Capacitance Diaphragm Gauge
CDG045D
tina51e1-c (2011-12) 1
Operating Manual
Incl. EC Declaration of Conformity
Product Identification
In all communications with INFICON, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.
INFICON AG, LI-9496 Balzers
Model:
PN:
SN:
V W ; LPS
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tina51e1-c (2011-12)
Validity
This document applies to products of the CDG045D series.
Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. factory setting of setpoint) as defined in the
corresponding ordering information.
Switching function
Interface
3CC1-xxx-xxxx
Receptacle
Measurement range
(F.S.)
The part number (PN) can be taken from the product nameplate.
2
3
0 none (analog)
1 DeviceNet
2 Profibus
Filter
0 Standard
B P control
0 D-Sub, 9-pin
2
Flange
1 DN 16 ISO-KF
3 DN 16 CF-R
9 1/2" tube
E 8VCR female
Unit
5 Torr
6 mbar
3 0.1
4 0.25
5 0.5
6 1
7 2
8
9
A
B 50
C 100
D 200
E 500
F 1000 (Torr only)
G 1100 (mbar only)
None
2 switching functions
D-Sub, 15-pin
(x 133 Pa; x 1.3 mbar)
(x 100 Pa)
5
10
20
tina51e1-c (2011-12) 3
If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with D-Sub 15-pin connector
and DN 16 ISO-KF vacuum connection. They apply to the other
gauges by analogy.
We reserve the right to make technical changes without prior
notice.
Intended Use
The temperature compensated Capacitance Diaphragm Gauges
of the CDG045 series are intended for absolute pressure
measurement of gases in their respective pressure ranges
(→ 3).
The gauges belong to the SKY
®
Smart Sensors family and can
be operated in connection with an INFICON Vacuum Gauge
Controller (VGC series) or another appropriate controller.
Functional Principle
A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into an analog linear output signal by the digital electronics.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the
sensor to a constant temperature of 45°C which results in a compensation of changes in the ambient conditions and a reduced
deposition of process products and by-products in process applications.
Trademarks
SKY® INFICON GmbH
®
Swagelok Marketing Co.
VCR
4
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Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085
Scope of Delivery
1× gauge CDG045D
1× pin
1× Calibration Test Report
1× Operating Manual German
1× Operating Manual English
Contents
Product Identification 2
Validity 3
Intended Use 4
Functional Principle 4
Trademarks 4
Patents 5
Scope of Delivery 5
Safety 7
1
1.1 Symbols Used 7
1.2 Personnel Qualifications 7
1.3 General Safety Instructions 8
1.4 Liability and Warranty 8
2 Technical Data 9
tina51e1-c (2011-12) 5
3 Installation 15
3.1 Vacuum Connection 15
3.2 Power Connection 18
3.2.1 D-Sub, 9-pin Connector 19
3.2.2 D-Sub, 15-pin Connector 20
4 Operation 21
4.1 Status Indication 21
4.2 Zeroing the Gauge 22
4.2.1 <ZERO> Adjustment 23
4.3 Switching Functions 27
4.4 Activating the Factory Setting (Factory Reset) 30
4.5 Diagnostic Port (RS232C Interface) 31
5 Deinstallation 32
6 Maintenance, Repair 34
7 Returning the Product 34
8 Disposal 35
9 Accessories 36
Further Information 36
ETL Certification 37
EC Declaration of Conformity 38
For cross-references within this document, the symbol (→ XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→ [Z]).
6
tina51e1-c (2011-12)
1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the necessary experience or who have been instructed by the end-user
of the product.
tina51e1-c (2011-12) 7
1.3 General Safety Instructions
• Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
• Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations etc.)
on the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear are not
covered by the warranty.
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tina51e1-c (2011-12)
2 Technical Data
For further technical data for gauges with DeviceNet and
Profibus interface → [5] and [6].
Measurement range
1)
Accuracy
0.15% of reading
Temperature effect on zero
0.1 / 0.25 / 0.5 F.S.
1 … 1100 F.S.
Temperature effect on span 0.01% of reading / °C
Resolution
Gas type dependence none
Output signal analog
(measurement signal)
Measurement range 0 … +10 V
Voltage range –5 … +10.24 V
Relationship voltage-pressure linear
Output impedance
Loaded impedance
Response time
2)
≥0.25 Torr/mbar (F.S.)
0.1 Torr/mbar (F.S.)
Identification
Resistance R
Voltage
Ident
→ "Validity"
0.0050% F.S./ °C
0.0025% F.S./ °C
0.003% F.S.
