Capacitance Diaphragm Gauge
Stripe™ CDG045Dhs
tina84e1-a (2019-07) 1
Operating Manual
Incl. EU Declaration of Conformity
Model:
PN:
SN:
V W
Product Identification
In all communications with INFICON, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.
Validity
This document applies to products of the Stripe CDG045Dhs
series.
Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. factory setting of setpoint) as defined in the
corresponding ordering information.
2 tina84e1-a (2019-07)
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with DN 16 ISO-KF vacuum
connection. They apply to gauges with other vacuum connections by analogy.
We reserve the right to make technical changes without prior
notice.
tina84e1-a (2019-07) 3
Intended Use
The temperature compensated Capacitance Diaphragm Gauges
of the Stripe CDG045Dhs series are intended for absolute
pressure measurement of gases in their respective pressure
ranges (→ 2).
Ideally the measurement values can be read out digitally via
EtherCAT interface or analog. The gauges can also be operated
in connection with an INFICON Vacuum Gauge Controller (VGC
series) or another appropriate controller.
Functional Principle
A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into a digital or into an
analog linear output signal by the digital electronics. The digital
output signal can only be read out via the EthreCAT interface.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the
sensor to a constant temperature of 45°C which results in a compensation of changes in the ambient conditions and a reduced
deposition of process products and by-products in process applications.
Trademarks
Stripe™ INFICON Gmb H
®
VCR
Swagelok Marketing Co.
Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085
4 tina84e1-a (2019-07)
Scope of Delivery
1× gauge Stripe CDG045Dhs
1× pin for adjusting settings via buttons
1× Calibration Test Report
1× Operating Manual German
1× Operating Manual English
tina84e1-a (2019-07) 5
Contents
Product Identification 2
Validity 2
Intended Use 4
Functional Principle 4
Trademarks 4
Patents 4
Scope of Delivery 5
1 Safety 8
1.1 Symbols Used 8
1.2 Personnel Qualifications 8
1.3 General Safety Instructions 9
1.4 Liability and W arranty 9
2 Technical Data 10
3 Installation 16
3.1 Vacuum Connection 16
3.2 Power Connection 19
3.2.1 D-sub, 15-pin Connector 20
3.2.2 EtherCAT Connector 21
3.2.3 Mini USB Type B Connector (Diagnostic Port) 22
4 Operation 23
4.1 Status Indication 23
4.2 Zeroing the Gauge 24
4.2.1 <ZERO> Adjustment 24
4.3 Switching Functions SP1, SP2, ATM, Status 28
4.4 Activating the Factory Setting (Factory Reset) 34
4.7 Diagnostic Port (USB Interface) 35
4.8 EtherCAT Operation 35
5 Deinstallation 37
6 Maintenance, Repair 39
6 tina84e1-a (2019-07)
7 Returning the Product 39
8 Disposal 40
Further Information 41
EU Declaration of Conformity 43
For cross-references within this document, the symbol (→ XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→ [Z]).
tina84e1-a (2019-07) 7
DANGER
WARNING
Caution
Skilled personnel
1 Safety
1.1 Symbols Used
Information on preventing any kind of physical injury.
Information on preventing extensive equipment and environmental damage.
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
<…> Labeling
1.2 Personnel Qualifications
All work described in this document may only be carried out by
persons who have suitable technical training and the necessary experience or who have been instructed by the end-user
of the product.
8 tina84e1-a (2019-07)
1.3 General Safety Instructions
• Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations etc.)
on the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination are not covered by the
warranty.
tina84e1-a (2019-07) 9
Measurement range
→ "Validity"
1)
0.01 … 0.05 F.S.
0.2% of reading
0.1 … 1100 F.S.
0.15% of reading
1 … 1100 F.S.
0.0025% F.S./ °C
Temperature effect on span
0.01% of reading / °C
Resolution
0.003% F.S.
Gas type dependence
none
(measurement signal)
Measurement range
0 … +10 V
(limited to +10.5 V)
Relationship voltage-pressure
linear
Output impedance
0 Ω (short-circuit proof)
Loaded impedance
>10 kΩ
Measurement rate
1 kHz
(analog output signal)
interface)
2 Technical Data
Precision
Accuracy
Temperature effect on zero
0.01 … 0.02 F.S.
