INFICON Q-pod User Manual
OPERATING MANUAL
Q-pod
Quartz Crystal Monitor
IPN 074-547-P1B
™
www.inficon.com reachus@inficon.com
©2012 INFICON
®
OPERATING MANUAL
Q-pod
Quartz Crystal Monitor
IPN 074-547-P1B
™
Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
Q-pod™ is a trademark of INFICON GmbH.
Teflon® is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates.
Windows®, is a registered trademark of Microsoft Corporation.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2012 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.
DECLARATION OF CONFORMITY
This is to certify that this equipment, designed and manufactured by:
INFICON Inc.
Two Technology Place
East Syracuse, NY 13057
USA
meets the essential safety requirements of the European Union and is placed on the
market accordingly. It has been constructed in accordance with good engineering
practice in safety matters in force in the Community and does not endanger the safety
of persons, domestic animals or property when properly installed and maintained and
used in applications for which it was made.
Equipment Description: Q-Pod Quartz Monitor
Applicable Directives: 2006/95/EC (LVD)
2004/108/EC (General EMC)
2002/95/EC (RoHS)
Applicable Standards:
Safety: EN 61010-1:2001
Emissions: EN 61326-1:1997/A1: 1998/A2: 2001 (Radiated & Conducted Emissions)
Class A: Emissions per Table 3
(EMC – Measurement, Control & Laboratory Equipment)
Immunity: EN 61326-1:1997/A1: 1998/A2: 2001 (General EMC)
Class A: Immunity per Table A1
(EMC – Measurement, Control & Laboratory Equipment)
RoHS: Fully compliant
CE Implementation Date: April 2007 (Updated February 2011)
Authorized Representative:
Steve Schill
_________________________
Thin Film Business Line Manager
INFICON Inc.
ANY QUESTIONS RELATIVE TO THIS DECLARATION OR TO THE SAFETY OF INFICON'S PRODUCTS SHOULD BE
DIRECTED, IN WRITING, TO THE AUTHORIZED REPRESENTATIVE AT THE ABOVE ADDRESS.
Warranty
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
two (2) years from the date of shipment thereof by Seller. Seller's liability under
this warranty is limited to such of the above products or parts thereof as are
returned, transportation prepaid, to Seller's plant, not later than thirty (30) days
after the expiration of the period of warranty coverage in respect thereof and are
found by Seller's examination to have failed to function properly because of
defective workmanship or materials and not because of improper installation or
misuse and is limited to, at Seller's election, either (a) repairing and returning the
product or part thereof, or (b) furnishing a replacement product or part thereof,
transportation prepaid by Seller in either case. In the event Buyer discovers or
learns that a product does not conform to warranty, Buyer shall immediately notify
Seller in writing of such non-conformity, specifying in reasonable detail the nature
of such non-conformity. If Seller is not provided with such written notification,
Seller shall not be liable for any further damages which could have been avoided if
Seller had been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.
www.inficon.com reachus@inficon.com
Chapter 1
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.1.1 Related Manuals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.2 Instrument Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.2.1 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.2.2 General Cautions and Warnings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
1.3 How to Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
1.3.1 Returning Your Q-pod . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
1.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.5 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
1.6 Parts and Options Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
1.6.1 Base Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.6.2 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
Q-pod Operating Manual
Table Of Contents
Trademarks
Disclaimer
Copyright
Introduction
Chapter 2
Quick Start
2.1 Install Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.2 Connect the Q-pod . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1
2.3 Using the Q-pod Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
2.3.1 Main Display. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
IPN 074-547-P1B
2.3.1.1 Reading Grid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
2.3.1.2 Materials Grid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
2.3.2 Setup Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
2.3.2.1 DataLog . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
2.3.2.2 Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
2.3.2.3 Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.3.2.4 Q-pods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.3.3 Graph Display. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
TOC - 1
Q-pod Operating Manual
Chapter 3
Communications
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 ASCII Command Set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.3 QPOD.DLL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3.3.1 Registering QPOD.DLL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3.3.2 Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.3.3 Events . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
