INFICON SRT-422 User Manual

SRT-422

E-Beam Source Indexer

instruments

MAN

AUTO

ON OFF

SRT-422

MULT-POCKET E-BEAM INDEXER

User's Manual

518-034 Revision A, January 2004

SRT-422

Operators Manual

Preface

Table of Contents

Preface...........................................................................................................................................3

Table of Contents......................................................................................................................3

List of Figures............................................................................................................................4

List of Table...............................................................................................................................5

Warranty........................................................................................................................................6

SYCON INSTRUMENTS, INC. .................................................................................................6

EQUIPMENT RETURN.............................................................................................................6

EC Declaration of Conformity....................................................................................................8

Section 1......................................................................................................................................11

General Information & Specifications......................................................................................11

Section 1.1: Introduction.................................................................................................................................11

Section 1.2: Unpacking...................................................................................................................................11

Section 1.3: Specifications ..............................................................................................................................12

Section 2......................................................................................................................................17

Operation ................................................................................................................................17

Section 2.1: Automatic Operation....................................................................................................................17

Section 2.2: Stalled Motor Indication on 7-Segment Display .........................................................................17

Section 2.3: Section overview ........................................................................................................................17

Section 2.4: Control/display features...............................................................................................................17

Section 2.5: Clockwise vs. counterclockwise pocket numbering ...................................................................19

Section 2.6: Indexer operation with standard multipocket sources................................................................19

Section 2.7: Indexer operation with 4-pocket UHV sources...........................................................................20

Section 2.8: Indexer operation with three-pocket sources that have one banana shaped pocket.................21

Section 2.9: Indexer operation with continuous trough hearths.....................................................................22

Section 2.10: phase adjustment......................................................................................................................23

Electromechanical Method.........................................................................................................................23

Electronic Method ......................................................................................................................................24

Section 2.11: Rotation speed and torque selection for pocket seeking.........................................................25

Section 3......................................................................................................................................29

Installation...............................................................................................................................29

Section 3.1: Introduction..................................................................................................................................29

Section 3.2: Electrical Connections and Descriptions.....................................................................................29

Line Voltages .............................................................................................................................................29

Section 3.3: Internal Configuration Switches...................................................................................................30

Section 3.4: setting the configuration dip switches..........................................................................................31

Section 3.5: Description of Configuration Switches........................................................................................32

Standard Multi-pocket Sources (Codes 0-5)..............................................................................................34

UHV 4-Pocket Sources (Code 7)...............................................................................................................34

Three-Pocket Hearths with One Banana-Shaped Pocket (Codes 10-13).................................................35

Hearths with Full-Circle Evaporant Troughs (Code 2)...............................................................................36

Section 3.6: configuring the opto-isolator pc board for 24-vdc I/Os................................................................37

Section 3.7: Initial Bench Test........................................................................................................................38

Section 3.8: System Installation .....................................................................................................................39

Section 3.9: Installing the Index-Drive Unit ....................................................................................................40

Section 3.10: Installing the Control Unit.........................................................................................................41

Section 3.11: Indexer and System Grounding................................................................................................42

Section 3.12: initial phase adjustment..............................................................................................................43

Electromechanical Method.........................................................................................................................43

Electronic Method ......................................................................................................................................44

Table of Contents Page 3

Section 3.13: making system connections via the rear panel I/O interface ....................................................45

Interlock Connections.................................................................................................................................45

Pins 1, 2, and 7 (Pocket SELect Inputs 0,1, and 2 respectively)...............................................................46

Pin 3 (System Interlock Input)....................................................................................................................46

Pins 4, 8, and 9 (Pocket POSition Outputs 1, 2, and 0, respectively) .......................................................46

Pin 5 (POCKET GOOD Output).................................................................................................................47

Pin 6 (External Supply Ground).................................................................................................................47

Pin 10 (External Supply Positive Input)......................................................................................................47

Pins 11, 12, and 13....................................................................................................................................47

Pin 14 (Internal Supply Ground) ................................................................................................................47

Pin 15 (External Supply Ground)...............................................................................................................47

