INFICON STC-2000A User Manual
STC-2000A Quick Start Guide
instruments
Non-Sequencing Mode
This guide is a supplement to the STC-2000A User’s Manual (518-031).
WARNING:
Improper operation of this equipment could cause
equipment damage or personal injury.
Read the safety precautions in the user’s manual prior to operating this equipment.
Terms and definitions:
The STC-2000A provides both manual and automatic control of single- or multi-layer film
deposition. Manual mode is often used to set up the system in order to run unattended in the
fully automatic mode.
A film is a set of user-programmable deposition-related parameters (density, Z-ratio, map,
etc.) Typically, one material deposition is accomplished per film. The STC-2000A can store up
to 50 films. The active film is the film that will run when the start sequence is initiated. A
process is a set of multiple films, or “layers”. The map specifies the configuration of the
physical plant (number of sensors, selection of source type, which crystal to read, which gun to
use, etc.) Up to 30 maps can be stored to allow multiple system configurations. Each film
specifies which map to use.
The STC-2000A has two basic process control modes: Sequencing mode and Non-
sequencing mode. Non-sequencing mode is used to run a single user-selected film.
Sequencing mode is used to run a process (a series of films) for multiple materials or layers.
The Runtime or Status Screen is the screen normally
displayed during operation. You may return to the Status
Screen at any time by pressing the “Status” button.
Test Mode can be used to check the programming of the STC-2000A. Test Mode simulates
sensors and deposition rates to allow running films without operating the deposition system (in
particular the high-voltage supply) or without having oscillator/sensor attached.
WARNING:
Gun output and all I/O are active in Test Mode.
Sycon Instruments, Inc. 1
6757 Kinne Street • East Syracuse, New York 13057-1215 • (315) 463-5297 • Fax (315) 463-5298
STC-2000A Quick Start Guide
instruments
Screen navigation (using fixed keys and touch screen):
• Arrow keys ↑ ↓ on menu screens allow scrolling to unseen list parameters.
• BYE is a screen or function exit.
• EDT is edit.
• GO2 any selects another film, map or process.
• STATUS exits the menu system and returns the Run-time Screen.
STATUS
MENU
ZERO
instruments
STOP
START
HAND CONTROLLER
MANUAL
STC-2000A
THICKNESS / RATE CONTROLLER
Sycon Instruments, Inc. 2
6757 Kinne Street • East Syracuse, New York 13057-1215 • (315) 463-5297 • Fax (315) 463-5298
STC-2000A Quick Start Guide
t
d
d
instruments
Navigation of Status Screens:
The Status button
1st Status Screen
Press
STATUS
button
2nd Status Screen
3
s
The 1
Status Screen
displays information related
to the current deposition.
n
The 2
Status Screen
displays rate, percent power,
and thickness in a large font
for distant viewing.
Press
STATUS
button
3rd Status Screen
Press
STATUS
button
4th Status Screen
Press
STATUS
button
r
The 3
Status Screen
displays gun information.
The 4th Status Screen
displays sensor information
Sycon Instruments, Inc. 3
6757 Kinne Street • East Syracuse, New York 13057-1215 • (315) 463-5297 • Fax (315) 463-5298
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