INFICON VGC401 User Manual

Page 1
Operating Manual
Incl. EC Declaration of Conformity
Single-Channel Controller
VGC401
para
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Product Identification
In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below:
Model:
PN: SN: V Hz W
Validity
This document applies to products with part number 398-010.
The part number (PN) can be taken from the product nameplate.
This document is based on firmware number 302-519-
our unit does not work as described in this document,
If y
E.
please check that it is equipped with the above firmware version ( 49).
We reserve the right to make technical changes without prior notice.
All dimensions are indicated in mm.
2
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Intended Use
Scope of Delivery
The VGC401 is used together with INFICON Transmit­ters (in this document referred to as gauges) for total pressure measurement. All products must be operated in accordance with their respective Operating Manuals.
1× Single-Channel Controller 1× Power cord 1× Rubber bar 2× Rubber feet 4× Collar screws 4× Plastic sleeves 1× CD-ROM (Operating Manuals) 1× EC Declaration of Conformity 1× Installation Manual
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Contents
Product Identification 2 Validity 2 Intended Use 3 Scope of Delivery 3
Safety 6
1
1.1 Symbols Used 6
1.2 Personnel Qualifications 6
1.3 General Safety Instructions 7
1.4 Liability and Warranty 8
2 Technical Data 9 3 Installation 13
3.1 Personnel 13
3.2 Installation, Setup 13
3.2.1 Rack Installation 13
3.2.2 Installation in a Control Panel 18
3.2.3 Use as Desk-Top Unit 19
3.3 Mains Power Connector 20
3.4 SENSOR Connector 22
3.5 CONTROL Connector 23
3.6 RS232 Interface Connector 25
4 Operation 26
4.1 Front Panel 26
4.2 Turning the VGC401 On and Off 27
4.3 Operating Modes 27
4.4 Measurement Mode 28
4.5 Parameter Mode 31
4.5.1 Parameters 34
4.6 Test Mode 47
4.6.1 Parameters 49
4.6.2 Test Programs 50
5 Communication (Serial Interface) 55
5.1 RS232C Interface 55
5.1.1 Data Transmission 55
5.1.2 Communication Protocol 57
5.2 Mnemonics Mnemonics 59
5.2.1 Measurement Mode 60
5.2.2 Parameter Mode 64
5.2.3 Test Mode 71
5.2.4 Example 75
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6 Maintenance 76 7 Troubleshooting 77 8 Repair 79 9 Accessories 79 10 Storage 80 11 Disposal 80
Appendix 81
A: Conversion Tables 81 B: Default Parameters 82 C: Firmware Update 83 D: Literature 86 E: Index 89
ETL Certification 91 EC Declaration of Conformity 92
For cross-references within this document, the symbol
XY) is used, for cross-references to further docu-
( ments listed under "Literature", the symbol (
[Z]).
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1 Safety
1.1 Symbols Used
Symbols for residual risks
DANGER
Information on preventing any kind of physical injury.
Further symbols
1.2 Personnel Qualifications
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.
The lamp/display is lit.
The lamp/display flashes.
The lamp/display is dark.
para
Press the key (example: 'para' key).
Do not press any key
Skilled personnel
All work described in this document may only be car­ried out by persons who have suitable technical train­ing and the necessary experience or who have been instructed by the end-user of the product.
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1.3 General Safety Instructions
Adhere to the applicable regulations and take the nec­essary precautions for all work you are going to do and consider the safety instructions in this document.
Disconnecting device
DANGER
DANGER: mains voltage Contact with live parts is extremely hazardous
when any objects are introduced or any liquids penetrate into the unit.
Make sure no objects enter through the lou­vers and no liquids penetrate into the equip­ment.
The disconnecting device must be readily identifiable and easily reached by the user.
To disconnect the controller from mains, you must un­plug the mains cable.
Disconnecting device
acc. to EN 61010-1
Communicate the safety instructions to all other users.
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1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties
disregard the information in this document
use the product in a non-conforming manner
make any kind of interventions (modifications, altera-
tions etc.) on the product
use the product with accessories not listed in the cor­responding documentation.
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2 Technical Data
Mains specifications
Ambiance
Compatible gauges
Voltage 90 … 250 VAC Frequency 50 … 60 Hz Power consumption 30 VA Overvoltage category II Protection class 1 Connection European appliance connec-
tor IEC 320 C14
Temperature
storage operation
Relative humidity
–20 … +60 °C + 5 … +50 °C
80% up to +31 °C,
decreasing to 50% at +40 °C
Use indoors only
max. altitude 2000 m NN Pollution degree II Protection type IP30
Number 1 Compatible types
Pirani
Pirani/Capacitive PCG
Cold cathode PEG Cold cathode/Pirani MPG Hot cathode BAG Hot cathode/Pirani BPG
PSG
(PSG400, PSG400-S, PSG100-S, PSG101-S, PSG500, PSG500-S, PSG502-S, PSG510-S, PSG512-S, PSG550, PSG552, PSG554)
(PCG400, PCG400-S, PCG550, PCG552, PCG554)
(PEG100) (MPG400, MPG401) (BAG100-S, BAG101-S)
(BPG400, BPG402)
HPG (HPG400)
Capacitive CDG
TripleGauge™ Hot cathode/Pirani/ Capacitive
(CDG025, CDG025D, CDG045, CDG045-H, CDG045D, CDG100, CDG100D, CDG160D)
(BCG450)
BCG
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Gauge connection
Operation
Measurement values
Number 2 (parallel)
Caution
Do not connect more than one gauge at the same time.
SENSOR connector 15-pin D-Sub, female
RJ45 (FCC68), female (pin assignment 23)
Front panel HOST (remote control)
via 3 keys via RS232C interface
Measurement ranges depending on gauge
( [1] … [21])
Measurement error
gain error offset error
Measurement rate
analog digital
0.02% FSr 0.05% FSr
100 / s 50 / s
CDGxxxD
10 / s
(BPG, HPG, BCG,
(BAG)
1)
)
Display rate 10 / s Filter time constant
slow normal (nor) fast
750 ms (f 150 ms (f 20 ms (f
= 0.2 Hz)
g
= 1 Hz)
g
= 8 Hz)
g
Pressure units mbar, Pa, Torr, Micron Zero adjust for linear gauges Correction factor for logarithmic gauges
0.10 … 10.00
A/D converters resolution >0.001% FSr
(The measurement values of BPG, HPG, BCG, BAG and CDGxxxD are transmitted digitally.)
1)
CDG025D, CDG045D, CDG100D, CDG160D
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Gauge supply
Switching function
Switching function relay
Error signal
Error signal relay
Voltage
+24 VDC ±5% Current 750 mA Power consumption 18 W Fuse protection 900 mA with PTC element,
self-resetting after turning the
VGC401 off or disconnecting
the gauge
Number 1 Reaction delay 10 ms if switching threshold
close to measurement value
(for larger differences con-
sider filter time constant). Adjustment range depending on gauge
( [1] … [21]) Hysteresis
1% FSr for linear gauges
10% of measurement value
for logarithmic gauges
Contact type floating changeover contact Load max. 60 VDC, 1 A (ohmic)
30 VAC, 2 A (ohmic) Service life
mechanic electric
Contact positions
8
10
cycles
5
cycles (at maximum load)
10
24 CONTROL connector 9-pin D-Sub, male
(pin assignment 24)
Number 1 Reaction time 20 ms
Contact type floating normally open contact Load max. 60 VDC, 1 A (ohmic)
30 VAC, 2 A (ohmic) Service life
mechanic electric
Contact positions
8
10
cycles
5
cycles (at maximum load)
10
24 CONTROL connector 9-pin D-Sub, male
(pin assignment 24)
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Analog output
Interface
Dimensions [mm]
106.2
91.2 ø3.5
Number 1 Voltage range 0 … +10 V Internal resistance
Measurement signal vs. pressure
660 Ω depending on gauge
( [1] … [21])
CONTROL connector 9-pin D-Sub, male
(pin assignment 24)
Standard RS232C Protocol ACK/NAK, ASCII with
3-character mnemonics, bi-directional data flow, 8 data bits, no parity bit,
1 stop bit RS232C only TXD and RXD used Transmission rate 9600, 19200, 38400 baud RS232 connector 9-pin D-Sub, female
(pin assignment 25)
285
103.6204.5 2.5
78
para
84
Use
For incorporation into a rack or control panel or as desk­top unit
Weight
0.85 kg
12
67.3
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3 Installation
3.1 Personnel
3.2 Installation, Setup
Skilled personnel
The unit may only be installed by persons who have suitable technical training and the necessary experience.
The VGC401 is suited for incorporation into a 19" rack or a control panel or for use as desk-top unit.