Section 3.14: making system connections via the rear panel rs232 interface................................................47

Section 3.15: Warranty Repair and Replacement..........................................................................................48

5 Year Service Policy.................................................................................................................................48

Section 4......................................................................................................................................51

Computer Interfacing...............................................................................................................51

RS-232 Interface.....................................................................................................................51

Section 4.1: RS-232 Description .....................................................................................................................51

Section 4.2: Baud Rates And Cabling.............................................................................................................51

Section 4.3: Setting The computer Baud Rate................................................................................................51

Section 4.4: ASCII Protocol.............................................................................................................................52

Section 4.5: Communication Commands........................................................................................................53

Section 4.6: Command Responses.................................................................................................................53

Section 4.7: ‘Illegal’ Responses.......................................................................................................................54

Section 4.8: Command Set..............................................................................................................................54

Query the unit for any operating parameter...............................................................................................54

Version Command @................................................................................................................................54

Lockout Command A.................................................................................................................................54

Pocket Command B..................................................................................................................................56

Power Fail Status Command C.................................................................................................................56

Moving Command D .................................................................................................................................56

Stall Error Command E.............................................................................................................................56

Pocket 1 Offset Command F.....................................................................................................................56

Current Location Command G..................................................................................................................56

Move To Command H...............................................................................................................................56

Read Configuration Command I ...............................................................................................................56

Reset Command J ....................................................................................................................................57

Read AUTO/MAN Switch Command K.....................................................................................................57

RS-232 Source Type Command L............................................................................................................57

Zero Non-Volitile offset and Goto Index Pulse Command ¦......................................................................57

Section 5......................................................................................................................................61

Trouble Shooting.....................................................................................................................61

Section 5.1: SECTION OVERVIEW................................................................................................................61

Section 5.2: ROUTINE TROUBLESHOOTING...............................................................................................62

Appendix A..................................................................................................................................65

Application Notes ....................................................................................................................65

List of Figures

Figure 1.1: SRT-422 Front Panel.....................................................................................................11

Figure 1.2: SRT-422 Rear Panel.....................................................................................................12

Figure 2.1: Control / display features on the control unit’s front panel.............................................18

Figure 2.2: How the orientation of pocket numbering depends on the setting of DIP switch 5. .......19

Figure 2.3: Standard 4-, 6-, and 8-pocket hearths...........................................................................19

Page 4 List of Figures

Figure 2.4: Illustration of a 4-pocket UHV source, indicating the position of the “software

barrier” implemented in this mode to prevent damage to the bellows attached to

UHV hearths in this area. ................................................................................................21

Figure 2.5: Three-pocket hearths with one banana-shaped pocket.................................................21

Figure 2.6: Illustration of a continuous-trough hearth ......................................................................22

Figure 3.1: SRT-422 Motor Drive unit..............................................................................................29

Figure 3.2: Line Voltage Selection Switch .......................................................................................30

Figure 3.3: SRT-422 Rear Panel.....................................................................................................30

Figure 3.4: Configuration Switch......................................................................................................32

Figure 3.5: Orientation of pocket numbering changes depending on the setting of DIP switch 6....33

Figure 3.6: Source types supported by the SRT-422.......................................................................34

Figure 3.7: Locations of screws that secure the control unit’s rear panel to its body.......................37

Figure 3.8: Motor Drive Unit.............................................................................................................40

Figure 3.9: SRT-422 Grounding ......................................................................................................42

Figure 3.10: Control/display features on the control unit’s front panel.............................................43

Figure 3.11: Pinout for the rear panel I/O (ISOLATED connector....................................................46

Figure 3.12: Connections required for RS-232 communications between the SRT-422 and a

remote device with a 9-pin RS-232 port and a 25 pin RS-232 port. ................................48

Figure 5.1: Signal Flow Diagram .....................................................................................................61

List of Table

Table 1.1: Specifications..................................................................................................................13

Table 2.1: Speed of Hearth in Banana Mode...................................................................................22

Table 2.2: Hearth rotation speed in continuous mode....................................................................23

