INFICON STM-2 User Manual
OPERATING MANUAL
STM-2
Rate and Thickness Monitor
PN 074-613-P1A
STM-2 Operating ManualPN
074-613-P1ATOC - #1 - #
www.inficon.com reachus@inficon.com
©2014 INFICON
®
Title P
age
OPERATING MANUAL
STM-2
Rate and Thickness Monitor
PN 074-613-P1A
Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
Windows® and Microsoft® are registered trademarks of Microsoft Corporation.
Inconel® is a registered trademark of Inco Alloys International, Huntington, WV.
LabVIEW
Sycon Instruments
TM
is a trademark of National Instruments Corporation.
TM
is a trademark of INFICON, Inc.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2014 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.
Warranty
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
one (1) year from the date of shipment thereof by Seller. Seller's liability under this
warranty is limited to such of the above products or parts thereof as are returned,
transportation prepaid, to Seller's plant, not later than thirty (30) days after the
expiration of the period of warranty coverage in respect thereof and are found by
Seller's examination to have failed to function properly because of defective
workmanship or materials and not because of improper installation or misuse and
is limited to, at Seller's election, either (a) repairing and returning the product or
part thereof, or (b) furnishing a replacement product or part thereof, transportation
prepaid by Seller in either case. In the event Buyer discovers or learns that a
product does not conform to warranty, Buyer shall immediately notify Seller in
writing of such non-conformity, specifying in reasonable detail the nature of such
non-conformity. If Seller is not provided with such written notification, Seller shall
not be liable for any further damages which could have been avoided if Seller had
been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.
www.inficon.com reachus@inficon.com
STM-2 Operating Manual
Table Of Contents
Title Page
Trademarks
Disclaimer
Copyright
Declaration Of Conformity
Warranty
Chapter 1
Introduction and Specifications
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.1.1 Related Manuals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1
1.2 Instrument Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.2.1 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.2.2 General Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
1.3 How To Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.3.1 Returning STM-2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
1.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.4.1 Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.4.2 Operating Environment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.4.3 Size and Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.4.4 Computer Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
1.5 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
1.6 Parts and Options Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
1.6.1 Base Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.6.2 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
PN 074-613-P1A
1.6.2.1 Oscillator Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.6.2.2 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Chapter 2
2.1 Installation Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.1 Parts Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1
2.2 System Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
2.2.1 Internal Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
2.2.2 External Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.3 Switching Between Internal and External Oscillator. . . . . . . . . . . . . . . . . . . 2-4
2.4 STM-2 Indicators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-5
Installation
TOC - 1
STM-2 Operating Manual
2.4.1 Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
2.4.2 USB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
Chapter 3
STM-2 Software Operation
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 Installing INFICON STM-2 Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2.1 Installing the Protocol Server . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2.2 Installing the INFICON STM-2 Software and Device Drivers. . . . . . . . . . . . 3-2
3.2.3 Starting INFICON STM-2 Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.2.3.1 Starting the Software in Windows XP or Windows 7 . . . . . . . . . . . . . . . . . . 3-3
3.2.3.2 Starting the Software in Windows 8 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.3 STM-2 Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
3.3.1 File Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
3.3.1.1 Open Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
3.3.1.2 Save Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
3.3.1.3 Save Configuration As . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
3.3.1.4 Print . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
3.3.1.5 Screen Image to File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
3.3.2 Edit Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
3.3.2.1 Graph Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
3.3.2.1.1 X Axis & Colors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
3.3.2.1.2 Rate Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
3.3.2.1.3 Thickness Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
3.3.2.1.4 Frequency Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
3.3.2.2 Display Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
3.3.2.3 Sample Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
3.3.3 Help Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
3.3.3.1 About Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
