INFICON STM-2XM User Manual
C
over Page
OPERATING MANUAL
STM-2XM
Rate and Thickness Monitor
PN 074-614-P1A
www.inficon.com reachus@inficon.com
©2014 INFICON
®
Title P
age
OPERATING MANUAL
STM-2XM
Rate and Thickness Monitor
PN 074-614-P1A
Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
Windows® and Microsoft® are registered trademarks of Microsoft Corporation.
Inconel® is a registered trademark of Inco Alloys International, Huntington, WV.
LabVIEWTM is a trademark of National Instruments Corporation.
Sycon Instruments
All other brand and product names are trademarks or registered trademarks of their respective companies.
TM
is a trademark of INFICON,
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2014 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.
Warranty
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
two (2) years from the date of shipment thereof by Seller. Seller's liability under
this warranty is limited to such of the above products or parts thereof as are
returned, transportation prepaid, to Seller's plant, not later than thirty (30) days
after the expiration of the period of warranty coverage in respect thereof and are
found by Seller's examination to have failed to function properly because of
defective workmanship or materials and not because of improper installation or
misuse and is limited to, at Seller's election, either (a) repairing and returning the
product or part thereof, or (b) furnishing a replacement product or part thereof,
transportation prepaid by Seller in either case. In the event Buyer discovers or
learns that a product does not conform to warranty, Buyer shall immediately notify
Seller in writing of such non-conformity, specifying in reasonable detail the nature
of such non-conformity. If Seller is not provided with such written notification,
Seller shall not be liable for any further damages which could have been avoided if
Seller had been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.
www.inficon.com reachus@inficon.com
STM-2XM Operating Manual
Table Of Contents
Cover Page
Title Page
Trademarks
Disclaimer
Copyright
Declaration Of Conformity
Warranty
Chapter 1
Introduction and Specifications
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.1.1 Related Manuals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.2 Instrument Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.2.1 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.2.2 General Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
1.2.3 Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.3 How To Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.3.1 Returning STM-2XM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
1.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.1 Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
1.4.2 Film Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
1.4.3 System Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.4.4 Digital I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
1.4.5 Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
1.4.6 Operating Environment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
PN 074-614-P1A
1.4.7 Size and Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
1.5 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9
1.6 Parts and Options Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9
1.6.1 Base Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9
1.6.2 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10
1.6.3 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
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STM-2XM Operating Manual
Chapter 2
Installation
2.1 Installation Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.1 Parts Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.2 Ground Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.1.3 Connection to Earth Ground. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2 Rear Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2.1 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2.2 Relay Outputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.2.3 Analog Outputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
2.2.4 Remote Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
2.3 Basic Vacuum System Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.4 Deposition System Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
2.4.1 Sensor Head Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
Chapter 3
Operation
3.1 Front Panel Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.1.1 System Control Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3.1.2 Data Entry and Programming Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.1.3 Changing a Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
3.1.4 Runtime Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
3.2 Programming . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
3.2.1 Main Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
3.2.1.1 Edit Film . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
3.2.1.2 System Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
3.2.1.3 Setup Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
TOC - 2
3.3 STM-2XM Operating Modes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
3.3.1 Simple . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
3.3.2 Backup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
3.3.3 Averaging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19
3.3.4 Alloy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
3.3.5 Independent . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21
3.4 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
3.4.1 No Shutter Delay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
3.4.2 Shutter Delay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
3.4.3 Test Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
3.4.4 Rate Sampling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
3.5 Film States . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
PN 074-614-P1A
STM-2XM Operating Manual
Chapter 4
Software
4.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2 Installing INFICON STM-2XM FilmMaker Software . . . . . . . . . . . . . . . . . . .4-1
4.2.1 Installing the Protocol Server . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2.2 Installing INFICON STM-2XM FilmMaker Software . . . . . . . . . . . . . . . . . . .4-2
4.2.3 Starting INFICON STM-2XM FilmMaker Software . . . . . . . . . . . . . . . . . . . . 4-3
4.2.3.1 Starting the Software in Windows XP or Windows 7 . . . . . . . . . . . . . . . . . . 4-3
4.2.3.2 Starting the Software in Windows 8 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3
4.3 STM-2XM Parameter Manager . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
4.3.1 Main Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-5
