Capacitance Diaphragm Gauge
CDG025D-X3
tina57e1 (2010-01) 1
Operating Manual
Incl. Declaration of Conformity
Product Identification
In all communications with INFICON, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.
Model:
PN:
SN:
V W
2
tina57e1 (2010-01)
Validity
This document applies to products of the CDG025D, X3 series.
Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. factory setting of setpoint) as defined in the
corresponding ordering information.
3CB1-xxx-230x
0 ⇒ Standard
B ⇒ P control
Flange
1 ⇒ DN 16 ISO-KF
3 ⇒ DN 16 CF-R
9 ⇒ 1/2" tube
E ⇒ 8VCR female
Unit
Measurement range
(F.S.)
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with the DN 16 ISO-KF vacuum
connection. They apply to other vacuum connections by analogy.
We reserve the right to make technical changes without prior
notice. All dimensions in mm.
tina57e1 (2010-01) 3
(x 133 Pa; x 1.3 mbar)
5 ⇒ Torr
(x 100 Pa)
6 ⇒ mbar
3 ⇒ 0.1
4
⇒
0.25
0.5
5 ⇒
6 ⇒ 1
7 ⇒ 2
8 ⇒ 5
9 ⇒ 10
A ⇒ 20
B ⇒ 50
C ⇒ 100
D ⇒ 200
E ⇒ 500
F ⇒ 1000 (Torr only)
G ⇒ 1100 (mbar only)
Intended Use
The Capacitance Diaphragm Gauges of the CDG025D X3 series
are intended for absolute pressure measurement of gases in
their respective pressure ranges (→ 3). They are clean room
compliant and double protected against contamination.
The gauges belong to the SKY
®
Smart Sensors family and can
be operated in connection with an INFICON Vacuum Gauge
Controller (VGC series) or another appropriate measuring unit.
Function
The Capacitance Diaphragm Gauge consists of a capacitive
sensor element made of aluminum oxide ceramics and electronics which convert the capacitance into a DC voltage output signal.
The output signal is linear to the measured pressure and independent of the gas type.
Trademarks
SKY® INFICON GmbH
®
VCR
Swagelok Marketing Co.
Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085
Scope of Delivery
1× gauge in clean room packaging
1× pin for adjusting settings via buttons
1× Calibration Test Report
1× Operating Manual German
1× Operating Manual English
4
tina57e1 (2010-01)
Contents
Product Identification 2
Validity 3
Intended Use 4
Function, Trademarks, Patents, Scope of Delivery 4
1 Safety 6
1.1 Symbols Used 6
1.2 Personnel Qualifications 6
1.3 General Safety Instructions 7
1.4 Liability and Warranty 7
2 Technical Data 8
3 Installation 13
3.1 Vacuum Connection 13
3.2 Electrical Connection 16
4 Operation 18
4.1 Displays 18
4.2 Zeroing the Gauge 19
4.2.1 <ZERO> Adjustment 20
4.3 Switching Functions 23
4.4 Activating the Factory Setting (Factory Reset) 26
5 Deinstallation 27
6 Maintenance, Repair 29
7 Returning the Product 29
8 Disposal 30
Further Information 31
Declaration of Contamination 32
ETL Certification 33
EC Declaration of Conformity 34
For cross-references within this document, the symbol (→ XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→ [Z]).
tina57e1 (2010-01) 5
1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the necessary experience or who have been instructed by the end-user
of the product.
6
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1.3 General Safety Instructions
• Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
• Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations etc.)
on the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination are not covered by the
warranty.
tina57e1 (2010-01) 7
2 Technical Data
Measurement range
1)
Accuracy
≥1 Torr/mbar (F.S.)
0.25 Torr/mbar (F.S.)
0.1 Torr/mbar (F.S.)
Temperature effect on zero
≥10 Torr/mbar (F.S.)
1 / 2 Torr/mbar (F.S.)
0.1 / 0.25 Torr/mbar (F.S.)
Temperature effect on span
≥1 Torr/mbar (F.S.)
0.1 / 0.25 Torr/mbar (F.S.)
