INFICON SKY CDG100D User Manual
Capacitance Diaphragm Gauge
CDG100D
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Operating Manual
Incl. EC Declaration of Conformity
Product Identification
In all communications with INFICON, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.
INFICON AG, LI-9496 Balzers
Model:
PN:
SN:
V W ; LPS
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Validity
This document applies to products of the CDG100D series.
Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. factory setting of setpoint) as defined in the
corresponding ordering information.
Switching function
3CD1-xxx-xxxx
Receptacle
Measurement range
(F.S.)
The part number (PN) can be taken from the product nameplate.
2 None
3 2 switching functions
Interface
0 None (analog)
1 DeviceNet
2 Profibus
8 EtherCAT
Filter
0 Standard
B P control
0 D-Sub, 9-pin
2 D-Sub, 15-pin
Flange
1 DN 16 ISO-KF
3 DN 16 CF-R
9 1/2" tube
E 8VCR female
H 8VCR long tube
Unit
5 Torr
6 mbar
3 0.1
4 0.25
5 0.5
6 1
7 2
8
9
A
B 50
C 100
D 200
E 500
F 1000 (Torr only)
G 1100 (mbar only)
5
10
20
(x 133 Pa; x 1.3 mbar)
(x 100 Pa)
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If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with D-Sub 15-pin connector
and DN 16 ISO-KF vacuum connection. They apply to the other
gauges by analogy.
We reserve the right to make technical changes without prior
notice.
Intended Use
The temperature compensated Capacitance Diaphragm Gauges
of the CDG100 series are intended for absolute pressure measurement of gases in their respective pressure ranges (→ 3).
The gauges belong to the SKY
®
Smart Sensors family and can
be operated in connection with an INFICON Vacuum Gauge
Controller (VGC series) or another appropriate controller.
Functional Principle
A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into an analog linear output signal by the digital electronics.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the
sensor to a constant temperature of 100°C which results in a
compensation of changes in the ambient conditions and a reduced deposition of process products and by-products in process applications. An integrated baffle protects the sensor
against coating.
Trademarks
SKY® INFICON GmbH
®
Swagelok Marketing Co.
VCR
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Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085
Scope of Delivery
1× gauge CDG100D
1× insulation shell
1× pin
1× Calibration Test Report
1× Operating Manual German
1× Operating Manual English
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Contents
Product Identification 2
Validity 3
Intended Use 4
Functional Principle 4
Trademarks 4
Patents 5
Scope of Delivery 5
Safety 8
1
1.1 Symbols Used 8
1.2 Personnel Qualifications 8
1.3 General Safety Instructions 9
1.4 Liability and Warranty 9
2 Technical Data 10
3 Installation 16
3.1 Vacuum Connection 16
3.2 Power Connection 20
3.2.1 D-Sub, 9-pin Connector 21
3.2.2 D-Sub, 15-pin Connector 22
4 Operation 23
4.1 Status Indication 23
4.2 Zeroing the Gauge 24
4.2.1 <ZERO> Adjustment 25
4.3 Switching Functions 29
4.4 Activating the Factory Setting (Factory Reset) 32
4.5 Diagnostic Port (RS232C Interface) 33
5 Deinstallation 34
5.1 Power Connection 34
5.2 Vacuum connection 34
6 Maintenance, Repair 37
7 Returning the Product 37
8 Disposal 38
9 Accessories 39
6
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Further Information 39
ETL Certification 40
EC Declaration of Conformity 41
For cross-references within this document, the symbol (→ XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→ [Z]).
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1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the necessary experience or who have been instructed by the end-user
of the product.
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1.3 General Safety Instructions
• Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
• Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations etc.)
on the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear are not
covered by the warranty.
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2 Technical Data
For further technical data for gauges with DeviceNet,
Profibus or EtherCAT interface → [5], [6], [7].
Measurement range
1)
Accuracy
≤0.5 Torr/mbar F.S.
≥1 Torr/mbar F.S.
Temperature effect on zero
≤0.5 Torr/mbar F.S.
≥1 Torr/mbar F.S.