Table 2.3: Rotation Speed and Torque............................................................................................25

Table 3.1: Codes 0 – 5 DIP Switches settings.................................................................................34

Table 3.2: Code 7 DIP switch settings.............................................................................................34

Table 3.3: Codes 10 – 13 DIP switch settings.................................................................................35

Table 3.4: Hearth rotation in continuous mode ...............................................................................36

Table 3.5: Pocket-select codes input via pins 1, 2, and 7 **SEL2 not required for four pocket

configurations..................................................................................................................46

Table 3.6: Pocket-position codes output via pins 4, 8, and 9 ...........................................................46

Table 5.1: Trouble Shooting guide...................................................................................................62

List of Table Page 5

Warranty

SYCON INSTRUMENTS, INC.

Sycon Instruments, Inc. (Sycon) warrants that all electronic instrumentation equipment manufactured by Sycon shall be free from defects in materials and workmanship for a period of 1 year from date of shipment. Mechanical vacuum components such as Feedthrough, sensors, cables, and shutters shall be warranted for a period of six months from the date of shipment. For the duration of the warranty period Sycon will, at its option, either repair or replace any part, which is defective in materials or workmanship without charge to the purchaser. The foregoing shall constitute the exclusive and sole remedy of the purchaser for any breach by Sycon of this warranty. This warranty does not apply to any equipment, which has not been used in accordance with the specifications recommended by Sycon for the proper and normal use of the equipment. Sycon shall not be liable under any circumstances for consequential or incidental damages in connection with, or arising out of the sale, performance, or use of, the equipment covered by this warranty. This warranty is in lieu of all other warranties by Sycon, expressed or implied, including the implied warranty of merchantability, the implied warranty of fitness for a particular purpose, and warranty against infringement of any patent.

EQUIPMENT RETURN

Before returning any equipment to Sycon contact the Product Service Department. You must obtain a RA (Return Authorization) number from Sycon Instruments and indicate this number on all shipping cartons and correspondence. Ship all items in suitable containers with adequate protection from outside damage. Also include a short description of the problem or condition to facilitate processing.

Sycon Instruments, Inc.

6757 Kinne Street

Syracuse, New York

13057-1215

P (315) 463-5297 F (315) 463-5298

www.sycon.com

Page 6 SYCON INSTRUMENTS, INC.

Sycon Instruments, Inc. reserves the right to change any information contained in this manual without notice.

IBM® Is a registered trademark of IBM Corporation Microsoft® is a registered trademark of Microsoft Corporation SWAGELOK® is a trademark owned by Crawford Fitting Company BITBUSTM is a trademark of Intel Corporation ConFlat® is a registered trademark of Varian Associates, Inc. AMPHENOL® is a registered trademark of Allied Corporation Microdot

is a registered trademark of Microdot Inc.

EQUIPMENT RETURN Page 7

EC Declaration of Conformity

We, Sycon Instruments 6757 Kinne Street East Syracuse, New York 13057 USA

Declare under sole responsibility that the

SRT-422, E-beam source indexer

Meets the intent of Directive 89/336/EEC as amended by 92/31/EEC and 93/68/EEC for Electromagnetic Compatibility and the 72/23/EEC Low Voltage Directive for Product Safety. Compliance was demonstrated to the following specifications as listed in the Official Journal of the European Communities:

EN 50081-1:1992 Emissions

EN 5022 Class B Radiated and Conducted Emissions EN 6100-3-2 AC Power Line Harmonic Current Emissions

EN 50082-1: 1995 Immunity

IEC 1000-4-2 Electrostatic Discharge Immunity IEC 1000-4-3 RF Electromagnetic Field Immunity IEC 1000-4-4 Electrical Fast Transient/Burst Immunity IEC 1000-4-5 Power Line Surge Immunity IEC 1000-4-11 Power Line Dips and Interrupts

