 . . . . . . . . . . . . . . . . . . . . . . . . . . . High Pressure orifice valve for the HexBlock

or for the capillary sampling option. Typically
used for process pressure sampling.
Customer configured depending on the
application.

V3 . . . . . . . . . . . . . . . . . . . . . . . . . . . High Conductance valve (1mT maximum

nominal pressure)

V4 . . . . . . . . . . . . . . . . . . . . . . . . . . . Bypass valve used in conjunction with the

high pressure bypass option or the capillary
sampling option

IPN 074-430-P1F

V5 . . . . . . . . . . . . . . . . . . . . . . . . . . . Calibration reference

For more details about the function of each valve, see section 4.2.1 on page 4-3.

Each of the solenoids has a red LED that will illuminate when the solenoid is
activated. Additionally, a green LED on the CPM controller will illuminate when the
solenoid is activated.

There is one compressed air input connection that is a compression fitting that will
use 1/4" tubing.

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Transpector CPM Operating Manual

Exhaust Muffler

Air Supply

Line Connection

9-Pin D Connector

Air

Lines

To

Val ves

V3

V1

V0

V2

V5

V4

Figure 2-4 Solenoid Valve Block

2.3.7 Transpector Subsystem

The Transpector2 electronics module and sensor form the heart of the CPM
system. The sensor is a quadrupole partial pressure analyzer and analyzes gases
by:

 ionizing some of the gas molecules.

 separating the ions by mass.

 measuring the quantity of ions at each mass.

The masses, unique for each substance, allow the identification of the gas
molecules from which the ions were created. The magnitudes of these signals are
used to determine the partial pressures (amounts) of the respective gases.

The Transpector2 electronics module mounts to the sensor and provides all the
requirements for operating the sensor, making the appropriate ion current
measurements, communicating to a computer and sending the resulting output to
the computer.

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2 - 10

2.4 Application

The CPM includes a pumping system for reducing the pressure of process gas to
a pressure at the CPM ion source which optimizes the partial pressure
measurements made by the CPM. The design dimensions of pressure reduction
orifices are chosen to produce 2x10
for the stated maximum pressure for a given orifice. The flow rate of gas through
the CPM that produces this pressure is:

Transpector CPM Operating Manual

-4

Torr pressure in the closed ion source (CIS)

Q(T-L/s)= P

= 2x10

= 1.4x10

where P

CIS

CIS SCIS

-4

(Torr) x 0.7 (L/s)

-4

(T-L/s)

is the pressure at the CIS ion source within the CPM tee region, S

CIS

is the pumping speed of the closed ion source and Q is the throughput of the CIS
ion source. This flow rate is produced by process gas flowing through the process
gas orifice which is

Q(T-L/s) = (P

Process - PCIS

where the conductance C

) * C

Process Orifice

Process Orifice

determines the orifice diameters needed to

~ 1.4x10-4 (T-L/s)

produce this flow for each process pressure. A selection of orifice diameters are
available for reducing pressure for a multi-decade range of (maximum) process
pressures from 0.001 Torr to 100 Torr. For example, a 10 Torr orifice has a 20
micron diameter hole to produce approximately 2x10

-4

Torr at the CIS when the
process has 10 Torr of nitrogen. Since process pressures can vary within the
operating range of the process, different pressure reductions may be needed. The
CPM system has a variety of inlet orifices that allow pressure range sampling which
typically covers measurement of the base pressure of the process chamber (for
leak detection and base vacuum analysis) with a high conductance port and two
orifices for process pressures. Various inlet systems are described with their typical
use in section 2.5 on page 2-12.

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Transpector CPM Operating Manual

2.5 Sample Inlet Systems and Examples of Use

2.5.1 Inlet System

Figure 2-5 shows the HexBlock inlet.

Figure 2-5 HexBlock Inlet

Table 2-2 Inlet System

Hex Block Inlets INFICON Part Number

Hex Block Inlet with one orifice (V1) and high vacuum (V3) 923-604-G11

Hex Block Inlet with one orifice (V2) with high pressure
by-pass (V4) and high vacuum (V3)

Hex Block Inlet with two orifices (V1) and (V2) 923-604-G13

Hex Block Inlet with two orifices (V1) and (V2) with high
pressure by-pass (V4)

Hex Block Inlet with two orifices (V1), (V2), and high vacuum
(V3)

Hex Block Inlet with two orifices (V1), (V2) with high pressure
by-pass (V4), and high vacuum (V3)

923-604-G12

923-604-G14

923-604-G15

923-604-G16

The orifice is a small laser drilled socket set screw that acts as a conductance
limitation. The orifice has a press fitted seal mounted to the bottom of the set screw.
When both the volume and the high vacuum pump speed are constant, the orifice
hole size determines the pressure at the sensor. Orifices are available in various

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Transpector CPM Operating Manual

sizes to cover various pressure ranges. Table 2-3 and Table 2-4 shows different
orifices for low and high pressure range application and Figure 2-6 on page 2-14
shows pressure ranges for sampling which will assist in choosing the proper orifice
for the application.

Table 2-3 Hex Block orifices (V1 for low pressure, typically background)

HexBlock orifices INFICON Part Number

10 mTorr orifice 923-706-G6

15 mTorr orifice 923-706-G8

100 mTorr orifice 923-706-G5

360 mTorr orifice 923-706-G7

1 Torr orifice 923-706-G4

3 Torr orifice 923-706-G9

10 Torr orifice 923-706-G3

Table 2-4 Hex Block orifices, sniffers and capillaries

(V2 for high pressure, typically process pressure)

Size of orifices, sniffers and capillaries INFICON Part Number

10 mTorr orifice 923-706-G6

15 mTorr orifice 923-706-G8

100 mTorr orifice 923-706-G5

360 mTorr orifice 923-706-G7

1 Torr orifice 923-706-G4

3 Torr orifice 923-706-G9

10 Torr orifice 923-706-G3

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30 Torr orifice

923-706-G10

(requires high pressure by-pass)

7 Torr sniffer

923-707-G3

(requires high pressure by-pass,30.5 cm length)

10 Torr sniffer

923-707-G1

(requires high pressure by-pass. 5 cm length)

100 Torr sniffer
(requires high pressure by-pass. 5 cm length)

923-707-G2

2 - 13

Transpector CPM Operating Manual

Figure 2-6 Pressure Ranges for Sampling for CPM Inlet Orifices and Sniffers

2.5.2 High Pressure Sampling: Orifice Bypass (V4)

When process pressures exceed 10 Torr, the process gas is dense enough that the
gas molecules collide with each other more often than with the walls of the
sampling system. In this transition or viscous flow regime, the time constant for
detecting changes in process gas composition becomes dominated by the time it
takes for the gas species that changes in the process to diffuse through the gas
matrix and arrive at the sampling orifice. This diffusion time is proportional to the
process pressure and the square of the distance from the process to orifice. This
sampling method effectively shortens the diffusion distance from process change
to the sampling orifice by drawing a small quantity (10 sccm) of the process gas
through the sampling valve and bypass valve to the interstage port of the Turbo
Molecular Pump. When the process gas flows in this manner, the diffusion distance
of the gas is reduced to about 2 cm and the response time for changes in the
process gas is significantly reduced.

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2 - 14

2.5.3 Dual-Capillary Sampling Option

The Dual-Capillary Sampling option provides a sampling means to reduce the
pressure of a process atmosphere in the range of 300 Torr to 1400 Torr to an
intermediate pressure of <10 Torr for the CIS using hardware shown in Figure 2-7.
The exit orifice to the pumping line limits the flow to the Turbo Molecular Pump and
establishes the interstage pressure. The 1/16" O.D. capillary can be inserted into
the process to an appropriate position through the Swagelok-4VCR connection
fitting. The capillary position is locked in place and sealed by tightening the
Swagelok nut with a re-usable ferrule.

Figure 2-7 Dual-Capillary Sampling Option (shown with calibration reference)

Transpector CPM Operating Manual

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Transpector CPM Operating Manual

2.6 Advice and Tips

2.6.1 Achieving Good Base Pressure in the CPM

The CPM vacuum manifold should be baked out after initial installation, or after
maintenance where the RGA sensor has been exposed to air. After an 8 hour
bakeout and cool down, the base pressure should be less than 5E-7 Torr at 40 eV,
200

A. If not, examine the background mass spectrum to look for the largest peak.

If the spectrum is dominated by mass 18, then continued baking is needed to
reduce the water vapor.