(limited to +10.24 V)
0 Ω (short-circuit proof)
>10 kΩ
30 ms
130 ms
13.2 kΩ referenced to
supply common
≤5 V
1)
Non-linearity, hysteresis, repeatability at 25 °C ambient operating
temperature without temperature effects after operation of 2 h.
2)
Increase 10 … 90 % F.S.R.
tina51e1-c (2011-12) 9
Remote Zero Adjust
External switching contact
digital input for zero adjustment (→ 23)
30 VDC / <5 mA DC
Switching functions SP1, SP2
Setting range 0 … 99% F.S. (0 … 9.9 V)
Hysteresis 1% F.S.
Relay contact 30 VDC/ ≤0.5 ADC
floating (n.o.)
closed p ≤ p
open p ≥ p
(LED lit solid)
SP
(LED off)
SP
Switching time ≤50 ms
Status relay
Relay contact 30 VDC/ ≤0.5 ADC
connected to supply com-
mon (pin 5)
closed measurement mode
warning
open no supply voltage
warming up
error
RS232C interface
Transmission rate
Data format
9600 baud
binary
8 data bits
one stop bit
no parity bit
no handshake
→ "Electrical Connection"
For further information on the RS232C interface → [4].
Diagnostic port Jack connector, 2.5 mm,
3-pin
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Supply
DANGER
The gauge may only be connected to power supplies, instruments or control devices that conform
to the requirements of a grounded protective extralow voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
3)
be fused
Supply voltage
at the gauge
.
Class 2 / LPS
+14 … +30 VDC or
±15 V (±5%)
Ripple ≤1 V
Power consumption
while being heated
at operating temperature
≤12 W
≤8 W
pp
The gauge is protected against reverse polarity of the supply
voltage and overload.
Electrical connection
3CC1-xxx-0xxx
3CC1-xxx-2xxx
Sensor cable for
3CC1-xxx-0xxx
3CC1-xxx-2xxx
9-pin D-Sub, male
15-pin D-Sub, male
9-pin plus shielding
15-pin plus shielding
Sensor cable 15 poles plus shielding
Cable length
Supply voltage 15 V
≤ 8 m (0.14 mm²/conductor)
≤15 m (0.25 mm²/conductor)
Supply voltage 24 V ≤43 m (0.14 mm²/conductor)
≤75 m (0.25 mm²/conductor)
Supply voltage 30 V ≤88 m (0.14 mm²/conductor)
≤135 m (0.25 mm²/conductor)
3)
INFICON controllers fulfill this requirement.
tina51e1-c (2011-12) 11
For longer cables, larger conductor cross-sections are required
≤1.0 Ω).
(R
cable
Grounding concept
→ "Electrical Connection"
Materials exposed to vacuum
ceramics (Al
stainless steel AISI 316L
Internal volume ≤4.2 cm
Admissible pressure (absolute)
200 / 500 / 1000 / 1100 F.S.
1 / 2 / 5 / 10 / 20 / 50 / 100 F.S.
0.1 / 0.25 / 0.5 F.S.
Bursting pressure (absolute) 6 bar
3 bar
2 bar
1.3 bar
≥99.5%),
2O3
3
Admissible temperatures
Storage
Operation
Bakeout
–40 °C … +65 °C
+10 °C … +40 °C
≤110 °C at the flange
Relative humidity ≤80% at temperatures
≤+31 °C, decreasing to 50%
at +40°C
Use indoors only, altitude up to
2000 m NN
Degree of protection IP 40
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Dimensions [mm]
3.8
110.4
82
13
OD½"
DN 16 ISO-KF
DN 16 CF-R
8 VCR
female
31.5
Weight 837 … 897 g
tina51e1-c (2011-12) 13
Analog Measurement Signal vs. Pressure
Pressure p
1.1×F.S.
1.0×F.S.
0.9×F.S.
0.8×F.S.
0.7×F.S.
0.6×F.S.
0.5×F.S.
0.4×F.S.
0.3×F.S.
0.2×F.S.
0.1×F.S.
0.0×F.S.
0
12 345678910
Measuring signal U
p = (U
out
Conversion Torr ↔ Pascal
Torr mbar 4) Pa
c 1.00
1013.25 / 760 =
1.3332…
Example: Gauge with 10 Torr F.S.
