INFICON XTC-3 User Manual

OPERATING MANUAL

XTC/3 Editor

XTC/3 Configuration Editing Software

IPN 074-452-P1

OPERATING MANUAL

XTC/3 Editor

XTC/3 Configuration Editing Software

IPN 074-452-P1A

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Visit our website for contact information and sales offices worldwide.
Due to our continuing program of product improvements, specifications are subject to change without notice.
©2006 INFICON

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Chapter 1

1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1

1.1.1 How To Contact Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2

1.2 Operating Manual Style Conventions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3

1.3 Inventory Of Supplied Items . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4

1.4 Computer System Minimum Requirements . . . . . . . . . . . . . . . . . . . . . . . . .1-4

1.5 XTC/3 Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

1.5.1 Firmware. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5

1.5.2 Thin Film Models Supported. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5

1.6 Communications Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5

1.6.1 Communications Baud Rate. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5

1.6.2 Communications Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

1.7 How To Install The XTC/3 Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

1.8 The Software Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7

1.9 How To Start The XTC/3 Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

1.10 Where To Go From Here . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11

XTC/3 Editor Operating Manual

Table Of Contents

Getting Started

Chapter 2

Setup

2.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1

2.1.1 Initial Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1

2.2 Communications Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

2.2.1 Adding A Communications Port and Controllers . . . . . . . . . . . . . . . . . . . . . 2-4

2.2.2 RS-232 Communications Port Properties. . . . . . . . . . . . . . . . . . . . . . . . . . .2-9

2.3 Controller Configuration and Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-11

IPN 074-452-P1A

2.4 User Preferences . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-14

2.4.1 Configuring The Display Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-14

2.4.2 Miscellaneous User Options. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17

2.4.3 Access Levels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-18

Chapter 3

Editing Configurations

3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-1

3.2 Using the Configuration Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2

3.3 Configuration Editor Main Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

3.4 ToolBar Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9

3.5 Editing the General Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

TOC - 1

XTC/3 Editor Operating Manual

3.6 Editing the I/O Map Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

3.7 Editing Film Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13

3.8 Creating a Process (XTC/3M Only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14

Chapter 4

Monitor

4.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.2 Starting Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.2.1 The Data Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.2.2 The Control Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

4.2.3 The Display Grid. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

4.2.4 Saving Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

4.2.4.1 The Display Smoothing Setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

4.2.4.2 Setting a Mark . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

4.2.4.3 The Pause and Start/Stop Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

4.3 Editing the Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7

4.3.1 Edit Current Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

4.3.2 New Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

4.3.3 Open Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

4.4 Recalling Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

4.5 Generating Reports . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

4.6 The Event Log . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14

Index

IPN 074-452-P1A

TOC - 2

1.1 Introduction

The XTC/3™ Editor is a Microsoft® Windows®-based application that provides
both programming capability and data collection for the INFICON® XTC/3 Thin
Film Deposition Controller. It is written as a full 32 bit application which takes
advantage of the capabilities of 32 bit operating systems such as Windows 2000
and Windows XP.

The XTC/3 Editor provides online and offline editing, structured as functional
windows, that allows for saving multiple configurations. The program makes use of
a simple, intuitive user interface which clearly displays the parameters and
performs boundary checking.

The editor can be used to create new configurations, read existing configurations
from a file or the XTC/3 controller, and send any or all parameters from a
Configuration file to the XTC/3 controller.

XTC/3 Editor Operating Manual

Chapter 1

Getting Started

Please see the
information.

IPN 074-452-P1A

XTC3 Readme.wri file distributed with the software for the latest

1 - 1

XTC/3 Editor Operating Manual

1.1.1 How To Contact Customer Support

If you have a question about your software, first refer to this Operating Manual or
the Help function within the software. If you cannot find the answer here, or no
online Help is available for your topic, then contact Customer Support. When
calling Customer Support, please have this manual at hand, along with the
following information:

 The XTC/3 Editor version number (available from the Help >> About XTC/3

Editor... dialog box).

 The type of computer that you are using and its specifications.

 Your MS Windows type and version number.