3.2.1 Rack Installation
DANGER
DANGER: damaged product Putting a damaged product into operation can
be extremely hazardous. In case of visible damages, make sure the
product is not put into operation.
The VGC401 is designed for installation into a 19" rack chassis adapter according to DIN 41 494. For this pur­pose, four collar screws and plastic sleeves are supplied with it.
DANGER
DANGER: protection class of the rack If the product is installed in a rack, it is likely
to lower the protection class of the rack (protection against foreign bodies and water) e.g. the EN 60204-1 regulations for switching cabinets.
Take appropriate measures for the rack to meet the specifications of the protection class.
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Guide rail
In order to reduce the mechanical strain on the front panel of the VGC401, preferably equip the rack chassis adapter with a guide rail.
Slide rails
For safe and easy installation of heavy rack chassis adapters, preferably equip the rack frame with slide rails.
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Mounting height
Rack installation
Height 2 U Height 3 U
Height 2 U rack chassis adapter
n Secure the rack chassis adapter in the rack frame.
The admissible maximum ambient tem-
perature ( neither the air circulation obstructed.
9) must not be exceeded
Rack chassis adapter Height 2 U
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o Slide the VGC401 into the adapter …
Height 2 U
Height 3 U rack chassis adapter
… and fasten the VGC401 to the rack chassis adapter using the screws supplied with it.
For incorporation into a 19" rack chassis adapter, height 3, an adapter panel (incl. two collar screws and plastic sleeves) is available ( 79).
n Secure the rack adapter in the rack frame.
The admissible maximum ambient tem-
perature ( neither the air circulation obstructed.
9) must not be exceeded
Rack chassis adapter Height 3 U
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o Mount the adapter panel as upper extension to the
front panel of the VGC401 using the screws sup­plied with the adapter panel.
Adapter panel (Height 2 U to height 3 U)
p Slide the VGC401 into the rack chassis adapter …
Height 3 U
…and fasten the adapter panel to the rack chassis adapter using the screws supplied with the VGC401.
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3.2.2 Installation in a Control Panel
DANGER
DANGER: protection class of the control panel
If the product is installed in a rack, it is likely to lower the protection class of the rack (protection against foreign bodies and water) e.g. according to the EN 60204-1 regulations for switching cabinets.
Take appropriate measures for the control panel to meet the specifications of the pro­tection class.
For mounting the VGC401 into a control panel, the fol­lowing cut-out is required:
105
91.2
The admissible maximum ambient temperature (
78
69
must not be exceeded neither
9)
the air circulation obstructed.
M3 or ø 3.5
For reducing the mechanical strain on the front panel, preferably support the unit.
n Slide the VGC401 into the cut-out of the control
panel …
… and secure it with four M3 or equivalent screws.
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3.2.3 Use as Desk-Top Unit
The VGC401 is also suited for use as desk-top unit. For this purpose, two self-adhesive rubber feet as well as a slip-on rubber bar are supplied with it.
n Stick the two supplied rubber feet to the rear part
of the bottom plate …
… and slip the supplied rubber bar onto the bottom edge of the front panel.
Select a location where the admissible maxi-
mum ambient temperature (
9) is not ex-
ceeded (e.g. due to sun irradiation).
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3.3 Mains Power Connector
DANGER
DANGER: line voltage Incorrectly grounded products can be ex-
tremely hazardous in the event of a fault. Use only a 3-conductor power cable
(3×1.5 mm
2
) with protective ground. The power connector may only be plugged into a socket with a protective ground. The protect­tion must not be nullified by an extension cable without protective ground.
The unit is supplied with a 2.5 m power cord. If the mains cable is not compatible with your system, use your own, suitable cable with protective ground.
The socket must be fuse­protected with
10 A
max
Disconnecting device
acc. to EN 61010-1
If the unit is installed in a switch cabinet, the mains volt­age should be supplied and turned on via a central power distributor.
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Grounding
On the rear of the unit, there is a screw which can be used to connect the unit to ground, e.g. using the grounding of the pumping station.
Do not unfasten this
Ground screw
screw (internal
ground protection)
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3.4 SENSOR Connector
The VGC401 is equipped with two different gauge con­nectors.
Caution
Caution: one channel measurement unit Connecting more than one gauge at the
same time may lead to gauge destruction.
1
at once
only
Make sure that there is never more than one gauge connected to the VGC401 at the same time.
Connect the gauge to one of the two SENSOR connec­tors on the rear of the unit. Use a screened 1:1 cable (electromagnetic compatibility). Make sure the gauge is compatible (
9).
DANGER
DANGER: protective low voltage According to EN 61010, voltages exceeding
30 VAC or 60 VDC are hazardous. Only connect a protective low voltage (SELV).
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Pin assignment SENSOR
3.5 CONTROL Connector
Pin assignment of the 8-pin RJ45
8 1
appliance connector:
Pin Signal
4
Identification
1
Supply +24 VDC
2
Supply common GND
3
Signal input (Measurement signal+)
5
Signal common (Measurement signal–)
6
Status
7
HV_L HV_H
8
15
9
1
8
Pin assignment of the female 15-pin D-Sub appliance connector:
Pin Signal
10
Identification
8
Supply for BPG, HPG, BCG and BAG
11
Supply for CDG
5
Supply common GND
2
Signal input (Measurement signal+)
12
Signal common (Measurement signal–)
3
Status
1
Emission status
7
Degas
4
HV_H
13
RXD
14
TXD
15
Screening = chassis
6, 9
not connected
This connector allows to read the measurement signal, to evaluate state of the floating switching function and error contacts, and to activate/deactivate the high vac­uum measurement circuit (only for PEG cold cathode gauge and BAG ionization vacuum gauge).
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Connect the peripheral components to the
CONTROL connector on the rear of the unit. Use a screened cable (electromagnetic com­patibility).
Pin assignment Contact positions CONTROL
DANGER: protective low voltage According to EN 61010, voltages ex-
ceeding 30 VAC or 60 VDC are haz­ardous.
Only connect a protective low voltage (SELV).
Pin assignment of the male 9-pin D-Sub appliance connector:
Pin Signal
1
Analog output 0 … +10 VDC
7
Chassis = GND HV_H on +24 V
5
off 0 V
The control over this signal is placed superior to the key operation.
4 3 2
9 8
6 7
Pressure below threshold
Error signal
No error
Supply for relays with higher switching power
+24 VDC, 200 mA Chassis = GND
DANGER
5
9
6
1
Pressure above threshold or power supply turned off
Error or power supply turned off
Fuse-protected at 300 mA with PTC element, self-resetting after power off or pulling the CONTROL con­nector. Meets the requirements of a grounded protective extra low voltage (SELV).
The analog output (pin 1) differ from the
displayed value by no more than ±50 mV.
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3.6 RS232 Interface Connector
The RS232C interface allows for operating the VGC401 via a HOST or terminal. It can also be used for updating the firmware ( 83).
Connect the serial interface to the RS232 con-
nector on the rear of the unit using your own, screened (electromagnetic compatibility) cable.
Pin assignment
RS232
DANGER
DANGER: protective low voltage According to EN 61010, voltages ex-
ceeding 30 VAC or 60 VDC are haz­ardous.
Only connect a protective low voltage (SELV).
e.g. PC VGC401
Screening Screening
RXD
2 T
XD
3 RXDTXD
GND
5 GND
(Minimum configuration)
Screening
Pin assignment of the female 9-pin D-Sub
1
6
9
5
appliance con­nector:
Pin Signal Pin Signal
2 3 5
6 8 9
TXD RXD GND
DSR CTS GND
1
Chassis = screening
4 7
not connected not connected not connected
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4 Operation
4.1 Front Panel
Warning/error
(flashing)
Measurement value in floating point or exponential
format or status messages
Pressure
unit
Switching function
status
Upper threshold
Lower threshold
Degas activated
Parameter mode activated
para
para
Operator keys
Offset value ≠ 0
Correction factor ≠ 1
High vacuum measurement circuit activated
(PEG, MPG, BAG, BPG402 and BCG only)
( BPG, BCG and BAG only)
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4.2 Turning the VGC401 On and Off
Turning the VGC401 on
Turning the VGC401 off
Make sure the VGC401 is correctly installed and the specifications in the Technical Data are met.
The power switch is on the rear of the unit.
Turn the VGC401 on with the power switch (or cen­trally, via a switched power distributor, if the unit is in­corporated in a rack).
After power on, the VGC401 …
automatically performs a self-test
identifies the connected gauge
activates the parameters that were in effect before the
last power off
switches to the Measurement mode
adapts the parameters if required (if another gauge
was previously connected).
