Keithley 6517A User Manual

Model 6517A

Electrometer/High Resistance Meter

Getting Started Manual

A G R E A T E R M E A S U R E O F C O N F I D E N C E

WARRANTY

Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a period of 1 year from date of shipment.

Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables, rechargeable batteries, diskettes, and documentation.

During the warranty period, we will, at our option, either repair or replace any product that proves to be defective.

To exercise this warranty, write or call your local Keithley representative, or contact Keithley headquarters in Cleveland, Ohio. You will be given prompt assistance and return instructions. Send the product, transportation prepaid, to the indicated service facility. Repairs will be made and the product returned, transportation prepaid. Repaired or replaced products are warranted for the balance of the original warranty period, or at least 90 days.

LIMITATION OF WARRANTY

This warranty does not apply to defects resulting from product modification without Keithley’s express written consent, or misuse of any product or part. This warranty also does not apply to fuses, software, non-rechargeable batteries, damage from battery leakage, or problems arising from normal wear or failure to follow instructions.

THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. THE REMEDIES PROVIDED HEREIN ARE BUYER’S SOLE AND EXCLUSIVE REMEDIES.

NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT, INDIRECT, SPECIAL, INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS, INC., HAS BEEN ADVISED IN ADVANCE OF THE POSSIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAMAGES SHALL INCLUDE, BUT ARE NOT LIMITED TO: COSTS OF REMOVAL AND INSTALLATION, LOSSES SUSTAINED AS THE RESULT OF INJURY TO ANY PERSON, OR DAMAGE TO PROPERTY.

Keithley Instruments, Inc.			28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: [phone]
			1-888-KEITHLEY (534-8453) • www.keithley.com
Sales Offices: BELGIUM:			Bergensesteenweg 709 • B-1600 Sint-Pieters-Leeuw • 02-363 00 40 • Fax: [phone]
	CHINA:		Yuan Chen Xin Building, Room 705 • 12Yumin Road, Dewai, Madian • Beijing 100029 • 8610-82251886 • Fax: [phone]
	FINLAND:		Halsuantie 2 • 00420 Helsinki, Finland • 09-53 06 65 60 • Fax: [phone]
	FRANCE:		3, allée des Garays • 91127 Palaiseau Cédex • 01-64 53 20 20 • Fax: [phone]
	GERMANY:		Landsberger Strasse 65 • 82110 Germering • 089-84 93 07-40 • Fax: [phone]
	GREAT BRITAIN:		Unit 2 Commerce Park, Brunel Road • Theale, Berkshire RG7 4AB • 0118 -929 75 00 • Fax: [phone]
	INDIA:		1/5, Eagles Street • Langford Town • Bangalore 560 025 • 080 212 80-27 • Fax: [phone]
	ITALY:		Viale San Gimignano, 38 • 20146 Milano • 02-48 39 16 01 • Fax: [phone]
	JAPAN:		New Pier Takeshiba North Tower 13F • 11-1, Kaigan 1-chome • Minato-ku, Tokyo 105-0022 • 81-3-5733-7555 • Fax: [phone]
	KOREA:		2FL., URI Building • 2-14 Yangjae-Dong • Seocho-Gu, Seoul 137-888 • 82-2-574-7778 • Fax: [phone]
	NETHERLANDS:		Postbus 559 • 4200 AN Gorinchem • 0183-63 53 33 • Fax: [phone]
	SWEDEN:		c/o Regus Business Centre • Frosundaviks Allé 15, 4tr • 16970 Solna • 08-50 90 46 00 • Fax: [phone]
	TAIWAN:		13F-3, NO. 6, Lane 99, Pu-Ding Road, Hsinchu, Taiwan, ROC. • 886-3-572-9077• Fax: [phone]

5/03

Model 6517A Electrometer/High Resistance Meter

Getting Started Manual

©2000, Keithley Instruments, Inc.

All rights reserved.

Cleveland, Ohio, U.S.A.

Second Printing, June 2003

Document Number: 6517A-903-01 Rev. B

Manual Print History

The print history shown below lists the printing dates of all Revisions and Addenda created for this manual. The Revision Level letter increases alphabetically as the manual undergoes subsequent updates. Addenda, which are released between Revisions, contain important change information that the user should incorporate immediately into the manual. Addenda are numbered sequentially. When a new Revision is created, all Addenda associated with the previous Revision of the manual are incorporated into the new Revision of the manual. Each new Revision includes a revised copy of this print history page.

Revision A (Document Number 6517A-903-01) ....................................................	September 2000
Revision B (Document Number 6517A-903-01) ..............................................................	June 2003

All Keithley product names are trademarks or registered trademarks of Keithley Instruments, Inc. Other brand names are trademarks or registered trademarks of their respective holders.

Safety Precautions

The following safety precautions should be observed before using this product and any associated instrumentation. Although some instruments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions may be present.

This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer to the manual for complete product specifications.

If the product is used in a manner not specified, the protection provided by the product may be impaired.

The types of product users are:

Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.

Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the instrument. They must be protected from electric shock and contact with hazardous live circuits.

Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line voltage or replacing consumable materials. Maintenance procedures are described in the manual. The procedures explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.

Service personnel are trained to work on live circuits, and perform safe installations and repairs of products. Only properly trained service personnel may perform installation and service procedures.

