INFICON SQC-122 User Manual

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Communications with the SQC-122

There are three possibilities for communicating with the SQC-122. The first is a DOS­based terminal program. The next is a 32 bit Windows DLL. The third is a Windows
program that can configure and operate the SQC-122.

SQM-TERM.EXE

This simple DOS-based terminal program allows you to send a command and receive a
response via the computer’s RS-232 port. The computer’s COM1 port baud rate must
be set to match the SQC-122 before the program is run. Source code (SQM-TERM.C)
is provided, so it can be customized easily. The command and response strings are
detailed in the attached Communications Protocol.

SIGMACOM.DLL

This 32 bit DLL should be placed in your Windows System directory. No Windows
registration is needed. The first call should be to InitCom to establish the comm port and
baud rate. Functions and their calling convention are listed in the attached
SIGMACOM.DLL Functions document.

SQC-122.EXE

This program uses SIGMACOM.DLL to communicate with the SQC-122. It must be
installed in Windows using the Setup SQC-122 installation program. It allows you to set
film parameters and names, download them to the SQC-122, and perform front panel
functions. This program is written in Visual Basic, contact Sigma Instruments if you need
the source code for this program.

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SQC-122 Communications Protocol

The SQC-122 communicates with a host computer via an ASCII based protocol. The
instrument defaults to 19200 baud, 8 data bits, and no parity. The baud rate can be
changed in the System Menu of the SQC-122, but is always 8 data bits with no parity.

The basic protocol is:

<sync character> <length character> <1 to n data characters> <CRC1><CRC2>

Once a valid command has been transmitted to the SQC-122, a response is returned.
The structure of the packet is identical in both the command and response. In the
response, the first character is a Response Status. These are summarized in the
following table.

Response Letter Meaning

A Command understood, normal response
B Command understood, but instrument reset
C Invalid command
D Problem with data in command
E Instrument in wrong mode for this command

The sync character is an exclamation point ‘!’. Anytime this character is received, the
communications for that packet is reset. Following the sync character is the length
character. This is the number of characters in the packet starting with the length and
counting the 2 CRC characters. This character has a decimal 34 added to it so there
cannot accidentally be a sync character embedded in the packet. The two character
CRC is computed using the following algorithm:

1. The CRC is initialized to 3FFF hex.

2. Each character in the message is examined, bit by bit, and added to the CRC
in the following manner:

a) The character is exclusive or’d with the CRC.
b) The CRC is shifted right one bit position.
c) If the character’s least significant bit is a 0 then the CRC is exclusive or’d

with 2001 hex.

d) Steps b and c are repeated for each of the 8 bits in the character.

The CRC contains 14 significant bits. This is split into two characters of 7 bits each, and
then a decimal 34 is added to offset the character outside the range of the Sync

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Character. See the code example in the SQM-TERM.C file for an example of managing
the CRC.

These examples represent the data in unpacked format to better illustrate the function of
the specific commands.

Command: @
Parameters: None
Description: Returns the model number and software version number.
Example: @ SQC122 Ver 1.2

Command: L
Parameters: [1..2]
Description: Read the current Rate for a channel.
Example: L1 A9.32 Channel one’s rate is 9.32 Angstroms/S

Command: M
Parameters: None.
Description: Read the current Average Rate.
Example: M A10.42 Average Rate is 10.42 Angstroms/S

Command: N
Parameters: [1..2]
Description: Read the current thickness for a channel.
Example: N2 A1.187 Channel two’s Thickness is 1.187 Kilo Angstroms.

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Command: O
Parameters: None.
Description: Read the current Average Thickness
Example: O A2.376 The current Average Thickness is 2.376 kilo

Angstroms.

Command: P
Parameters: [1..2
Description: Read the current Frequency for a channel.
Example: P2 A5701563.2 Channel two’s current Frequency 5701563.2Hz

Command: R
Parameters: [1..2]
Description: Read the Crystal Life for a channel.
Example: R2 A57.82 Channel two’s remaining life is 57.82%.

Command: S
Parameters: None.
Description: Zero Average Thickness and Rate.
Example: S A

Command: T
Parameters: None.
Description: Zero Time

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Example: T A Zeroes time display on unit.

Command: U
Parameters: 0 to 33
Description: Controls operation of the SQC-122.

0 = Start Process 6 = Start Process 1
1 = Stop Process 7 = Start Process 2
2 = Start Layer 8-30 = Start Process 3-25
3 = Stop Layer 31 = Soak Hold
4 = Start Next Layer 32 = Zero Thickness
5 = Force Final Thickness 33 = Zero Time

Example: U1 A Starts the first layer of the active process.