3.3.4 STM-2 Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19
3.3.5 Rate Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
3.3.6 Thickness Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21
3.3.7 Frequency Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
Chapter 4
STM-2 LabVIEW Operation
4.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2 Installing the STM-2 LabVIEW Application. . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2.1 Installing the Protocol Server . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2.2 Installing the LabVIEW Application and Device Drivers. . . . . . . . . . . . . . . . 4-2
PN 074-613-P1A
TOC - 2
STM-2 Operating Manual
4.2.3 Starting the STM-2 LabVIEW Application. . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
4.2.3.1 Starting the Software in Windows XP or Windows 7 . . . . . . . . . . . . . . . . . . 4-3
4.2.3.2 Starting the Software in Windows 8 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3
4.3 STM-x_win32.VI Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
4.3.1 Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-6
4.3.1.1 Manual Connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-8
4.3.1.2 Simulate Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-9
4.3.2 Operate. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-10
4.3.3 Films . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12
4.3.4 Rate Graph . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14
4.3.5 Mass/Thick Graph . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15
4.3.6 Frequency Graph . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-16
4.3.7 Help/About . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-18
Chapter 5
Communication
5.1 Communication Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2 Sycon Multi-Drop Protocol (SMDP) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2.1 Command Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2.1.1 Checksum. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
5.2.1.2 Command Packet Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-5
5.2.1.3 Response Packet Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
5.2.2 Optional Serial Command Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6
5.2.2.1 Optional Serial Command Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
5.2.2.2 Additional Option to Serial Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
5.3 Communications Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
Chapter 6
Troubleshooting and Maintenance
PN 074-613-P1A
6.1 Troubleshooting Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-1
6.1.1 Indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-1
6.1.2 General STM-2 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
6.1.3 Troubleshooting Computer Communications . . . . . . . . . . . . . . . . . . . . . . . .6-7
Chapter 7
Calibration Procedures
7.1 Importance of Density, Tooling and Z-Ratio. . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.2 Determining Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-1
7.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
7.4 Laboratory Determination of Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3
TOC - 3
Chapter 8
8.1 Basics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
8.1.1 Monitor Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
8.1.2 Period Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
8.1.3 Z-match Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-6
Appendix A
A.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .A-1
STM-2 Operating Manual
Measurement and Theory
Material Table
TOC - 4
PN 074-613-P1A
1.1 Introduction
STM-2™ is a USB-powered thin film thickness and rate deposition monitor (see
Figure 1-1). STM-2 provides precise control of thickness or mass deposition
experiments using a USB connection, Windows® or LabVIEW™ software
(provided), and a Windows computer (user supplied).
The STM-2 internal oscillator allows the sensor to be located within 76.2 cm (30 in.)
of STM-2. An external oscillator, PN 783-500-013, can be used when the sensor is
located farther than 101.6 cm (40 in.) from STM-2.
STM-2 can take ten measurements per second. The measurements are shown on
a 0.01Å/s rate display. STM-2 LabVIEW software has an option for multi-layer
mode. This mode enables a Layer Stackup pane, displaying a list of process
layers. It also enables cumulative substrate thickness to be displayed on the
software (see section 4.3.1 on page 4-6).
STM-2 Operating Manual
Chapter 1
Introduction and Specifications
Figure 1-1 STM-2
PN 074-613-P1A
1.1.1 Related Manuals
Sensors are covered in separate manuals. These manuals are contained in the
Thin Film Manuals CD (PN 074-5000-G1), which is part of the ship kit.
PN 074-154—Bakeable Sensor
PN 074-156—Front Load Sensor, Single/Dual
PN 074-157—Sputtering Sensor
PN 074-609—Cool Drawer Sensor, Single/Dual
1 - 1
STM-2 Operating Manual
CAUTION
WARNING
WARNING - Risk Of Electric Shock
1.2 Instrument Safety
1.2.1 Definition of Notes, Cautions and Warnings
When using this manual, please pay attention to the notes, cautions and warnings
found throughout. For the purposes of this manual they are defined as follows:
NOTE: Pertinent information that is useful in achieving maximum STM-2 efficiency
when followed.
Failure to heed these messages could result in damage
to STM-2 or the loss of data.
Failure to heed these messages could result in personal
injury.
Dangerous voltages are present, which could result in
personal injury.
PN 074-613-P1A
1 - 2
1.2.2 General Safety Information
CAUTION
CAUTION
WARNING
STM-2 contains delicate circuitry, susceptible to
transient power line voltages. Disconnect the USB cord
whenever making any sensor connections or when the
case is open.
