INFICON TM-400 User Manual
OPERATION AND SERVICE MANUAL
TM-350/400
Thickness Monitor
178800 Rev. B
OPERATION AND SERVICE MANUAL
TM-350/400
Thickness Monitor
178800 Rev. B
®
www.inficon.com reachus@inficon.com
Due to our continuing program of product improvements, specifications are subject to change without notice.
©2007 INFICON
Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
Microdot® is a registered trademark of Microdot Corp.
ConFlat® is a registered trademark of Varian Corporation.
INFICON® is a trademark of INFICON.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Disclosure
The disclosure of this information is to assist owners of INFICON equipment to properly operate and maintain
their equipment, and does not constitute the release of rights thereof. Reproduction of this information and
equipment described herein is prohibited without prior written consent from INFICON, Two Technology Place,
East Syracuse, NY 13057-9714. Phone 315.434.1100. See www.inficon.com.
Copyright
©1998 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.
WARNING
All standard safety procedures associated with the safe
handling of electrical equipment must be observed. Always
disconnect power when working inside the controller. Only
properly trained personnel should attempt to service the
instrument.
DECLARATION
OF
CONFORMITY
This is to certify that this equipment, designed and manufactured by:
INFICON Inc.
Two Technology Place
East Syracuse, NY 13057
USA
meets the essential safety requirements of the European Union and is placed on the market accordingly. It
has been constructed in accordance with good engineering practice in safety matters in force in the
Community and does not endanger the safety of persons, domestic animals or property when properly
installed and maintained and used in applications for which it was made.
Equipment Description: TM-400 Dual Sensor Thin Film Deposition Monitor, including the SO-100
Oscillator Package.
Applicable Directives: 73/23/EEC as amended by 93/68/EEC (LVD)
89/336/EEC as amended by 93/68/EEC (EMC)
2002/95/EC (RoHS)
Applicable Standards: EN 61010-1:2001 (Safety)
EN 61326-1:1997/A1:1998/A2:2001, Class A: Emissions per Table 3
Immunity per Table A.1
Due to the classification of this product it is currently exempt from the RoHS
directive.
CE Implementation Date: November 1, 2007
Authorized Representative: Duane H. Wright
Quality Assurance Manager, ISS
INFICON Inc.
ANY QUESTIONS RELATIVE TO THIS DECLARATION OR TO THE SAFETY OF INFICON'S PRODUCTS SHOULD BE DIRECTED,
IN WRITING, TO THE QUALITY ASSURANCE DEPARTMENT AT THE ABOVE ADDRESS.
10/01/07
Warranty
INFICON warrants the product to be free of functional defects in material and
workmanship and that it will perform in accordance with its published specification
for a period of (twenty-four) 24 months.
The foregoing warranty is subject to the condition that the product be properly
operated in accordance with instructions provided by INFICON or has not been
subjected to improper installation or abuse, misuse, negligence, accident,
corrosion, or damage during shipment.
Purchaser's sole and exclusive remedy under the above warranty is limited to, at
INFICON's option, repair or replacement of defective equipment or return to
purchaser of the original purchase price. Transportation charges must be prepaid
and upon examination by INFICON the equipment must be found not to comply
with the above warranty. In the event that INFICON elects to refund the purchase
price, the equipment shall be the property of INFICON.
This warranty is in lieu of all other warranties, expressed or implied and
constitutes fulfillment of all of INFICON's liabilities to the purchaser. INFICON
does not warrant that the product can be used for any particular purpose other
than that covered by the applicable specifications. INFICON assumes no liability in
any event, for consequential damages, for anticipated or lost profits, incidental
damage of loss of time or other losses incurred by the purchaser or third party in
connection with products covered by this warranty or otherwise.
