INFICON XTC-C User Manual

OPERATING MANUAL

XTC/C

XTC/C XTC/2

Thin Film Deposition Controller

IPN 074-183

XTC/2

OPERATING MANUAL

XTC/C XTC/2

Thin Film Deposition Controller

IPN 074-183X

TWO TECHNOLOGY PLACE
EAST SYRACUSE, NY 13057-9714 USA

Phone: [phone]
Fax: [phone]
Email: [e-mail]

VISIT US ON THE WEB AT www.inficon.com

©2001 INFICON 092304

ALTE LANDSTRASSE 6
LI-9496 BALZERS, LIECHTENSTEIN

Phone: [phone]
Fax: [phone]
Email: reach.liechtenstein@ inficon.com

BONNER STRASSE 498
D-50968 COLOGNE, GERMANY

Phone: [phone]
Fax: [phone]
Email: reach.germany@i nficon.com

Trademarks

The trademarks of the products mentioned in this manual are held by the companies that
produce them.

INFICON®, CrystalSix® are trademarks of INFICON Inc.

All other brand and product names are trademarks or registered trademarks of their respective companies.

The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.

©2001 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

DECLARATION

OF

CONFORMITY

This is to certify that this equipment, designed and manufactured by:

INFICON Inc.

2 Technology Place

East Syracuse, NY 13057

USA

meets the essential safety requirements of the European Union and is placed on the
market accordingly. It has been constructed in accordance with good engineering
practice in safety matters in force in the Community and does not endanger the safety
of persons, domestic animals or property when properly installed and maintained and
used in applications for which it was made.

Equipment Description: XTC/2 and XTC/C Deposition Controllers, including _

the Oscillator Package and Crystal Sensor as properly

installed. ________

Applicable Directives: 73/23/EEC as amended by 93/68/EEC

89/336/EEC as amended by 93/68/EEC

Applicable Standards: EN 61010-1 : 1993, Fixed Equipment

EN 55011, Group 1, Class A : 1991

EN 50082-2 : 1995 ____ ______

CE Implementation Date: January 3, 1995

Revised to include EMC Directive: January 2, 1997

Authorized Representative: Gary W. Lewis
Vice President – Quality Assurance
INFICON Inc.

ANY QUESTIONS RELATIVE TO THIS DECLARATION OR TO THE SAFETY OF LEYBOLD INFICON'S PRODUCTS SHOULD
BE DIRECTED, IN WRITING, TO THE QUALITY ASSURANCE DEPARTMENT AT THE ABOVE ADDRESS.

04/15/97

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TWO TECHNOLOGY PLACE
EAST SYRACUSE, NY 13057-9714 USA

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VISIT US ON THE WEB AT www.inficon.com

ALTE LANDSTRASSE 6
LI-9496 BALZERS, LIECHTEN STEIN

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BONNER STRASSE 498
D-50968 COLOGNE, GERMANY

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BUSINESS REPLY MAIL

FIRST CLASS PERMIT NO. 49 EAST SYRACUSE, NEW YORK

POSTAGE WILL BE PAID BY ADDRESSEE

INFICON INC.
Two Technology P lace
East Syracuse, New York 13057-9714

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WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
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found by Seller's examination to have failed to function properly because of
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TWO TECHNOLOGY PLACE
EAST SYRACUSE, NY 13057-9714 USA

Phone: [phone]
Fax: [phone]
Email: [e-mail]

VISIT US ON THE WEB AT www.inficon.com

ALTE LANDSTRASSE 6
LI-9496 BALZERS, LIECHTEN STEIN

Phone: [phone]
Fax: [phone]
Email: [e-mail]

BONNER STRASSE 498
D-50968 COLOGNE, GERMANY

Phone: [phone]
Fax: [phone]
Email: [e-mail]

XTC/C - XTC/2 Operating Manual

Table Of Contents

Chapter 1

Introduction and Specifications

1.1 Instrument Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1

1.1.1 Notes, Cautions, Warnings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1

1.1.2 General Safety Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2

1.1.3 Earth Ground. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3

1.1.4 Main Power Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4

1.2 Introduction to the Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5

1.3 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.3.1 Specifications XTC/2 and XTC/C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6