Keithley products are designed for use with electrical signals that are rated Measurement Category I and Measurement Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most measurement, control, and data I/O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient over-voltages. Measurement Category II connections require protection for high transient over-voltages often associated with local AC mains connections. Assume all measurement, control, and data I/O connections are for connection to Category I sources unless otherwise marked or described in the Manual.

Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30V RMS, 42.4V peak, or 60VDC are present. A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring.

Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of operating at or above 1000 volts, no conductive part of the circuit may be exposed.

Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance limited sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current and voltage to the card.

Before operating an instrument, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.

When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power disconnect device must be provided, in close proximity to the equipment and within easy reach of the operator.

For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting ca-

5/03

bles or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.

The instrument and accessories must be used in accordance with its specifications and operating instructions or the safety of the equipment may be impaired.

Do not exceed the maximum signal levels of the instruments and accessories, as defined in the specifications and operating information, and as shown on the instrument or test fixture panels, or switching card.

When fuses are used in a product, replace with same type and rating for continued protection against fire hazard.

Chassis connections must only be used as shield connections for measuring circuits, NOT as safety earth ground connections.

If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use of a lid interlock.

If a screw is present, connect it to safety earth ground using the wire recommended in the user documentation.

The ! symbol on an instrument indicates that the user should refer to the operating instructions located in the manual.

The symbol on an instrument shows that it can source or measure 1000 volts or more, including the combined effect of normal and common mode voltages. Use standard safety precautions to avoid personal contact with these voltages.

The symbol indicates a connection terminal to the equipment frame.

The WARNING heading in a manual explains dangers that might result in personal injury or death. Always read the associated information very carefully before performing the indicated procedure.

The CAUTION heading in a manual explains hazards that could damage the instrument. Such damage may invalidate the warranty.

Instrumentation and accessories shall not be connected to humans.

Before performing any maintenance, disconnect the line cord and all test cables.

To maintain protection from electric shock and fire, replacement components in mains circuits, including the power transformer, test leads, and input jacks, must be purchased from Keithley Instruments. Standard fuses, with applicable national safety approvals, may be used if the rating and type are the same. Other components that are not safety related may be purchased from other suppliers as long as they are equivalent to the original component. (Note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product.) If you are unsure about the applicability of a replacement component, call a Keithley Instruments office for information.

To clean an instrument, use a damp cloth or mild, water based cleaner. Clean the exterior of the instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis (e.g., data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.

Table of Contents

1	Front Panel Operation
	Product overview ........................................................................	1-2
	Display .......................................................................................	1-8
	Power-up ....................................................................................	1-8
	Warm-up .............................................................................	1-8
	Bench defaults ............................................................................	1-9
	Changing functions ....................................................................	1-9
	Voltage measurements ..............................................................	1-10
	Guarding ...........................................................................	1-12
	Current measurements ..............................................................	1-12
	Resistance measurements .........................................................	1-14
	Auto V-Source ...................................................................	1-16
	Amps Rel ..........................................................................	1-16
	Resistivity measurements .........................................................	1-17
	Charge measurements ..............................................................	1-20
	Auto discharge ..................................................................	1-21
	External temperature and relative humidity measurements .....	1-22
	Connections .......................................................................	1-22
	Measurement control ........................................................	1-23
	Temperature units ..............................................................	1-23
	Display reading options ....................................................	1-24

2	Measurement Options
	Multiple displays ........................................................................	2-2
	Menus .........................................................................................	2-5
	Navigating menus ...............................................................	2-6
	Voltage source ............................................................................	2-8
	Connections .........................................................................	2-8
	Basic operation ....................................................................	2-9
	Configuring V-Source .......................................................	2-10
	Relative .....................................................................................	2-10
	Configuring rel ..................................................................	2-10
	Zero check ................................................................................	2-11
	Zero correct ..............................................................................	2-11
	Triggering .................................................................................	2-12
	Idle ....................................................................................	2-13
	Control sources .................................................................	2-14
	Device action .....................................................................	2-14
	Output trigger ....................................................................	2-14
	Counters (Advanced triggering) ........................................	2-14
	Bench default trigger model setup ....................................	2-15
	Speed ........................................................................................	2-15
	Configuring speed .............................................................	2-15