Measurement signal U
p = (6 V / 10 V) × 10 Torr
= 0.6 × 10 Torr = 6 Torr
4)
Source: NPL (National Physical Laboratory)
Guide to the Measurement of Pressure and Vacuum, ISBN 0904457x /
1998
14
out
/ 10 V) × p (F.S.)
101325 / 760 =
= 6 V
out
[V]
4)
133.3224…
tina51e1-c (2011-12)
3 Installation
WARNING
WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
3.1 Vacuum Connection
impacts.
DANGER
DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
suited to overpressure.
DANGER
DANGER: overpressure in the vacuum system
>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage your
health.
Use O-rings provided with an outer centering ring.
tina51e1-c (2011-12) 15
DANGER: protective ground
Products that are not correctly connected to ground
can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded
vacuum chamber. This connection must conform to
the requirements of a protective connection according to EN 61010:
• CF and VCR flanges fulfill this requirement.
• For gauges with a KF flange, use a conductive
metallic clamping ring.
• For gauges with a ½" tube, take appropriate
measures to fulfill this requirement.
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.
DANGER
Caution
Caution
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Mount the gauge so that no vibrations occur. The gauge
may be mounted in any orientation. To keep condensates and particles from getting into the measuring
chamber preferably choose a horizontal to upright position. If adjustment should be possible after the gauge
has been installed, be sure to install it so that the buttons can be accessed with a pin (→ 22).
Remove the protective lid and connect the product to the vacuum system.
Seal with centering ring
Protective lid
Clamp
Keep the protective lid.
tina51e1-c (2011-12) 17
3.2 Power Connection
Make sure the vacuum connection is properly made
(→ 15).
DANGER
The gauge may only be connected to power supplies, instruments or control devices that conform
to the requirements of a grounded protective extralow voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
5)
be fused
.
Ground loops, differences of potential, or EMC problems
may affect the measurement signal. For optimum signal
quality, please do observe the following notes:
• Use an overall metal braided shielded cable. The
connector must have a metal case.
• Connect the cable shield to ground at one side via the
connector case. Make sure the connector case has
direct contact to the cable's shield on its whole circumference. Do not connect the other side of the
shield.
• Connect the supply common with protective ground
directly at the power.
• Use differential measurement input (signal common
and supply common conducted separately).
• Potential difference between supply common and
housing ≤18 V (overvoltage protection).
5)
INFICON controllers fulfill this requirement.
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3.2.1 D-Sub, 9-pin Connector
If no sensor cable is available, make one according to the
following diagram (cable length and conductor cross-sections
→ 11).
Ident
10
Ω
18 V
100nF
Electrical connection
Pin 1 Signal ouput (measurement signal)
Pin 2 N.C.
Pin 3 N.C.
Pin 4 Supply (+14 ... +30 V or +15 V)
Pin 5 Supply (-15 V)
Pin 6 N.C.
Pin 7 Gauge identification
or Remote Zero Adjust
Pin 8 Signal common
Pin 9 Supply common
case Connector case
7
1
8
4
9
5
1 M
case
Remote
Zero Adjust
14…30 V
6
9
9-pin,
D-Sub
female
soldering
side
15 V
15 V
1
5
tina51e1-c (2011-12) 19
3.2.2 D-Sub, 15-pin Connector
If no sensor cable is available, make one according to the
following diagram (cable length and conductor cross-sections
→ 11).
TxD
RxD
1 M
3
4
1
8
9
10
13
14
2
12
7
11
5
6
15
Status
SP1
SP2
Ident
10
Ω
18 V
100nF
Electrical connection
Pin 1, 4 Relay SP1, closing contact
Pin 2 Signal ouput (measurement signal)
or thresholds SP1/2
Pin 3 Status
Pin 5 Supply common
Pin 6 Supply (-15 V)
Pin 7, 11 Supply (+14 ... +30 V or +15 V)
Pin 8, 9 Relay SP2, closing contact
Pin 10 Gauge identification
or Remote Zero Adjust
Pin 12 Signal common
Pin 13 RS232, TxD
Pin 14 RS232, RxD
Pin 15 Housing (Chassis Ground)
case Connector case
case
Remote
Zero Adjust
14…30 V
9
15
15-pin
D-Sub
female
soldering
side
15 V
15 V
1
8
20
tina51e1-c (2011-12)
4 Operation
Put the gauge into operation. If you are using an INFICON controller, define the measurement range (→ [1, 2, 3]).
A warm-up time of at least ½ hour should be allowed; for precise
pressure measurements a warm-up time of at least 2 hours is
required.
