This guide is a supplement to the STC-2000A User’s Manual (518-031).
WARNING:
Improper operation of this equipment could cause
equipment damage or personal injury.
Read the safety precautions in the user’s manual prior to operating this equipment.
Terms and definitions:
The STC-2000A provides both manual and automatic control of single- or multi-layer film
deposition. Manual mode is often used to set up the system in order to run unattended in the
fully automatic mode.
A film is a set of user-programmable deposition-related parameters (density, Z-ratio, map,
etc.) Typically, one material deposition is accomplished per film. The STC-2000A can store up
to 50 films. The active film is the film that will run when the start sequence is initiated. A
process is a set of multiple films, or “layers”. The map specifies the configuration of the
physical plant (number of sensors, selection of source type, which crystal to read, which gun to
use, etc.) Up to 30 maps can be stored to allow multiple system configurations. Each film
specifies which map to use.
The STC-2000A has two basic process control modes: Sequencing mode and Non-sequencing mode. Non-sequencing mode is used to run a single user-selected film.
Sequencing mode is used to run a process (a series of films) for multiple materials or layers.
The Runtime or Status Screen is the screen normally
displayed during operation. You may return to the Status
Screen at any time by pressing the “Status” button.
Test Mode can be used to check the programming of the STC-2000A. Test Mode simulates
sensors and deposition rates to allow running films without operating the deposition system (in
particular the high-voltage supply) or without having oscillator/sensor attached.
WARNING:
Gun output and all I/O are active in Test Mode.
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6757 Kinne Street • East Syracuse, New York 13057-1215 • (315) 463-5297 • Fax (315) 463-5298
STC-2000A Quick Start Guide
instruments
Screen navigation (using fixed keys and touch screen):
• Arrow keys ↑ ↓ on menu screens allow scrolling to unseen list parameters.
• BYE is a screen or function exit.
• EDT is edit.
• GO2 any selects another film, map or process.
• STATUS exits the menu system and returns the Run-time Screen.
STATUS
MENU
ZERO
instruments
STOP
START
HAND CONTROLLER
MANUAL
STC-2000A
THICKNESS / RATE CONTROLLER
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6757 Kinne Street • East Syracuse, New York 13057-1215 • (315) 463-5297 • Fax (315) 463-5298
STC-2000A Quick Start Guide
t
d
d
instruments
Navigation of Status Screens:
The Status button
1st Status Screen
Press
STATUS
button
2nd Status Screen
3
s
The 1
Status Screen
displays information related
to the current deposition.
n
The 2
Status Screen
displays rate, percent power,
and thickness in a large font
for distant viewing.
Press
STATUS
button
3rd Status Screen
Press
STATUS
button
4th Status Screen
Press
STATUS
button
r
The 3
Status Screen
displays gun information.
The 4th Status Screen
displays sensor information
Sycon Instruments, Inc. 3
6757 Kinne Street • East Syracuse, New York 13057-1215 • (315) 463-5297 • Fax (315) 463-5298
STC-2000A Quick Start Guide
instruments
Menu Programming: Non-Sequencing Mode
Status Scre en
Press fixed MENU key
Menu Screen
Review Film
Number
Review Source
Sensor (SS) Map
Next Film
(Selects next film
to run)
I/O Set-up Menu
Service
Process
Accounting
Executive Menu
Options/
Information/
Diagnostics
System
Configuration
I/O Set-up:
Memory
I/O Set-up:
Operations Mode
I/O Set-up:
Edit
Sycon Instruments, Inc. 4
6757 Kinne Street • East Syracuse, New York 13057-1215 • (315) 463-5297 • Fax (315) 463-5298
Communications
Set-up
I/O Set-up:
Change
STC-2000A Quick Start Guide
p
instruments
Basic Operation Flow Chart: To perform a practice run of X thickness at
X rate:
Power On
Unit power on,
connected
MENU screen:
Press
NEXT FILM
NEXT FILM menu:
Enter
Film ID no.