	Resolution .................................................................................	2-16
	Configure resolution ..........................................................	2-16
	Filter .........................................................................................	2-16
	Filter types .........................................................................	2-16
	Filter modes .......................................................................	2-17
	Median filter ......................................................................	2-17
	Configuring filters .............................................................	2-18
	Buffer (Data Store) ...................................................................	2-19
	Storing readings .................................................................	2-19
	Math ..........................................................................................	2-20
	Selecting and configuring math .........................................	2-21
	Enabling math ...................................................................	2-22
	Additional math operations ...............................................	2-22
	Test sequences ..........................................................................	2-23
	Selecting and configuring a test sequence .........................	2-23
	Connections .......................................................................	2-24
	Running a test ....................................................................	2-25
	Internal scanning ......................................................................	2-26
	Configure internal scanner ................................................	2-26
	Perform the scan ................................................................	2-27
	Close/Open channels .........................................................	2-28
	External scanning .....................................................................	2-28
	Trigger connections ...........................................................	2-28
	Configure external channels ..............................................	2-29
	Perform the scan ................................................................	2-30
3	Remote Operation
	Overview ....................................................................................	3-2
	Software support .........................................................................	3-2
	TestPoint application software ............................................	3-2
	Demonstration/Startup programs ........................................	3-2
	LabView driver ....................................................................	3-2
	IEEE-488 bus standards ..............................................................	3-3
	RS-232 standard .........................................................................	3-3
	IEEE-488 bus connections ..........................................................	3-3
	RS-232 connections ....................................................................	3-4
	IEEE-488 interface, address and language selection ..................	3-4
	RS-232 interface selection and configuration .............................	3-5
	Common commands ...................................................................	3-6
	SCPI commands .........................................................................	3-7
	SCPI command syntax ...............................................................	3-8
	Tree structure .......................................................................	3-8
	Long and short form commands ..........................................	3-9
	Query commands .................................................................	3-9
	Default nodes .......................................................................	3-9
	Command syntax ...............................................................	3-10

	SCPI signal oriented commands ..............................................	3-10
	:FETCh? ............................................................................	3-10
	:MEASure[:<function>]? ..................................................	3-10
	SCPI subsystem commands .....................................................	3-11
	Defaults .............................................................................	3-11
	Fresh readings ...................................................................	3-11
	Function configuration ......................................................	3-12
	V-Source ............................................................................	3-14
	Data store (Buffer) ............................................................	3-14
	Open/close channels and scan ...........................................	3-14
	Trigger model ....................................................................	3-15
	Test sequences ...................................................................	3-16
	Status register ....................................................................	3-17
	Program examples ....................................................................	3-18
	Changing function and range ............................................	3-18
	One-shot triggering ...........................................................	3-19
	Continuous triggering #1 ..................................................	3-21
	Continuous triggering #2 ..................................................	3-22
	Generating SRQ on buffer full ..........................................	3-23
	Storing readings in buffer .................................................	3-24
	Taking readings with the scanner card ..............................	3-26
	Test Sequence — staircase sweep .....................................	3-28
4	Specs and Accessories

List of Tables

2	Measurement Options
Table 2-1	Multiple displays by function .................................................	2-2
Table 2-2	Summary of main menu..........................................................	2-5
Table 2-3	Configuration settings for instrument operations....................	2-6
Table 2-4	Configuration settings for each measurement function ..........	2-6
Table 2-5	Menu summary .......................................................................	2-7

List of Illustrations

1	Front Panel Operation
Figure 1-1	Model 6517A front panel overview	....................................... 1-4
Figure 1-2	Model 6517A rear panel overview .........................................	1-6
Figure 1-3	Voltage measurements .........................................................	1-11
Figure 1-4	Current measurements .........................................................	1-13
Figure 1-5	Resistance measurements ....................................................	1-15
Figure 1-6	Resistivity measurements ....................................................	1-19
Figure 1-7	Charge measurements ..........................................................	1-20
Figure 1-8	External temperature and humidity ......................................	1-22

2	Measurement Options
Figure 2-1	Independent V-Source connections ........................................	2-8
Figure 2-2	FVMI connections .................................................................	2-9
Figure 2-3	Basic trigger model (simplified) ..........................................	2-12
Figure 2-4	Advanced trigger model (simplified) ...................................	2-13
Figure 2-5	Filter response/noise window ..............................................	2-17
Figure 2-6	Combining math calculations ..............................................	2-23
Figure 2-7	Typical FVMI connections ..................................................	2-25
Figure 2-8	Trigger connections using trigger link .................................	2-29
Figure 2-9	Trigger connections using conventional external triggering	2-29

3	Remote Operation
Figure 3-1	IEEE-488 connections ...........................................................	3-3
Figure 3-2	Hierarchy of the example SENSe1 commands ......................	3-8

1

Front Panel Operation

1-2

Front Panel Operation

Model 6517A Getting Started Manual

Product overview

If you have any questions after reviewing this information, please contact your local Keithley representative, or call one of our Applications Engineers at 1-800-348-3735 (U.S. and Canada only). Worldwide phone numbers are listed in the front of this manual.

The Model 6517A is a 6½-digit electrometer/high resistance system with the following measurement capabilities:

•DC voltage measurements from 1µV to 210V

•DC current measurements from 10aA to 21mA

•Charge measurements from 10fC to 2.1µC

•Resistance measurements from 10Ω to 210TΩ

•Surface resistivity measurements

•Volume resistivity measurements

•External temperature measurements from -25°C to 150°C using the supplied Model 6517-TP thermocouple

•Relative humidity measurements (0 to 100%) using the optional Model 6517-RH probe

Model 6517A Getting Started Manual

Front Panel Operation

1-3

Some additional capabilities of the Model 6517A include:

•Built-in V-Source — The 100V range provides up to 100V at 10mA, while the 1000V range provides up to 1000V at 1mA

•Data storage

•Single button zeroing (REL)

•Built-in math functions

•Filtering; averaging and median

•Built-in test sequences

•Remote operation using the IEEE-488 (GPIB) bus or the RS-232 interface

•Model 617 emulation using the DDC (device-dependent command) programming language mode

•Scan (measure) channels of an external scanner (e.g., Model 706, 7001, or 7002)

•Scan (measure) channels of an internal scanner card (e.g., Model 6521 or 6522) installed in the option slot

The Model 6517A front and rear panel overviews (Figure 1-1 and Figure 1-2) include important abbreviated information that should be reviewed before operating the instrument.