3.4 Calculating Rate and Thickness. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
3.5 Sample Programs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Chapter 4
Troubleshooting and Maintenance
4.1 Troubleshooting Guide. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.1 Status LED . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.1.1 LED illuminated steady. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.1.2 LED flashes slowly (about 2 Hz) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.1.3 LED flashes rapidly (about 10 Hz) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.2 Troubleshooting the Q-pod. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
4.1.3 Troubleshooting Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
4.1.4 Troubleshooting Computer Communications. . . . . . . . . . . . . . . . . . . . . . . . 4-8
4.2 Replacing the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
4.2.1 Front Load . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
4.2.2 Cool Drawer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
4.2.3 Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12
4.2.4 Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
4.2.5 Crystal Snatcher. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14
4.3 Crystal Sensor Emulator IPN 760-601-G2 . . . . . . . . . . . . . . . . . . . . . . . . . 4-15
4.3.1 Diagnostic Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16
4.3.1.1 Measurement System Diagnostic Procedure. . . . . . . . . . . . . . . . . . . . . . . 4-16
4.3.1.2 Feed-Through Or In-Vacuum Cable Diagnostic Procedure . . . . . . . . . . . . 4-17
4.3.1.3 Sensor Head Or Monitor Crystal Diagnostic Procedure. . . . . . . . . . . . . . . 4-18
4.3.1.4 System Diagnostics Pass But Crystal Fail Message Remains. . . . . . . . . . 4-19
4.3.2 Sensor Cover Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
4.3.2.1 Compatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
4.3.2.2 Incompatible Sensor Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
IPN 074-547-P1B
TOC - 2
4.3.3 Emulator Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21
Chapter 5
5.1 Importance of Density, Tooling and Z-Ratio. . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2 Determining Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-1
5.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.4 Laboratory Determination of Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2
Chapter 6
6.1 Basics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
6.1.1 Monitor Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
6.1.2 Period Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-4
6.1.3 Z-match Technique. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-5
6.1.4 Active Oscillator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Appendix A
A.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .A-1
Q-pod Operating Manual
Calibration Procedures
Measurement and Theory
Material Table
IPN 074-547-P1B
TOC - 3
Q-pod Operating Manual
This page is intentionally blank.
TOC - 4
IPN 074-547-P1B
1.1 Introduction
The INFICON Q-pod™ Transducer is a small, inexpensive and accurate way to
measure thin film depositon rate and thickness. No external oscillator or power
source is required.
The included Q-pod software displays rate, thickness, frequency, crystal life and a
graph of rate versus time, for up to 8 Q-pods simultaneously. Q-pod readings can
be logged to disk in spreadsheet friendly comma-delimited format.
There are also sample files included, written in Labview, Java and Visual Basic to
help aid in the integration of the Q-pod into a system that is managed via software.
See section section 3.5, Sample Programs, on page 3-4 for more details.
Figure 1-1 Q-pod
Q-pod Operating Manual
Chapter 1
Introduction
IPN 074-547-P1B
When reading this Q-pod manual, please pay particular attention to the NOTES,
CAUTIONS, and WARNINGS found throughout the text. The Notes, Cautions, and
Warnings are defined in section 1.2.1 on page 1-2. Also, note the general warnings
in section 1.2.2, General Cautions and Warnings, on page 1-3.
1 - 1
Q-pod Operating Manual
CAUTION
WARNING
WARNING - Risk Of Electric Shock
1.1.1 Related Manuals
Sensors are covered in separate manuals. PDF files of these manuals are
contained in the 074-5000-G1 CD, part of the Ship Kit.
074-154 - Bakeable Sensor
074-156 - Front Load Sensor, Single/Dual
074-157 - Sputtering Sensor
147-800 - Cool Drawer Sensor, Single/Dual
1.2 Instrument Safety
1.2.1 Definition of Notes, Cautions and Warnings
When using this manual, please pay attention to the NOTES, CAUTIONS and
WARNINGS found throughout. For the purposes of this manual they are defined as
follows:
NOTE: Pertinent information that is useful in achieving maximum instrument
efficiency when followed.
Failure to heed these messages could result in damage
to the instrument.
Failure to heed these messages could result in personal
injury.
Dangerous voltages are present which could result in
personal injury.
IPN 074-547-P1B
1 - 2
1.2.2 General Cautions and Warnings
CAUTION
WARNING
CAUTION
Do not open the instrument case! There are no
user-serviceable components within the instrument
case.