1.3.1.1 General. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6

1.3.1.2 Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.3.1.3 Source Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6

1.3.1.4 Input/Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7

1.3.1.5 Recorder Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

1.3.1.6 Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7

1.3.1.7 Process Recipe Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7

1.3.1.8 Hardware interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8

1.3.1.9 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8

1.3.2 Transducer Specifications (optional) . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9

1.3.3 XIU (Crystal Interface Unit) Specifications . . . . . . . . . . . . . . . . . . . . . . . 1-9

1.4 Guide to the Use of the Manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10

1.5 XTC/C Users and Installers Note. . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10

1.6 Related Manuals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11

1.7 How To Contact Customer Support. . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

IPN 074-183X

1.7.1 Application Support. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11

1.7.2 Field Service and Repair Support . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12

1.7.3 Returning Your Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12

Chapter 2

Quick Use Guide

2.1 Unpacking, Initial Inspection and Inventory . . . . . . . . . . . . . . . . . . . . . .2-1

2.1.1 Unpacking and Inspection Procedures . . . . . . . . . . . . . . . . . . . . . . . . .2-1

2.1.2 Inventory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

2.1.2.1 XTC/2 System Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2

2.1.2.2 XTC/C System Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2

TOC - 1

XTC/C - XTC/2 Operating Manual

2.1.2.3 Ship Kit - XTC/2 XTC/C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

2.2 Voltage Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

2.3 Installation Guide and Schematic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

2.4 XTC/2 Front Panel Description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

2.4.1 XTC/2 Front Control Panel Description. . . . . . . . . . . . . . . . . . . . . . . . 2-10

2.4.2 XTC/2 Display Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12

2.5 XTC/C Front Panel Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16

2.6 Rear Panel Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18

2.6.1 Power Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18

2.6.2 Configuration Switches 1 & 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19

2.6.3 Grounding Stud . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22

2.6.4 System I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23

2.6.5 AUX I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24

2.6.6 Sensor 1, Sensor 2. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25

2.6.7 RS232 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-26

2.6.8 Communication Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-27

2.6.9 Source 1,2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-27

2.6.10 Manufacturer’s Identific ation and

Serial Number Plate. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-28

2.6.11 Recorder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-28

2.7 Operation as a Deposition Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-29

2.7.1 Monitoring - Systems Without a Source Shutter . . . . . . . . . . . . . . . . . 2-29

2.7.2 Monitoring - Systems with a Source Shutter. . . . . . . . . . . . . . . . . . . . 2-30

2.7.3 Rate Sampling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-31

2.7.4 Nontraditional Applications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-32

2.7.4.1 Etching. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-32

2.7.4.2 Immersion in Liquids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-32

2.7.4.3 Biological . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-32

2.7.4.4 Measurement of Liquids. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-33

TOC - 2

2.8 Operation as a One Layer Controller . . . . . . . . . . . . . . . . . . . . . . . . . 2-33

IPN 074-183X

2.8.1 Skipping a State Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-34

2.8.2 Idle State Processing Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-34

2.8.3 Manual Power Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-34

2.8.4 Time Power State Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-35

2.8.5 Controlling the Source Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-35

2.9 Operation as a Multi-Layer Controller. . . . . . . . . . . . . . . . . . . . . . . . . 2-36

2.9.1 Defining a Process Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-36

XTC/C - XTC/2 Operating Manual

Chapter 3

Installation

3.1 Installing the Instrument - Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-1

3.1.1 Control Unit Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-1

3.2 Electrical Grounding and Shielding Requirements. . . . . . . . . . . . . . . . .3-1

3.2.1 Verifying / Establishing Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

3.2.2 Connections to Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

3.2.3 Minimizing Noise Pickup from External Cabling. . . . . . . . . . . . . . . . . . .3-3

3.3 Connection to Rear Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4

3.3.1 The BNC Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4

3.3.2 The "D" Shell Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

3.4 Sensor Selection Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-6

3.5 Guidelines for Transducer Installation . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