Command: V
Parameters: None
Description: Controls operation of the SQC-122.

0 = Stopped 8 = Soak 2 16 = Start Next Layer
1 = Crystal Verify 9 = Soak Hold 17 = Crystal Fail
2 = Initialize layer 10 = Shutter Delay 18 = Stop Layer
3 = Manual Start Layer 11 = Deposit 19 = Manual Power
4 = Pocket Rotate 12 = Rate Ramp
5 = Ramp 1 13 = Rate Ramp Deposit
6 = Soak 1 14 = Timed Power
7 = Ramp 2 15 = Idle Ramp

Example: U1 A9 Units is in Soak Hold phase.

Command: Y
Parameters: None.
Description: Read the Power-Up Reset flag. The Power-Up Reset flag is set during

boot-up of the unit and stays set until read through the RS-232 interface.

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After the flag is read, it is reset and will not be set again until the unit is
power cycled.

Example: Y A1 Power-Up Reset flag is set.

Y A0 Power-Up Reset flag is reset.

Command: Z
Parameters: None.
Description: Set all Film and System parameters to defaults.

Note that this command can take over 1 second to complete

Example: Z A All Film and System parameters are set to defaults.

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SIGMACOM.DLL Function Descriptions

This dll acts as an interpreter between an application and the SQC122. The dll

transforms function calls to specific command sequences that the unit understands.

Transfer of data to the unit, in general, requires two function calls. The first
function call is to transfer the data to the unit. The data to be sent is usually contained in
the function’s parameter(s). The second function call is to ChkCommDone. This function
call ensures that the data was sent properly to the unit.

Data retrieval requires three function calls. The first function call is used to tell the
unit what data is being requested. The second function call is to ChkCommDone. This
function call is used to determine when all of the data has been transferred from the unit
to the dll or if an error occurred in the communications. The third function call is used to
retrieve the data from the dll.

InitComm

Parameters: 16 Bit Integer, 32 Bit Integer

Return : 16 Bit Integer.

InitComm is used to initialize the dll com port. The function’s first parameter is the

com port number to initialize (1 - 99 are valid). The second parameter is the baud

rate for the port. The function returns zero if initialization was successful or a bit

flag to indicate the failure of the initialization :

Example:

bit 0 : Communications Port handle is invalid.
bit 1 : Communications Port Set parameters invalid (Baud Rate)
bit 2 : Communications Port Set timeouts invalid.
bit 3 : Communications Port Set mask invalid.
bit 4 : Communications Port Error – Already exists.
bit 5 : Communications Port Set Read Thread fail.
bit 6 : Communications Port Set Read Thread priority fail.

ReturnVal =InitComm(1,19200) initialize Com1 to 19200 baud
if (ReturnVal != 0) if port did not initialize correctly
CloseComm() close the port

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CloseComm

Parameters: None.

Return : 16 Bit Integer, always returns a 1.

CloseComm is used to close the currently opened communications port.

CloseComm should always be used before attempting to open another port or

before exiting the dll’s calling application. The dll can have only one port open at a

time.

Example:

ReturnVal =CloseComm() Close the currently open comm port

ChkCommDone

Parameters: None.

Return : 16 Bit Integer.

ChkCommDone is used to check the status of a single communications iteration.

The function returns one of five different types of values:

Example:

ClearComm

Parameters: None.

Return : 16 Bit Integer, always returns a 1.

-1: communications not complete

Positive integer : communications complete, value is byte count of

returned message.

-99 : communications complete, but return message
incomplete due to timeout with unit.

-98 : communications complete, but return message not
valid due to a CRC error.

-97 : communications complete, but message not
understood by unit.

ReturnVal =ChkCommDone() check communications status

ClearComm is used to clear the communications buffers in the dll.

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Example:

ReturnVal =ClearComm() Clear the comm buffers in the dll

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SendGetVers

Parameters: None.
Return : 16 Bit Integer, always returns a 1.

SendGetVers is used to retrieve the software version of the unit from the unit.
This function must precede the use of the GetVers function

GetVers

Parameters: Pointer to Null-Terminated string.
Return : 16 Bit Integer, always returns a 1.

GetVers is used to retrieve the software version of the unit from the dll. This
function must be preceded by the SendGetVers. The Null-terminated string is
used to return the version from the dll.