2.6.2 Avoiding Trapped Gas when Sampling Valves are Closed

When V2 is closed, the process pressure that is sampled is trapped between V2
and O2. This gas will pump out in a few minutes. However when possible, it is
better to keep V2 open until the process pressure has been evacuated. Then V1
can be opened to scan the background spectrum of the process vacuum system.

It is good practice to close the sampling valves when finished with measurements
to avoid pressure bursts to the RGA if the process is vented. However, the CPM
will turn off the emission and EM and close all sampling valves if a total pressure
trip occurs.

2 - 16

IPN 074-430-P1F

3.1 Theory of Operation

Ion

Source

Mass
Filter

Detector

A Closed Ion Source (CIS) analyzer is designed to sample a representative fraction
of a process atmosphere and direct the gas sample to the ionization region of a
Residual Gas Analyzer (RGA). The sampling and flow of the gas sample is
accomplished by successive reduction of pressure from the process to the Turbo
Molecular Pump through fixed geometry pump-in channels. By design, the sample
pressure in the ion source is higher than in the analyzer by a factor of 23. This
source/analyzer pressure ratio is true only for the CVD/Etch source. For the PVD
version, the ratio is higher by approximately seven times. Proper design enables
the CPM to detect levels of impurities in process gases significantly lower than
open-ion source RGA analyzers and at sub-ppm levels for many components.

Transpector CPM Operating Manual

Chapter 3

Theory and Application Guide

3.2 Sensors

The three main parts of the CPM sensor are:

 the ion source (ionizer),

 the quadrupole mass filter,

 the ion detector.

All of these parts are mounted on an electrical feedthrough flange, which is bolted
to the vacuum manifold. See Figure 3-1.

The sensor works only in a high-vacuum environment because the ions, once
created, must not collide with other gas molecules as they move through the
sensor — otherwise, they might not be detected.

IPN 074-430-P1F

Figure 3-1 CPM Sensor

3 - 1

Transpector CPM Operating Manual

1
2

3

4
5

6
7
8
9

10

1 Sealing Disk
2 Spring
3 Anode Cylinder
4 Filament Block
5 Shield Washer

6 Anode Plate
7 Insulator Rings
8 Focus Plates
9 Upper Tube Ring
10 Filament

PVD CVD/ETCH

NOTE: Electron Repeller not shown (for clarity).

3.2.1 The Ion Source

The Transpector PVD CIS, optimized for detecting parts per million (ppm)
impurities in a process gas (usually argon), has a fairly closed anode construction
that allows the sampled gas to be ionized at full process pressure. See Figure 3-2.

The CVD/Etch CIS is designed to be used in conjunction with a pressure reducing
orifice since process pressures are often far greater than the maximum at which
the ion source itself can operate. Additional modifications have been made to the
source which will extend the lifetime of the ion source in aggressive gas
applications.

Figure 3-2 The Closed Ion Source

Inside the ion source, a heated filament emits electrons which bombard the
incoming gas molecules giving them an electrical charge. While this charge may
be either positive or negative, the Transpector CPM detects only positive ions.
Once a molecule is charged, or ionized, electric fields can be used to manipulate it.

The filament is a tungsten wire. This type is often chosen for the PVD source
because it produces the fewest artifacts (for example, CO and CO
spectrum. For the CVD/Etch source, tungsten is chosen because it offers the best
resistance to aggressive gases, particularly those containing fluorine and chlorine.

3 - 2

) in the

2

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Transpector CPM Operating Manual

CAUTION

Tungsten filaments can be destroyed if operated at too
high a pressure because they react with oxygen and
water vapor at the filament operating temperature.

The term “emission current” refers to this stream of electrons emitted by the
filament. The filament is heated with a DC current from the emission regulator
circuit, with the resulting temperature of the filament used as the means of
controlling the emission current.

The filament is centered over a hole in the anode cylinder. The potential (voltage)
on the anode is positive with respect to the filament. The electron repeller, a flat
plate, is located behind the filament and is electrically connected to the negative
side of the filament. The potential difference between the filament and the anode
determines the kinetic energy (usually called the electron energy) of the emitted
electrons. The electron energy in turn determines how gas molecules will ionize
when struck by the electrons.

For the CPM, the electron energy can be operated from 70 eV down to 10 eV.
Operation below 70 eV is restricted to emission currents of no greater than 200
microamperes. At 70 eV or above, an emission current of 2 milliamperes is
available to maximize sensitivity for background monitoring and leak checking.

The ions formed within the anode cylinder are pulled away by the potential on the
focus lens and formed into an ion beam. (The focus lens is sometimes called an
extractor, since it extracts the ions from the region in which they are created.) The
focus lens also serves to focus the ion beam into the hole in the source exit lens.
To attract positive ions, the focus lens is biased negatively with respect to the
anode.

The potential on the source exit lens is negative with respect to the anode, and (for
the particular design illustrated here) the focus lens as well. The ion beam passes
through the hole in the exit lens and is injected into the mass filter.

IPN 074-430-P1F

The two different ion sources, PVD and CVD/Etch, have two different throughputs.
The PVD ion source has a pumping speed of about 0.1 liter / second. This pumping
speed will create a pressure differential between the ion source and the quadrupole
region. The PVD ion source is designed to operate with a maximum process
pressure up to about 10 mtorr (1.3E-2 mbar). The pressure in the closed ion source
will be about 160 times higher than the pressure in the quadrupole. Nominally, 3
mTorr in the ion source will produce about 2E-5 Torr in the quadrupole region.

The CVD ion source has a pumping speed of about 0.7 liter / second. This pumping
speed will create a pressure differential between the ion source and the quadrupole
region. The CVD ion source is designed to operate with a maximum process
pressure up to about 2 mTorr (2.7E-3 mbar). This ion source is typically used with
an orifice to reduce the high pressure down to about 2E-4 Torr (2.7E-4 mbar). The

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Transpector CPM Operating Manual

pressure in the closed ion source will be about 23 times higher than the pressure
in the quadrupole (e.g., 2.3E-4 Torr in the ion source will produce about 1E-5 Torr
in the quadrupole region).

See section 4.7, Filament Control, on page 4-10 for more ion source information.

3.2.2 The Quadrupole Mass Filter

The ions produced in the ion source are injected into the mass filter, which rejects
all ions except those of a specific mass-to-charge ratio. Most ions contain only one
unit of charge. In the Transpector family, the mass filter is a quadrupole type, to
which is applied a combination of RF and DC potentials. The RF frequency and
amplitude determine the mass, and the RF/DC ratio determines the filter selectivity.
See Figure 3-3.

Figure 3-3 The Sensor’s Quadrupole Mass Filter

3 - 4

The mass filter’s four rods (hence the term “quadrupole”) are alternately charged
to direct ions of specific masses down through the center, deflecting all larger and
smaller masses (hence the term “mass filter”).

The mass filter consists of four parallel rods, or poles, in a square array. The rods,
and the insulators in which they are mounted, form an extremely precise
mechanical assembly. The distance between the center of the square array and the
closest rod surface is known as the quadrupole radius, with the symbol r

. Ideally,

0

the rod should have a hyperbolic shape (towards the center of the assembly) rather
than round. If the ratio of the round rod radius to r

is made equal to 1.148, the

0

resulting electric field is a reasonably good approximation of the desired hyperbolic
shape.

Opposite rods are electrically connected together. The ions are directed into the
space between the poles, in a direction nominally parallel to the length of the rods.
There the ions are separated according to their mass-to-charge ratios by the lateral
forces resulting from the potentials applied to the poles.

IPN 074-430-P1F

Transpector CPM Operating Manual

XV 2ftcos U PZ++=

YV 2ft +cos U– PZ+=

V 14.438 M f2r

0

2

=

The applied potentials consist of an RF component and a DC component. The RF
potential on one set of rods is out of phase by 180° with respect to the RF potential
on the other set of rods, but of the same amplitude. For one pair of rods, the “X”
pair, the DC potential is positive. For the other, the “Y” pair, the DC potential is of
the same magnitude but negative. The DC and RF potentials are referenced to a
“center voltage” (sometimes called the “pole zero”). The following equations
summarize the potentials applied to the rods:

[1]

[2]

where
potential, and

The RF component removes the low-mass ions from the beam. Ions of sufficiently
low mass have their motions remain in phase with that of the applied RF. These
ions will gain energy from the field and oscillate with increasingly large amplitudes.
Eventually, as they travel along the length of the rods, they will strike one of the
rods and be neutralized. On the other hand, high mass ions are focused by the RF
component to an area close to the quadrupole’s long axis, the Z axis.

