INFICON SQM-160 User Manual
OPERATING MANUAL
™
SQM-160
Multi-Film Rate/Thickness Monitor
IPN 074-511-P1C
www.inficon.com reachus@inficon.com
©2012 INFICON
®
OPERATING MANUAL
™
SQM-160
Multi-Film Rate/Thickness Monitor
IPN 074-511-P1C
Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
SQM-160™ and INFICON® is a trademark of INFICON GmbH.
Visual Basic®, Windows® and Microsoft® are registered trademarks of Microsoft Corporation.
Oracle® and Java® are registered trademarks of Oracle and/or its affiliates.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2012 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.
Warranty
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
one (1) year from the date of shipment thereof by Seller. Seller's liability under this
warranty is limited to such of the above products or parts thereof as are returned,
transportation prepaid, to Seller's plant, not later than thirty (30) days after the
expiration of the period of warranty coverage in respect thereof and are found by
Seller's examination to have failed to function properly because of defective
workmanship or materials and not because of improper installation or misuse and
is limited to, at Seller's election, either (a) repairing and returning the product or
part thereof, or (b) furnishing a replacement product or part thereof, transportation
prepaid by Seller in either case. In the event Buyer discovers or learns that a
product does not conform to warranty, Buyer shall immediately notify Seller in
writing of such non-conformity, specifying in reasonable detail the nature of such
non-conformity. If Seller is not provided with such written notification, Seller shall
not be liable for any further damages which could have been avoided if Seller had
been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.
www.inficon.com reachus@inficon.com
SQM-160 Operating Manual
Table Of Contents
Trademarks
Disclaimer
Copyright
Chapter 1
Introduction
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.1.1 Related Manuals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.2 Instrument Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.2.1 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.2.2 General Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
1.2.3 Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
1.3 How To Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.3.1 Returning Your SQM-160. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.4.1 Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
1.4.2 Film Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
1.4.3 System Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.4 Digital I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.5 General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
1.5 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
1.6 Parts and Options Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
1.6.1 Base Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
1.6.2 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9
IPN 074-511-P1C
1.6.3 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Chapter 2
2.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.3 Front Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
2.4 Rear Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
2.5 System Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
2.6 Film Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
2.7 Depositing a Film . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-7
Quick Start
TOC - 1
Chapter 3
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 Menu Selection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.3 Film Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3.4 System Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
3.5 Sensor Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
3.6 Sensor Frequency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
3.7 Sensor Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
3.8 Display Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
3.9 Crystal Life . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
3.10 Zero Thickness. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
3.11 Shutter Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
3.12 Dual Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
3.13 Rate Sampling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
3.14 Time Setpoint . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
3.15 Thickness Setpoint . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
3.16 Simulate Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
3.17 Defaulting the Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
3.18 Relay Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15
3.19 Analog Output Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
3.20 I/O Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
3.21 Rack Mounting Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
SQM-160 Operating Manual
Operation
Chapter 4
Chapter 5
TOC - 2
SQM-160 Comm Software
4.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.3 Main Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.4 Data Log Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
4.5 Films Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.6 System Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
4.7 Communications Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
4.8 Graph Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
4.9 Help Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11
Communications
5.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.1.1 RS-232C Serial Port. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.1.2 USB Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
IPN 074-511-P1C
SQM-160 Operating Manual
5.1.3 TCP/IP Ethernet Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2
5.1.3.1 How to Set Up the Network Protocol on the PC. . . . . . . . . . . . . . . . . . . . . . 5-2
5.1.3.2 How to change the IP address of the SQM-160. . . . . . . . . . . . . . . . . . . . . . 5-5
5.2 SQM-160 Comm Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
5.3 SQM-160 Communications Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6