www.inficon.com reachus@inficon.com
TM-350/400 Operating Manual
Table Of Contents
Chapter 1
Safety Precaution and Preparation for Use
1.1 Input Power Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.2 Power Entry Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1
1.3 Power Cord. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1
1.4 Grounding. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.5 Line Fuses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.6 Power Switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
Chapter 2
General Description
2.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.2 Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1
2.2.1 Independent Film Density and Tooling Factor Parameters . . . . . . . . . . . . . 2-1
2.2.2 Acoustic Impedance Correction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1
2.2.3 Parameter Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.2.4 High Resolution Autoranged Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.2.5 Long-Term Parameter Storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
2.2.6 Multiple Computer Interfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
2.2.7 Compact Case . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.2.8 DAC Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
2.2.9 Multiple Crystal Frequencies . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.2.10 Built In Test. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
2.2.11 Dynamic Measurement Update Rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2.12 Automatic Crystal Switching (TM-400 Only). . . . . . . . . . . . . . . . . . . . . . . . .2-3
2.3 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
IPN 178800 Rev. B
2.3.1 Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
2.3.2 Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.3.3 Computer Interfaces. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
2.3.4 Program Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
2.3.5 Input Capability. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.3.6 Output Capability . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
2.3.7 Other. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
2.4 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-7
TOC - 1
Chapter 3
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 Bench Check-Out. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.3 Installing Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3.3.1 IEEE-488 Option Board . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3.3.2 RS-485 Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.4 Digital To Analog Converter (DAC) Checkout . . . . . . . . . . . . . . . . . . . . . . . 3-3
Chapter 4
4.1 Monitor Installation Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.1 Proper Grounding. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.2 Heat Dissipation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2 Rear Panel Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2.1 Oscillator Connector(s). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2.2 IEEE-488 Option Board (optional) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.2.3 Digital To Analog Converter (DAC) Connection. . . . . . . . . . . . . . . . . . . . . . 4-2
4.2.4 Remote TTL Inputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.2.5 Relay Outputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.2.6 Line Voltage Selection and Fuse Replacement . . . . . . . . . . . . . . . . . . . . . . 4-2
4.3 Internal DIP Switches. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
4.3.1 Crystal Type Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
4.3.2 Computer Interface Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
4.3.3 DAC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.3.4 Disable Negative Thickness/Rate Readings . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.3.5 Allow Crystal Switching to a Failed Sensor (TM-400 Only) . . . . . . . . . . . . . 4-6
4.3.6 Pulse Switch At Thickness Endpoint . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.3.7 S16 Switch Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
4.3.8 DAC Range Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
4.4 Monitor Cover Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
TM-350/400 Operating Manual
Unpacking and Inspection
Monitor Installation
IPN 178800 Rev. B
Chapter 5
TOC - 2
Sensor, Feedthrough and Oscillator
5.1 Sensor Head Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2 Sensor Head Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.3 Instrumentation Feedthrough Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.4 Sensor Oscillator Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Chapter 6
6.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
Chapter 7
7.1 Front Panel Displays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.2 Front Panel Controls. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-1
7.3 Display and Modification Of Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . .7-2
7.4 Thickness Set Point Shutter Control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3
7.5 Crystal Test Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3
7.6 Crystal Fail Indication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3
7.7 Power Fail Indication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-4
7.8 DAC Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-4
Chapter 8
8.1 Basic Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
8.2 Film Thickness Calculation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-1
8.3 Crystal Health Calculation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-3
8.4 Rate Calculation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-4
TM-350/400 Operating Manual
Sensor Crystal Replacement
Operation
Theory of Operation
Chapter 9
Establishing The Deposition Parameters
9.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-1
9.2 Tooling Factor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-1
9.3 Sensor Number (TM-400 Only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-2
9.4 Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-2
9.5 Acoustic Impedance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-2
9.6 Empirical Calibration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-3
IPN 178800 Rev. B
9.6.1 Material Density Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-3
9.6.2 Tooling Factor Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3
9.6.3 Acoustic Impedance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-4
Chapter 10
Computer Interface
10.1 General. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-1
10.2 RS-232 Serial Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-1
10.3 RS-485 Serial Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-1
10.4 IEEE-488 Parallel Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-2
10.5 Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-2
TOC - 3
10.6 Data Types. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-3
10.7 Message Received Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-3
10.8 Instruction Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-4
10.9 Instruction Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5
Chapter 11
11.1 Handling Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-1
11.2 Maintenance Philosophy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-1
11.3 Self Test Failure Detection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-2
11.3.1 EPROM Failure (E FAIL) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-2
11.3.2 RAM Failure (I FAIL) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-3
11.3.3 Film Data Failure (C-FAIL) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-3
11.3.4 Power Failure (P-FAIL). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-3
11.3.5 Oscillator Failure (O-FAIL) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-3
11.3.6 Sensor Card Failure (S FAIL). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-3
11.4 Troubleshooting Aids To Isolate Installation Faults . . . . . . . . . . . . . . . . . . 11-4
11.5 How To Contact Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-6
11.6 Returning Your Instrument to INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-6
TM-350/400 Operating Manual
Repair and Maintenance
TOC - 4
IPN 178800 Rev. B
Safety Precaution and Preparation for Use
1.1 Input Power Requirements
The TM Series Thickness Monitor can be set to operate one of the following line
voltages: 100, 120, 200, or 240 V(ac) at line frequency of 50 or 60 Hz. Maximum
power consumption is 25 watts. See section 4.2.6 on page 4-2 for instruction on
how to select the line voltage.