0.05 … 0.5 F.S.
Output signal analog
Voltage range –5 … +10.5 V
Step response time 3)
Delay time
(digital output signal, EtherCAT
1)
→ ISO/WD 15725-1
2)
Non-linearity, hysteresis, repeatability at 25 °C ambient operating
temperature without temperature effects after operation of 2 h.
3
)
Increase 10 … 90 % F.S.R.
4
)
Depending on pressure range, conductance vacuum connection and the
default filter setting.
10 tina84e1-a (2019-07)
2)
0.0100% F.S./ °C
0.0050% F.S./ °C
2 … 20 ms 4)
2 ms
Voltage
≤5 V
contact (→ 24)
Pulse
>1 s … <5 s
status
Setpoints
Setting range SP1 & SP2
1 … 99% F.S.
pressure
Hysteresis 5)
1% F.S.
High Trip Point
floating (NO)
closed
LED lit solid
open
LED off
Status relay
mon (pin 5)
warning
warming up, error
Cable
USB cable type A/mini B
Identification
Resistance R
Ident
13.2 kΩ referenced to supply common
Remote Zero Adjust digital input for zero adjust-
ment with external switching
External switching contact
30 V (dc) / <5 mA (dc)
Switching functions setpoints SP1& SP2, AT M,
Setting range ATM Factor 0.5 … 1.1 from ATM
Switching characteristics 5) Low Trip Point (default)
Relay contact 30 V (dc) / ≤0.5 A (dc)
Relay contact 30 V (dc) / ≤0.5 A (dc)
connected to supply com-
closed measurement mode
open no supply voltage
Diagnostic port
5
)
The hysteresis and the switching characteristics can be programmed via
the serial interface or the diagnostic port.
tina84e1-a (2019-07) 11
Mini USB type B, 5-pin
EtherCAT interface
3CC9-xxx-23G0
→ [9], [10]
Data rate
100 Mbps
Note address
explicit device identification
Physical layer
100Base-Tx (IEEE 802.3)
input and output
or higher)
Cable length
≤100 m
For further information on the EtherCAT interface → [5], [6]
DANGER
has to be fused 6).
±15 V (dc)
at operating temperature
≤9 W
Fuse to be connected 6)
1.25 AT
voltage and overload.
Specification, data format,
communication protocol
3CC9-xxx-2380
→ [7], [8]
EtherCAT connector 2×RJ45, 8-pin, socket
Cable 8-pin, shielded, Ethernet
Patch Cable (CAT5e quality
Supply
The gauge may onl y be connected to power supplies, instruments or control devices that conform
to the requirements of a grounded protective extralow voltage (PELV). The connection to the gauge
Supply voltage
at the gauge
Power consumption
while being heated
+14 … +30 V (dc) or
≤14 W
The gauge is protected against reverse polarity of the supply
6)
INFICON controllers fulfill this requirement.
12 tina84e1-a (2019-07)
Electrical connection
15-pin D-sub, male
Sensor cable
15-pin plus shielding
≤15 m (0.25 mm²/conductor)
≤75 m (0.25 mm²/conductor)
≤135 m (0.25 mm²/conductor)
(R
cable
≤1.0 Ω).
Grounding concept
→ "Power Connection"
stainless steel AISI 316L
Internal volume
≤4.2 cm3
0.01 … 0.5 F.S.
1.3 bar | 130 kPa
Bursting pressure (absolute)
6 bar | 600 kPa
Admissible temperatures
Bakeout
≤110 °C at the flange
at +40°C
3000 m NN
Degree of protection
IP 30
tal
Cable length
Supply voltage 15 V
≤ 8 m (0.14 mm²/conductor)
Supply voltage 24 V ≤43 m (0.14 mm²/conductor)
Supply voltage 30 V ≤88 m (0.14 mm²/conductor)
For longer cables, larger conductor cross-sections are required
Materials exposed to vacuum ceramics (Al2O3 ≥99.5%),
Admissible pressure (absolute)
1000 / 1100 F.S.