1-4

Front Panel Operation

Model 6517A Getting Started Manual

Figure 1-1

Model 6517A front panel overview

Secondary Display Line

Primary Display Line

1			9

EDIT	ERR	REM TALK			LSTN SRQ REAR				REL	FILT MATH			4W	AUTO		ARM	TRIG		SMPL
1	2	3	4	5	6	7	8	9	10	1	2	3	4	5	6	7	8	9	10

				6517A ELECTROMETER/HIGH RESISTANCE METER
					OPTION	VOLTAGE SOURCE		VOLTAGE
								SOURCE
	V	I	R	Q				OPERATE
PREV					CARD	OPER
DISPLAY							RANGE
NEXT	Z-CHK	REL	FILTER	MATH	TRIG	SEQ	AUTO
POWER							RANGE	CAL

INFO

LOCAL

STORE RECALL

CONFIG MENU

EXIT

ENTER

	5	2	6	7	3	8	4
1	ANNUNCIATORS
	ERR		Questionable reading
	REM		In remote
	TALK		Addressed to talk
	LSTN		Addressed to listen
	SRQ		Service Request
	REL		Relative reading displayed
	FILT		Digital filter enabled
	MATH		Math calculation enabled
	AUTO		Autoranging enabled
	ARM		Trigger armed; not in idle
	*(asterisk)		Reading being stored
2	FUNCTION KEYS Select measurement function; volts (V), amps (I), resistivity (R) or
			coulombs (Q)

3 RANGE KEYS

Moves to higher range; increments digit

Moves to lower range; decrements digit

AUTO	Enables/disables autorange

4HANDLE (not shown) Pull out and rotate to desired position.

5DISPLAY KEYS PREV/NEXT Scroll through multiple displays of a function

Model 6517A Getting Started Manual			Front Panel Operation	1-5
6	OPERATION KEYS
	Z-CHK	Enables/disables zero check. Enable zero check before changing functions.
	REL	Enables/disables relative reading
	FILTER	Displays digital filter status for present function and toggles filter on/off
	MATH	Displays math calculation and toggles math on/off if configured
	TRIG	Triggers unit
	SEQ	Performs selected test sequence
	and	Moves cursor among data entry digits, menu selections, and information displays
	INFO	Shows context-sensitive information about the present display
	LOCAL	Cancels remote operation
	STORE	Enables data storage
	RECALL	Displays reading data (reading, number, time). Use PREV/NEXT DISPLAY for maxi-
		mum, minimum average, standard deviation.
	CONFIG	Configures functions and operations
	MENU	Saves/restores instrument conditions; sets up communications; performs calibration
		and self-tests; defines limits, digital output, and other miscellaneous operations (see
		Table 2-2)
	EXIT	Cancels selection, moves back within menu structure
	ENTER	Holds reading, enters selection, moves down within menu structure
7	VOLTAGE SOURCE KEYS
	OPER	Toggles V-source between operate and standby
	and	Adjusts V-source value

8VOLTAGE SOURCE OPERATE Indicator on when in operate, off when in standby

9OPTION CARD KEY Use to program and operate an installed option. Also used to scan

external scanner channels.

1-6

Front Panel Operation

Model 6517A Getting Started Manual

Figure 1-2

Model 6517A rear panel overview

2

3

5

4

9

8

10

		WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.
						1010V
						PEAK
					LO		HI SELECTED				MADE
							LINE VOLTAGE				IN
											U.S.A.
!		PREAMP OUT	COMMON	2V ANALOG	V SOURCE		90-110V	180-220V
							105-125V	210-250V
	INPUT	250 PEAK		OUTPUT
	250V PEAK				750V			115V	LINE RATING		LINE FUSE
					PEAK
										50-60HZ	SLOWBLOW
										50VA MAX	1/2A 90-125V
		TEMP		HUMIDITY						AC ONLY	1/4A 180-250V
					EXT TRIG	MTR COMP
		TYPE K									11
					IN	OUT

	IEEE-488
	(CHANGE IEEE ADDRESS
RS232	WITH FRONT PANEL MENU)
	DIGITAL TRIG LINK
	I/O
OPTION SLOT	!
	INTERLOCK
CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

1	17	6	7	15 16	14	13	12
	Input High		EXTERNAL TRIGGER INPUT				METER COMPLETE OUTPUT
			Trigger Reading				Reading Complete
	Input Low
					TTL HI		TTL HI
	Chassis Ground
				>10 sec	TTL LO		>10 sec
Unguarded (Guard off)							TTL LO
	Input High				BNC CONNECTIONS
	Guard
							HI
	Chassis Ground
Guarded (Guard on)							LO (Chassis)

1 INPUT CONNECTOR (see Figure 1-2)

Unguarded Configuration	Disable GUARD for amps, ohms, coulombs and unguarded volts
	measurements.
Guarded Configuration	Enable GUARD for guarded volts measurements.

2TEMP TYPE K Connect the Model 6517-TP type K thermocouple for temperature measurements.