4.3.1.1 Main Setup Pane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-5
4.3.1.2 Utilities Pane. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-7
4.3.2 Films Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-8
4.3.3 System Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
4.3.3.1 Setup parameters Pane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-11
4.3.3.2 System parameters Pane. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16
4.3.4 Save/Load file Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-17
4.3.5 Save/Load instrument Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18
4.3.6 About Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
Chapter 5
Communications
5.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2 Communications Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-1
5.2.1 RS-232/RS-485 Connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2.2 RS-232 Point-to-Point Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.2.3 RS-485 TTL Differential Signaling Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.3 Electrical. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
PN 074-614-P1A
5.3.1 RS-485 Line Signal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
5.3.2 Bit Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
5.4 Bauds . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
5.5 Message Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
5.5.1 Sycon Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
5.5.1.1 Command Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-5
5.5.2 Sycon Multi-Drop Protocol (SMDP) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6
5.5.2.1 Command Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6
5.5.2.1.1 Checksum. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9
5.5.2.1.2 Command Packet Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-10
5.5.2.1.3 Response Packet Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
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STM-2XM Operating Manual
5.5.3 Optional Serial Command Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
5.5.3.1 Optional Serial Command Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12
5.5.3.2 Additional Option to Serial Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12
5.6 Communication Library . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13
5.6.1 Methods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14
5.6.2 Communication Properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15
5.6.3 Other Properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15
5.7 Windows/SMDP Server Implementation . . . . . . . . . . . . . . . . . . . . . . . . . . 5-16
5.8 Communications Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17
5.8.1 Command: ?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18
5.8.2 Command: @ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18
5.8.3 Command: C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18
5.8.4 Command: E/F . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20
5.8.4.1 Analog Output Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24
5.8.4.2 Relay Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-26
5.8.4.3 Input Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-27
5.8.5 Command: G/H . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-28
5.8.6 Command: I/J . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-28
5.8.7 Command: K/L . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-30
5.8.8 Command: M/N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-30
5.8.9 Command: O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-31
5.8.10 Command: P . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-32
5.8.10.1 Alloy State Class . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-33
5.8.11 Command: Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-34
5.8.11.1 Raw Status. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-36
5.8.11.2 Raw Status 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-36
5.8.11.3 Film State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-37
5.8.12 Run Screen Lock Codes and Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . 5-38
5.8.13 Command Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-39
5.8.13.1 Query Software Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-39
5.8.13.2 Reboot SMDP Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-40
Chapter 6
Troubleshooting
6.1 Troubleshooting Guide. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
6.2 Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
6.3 Spare Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
6.4 Persistent Crystal Fail Indication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
6.5 Diagnostics Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
PN 074-614-P1A
TOC - 4
Chapter 7
7.1 Importance of Density, Tooling and Z-Ratio. . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.2 Determining Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-1
7.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
7.4 Laboratory Determination of Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3
Chapter 8
8.1 Basics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
8.1.1 Monitor Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-2
8.1.2 Period Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
8.1.3 Z-match Technique. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-6
Appendix A
A.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .A-1
STM-2XM Operating Manual
Calibration Procedures
Measurement and Theory
Material Table
PN 074-614-P1A
TOC - 5
STM-2XM Operating Manual
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TOC - 6
PN 074-614-P1A
1.1 Introduction
STM-2XM rate and thickness monitor (see Figure 1-1) will manage single sensor
processes as well as codeposition and alloy processes through five modes of
operation:
Simple mode (single film mode)
Backup mode (crystal switching)
Averaging mode
Alloy mode
Independent mode
Independent mode allows STM-2XM to function as two completely separate
monitors with shutter delay. To extend crystal life for thicker films, the Alloy mode
provides a linked shutter delay.
STM-2XM Operating Manual
Chapter 1
Introduction and Specifications
Time/Power allows films to complete even with a crystal failure. STM-2XM displays
accumulated film mass or thickness and can also display a graph of rate, thickness,
or rate deviation.
STM-2XM has eight programmable digital inputs, eight programmable digital
outputs, and four analog outputs.
Figure 1-1 STM-2XM rate/thickness monitor
PN 074-614-P1A
1 - 1
STM-2XM Operating Manual
CAUTION
WARNING
WARNING - Risk Of Electric Shock
1.1.1 Related Manuals
Sensors are covered in separate manuals. PDF files of these manuals are
contained in the Thin Film Manuals CD (PN 074-5000-G1), part of the Ship Kit.