Refer all maintenance to qualified personnel.
STM-2 may not be suitable for use with RF sputtering
systems or other electrically noisy environments.
STM-2 Operating Manual
Failure to operate STM-2 in the manner intended by
INFICON can circumvent the safety protection provided
by the instrument and may result in personal injury.
PN 074-613-P1A
1 - 3
STM-2 Operating Manual
1.3 How To Contact INFICON
Worldwide customer support information is available under Support >> Support
Worldwide at www.inficon.com:
Sales and Customer Service
Technical Support
Repair Service
When communicating with INFICON about STM-2, please have the following
information readily available:
the Sales Order or Purchase Order number of the STM-2 purchase.
the version of STM-2 software (see section 3.3.3.1 on page 3-18 or section
4.3.7 on page 4-18).
the version of Windows operating system.
adescription of the problem.
an explanation of any corrective action that may have already been attempted.
the exact wording of any error messages that may have been received.
1.3.1 Returning STM-2
Do not return any component of STM-2 to INFICON before speaking with a
Customer Support Representative and obtaining a Return Material Authorization
(RMA) number. STM-2 will not be serviced without an RMA number.
Packages delivered to INFICON without an RMA number will be held until the
customer is contacted. This will result in delays in servicing STM-2.
If returning STM-2 with a crystal sensor or another component potentially exposed
to process materials, prior to being given an RMA number, a completed Declaration
Of Contamination (DOC) form will be required. DOC forms must be approved by
INFICON before an RMA number is issued. INFICON may require that the
component be sent to a designated decontamination facility, not to the factory.
PN 074-613-P1A
1 - 4
1.4 Specifications
Compatible Sensor. . . . . . . . . . . . . . Non-shuttered single QCM sensor
Sensor Inputs . . . . . . . . . . . . . . . . . . 1
Sensor Input . . . . . . . . . . . . . . . . . . . Female BNC
Measurement Frequency Range . . . 6.0 to 5.0 MHz (fixed)
Frequency Resolution . . . . . . . . . . . ± 0.03 Hz @ 6 MHz
Measurement Interval. . . . . . . . . . . . 0.10 s
Reference Frequency Stability . . . . . ± 2 ppm
Thickness and Rate
Resolution/Measurement . . . . . . . . . ± 0.037 Å @ tooling/density = 100/1
Thickness Display Resolution . . . . . 1 Å
Interface . . . . . . . . . . . . . . . . . . . . . . USB, 5 m (16.4 ft.) maximum length
1.4.1 Power
STM-2 Operating Manual
Fundamental frequency = 6 MHz
Rated Supply Voltage. . . . . . . . . . . . 400 mA, 5 V (dc)
USB Isolation Voltage. . . . . . . . . . . . 1000 V
USB Isolation Capacitance. . . . . . . . 300 pF typically
1.4.2 Operating Environment
Usage . . . . . . . . . . . . . . . . . . . . . . . . Indoor use only
Operating Temperature . . . . . . . . . . 0 to 50°C (32 to 122°F)
Storage Temperature . . . . . . . . . . . . -10 to 60°C (14 to 140°F)
Humidity . . . . . . . . . . . . . . . . . . . . . . Up to 85% RH, non-condensing
Altitude . . . . . . . . . . . . . . . . . . . . . . . Up to 2000 meters
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Pollution Degree. . . . . . . . . . . . . . . . 2
1.4.3 Size and Weight
Size . . . . . . . . . . . . . . . . . . . . . . . . . 11.4 x 7.6 x 2.5 cm (4.5 x 3 x 1 in.)
Weight . . . . . . . . . . . . . . . . . . . . . . . 57 g (2 oz.)