5.4 Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-7
5.4.1 Command: @ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-7
5.4.2 Command: A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-7
5.4.3 Command: B. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-8
5.4.4 Command: C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
5.4.5 Command: D . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
5.4.6 Command: J . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9
5.4.7 Command: L. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9
5.4.8 Command: M . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9
5.4.9 Command: N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
5.4.10 Command: O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9
5.4.11 Command: P. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-10
5.4.12 Command: R . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
5.4.13 Command: S. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-10
5.4.14 Command: T. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .T5-10
5.4.15 Command: U . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
5.4.16 Command: W . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-11
5.4.17 Command: Y. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-11
5.4.18 Command: Z. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-11
5.5 CRC Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12
5.5.1 Visual Basic® 5/6 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12
5.5.2 Java® . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-14
5.5.3 C++. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14
IPN 074-511-P1C
Chapter 6
Troubleshooting and Maintenance
6.1 Troubleshooting Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-1
6.2 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
6.2.1 Troubleshooting the SQM-160 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
6.2.2 Troubleshooting Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-3
6.2.3 Troubleshooting Computer Communications . . . . . . . . . . . . . . . . . . . . . . . .6-8
6.3 Replacing the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
6.3.1 Front Load . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-9
6.3.2 Cool Drawer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-10
6.3.3 Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-12
TOC - 3
SQM-160 Operating Manual
6.3.4 Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13
6.3.5 Crystal Snatcher. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
6.4 Crystal Sensor Emulator
IPN 760-601-G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15
6.4.1 Diagnostic Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16
6.4.1.1 Measurement System Diagnostic Procedure. . . . . . . . . . . . . . . . . . . . . . . 6-16
6.4.1.2 Feedthrough Or In-Vacuum Cable
Diagnostic Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17
6.4.1.3 Sensor Head Or Monitor Crystal
Diagnostic Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18
6.4.1.4 System Diagnostics Pass But
Crystal Fail Message Remains. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19
6.4.2 Sensor Cover Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20
6.4.2.1 Compatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20
6.4.2.2 Incompatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20
6.4.3 Emulator Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21
Chapter 7
7.1 Importance of Density, Tooling and Z-Ratio. . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.2 Determining Density. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
7.4 Laboratory Determination of Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
Chapter 8
8.1 Basics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
8.1.1 Monitor Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
8.1.2 Period Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
8.1.3 Z-match Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-5
8.1.4 Active Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-6
Appendix A
A.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .A-1
Calibration Procedures
Measurement and Theory
IPN 074-511-P1C
Material Table
TOC - 4
1.1 Introduction
Figure 1-1 SQM-160 Multi-Film Rate/Thickness Monitor
SQM-160 Operating Manual
Chapter 1
Introduction
The SQM-160™ uses proven INFICON® quartz crystal sensor technology to
measure rate and thickness in a thin film deposition process. Two sensor inputs are
standard and four additional sensor inputs are optional. Two recorder outputs
provide analog rate and thickness signals.
Sensor inputs can be assigned to different materials, averaged for accurate
deposition control in large systems, or configured for a dual sensor. The rate
sampling mode allows a shuttered sensor to extend sensor life in high rate
processes. Rate displays of 0.1 Å/s or 0.01 Å/s are user selectable. In addition,
frequency or mass displays can be selected. Four relay outputs allow the SQM-160
to control source or sensor shutters, signal time and thickness setpoints, and signal
IPN 074-511-P1C
crystal failure. Digital inputs allow external signals to start/stop and zero readings.
The SQM-160 comes with an RS-232 port and Windows
®
software that allows
instrument setup from your computer. The software can be used to set and store
all parameters, operate the instrument, and save process data in an .txt file that can
easily be imported into Excel
®
. USB or Ethernet options add to the communications
flexibility.
1 - 1
SQM-160 Operating Manual
CAUTION
WARNING
WARNING - Risk Of Electric Shock
1.1.1 Related Manuals
Sensors are covered in separate manuals. PDF files of these manuals are
contained in the 074-5000-G1 CD, part of the Ship Kit.
074-154 - Bakeable Sensor
074-156 - Front Load Sensor, Single/Dual
074-157 - Sputtering Sensor
147-800 - Cool Drawer Sensor, Single/Dual
1.2 Instrument Safety
1.2.1 Definition of Notes, Cautions and Warnings
When using this manual, please pay attention to the NOTES, CAUTIONS and
WARNINGS found throughout. For the purposes of this manual they are defined as
follows:
NOTE: Pertinent information that is useful in achieving maximum SQM-160
efficiency when followed.