Turn the VGC401 off with the power switch (or centrally, via a switched power distributor, if the unit is incorpo­rated in a rack).
Wait at least 10 s before turning the VGC401 on
again in order for it to correctly initialize itself.
4.3 Operating Modes
The VGC401 works in the following operating modes:
Measurement mode for displaying measurement values or status mes-
28)
sages (
Parameter mode for entering or displaying parameters (
31)
Test mode
for running internal test programs (
47)
Program transfer mode
for updating the firmware (
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83)
Page 28
4.4 Measurement Mode
The Measurement mode is the standard operating mode of the VGC401. Measurement values and status mes­sages as well as the gauge identification are displayed in this mode.
Power on
Measurement mode
Measurement value
Gauge identification
Parameter
mode
>10 s
Test
mode
28
>5 s
>5 s
Page 29
Turning the gauge on and off
Available for:
Pirani (PSG) Pirani/Capacitive (PCG) ; Cold cathode (PEG) Cold cathode/Pirani (MPG) ; Hot cathode (BAG) Hot cathode/Pirani (BPG, HPG) Capacitive (CDG) Hot cathode/Pirani/Capacitive (BCG)
para
Ö Press key >1 s:
The gauge is turned off.
is dis­played instead of the measurement value.
para
Ö Press key >1 s:
The gauge is turned on. A status message may be displayed instead of the measure­ment value
:
Pressure p
range
Measurement
The high vacuum measurement circuit of these gauges can be activated in both, the Measurement and the Parameter mode ( 43).
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Displaying the gauge identification
Getting to the Parameter mode
para
Ö Press keys >0.5 s:
The type of the connected gauge is automatically iden­tified and displayed for 5 s:
Pirani gauge
(PSG400, PSG400-S, PSG100-S, PSG101-S, PSG500, PSG500-S, PSG502-S, PSG510-S, PSG512-S, PSG550, PSG552, PSG554)
Pirani/Capacitive gauge
(PCG400, PCG400-S, PCG550, PCG552, PCG554)
Cold cathode gauge
(PEG100)
Cold cathode/Pirani gauge
(MPG400, MPG401)
Hot cathode gauge
(BAG100-S, BAG101-S)
Hot cathode/Pirani gauge
(BPG400)
Hot cathode/Pirani gauge
(BPG402)
Hot cathode/Pirani gauge
(HPG400)
Hot cathode/Pirani/Capacitive gauge
(BCG450)
Linear gauge (capacitive. analog)
(CDG025, CDG045, CDG045-H, CDG100)
Linear gauge (capacitive. digital)
(CDG025D, CDG045D, CDG100D, CDG160D)
No gauge connected
(no Sensor)
Connected gauge cannot be identified
(no Identifier)
31
Getting to the Test mode
Press keys >5 s ( 47)
30
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4.5 Parameter Mode
The Parameter mode is used for displaying, editing and entering parameter values.
Power on
Measurement
mode
Parameter mode
Degas
lower threshold
>10 s
Pirani range extension
Test mode
>5 s
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Selecting a parameter
34 34 38 38 41 41 42 43 44 44 45 45 46
Available for
Ö The name of the parameter
e.g.:
Degas
is displayed as long as the key is pressed or at least for 2 s.
Afterwards, the currently valid parameter value is dis­played.
Some parameters are not available for all gauge types. They are only displayed if available.
32
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Editing the parameter value
Loading the default parameters
Getting to the Test mode
para
Ö Press key <1 s:
The value is increased/ decreased by 1 increment.
para
Press key >1 s: The value is increased/ decreased continuously.
Modifications of parameters come into effect immediately and are stored automatically. Exceptions are mentioned under the corresponding parameters.
para
Ö Press keys >5 s:
All user-defined parameters are restored to their default values ( 82).
Loading of the default parameter settings is
irreversible.
Press keys >5 s ( 47)
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Page 34
4.5.1 Parameters
Degas
Lower/upper switch­ing threshold
Contamination deposits on the electrode system of Hot cathode gauges may cause instabilities of the meas­urement values. The Degas function allows to clean the electrode system.
BAG10X and BPG402 gauges: The Degas func-
tion acts only upon the active filament.
Available for:
Pirani (PSG) Pirani/Capacitive (PCG) Cold cathode (PEG) Cold cathode/Pirani (MPG) ; Hot cathode (BAG) ; Hot cathode/Pirani (BPG) Hot cathode/Pirani (HPG) Capacitive (CDG) ; Hot cathode/Pirani/Capacitive (BCG)
Value
Ö Normal operation.
Ö Degas: The electron
collection grid is heated to
700 °C by
electron bombard­ment and the elec­trode system is thus cleaned.
Duration of the Degas function: 3 min (can be aborted).
The VGC401 has a switching function with two adjustable thresholds. The status of the switching function is displayed on the front panel (
26) and can be evalu-
ated via the floating contact at the CONTROL connector
23).
(
34
Page 35
Pressure pDisplay
e
u
l
a
v
t
n
e
m
e
r
u
s
a
e
M
Time t
4 3
2
function
Switching
Off
e.g.:
4 3
2
On
4 3
2
Off
Value
The lower switching threshold (Setpoint low) defines the pres­sure at which the switching func­tion is activated when the pres­sure is dropping.
Ö gauge dependent
(
table).
If another gauge type is con­nected, the VGC401 auto­matically adjusts the switching threshold if required.
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Page 36
lower
threshold
2×10
2×10
1×10
5×10
1×10
1×10
1×10
1×10
limit
-3 *)
-3 *)
-9
-9
-8
-8
-6
-10
upper
threshold
5×10
1.5×10
1×10
1×10
1×10
1×10
1×10
1×10
limit
2
3
-2
3
3
3
3
-1
FSr / 1000
FSr / 1000
-8
1×10
all values in mbar, Cor = 1
*)
2×10-4 mbar, if PrE is activated ( 46)
The minimum hysteresis between the upper and
lower switching threshold is at least 10% of the lower threshold or 1% of the set full scale value. If the value of the minimum hysteresis drops be­low these values, the upper threshold is auto­matically adjusted. This prevents unstable states.
Value
The upper switching threshold (Setpoint high) defines the pres­sure at which the switching func­tion is deactivated when the pres­sure is rising.
Ö gauge dependent
e.g.:
(
table).
If another gauge type is con­nected, the VGC401 auto­matically adjusts the threshold if required.
36
FSr
FSr
3
1.5×10
Page 37
lower
threshold
limit
+10% lower threshold
+10% lower threshold
+10% lower threshold
+10% lower threshold
+10% lower threshold
+10% lower threshold
lower threshold
+10% lower threshold
+10% lower threshold
+1% measurement
range (FSr)
+1% measurement
range (FSr)
+10% lower threshold
upper
threshold
5×10
1.5×10
1×10
1×10
1×10
1×10
1×10
1×10
FSr
FSr
1.5×10
limit
2
3
-2
3
3
3
3
-1
3
all values in mbar, Cor = 1
The minimum hysteresis between the upper and
lower switching threshold is at least 10% of the lower threshold or 1% of the set full scale value. This prevents unstable states.
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Measurement range of capacitive gauges
Offset correction of the controller
The full scale value of the measurement range (Full Scale range) of the linear gauges has to be defined by the user; the full scale value of logarithmic gauges is automatically recognized.
Available for:
Pirani (PSG) Pirani/Capacitive (PCG) Cold cathode (PEG) Cold cathode/Pirani (MPG) Hot cathode (BAG) Hot cathode/Pirani (BPG, HPG) ; Capacitive (CDG) Hot cathode/Pirani/Capacitive (BCG)
Value
0.01 mbar
Ö
e.g.:
0.01 Torr, 0.02 Torr, 0.05 Torr
0.10 mbar, 0.25 mbar, 0.50 mbar
0.10 Torr, 0.25 Torr, 0.50 Torr 1 mbar, 2 mbar, 5 mbar
1 Torr, 2 Torr, 5 Torr 10 mbar, 20 mbar, 50 mbar
10 Torr, 20 Torr, 50 Torr 100 mbar, 200 mbar, 500 mbar
100 Torr, 200 Torr, 500 Torr 1000 mbar, 1100 mbar
1000 Torr
2 bar, 5 bar, 10 bar, 50 bar
Conversion table Appendix, 81
For displaying the offset correction and zero adjustment of the gauge and adjustment to the currently measured value (in the range -5 ... +110% of the full scale setting).
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Available for:
Pirani (PSG) Pirani/Capacitive (PCG) Cold cathode (PEG) Cold cathode/Pirani (MPG) Hot cathode (BAG) Hot cathode/Pirani (BPG, HPG) ; Capacitive (CDG) Hot cathode/Pirani/Capacitive (BCG)
When the offset correction is activated, the stored offset value is subtracted from the actual measurement value. This allows measuring relative to a reference pressure.