3PREAMP OUT Follows the signal amplitude applied to the INPUT terminal. With GUARD on, PREAMP OUT is internally connected to the inner shell of the INPUT triax connector to configure the input for guarded volts measurements. Referenced to COMMON. See the Model 6517A User’s Manual for more information.

Model 6517A Getting Started Manual

Front Panel Operation

1-7

42V ANALOG OUTPUT Binding post provides a scaled 0 to 2V output that is referenced to COMMON. Typically connected to a measuring device such as a chart recorder. See the Model 6517A User’s Manual for more information.

5COMMON Binding post that is internally connected to INPUT low through a 0.6Ω resistor.

6CHASSIS GROUND Binding post that connects the chassis to ground through the power line cord. COMMON can be connected to chassis ground by installing the ground link. For floating measurements, make sure the ground link connection between COMMON and Chassis Ground is open.

7HUMIDITY Connect the optional Model 6517-RH probe for relative humidity measurements.

8V-SOURCE HI and LO Banana jacks for the voltage source.

9LINE VOLTAGE SWITCH Two-position slide switch configures instrument for available line power voltage. A 90 to 125V line voltage requires the 115V setting, while a 180 to 250V line voltage requires the 230V setting.

10POWER LINE INPUT Connect to power line (50 or 60Hz) grounded outlet using 3-wire power cord.

11LINE FUSE For the 115V line voltage setting, use a ½A, 250V, slow blow, 5×20mm fuse. For the 230V setting, use a ¼A, 250V, slow blow, 5×20mm fuse.

12IEEE-488 CONNECTOR Connects the instrument to the IEEE-488 (GPIB) bus. Use shielded IEEE-488 cables.

13TRIG LINK An 8-pin micro DIN connector for sending and receiving trigger pulses to and from other instruments.

14DIGITAL I/O An 8-pin micro DIN connector for the four TTL-compatible digital output lines.

15RS-232 DB-9 connector for the RS-232 interface. Use a standard RS-232 cable.

16INTERLOCK Connects the safety interlock to the Model 8009 Resistivity Test Fixture or the Model 8002A High Resistance Test Fixture using the appropriate cable.

17OPTION SLOT An option card, such as the Model 6521 or 6522 scanner card, installs in this slot.

1-8

Front Panel Operation

Model 6517A Getting Started Manual

Display

As shown in the Model 6517A front panel overview (Figure 1-1), the front panel has three lines of display information: the primary display line, the secondary display line, and annunciators.

•Primary Display Line — The top line displays readings along with units. It can also display measurement type, “hold”, math operating type, channel number, menu headings and messages. Error and status messages are listed in Section 2 of the User’s Manual.

•Secondary Display Line — The bottom line displays the range, V-Source value, menu items, messages and multiple displays (see Measurement Options section of this manual). Longer text strings are indicated by arrows on either end of the display line. Use the cursor keys ( and ) to display the additional information.

Power-up

WARNING Before turning on the Model 6517A, make sure it is connected to a grounded power receptacle using the supplied power cord or the equivalent. Failure to properly ground the unit creates a shock hazard that could result in injury or death.

Use the front panel POWER switch to turn power on and off.

During power-up, the Model 6517A performs self-tests on its memory elements. If a failure occurs, the instrument momentarily displays an error message and turns on the ERR annunciator. If the instrument passes the self-tests, the firmware revision level and bus interface information are displayed.

For complete information on the power-up sequence, see Section 2 in the User’s Manual.

Warm-up

The instrument is ready for use as soon as the power-up sequence is completed. However, to achieve rated accuracy, allow the instrument to warm up for one hour. If the instrument has been subjected to extreme temperatures, allow additional time to allow internal temperatures to stabilize.

Model 6517A Getting Started Manual

Front Panel Operation

1-9

Bench defaults

The Model 6517A can save ten user setups in non-volatile memory. You can select one of the user setups as the power-on default or have the instrument power up to either of the two factory defaults (optimized for “BENCH” or “GPIB” operation).

Since the basic measurement procedures in this manual assume the BENCH defaults, reset the instrument from the SAVESETUP item of the MAIN MENU by performing the following steps:

1.Press the MENU key to display the main menu:

MAIN MENU

SAVESETUP COMMUNICATION	CAL
TEST LIMITS STATUS-MSG	GENERAL

2.If the SAVESETUP option is not blinking, press the key until it is blinking and then press ENTER to view the setup menu:

SETUP MENU

SAVE RESTORE POWERON RESET

3.Select the RESET option and press ENTER to view the reset menu:

RESET ORIGINAL DFLTS

BENCH GPIB

4.Select the BENCH option and press ENTER. The following message is displayed:

RESETTING INSTRUMENT

Enter to confirm; EXIT to abort

5.Press ENTER to confirm. The display will go to the volts function with auto-range disabled and zero check enabled.

Other BENCH default settings for each function include:

•Triggers — Continuous measurements.

•Measurement speed (integration time) — Normal, 1 power line cycle.

•Digital filter — Enabled, averaging, 10 readings.

•Median filter — Enabled, rank 1.

•Display resolution — 5½ digits.

Note: See “Menus” in the Measurement Options section of this manual for details on navigating the Main Menu.

