INFICON STM-2XM User Manual

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OPERATING MANUAL

STM-2XM

Rate and Thickness Monitor

PN 074-614-P1A

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Title P

age

OPERATING MANUAL

STM-2XM

Rate and Thickness Monitor

PN 074-614-P1A

Trademarks

The trademarks of the products mentioned in this manual are held by the companies that produce them.

Windows® and Microsoft® are registered trademarks of Microsoft Corporation.

Inconel® is a registered trademark of Inco Alloys International, Huntington, WV.

LabVIEWTM is a trademark of National Instruments Corporation.

Sycon Instruments

All other brand and product names are trademarks or registered trademarks of their respective companies.

is a trademark of INFICON,

Disclaimer

The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product.

Due to our continuing program of product improvements, specifications are subject to change without notice.

Copyright

Warranty

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the reverse hereof, to be, for the period of warranty coverage specified below, free from defects of materials or workmanship under normal proper use and service. The period of warranty coverage is specified for the respective products in the respective Seller instruction manuals for those products but shall not be less than two (2) years from the date of shipment thereof by Seller. Seller's liability under this warranty is limited to such of the above products or parts thereof as are returned, transportation prepaid, to Seller's plant, not later than thirty (30) days after the expiration of the period of warranty coverage in respect thereof and are found by Seller's examination to have failed to function properly because of defective workmanship or materials and not because of improper installation or misuse and is limited to, at Seller's election, either (a) repairing and returning the product or part thereof, or (b) furnishing a replacement product or part thereof, transportation prepaid by Seller in either case. In the event Buyer discovers or learns that a product does not conform to warranty, Buyer shall immediately notify Seller in writing of such non-conformity, specifying in reasonable detail the nature of such non-conformity. If Seller is not provided with such written notification, Seller shall not be liable for any further damages which could have been avoided if Seller had been provided with immediate written notification.

THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD HEREUNDER. All other obligations and liabilities of Seller, whether in contract or tort (including negligence) or otherwise, are expressly EXCLUDED. In no event shall Seller be liable for any costs, expenses or damages, whether direct or indirect, special, incidental, consequential, or other, on any claim of any defective product, in excess of the price paid by Buyer for the product plus return transportation charges prepaid.

No warranty is made by Seller of any Seller product which has been installed, used or operated contrary to Seller's written instruction manual or which has been subjected to misuse, negligence or accident or has been repaired or altered by anyone other than Seller or which has been used in a manner or for a purpose for which the Seller product was not designed nor against any defects due to plans or instructions supplied to Seller by or for Buyer.

This manual is intended for private use by INFICON® Inc. and its customers. Contact INFICON before reproducing its contents.

NOTE: These instructions do not provide for every contingency that may arise in connection with the installation, operation or maintenance of this equipment. Should you require further assistance, please contact INFICON.

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STM-2XM Operating Manual

Cover Page

Title Page

Trademarks

Disclaimer

Declaration Of Conformity

Warranty

Chapter 1

Introduction and Specifications

1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

1.1.1 Related Manuals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2

1.2 Instrument Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.2.1 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . .1-2

1.2.2 General Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

1.2.3 Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

1.3 How To Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

1.3.1 Returning STM-2XM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5

1.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.4.1 Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6

1.4.2 Film Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6

1.4.3 System Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

1.4.4 Digital I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7

1.4.5 Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

1.4.6 Operating Environment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9

PN 074-614-P1A

1.4.7 Size and Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9

1.5 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9

1.6 Parts and Options Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9

1.6.1 Base Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9

1.6.2 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10

1.6.3 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

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STM-2XM Operating Manual

Chapter 2

Installation

2.1 Installation Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

2.1.1 Parts Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

2.1.2 Ground Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

2.1.3 Connection to Earth Ground. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

2.2 Rear Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

2.2.1 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

2.2.2 Relay Outputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

2.2.3 Analog Outputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

2.2.4 Remote Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

2.3 Basic Vacuum System Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7

2.4 Deposition System Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

2.4.1 Sensor Head Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

Chapter 3

Operation

3.1 Front Panel Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.1.1 System Control Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

3.1.2 Data Entry and Programming Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

3.1.3 Changing a Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

3.1.4 Runtime Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

3.2 Programming . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

3.2.1 Main Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

3.2.1.1 Edit Film . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8

3.2.1.2 System Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

3.2.1.3 Setup Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

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3.3 STM-2XM Operating Modes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17

3.3.1 Simple . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17

3.3.2 Backup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18

3.3.3 Averaging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19

3.3.4 Alloy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20

3.3.5 Independent . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21

3.4 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22

3.4.1 No Shutter Delay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22

3.4.2 Shutter Delay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22

3.4.3 Test Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22

3.4.4 Rate Sampling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23

3.5 Film States . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23

PN 074-614-P1A

STM-2XM Operating Manual

Chapter 4

Software

4.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.2 Installing INFICON STM-2XM FilmMaker Software . . . . . . . . . . . . . . . . . . .4-1

4.2.1 Installing the Protocol Server . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.2.2 Installing INFICON STM-2XM FilmMaker Software . . . . . . . . . . . . . . . . . . .4-2

4.2.3 Starting INFICON STM-2XM FilmMaker Software . . . . . . . . . . . . . . . . . . . . 4-3

4.2.3.1 Starting the Software in Windows XP or Windows 7 . . . . . . . . . . . . . . . . . . 4-3

4.2.3.2 Starting the Software in Windows 8 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3

4.3 STM-2XM Parameter Manager . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

4.3.1 Main Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-5

4.3.1.1 Main Setup Pane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-5

4.3.1.2 Utilities Pane. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-7

4.3.2 Films Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-8

4.3.3 System Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

4.3.3.1 Setup parameters Pane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-11

4.3.3.2 System parameters Pane. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16

4.3.4 Save/Load file Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-17

4.3.5 Save/Load instrument Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18

4.3.6 About Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20

Chapter 5

Communications

5.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

5.2 Communications Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-1

5.2.1 RS-232/RS-485 Connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

5.2.2 RS-232 Point-to-Point Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

5.2.3 RS-485 TTL Differential Signaling Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

5.3 Electrical. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

PN 074-614-P1A

5.3.1 RS-485 Line Signal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4

5.3.2 Bit Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

5.4 Bauds . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

5.5 Message Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4

5.5.1 Sycon Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

5.5.1.1 Command Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-5

5.5.2 Sycon Multi-Drop Protocol (SMDP) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6

5.5.2.1 Command Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6

5.5.2.1.1 Checksum. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9

5.5.2.1.2 Command Packet Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-10

5.5.2.1.3 Response Packet Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11

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STM-2XM Operating Manual

5.5.3 Optional Serial Command Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11

5.5.3.1 Optional Serial Command Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12

5.5.3.2 Additional Option to Serial Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12

5.6 Communication Library . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13

5.6.1 Methods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14

5.6.2 Communication Properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15

5.6.3 Other Properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15

5.7 Windows/SMDP Server Implementation . . . . . . . . . . . . . . . . . . . . . . . . . . 5-16

5.8 Communications Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17

5.8.1 Command: ?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18

5.8.2 Command: @ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18

5.8.3 Command: C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18

5.8.4 Command: E/F . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20

5.8.4.1 Analog Output Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24

5.8.4.2 Relay Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-26

5.8.4.3 Input Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-27

5.8.5 Command: G/H . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-28

5.8.6 Command: I/J . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-28

5.8.7 Command: K/L . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-30

5.8.8 Command: M/N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-30

5.8.9 Command: O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-31

5.8.10 Command: P . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-32

5.8.10.1 Alloy State Class . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-33

5.8.11 Command: Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-34

5.8.11.1 Raw Status. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-36

5.8.11.2 Raw Status 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-36

5.8.11.3 Film State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-37

5.8.12 Run Screen Lock Codes and Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . 5-38

5.8.13 Command Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-39

5.8.13.1 Query Software Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-39

5.8.13.2 Reboot SMDP Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-40

Chapter 6

Troubleshooting

6.1 Troubleshooting Guide. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

6.2 Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7

6.3 Spare Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7

6.4 Persistent Crystal Fail Indication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7

6.5 Diagnostics Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8

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TOC - 4

Chapter 7

7.1 Importance of Density, Tooling and Z-Ratio. . . . . . . . . . . . . . . . . . . . . . . . . 7-1

7.2 Determining Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-1

7.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2

7.4 Laboratory Determination of Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3

Chapter 8

8.1 Basics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1

8.1.1 Monitor Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-2

8.1.2 Period Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4

8.1.3 Z-match Technique. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-6

Appendix A

A.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .A-1

STM-2XM Operating Manual

Calibration Procedures

Measurement and Theory

Material Table

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TOC - 5

STM-2XM Operating Manual

This page is intentionally blank.

TOC - 6

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1.1 Introduction

STM-2XM rate and thickness monitor (see Figure 1-1) will manage single sensor processes as well as codeposition and alloy processes through five modes of operation:

 Simple mode (single film mode)

 Backup mode (crystal switching)

 Averaging mode

 Alloy mode

 Independent mode

Independent mode allows STM-2XM to function as two completely separate monitors with shutter delay. To extend crystal life for thicker films, the Alloy mode provides a linked shutter delay.

STM-2XM Operating Manual

Chapter 1

Introduction and Specifications

Time/Power allows films to complete even with a crystal failure. STM-2XM displays accumulated film mass or thickness and can also display a graph of rate, thickness, or rate deviation.

STM-2XM has eight programmable digital inputs, eight programmable digital outputs, and four analog outputs.

Figure 1-1 STM-2XM rate/thickness monitor

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1 - 1

STM-2XM Operating Manual

CAUTION

WARNING

WARNING - Risk Of Electric Shock

1.1.1 Related Manuals

Sensors are covered in separate manuals. PDF files of these manuals are contained in the Thin Film Manuals CD (PN 074-5000-G1), part of the Ship Kit.

 PN 074-154—Bakeable Sensor

 PN 074-156—Front Load Sensor, Single/Dual

 PN 074-157—Sputtering Sensor

 PN 074-609—Cool Drawer Sensor, Single/Dual

1.2 Instrument Safety

1.2.1 Definition of Notes, Cautions and Warnings

When using this manual, please pay attention to the NOTES, CAUTIONS, and WARNINGS found throughout. For the purposes of this manual they are defined as follows:

NOTE: Pertinent information that is useful in achieving maximum STM-2XM

efficiency when followed.

Failure to heed these messages could result in damage to STM-2XM.

Failure to heed these messages could result in personal injury.

Dangerous voltages are present which could result in personal injury.

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1 - 2

1.2.2 General Safety Information

WARNING - Risk Of Electric Shock

CAUTION

Dangerous voltages may be present whenever the power cord or external input/relay connectors are present.

Refer all maintenance to qualified personnel.

STM-2XM contains delicate circuitry which is susceptible to transient power line voltages. Disconnect the line cord whenever making any interface connections. Refer all maintenance to qualified personnel.

STM-2XM Operating Manual

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1 - 3

STM-2XM Operating Manual

WARNING - Risk Of Electric Shock

CAUTION

1.2.3 Earth Ground

STM-2XM is connected to earth ground through a sealed three-core (three-conductor) power cable, which must be plugged into a socket outlet with a protective earth terminal. Extension cables must always have three conductors including a protective earth terminal.

Never interrupt the protective earth circuit.

Any interruption of the protective earth circuit inside or outside STM-2XM, or disconnection of the protective earth terminal is likely to make STM-2XM dangerous.

This symbol indicates where the protective earth ground is connected inside STM-2XM. Never unscrew or loosen this connection.

There are no user serviceable components within the STM-2XM case.

Refer all maintenance to qualified personnel.

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1 - 4

1.3 How To Contact INFICON

Worldwide customer support information is available under Support >> Support Worldwide at www.inficon.com:

 Sales and Customer Service

 Technical Support

 Repair Service

If experiencing a problem with STM-2XM, please have the following information readily available:

 The Sales Order or Purchase Order number of the instrument purchase.

 The version of STM-2XM firmware.

 The version of Windows operating system.

 A description of the problem.

 An explanation of any corrective action that may have already been attempted.

 The exact wording of any error messages that may have been received.

STM-2XM Operating Manual

1.3.1 Returning STM-2XM

Do not return any component of STM-2XM to INFICON before speaking with a Customer Support Representative and obtaining a Return Material Authorization (RMA) number. STM-2XM will not be serviced without an RMA number.

Packages delivered to INFICON without an RMA number will be held until the customer is contacted. This will result in delays in servicing STM-2XM.

If returning STM-2XM with a crystal sensor or another component potentially exposed to process materials, prior to being given an RMA number, a completed Declaration Of Contamination (DOC) form will be required. DOC forms must be approved by INFICON before an RMA number is issued. INFICON may require

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that the component be sent to a designated decontamination facility, not to the factory.