The offset correction affects:
; the displayed measurement value the displayed threshold value of the switching
functions
the analog output at the CONTROL connector
23)
(
Value
Ö Offset correction
deactivated
Ö Offset correction
e.g.:
para
activated
Ö Press briefly:
Activate offset correction.
para
Ö Press key >2 s:
The offset value is read­justed. The actual measure­ment value is accepted as
para
new offset value.
Ö Press briefly:
Deactivate offset correction.
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Zero adjustment of the gauge
Available for:
Pirani (PSG) Pirani/Capacitive (PCG) Cold cathode (PEG) Cold cathode/Pirani (MPG) Hot cathode (BAG) Hot cathode/Pirani (BPG, HPG) ; Capacitive (CDG) Hot cathode/Pirani/Capacitive (BCG)
First adjust the gauge and then the controller.
When the zero of the gauge is readjusted, the
offset correction must be deactivated.
Value
e.g.:
para
Ö Zero adjustment
activated
as long as key remains pressed
Ö Press >2 s
Zero adjustment of the
Lit solid after >2 s and
gauge (CDGxxxD only).
After adjusting the zero point, a zero value is
displayed. Due to the measuring resolution of the CDG (noise, drift), a zero with plus/minus several digits are displayed.
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Pressure unit
Correction factor
Unit of measured values, thresholds etc. See Appendix ( 81) for conversion.
Value
Ö mbar/bar
Ö Torr
(only available if Torr lock is not activated i.e. Torr is not sup­pressed 50)
Ö Pascal
Ö Micron
(=mTorr)
A change of the pressure unit influences also the settings of the BPG, HPG and BCG gauges.
When selecting Micron, above 99000 Micron the readout automatically changes over to Torr. When the pressure drops below 90 Torr the instrument automatically switches back to Micron.
The correction factor allows the measured value to be calibrated for other gases than N
( respective manual,
2
"Literature" 86).
Available for:
Only for pressures
; Pirani (PSG) ; Pirani/Capacitive (PCG) <10 mbar ; Cold cathode (PEG) ; Cold cathode/Pirani (MPG) <1×10 ; Hot cathode (BAG) ; Hot cathode/Pirani (BPG) <1×10
-2
mbar
-2
mbar
; Hot cathode/Pirani (HPG) Capacitive (CDG) ; Hot cathode/Pirani/Capacitive (BCG) <1 mbar
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Value
Measurement value filter
e.g.:
Ö Measurement value
Ö No correction
e.g.:
corrected by a factor of 0.10 … 10.00
The measurement value filter permits a better evaluation of unstable or disturbed measuring signals.
The filter affects:
; the displayed measurement value the analog output the digitally transmitted measurement value of the
Hot cathode gauges BPG, HPG, BCG and BAG
Value
Ö Fast:
The VGC401 responds quickly to fluctuations in measured values. As a result, it will be more sensitive to disturbed measurement signals.
Pressure p
42
Time t
Page 43
Ö Normal:
Good relationship between re­sponse and sensitivity of the display and the switching func­tions to changes in the meas­ured values.
Pressure p
Time t
Ö Slow:
The VGC401 does not re­spond to small changes in measured values. As a result, it will respond more slowly to changes in the measured val­ues.
Pressure p
Time t
Turning the gauge on/off
Activating/deactivating the high vacuum measurement circuit ( also 29).
Available for:
 Pirani (PSG) Pirani/Capacitive (PCG) ; Cold cathode (PEG)  Cold cathode/Pirani (MPG) ; Hot cathode (BAG)  Hot cathode/Pirani (BPG, HPG)  Capacitive (CDG) Hot cathode/Pirani/Capacitive (BCG)
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Display resolution (digits)
Value
Ö High vacuum meas-
urement circuit acti­vated
Ö High vacuum meas-
urement circuit de­activated
Display resolution of measured values.
Value
Ö Display
rounded to one decimal digit
or two integrals
Ö Display
rounded to two decimal digits
or three inte­grals
When the PrE ( 46) is ON and the pressure is in the range p<1.0E-4 mbar the display resolution of the PSG and PCG Gauges is reduced by one decimal digit.
Transmission rate
Transmission rate of the RS232C interface.
Value
Ö 9600 baud
e.g.:
19200 baud 38400 baud
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Emission
Filament
Switching the emission on and off.
Available for:
 Pirani (PSG) Pirani/Capacitive (PCG)  Cold cathode (PEG)  Cold cathode/Pirani (MPG)  Hot cathode (BAG) ; Hot cathode/Pirani (BPG402 only)  Capacitive (CDG) ; Hot cathode/Pirani/Capacitive (BCG)
Value
Ö the emission is switched on
and off automatically by the gauge
Ö the emission is switched on
and off by the user
Means of selection.
Available for:
 Pirani (PSG) Pirani/Capacitive (PCG)  Cold cathode (PEG)  Cold cathode/Pirani (MPG)  Hot cathode (BAG) ; Hot cathode/Pirani (BPG402 only)  Capacitive (CDG) Hot cathode/Pirani/Capacitive (BCG)
Value
Ö the gauge automatically alter-
nates between the filaments
Ö filament 1 aktive
Ö filament 2 aktive
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Pirani range extension
The display and setpoint adjustment range can be extended.
Available for:
; Pirani Gauge ; Pirani Capacitance Gauge (PCG) 5×10 Cold Cathode Gauge
Measurement range
(PSG) 5×10
(PEG)
-5
…1000 mbar
-5
…1500 mbar
Cold cathode/Pirani (MPG) Hot cathode (BAG) Hot cathode/Pirani (BPG, HPG) Capacitive (CDG) Hot cathode/Pirani/Capacitive (BCG)
Value
Ö Default.
Ö Display extended to
-5
5×10
mbar, setpoint adjust-
-4
mbar.
extended to
ment range 2×10
para
Ö Activate/deactivate the
Pirani range extension.
para
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4.6 Test Mode
The Test mode is used for displaying, editing and entering special parameter values for testing the VGC401.
Power on
+ Press any key.
Measurement
mode
>5 s
>5 s
Parameter mode
Test mode
Firmware version
Watchdog control
RS232C test program
>5 s
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Selecting a parameter
49 49 50
Ö The name of the parameter
e.g.:
Firmware version
is displayed.
Modifying a parameter
The name of the parameter is dis­played as long as the key is pressed or at least for 2 s.
The firmware version is continuously displayed.
50 51 51 52 52 53 53 54 54
The name of the test program is displayed until it is started.
para
Ö Increase/decrease the value
by the defined increments.
para
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Starting the test program
para
Ö Start test program.
Changing to the Measurement mode
4.6.1 Parameters
Firmware version
Watchdog control
Press keys >5 s ( 28) or turn the unit off, wait for 10 s and then turn it on again.
The firmware version (program version) is displayed.
Version
Ö The two parts of the firmware
number are displayed alter­nately.
The last character indicates the modifi­cation index (-, A … Z). Please mention this index when contacting INFICON in the event of a fault.
Behavior of the system control (watchdog) in the event of an error.
Setting
Ö The system automatically ac-
knowledges error messages of the watchdog after 2 s.
Ö Error messages of the watch-
dog have to be acknowledged by the operator.
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Torr lock
The pressure unit can be suppressed in the corre-
sponding parameter setting
Setting
( 41).
Parameter setup lock
4.6.2 Test Programs
RAM test
Ö Pressure unit
available.
Ö Pressure unit
able.
not avail-
This parameter affects the parameter mode. When the lock is activated, the user can inspect but not modify parameter values.
Setting
Ö Parameters can be inspected
and modified
Ö Parameters can be inspected
only.
Test of the main memory.
Test sequence
The test runs automatically one time:
Ö Test in process (very briefly).
Ö Test finished, no error found.
Ö Test finished, error(s) found.
The
50
lamp flashes.
Page 51
EPROM test
EEPROM test
Test of the program memory.
Test sequence
The test runs automatically one time:
Ö Test in process
Ö Test finished, no error found.
After the test, a four-digit checksum (hexadecimal for­mat) is displayed.
Ö Test finished, error(s) found.
After the test, a four-digit checksum (hexadecimal for-
mat) is displayed. The lamp flashes.
Test of the parameter memory.
Test sequence
The test runs automatically one time:
Ö Test in process (very briefly).
Ö Test finished, no error found.
Ö Test finished, error(s) found.
The
lamp flashes.
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Display test
Test of the display.
HV COR
:
Test sequence
The test runs automati­cally one time
1)
:
Ö First, all display ele-
ments are lit at the same time, ...