The DC component is superimposed on the RF to remove high mass ions from the
beam. The DC field deflects the high mass ions toward the negative poles,
opposing the focusing effects of the RF field. Eventually, these high mass ions
strike the negative rods and are neutralized. By a suitable choice of DC-to-RF ratio,
the mass filter can be made to discriminate against both high and low mass ions to
the desired degree.

The kinetic energy directed along the Z axis of the mass filter (usually called the ion
energy) is primarily dependent on the difference between the potential at which the
ions were formed (approximately the anode voltage), and the pole zero. The ion
energy is usually only slightly modified by the electric field (the “fringing” field)
between the source exit aperture and the quadrupole. Imbalances in the amplitude
of the two phases of RF applied to the rod pairs, and of the DC voltages also

IPN 074-430-P1F

applied, result in a further modification of the ion energy.

The mass of the ions passed by the filter is determined by the RF amplitude, the
RF frequency, and the quadrupole radius, as shown by the following equation:

V is the RF amplitude, f is the RF frequency, t is time, U is the DC

PZ is the pole zero.

[3]

where
atomic mass units (AMU) per electron charge,
and

For example, a 200 AMU singly charged ion would pass through a quadrupole with
nominal 1/4” diameter rods (an
peak-to-peak RF amplitude of approximately 700 Volts.

V is the peak-to-peak RF amplitude in Volts, M the mass of the ion in

f the RF frequency in megahertz,

r

the quadrupole radius in centimeters.

0

r

of 0.277 cm), operating at 1.78 MHz, at a

0

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Transpector CPM Operating Manual

The mass of ions transmitted (M) is directly proportional to the RF amplitude
(provided

f is constant). As the RF amplitude is increased, progressively higher

mass ions will be made to oscillate in phase with the RF field and thus gain
sufficient energy to strike the poles. Of course, the DC voltage must also be
increased to maintain the high mass rejection properties of the filter. A mass
spectrum can therefore be obtained by sweeping the RF amplitude, along with the
DC voltage.

The next section (Scanning Characteristics) discusses the variation in the
efficiency of transmission of ions through the filter with mass. Following that,

section 3.2.2.2, The Zero Blast, on page 3-7 discusses the behavior of the filter at

very low masses where the applied voltages approach zero.

3.2.2.1 Scanning Characteristics

As previously discussed, the quadrupole acts as a mass filter for a mixed beam of
ions, rejecting those of both high and low mass, while passing those of an
intermediate mass. The selectivity of the mass filter is expressed in terms of
resolution, R, which is numerically given by the ratio of the center mass, M, to the
width, M (both in AMU), of the pass band. Since the number of the ions passed
by the filter falls off gradually as the edge of the pass band is approached, the width
is defined at the point where the ion current falls to some specified fraction (usually
1/2 or 1/10) of the maximum value. The width of the pass band is determined by
the DC-to-RF ratio.

While the quadrupole drive circuits can be designed so that R varies in any desired
manner with M, it is usually most convenient to keep M constant at a value, which
ensures adequate separation of masses that are 1 AMU apart. This mode of
scanning is called Constant M. As a result, R is proportional to M, and therefore
the efficiency with which ions of mass M are transmitted through the quadrupole
decreases with M. Thus, the sensitivity of the sensor decreases as M increases.

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3 - 6

3.2.2.2 The Zero Blast

When the mass filter is tuned to very low masses, the RF and DC voltages applied
to the rods approach zero. The quadrupole then ceases to act as a filter, and a
large current of unseparated ions is detected. This current is called the “zero blast.”
See Figure 3-4.

The zero blast, present in all quadrupole-based sensors, can interfere with the
observation of masses 1 and 2 when significant quantities of higher-mass ions are
present. In some instruments, the magnitude of the zero blast is concealed by
preventing the voltages from reaching zero.

Figure 3-4 The Zero Blast

Transpector CPM Operating Manual

The zero blast — the large current of unseparated ions that enters the mass filter

IPN 074-430-P1F

when it is tuned to very low masses — can interfere with the observation of masses
1 and 2 when significant quantities of higher-mass ions are present. With the
Transpector2 electronics, the zero blast only produces parts-per-million
interference to masses 1 and 2.

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Transpector CPM Operating Manual

3.2.3 The Ion Detector

The ion detector region of the sensor consists of the quadrupole exit lens and the
detector itself. Often, the quadrupole exit aperture is biased negatively with respect
to the anode, focusing ions that have been transmitted through the quadrupole into
the detector element. The detector can be a simple Faraday Cup (FC), an Electron
Multiplier (EM), or a combination of both.

3.2.3.1 The Electron Multiplier (EM) Detector

The Electron Multiplier (EM) acts as an in situ preamplifier for improved sensitivity.
Although there are several different types of EM, their operating principals are the
same. Incoming ions are accelerated into the input of the EM by a high negative
voltage (usually -1.0 kV or more). When an ion strikes the surface of the EM, one
or more secondary electrons are emitted. These electrons are accelerated to a
second surface which is at a more positive potential, where additional electrons are
generated.

This process repeats itself until a pulse of electrons emerges from the output of the
EM and is collected on a Faraday Cup. The result is that as many as a million
electrons or more can be produced by each incident ion. The current from a
Faraday detector is positive (for positive ions) while an EM detector puts out a
negative signal.

The ratio of the electron output current to the incident ion current is known as the
EM gain. The gain primarily depends on the EM type, the voltage applied to the EM
input, the voltage applied across the EM, the condition of the EM, and, to a lesser
extent, the mass and chemical nature of the incident ion. In general, the EM gain
decreases as the ion mass increases.

The advantage of the EM detector sensor is it’s high sensitivity (as much as 0.25
amps/Torr), thus making it possible to measure partial pressures as low as 1x10

-13

Torr for some instruments in the Transpector family. A typical FC sensor would

-5

have a sensitivity of only 1x10
partial pressure of 5x10

-12

amps/Torr, resulting in a minimum detectable

amps/Torr. (Again, this value depends on the particular

Transpector model.)

IPN 074-430-P1F

3 - 8

3.3 How to Interpret The Result

This section explains how to interpret the measurements the CPM produces. It is
divided into three main parts:

1 section 3.3.1, Qualitative Interpretation Of Mass Spectra,, explains how to

determine which substances are present in the gas sample being analyzed.

2 section 3.3.2, Quantitative Interpretation of Mass Spectra (Calculating Partial

Pressures), on page 3-24, shows how to estimate how much of each substance

is present.

3 section 3.3.3, Additional Information For Interpreting Mass Spectra, on page

3-30, provides additional information that may help you interpret mass spectra.

Software packages for the Transpector family of instruments generally include
routines which serve as aids in the interpretation of spectra and the calculation of
partial pressures and relative concentrations.

For a discussion of how the Transpector produces its measurements, refer to

Chapter 2, How the CPM System Works.

Transpector CPM Operating Manual

3.3.1 Qualitative Interpretation Of Mass Spectra

The basic graphical output of a partial pressure analyzer is the mass spectrum. A
mass spectrum is a pattern of peaks on a plot of ion intensity as a function of ion
mass-to-charge ratio. Each chemical substance has a characteristic mass
spectrum. Different instruments will give slightly different spectra for the same
substance. The particular characteristics of the ionizer, mass filter, and detector,
not to mention the manner in which the sample is introduced into the mass
spectrometer, all influence the spectrum that is produced.

Rarely will a mass spectrum be obtained for a pure substance. Most of the time
(especially for residual gas analyzers), the spectrum obtained will be a composite
of the individual substances which together comprise the actual sample present.
See Figure 3-5.

IPN 074-430-P1F

3 - 9

Transpector CPM Operating Manual

Figure 3-5 A Mass Spectrum

Figure 3-5 shows the mass spectrum of air. The top graph is a trend analysis

showing the most important masses verses time. The bottom graph shows the data
taken during scan 41 and shows the air spectra over a logarithmic four decade
y-axis. The prominent peaks for air are mass 28 from Nitrogen, mass 32 from
Oxygen, mass 40 from Argon and mass 18 from water vapor.

IPN 074-430-P1F

3 - 10

3.3.1.1 Ionization Process

When a sufficiently energetic electron strikes a gas molecule, there are many
processes that can occur, just some of which are summarized in Table 3-1.

