INFICON T3000 User Manual
T3000
Thermal Power Supply
OVER TEMP
POWER MODE
RESET
OPEN
LOAD
SER - PAR
J1
1
OUT 1 NEG
OUT 1 POS
OUT 2 POS
OUT 2 NEG
User's Manual
518-035 Revision A, Feb 2006
instruments
Thermal Power Supply
T3000
Preface
Warranty
SYCON INSTRUMENTS, INC.
Policy
Sycon Instruments, Inc. (Sycon) warrants that all electronic instrumentation
equipment manufactured by Sycon shall be free from defects in materials and workmanship
for a period of 2 years from date of shipment. Mechanical vacuum components such as
feedthroughs, sensors, cables, and shutters shall be warranted for a period of six months
from the date of shipment. For the duration of the warranty period Sycon will, at its option,
either repair or replace any part which is defective in materials or workmanship without
charge to the purchaser. The foregoing shall constitute the exclusive and sole remedy of
the purchaser for any breach by Sycon of this warranty.
This warranty does not apply to any equipment which has not been used in
accordance with the specifications recommended by Sycon for the proper and normal use
of the equipment. Sycon shall not be liable under any circumstances for consequential or
incidental damages in connection with, or arising out of the sale, performance, or use of,
the equipment covered by this warranty.
This warranty is in lieu of all other warranties by Sycon, expressed or implied,
including the implied warranty of merchantability, the implied warranty of fitness for a
particular purpose, and warranty against infringement of any patent.
EQUIPMENT RETURN
Before returning any equipment to Sycon contact the Product Service Department in
your area for instructions. Obtain a Return Authorization (RA) number and indicate this
number on all shipping cartons and correspondence. Ship all items in suitable containers
with adequate protection from outside damage.
Sycon Instruments, Inc.
6757 Kinne Street
East Syracuse, New York
13057-1215
Phone (315) 463-5297
Fax (315) 463-5298
Preface
Page i
Warranty
T3000
Thermal Power Supply
instruments
Warranty
Page ii
Preface
instruments
Thermal Power Supply
T3000
Table of Contents
PREFACE.....................................................................................................................................I
WARRANTY ......................................................................................................................................I
TABLE OF CONTENTS .......................................................................................................................III
LIST OF TABLES ...............................................................................................................................IV
LIST OF FIGURES..............................................................................................................................V
SECTION 1...................................................................................................................................1-1
INTRODUCTION – DESCRIPTION OF EQUIPMENT .................................................................................1-1
1.1 Purpose and Capabilities .............................................................................................1-1
1.2 Theory of Operation .....................................................................................................1-1
1.3 Technical Characteristics.............................................................................................1-2
1.4 Output Characteristics..................................................................................................1-3
SECTION 2...................................................................................................................................2-1
INSTALLATION ..................................................................................................................................2-1
2.1 Inspection.....................................................................................................................2-1
2.2 Input/Output Connectors..............................................................................................2-1
2.3 Locations and Mounting...............................................................................................2-8
2.4 Wire Sizing...................................................................................................................2-9
2.5 Outline Drawings........................................................................................................2-10
SECTION 3...................................................................................................................................3-1
OPERATING INSTRUCTIONS...............................................................................................................3-1
3.1 Controls and Indicators ................................................................................................3-1
3.2 Basic Operation............................................................................................................3-4
SECTION 4...................................................................................................................................4-1
USE OF THE T3000 WITH THE RS-3000.............................................................................................4-1
4.1 Introduction...................................................................................................................4-1
4.2 Description ...................................................................................................................4-1
4.3 Basic Operation............................................................................................................4-5
4.4 Error Conditions ...........................................................................................................4-6
SECTION 5...................................................................................................................................5-1
CALIBRATION ...................................................................................................................................5-1
5.1 Instructions...................................................................................................................5-1
SECTION 6...................................................................................................................................6-1
MAINTENANCE..................................................................................................................................6-1
6.1 Introduction...................................................................................................................6-1
6.2 Preventive Maintenance...............................................................................................6-1