Ö ... and then, each ele-
ment is lit individually.
A/D converter test 0
HV COR
1)
para
Ö Stop the test sequence
and activate one element after another by pressing the key once per element.
Test of channel 0 of the analog/digital converter (with a reference voltage at the signal input of the SENSOR connector ( 23)).
The measurement value filter affects the applied
voltage. If the signal input is open, the VGC401 displays a default value that may easily fluctuate because of the high sensitivity of the open measurement circuit.
Test sequence
Ö Positive portion of the meas-
e.g.:
urement signal in Volt
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A/D converter test 1
Test of channel 1 of the analog/digital converter (with a reference voltage at the signal input of the SENSOR connector ( 23)).
The measurement value filter affects the applied
voltage. If the signal input is open, the VGC401 displays a default value that may easily fluctuate because of the high sensitivity of the open measurement circuit.
Test sequence
A/D converter test 2
e.g.:
urement signal in Volt.
Ö Negative portion of the meas-
Test of channel 2 of the analog/digital converter (with a reference voltage at the signal input of the SENSOR connector ( 23)).
The measurement value filter affects the applied
voltage. If the signal input is open, the VGC401 displays a default value that may easily fluctuate because of the high sensitivity of the open measurement circuit.
Test sequence
Ö Gauge identification voltage
e.g.:
Ö No gauge connected
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I/O test
RS232C test
Test of the two relays of the VGC401. The program tests their switching function.
Caution
Caution: The relays switch irrespective of the pressure
Starting a test program may cause unwanted effects in connected control systems.
Disconnect all sensor cables and control system lines to ensure that no control com­mands or messages are triggered by mistake.
The relays switch on and off cyclically. The switching operations are indicated optically and can be heard.
The contacts are connected to the CONTROL connector on the rear of the housing ( function with an ohmmeter.
23). Check the switching
Test sequence
The test runs automatically one time:
Ö both relays deactivated
Ö switching function relay
Ö switching function relay
Ö error relay
Ö error relay
Test of the RS232C interface. The VGC401 repeats each sign transmitted by the communicating HOST.
The data transferred from/to the VGC401 can
be displayed by the computer only
Section 5).
(
Test sequence
The test runs automatically.
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5 Communication (Serial Interface)
5.1 RS232C Interface
Connection diagram, connection cable
5.1.1 Data Transmission
Data format
The serial interface is used for communication between the VGC401 and a computer. A terminal can be con­nected for test purposes.
When the VGC401 is put into operation, it starts trans­mitting measured values in intervals of 1 s. As soon as the first character is transferred to the VGC401, the automatic transmission of measured values stops. After the necessary inquiries or parameter modifications have been made, the transmission of measured values can be started again with the COM command ( 61).
Pin assignment of the 9-pin D-Sub connector and RS232 cable 25.
The data transmission is bi-directional, i.e. data and control commands can be transmitted in either direction.
1 start bit 8 data bits No parity bit 1 stop bit No hardware handshake
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Definitions
Format of pressure values
Flow Control
The following abbreviations and symbols are used:
Symbol Meaning
HOST Computer or terminal [...] Optional elements ASCII American Standard Code for Information
Interchange
<ETX> END OF TEXT (CTRL C)
Dec Hex
3 03
Reset the interface
<CR> CARRIAGE RETURN
13 0D
Go to beginning of the line
<LF> LINE FEED
10 0A
Advance by one line
<ENQ> ENQUIRY
5 05
Request for data transmission
<ACK> ACKNOWLEDGE
6 06
Positive report signal
<NAK> NEGATIVE ACKNOWLEDGE
21 15
Negative report signal
"Transmit": Data transfer from HOST to VGC401 "Receive": Data transfer from VGC401 to HOST
For pressure values, the following format is used:
sx.xxxxEsxx
│ │ │└─── Exponent │ │
└──── Sign exponent
│ └───────-── Mantissa └────-────-── Sign mantissa
After each ASCII string, the HOST must wait for a report signal (<ACK><CR><LF> or <NAK> <CR><LF>).
The input buffer of the HOST must have a capacity of at least 25 bytes.
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5.1.2 Communication Protocol
Transmission format
Transmission protocol
Reception format
Messages are transmitted to the VGC401 as ASCII strings in the form of mnemonics and parameters. All mnemonics comprise three ASCII characters.
Spaces are ignored. <ETX> (CTRL C) clears the input buffer in the VGC401.
The input is terminated by <CR> or <LF> or <CR><LF> ("end of message"), and evaluation in the VGC401 is subsequently started.
The tables starting on 59 are applicable to the mnemonics and parameters. The maximum number of digits, the data formats and admissible value ranges are also specified there.
HOST VGC401 Explanation
Mnemonics [and parameters] ––-–––> <CR>[<LF>] –––––––-––>
Receives message with "end of message"
<–-––– <ACK><CR><LF> Positive acknowledgment
of a received message
When requested with a mnemonic instruction, the VGC401 transmits the measurement data or parameters as ASCII strings to the HOST.
<ENQ> must be transmitted to request the transmission of an ASCII string. Additional strings, according to the last selected mnemonic, are read out by repetitive transmission of <ENQ>.
If <ENQ> is received without a valid request, the ERROR word is transmitted.
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Reception protocol
Error processing
Error recognition protocol
HOST VGC401 Explanation
Mnemonics [and parameters] ––––––> <CR>[<LF>] –––––––––->
Receives message with "end of message"
<––––- <ACK><CR><LF> Positive acknowledgment
of a received message
<ENQ> -–––––––––––––> Requests to transmit
<––––––--– Measurement values or parameters <–––––––––– <CR><LF>
Transmits data with "end of message"
: :
<ENQ> –––––––––––––> Requests to transmit
<––––––--– Measurement values or parameters <–––––––––– <CR><LF>
Transmits data with "end of message"
All strings received are verified in the VGC401. If an error is detected, a negative acknowledgment <NAK> is output. The appropriate flag is set in the ERROR word. Errors can be decoded when the ERROR word is read.
HOST VGC401 Explanation
Mnemonics [and parameters] ––––-–> <CR>[<LF>] -–––––––––>
Receives message with "end of message"
***** Transmission or programming error *****
<–––– <NAK><CR><LF> Negative acknowledgment
of a received message
Mnemonics [and parameters] –––––-> <CR>[<LF>] –––––-––––>
Receives message with "end of message"
<––––- <ACK><CR><LF> Positive acknowledgment
of a received message
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5.2 Mnemonics
Mnemonics
BAU COM COR DCD DGS ERR EUM FIL FSR FUM HVC ITR
Baud rate 69 Continuous mode 61 Correction factor 68 Display control digits 68 BAG, BPG, BCG degas on/off 64 Error status 63 Emission user mode 69 Filter time constant 68 CDG full scale range 66 Filament user mode 69 HV, EMI on/off 61 BAG, BPG, HPG, BCG, CDGxxxD
data output
LOC OFS PNR PRE PR1 RES SAV SP1 SPS TAD TDI TEE TEP TID TIO TKB TLC TRA TRS UNI WDT
Parameter setup lock 72 Offset correction 67 Program number 71 Pirani range extension 70 Pressure measurement 60 Reset 63 Save parameters to EEPROM 69 Setpoint 64 Setpoint status 65 A/D converter test 73 Display test 73 EEPROM test 72 EPROM test 72 Sensor identification 62 I/O test 74 Keyboard test 74 Torr lock 71 RAM test 72 RS232 test 74 Pressure unit 67 Watchdog control 71
62
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5.2.1 Measurement Mode
Measurement data
Transmit: PR1 <CR>[<LF>]
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x,sx.xxxxEsxx <CR><LF>
│ │ │ └─ Measurement value │ [in current pressure unit] │ └─ Status, x =
0 –> Measurement data okay 1 –> Underrange 2 –> Overrange 3 –> Sensor error 4 –> Sensor off (BAG, PEG) 5 –> No sensor 6 –> Identification error 7 –> Error BAG, BPG, HPG, BCG
1)
The 3rd and 4th decimal are always 0, except for
the CDG gauge.
1)
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Continuous output of measured values (RS232)
Activating/deactivating the HV circuit and EMI
Transmit: COM [,x] <CR>[<LF>]
│ └─ Mode x = 0 –> 100 ms
1 –> 1 s (default) 2 –> 1 min.
Receive: <ACK><CR><LF>
<ACK> is immediately followed by the con­tinuous output of the measured value in the desired interval.