1 … 500 F.S.
Storage
Operation
4 bar | 400 kPa
2.6 bar | 260 kPa
–20 °C … +85 °C
+10 °C … +40 °C
Relative humidity ≤80% at temperatures
≤+31 °C, decreasing to 50%
Use indoors only, altitude up to
Mounting orientation
0.01 … 0.05 F.S.
0.1 … 1100 F.S.
standing upright or horizontal
standing upright to horizon-
tina84e1-a (2019-07) 13
15.7
31.5
110.4
3.8
DN 16 ISO-KF
½¨ tube
ø82
ø85
DN 16 CF-R
8VCR
female
Weight
837 … 897 g
Dimensions [mm]
14 tina84e1-a (2019-07)
1 2 3 4 5 6 7 8 9 10
0
0.9×F.S.
0.5×F.S.
0.6×F.S.
1.0×F.S.
0.7×F.S.
0.8×F.S.
0.1×F.S.
0.2×F.S.
0.3×F.S.
0.4×F.S.
1.1×F.S.
Pressure p
Measurement U
out
[V]
0.0×F.S.
Torr
mbar 7)
Pa 7
1.3332…
133.3224…
Analog Measurement Signal vs. Pressure
c 1.00
p = (U
/ 10 V) × p (F.S.)
out
Conversion Torr ↔ Pascal
1013.25 / 760 =
101325 / 760 =
Example: Gauge with 10 Torr F.S.
Measurement signal U
= 6 V
out
p = (6 V / 10 V) × 10 Torr
= 0.6 × 10 Torr = 6 Torr
7)
Source: NPL (National Physical Laboratory)
Guide to the Measurement of Pressure and Vacuum, ISBN 0904457x /
1998
tina84e1-a (2019-07) 15
WARNING
impacts.
DANGER
suited to overpressure.
DANGER
Use O-rings provided with an outer centering ring.
3 Installation
Fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
3.1 Vacuum Connection
Overpressure in the vacuum system >1 bar
Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
Overpressure in the vacuum system >2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage your
health.
16 tina84e1-a (2019-07)
DANGER
measures to fulfill this requirement.
Caution
damages.
Caution
tools when working in this area.
Protective ground
Products that are not correctly connected to ground
can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded
vacuum chamber. This connection must conform to
the requirements of a protective connection according to EN 61010:
• CF and VCR flanges fulfill this requirement.
• For gauges with a KF flange, use a conductive
metallic clamping ring.
• For gauges with a ½" tube, take appropriate
Vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
Dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
Mount the gauge so that no vibrations occur.
tina84e1-a (2019-07) 17
Mounting orientation
0.01 … 0.05 F.S.
Seal with
centering ring
Clamp
Protective lid
standing upright or
horizontal acc. to the
"Calibration Test
Report"
0.1 … 1100 F.S.
If adjustment should be possible after the gauge has been installed, be sure to install it so that the buttons can be accessed
with a pin.
Remove the protective lid and connect the product to the vacuum system.
18 tina84e1-a (2019-07)
standing upright to
horizontal
Keep the protective lid.
DANGER
has to be fused 8).
3.2 Power Connection
Make sure the vacuum connection is properly made
(→ 16).
tina84e1-a (2019-07) 19
The gauge may onl y be connected to power supplies, instruments or control devices that conform
to the requirements of a grounded protective extralow voltage (PELV) The connection to the gauge
Ground loops, differences of potential, or EMC problems
may affect the measurement signal. For optimum signal
quality, please do observe the following notes:
• Use an overall metal braided shielded cable. The
connector must have a metal case.
• Connect the cable shield to ground at one side via the
connector case. Make sure the connector case has
direct contact to the cable's shield on its whole ci rcumference. Do not connect the other side of the
shield.
• Connect the supply common with protective ground
directly at the power.
• Use differential measurement input (signal common
and supply common conducted separately).
• Potential difference between supply common and
housing ≤18 V (overvoltage protecti on).