Resolution
Gas type dependence none
Output signal analog
(measuring signal)
Voltage range –5 … +10.24 V
Measuring range 0 … +10 V
Relationship voltage-pressure linear
Output impedance
Loaded impedance
Response time
≥0.25 Torr/mbar (F.S.)
0.1 Torr/mbar (F.S.)
Gauge identification Resistance 13.2 kΩ refer-
→ "Validity"
0.20% of reading
0.25% of reading
0.50% of reading
0.0050% F.S./ °C
0.015% F.S./ °C
0.020% F.S./ °C
0.01% of reading / °C
0.03% of reading / °C
0.003% F.S.
0 Ω (short-circuit proof)
>10 kΩ
30 ms
130 ms
enced to supply common
(Voltage at pin 10 ≤5 V)
1)
Non-linearity, hysteresis, repeatability in the calibrated range at 25 °C
ambient operating temperature without temperature effects after
operation of 2 h.
8
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Switching functions SP1, SP2
Setting range
0 … +10 V
Hysteresis 1% F.S.
Relay contact
30 VDC / ≤0.5 ADC
floating (n.o.)
closed at low pressure
(LED is lit)
open at high pressure
(LED is off)
Switching time
RS232C interface
Transmission rate
Data format
Connection
Further information about the RS232C interface → [4]
Supply
≤50 ms
9600 baud
binary
8 data bits
one stop bit
no parity bit
no handshake
→ "Electrical Connection"
DANGER
The gauge may only be connected to power supplies, instruments or control devices that conform
to the requirements of a grounded protective extralow voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
2)
be fused
Supply voltage
at the gauge
ripple
2)
INFICON controllers fulfill this requirement.
tina57e1 (2010-01) 9
.
+14 … +30 VDC
Class 2 / LPS
≤1 V
pp
Current consumption <500 mA
(max. starting current)
Power consumption
(depending on supply voltage) ≤1 W
Fuse required
2)
1 AT (slow), automatic reset
(Polyfuse)
The gauge is protected against reverse polarity of the supply
voltage.
Electrical connection 15-pin D-Sub, male
Sensor cable
without switching functions
with switching functions
Cable length
5-pin plus shielding
9-pin plus shielding
≤100 m (0.14 mm² conductor)
For longer cables, larger conductor cross-sections are required
≤1.0 Ω).
(R
cable
Grounding concept
Vacuum flange - signal common
→ "Electrical Connection"
Supply common - signal common conducted separately; for dif-
ferential measurement (10 Ω)
Materials exposed to vacuum
Flange, tube
Sensor and diaphragm
Internal volume
Admissible pressure (absolute)
≥200 Torr/mbar (F.S.)
1 … 100 Torr/mbar (F.S.)
0.1 / 0.25 Torr/mbar (F.S.)
Bursting pressure (absolute) 5 bar
stainless steel AISI 316L
ceramics (Al
≤3.6 cm
≥99.5%)
2O3
3
3 bar
2 bar
1.3 bar
10
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55
Admissible temperatures
Storage
Operation
Bakeout (not in operation)
Relative humidity
–40 °C … +65 °C
+5 °C … +50 °C
≤110 °C at the flange
≤80% at temperatures
≤+31 °C decreasing to 50%
at +40°C
Use indoors only, altitude up to
2000 m NN
Degree of protection IP 30
Dimensions [mm]
3.8
69
26
OD½"
Weight
DN 16 ISO-KF
DN 16 CF-R
≤370 g
8 VCR
4 VCR
female
44
tina57e1 (2010-01) 11
Analog Measuring Signal vs. Pressure
Pressure p
1.1×F.S.
1.0×F.S.
0.9×F.S.
0.8×F.S.
0.7×F.S.
0.6×F.S.
0.5×F.S.
0.4×F.S.
0.3×F.S.
0.2×F.S.
0.1×F.S.
0.0×F.S.
0
12 345678910
Measuring signal U
p = (U
/ 10 V) × p (F.S.)
out
Conversion Torr ↔ Pascal
Torr mbar 3) Pa
c 1.00
1013.25 / 760 =
1.3332…
[V]
out
3)
101325 / 760 =
133.3224…
Example: Gauge with 10 Torr F.S.
