INFICON SKY CDG025D-X3 User Manual

Capacitance Diaphragm Gauge

CDG025D-X3

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Operating Manual

Incl. Declaration of Conformity

Product Identification

In all communications with INFICON, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.

Model:

PN: SN: V W

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Validity

This document applies to products of the CDG025D, X3 series.

Part numbers of standard products are indicated below. OEM products have other part numbers and different parameter settings (e.g. factory setting of setpoint) as defined in the corresponding ordering information.

3CB1-xxx-230x

0 ⇒ Standard B ⇒ P control

Flange

1 ⇒ DN 16 ISO-KF 3 ⇒ DN 16 CF-R 9 ⇒ 1/2" tube E ⇒ 8VCR female

Unit

Measurement range

(F.S.)

The part number (PN) can be taken from the product nameplate. If not indicated otherwise in the legends, the illustrations in this

document correspond to gauges with the DN 16 ISO-KF vacuum connection. They apply to other vacuum connections by analogy.

We reserve the right to make technical changes without prior notice. All dimensions in mm.

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(x 133 Pa; x 1.3 mbar)

5 ⇒ Torr

(x 100 Pa)

6 ⇒ mbar

3 ⇒ 0.1

⇒

0.25

0.5

5 ⇒

6 ⇒ 1 7 ⇒ 2 8 ⇒ 5 9 ⇒ 10 A ⇒ 20 B ⇒ 50 C ⇒ 100 D ⇒ 200 E ⇒ 500 F ⇒ 1000 (Torr only) G ⇒ 1100 (mbar only)

Intended Use

The Capacitance Diaphragm Gauges of the CDG025D X3 series are intended for absolute pressure measurement of gases in their respective pressure ranges (→  3). They are clean room compliant and double protected against contamination.

The gauges belong to the SKY

Smart Sensors family and can be operated in connection with an INFICON Vacuum Gauge Controller (VGC series) or another appropriate measuring unit.

Function

The Capacitance Diaphragm Gauge consists of a capacitive sensor element made of aluminum oxide ceramics and electronics which convert the capacitance into a DC voltage output signal.

The output signal is linear to the measured pressure and independent of the gas type.

Trademarks

SKY® INFICON GmbH

VCR

Swagelok Marketing Co.

Patents

EP 1070239 B1, 1040333 B1 US Patents 6528008, 6591687, 7107855, 7140085

Scope of Delivery

1× gauge in clean room packaging 1× pin for adjusting settings via buttons 1× Calibration Test Report 1× Operating Manual German 1× Operating Manual English

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Contents

Product Identification 2 Validity 3 Intended Use 4 Function, Trademarks, Patents, Scope of Delivery 4

1 Safety 6

1.1 Symbols Used 6

1.2 Personnel Qualifications 6

1.3 General Safety Instructions 7

1.4 Liability and Warranty 7

2 Technical Data 8 3 Installation 13

3.1 Vacuum Connection 13

3.2 Electrical Connection 16

4 Operation 18

4.1 Displays 18

4.2 Zeroing the Gauge 19

4.2.1 <ZERO> Adjustment 20

4.3 Switching Functions 23

4.4 Activating the Factory Setting (Factory Reset) 26

5 Deinstallation 27 6 Maintenance, Repair 29 7 Returning the Product 29 8 Disposal 30

Further Information 31 Declaration of Contamination 32 ETL Certification 33 EC Declaration of Conformity 34

For cross-references within this document, the symbol (→  XY) is used, for cross-references to further documents, listed under "Further Information", the symbol (→  [Z]).

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1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.

Notice

1.2 Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.

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1.3 General Safety Instructions

• Adhere to the applicable regulations and take the necessary

precautions for the process media used. Consider possible reactions with the product materials.

• Adhere to the applicable regulations and take the necessary

precautions for all work you are going to do and consider the safety instructions in this document.

• Before beginning to work, find out whether any vacuum com-

ponents are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.)

on the product

• use the product with accessories not listed in the product

documentation.