8)
INFICON controllers fulfill this requirement.
c
ase
14…
30 V
Remote
Zero Adjust
1
M
4
3
1
8
9
10
Ident
13
14
2
12
7
11
5
15
680 n
F
18 V
10 Ω
6
SP1
SP2
Status
Pin 1, 4
Relay SP1, closing contact
15
8
9
1
Pin 2
Signal output (measuring
signal) or thresholds SP1/2
Pin 3
Status
Pin 5
Supply common
Pin 7, 11
Supply (+14…+30 V)
Pin 8, 9
Relay SP2, closing contact
Pin 10
Gauge identification or
Remote Zero Adjust
Pin 12
Signal common
Pin 15
Housing (Chassis Ground)
Case
Connector case
Pin 6, 13, 14: n.c.
3.2.1 D-sub, 15-pin Connector
If no sensor cable is available, make one according to the
following diagram (cable length and conductor cross-sections
→ 13).
Electrical connection
20 tina84e1-a (2019-07)
D-sub, 15-pin
female
soldering side
8 1
Pin 1
TD+
Transmission data +
Pin 2
TD-
Transmission data -
Pin 3
RD+
Receive data +
Pin 6
RD-
Receive data -
Sensor cable
FCC68 cable
<IN> port
FCC68 cable
<OUT> port
3.2.2 EtherCAT Connector
EtherCAT is a communications interface. It is powered
via the sensor cable.
If no EtherCAT cables are available, make them according to the
following diagram. Connect the EtherCAT cables.
FCC68, 8-pin, soldering side
Pin 4, 5, 7 and 8: n.c.
tina84e1-a (2019-07) 21
5
1
Pin 1
VBUS (5 V)
Pin 2
D-
Pin 3
D+
Pin 4
ID
Pin 5
GND
Mini USB type B
3.2.3 Mini USB Type B Connector (Diagnostic Port)
A standard USB cable can be used. If no cable is available,
make one according to the following diagram. Connect the cable.
Mini USB typ B, soldering side
22 tina84e1-a (2019-07)
LED
LED status
Meaning
<STATUS>
off
no supply voltage
lit solid green
measurement mode
long blinks
warming up
lit solid red
error
<SP1>
lit green green
setpoint 1 closed
blinking green
waiting for setpoint 1 input
off
setpoint 1 open
<SP2>
lit solid green
setpoint 2 closed
blinki ng green
waiting for setpoint 2 input
off
setpoint 2 open
4 Operation
Put the gauge into operation. If you are using an INFICON controller, define the measurement range (
A warm-up time of at least ½ hour should be allowed; for precise
pressure measurements a warm-up time of at least 2 hours is
required.
4.1 Status Indication
→ [1], [2], [3]).
blinking green
EtherCAT LEDs → [5], [6].
tina84e1-a (2019-07) 23
short blinks
warning, over/underrange
F.S.
U / 90°
1000 Torr/mbar
≈2 mV
100 Torr/mbar
≈10 mV
10 Torr/mbar
≈50 mV
1 Torr/mbar
≈300 mV
0.1 Torr/mbar
≈1.8 V
0.01 … 0.05 Torr/mbar
0 V *)
4.2 Zeroing the Gauge
The gauge is factory calibrated while "standing upright" or in
horizontal position (→ "Calibration Test Report").
Perform a zero adjustment, when the gauge is operated
for the first time.
Due to long time operation or contamination, a zero drift could
occur and zero adjustment may become necessary.
For adjusting the zero, operate the gauge under the same constant ambient conditions and in the same mounting orientation
as normally.
The output signal (measuring signal) is depending on the mounting orientation. The signal difference between the vertical and
horizontal mounting orientation is:
*) The gauge is factory calibrated while "standing upright" or in
horizontal position (→ "Calibration Test Report").
If the gauge is operated via a controller, the zero of the
whole measuring s ystem has to be adjusted on the
controller: first, adjust the zero of the gauge and then,
the zero of the controller.
4.2.1 <ZERO> Adjustment
The zero can be adjusted via
• the <ZERO> button on the gauge,
• the diagnostic port (→ [4]),
• the EtherCAT interface (→ [5], [6]),
∆
24 tina84e1-a (2019-07)
• the digital input "Remote Zero": Apply the supply
F.S.
zero adjustment
0.01 Torr
voltage to pin 10 (pulse → 11),
• an INFICON Vacuum Gauge Controller (VGC series).