Measuring signal U
out
= 6 V
p = (6 V / 10 V) × 10 Torr
= 0.6 × 10 Torr = 6 Torr
3)
Source: NPL (National Physical Laboratory)
Guide to the Measurement of Pressure and Vacuum, ISBN 0904457x /
1998
12
tina57e1 (2010-01)
3 Installation
WARNING
WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
3.1 Vacuum Connection
impacts.
DANGER
DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
suited to overpressure.
DANGER
DANGER: overpressure in the vacuum system
>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage your
health.
Use O-rings provided with an outer centering ring.
tina57e1 (2010-01) 13
DANGER: protective ground
Products that are not correctly connected to ground
can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded
vacuum chamber. This connection must conform to
the requirements of a protective connection according to EN 61010:
• CF and VCR flanges fulfill this requirement.
• For gauges with a KF flange, use a conductive
metallic clamping ring.
• For gauges with a ½" tube, take appropriate
measures to fulfill this requirement.
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.
DANGER
Caution
Caution
14
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Mount the gauge so that no vibrations occur. The gauge
may be mounted in any orientation. To keep condensates and particles from getting into the measuring
chamber preferably choose a horizontal to upright position and possibly use a seal with a centering ring and
filter. If adjustment should be possible after the gauge
has been installed, be sure to install it so that the buttons can be accessed with a pin (→ 19).
Remove the protective lid and connect the product to the vacuum system.
Seal with centering ring
or
Protective lid
Seal with centering ring
and filter
Clamp
Keep the protective lid.
tina57e1 (2010-01) 15
3.2 Electrical Connection
Make sure the vacuum connection is properly made
(→ 13).
DANGER
The gauge may only be connected to power supplies, instruments or control devices that conform
to the requirements of a grounded protective extralow voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
4)
be fused
.
Ground loops, differences of potential, or EMC problems
may affect the measurement signal. For optimum signal
quality, please do observe the following notes:
• Connect the cable shield to ground on one side via
the chassis ground. Do not connect the other side of
the shield.
• Connect the supply common with protective ground
directly at the power supply.
• Use differential measurement input (signal common
and supply common conducted separately).
• Potential difference between supply common and
housing ≤18 V (overvoltage protection).
4)
INFICON controllers fulfill this requirement.
16
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If no sensor cable is available, make one according to the
following diagram.
4
1
8
9
TxD
RxD
100k
10
13
14
2
12
7
11
5
15
case
female
soldering
side
1
8
9
15
D-Sub,15-pole
Ident
10
18 V
100nF
Electrical connection
Pin 1, 4 Relay SP1, closing contact
Pin 2 Signal output (measuring signal)
or thresholds SP1/2
Pin 5 Supply common, GND
Pin 7, 11 Supply
Pin 8, 9 Relay SP2, closing contact
Pin 10 Gauge identification
Pin 12 Signal common
Pin 13 RS232, TxD
Pin 14 RS232, RxD
Pin 15 Housing (Chassis Ground)
case Connector case
Connect the sensor cable to the gauge and secure it using
the lock screws.
Connect the sensor cable to the controller.
tina57e1 (2010-01) 17
4 Operation
Put the gauge into operation. If you are using an INFICON controller, define the measurement range (→ [1, 2, 3]).
A warm-up time of at least 15 minutes should be allowed; for
exact pressure measurements a warm-up time of at least
2 hours is required.
4.1 Displays
ZERO
RUN
12
SP
LED State Meaning
<RUN>
lit Measurement mode
flashing Other mode, error
<1> lit
p ≤ setpoint level 1
flashing Adjusting setpoint <1>
<2> lit
p ≤ setpoint level 2
flashing Adjusting setpoint <2>
18
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4.2 Zeroing the Gauge
The gauge is factory calibrated while "standing upright"
(→ "Calibration Test Report").
We recommend performing a zero adjustment, when the
gauge is operated for the first time.
Due to long time operation or contamination, a zero drift could
occur and zero adjustment may become necessary.