PN 074-154—Bakeable Sensor
PN 074-156—Front Load Sensor, Single/Dual
PN 074-157—Sputtering Sensor
PN 074-609—Cool Drawer Sensor, Single/Dual
1.2 Instrument Safety
1.2.1 Definition of Notes, Cautions and Warnings
When using this manual, please pay attention to the NOTES, CAUTIONS, and
WARNINGS found throughout. For the purposes of this manual they are defined as
follows:
NOTE: Pertinent information that is useful in achieving maximum STM-2XM
efficiency when followed.
Failure to heed these messages could result in damage
to STM-2XM.
Failure to heed these messages could result in personal
injury.
Dangerous voltages are present which could result in
personal injury.
PN 074-614-P1A
1 - 2
1.2.2 General Safety Information
WARNING - Risk Of Electric Shock
CAUTION
Dangerous voltages may be present whenever the power
cord or external input/relay connectors are present.
Refer all maintenance to qualified personnel.
STM-2XM contains delicate circuitry which is susceptible
to transient power line voltages. Disconnect the line cord
whenever making any interface connections. Refer all
maintenance to qualified personnel.
STM-2XM Operating Manual
PN 074-614-P1A
1 - 3
STM-2XM Operating Manual
WARNING - Risk Of Electric Shock
CAUTION
1.2.3 Earth Ground
STM-2XM is connected to earth ground through a sealed three-core
(three-conductor) power cable, which must be plugged into a socket outlet with a
protective earth terminal. Extension cables must always have three conductors
including a protective earth terminal.
Never interrupt the protective earth circuit.
Any interruption of the protective earth circuit inside or
outside STM-2XM, or disconnection of the protective
earth terminal is likely to make STM-2XM dangerous.
This symbol indicates where the protective earth ground
is connected inside STM-2XM. Never unscrew or loosen
this connection.
There are no user serviceable components within the
STM-2XM case.
Refer all maintenance to qualified personnel.
PN 074-614-P1A
1 - 4
1.3 How To Contact INFICON
Worldwide customer support information is available under Support >> Support
Worldwide at www.inficon.com:
Sales and Customer Service
Technical Support
Repair Service
If experiencing a problem with STM-2XM, please have the following information
readily available:
The Sales Order or Purchase Order number of the instrument purchase.
The version of STM-2XM firmware.
The version of Windows operating system.
A description of the problem.
An explanation of any corrective action that may have already been attempted.
The exact wording of any error messages that may have been received.
STM-2XM Operating Manual
1.3.1 Returning STM-2XM
Do not return any component of STM-2XM to INFICON before speaking with a
Customer Support Representative and obtaining a Return Material Authorization
(RMA) number. STM-2XM will not be serviced without an RMA number.
Packages delivered to INFICON without an RMA number will be held until the
customer is contacted. This will result in delays in servicing STM-2XM.
If returning STM-2XM with a crystal sensor or another component potentially
exposed to process materials, prior to being given an RMA number, a completed
Declaration Of Contamination (DOC) form will be required. DOC forms must be
approved by INFICON before an RMA number is issued. INFICON may require
PN 074-614-P1A
that the component be sent to a designated decontamination facility, not to the
factory.
1 - 5
STM-2XM Operating Manual
1.4 Specifications
1.4.1 Measurement
Sensor Inputs . . . . . . . . . . . . . . . . . . 2
Compatible Sensors. . . . . . . . . . . . . Single/shuttered single or dual QCM sensor
Measurement Frequency Range . . . 6.0 to 5.0 MHz (fixed)
Frequency Resolution . . . . . . . . . . . ± 0.03 Hz @ 6 MHz
Reference Frequency Stability . . . . . ± 2 ppm
Thickness and Rate
Resolution/Measurement . . . . . . . . . ± 0.037 Å @ tooling/density = 100/1
Measurement Interval . . . . . . . . . . . 0.10 s
1.4.2 Film Parameters
Stored Films . . . . . . . . . . . . . . . . . . . 15
Fundamental frequency = 6 MHz
Name . . . . . . . . . . . . . . . . . . . . . . . . 8 characters, 0 to 9, A to Z, _ and [space]
Density . . . . . . . . . . . . . . . . . . . . . . . 0.4 to 99.99 g/cm