Example:

ReturnVal = SendGetVers() tell unit to transfer version to dll
do while(ChkCommDone == -1) wait for comm to finish
ReturnVal = GetVers(&VersionString[0]) VersionString contains version info

SetActiveProcess

Parameters: Process # (16 Bit Integer).
Return : 16 Bit Integer, always returns a 1.

SetActiveProcess is used to select the active Process in the unit.
Example:

ReturnVal = SetActiveProcess(1t) set to Process 1
do while(ChkCommDone == -1) wait for comm to finish

SetProcess

Parameters: Process # (16 Bit Integer), Pointer to a Process Structure.
Return : 16 Bit Integer, always returns a 1.

SetProcess is used to set a Process’ Parameters in the unit. All of the
parameters are passed to the function through the Process Structure.

Example:

ReturnVal = SetProcess(1, &ProcessStruct) set Process 1 parameters
do while(ChkCommDone == -1) wait for comm to finish

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SendGetProcess

Parameters: 16 Bit Integer.
Return : 16 Bit Integer, always returns a 1.

SendGetProcess is used to get a Process’ parameters from the unit. The
Processr number (1-25) is passed to the function. This function must precede the
use of GetProcess.

GetProcess

Parameters: Pointer to a Process Structure.
Return : 16 Bit Integer, always returns a 1.

GetProcess is used to retrieve a Process’ parameters (requested by
SendGetProcess). The parameters are passed through the Process Structure.

Example:

ReturnVal = SendGetProcess(ProcessNum) tell to transfer Process#
do while(ChkCommDone == -1) wait for comm to finish
ReturnVal = GetProcess(&ProcessStruct) contains Process info

SetLayer

Parameters: Layer # (16 Bit Integer), Pointer to a Layer Structure.
Return : 16 Bit Integer, always returns a 1.

SetLayer is used to set a Layer’s parameters in the unit. All of the parameters
are passed to the function through the Layer Structure.

Example:

ReturnVal = SetLayer(1, &LayerStruct) set Layer 1 parameters
do while(ChkCommDone == -1) wait for comm to finish

SendGetLayer

Parameters: 16 Bit Integer.
Return : 16 Bit Integer, always returns a 1.

SendGetLayer is used to get a Layer’s parameters from the unit. The Layer
number (1-99) is passed to the function. This function must precede the use of
GetLayer.

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GetLayer

Parameters: Pointer to a Layer Structure.
Return : 16 Bit Integer, always returns a 1.

GetLayer is used to retrieve a Layer’s parameters (requested by SendGetLayer).
The parameters are passed through the Film Structure.

Example:

ReturnVal = SendGetFilm(FilmNum) tell unit to transfer Film #
do while(ChkCommDone == -1) wait for comm to finish
ReturnVal = GetLayer(&LyrStruct) LyrStruct contains Film info

DeleteLayers

Parameters: None
Return : 16 Bit Integer, always returns a 1.

Delete Layers removes all layers from the active process.

Example:

Set122Film

Parameters: Film # (16 Bit Integer), Pointer to a Film Structure.
Return : 16 Bit Integer, always returns a 1.

Set122Film is used to set a Film’s parameters in the unit. All of the parameters
are passed to the function through the Film Structure.

Example:

SendGetFilm

Parameters: 16 Bit Integer.
Return : 16 Bit Integer, always returns a 1.

ReturnVal = DeleteLayers set film parameters
do while(ChkCommDone == -1) wait for comm to finish

ReturnVal = SetFilm(&FilmStruct) set film parameters
do while(ChkCommDone == -1) wait for comm to finish

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SendGetFilm is used to get a Film’s parameters from the unit. The Film number
(1-25) is passed to the function. This function must precede the use of
Get122Film.

Get122Film

Parameters: Pointer to a Film Structure.
Return : 16 Bit Integer, always returns a 1.

Get122Film is used to retrieve a Film’s parameters (requested by SendGetFilm).
The parameters are passed through the Film Structure.

Example:

ReturnVal = SendGetFilm(FilmNum) tell unit to transfer Film #
do while(ChkCommDone == -1) wait for comm to finish
ReturnVal = Get122Film(&FilmStruct) FilmStruct contains Film info

Set122Material

Parameters: Material # (16 Bit Integer), Pointer to a Material Structure.
Return : 16 Bit Integer, always returns a 1.

Set122Material is used to set a Material’s parameters in the unit. All of the
parameters are passed to the function through the Material Structure.

Example:

ReturnVal = SetMaterial(&MaterialStruct) set Material parameters
do while(ChkCommDone == -1) wait for comm to finish

SendGetMaterial

Parameters: 16 Bit Integer.
Return : 16 Bit Integer, always returns a 1.