Failure to heed these messages could result in damage
to the SQM-160.
Failure to heed these messages could result in personal
injury.
Dangerous voltages are present which could result in
personal injury.
IPN 074-511-P1C
1 - 2
1.2.2 General Safety Information
WARNING - Risk Of Electric Shock
CAUTION
Do not open the SQM-160 case! There are no
user-serviceable components within the SQM-160 case.
Dangerous voltages may be present whenever the power
cord or external input/relay connectors are present.
Refer all maintenance to qualified personnel.
This SQM-160 contains delicate circuitry which is
susceptible to transient power line voltages. Disconnect
the line cord whenever making any interface
connections. Refer all maintenance to qualified
personnel.
SQM-160 Operating Manual
1.2.3 Earth Ground
The SQM-160 is connected to earth ground through a sealed three-core
(three-conductor) power cable, which must be plugged into a socket outlet with a
protective earth terminal. Extension cables must always have three conductors
including a protective earth terminal.
IPN 074-511-P1C
1 - 3
SQM-160 Operating Manual
WARNING - Risk Of Electric Shock
WARNING
Never interrupt the protective earth circuit.
Any interruption of the protective earth circuit inside or outside the SQM-160,
or disconnection of the protective earth terminal is likely to make the SQM-160
dangerous.
This symbol indicates where the protective earth ground is connected inside
the SQM-160. Never unscrew or loosen this connection.
There are no adjustments or user-serviceable parts
inside the SQM-160. For maintenance or repair, contact
INFICON.
1.3 How To Contact INFICON
Worldwide support information, to contact a:
Technical Support Engineer with questions regarding applications for and
programming the SQM-160
Service Engineer with questions regarding troubleshooting, diagnosing or
repairing a defective SQM-160
Sales and Customer Service, to contact the INFICON Sales office nearest you
Repair Service, to contact the INFICON Service Center nearest you
is available at the Support tab a www.inficon.com.
If you are experiencing a problem with your SQM-160, please have the following
information readily available:
the serial number and firmware version for your SQM-160,
a description of your problem,
IPN 074-511-P1C
an explanation of any corrective action that you may have already attempted,
and the exact wording of any error messages that you may have received.
To contact Customer Support, see Support at www.inficon.com.
1 - 4
1.3.1 Returning Your SQM-160
Do not return any component of your SQM-160 to INFICON without first speaking
with a Customer Support Representative. You must obtain a Return Material
Authorization (RMA) number from the Customer Support Representative.
If you deliver a package to INFICON without an RMA number, your package will be
held and you will be contacted. This will result in delays in servicing your SQM-160.
Prior to being given an RMA number, you may be required to complete a
Declaration Of Contamination (DOC) form if your sensor has been exposed to
process materials. DOC forms must be approved by INFICON before an RMA
number is issued. INFICON may require that the sensor be sent to a designated
decontamination facility, not to the factory.