3
Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . 0.100 to 9.999
Tooling . . . . . . . . . . . . . . . . . . . . . . . 10 to 999.9%
Setpoint Thickness. . . . . . . . . . . . . . 0.000 to 999.999 kÅ
End Thickness . . . . . . . . . . . . . . . . . 0.000 to 999.999 kÅ
Use Backup Crystal . . . . . . . . . . . . . Yes/No
Setpoint Time . . . . . . . . . . . . . . . . . . 0:00:00 to 9:59:59 h:mm:ss
Deposit Rate . . . . . . . . . . . . . . . . . . 0.0 to 999.9 Å/s
Coast Enable . . . . . . . . . . . . . . . . . . Yes/No
Crystal Life Minimum . . . . . . . . . . . . 0 to 99%
Force Crystal Fail . . . . . . . . . . . . . . . Yes/No
Temporal Average . . . . . . . . . . . . . . 1 to 50
Good Rate Tolerance . . . . . . . . . . . . 0 to 50
PN 074-614-P1A
1 - 6
1.4.3 System Parameters
Operation Modes . . . . . . . . . . . . . . . Simple mode (single film mode)
Test Mode. . . . . . . . . . . . . . . . . . . . . On/Off
Active Source . . . . . . . . . . . . . . . . . . Channel 1/Channel 2
Display Mode . . . . . . . . . . . . . . . . . . Thickness/Mass
Plot Type . . . . . . . . . . . . . . . . . . . . . None/Rate Deviation/Rate/Thickness
Plot Time Interval . . . . . . . . . . . . . . . 0:00:00 to 9:59:59 h:mm:ss
LCD Contrast . . . . . . . . . . . . . . . . . . 10 to 85
LCD Brightness . . . . . . . . . . . . . . . . 1 to 99
Beeper . . . . . . . . . . . . . . . . . . . . . . . On/Off
STM-2XM Operating Manual
Backup mode (crystal switching)
Averaging mode
Alloy mode
Independent mode
Communications Protocol . . . . . . . . Sycon 9600 (Sycon Protocol @ 9.6 Kbps)
SMDP L (SMDP Protocol @ 9.6 Kbps)
SMDP M (SMDP Protocol @ 38.4 Kbps)
SMDP H (SMDP Protocol @ 115.2 Kbps)
SMDP Address. . . . . . . . . . . . . . . . . 16 to 254
1.4.4 Digital I/O
Digital Inputs. . . . . . . . . . . . . . . . . . . 8
Digital Input Functions . . . . . . . . . . . Open Shutter
Close Shutter
Zero Thickness
PN 074-614-P1A
Disabled
Select crystal as active (dual mode)
NOTE: To select crystal one, use on a
Channel 1 input (1.x). To select
crystal two, use on a Channel 2 input
(2.x).
Allow sync
Digital Outputs . . . . . . . . . . . . . . . . . 8
NOTE: Allows simultaneous shutter delay of
both films.
1 - 7
STM-2XM Operating Manual
Digital Output Functions. . . . . . . . . . Manual (front panel)
Source shutter
Substrate shutter
Sensor shutter
Crystal fail
Setpoint time
Setpoint thick
Forced active
Controlled via serial communications
Rate is steady and within tolerance
Analog Outputs. . . . . . . . . . . . . . . . . 4
Analog Output Functions . . . . . . . . . Rate:
Rate 1000 Å/s, 10.00 µg scale
Rate 10.0 Å/s, 0.10 µg scale
Rate deviation:
Rate deviation 1000 Å/s, 10.00 µg scale
Rate deviation 10.0 Å/s, 0.10 µg scale
1.4.5 Power
Thickness:
Thickness recorder 999 Å scale
Thickness recorder 99.9 Å scale
Disabled
Controlled via serial communications
Fixed positive/negative full scale
Analog Output Rating. . . . . . . . . . . . -10 to +10 V, 10 mA
Relay Rating. . . . . . . . . . . . . . . . . . . up to 48 V (dc)
• V (ac), 2 A
Rated Supply Voltage. . . . . . . . . . . . 100 to 240 V (ac) ± 10%, 50/60 Hz, 2.5 VA
Fuse Rating . . . . . . . . . . . . . . . . . . . 1 A 250 V, 5 x 20 mm, Fast-acting
Mains Power Cable Rating
STM-2XM-G1 . . . . . . . . . . . . . . . 10 A 125 V
STM-2XM-G2 . . . . . . . . . . . . . . . 10 A 250 V
Power Consumption. . . . . . . . . . . . . less than 10 W
PN 074-614-P1A
1 - 8
Overvoltage . . . . . . . . . . . . . . . . . . . Category II
Temporary Overvoltage
Short Term . . . . . . . . . . . . . . . . . 1200 V, < 5 s
Long Term . . . . . . . . . . . . . . . . . 250 V, > 5 s
1.4.6 Operating Environment
Usage . . . . . . . . . . . . . . . . . . . . . . . . Indoor use only
Operating Temperature . . . . . . . . . . 0 to 50°C (32 to 122°F)
Storage Temperature . . . . . . . . . . . . -10 to 60°C (14 to 140°F)
Humidity . . . . . . . . . . . . . . . . . . . . . . Up to 85% RH, non-condensing
Altitude . . . . . . . . . . . . . . . . . . . . . . . Up to 2000 meters
Pollution Degree. . . . . . . . . . . . . . . . 2
1.4.7 Size and Weight
Rack Dimensions (HxWxD) . . . . . . . 8.9 x 24.1 x 25.4 cm (3.5 x 9.5 x 10 in.)