6.3 Fuses............................................................................................................................6-3
SECTION 7...................................................................................................................................7-1
T3000 CONFIGURATIONS..................................................................................................................7-1
7.1 T3000 Stand-Alone Configuration................................................................................7-1
7.2 T3000 Controlled by RS3000.......................................................................................7-2
7.3 T3000 Controlled by STC.............................................................................................7-3
7.4 T3000 Controlled by STC via RS3000........................................................................7-4
APPENDIX A.................................................................................................................................A-1
RMS RELATIONSHIPS.......................................................................................................................A-1
Preface
Page iii
Table of Contents
T3000
Thermal Power Supply
instruments
List of Tables
Table 1-1 Specifications .........................................................................................................................1-2
Table 2.2-1 T3000 External Connections...............................................................................................2-1
Table 2.2-2 T3000 Connection Interface................................................................................................2-2
Table 2.4-1 Minimum Wire Size Table ...................................................................................................2-9
Table 3.1-1 T3000 Indicator and Control Description.............................................................................3-1
Table 3.1-2 T3000 LED Mode Indication Summary...............................................................................3-2
Table 3.2-1 T3000 Connector J1 Pin Assignments................................................................................3-5
Table 6-1 Preventive Maintenance Schedule.........................................................................................6-1
Table 6-2 Inspection and Corrective Action............................................................................................6-2
Table A-1 Harmonic Levels & RMS Estimate Error............................................................................... A-2
List of Tables
Page iv
Preface
instruments
Thermal Power Supply
T3000
List of Figures
Figure 1-1 Maximum Voltage-Current Profile for Series and Parallel Hookup........................................ 1-3
Figure 2.2-1 AC Line and Frame Ground Connections.............................................................................. 2-4
Figure 2.2-2 Bus Bar Identification For The Two Output Sections............................................................. 2-5
Figure 2.2-3 Bus Bar Jumpers Connect Two Output Sections In Parallel ................................................. 2-6
Figure 2.2-4 J-Shaped Bus Bar Connects Two Supply Sections in Series................................................2-7
Figure 2.3-1 Location of Six Mounting Holes on T3000 Side Panels......................................................... 2-8
Figure 2.3-2 Side-By-Side19” Rack Mount Configuration.......................................................................... 2-8
Figure 2.5-1 T3000 Case Outline Drawing............................................................................................... 2-10
Figure 3.1-1 LED and Reset Button Location: Back Panel View ............................................................... 3-3
Figure 3.2-1 Various Methods For Controlling The T3000 Power Supply..................................................3-4
Figure 4.2-2: RS-3000 Front Panel .............................................................................................................4-3
Figure 4.2-2 RS-3000 Back Panel..............................................................................................................4-4
Figure A-1 Full-Wave Rectified SIN[2π60t]..............................................................................................A-1
Figure A-2 Current Transformer Method for Estimating True RMS Value of Io from AC Current
Components Measurement ..........................................................................................................................A-3
Preface
Page v
List of Figures
T3000
Thermal Power Supply
instruments
List of Figures
Page vi
Preface
instruments
Thermal Power Supply
T3000
Section 1
Introduction – Description of Equipment
1.1 Purpose and Capabilities
The Sycon T3000 is designed specifically to power resistive evaporative sources used in
the deposition of thin film coatings. It has been specified to cover the class of resistive load
devices requiring low voltage and high current at power levels up to 3kW. The two output
sections of the supply can be connected in parallel to provide up to 600 Amperes RMS in
excess of 5 Volts, or in the series connected configuration, 300 Amperes RMS in excess of
10 Volts. This versatile output range covers a broad spectrum of thermal sources. T3000
power supplies can be connected in parallel to meet extremely high power requirements,
(two units connected in parallel would provide up to 6kW load power.)
Several methods for controlling output power are available to the user. In the simplest
arrangement, a user-supplied DC voltage is applied to control the output current to the
load. A current feedback loop in the T3000 serves to stabilize output load current in
proportion to this DC control voltage input.
The next level of sophistication is to use the T3000 in conjunction with the Sycon RS3000
controller. This unit allows the user to input desired current levels with corresponding rate
of rise times to control load thermal stresses and to monitor set points and output power
levels. The controller features automatic shutdown to govern over-temperature and openload failure modes.
The T3000 is also directly compatible for use with industry standard thickness/rate
controllers, such as the Sycon STC-200 or STC-2000 products. This configuration allows
setting of specified deposition rates through automatic control of output power to the
thermal source. STC PID control loop features govern deposition dynamics for these
applications.
The most sophisticated configuration employs the T3000 with the RS3000 and STC-200 or
STC-2000 products. This configuration allows setting of specified deposition rates through
automatic control of output power to the thermal source, control of PID loop dynamics and
provides set points and output power level as well as other monitoring and control
functions.