1 - 5

STM-2XM Operating Manual

1.4 Specifications

1.4.1 Measurement

Sensor Inputs . . . . . . . . . . . . . . . . . . 2

Compatible Sensors. . . . . . . . . . . . . Single/shuttered single or dual QCM sensor

Measurement Frequency Range . . . 6.0 to 5.0 MHz (fixed)

Frequency Resolution . . . . . . . . . . . ± 0.03 Hz @ 6 MHz

Reference Frequency Stability . . . . . ± 2 ppm

Thickness and Rate

Resolution/Measurement . . . . . . . . . ± 0.037 Å @ tooling/density = 100/1

Measurement Interval . . . . . . . . . . . 0.10 s

1.4.2 Film Parameters

Stored Films . . . . . . . . . . . . . . . . . . . 15

Fundamental frequency = 6 MHz

Name . . . . . . . . . . . . . . . . . . . . . . . . 8 characters, 0 to 9, A to Z, _ and [space]

Density . . . . . . . . . . . . . . . . . . . . . . . 0.4 to 99.99 g/cm

Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . 0.100 to 9.999

Tooling . . . . . . . . . . . . . . . . . . . . . . . 10 to 999.9%

Setpoint Thickness. . . . . . . . . . . . . . 0.000 to 999.999 kÅ

End Thickness . . . . . . . . . . . . . . . . . 0.000 to 999.999 kÅ

Use Backup Crystal . . . . . . . . . . . . . Yes/No

Setpoint Time . . . . . . . . . . . . . . . . . . 0:00:00 to 9:59:59 h:mm:ss

Deposit Rate . . . . . . . . . . . . . . . . . . 0.0 to 999.9 Å/s

Coast Enable . . . . . . . . . . . . . . . . . . Yes/No

Crystal Life Minimum . . . . . . . . . . . . 0 to 99%

Force Crystal Fail . . . . . . . . . . . . . . . Yes/No

Temporal Average . . . . . . . . . . . . . . 1 to 50

Good Rate Tolerance . . . . . . . . . . . . 0 to 50

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1 - 6

1.4.3 System Parameters

Operation Modes . . . . . . . . . . . . . . . Simple mode (single film mode)

Test Mode. . . . . . . . . . . . . . . . . . . . . On/Off

Active Source . . . . . . . . . . . . . . . . . . Channel 1/Channel 2

Display Mode . . . . . . . . . . . . . . . . . . Thickness/Mass

Plot Type . . . . . . . . . . . . . . . . . . . . . None/Rate Deviation/Rate/Thickness

Plot Time Interval . . . . . . . . . . . . . . . 0:00:00 to 9:59:59 h:mm:ss

LCD Contrast . . . . . . . . . . . . . . . . . . 10 to 85

LCD Brightness . . . . . . . . . . . . . . . . 1 to 99

Beeper . . . . . . . . . . . . . . . . . . . . . . . On/Off

STM-2XM Operating Manual

Backup mode (crystal switching) Averaging mode Alloy mode Independent mode

Communications Protocol . . . . . . . . Sycon 9600 (Sycon Protocol @ 9.6 Kbps)

SMDP L (SMDP Protocol @ 9.6 Kbps) SMDP M (SMDP Protocol @ 38.4 Kbps) SMDP H (SMDP Protocol @ 115.2 Kbps)

SMDP Address. . . . . . . . . . . . . . . . . 16 to 254

1.4.4 Digital I/O

Digital Inputs. . . . . . . . . . . . . . . . . . . 8

Digital Input Functions . . . . . . . . . . . Open Shutter

Close Shutter Zero Thickness

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Disabled Select crystal as active (dual mode) NOTE: To select crystal one, use on a

Channel 1 input (1.x). To select crystal two, use on a Channel 2 input (2.x).

Allow sync

Digital Outputs . . . . . . . . . . . . . . . . . 8

NOTE: Allows simultaneous shutter delay of

both films.

1 - 7

STM-2XM Operating Manual

Digital Output Functions. . . . . . . . . . Manual (front panel)

Source shutter Substrate shutter Sensor shutter Crystal fail Setpoint time Setpoint thick Forced active Controlled via serial communications Rate is steady and within tolerance

Analog Outputs. . . . . . . . . . . . . . . . . 4

Analog Output Functions . . . . . . . . . Rate:

Rate 1000 Å/s, 10.00 µg scale Rate 10.0 Å/s, 0.10 µg scale

Rate deviation: Rate deviation 1000 Å/s, 10.00 µg scale Rate deviation 10.0 Å/s, 0.10 µg scale

1.4.5 Power

Thickness: Thickness recorder 999 Å scale Thickness recorder 99.9 Å scale

Disabled

Controlled via serial communications

Fixed positive/negative full scale

Analog Output Rating. . . . . . . . . . . . -10 to +10 V, 10 mA

Relay Rating. . . . . . . . . . . . . . . . . . . up to 48 V (dc)

• V (ac), 2 A

Rated Supply Voltage. . . . . . . . . . . . 100 to 240 V (ac) ± 10%, 50/60 Hz, 2.5 VA

Fuse Rating . . . . . . . . . . . . . . . . . . . 1 A 250 V, 5 x 20 mm, Fast-acting

Mains Power Cable Rating

STM-2XM-G1 . . . . . . . . . . . . . . . 10 A 125 V

STM-2XM-G2 . . . . . . . . . . . . . . . 10 A 250 V

Power Consumption. . . . . . . . . . . . . less than 10 W

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1 - 8

Overvoltage . . . . . . . . . . . . . . . . . . . Category II

Temporary Overvoltage

Short Term . . . . . . . . . . . . . . . . . 1200 V, < 5 s

Long Term . . . . . . . . . . . . . . . . . 250 V, > 5 s

1.4.6 Operating Environment

Usage . . . . . . . . . . . . . . . . . . . . . . . . Indoor use only

Operating Temperature . . . . . . . . . . 0 to 50°C (32 to 122°F)

Storage Temperature . . . . . . . . . . . . -10 to 60°C (14 to 140°F)

Humidity . . . . . . . . . . . . . . . . . . . . . . Up to 85% RH, non-condensing

Altitude . . . . . . . . . . . . . . . . . . . . . . . Up to 2000 meters

Pollution Degree. . . . . . . . . . . . . . . . 2

1.4.7 Size and Weight

Rack Dimensions (HxWxD) . . . . . . . 8.9 x 24.1 x 25.4 cm (3.5 x 9.5 x 10 in.)

Weight . . . . . . . . . . . . . . . . . . . . . . . 1.25 kg (2.75 lb.)

1.5 Unpacking and Inspection

1 If STM-2XM has not been removed from its packaging, do so now.

STM-2XM Operating Manual

2 Carefully examine STM-2XM for damage that may have occurred during

shipping. It is especially important to note obvious rough handling on the outside of the container. Immediately report any damage to the carrier and to

INFICON.

3 Do not discard the packaging material until inventory has been taken and

installation has been successful.

4 Refer to the invoice to take inventory (see section 1.6).

5 To install STM-2XM, see Chapter 2, Installation.

6 For additional information or technical assistance, contact INFICON (refer to

section 1.3 on page 1-5).

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1.6 Parts and Options Overview

1.6.1 Base Configurations

STM-2XM with US Power Cord . . . . PN STM-2XM-G1

STM-2XM with

European Power Cord . . . . . . . . . . . PN STM-2XM-G2

Thin Film Manuals CD . . . . . . . . . . . PN 074-5000-G1

1 - 9

STM-2XM Operating Manual

1.6.2 Accessories

3 m (10 ft.) Oscillator Kit. . . . . . . . . . PN 783-500-109-10

7.6 m (25 ft.) Oscillator Kit . . . . . . . . PN 783-500-109-25

15.2 m (50 ft.) Oscillator Kit . . . . . . . PN 783-500-109-50

22.9 m (75 ft.) Oscillator Kit . . . . . . . PN 783-500-109-75

NOTE: Each sensor requires an oscillator kit to interface to STM-2XM.

Oscillator kits include:

Oscillator . . . . . . . . . . . . . . . . . . PN 783-500-013

15.2 cm (6 in.) BNC cable . . . . . PN 782-902-011

One of the following:

3 m (10 ft.) BNC Cable . . . . . PN 782-902-012-10

7.6 m (25 ft.) BNC Cable . . . PN 782-902-012-25

15.2 m (50 ft.) BNC Cable . . PN 782-902-012-50

22.9 m (75 ft.) BNC Cable . . PN 782-902-012-75

These kits are designed for use with the standard in-vacuum cables ranging in length from 15.2 cm (6 in.) to 78.1 cm (30.75 in.).

48.3 cm (19 in.) rack mount kits are available in the following configurations:

One STM-2XM . . . . . . . . . . . . . . PN 783-014-008

Two STM-2XM . . . . . . . . . . . . . . PN 783-014-009

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1 - 10

1.6.3 Sensors

Front Load Single Sensor. . . . . . . . . . . . . . . . . . . . . PN SL-XXXXX

Front Load Dual Sensor . . . . . . . . . . . . . . . . . . . . . . PN DL-AXXX

Cool Drawer Single Sensor . . . . . . . . . . . . . . . . . . .PN CDS-XXFXX

Cool Drawer Dual Sensor. . . . . . . . . . . . . . . . . . . . . PN CDD-XFXX

Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . PN 750-618-G1

UHV Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . .PN BK-AXF

Low Profile Single Sensor . . . . . . . . . . . . . . . . . . . . PN 783-500-042

Low Profile Dual Sensor. . . . . . . . . . . . . . . . . . . . . .PN 783-500-093

Low Profile Bakeable Single Sensor . . . . . . . . . . . . PN 783-500-009

Low Profile Bakeable Dual Sensor. . . . . . . . . . . . . . PN 783-500-050

NOTE: Low Profile Sensors also have shuttered options as well as options without

NOTE: "X" in part number indicates customer-selectable option, see

STM-2XM Operating Manual

cooling lines.

www.inficon.com for Sensor Datasheets.

NOTE: Shuttered sensors require a feedthrough with an air line and solenoid valve

PN 750-420-G1.

NOTE: Multi-crystal (rotary) sensors should not be used with STM-2XM.

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STM-2XM Operating Manual

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2.1 Installation Requirements

CAUTION

2.1.1 Parts Requirements

 STM-2XM Monitor

Use the supplied mains power cable.

If this cable must be replaced, the replacement cable must meet or exceed the ratings of the supplied cable.

STM-2XM Operating Manual

Chapter 2

Installation

 One crystal sensor/feedthrough

 One Oscillator Kit for each crystal sensor

 Quartz crystals appropriate for the application

To maintain proper STM-2XM performance, use only the 15.2 cm (6 in.) BNC cable that is included to connect the oscillator to the crystal sensor.

The length of the in-vacuum cable (Front Load and Sputtering sensors) or electrical conduit tube (Cool Drawer and Bakeable sensors) should not exceed

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78.1 cm (30.75 in.).

2 - 1

STM-2XM Operating Manual

CAUTION

Substrate

Source

Sensor

Evaporator

Power Supply

2.4 m (8 ft.) Copper Ground Rods

7.62 cm (3 in.) Wide Copper

Ground

Strap

12.7 mm (0.5 in.) Wide Copper

Ground

Straps

Earth

2.1.2 Ground Requirements

A ground post is provided on the rear panel. This point should be connected to the common ground with a grounding strap.

Use low impedance cables or straps to connect the chassis of all control components to a common ground point on the vacuum chamber. The common ground point must be connected to earth ground (see section 2.1.3, Connection to

Earth Ground, on page 2-3).

Solid copper straps are recommended, where RF is present. Use a strap of the shortest possible length, minimum width of 12.7 mm (0.5 in.), approximately

0.56 mm (0.22 in.) thick. This is particularly important in high-noise electron beam (e-beam) systems. See Figure 2-1 for the recommended grounding method.

NOTE: The oscillator is grounded to STM-2XM and crystal sensor through the

BNC cables.

The crystal sensor is typically grounded to the wall of the vacuum system. If the sensor feedthrough is not properly grounded to earth through the vacuum system, connect a copper strap between the feedthrough and the common ground point on the vacuum system.

Figure 2-1 Recommended grounding

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2 - 2

2.1.3 Connection to Earth Ground

CAUTION

If an earth ground is not established:

1 Where soil conditions allow, drive two 2.4 m (8 ft.) copper clad steel rods into

the ground 1.8 m (6 ft.) apart. Follow local regulations and codes.

2 Pour a copper sulfate or a salt solution around each rod to improve the

ground conductivity.

3 Measure the resistance. A near zero resistance between the two rods indicates

that a good earth ground is achieved.

4 After verifying a near zero resistance between the rods, connect the rods

together with a 7.62 cm (3 in.) wide copper strap.

2.2 Rear Panel

Figure 2-2 STM-2XM rear panel

STM-2XM Operating Manual

Connecting cables must be routed away from any

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potential source of electrical noise.

2.2.1 Sensors

The Sensors input provides the remote sensor oscillator interface to STM-2XM, providing both the signal and power path to the oscillator.

NOTE: Sensors connection requires coaxial cable type RG58 or RG59.

The maximum BNC cable length connecting the oscillator to STM-2XM is 30 m (98 ft.).

2 - 3

STM-2XM Operating Manual

2.2.2 Relay Outputs

STM-2XM has eight normally open (NO) relay contact outputs. These outputs are intended for low voltage (see section 1.4.4, Digital I/O, on page 1-7).

Table 2-1 Relay output contact pin numbers

Relay Contacts on pins

1 12,13

2 23,24

39,10

4 20,21

56,7

6 17,18

73,4

8 14,15

Figure 2-3 Relay output contact pin numbers

2 - 4

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2.2.3 Analog Outputs

For functions associated with the analog outputs, see section 1.4.4, Digital I/O, on

page 1-7.

Table 2-2 Analog output contact pin numbers

Analog Output Connections

1 9(+), relative to pin 5 or 1

2 4(+), relative to pin 5 or 1

3 2(+), relative to pin 5 or 1

4 6(+), relative to pin 5 or 1

Figure 2-4 Analog output contact pin numbers

STM-2XM Operating Manual

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STM-2XM Operating Manual

2.2.4 Remote Inputs

STM-2XM has eight remote digital inputs that are activated by contact closure to ground.

For the specific functions associated with the inputs, see section 1.4.4 on page 1-7.

Table 2-3 Remote input pin numbers

Input Contact on pins

Input 1 14,13

Input 2 3,13

Input 3 17,13

Input 4 6,13

Input 5 20,13

Input 6 9,13

Input 7 23,13

Input 8 12,13

Figure 2-5 Remote input pinout

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STM-2XM Operating Manual

Substrate

Substrate Shutter

Source Shutter

Chamber

Oscillator

Source

Power

Supply

Sensor

Sensor Shutter

2.3 Basic Vacuum System Components

Figure 2-6 Basic vacuum system components

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Substrate

The substrate is the object being coated.

