INFICON SKY CDG025D User Manual
Capacitance Diaphragm Gauge
CDG025D
CDG025D-S
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Operating Manual
Incl. Declaration of Conformity
Product Identification
In all communications with INFICON, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.
Model:
PN:
SN:
V W
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Validity
This document applies to products of the CDG025D and
CDG025D-S series.
Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. factory setting of setpoint) as defined in the
corresponding ordering information.
Flange
1/2" tube
0 ⇒
DN 16 ISO-KF
1 ⇒
DN 16 CF-R
2 ⇒
3 ⇒ 8 VCR female
7 ⇒ 4 VCR male
3xx-x0x
Switching function
Measurement range
Unit
(F.S.)
Without switching function
(x 133 Pa; x 1.3 mbar)
0 ⇒ Torr
(x 100 Pa)
2 ⇒ mbar
With switching function
(x 133 Pa; x 1.3 mbar)
3 ⇒ Torr
(x 100 Pa)
5 ⇒ mbar
75 ⇒ 1000 (Torr only)
75 ⇒ 1100 (mbar only)
76 ⇒ 100
77 ⇒ 10
1
78 ⇒
76
⇒
0.1
200
82 ⇒
20
⇒
83
84 ⇒ 2
85 ⇒ 0.25
87 ⇒ 500
The part number (PN) can be taken from the product nameplate.
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If not indicated otherwise in the legends, the illustrations in this
document correspond to CDG025D-S gauges with the
DN 16 ISO-KF vacuum connection. They apply to other vacuum
connections by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.
Intended Use
The Capacitance Diaphragm Gauges of the CDG025 series are
intended for absolute pressure measurement of gases in their
respective pressure ranges (→ 3).
The gauges belong to the SKY
®
Smart Sensors family and can
be operated in connection with an INFICON Vacuum Gauge
Controller (VGC series) or another appropriate measuring unit.
Function
The Capacitance Diaphragm Gauge consists of a capacitive
sensor element made of aluminum oxide ceramics and electronics which convert the capacitance into a DC voltage output signal.
The output signal is linear to the measured pressure and independent of the gas type.
Trademarks
SKY® INFICON GmbH
®
Swagelok Marketing Co.
VCR
Patents
EP 1070239, 1040333
US Patents 6528008, 6591687, 7107855, 7140085
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Scope of Delivery
1× gauge
1× pin
1× Calibration Test Report
1× Operating Manual
1× Gebrauchsanleitung
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Contents
Product Identification 2
Validity 3
Intended Use 4
Function, Trademarks, Patents 4
Scope of Delivery 5
1 Safety 7
1.1 Symbols Used 7
1.2 Personnel Qualifications 7
1.3 General Safety Instructions 8
1.4 Liability and Warranty 8
2 Technical Data 9
3 Installation 14
3.1 Vacuum Connection 14
3.2 Electrical Connection 17
4 Operation 19
4.1 Displays 19
4.2 Zeroing the Gauge 20
4.2.1 <ZERO> Adjustment 21
4.3 Switching Functions (CDG025D-S only) 24
4.4 Activating the Factory Setting (Factory Reset) 27
5 Deinstallation 28
6 Maintenance, Repair 30
7 Returning the Product 30
8 Disposal 31
Further Information 32
Declaration of Contamination 33
ETL Certification 34
EC Declaration of Conformity 35
For cross-references within this document, the symbol (→ XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→ [Z]).
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1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the necessary experience or who have been instructed by the end-user
of the product.
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1.3 General Safety Instructions
• Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
• Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations etc.)
on the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination are not covered by the
warranty.
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2 Technical Data
Measurement range
1)
Accuracy
≥1 Torr/mbar (F.S.)
0.25 Torr/mbar (F.S.)
0.1 Torr/mbar (F.S.)
Temperature effect on zero
≥10 Torr/mbar (F.S.)
1 / 2 Torr/mbar (F.S.)
0.1 / 0.25 Torr/mbar (F.S.)
Temperature effect on span
≥1 Torr/mbar (F.S.)
0.1 / 0.25 Torr/mbar (F.S.)
Resolution
Gas type dependence none
Output signal analog
(measuring signal)
Voltage range –5 … +10.24 V
Measuring range 0 … +10
Relationship voltage-pressure linear
Output impedance
Loaded impedance
Response time
≥0.25 Torr/mbar (F.S.)
0.1 Torr/mbar (F.S.)
Gauge identification Resistance 13.2 kΩ refer-
→ "Validity"
0.20% of reading
0.25% of reading
0.50% of reading
0.0050% F.S./ °C
0.015% F.S./ °C
0.020% F.S./ °C
0.01% of reading / °C
0.03% of reading / °C
0.003% F.S.
0 Ω (short-circuit proof)
>10 kΩ
30 ms
130 ms
enced to supply common
(Voltage at pin 10 ≤5 V)
V
1)
Non-linearity, hysteresis, repeatability in the calibrated range at 25 °C
ambient operating temperature without temperature effects after
operation of 2 h.
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Switching functions SP1, SP2
Setting range
0 … +10 V
Hysteresis 1% F.S.
Relay contact
30 VDC / ≤0.5 ADC
floating (n.o.)
closed at low pressure
(LED is lit)
open at high pressure
(LED is dark)
Switching time
RS232C interface
Transmission rate
Data format
Connection
Further information about the RS232C interface → [3].
Supply
≤50 ms
9600 baud
binary
8 data bits
one stop bit
no parity bit
no handshake
→ "Electrical Connection"
DANGER
The gauge may only be connected to power supplies, instruments or control devices that conform
to the requirements of a grounded protective extralow voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
2)
be fused
Supply voltage
at the gauge
ripple
2)
INFICON controllers fulfill this requirement.
.
+14 … +30 VDC
Class 2 / LPS
≤1 V
10
pp
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Current consumption <500 mA
(max. starting current)
Power consumption
(depending on supply voltage) ≤1 W
Fuse required
2)
1 AT (slow), automatic reset
(Polyfuse)
The gauge is protected against reverse polarity of the supply
voltage.
Electrical connection 15 poles D-Sub, male
Sensor cable
without switching functions
with switching functions
Cable length
5 poles plus shielding
9 poles plus shielding
≤100 m (0.14 mm² conductor)
For longer cables, larger conductor cross-sections are required
(R
≤1.0 Ω).
cable
Grounding concept
Vacuum flange - signal common
→ "Electrical Connection"
Supply common - signal common conducted separately; for dif-
ferential measurement (10 Ω)
Materials exposed to vacuum
Flange, tube
Sensor and diaphragm
Sensor–diaphragm connection
Ceramics–metal connection
Internal volume
Admissible pressure (absolute)
≥200 Torr/mbar (F.S.)
1 … 100 Torr/mbar (F.S.)
0.1 / 0.25 Torr/mbar (F.S.)
Bursting pressure (absolute) 5 bar
stainless steel AISI 316L
ceramics (Al
≥99.5%)
2O3
glass ceramics solder
AgTiCu hard solder, Vacon 70
(28% Ni, 23% Co, 49% Fe)
3
≤3.6 cm
3 bar
2 bar
1.3 bar
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