1.4 Specifications
1.4.1 Measurement
Number of Sensors . . . . . . . . . . . . . 2 standard, 4 additional optional
Sensor Frequency Range . . . . . . . . 4.0 MHz to 6.0 MHz
SQM-160 Operating Manual
Reference Frequency Accuracy . . . . 0.002%
Reference Frequency Stability . . . . . +/- 2ppm (total, 0 to 50°C)
Thickness Display Resolution . . . . . 1 Å
Frequency Resolution* . . . . . . . . . . . +/- 0.12 Hz (Std.), +/- 0.03 Hz (HiRes)
Rate Resolution* . . . . . . . . . . . . . . . 0.60 Å/s (Std.), 0.037 Å/s (HiRes)
Thickness Resolution* . . . . . . . . . . . 0.15 Å (Std.), 0.037 Å (HiRes)
*Density = 1, Period = 4 rdgs/sec (Std.) 10 rdgs/s (HiRes)
1.4.2 Film Parameters
IPN 074-511-P1C
Stored Films . . . . . . . . . . . . . . . . . . . 99
Density . . . . . . . . . . . . . . . . . . . . . . . 0.5 – 99.99 gm/cc
Tooling . . . . . . . . . . . . . . . . . . . . . . . 10 – 399 %
Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . 0.10 – 10.00
Final Thickness . . . . . . . . . . . . . . . . 0.000 – 99.99 kÅ
Thickness Setpoint . . . . . . . . . . . . . . 0.000 – 99.99 kÅ
Time Setpoint . . . . . . . . . . . . . . . . . . 0:00 – 99:59 mm:ss
Sample/Hold. . . . . . . . . . . . . . . . . . . 0-9999 s
Sensor Average . . . . . . . . . . . . . . . . Any combination of installed sensors
1 - 5
SQM-160 Operating Manual
1.4.3 System Parameters
Measurement Period . . . . . . . . . . . . 0.15 to 2 s
Simulate Mode . . . . . . . . . . . . . . . . . On/Off
Frequency Mode . . . . . . . . . . . . . . . On/Off
Rate Resolution . . . . . . . . . . . . . . . . 0.01/0.1 Å/s
Measurement Filter . . . . . . . . . . . . . 1 to 20 readings
Dual Crystal 1/2 . . . . . . . . . . . . . . . . On/Off
Rate Sampling . . . . . . . . . . . . . . . . . On/Off
RS-232 Baud Rate . . . . . . . . . . . . . . 2.4/4.8/9.6/19.2 kb/s
Etch Mode . . . . . . . . . . . . . . . . . . . . On/Off
Crystal Tooling 1-6 . . . . . . . . . . . . . . 10-399%
Crystal Fail Min/Max. . . . . . . . . . . . . 4.0 to 6.0 MHz / 4.1 to 6.1 MHz
1.4.4 Digital I/O
Digital Inputs. . . . . . . . . . . . . . . . . . . 4
Functions . . . . . . . . . . . . . . . . . . . . . Open Shutter, Close Shutter, Zero
Thickness, Zero Time
Input Rating . . . . . . . . . . . . . . . . . . . 5 V (dc), non-isolated
Relay Outputs. . . . . . . . . . . . . . . . . . 4
Functions . . . . . . . . . . . . . . . . . . . . . Shutter, Sample/Hold or Thickness Setpoint,
Dual Sensor Shutter or Time Setpoint,
Crystal Fail
Relay Rating. . . . . . . . . . . . . . . . . . . 30 V
or 30 V (dc), 2 A maximum
rms
IPN 074-511-P1C
1 - 6
1.4.5 General Specifications
Mains Power Supply. . . . . . . . . . . . . 100-120/200-240~, ±10% nominal, 50/60 Hz
Power Consumption . . . . . . . . . . . . . 20 W
Operating Environment . . . . . . . . . . 0°C to 50°C
Storage Environment . . . . . . . . . . . . -40°C to 70°C
Rack Dimensions (HxWxD) . . . . . . . 88.5 mm x 212.7 mm x 196.9 mm
SQM-160 Operating Manual
0 to 80% RH non-condensing
0 to 2,000 meters
Indoor Use Only
Class 1 Equipment (Grounded Type)
Suitable for Continuous Operation
Ordinary Protection (not protected against
harmful ingress of moisture)
Pollution Degree 2
Installation (Overvoltage) Category II
for transient overvoltages
Weight . . . . . . . . . . . . . . . . . . . . . . . 2.7 kg (6 pounds)
IPN 074-511-P1C
1 - 7
SQM-160 Operating Manual
1.5 Unpacking and Inspection
1 If the SQM-160 has not been removed from its packaging, do so now.
2 Carefully examine the unit for damage that may have occurred during shipping.
This is especially important if you notice obvious rough handling on the outside
of the container. Immediately report any damage to the carrier and to INFICON.
3 Do not discard the packing materials until you have taken inventory and have
at least performed a power on verification.
4 Take an inventory of your order by referring to your order invoice and the
information contained in section 1.6.