1.4.4 Computer Requirements
Operating system . . . . . . . . . . . . . . . Windows 8, Windows 7, Windows Vista,
Windows XP, or Windows 2000
USB Port(s) . . . . . . . . . . . . . . . . . . . One USB 1.1 (or later) port for each STM-2
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STM-2 Operating Manual
1.5 Unpacking and Inspection
1 Remove STM-2 from its packaging.
2 Carefully examine STM-2 for damage that may have occurred during shipping.
It is especially important to note obvious rough handling on the outside of the
container. Immediately report any damage to the carrier and to INFICON.
NOTE: Do not discard the packaging material until inventory has been taken and
installation is successful.
3 Refer to the invoice and take inventory.
4 To install STM-2, see Chapter 2, Installation.
For additional information or technical assistance, contact INFICON (refer to
section 1.3 on page 1-4).
1.6 Parts and Options Overview
1.6.1 Base Configuration
STM-2 with software and cables . . . PN STM-2
1.6.2 Accessories
5 m (16.4 ft.) USB cable. . . . . . . . . . PN 068-0506
15.2 cm (6 in.) BNC . . . . . . . . . . . . . PN 755-257-G6
1.6.2.1 Oscillator Kit
STM-2 has an internal oscillator, however, an option exists to use an external
oscillator kit to interface the sensor to the controller (see section 2.3 on page 2-4).
3 m (10 ft.) Oscillator Kit. . . . . . . . . . PN 783-500-109-10
7.6 m (25 ft.) Oscillator Kit . . . . . . . . PN 783-500-109-25
15.2 m (50 ft.) Oscillator Kit . . . . . . . PN 783-500-109-50
22.9 m (75 ft.) Oscillator Kit . . . . . . . PN 783-500-109-75
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Oscillator kits include:
These kits are designed for use with the standard in-vacuum cables ranging in
length from 15.2 cm (6 in.) to 78.1 cm (30.75 in.).
1.6.2.2 Sensors
Front Load Single Sensor. . . . . . . . . . . . PN SL-XXXXX
Cool Drawer Single Sensor . . . . . . . . . . PN CDS-XXFXX
Sputtering Sensor. . . . . . . . . . . . . . . . . . PN 750-618-G1
STM-2 Operating Manual
Oscillator. . . . . . . . . . . . . . . . . . . PN 783-500-013
15.2 cm (6 in.) BNC cable . . . . . PN 782-902-011
One of the following:
3 m (10 ft.) BNC Cable . . . . . PN 782-902-012-10
7.6 m (25 ft.) BNC Cable . . . PN 782-902-012-25
15.2 m (50 ft.) BNC Cable . . PN 782-902-012-50
22.9 m (75 ft.) BNC Cable . . PN 782-902-012-75
UHV Bakeable Sensor . . . . . . . . . . . . . . PN BK-A0F
Low Profile Singe Sensor . . . . . . . . . . . . PN 783-500-042
Low Profile Bakeable Single Sensor . . . PN 783-500-009
NOTE: Low Profile Single Sensors also have options with no cooling lines.
NOTE: "X" in part number indicates customer-selectable option,
see www.inficon.com for Sensor Datasheets.
NOTE: Multi-crystal (rotary) sensors and dual sensors should
not be used with STM-2.
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2.1 Installation Requirements
CAUTION
2.1.1 Parts Requirements
STM-2 Monitor
One crystal sensor with feedthrough
One oscillator kit for the crystal sensor
NOTE: The oscillator kit is not required when using the internal oscillator.
Quartz crystals appropriate for the application
One Windows computer meeting minimum specifications (refer to section 1.4
on page 1-5).
STM-2 Operating Manual
Chapter 2
Installation
To maintain proper STM-2 performance, use only
the provided 15.2 cm (6 in.) BNC cable to connect STM-2
or the oscillator to the crystal sensor.
The length of the in-vacuum cable (Front Load and
Sputtering sensors) or electrical conduit tube
(Cool Drawer and Bakeable sensors) must not exceed
78.1 cm (30.75 in.).
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STM-2 Operating Manual
USB
USB
Cable
BNC Cable
Maximum Length
15.2 cm (6 in.)