3.5.1 Sensor Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

3.5.2 CrystalSix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-10

3.5.3 Check List for Transducer Installation . . . . . . . . . . . . . . . . . . . . . . . . .3-11

3.6 Use of the Test Mode (XTC/2 Only). . . . . . . . . . . . . . . . . . . . . . . . . . .3-11

3.6.1 Operational Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

3.7 Input and Output Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-15

3.7.1 Relays. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-15

3.7.2 Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-18

3.7.3 Chart Recorder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19

3.7.4 Source Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20

3.8 Computer Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-20

3.8.1 Communications Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20

3.8.1.1 IEEE Settings for a National Instruments IEEE-GPIB Board . . . . . . . .3-21

3.8.2 Basic Command Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-22

3.8.3 Service Requests and Message Available. . . . . . . . . . . . . . . . . . . . . .3-24

3.8.4 Datalogging. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25

IPN 074-183X

3.8.5 Computer Command Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-26

3.8.5.1 Echo Command. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-26

3.8.5.2 Hello Command. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26

3.8.5.3 Query Command. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-26

3.8.5.4 Update Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-28

3.8.5.5 Status Command. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-28

3.8.5.6 Remote Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-32

3.8.6 Examples of RS232 Programs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-34

3.8.6.1 Program Without Checksum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-34

3.8.6.2 Program With Checksum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-35

TOC - 3

XTC/C - XTC/2 Operating Manual

3.8.6.3 Example of SEMI II Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-36

3.8.7 Example of IEEE488 Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-38

3.9 Co-Deposition (Two Unit Interconnection) . . . . . . . . . . . . . . . . . . . . . 3-39

Chapter 4

Programming System Operation Details

4.1 State and Measurement System Sequencing. . . . . . . . . . . . . . . . . . . . 4-1

4.2 State Descriptions and Parameter Limits . . . . . . . . . . . . . . . . . . . . . . . 4-6

4.3 Alarms and Stops. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9

4.3.1 Alarms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9

4.3.2 Stops . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9

4.4 Recovering From "STOPS" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

4.5 Tuning the Control Loop. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11

4.5.1 Tuning a Fast Source. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11

4.5.2 Tuning a Slow Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12

4.5.3 Setting Maximum Power. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14

4.6 Setting S&Q Parameters

(Soft Crystal Failures) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14

4.6.1 Q-Factor (Quality) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15

4.6.2 S-Factor (Stability) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16

4.6.3 Determining Q and S Values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17

4.7 Rate Ramps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19

4.7.1 Rate Ramp to Zero Rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19

4.8 Use of the Hand Controller (Option) . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19

4.9 Setting the Soak and Idle Power Levels . . . . . . . . . . . . . . . . . . . . . . . 4-20

4.9.1 Setting Soak Power 1 Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20

4.9.2 Setting Soak Power 2 Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20

4.9.3 Setting Idle Power Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21

4.10 Implementing RateWatcher . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21

4.11 Crystal Fail. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22

4.12 Completing on TIME-POWER . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22

4.13 Crystal Fail Inhibit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23

4.14 Shutter Delay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23

4.15 Crystal Switch Details. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24

4.15.1 Sensor Shutter / CrystalSwitch Output . . . . . . . . . . . . . . . . . . . . . . . . 4-25

4.16 Start Layer Without

Backup Crystal Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26

4.17 Crystal Life and Starting Frequency . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27

IPN 074-183X

TOC - 4

XTC/C - XTC/2 Operating Manual

Chapter 5

Calibration and Measurement

5.1 Importance of Density, Tooling and Z-ratio . . . . . . . . . . . . . . . . . . . . . .5-1

5.2 Determining Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

5.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

5.4 Laboratory Determination of Z-ratio. . . . . . . . . . . . . . . . . . . . . . . . . . . .5-3

5.5 Measurement Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4

5.5.1 Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4

5.5.2 Monitor Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-5

5.5.3 Period Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-7

5.5.4 Z-Match Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-8

5.5.5 Active Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9

5.5.6 ModeLock Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-11