While the gauge is being heated and/or under atmos-
pheric pressure, the zeroing function is locked in order
for operating errors to be prevented.
Evacuate the gauge to a pressure according to the table
below:
Recommended final pressure for
1100 mbar
1000 Torr
500 Torr/mbar
200 Torr/mbar
100 Torr/mbar
50 Torr/mbar
20 Torr/mbar
10 Torr/mbar
5 Torr/mbar
2 Torr/mbar
1 Torr/mbar
0.5 Torr/mbar
0.25 Torr/mbar
0.1 Torr/mbar
0.05 Torr/mbar
0.02 Torr/mbar
−
<5×10
<3×10-2 Torr
<1×10-2 Torr
<5×10-3 Torr
<3×10-3 Torr
<1×10-3 Torr
<5×10-4 Torr
<3×10-4 Torr
<1×10-4 Torr
<5×10-5 Torr
<3×10-5 Torr
<1×10-5 Torr
<5×10-6 Torr
<3×10-6 Torr
<1×10-6 Torr
<5×10-7 Torr
-2
Torr
<7×100 Pa
<7×100 Pa
<4×100 Pa
<2×10-0 Pa
<7×10-1 Pa
<4×10-1 Pa
<2×10-1 Pa
<7×10-2 Pa
<4×10-2 Pa
<2×10-2 Pa
<7×10-3 Pa
<4×10-3 Pa
<2×10-3 Pa
<7×10-4 Pa
<4×10-4 Pa
<2×10-4 Pa
<7×10-5 Pa
<7×10-2 mbar
−
<4×10-2 mbar
<2×10-2 mbar
<7×10-3 mbar
<4×10-3 mbar
<2×10-3 mbar
<7×10-4 mbar
<4×10-4 mbar
<2×10-4 mbar
<7×10-5 mbar
<4×10-5 mbar
<2×10-5 mbar
<7×10-6 mbar
<4×10-6 mbar
<2×10-6 mbar
−
If the final pressure is too high for zero adjustment (>25%
of the F.S.), the zero cannot be reached and the
<STATUS> LED blinks green. If this is the case, activate
the factory setting and adjust the zero again (→ 34).
Operate the gauge for at least 2 hours (until the signal is
stable).
tina84e1-a (2019-07) 25
Briefly press the <ZERO> button with a pin (max.
max. ø1.1 mm
Press the
button briefly
ø1.1 mm). or …
… apply supply voltage to Remote Zero at pin 10
(pulse → 11).
The zero adjustment runs automatically. The <STATUS>
indicator flashes until the adjustment (duration ≈8 s) is
completed.
After zero adjustment, the gauge automatically returns
to the measurement mode.
The <STATUS> LED blinks green if
• the signal output is negative (< -20 mV) when the final pressure has been attai ned
• the zero adjustment has failed.
4.2.2 <ZERO> Adjustment with Ramp Function
The ramp function allows to adjust the pressure value at a
known reference pressure within the measurement range of the
gauge.
26 tina84e1-a (2019-07)
It also permits to adjust an offset of the characteristic curve in
max. ø1.1 mm
Keep the button
depressed
order to
• compensate for the offset of the measuring system or
• obtain a slightly positive zero for a 0 … 10 V AD converter.
The offset should not exceed 5% of the F.S. (+500 mV). At a
higher positive offset, the upper limit of the measurement range
is exceeded.
Zero adjustment using the ramp function can be
performed via
• the <ZERO> button on the gauge,
• the EtherCAT interface (→ [5], [6]),
• the diagnostic port (→ [4]),
Recommended procedure for adjusting the offset of a
measuring system: → Notice 24.
Operate the gauge for at least 2 hours (until the signal is
stable).
Push the <ZERO> button with a pin (max. ø1.1 mm) and
keep it depressed. The <STATUS> LED starts blinking.