Source

The source is the object that emits the evaporant. STM-2XM provides support for two sources.

Sensor

The sensor is the component that detects the evaporant. The sensor can only detect evaporant that accumulates on the sensor crystal. To account for differences in evaporant between the sensor and substrate, tooling adjustments are used (see

section 7.3 on page 7-2). STM-2XM provides support for two sensors.

Source shutter (optional)

The source shutter blocks the evaporant stream from the source. With the source shutter closed, the evaporant from the source cannot reach the substrate or the sensors. The front panel shutter buttons and the End Thickness setpoint activate the source shutter.

2 - 7

STM-2XM Operating Manual

Substrate shutter (optional)

The substrate shutter blocks the evaporant stream from reaching the substrate. A closed substrate shutter will not allow material to reach the substrate but will allow evaporant to reach the sensor(s). With a substrate shutter installed, it is possible to have a shutter delay, where the rate can be pre-established before exposing the substrate to the evaporant stream. STM-2XM automatically accounts for a substrate shutter (if programmed) and will not display thickness accumulation while the substrate shutter is closed. The displayed rate is always "live" even if the substrate shutter is closed.

NOTE: If STM-2XM is programmed to use a substrate shutter, it ignores changes

in substrate thickness when the substrate shutter is closed. Therefore, program STM-2XM for a substrate shutter only if a substrate shutter actually exists in the system.

Sensor shutter (optional)

The sensor shutter blocks the evaporant stream from the sensor. Shuttered sensors are required for rate sampling, where the sensor monitors the source for a portion of the deposition. Shuttered sensors are also used in multiple-sensor, multi-layer systems to keep the sensor from being contaminated with incompatible materials on different layers

In-Vacuum Cable

The in-vacuum cable connects the sensor to the feedthrough.

Feedthrough

A feedthrough provides isolation between vacuum and atmosphere for electrical and cooling lines.

15.2 cm (6 in.) BNC Cable

A BNC cable provides a flexible connection from the feedthrough to the oscillator.

Oscillator

The oscillator contains the electronics to operate the quartz crystal. The length from the oscillator to the crystal should be under 1 m (40 in.).

BNC Cable

A BNC cable connects the oscillator to STM-2XM.

Ground Wire

The ground wire is preferably a solid copper ground strap that connects the earth-grounded vacuum system to the STM-2XM ground terminal (refer to section

2.1.2, Ground Requirements, on page 2-2).

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2 - 8

2.4 Deposition System Installation

Correct

Incorrect

Correct

Incorrect

Obstruction

Source

2.4.1 Sensor Head Installation

Install the sensor as far as possible from the evaporation source (a minimum of

25.4 cm (10 in.)) while still being in a position to accumulate thickness at a rate proportional to accumulation on the substrate. Figure 2-7 shows proper and improper methods of installing sensors.

NOTE: For best process reproducibility, rigidly support the sensor so that it cannot

move during maintenance and crystal replacement.

Figure 2-7 Sensor installation guidelines

STM-2XM Operating Manual

PN 074-614-P1A

To guard against spattering, use a source shutter to shield the sensor during initial soak periods. If the crystal is hit with a particle of molten material, it may be damaged and stop oscillating. Even in cases when the crystal does not completely stop oscillating, it may immediately become unstable or instability may occur shortly after deposition begins.

Plan the installation to ensure that there are no obstructions blocking a direct path between the sensor and the source. Install sensors in such a manner that the center axis of the crystal is aimed directly at the source to be monitored. Verify that the angle of the sensor location (with reference to the source) is well within the evaporant stream. If the sensor is not perpendicular to the source, the coating on the crystal will be tapered and diminished crystal life can result.

NOTE: In many cases installing multiple sensors to monitor one source can

improve thickness accuracy for the product. The recommendations for multiple sensors are the same as for a single sensor installation, and the locations chosen should be as defined above.

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2 - 10

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3.1 Front Panel Description

Power

On / Off

System Control

Display Data

Entry

Control

Knob

Figure 3-1 Front panel

STM-2XM Operating Manual

Chapter 3

Operation

The STM-2XM front panel is divided into two functional groups:

 Buttons to the left of the display are for system control.

 The control knob and buttons to the right of the display are for data entry and

programming.

An audible beep will accompany each button activation. The beeper may be disabled if desired (see section 3.2.1.2 on page 3-10).

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3 - 1

STM-2XM Operating Manual

Open for

Channel 1

Close for Channel 1

Zero for

Sensor 1

Open for

Channel 2

Select

Crystal 1

(Backup

Mode)

Crystal 2

Close for

Channel 2

Select

(Backup

Mode)

Zero for

Sensor 2

3.1.1 System Control Buttons

NOTE: All button functions can be duplicated with remote inputs.

Figure 3-2 Button functions

3 - 2

OPEN . . . . . . . . . . . . . . . . . . . . . . . . Press OPEN to open the source/substrate

shutter. When OPEN is pressed, all setpoints (setpoint time, setpoint thickness, and end thickness) are cleared and the film will enter the deposit state.

NOTE: Pressing OPEN while STM-2XM is in

the deposit state has no effect.

CLOSE. . . . . . . . . . . . . . . . . . . . . . . Press CLOSE to close the source/substrate

shutter and terminate the deposition. STM-2XM will then enter the Ready state.

NOTE: Pressing CLOSE while STM-2XM is

in the Ready state has no effect.

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ZERO . . . . . . . . . . . . . . . . . . . . . . . . Press ZERO to zero the substrate thickness.

Control Knob

When ZERO is pressed, the thickness displayed is cleared.

NOTE: If ZERO is pressed during the

Mode-Dependent Button Functions

 Sensor 2 ZERO is only used in the independent mode.

 Channel 2 OPEN is used to select Crystal 1 in the backup mode.

 Channel 2 CLOSE is used to select Crystal 2 in the backup mode.

3.1.2 Data Entry and Programming Buttons

Figure 3-3 Data entry and programming buttons

STM-2XM Operating Manual

deposit state, the setpoint thickness will activate when the film thickness on the display reaches the programmed setpoint thickness.

PROG/ENTER . . . . . . . . . . . . . . . . . Provides access to the main menu and

subsequent menus Saves parameters after edit Advances to the next list item in a sub-menu

after an edit has been saved

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CANCEL/BACK . . . . . . . . . . . . . . . . Returns to previous menu or Runtime screen

Control Knob . . . . . . . . . . . . . . . . . Scrolls up/down menu items

Scrolls through fixed choices Increments value-based parameters For parameters requiring multiple numeric

placeholders (density, Z-Ratio, thickness, time, and rate), the control knob will:

 increment the selected numeric

placeholder when rotated clockwise

 select the next numeric placeholder

when rotated counterclockwise

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STM-2XM Operating Manual

Counterclockwise

Clockwise

three clicks

two clicks

3.1.3 Changing a Parameter

There are two types of parameters, enumerated and numeric. Enumerated parameters have a list of fixed choices. Numeric parameters allow a number to be entered. To change a parameter,

1 Press PROG/ENTER.

2 Rotate the control knob to select Edit Active Film.

3 Press PROG/ENTER to display the Editing Film menu for the active film (see

Figure 3-4).

Figure 3-4 Editing film settings

To edit the density, for example, rotate the control knob clockwise to select DENSITY, then press PROG/ENTER. The DENSITY numeric parameter editor will be displayed (see Figure 3-5).

Figure 3-5 Numeric parameter editor

3 - 4

 Numeric parameters are changed one digit at a time.  Each digit may only be incremented, and rolls over from 9 to 0.  To select the next digit, rotate the control knob counterclockwise.  To increment the selected digit, rotate the control knob clockwise.  When finished, press the PROG/ENTER button.  To cancel the entry, press the CANCEL/BACK button.

PN 074-614-P1A

STM-2XM Operating Manual

WARNING

Clockwise one click

When changing an enumerated type, rotate the control knob to the appropriate item, and press PROG/ENTER to save the selection and return to the previous screen (see Figure 3-6).

Figure 3-6 Enumerated entry

NOTE: The help message changes appropriately with the choice.

Pressing CANCEL/BACK will cancel the entry and set it back to the previous setting.

Enumerated choices take effect immediately.

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3.1.4 Runtime Screen

Deposition Rate

Substrate Thickness

or Mass

Film State

Set Point

Indicators

Real-Time Chart

Context-Based

Help

Film No.:Film Name

Upper Chart Bound

Chart Type

Lower Chart Bound

Indicates Active Sensor

Sensor Shutter Closed

Sensor Shutter Open

Crystal Life (Frequency-Based)

Deposit Phase Time

Substrate Shutter Source Shutter

Shutter Closed

Shutter Open

STM-2XM Operating Manual

Figure 3-7 STM-2XM Runtime screen component status

3 - 6

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3.2 Programming

3.2.1 Main Menu

To program STM-2XM, press PROG/ENTER. The MAIN MENU will display.

Figure 3-8 Main menu

Use the control knob to select a menu item, then press PROG/ENTER. Press CANCEL/BACK to return to the Runtime screen.

Set Active Film . . . . . . . . . . . . . . . . 1 to 15. Sets the active film.

Edit Active Film . . . . . . . . . . . . . . . Lists programmable parameters for the

STM-2XM Operating Manual

currently active film. For a description of the settings on the film page, see section 3.2.1.1.

System Settings . . . . . . . . . . . . . . . Displays the SYSTEM PARAMS menu. For a

description of the system settings, see

section 3.2.1.2 on page 3-10.

Status/Diagnostics . . . . . . . . . . . . . Displays STM-2XM status and diagnostics.

For example, displays the raw frequency of the crystal, the status of the inputs and outputs, and other useful information.

Edit Any Film . . . . . . . . . . . . . . . . . Displays a selection box that allows the

choice of the film to edit, and then displays the settings menu for the selected film.

Setup . . . . . . . . . . . . . . . . . . . . . . . . Displays the HARDWARE SETUP menu,

where STM-2XM system hardware is

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programmed, including sensors, shutters, tooling, and relays. The settings on this menu must be accurate to allow STM-2XM to operate properly. For example, if STM-2XM is programmed for a substrate shutter, and one does not exist in the system, STM-2XM will provide false readings because it will not count any material accumulated on the substrate during the Ready phase. For a description of hardware settings, see section

3.2.1.3 on page 3-12.

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3.2.1.1 Edit Film

All parameters are listed, but during actual operation STM-2XM will show only the parameters that are relevant to its configuration and mode.

Name . . . . . . . . . . . . . . . . . . . . . . . . Name of the film, displayed on the monitor

Density . . . . . . . . . . . . . . . . . . . . . . Density of the film material. Used to

Z-Ratio. . . . . . . . . . . . . . . . . . . . . . . Z-Ratio of the film material. Used to

Additional Tooling . . . . . . . . . . . . . Tooling applied in addition to the tooling in

STM-2XM Operating Manual

screen.

accurately calculate thickness. The density of common materials is found in Appendix A,

Material Table.

NOTE: Density is not used in Mass mode.

accurately calculate thickness. The Z-Ratio of common materials is found in Appendix A,

Material Table.

the setup menu.

NOTE: This only affects the film being edited

and not all films.

Setpoint Thickness . . . . . . . . . . . . Thickness/mass at which the setpoint

thickness relay (if programmed) will close.

NOTE: Each time a film is started, the

setpoint thickness condition is cleared, and will be activated when the thickness of the specific film (not necessarily the total displayed thickness) reaches the setpoint.

End Thickness . . . . . . . . . . . . . . . . Thickness/mass at which the deposit state

automatically terminates.

NOTE: Each time a film is started, the end

thickness condition is cleared. This will be activated when the thickness of the specific film (not necessarily the total displayed thickness) reaches the setpoint.

Use Backup Xtal . . . . . . . . . . . . . . . Available in Backup Mode

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Allows the sensor to switch automatically if the active crystal fails.

Setpoint Time . . . . . . . . . . . . . . . . . Thickness/mass at which the setpoint time

relay (if programmed) will close.

STM-2XM Operating Manual

Deposit Rate . . . . . . . . . . . . . . . . . . Desired rate for the film. Used for the rate

deviation graph (and analog output) and to ensure the Rate digital output is steady and within tolerance.

Shutter Delay . . . . . . . . . . . . . . . . . Activates a shutter delay for the film. During

a shutter delay, STM-2XM will monitor the rate from the source but will keep the substrate shutter closed. OPEN stops shutter delay and starts the deposit phase.

NOTE: Available only if the appropriate

shutter setup is present.

Rate Sampling . . . . . . . . . . . . . . . . When using rate sampling, the sensor

shutter opens and closes during deposit to reduce the exposure of the crystal to the evaporant stream during deposition. This feature is intended to extend crystal life for processes with stable rates.

NOTE: Available only if the appropriate

shutter setup is present.

Rate Sampling Period . . . . . . . . . . Determines how often STM-2XM samples

and holds during Rate Sampling. Rate Sampling Period minus Rate Sampling Dwell time yields an approximate hold time (how long STM-2XM will keep the sensor shutter closed).

Rate Sampling Dwell . . . . . . . . . . . Determines the amount of time STM-2XM

will keep the sensor shutter open.

Time Power Enable . . . . . . . . . . . . STM-2XM will use the last known steady rate

and continue to accumulate thickness/mass

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at this rate if a crystal fail occurs. This allows films to be completed even in the event of a crystal failure.

Xtal Life Min . . . . . . . . . . . . . . . . . . Adjustable to enter the percent life at which

the crystal will fail. This sets the minimum acceptable crystal life before a forced failure.

Auto Fail/Force Switch Xtal . . . . . . If the sensor(s) used by this film have a life

lower than Xtal Life Min, and the Auto Fail parameter is true, then the crystal is failed. Used to switch to a backup sensor at a given crystal life.