Changing functions

To avoid erratic operation, always enable zero check (“ZeroCheck” displayed) before selecting one of the other measurement functions (V, I, R, or Q). The Z-CHK key controls zero check. See “Zero Check” in Section 2 for more information on the zero check feature.

1-10

Front Panel Operation

Model 6517A Getting Started Manual

Voltage measurements

Assuming “BENCH” reset conditions, the basic procedure is as follows:

1.With zero check enabled (“ZeroCheck” displayed), select the volts function by pressing V. The Z-CHK key is used to enable/disable zero check.

2.Enable or disable guard as needed. See “Guarding” at the end of this procedure.

NOTE With guard enabled (ON), the “Grd” message is displayed. However, if zero correct is already enabled (“ZCor” displayed), then “Grd” will not be displayed.

3.To achieve optimum accuracy for low voltage measurements, zero correct the Model 6517A. To do this, use the RANGE key to select the lowest measurement range (2V) and press REL. With zero correct enabled, the REL indicator is on.

NOTE With zero correct enabled, the “ZCor” message is displayed. However, if guard is already enabled (“Grd” displayed), then “ZCor” will not be displayed.

4.Select a measurement range or use autoranging.

a.To automatically select the most sensitive range, enable autorange. The AUTO key enables and disables autorange. When enabled, the AUTO annunciator is on.

b.For manual ranging, use the RANGE and keys to select a measurement range consistent with the expected voltage.

5.Connect the test cable(s) to the voltage to be measured. Figure 1-3A shows connections for unguarded measurements, and Figure 1-3B shows connections for guarded measurements.

WARNING Hazardous voltage may be present on the inner shield of the triax cable when GUARD is on. A safety shield connected to safety earth ground (as shown in Figure 1-3B) should be used for voltage measurements at or above 30V.

CAUTION Do not apply more than 250V peak (DC to 60Hz) to the input or instrument damage may occur.

6.Press Z-CHK to disable zero check and take a reading from the display.

Model 6517A Getting Started Manual

Front Panel Operation

1-11

Figure 1-3

Voltage measurements

A. Unguarded (GUARD off)

6517A

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL O

Red (HI)	237-ALG-2
	Cable

!

COMMON

	+	INPUT
		250V PEAK	LINE R
Measured
	Vs		90-13
			50, 60,
			180-25
Voltage			55VA

-

W

IN OUT

TRIGGER

LINK

Black (LO)

Shield (Optional)	CAUTION:FOR CONTINUEDI	PROTECTIONI AGAINSTI FIREI HAZARD,REPLACE,	FUSE WITHI SAME TYPE AND

			6517A
				WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY
			237-ALG-2
		Red (HI)	Cable
			!	COMMON
	+	Black	INPUT
Measured			250V PEAK
		Vs
Voltage	-
		Green
		LO		IN	LI
				TRIG
				CAUTION:FOR CONTINUEDI PROTECTIONI AGAINSTI FIREI HAZARD,REPLACE,	FU
Guard		Safety
Safety
Earth		Shield
Ground

1-12

Front Panel Operation

Model 6517A Getting Started Manual

Guarding

Guarding should be used for high impedance (≥109Ω) voltage measurements and for voltage measurements that use long input cables. In a high impedance circuit, guarding greatly reduces leakage currents. When using long input cables, guarding cancels the effects of cable capacitance that can significantly slow down the measurement response time.

When GUARD is enabled, the INPUT triax connector is reconfigured to apply the guard potential to the inner shell of the INPUT triax connector. With this configuration, the COMMON banana jack is used for input low. Figure 1-3 shows both the guarded and unguarded configuration of the INPUT connector.

Perform the following steps to enable or disable guard:

1.Press CONFIG and then V to display the volts configuration menu.

2.Use the and keys to place the cursor (blinking menu item) on GUARD and press ENTER.

3.Place the cursor on the desired selection (OFF to disable or ON to enable) and press ENTER.

4.Use the EXIT key to back out of the menu.

Current measurements

Assuming “BENCH” reset conditions, the basic procedure is as follows:

1.With zero check enabled (“ZeroCheck” displayed), select the amps function by pressing I. The Z-CHK key is used to enable/disable zero check.

2.To achieve optimum accuracy for low current measurements, zero correct the Model 6517A. To do this, use the RANGE key to select the lowest measurement range (20pA) and press REL. With zero correct enabled, the REL indicator is on, and the message “ZCor” is displayed.

3.Select a measurement range or use autoranging:

a.To automatically select the most sensitive range, enable autorange. The AUTO key enables and disables autorange. When enabled, the AUTO annunciator is on.

b.For manual ranging, use the RANGE and keys to select a measurement range consistent with the expected current.

Model 6517A Getting Started Manual

Front Panel Operation

1-13

4.Connect the instrument to the current to be measured as shown in Figure 1-4.

CAUTION Do not apply more than 250V peak (DC to 60Hz; 10 seconds per minute maximum on mA ranges), or instrument damage may occur.

5.Press Z-CHK to disable zero check and take a reading from the display.

NOTE To disable zero correct, enable zero check and then press REL.