1.2 Theory of Operation
The T3000 is a switch mode power supply (SMPS), which operates at a switching
frequency of 250kHz. High frequency operation allows significant reduction in the size and
weight of the magnetic components while maintaining high operating efficiency.
The SMPS converts 208/220 VAC single-phase line voltage to a line-isolated full-wave
rectified 120-Hertz output waveform, which provides up to 3kW output power. Please note
that the RMS value of a full-wave rectified sine wave is the same as that of the sine wave,
Section 1
Page 1 - 1
Introduction – Description
of Equipment
T3000
Thermal Power Supply
instruments
although it contains both DC and harmonics of line frequency. Therefore, the heating value
in the load (the resistive deposition source) is the same whether the current is sine wave,
rectified sine wave or a DC voltage all of equal RMS value.
The rectified line frequency was chosen as the output format because it offers an inherent
unity power factor characteristic for the power supply. This comes about because power is
being delivered to the resistive load throughout the 60-Hertz cycle of line frequency. Since
conversion from line to output is performed at 250 kHz, there is insignificant phase shift
introduced at the 60-Hertz line frequency. The net result is input line current that is, ideally,
sinusoidal and essentially in-phase with the line voltage. This is the condition for near unity
power factor.
1.3 Technical Characteristics
Table 1-1 Specifications
Output Power 3000 Watts
Parallel Output 5 Volts @ 600 Amps RMS
Series Output 10 Volts @ 300 Amps RMS
Input Voltage Range 180-264 VAC, Single Phase
Input Freq. Range 47 Hz to 63 Hz
Input Current 18 Amps @ 220 VAC
Efficiency 80% Full Load
Power Factor >0.99 @ Full Load (TBD)
Total Harmonics < 5% @ Full Load (TBD)
Input Control 0 to +10VDC Required For Controlling Output Current
Response Time <100ms 250A to 500A Step Parallel Output
1
Current Monitor 1 VDC = 100 Amps RMS For Parallel & 50 Amps For Series
Voltage Monitor 1 VDC = 1.5 Volt RMS Across Output Terminals
Protection Over Temperature Shutdown
Size 11.4 in. H x 5.25 in. W x 12.9 in. D
Power Density 4 Watts per cubic inch
Weight 28 Pounds
Ambient Range 0oC to +50oC at full load
Cooling Forced air, two internal fans
EMI Designed to meet Conducted and Radiated EN55022
Safety Designed to meet EN60950
Output Connectors Flat bus bars with ¼” Bolt Hole for Lug Attachment
AC Input Wiring 2-Wire plus Ground with 8 – 32 lugs
I/O Connector 15-pin Dsub for control, monitoring and status signals
Power ON Indicator Green LED: Flashing=Input Power ON, Steady=Output ON
Over Temperature Red LED: Steady=Over Temp, Flashing=Ready for Reset
Open Load Red LED: Steady=Open Load
Compatibility Sycon Controller RS3000 &/or Rate Deposition Controllers
Footnote1; Response time is load dependent with lower resistance loads exhibiting faster response.
Introduction – Description
of Equipment
Page 1 - 2
Section 1
instruments
Thermal Power Supply
T3000
1.4 Output Characteristics
The purpose of this subsection is to provide guidelines for choosing between series or
parallel output connections based on the load requirements of the thermal source being
energized. Output voltage and current profiles vary in proportion to load resistance, up to
maximum limits determined by the output circuit configuration. Figure 1-1 provides a
guideline for choosing the appropriate output hookup configuration, based on the T3000
maximum output profile and the load requirements of the thermal source.
Maximum Load Vol t age- Cur r ent Pr of ile
16
14
12
Series Only Regi on
10
8
6
Load Voltage - Volts RMS
4
2
0
0 100 200 300 400 500 600 700
Max Output: Series Configuration
Vline = 220V rms
Max Output: Parallel Confi gur at ion
Parallel Region OnlyEither Seri es or Pa rallel Regi o n
Load Current - Am ps RMS
Figure 1-1 Maximum Voltage-Current Profile for Series and Parallel Hookup
Figure 1-1 is marked with regions which define when the series or parallel output
configuration is appropriate. The maximum voltage-current rating of any given thermal
source may be located as a point on the graph. The appropriate configuration(s) is
determined by the location of this point.
For example, consider a commercially available thermal source rated at 521 ARMS and a
corresponding voltage drop of 3.89 VRMS. This is a 2kW thermal source and falls in the
area of the graph noted as “Parallel Only”.