5.6 Control Loop Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-12

Chapter 6

Adjustments and Problems

6.1 LCD Contrast Adjustment (XTC/2 only). . . . . . . . . . . . . . . . . . . . . . . . .6-1

6.2 Error Messages. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

6.2.1 Powerup Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-1

6.2.2 Parameter Update Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2

6.2.3 Other Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2

6.3 Troubleshooting Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2

6.3.1 Major Instrument Components, Assem blies

and Mating Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-3

6.3.2 Troubleshooting the Instrument. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-4

6.3.3 Troubleshooting Transducers/Sensors . . . . . . . . . . . . . . . . . . . . . . . . . 6-6

6.3.4 Troubleshooting Computer Communications. . . . . . . . . . . . . . . . . . . .6-10

6.3.5 Leaf Spring Concerns . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-12

IPN 074-183X

6.4 Replacing the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-13

6.4.1 Standard and Compact . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-13

6.4.2 Shuttered and Dual Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-14

6.4.3 Bakeable Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-15

6.4.4 Sputtering Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-16

6.4.5 Crystal Snatcher . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17

6.4.6 CrystalSix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-17

6.5 Crystal Sensor Emulator IPN 760-601-G1 or 760-60 1-G2 . . . . . . . . . .6-18

6.5.1 Diagnostic Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-19

6.5.1.1 Measurement System Diagnostic Procedure. . . . . . . . . . . . . . . . . . . .6-19

6.5.1.2 Feed-Through Or In-Vacuum Cable Diagnostic Procedure . . . . . . . . .6-20

TOC - 5

6.5.1.3 Sensor Head Or Monitor Crystal Diagnostic Procedure . . . . . . . . . . . 6-21

6.5.1.4 System Diagnostics Pass But

6.5.2 % XTAL Life. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22

6.5.3 Sensor Cover Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23

6.5.3.1 Compatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23

6.5.3.2 Incompatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23

6.5.4 Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-24

Appendix A

Index

XTC/C - XTC/2 Operating Manual

Crystal Fail Message Remains. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22

Table of Densities and Z-ratios

TOC - 6

IPN 074-183X

Introduction and Specifications

1.1 Instrument Safety

1.1.1 Notes, Cautions, Warnings

When using this manual, please pay attention to the NOTES, CAUTIONS and
WARNINGS found throughout. For the purposes of this manual they are
defined as follows:

NOTE: Pertinent information that is useful in achieving maximum instrument

efficiency when followed.

CAUTION

Failure to heed these messages could result in damage
to the instrument.

XTC/C - XTC/2 Operating Manual

Chapter 1

WARNING

Failure to heed could result in personal injury.

WARNING

Dangerous voltages are present. Failure to heed could
result in personal injury.

IPN 074-183X

1 - 1

XTC/C - XTC/2 Operating Manual

1.1.2 General Safety Information

WARNING

This product is not for use in a manner not specified by
the manufacturer.

There are no user serviceabl e compon ents within the
instrument case.

Potentially lethal voltages are present when the line
cord, system I/O or aux I/O are connected.

Refer all maintenance to qualified personnel.

CAUTION

This instrument contains delicate circuitry which is
susceptible to transient power line voltages.
Disconnect the line cord whenever making any
interface connections. Refer all mainte nance to
qualified personnel.

1 - 2

IPN 074-183X

1.1.3 Earth Ground

This instrument is connected to earth via a sealed three-core (three-conductor)
power cable, which must be plugged into a socket outlet with a protective earth
terminal. Extension cables must always have three condu ctors, inclu ding a
protective earth conductor.

WARNING

XTC/C - XTC/2 Operating Manual

Never interrupt the protective earth circuit.

Any interruption of the protective earth connection
inside or outside the instrument, or disconnection of
the protective earth terminal is likely to make the
instrument dangerous.

This symbol indicates where the protective earth
ground is connected inside the instrume nt. Never
unscrew or loosen this connection .

IPN 074-183X

1 - 3

XTC/C - XTC/2 Operating Manual

1.1.4 Main Power Connection

WARNING

This instrument has line voltage present on the
primary circuits whenever it is plugged into a main
power source.

Never remove the covers from the instrument during
normal operation.

There are no operator serviceable items within this
instrument.

Removal of the top or bottom covers must be done
only by a technically qualified person.

If this instrument is installed into a rack system which
contains a mains switch, this switch must break both
sides of the line when it is open and it must not
disconnect the safety ground. This configuration is
required in order to comply with accepted European
safety standards.

1 - 4

IPN 074-183X

1.2 Introduction to the Instrument

The XTC/2 and XTC/C are quartz crystal transducer type deposition process
controllers with three layer capability. They are readily connected to interact
with and control the other instruments associated with a vacuum coating plant
of moderate complexity. These instruments incorporate the patented (US
#5,117,192—May 27, 1992) ModeLock measurement system. This innovative
system provides process security , measurement speed and precision at a level
that no active oscillator based instrume nt can provide.