5 To install and setup, see Chapter 2, Quick Start.
6 For additional information or technical assistance, contact INFICON, refer to
section 1.3 on page 1-4.
1.6 Parts and Options Overview
1.6.1 Base Configurations
SQM-160 . . . . . . . . . . . . . . . . . . . . . . . . .SQM160-X-X-X
Consult the figure below for possible configurations.
Figure 1-2 SQM-160 Configurations
Technical Manual . . . . . . . . . . . . . . . . . . .074-511 on 074-5000-G1 CD
IPN 074-511-P1C
1 - 8
1.6.2 Accessories
Each sensor requires an oscillator kit to interface to the controller:
SQM-160 10 ft. Oscillator Kit . . . . . . 782-934-003-10
SQM-160 25 ft. Oscillator Kit . . . . . . 782-934-003-25
SQM-160 50 ft. Oscillator Kit . . . . . . 782-934-003-50
SQM-160 100 ft. Oscillator Kit . . . . . 782-934-003-99
Above kits consist of oscillator 782-900-010, 6 inch BNC oscillator to feedthrough
cable 782-902-011 and BNC controller to oscillator cable 782-902-012-10,
782-902-012-25, 782-902-012-50 or 782-902-012-99. These kits are designed for
use with the standard in-vacuum cables ranging in length from 6 in. (15.2 cm) to
36 in. (91.4 cm). The 007-044 standard in-vacuum cable supplied with the front
load style sensors are 30.75 in. (78.1 cm) long.
19 in. Rack mount for 1 SQM-160 . . 782-900-008
19 in. Rack mount for 2 SQM-160 . . 782-900-014
SQM-160 Operating Manual
1.6.3 Sensors
Front Load Single Sensor. . . . . . . . . . . . . . . . . . . . . SL-XXXXX
Front Load Dual Sensor . . . . . . . . . . . . . . . . . . . . . . DL-AXXX
Cool Drawer Single Sensor . . . . . . . . . . . . . . . . . . .CDS-XXFXX
Cool Drawer Dual Sensor. . . . . . . . . . . . . . . . . . . . . CDD-XFXX
Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . 750-618-G1
Front Load UHV Bakeable Sensor . . . . . . . . . . . . . .BK-AXF
NOTE: "X" in part number indicates customer-selectable option, see
www.inficon.com for Sensor Datasheets.
NOTE: All shuttered sensors require a feedthrough with an air line and a
IPN 074-511-P1C
Pneumatic Shutter Actuator Control Valve . . . . . . . . 750-420-G1
NOTE: Multi-crystal (rotary) sensor should not be used with the SQM-160
pneumatic shutter actuator control valve.
1 - 9
SQM-160 Operating Manual
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1 - 10
IPN 074-511-P1C
2.1 Introduction
WARNING - Risk Of Electric Shock
WARNING - Risk Of Electric Shock
This section assumes you are familiar with thin film monitors. See section 2.3,
Front Panel, on page 2-2 and section 2.4, Rear Panel, on page 2-3 for basic system
use and connection information.
2.2 Installation
SQM-160 Operating Manual
Chapter 2
Quick Start
Maintain adequate insulation and physical separation of
sensor, I/O, and wiring from hazardous voltages.
1 Rack Installation
The SQM-160 occupies a 3.5 in. high, half-rack space. Rack installation
requires an optional half-rack adapter kit or a full rack extender kit. Install the
SQM-160 in a 19 in. rack with the appropriate hardware. See section 3.21,
Rack Mounting Procedure, on page 3-18, for detailed installation instructions.
2 Power Connection
Verify that the power cable provided is connected to a
properly grounded mains receptacle.
IPN 074-511-P1C
3 Sensor Connections
Connect the BNC cables and oscillator from your vacuum chamber
feedthrough to the SQM-160 Sensor Input(s). See section 2.4 on page 2-3.
4 Digital I/O Connections
Refer to section 3.20, I/O Connections, on page 3-16 for details on wiring digital
I/O to the SQM-160 Relay I/O connector.
5 Computer Connection
If you would like to use the supplied Windows Comm software with the
SQM-160, see section Chapter 4, SQM-160 Comm Software, on page 4-1.