For adjusting the zero, operate the gauge under the same constant ambient conditions and in the same mounting orientation
as normally.
The output signal (measuring signal) is depending on the mounting orientation. The signal difference between the vertical and
horizontal mounting orientation is:
If the gauge is operated via a controller, the zero of the
whole measuring system has to be adjusted on the controller: first, adjust the zero of the gauge and then, the
zero of the controller.
F.S. ΔU / 90°
1000 Torr/mbar ≈2 mV
100 Torr/mbar ≈10 mV
10 Torr/mbar ≈50 mV
1 Torr/mbar ≈300 mV
0.1 Torr/mbar ≈1.8 V
tina57e1 (2010-01) 19
4.2.1 <ZERO> Adjustment
The zero can be adjusted via
• the <ZERO> button on the gauge,
• the RS232C interface (→ [4]),
• an INFICON Vacuum Gauge Controller (VGC series).
Evacuate the gauge to a pressure according to the table
below:
Recommended final pressure for
F.S.
1100 mbar
1000 Torr/mbar
200 Torr/mbar
100 Torr/mbar
20 Torr/mbar
10 Torr/mbar
2 Torr/mbar
1 Torr/mbar
0.25 Torr/mbar
0.1 Torr/mbar
−
×10
<5
<10
<5
×10
<10
<5
×10
<10
<5
×10
<10
<5
×10
-2
-2
-3
-3
-4
-4
-5
-5
-6
Torr
Torr
Torr
Torr
Torr
Torr
Torr
Torr
Torr
zero adjustment
0
<6.65×10
0
<6.65
×10
-0
<1.33
×10
-1
<6.65
×10
-1
<1.33
×10
-2
<6.65
×10
-2
<1.33
×10
-3
<6.65
×10
-3
<1.33
×10
-4
<6.65
×10
If the final pressure in the gauge is too high for zero adjustment (>25% of the F.S.), the zero cannot be reached
and the <RUN> LED flashes. If this is the case, activate
the factory setting and adjust the zero again (→ 26).
Operate the gauge for at least 15 minutes (until the signal
is stable).
Pa
Pa
Pa
Pa
Pa
Pa
Pa
Pa
Pa
Pa
<5×10
<5
×10
<10
<5
×10
<10
<5
×10
<10
<5
×10
<10
<5
×10
-2
mbar
-2
mbar
-2
mbar
-3
mbar
-3
mbar
-4
mbar
-4
mbar
-5
mbar
-5
mbar
-6
mbar
20
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Briefly press the <ZERO> button with a pin (max.
ø1.1 mm). The zero adjustment runs automatically. The
<STATUS> LED flashes until the adjustment (duration
≤8 s) is completed.
Press the button briefly
max. ø1.1 mm
After zero adjustment the gauge automatically returns to
measurement mode.
The <RUN> LED flashes if
• the signal output is negative (< -20 mV) when the final pressure has been attained
• the zero adjustment has failed.
4.2.2 <ZERO> Adjustment with Ramp Function
The ramp function allows to adjust the zero at a known reference
pressure within the measurement range of the gauge.
tina57e1 (2010-01) 21
It also permits to adjust an offset of the characteristic curve in
order to
• compensate for the offset of the measuring system or
• obtain a slightly positive zero for a 0 … 10 V AD converter.
The offset should not exceed 2% of the F.S. (+200 mV). At a
higher positive offset, the upper limit of the measurement range
is exceeded.
Recommended procedure for adjusting the offset of a
measuring system: → Notice 19.
Operate the gauge for at least 15 minutes (until the signal
is stable).
Push the <ZERO> button with a pin (max. ø1.1 mm) and
keep it depressed. The <RUN> LED starts flashing. After
5 s, the zero adjustment value, starting at the current output value, keeps continually changing (ramp) until the button is released or until the setting limit (max. 25% F.S.) is
reached. The corresponding output signal is delayed by
about 1 s.
Keep the button depressed
max. ø1.1 mm
22
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Push the <ZERO> button again:
Fine adjustment
within 0...3 s:
Change of direction
within 3...5 s:
If the <ZERO> button is released for more than 5 s, the
gauge returns to the measurement mode.