SendGetMaterial is used to get a material’s parameters from the unit. The
Material number (1 - 99) is passed to the function. This function must precede the
use of Get122Material.

Get122Material

Parameters: Pointer to a Material Structure.
Return : 16 Bit Integer, always returns a 1.

Get122Material is used to retrieve a Material’s parameters (requested by
SendGetMaterial). The parameters are passed through the Material Structure.

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Example:

ReturnVal = SendGetMaterial(MaterialNum) request transfer Material #
do while(ChkCommDone == -1) wait for comm to finish
ReturnVal = Get122Material(&MaterialStruct) MaterialSruct contains info

SendGetRunState

Parameters: None
Return : 16 Bit Integer, always returns a 1.

SendGetRunState is used to retrieve the operating phase of the deposition. This
function must precede the use of GetRunState.

GetRunState

Parameters: None
Return : 16 Bit Integer

GetRunState returns an integer whose value represents the current operating
phase of the instrument, as shown below:

0 = Stopped 8 = Soak 2 16 = Start Next Layer
1 = Crystal Verify 9 = Soak Hold 17 = Crystal Fail
2 = Initialize layer 10 = Shutter Delay 18 = Stop Layer
3 = Manual Start Layer 11 = Deposit 19 = Manual Power
4 = Pocket Rotate 12 = Rate Ramp
5 = Ramp 1 13 = Rate Ramp Deposit
6 = Soak 1 14 = Timed Power
7 = Ramp 2 15 = Idle Ramp

UnitControl

Parameters: 16 Bit Integer.
Return : 16 Bit Integer, always returns a 1.

UnitControl is used to set the operating state of the SQC-122.
0 = Start Process 6 = Start Process 1

1 = Stop Process 7 = Start Process 2
2 = Start Layer 8-30 = Start Process 3-25
3 = Stop Layer 31 = Soak Hold
4 = Start Next Layer 32 = Zero Thickness
5 = Force Final Thickness 33 = Zero Time

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SendGetInputs

Parameters: None
Return : 16 Bit Integer, always returns a 1.

SendGetInputs is used to retrieve the mapping of the 8 physical digital inputs to
the 35 Input events. This function must precede the use of GetInputs.

GetInputs

Parameters: Pointer to an IO structure (integer array(7).
Return : 16 Bit Integer, always returns a 1.

GetInputs is used to retrieve the mapping of the 8 physical digital inputs to the 35
Input events. Values in the array(0-7) are the events (0-34) assigned to each
input. Input events are:

0 = Start Process 6 = Start Process 1 31 = Start Soak Hold
1 = Stop Process 7 = Start Process 2 32 = Zero Thickness
2 = Start Layer 8 to 30 = 33 = Zero Time
3 = Stop Layer Start Process n-5 34 = Pocket Ready
4 = Start next layer
5 = Force Final Thickness

Example:

SetInputs

Parameters: Pointer to a I/O Structure.
Return : 16 Bit Integer, always returns a 1.

SetInputs is used to set the event definitions of the eight digital inputs as
described above. All of the parameters are passed to the function through the I/O
Structure.

Example:

ReturnVal = SendGetInputs request transfer Inputs
do while(ChkCommDone == -1) wait for comm to finish
ReturnVal = GetInputs(&IoP) I/O Sruct contains info

ReturnVal = SetInputs(&IoP) set Input events
do while(ChkCommDone == -1) wait for comm to finish

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SendGetRelays

Parameters: None
Return : 16 Bit Integer, always returns a 1.

SendGetRelays is used to retrieve the mapping of the 8 physical relays to the 21
Relay events. This function must precede the use of GetRelays.

GetRelays

Parameters: Pointer to an IO structure (integer array(7).
Return : 16 Bit Integer, always returns a 1.

GetRelays is used to retrieve the mapping of the 8 physical relays to the 21 relay
events. Values in the array(0-7) are the events (0-20) assigned to each input.
Relay events are:

0 = Source Shutter 1 7 = Deposit Phase 14 = Time Setpoint
1 = Source Shutter 2 8 = PreCond Phase 15 = Thickness Setpoint
2 = Sensor Shutter 1 9 = SoakHold Phase 16 = Final Thickness
3 = Sensor Shutter 2 10 = Process Active 17 = Pocket BCD Bit 0
4 = All Sensor Fail 11 = Manual Mode 18 = Pocket BCD Bit 1
5 = Sensor 1 Fail 12 = Max. Power 19 = Pocket BCD Bit 2
6 = Sensor 2 Fail 13 = Stopped 20 = Secondary Sensor

Example:

SetRelays

Parameters: Pointer to a I/O Structure.
Return : 16 Bit Integer, always returns a 1.