Receive: x,sx.xxxxEsxx y <CR><LF>
│ │ │ │ └───┴─ Measured value │ with pressure unit │ └─ Status, x =
0 –> Measurement data okay 1 –> Underrange 2 –> Overrange 3 –> Sensor error 4 –> Sensor off (BAG, PEG) 5 –> No sensor 6 –> Identification error 7 –> Error BAG, BPG, HPG, BCG
1)
The 3rd and 4th decimal are always 0, except for the CDG gauge.
Transmit: HVC [,x] <CR>[<LF>]
│ └─ Mode x = 0 –> off (default)
1 –> on
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x <CR><LF>
│ └─ Mode
1)
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Data output BAG, BPG, HPG, BCG, CDGxxxD
Gauge identification
Transmit: ITR <CR>[<LF>]
Receive: <ACK><CR><LF> Transmit: <ENQ>
1)
Receive: xxx...xxx,y <CR><LF>
│ │ │ └─ Gauge status ERS y │ ( BAG) │ └─ Transmission string (17 character)
( BAG)
xx,xx,xx,xx,xx,xx,xx,xx <CR><LF>
│ └─ Transmission string byte
0 … 7 in hex format ( BPG, HPG, BCG, CDGxxxD)
1)
Only for BAG
2)
For BPG, HPG, BCG, CDGxxxD
Transmit: TID <CR>[<LF>]
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x <CR><LF>
│ └─ Identification, x =
PSG (Pirani) PCG (Pirani/Capacitive) PEG (Cold cathode) MPG (Cold cathode/Pirani) CDG (Capacitive) BAG (Hot cathode) BPG (Hot cathode/Pirani) BPG402 (Hot cathode/Pirani) HPG (Hot cathode/Pirani) BCG (Hot cathode/Pirani/ Capacitive) noSEn (no Sensor) noid (no identification)
2)
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Error status
Reset
Transmit: ERR <CR>[<LF>]
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: xxxx <CR><LF>
│ └─ x =
0000 –> No error 1000 –> Controller error (See display on front panel) 0100 –> NO, HWR No hardware 0010 –> PAR, Inadmissible parameter 0001 –> SYN, Syntax error
The ERROR word is cancelled when read out. If
the error persists, it is immediately set again.
Transmit: RES [,x] <CR>[<LF>]
│ └─ x = 1 –> Reset
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: [x]x,[x]x,... <CR><LF>
│ └─ List of all present error messages
xx = 0 –> No error 1 –> Watchdog has responded 2 –> Task fail error 5 –> EPROM error 6 –> RAM error 7 –> EEPROM error 9 –> DISPLAY error 10 –> A/D converter error 11 –> Sensor error (e.g. filament rupture, no supply) 12 –> Sensor identification error
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5.2.2 Parameter Mode
Degas
Threshold value setting, allocation
Transmit: DGS [,x] <CR>[<LF>]
│ └─ x = 0 –> off (default)
1 –> on (3 min.)
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x <CR><LF>
│ └─ Degas status
Transmit: SP1 [,x.xxEsx,x.xxEsx] <CR>[<LF>]
│ │ │ └─ Upper threshold
1)
[in current pressure unit] (default = depending on gauge) │ └─ Lower threshold
1)
[in current pressure unit] (default = depending on
1)
Values can be entered in any format. They are internally
gauge)
converted into the floating point format.
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x.xxxxEsxx,x.xxxxEsxx <CR><LF>
│ │ │ └─ Upper threshold │ [in current pressure unit] │ └─ Lower threshold
[in current pressure unit]
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Switching function status
Transmit: SPS <CR>[<LF>]
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x <CR><LF>
│ └─ Switching function x = 0 –> off
1 –> on
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Measurement range (F.S.) of capacitive gauges
The full scale value of the measurement range
(Full Scale) of linear gauges has to be defined by the user; the full scale value of logarithmic gauges is automatically recognized.
Transmit: FSR [,x] <CR>[<LF>]
│ └─ Measurement range, x =
0 –> 0.01 mbar 1 –> 0.01 Torr 2 –> 0.02 Torr 3 –> 0.05 Torr 4 –> 0.10 mbar 5 –> 0.10 Torr 6 –> 0.25 mbar 7 –> 0.25 Torr 8 –> 0.50 mbar 9 –> 0.50 Torr 10 –> 1 mbar 11 –> 1 Torr 12 –> 2 mbar 13 –> 2 Torr 14 –> 5 mbar 15 –> 5 Torr 16 –> 10 mbar 17 –> 10 Torr 18 –> 20 mbar 19 –> 20 Torr 20 –> 50 mbar 21 –> 50 Torr 22 –> 100 mbar 23 –> 100 Torr 24 –> 200 mbar 25 –> 200 Torr 26 –> 500 mbar 27 –> 500 Torr 28 –> 1000 mbar 29 –> 1100 mbar 30 –> 1000 Torr 31 –> 2 bar 32 –> 5 bar 33 –> 10 bar 34 –> 50 bar
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x <CR><LF>
│ └─ Measurement range (F.S.)
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Offset correction
Transmit: OFS [,x,x.xxxEsx] <CR>[<LF>]
│ │ │ └─ Offset
1)
[in current pressure unit] (default = 0.000E0) │ └─ Mode, x =
0 –> Off (default) No offset value needs to be entered. 1 –> On If no offset value has been entered, the previously defined offset value is taken over. 2 –> Auto (offset measurement) No offset value needs to be entered.
3 –> Zero adjustment CDGxxxD No offset value needs to
1)
Values can be entered in any format. They are
be entered.
internally converted into the floating point format.
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x,sx.xxxxEsxx <CR><LF>
│ │ │ └─ Offset │ [in current pressure unit] │ └─ Mode
Measurement unit
Transmit: UNI [,x] <CR>[<LF>]
│ └─ x = 0 –> mbar/bar (default)
1 –> Torr 2 –> Pascal 3 –> Micron
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x <CR><LF>
│ └─ Measurement unit
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Correction factor
Number of digits in the display
Measurement value filter
Transmit: COR [,[x]x.xxx] <CR>[<LF>]
│ └─ 0.100 … 10.000
(default = 1.000)
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: [x]x.xxx <CR><LF>
│ └─ Correction factor
Transmit: DCD [,x] <CR>[<LF>]
│ └─ x = 2 –> 2 digits (default)
3 –> 3 digits
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x <CR><LF>
│ └─
Number of digits
When the PrE ( 46) is ON and the pressure is in the range p<1.0E-4 mbar the display resolution of the PSG and PCG Gauges is reduced by one decimal digit.
Transmit: FIL [,x] <CR>[<LF>]
│ └─ x = 0 –> fast
1 –> medium (default) 2 –> slow
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x <CR><LF>
│ └─ Filter time constant
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Transmission rate
Emission
Filament
Save parameters to EEPROM
Transmit: BAU [,x] <CR>[<LF>]
│ └─ x = 0 –> 9600 baud (default)
1 –> 19200 baud 2 –> 38400 baud
As soon as the new baud rate has been entered,
the report signal is transmitted at the new transmission rate.
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x <CR><LF>
│ └─ Transmission rate
Transmit: EUM [,x] <CR>[<LF>]
│ └─ x = 0 –> Manually
1 –> Automatically
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x <CR><LF>
Transmit: FUM [,x] <CR>[<LF>]
│ └─ x = 0 –> Automatically
1 –> Filament 1 2 –> Filament 2
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x <CR><LF>
Transmit: SAV [,x] <CR>[<LF>]
│ └─ x = 0 –> Save default
parameters 1 –> Save user parameters
Receive: <ACK><CR><LF>
(default)
(default)
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Pirani range extension
Transmit: PRE [,x] <CR>[<LF>]
│ └─ x = 0 –> off (default)
1 –> on
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x <CR><LF>
PSG and PCG gauges only, measurement
range up to 5×10
-5
mbar.
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5.2.3 Test Mode
Firmware version
Watchdog control
Torr lock
(For service specialists)
Transmit: PNR <CR>[<LF>]
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: xxx-xxx-x <CR><LF>
│ │ │ └─ -x = Modification index │ (-- = original version) │ └─ Firmware number
Transmit: WDT [,x] <CR>[<LF>]
│ └─ x = 0 –> Manual error
acknowledgement 1 –> Automatic error acknowledgement (default)
1)
If the watchdog has responded, the error is auto-
matically acknowledged and cancelled after 2 s.
