Inficon Stripe CDG045Dhs Operating Manual

Capacitance Diaphragm Gauge
Stripe™ CDG045Dhs
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Operating Manual
Incl. EU Declaration of Conformity
Model:
PN: SN:
V W

Product Identification

In all communications with INFICON, please specify the infor­mation given on the product nameplate. For convenient refer­ence copy that information into the space provided below.

Validity

This document applies to products of the Stripe CDG045Dhs series.
Part numbers of standard products are indicated below. OEM products have other part numbers and different parameter settings (e.g. factory setting of setpoint) as defined in the corresponding ordering information.
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The part number (PN) can be taken from the product nameplate. If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with DN 16 ISO-KF vacuum connection. They apply to gauges with other vacuum connec­tions by analogy.
We reserve the right to make technical changes without prior notice.
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Intended Use

The temperature compensated Capacitance Diaphragm Gauges of the Stripe CDG045Dhs series are intended for absolute pressure measurement of gases in their respective pressure ranges ( 2).
Ideally the measurement values can be read out digitally via EtherCAT interface or analog. The gauges can also be operated in connection with an INFICON Vacuum Gauge Controller (VGC series) or another appropriate controller.

Functional Principle

A ceramic diaphragm is deflected by pressure. The deflection is measured capacitively and converted into a digital or into an analog linear output signal by the digital electronics. The digital output signal can only be read out via the EthreCAT interface.
The output signal is independent of the gas type. Very accurate pressure measurement is achieved by heating the
sensor to a constant temperature of 45°C which results in a com­pensation of changes in the ambient conditions and a reduced deposition of process products and by-products in process appli­cations.

Trademarks

Stripe™ INFICON Gmb H
®
VCR
Swagelok Marketing Co.

Patents

EP 1070239 B1, 1040333 B1 US Patents 6528008, 6591687, 7107855, 7140085
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Scope of Delivery

1× gauge Stripe CDG045Dhs 1× pin for adjusting settings via buttons 1× Calibration Test Report 1× Operating Manual German 1× Operating Manual English
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Contents
Product Identification 2 Validity 2 Intended Use 4 Functional Principle 4 Trademarks 4 Patents 4 Scope of Delivery 5
1 Safety 8
1.1 Symbols Used 8
1.2 Personnel Qualifications 8
1.3 General Safety Instructions 9
1.4 Liability and W arranty 9
2 Technical Data 10 3 Installation 16
3.1 Vacuum Connection 16
3.2 Power Connection 19
3.2.1 D-sub, 15-pin Connector 20
3.2.2 EtherCAT Connector 21
3.2.3 Mini USB Type B Connector (Diagnostic Port) 22
4 Operation 23
4.1 Status Indication 23
4.2 Zeroing the Gauge 24
4.2.1 <ZERO> Adjustment 24
4.3 Switching Functions SP1, SP2, ATM, Status 28
4.4 Activating the Factory Setting (Factory Reset) 34
4.7 Diagnostic Port (USB Interface) 35
4.8 EtherCAT Operation 35
5 Deinstallation 37 6 Maintenance, Repair 39
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7 Returning the Product 39 8 Disposal 40 Further Information 41 EU Declaration of Conformity 43
For cross-references within this document, the symbol ( XY) is used, for cross-references to further documents, listed under "Further Information", the symbol ( [Z]).
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DANGER
WARNING
Caution
Skilled personnel

1 Safety

1.1 Symbols Used

Information on preventing any kind of physical injury.
Information on preventing extensive equipment and environ­mental damage.
Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.
Notice
<…> Labeling

1.2 Personnel Qualifications

All work described in this document may only be carried out by persons who have suitable technical training and the neces­sary experience or who have been instructed by the end-user of the product.
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1.3 General Safety Instructions

Adhere to the applicable regulations and take the necessary precautions for the process media used.
Consider possible reactions with the product materials.
Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.
Before beginning to work, find out whether any vacuum com­ponents are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contamin­ated parts.
Communicate the safety instructions to all other users.

1.4 Liability and Warranty

INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties
disregard the information in this document
use the product in a non-conforming manner
make any kind of interventions (modifications, alterations etc.)
on the product
use the product with accessories not listed in the product documentation.
The end-user assumes the responsibility in conjunction with the process media used.
Gauge failures due to contamination are not covered by the warranty.
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Measurement range
"Validity"
1)
0.01 … 0.05 F.S.
0.2% of reading
0.1 … 1100 F.S.
0.15% of reading
1 … 1100 F.S.
0.0025% F.S./ °C
Temperature effect on span
0.01% of reading / °C
Resolution
0.003% F.S.
Gas type dependence
none
(measurement signal)
Measurement range
0 … +10 V
(limited to +10.5 V)
Relationship voltage-pressure
linear
Output impedance
0 (short-circuit proof)
Loaded impedance
>10 k
Measurement rate
1 kHz
(analog output signal)
interface)

