INFICON VSC150A User Manual
Vacuum Switch
VSC150
Part Number
399-005
OPERATING MANUAL
incl. Declaration of Conformity
tina42e1
General Note
The right of alterations in the design and the technical
data is reserved.
The illustrations are not binding.
2
tina42e1 (2005-03) VSC150.ga
Contents
Page
1 Description . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1.1 Purpose . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 Technical Data . . . . . . . . . . . . . . . . . . . . . . 5
1.2.1 VSC150 Vacuum Switch . . . . . . . . . . . . . . . 5
1.2.2 SV Switching Amplifier . . . . . . . . . . . . . . . . 6
1.3 Technical Description . . . . . . . . . . . . . . . . . 6
1.3.1 Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.3.2 Vacuum Switch Mode of Operation . . . . . . . 6
1.3.3 Switching Amplifier Mode of Operation . . . . 7
1.4 Equipment . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.4.1 Scope of Delivery . . . . . . . . . . . . . . . . . . . 8
1.4.2 Accessories . . . . . . . . . . . . . . . . . . . . . . . . 8
2 Operation . . . . . . . . . . . . . . . . . . . . . . . . . 9
2.1 Connection to the Vacuum System . . . . . . . 9
2.2 Electrical Connection . . . . . . . . . . . . . . . . 10
2.2.1 Connection of the Vacuum Switch . . . . . . . 11
2.2.2 SV Switching Amplifier . . . . . . . . . . . . . . . 12
2.3 Design Versions and Switch Point Setting . 13
2.3.1 VSC150 Vacuum Switch . . . . . . . . . . . . . . 13
2.3.1.1 Setting Switching Pressures
Higher than 20 mbar . . . . . . . . . . . . . . . . 14
2.3.1.2 Setting Switching Pressures
Lower than 20 mbar . . . . . . . . . . . . . . . . . 14
2.4 Differential Pressure Adapter . . . . . . . . . . . 15
Page
2.4.1 Connecting the Differential Pressure
Adapter to the Vacuum Switch . . . . . . . . . 15
2.4.2 Switching Logic . . . . . . . . . . . . . . . . . . . . . 16
2.5 Typical Applications . . . . . . . . . . . . . . . . . . 16
2.5.1 Protection of a Gate Valve which
must only be Operated when
Pressure on both Sides
Becomes Equal . . . . . . . . . . . . . . . . . . . . 16
2.5.2 In a Vacuum System it must bei
Prevented that in Case of
Failure Gas Flows into the
Vacuum Chamber . . . . . . . . . . . . . . . . . . 17
2.5.3 Automatic Venting of a Vacuum Chamber . 17
2.5.4 Automatic Venting of a Vacuum
Chamber to a Slight Overpressure . . . . . . 18
2.5.5 Differential Pressure Monitoring,
Positive and Negative Going . . . . . . . . . . . 18
3 Maintenance . . . . . . . . . . . . . . . . . . . . . . 19
3.1 Cleaning the Sensing Chamber . . . . . . . . . 19
3.2 Cleaning the Reference Chamber . . . . . . . 20
3.3 Service at INFICON . . . . . . . . . . . . . . . . . 20
4 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . 21
EEC Declaration of Conformity . . . . . . . 22
Declaration of Contamina . . . . . . . . . . . . 23
3
tina42e1 (2005-03) VSC150.ga
1 Description
1.1 General
These Operating Instructions contain important information on the functions, installation,
operation, and maintenance of the Vacuum
Switch and the switching amplifier.
Important remarks concerning operational safety and
protection are emphasized as follows:
Warning Indicates procedures that must be strict-
ly observed to prevent hazards to persons.
Caution Indicates procedures that must be strict-
ly observed to prevent damage or destruction.
Note
Indicates special technical requirements that the user
must comply with.
The references to diagrams, e.g. (1/5), consist of the Fig.
No. and the Item No. in that order.
Unpack the Vacuum Switch and the switching amplifier
immediately after delivery, even if they are to be put into
operation at a later date.
Before doing so, examine the shipping container for any
external damage.
Then completely remove the packaging materials.
Note
The shipping container and packaging materials must be
kept in the event of complaints about damage.
Check for completeness (see Section 1.4).
Carefully examine the Vacuum Switch and the switching
amplifier visually.
If any damage is discovered, report it immediately to the
forwarding agent and insurer. If the damaged part has to
be replaced, please get in touch with the orders department.
1.1.1 Purpose
The V acuum Switch VSC150 in connection with the switching amplifier SV is used to produce pressure dependent signals and for the control of valves and pumps.