REVIEW SS MAP
menu:
Select outputs,
tooling, sensor
values
REVIEW FILM
menu:
Enter Film
parameters, select
MAP
Check back panel
connections,
safety interlocks
and cooling water
Press MENU key
Press "Review SS
Map"
Set SOURCE
MAX PWR to
100%, and CH1
START MODE to
"ACTIVE"
Press BYE to
return to Menu
Screen
Press "REVIEW
FILM"
SS MAP Select 1
Set SOAK1 PWR
VALUE to 50%,
PWR RAMP1
TIME to 00:11,
PWR SOAK1
TIME to 00:11,
and MAX
POWER LIMIT to
100%
Press STATUS
key to return to
Run-time Screen
Edit Map 1
Edit Film 1
Return to
Run-time Screen
(Status key)
First “Start” button press clears
Ready to Start
“STOP” status to “READY”.
From READY state or IDLE state,
“Start” button
Sycon Instruments, Inc. 5
6757 Kinne Street • East Syracuse, New York 13057-1215 • (315) 463-5297 • Fax (315) 463-5298
Press START key
to initiate start
sequence
ress begins film.
STC-2000A Quick Start Guide
instruments
To switch from Sequencing to Non-sequencing or vice-versa:
Press the fixed “Menu” button to view the Menu screen.
Press “Service” on the touchscreen to view the Service menu.
Non-sequencing: Sequencing:
Press to toggle
Press “Accept” on the touchscreen to accept the change. The STC-2000A will automatically
restart after the change is accepted. (Note: “Accept” button appears only for a status change.)
To switch to or from Test Mode:
Press the fixed “Menu” button to view the Menu screen.
Press “Service” on the touchscreen to view the Service menu.
Press to toggle
Press “Accept” on the touchscreen to accept the change. The STC-2000A will automatically
restart after the change is accepted. (Note: Turning the unit off clears Test mode.)
Sycon Instruments, Inc. 6
6757 Kinne Street • East Syracuse, New York 13057-1215 • (315) 463-5297 • Fax (315) 463-5298
STC-2000A Quick Start Guide
instruments
To edit film parameters:
Press the fixed “Menu” button to view the Menu screen.
Press “Review Film” on the touchscreen to view the film parameter edit screen.
Select "GO2 Flm" on the touchscreen, and enter the number of the film you want to review/edit
(select the number using the touchscreen keypad, then select "Enter".)
When the film numbers next to "Edit" and "Active" at the top of the screen match, you are
editing the active film.
Note: Changes made to the active film will change a running process.
To Start:
From any Status screen, press the fixed “Start” button.
The word “Ready” should be displayed in the upper left corner of the screen.
Press the start button again to start deposition.
Sycon Instruments, Inc. 7
6757 Kinne Street • East Syracuse, New York 13057-1215 • (315) 463-5297 • Fax (315) 463-5298
STC-2000A Quick Start Guide
instruments
The standard unit includes:
DESCRIPTION SYCON P/N QTY
Source sensor card (w/2 crystal sensor inputs & 2 analog
Power cord (120 VAC) 600-004 1
Fuses (2 x 2.00A 250VAC F-type) 356-014 2
Opto-coupled inputs 25-pin male connector 402-222 1
Relay outputs 25-pin female connector 404-020 1
EMI hood for 25-pin connectors 404-021 2
RS-232 9-pin male connector 404-011 1
EMI hood for 9-pin connector 404-009 1
Rack mount ears 016-012 2
Rack mount hardware 094-006 4
Manual 518-031 1
9-pin female/female “null modem” cable 506-170 1
Hand controller 500-198 1
Communications software tools disk 500-046 1
Quick Start Guide (Non-Sequencing mode) 518-037 1
Quick Start Guide (Sequencing mode) 518-058 1
System Configuration:
The STC-2000A uses a crystal sensor and oscillator to monitor deposition. Connections are
made as shown below. Consult the user’s manual for detailed information.
To STC-2000A
Feed-through
Crystal Sensor
STC-2000A Quick Start Guide for Non-Sequencing Mode SPN 518-037
Effective Date: 2 December 2010
Sycon Instruments, Inc. 8
6757 Kinne Street • East Syracuse, New York 13057-1215 • (315) 463-5297 • Fax (315) 463-5298
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