The bright Liquid Crystal Display of the XTC/2 is easily read and keeps the
operator continuously informed with pertinen t deposition da ta including rate,
thickness, phase, rate deviatio n and ela psed time. Special messages such as
Stop, Crystal Fail or Time-Power are clearly presented to reduce operator
uncertainty and eliminate the possibility of costly mis takes.

The XTC/C is a variant of the XTC/2 that has a limited front panel. Instead of
an LCD display , it has 8 LED type status indicators that indicate process status
and instrument functional status. It is primarily designed for use in vacuum
coating plants that have a computer based central controller. The original
equipment manufacturer (OEM) will design a custom user input-output syst em
through his system controller. Once programmed and started, the XTC/C will
essentially run as independent of the central controller as is desired . The
deposition layer can complete without further intervention, freeing the central
controller for other tasks. Status and data may be queried as frequently as is
desired, however.

XTC/C - XTC/2 Operating Manual

Interaction with the coating system for both units is multifa ceted. All units come
with RS232 and support data rates to 9600 baud. The SECSII protocol is
supported. The optional computer interface is IEEE-488. The in strument is
configured to sequentially control two separate deposition sources with 15 bit
resolution using either PID or integrating type controller algorithms. Twelve
relays are used to manipulate various external devices such as source and
sensor shutters, heaters or valves. Lower power outputs are u sed to control the

IPN 074-183X

position of multi-hearth crucibles. There are eight input lines to provide the
ability to sense and react to discrete external signals.

There are numerous special control functions for accommodating the needs of
the deposition process. Full predeposit pro cessing is provide d, including
shutter delay which allows the establishment of the desired rate prior to opening
the substrate shutter. A Rate Ramp allows the deposition rate to be changed
during the deposit phase. The Ra teWatcher feature allows t he dep osition
stream to be periodically sampled, extendin g the life of the crystal.

These instruments are fully compatible with the complete family of INFICON
transducers, including Dual and CrystalSix®.

1 - 5

XTC/C - XTC/2 Operating Manual

1.3 Specifications

At the time of this manual’s writing, the specifications for perform ance are as
published below. INFICON continuously improves its products, affecting the
instrument’s performance.

1.3.1 Specifications XTC/2 and XTC/C

1.3.1.1 General

Usage . . . . . . . . . . . . . . . . . . . . . .Indoor use only.

Altitude Range. . . . . . . . . . . . . . . .Up to 2000 m (6,561 ft)

Pollution Degree . . . . . . . . . . . . . .1—No pollut ion occurs

Overvoltage Category . . . . . . . . . .2—Local level, appliances, etc.

Cleaning . . . . . . . . . . . . . . . . . . . .The unit enclosure can be safely cleaned

with a mild detergent or spray cleaner
designed for that purpose. Care should be
taken to prevent any cleaner from entering
the unit.

1.3.1.2 Measurement

Crystal Range & Precision. . . . . . .6.0 to 5.0 MHz +/- .05 Hz

Thickness & Rate Resolution. . . . .0.0617Å (per 250 msec sample)

Thickness accuracy . . . . . . . . . . . .0.5%

Measurement frequency . . . . . . . .4 Hz

1.3.1.3 Source Controls

Source-Control Voltage . . . . . . . . .0 to +/- 10 v

Number of Sources . . . . . . . . . . . .2

Resolution . . . . . . . . . . . . . . . . . . .15 bits over full range (10 v)

Update Rate . . . . . . . . . . . . . . . . .4 Hz max.

Maximum Load . . . . . . . . . . . . . . .400 Ohm (100 Ohm internal impedance)

(per 250 msec sample)

Material density = 1.0; Z-Rati o = 1.0;
crystal frequency = 6 MHz.
Å/S/M = Angstroms/second/measurement.