Table 3-1 Electron Impact Ionization Processes

XYZ + e- 

In all cases, the reactants are a high energy electron, e
The products of the first reaction are the molecule with a single electron removed
(the so-called parent ion) and two low energy electrons. In the second reaction, two
electrons are removed from the gas molecule, resulting a doubly charged ion.
Triply (or even more highly) charged ions are also possible, provided the incident
electron has enough energy.

+

XYZ

+ 2e

2+

XYZ

XY + Z

+

XY

+ Z + 2e

+

X

+ YZ + 2e

X + YZ

XZ + Y

+

XZ

+ Y + 2e

+ 3e

+

+ 2e

+

+ 2e

+

+ 2e

Transpector CPM Operating Manual

-

-

-

-

-

-

-

-

(1)

(2)

(3)

(4)

(5)

(6)

(7)

(8)

-

, and a gas molecule, XYZ.

Reactions 3 through 8 are all examples where the original molecule is broken into
fragments, at least one of which is positively charged (negative ions can also be
produced in this manner). Only the positive ion fragments are observed; the neutral
(uncharged) fragments are not detected. The mass spectrum obtained when the
parent molecule breaks apart under electron impact is commonly referred to as the
fragmentation pattern (or, sometimes, the cracking pattern). The fragmentation
pattern for nitrogen at an electron energy of 70 eV is given in Figure 3-6.

IPN 074-430-P1F

3 - 11

Transpector CPM Operating Manual

Figure 3-6 A Nitrogen Fragmentation Pattern

This nitrogen fragmentation pattern shows 14N+ (14 AMU), 14N

14N15N+

(29 AMU).

+

(28 AMU), and

2

In general, peaks from multiple charged species will be less intense than those for
the corresponding singly charged ion. For example, the doubly charged peak for
argon is typically less than one fifth as intense as the singly charged peak (it should
be noted that this intensity ratio is sensitive to the incident electron energy).

There are some situations when it is difficult to determine whether the ion is singly
or multiply charged. When a molecule is composed of two atoms of the same
element, the typical partial pressure analyzer cannot distinguish between the singly
charged one-atom fragment ion and the doubly charged two-atom molecular ion,
which will both have the same mass-to-charge ratio. Refer to Figure 3-6 above; the
peak at 28 AMU is the parent ion, N
peak at 14 AMU is from N

+

or N

+

. It is not discernible from this spectrum if the

2

2+

. It has been demonstrated, by other means, that

2

the 14 AMU peak in the nitrogen spectrum is from the singly charged fragment ion.

Most ions (with the important exception of complex hydrocarbons) have masses
very close to integer values. When the mass of an ion is not evenly divisible by the
number of charges on it, the mass-to-charge ratio will not be an integer. Thus, Ar

2+

will appear at 13.33 AMU, while F

will show up at 9.5 AMU.

3+

IPN 074-430-P1F

3 - 12

3.3.1.2 Isotope Ratios

An additional cause of multiple peaks in the mass spectrum of a pure substance is
that most (but not all) elements are composed of more than one isotope. For
example, 99.63% of all nitrogen atoms in nature have a mass of 14 AMU; only

0.37% have a mass of 15 AMU. Carefully examine the nitrogen spectrum in Figure

3-6. The largest peak at 28 AMU is the parent ion, N

isotope peak,
since there are two nitrogen atoms in the ion, each one of which has a 0.37%
chance of being 15 AMU.

Some elements have many intense isotopes. For example, xenon is 0.096% mass
124, 0.090% mass 126, 1.92% mass 128, 26.44% mass 129, 4.08% mass 130,

21.18% mass 131, 26.89% mass 132, 10.44% mass 134, and 8.87% mass 136.

Isotope ratios, like fragmentation patterns, are a very useful aid in recognizing
specific materials. Under normal partial pressure analyzer ionization conditions,
the peak height ratios for the various isotopes of an element will be the same as
the ratios of their natural abundance’s. That is, the probability of ionizing, for
example, the mass 35 isotope of chlorine (
ionizing the mass 37 isotope (
from HCl will be 3.07 to 1 (75.4% / 24.6%).

14N15N+

Transpector CPM Operating Manual

+

. The peak at 29 AMU is the

2

, and is 0.74% (two times 0.37%) as high as the parent peak

35

37

Cl). Thus, the peak height ratio of mass 35 to 37

Cl) is the same as the probability of

For a listing of the isotopic ratios for the lighter elements, see Table 3-2. For a
complete listing of the natural abundances for the isotopes of all the elements, see
the Handbook of Chemistry and Physics from CRC Press.

Table 3-2 Isotope Ratios

Isotope Ratios

Element Mass No. Relative

Abundance

H 1 99.985

20.015

He 3 0.00013

IPN 074-430-P1F

B 10 19.78

C 12 98.892

N 14 99.63

4 ~100.0

11 80. 22

13 1.108

15 0.37

3 - 13

Transpector CPM Operating Manual

Table 3-2 Isotope Ratios (continued)

Isotope Ratios

Element Mass No. Relative

Abundance

O 16 99.759

17 0.0374

18 0.2039

F19 100.0

Ne 20 90.92

21 0.257

22 8.82

Na 23 100.0

Al 27 100.0

Si 28 92.27

29 4.68

30 3.05

P31 100.0

S 32 95.06

33 0.74

34 4.18

36 0.016

Cl 35 75.4

37 24.6

Ar 36 0.337

38 0.063

40 99.600

IPN 074-430-P1F

3 - 14

3.3.1.3 Electron Energy Effects

As was previously mentioned, the exact fragmentation pattern observed will
depend on the energy of the bombarding electrons. Figure 3-7 (from a paper by W.
Bleakney, Physical Review, 36, p. 1303, published in 1930) graphs the number of
argon ions (of different charge states) produced per incident electron per Torr of
gas pressure as a function of electron energy.

Figure 3-7 Electron Energy Effects

Transpector CPM Operating Manual

This graph shows the number or argon ions, N, formed per electron per Torr at
0°C versus electron energy.

The appearance potential — the minimum electron energy required to produce a
specific ion — for Ar

+

is 15.7 eV. The number of argon ions produced rises steeply

with energy until a maximum is reached at about 55 eV. As the electron energy

+

rises above this level, the rate of Ar

IPN 074-430-P1F

Typically, in mass spectrometry, electron impact ionization is carried out at an
electron energy of 70 eV. This value is chosen primarily for two reasons. First, it is

production slowly decreases.

above the minimum energy required to produce at least some positive ions from
any sufficiently volatile chemical species. Second, it is near the energy at which the
rate of ion production is at its maximum for most of the common gases. Thus,
operating at 70 eV provides a universal detector with good sensitivity for gases
typically encountered.

Sometimes there is a problem with mass spectral overlap — ions with differing
chemical composition form chemically distinct source molecules, but with the same
mass. For example, there is a problem with detecting small amounts of water vapor
in argon, as is often desired when monitoring a PVD process. Normally, water
vapor is monitored at 18 AMU (H

O+). There is a problem with overlap from the

2

doubly charged argon-36 isotope which also shows up at mass-to-charge ratio 18

3 - 15

Transpector CPM Operating Manual

(most mass filters, including quadrupoles, are really mass-to-charge ratio filters
and not true mass filters). Approximately 3,400 parts per million of all argon atoms

2+

are the mass 36 isotope. Also, at 70 eV, the doubly-charged argon ion, Ar
about 15% of the intensity of the singly charged Ar
approximately 510 ppm (3,400 ppm times 15%) of

+

ion. Thus, there will be

36Ar2+

at 18 AMU, making it

, has

impossible to detect several ppm of water vapor at the same mass. Another ion

+

from water vapor, e.g. the OH

+

OH

at 17 AMU from water vapor has in intensity of only 25% of that of the parent

ion, H

O+. Thus, to detect several ppm of water vapor would require the detection

2

at 17 AMU could be used instead. Unfortunately,

of less than one ppm of current at 17 AMU. This is difficult because there will be
some tailing of the 510 ppm

36Ar2+

peak at 18 AMU over onto 17 AMU.

The best solution to this argon/water vapor problem is to make use of a property of
ions known as the appearance potential. The appearance potential for an ion from
a given substance is the minimum electron energy required to produce that
particular type of ion from the specified substance. A list of appearance potentials
for various ions from common gases is given in Table 3-3.