3 - 9

STM-2XM Operating Manual

Temporal Average . . . . . . . . . . . . . Number of measurement samples to

average as the effective rate. More samples yield a more accurate rate, however, rate and thickness will not update as quickly at higher sampling rates.

The effective frequency accuracy is 0.03 Hz per measurement divided by the square root of the number of temporal average samples.

Good Rate Tolerance(%) . . . . . . . . Set as a percentage of rate deviation. When

set for good rate, a relay will activate only within tolerance, when the good rate condition is true.

For example, if Good Rate Tolerance is set to 10% and the target rate is set to 10 Å/s, when the rate is between 9 and 11 Å/s (10%), the good rate relay would be active.

NOTE: A relay must be programmed to use

this feature.

3.2.1.2 System Settings

Operational Mode. . . . . . . . . . . . . . Sets STM-2XM mode of operation (see

Table 3-1 Modes of operation

Mode Description Notes

Simple X1 Single film, single sensor Sensor 1 active only. Analog/shutter outputs

Simple X2 Single film, single sensor Sensor 2 active only. Analog/shutter outputs

Backup Single film, dual sensors Crystal switching mode.

Averaging Single film, two sensors spatially

Alloy Two films codeposited Codeposition of two materials onto a

Independent Two films cluster deposition Allows STM-2XM to be used as two separate

averaged

section 3.3, STM-2XM Operating Modes, on page 3-17). (See Table 3-1.)

selected by changing active source.

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Used for large chambers or systems with a moving substrate.

substrate at the same time.

instruments. Recommended for cluster tools and research systems.

3 - 10

STM-2XM Operating Manual

Test Mode

. . . . . . . . . . . . . . . . . . . . . Test mode provides simulated sensor

Active Source (Active Channel)

Display Mode

Plot type

Plot time scale

. . . . . . . . . . . . . . . . . . .Displays thickness in kiloangstoms (

. . . . . . . . . . . . . . . . . . . . . . . Available in single film modes.

. . . . . . . . . . . . . . . . . .Sets the horizontal axis size. Defines the

LCD Contrast LCD Brightness

readings.

NOTE:

If STM-2XM is reset, test mode is turned off automatically.

. . . . . . . . . . . . . . . .For single film modes, this selects where the

analog and digital outputs and inputs are connected (refer to

section 2.2 on page 2-3

kÅ)

mass in micrograms per square centimeter

µg/cm3)

(

Displays the graph on the Runtime screen as None, Rate Deviation, Rate, or Thickness.

amount of time covered by the plot before it is overwritten.

. . . . . . . . . . . . . . . . .Adjusts the appearance of the screen. Set the

brightness to 100%, and then adjust the contrast until the display is easily read. Brightness can be programmed to a desired level.

NOTE:

The screen dims when STM-2XM is

idle.

Beep [on/off]

Comm Protocol

. . . . . . . . . . . . . . . . . . . Turns the button/control knob beeper on or off.

. . . . . . . . . . . . . . . . .Serial communications mode to STM-2XM,

Sycon 9600 (9.6 Kbps), SMDP L (9.6 Kbps), SMDP M (38.4 Kbps), and SMDP H (115.2

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Kbps).

If the protocol selected is Sycon 9600, STM-2XM performs serial communication with Sycon protocol at 9600 baud, using RS-232 electrical levels.

If the protocol selected is SMDP, STM-2XM performs serial communication using SMDP protocol at 9600, 38400, or 115200 baud.

3 - 11

STM-2XM Operating Manual

CAUTION

SMDP address

3.2.1.3 Setup Parameters

Changes in the Setup menu occur immediately. Relays and analog outputs can activate unexpectedly during programming.

Sensor setup . . . . . . . . . . . . . . . . . Main parameter that effects the

Table 3-2 Sensor setup parameter

Sensor Setup Available modes Rate sampling

1:Single

unshuttered

. . . . . . . . . . . . . . . . . . Serial communication mode for STM-2XM. If

the SMDP address is 16, STM-2XM uses RS-232 electrical signaling; otherwise STM-2XM uses RS-485 signaling.

choices/modes available (see Table 3-2

capable

Simple No No

Backup capable

2:Single

shuttered

3:Dual w/single

shutter

4:Dual

unshuttered

5:Dual w/dual

shutters

Simple, Averaging, Alloy, Independent No If mode is

Simple, Averaging, Alloy, Independent Yes If mode is

Simple Yes No

Simple Yes Yes

Simple

Tooling, X1:SRC1 . . . . . . . . . . . . . . The ratio between substrate thickness using

Source 1 and Sensor 1 thickness (see

section 7.3, Determining Tooling, on page 7-2).

Tooling, X2:SRC1 . . . . . . . . . . . . . . The ratio between substrate thickness using

Source 1 and Sensor 2 thickness (see

section 7.3, Determining Tooling, on page 7-2).

NOTE: In independent chambers, set this

value to zero.

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STM-2XM Operating Manual

Tooling, X1:SRC2 . . . . . . . . . . . . . . The ratio between substrate thickness using

Source 2 and Sensor 1 thickness (see

section 7.3, Determining Tooling, on page 7-2).

NOTE: In independent chambers. Set this

value to zero.

Tooling, X2:SRC2 . . . . . . . . . . . . . . The ratio between substrate thickness using

Source 2 and Sensor 2 thickness (see

section 7.3, Determining Tooling, on page 7-2).

Weight Ratio . . . . . . . . . . . . . . . . . . Available only in spatial averaging mode.

This parameter describes the percentage of time the substrate is near Sensor 1. In moving substrate systems, if the substrate spends more time near one sensor than the other, this needs to be accounted for in the computations. If the substrate spends 90% of time near Sensor 1, this parameter should be programmed for 90%. If the substrate is fixed, the default value is 50%.

Substrate Shutr . . . . . . . . . . . . . . . Configures the substrate shutter delay

operation (see Table 3-3).

Table 3-3 Substrate shutter setup parameters

Substrate shutter

setup

None N

CH1: Substrate3 Only for film on Channel 1

CH2: Substrate Only for film on Channel 2

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Shared substrate Only allows shutter delay for one film at a time

Dual substrate Allows dual shutter delay (alloy shutter delay)

Shutter Delay

Thick hold

Anal. Scl Mode . . . . . . . . . . . . . . . . Thickness, Mass

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STM-2XM Operating Manual

Analog Out 1 to 4 . . . . . . . . . . . . . . Determines the function of each of the

analog outputs (refer to section 2.2.3 on

page 2-5 for details on wiring analog

outputs). (See Table 3-4

Table 3-4 Analog output functions

Setting Description

None Output is disabled

Pos Fscl +10 V Fixed

Neg Fscl -10 V Fixed

Remote Output is computer set value

Ch1 Rdev 1k Rate Deviation, Channel 1, 1000 Å/s

Ch1 Rdev 10 Rate Deviation, Channel 1, 10 Å/s

Ch1 Rate 1k Rate, Channel 1, 1000 Å/s

Ch1 Rate 10 Rate, Channel 1, 10 Å/s

Ch1 Thickns Thickness Recorder, Channel 1, 999 Å

Ch1 Mgthick Thickness Recorder, Channel 1, 99.9 Å

Ch2 Rdev 1k Rate Deviation, Channel 2, 1000 Å/s

Ch2 Rdev 10 Rate Deviation, Channel 2, 10 Å/s

Ch2 Rate 1k Rate, Channel 2, 1000 Å/s

Ch2 Rate 10 Rate, Channel 2, 10 Å/s

Ch2 Thickns Thickness Recorder, Channel 2, 999 Å

Ch2 Mgthick Thickness Recorder, Channel 2, 99.9 Å

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STM-2XM Operating Manual

Relay 1 to 8 . . . . . . . . . . . . . . . . . . . Determines the function of each of the digital

(relay) outputs (refer to section 2.2.2 on page

2-4 for details on wiring digital outputs). (See Table 3-5.)

Table 3-5 Relay functions

Setting Decription

None Relay is inactive

Forced ON Relay is always active

Remote Relay is controlled with remote communications

Ch 1 FP Keys Relay is toggled using Sensor 1 OPEN/CLOSE

buttons

Ch 2 FP Keys Relay is toggled using Sensor 2 OPEN/CLOSE

buttons

Srce 1 Shtr Relay activates Channel 1 source shutter

Srce 2 Shtr Relay activates Channel 2 source shutter

Subs 1 Shtr Relay activates Channel 1 substrate shutter

Subs 2 Shtr Relay activates Channel 2 substrate shutter

Sens 1 Shtr Relay activates Sensor 1 shutter

Sens 2 Shtr Relay activates Sensor 2 shutter

Xtal 1 Fail Relay activates when Sensor 1 fails

Xtal 2 Fail Relay activates when Sensor 2 fails

Stpt 1 Time Relay activates when Channel 1 setpoint time has

elapsed

Stpt 2 Time Relay activates when Channel 2 setpoint time has

elapsed

Stpt 1 Thik Relay activates when Channel 1 setpoint thickness

has been reached

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Stpt 2 Thik Relay activates when Channel 2 setpoint thickness

has been reached

Ch1 Rate OK Relay activates when Channel 1 rate is steady and

within tolerance

Ch2 Rate OK Relay activates when Channel 2 rate is steady and

within tolerance

Xtl 1 N.C. Relay is Normally Closed and opens to use Sensor

Xtl 2 N.C. Relay is Normally Closed and opens to use Sensor

3 - 15

STM-2XM Operating Manual

Input 1.1 to 1.4

Input 2.1 to 2.4 . . . . . . . . . . . . . . . . Determines the function of each of the digital

(relay) outputs for Sensor 1 (1.X) and Sensor 2 (2.X) (refer to section 2.2.4 on page 2-6 for details on wiring remote inputs). (See Table

3-6

Table 3-6 Input functions

Setting Description

None Input is ignored

Zero Thick Zero accumulated thickness

Open Source Open source shutter and in deposit mode

Close Source Closed source shutter and in monitor mode

Select Xtal Switch active crystal

Terminal Thk Source final thickness

2 Chnl Fnltk All channels final thickness (alloy mode)

Alloy Syncup Open substrate shutter and sync start channels

(alloy mode)

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3.3 STM-2XM Operating Modes

Source Shutter

Sensor

Chamber

Sensor Shutter

Source

Substrate Shutter

Substrate

Notice that one sensor

is off.

3.3.1 Simple

In simple mode, STM-2XM can read one sensor and can control a shutter for one source. The deposition process is a single material per layer.

Figure 3-9 Simple mode

STM-2XM Operating Manual

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3 - 17

3.3.2 Backup

Source Shutter

Source

Sensor Shutter

Dual Sensor

Chamber

Substrate Shutter

Substrate

Notice that both sensors are on. The arrow indicates the active sensor

Select

In backup mode, STM-2XM is a single layer, single source monitor using two sensors; one sensor is a backup for the other sensor. If the active sensor fails, STM-2XM automatically switches to the backup sensor. The active sensor can be switched manually by pressing the lower OPEN and CLOSE buttons on the front panel (refer to section 3.1.1 on page 3-2).

NOTE: The 1 and 2 on these buttons indicate which sensor will be selected (see

Figure 3-10 Backup mode

STM-2XM Operating Manual

Figure 3-10).

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3 - 18

Crystal 1 Crystal 2

3.3.3 Averaging

Source

Substrate

Substrate Shutter

Sensor Shutter

Sensor

Chamber

Shutter

Notice that both sensors are on

and their shutters are open.

The averaging mode is spatial averaging for two sensors. STM-2XM calculates weighted averages of two sensors to determine the film rate and thickness. Both sensors must be active and monitored at the same time. The effective rate/ thickness is the average of the readings between Sensor 1 and Sensor 2.

NOTE: Averaging mode requires two operational sensors.

Figure 3-11 Averaging mode

STM-2XM Operating Manual

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3.3.4 Alloy

Sensor Shutter

Source

Sensor

Source

Substrate

Chamber

Substrate Shutter

Source

Shutters

Total Substrate

Thickness

Film No.:Film Name

Deposit Rate for

Source 1

Deposit Rate for

Source 2

Ratio Indicator

(Based on

current rate)

STM-2XM Operating Manual

In alloy mode, two different materials are deposited onto the substrate at the same time. STM-2XM associates a material with a sensor. Make sure to shield the sensors so that each sensor monitors only one source.

In alloy mode, Sensor 1 (X1) is associated with Channel/Source 1 (top line on the Runtime screen) and Sensor 2 (X2) is associated with Channel 2/Source 2 (bottom line on the Runtime screen) (see Figure 3-12).

In alloy mode, STM-2XM links the source or substrate shutters together, so that the evaporants are properly codeposited on the substrate. Each channel (or both) may still have a shutter delay phase. In this case, when the channel(s) are programmed with shutter delay, they both enter the deposit phase at the same time by pressing either of the two OPEN buttons. Also, each channel may independently be programmed for rate sampling.

In alloy mode, the setpoint thickness of each source channel is independent.

The Ratio Indicator displays the ratio as measured at the instant, not an overall ratio.

NOTE: The chart is not available in Alloy Mode.

Figure 3-12 Alloy mode

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3.3.5 Independent

Source Shutter

Sensor

Chamber

Sensor Shutter

Source

Substrate Shutter

Substrate

Source Shutter

Sensor

Chamber

Sensor Shutter

Source

Substratre Shutter

Substrate

Source 1 Related

Source 2 Related

In independent mode, STM-2XM acts like two separate simple monitors. The source shutters are operated independently, and the films can be deposited independently. The two channels are completely independent. Sensor 1 (X1) is associated with Channel/Source 1 (top line on the screen) and Sensor 2 (X2) is associated with Channel 2/Source 2 (bottom line on the screen)

NOTE: The chart is not available in Independent Mode. The setpoint indicators on

Figure 3-13 Independent mode

STM-2XM Operating Manual

the Runtime screen (refer to Figure 3-7 on page 3-6) are also not available in Independent mode.