SetRelays is used to set the event definitions of the eight realys as described
above. All of the parameters are passed to the function through the I/O Structure.

Example:

ReturnVal = SendGetRelays request transfer Relays
do while(ChkCommDone == -1) wait for comm to finish
ReturnVal = GetRelays(&IoP) I/O Sruct contains info

ReturnVal = SetRelays(&IoP) set Relay events
do while(ChkCommDone == -1) wait for comm to finish

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SendGetSys1

Parameters: None.
Return : 16 Bit Integer, always returns a 1.

SendGetSys1 is used to get the System1 Parameters from the unit. This function
must precede the use of the GetSys1 function.

Get122Sys

Parameters: Pointer to a System1 Structure.
Return : 16 Bit Integer, always returns a 1.

GetSys1 is used to retrieve the System1 Parameters from the dll. The parameters
are passed through the System1 Structure.

Example:

ReturnVal = SendGetSys1() tell unit to transfer System1 parameters
do while(ChkCommDone == -1) wait for comm sequence to finish
ReturnVal = GetSys1(&Sys1Struct) Sys1Struct contains System1 info

Set122Sys

Parameters: Pointer to a System2 Structure.
Return : 16 Bit Integer, always returns a 1.

SetSys2 is used to set the System2 Parameters. The parameters are passed to
the function through the System2 Structure.

Example:

ReturnVal = SetSys2(&Sys2Struct) set System2 parameters to

Sys2Struct values

do while(ChkCommDone == -1) wait for comm to finish

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SendGetAllData

Parameters: None.
Return : 16 Bit Integer, always returns a 1.

SendGetAllData is used to get the data from the unit. This function must precede
the use of the Get122Data function.

Get122Data

Parameters: Pointer to an Measurement Data Structure.
Return : 16 Bit Integer, always returns a 1.

Get122Data is used to retrieve the data from the dll. The parameters are passed
through the Measurement Data Structure. If the TimeStamp parameter of the
AllData structure returned is equal to -1 then the unit does not have new data
available.

Example:

while(Running)

ReturnVal = SendGetAllData() tell unit to transfer AllData
do while(ChkCommDone == -1) wait for comm to finish
ReturnVal = Get122Data(&MeasurementDataStruct) Measurement

DataStruct contains run info

if (AllData.TimeStamp != -1) then if new data available

ProcessData() then graph or save data

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Data Structures:

The size of each data type in the structures is :

double : 8 bytes, the LSB is thrown out before transmission to the unit.
single : 4 bytes
int : 2 bytes.
char : 1 byte.

Process Data
int NumLayers number of layers in the process
int FirstLayer film number of first layer
char ProcName[16] process name

Layer Data
single Rate layer rate
single FnlThick final thickness
integer TimeSet time setpoint (sec.)
single ThickLimit thickness limit setpoint
int FilmNum layer’s film number
int NextLayer next layer number
int StartMode auto(0) or manual (1)
int Default l ayer is in the active process (1)

Film Data
int Pterm proportional term
single Iterm integral term
single Dterm differential term
int Sensor1 sensor 1 on/off
int Sensor2 sensor 2 on/off
int Output active output (0/1)
single MaxPower 0 to 100%
single SlewRate 0 to 100%
int MatIndex film material number
single R1Power ramp 1 power (%)
single R1Time ramp 1 time (sec.)
single S1Time soak 1 time (sec.)
single R2Power ramp 2 power (%)
single R2Time ramp 2 time (sec.)
single S2Time soak 2 time (sec.)
single IdlePwr idle power (%)
single IdleTime idle time (sec.)
int Pocket source pocket

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int Tooling film tooling factor
char Name[16] film name

Material Data
single Density material density (gm/cc)
single ZFactor material z factor
char MatName[16] material name

InOut Data
Int Io(8)

122Sys Data
double Period measurement period (sec.)
int SysTool system tooling
int Xtool(1) individual sensor tooling
int SimMode simulation mode (1 = on)
double FMin minimum frequency
double FMax maximum frequency
double PwrScale(1)
double RateDev

Measurement Data
double TimeStamp time relative to start time data was acquired
double AvgRate average rate
double AvgThick average thickness
double Power(1) average power
double ChRate(5) up to six individual channels of rate
double ChThick(5) up to six individual channels of thickness
double ChFreq(5) up to six individual channels of frequency