IPN 074-183X

1 - 6

1.3.1.4 Input/Output

Inputs . . . . . . . . . . . . . . . . . . . . . . 9 TTL inputs

Outputs

a) relay . . . . . . . . . . . . . . . . . . 12 SPST 2.5-amp relays rated

b) crucible select . . . . . . . . . . . 8 open col lector

Scan/Change Rate . . . . . . . . . . . . 4 Hz

1.3.1.5 Recorder Output

Voltage . . . . . . . . . . . . . . . . . . . . . 0 to +10 v

Resolution . . . . . . . . . . . . . . . . . . 13 bits over full range

Update Rate . . . . . . . . . . . . . . . . . 4 Hz

Function . . . . . . . . . . . . . . . . . . . . Rate / Thickness / Mass

Maximum Load . . . . . . . . . . . . . . . 2.0 KOhm (100 Ohm internal impedance)

XTC/C - XTC/2 Operating Manual

@ 30 V(dc) / 30 V(ac) / 42 V(peak) max.

(5 volt DC max sink, 5 TTL loads)

(one reserved for sign)

1.3.1.6 Display

Applies to XTC/2 only; the XTC/C provides LED annunciators.

Type . . . . . . . . . . . . . . . . . . . . . . . 4x multiplexed custom LCD with backlight.

If desired, backlight automatically dims
during prolonged period of inactivity,
automatically brightening when a ctivity

begins.

Thickness Resolution . . . . . . . . . . 1 Å

Rate Resolution . . . . . . . . . . . . . . .1 Å for 1 to 99.9 Å/sec

1 Å for 100 to 999 Å/sec

Update Rate . . . . . . . . . . . . . . . . . 1 Hz

IPN 074-183X

1.3.1.7 Process Recipe Storage

Film Programs . . . . . . . . . . . . . . . 9, 30 variables per program

Process layers . . . . . . . . . . . . . . . 3

1 - 7

XTC/C - XTC/2 Operating Manual

1.3.1.8 Hardware interface

Sensors

Single. . . . . . . . . . . . . . . . . . . .2

Dual . . . . . . . . . . . . . . . . . . . . .1

CrystalSix. . . . . . . . . . . . . . . . .2

Sources. . . . . . . . . . . . . . . . . . . . .2 BNC female

Crucible Locations. . . . . . . . . . . . .8, 1 of 8 and BCD encoded

I/O

Standard (inputs/outputs) . . . . .8/12

Optional . . . . . . . . . . . . . . . . . .None

Communications

Standard. . . . . . . . . . . . . . . . . .RS232C

Optional . . . . . . . . . . . . . . . . . .IEEE

Chart Recorder . . . . . . . . . . . . . . .1 BNC female

1.3.1.9 Operation

Power Requirements

Operating Temperature . . . . . . . . .0 to 50 °C (32 to 122 °F)

Size . . . . . . . . . . . . . . . . . . . . . . . .3.5" H x 8" W x 12" D

Weight. . . . . . . . . . . . . . . . . . . . . .6 lb. (2.7 kg)

"115 V" input range. . . . . . . . . .90 to 132 V(ac), 49 to 61 Hz, 45 VA max.

fused at 3/8 Amp Type T fuse

"230 V" input range . . . . . . . . .180 to 264 V(ac), 49 to 61 Hz, 45 VA max.

fused at 3/16 Amp Type T fuse

(89 mm x 203 mm x 305 mm)

IPN 074-183X

1 - 8

XTC/C - XTC/2 Operating Manual

1.3.2 Transducer Specifications (optional)

Max. Bakeout
Temperature*

CrystalSix Sensor 130 °C 3.5" dia. x 2.0" high

Standard Sensor 130 °C 1.063" x 1.33" x .69" high

Standard Sensor
with Shutter

Sputtering Sensor 105 °C 1.36" dia. x .47" high

Compact Sensor 130 °C 1.11" x 1.06" x 1.06" high

Compact Sensor
with Shutter

UHV Bakeable
Sensor

UHV Bakeable
Sensor with Shutter

Dual Sensor 130 °C 1.45" x 3.45" x 1.70" high

Shutter Assembly 400 °C two models available N/A 300-series SS 750-210-G1

*For Bake only; waterflow is required for actual deposition monitoring. These temperatures are conservative maximum
device temperatures, limited by the properties of Teflon (PTFE) at higher temperatures. In usage, the water cooling allows
operation in environments that are significantly elevated, without deleterious affects.
**Aluminum body for heat transfer.