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STM-2XM Operating Manual

CAUTION

3.4 Operation

3.4.1 No Shutter Delay

Press OPEN. STM-2XM transitions from Ready to Deposit. The setpoint time, setpoint thickness, and end thickness indicators are cleared. When the accumulated thickness reaches the End Thickness value for the active film (refer to section 3.2.1.1 on page 3-8), STM-2XM automatically closes the source shutter and transitions back to the Ready phase.

NOTE: The substrate thickness is not zeroed when the deposit phase is entered.

This allows multiple layers to be deposited and the accumulated total substrate thickness to be displayed (also known as thickness summing). Zero the thickness by pressing ZERO before pressing OPEN to display the thickness of a single layer.

3.4.2 Shutter Delay

From the Ready phase, press OPEN. STM-2XM will enter the shutter delay phase (SHUT_DLY). The substrate shutter remains closed but the source shutter (if installed) opens. This allows for preconditioning of the source and establishing a steady rate prior to opening the substrate shutter.

While in shutter delay the Open indicator blinks. When ready to start depositing, press OPEN again. STM-2XM will open the substrate shutter and enter the deposit phase.

NOTE: Setpoint time, setpoint thickness, and end thickness indicators are cleared

3.4.3 Test Mode

Test mode allows STM-2XM settings and operation to be tested without performing an actual deposition. Setting Test mode On provides a simulated rate, to simulate the effects of a real deposition.

In Test mode, STM-2XM simulates attached sensors, and provides a simplified way to become familiar with the STM-2XM front panel indicators and programming.

It is possible to open or close the shutter to simulate deposition and zero readings. It is also possible to test the Time and Thickness Setpoint relays and indicators.

at the beginning of the shutter delay phase.

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In Test mode, all setpoints, inputs, and outputs are active.

3 - 22

3.4.4 Rate Sampling

STM-2XM rate sampling allows for long depositions by limiting the time the sensor is exposed to the evaporant. STM-2XM samples rate for a period of time, then closes the sensor shutter and assumes the rate is constant. STM-2XM continuously opens and closes the sensor shutter according to the times programmed. While depositing, when STM-2XM closes the sensor shutter, STM-2XM enters a HOLD phase, and the locked-in rate blinks. STM-2XM will not enter the HOLD phase unless the measured rate is at least 50% of the programmed deposit rate for the film or 0.5 Å/s (whichever is greater). This prevents STM-2XM from jumping into the HOLD phase before the rate has been established.

3.5 Film States

FAIL TPW . . . . . . . . . . . . . . . . . . . . Crystal failed; completed time power

STM-2XM Operating Manual

(thickness was incremented at last known rate and shutter was held open until End Thickness was reached).

X FAIL . . . . . . . . . . . . . . . . . . . . . . . Crystal failed; film was aborted; all shutters

are closed. If the crystal recovers while in the X FAIL phase, STM-2XM will transition to the Ready phase.

READY. . . . . . . . . . . . . . . . . . . . . . . Sensor shutters are open, but all other

shutters are closed. Monitor is ready; press OPEN to open source/substrate shutters.

SHUT DLY . . . . . . . . . . . . . . . . . . . . Sensor and source shutters are open but

substrate shutter is closed. This allows a rate to be established. Pressing OPEN will transition the film to Deposit (opening the substrate shutter).

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COAST. . . . . . . . . . . . . . . . . . . . . . . Crystal failed, but STM-2XM is incrementing

thickness at the last known rate and keeping the source/substrate shutters open. Once the end thickness is reached, the film will transition to the FAIL_TPW state.

DEPOSIT . . . . . . . . . . . . . . . . . . . . . All shutters are open and STM-2XM is

monitoring the evaporant onto the target. This is the normal mode.

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STM-2XM Operating Manual

HOLD . . . . . . . . . . . . . . . . . . . . . . . . Sensor shutters are closed during deposit,

and STM-2XM is incrementing thickness at the last known rate.

NOTE: STM-2XM will not enter the HOLD

phase unless the measured rate is at least 50% of the programmed deposit rate for the film or 0.5 Å/s. STM-2XM uses the greater of the two values.

STABILIZ . . . . . . . . . . . . . . . . . . . . . After being in the HOLD phase, the sensor

shutter(s) are opened and STM-2XM waits until the reading stabilizes before accumulating the measured rate.

3 - 24

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4.1 Introduction

STM-2XM is capable of RS-232 and RS-485 serial communication. To connect STM-2XM to a computer via RS-232, use the serial cable included in the ship kit, PN 783-506-000-P1.

STM-2XM can be programmed offline and the offline settings can be saved. STM-2XM supports Sycon protocol for backwards compatibility, SMDP protocol for faster communication, and multiple instruments on the same RS-485 link (see

Chapter 5, Communications).

To use INFICON STM-2XM FilmMaker software, first install the Protocol Server (see section 4.2.1). Then install the INFICON STM-2XM FilmMaker software (see

section 4.2.2).

STM-2XM Operating Manual

Chapter 4

Software

4.2 Installing INFICON STM-2XM FilmMaker Software

INFICON STM-2XM FilmMaker Software supports one STM-2XM.

4.2.1 Installing the Protocol Server

1 Insert the Thin Film Manuals CD into the CD drive of the computer that will be

connected to STM-2XM.

2 Click Windows Explorer or File Explorer >> Computer >> (CD drive letter:)

>> Common Software.

3 Double click setup_smdp_svr_lv.exe. The Zip Self-Extractor window will

display.

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4 Click Unzip. The SMDP Serial Protocol Server window will display.

5 On the Destination Directory pane, click Browse to select the location all

software will be installed.

6 Click Next.

7 Read the license agreement.

8 Click I accept License Agreement(s).

9 Click Next.

10 Review the summary of information.

11 Click Next. Installation Complete will display.

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STM-2XM Operating Manual

12 Click Next. The Setup Wizard pane will display.

13 Click Next. The Confirm Installation pane will display.

14 Click Next.

15 Read the license agreement.

16 Click I Agree.

17 Click Next. Installation Complete will display.

18 Click Close.

19 Click Close on the Zip Self-Extractor.

4.2.2 Installing INFICON STM-2XM FilmMaker Software

1 Insert the Thin Film Manuals CD into the CD drive of the computer that will be

connected to STM-2XM.

2 Click Windows Explorer or File Explorer >> Computer >> (CD drive letter:)

>> STM-2XM >> TOOLS >> FilmMaker.

3 Double click setup_INFICON_2xm_filmmaker.exe. The Zip Self-Extractor

window will display.

4 Click Unzip. The INFICON 2XM FilmMaker window will display.

5 On the Destination Directory pane, click Browse to select the location all

software will be installed.

6 Click Next.

7 Review the summary of information.

8 Click Next. Installation Complete will display.

9 Click Finish.

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4.2.3 Starting INFICON STM-2XM FilmMaker Software

4.2.3.1 Starting the Software in Windows XP or Windows 7

1 Click Start >> All Programs >> INFICON >> INFICON STM-2XM FilmMaker.

2 The STM-2XM-ParmManager.vi window will display (see Figure 4-1).

Figure 4-1 STM-2XM-ParmManager.vi initial display

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4.2.3.2 Starting the Software in Windows 8

1 In the Start window, click the STM-2XM FilmMaker icon.

2 If the icon cannot be found:

2a Click Search >> Apps.

2b Type STM in the Search text box.

2c Click the INFICON STM-2XM FilmMaker icon.

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4.3 STM-2XM Parameter Manager

Figure 4-2 STM-2XM-ParmManager.vi

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 Main tab (see section 4.3.1)

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 Films tab (see section 4.3.2 on page 4-8)

 System tab (see section 4.3.3 on page 4-10)

 Save/Load file tab (see section 4.3.4 on page 4-17)

 Save/Load instrument tab (see section 4.3.5 on page 4-18)

 About tab (see section 4.3.6 on page 4-20)

4.3.1 Main Tab

Communication and utilities are accessed on the Main tab. (Refer to Figure 4-2.)

NOTE: Right-clicking on a value or parameter and then clicking Description and

Tip will display additional information about that value or parameter.

4.3.1.1 Main Setup Pane

Communication Settings

Com Port# . . . . . . . . . . . . . . . . . . . . 1 to 255

Protocol. . . . . . . . . . . . . . . . . . . . . . Sycon @ 9.6 Kbps, SMDP L (9.6 Kbps),

STM-2XM Operating Manual

Sets the communications port that STM-2XM is communicating through.

SMDP M (38.4 Kbps), SMDP H (115.2 Kbps).

Adjustable baud rate.

NOTE: This value must match the Comm

Protocol setting in the System Settings menu on STM-2XM (refer to

section 3.2.1.2 on page 3-10).

Slave Address. . . . . . . . . . . . . . . . . 16 to 255

SMDP address the software will use for serial communication with STM-2XM.

NOTE: This value must match the SMDP

Address setting in the System Settings menu on STM-2XM (refer to

section 3.2.1.2 on page 3-10).

Timeout(ms) . . . . . . . . . . . . . . . . . . 150 to 20000

The amount of time in microseconds that the

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software will wait for a response before issuing an error.

Program Control

Exit Program . . . . . . . . . . . . . . . . . . Click to safely stop communications and exit

the software program.

Purge/Re-Init all edit controls . . . . Returns all parameters edited using the

software to default values.

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STM-2XM Operating Manual

Instrument Communication Status

Instrument Online? . . . . . . . . . . . . Indicator to display communication status.

With established communication, the indicator will illuminate a light green color. Without established communication, the indicator will illuminate a dark green color (see Figure 4-3).

Figure 4-3 Instrument online indicator

Firmware Version . . . . . . . . . . . . . . Displays the firmware version of the

connected STM-2XM.

Comm Status:. . . . . . . . . . . . . . . . . Displays communications error messages. If

communications have been established without error, OK: [CMD:@] will be displayed.

Num Instances . . . . . . . . . . . . . . . . Shows number of instruments using the

communication server. It is possible to have multiple instances of STM-2XM Parm Manager.vi running.

SMDP_SVR Build . . . . . . . . . . . . . . Build or version of the communication server.

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4.3.1.2 Utilities Pane

Arbitrary file send

Send File to instrument . . . . . . . . . Selects a parameter file (*.2XM) to send to

File Dnld Status . . . . . . . . . . . . . . . Displays status of file download to

Arbitrary communication

Send CMD to instrument . . . . . . . . Click to send remote command.

CMD to send . . . . . . . . . . . . . . . . . . Enter command in the CMD to send box.

Response . . . . . . . . . . . . . . . . . . . . Receives the reply from the command sent.

Status. . . . . . . . . . . . . . . . . . . . . . . . Displays communications error messages. If

STM-2XM Operating Manual

STM-2XM.

STM-2XM. Error messages and comments will be displayed after a file is selected for transmission.

(See section 5.8, Communications

Commands, on page 5-17.)

communications have been established without error, OK: [CMD:@] will be displayed.

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4.3.2 Films Tab

Figure 4-4 Films tab

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NOTE: Right-clicking on a value or parameter and then clicking Description and

Tip will display additional information about that value or parameter.

Copy and paste controls for current edit film pane

Copy film. . . . . . . . . . . . . . . . . . . . . Click to copy the current film number

displayed and place it on the clipboard.

film on clipboard . . . . . . . . . . . . . . Displays the film that has been copied and is

in queue.

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Paste film . . . . . . . . . . . . . . . . . . . . Click to paste the film parameters for the

displayed film in the film on clipboard box onto the current film parameters displayed, thereby replacing the values for the current film.

All films pane

Use the spin box to increment or decrement the values for each of the parameters listed below.

EDITING film# . . . . . . . . . . . . . . . . . 1 to 15

Name . . . . . . . . . . . . . . . . . . . . . . . . 8 character maximum

Density . . . . . . . . . . . . . . . . . . . . . . 0.40 to 99.99 g/cm

Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . 0.100 to 9.999

Tooling. . . . . . . . . . . . . . . . . . . . . . . 10 to 999.9%

Setpoint mass. . . . . . . . . . . . . . . . . 0.00 to 9999.99 µg/cm²

Setpoint Thickness . . . . . . . . . . . . 0.000 to 999.999 kÅ

End mass . . . . . . . . . . . . . . . . . . . . 0.00 to 9999.99 µg/cm²

End Thickness . . . . . . . . . . . . . . . . 0.000 to 999.999 kÅ

Use Backup. . . . . . . . . . . . . . . . . . . Select to enable the use of the backup crystal

(refer to section 3.2.1.1 on page 3-8).

Setpoint Time . . . . . . . . . . . . . . . . . 00:00:00 to 9:59:59 h:mm:ss

Desired Rate . . . . . . . . . . . . . . . . . . 0.00 to 99.99 µg•s/cm²

Desired Rate . . . . . . . . . . . . . . . . . . 0.0 to 999.9 Å/s

Do shutter delay? . . . . . . . . . . . . . . Select to enable shutter delay (refer to

section 3.2.1.1 on page 3-8).

Do rate sampling . . . . . . . . . . . . . . Select to enable rate sampling (refer to

section 3.2.1.1 on page 3-8).

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Sampling interval . . . . . . . . . . . . . . 00:00:00 to 9:59:59 h:mm:ss

Sampling Dwell. . . . . . . . . . . . . . . . 00:00:00 to 9:59:59 h:mm:ss

Do time/power. . . . . . . . . . . . . . . . . Select to enable time/power upon crystal fail

(refer to section 3.2.1.1 on page 3-8).