Refer all maintenance to technically qualified personnel.
Failure to operate the Q-pod in the manner intended by
INFICON can circumvent the safety protection provided
by the instrument and may result in personal injury.
Q-pod Operating Manual
Q-pod may not be suitable for use with RF sputtering
systems or other electrically noisy environments.
IPN 074-547-P1B
1 - 3
Q-pod Operating Manual
1.3 How to Contact INFICON
Worldwide customer support information is available under Support at
www.inficon.com where you can contact:
A Technical Support Engineer with questions regarding applications for and
programming the Q-pod.
A Service Engineer with questions regarding troubleshooting, diagnosing or
repairing a defective Q-pod.
Sales and Customer Service, to find the INFICON Sales office nearest to you.
Repair Service, to find the INFICON Service Center nearest to you.
If you are experiencing a problem with your Q-pod, please have the following
information readily available:
The serial number and firmware version for your Q-pod.
A description of your problem.
An explanation of any corrective action that you may have already attempted.
The exact wording of any error messages that you may have received.
1.3.1 Returning Your Q-pod
Do not return any component of your Q-pod to INFICON without first speaking with
a Customer Support Representative. You must obtain a Return Material
Authorization (RMA) number from the Customer Support Representative.
If you deliver a package to INFICON without an RMA number, your package will be
held and you will be contacted. This will result in delays in servicing your Q-pod.
1.4 Specifications
Frequency Range. . . . . . . . . . . . . . . 1 to 6 MHz
Frequency Resolution . . . . . . . . . . . 0.05 Hz at 6 MHz @ 2 measurements per
Frequency Accuracy . . . . . . . . . . . . 0.002%
Frequency Stability. . . . . . . . . . . . . . ±2 ppm total, over 0º to 50ºC
Thickness & Rate Resolution . . . . . . 0.0613 Å (new crystal); 0.1091 Å (crystal @
Input . . . . . . . . . . . . . . . . . . . . . . . . . BNC
second)
4.5 MHz); over 500 ms sample for material
density = 1.0, Z-ratio = 1.0
IPN 074-547-P1B
1 - 4
Interface & Power. . . . . . . . . . . . . . . USB, v2.0 or later, 15 ft. (457 cm) maximum
allowable length
Size . . . . . . . . . . . . . . . . . . . . . . . . . 1 in. x 2 in. x 2.5 in. (25 mmx 50 mm x 64 mm)
Weight . . . . . . . . . . . . . . . . . . . . . . . 2 oz. (32 gm)
Computer Requirements . . . . . . . . . Any PC running Windows® XP / 2000 /
1.5 Unpacking and Inspection
1 If the Q-pod has not been removed from its packaging, do so now.
2 Carefully examine the card for damage that may have occurred during
shipping. This is especially important if you notice obvious rough handling on
the outside of the container. Immediately report any damage to the carrier and
to INFICON.
3 Do not discard the packing materials until you have taken inventory and have
at least performed successful installation.
4 Take an inventory of your order by referring to your order invoice and the
information contained in section 1.6.1.
5 To install the Q-pod, see Chapter 2, Quick Start.
Q-pod Operating Manual
Windows 7 32-bit with one available USB
port for each Q-pod
6 For additional information or technical assistance, contact INFICON, refer to
section 1.3 on page 1-4.
1.6 Parts and Options Overview
1.6.1 Base Configuration
Q-pod Transducer w/Software . . . . . . . . .Q-POD
10 ft. USB Cable. . . . . . . . . . . . . . . . . . . .068-0472
6 in. BNC Cable . . . . . . . . . . . . . . . . . . . .755-257-G6
Technical Manual . . . . . . . . . . . . . . . . . . .074-547 on 074-5000-G1 CD
IPN 074-547-P1B
1.6.2 Sensors
5.5 MHz Test Crystal . . . . . . . . . . . . . . . .782-902-023
Front Load Single Sensor. . . . . . . . . . . . . . . . . . . . . SL-XXXXX
Cool Drawer Single Sensor . . . . . . . . . . . . . . . . . . . CDS-XXFXX
Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . 750-618-G1
Front Load UHV Bakeable Sensor . . . . . . . . . . . . . . BK-AXF
NOTE: Multi-crystal (rotary) sensors & dual sensors should not be used with the
Q-pod.