 A description of your problem.

 What you were doing when the problem occurred.

 An explanation of the corrective action that you may have already attempted.

CAUTION

Please contact your Customer Support Representative
before sending any files.

Customer support may be reached at the following phone numbers.
Please contact the location that is closest to you. If you are located outside the USA
please contact your sales office, or see www.inficon.com for a complete listing of
worldwide service centers.

Application Support

Syracuse, NY . . . . .ph. 315-434-1128 . . . . . . . . . . . fax [phone]

San Jose, CA . . . . .ph. 408-436-2828 ext. 125 . . . . fax [phone]

Austin, TX. . . . . . . .ph. 512-448-0488 . . . . . . . . . . . fax [phone]

Field Service and Repair Support

Syracuse, NY . . . . .ph. 315-434-1167 . . . . . . . . . . . fax [phone]

Austin, TX . . . . . . .ph. 512-448-0488 . . . . . . . . . . . fax [phone]

San Jose, CA . . . .ph. 408-436-2828 ext. 120 . . . . fax [phone]

Customer support is also available on the World Wide Web or via email:

IPN 074-452-P1A

1 - 2

WWW . . . . . . . . . . .http://www.inficon.com

EMail . . . . . . . . . . [e-mail]

XTC/3 Editor Operating Manual

1.2 Operating Manual Style Conventions

File names, diskette labels, environment variables, program names, screen
prompts, command strings, and text that you must enter on your keyboard are
presented in

Windows dialog options, title bars, and menu options are presented in this font.

For example: select File >> Open....

When you must hold down a key then press another key, this is expressed as (for
example) Press Ctrl+C

We assume that the CD ROM drive you’ll be using is drive D. If you’re using
another drive, whenever you see “d:” substitute your CD ROM drive letter.

We also assume your hard drive is C, so if this isn’t the case for you, whenever you
see “c:” substitute the letter for your hard drive.

Often you will be required to select an option from a cascading menu. Instead of
verbose statements, for example, “position the mouse pointer over the word File,
press the left mouse button to display the cascading menu, then drag the pointer
to highlight the words Edit Configuration and release the left mouse button,” you
will read, “select File >> Edit Configuration.”

this font. For example, Enter a:\install.

You will also be required to use icons and buttons. For example, instead of the
statement, “position the mouse pointer over the Configuration Editor icon, then
press and release the left mouse button to select Configuration Editor,” you will
read, “click the Configuration Editor icon.” or, you may read “select the
Configuration Editor icon”.

Similarly, left-click means to press and release the left mouse button and right-click
means to press and release the right mouse button.

The XTC/3 Editor operates in the Windows environment. We make the assumption
that you know how to use the Windows Graphical User Interface (GUI). Therefore,
actions in the XTC/3 Editor GUI that are common to the Windows GUI are not
explained in detail in this manual. If you do need help with the Windows GUI,

IPN 074-452-P1A

please refer to the Windows documentation supplied by Microsoft.

NOTE: This is a note paragraph. Notes provide additional information about the

current topic.

HINT: This is a hint paragraph. Hints provide insight into product usage.

CAUTION

This is a Caution paragraph. It cautions against actions
which may cause damage to the XTC/3 Controller or lead
to the loss of data.

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XTC/3 Editor Operating Manual

1.3 Inventory Of Supplied Items

You should have one CD ROM (or may have floppy disks) which contain the XTC/3
Editor program and online Operating Manual.

1.4 Computer System Minimum Requirements

Table 1-1 Computer System Minimum Requirements

Recommended for
Recommended for
communication with
one XTC/3 Controller

communication with up

to 4 XTC/3 Controllers

(more than 4, consult

factory)

Processor

RAM

Hard Disk space to

Pentium® III
550 MHz or greater

512 MB or greater 2 GB or greater

15 Mb 15 MB

Pentium 4

3.2 GHz or greater

load XTC/3Editor

Hard Disk Space for

20 GB (see Note below) 60 GB (see Note below)

storage

Disk Drives

Monitor

Resolution

Communications

Operating System

NOTE: Data files should be archived and removed periodically as a maintenance
step to provide storage space for ongoing data collection.