Xtal min life . . . . . . . . . . . . . . . . . . . 0 to 99%

Force fail on min life . . . . . . . . . . . Select to enable an automatic crystal fail

upon reaching the minimum crystal life input (refer to section 3.2.1.1 on page 3-8).

# Samples . . . . . . . . . . . . . . . . . . . . 1 to 50

Good Rate Tolerance . . . . . . . . . . . 0 to 50%

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4.3.3 System Tab

Use the spin box to select parameter values (see Figure 4-5).

Figure 4-5 System tab

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NOTE: Right-clicking on a value or parameter and then clicking Description and

Tip will display additional information about that value or parameter.

4.3.3.1 Setup parameters Pane

Sensor setup. . . . . . . . . . . . . . . . . . Main parameter that affects the

STM-2XM Operating Manual

choices/modes available (see Table 4-1

Table 4-1 Sensor setup parameter

Sensor Setup Available modes Rate sampling

capable

1:Single

unshuttered

2:Single shuttered Simple Yes No

3:Dual w/single

shutter

4:Dual unshuttered Simple, Averaging,

5:Dual w/dual

shutters

Simple No No

Simple Yes Yes

No If mode is

Alloy, Independent

Simple, Averaging,

Alloy, Independent

Yes If mode is

Backup capable

Simple

Substrate shutter setup . . . . . . . . . The parameter that describes the shutter

assembly of the substrate(s) (see Table 4-2).

Table 4-2 Substrate shutter setup parameters

Substrate shutter

setup

None N

CH1: Substrate Only for film on Channel 1

Shutter Delay

Thick hold

CH2: Substrate Only for film on Channel 2

Shared substrate Only allows shutter delay for

one film at a time

Dual substrate Allows dual shutter delay

(alloy shutter delay)

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Tooling and Weights

Tooling X1:S1 . . . . . . . . . . . . . . . . . The ratio between substrate thickness using

Source 1 and Sensor 1 thickness (see

section 7.3, Determining Tooling, on page 7-2).

Tooling X2: S1 . . . . . . . . . . . . . . . . The ratio between substrate thickness using

Source 1 and Sensor 2 thickness (see

section 7.3, Determining Tooling, on page 7-2).

NOTE: For independent chambers, set this

value to zero.

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STM-2XM Operating Manual

Tooling X1:S2 . . . . . . . . . . . . . . . . . The ratio between substrate thickness using

Source 2 and Sensor 1 thickness (see

section 7.3, Determining Tooling, on page 7-2).

NOTE: For independent chambers, set this

value to zero.

Tooling X2:S2 . . . . . . . . . . . . . . . . . The ratio between substrate thickness using

Source 2 and Sensor 2 thickness (see

section 7.3, Determining Tooling, on page 7-2).

Weight Ratio . . . . . . . . . . . . . . . . . . Available only in spatial averaging mode.

Analog outputs

Analog output mode . . . . . . . . . . . 0: Thickness, 1: Mass

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STM-2XM Operating Manual

Analog output 1 to 4 function . . . . Determines the function of each of the

analog outputs (refer to section 2.2.3 on

page 2-5 for details on wiring analog

outputs). (See Table 4-3.)

Table 4-3 Analog output functions

Setting Description

0: Zero volts Output is disabled

1: +10 V Fixed +10 V Fixed

2: -10 V Fixed -10 V Fixed

3: Computer controlled Output is computer set value

4: Rate Deviation, Channel 1, 1000 Å/S Rate Deviation, Channel 1, 1000 Å/s

5: Rate Deviation, Channel 1, 10 Å/S Rate Deviation, Channel 1, 10 Å/s

6: Rate, Channel 1, 1000 Å/S Rate, Channel 1, 1000 Å/s

7: Rate, Channel 1, 10 Å/S Rate, Channel 1, 10 Å/s

8: Thickness, Channel 1, 999 Å Thickness Recorder, Channel 1, 999 Å

9: Thickness, Channel 1, 99.9 Å Thickness Recorder, Channel 1, 99.9 Å

10: Rate Deviation, Channel 2, 1000 Å/S Rate Deviation, Channel 2, 1000 Å/s

11: Rate Deviation, Channel 2, 10 Å/S Rate Deviation, Channel 2, 10 Å/s

12: Rate, Channel 2, 1000 Å/S Rate, Channel 2, 1000 Å/s

13: Rate, Channel 2, 10 Å/S Rate, Channel 2, 10 Å/s

14: Thickness, Channel 2, 999 Å Thickness Recorder, Channel 2, 999 Å

15: Thickness, Channel 2, 99.9 Å Thickness Recorder, Channel 2, 99.9 Å

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STM-2XM Operating Manual

Digital (relay) outputs

Relay 1 to 8 function . . . . . . . . . . . Determines the function of each of the digital

(relay) outputs (refer to section 2.2.2 on page

2-4 for details on wiring digital outputs). (See Table 4-4.)

Table 4-4 Relay functions

Setting Decription

0: Forced OFF Relay is inactive

1: Forced ON Relay is always active

2: Computer controlled Relay is controlled with remote communications

3: Front panel buttons, top Relay is toggled using Sensor 1 OPEN/CLOSE buttons

4: Front panel buttons, bottom Relay is toggled using Sensor 2 OPEN/CLOSE buttons

5: Channel 1 source shutter Relay activates Channel 1 source shutter

6: Channel 2 source shutter Relay activates Channel 2 source shutter

7: Channel 1 substrate shutter Relay activates Channel 1 substrate shutter

8: Channel 2 substrate shutter Relay activates Channel 2 substrate shutter

9: Sensor 1 (X1) active Relay activates Sensor 1 shutter

10: Sensor 2 (X2) active Relay activates Sensor 2 shutter

11: Sensor 1 (X1) failed Relay activates when Sensor 1 fails

12: Sensor 2 (X2) failed Relay activates when Sensor 2 fails

13: Channel 1 setpoint time Relay activates when Channel 1 setpoint time has elapsed

14: Channel 2 setpoint time Relay activates when Channel 2 setpoint time has elapsed

15: Channel 1 setpoint thick Relay activates when Channel 1 setpoint thickness has been

reached

16: Channel 2 setpoint thick Relay activates when Channel 2 setpoint thickness has been

reached

17: Channel 1 good rate Relay activates when Channel 1 rate is steady and within tolerance

18: Channel 2 good rate Relay activates when Channel 2 rate is steady and within tolerance

19: Complement of #9 Relay is Normally Closed and opens to use Sensor 1

20: Complement of #10 Relay is Normally Closed and opens to use Sensor 2

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STM-2XM Operating Manual

Digital inputs

CH1/CH2 input 1 to 4 function. . . . Determines the function of each of the digital

(relay) outputs (refer to section 2.2.4 on page

2-6 for details on wiring remote inputs). (See Table 4-5.)

Table 4-5 Input functions

Setting Description

0: Input disabled Input is ignored

1: Thickness zero Zero accumulated thickness

2: Open as if from front panel Open source shutter and in deposit mode

3: Close as if from front panel Closed source shutter and in monitor mode

4: Select Sensor 1/ Sensor 2 (backup mode) Switch active crystal

5: Trigger final thickness Source final thickness

6: Trigger final thicknesses (alloy mode) All channels final thickness (alloy mode)

7: Sync start channels (alloy mode) Open substrate shutter and sync start

channels (alloy mode)

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4.3.3.2 System parameters Pane

Main system settings

System Mode . . . . . . . . . . . . . . . . . Sets STM-2XM to operate in a certain mode

Mode Action Mode Action

Test Mode . . . . . . . . . . . . . . . . . . . . Select to enable Test mode where sensor

Active Channel/Source . . . . . . . . . CH1, CH2

(refer to section 3.3 on page 3-17). (See

Table 4-6.

0 Simple, Sensor X1 active 3 Averaging

1 Simple, Sensor X2 active 4 Alloying

2 Sensor backup 5 Independent

)

Table 4-6 System mode

readings are simulated. NOTE: If STM-2XM is reset, test mode is

turned off automatically.

Selects where the analog and digital outputs and inputs are connected.

Display Mode . . . . . . . . . . . . . . . . . Displays thickness in kiloangstroms (kÅ) or

mass in

µg/cm3).

(

micrograms per square centimeter

Chart settings

Plot type . . . . . . . . . . . . . . . . . . . . . Available in single film modes.

Displays the graph on the Runtime screen as No plot, Rate Deviation, Rate, or Thickness/Mass.

Plot time scale . . . . . . . . . . . . . . . . Sets the horizontal axis size. Defines the

amount of time covered by the plot before it is overwritten.

Screen + sound

LCD Contrast . . . . . . . . . . . . . . . . . 10 to 85

Adjusts the appearance of the screen.

LCD Brightness . . . . . . . . . . . . . . . 1 to 99

Adjusts the appearance of the screen.

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Beeper on? . . . . . . . . . . . . . . . . . . . Select to enable a sound when a front panel

button is pressed.

4.3.4 Save/Load file Tab

Save a parameter file as *.2XM or load a parameter file from this tab (see Figure

4-6).

Figure 4-6 Save/Load file tab

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NOTE: Right-clicking on a value or parameter and clicking Description and Tip

will display more information about that value or parameter.

Film Selection Control . . . . . . . . . . A comma separated list of pages or ranges to

Save/Load. Type "all" to Save/Load all pages or ranges of parameters.

Setup/System Params . . . . . . . . . . Select to enable to Save/Load setup and

system parameters in addition to film parameters.

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Open . . . . . . . . . . . . . . . . . . . . . . . . Click to browse and select the location of a

Save. . . . . . . . . . . . . . . . . . . . . . . . . Click to browse and select the location to

Message . . . . . . . . . . . . . . . . . . . . . Displays error messages or comments

4.3.5 Save/Load instrument Tab

This tab is used to upload a configuration file from STM-2XM into the STM-2XM software. It will also download the configuration to STM-2XM (see Figure 4-7).

Figure 4-7 Save/Load instrument tab

file to open.

save the current process and system configuration.

regarding the saving or loading of process and system configuration files.

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STM-2XM Operating Manual

NOTE: Right-clicking on a value or parameter and then clicking Description and

Tip will display additional information about that value or parameter.

Film Selection Control . . . . . . . . . . A comma separated list of pages or ranges to

Save/Load. Type "all" to Save/Load all pages or ranges of parameters.

Setup/System Params . . . . . . . . . . Select to enable to Save/Load setup and

system parameters in addition to film parameters.

Read from 2XM . . . . . . . . . . . . . . . . Click to upload a configuration file from

STM-2XM into the software.

Write to 2XM . . . . . . . . . . . . . . . . . . Click to download the configuration

parameters from the software and into STM-2XM.

Message . . . . . . . . . . . . . . . . . . . . . Displays error messages or comments

regarding the saving or loading of process and system configuration files.

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4.3.6 About Tab

Displays copyright, version history, and software version number (see Figure 4-8).

Figure 4-8 About tab

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5.1 Introduction

123456

RS-232/485

TAB

Chapter 5 describes the Sycon Protocol and the Sycon Multi Drop Protocol (SMDP).

5.2 Communications Connections

STM-2XM interfaces to a computer using RS-232 through the SMDP cable provided in the ship kit, PN 783-506-000-P1.

5.2.1 RS-232/RS-485 Connector

STM-2XM uses RS-232 and RS-485 for serial communications. Both communication ports are accessed through the RS-232/485 connector. The RS-232/485 connector location and pin numbering is shown in Figure 5-1.

STM-2XM Operating Manual

Chapter 5

Communications

Figure 5-1 Rear panel

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5.2.2 RS-232 Point-to-Point Mode

STM-2XM can be set to RS-232 point-to-point mode for a single host-slave connection by selecting SMDP address 16 (0x10). Point-to-point mode can be set to one of three baud rates (high-115200, medium-38400, low-9600) via the Comm Protocol menu accessed from the System Settings menu (refer to section 3.2.1.2

on page 3-10). This supports a three wire (transmit, receive, common ground)

interface that can be directly connected to most RS-232 ports of a computer or controller. The protocol is standard 10 bit (1 start bit, 8 data bits, 1 stop bit) (see

section 5.5 on page 5-4).

5.2.3 RS-485 TTL Differential Signaling Mode

RS-485 TTL differential signaling mode is selected by SMDP address values 17 through 254. In TTL differential signaling mode, two wires are time-shared (half-duplex) between a master and 1 to N slaves. Slaves monitor the state of the A/B differential signals, looking for the master to a frame (start-data-stop-start-data-stop-etc). When a slave receives a frame that is addressed for it (address byte value 17 to 254), the slave will drive the A/B wire pair differentially with its own reply frame, which the master (and all other slaves) will see. Since the reply has an address byte embedded in it, other slaves will ignore the reply. The host will decode and verify (via checksum) the reply. If acceptable, the reply will be used by the master.

The RS-232 pin assignments for the PN 783-506-000 cable (see Figure 5-2) are Pin 2 (TXD), Pin 3 (RXD), and Pin 5 (Signal GND). The cable wiring is straight-through (not null modem).

When using the PN 783-560-000 cable for RS-485 communication, the pin assignments are Pin 2 - Green (inverting signal), Pin 3 - Red (non-inverting signal), and Pin 5 (Signal GND). The RS-485 / TIA-485 standard does not specify pin assignments, so a modification may be needed at the cable end connected to the RS-485 card. Refer to the RS-485 card operating manual to determine which pins are inverting and non-inverting.

NOTE: If the inverting and non-inverting signal connections to the RS-485 card are

reversed, the RS-485 link will not communicate; however, STM-2XM and the RS-485 card will not be damaged.