Weight . . . . . . . . . . . . . . . . . . . . . . . 1.25 kg (2.75 lb.)
1.5 Unpacking and Inspection
1 If STM-2XM has not been removed from its packaging, do so now.
STM-2XM Operating Manual
2 Carefully examine STM-2XM for damage that may have occurred during
shipping. It is especially important to note obvious rough handling on the
outside of the container. Immediately report any damage to the carrier and to
INFICON.
3 Do not discard the packaging material until inventory has been taken and
installation has been successful.
4 Refer to the invoice to take inventory (see section 1.6).
5 To install STM-2XM, see Chapter 2, Installation.
6 For additional information or technical assistance, contact INFICON (refer to
section 1.3 on page 1-5).
PN 074-614-P1A
1.6 Parts and Options Overview
1.6.1 Base Configurations
STM-2XM with US Power Cord . . . . PN STM-2XM-G1
STM-2XM with
European Power Cord . . . . . . . . . . . PN STM-2XM-G2
Thin Film Manuals CD . . . . . . . . . . . PN 074-5000-G1
1 - 9
STM-2XM Operating Manual
1.6.2 Accessories
3 m (10 ft.) Oscillator Kit. . . . . . . . . . PN 783-500-109-10
7.6 m (25 ft.) Oscillator Kit . . . . . . . . PN 783-500-109-25
15.2 m (50 ft.) Oscillator Kit . . . . . . . PN 783-500-109-50
22.9 m (75 ft.) Oscillator Kit . . . . . . . PN 783-500-109-75
NOTE: Each sensor requires an oscillator kit to interface to STM-2XM.
Oscillator kits include:
Oscillator . . . . . . . . . . . . . . . . . . PN 783-500-013
15.2 cm (6 in.) BNC cable . . . . . PN 782-902-011
One of the following:
3 m (10 ft.) BNC Cable . . . . . PN 782-902-012-10
7.6 m (25 ft.) BNC Cable . . . PN 782-902-012-25
15.2 m (50 ft.) BNC Cable . . PN 782-902-012-50
22.9 m (75 ft.) BNC Cable . . PN 782-902-012-75
These kits are designed for use with the standard in-vacuum cables ranging in
length from 15.2 cm (6 in.) to 78.1 cm (30.75 in.).
48.3 cm (19 in.) rack mount kits are available in the following configurations:
One STM-2XM . . . . . . . . . . . . . . PN 783-014-008
Two STM-2XM . . . . . . . . . . . . . . PN 783-014-009
PN 074-614-P1A
1 - 10
1.6.3 Sensors
Front Load Single Sensor. . . . . . . . . . . . . . . . . . . . . PN SL-XXXXX
Front Load Dual Sensor . . . . . . . . . . . . . . . . . . . . . . PN DL-AXXX
Cool Drawer Single Sensor . . . . . . . . . . . . . . . . . . .PN CDS-XXFXX
Cool Drawer Dual Sensor. . . . . . . . . . . . . . . . . . . . . PN CDD-XFXX
Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . PN 750-618-G1
UHV Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . .PN BK-AXF
Low Profile Single Sensor . . . . . . . . . . . . . . . . . . . . PN 783-500-042
Low Profile Dual Sensor. . . . . . . . . . . . . . . . . . . . . .PN 783-500-093
Low Profile Bakeable Single Sensor . . . . . . . . . . . . PN 783-500-009
Low Profile Bakeable Dual Sensor. . . . . . . . . . . . . . PN 783-500-050
NOTE: Low Profile Sensors also have shuttered options as well as options without
NOTE: "X" in part number indicates customer-selectable option, see
STM-2XM Operating Manual
cooling lines.
www.inficon.com for Sensor Datasheets.