(1) Floppy, (1) CD (1) Floppy, (1) CD

15 inch, SVGA or greater 15 inch, SVGA or greater

1024 x 768 or greater 1024 x 768 or greater

One RS-232 port or one
Ethernet card

Windows 2000 or XP

One Ethernet card

The XTC/3 Controller and Communications Interface must meet the requirements
shown in the following sections.

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1 - 4

1.5 XTC/3 Requirements

1.5.1 Firmware

The XTC/3 firmware must be Version 1.00 or higher.

1.5.2 Thin Film Models Supported

The XTC/3S and XTC/3M are the only Thin Film Deposition Controllers supported
at the time of this release.

1.6 Communications Interface

Communications interfaces supported are RS-232 and TCP/IP, via an Ethernet
card, for communications with multiple XTC/3 controllers.

1.6.1 Communications Baud Rate

The baud rates supported for RS-232 are: 9600, 19200, 38400, 57600, and

115200. 115200 is the default.

XTC/3 Editor Operating Manual

1.6.2 Communications Cable

Communication cables are required to connect the PC running the XTC/3 Editor to
the XTC/3 Controller. Cables are different and dependent on the Communications
Interface.

 For RS-232C Communications, refer to the XTC/3 Thin Film Deposition

Controller Operating Manual (IPN 074-446-P1) section titled “RS232C Serial

Port” for detailed information concerning constructing an RS-232C cable.

 For TCP/IP Ethernet Communications, a standard Ethernet cable at a length

appropriate for your installation is required. INFICON does not supply Ethernet
cables.

IPN 074-452-P1A

Maximum Length

RS-232 — 50 feet (15 meters)

1 - 5

XTC/3 Editor Operating Manual

1.7 How To Install The XTC/3 Editor

Install the XTC/3 Editor from within Windows as follows:

NOTE: Administrative or Standard user rights are required to install the XTC/3

Editor on a system running Windows 2000 or XP system.

NOTE: This description assumes that the CD-ROM drive is drive “d”. If it is not “d”,

substitute the appropriate drive letter.

1 Insert the CD into the CD-ROM drive.
2 Select Start >> Run... to display the Run dialog
3 In the Open field, type d:\setup
4 Select OK.
5 When prompted, answer the questions.

NOTE: If prompted during the installation to replace a system file (e.g. a DLL

file), it is recommended that the file be replaced. Normally this prompt
is only presented if the file on the hard disk is older than the file on the
installation disk. The newer version should still work with older
programs that use this file; however, if you are concerned that it may
cause problems, abort the installation, save a copy of the file in
question, and restart the installation program.

CAUTION

The XTC/3 Editor may not function properly if all files are
not installed.

When the installation is complete, put the original CD in a safe storage area.

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1 - 6

1.8 The Software Controls

The XTC/3 Editor software utilizes some common Windows controls as well as a
few custom controls for easy editing and entry of parameters and information.

The following controls may be in use throughout the software:

. . . . . . . . . . . . . . . . . . . . Button. Pressing this will display a dialog

. . . . . . . . . . . . . . Checkbox. This is used to enable or disable

XTC/3 Editor Operating Manual

box for user input or take the action noted on
the button.

a feature or action taken upon the system.

. . Entry box. An entry box generally accepts a

numeric or alphanumeric entry and has
upper and lower boundaries associated with
the parameter. The boundaries are checked
after the entry has been input and the cursor
has been moved to another entry point. The
value in an entry box can be typed over by
clicking once in the box, to focus on the box,
and then typing the new entry. A double-click
in the box will highlight the value, which
allows for the value to be edited or deleted.

. . . . . Pulldown. A pulldown, indicated with a

downward triangle, provides a list of
acceptable inputs for the parameter. A

IPN 074-452-P1A

highlight is used to select the parameter.
Some entry boxes that use pulldowns can
also be directly edited.

HINT: When editing from the keyboard, the Alt+DownArrow key

combination will "pull" the pulldown.