After 5 s, the zero adjustment value, starting at the current
output value, keeps continually changing (ramp) until the
button is released or until the setting limit (max. 25% F.S.)
is reached.
tina84e1-a (2019-07) 27
• Change of direction (inverse ramp): Release the button.
Press and keep it depressed again within 3 … 5 s (the
flashing frequency of the <STATUS> indicator changes
briefly).
• Fine adjustment: Release the button. Briefly press it
again within 0 … 3 s. The zero adjustment value changes by one unit.
If the <ZERO> button is released for m ore than 5 s, the
gauge returns to the measurement mode.
The <STATUS> LED blinks green if the signal output is negative
(< -20 mV).
4.3 Switching Functions SP1, SP2, ATM, Status
The gauge provides two adjustable and programmable switching
functions, which are independent of each other. A switching
contact is provided for each switching function:
• Vacuum pressure set points SP1 & SP2 (default)
• Atmospheric pressure set point (ATM set point)
• Gauge status
Switching characteristics and hysteresis of the set points
• Low Trip Point (default)
• High Trip Point
The switching characteristics and the hysteresis of each
set point can only be programmed via the diagnostic
port (→ [4]) and the E therCAT interface (→ [5],
[6]).
28 tina84e1-a (2019-07)
Mea
surement sign
al
(pressure p)
Time t
OffOn
Hysteresis
(1% F.S.)
Off
Threshold value
Reset value
Setpoint
Measurement signal
(pressure p)
Time t
OffOn
Hysteresis
(1% F.S.)
Off
Threshold value
Setpoint
Reset value
Low Trip Point (default)
If the pressure in the vacuum system is lower than the setpoint,
the corresponding LED (<SP1> or <SP2>) is lit soli d and the
corresponding switching contact is closed.
tina84e1-a (2019-07) 29
High Trip Point
If the pressure in the vacuum system is higher than the setpoint,
the corresponding LED (<SP1> or <SP2>) is lit soli d and the
corresponding switching contact is closed.
DANGER
malfunction will cause.
4.3.1 Adjusting the Vacuum Pressure Setpoints (SP1 &
SP2)
The two setpoints can be set to any pressure within the measurement range of the gauge.
The thresholds of the setpoints SP1 & SP2 can be
adjusted via
• the buttons on the gauge
• the diagnostic port (→ [4])
• the EtherCAT interface (→ [5], [6]).
The current threshold setting
• is output at the measurement signal output instead of the
pressure signal and can be measured with a voltmeter after
the <SP> button is pressed
• can be read via the diagnostic port (→ [4]) and the
EtherCAT interface (→ [5], [6]).
Adjusting Setpoint <1>
Push the <SP> button with a pin (max. ø1.1 mm). The
30 tina84e1-a (2019-07)
Malfunction
If processes are controlled via the signal output,
keep in mind that by pushing an <SP> button the
measurement signal is suppressed and the corresponding threshold value is output instead. This
can cause malfunctions.
Push the <SP> button only if you are sure that no
gauge changes to the switching function mode and outputs
the current threshold value at the measurement value
output for about 10 s (LED <1> blinks).
max. ø1.1 mm
Press the button
max. ø1.1 mm
Keep the button
depressed
For changing the threshold value, push the <ZERO> button
and keep it depressed. The threshold keeps changing from
the current value (ramp) until the button is released or until
the limit of the setting range is reached.
• Change of direction (inverse ramp): Release the button.
Press and keep it depressed again within 3 … 5 s (the
flashing frequency of the <STATUS> indicator changes
briefly).
• Fine adjustment: Release the button. Briefly press it
again within 0 … 3 s. The threshold value changes by
one unit.
tina84e1-a (2019-07) 31
If the <ZERO> button is released for more than 5 s, the
Low Trip Point Hysteresis
High Trip Point Hysteresis
Setpoint Mode
gauge returns the measurement mode.
The factory setting of the reset value is 1% F.S. above
the Low Trip Point and 1% F.S. below the High Trip
Point (hysteresis).
If after programming of the hysteresis the button <SP> is
pushed, the factory setting of the hysteresis (1%) is
reactivated.