130 °C 1.06" x 2.24" x .69" high

130 °C 2.08" x 1.62" x 1.83" high

450 °C 1.35" x 1.38" x .94" high

400 °C 1.46" x 1.37" x 1.21" high

Size (Max. Envelope) Water Tube &

Coax Length
30" (762 mm) 304 SS (plate,

(89 mm dia. x 51 mm high)

30" (762 mm) 304 SS 750-211-G1

(27 mm dia. x 34 mm x 17.5 mm high)

(27 mm dia. x 57 mm x 17.5 mm high)

(34.5 mm dia. x 11.8 mm high)

(28 mm x 27 mm x 27 mm high)

(53 mm x 41 mm x 46 mm high)

(34 mm x 35 mm x 24 mm high)

(37 mm x 35 mm x 31 mm high)

(37 mm x 88 mm x 43 mm high)

30" (762 mm) 304 SS 750-211-G2

30" (762 mm) Au-plated BeCu 007-031

30" (762 mm) 304 SS 750-213-G1

30" (762 mm) 304 SS 750-213-G2

12" (305 mm)
20" (508 mm)
30" (762 mm)

12" (305 cm)
20" (508 cm)
30" (762 cm)

30" (762 mm) 304 SS 750-212-G2

Body & Holder IPN

750-446-G1
holders, & mate­rial shield)**

304 SS 007-219

007-220

007-221
304 SS 750-012-G1

750-012-G2

750-012-G3

750-005-G1

(Sputtering)

1.3.3 XIU (Crystal Interface Unit) Specifications

The XTC/2 Series instruments use a new type of "passive intelligent" oscillator.

IPN 074-183X

It is available with cable lengths of 15’ (4.572 m), 30’ (9.144 m), 50’ (15.24 m),
and 100’ (30.28 m) as IPN 757-305-G15, G30, G50, or G100, respectively.
Conventional, active style oscillators do not work with these instrum ents.
In-vacuum cable lengths to a maximum of 2 m (6.6’) are supported with this new
technology.

1 - 9

XTC/C - XTC/2 Operating Manual

1.4 Guide to the Use of the Manual

This manual is configured to be used by both experie nced and inexperie nced
deposition process engineers. For those with significant experience, especially
on INFICON controllers, nearly all pertinent infor mation is containe d in Chapter

2, Quick Use Guide. Other sections contain the details that supplement the

information in the quick use section .
Every user should read the complete ma nual. It is strong ly sugges ted that t he

user or installer follow the following plan to gain the most information in the
shortest period of time.

 Register the instrument to receive updates and important information from

the factory.

 Read section 1.1.1, Notes, Cautions, Warnings, on page 1-1 to understand

the safety related issues.

 Read Chapter 2, Quick Use Guide, to become familiar with the instrument’s

needs and capabilities. Use the other sections of the manual to supplement
areas where you do not feel you have an adequate un derstanding of the
material. Throughout Chapter 2 there will be frequent referenc es to the
manual sections that provide more detailed information. The final sections
of the Chapter 2 build the understanding of the full use of the instrument in
a logical progression, as suggested in section 2.3 on page 2-8.

1.5 XTC/C Users and Installers Note

The XTC/C can do anything that an XTC/2 can do, but it must be controlled
through the computer interface. In order to install and use this instrument
effectively , all aspects of XTC/2 operation must be understood. Because of this
additional burden, it is probably not cos t effective for an end-user of a singl e
unit to purchase and install the XTC/C version.

WARNING

There are no user serviceabl e compon ents within the
instrument case.

Potentially lethal voltages are present when the line
cord, System I/O or Aux I/O are connected.

Refer all maintenance to qualified personnel.

IPN 074-183X

1 - 10

XTC/C - XTC/2 Operating Manual

1.6 Related Manuals

Transducers are covered under separate manuals.

IPN Transducer Type

074-154 . . . . . . Bake able

074-155 . . . . . . Cry stalSix

074-156 . . . . . . Sin gle/Dual/Compact

074-157 . . . . . . Sputtering

1.7 How To Contact Customer Support

If you cannot find the answer to your quest ion in this man ual, please co ntact
one of the following Customer Support groups after deciding whether:

 your dif ficulty is with how you are using the instrument—in this case, cont act

Application Support.

or
 your instrument needs repair—in this case, contact Field Service and

Repair Support.