1.2 Power Entry Module
The AC (alternating current) power entry module, located in the rear panel of the
TM, provides connection to the power source and a protective ground. It also holds
the fuses and the voltage selection wheel.
TM-350/400 Operating Manual
Chapter 1
1.3 Power Cord
WARNING - Risk Of Electric Shock
To avoid electrical shock, always connect the power cord
to an AC outlet which has a proper protective ground.
The TM Series Thickness Monitor comes with a detachable, three-wire power cord
for connection to a power source with protective ground. The TM chassis is
connected to the power ground to protect against electrical shock. Always connect
to an AC outlet which has a properly connected protective ground. If necessary, or
when in doubt, consult a certified electrician.
IPN 178800 Rev. B
1.4 Grounding
A grounding lug is located on the rear panel, near the power entry module. Use
heavy ground wire, wire braid, or copper strap of #12 AWG or larger to connect this
grounding lug directly to a facility protective earth ground to provide additional
protection against electrical shock. See Figure 4-3 on page 4-10.
1 - 1
TM-350/400 Operating Manual
1.5 Line Fuses
There are two 5 x 20 mm fuses mounted inside the power entry module. They are
accessible via the snap-in cover. Replace with the correct fuse rating: IEC T Type
(Slow), 4/10 A, 250 V(ac). See section 4.2.6 on page 4-2 for instruction to replace
the fuse.
1.6 Power Switch
WARNING - Risk Of Electric Shock
Do NOT use the power switch as a disconnecting device;
disconnect the power cord from the power entry module
to fully remove hazardous voltage from inside the TM
monitor.
The power switch is located on the front of the TM monitor. The switch is a toggle
type, marked with
The
O (off) position cuts off the power to the instrument. However, turning the
power switch off does not fully remove the AC power from inside the instrument.
I and O. The I (on) position applies the power to the instrument.
Always disconnect the power cord from the power entry module to fully remove AC
power from inside the instrument.
IPN 178800 Rev. B
1 - 2
2.1 Introduction
The Thickness Monitor allows improved manual control of the vacuum film
deposition process by providing a direct display of film thickness and deposition
rate during deposition.
Semiautomatic control of film thickness can be accomplished by utilization of the
shutter control relay in the Monitor. The shutter control relay allows for direct
operator control of the systems shutter and will also automatically close the shutter
when the deposition thickness equals a pre programmed value.
The Monitor requires 4 (6 in a TM-400 using crystal switching) operator-supplied
parameters in order to provide direct readout and shutter control. Entry,
modification and display of these parameters are easy and straightforward.
Parameter storage is not dependent on continuous AC power. An internal,
self-charging, lithium battery provides parameter storage for a minimum of five
years without external power.
TM-350/400 Operating Manual
Chapter 2
General Description
2.2 Features
2.2.1 Independent Film Density and Tooling Factor Parameters
The tooling factor parameter allows the Monitor to compensate for deposition
geometry effects such as different source to sensor and source to substrate
distances, which result in proportional but not equal film thicknesses at the sensor
and the substrates. By utilizing the tooling factor, the Monitor can calculate and
display film thickness and rate at the substrate rather than at the sensor.
2.2.2 Acoustic Impedance Correction
IPN 178800 Rev. B
The Monitor corrects the thickness reading for acoustic impedance mismatch
between the crystal and film material by taking into account the operator supplied
Acoustic Impedance Parameter for the film. If not corrected for, errors result as the
film thickness builds up on the sensor crystal. The sensitivity of quartz crystals to
material buildup changes with the amount of material on the crystal if the deposited
material's acoustic impedance is significantly different than that of quartz. With
some materials this effect can lead to differences between indicated and actual
thickness of up to 20% as material builds up on the sensor crystal.