Figure 1-4
Current measurements
		6517A
			WARNING:NO INTERNALI OPERATOR SERVICABLEI PARTS,SERVICE, I BY QUALIFIEDI I PERSONNE
		237-ALG-2
	Red (HI)	Cable
		!	COMMON
		INPUT
		250V PEAK		LIN
				90
Measured				18
				5
	Is			50,
Current
	Black (LO)		IN	OUT
				TRIGGER
				LINK
Shield			CAUTION:FOR CONTINUEDI PROTECTIONI AGAINSTI FIREI HAZARD,REPLACE, FUSE WITHI SAME TYPE A

(Recommended	Input low
below 1 A)
	connected
	to shield

CAUTION: Maximum Input = 250V peak (DC to

60Hz) ; 10s per minute maximum on mA ranges.

1-14

Front Panel Operation

Model 6517A Getting Started Manual

Resistance measurements

NOTE Accurate high resistance measurements require the use of a low-leakage test fixture, such as the Model 8002A.

The following procedure requires “BENCH” reset conditions. See “Bench defaults” to reset the instrument.

1.With zero check enabled (“ZeroCheck” displayed), select the ohms function by pressing R.

2.Select Auto V-Source ohms. In this mode, the V-Source is automatically set to a voltage (nominally 40V or 400V) that optimizes measurement accuracy. See “Auto V-Source” to select Auto V-Source ohms.

NOTE “BENCH” reset conditions selects Manual V-Source ohms. In this mode, you must manually set the V-Source level for the measurement. See Section 2, “Voltage Source,” for details on using the V-Source.

WARNING Selecting Auto V-Source ohms may set the V-Source to 400V.

3.Select a measurement range or use autoranging:

a.To automatically select the most sensitive range, enable autorange. The AUTO key enables and disables autorange. When enabled, the AUTO annunciator is on.

b.For manual ranging, use the RANGE and keys to select a measurement range consistent with the expected resistance.

4.Connect the Model 6517A to the test fixture. Generic connections are shown in Figure 1-5A. Note that this connection scheme requires that ammeter LO be internally connected to V-Source LO. See “Configuring V-Source” in Section 2 to control this internal LO-to-LO connection. If using the Model 8002A test fixture, refer to Figure 1-5B.

NOTE For optimum accuracy, leakage currents in the test fixture can be cancelled by performing REL on the current component of the measurement. To cancel leakage current, perform the procedure in “Amps Rel”.

5.Disable zero check by pressing Z-CHK and press OPER to source voltage to the test fixture DUT.

6.Take a reading from the display.

7.Place the V-Source in standby when finished by again pressing OPER.

WARNING Place the V-Source in standby before making or breaking connections to the test fixture or DUT.

Model 6517A Getting Started Manual

Front Panel Operation

1-15

Figure 1-5

Resistance measurements

A. Generic connections
		6517A
				WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PER
		237-ALG-2
	Red	Cable			LO	HI
		!		PREAMP OUT COMMON	V SOURCE
			INPUT	250V PEAK
	Black		250V PEAK
Measured
	RX
Resistance	LO connected
	to shield				IN	OUT
					TRIGGER
						LINK
Shield				CAUTION:FOR CONTINUEDI PROTECTIONI AGAINSTI FIREI HAZARD,REPLACE,		FUSE WITHI SAME
		Note: V-Source low internally
			connected to electrometer low.

B. Connections using 8002A test fixture

8002-ILC-3 Interlock Cable

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

8002A HIGH RESISTANCE TEST FIXTURE

LO

HI

!		PREAMP OUT COMMON	V SOURCE
	INPUT	250V PEAK
	250V PEAK		LINE RATING
			90-134VAC
			180-250VAC
			50, 60, 400HZ
			55VA MAX
			IE
			(CHANGE
			WITH FRON
			OUT
			!

INTERLOCK

7078-TRX-3 Triax Cable

CAUTION:FOR CONTINUEDI PROTECTIONI AGAINSTI FIREI HAZARD,REPLACE, FUSE WITHI SAME TYPE AND RATINGI ..

Model 6517A

8607 Banana Plug Cables
Warning: Connect	of fixture to safety earth	Note: Set fixture mode switch to
ground using safety ground wire		picoammeter operation.

(supplied with 8002A test fixture).

1-16

Front Panel Operation

Model 6517A Getting Started Manual

Auto V-Source

Auto V-Source should be used to achieve optimum accuracy for ohms measurements. With Auto V-Source selected, the V-Source is automatically set for either 40V or 400V. For the 2MΩ through 200GΩ ranges, the V-Source is set to 40V. For the 2TΩ through 200TΩ ranges, a 400V test voltage is used. With Manual V-Source selected, you can manually set the voltage level of the V-Source.

Perform the following steps to select the V-Source mode for the ohms function:

1.Press CONFIG and then R to display the ohms configuration menu.

2.Use the and keys to place the cursor (blinking menu item) on VSOURCE and press ENTER.

3.Place the cursor on AUTO (Auto V-Source ohms) or on MANUAL (Manual V-Source ohms) and press ENTER.

4.Use the EXIT key to back out of the menu.

Amps Rel

Amps Rel is used to cancel leakage current in a test fixture for ohms measurements. Perform the following steps:

NOTE This procedure assumes that steps 1 through 4 of the Resistance Measurement procedure have been performed.