When you contact Customer Support, please have this manua l at hand, a long
with the following information:

 The serial number for your instrument.
 A description of your problem.
 An explanation of the corrective action that you may have already

attempted.

 The exact wording of any error messages that you have received from the

instrument.

IPN 074-183X

Within the USA, you may reach Customer Support at the following phone
numbers. Please contact the location that is closest to you. If you are located
outside of the USA, please contact your sales office. A complete listing of
INFICON Worldwide Service Centers is available at www.inficon.com.

1.7.1 Application Support

Austin, TX. . . . . . .ph. 512-448-0488 . . . . . . . . . fax [phone]

San Jose, CA . . . .ph. 408-361-1200 ext. 125 . . fax [phone]

Syracuse, NY . . . . ph. 315-434-1128 . . . . . . . . . fax [phone]

If you are located outside the USA, please contact your sales office. A complete
listing of INFICON Worldwide Service Centers is available at www.inficon .com.

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XTC/C - XTC/2 Operating Manual

1.7.2 Field Service and Repair Support

Austin, TX . . . . . . ph. 512-448-0488. . . . . . . . . .fax [phone]

San Jose, CA . . . . ph. 408-361-1200 ext. 12 0 . . .fax [phone]

Syracuse, NY . . . . ph. 315-434-1167. . . . . . . . . .fax [phone]

If you are located outside the USA, please contact your sales office. A complete
listing of INFICON Worldwide Service Centers is available at www.in ficon.com.

1.7.3 Returning Your Instrument

Do not send your instrument without first speaking with a Customer Support
Representative.

You must obtain an RMA (Return Material Authori zation) num ber from the
Customer Support Representative. If the delivery of a package without an RMA
number is attempted, INFICON will refuse the delivery and the package will be
returned to you.

If your instrument has been exposed to process materials, you will be required
to complete a Declaration Of Contamination form.

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IPN 074-183X

XTC/C - XTC/2 Operating Manual

Quick Use Guide

2.1 Unpacking, Initial Inspection and Inventory

2.1.1 Unpacking and Inspection Procedures

1 If you haven’t removed the instrument from its shipping containers, do so

now.

2 Carefully examine the unit for damage that may have occurred during

shipping. This is especially important if you notice signs of obvious rough
handling on the outside of the cartons. Report any damage to the carrier and

to INFICON, immediately.

3 DO NOT discard any packing materials until you have taken inventory and

have verified proper instrument operation to you r satisfactio n. See section

2.2 on page 2-4 for voltage selection and section 3.6 on page 3-11 for test

mode operation.

Chapter 2

2.1.2 Inventory

Make sure you have received all of the necessary equipment by checking the
contents of the shipping containers with the parts list below. INFICON ships
these products on a feature-option basis. Check your order for the part number
before comparing to the lists below.

IPN 074-183X

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XTC/C - XTC/2 Operating Manual

2.1.2.1 XTC/2 System Configuration

BASIC CONFIGURATION IPN # CODE#

115V 50/60 Hz 757-500-G1 1
230V 50/60 Hz 757-500-G2 2

Computer Communications Module

None 757-211-G1 1
IEEE-488 Parallel 760-142-G1 2

Remote Module

None 0
Hand Controller 755-262-G1 1

Rack Mounting

None 0
1 Unit Mounting Kit 757-212-G1 1
2 Unit Mounting Kit 757-212-G2 2

XTC/2 ---

2.1.2.2 XTC/C System Configuration

BASIC CONFIGURATION IPN # CODE#

115V 50/60 Hz 759-500-G1 1
230V 50/60 Hz 759-500-G2 2

Computer Communications Module

None 757-211-G1 1
IEEE-488 Parallel 760-142-G1 2

Remote Module

None 0
Hand Controller 755-262-G1 1

Rack Mounting

None 0
1 Unit Mounting Kit 757-212-G1 1
2 Unit Mounting Kit 757-212-G2 2

XTC/C ---

IPN 074-183X

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