INFICON RSH-600 User Manual

OPERATING MANUAL

RSH-600

Rotary Sensor Head

IPN 153800-G

www.inficon.com [e-mail]

©2012 INFICON

®

OPERATING MANUAL

RSH-600

Rotary Sensor Head

IPN 153800-G

Trademarks

The trademarks of the products mentioned in this manual are held by the companies that
produce them.

Scotch-Brite® is a registered trademark of 3M.

Teflon® is a registered trademarks of E. I. du Pont de Nemours and Company or its affiliates.

Windows® and Microsoft® are registered trademarks of Microsoft Corporation.

All other brand and product names are trademarks or registered trademarks of their respective companies.

Disclaimer

The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.

Due to our continuing program of product improvements, specifications are subject to change without notice.

Copyright

©2012 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

Warranty

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
one (1) year from the date of shipment thereof by Seller. Seller's liability under this
warranty is limited to such of the above products or parts thereof as are returned,
transportation prepaid, to Seller's plant, not later than thirty (30) days after the
expiration of the period of warranty coverage in respect thereof and are found by
Seller's examination to have failed to function properly because of defective
workmanship or materials and not because of improper installation or misuse and
is limited to, at Seller's election, either (a) repairing and returning the product or
part thereof, or (b) furnishing a replacement product or part thereof, transportation
prepaid by Seller in either case. In the event Buyer discovers or learns that a
product does not conform to warranty, Buyer shall immediately notify Seller in
writing of such non-conformity, specifying in reasonable detail the nature of such
non-conformity. If Seller is not provided with such written notification, Seller shall
not be liable for any further damages which could have been avoided if Seller had
been provided with immediate written notification.

THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.

No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.

This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.

NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.

www.inficon.com [e-mail]

Chapter 1

1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1

1.2 Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.3 Mounting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2

1.4 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

1.4.1 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . . 1-3

1.5 How To Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

1.5.1 Returning Your Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

1.6 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

1.7 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.7.1 Base Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.8 Functional Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7

RSH-600 Operating Manual

Table Of Contents

Trademarks

Disclaimer

Copyright

Introduction

Chapter 2

Installation

2.1 Crystal Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

2.2 Mounting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2

2.3 Adjustable Flange Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3

2.4 Copper Head Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

2.5 Cooling System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

IPN 153800-G

2.6 Air Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

2.7 Crystal Position Feedback Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

2.8 Protection from Evaporant . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6

Chapter 3

Troubleshooting and Maintenance

3.1 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-1

3.2 Troubleshooting the RSH-600 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.3 Maintain the Temperature of the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

3.4 Use the Optimum Crystal Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

3.5 Crystal Concerns when Opening the Chamber . . . . . . . . . . . . . . . . . . . . . . 3-4

TOC - 1

3.6 Crystal Holder Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

3.7 Crystal Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

Chapter 4

4.1 Accessories and Replacement Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

Chapter 5

RSH-600 Operating Manual

Accessories and Replacement Parts

Outline Drawings

TOC - 2

IPN 153800-G

1.1 Introduction

The RSH-600 rotary sensor, see Figure 1-1, is designed for the most demanding
processes employing very thick films and several different materials. Switching the
crystal without venting the system makes it possible to run automatically with
continuous deposition. The fixed position of the crystal being measured also makes
it unnecessary to change the tooling factor.

The RSH-600 can be used to deposit a different material on each of six crystals
providing greater measurement accuracy. Upon completion of deposition of one
material, the deposition controller may be programmed to switch crystals for the
next material. It may also be actuated manually.

The RSH-600 sensor holds six crystals in a thermally shielded, water cooled
housing, insuring excellent crystal performance in temperature environments up to
300ºC. Crystals are housed in an easily removable Teflon
crystal holder.

RSH-600 Operating Manual

Introduction

®

and stainless steel

Chapter 1

Crystal position is incremented by applying a one second pulse to a 110/115 V (ac)
or 24 V (dc) pneumatic valve. A 7-pin connector provides an indication of the
number of the active crystal. This may be used to interface with a thin film controller
for automatic crystal switching operation. Refer to your controller operating manual
for programming instructions.

Figure 1-1 RSH-600 and Sensor Head Options

IPN 153800-G

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RSH-600 Operating Manual

1.2 Configurations

The RSH-600 can be configured with a flat head or a 45º angled head. This allows
for mounting in various locations within your vacuum chamber. Standard head
covers are made of stainless steel. Copper head covers are available for
applications where temperature is a concern (see Figure 1-2). All versions of the
RSH-600 are fixed to their specified lengths, but may be adapted to be adjustable
in length using the optional adjustable mounting flange (see Chapter 4).

Figure 1-2 RSH-600 Sensor Head Cooling Efficiency.

1.3 Mounting

The RSH-600's smooth sealing surface mounts to an O-ring sealed nipple (not
included). The optional adjustable flange allows for the in-vacuum length to be
adjustable up to the RSH-600's original length. A flat head cover is typically used
for centered top mount applications while the angled heads may be used for either
off-center top mount or side mount applications. The customer must supply
specifications regarding mounting holes, exterior diameter of flange and the
system mating flange.

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IPN 153800-G

RSH-600 Operating Manual

CAUTION

WARNING

1.4 Safety

1.4.1 Definition of Notes, Cautions and Warnings

When using this manual, please pay attention to the Notes, Cautions, and
Warnings found throughout. For the purposes of this manual they are defined as
follows:

NOTE: Pertinent information that is useful in achieving maximum efficiency when

followed.

Failure to heed these messages could result in damage
to the instrument.

Failure to heed these messages could result in personal
injury.

IPN 153800-G

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