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x <CR><LF>
│ └─ Watchdog control
Transmit: TLC [,x] <CR>[<LF>]
│ └─ x = 0 –> off (default)
1 –> on
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x <CR><LF>
│ └─ Torr lock status
1)
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Parameter setup lock
RAM test
EPROM test
EEPROM test
Transmit: LOC [,x] <CR>[<LF>]
│ └─ x = 0 –> off (default)
1 –> on
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x <CR><LF>
│ └─ Parameter setup lock status
Transmit: TRA <CR>[<LF>]
Receive: <ACK><CR><LF> Transmit: <ENQ>
Starts the test (duration <1 s)
Receive: xxxx <CR><LF>
│ └─ ERROR word
Transmit: TEP <CR>[<LF>]
Receive: <ACK><CR><LF> Transmit: <ENQ>
Starts the test (duration 10 s)
Receive: xxxx,xxxx <CR><LF>
│ │ │ └─ Check sum (hex) │ └─ ERROR word
Transmit: TEE <CR>[<LF>]
Receive: <ACK><CR><LF> Transmit: <ENQ>
Do not keep repeating the test (EEPROM life).
Starts the test (duration <1 s)
Receive: xxxx <CR><LF>
│ └─ ERROR word
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Display test
ADC test
Transmit: TDI [,x] <CR>[<LF>]
│ └─ x = 0 –> Stops the test – display
according to current operating mode (default) 1 –> Starts the test – all LEDs on
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x <CR><LF>
│ └─ Display test status
Transmit: TAD <CR>[<LF>]
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: [x]x.xxxx, x.xxxx, x.xxxx <CR><LF>
│ │ │ │ │ └─ ADC channel 2 │ │ Gauge │ │ identification │ │ [0.0000 … │ │ 5.0000 V] │ │ │ └─ ADC channel 1 │ Measurement signal │ (negative portion) │ [0.0000 … 5.0000 V] │ └─ ADC channel 0
Measurement signal (positive portion) [0.0000 … 11.0000 V]
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I/O test
Operator key test
RS232 test
Transmit: TIO [,x] <CR>[<LF>]
│ └─ x =
0 –> Stops the test (default) 1 –> Setpoint relay off, error relay off 2 –> Setpoint relay on, error relay off 3 –> Setpoint relay off, error relay on 4 –> Setpoint relay on, error relay on
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: x <CR><LF>
│ └─ I/O test status
Transmit: TKB <CR>[<LF>]
Receive: <ACK><CR><LF> Transmit: <ENQ>
Receive: xxx <CR><LF>
│││ ││└─ Key 3
x = 0 –> Not pushed
││ 1 –> Pushed ││ │└── Key 2 │
para
└─── Key 1
Transmit: TRS <CR>[<LF>]
Receive: <ACK><CR><LF> Transmit: <ENQ>
Starts the test (repeats each character, test is interrupted with <CTRL> C).
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5.2.4 Example
"Transmit (T)" and "Receive (R)" are related to the host.
T: TID <CR> [<LF>] R: <ACK> <CR> <LF> T: <ENQ> R: PSG <CR> <LF>
T: SP1 <CR> [<LF>]
R: <ACK> <CR> <LF> T: <ENQ> R: 1.0000E-09,9.0000E-07 <CR> <LF>
T: SP1,6.80E-3,9.80E-3 <CR> [<LF>]
R: <ACK> <CR> <LF> T: FOL,2 <CR> [<LF>]
R: <NAK> <CR> <LF> T: <ENQ> R: 0001 <CR> <LF> T: FIL,2 <CR> [<LF>] R: <ACK> <CR> <LF> T: <ENQ> R: 2 <CR> <LF>
T: PR1 <CR> [<LF>] R: <ACK> <CR> <LF> T: <ENQ> R: 0,8.3400E-03 <CR> <LF> T: <ENQ> R: 1,8.0000E-04 <CR> <LF>
Request for gauge identification Positive acknowledgement Request for data transmission Gauge identification
Request for parameters of switching function (setpoint) Positive acknowledgement Request for data transmission Thresholds
Modification of threshold values of switching function (setpoint) Positive acknowledgement
Modification of filter time constant (syntax error) Negative acknowledgement Request for data transmission ERROR word Modification of filter time constant Positive acknowledgement Request for data transmission Filter time constant
Request for measurement data Positive acknowledgement Request for data transmission Status and pressure Request for data transmission Status and pressure
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6 Maintenance
Cleaning the VGC401
The product requires no maintenance.
For cleaning the outside of the VGC401, a slightly moist cloth will usually do. Do not use any aggressive or scouring cleaning agents.
DANGER
DANGER: mains voltage Contact with live parts is extremely hazardous
when liquids penetrate into the unit. Make sure no liquids penetrate into the
equipment.
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7 Troubleshooting
Signalization of errors
Error messages
and the error relay opens ( 24).
Possible cause and remedy/
acknowledgement
Parameter setup lock activated
( 50).
Possible cause and remedy/
acknowledgement
Interruption or instability in sensor line
or connector (Sensor error).
Ö Acknowledge with the
para
If the problem persists,
is displayed
Possible cause and remedy/
acknowledgement
Error messages concerning BPG, BAG
and HPG.
Meaning [6], [7], [8], [14].
0 = no communication to the gauge
1…9 = High-Byte of Error-Byte
(BPG400, HPG)
1…6 = Error status (BAG)
Possible cause and remedy/
acknowledgement
Error messages concerning BCG and
BPG402.
Meaning [15], [21].
xx = Error byte (HEX)
key.
or
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Possible cause and remedy/
acknowledgement
The VGC401 has been turned on too fast after power off.
Ö Acknowledge with the
para
The watchdog has tripped because of a severe electric disturbance or an operating system error.
Ö Acknowledge with the
para
1)
If the watchdog is set to , the VGC401 acknowledges the message automatically after 2 s ( 49).
Possible cause and remedy/
acknowledgement
Main memory (RAM) error.
Ö Acknowledge with the
para
Possible cause and remedy/
acknowledgement
Program memory (EPROM) error.
Ö Acknowledge with the
para
Possible cause and remedy/
acknowledgement
Parameter memory (EEPROM) error.
Ö Acknowledge with the
para
Possible cause and remedy/
acknowledgement
Display driver error.
Ö Acknowledge with the
para
key 1).
key 1).
key.
key.
key.
key.
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Technical support
8 Repair
Possible cause and remedy/
acknowledgement
A/D converter error.
Ö Acknowledge with the
para
key.
Possible cause and remedy/
acknowledgement
Operating system (Task Fail) error.
Ö Acknowledge with the
para
key.
If the problem persists after the message has been
acknowledged for several times and/or the gauge has been exchanged, please contact your local INFICON service center.
Return defective products to your local INFICON service center for repair.
INFICON assumes no liability and the warranty becomes null and void if repair work is carried out by the end-user or third parties.
9 Accessories
Ordering
Adapter panel for installation into a 19" rack chassis adapter, height 3 U
tinb01e1-f (2011-07) VGC401.om 79
number
398-499
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10 Storage
11 Disposal
Separating the components
Non-electronic components
Electronic components
Caution
Caution: electronic component Inappropriate storage (static electricity, hu-
midity etc.) can damage electronic compo­nents.
Store the product in a bag or container. Ob­serve the corresponding specifications in the technical data (
9).
WARNING
WARNING: substances detrimental to the environment
Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with the relevant local regulations.
After disassembling the product, separate its compo­nents according to the following criteria:
Such components must be separated according to their materials and recycled.
Such components must be separated according to their materials and recycled.
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Appendix
A: Conversion Tables
Weights
kg lb slug oz
Pressures
N/m2, Pa bar mbar Torr at
Pressure units used in the vacuum technology
mbar Pascal Torr mmWs psi
Linear measures
mm m inch ft
Temperature
Kelvin Celsius Fahrenheit
kg lb slug oz
1
0.454 1 31.081×10-3 16
14.594 32.174 1 514.785
28.349×10-3 62.5×10-3 1.943×10-3 1
N/m2, Pa bar mbar Torr at
1 10×10-6 10×10-3 7.5×10-3 9.869×10-6
100×103 1 103 750.062 0.987
100 10-3 1 750.062×10-3 0.987×10-3
133.322 1.333×10-3 1.333 1 1.316×10-3
101.325×103 1.013 1.013×103 760 1
mbar Pascal Torr mmWs psi
1 100 750.062×10-3 10.2 14.504×10-3
10×10-3 1 7.5×10-3 0.102 0.145×10-3
1.333 133.322 1 13.595 19.337×10-3
9.81×10-2 9.81 7.356×10-2 1 1.422×10-3
68.948 6.895×103 51.715 703 1
mm m inch ft
10
25.4 25.4×10
304.8 0.305 12
Kelvin Celsius Fahrenheit
1 °C+273.15 (°F+459.67)×5/9
K-273.15 1 5/9×°F-17.778
9/5×K-459.67 9/5×(°C+17.778) 1
2.205
68.522×10
-3
35.274
1 10-3 39.37×10-3 3.281×10-3
3
1 39.37 3.281
-3
1 8.333×10-2
1
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B: Default Parameters
The following values are activated when the default parameters are loaded (
33):
Default User
oFF
-4
mbar
5×10
3
mbar
1×10
1000 Torr
oFF
mbar
1.00
nor
oFF
2 Digits
9600
oFF
Auto
oFF
oFF
Auto
Auto
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C: Firmware Update
User parameters
Preparing the VGC401 for a program transfer
If your VGC401 firmware needs updating, e.g. for
implementing a new gauge type, please download it from our website (www.inficon.com) or contact your local INFICON service center.