Table 3-3 Appearance Potential for Some Common Ions

Appearance Potential

Ion Gas Mass-to-Charge

+

Ar

Ar

Ar

N

N

O

O

CO

CO

O

C

CO

O

C

H

OH

H

HF

2+

3+

+

2

+

+

2

+

+

2

+

+

+

+

+

+

+

O

2

+

+

2

+

argon 40 15.7

argon 20 43.5

argon 13.3 >70

nitrogen 28 15.6

nitrogen 14 24.3

oxygen 32 12

oxygen 16 14.01

carbon dioxide 44 13.8

carbon dioxide 28 19.4

carbon dioxide 16 19.4

carbon dioxide 12 22.7

carbon monoxide 28 14.1

carbon monoxide 16 20.9

carbon monoxide 12 20.9

water vapor 18 12.6

water vapor 17 13.5

hydrogen 2 15.5

hydrogen fluoride 20 16.1

(eV)

IPN 074-430-P1F

3 - 16

Transpector CPM Operating Manual

CAUTION

From Table 3-3, it can be seen that the appearance potential for Ar2+ is 43.5 eV,
while that for H

O+ is only 13.5 eV. Therefore, by choosing an electron energy

2

below 43.5 but above 13.5 eV, it is possible to produce the water vapor ion without
producing doubly charged argon ions, thus permitting the detection of water vapor
at 18 AMU.

The Transpector CPM sensor and electronics are capable of operation at electron
energies below 70 eV, with reduced electron emission (200 microampere,
maximum). For purposes of monitoring PVD processes, it is recommended that the
CPM be operated at 40 eV with an electron emission current of 200 microampere
(to reduce power to the filament). The software has the capability to switch the
CPM between 70 eV, 2.0 milliampere (CIS “high”) for background monitoring, and
40 eV, 200 microampere (CIS “low”) for process monitoring.

When using FabGuard Explorer, it is possible to change the electron energy in the
CIS “on” mode to any voltage between 10 and 100 eV.

Especially below 20 eV, it is necessary to limit the
electron emission current so as not to overpower the
filament which would result in shortened filament life.
Setting the electron energy is accomplished by selecting
the TUNE PARAMETERS menu while operating in the
TUNE mode.

3.3.1.4 A Qualitative Interpretation Guide

To use a partial pressure analyzer to identify unknown substances, you must
recognize three characteristics: fragmentation patterns, multiply charged ions, and
isotope ratios. Simple spectra are, in general, relatively easy to interpret and will
yield useful identifications. The analysis of complicated mixtures of substances is
much more difficult.

IPN 074-430-P1F

Table 3-4 is intended as a spectrum interpretation guide which may be of use when

first examining an unknown spectrum. The guide lists the masses of peaks,
possible ion identities for each of these masses, and common sources for each of
these ions. This list is by no means all-inclusive, and only goes up to 50 AMU.
Processes such as CVD and Etch often involve fairly complex chemicals which
provide very complicated spectra that extends to masses well beyond 50 AMU.

3 - 17

Transpector CPM Operating Manual

.

Table 3-4 Spectrum Interpretation Guide

Spectrum Interpretation Guide

AMU # Chemical Symbol Sources

1 H Water F or Hydrogen F

2H

3 HD,

, D Hydrogen, Deuterium (2H)

2

3

H Hydrogen-Deuterium, Tritium (3H)

4 He Helium

5 No known elements

6 C Doubly Ionized

7N DI

8O DI

14

N (Rare)

16

O (Rare)

12

C (Rare)

9 No known elements

10 Ne,

10

BDI

11 Ne, 11BDI

20

Ne (Rare), BF3, BCl

22

Ne (Rare), 11BF3, BCl

3

3

12 C Carbon, Carbon Monoxide F,

Carbon Dioxide F

13 CH,

14 N, CH

15 CH

16 O, CH

17 OH, NH

18 H

13

C Methane F, Carbon Isotope

2

3

, NH

4

2

3

O Water

2

Nitrogen, Methane F or Note 1

Methane F or Note 1

Oxygen or Carbon Monoxide F, Ammonia

Water F, Ammonia F

19 F Fluorine or Freon F

20 Ar

2+

, Ne, HF Argon Dl, Neon, Hydrofluoric acid

3 - 18

21

22

22

Ne, CO

23

24 C

25 C

26 C

27 C

28 N

29 CH

30 C

2

H See Note 1

2

2H2

2H3

, CO, C2H4, Si Nitrogen, Carbon Monoxide, Ethylene P,

2

3CH2

2H6

31 P, CH

2

Neon, DI CO

2

See Note 1

CN See Note 1, Hydrogen Cyanide F

, Al, HCN See Note 1, Aluminum, Hydrogen Cyanide

Silicon

Ethane F or Ethanol F or Isopropyl Alcohol

, NO Ethane P, Nitric Oxide

OH, Phosphorus, Methanol F,

2

IPN 074-430-P1F

Transpector CPM Operating Manual

Table 3-4 Spectrum Interpretation Guide (continued)

Spectrum Interpretation Guide

AMU # Chemical Symbol Sources

32 O2, S Oxygen, Sulfur, Methanol P

33 HS Hydrogen Sulfide F

34 H

S, 34S, O

2

2

Hydrogen Sulfide P, Sulfur isotope,
Oxygen isotope

35

35

36 HCl,

Cl Chlorine isotope, See Note 2

36

Ar, C

3

Hydrochloric acid, Argon isotope,
hydrocarbons

37

37

38

Cl, C3H Chlorine isotope, See Note 2, hydrocarbons

37

HCl, C3H

2

Hydrochloric acid or See Note 2,
hydrocarbons

39 C

3H3

40 Ar, C

41 C

42 C

43 C

3H5

3H6

3H7

44 CO

45 CH

46 CH

47 C

35

48 HC

49 C

50 C

37

37

3H4

, CH3CO Note 1, Acetone F or Methyl Ethyl ketone F

, C3H

2

8

O Ethanol F or Isopropyl alcohol F

3CH2

OH Ethanol P

3CH2

Cl See Note 2

35

Cl, SO See Note 2, Sulfur Dioxide F

Cl See Note 2

Cl, CF2, C4H

See Note 3, hydrocarbons

Argon, See Note 1, hydrocarbons

See Note 1, hydrocarbons

See Note 1, hydrocarbons

Carbon dioxide, See Note 3

See Note 2, Freon F, Note 3

2

NOTES: (1) Fragments of several hydrocarbons, such as mechanical pump

oil, diffusion pump oil, vacuum grease, cutting oil, and organic

IPN 074-430-P1F

solvents.
(2) Fragments of several chlorinated hydrocarbons, such as carbon
tetrachloride, tichloroethylene, and many freons.
(3) Fragments from both straight chain hydrocarbons and benzene
ring hydrocarbons.
(4) F = Fragment ion; P = Parent ion; DI = Doubly ionized

3 - 19

Transpector CPM Operating Manual

3.3.1.5 Dry Etching Chemistries

Table 3-5 lists some materials to be etched, some of the typical chemistries used,

some of the chemical species which may be important, and a list of masses which
can be used to monitor each of these species. It should be noted that there exist
many different chemistries for etching any given film, and that only a few of the
more common etch processes are listed. The important species listed for each
process were picked for the list on the basis of their either being the reagent gases
for the listed process, known reaction product gases, potentially troublesome
impurities (for example, H
means be considered an all-inclusive list; there may be other important species,
such as highly reactive intermediates, which have not been included. The list of
monitored masses for each process is also only a general guide. Note that
significant spectral overlap exists (for example, COF
for the listed masses which must be taken into account when interpreting the data.
Furthermore, many of the cracking patterns for the important species are very
complicated because of the molecule’s complexity and/or because of multiple
isotope peaks, and only a few of the more intense or unique masses are listed.