Temperature effect on span 0.02% of reading / °C
Resolution
Gas type dependence none
Output signal analog
(measurement signal)
Measurement range 0 … +10 V
Voltage range –5 … +10.24 V
Relationship voltage-pressure linear
Output impedance
Loaded impedance
Response time
2)
≥0.25 Torr/mbar (F.S.)
0.1 Torr/mbar (F.S.)
Identification
Resistance R
Voltage
1)
Non-linearity, hysteresis, repeatability in the calibrated range at 25 °C
ambient operating temperature without temperature effects after
operation of 2 h.
2)
Increase 10 … 90 % F.S.R.
Ident
10
→ "Validity"
0.4% of reading
0.2% of reading
0.0050% F.S./ °C
0.0025% F.S./ °C
0.003% F.S.
(limited to +10.24 V)
0 Ω (short-circuit proof)
>10 kΩ
30 ms
130 ms
13.2 kΩ referenced to
supply common
≤5 V
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Remote Zero Adjust
External switching contact
digital input for zero adjustment (→ 25)
30 V (dc) / <5 mA (dc)
Switching functions SP1, SP2
Setting range 0 … 99% F.S. (0 … 9.9 V)
Hysteresis 1% F.S.
Relay contact 30 V (dc)/ ≤0.5 A (dc)
floating (NO)
closed p ≤ p
open p ≥ p
Switching time ≤50 ms
(LED lit solid)
SP
(LED off)
SP
Status relay
Relay contact 30 V (dc)/ ≤0.5 A (dc)
connected to supply com-
mon (pin 5)
closed measurement mode
warning
open no supply voltage
warming up
RS232C interface
Transmission rate
Data format
error
9600 baud
binary
8 data bits
one stop bit
no parity bit
no handshake
→ "Power Connection"
For further information on the RS232C interface → [4].
Diagnostic port Jack connector, 2.5 mm,
3-pin
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Supply
DANGER
The gauge may only be connected to power supplies, instruments or control devices that conform
to the requirements of a grounded protective extralow voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
3)
be fused
Supply voltage
at the gauge
.
Class 2 / LPS
+14 … +30 V (dc) or
±15 V (±5%)
Ripple ≤1 V
Power consumption
while being heated
at operating temperature
≤15 W
≤10 W
pp
The gauge is protected against reverse polarity of the supply
voltage and overload.
Electrical connection
3CD1-xxx-0xxx
3CD1-xxx-2xxx
Sensor cable for
3CD1-xxx-0xxx
3CD1-xxx-2xxx
Cable length
Supply voltage 15 V
9-pin D-Sub, male
15-pin D-Sub, male
9-pin plus shielding
15-pin plus shielding
≤ 4 m (0.14 mm²/conductor)
≤ 7 m (0.25 mm²/conductor)
Supply voltage 24 V ≤20 m (0.14 mm²/conductor)
≤35 m (0.25 mm²/conductor)
Supply voltage 30 V ≤40 m (0.14 mm²/conductor)
≤70 m (0.25 mm²/conductor)
For longer cables, larger conductor cross-sections are required
(R
≤1.0 Ω).
cable
3)
INFICON controllers fulfill this requirement.
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Grounding concept
→ "Power Connection"
Materials exposed to vacuum ceramics (Al2O3 ≥99.5%),
stainless steel AISI 316L
3 bar
2 bar
1.3 bar
3
Internal volume ≤4.2 cm
Admissible pressure (absolute)
200 / 500 / 1000 / 1100 F.S.
1 / 2 / 5 / 10 / 20 / 50 / 100 F.S.
0.1 / 0.25 / 0.5 F.S.
Bursting pressure (absolute) 6 bar
Admissible temperatures
Storage
Operation
Bakeout
Relative humidity
–40 °C … +65 °C
+10 °C … +50 °C
≤110 °C at the flange
≤80% at temperatures
≤+31 °C, decreasing to 50%
at +40°C
Use indoors only, altitude up to
2000 m NN
Degree of protection IP 40
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82
Dimensions [mm]
110.4 3.8
31.5
OD½"
31.5
13
DN 16 ISO-KF
31.5
54.1
31.5
DN 16 CF-R
8-VCR
female
8-VCR long
female
Weight 837 … 897 g
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