1 - 5
Q-pod Operating Manual
This page is intentionally blank.
1 - 6
IPN 074-547-P1B
2.1 Install Software
NOTE: If this is the initial Q-pod installation on this computer, you should install the
Q-pod Software before connecting a Q-pod to the USB port.
1 Place the INFICON Program Disk in the computer’s CD-ROM.
2 Ignore the prompt and double-click the My Computer icon.
3 Right-click the CD-ROM icon, then click Open.
4 Double-click the Q-pod Transducer file.
5 Double click QPOD_V#_SETUP.EXE.
6 Follow the on screen directions and select the default installation options.
7 When software installation is complete, exit the installation program.
Q-pod Operating Manual
Chapter 2
Quick Start
2.2 Connect the Q-pod
1 Connect the USB cable to a computer USB port, then to the Q-pod. See Figure
2-1.
1a If you are prompted to install the Q-pod drivers, select Install the Software
Automatically.
1b If you are prompted concerning Windows Logo Testing, select Continue
Anyway.
Figure 2-1 Q-pod Connections
IPN 074-547-P1B
2 - 1
Q-pod Operating Manual
2 Use the 6 in. BNC cable provided to connect the Q-pod to the QCM sensor
feedthrough.
3 The status light on the Q-pod illuminates when a quartz crystal is detected.
2.3 Using the Q-pod Software
Click the Q-pod desktop icon, or click Start >> Programs >> Sigma Instruments
>> Q-pod. If you are prompted to assign Q-pod(s) to a channel, click Yes. Click
Help to get more detailed information on materials and operation. Select Setup or
Graph on the Main Screen menu to change the main screen display mode. See
Figure 2-2.
Figure 2-2 Main Screen
2.3.1 Main Display
The top of the main screen is the main display. Here the Start button is used to start
and record a run. Run time and run number are shown, along with the current time
and date. The option to datalog during any given run is also given.
2.3.1.1 Reading Grid
The left grid displays the measured values of each connected Q-pod. Click Start to
display Rate and Thickness readings. Frequency and Life readings are always
displayed. Click a channel’s Zero button to zero the channel thickness reading.
Shift-Click any channel Zero button to zero all thicknesses.
2 - 2
IPN 074-547-P1B
2.3.1.2 Materials Grid
In the right grid, edit the Density, Z-Factor and Tooling values for the materials
being deposited. Move your mouse over each setting to see a brief description.
2.3.2 Setup Display
The lower section of the main screen is where run parameters can be changed and
Q-pod communication information is presented.
2.3.2.1 DataLog
Sets the file name, location and operation of disk data logging. Data log files can
be set to overwrite the file name each time it is saved. It can append the data, by
adding the newly recorded data to the end of the same file. It can also save each
run in a new file designated by run number. Data is saved in comma delimited
format for easy import into a spreadsheet.
2.3.2.2 Measurement
Sets the basic measurement parameters for all Q-pods. The values shown above
are correct for most applications.
Q-pod Operating Manual
2.3.2.3 Display
Sets the display parameters.Thickness can be displayed in kÅ or Å. Mass can be
displayed in ug/cm
2
. Rate will be changed to ng/cm2/sec if mass is the chosen
option. Resolution of displayed readings may also be changed here (0.0 or 0.00).
The rate reading filter can be set in this section. The Filter number represents how
many measurements are averaged together to produce the displayed rate. The
number of Q-pods being used is defined in this section as well.
2.3.2.4 Q-pods
Sets the name and displays the serial number of the Q-pod assigned to each
measurement channel. A strike-through serial number indicates the Q-pod is not
IPN 074-547-P1B
connected. The software can monitor a maximum of 8 Q-pods simultaneously.
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Q-pod Operating Manual
2.3.3 Graph Display
Figure 2-3 Graph Display
Graphs the deposition rate, thickness, or frequency of active measurement
channels when Start is clicked. The graph viewed can be changed from the view
option on the toolbar on the main screen. Settings to the right of the graph control
basic graph functions. See the Help menu for advanced graph setup.
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IPN 074-547-P1B
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