Table 3-5 Dry Etching Chemistries

O), or probable by-product gases. This should by no

2

and SiF4 or CO, CO2 and N2)

2

Etched

Material

Al (& alloys) BCl

Typical

Reagents

/Cl2 (+N2)BCl

3

Important

Species

3

Cl

2

N

2

O

2

AlCl

3

Al2Cl

6

HCl

H

O

2

Monitored

Masses

81, 83, 116, 118, 46, 48

70, 72, 74

28, 14

32, 16

134, 97, 62, 27

266, 231, 196, 161, 134, 97, 62

36, 38

18, 17

IPN 074-430-P1F

3 - 20

Table 3-5 Dry Etching Chemistries (continued)

Transpector CPM Operating Manual

Etched

Material

W (& alloys)

(TiN liner)

W (& alloys)

(TiN liner)

Typical

Reagents

SF

6

NF

3

Important

Species

SF

6

WF

6

F

2

HF

H

O

2

O

2

N

2

WOF

4

TiF

4

NF

3

WF

6

F

2

HF

H

O

2

N

2

O

2

WOF

4

TiF

4

Monitored

Masses

127, 89, 108

279, 281

38

20

18, 17

32, 16

28, 14

257, 259

86, 67, 105, 48

52, 33, 71

279, 281

38

20

18, 17

28, 14

32, 16

257, 259

86, 67, 105, 48

SiO

2

(& BPSG*)

IPN 074-430-P1F

CHF

CHF

/CF4,

3

3/O2

CHF

CF

O

SiF

CO

HF

H

2

COF

C2F

3

4

2

4

2

51, 69

69, 50

32, 16

85, 66, 47

44, 28, 16, 12

20

O

2

6

18, 17

47, 66

119

3 - 21

Transpector CPM Operating Manual

Table 3-5 Dry Etching Chemistries (continued)

Etched

Material

Si3N

4

Reagents

Poly-Si BCl

HBr/Cl2/O

Typical

CF4/O

/Cl

3

Important

Species

2

CF

O

SiF

NF

CO

4

2

4

3

2

HF

H

O

2

COF

2

N

2

CO

2

BCl

Cl

SiCl

3

2

4

HCl

H

O

2

2

HBr

Cl

O

SiCl

SiBr

SiBrXCl

2

2

4

4

(1-X)

H2O

HCl

Monitored

Masses

69, 50, 31

32, 16

85, 66, 47

52, 33, 71

44

20

18, 17

47, 66

28, 14

28, 12

81, 83, 116, 118, 46, 48

70, 72, 74

133, 135, 170

36, 38

18, 17

80, 82

70, 72, 74

32, 16

170, 133, 135

348, 267, 269

many peaks

18, 17

36, 38

3 - 22

* BPSG - boro-phospho-silicate glass

IPN 074-430-P1F

3.3.1.6 Tungsten CVD

Table 3-6 lists some of the materials of interest and the masses at which to monitor

them for blanket tungsten or tungsten silicide deposition. Oxygen and water vapor
are unwanted contaminants during tungsten deposition because they react with the
tungsten hexafluoride to produce tungsten oxyfluorides and oxides, which, except
for WOF
WOF

may be the only indication that water vapor or oxygen are also present, but

4

not detected by the mass spectrometer because of rapid reaction with the tungsten
hexafluoride.

Table 3-6 Tungsten CVD Materials Of Interest

Transpector CPM Operating Manual

, are nonvolatile and can result in particle generation. The presence of

4

Chemical Type Monitoring Mass

WF

H

SiH

6

2

4

reagent 279

reagent 2

reagent 30, 31, 32

Ar reagent 40

N

2

reagent 28

(interference from SiH4)

HF product 20 (at 35 eV)

O

2

contaminant 32

(interference from SiH4)

H

O contaminant 18 (at 35 eV)

2

WOF

4

by-product 257

3.3.1.7 Copper MOCVD

Table 3-7 lists some of the materials of interest and the masses for monitoring them

for the deposition of copper using Cu

I

(hfac)(tmvs). Oxygen and water vapor are

unwanted contaminants.

IPN 074-430-P1F

Table 3-7 Copper MOCVD Materials Of Interest

Chemical Types Monitoring Mass

I

Cu

(hfac)(tmvs) reagent 201, 63

H

2

reagent 2

Ar reagent 40

tmvs product 100, 85

H(hfac) product 139

O

2

H

O contaminant 18

2

contaminant 32

(if Ar present, use 35 eV)

3 - 23

Transpector CPM Operating Manual

PP

a

K

abIab

=

PP

a

M

ab

AbIab=

M

ab

1

FF

ab

XF

a



------------------------------=

3.3.2 Quantitative Interpretation of Mass Spectra (Calculating Partial Pressures)

Partial pressure is defined as the pressure of a designated component in a gas
mixture. By Dalton’s Law, the sum of all the partial pressures is the total pressure.
The partial pressure analyzer is designed so that the height of a peak in a mass
spectrum is proportional to the number of ions giving rise to that peak. Also by
design, the number of ions is more or less proportional to the partial pressure of the
substance giving rise to that peak (over some specified operating pressure range).
Therefore, the height of a peak is proportional to the partial pressure of the
substance giving rise to that peak.

The following equation shows the relationship between the partial pressure of
substance determined by measuring the ion current at mass b:

[1]

The partial pressure of substance a is symbolized by PP
proportionality constant for the peak at mass b from substance a, and I

, while Kab is the

a

ab

is the ion

current at mass b from substance a.

The proportionality constant, K

, depends on the nature of the substance being

ab

detected and on the characteristics of the partial pressure analyzer. The substance
dependent part is called the material factor, M
called the analyzer factor, A

, and depends primarily on the ion mass, b. Therefore,

b

. The Instrument dependent part is

ab

the original equation [1] can therefore be rewritten as follows:

[2]

The material factor, M

, depends on the fragmentation pattern for the particular

ab

substance, the fragmentation pattern for a reference gas (usually nitrogen), and the
ease with which the substance can be ionized relative to the same reference gas.
The relationship involved is shown in equation [3]:

[3]

The term FF

is the fragmentation factor for substance a at mass b. It is equal to

ab

the fraction of the total current of all ions from substance a which have a mass b.
Finally, XF
XF

=1). That is, it is the ratio of total ion current (for all masses) from substance a

N

is the ionization probability of substance a, relative to nitrogen (i.e.,

a

to the total ion current from nitrogen, both measured at the same true partial
pressure. Both fragmentation factors and ionization probabilities depend strongly
on the energy of the ionizing electrons. If the correct values of these factors are not
known for the exact conditions of the particular analyzer being used, they can be
approximated using published values for other conditions with, generally, only a
small loss in accuracy.

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Transpector CPM Operating Manual

Fragmentation factors can be calculated from fragmentation patterns given in the
general references cited in Chapter 10, Bibliography. Other valuable references
include the Index of Mass Spectral Data from ASTM, and EPA/NIH Mass Spectral
Data Base by Heller and Milne and an extensive library of spectra is available from
the National Institute of Standards and Technology.

Table 3-8 lists the fragmentation factors (FF) for the major peaks for selected

substances.

NOTE: Actual fragmentation factors vary significantly depending especially on the

ionizer, electron energy, and mass filter turning. For best accuracy,
measure fragmentation factors with the same instrument used for the
analysis, under the same tuning conditions

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Transpector CPM Operating Manual

Table 3-8 Typical Fragmentation Factors for the Major Peaks of Some Common Substances

.

(At 70eV Electron Energy)

Mass FF Mass FF Mass FF

Acetone (CH

CO Helium He Oxygen O

3)2

43 .46 4 1.00 32 .82

58 .11 16 .18

42 .03 Hydrogen H

2

27 .05 2 1.00 Toulene C6H5CH

Argon Ar 92 .24

40 .87 Krypton Kr 39 .07

20 .13 84 .45 65 .04

86 .13 63 .03

Benzene C

6H6

82 .10

78 .43 83 .10 Trichlorethylene C

51 .09 130 .17

52 .09 Methane CH

4

50 .08 16 .44 132 .16

15 .39 97 .10

Carbon Dioxide CO

2

14 .09 60 .08

44 .86 13 .05

28 .06 12 .02 Water H

16 .05 17 .01 18 .77

12 .01 17 .21

Methanol CH

OH 16 .02

3

Carbon Monoxide CO 31 .31

28 .87 32 .21 Xenon Xe

12 .08 29 .07 132 .26

16 .04 28 .04 129 .26

29 .01 131 .22

Neon Ne 134 .11

Ethanol C

OH 20 .91 136 .09

2H5

31 .45 22 .09

45 .22

46 .08 Nitrogen N

2

27 .07 28 .87

29 .05 14 .12

29 .01

2

3

91 .33

HCl

2

3

95 .16

O

2

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Transpector CPM Operating Manual

Ionization probability factors can be approximated by substituting the relative ion
gauge sensitivities for various gases. Table 3-9 gives relative ion gauge
sensitivities for some common gases.

NOTE: This table lists relative ionization gauge sensitivities for selected

molecules. The data was compiled from Empirical Observations on the
Sensitivity of Hot Cathode Ionization Type Vacuum Gauges by R. L.
Summers (NASA Technical Note NASA TN D5285, published in 1969).
Similar, although more limited, lists of ionization sensitivities can be found
in the books by O’Hanlon (Chapter 8, Section 1.1) and Drinkwine and
Lichtman (Table I, page 5).