Substrate
Source
Sensor
Jumpers set
for internal oscillator
2.2 System Connections
STM-2 can be configured to use either an internal or external oscillator depending
on the internal jumpers. The default jumper setting is to use the internal oscillator.
2.2.1 Internal Oscillator
1 Connect the (provided) USB cable to a computer USB port and to STM-2.
2 Use the (provided) 15.2 cm (6 in.) BNC cable to connect STM-2 to the sensor
feedthrough (see Figure 2-1).
Figure 2-1 Internal oscillator
3 Install and run STM-2 Software or STM-2 LabVIEW Application (see Chapter 3
or Chapter 4).
NOTE: STM-2 Software and STM-2 LabVIEW can be installed and run on the
same computer without interference.
4 The PWR indicator on STM-2 illuminates (see section 2.4.1 on page 2-5).
5 The USB indicator on STM-2 illuminates (see section 2.4.2 on page 2-5).
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2.2.2 External Oscillator
USB
USB
Cable
BNC Cable
Maximum Length
22.9 m (75 ft.)
Substrate
Source
Sensor
Jumpers set
for external oscillator
Oscillator
783-500-013
15.2 cm (6 in.)
BNC Cable
To use an optional external oscillator, the jumpers inside STM-2 must be
repositioned (see section 2.3). The maximum BNC cable length connecting the
external oscillator and STM-2 is 22.9 m (75 ft.) (see Figure 2-2).
Figure 2-2 External oscillator
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STM-2 Operating Manual
CAUTION
CAUTION - Static Sensitive Device
2.3 Switching Between Internal and External Oscillator
Three jumpers must be repositioned inside the STM-2 case to switch between the
internal oscillator and an external oscillator.
STM-2 contains delicate circuitry, susceptible to
transient power line voltages. Disconnect the USB cord
whenever making any sensor connections or when the
case is open.
Observe proper ESD procedures when the STM-2
case is open.
Remove the two phillips screws which secure the back of the case, and remove the
back of the case.
Near the BNC connector are three jumpers on the circuit board, labeled Internal
and External. Move all three jumpers:
To Internal for internal oscillator operation (see Figure 2-3).
To External for external oscillator operation.
Figure 2-3 Jumpers set for internal oscillator operation
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2.4 STM-2 Indicators
2.4.1 Power
Illuminated . . . . . . . . . . . . . . . . . . . . STM-2 is powered up and is connected to a
Flashing fast . . . . . . . . . . . . . . . . . . . STM-2 is powered up but cannot detect a
Blinking slow
(approximately once per second) . . . STM-2 is powered up and the crystal is good,
Extinguished. . . . . . . . . . . . . . . . . . . STM-2 does not have power. Check the USB
STM-2 Operating Manual
good crystal.
The host computer has initialized STM-2 by
returning a reset status when the software
begins communication.
good crystal.
but the computer application has not
initialized STM-2. Once the computer
initializes STM-2 the indicator will illuminate
continuously (see section 6.1.1 on page 6-1).
connection, and make sure the computer is
turned on.
2.4.2 USB
The USB indicator detects communications signal traffic.
Illuminated . . . . . . . . . . . . . . . . . . . . STM-2 is connected and communicating to a
host computer. Communications
sent/received every 100 ms will cause the
indicator to be steadily illuminated.
Flashing . . . . . . . . . . . . . . . . . . . . . . STM-2 is connected and communicating to a
host computer. A flashing indicator will
correspond to the time elapsed between sent
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Extinguished. . . . . . . . . . . . . . . . . . . STM-2 is not communicating to the
NOTE: STM-x_win32 LabVIEW application software and INFICON STM-2
software will steadily illuminate the indicator due to communications
queries sent every 100 ms. User-created software may not steadily
illuminate the indicator due a longer time period elapsing between
communications queries being sent.
and received communications. A query sent
once per second will correspond to the
indicator flashing approximately once per
second.
computer.
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STM-2 Operating Manual
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STM-2 Software Operation
3.1 Introduction
INFICON STM-2 Software is capable of interfacing up to eight STM-2 instruments
to display Rate, Thickness, Frequency, and Crystal Life for the connected sensors.
