INFICON Sputtering Sensor User Manual

OPERATING MANUAL

Sputtering Crystal Sensor

IPN 074-157

OPERATING MANUAL

Sputtering Crystal Sensor

IPN 074-157L

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Sputtering Crystal Sensor Operating Manual

Table Of Contents

Chapter 1

Sensor Specifications

1.1 Specifications for the

Sputtering Crystal Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1

1.1.1 Installation Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

1.1.2 Materials. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.1.3 Unpacking Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.1.4 Inventory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2

1.2 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5

1.3 Specifications for the Shutter Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

Chapter 2

Sensor Installation

2.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1

2.2 Pre-installation Sensor Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1

2.2.1 IC/5 Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

2.2.2 Applies to Sensor Installation with an IC-6000 or

XTC Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2

2.2.3 Applies to Sensor Installation with an IC/4 or

IC/4 PLUS Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

2.2.4 Applies to Sensor Installation with an

XTC/2 or XTC/C Deposition Controller, or

XTM/2 Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

2.3 General Guidelines. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4

2.3.1 Crystal Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

2.4 Installing the Sputtering Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6

2.5 Sensor Shutter Function Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-10

2.6 Sputtering Sensor Shutter Module

IPN 074-157L

2.6.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

2.6.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12

Installation Instructions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

Chapter 3

3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-1

3.2 Installation with 1" Bolts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.3 Installation with 2 3/4" Feedthrough . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2

3.4 Electrical and Pneumatic Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

3.4.1 Electrical. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

3.4.2 Pneumatic. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-3

Installation of the Solenoid Valve Assembly

TOC - 1

Chapter 4

4.1 General Precautions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.1.1 Handle the Crystal with Care . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.1.2 Maintain the Temperature of the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.1.3 Use the Optimum Crystal Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.1.4 Crystal Concerns when Opening the Chamber . . . . . . . . . . . . . . . . . . . . . . 4-2

4.1.5 Care of the Ceramic Retainer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

4.1.6 Leaf Spring Concerns. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

4.2 Crystal Replacement Instructions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

4.3 Retainer Spring Adjustment Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

4.4 Crystal Holder Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

4.5 Sputtering Sensor Shutter Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

Chapter 5

5.1 List of Supplied Drawings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

Sputtering Crystal Sensor Operating Manual

Maintenance

Feedthrough Outline Drawings

TOC - 2

IPN 074-157L

1.1 Specifications for the Sputtering Crystal Sensor

Figure 1-1 Sputtering Crystal Sensor (IPN 750-618-G1)

Maximum bakeout temp

with no water: . . . . . . . . . . . . . . . . . . 105 °C

Size (maximum envelope):. . . . . . . . 1.36" OD x 0.69" high (3.45 cm x 1.75 cm)

Water, air and coax length:. . . . . . . . Standard 30" (76.2 cm)

Crystal exchange:. . . . . . . . . . . . . . . Rear-loading

Sputtering Crystal Sensor Operating Manual

Chapter 1

Sensor Specifications

Mounting: . . . . . . . . . . . . . . . . . . . . . Customer supplied

1.1.1 Installation Requirements

Feedthrough . . . . . . . . . . . . . . . . . . . 2 pass water with coax connector

2-3/4" ConFlat® Flange - IPN 002-043
1" Bolt - IPN 002-42

Other . . . . . . . . . . . . . . . . . . . . . . . . 1. Customer to provide vacuum-tight braze

joints or connectors for the water tubes.

2. XIU or Oscillator designed to interface with
the specific deposition controller.

IPN 074-157L

Water Flow Rate. . . . . . . . . . . . . . . . Minimum water flow 750 cc/min, 30 °C max

Coolant should not contain chlorides as
stress corrosion cracking may occur. If the
water tube passes through a cryoshroud,
drain the tubes if the water flow is stopped for
any reason.

CAUTION

Do not allow water tubes to freeze. This may happen if the
tubes pass through a cryogenic shroud and the fluid’s
flow is interrupted.

1 - 1

1.1.2 Materials

Body and Holder . . . . . . . . . . . . . . . Au plated Be-Cu

Springs, Electrical Contacts . . . . . . . Au plated Be-Cu

Water tubes . . . . . . . . . . . . . . . . . . . Au plated Be-Cu,

Connector. . . . . . . . . . . . . . . . . . . . . 304 Stainless steel

Sputtering Crystal Sensor Operating Manual

0.125" (0.32 cm) O.D.

Insulators . . . . . . . . . . . . . . . . . . . . . 99% Al

Wire . . . . . . . . . . . . . . . . . . . . . . . . . Teflon insulated copper

Solder. . . . . . . . . . . . . . . . . . . . . . . . Cadmium free silver and

Crystal . . . . . . . . . . . . . . . . . . . . . . . 0.550" (1.4 cm) Diameter

Magnet . . . . . . . . . . . . . . . . . . . . . . . ALNICO 5 Alloy

1.1.3 Unpacking Instructions

The sensor and accessories are packaged in a single cardboard carton with rigid
foam inserts.

Carefully remove the packaged accessories before removing the
plastic sensor box.

1.1.4 Inventory

In addition to the basic transducer, the complete shipping package
includes the following:

Table 1-1 Shipping Package Contents

2O3

indium alloys

1 - 2

Qty IPN Description

1 074-5000-G1 Thin Film Manuals CD

1 008-009-G10 Assembly, Sputtering Crystal 6MHz

1 750-037-G1 *Spring Tube Bender Kit

1 008-007 Crystal Snatcher

1 750-191-G1 *Molybdenumdisulfide in Alcohol

*Provided with Pneumatic Shutter Module

IPN 074-157L

Sputtering Crystal Sensor Operating Manual

Figure 1-2 Sputtering Crystal Sensor Head

IPN 074-157L

1 - 3

Sputtering Crystal Sensor Operating Manual

1 - 4

Figure 1-3 Sputtering Crystal Head Assembly

IPN 074-157L

1.2 Troubleshooting

The most useful tool for diagnosing sensor head problems is the DVM (Digital Volt
Meter). Disconnect the short oscillator cable from the feedthrough and measure the
resistance from the center pin to ground. If the reading is less than 1-2 megohms
the source of the leakage should be found and corrected. Likewise, with the
vacuum system open, check for center conductor continuity, a reading of more than
1

Ω from the feedthrough to the transducer contact indicates a problem. Cleaning

contacts or replacing the in-vacuum cable may be required.

Another useful diagnostic is to continuity-test the sensor head without a crystal.
Install the ceramic retainer (item 5) into the Sputtering Head (item 3) holder without
a crystal (item 6) and place into the Sputtering Head body (refer to Figure 1-3 on

page 1-4). The DVM will measure 1

to ground. Replacing the in-vacuum cable may be required

Table 1-2 Symptom - Cause - Remedy Chart

SYMPTOM CAUSE REMEDY

Sputtering Crystal Sensor Operating Manual

Ω or less from the center pin of the feedthrough

Large jumps of thickness
reading during deposition.

IPN 074-157L

Mode hopping due to
damaged crystal.

Crystal is near the end of its
life.

Scratches or foreign particles
on the crystal holder seating
surface.

Improper crystal seating. Check and clean the crystal

Small pieces of material fell
on the crystal (for crystal
facing-up situation).

Small pieces of magnetic
material being attracted by
the sensor magnet and
contacting the crystal.

Replace the crystal.

Use ModeLock
measurement system.

Replace the crystal.

Clean or polish the crystal
seating surface on the crystal
holder.

seating surface.

Check the crystal surface
and blow it off with clean air.

Check the sensor opening
hole and remove any foreign
material.

1 - 5