2 - 1
SQM-160 Operating Manual
Crystal Status
Thickness kA
Next
Clear Program
Open
Closed
Thk SP
1
2
Display 1
Display 2
Crystal
Status
LEDs
Control
Knob
Control
Section
Setpoint
LEDs
Configuration
Section
6 Option Connections
If you have purchased the optional four sensor card, connect the four additional
sensors to these four inputs.
7 Power On
Move the rear panel power switch to the On (|) position. The SQM-160 will
briefly display its software and hardware versions, then go to normal operating
mode.
2.3 Front Panel
Figure 2-1 SQM-160 Front Panel
Rate A/s
Zero
Xtal Life Shutter
Time
Time SP
Final Thk
3
4
5
6
Prev
Display 1
Displays rate/thickness or frequency in normal operation. If multiple sensors are
being used and Display shows Time, this is the average of those sensors. Turn the
Control Knob right to display each individual sensor's readings. Displays the setup
parameter name in program mode.
Display 2
Displays deposition time, or the sensor # displayed on Display 1 when scrolling
through sensor readings. Displays setup parameter values in program mode.
Control Section
Push-button to zero the thickness reading.
Push-button to toggle display between Crystal Life and Rate/Thickness readings.
Push-button to Open/Close shutter relay.
Control Configuration
IPN 074-511-P1C
2 - 2
Two LED shutter relay status display.
SQM-160 Operating Manual
Sensor 1 Sensor 2
Option Card
Relay I/O
100-120/200-240V~
Thick Out
Rate Out
3
456
Fuse T2.5A 250V
USB/Ethernet
Configuration Section
Push-button to enter/exit program mode.
Push-button to cancel a change and return to original value.
Push-buttons to move to Next/Previous parameter.
Setpoint LEDs
Illuminates when the indicated setpoint is reached.
Crystal Status LEDs
Illuminates when the crystal is active and operating properly.
Flashes when an active crystal fails.
Extinguished when that crystal is not being used.
Control Knob
Used to adjust values or scroll though menu selections.
Pushing the control knob stores the current setting.
2.4 Rear Panel
Figure 2-2 Rear Panel
RS-232
IPN 074-511-P1C
Sensor 1 & 2
Connection to quartz crystal sensors. See section 2.5 on page 2-4 for detailed
hookup information.
Rate and Thick Outputs
Provides 0-5 V analog outputs for Sensor 1 & 2 rate and thickness readings. For
connection to strip chart recorders, etc.
Sensor
50/60 Hz
20 W
Relay I/O
Connects 4 relays and 4 digital inputs to external devices. See section 3.20, I/O
Connections, on page 3-16 for connections.
2 - 3
SQM-160 Operating Manual
WARNING
WARNING - Risk Of Electric Shock
RS-232
Connection to computer for programming and data acquisition. See Chapter 5,
Communications.
USB/Ethernet
Optional connection to computer USB or Ethernet port for programming and data
acquisition. See Chapter 5, Communications.
Option Card
Provides four additional sensor measurement channels.
Measurement ground terminal useful for common system and cable grounding.
Power Connector
Use removable power cords only of the specified type
and rating, attached to a properly grounded receptacle.
2.5 System Connections
Figure 2-3 shows typical vacuum system wiring.
WARNING: Maintain adequate insulation and physical
separation of sensor wiring from hazardous voltages.
IPN 074-511-P1C
2 - 4
SQM-160 Operating Manual
Sensor
Relay I/O
Option Card
Rate OutThick OutSensor 2Sensor 1
RS-232 43
100-120/200-240V~
50/60 Hz
20 W
Fuse T2.5A 250V
65
Sensor
In-Vac Cable
Feedthrough
6 in. BNC Cable
Oscillator
10 ft. BNC Cable
Ground Wire
SQM-160 Monitor
Figure 2-3 Typical Vacuum System Wiring
Sensor
Holds the quartz crystal used to measure rate and thickness. Crystals must be
replaced occasionally.