STM-2 Software has independent Density, Z-Ratio, and Tooling parameters for
each STM-2 to allow for codeposition monitoring capabilities.
3.2 Installing INFICON STM-2 Software
3.2.1 Installing the Protocol Server
1 Insert the Thin Film Manuals CD into the CD drive on the computer that will
be connected to STM-2.
2 Click Windows Explorer or
File Explorer >> Computer >> (CD drive letter:) >> Common Software.
STM-2 Operating Manual
Chapter 3
3 Double click setup_smdp_svr_lv.exe. The Zip Self-Extractor window will
display.
4 Click Unzip. The SMDP Serial Protocol Server window will display.
5 On the Destination Directory pane, click Browse to select the location where
all software will be installed.
6 Click Next.
7 Read the license agreement.
8 Click I accept License Agreement(s).
9 Click Next.
10 Review the summary of information.
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11 Click Next. Installation Complete will display.
12 Click Next. The Setup Wizard pane will display.
13 Click Next. The Confirm Installation pane will display.
14 Click Next.
15 Read the license agreement.
16 Click I Agree.
17 Click Next. Installation Complete will display.
18 Click Close.
19 Click Close on the Zip Self-Extractor.
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STM-2 Operating Manual
3.2.2 Installing the INFICON STM-2 Software and Device Drivers
1 Insert the Thin Film Manuals CD into the CD drive of the computer that will be
connected to STM-2.
2 Click Windows Explorer or File Explorer >> Computer >> (CD drive letter:)
>> STM-2.
3 Double click STM-2 v1.0.0 Setup.exe. The STM-2 - InstallShield Wizard will
display.
4 Click Next.
5 Review the summary of information.
6 Select I accept the terms in the license agreement.
7 Click Next.
8 Click Change to select the location of the software files to be installed.
9 Click Next.
10 Click Install.
11 Click Finish. The USB Installer - InstallShield Wizard window will display.
12 Click Next.
13 Review the summary of information.
14 Select I accept the terms in the license agreement.
15 Click Next.
16 Enter User Name and Organization information.
17 Click Next.
18 Click Install.
19 Click Finish. The CP210x USB to UART Bridge Driver Installer window will
display.
20 Click Next.
21 Review the summary of information.
22 Select I accept this agreement.
23 Click Next.
24 Click Finish.
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STM-2 Operating Manual
3.2.3 Starting INFICON STM-2 Software
3.2.3.1 Starting the Software in Windows XP or Windows 7
1 Click Start >> All Programs >> INFICON >> STM-2.
2 The STM-2 window will display (see Figure 3-1).
Figure 3-1 STM-2 window
3.2.3.2 Starting the Software in Windows 8
1 In the Start window, click the STM-2 icon.
2 If the icon cannot be found:
2a Click Search >> Apps.
2b Type STM in the Search text box.
2c Click the STM-2 icon.
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STM-2 Operating Manual
3.3 STM-2 Window
The STM-2 window displays Serial Number (SN), (Sensor) Name, Rate,
Thick(ness) of the film, Zero thickness button, Freq(uency), crystal Life, Density of
the film, Z-Ratio, and Tooling for the connected sensor and process material. This
window also provides a button to Start, Stop, or Pause/Resume monitoring. Also,
the Run Time of the Process, the Run #, a selection for Data Log(ging) to be turned
on and off, and the current date and time are displayed. From this window, there is
also access to STM-2, Rate, Thickness, and Frequency tabs as well as the File,
Edit, and Help menus for customization and configuration (see Figure 3-2).
Figure 3-2 STM-2 window
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File menu (see section 3.3.1 on page 3-6)
Edit menu (see section 3.3.2 on page 3-8)
Help menu (see section 3.3.3 on page 3-18)
STM-2 tab (see section 3.3.4 on page 3-19)
Rate tab (see section 3.3.5 on page 3-20)
Thickness tab (see section 3.3.6 on page 3-21)
Frequency tab (see section 3.3.7 on page 3-22)
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