2 - 1
TM-350/400 Operating Manual
2.2.3 Parameter Display
The Film Density, Tooling Factor, and Acoustic Impedance parameters are instantly
viewable on demand for quick reference at any time.
2.2.4 High Resolution Autoranged Display
All parameter displays and Rate and Thickness displays are fully auto ranged. Rate
measurements are displayed to resolution of 0.1 Å/sec, and thickness to a
resolution of 1 Å.
2.2.5 Long-Term Parameter Storage
Parameters entered into the Monitor are maintained in memory for a period of at
least five years without power. Short-term power loss will not require parameters to
be re-entered.
2.2.6 Multiple Computer Interfaces
Supports RS-232 (standard), RS-485, or IEEE-485.
2.2.7 Compact Case
Available in either a bench top model or with a standard (19”) rack mounting kit
2.2.8 DAC Output
Dual Digital-to-Analog converter outputs provide data for recording Rate and
Thickness data, simultaneously.
2.2.9 Multiple Crystal Frequencies
The Monitor is designed to accept 2.5, 3, 5, 6, 9, & 10 MHz sensor crystals and
nominal AC line voltages of 100 through 120 or 220 through 240 V(ac) at
50 to 60 Hz.
2.2.10 Built In Test
The Monitor incorporates built in test functions to guarantee its operational integrity
and to aid in fault isolation in the event of an internal failure.
IPN 178800 Rev. B
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TM-350/400 Operating Manual
2.2.11 Dynamic Measurement Update Rate
The Monitor utilizes a dynamic updating scheme where the update rate is
automatically varied from 0.5 to 10 measurement updates/sec depending on the
deposition rate. The update rate will increase for high deposition rates where fast
response is important. Conversely, the update rate will decrease for slow
deposition rates to maximize the measurement resolution.
2.2.12 Automatic Crystal Switching (TM-400 Only)
Allows the use of a dual sensor head so that upon crystal failure the instrument can
switch to a backup sensor to complete the film.
2.3 Specifications
2.3.1 Measurement
Frequency Resolution . . . . . . . . . . . 0.03 Hz @ 6.0 MHz (TM-400)
0.5 Hz @ 6.0 MHz (TM-350)
Mass Resolution. . . . . . . . . . . . . . . . 0.375 ng/cm2 (TM-400)
6.0 ng/cm^2 (TM-350)
Thickness Accuracy . . . . . . . . . . . . . 0.5% + 1 count
Measurement Update Rate . . . . . . . Dynamically adjusted, 0.5 to 10 Hz
Display Update Rate . . . . . . . . . . . . 10 Hz
Sensor Crystal Frequency . . . . . . . . 2.5, 3, 5, 6, 9, 10 MHz
2.3.2 Display
Thickness Display . . . . . . . . . . . . . . Autoranging: 0.000 to ± 999.9 KÅ
Rate Display . . . . . . . . . . . . . . . . . . . Autoranging: 000.0 to ± 999.9 Å/sec
Frequency . . . . . . . . . . . . . . . . . . . . 0,000,000.0 to 9,999,999.9 MHz
IPN 178800 Rev. B
2.3.3 Computer Interfaces
RS-232 serial port standard
RS-485 serial port optional
IEEE-488 bus interface optional
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TM-350/400 Operating Manual
2.3.4 Program Parameters
Film Number. . . . . . . . . . . . . . . . . . . 100 Programmable films
Thickness Endpoint . . . . . . . . . . . . . 0.000 to 999.9 KÅ
Density . . . . . . . . . . . . . . . . . . . . . . . 0.1 to 99.99 gm/cm
Acoustic Impedance. . . . . . . . . . . . . 0.50 to 59.99 × 10
Tooling Factor #1 . . . . . . . . . . . . . . . 10.0 to 999.9%
Tooling Factor #2 (TM-400 only) . . . 10.0 to 999.9%
Primary Sensor (TM-400 only) . . . . . 1 to 2
2.3.5 Input Capability
Discrete Inputs . . . . . . . . . . . . . . . . . TTL level inputs activated by a short across
2.3.6 Output Capability
3
-5
gm/cm2/sec
the input pins (min 200 ms pulse): Start, Stop,
Film Number, Increase, Decrease
2.3.7 Other
Source Shutter Relay . . . . . . . . . . . . One Single Pole Single Throw Relay,
120 VA, 2A Max
Sensor Shutter Relay . . . . . . . . . . . . (TM-400 only.) One Single Pole Single Throw
Relay, 120 VA, 2A Max
Digital to Analog Converter . . . . . . . Rate and Thickness; 0 to 5 V(dc), 11 bit