NOTE: Shuttered sensors require a feedthrough with an air line and solenoid valve
PN 750-420-G1.
NOTE: Multi-crystal (rotary) sensors should not be used with STM-2XM.
PN 074-614-P1A
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STM-2XM Operating Manual
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PN 074-614-P1A
2.1 Installation Requirements
CAUTION
CAUTION
2.1.1 Parts Requirements
STM-2XM Monitor
Use the supplied mains power cable.
If this cable must be replaced, the replacement cable
must meet or exceed the ratings of the supplied cable.
STM-2XM Operating Manual
Chapter 2
Installation
One crystal sensor/feedthrough
One Oscillator Kit for each crystal sensor
Quartz crystals appropriate for the application
To maintain proper STM-2XM performance, use only
the 15.2 cm (6 in.) BNC cable that is included to connect
the oscillator to the crystal sensor.
The length of the in-vacuum cable (Front Load and
Sputtering sensors) or electrical conduit tube
(Cool Drawer and Bakeable sensors) should not exceed
PN 074-614-P1A
78.1 cm (30.75 in.).
2 - 1
STM-2XM Operating Manual
CAUTION
Substrate
Source
Sensor
Evaporator
Power Supply
2.4 m (8 ft.) Copper Ground Rods
7.62 cm (3 in.)
Wide Copper
Ground
Strap
12.7 mm (0.5 in.)
Wide Copper
Ground
Straps
Earth
2.1.2 Ground Requirements
A ground post is provided on the rear panel. This point
should be connected to the common ground with a
grounding strap.
Use low impedance cables or straps to connect the chassis of all control
components to a common ground point on the vacuum chamber. The common
ground point must be connected to earth ground (see section 2.1.3, Connection to
Earth Ground, on page 2-3).
Solid copper straps are recommended, where RF is present. Use a strap of the
shortest possible length, minimum width of 12.7 mm (0.5 in.), approximately
0.56 mm (0.22 in.) thick. This is particularly important in high-noise electron beam
(e-beam) systems. See Figure 2-1 for the recommended grounding method.
NOTE: The oscillator is grounded to STM-2XM and crystal sensor through the
BNC cables.
The crystal sensor is typically grounded to the wall of the vacuum system. If the
sensor feedthrough is not properly grounded to earth through the vacuum system,
connect a copper strap between the feedthrough and the common ground point on
the vacuum system.
Figure 2-1 Recommended grounding
PN 074-614-P1A
2 - 2
2.1.3 Connection to Earth Ground
CAUTION
If an earth ground is not established:
1 Where soil conditions allow, drive two 2.4 m (8 ft.) copper clad steel rods into
the ground 1.8 m (6 ft.) apart. Follow local regulations and codes.
2 Pour a copper sulfate or a salt solution around each rod to improve the
ground conductivity.
3 Measure the resistance. A near zero resistance between the two rods indicates
that a good earth ground is achieved.
4 After verifying a near zero resistance between the rods, connect the rods
together with a 7.62 cm (3 in.) wide copper strap.
2.2 Rear Panel
Figure 2-2 STM-2XM rear panel
STM-2XM Operating Manual
Connecting cables must be routed away from any
PN 074-614-P1A
potential source of electrical noise.
2.2.1 Sensors
The Sensors input provides the remote sensor oscillator interface to STM-2XM,
providing both the signal and power path to the oscillator.
NOTE: Sensors connection requires coaxial cable type RG58 or RG59.
The maximum BNC cable length connecting the oscillator to
STM-2XM is 30 m (98 ft.).
2 - 3
STM-2XM Operating Manual
2.2.2 Relay Outputs
STM-2XM has eight normally open (NO) relay contact outputs. These outputs are
intended for low voltage (see section 1.4.4, Digital I/O, on page 1-7).
Table 2-1 Relay output contact pin numbers
Relay Contacts on pins
1 12,13
2 23,24
39,10
4 20,21
56,7
6 17,18
73,4
8 14,15
Figure 2-3 Relay output contact pin numbers
2 - 4
PN 074-614-P1A
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