If the gauge is used for fast downstream pressure con-
trol we recommend setting its signal filter to "fast".
The filter can be set via the RS232C interface or the
diagnostic port (→ [4]).
4.1 Status Indication
DIAG
I/O
1
P
S
2
S
P
S
U
T
A
T
SP ZERO
S
LED LED status Meaning
<STATUS> off no supply voltage
lit solid green measurement mode
blinking green
short blinks
long blinks
lit solid red error
<SP1> lit green green
blinking green waiting for setpoint 1 input
off p > setpoint 1
<SP2> lit solid green
blinking green waiting for setpoint 2 input
off p > setpoint 2
warning, over/underrange
warming up
p
≤ setpoint 1
p
≤ setpoint 2
tina51e1-c (2011-12) 21
4.2 Zeroing the Gauge
The gauge is factory calibrated while "standing upright"
(→ "Calibration Test Report").
We recommend performing a zero adjustment, when the
gauge is operated for the first time.
Due to long time operation or contamination, a zero drift could
occur and zero adjustment may become necessary.
For adjusting the zero, operate the gauge under the same constant ambient conditions and in the same mounting orientation
as normally.
The output signal (measuring signal) is depending on the mounting orientation. The signal difference between the vertical and
horizontal mounting orientation is:
If the gauge is operated via a controller, the zero of the
whole measuring system has to be adjusted on the
controller: first, adjust the zero of the gauge and then,
the zero of the controller.
F.S. ΔU / 90°
1000 Torr/mbar ≈2 mV
100 Torr/mbar ≈10 mV
10 Torr/mbar ≈50 mV
1 Torr/mbar ≈300 mV
0.1 Torr/mbar ≈1.8 V
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4.2.1 <ZERO> Adjustm ent
The zero can be adjusted via
• the <ZERO> button on the gauge,
• the diagnostic port (→ [4]),
• the digital input "Remote Zero" (briefly apply the
supply voltage to pin 10 (15-pin) or to pin 7 (9-pin)),
• the RS232C interface (→ [4]),
• an INFICON Vacuum Gauge Controller (VGC series).
While the gauge is being heated and/or under atmos-
pheric pressure, the zeroing function is locked in order
for operating errors to be prevented.
Evacuate the gauge to a pressure according to the table
below:
F.S.
1100 mbar
1000 Torr/mbar
500 Torr/mbar
200 Torr/mbar
100 Torr/mbar
50 Torr/mbar
20 Torr/mbar
10 Torr/mbar
5 Torr/mbar
2 Torr/mbar
1 Torr/mbar
0.5 Torr/mbar
0.25 Torr/mbar
0.1 Torr/mbar
If the final pressure is too high for zero adjustment (>25%
of the F.S.), the zero cannot be reached and the
<STATUS> LED blinks green. If this is the case, activate
the factory setting and adjust the zero again (→ 30).
Recommended final pressure for
zero adjustment
−
×10
<5
×10
<2.5
<10
×10
<5
×10
<2.5
<10
×10
<5
×10
<2.5
<10
×10
<5
×10
<2.5
<10
×10
<5
-2
-2
-2
-3
-3
-3
-4
-4
-4
-5
-5
-5
-6
Torr
Torr
Torr
Torr
Torr
Torr
Torr
Torr
Torr
Torr
Torr
Torr
Torr
<6.65
<6.65
<3.33
<1.33
<6.65
<3.33
<1.33
<6.65
<3.33
<1.33
<6.65
<3.33
<1.33
<6.65
×10
×10
×10
×10
×10
×10
×10
×10
×10
×10
×10
×10
×10
×10
-0
-1
-1
-1
-2
-2
-2
-3
-3
-3
-4
0
0
0
Pa
Pa
Pa
Pa
Pa
Pa
Pa
Pa
Pa
Pa
Pa
Pa
Pa
Pa
×10
<5
×10
<5
×10
<2.5
<10
×10
<5
×10
<2.5
<10
×10
<5
×10
<2.5
<10
×10
<5
×10
<2.5
<10
×10
<5
-2
mbar
-
2 mbar
-2
mbar
-2
mbar
-3
mbar
-3
mbar
-3
mbar
-4
mbar
-4
mbar
-4
mbar
-5
mbar
-5
mbar
-5
mbar
-6
mbar
tina51e1-c (2011-12) 23
Operate the gauge for at least ¼ hour (until the signal is
stable).
Briefly press the <ZERO> button with a pin (max.