1.With the V-Source in standby, remove the DUT from the test fixture.

2.Select the amps (I) function and disable zero check. Make sure REL is disabled.

3.Place the V-Source in operate by pressing OPER. The VOLTAGE SOURCE OPERATE indicator is on when in operate.

4.Select the lowest possible measurement range to display the leakage current in the test fixture.

5.Enable relative (REL annunciator on) by pressing REL. This zeroes the display, cancelling the leakage current reading.

6.Press OPER to place the V-Source in standby and enable zero check.

7.Perform the following steps to establish the amps Rel value for the ohms function.

a.Press CONFIG and then R to display the ohms configuration menu.

b.Use the and keys, place the cursor (blinking menu item) on AMPSREL and press ENTER.

c.Place the cursor on YES and press ENTER to use the amps Rel value for the ohms measurement.

d.Use the EXIT key to back out of the menu.

8.Re-install the DUT in the test fixture.

9.Select the ohms function (R) and proceed to step 5 of the Resistance Measurement procedure.

Model 6517A Getting Started Manual

Front Panel Operation

1-17

Resistivity measurements

NOTE The following procedure to measure resistivity (surface or volume) requires the use of the Keithley Model 8009 Resistivity Test Fixture. Refer to the Model 8009 Instruction Manual for details on using the test fixture.

The following procedure requires “BENCH” reset conditions. See “Bench defaults” to reset the instrument.

1.With zero check enabled (“ZeroCheck” displayed), select the ohms function by pressing R.

2.Select Auto V-Source ohms. In this mode, the V-Source is automatically set to a voltage (nominally 40V or 400V) that optimizes measurement accuracy. See “Auto V-Source” located under “Resistance Measurements” to select Auto V-Source ohms.

NOTE “BENCH” reset conditions selects Manual V-Source ohms. In this mode, you must manually set the V-Source level for the measurement. See “Voltage Source” for details on using the V-Source.

WARNING Selecting Auto V-Source ohms may set the V-Source to 400V.

3.Select a measurement range or use autoranging:

a.To automatically select the most sensitive range, enable autorange. The AUTO key enables and disables autorange. When enabled, the AUTO annunciator is on.

b.For manual ranging, use the RANGE and keys to select a measurement range consistent with the expected resistance.

4.Connect the Model 6517A to the Model 8009 test fixture as shown in Figure 1-6, and set the switch on the test fixture to the desired measurement type (Surface or Volume).

5.Select the resistivity measurement mode as follows:

a.Press the CONFIG and then R to display the ohms configuration menu.

b.Use the and keys to place the cursor (blinking menu item) on MEASTYPE and press ENTER.

c.Place the cursor on RESISTIVITY and press ENTER.

NOTE The Model 6517A senses the switch position (surface or volume) on the Model 8009 through the interlock cable, and automatically configures the instrument for that measurement type.

1-18

Front Panel Operation

Model 6517A Getting Started Manual

d.Cursor position (SURFACE or VOLUME menu item blinking) indicates the selected measurement type:

•SURFACE — If Surface is the selected measurement type, you do not have to proceed any further into the menu structure. Use the EXIT key to exit from the menu.

•VOLUME — If Volume is the selected measurement type, proceed as follows to specify the thickness of the sample:

(1)With the cursor on VOLUME, press ENTER to display the parameters menu for volume.

(2)Place the cursor on THICKNESS and press ENTER. The present thickness parameter for the sample will be displayed.

(3)Use the cursor keys ( and ) and the RANGE and keys to specify the thickness (in millimeters) of the sample, and then press ENTER.

(4)Use the EXIT key to back out of the menu structure.

6.Disable zero check by pressing Z-CHK.

7.Press OPER to source voltage to the DUT and, after an appropriate electrification time, take a reading from the display. Typically, an electrification time of 60 seconds is used.

8.Place the V-Source in standby when finished by again pressing OPER.

WARNING Place the V-Source in standby before making or breaking connections to the test fixture or DUT.

Model 6517A Getting Started Manual

Front Panel Operation

1-19

Figure 1-6

Resistivity measurements

Model 8009

		LID !
METER	SOURCE	INTERLOCK	of fixture to
		Warning: Connect
HI-LO	1100V	safety earth ground using
TRIAX	MAX INPUT
250 MAX
		safety ground wire.

6517-ILC-3 Interlock Cable

8607 Banana Plug Cable

8607 Banana Plug Cable

7078-TRX-3 Triax Cable

WARNING:NO INTERNALI OPERATOR SERVICABLEI PARTS,SERVICE, I BY QUALIFIEDI I PERSONNEL ONLY..

			LO	HI
!		PREAMP OUT	COMMON	V SOURCE
	INPUT	250V PEAK
	250V PEAK			LINE RATING	LINE FUSE
				90-134VAC
					SLOWBLOW
				180-250VAC
				50, 60, 400HZ	1/2A, 250V
				55VA MAX
				IEEE-488
				(CHANGE IEEE ADDRESS
				WITH FRONT PANEL MENU)
				OUT
				!
				INTERLOCK

CAUTION:FOR CONTINUEDI PROTECTIONI AGAINSTI FIREI HAZARD,REPLACE, FUSE WITHI SAME TYPE AND RATINGI ..

Model 6517A