Most of the settings you may have defined in the Pa­rameter and Test mode will not be affected by a firm­ware update. To be sure, note your parameter settings before upgrading the firmware ( 82).
n Turn the VGC401 off
o Connect the VGC401 with the serial COM1
(COM2) interface of your PC via a 9-pin D-Sub extension cable (the firmware of the VGC401 can­not be loaded from a Mac).
PC VGC401
Screening Screening
RXD
GND
2 T
XD
3 RXDTXD
5 GND
p With a pin (ø<2 mm) depress the switch behind
the rear panel and turn the VGC401 on.
After power on, the display remains dark.
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Program transfer
In the following instructions, the index is used instead of the actual index.
n Unpack the self extracting file
.
file *.zip
*.exe or the packed
o If you have not connected the VGC401 to the
COM1 interface:
Open the batch file *.bat …
… edit the interface …
… and save the new setting.
p Start batch file *.bat.
The new firmware is transmitted to the VGC401.
Ö
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Starting the VGC401 with the updated firm­ware
If the program transfer was successful, quit the Update mode by turning the VGC401 off.
Wait at least 10 s before turning the VGC401
on again in order for it to correctly initialize itself.
The VGC401 is now ready for operation. To be
sure, check that the current parameter settings are identical with the previously defined settings ( 82).
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D: Literature
[1] www.inficon.com
Operating Manual Pirani Standard Gauge PSG400, PSG400-S tina04e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[2] www.inficon.com
Operating Manual Compact Pirani Gauge PSG500/-S, PSG502-S, PSG510-S, PSG512-S tina44e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[3] www.inficon.com
Operating Manual Pirani Standard Gauge PSG100-S, PSG101-S tina17e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[4] www.inficon.com
Operating Manual Pirani Standard Gauge PSG550, PSG552, PSG554 tina60e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[5] www.inficon.com
Operating Manual Penning Gauge PEG100 tina14e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[6] www.inficon.com
Operating Manual Bayard-Alpert Pirani Gauge BPG400 tina03e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[7] www.inficon.com
Operating Manual Bayard-Alpert Gauge BAG100-S tina06e1 Inficon AG, LI–9496 Balzers, Liechtenstein
[8] www.inficon.com
Operating Manual Bayard-Alpert Gauge BAG101-S tina11e1 INFICON AG, LI–9496 Balzers, Liechtenstein
86
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[9] www.inficon.com
Operating Manual Capacitance Diaphragm Gauge CDG025 tina01e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[10] www.inficon.com
Operating Manual Capacitance Diaphragm Gauge CDG045, CDG045-H tina07e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[11] www.inficon.com
Operating Manual Capacitance Diaphragm Gauge CDG100 tina08e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[12] www.inficon.com
Operating Manual Pirani Capacitance Diaphragm Gauge PCG400, PCG400-S tina28e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[13] www.inficon.com
Operating Manual Pirani Capacitance Diaphragm Gauge PCG550, PCG552, PCG554 tina56e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[14] www.inficon.com
Operating Manual High Pressure / Pirani Gauge HPG400 tina31e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[15] www.inficon.com
Operating Manual TripleGauge™ BCG450 tina40e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[16] www.inficon.com
Operating Manual Inverted Magnetron Pirani Gauge MPG400, MPG401 tina48e1 INFICON AG, LI–9496 Balzers, Liechtenstein
tinb01e1-f (2011-07) VGC401.om 87
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[17] www.inficon.com
Operating Manual Bayard-Alpert Pirani Gauge BPG402 tina46e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[18] www.inficon.com
Operating Manual Capacitance Diaphragm Gauge CDG025D tina49e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[19] www.inficon.com
Operating Manual Capacitance Diaphragm Gauge CDG045D tina51e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[20] www.inficon.com
Operating Manual Capacitance Diaphragm Gauge CDG100D tina52e1 INFICON AG, LI–9496 Balzers, Liechtenstein
[21] www.inficon.com
Operating Manual Capacitance Diaphragm Gauge CDG160D, CDG200D tina53e1 INFICON AG, LI–9496 Balzers, Liechtenstein
88
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E: Index
A/D converter test 52 Accessories 79 Baud rate 44
Calibration factor Correction factor
Cleaning 76 Communication
Example 75 Mnemonics 59 RS232C- 55
Connectors
CONTROL 23 mains power 20 RS232 25
SENSOR 22 Contact positions 24 Contents 4 CONTROL connector 23 Conversion 81 Correction factor 41 Default parameters 82
Loading 33 Default settings 82 Degas 34 Display
resolution 44 Display test 52 Disposal 80 EEPROM 51 Emission on/off 45 EPROM test 51 Error messages 77 Factory settings 82 Filament 45 Filter 42 Firmware
update 83
version 2, 49 Front panel 26
display 26
operator keys 26
Full Scale Measurement range
Gauge
activation/deactivation 43
identification 30 Gauge connector 22 Gauge parameters
measurement value filter 42
Pirani range extension 46
Gauges 9 General parameters
display resolution 44
pressure units 41 I/O test 54 Identification of the gauge 30 Installation 13
Interface RS232C Literature 86 Mains power connector 20 Maintenance 76 Measurement mode
displaying the gauge
identification 3 0
status messages 29
turning the gauge on/off 29 Measurement range 38 Measurement units
Pressure units Measurement value filter 42
Mnemonics Communication
Mode Operating modes Offset 38, 40 Operating modes
Measurement mode 28
overview 27
Parameter mode 31
Program transfer mode 83
Test mode 47 Operation
power off 27
power on 27 Parameter 40 Parameter mode 31
correction factor 41
degas 34
display resolution 44
measurement range 38
measurement value filter 42
offset 38
pressure units 41
switching thresholds 34
transmission rate 44
turning the gauge on/off 43 Parameter Mode
Emission on/off 45
Filament 45 Parameter setup lock 50 Pin assignment
CONTROL 24
RS232 25
SENSOR 23
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Pirani range extension 46 Power connector 20 Power off 27 Power on 27 Pressure units 41
Program Firmware RAM test 50 Repair 79 RS232C
interface connector 25 Serial interface 25 Technical data 12
Test 54 Safety 6 Scope of Delivery 3 SENSOR connector 22
Serial interface RS232C Status messages 29 Storage 80 Switching function 34 Symbols 6 Technical data 9 Test 51
Test mode
A/D converter test 52 Display test 52 EPROM test 51 Firmware version 49 I/O test 54 parameter setup lock 50 RAM test 50 RS232C test 54 Torr lock 50
Watchdog 49 Thresholds 34 Torr lock 50 Transmission rate 44 Troubleshooting 77 Turning the gauge on/off 29
Units Pressure units Update 83 Warranty 8 Watchdog 49
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ETL Certification
3103457
ETL LISTED The product VGC401 complies with the requirements of
the following Standards: UL 61010-1, Issued: 2004/07/12 Ed: 2 Rev: 2005/07/22 CAN/CSA C22.2#61010-1, Issued: 2004/07/12
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EC Declaration of Conformity
We, INFICON, hereby declare that the equipment men­tioned below complies with the provisions of the Direc­tive relating to electrical equipment designed for use within certain voltage limits 2006/95/EC and the Directive relating to electromagnetic compatibility 2004/108/EC.
Product
Single-Channel Controller
VGC401
Part number
Standards
Signatures
398-010
Harmonized and international/national standards and specifications:
EN 61010-1:2001
equipment for measurement, control and laboratory use)
EN 61000-3-2:2006
emissions)
EN 61000-3-3:1995 + A1:2001 + A2:2005
(EMC: limitation of voltage changes, voltage fluctuations and flicker)
EN 61000-6-2:2005
EN 61000-6-3:2007
INFICON AG, Balzers
28 November 2008 28 November 2008
(Safety requirements for electrical
(EMC: limits for harmonic current
(EMC: generic immunity standard)
(EMC: generic emission standard)
Dr. Urs Wälchli Managing Director
92
Markus Truniger Product Manager
Page 93
tinb01e1-f (2011-07) VGC401.om 93
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LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700
Original: German tinb01d1-f (2011-07) reachus@inficon.com
t i nb01e1- f
www.inficon.com
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