By way of contrast, a thermal source rated at 742 Watts, which is specified by a voltage
drop of 8.73 VRMS at 85 ARMS and falls in the “Series Only” region of the graph.
Section 1
Page 1 - 3
Introduction – Description
of Equipment
T3000
Thermal Power Supply
instruments
As a third example, consider a thermal source rated at about 365 Watts exhibiting a voltage
drop of 1.34V at a maximum current of 273 Amperes. This falls in the region where either a
series or parallel connection would work.
The above sample calculations assume that the voltage drop in the wires connecting to the
T3000 is small in comparison to the voltage drop across the thermal source load. This
condition is usually satisfied when the output wiring is properly sized for current carrying
capacity.
Generally, where either a series or parallel option is available, the series configuration is
recommended.
Introduction – Description
of Equipment
Page 1 - 4
Section 1
instruments
Thermal Power Supply
T3000
Section 2
Installation
2.1 Inspection
Inspect the shipping carton for possible damage before unpacking the unit. Carefully
unpack the equipment. Save all packing materials until inspection is complete. Verify that
all items listed on the packing slips have been received. Visually inspect all exterior
surfaces for damage. External damage may be an indication of internal damage. If any
damage is evident, immediately contact the carrier that delivered the unit and submit a
damage report. Failure to do so could invalidate future claims.
2.2 Input/Output Connectors
Table 2.2-1 lists all external connections for the T3000. An input and output connector
description is provided in Table 2.2-2. For permanently connected equipment, a readily
accessible safety switch shall be incorporated in the fixed AC wiring.
Table 2.2-1 T3000 External Connections
CONNECTOR FUNCTION CONNECTS TO
AC1 (See Figure 2.2-1)
AC2
Frame Ground
Section 1 (See Figure 2.2-2)
Positive Bus Bar
Negative Bus Bar
Section 2 (See Figure 2.2-2)
Positive Bus Bar
Negative Bus Bar
J1
For proper connection to the mains, a 30-Amp circuit
breaker or fuse is required in each AC line.
Prime AC Power Input
Single Phase
Output Power
Output Power
Control Interface
NOTICE
180-264 VAC
47-63 Hertz
Power Source
User Load
(See Figure 2.2-3 for
series or parallel
connections)
User Load
See Table 3.2-1
Section 2
Page 2 - 1
Installation
T3000
Table 2.2-2 T3000 Connection Interface
Connector Function Description
AC line connections & frame ground
Output Bus Bars
J1 control interface
Figure 2.2-1 shows the location and connection configuration for the single AC line input
(180-264 VAC). The AC wiring should be terminated with NO. 8 ring terminals and secured
to the 8-32 male terminals on the T3000 with nut and lock-washer. A safety cover, with
strain relief, covers the AC input connections.
Thermal Power Supply
8-32 Threaded Stand-off accepts #8
Ring terminal
¼” bolt holes
15 pin DB female (accepts 15 pin male
matching connector on cable)
instruments
CAUTION
Hazardous
Voltages
Present
Figure 2.2-2 shows the location of the bus bars for the two output sections and defines the
polarity relative to each other. Note that the Output-2 positive bus bar is common with the
T3000 signal ground.
TURN OFF THE INPUT AC POWER WITH THE
SAFETY SWITCH BEFORE REMOVING THE
T3000 PROTECTIVE COVER.
Hazardous
Current
Levels
Possible
Figure 2.2-3 shows how the auxiliary C-shaped and flat bus bars are utilized to connect the
two output sections of the T3000 in the parallel configuration. Cables to the thermal
sources (usually the feedthrough terminals of the vacuum chamber) must be terminated in
a suitably current rated solderless connector with a ¼-inch bolt hole for connection to the
bus bars.
Installation
TURN OFF THE INPUT AC POWER
WITH THE SAFETY SWITCH
BEFORE CHANGING
CONNECTIONS TO BUS BARS.
Page 2 - 2
CAUTION
Section 2
instruments
Thermal Power Supply
T3000
Figure 2.2-4 shows a similar arrangement for series connection of the two output sections
using the auxiliary Z-shaped bus bar. Cable connection requirements must be consistent
with current load requirements.
Also shown in Figure 2.2-4 is the location of the DB15 connector, which interfaces with the
control cable from the RS3000 or other user specified control hardware.
Section 2
Page 2 - 3
Installation
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