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PIN 2 - GREEN (RS-232 TXD) [RS-485 Inverting Signal]

PIN 3 - RED (RS-232 RXD) [RS-485 Non-inverting Signal]

PIN 5 - ORANGE (Signal GND) [Signal GND]

PN 783-506-000

RS-232 Cable

Figure 5-2 PN 783-506-000 cable for RS-485

The RS-485 communications interface must be wired properly with the same baud rate used for all instruments and a unique SMDP address used for each connected instrument for communication to occur. A message will not be acknowledged, and the software will timeout if any of these conditions are not met.

5.3 Electrical

The STM-2XM SMDP interface is two-wire RS-485 providing a single master, multi-slave, half-duplex network. STM-2XM can also implement this protocol over an RS-232 interface. This allows STM-2XM to be used for RS-232 or RS-485 networks and makes an upgrade path from point-to-point.

In point-to-point RS-232 mode, the transmit and receive data lines are converted to logic levels with a standard RS-232 transceiver.

In RS-485 bus mode, a two-wire bus uses lines designated as inverting and non-inverting and carries complementary Transistor-Transistor Logic (TTL) level differential signals, time-shared (half-duplex) for messages to and from the master. When the line is idle, the non-inverting signal line is at a TTL high.

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5.3.1 RS-485 Line Signal

The first bit, a start bit, is a data zero value, with the non-inverting signal line going to a logic low (<1 volt). The opposite differential signal (inverting RS-485) goes to a logic high (>2 volts) during the same start bit time.

NOTE: After the start bit, the eight data bits are presented in order from least

significant bit (D0) through most significant bit (D7), and then followed with a stop bit (logic 1 value).

The values of the ASCII code bits as 1 or 0 are represented as normal logic (1 is high TTL, 0 is low TTL) on the non-inverting RS-485 line.

For example, the opening protocol character STX (ASCII 0x02) is transmitted on the non-inverting RS-485 wire START0-0-1-0-0-0-0-0-0-STOP1. This can be examined on an oscilloscope.

5.3.2 Bit Time

At 115200 baud, for example, a bit time is 8.68 microseconds (s). The start and LSB zero values together would hold the line low for 2*8.68 the D1 bit value of one would take the line high for 8.68

s or 17.36 s. Then

s.

The remainder of the frame data bits are a zero value, until the final stop bit one value returns the line to the Idle / 1 / Marking state. At the end of the master transmission, the line driver for the master enters a high-impedance, inactive state, so that the slave can reply over the same two wires by sending back a similarly encoded frame. This master/slave, command/reply interaction is at the heart of the protocol.

5.4 Bauds

Sycon Protocol must be 9600 baud.

All STM-2XM on the same network must have the same baud rate.

5.5 Message Format

5.5.1 Sycon Protocol

The general format for sending and receiving commands using Sycon Protocol with STM-2XM uses a start character, a length, data, and a checksum.

NOTE: Each field in angle brackets (< >) is a byte, and is not optional. Fields in

regular brackets ([ ]) are optional. Ellipses (...) mean one or more of the previous.

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5.5.1.1 Command Format

STX . . . . . . . . . . . . . . . . . . . . . . . . . Start of text character (hexadecimal 02).

DATA LENGTH . . . . . . . . . . . . . . . . ASCII character from SOH (1 decimal)

STM-2XM Operating Manual

If a different character is received, it is discarded.

through P (80 decimal) and indicates the number of data characters in the message.

The data length is the count of message bytes following the data length byte plus one to designate the checksum termination. The count of message bytes can be any valid 8 bit decimal, from 0 (hexadecimal 00) through 255 (hexadecimal FF).

STM-2XM uses this number to determine where the end of the command is. If a mismatch between this number and the actual number of data characters in the message occurs, one of the following will ensue:

 If the data length number is low,

STM-2XM will terminate the command prematurely. The checksum will not match. It will not respond in any way.

 If the data length number is high,

STM-2XM will be waiting for more characters than actually contained in the message.

NOTE: In order to recover from either error,

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the host computer must have a time-out/retry capability built into the software. There is a maximum of 80 data characters allowed in any communications message, although most messages are short. The length of commands and replies depend on command specifics. This does not include any packet formatting characters.

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STM-2XM Operating Manual

DATA . . . . . . . . . . . . . . . . . . . . . . . . 1 to 80 characters of data (see section 5.8 on

CKSUM . . . . . . . . . . . . . . . . . . . . . . Checksum character for the message

5.5.2 Sycon Multi-Drop Protocol (SMDP)

SMDP is a byte-packet, binary protocol. All eight bits of the data of a byte/character are used. Standard asynchronous serial conventions apply. The link must be configured for one start bit, eight data bits, and one or more stop bits. The logic polarity and bit order adopt the standard used for asynchronous serial communications (refer to section 5.3.1). A packet begins with STX (ASCII 0x02) and ends with CR (carriage return, 0x0D).

page 5-17 for data commands).

NOTE: STX characters are not allowed in

the data field.

This is the modulo-256 checksum of data bytes only. The checksum can be any valid 8 bit decimal, from 0 (hexadecimal 00) through 255 (hexadecimal FF) depending on the data field contents. If this does not match the actual checksum of the data. STM-2XM will not respond to the command.

The SMDP specification provides several common, mandated command codes. STM-2XM responds to these common messages. For example, the reset command will cause STM-2XM to reboot, as though power was cycled. This will set STM-2XM into a known state. Another common command queries the product type or ID. This command (0x30) will return an ASCII integer code that identifies the product type (see section 5.5.2.1.2 on page 5-10). This allows a master computer to poll a network and locate devices by their types and ensure that the proper connection and commands are used for the appropriate product.

NOTE: Each field in angle brackets (< >) is a byte, and is not optional. Fields in

regular brackets ([ ]) are optional. Ellipses (...) mean one or more of the previous.

5.5.2.1 Command Format

STX . . . . . . . . . . . . . . . . . . . . . . . . . Start of text character (hexadecimal 02)

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Multiple STX characters in a row are allowed. Data between STX characters is ignored. A single STX character initializes the receiver to receive a new message, purging any data collected since the last STX character or carriage return received.

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STM-2XM Operating Manual

ADDR . . . . . . . . . . . . . . . . . . . . . . . . One byte address field

The address (ADDR) byte identifies the SMDP address (refer to section 3.2.1.2 on

page 3-10) in order to select which device the

command/query is sent to.

NOTE: RS-485 communication limits the

number of attached devices to 32. Each connected instrument must be assigned a unique address. The slave reply repeats the address when it replies to the master, verifying the address of the instrument receiving the command.

The range of values are 10 hexadecimal to FE hexadecimal (16 to 254 decimal).

Address FF hexadecimal is reserved. It is used as an extension to indicate another byte of address information follows for products that have an address range higher than an address of FE hexadecimal.

CMD_RSP . . . . . . . . . . . . . . . . . . . . Command/Response field

When a command is sent from master to slave, the RSPF bit is zero and the RSP field (3 bits) is zero.

When a command is received from a slave to a master, CMD bits are the same as in the message that was sent (see section

5.5.2.1.2), but the RSP2 through RSP0 field

will be non-zero (indicating actual unit response status) (see section 5.5.2.1.3). The

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slave will set or clear the RSPF flag bit in the reply CMD_RSP frame to indicate an unacknowledged slave reset. This bit only has meaning when a command is going from slave to master. If this bit is 1, the slave has been reset since the last AckPF, acknowledge power fail, flag command was received (see Table 5-1).

Table 5-1 Command/Response

D7 D6 D5 D4 D3 D2 D1 D0

CMD3 CMD2 CMD1 CMD0 RSPF RSP2 RSP1 RSP0

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STM-2XM Operating Manual

DATA . . . . . . . . . . . . . . . . . . . . . . . . Optional data

STX and carriage return characters are not allowed in the data field.

To send a data byte valued as hexadecimal 02, send the protocol escape character (hexadecimal 07) followed by zero (hexadecimal 30).

To send a data byte valued at hexadecimal 0D, send the protocol escape character (hexadecimal 07) followed by one (hexadecimal 31).

To send a data value of hexadecimal 07, send the protocol escape character followed by two (hexadecimal 32).

The protocol escape character cannot be sent as a single byte, but can only be sent as the first byte of a pair, followed by an ASCII 0, 1, or 2.

If the protocol escape character is seen but is not followed by an ASCII 0, 1, or 2, the command is invalid and is ignored.

CKSUM1,2 . . . . . . . . . . . . . . . . . . . . Checksum characters for the message

This is the mod-256 checksum of the command binary message data. The checksum does not include STX and carriage return, and it is calculated before escape character byte stuffing (see section

5.5.2.1.1).

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5.5.2.1.1 Checksum

CAUTION

 Compute the mod 256 checksum of ADDR, CMD_RSP and DATA fields, before

byte stuffing with escape characters. This is the logical content (payload) of the command.

 CKSUM1 is the upper (most significant) four bits of the checksum (read as a

nibble, 0 through 15, or right justified) plus hexadecimal 30 (ASCII zero). This yields an ASCII character from zero (hexadecimal 30) to ? (hexadecimal 3f).

 CKSUM2 is the lower (least significant) four bits of the checksum plus

hexadecimal 30 (ASCII zero). This yields an ASCII character from zero (hexadecimal 30) to ? (hexadecimal 3f).

NOTE: If the checksum of the command is invalid (in form or value), the packet

STM-2XM Operating Manual

is deemed invalid and will be ignored.

Invalid commands (bad checksum, too short, corrupt data, bad escape sequences) will be ignored by slaves (and masters). No response will be sent by the slave.

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5.5.2.1.2 Command Packet Format

Where <CMD> is:

1 BOOT_API Prefix for commands exclusively used to

2 Reserved Reserved for future use in protocol stack. 3 Prod_id Product identifier, returned as decimal string.

communicate with a sandal-loader/bootloader parser running on a target platform. Non-bootloader applications will consider this to be invalid (Err_Inv_Cmd). Bootloader parser agent will initially only respond to this command prefix, and will be unresponsive (return no reply) to any others. Once accessed through this API, bootloader parser can be commanded to open up to other CMD code values.

NOTE: The value for STM-2XM is 18 decimal. 4 Version Request slave to return software version string. 5 Reset Request slave to reset/reboot. 6 AckPF Request slave to acknowledge power failure

flag and clear RSPF bit. 7PROTV Request slave to return protocol stack version

as decimal string. 8 Product_Specific Application API prefix to precede STM-2XM

commands (see section 5.8 on page 5-17).

NOTE: SMDP will respond to commands in the range of 1 through 7. Commands

2 through 7 are handled in the protocol, at the protocol layer. Applications are not to use commands 2 through 7 except to implement the protocol specification.

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5.5.2.1.3 Response Packet Format

NOTE: In the CMD_RSP byte, the CMD bits are unchanged from the master, but

the RSP bits are filled in according to the status of the slave.

Where <RSP> is:

1OK Command understood and executed. 2 Err_Inv_cmd Illegal command (CMD code not valid). 3 Err_syntax Syntax error (too many bytes in data field, not

4 Err_range Data range error. 5 Err_inh Inhibited. 6 Err_obso Obsolete command. No action taken.

5.5.3 Optional Serial Command Mode

SMDP (version 3 and greater) allows for a serial number in the command to associate a command from the master with the correct response. This detects errors in serial communications ports where commands are queued and sent out of order. The protocol structure is nearly identical to section 5.5.2, Sycon

Multi-Drop Protocol (SMDP), on page 5-6, except:

STM-2XM Operating Manual

enough bytes).

 A serial number byte must be placed before the checksum bytes. This must be

a value greater than or equal to 0x10 (16), otherwise it could be mistaken as a framing or escape character byte (see section 5.5.3.1). This byte is summed as a part of the packet payload in computing the packet checksum value.

 The checksum character base must be hexadecimal 40 (@), instead of

hexadecimal 30 (0) to inform the slave that it is receiving a packet with the extra SRLNO field postamble. This makes the last two characters of the command (the checksums) range from @ (0x40) through the letter, O (0x4f).

 For a response, the slave places the corresponding SRLNO byte into its

response packet just before the two reply packet checksum characters, also 0x40 based.

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In order for this serial command mode to be effective, the master should generate a new SRLNO value for each command that it sends (modulo 255, and greater than 0x10). This allows for 240 unique serial number values before repeating. The value could be an incrementing tag that rolls over from 255 to 16 with the understanding that there would never be 240 outstanding messages. Alternatively, the tag could have a unique value or range of values for each line of communication to the product at a specific address. This will allow the responses to be received by the proper line of communication.

NOTE: When an SMDP response packet is received by the master, verify the

SRLNO value and use it to associate it with the source of the command/query. This will prevent out-of-sequence replies from being misinterpreted and invalid results being generated.

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STM-2XM Operating Manual

5.5.3.1 Optional Serial Command Format

SRLNO. . . . . . . . . . . . . . . . . . . . . . . Serial Number

ACKSM1, 2 . . . . . . . . . . . . . . . . . . . Alternate 0x40 based checksum characters

NOTE: Refer to section 5.5.2.1 on page 5-6 for additional information identifying

the bytes in this command string.

5.5.3.2 Additional Option to Serial Command

Opcode 0x10 BOOT_API is a reserved SMDP opcode. This divides the communication response of STM-2XM into two sections, bootloader and application. A platform that is in the bootloader operational mode will only respond to BOOT_API opcode commands, and will ignore all others making the instrument invisible to standard communications interrogations.

Associates a command from the master with the correct response. The value must be greater than or equal to 0x10 (16) in order to not be mistaken as a framing or escape character byte.

This has a range of values from @ (0x40) through the letter, O (0x4f).

Opcode 0x10 BOOT_API hides platforms waiting in bootloader mode from general network polls and interrogations. Special bootloader aware host code must use the BOOT_API hooks to open the platform and make it suitable for erasing and downloading new applications code, scanning for existing applications, and launching existing applications.