Programming setpoint SP1
Programmable parameters:
(→ [4], [5], [6])
Low Trip Point
Low Trip Enable
High Trip Point
Adjusting setpoint SP2
The adjustment procedure is the same as for setpoint SP1.
4.3.2 Programming the ATM Setpoint
The vacuum pressure setpoints SP1 & SP2 can be programmed
to atmospheric pressure setpoint (ATM setpoint) vi a the diagnostic port (→ [4]) or the EtherCAT interface (→ [5], [6]).
Switching characteristics Low / High Trip Point and hysteresis
→ 28.
The threshold value of the ATM setpoint is defined as a factor of
the current atmospheric pressure. The switching contact switches when the pressure in the vacuum system has reached the
defined threshold value.
32 tina84e1-a (2019-07)
High Trip Enable
Example: Setpoint of the High Trip P oint with threshold 110% of
M
easurement signal
(pressure p)
1078 mbar
980 mbar
Atmospheric pres/
sure (ambience)
ATM setpoint 110%
(= factor 1.1)
Hysteresis (1% F.S.)
OffOnOff
Threshold value
Reset value
Low Trip Point Hysteresis
High Trip Point Hysteresis
Setpoint Mode
the atmospheric pressure (= factor 1.1)
Hysteresis: 1%
The current programmed ATM threshold setting
• can be read / written via the diagnostic port (→ [4])
• can be read / written via the EtherCAT interface (→ [5],
[6]).
Programming ATM setpoint
Programmable parameters:
(→ [4], [5], [6])
High Trip Enable
tina84e1-a (2019-07) 33
Factor of ATM
Low Trip Enable
Switching characteristics of the setpoints → 28.
Diagnostic port → [4].
4.3.3 Programming Gauge Status
The vacuum pressure setpoints SP1 & SP2 can be programmed
to gauge status via the diagnostic port (→ [4]) or the
EtherCAT interface (→ [5], [6]).
The status of the gauge is output as a digital signal.
4.4 Activating the Factory Setting (Factory Reset)
All user defined parameters (e.g. zero, filter) are restored to their
default values.
Loading of the default parameters is irreversible.
Loading the default parameters:
Put the gauge out of operation.
Keep the <ZERO> button depressed for at least 5 s while
the gauge is being put into operation (Power ON).
34 tina84e1-a (2019-07)
Mini USB type B
Caution
nostic port.
4.5 Diagnostic Port (USB Interface)
The diagnostic port <DIAG> permits to output the pressure
reading and all status information and to enter all settings at the
same time (→ [4]). A standard USB cable type A/mini B can
be used.
Required software: T-Gauge. Please contact your local INFICON
service center.
4.6 EtherCAT Operation
Data transmission errors
Any attempt to simultaneously operate the gauge
via the EtherCAT interface and the diagnostic port
causes data transmission errors.
Therefore the gauge must not be operated simultaneously via the EtherCAT interface and the diag-
tina84e1-a (2019-07) 35
For operating the gauge via EtherCAT, prior installation of the
2
4
068
A
E
2
4
068
A
E
2
4
068
A
E
device specific ESI file is required on the bus master side. This
file can be downloaded from our website (www.inficon.com).
Explicit Device Address Setting (default 00
)
hex
During device initialization, the device address switches are read
by the device firmware. This device address is supported to the
master as Explicit Device Identification.
The explicit device address is set in hexadecimal form (00 … FFF
<x100>, <x10> and <x1> switches.
) via the
hex
Example: Device address = 0xDDD (dec 3549):
0x100 * 0xD (dec 3328) + 0x10 * 0xD (dec 208) + 0x1 * 0xD
(dec 13)
Status LED
LEDs on the gauge inform on the gauge status and the current
EtherCAT status (→ [5], [6]).
36 tina84e1-a (2019-07)
WARNING
impacts.
DANGER
when handling contaminated parts.
Caution
damages.
5 Deinstallation
Fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
Contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
Vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
tina84e1-a (2019-07) 37
Caution
tools when working in this area.
Dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
Vent the vacuum system.
Put the gauge out of operation.
Unfasten the lock screws and disconnect the sensor cable.