HINT: Actual ionization probabilities vary significantly depending especially on the

ionizer and the electron energy. For best accuracy, measure the relative
ionization probability using a hot cathode ionization gauge (calibrated for
nitrogen) to monitor a known pressure of the substance of interest. The
ratio of the gauge reading to the known true pressure is the relative
ionization probability. To determine the true pressure, use a gauge which is
gas species independent (e.g., a capacitance manometer) or a gauge with
a known sensitivity factor (e.g., a spinning rotor gauge).

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Transpector CPM Operating Manual

Table 3-9 Ionization Probabilities For Some Common Substances

Substance Formula Relative

Ionization

Gauge

Sensitivity

Substance Formula Relative

Acetone (CH3)2CO 3.6 Hydrogen chloride HCl 1.6

Air 1.0 Hydrogen fluoride HF 1.4

Ammonia NH

3

Argon Ar 1.2 Hydrogen sulfide H

Benzene C

Benzoic acid C

Bromine Br

Butane C

Carbon dioxide CO

Carbon disulfide CS

6H6

COOH 5.5 Lithium Li 1.9

6H5

2

4H10

2

2

1.3 Hydrogen iodide HI 3.1

S2.2

2

5.9 Krypton Kr 1.7

3.8 Methane CH

4

4.9 Methanol CH3OH 1.8

1.4 Neon Ne 0.23

4.8 Nitrogen N

2

Carbon monoxide CO 1.05 Nitric oxide NO 1.2

Carbon tetrachloride CCl

Chlorobenzene C

Chloroethane C

6H5

2H5

Chloroform CHCl

Chloromethane CH

Cyclohexane C

6H12

Deuterium D

Dichlorodifluormethane CCl

Dichloromethane CH

Dintrobenzene C

6H4

Ethane C

Ethanol C

2H5

Ethylene oxide (CH

4

Cl 7.0 Oxygen O

Cl 4.0 n-Pentane C5H

3

Cl 3.1 Phosphine PH

3

2

2F2

2Cl2

(NO2)

2

2H6

OH 3.6 Trinitrobenzene C6H3(NO2)

O2.5 Water H

2)2

6.0 Nitrous oxide N2O1.7

2

12

4.8 Phenol C6H5OH 6.2

3

6.4 Propane C3H

0.35 Silver perchlorate AgClO

2.7 Stannic iodide Snl

7.8 Sulfur dioxide SO

7.8 Sulfur hexafluoride SF

2.6 Toluene C6H5CH

8

4

4

2

6

3

3

O1.0

2

Helium He 0.14 Xenon Xe 3.0

Ionization

Gauge

Sensitivity

1.6

1.0

1.0

6.0

2.6

3.7

3.6

6.7

2.1

2.3

6.8

9.0

IPN 074-430-P1F

3 - 28

Hexane C

6H14

Hydrogen H

6.6 Xylene C6H4(CH3)

2

0.44

2

7.8

Transpector CPM Operating Manual

A

a

1

TFbDF

ab

 G S

---------------------------------------------------=

PP

a

FF

N28

FF

ab

XF

ab

 TF

b

 DF

ab

 G S

-------------------------------------------------------------------------------------------







Iab=

The analyzer factor, Ab, depends on the transmission and detection characteristics
of the analyzer, the Electron Multiplier gain (if the analyzer is so equipped), and the
basic sensitivity, as indicated in equation [4]:

[4]

Here, TF
factor is the fraction of ions at mass b which pass through the mass filter, relative
to nitrogen ions at mass 28. Nominally, the transmission factor is equal to 28
divided by the mass of the ion, b.

The detection factor, DF
Multiplier, the detection factor is a function of the mass of the ion and its chemical
nature, and is measured relative to that of a reference gas, typically nitrogen. In
general, as the mass ion increases, the Electron Multiplier detection factor
decreases.

The gain of the Electron Multiplier, G, measured at mass 28 for nitrogen, is the
Electron Multiplier output current divided by the Faraday mode output current,
under otherwise identical conditions. The multiplier gain is a strong function of the
high voltage applied.

The sensitivity of the instrument, S, is the Faraday mode ion current from a given
pressure of pure nitrogen measured at mass 28, and is typically expressed in
amps/Torr.

The overall relation between partial pressure and ion current, given in equation [5],
is quite general. The constants for this equation can be obtained from various
tables, but for the best accuracy, they should be measured for each instrument.

is the transmission factor of the mass filter at mass b. The transmission

b

, is equal to 1 for a Faraday Cup detector. For an Electron

ab

A brief discussion of each of the terms follows:

IPN 074-430-P1F

PP

a

FF

ab

FF

N28

. . . . . . . . . . . . . . . . . . . . . . . . . . partial pressure of substance a (usually in

Torr).

. . . . . . . . . . . . . . . . . . . . . . . . . fragmentation factor, or fraction of total ion

current from substance a having mass b
(dimensionless; see Table 3-8 on page

3-26).

. . . . . . . . . . . . . . . . . . . . . . . . fragmentation factor for N2+ ions at 28 AMU

from nitrogen (dimensionless; typically
around 0.9).

[5]

3 - 29

Transpector CPM Operating Manual

XFa. . . . . . . . . . . . . . . . . . . . . . . . . . ionization probability of substance a relative

to nitrogen; approximately the same as the
relative ion gauge sensitivity as shown in
(dimensionless).

. . . . . . . . . . . . . . . . . . . . . . . . . . transmission factor, the fraction of total ions

TF

b

at mass b which pass through the mass filter,
relative to ions with a mass of 28 AMU;
nominally, T

DF

. . . . . . . . . . . . . . . . . . . . . . . . . detection factor for mass b ions from

ab

= 28 / M (dimensionless).

FM

substance a, relative to nitrogen at 28 AMU;
assumed to be 1.00 for Faraday detectors,
but varies for Electron Multiplier detectors
(dimensionless).

G . . . . . . . . . . . . . . . . . . . . . . . . . . . Electron Multiplier gain for nitrogen ions at 28

AMU (dimensionless; set equal to 1 for a
Faraday Cup detector).

S. . . . . . . . . . . . . . . . . . . . . . . . . . . . sensitivity of instrument to nitrogen, the ion

current at 28 AMU per unit of nitrogen partial
pressure (usually in amps/Torr).

I

. . . . . . . . . . . . . . . . . . . . . . . . . . . ion current of mass peak b resulting from

ab

3.3.3 Additional Information For Interpreting Mass Spectra

The following paragraphs contain additional information which may be of use when
interpreting mass spectra.

3.3.3.1 Ion Source Characteristics

It is important to recognize that even a closed ion source, and the particular inlet
system selected, can have an effect on the mass spectrum obtained.

The analyzer itself is a source of gas molecules because of outgassing from its
surfaces. Usually, the outgassing levels can be reduced by baking the analyzer in
vacuum and by using the Degas function (wherein the ion source surfaces are
bombarded by high energy electrons). Overnight bakeouts at the maximum
allowable temperature, are the best way to minimize the effects of outgassing of
the sensor, manifold, and inlet system.

substance a (in amps; assumes that there
are no other substances present which
contribute significantly to the total current at
mass peak b).

IPN 074-430-P1F

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Transpector CPM Operating Manual

CAUTION

NOTE: It can take more than three hours for all parts of the sensor to reach

maximum temperature during a bakeout, and more than six hours to cool
back down.

Make sure that the Electron Multiplier high voltage is
turned off if the bakeout temperature exceeds 150°C.
Otherwise, permanent damage to the EM may result.

It is possible that the opposite of outgassing can occur, that is, gas molecules can
be captured by the surfaces of the sensor. This effect is called “pumping”. In such
cases, the magnitude of the signals of the gases pumped will be lower than is
properly representative of the composition of the gas in the vacuum chamber.
Significant temporary pumping effects will frequently occur following degassing of
the ion source.

Reactions involving gas molecules on surfaces of the analyzer can result in a
change of composition. Gases can either be consumed by the surfaces, or
produced by the surfaces. One example of gas consumption is the reaction of
oxygen with a hot filament, particularly when tungsten filaments are used. The
typical result is an anomalously low concentration of oxygen detected. See
O’Hanlon’s book (Chapter 8, Section 2) for more information on filament materials
and their interactions with the gas being analyzed. An example of gases being
produced from surfaces is the liberation of carbon monoxide molecules from a
thorium oxide coated iridium filament by a sputtering mechanism in the presence
of significant quantities of argon. It is for this reason that the PVD version of the CIS
uses tungsten filaments.