4
tina42e1 (2005-03) VSC150.ga
The Vacuum Switch VSC150 can also be used as a differential pressure switch.
Note the Technical Data given in section 1.2.
1.2 Technical Data
1.2.1 VSC150 Vacuum Switch
Switching range 0.5 to 2000 mbar
Overload limit 3000 mbar
Response sensitivity 0.1 mbar
Switching hysteresis 0.5 mbar
Temperature coefficient 0.4 % / K
of switching value
Ambient temperature,
briefly (max. 8 h) 120 °C
continuous 90 °C
Switching voltage 24 V
Switching current 10 mA
Connector protected plug-(DIN 43 650)
Protection type (DIN 40 050) IP 65
Vacuum connection DN 16 KF
Materials in contact with the medium:
Sensing volume stainless steel 1.4301; 1.4401
stainless steel 1.4310; 1.3541
FPM
Reference volume stainless steel 1.4301
stainless steel 1.4401; 1.3541
glass; gold
Sensing volume, approx. 41)cm
3
Reference volume, approx. 20 cm
3
Weight 1.3 kg
VSC150 Vacuum Switch
Switching pressure adjustable
between 0.5 and 2000 mbar Part Number 399-005
Differential Pressure Adapter
Connection DN 16 KF Part Number 399-007
Pressure switch adjustment Part Number 399-006
1)
Including connection port
5
tina42e1 (2005-03) VSC150.ga
1.2.2 SV Switching Amplifier
Mains supply 110 to 130 VAC
220 to 240 VAC
Mains frequency 50 / 60 Hz
Power consumption 3 VA
Output relay
Switching voltage, max. 250 V
Switching current, max. 5 A
Switching capacity, max. 500 VA
Response time 30 ms
Release time 7 ms
Control circuit 24 V / 10 mA
Ambient temperature, max. 50 °C
Weight 0.36 kg
SV Switching amplifier Part Number 399-008
1.3 Technical Description
1.3.1 Design
The VSC150 is a diaphragm absolute pressure switch.
He can also be used as a differential pressure switch.
Within both pressure switches there is a sensing chamber (1/2) and a reference chamber (1/5) separated by a
highly sensitive sealed diaphragm made of stainless
steel (1/3). A pin (1/6) in the reference chamber (1/5) is
led to the outside and insulated (1/7). The ground
connected diaphragm acts as the opposite contact.
This contact configuration is so designed that the diaphragm contacts the pin when it is unstressed, i. e. with
equal pressure in sensing and reference chamber.
1.3.2 Vacuum Switch Mode of Operation
For switch-point setting, the adjusting valve (1/4) between sensing chamber (1/2) and reference chamber
(1/5) is opened and closed again when the desired switching pressure is attained. If the pressure in the sensing
chamber drops below the set reference pressure by
more than 0.1 mbar, the contact opens and energizes a
heavy-duty relay in the connected SV switching amplifier.
6
tina42e1 (2005-03) VSC150.ga
1.3.3 Switching Amplifier Mode of Operation
A switching amplifier is required for each Vacuum
Switch. The output relay supplied with heavy-duty change-over contact is energized when the pressure drops
below the value preset on the Vacuum Switch, i.e. if the
contact between diaphragm and contact pin in the reference chamber opens by flexing of the diaphragm. The
built-in slide switch (Fig. 5) must be set to the connected
type of Vacuum Switch.
7
tina42e1 (2005-03) VSC150.ga
9
(R)
(M)
10
9
(R)
(M)
8
7
6
5
4321
Fig 1 Schematic diagram of the Vacuum Switches
Key to Fig. 1
1 Adjusting Screw
2 Sensing chamber (M)
3 Diaphragm
4 Adjusting valve
5 Reference volume (R)
6 Contact pin
7 Current leadthrough
8 Electrical connection
9 Vacuum connection flange
10 Differential pressure adapter
1.4 Equipment
1.4.1 Scope of Delivery
Part Number
Vacuum Switch VSC150 399-005
or
Switching amplifier SV 399-008
Operating Instructions tina42d1
tina42e1
1.4.2 Accessories
Clamping ring DN 16 KF, made of plastic
*)
Centering ring DN 16 KF, made of
PTFE, with FPM O-ring
*)
For pressure systems
(1000 to max. 3000 mbar abs.)
Outer centering ring
Clamping ring for ultrahigh vacuum disk DN 16 KF
*)
For floating installation
8
tina42e1 (2005-03) VSC150.ga
Loading...