2 Technical Data

Precision
Accuracy
Temperature effect on zero
0.01 … 0.02 F.S.
0.05 … 0.5 F.S.
Output signal analog
Voltage range –5 … +10.5 V
Step response time 3)
Delay time (digital output signal, EtherCAT
1)
ISO/WD 15725-1
2)
Non-linearity, hysteresis, repeatability at 25 °C ambient operating
temperature without temperature effects after operation of 2 h.
3
)
Increase 10 … 90 % F.S.R.
4
)
Depending on pressure range, conductance vacuum connection and the
default filter setting.
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2)
0.0100% F.S./ °C
0.0050% F.S./ °C
2 … 20 ms 4)
2 ms
Voltage
5 V
contact ( 24)
Pulse
>1 s … <5 s
status
Setpoints
Setting range SP1 & SP2
1 … 99% F.S.
pressure
Hysteresis 5)
1% F.S.
High Trip Point
floating (NO)
closed
LED lit solid
open
LED off
Status relay
mon (pin 5)
warning
warming up, error
Cable
USB cable type A/mini B
Identification
Resistance R
Ident
13.2 k referenced to sup­ply common
Remote Zero Adjust digital input for zero adjust-
ment with external switching
External switching contact
30 V (dc) / <5 mA (dc)
Switching functions setpoints SP1& SP2, AT M,
Setting range ATM Factor 0.5 … 1.1 from ATM
Switching characteristics 5) Low Trip Point (default)
Relay contact 30 V (dc) / 0.5 A (dc)
Relay contact 30 V (dc) / 0.5 A (dc)
connected to supply com-
closed measurement mode
open no supply voltage
Diagnostic port
5
)
The hysteresis and the switching characteristics can be programmed via
the serial interface or the diagnostic port.
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Mini USB type B, 5-pin
EtherCAT interface
3CC9-xxx-23G0
[9], [10]
Data rate
100 Mbps
Note address
explicit device identification
Physical layer
100Base-Tx (IEEE 802.3)
input and output
or higher)
Cable length
100 m
For further information on the EtherCAT interface [5], [6]
DANGER
has to be fused 6).
±15 V (dc)
at operating temperature
9 W
Fuse to be connected 6)
1.25 AT
voltage and overload.
Specification, data format, communication protocol 3CC9-xxx-2380
[7], [8]
EtherCAT connector 2×RJ45, 8-pin, socket
Cable 8-pin, shielded, Ethernet
Patch Cable (CAT5e quality
Supply
The gauge may onl y be connected to power sup­plies, instruments or control devices that conform to the requirements of a grounded protective extra­low voltage (PELV). The connection to the gauge
Supply voltage
at the gauge
Power consumption while being heated
+14 … +30 V (dc) or
≤14 W
The gauge is protected against reverse polarity of the supply
6)
INFICON controllers fulfill this requirement.
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Electrical connection
15-pin D-sub, male
Sensor cable
15-pin plus shielding
15 m (0.25 mm²/conductor)
75 m (0.25 mm²/conductor)
135 m (0.25 mm²/conductor)
(R
cable
1.0 ).
Grounding concept
"Power Connection"
stainless steel AISI 316L
Internal volume
4.2 cm3
0.01 … 0.5 F.S.
1.3 bar | 130 kPa
Bursting pressure (absolute)
6 bar | 600 kPa
Admissible temperatures
Bakeout
110 °C at the flange
at +40°C
3000 m NN
Degree of protection
IP 30
tal
Cable length
Supply voltage 15 V
8 m (0.14 mm²/conductor)
Supply voltage 24 V 43 m (0.14 mm²/conductor)
Supply voltage 30 V 88 m (0.14 mm²/conductor)
For longer cables, larger conductor cross-sections are required
Materials exposed to vacuum ceramics (Al2O3 99.5%),
Admissible pressure (absolute)
1000 / 1100 F.S. 1 … 500 F.S.
Storage Operation
4 bar | 400 kPa
2.6 bar | 260 kPa
–20 °C … +85 °C +10 °C … +40 °C
Relative humidity 80% at temperatures
+31 °C, decreasing to 50%
Use indoors only, altitude up to
Mounting orientation
0.01 … 0.05 F.S.
0.1 … 1100 F.S.
standing upright or horizon­tal standing upright to horizon-
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15.7
31.5
110.4
3.8
DN 16 ISO-KF
½¨ tube
ø82
ø85
DN 16 CF-R
8VCR
female
Weight
837 … 897 g

Dimensions [mm]

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