There are cases where at least some of the ions detected are emitted from
surfaces in the ion source under electron bombardment, and are not generated in
the gas phase from neutral molecules. This process is known as electron
stimulated desorption (ESD), or sometimes as electron induced desorption (EID).

IPN 074-430-P1F

When the sensor has been exposed to fluorine containing substances (such as
sulfur hexafluoride, chlorofluorocarbons, perfluorotributylamine, or
perfluorokerosene) for extended periods of time, it is not uncommon for a strong F

+

peak at 19 AMU to remain even after the fluorine containing substance has been
removed. When operating in the UHV region, EID/ESD of H

+

, C+, O+, and CO+
(and other ions) is not uncommon. The clue to diagnosing this problem is that the
observed fragmentation patterns do not match known gas phase patterns. See
pages five and six, and typical spectra TS2 through 5, 16, 28, and 30 of Partial
Pressure Analyzers and Analysis by Drinkwine and Lichtman for more information
on EID/ESD.

3 - 31

Transpector CPM Operating Manual

Partial pressure analyzers are also characterized by varying degrees of mass
discrimination, that is, the sensitivity of the instrument is a function of mass. Ion
sources show mass discrimination because various substances offer different
degrees of difficulty of ionization. Generally, heavy, large molecules are ionized
more readily than light, small molecules. There is a rough correlation between the
number of electrons in a molecule and its ease of ionization. Although the total ion
yield (that is, the sum of ions of all masses) is electron energy and ionizer
dependent, a reasonable estimate for the number of ions produced (relative to
some standard, usually nitrogen) in a partial pressure analyzer is the relative
ionization gauge sensitivity.

3.3.3.2 Scanning Characteristics

Quadrupole mass filters can also exhibit mass discrimination characteristics
depending on how the control voltages are varied during the sweep through the
mass range. Most instruments are designed to operate with a constant peak width
(constant M) which results in a resolution which is proportional to the mass. This
characteristic provides a good degree of peak separation throughout the mass
spectrum, but results in an ion transmission efficiency (that is, the fraction of all ions
of the selected mass entering the mass filter which are transmitted through it)
which decreases as mass increases.

The way the mass scale is “calibrated” or “tuned” — the way the peak positions and
widths are adjusted — can have a significant effect on the transmission efficiency
of the mass filter across the mass spectrum. If the adjustments are not made
properly, the ratios of peak heights across the mass range will not be correct.

3.3.3.3 Fragmentation Factors

The fragmentation factor is the fraction of the total ion current contributed by ions
of the chosen mass. Only peaks contributing at least one percent to the total ion
current are included in the list. The sum of the factors for all the peaks in a mass
spectrum cannot exceed 1.00. The sum can be less than 1.00 if only some of the
peaks are listed (either there are many peaks, or some of the ions produced lie
outside the mass range of the particular instrument used).

The data presented in Table 3-8 on page 3-26 are typical fragmentation factors for
some common gases at an electron energy of 70 eV. These fragmentation factors
can vary considerably with electron energy. For instance, at 35eV the only
significant peak made in argon is Ar

+

at 40 AMU.

IPN 074-430-P1F

3 - 32

4.1 CPM Controller Front Panel

CPM Controller

V1 (Low Pressure)

V2 (High Pressure)

V3 (High Conductance)

V4 (Bypass)

V5 (Calibration Std.)

LOW

HIGH

Accelerate

Normal

Fault

Remote On

HEATER TURBO PUMPVALVES POWER

4.1.1 LED Indicators

Figure 4-1 CPM Front Panel Indicators

Transpector CPM Operating Manual

Chapter 4

Operation

VALVES (illuminated Green when valve is open)

V1: Low Pressure (LP)

V2: High Pressure (HP)

V3: High Conductance (HC)

V4: Bypass

V5: Calibration reference

HEATER

IPN 074-430-P1F

Low: ~90°C (Amber LED Illuminated)

High: ~150°C (Both LEDs Illuminated)

4 - 1

Transpector CPM Operating Manual

WARNING - Risk Of Electric Shock

TURBO PUMP

Accelerate: Amber LED Illuminated when the Turbo Molecular Pump is on, but

not at normal state.

Normal: System is normal and a good vacuum has been attained. System
Normal is described as the Turbo Molecular Pump reaching a speed greater
than or equal to 72,000 RPM.

Fault: System fault (See Chapter 6, Diagnosing Problems).

Remote On: Amber LED when illuminated indicates service mode is enabled.

For use only by qualified technical support personnel. For information, contact
INFICON customer support (refer to section 1.4 on page 1-5).

To eliminate personal injury the Turbo Molecular Pump
must be completely at rest and the controller power
supply must be disconnected before the Turbo Molecular
Pump connecting cable can be removed.

POWER

Illuminates when electrical power is applied to the CPM controller.

IPN 074-430-P1F

4 - 2

4.2 HexBlock

CAUTION

The HexBlock is a solid piece of machined inert 316 stainless steel that provides
several inlets, a process pressure gauge (CDG) and a calibration reference. It
allows for up to three pressure ranges, including a high conductance inlet that
covers various applications such as High Density Plasma Etch (HDP), TiN
Deposition such as TDMAT, W CVD, or any other semiconductor process.

It also has many other advantages, such as:

 Small vacuum path lengths,

 Minimum surface area,

 Interchangeable orifices,

 Various process connections (CF40, KF40 and KF25),

 Various sniffer (capillary) inlets for sampling at the process.

The orifices mounted into the HexBlock are replaceable. Pressure ranges for V1
are 3mTorr to 10 Torr and for V2 are 3 mTorr to 100 Torr.

Transpector CPM Operating Manual

The tool and the CPM must be vented before changing
orifices, except when a tool isolation valve is installed.

4.2.1 HexBlock Inlet

 V1 - Low pressure sampling (LP). Indicates background pressures for some

etch or CVD process. (No bypass available.)

 V2 - High pressure sampling (HP). Indicates process pressures for etch, CVD

and 300 mm degas sampling. (Bypass is optional.)

IPN 074-430-P1F

 V3 - High Conductance. This is similar to a wide open position and can be used

for any high vacuum condition lower than 1 mTorr.

 V4 - Bypass. This is used in conjunction with V2 whenever there is a high

pressure application (above 5 Torr). V4 connects to the interstage of the Turbo
Molecular Pump and pulls the gases from the process to improve the response
time of high pressure applications.

Additional hardware includes another valve (V4) and a stainless tube between
the Turbo Molecular Pump and V4. Having this option will allow high pressures
sampling (>1 Torr) with minimum response time. The sample draw inlet
consumes 10 sccms of process gas to the orifice located at V2. This will cut the
response time down from several minutes to less than 10 seconds for a 100
Torr process.

4 - 3

Transpector CPM Operating Manual

CAUTION

NOTE: V4 will open before V2 to prevent pressure bursts. When V2 is closed,

V4 remains open for several seconds to pump out any residuals left
from sampling the process.

 V5 - Calibration reference. Used for mass tuning and as a sensitivity reference.

This calibration reference provides:

 a means to tune the RGA,

 a reference for adjusting the EM voltage,

 a way to check whether the orifices are getting dirty or clogged,

 a reference for tracking the performance of the RGA.

The Calibration valve refers to the option of adding a Calibration reference to
the CPM system. The Calibration reference is located near the ion source of
the CPM system.

NOTE: The Transpector2 emission and electron multiplier are turned off prior

to opening the Calibration Valve (V5). This is due to trapped gas in the
calibration reference.

INFICON also offers an FC5311 tuning reference gas as an option used for
adjusting peak position for high AMU CPMs. It is controlled via a manual valve.
This tuning calibration mixture is a volatile liquid and is located at the inlet of the
high vacuum pump.

Due to the nature of the FC5311 reference gas, it may take
up to 24 hours of pumping to remove all trace levels of
the FC5311 compound after use. It is recommended that
a bakeout be performed if the FC5311 reference gas is
sampled.

 Sniffer (capillary) - The sniffer option allows sampling closer to the actual

process reactions and it gives a faster response time and better signal (uses
valve V2).

 CDG Port - The CDG port is for measuring process pressure. The CDG

automatically opens and closes the inlet valves based upon process pressure
setpoints. It also helps to prevent accidental or erroneous inlet valves from
being opened.

IPN 074-430-P1F

4 - 4