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5.6 Communication Library

SMDP control is an ActiveX library that implements SMDP.

SMDP is built as an out-of-process server, and automatically manages multiple sessions with multiple programs. All programs that use SMDP control can share the communication link without interference or crosstalk. It is possible to have multiple programs communicating with the same instrument, transparent to the user.

Using SMDP control is a standard ActiveX control for Windows computers.

NOTE: Since all programming environments have different ways to integrate

ActiveX controls, linking to the control will not be covered.

Most programming environments can use ActiveX controls (i.e., Delphi, Visual Studio (vb,vc++, etc), LabVIEW, and many others). SMDP_SVR is the name of the ActiveX control library for all programming environments.

An instance of the control should be initiated for each instrument being controlled and communicated with remotely, the parameters set accordingly, and DoTransaction called to do the communications.

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SMDP control handles multiple instances on the same communications port and multiple instances for the same instrument.

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5.6.1 Methods

Open . . . . . . . . . . . . . . . . . . . . . . . . (file name)

DoTransaction . . . . . . . . . . . . . . . . (addr, SmdpCmd, Msg, Rsp, resetflag)

STM-2XM Operating Manual

Attempts to acquire communications port and allocate resources. Open does not need to be called; if the port was not opened it will automatically be opened when the DoTransaction function is called.

Initiates communication with STM-2XM, and waits for a reply (or timeout) before returning.

 In: addr is the SMDP address of target

instrument.

 In: SmdpCmd is the SMDP command

opcode enumeration constant. The value to use is based on the CMD_RSP most significant nibble value, less one. For example, a hexadecimal 60 AckPF command will pass a value of 5 as the SmdpCmd code.

NOTE: All command codes for

DoTransaction SmdpCmd argument are one less than the CMD3 to CMD0 bit field used in the SMDP packet (refer to Table 5-1 on page

5-7).

 In: Msg is the message to send, may be

a string or byte array.

 Out: Rsp is string response from

instrument.

 Out: Boolean resetflag is true if

instrument has been reset since the flag was acknowledged last.

Close() . . . . . . . . . . . . . . . . . . . . . . . Clears resources associated with the

instance. Will also close the communications port if there are no instances communicating on the port.

NOTE: In most cases it is not necessary to

call this function. The programming environment will unload the control when it is finished, and the control automatically closes the resources when it is unloaded.

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5.6.2 Communication Properties

ComPortNo . . . . . . . . . . . . . . . . . . . The communications port to use for

Baud . . . . . . . . . . . . . . . . . . . . . . . . The baud rate. Valid baud rates are 9600,

Protocol. . . . . . . . . . . . . . . . . . . . . . The protocol to use (1 - Sycon or 0 - SMDP).

DoPacketStamp . . . . . . . . . . . . . . . Set true to use SMDP-II protocol.

TimeoutMS . . . . . . . . . . . . . . . . . . . Sets the number of milliseconds to wait for

STM-2XM Operating Manual

communication to STM-2XM.

38400, or 115200 baud.

NOTE: The value of 0 is used to select

SMDP and the value of 1 is used to select Sycon protocol to interface to an open serial channel connection.

NOTE: This should always be true.

the instrument to respond before the control displays a timeout error during DoTransaction(). The valid range is 150 to 20000 milliseconds.

LastTimeTransSec . . . . . . . . . . . . . The amount of time the last DoTransaction()

call took to complete, in floating point (real) seconds. Typical values are in the range of

0.002 to 0.014 seconds.

NOTE: Some behaviors take longer to

execute.

5.6.3 Other Properties

Numinstances. . . . . . . . . . . . . . . . . The number of instances of the control or

number of users on the communication server.

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Build . . . . . . . . . . . . . . . . . . . . . . . . The build number of the control (unique

version identifier).

These properties are read only and return the same value across all instances.

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5.7 Windows/SMDP Server Implementation

SMDP server on Windows message timeout is typically 150 milliseconds. That is, after the host sends a command, it waits 150 milliseconds for a reply. If no complete reply is returned from STM-2XM in that time, the message is considered lost. This could indicate the following:

 STM-2XM is offline

 The cable is disconnected

 The baud rate is invalid/mismatched

 There is noise corrupting the packet/checksum integrity

After 150 milliseconds have elapsed, the host can try again.

NOTE: Once a valid connection to STM-2XM is made, the command/response

exchange will proceed at the fastest speed, sending a new command as soon as the prior answer has come back to the host.

If there is a loss of a packet due to noise, software error, or power loss to STM-2XM, the loss will be detected when a valid reply packet is not returned within the 150 millisecond timeout.

Retries or resending commands can continue to take place until a valid reply is returned once the 150 millisecond timeout has been reached.

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5.8 Communications Commands

STM-2XM uses command prefix 0x80 to introduce command sequences. The data payload that follows 0x80 are standard ASCII character sequences. This vocabulary is documented in section 5.5.2.1, Command Format, on page 5-6.

Common commands have the same initial character sequences, and are distinguished by variable numeric arguments which further specify the intended action or target of the command/query.

Therefore, only the data payload content which distinguishes these commands are found in this section.

All responses conform to the SMDP specification (refer to section 5.5.2 on page

5-6) with the lower four bits of the returned <CMD_RSP> byte being a non-zero

value in the range of 1 to 15. The upper 4 bits are the same as the host command group (CmdOpcode_xxx), 3 to 8. The lower three bits have the value 1 to 7 as defined in section 5.5.2.1.3 on page 5-11. This value indicates whether the receiver could process the query or found fault with it. If the address is not matched with a slave, the checksum of the frame fails, or the command is otherwise improper, no response is returned by the slave.

STM-2XM Operating Manual

The fourth bit (D3, 8 weight) is a power fail flag bit, and the slave replies with this bit set when the platform has been reset, until such a time as the master sends one of the following:

 Acknowledge-power-fail command (CmdOpcode_ACKPF 0x60), low level

SMDP message

 USRAPI_ackPfail (?) command, application specific command (0x80)

The message from the master clears the power fail flag such that the status bit, D3, of all subsequent replies is now zero. This allows the master to detect at the earliest transaction (first valid communications after reboot/reset) that the slave device has been reset and needs to be re-synchronized. This might be considered a fatal error (power supply was reset and system state harmed), a soft error which can be recovered from, or a non-issue requiring no intervention.

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5.8.1 Command: ?

Command Type . . . . . . . . . . . . . . . . Acknowledge

Syntax . . . . . . . . . . . . . . . . . . . . . . . ?

Description . . . . . . . . . . . . . . . . . . . . Clears the power fail status flag.

Command Structure . . . . . . . . . . . . . USRAPI_ackPfail

5.8.2 Command: @

Command Type . . . . . . . . . . . . . . . . Query

Syntax . . . . . . . . . . . . . . . . . . . . . . . @

Description . . . . . . . . . . . . . . . . . Queries the version.

Reply Example . . . . . . . . . . . . . . X2MA1.3

Syntax . . . . . . . . . . . . . . . . . . . . . . . @1

Description . . . . . . . . . . . . . . . . . Display FRAM database covenant code.

Reply Example . . . . . . . . . . . . . . 1P6 (value dependent on firmware version)

Syntax . . . . . . . . . . . . . . . . . . . . . . . @2

Description . . . . . . . . . . . . . . . . . Reboot via watchdog.

Command Structure . . . . . . . . . . . . . USRAPI_atQuery (can be followed by a 1 or

5.8.3 Command: C

Command Type . . . . . . . . . . . . . . . . Query

Syntax . . . . . . . . . . . . . . . . . . . . . . . CID,inx

Description . . . . . . . . . . . . . . . . . . . . Query decimal IDHash/Index to allow ASCII

Sent Example. . . . . . . . . . . . . . . . . . C5555,0

Reply Example . . . . . . . . . . . . . . . . . 18

Command Structure . . . . . . . . . . . . . USRAPI_RD_IEC_C

2 modifier character or entered by itself)

string rather than binary packet. ID number is a Hash index used to identify data items (see

Table 5-2). The index is typically 0.

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Table 5-2 Common hash values and the queried result

Number Name Description Response

5555 PROD_ID Standard product identifier 18

6857 CRC Result 16 bit CRC signature of the

STM-2XM flash memory, used to verify that the proper code has been installed at the factory. The particular value for a combination of a particular version of bootloader and application image is documented in a database registry used for manufacturing support. This value is read only.

11021 CODE_SUM The code checksum from

bootloader prefix block. This sum details the specific version of the application code that is installed into the flash memory. By comparing this value with a list of known software releases, the specific version can be determined. This value is algorithmically generated based on the actual code pattern, so it will change with any firmware change, even if the embedded version reply string was not updated. This value is read only.

CRC checksum of the CPU flash memory, with 65536 added to it

65536 to 131071

36581 PROD_BTYPE Product build type, copied into

dictionary from FRAM configuration block. This value defines the hardware platform revision and/or configuration. This value is read only.

53184 PROD_SRNO The internal product serial

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number assigned to the motherboard in manufacturing. This value is read only.

0 Indicates that the FRAM memory has lost the information

1 to 65535

Returns an integer numeric value

A value of 0 indicates a FRAM memory failure.

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5.8.4 Command: E/F

Command Type . . . . . . . . . . . . . . . . Query

Command Structure . . . . . . . . . . . . . CSID_class Pid SYSTEM GROUP

Syntax . . . . . . . . . . . . . . . . . . . . . . . En

Description . . . . . . . . . . . . . . . . . . . . Queries System Settings and Setup

Command Type . . . . . . . . . . . . . . . . Update

Syntax . . . . . . . . . . . . . . . . . . . . . . . Fn=value

Description . . . . . . . . . . . . . . . . . . . . Updates System Settings and Setup

Parameters. . . . . . . . . . . . . . . . . . . . (See Table 5-3.)

Table 5-3 E/F command

# Command Structure Comments Values

parameters.

1 CSID_SUP_SNSR Sensor has largest effect. It

should be written first to set top level.

2 CSID_SUP_TOOLX1S1 Crystal 1 tooling versus

source/substrate on Channel 1

3 CSID_SUP_TOOLX2S1 Crystal 2 tooling versus

source/substrate on Channel 1

4 CSID_SUP_TOOLX1S2 Crystal 1 tooling versus

source/substrate on Channel 2

5 CSID_SUP_TOOLX2S2 Crystal 2 tooling versus

source/substrate on Channel 2

6 CSID_SUP_WHTRATIO Relative weight ratio of

Channel 2 to Channel 1 (averaging only)

NOTE: Available when

dual open sensors mode is selected.

#sensors:#shutters

0 - 1:0 - Single Open 1 - 1:1 - Single w/Shutter 2 - 2:1 - Dual 1 Shutter 3 - 2:0 - Dual Open 4 - 2:2 - Dual 2 Shutter

Tooling 10.0 to 999.9%

Default 100.0

Tooling 10.0 to 999.9%

Default 100.0

Tooling 10.0 to 999.9%

Default 100.0

Tooling 10.0 to 999.9%

Default 100.0

Weight Ratio 0 to 100%

Default 50%

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7 CSID_SUP_SHTR Substrate shutter setup

supshtr_class 0-4

0 - None 1 - Channel 1 2 - Channel 2 3 - Shared 4 - Dual

INFICON STM-2XM User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Trademarks

Disclaimer

Copyright

Warranty

Table Of Contents

1.1 Introduction

1.1.1 Related Manuals

1.2 Instrument Safety

1.2.1 Definition of Notes, Cautions and Warnings

1.2.2 General Safety Information

1.2.3 Earth Ground

1.3 How To Contact INFICON

1.3.1 Returning STM-2XM

1.4 Specifications

1.4.1 Measurement

1.4.2 Film Parameters

1.4.3 System Parameters

1.4.4 Digital I/O

1.4.5 Power

1.4.6 Operating Environment

1.4.7 Size and Weight

1.5 Unpacking and Inspection

1.6 Parts and Options Overview

1.6.1 Base Configurations

1.6.2 Accessories

1.6.3 Sensors

2.1 Installation Requirements

2.1.1 Parts Requirements

2.1.2 Ground Requirements

2.1.3 Connection to Earth Ground

2.2 Rear Panel

2.2.1 Sensors

2.2.2 Relay Outputs

2.2.3 Analog Outputs

2.2.4 Remote Inputs

2.3 Basic Vacuum System Components

2.4 Deposition System Installation

2.4.1 Sensor Head Installation

3.1 Front Panel Description

3.1.1 System Control Buttons

3.1.2 Data Entry and Programming Buttons

3.1.3 Changing a Parameter

3.1.4 Runtime Screen

3.2 Programming

3.2.1 Main Menu

3.2.1.1 Edit Film

3.2.1.2 System Settings

3.2.1.3 Setup Parameters

3.3 STM-2XM Operating Modes

3.3.1 Simple

3.3.2 Backup

3.3.3 Averaging

3.3.4 Alloy

3.3.5 Independent

3.4 Operation

3.4.1 No Shutter Delay

3.4.2 Shutter Delay

3.4.3 Test Mode

3.4.4 Rate Sampling

3.5 Film States

4.1 Introduction

4.2 Installing INFICON STM-2XM FilmMaker Software

4.2.1 Installing the Protocol Server

4.2.2 Installing INFICON STM-2XM FilmMaker Software

4.2.3 Starting INFICON STM-2XM FilmMaker Software

4.2.3.1 Starting the Software in Windows XP or Windows 7

4.2.3.2 Starting the Software in Windows 8

4.3 STM-2XM Parameter Manager

4.3.1 Main Tab

4.3.1.1 Main Setup Pane

4.3.1.2 Utilities Pane

4.3.2 Films Tab

4.3.3 System Tab

4.3.3.1 Setup parameters Pane

4.3.3.2 System parameters Pane

4.3.4 Save/Load file Tab