EN 61010-1: 1993 Safety Requirements for Electrical Equipment for Measurement,

Control, and Laboratory Use

Page 8 EC Declaration of Conformity

SECTION 1

GENERAL INFORMATION

Section 1

General Information & Specifications

Section 1.1: Introduction

The Source Rotation Indexer (SRT-422) is a stepping motor driver unit with optical encoding for the positioning and rotation of multi-pocket electron beam sources. The SRT-422 is unique to other rotation controllers because the motor is small and compact separate from the driver, and control electronics.. The unit is designed to attach to the input shaft (air side) of a rotary vacuum feedthrough. For ease of installation, complete installation packages are available which include either a 1” bolt Rotary Feedthrough or a 2 ¾” Del Seal Rotary Feedthrough. The Indexer can be controlled manually from a remote control panel, or automatically from STC I/O Input or the RS 232 computer interface. It can control a 3, 4, 6 or 8 pocket source in either a unidirectional or bi-directional manner. (the bi-directional mode, takes the shortest path to the next selected pocket). The unit can be used to rotate a continuous trough source at one of seven selected rotation speeds. For the multi-pocket UHV source, it has the capability of limiting rotation to 270 degrees (3 pockets) from the pocket 1 position. Three variations of 3 pocket source rotation control are provided (2 Standard pockets, 1 ‘banana’ pocket) which allow for different retrograde motion of the banana pocket (120°, 135° and 145° sweep). Five rotational speeds are available for sweeping the ‘banana’ pocket. In addition, custom firmware can be added to control other variations of sources.

instruments

MAN

SRT-422

AUTO

ON OFF

MULT-POCKET E-BEAM INDEXER

Figure 1.1: SRT-422 Front Panel

Section 1.2: Unpacking

When opening the shipping package, you should find the following items:

General Information & Specifications Page 11

• SRT-422 Source Rotation Indexer

• 600-004 Power Cord (IEC 110 Volt)

• 514-004 RS232 / I/O Connector Kit

• 518-XXX SRT-422 User’s Manual

The following optional items will be additionally included if they have been purchased:

• 500-074 1” Bolt Rotary Feedthrough and Adapter

• 500-075 2 ¾” Del Seal Rotary Feedthrough and Adapter

MOTOR

instruments

RS-232

I/O (ISOLATED)

Figure 1.2: SRT-422 Rear Panel

Section 1.3: Specifications

Ready

SRT-422

120VAC Fuse 1/4 AMP SB 240VAC Fuse 1/8 AMP SB

Page 12 General Information & Specifications

Specifications Description

Rotational Ability

Rotational Speed Path Finding Torque Repeatability Data Interface Relay Interface Manual Control Safety Interlocks Pocket Good

Indication Size Weight Power

•4,6 or 8 Pocket Source (Uni or Bi-direction)

•Continuous Trough Source (1 of 8 speeds)

•UHV 4 pocket source (limited rotation)

•3 - 3 pocket ‘banana’ types

•Shaft speeds of up to 12 rpm

•Quickest path (CW, CCW) for multi-pocket source

•120 in-oz. at output shaft

•3° resolution and repeatability

•RS-232

•Allows control from system or deposition

•Inputs/outputs for Remote Manual Control Panel

•Disallows rotation with beam power applied

•Indicated selected pocket is reached or retrograde motion is in

progress.

•5.0w x 5.0h x 4.5d plus 1” shaft extensions

•3.5 lbs.

•Input power 115/230 Volts ac/10 watts

Table 1.1: Specifications

General Information & Specifications Page 13

SECTION 2

OPERATION

Section 2

Operation

The SRT-422 can be controlled remotely by the output relays of our STC-2002 and STC-2000A Thin Film Deposition Controllers, or any other system controller. Additionally, it can be controlled by a remote panel Manual Pocket Selection Switch or through either of two standard computer interfaces. An Interlock input is provided to assure that rotation of multipocket sources cannot occur while deposition power is being applied to the source.

Section 2.1: Automatic Operation

With the Auto/Man toggle switch in the Auto position (DOWN), the Indexer will be controlled through the STC I/O Port or the RS232 Computer Interface. The Binary code applied to the STC I/O port will direct the Indexer to the proper position. Signals are available which indicate correct pocket position along with the safety interlock described above.