The end-user assumes the responsibility in conjunction with the process media used.

Gauge failures due to contamination are not covered by the warranty.

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2 Technical Data

Measurement range

Accuracy

≥1 Torr/mbar (F.S.)

0.25 Torr/mbar (F.S.)

0.1 Torr/mbar (F.S.)

Temperature effect on zero

≥10 Torr/mbar (F.S.) 1 / 2 Torr/mbar (F.S.)

0.1 / 0.25 Torr/mbar (F.S.)

Temperature effect on span

≥1 Torr/mbar (F.S.)

0.1 / 0.25 Torr/mbar (F.S.) Resolution Gas type dependence none

Output signal analog (measuring signal)

Voltage range –5 … +10.24 V Measuring range 0 … +10 V

Relationship voltage-pressure linear Output impedance

Loaded impedance

Response time

≥0.25 Torr/mbar (F.S.)

0.1 Torr/mbar (F.S.)

Gauge identification Resistance 13.2 kΩ refer-

→ "Validity"

0.20% of reading

0.25% of reading

0.50% of reading

0.0050% F.S./ °C

0.015% F.S./ °C

0.020% F.S./ °C

0.01% of reading / °C

0.03% of reading / °C

0.003% F.S.

0 Ω (short-circuit proof)

>10 kΩ

30 ms 130 ms

enced to supply common (Voltage at pin 10 ≤5 V)

Non-linearity, hysteresis, repeatability in the calibrated range at 25 °C

ambient operating temperature without temperature effects after

operation of 2 h.

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Switching functions SP1, SP2

Setting range

0 … +10 V Hysteresis 1% F.S. Relay contact

30 VDC / ≤0.5 ADC

floating (n.o.)

closed at low pressure

(LED is lit)

open at high pressure

(LED is off) Switching time

RS232C interface

Transmission rate Data format

Connection

Further information about the RS232C interface →  [4]

Supply

≤50 ms

9600 baud

binary

8 data bits

one stop bit

no parity bit

no handshake

→ "Electrical Connection"

DANGER

The gauge may only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded protective extralow voltage (SELV) and limited power source (LPS), Class 2. The connection to the gauge has to

be fused

Supply voltage

at the gauge

ripple

INFICON controllers fulfill this requirement.

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+14 … +30 VDC

Class 2 / LPS

≤1 V

Current consumption <500 mA

(max. starting current)

Power consumption (depending on supply voltage) ≤1 W

Fuse required

1 AT (slow), automatic reset

(Polyfuse)

The gauge is protected against reverse polarity of the supply voltage.

Electrical connection 15-pin D-Sub, male Sensor cable

without switching functions with switching functions

Cable length

5-pin plus shielding

9-pin plus shielding

≤100 m (0.14 mm² conductor)

For longer cables, larger conductor cross-sections are required

≤1.0 Ω).

cable

Grounding concept

Vacuum flange - signal common

→ "Electrical Connection" Supply common - signal common conducted separately; for dif-

ferential measurement (10 Ω)

Materials exposed to vacuum

Flange, tube Sensor and diaphragm

Internal volume

Admissible pressure (absolute)

≥200 Torr/mbar (F.S.) 1 … 100 Torr/mbar (F.S.)

0.1 / 0.25 Torr/mbar (F.S.)

Bursting pressure (absolute) 5 bar

stainless steel AISI 316L

ceramics (Al

≤3.6 cm

≥99.5%)

2O3

3 bar

2 bar

1.3 bar

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Admissible temperatures

Storage Operation Bakeout (not in operation)

Relative humidity

–40 °C … +65 °C

+5 °C … +50 °C

≤110 °C at the flange

≤80% at temperatures

≤+31 °C decreasing to 50%

at +40°C

Use indoors only, altitude up to

2000 m NN

Degree of protection IP 30

Dimensions [mm]

3.8

OD½"

Weight

DN 16 ISO-KF

DN 16 CF-R

≤370 g

8 VCR 4 VCR female

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+ 25 hidden pages