ø1.1 mm). The zero adjustment runs automatically. The
<STATUS> LED blinks until the adjustment (duration ≤8 s)
is completed.
Press the button briefly
max. ø1.1 mm
After zero adjustment, the gauge automatically returns
to the measurement mode.
The <STATUS> LED blinks green if
• the signal output is negative (< -20 mV) when the final pressure has been attained
• the zero adjustment has failed.
4.2.2 <ZERO> Adjustment with Ramp Functi on
The ramp function allows to adjust the zero at a known reference
pressure within the measurement range of the gauge.
24
tina51e1-c (2011-12)
It also permits to adjust an offset of the characteristic curve in
order to
• compensate for the offset of the measuring system or
• obtain a slightly positive zero for a 0 … 10 V AD converter.
The offset should not exceed 2% of the F.S. (+200 mV). At a
higher positive offset, the upper limit of the measurement range
is exceeded.
Zero adjustment using the ramp function can be
performed via
• the <ZERO> button on the gauge,
• the diagnostic port (→ [4]),
• the RS232C interface (→ [4]).
Recommended procedure for adjusting the offset of a
measuring system: → Notice 22.
Operate the gauge for at least 1 hour (until the signal is
stable).
Push the <ZERO> button with a pin (max. ø1.1 mm) and
keep it depressed. The <STATUS> LED starts blinking.
After 5 s, the zero adjustment value, starting at the current
output value, keeps continually changing (ramp) until the
button is released or until the setting limit (max. 25% F.S.)
is reached. The corresponding output signal is delayed by
about 1 s.
tina51e1-c (2011-12) 25
Keep the button depressed
max. ø1.1 mm
Push the <ZERO> button again:
Fine adjustment
within 0...3 s:
the zero adjustment value changes
by one unit (push <ZERO> button in
intervals of 1 s)
Change of direction
within 3...5 s:
the zero adjustment changes its
direction (the blinking frequency of
the <STATUS> LED changes
briefly)
If the <ZERO> button is released for more than 5 s, the
gauge returns to the measurement mode.
The <STATUS> LED blinks green if the signal output is negative
(< -20 mV).
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4.3 Switching Functions
The two switching functions can be set to any pressure within
the measurement range of the gauge (→ 14).
The current setpoint setting
• can be read/written via the diagnostic port,
• is output at the D-Sub connector instead of the measurement
signal (→ 20) and can be measured with a voltmeter after
the <SP> button is pressed, or
• can be read/written via the RS232C interface.
If the pressure is lower than the setpoint, the corresponding LED
(<SP1> or <SP2>) is lit solid and the corresponding relay
(→ 20) is energized.
Measurement signal (pressure p)
Setpoint
e
m
e
r
u
s
a
e
M
Hysteresis
(1% F.S.)
Threshold value
e
u
l
a
v
t
n
Off
On
Off
tina51e1-c (2011-12) 27
Time t
4.3.1 Adjusting the Setpoints
The setpoints can be adjusted via
• the buttons on the gauge,
• the diagnostic port (→ [4]),
• the RS232C interface (→ [4]).
DANGER
DANGER: malfunction
If processes are controlled via the signal output,
keep in mind that by pushing the <SP> button the
measurement signal is suppressed and the corresponding threshold value is output instead. This
can cause malfunctions.
Push the <SP> button only if you are sure that no
damages can arise from a malfunction.
Adjusting Setpoint <1>
Push the <SP> button with a pin (max. ø1.1 mm). The
gauge changes to the switching function mode and outputs
the current threshold value at the measurement value
output for about 10 s (LED <1> blinks).
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tina51e1-c (2011-12)
Press the button
max. ø1.1 mm
For changing the threshold value, push the <ZERO> button
and keep it depressed. The threshold keeps changing from
the current value (ramp) until the button is released or until
the limit of the setting range is reached.
Keep the button depressed
max. ø1.1 mm
tina51e1-c (2011-12) 29
Push the <ZERO> button again:
Fine adjustment
within 0...3 s:
Change of direction
within 3...5 s:
If the <ZERO> button is released for more than 5 s, the
gauge returns the measurement mode.
The upper threshold is automatically set 1% F.S. above
the lower one (hysteresis).
the zero adjustment value changes
by one unit
the zero adjustment changes its
direction (the blinking frequency of
the <STATUS> LED changes
briefly)
Adjusting Setpoint <2>
Push the <SP> button twice (the LED <2> blinks). The adjustment procedure is the same as for setpoint <1>.