Section 2.2: Stalled Motor Indication on 7-Segment Display

In addition to indicating the current pocket location the 7-segment LED provides a stall or jammed source indication. This is done by alternately flashing the 7-segment display between the current pocket location and zero. (The green LED on the back panel of the Indexer will also blink if the condition occurs). This flashing indicates the load on the Indexer has exceeded the torque capacity of the Indexer and it is unable to move to the new desired position. This usually means that an excess amount of material has accumulated on the source such that it cannot rotate freely.

Section 2.3: Section overview

This section describes the operation of the SRT-422 with a variety of source hearth types. The specific sections are

Control/Display Features Clockwise vs. Counterclockwise Pocket Numbering Indexer Operation With Standard Multipocket Sources Indexer Operation with 4-pocket UHV Sources Indexer Operation With 3-pocket Sources That Have One Banana-Shaped Pocket Indexer Operation With Continuous-Trough Hearths Phase Adjustment Rotation Speed and Torque Selection

Section 2.4: Control/display features

All of the indexer’s control/display features are on the control unit’s front panel, which is illustrated in Figure below.

Operation Page 17

instruments

MAN

AUTO

ON OFF

SRT-422

MULT-POCKET E-BEAM INDEXER

Figure 2.1: Control / display features on the control unit’s front panel

1. ON/OFF switch. This switch controls the input power to the unit.

2. Phase-adjustment switch. This spring-loaded pushbutton is mounted inside a hole

below the Greek letter ph ø. See the instructions on using this switch to recalibrate the home position of pocket 1.

3. MANual/AUTO mode switch. When this switch is set toward MAN, the position of the

thumbwheel (feature 5) controls the following functions:

• Pocket selection in all multipocket modes.

• Rotation speed in continuous mode and oscillation speed in “banana” mode. When the switch is set toward AUTO, these functions are controlled by signals from a host computer, deposition controller, or other remote device. These signals are input via either the RS-232 port or the I/O (ISOLATED) connector, both of which are on the control unit’s rear panel. Note that this switch has a spring-loaded locking feature. You must pull the switch all the way out and hold it out while changing its position.

4. LED pocket-position indicator. This 7-segment LED displays the numerals 0 through 7

to indicate the current pocket position. The LED also flashes between zero and the number of the current pocket position to indicate a stalled-motor condition, which usually results from the buildup of material along the edges of the cutout in the top of the source.

5. Pocket/speed selection thumbwheel. When the MAN/AUTO switch is set to MANual,

this thumbwheel controls pocket selection and rotation/oscillation speed.

Page 18 Operation

Section 2.5: Clockwise vs. counterclockwise pocket numbering

When planning multipocket deposition—with the indexer in either unidirectional or bidirectional mode, bear in mind that the orientation of pocket numbering is determined by the setting of internal DIP switch 5. This means that the direction of “forward” rotation (i.e., rotation “upward” through the pocket numbers) depends on whether DIP switch 5 is set for clockwise or counterclockwise rotation. The Figure below shows what this means for indexer operation with a standard 4-pocket source. The pockets of such a source must be thought of as being numbered 1-4 in a counterclockwise direction when DIP switch 5 is on and 1-4 in a clockwise direction when switch 5 is off. The same principle applies to all multipocket sources.

HOME

DIP Switch 5

OFF

Figure 2.2: How the orientation of pocket numbering depends on the setting of DIP switch 5.

Section 2.6: Indexer operation with standard multipocket sources

The SRT-422 operates any standard 3-, 4-, 5-, 6-, or 8-pocket source that has internal 4:1 gear reduction. When the internal DIP switches are configured for one of these source types, operation of the indexer is straightforward. After the pocket selection has been changed either manually via the front-panel thumbwheel or automatically by a remote device, the indexer rotates the hearth to that pocket position at a constant rotational speed and then stops.

4-pkt. standard

(code 1)

6-pkt. standard

(code 3)

8-pkt. standard

(code 5)

Figure 2.3: Standard 4-, 6-, and 8-pocket hearths

Operation Page 19

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