The <RUN> LED flashes if the signal output is negative (< 20 mV).
the zero adjustment value changes
by one unit (push <ZERO> button in
intervals of 1 s)
the zero adjustment changes its
direction (the flashing frequency of
the <RUN> LED changes briefly)
4.3 Switching Functions
The two switching functions can be adjusted to any pressure
within the whole measurement range (→ 12).
The current setpoint setting
• is output at the D-Sub connector instead of the measurement
signal (→ 17) and can be measured with a voltmeter after
the <SP> button is pressed, or
• can be read/written via the RS232C interface.
tina57e1 (2010-01) 23
If the pressure is lower than the setpoint, the corresponding LED
is lit (<1> or <2>) and the corresponding relay (→ 17) is
energized.
Measurement signal (Pressure p)
Setpoint
e
r
u
s
a
e
M
Hysteresis
(1% F.S.)
Threshold value
e
u
l
a
v
t
n
e
m
Off
On
4.3.1 Adjusting the Setpoints
The setpoints can be adjusted via
• the buttons on the gauge,
• the RS232C interface (→ [4]).
DANGER
DANGER: malfunction
If processes are controlled via the signal output,
keep in mind that by pushing the <SP> button the
measurement signal is suppressed and the corresponding threshold value is output instead. This
can cause malfunctions.
Push the <SP> button only if you are sure that no
damages can arise from a malfunction.
24
Off
tina57e1 (2010-01)
Time t
Adjusting Setpoint <1>
Push the <SP> button with a pin (max. ø1.1 mm). The
gauge changes to the switching function mode and outputs
the current lower threshold value at the measurement
value output for about 10 s (LED <1> flashes).
Press the button
max. ø1.1 mm
For changing the threshold value, push the <ZERO> button
and keep it depressed. The threshold keeps changing from
the current value (ramp) until the button is released or until
the limit of the setting range is reached.
Keep the button depressed
max. ø1.1 mm
tina57e1 (2010-01) 25
Push the <ZERO> button again:
Fine adjustment
within 0...3 s:
Change of direction
within 3...5 s:
If the <ZERO> button is released for more than 5 s, the
gauge returns the measurement mode.
The upper threshold is automatically set 1% F.S. above
the lower one (hysteresis).
the zero adjustment value changes
by one unit
the zero adjustment changes its
direction (the flashing frequency of
the <RUN> LED changes briefly)
Adjusting Setpoint <2>
Push the <SP> button twice (LED <2> flashes). The adjustment
procedure is the same as for setpoint <1>.
4.4 Activating the Factory Setting (Factory Reset)
All user defined parameters (e.g. zero, filter) are restored to their
default values.
Loading of the default parameters is irreversible.
Loading the default parameters:
But the gauge out of operation.
Keep the <ZERO> button depressed for at least 5 s while
the gauge is being put into operation (Power ON).
26
tina57e1 (2010-01)
5 Deinstallation
WARNING
WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
impacts.
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
tina57e1 (2010-01) 27
damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.
Vent the vacuum system.
But the gauge out of operation.
Unfasten the lock screws and disconnect the sensor cable.
Remove the gauge from the vacuum system and install the
protective lid.
28
tina57e1 (2010-01)
6 Maintenance, Repair
Under clean operating conditions, the product requires no maintenance.
Gauge failures due to contamination are not covered by
the warranty.
We recommend checking the zero at regular intervals
(→ 20).
INFICON assumes no liability and the warranty becomes null
and void if any repair work is carried out by the end-user or third
parties.
7 Returning the Product
WARNING
WARNING: forwarding contaminated products
Contaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detrimental to health and environment.
Products returned to INFICON should preferably be
free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed
Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration of
contamination are returned to the sender at his own expense.
tina57e1 (2010-01) 29
declaration of contamination.
8 Disposal
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
N
Separating the components
After disassembling the product, separate its components according to the following criteria:
• Contaminated components
• Other components
when handling contaminated parts.