resolution, 2 or 3 Decade range
Input Power Requirements. . . . . . . . 100, 120, 200, 240 V(ac); 50/60 Hz; 25 watts
Fuse Rating . . . . . . . . . . . . . . . . . . . IEC T-Type (Slow), 4/10 A, 250 V(ac)
Operating Temperature Range. . . . . 0 to 50°C
Physical Size
. . . . . . . . . . . . . . . . . . . . Instrument Case 3.47” H × 8.4” W × 9.7”D
19” Rack-mount case 3.47” H × 19” W × 9.7” D
IPN 178800 Rev. B
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TM-350/400 Operating Manual
Figure 2-1 TM-400 Outline
IPN 178800 Rev. B
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TM-350/400 Operating Manual
Figure 2-2 TM-400R Outline
IPN 178800 Rev. B
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2.4 Accessories
Table 2-1 Accessories
Part Number Description
123200-5 SH-102 Sensor Head, cables, and carousel of 10 each 6 MHz
124201-4 SO-100 Oscillator with 6" and 10' BNC Cables.
130200-2 IF-111 Instrument Feedthrough, 1" o-ring with 1 electrical
130204-2 IF-276 Instrumentation Feedthrough, 2 3/4" ConFlat® Flange
123204-1 Internal Coax Cable 30".
TM-350/400 Operating Manual
179217 IEEE-488 Communication Board
179219 RS-232 to RS-485 conversion
Gold SC-101 sensor crystals
connector and dual 3/16" water tubes.
seal with 1 electrical connector and dual 3/16" water tubes.
150902 SF-120 Combination Sensor Head, Feedthrough, Cables,
Crystals and Oscillator.
123204-2 Internal Coax Cable 60".
124202-1 BNC Cable Assembly 10'.
124202-2 BNC Cable Assembly 20'
124204 BNC Cable Assembly 6".
103220 SC-101 Carousel of 10 each 6 MHz gold sensor crystals.
103221 SC-102 Carousel of 10 each 6 MHz silver sensor crystals.
IPN 178800 Rev. B
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TM-350/400 Operating Manual
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IPN 178800 Rev. B
3.1 Introduction
Carefully inspect your Monitor and its shipping container for evidence of possible
shipping damage or loss. If such evidence is present, a report should be filed with
the carrier as soon as possible. Keep the shipping container as evidence if shipping
damage is present or for possible future return of the instrument. Check the
material received against the packing list to be certain that all material is accounted
for. The following items are included with your Monitor:
1 TM-350/400 instrument
1 Operator's Manual
1 Power cord
1 Output cable (8 pin mini-din, 10’)
TM-350/400 Operating Manual
Chapter 3
Unpacking and Inspection
1 Input cable, (6 pin mini-din, 10’) optional
1 DAC interface/control unit, optional
3.2 Bench Check-Out
If there is no evidence of damage, the Monitor can now be bench checked. Make
sure that the input power voltage requirement is correct for your installation. If not,
see section 4.2.6 on page 4-2 to set your Monitor for the correct line voltage.
When power is first applied to the Monitor, all LED displays will light for about two
seconds. This is followed by an "E FAIL" message indicating that the EPROM is
being tested followed by an "I FAIL" message indicating that the RAM is being
tested. The monitor will halt with the failure displayed if a fault is detected and will
IPN 178800 Rev. B
remain inoperative until the fault is corrected. Further details of error messages can
be found in section 11.3 on page 11-2.
Assuming both tests pass, the "P FAIL" message will begin flashing indicating that
power was interrupted for more than 250 ms. Pressing the Stop key will clear the
"P FAIL" message. If a working sensor is not connected to the monitor, a flashing
"O FAIL" will be displayed indicating that the sensor is failed. If an oscillator,
feedthrough, and sensor head are available, you may wish to bench check the total
system at this time. Obviously good vacuum practice should be observed when
handling those items that will later be installed in the vacuum system. Be careful
not to touch the surface of the sensor crystal installed in the Crystal Holder.