IPN 074-511-P1C
In-Vac Cable
Microdot cable that connects the sensor to the feedthrough.
Feedthrough
Provides isolation between vacuum and atmosphere for electrical and cooling
lines.
6 in. BNC Cable
Provides a flexible connection from the feedthrough to the oscillator. Keep this
cable as short as possible.
Oscillator
Contains the electronics to operate the quartz crystal. The length from the oscillator
to the crystal should be under 40 in. (1 m).
10' BNC Cable
Connects the oscillator to the SQM-160. Lengths up to 100 ft. (30 m) are
acceptable.
Ground Wire
A wire, preferably braided, that connects the vacuum system to the SQM-160
ground terminal.
2 - 5
SQM-160 Operating Manual
2.6 Film Setup
This section will help you set up the SQM-160 to measure a film. See Chapter 3,
Operation, for detailed programming instructions.
1 Enter Program Mode
Press Program to enter the film setup menu. If the Crystal Life display is shown,
press Xtal Life to return to Rate/Thickness mode, then press Program.
2 Select a Film
Turn the Control Knob to select one of the 99 possible films, then press the
Control Knob to enter that Film Menu.
3 Set Film Parameters
Turn the Control Knob to set the first film parameter (Density). The parameter
value is shown in Display 2. Press the Control Knob to save the value and move
to the next parameter. Press Clear to return the film parameter to its original
value. Continue to set each parameter. Be sure to press the Control Knob to
store each parameter. Press Program to exit Program mode and return to
normal mode.
4 Set System Parameters
To Enter the System Menu, press Program, then Prev. Select and set system
parameters by turning and then pressing the Control Knob as described above.
Press Program to return to Normal mode.
If the sensor(s) selected during Film setup are connected properly to the SQM-160,
the Crystal Status LEDs should be illuminated. If not, return to the Film Menu and
set the Sensor Average parameter to the desired sensor(s). See section 3.5 on
page 3-6 for detailed information on assigning sensors to a film.
If the Crystal Status LED is flashing, the sensor is most likely not properly
connected. A small test crystal, supplied with each oscillator module, can be used
to test sensor connections external to the vacuum chamber. To use the test crystal,
disconnect the oscillator from its 6 in. BNC cable. Attach the test crystal to the
oscillator's feedthrough connector. The Crystal Status LED will remain illuminated
if the external sensor connections are correct.
See section 6.2.2, Troubleshooting Sensors, on page 6-3 for assistance in
troubleshooting sensor problems.
IPN 074-511-P1C
2 - 6
2.7 Depositing a Film
If you have followed this Quick Start chapter, you are ready to deposit a film. Follow
the procedure below to begin deposition.
1 Verify Sensor Operation
Verify that the Crystal Status LED for the measuring sensor(s) is illuminated,
and not blinking.
2 Display Rate/Thickness
Display 1 should be displaying Rate on the left and Thickness on the right. If
the Crystal Life display mode is active, press the Xtal Life switch to return to
Rate/Thickness mode. If the Program Mode is active, press Program to return
to normal mode.
3 Zero Thickness
If needed, press the Zero switch to zero the thickness reading.
4 Start Deposition
Apply power to the source evaporation supply. If the SQM-160 shutter relay is
connected, press the Shutter switch to open the source shutter and begin
deposition.
SQM-160 Operating Manual
Rate and Thickness displays should begin to move from zero.
If the displays remain at zero, check the system setup to assure that evaporating
is actually taking place. Also check that the deposited material is reaching the
sensor.
If the display is erratic or noisy, first check your sensor connections. See section
6.2.2, Troubleshooting Sensors, on page 6-3 for information that can help in
identifying the cause of noisy readings.
If the rate and thickness readings do not match expectations, see the Film
Parameter (Density, Z-Ratio (Z-Factor), Tooling) and Sensor Tooling sections of
IPN 074-511-P1C
Chapter 3.
Review the remainder of this manual for detailed operational, programming, and
safety information.
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SQM-160 Operating Manual
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IPN 074-511-P1C
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