Remove the gauge from the vacuum system and install the
protective lid.
38 tina84e1-a (2019-07)
WARNING
declaration of contamination *).
6 Maintenance, Repair
Under clean operating conditions, the product requires no maintenance.
Gauge failures due to contamination are not covered by
the warranty.
We recommend checking the zero at regular intervals
(→ 24).
INFICON assumes no liability and the warranty becomes null
and void if any repair work is carried out by the end-user or third
parties.
7 Returning the Product
*)
Form under www.inficon.com
Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration of
contamination are returned to the sender at his own expense.
tina84e1-a (2019-07) 39
Forwarding contaminated products
Contaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detrimental to health and environment.
Products returned to INFICON should preferably be
free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed
DANGER
when handling contaminated parts.
WARNING
relevant local regulations.
8 Disposal
Contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
Substances detrimental to the environment
Products or parts thereof (mechanical and electric
components, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with the
Separating the components
After disassembling the product, separate its com ponents according to the following criteria:
• Contaminated components
Contaminated components (radioactive, toxic, caustic or bio-
logical hazard etc.) must be decontaminated in accordance
with the relevant national regulations, separated according to
their materials, and disposed of.
• Other components
Such components must be separated according to their ma-
terials and recycled.
40 tina84e1-a (2019-07)
Further Information
[1] Operating Manual
Single-Channel Controller VGC401
tinb01e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[2] Operating Manual
Two- & Three-Channel Measurement and Control Unit
VGC402, VGC403
tinb07e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[3] Operating Manual
One-, Two- & Three-Channel Measurement and Control
Unit VGC501, VGC502, V GC503
tina96e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[4] Communication Protocol
Diagnostic Port
via T-Gauge
tira84e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[5] Communication Protocol
EtherCAT CDG045Dhs
(ETG.5003.2080 S (R) V1.0.0)
tira68e1 (nur englisch)
INFICON AG, LI–9496 Balzers, Liechtenstein
[6] Communication Protocol
EtherCAT CDG045Dhs
(ETG.5003.2080 S (R) V1.3.0)
tirb45e1 (nur englisch)
INFICON AG, LI–9496 Balzers, Liechtenstein
[7] ETG.5003.1 S (R) V1.0.0: Semiconductor Device profile
– Part 1: Common Device Profile (CDP)
[8] ETG.5003.2080 S (R) V1.0.0: Semiconductor Device
profile – Part 2080: Specific Device Profile (SDP):
Vacuum Pressure Gauge
[9] ETG.5003.1 S (R) V1.1.0: Semiconductor Device profile
– Part 1: Common Device Profile (CDP)
tina84e1-a (2019-07) 41
[10] ETG.5003.2080 S (R) V1.3.0: Semiconductor Device
profile – Part 2080: Specific Device Profile (SDP):
Vacuum Pressure Gauge
42 tina84e1-a (2019-07)
5 July 2019
5 July 2019
EU Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned
below complies with the provisions of the following directives:
• 2014/30/EU, OJ L 96/79, 29.3.2014
(EMC Directive; Directive relating to electromagnetic compatibility)
• 2011/65/EU, OJ L 174/88, 1.7.2011
(RoHS Directive; Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment)
Product
Capacitance Diaphragm Gauge
Stripe™ CDG045Dhs
Standards
Harmonized and international/national standards and specifications:
• EN 61000-6-2:2005
• EN 61000-6-3:2007 + A1:2011
• EN 61010-1:2010 (Safety requirements for electrical equipment for
measurement, control and laboratory use)
• EN 61326:2013; Group 1, Cl ass B
cal equipment for measurement, control and laboratory use)
Manufacturer / Signatures
INFICON AG, Alte Landstraße 6, LI-9496 Balzers
(EMC: generic immunity standard)
(EMC: generic emission standard)
(EMC requirements for electri-
tina84e1-a (2019-07) 43
ti na84e1-a
LI–9496 Balzers
Liechtenstein
Tel +423 / 388 3111
Fax +423 / 388 3700
Original: German tina84d1-a (2019-07) reachus@inficon.com
www.inficon.com
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