Connect the various components as follows. Use the 10' coaxial cable to connect
the Monitor to the "Output" end of the Oscillator. Use the 6" coaxial cable to connect
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TM-350/400 Operating Manual
the "Input" end of the Oscillator to the atmosphere side of the Feedthrough. Use
the 30" miniature coaxial cable to connect the vacuum side of the Feedthrough to
the Sensor Head.
After all the components have been connected, press the STOP button to clear the
"O FAIL" message.
Depressing the START button will set the thickness display to zero. Breathe lightly
on the sensor crystal surface. The displayed thickness should increase due to
condensed water vapor on the crystal. The "O FAIL" message may be reactivated
if excessive water on the crystal causes it to fail. Pressing the Stop key after
sufficient water has evaporated from the surface of the crystal should clear the
failure. The displayed thickness should then decrease as additional water vapor
evaporates from the surface. If operation seems abnormal, check to see that the
stored parameter values are reasonable. The following parameter values are
suggested.
Set Point Thickness — 10.00 KÅ
Material Density — 2.650 gm/cubic cm
Acoustic Impedance — 8.830
Tooling Factor — 100.0%
If everything responds as described above the total system is OK. If not, see
Chapter 11, Repair and Maintenance.
3.3 Installing Options
Options are most easily installed while the TM-350/400 is on the bench. Figure 3-9
on page 3-12 shows the location of the various options.
3.3.1 IEEE-488 Option Board
1 Remove the chassis top cover.
2 Locate IEEE-488 option slot and remove the slot cover.
3 Carefully slide the connector of the IEEE-488 board into the slot.
4 Plug the 20-pin ribbon connector into the J7 connector on the Main board, and
then secure the board in place using the screws that came with the board.
5 Replace the chassis top cover and apply power to the monitor.
IPN 178800 Rev. B
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TM-350/400 Operating Manual
3.3.2 RS-485 Option
1 Remove the chassis top cover.
2 Locate the IC socket labeled U1. It is on the left side along the back of the
TM-350/400’s main board. Remove the device from this socket. This will
disable the standard RS-232 interface.
3 Carefully insert the supplied IC labeled ”U2 RS485” into socket U2, being
careful no to bend any of the pins. It is on the left side along the back of the
TM-350/400’s main board.
4 Carefully insert the supplied IC labeled ”U4 RS485” into socket U4, being
careful no to bend any of the pins. It is on the left side along the back of the
TM-350/400’s main board.
5 Insert the supplied yellow jumper across J22, which is on the left side along the
front of the main board. See Figure 3-9 on page 3-12.
6 Replace the chassis top cover.
3.4 Digital To Analog Converter (DAC) Checkout
The built-in DAC function on the Main board contains two converters, allowing
simultaneous recording of Rate and Thickness. The full-scale output of each
converter is 5 volts, is single ended and is referenced to ground.
In addition to the individual channel output pins there are two control pins that are
common to both channels and are intended to simplify the process of setting up
analog recorders. Connecting the Zero control line to ground will drive both channel
outputs to zero, allowing the recorder zero reference to be easily set. Releasing the
Zero line and connecting the Full Scale line to ground will drive both channel
outputs to full scale for establishing the recorder full scale calibration.
Each channel can be set independently to convert either the two or the three least
significant digits of the displayed Rate and Thickness to a proportional analog
IPN 178800 Rev. B
signal, corresponding to the DAC setup option chosen. With the three-digit setting,
a thickness of 0.500 KÅ would result in an analog output of 2.50 volts, or a scale
factor of 5 mV/Å. If more resolution is desired, either channel can be configured,
using the switches shown in Figure 3-9 on page 3-12, to convert only the last two
digits of the parameter, thus the analog output would achieve full scale at 99 Å. The
output scale factor in this configuration is 50 mV/Å.
The above scale factors are based on the assumption that the thickness display is
in the 0 - 9.999 KÅ range. Because the thickness and rate displays are
autoranging, the analog output of these variables will also autorange. In the above
example, if the thickness were in the range of 10 KÅ to 99.9 KÅ, the analog scale
factor would be 50 mV per 10 Å, also ten times larger.
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