4.4 Activating the Factory Setting (Factory Reset)
All user defined parameters (e.g. zero, filter) are restored to their
default values.
Loading of the default parameters is irreversible.
Loading the default parameters:
Put the gauge out of operation.
Keep the <ZERO> button depressed for at least 5 s while
the gauge is being put into operation (Power ON).
30
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4.5 Diagnostic Port (RS232C Interface)
The diagnostic port <DIAG> permits to output the pressure
reading and all status information and to enter all settings at the
same time (→ [4]).
"Accessories"
→
tina51e1-c (2011-12) 31
5 Deinstallation
WARNING
WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
impacts.
32
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
DANGER
Caution
tina51e1-c (2011-12)
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.
Vent the vacuum system.
Put the gauge out of operation.
Unfasten the lock screws and disconnect the sensor cable.
Remove the gauge from the vacuum system and install the
protective lid.
tina51e1-c (2011-12) 33
6 Maintenance, Repair
Under clean operating conditions, the product requires no maintenance.
Gauge failures due to contamination or wear and tear
are not covered by the warranty.
We recommend checking the zero at regular intervals
(→ 23).
INFICON assumes no liability and the warranty becomes null
and void if any repair work is carried out by the end-user or third
parties.
7 Returning the Product
WARNING
WARNING: forwarding contaminated products
Contaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detrimental to health and environment.
Products returned to INFICON should preferably be
free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed
*)
Form under www.inficon.com
declaration of contamination
Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration of
contamination are returned to the sender at his own expense.
34
*)
.
tina51e1-c (2011-12)
8 Disposal
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
Separating the components
After disassembling the product, separate its components according to the following criteria:
• Contaminated components
• Other components
tina51e1-c (2011-12) 35
when handling contaminated parts.
WARNING
WARNING: substances detrimental to the environment
Products or parts thereof (mechanical and electric
components, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with the
relevant local regulations.
Contaminated components (radioactive, toxic, caustic or biological hazard etc.) must be decontaminated in accordance
with the relevant national regulations, separated according to
their materials, and disposed of.
Such components must be separated according to their materials and recycled.
9 Accessories
Ordering number
Communication adapter (2 m) 6) 303-333
Further Information
[1] www.inficon.com
Operating Manual
Vacuum Gauge Controller VGC032
tinb02e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[2] www.inficon.com
Operating Manual
Single-Channel Controller VGC401
tinb01e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[3] www.inficon.com
Operating Manual
Two- & Three-Channel Measurement and Control Unit
VGC402, VGC403
tinb07e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[4] www.inficon.com
Communication Protocol
RS323C Interface
tira49e1
INFICON AG, LI–9496 Balzers, Liechtenstein
6)
The diagnostic software (Windows NT, XP) can be downloaded from our
website.
36
tina51e1-c (2011-12)
[5] www.inficon.com
Communication Protocol
DeviceNet™ CDG045D
tira51e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[6] www.inficon.com
Communication Protocol
Profibus CDG045D
tira54e1
INFICON AG, LI–9496 Balzers, Liechtenstein
ETL Certification
3103457
ETL LISTED
The product CDG045D complies with
the requirements of the following
Standards:
UL 61010-1, Issued: 2004/07/12 Ed: 2
Rev: 2005/07/22
CAN/CSA C22.2#61010-1,
Issued: 2004/07/12
tina51e1-c (2011-12) 37
EC Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned
below complies with the provisions of the Directive relating to
electromagnetic compatibility 2004/108/EC.
Product
Capacitance Diaphragm Gauge
CDG045D
Standards
Harmonized and international/national standards and specifications:
• EN 61000-6-2:2005
• EN 61000-6-3:2007
• EN 61010-1:2001
measurement, control and laboratory use)
• EN 61326:2006
measurement, control and laboratory use)
Manufacturer / Signatures
INFICON AG, Alte Landstrasse 6, LI-9496 Balzers
1 July 2010 1 July 2010
(EMC: generic immunity standard)
(EMC: generic emission standard)
(Safety requirements for electrical equipment for
(EMC requirements for electrical equipment for
38
Dr. Urs Wälchli
Managing Director
Alex Nef
Product Manager
tina51e1-c (2011-12)
Notes
tina51e1-c (2011-12) 39
LI–9496 Balzers
Liechtenstein
Tel +423 / 388 3111
Fax +423 / 388 3700
Original: German tina51d1-c (2011-12) reachus@inficon.com
t i na51e1- c
www.inficon.com
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