Inficon TPG300, CP300C9, IF300P Operating Manual

Operating
M
0
r
C
o
3
anual
Plug Cont
CP300 IF300P
In B
oller
9,
ards
TPG
for T
00
otal Pressure Gauge
IG9972BEN (2
017-09)
1
About this Document
Validity
This document describes the plug-in boards for the total pressure gauge control­ler TPG300, intended as a supplement to the documentation of the basic unit TPG300 ( [1]).
This document applies to plug-in boards listed below
Type Description Part number
CP300C9 Pirani / cold cathode measurement board IO441000
IF300P Interface and relay Board (Profibus) IO441395
The part number (No) can be taken from the product nameplate.
2 IG9972BEN (2017-09) Plug-In Boards.om
Contents
About this Document 2 Validity 2
1 Safety 4
1.1 General Safety Information 4
1.2 Symbols Used 4
1.3 General Stipulations 4
2 Description 5
2.1 Pirani / Cold Cathode Measurement Board CP300C9 5
2.2 Interface and Relay Board IF300P 5
2.3 Pirani Measurement 5
2.4 Cold Cathode Measurement 5
3 Technical Data 6
3.1 Pirani / Cold Cathode Measurement Board CP300C9 6
3.2 Interface and Relay Board IF300P 7
4 Installation 8
4.1 Installing / Removing the Plug-In Boards 8
4.2 Connecting the Pirani Gauge 8
4.3 Connecting the Cold Cathode Gauge 9
4.4 Connecting the <OUTPUT> Analog Signal 10
4.5 Connecting the Relays of the IF300P 10
4.6 Connecting the Profibus-DP Interface to the IF300P 11
5 Adjustment 12
5.1 Adjusting the Pirani Measurement Circuit 12
6 Troubleshooting 13
6.1 Operating and Adjustment Problems 13
6.2 Defects 13
6.3 Problems with the RS232C Interface 13
6.4 Problems with the Profibus-DP Interface 14
7 Accessories 15
7.1 Gauges 15
7.2 Measurement Cables and Cable Connectors 15
Appendix 17
A: Output Signals of the Measurement Boards 17 B: Gas Type Dependence 19 C: Literature 21
IG9972BEN (2017-09) Plug-In Boards.om 3
1 Safety
1.1 General Safety Information
1.2 Symbols Used
a) Take the necessary precautions when doing installation work.
It may be necessary implement additional protective measures in the system.
b) Before connecting any external elements, check that they are compatible with
the technical data in this document.
c) Take the necessary precautions when doing maintenance or repair work.
Danger:
Information on preventing any kind of personal injury or extensive equipment damage.
Caution:
Special information on damage prevention.
Note:
Special information on cost-effective use.
1.3 General Stipulations
Skilled Personnel:
This work may only be carried out by persons with suitable technical training and the necessary experience.
Waiting time, reaction time, duration of test
<
> Marking
See page …
See document …
Since the individual components are delicate, appropriate measures must be taken to protect them from static electricity. Store modules in antistatic bags or contain­ers.
Damage resulting from incorrect handling may lead to a revocation of the guarantee.
INFICON accepts no responsibility nor warranty if the user or third parties
utilize the product not according to the defined use
make any kind of changes (modifications, alterations, etc.) to the product.
4 IG9972BEN (2017-09) Plug-In Boards.om
2 Description
2.1 Pirani / Cold Cathode Measurement Board CP300C9
Pirani measurement circuit
Cold cathode measurement circuit
2.2 Interface and Relay Board IF300P
2.3 Pirani Measurement
2.4 Cold Cathode Measurement
The CP300C9 board is a combined board containing one Pirani and one cold cathode measurement circuit.
The Pirani measurement circuit has one gauge cable connector, two trimmer po­tentiometers and one analog signal output. When the control unit is on, the Pirani measurement circuit is in continuous operation. The analog signal is constantly available, independent of what is shown on the pressure display.
The cold cathode measurement circuit for the measurement of high and ultra high vacuum has one gauge cable connector and one analog signal output. When the gauge is turned on, the analog signals are constantly available, independent of what is shown on the pressure display.
This measurement board contains special electronics to limit the measurement current to 100 µA, a feature that considerably extends the lifetime of the gauge.
The IF300P board contains a RS232C interface and a Profibus-DP interface. The board has five relays with one floating changeover contact each.
Within certain limits the thermal conductivity of gases is a function of the pressure. Pirani thermal conductivity vacuum gauges exploit this phenomenon for pressure measurements.
The measurement element consists of a thin filament with a high temperature co­efficient. The resistance of the wire and consequently its temperature are main­tained at a constant value by means of a suitable control circuit. The electrical power supplied to the filament is, therefore, a measure of the thermal conductivity and consequently the gas pressure.
The current flowing in a self-sustained gas discharge with a cold cathode (inverted magnetron) depends on the applied voltage, the gas composition, and the pres­sure. A magnetic field that penetrates the measurement chamber has the effect that the electrons move along a spiral trajectory from the cathode to the anode and thereby cause even at low gas densities a sufficient number of ionizing impacts for maintaining the discharge. If (with a known gas type) the anode voltage and mag­netic field are kept constant, the discharge current is a measure of the pressure.
IG9972BEN (2017-09) Plug-In Boards.om 5
3 Technical Data
3.1 Pirani / Cold Cathode Measurement Board CP300C9
Number of measurement circuits 1 each
Gauges TPR018, IKR085 (both ITER)
Display range (signal output) 1)
Pirani Cold cathode
mbar mbar
5×10-4 … 1000
-9
… 1×10-2
5×10
Measurement range 1)
Pirani Cold cathode
mbar mbar
1×10-2 … 100
-8
… 5×10-3
1×10
Cable length
Pirani, max. Cold cathode, max.
m m
100 60
2)
… 100
Power supply cold cathode gauges
Operating voltage Measurement current
kV µA
3.3 600
Signal output
Measured value, analog Error message Current, max. Output resistance
Reaction time (10 90%) for sudden
V V mA Ω
0 … +10 >11.5 2 400
pressure step
Pirani
-3
<10
103 mbar
Cold cathode
-9
10-6 mbar
10
ms
ms
<50
<100
Connection, equipment side
Pirani gauge Cold cathode gauge Signal output
Weight kg
female female female
Amphenol C91E, 6-pin SHV coaxial ø2 mm
0.21
1)
N2-equivalent
2)
when using the lower measurement range limit ( 9)
6 IG9972BEN (2017-09) Plug-In Boards.om
3.2 Interface and Relay Board IF300P
Relay
Number 5
Contact type 1 change over contact each
floating max. 50 V (ac) relative to other contacts and ground
Characteristic data (ac)
Switching voltage, max. Switching current, max. Switching power, max.
30 V (dc), 50 V (ac)
1.5 A 45 W, 75 VA
Characteristic data (dc)
Switching current, max. switching voltages >50 V (dc) are
inadmissible for safety reasons
0.6 A at 50 V (dc)
0.8 A at 40 V (dc)
1.5 A at 30 V (dc)
Connection, equipment side
Type D-sub connector, 15-pin, male
Transition resistance with socket
125 mΩ
Interface
Type Profibus-DP
Baud rates <12Mbaud
Data format
Profibus-DP interface [2]
Connection, equipment side D-sub connector, 9 pin, male
Cable length, max.
Weight
[2]
0.16 kg
Before connecting any external elements, check that they conform to the
above technical data and the controller is switched off for at least 15 seconds.
IG9972BEN (2017-09) Plug-In Boards.om 7
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