WARNING
WARNING: substances detrimental to the environment
Products or parts thereof (mechanical and electric
components, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with the
relevant local regulations.
Contaminated components (radioactive, toxic, caustic or biological hazard etc.) must be decontaminated in accordance
with the relevant national regulations, separated according to
their materials, and disposed of.
Such components must be separated according to their materials and recycled.
30
tina57e1 (2010-01)
Further Information
[1] www.inficon.com
Operating Manual
Vacuum Gauge Controller VGC032
tinb02e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[2] www.inficon.com
Operating Manual
Single-Channel Controller VGC401
tinb01e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[3] www.inficon.com
Operating Manual
Two- & Three-Channel Measurement and Control Unit
VGC402, VGC403
tinb07e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[4] www.inficon.com
Communication Protocol
RS232C Interface
tira49e1
INFICON AG, LI–9496 Balzers, Liechtenstein
tina57e1 (2010-01) 31
Declaration of Contamination
The service, repai r, and/or disposal of vacuum equipment and components wi ll only be carried out if a correctl y completed declaration has
been submitted. Non-completion will result in delay.
This declaration may only be completed (in block letters) and signed by authorized and qualified staff.
Description of product
Type
Part number
Serial number
The product is free of any substances wh ich are damagi ng to
health. yes
Harmful substances, gases and/or by-products
Please list all substances, gases, and by-products which the product may have come into contact with:
Trade/product name
Legally bindin g declaration:
We hereby declare that t he information on this form is complete and accurate and that we will assume any further costs that m ay
arise. The contaminated p roduct will be dispatched in accordance with the applicable regulations.
Organization/company
Address Post code, place
Phone Fax
Email
Name
Date and legally binding signature Company stamp
Reason for return
Operating fluid(s) used
Used in copper process
no yes
Process related contamination of product:
toxic no 1) yes
caustic no 1) yes
biological hazard no yes 2)
explosive no yes 2)
radioactiv e no yes 2)
other harmful substances no 1) yes
1) or not containing any amount
of ha zardous resid ues that
exceed the permissible ex posure limits
Chemical name
(or symbol)
(Must be drained before shipping.)
Seal product in plastic bag and
mark it with a corresponding label.
Precautions associated
with substance
2) Products thus contami nated wil l not be ac cepted without written
evidence of decontami nation.
Action if human contact
This form can be downloaded
from our website.
32
Copies:
Original for addresee - 1 copy for accompanying documents - 1 copy for file of sender
tina57e1 (2010-01)
ETL Certification
3103457
ETL LISTED
The product CDG025D complies with
the requirements of the following
Standards:
UL 61010-1, Issued: 2004/07/12 Ed: 2
Rev: 2005/07/22
CAN/CSA C22.2#61010-1,
Issued: 2004/07/12
tina57e1 (2010-01) 33
EC Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned
below complies with the provisions of the Directive relating to
electrical equipment designed for use within certain voltage limits
2006/95/EC and the Directive relating to electromagnetic compatibility 2004/108/EC.
Capacitance Diaphragm Gauge
CDG025D-X3
Standards
Harmonized and international/national standards and specifications:
• EN 61000-3-2:2000 + A2:2005
(EMC: limits for harmonic current emissions)
• EN 61000-3-3:1995 + A1:2001 + A2:2005
(EMC: limitation of voltage changes, voltage fluctuations and flicker)
• EN 61000-6-2:2005
• EN 61000-6-3:2001 + A11:2004
(EMC: generic emission standard)
• EN 61010-1:2001
(Safety requirements for electrical equipment for measurement, control
and laboratory use)
Manufacturer / Signatures
INFICON AG, Alte Landstrasse 6, LI-9496 Balzers
14 January 2010 14 January 2010
(EMC: generic immunity standard)
34
Dr. Urs Wälchli
Managing Director
Alex Nef
Product Manager
tina57e1 (2010-01)
Notes
tina57e1 (2010-01) 35
LI–9496 Balzers
Liechtenstein
Tel +423 / 388 3111
Fax +423 / 388 3700
Original: German tina57d1 (2010-01) reachus@inficon.com
t i na57e1
www.inficon.com
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