1 - 7

XTC/3 Editor Operating Manual

. . . . . . . . . . . . . . . . . . . . . . . Radio buttons. These buttons are used to

accept a single selection from at least two
choices. Radio buttons are often grouped
according to functionality and sometimes
enable other controls based on the choice
selected. If radio buttons are shown, but are
disabled (greyed), then they are being used
to show a status not selectable by the user.

. . . Spinners. Spinners are a pair of triangles

pointing up and down. These are used to
increase or decrease a parameter. Most
often used with an entry box, spinners only
act upon the entry box selected with the
mouse pointer. When two or more entry
boxes are on the same line as the spinner,
the mouse pointer must be used to select an
entry box before the spinners will change the
value in that box. When an entry box
contains a value with punctuation (e.g. a
value of time), the spinners act upon each
piece of the value individually. Some entry
boxes that use spinnners can also be directly
edited.

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HINT: When editing from the keyboard, the Alt+UpArrow key combination

will increase the value (except for Time spinners). The
Alt+DownArrow key combination will decrease the value.

. . . . . . . . . . . . . . . . . . . Toolbar. A collection of buttons that is often

visible for an associated functionality and
invisible when that function is inactive.
Toolbars can be moved with the mouse
pointer or made visible/invisible from a menu
selection.

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XTC/3 Editor Operating Manual

. . . . . . . . . . . . . . . Grid. The grid is a row and column collection

of cells of related data that use many of the
controls mentioned above. Some grids allow
for all cells to be edited and some contain a
mixture of protected and editable cells.
Controls used in grid cells include Pulldowns,
Entry Boxes, and Spinners. Some grids
support use of the Delete and Insert keys.

In grids that support deletion, any row can be
deleted by selecting an item in the row and
pressing the Delete key.

In grids that support insertion, a row can be
inserted above any row by selecting an item
in a row and pressing the Insert key.

In grids that support duplication, a row can be
duplicated by selecting an item in the row
and pressing the Shift-Insert key
combination. The duplicated row is then
inserted as the next row.

. . . . . . . . . . Context Menu. This menu is accessed by

clicking the right mouse button on a view, grid
or panel. Many parts of the software contain
a context menu; the menu provides

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functionality appropriate for the data or
parameters displayed.

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XTC/3 Editor Operating Manual

1.9 How To Start The XTC/3 Editor

To start the XTC/3 Editor select Start >> Programs >> XTC3 Application >>
XTC3 (see Figure 1-1).

HINT: You may want to make a shortcut to XTC/3 Editor on your desktop to

facilitate starting the program in the future. See the Windows
documentation for instructions on how to create shortcuts.

When upgrading the XTC/3 Editor program it is not possible for the
installation program to upgrade existing shortcuts. After an upgrade, an
existing shortcut will not work if the XTC/3 Editor is installed in a folder that
is not the folder pointed to by the shortcut.

Figure 1-1 Starting XTC/3Editor

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The first time XTC/3 Editor is run on a computer, it will start in the setup screen with
the communication configuration dialog displayed.

See Chapter 2 for information on how to configure the communications interface,
individual controllers and user preferences.

1.10 Where To Go From Here

This Operating Manual is intended to make the process of setting up, installing, and
using the XTC/3 Editor a pleasurable and trouble-free experience. Please, take a
few moments to look through it and become familiar with its contents.

The information in this manual is organized into the following chapters:

Chapter 1, Getting Started

An introduction to the XTC/3 Editor application, provides instructions on how to
install and run the XTC/3 Editor, and explains how to use this Operating
Manual.

Chapter 2, Setup

A description of how to set up the software and communications ports for your
installation and customize it to your preferences.

Chapter 3, Editing Configurations

Describes how to edit, save and send Configuration files, which specify the
measurement parameters for the XTC/3 Controller.

Chapter 4, Monitor

XTC/3 Editor Operating Manual

Describes how to acquire, save, recall and report XTC/3 Controller data.

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XTC/3 Editor Operating Manual

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